tokuda norio 徳田規夫

… Alternative Names

TOKUDA Norio 徳田規夫

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Researcher Number	80462860
Other IDs
External Links
Affiliation (Current)	2025: 金沢大学, ナノマテリアル研究所, 教授
Affiliation (based on the past Project Information) *help	2025: 金沢大学, ナノマテリアル研究所, 教授 2018 – 2023: 金沢大学, ナノマテリアル研究所, 教授 2018: 金沢大学, 学内共同利用施設等, 准教授 2018: 金沢大学, 電子情報学系, 教授 2012 – 2017: 金沢大学, 電子情報学系, 准教授 2009: National Institute of Advanced Industrial Science and Technology, 電子情報学系, 助教 2008: National Institute of Advanced Industrial Science and Technology, エネルギー技術研究部門, 産総研特別研究員
Review Section/Research Field	Principal Investigator Thin film/Surface and interfacial physical properties / Inorganic materials/Physical properties / Materials engineering and related fields Except Principal Investigator Basic Section 21060:Electron device and electronic equipment-related / Medium-sized Section 29:Applied condensed matter physics and related fields / Nanomaterials engineering / Medium-sized Section 28:Nano/micro science and related fields / Electron device/Electronic equipment / Inorganic materials/Physical properties
Keywords	Principal Investigator ダイヤモンド / 表面・界面物性 / 結晶成長 / 半導体 / 構造・機能材料 / 半導体物性 / 触媒・化学プロセス / ダイヤモンド薄膜 / パワーデバイス / カーボン材料 / 標準試料 / 表面制御 … More Except Principal Investigator … More ダイヤモンド / NV中心 / 量子センサ / NVセンタ / NMR / 量子センシング / 強誘電体 / 複合イメージング / 電子スピン二重共鳴 / n型ダイヤモンド / CVDダイヤモンド合成 / バイオ計測 / イメージング / ナノダイヤモンド / 量子計測 / 発光中心 / スピン / 量子エレクトロニクス / 磁気共鳴 / 磁気センサ / 量子技術 / T2 / コヒーレンス時間 / 量子デバイス / 超微細構造 / 表面制御 / 窒素空孔ペアー / ダイヤモンド成膜 / 量子 / 量子シミュレータ / キャリアオフセット / Pb(Zr,Ti)O3 / パワーデバイス / ワイドギャップ半導体 / 電界効果トランジスタ / 国際情報交換 / 電界効果 / グラフェン Less

Simultaneous imaging of AC magnetic field and temperature using diamond quantum sensor based on electron spin double resonance
- Principal Investigator
  
  早瀬潤子 (伊師潤子)
- Project Period (FY)
  2025 – 2027
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  Keio University
Quantum sensing research by utilizing the quantum state of NV centers in diamond
- Principal Investigator
  
  Mizuochi Norikazu
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 29:Applied condensed matter physics and related fields
- Research Institution
  Kyoto University
Development of diamond power electronicsPrincipal Investigator
- Principal Investigator
  
  徳田規夫
- Project Period (FY)
  2019 – 2024
- Research Category
  
  Fund for the Promotion of Joint International Research (Fostering Joint International Research (A))
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Kanazawa University
Room temperature quantum simulator of diamond surface nuclear lattice
- Principal Investigator
  
  Yamasaki Satoshi
- Project Period (FY)
  2018 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 28:Nano/micro science and related fields
- Research Institution
  Kanazawa University
  National Institute of Advanced Industrial Science and Technology
Development of innovative synthesis process of ammonia using diamondPrincipal Investigator
- Principal Investigator
  
  Tokuda Norio
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Research Field
  
  Materials engineering and related fields
- Research Institution
  Kanazawa University
Low-loss vertical-type diamond power MOSFETPrincipal Investigator
- Principal Investigator
  
  Tokuda Norio
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Kanazawa University
Fabrication of low-loss diamond power FET using giant poralization of ferroelectrics
- Principal Investigator
  
  KAWAE TAKESHI
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Kanazawa University
Diamond quantum nano-sensor with high sensitivity and high resolution
- Principal Investigator
  
  Mizuochi Norikazu
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Nanomaterials engineering
- Research Institution
  Kyoto University
Basic study for development of inch-scale diamond wafersPrincipal Investigator
- Principal Investigator
  
  Tokuda Norio
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Kanazawa University
Control of surface carrier of carbon materials by giant remnant polarization
- Principal Investigator
  
  KAWAE Takeshi
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Inorganic materials/Physical properties
- Research Institution
  Kanazawa University
Basic study for development of ultra-low loss diamond power devicesPrincipal Investigator
- Principal Investigator
  
  TOKUDA Norio
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Inorganic materials/Physical properties
- Research Institution
  Kanazawa University
Large-area formation of atomically flat diamond (111) surface and creation of the functionsPrincipal Investigator
- Principal Investigator
  
  TOKUDA Norio
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Inorganic materials/Physical properties
- Research Institution
  National Institute of Advanced Industrial Science and Technology

[Book] Novel Aspects of Diamond (Chapter 1. Homoepitaxial Diamond Growth by Plasma-Enhanced Chemical Vapor Depositionを担当）2014
- Author(s)
  Norio Tokuda
- Total Pages
  325
- Publisher
  Springer
- Data Source
  KAKENHI-PROJECT-24686074
[Book] 2013ナノカーボン技術大全2012
- Author(s)
  徳田規夫
- Publisher
  電子ジャーナル
- Data Source
  KAKENHI-PROJECT-24686074
[Journal Article] Temperature sensing with RF-dressed states of nitrogen-vacancy centers in diamond2023
- Author(s)
  Tabuchi Hibiki、Matsuzaki Yuichiro、Furuya Noboru、Nakano Yuta、Watanabe Hideyuki、Tokuda Norio、Mizuochi Norikazu、Ishi-Hayase Junko
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 133 Issue: 2 Pages: 024401-024401
- DOI
  10.1063/5.0129706
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21H04653, KAKENHI-PROJECT-23K22828
[Journal Article] <i>n</i>-type diamond synthesized with <i>tert</i>-butylphosphine for long spin coherence times of perfectly aligned NV centers2022
- Author(s)
  Kawase Riku、Kawashima Hiroyuki、Kato Hiromitsu、Tokuda Norio、Yamasaki Satoshi、Ogura Masahiko、Makino Toshiharu、Mizuochi Norikazu
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 132 Issue: 17 Pages: 174504-174504
- DOI
  10.1063/5.0101215
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21H04653
[Journal Article] Selectively buried growth of heavily B doped diamond layers with step-free surfaces in N doped diamond (1 1 1) by homoepitaxial lateral growth2022
- Author(s)
  Kobayashi Kazuki、Zhang Xufang、Makino Toshiharu、Matsumoto Tsubasa、Inokuma Takao、Yamasaki Satoshi、Nebel Christoph E.、Tokuda Norio
- Journal Title
  
  Applied Surface Science
  
  Volume: 593 Pages: 153340-153340
- DOI
  10.1016/j.apsusc.2022.153340
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383, KAKENHI-PROJECT-21H01363
[Journal Article] Fabrication of inversion p-channel MOSFET with a nitrogen-doped diamond body2021
- Author(s)
  Matsumoto Tsubasa、Yamakawa Tomoya、Kato Hiromitsu、Makino Toshiharu、Ogura Masahiko、Zhang Xufang、Inokuma Takao、Yamasaki Satoshi、Tokuda Norio
- Journal Title
  
  Applied Physics Letters
  
  Volume: 119 Issue: 24 Pages: 242105-242105
- DOI
  10.1063/5.0075964
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21H01363, KAKENHI-PROJECT-18KK0383
[Journal Article] Inversion-type p-channel diamond MOSFET issues2021
- Author(s)
  Xufang Zhang, Tsubasa Matsumoto, Satoshi Yamasaki, Christoph E. Nebel, Takao Inokuma, and Norio Tokuda
- Journal Title
  
  Journal of Materials Research
  
  Volume: 36 Issue: 23 Pages: 4688-4702
- DOI
  10.1557/s43578-021-00317-z
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K14773, KAKENHI-PROJECT-18KK0383
[Journal Article] Inversion channel MOSFET on heteroepitaxially grown free-standing diamond2021
- Author(s)
  Zhang Xufang、Matsumoto Tsubasa、Nakano Yuta、Noguchi Hitoshi、Kato Hiromitsu、Makino Toshiharu、Takeuchi Daisuke、Ogura Masahiko、Yamasaki Satoshi、Nebel Christoph E.、Inokuma Takao、Tokuda Norio
- Journal Title
  
  Carbon
  
  Volume: 175 Pages: 615-619
- DOI
  10.1016/j.carbon.2020.11.072
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383, KAKENHI-PROJECT-19K15042, KAKENHI-PROJECT-20K14773
[Journal Article] Mechanical damage-free surface planarization of single-crystal diamond based on carbon solid solution into nickel2021
- Author(s)
  Sakauchi Kazuto、Nagai Masatsugu、Tabakoya Taira、Nakamura Yuto、Yamasaki Satoshi、Nebel Christoph E.、Zhang Xufang、Matsumoto Tsubasa、Inokuma Takao、Tokuda Norio
- Journal Title
  
  Diamond and Related Materials
  
  Volume: 116 Pages: 108390-108390
- DOI
  10.1016/j.diamond.2021.108390
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K15042, KAKENHI-PROJECT-18KK0383
[Journal Article] Insight into temperature impact of Ta filaments on high-growth-rate diamond (100) films by hot-filament chemical vapor deposition2021
- Author(s)
  Takamori Yue、Nagai Masatsugu、Tabakoya Taira、Nakamura Yuto、Yamasaki Satoshi、Nebel Christoph E.、Zhang Xufang、Matsumoto Tsubasa、Inokuma Takao、Tokuda Norio
- Journal Title
  
  Diamond and Related Materials
  
  Volume: 118 Pages: 108515-108515
- DOI
  10.1016/j.diamond.2021.108515
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383
[Journal Article] Energy distribution of Al2O3/diamond interface states characterized by high temperature capacitance-voltage method2020
- Author(s)
  Xufang Zhang, Tsubasa Matsumoto, Ukyo Sakurai, Toshiharu Makino, Masahiko Ogura, Satoshi Yamasaki, Mitsuru Sometani, Dai Okamoto, Hiroshi Yano, Noriyuki Iwamuro, Takao Inokuma, and Norio Tokuda
- Journal Title
  
  CARBON
  
  Volume: 168 Pages: 659-664
- DOI
  10.1016/j.carbon.2020.07.019
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K14773, KAKENHI-PROJECT-18KK0383, KAKENHI-PROJECT-19K15042
[Journal Article] Formation of U-shaped diamond trenches with vertical {111} sidewalls by anisotropic etching of diamond (110) surfaces2020
- Author(s)
  Nagai M.、Nakamura Y.、Yamada T.、Tabakoya T.、Matsumoto T.、Inokuma T.、Nebel C.E.、Makino T.、Yamasaki S.、Tokuda N.
- Journal Title
  
  Diamond and Related Materials
  
  Volume: 103 Pages: 107713-107713
- DOI
  10.1016/j.diamond.2020.107713
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786, KAKENHI-PROJECT-19J12733
[Journal Article] Insight into Al2O3/diamond interface states with high-temperature conductance method2020
- Author(s)
  Xufang Zhang, Tsubasa Matsumoto, Ukyo Sakurai, Toshiharu Makino, Masahiko Ogura, Mitsuru Sometani, Satoshi Yamasaki, Christoph E. Nebel, Takao Inokuma, and Norio Tokuda
- Journal Title
  
  Applied Physics Letters
  
  Volume: 117 Issue: 9 Pages: 092104-092104
- DOI
  10.1063/5.0021785
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K14773, KAKENHI-PROJECT-18KK0383, KAKENHI-PROJECT-19K15042
[Journal Article] Step-edge growth and doping of diamond2020
- Author(s)
  Tokuda Norio
- Journal Title
  
  Diamond for Quantum Applications Part 1
  
  Volume: 103 Pages: 57-72
- DOI
  10.1016/bs.semsem.2020.03.003
- ISBN
  9780128202401
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18KK0383
[Journal Article] Homoepitaxial Diamond Growth by Plasma-Enhanced Chemical Vapor Deposition2019
- Author(s)
  Tokuda Norio
- Journal Title
  
  Novel Aspects of Diamond
  
  Volume: 121 Pages: 1-29
- DOI
  10.1007/978-3-030-12469-4_1
- ISBN
  9783030124687, 9783030124694
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H02786, KAKENHI-PROJECT-17K18980
[Journal Article] High‐Rate Growth of Single‐Crystalline Diamond (100) Films by Hot‐Filament Chemical Vapor Deposition with Tantalum Filaments at 3000?°C2019
- Author(s)
  Tabakoya Taira、Kanada Shohei、Wakui Yusuke、Takamori Yue、Yamada Tatsuki、Nagai Masatsugu、Kojima Yoshiyasu、Ariyada Osamu、Yamasaki Satoshi、Nebel Christoph E.、Matsumoto Tsubasa、Inokuma Takao、Tokuda Norio
- Journal Title
  
  physica status solidi (a)
  
  Volume: 216 Issue: 21 Pages: 1900244-1900244
- DOI
  10.1002/pssa.201900244
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Journal Article] Inversion channel mobility and interface state density of diamond MOSFET using N-type body with various phosphorus concentrations2019
- Author(s)
  Matsumoto Tsubasa、Kato Hiromitsu、Makino Toshiharu、Ogura Masahiko、Takeuchi Daisuke、Yamasaki Satoshi、Inokuma Takao、Tokuda Norio
- Journal Title
  
  Applied Physics Letters
  
  Volume: 114 Issue: 24 Pages: 242101-242101
- DOI
  10.1063/1.5100328
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K15042, KAKENHI-PROJECT-17H02786
[Journal Article] Conductive-probe atomic force microscopy and Kelvin-probe force microscopy characterization of OH-terminated diamond (111) surfaces with step-terrace structures2019
- Author(s)
  Nagai Masatsugu、Yoshida Ryo、Yamada Tatsuki、Tabakoya Taira、Nebel Christoph E.、Yamasaki Satoshi、Makino Toshiharu、Matsumoto Tsubasa、Inokuma Takao、Tokuda Norio
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Issue: SI Pages: SIIB08-SIIB08
- DOI
  10.7567/1347-4065/ab1b5c
- NAID
  210000156440
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786, KAKENHI-PROJECT-19J12733
[Journal Article] Anisotropic diamond etching through thermochemical reaction between Ni and diamond in high-temperature water vapour2018
- Author(s)
  Nagai Masatsugu、Nakanishi Kazuhiro、Takahashi Hiraku、Kato Hiromitsu、Makino Toshiharu、Yamasaki Satoshi、Matsumoto Tsubasa、Inokuma Takao、Tokuda Norio
- Journal Title
  
  Scientific Reports
  
  Volume: 8 Issue: 1 Pages: 6687-6687
- DOI
  10.1038/s41598-018-25193-2
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17H02786
[Journal Article] Formation of atomically flat hydroxyl-terminated diamond (1?1?1) surfaces via water vapor annealing2018
- Author(s)
  Yoshida Ryo、Miyata Daisuke、Makino Toshiharu、Yamasaki Satoshi、Matsumoto Tsubasa、Inokuma Takao、Tokuda Norio
- Journal Title
  
  Applied Surface Science
  
  Volume: 458 Pages: 222-225
- DOI
  10.1016/j.apsusc.2018.07.094
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17K18980, KAKENHI-PROJECT-17H02786
[Journal Article] Direct observation of inversion capacitance in p-type diamond MOS capacitors with an electron injection layer2018
- Author(s)
  T. Matsumoto, H. Kato, T. Makino, M. Ogura, D. Takeuchi, S. Yamasaki, M. Imura, A. Ueda, T. Inokuma, and N. Tokuda
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 57 Issue: 4S Pages: 04FR01-04FR01
- DOI
  10.7567/jjap.57.04fr01
- NAID
  210000149007
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06330, KAKENHI-PROJECT-17H02786
[Journal Article] B-doped diamond field effect transistor with ferroelectric vinylidene fluoride-trifluoroethylene gate insulator2017
- Author(s)
  Ryota Karaya, Ikki Baba, Yosuke Mori, Tsubasa Matsumoto, Takashi Nakajima, Norio Tokuda and Takeshi Kawae
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 10S Pages: 10PF06-10PF06
- DOI
  10.7567/jjap.56.10pf06
- NAID
  210000148383
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H03248, KAKENHI-PROJECT-17H04814
[Journal Article] Self-separation of freestanding diamond films using graphite interlayers precipitated from C-dissolved Ni substrates2017
- Author(s)
  Shinya Ito, Masatsugu Nagai, Tsubasa Matsumoto, Takao Inokuma, Norio Tokuda
- Journal Title
  
  Journal of Crystal Growth
  
  Volume: 470 Pages: 104-107
- DOI
  10.1016/j.jcrysgro.2017.04.014
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26600096
[Journal Article] 原子的平坦面を有するダイヤモンド(111)膜の成長2016
- Author(s)
  徳田　規夫，松本　翼，猪熊　孝夫，梅沢　仁，小倉　政彦，加藤　宙光，牧野　俊晴，竹内　大輔，大串　秀世，寺地　徳之，山部　紀久夫，有屋田　修，山崎　聡
- Journal Title
  
  NEW DIAMOND
  
  Volume: 第120号 Pages: 9-14
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26600096
[Journal Article] Anisotropic lateral growth of homoepitaxial diamond (111) films by plasma-enhanced chemical vapor deposition2014
- Author(s)
  Norio Tokuda, Masahiko Ogura, Satoshi Yamasaki, and Takao Inokuma
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 53 Issue: 4S Pages: 04EH04-04EH04
- DOI
  10.7567/jjap.53.04eh04
- NAID
  210000143648
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-24686074
[Journal Article] Formation of Graphene-on-Diamond Structure by Graphitization of Atomically Flat Diamond (111) Surface2013
- Author(s)
  Norio Tokuda, Makoto Fukui, Toshiharu Makino, Daisuke Takeuchi, Satoshi Yamasaki, and Takao Inokuma
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 52 Issue: 11R Pages: 110121-110121
- DOI
  10.7567/jjap.52.110121
- NAID
  210000143041
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24686074
[Journal Article] Fabrication of (Bi,Pr)(Fe,Mn)O3 thin films on poly-crystalline diamond substrate by chemical solution deposition and their properties2012
- Author(s)
  T. Kawae, M. Kawasaki, T. Nakajima, N. Tokuda, S. Okamura, A. Morimoto, and Y Takano
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 51 Issue: 9S1 Pages: 09LA08-09LA08
- DOI
  10.1143/jjap.51.09la08
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656212, KAKENHI-PROJECT-24656380
[Journal Article] Formation of Step-Free Surfaces on Diamond (111) Mesas by Homoepitaxial Lateral Growth2012
- Author(s)
  Norio Tokuda
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 51 Issue: 9R Pages: 90107-90107
- DOI
  10.1143/jjap.51.090107
- NAID
  210000141151
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24686074
[Journal Article] プラズマCVD法によるステップフリーダイヤモンド(111)表面の形成2012
- Author(s)
  徳田規夫
- Journal Title
  
  日本結晶成長学会誌
  
  Volume: 39 Pages: 185-189
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24686074
[Journal Article] 正確に0. 2ナノメートルを測れますか?～ダイヤによるナノスケール標準試料の可能性～2010
- Author(s)
  徳田規夫, 権太聡, 牧野俊晴, 山崎聡
- Journal Title
  
  MATERIAL STAGE 9
  
  Pages: 1-3
- Data Source
  KAKENHI-PROJECT-20760455
[Journal Article] Growth of atomically step-free s urface on diamond {111} mesas2010
- Author(s)
  Norio Tokuda, Hitoshi Umezawa, Kikuo Yamabe, Hideyo Okushi, Satoshi Yam asaki
- Journal Title
  
  Diamond and Related Materials 19
  
  Pages: 288-290
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760455
[Journal Article] Growth of atomically step-free surface on diamond {111} mesas2010
- Author(s)
  Norio Tokuda, Hitoshi Umezawa Kikuo Yamabe, Hideyo Okushi, Satoshi Yamasaki
- Journal Title
  
  Diamond and Related Materials 19
  
  Pages: 288-290
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760455
[Journal Article] 正確に0.2ナノメートルを測れますか?～ダイヤによるナノスケール標準試料の可能性～2010
- Author(s)
  徳田規夫, 権太聡, 牧野俊晴, 山崎聡
- Journal Title
  
  MATERIAL STAGE 9
  
  Pages: 1-3
- NAID
  40017002371
- Data Source
  KAKENHI-PROJECT-20760455
[Journal Article] Nanometer Scale Height Standard Using Atomically Controlled Diamond Surface2009
- Author(s)
  徳田規夫、梅沢仁、加藤宙光、小倉政彦、権太聡、山部紀久夫、大串秀世、山崎聡
- Journal Title
  
  Applied Physics Express Vol.2, No.5
  
  Pages: 55001-55001
- NAID
  10025086166
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760455
[Journal Article] ナノサイズを測るダイヤの"ものさし"2009
- Author(s)
  徳田規夫, 山崎聡
- Journal Title
  
  Newton 8
  
  Pages: 13-13
- Data Source
  KAKENHI-PROJECT-20760455
[Journal Article]2009
- Author(s)
  Norio Tokuda, Hitoshi Umezawa, Hirom itsu Kato, Masahiko Ogura, Satoshi Gond a, Kikuo Yamabe, Hideyo Okushi, Satoshi Yamasaki
- Journal Title
  
  Applied Physics Express 2
  
  Pages: 55001-55001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760455
[Journal Article] ナノサイズを測るダイヤの"ものさし"2009
- Author(s)
  徳田規夫、山崎聡
- Journal Title
  
  Newton 8
  
  Pages: 13-13
- Data Source
  KAKENHI-PROJECT-20760455
[Patent] ダイヤモンドの製造方法2015
- Inventor(s)
  徳田規夫、猪熊孝夫、伊藤槙哉、有屋田修
- Industrial Property Rights Holder
  金沢大学、アリオス株式会社
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-102143
- Filing Date
  2015-05-19
- Data Source
  KAKENHI-PROJECT-26600096
[Patent] 半導体装置2013
- Inventor(s)
  小山和博、牧野俊晴、小倉政彦、加藤宙光、山崎聡、徳田規夫他3名
- Industrial Property Rights Holder
  小山和博、牧野俊晴、小倉政彦、加藤宙光、山崎聡、徳田規夫他3名
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2013-248166
- Filing Date
  2013-11-29
- Data Source
  KAKENHI-PROJECT-24686074
[Patent] 単結晶ダイヤモンド基板2009
- Inventor(s)
  徳田規夫, 他7名
- Industrial Property Rights Holder
  (独)産業技術総合研究所
- Industrial Property Number
  2009-100870
- Filing Date
  2009-04-17
- Data Source
  KAKENHI-PROJECT-20760455
[Patent] 単結晶ダイヤモンド基板2009
- Inventor(s)
  徳田規夫、小倉政彦、加藤宙光、竹内大輔、牧野俊晴、小山和博、大串秀世、山崎聡
- Industrial Property Rights Holder
  産業技術総合研究所
- Industrial Property Number
  2009-100870
- Filing Date
  2009-04-17
- Data Source
  KAKENHI-PROJECT-20760455
[Patent] ナノメートルスケールの計測標準試料およびナノメートルスケールの計測標準試料を用いた走査型顕微鏡の校正方法2009
- Inventor(s)
  徳田規夫、山崎聡、栗原健一、権太聡、太田敏隆
- Industrial Property Rights Holder
  (独)産業技術総合研究所
- Industrial Property Number
  2009-037517
- Filing Date
  2009-02-20
- Data Source
  KAKENHI-PROJECT-20760455
[Patent] ナノメートルスケールの計測標準試料及びナノメートルスケールの計測標準試料を使用した走査型顕微鏡の校正方法2008
- Inventor(s)
  徳田規夫、山崎聡、栗原健一、権太聡、太田敏隆
- Industrial Property Rights Holder
  (独)産業技術総合研究所
- Industrial Property Number
  2008-222042
- Filing Date
  2008-08-29
- Data Source
  KAKENHI-PROJECT-20760455
[Patent] ナノメートルスケールの計測標準試料及びナノメートルスケールの計測標準試料を使用した走査型顕微鏡の校正方法体2008
- Inventor(s)
  徳田規夫、山崎聡、栗原健一、権太聡、太田敏隆
- Industrial Property Rights Holder
  産業技術総合研究所
- Industrial Property Number
  2008-222042
- Filing Date
  2008-08-29
- Data Source
  KAKENHI-PROJECT-20760455
[Presentation] ダイヤモンドウェーハの平坦化技術～ダイヤモンド半導体の最新動向を踏まえて～2024
- Author(s)
  徳田規夫
- Organizer
  公益社団法人砥粒加工学会　次世代固定砥粒加工プロセス専門委員会第113回研究会　「硬脆材料の平坦化・平滑化技術　～半導体素材・電子デバイス素材・光学素材の平面加工～」
- Invited
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] ダイヤモンドパワー半導体の現状2024
- Author(s)
  徳田規夫
- Organizer
  応用物理学会　システムデバイスロードマップ産学連携委員会（SDRJ） 2023年度第5回Beyond CMOS、More than Moore合同委員会
- Invited
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] 圧力によるCVD ダイヤモンドの不純物取り込み制御と NV中心コヒーレンス時間の改善2023
- Author(s)
  川瀬凜久，川島宏幸，加藤宙光，徳田規夫，山崎聡 , 小倉政彦，牧野俊晴，水落憲和
- Organizer
  第37回ダイヤモンドシンポジウム
- Data Source
  KAKENHI-PROJECT-21H04653
[Presentation] ダイヤモンド半導体を用いた反転層MOSFET2023
- Author(s)
  徳田規夫
- Organizer
  2023年度電子情報通信学会総合大会
- Invited
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] Advances in diamond MOSFET technologies2023
- Author(s)
  Norio Tokuda, Kazuki Kobayashi, Kan Hayashi, Kimiyoshi Ichikawa, Xufang Zhang, Tsubasa Matsumoto, Takao Inokuma, Satoshi Yamasaki, Hiromitsu Kato, Masahiko Ogura, Toshiharu Makino, Daisuke Takeuchi, Christoph E. Nebel
- Organizer
  E-MRS 2023 Spring Meeting
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] Inversion type diamond MOSFET technology2023
- Author(s)
  Norio Tokuda
- Organizer
  2023 FUNCTIONAL DIAMOND SYMPOSIUM
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] TBP による(111)面リンドープ n 型ダイヤモンド膜のホール移動度2023
- Author(s)
  川島宏幸，川瀬凜久，加藤宙光，徳田規夫，山崎聡, 小倉政彦，牧野俊晴，森岡直也，水落憲和
- Organizer
  応用物理学会秋季大会
- Data Source
  KAKENHI-PROJECT-21H04653
[Presentation] Diamond MOSFET technology: 　　current status and future perspectives2023
- Author(s)
  Norio Tokuda
- Organizer
  33rd International Conference on Diamond and Carbon Materials
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] TBP を用いた(111)面リンドープ n 型ダイヤモンド膜のホール移動度の向上2023
- Author(s)
  川島宏幸，川瀬凜久，加藤宙光，徳田規夫，山崎聡, 小倉政彦，牧野俊晴，森岡直也，水落憲和
- Organizer
  第37回ダイヤモンドシンポジウム
- Data Source
  KAKENHI-PROJECT-21H04653
[Presentation] NV 中心による二次元 NMR を目指した直交検波手法の開発2023
- Author(s)
  森田航希，大木出，徳田規夫, 水落憲和
- Organizer
  応用物理学会秋季大会
- Data Source
  KAKENHI-PROJECT-21H04653
[Presentation] ダイヤモンドMOS界面の進展2022
- Author(s)
  徳田規夫
- Organizer
  ワイドギャップ半導体学会第9回研究会
- Invited
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] ダイヤモンドウェハの研究開発動向2022
- Author(s)
  徳田規夫
- Organizer
  第23回KENMA研究会
- Invited
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] Recent Progress in Electrical Characterization of Al2O3/Diamond Interface2022
- Author(s)
  X. Zhang, T. Matsumoto, M. Sometani, M. Ogura, T. Makino, D. Takeuchi, C.E. Nebel, T. Inokuma, S. Yamasaki, and N. Tokuda
- Organizer
  14th Topical Workshop on Heterostructure Microelectronics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] ダイヤモンドMOS界面の原子レベル制御 - 反転層ダイヤモンドMOSFETの実現に向けて -2022
- Author(s)
  徳田規夫
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] Progress in inversion channel diamond MOSFET technologies2022
- Author(s)
  Norio Tokuda, Kazuki Kobayashi, Xufang Zhang, Tsubasa Matsumoto, Takao Inokuma, Satoshi Yamasaki, Hiromitsu Kato, Masahiko Ogura, Toshiharu Makino, Daisuke Takeuchi, Christoph E. Nebel
- Organizer
  2022 MRS SPRING MEETING & EXHIBIT
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] Advances in Diamond MOS Interface2021
- Author(s)
  Norio Tokuda, Xufang Zhang, Tsubasa Matsumoto, Takao Inokuma, Hiromitsu Kato, Toshiharu Makino, Daisuke Takeuchi, Christoph E. Nebel, Satoshi Yamasaki
- Organizer
  2021 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] Diamond Etching Based on Carbon Solid Solution into Nickel for Wafer and Device Fabrication Processes2021
- Author(s)
  Norio Tokuda, Xufang Zhang, Tsubasa Matsumoto, Takao Inokuma, Christoph Nebel, Satoshi Yamasaki
- Organizer
  2021 MRS Fall Meeting & Exhibit
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] ダイヤモンドFeFETに対する残留分極を用いた疑似ノーマリオフ動作に関する検証2020
- Author(s)
  玉村達哉、山田樹、松本翼、中嶋宇史、徳田規夫、川江健
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-17H03248
[Presentation] Inversion Layer Diamond MOSFET2020
- Author(s)
  Norio Tokuda
- Organizer
  Second Workshop on Diamond Electronics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] MOS interface control for inversion channel diamond MOSFET2020
- Author(s)
  N. Tokuda, T. Matsumoto, X. Zhang, T. Inokuma, S. Yamasaki, H. Kato, T. Makino, C.E. Nebel, R.J. Nemanich
- Organizer
  Hasselt Diamond Workshop 2020
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] ダイヤモンドパワー半導体　～ウェハ・プロセス・デバイス～2020
- Author(s)
  徳田規夫，張　旭芳，松本　翼，猪熊　孝夫， Christoph E. Nebel, 山崎　聡
- Organizer
  2021年第68回応用物理学会春季学術講演会　分科企画シンポジウム「パワーデバイスの最新動向と今後の展望」
- Invited
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] MOS interface control for inversion channel diamond MOSFET2020
- Author(s)
  N. Tokuda, T. Matsumoto, X. Zhang, T. Inokuma, S. Yamasaki, H. Kato, T. Makino, C.E. Nebel, R.J. Nemanich
- Organizer
  Hasselt Diamond Workshop 2020
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18KK0383
[Presentation] ダイヤモンド半導体の技術動向と可能性2019
- Author(s)
  徳田規夫
- Organizer
  技術情報協会セミナー
- Invited
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] Reduction of Interface State Density for Diamond MOS structures by Wet Annealing after Hydrogen Plasma Treatment2019
- Author(s)
  U. Sakurai, T. Matsumoto, M. Nagai, M. Ogura, T. Makino, S. Yamasaki, C.E. Nebel, T. Inokuma, N. Tokuda
- Organizer
  EM-NANO 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] ダイヤモンドエレクトロニクスの基礎と技術動向2019
- Author(s)
  徳田規夫
- Organizer
  サイエンス＆テクノロジーセミナー
- Invited
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] Electrical characteristics of Ni/B-doped diamond (111) contact after annealing2019
- Author(s)
  Y. Nakamur, T. Tabakoya, M. Nagai, Y. Katagiri, C.E. Nebel, T. Matsumoto, T. Inokuma, N. Tokuda
- Organizer
  EM-NANO 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] 部分O終端チャネルを用いたダイヤモンドFeFETの疑似ノーマリオフ動作化に関する検討2019
- Author(s)
  玉村達哉、山田樹、高橋和暉、中嶋宇史、松本翼、徳田規夫、川江健
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17H03248
[Presentation] ダイヤモンドパワーデバイス2019
- Author(s)
  徳田規夫
- Organizer
  新技術研究会主催　第314回月例研究会
- Invited
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] 部分O終端構造化ダイヤモンド表面伝導層をチャネルとした強誘電体ゲートFETの作製2019
- Author(s)
  玉村達哉、中嶋宇史、松本翼、徳田規夫、川江健
- Organizer
  第36回強誘電体応用会議
- Data Source
  KAKENHI-PROJECT-17H03248
[Presentation] Conductive-Probe AFM and Kelvin-Probe Force Microscopy Characterization of OH-terminated Diamond (111) Surfaces with Step-Terrace Structures through Water Vapor Annealing2019
- Author(s)
  M. Nagai, R. Yoshida, T. Yamada, T. Tabakoya, C.E. Nebel, S. Yamasaki, T. Makino, T. Matsumoto, T. Inokuma, N. Tokuda
- Organizer
  EM-NANO 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] Advances in inversion channel diamond MOSFETs2019
- Author(s)
  N. Tokuda, T. Matsumoto, T. Inokuma, S. Yamasaki, H. Kato, T. Makino, C.E. Nebel
- Organizer
  SSDM 2019
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] ダイヤモンド半導体の技術動向と可能性2019
- Author(s)
  徳田規夫
- Organizer
  技術情報協会セミナー
- Invited
- Data Source
  KAKENHI-PROJECT-17K18980
[Presentation] ダイヤモンドエレクトロニクスの基礎と技術動向2019
- Author(s)
  徳田規夫
- Organizer
  サイエンス＆テクノロジーセミナー
- Invited
- Data Source
  KAKENHI-PROJECT-17K18980
[Presentation] Recent Progress in Inversion Channel Diamond MOSFET2019
- Author(s)
  N. Tokuda, T. Matsumoto, T. Inokuma, S. Yamasaki, H. Kato, T. Makino, C.E. Nebel
- Organizer
  2019 MRS FALL MEETING&EXHBIT
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] Surface planarization of diamond substrates using carbon solid solution into nickel2019
- Author(s)
  K. Sakauchi, T. Tabakya, M. Nagai, C.E. Nebel, T. Matsumoto, T. Inokuma, N. Tokuda
- Organizer
  EM-NANO 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] Recent progress for inversion channel mobility improvement in diamond MOSFETsRecent progress for inversion channel mobility improvement in diamond MOSFETsRecent progress for inversion channel mobility improvement in diamond MOSFETsRecent progress for inversion channel mobility improvement in diamond MOSFETsRecent progress for inversion channel mobility improvement in diamond MOSFETs2019
- Author(s)
  T. Matsumoto, U. Sakurai, T. Yamakawa, H. Kato, T. Makino, M. Ogura, D. Takeuchi, S. Yamasaki, T. Inokuma, N. Tokuda
- Organizer
  APWS 2019
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] 反転層チャネルダイヤモンドMOSFETの実証2019
- Author(s)
  松本翼，加藤宙光，小山和博，牧野俊晴，小倉政彦，竹内大輔，猪熊孝夫，山崎聡，徳田規夫
- Organizer
  2019年第66回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] Inversion channel MOSFET on lightly impurity doped n-type diamond2018
- Author(s)
  T. Matsumoto, H. Kato, T. Makino, S. Ohmagari, M. Ogura, D. Takeuchi, T. Inokuma, S. Yamasaki and N. Tokuda
- Organizer
  ACSIN-14 & ICSPM26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] ダイヤモンドエレクトロニクスの将来像と結晶材料開発2018
- Author(s)
  徳田規夫
- Organizer
  日本学術振興会結晶成長の科学と技術第161委員会第108回研究会「2025年結晶産業の未来～新規材料素材編～」（
- Invited
- Data Source
  KAKENHI-PROJECT-17K18980
[Presentation] 反転層チャネルダイヤモンドMOSFET ～ウェットアニール処理による高品質ダイヤモンドMOS界面の形成～2018
- Author(s)
  松本翼，加藤宙光，牧野俊晴，小倉政彦，竹内大輔，猪熊孝夫，山崎聡，徳田規夫
- Organizer
  MOSデバイス・メモリ高性能化－材料・プロセス技術（シリコン材料・デバイス研究会と応用物理学会シリコンテクノロジー分科会との合同開催）
- Invited
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] ダイヤモンドパワーデバイスの最新動向とその可能性2018
- Author(s)
  徳田規夫
- Organizer
  技術情報協会主催セミナー　次世代パワーデバイスの最新開発動向と実用化展望
- Invited
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] Inversion channel diamond MOSFET with lightly phosphorus doped body2018
- Author(s)
  T. Matsumoto, H. Kato, T. Makino, M. Ogura, D. Daisuke, T. Inokuma, N. Tokuda, S. Yamasaki
- Organizer
  Hasselt Diamond Workshop 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] 窒素ドープダイヤモンド膜における光伝導2018
- Author(s)
  亀井　悠平,池田　眞二,松本　翼,猪熊　孝夫,徳田　規夫
- Organizer
  第4回有機・無機エレクトロニクスシンポジウム
- Data Source
  KAKENHI-PROJECT-17K18980
[Presentation] 100 kA/cm2 Schottky-pn diodes on freestanding diamond (100) substrate2018
- Author(s)
  T. Matsumoto, R. Yoshida, T. Yamamoto, T. Teraji, O. Ariyada, H. Kato, S. Yamasaki, T. Inokuma, N. Tokuda
- Organizer
  Hasselt Diamond Workshop 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] ダイヤモンドで究極の省エネ～低炭素社会の実現を目指す～2018
- Author(s)
  徳田規夫
- Organizer
  日本海イノベーション会議　新エネルギー戦略-振動発電とダイヤモンド-
- Invited
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] P(VDF-TrFE)をゲート絶縁膜としたBドープダイヤモンドFETの開発2018
- Author(s)
  庄司駿輔、森陽介、松本翼、中嶋宇史、小倉政彦、徳田規夫、川江健
- Organizer
  第6回強的秩序とその操作に関わる研究グループ研究会
- Data Source
  KAKENHI-PROJECT-17H03248
[Presentation] 強誘電体の残留分極を用いたダイヤモンド表面伝導層の空乏化に関する検証2018
- Author(s)
  庄司駿輔、玉村達哉、中嶋宇史、松本翼、徳田規夫、川江健
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17H03248
[Presentation] 熱化学反応を用いた選択的かつ高速な結晶異方性ダイヤモンドエッチング2018
- Author(s)
  長井雅嗣，松本翼，猪熊孝夫, 徳田規夫
- Organizer
  第4回有機・無機エレクトロニクスシンポジウム
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] Conductive-Probe AFM Characterization of Atomically Well-Defined Diamond (111) Surfaces2018
- Author(s)
  Norio TOKUDA, Ryo YOSHIDA, Masatsugu NAGAI, Taira TABAKOYA, Tsubasa MATSUMOTO, Takao INOKUMA
- Organizer
  The 12th International New Diamond and Nano Carbons Conference (NDNC 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] ダイヤモンド MOS キャパシタにおける低界面準位密度 10^11 cm -2eV-1オーダーの実現2018
- Author(s)
  桜井海匡、松本翼、牧野俊晴、山崎聡、Christoph E. Nebel、猪熊孝夫、徳田規夫
- Organizer
  平成30年度(2018年)応用物理学会北陸・信越支部学術講演会
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] ダイヤモンドエレクトロニクスの将来像と結晶材料開発2018
- Author(s)
  徳田規夫
- Organizer
  日本学術振興会結晶成長の科学と技術第161委員会第108回研究会「2025年結晶産業の未来～新規材料素材編～」
- Invited
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] Conductive-Probe AFM Characterization of Diamond (111) Surfaces with Step-Terrace Structures2018
- Author(s)
  N. Tokuda, R. Yoshida, M. Nagai, T. Tabakoya, S. Yamasaki, T. Makino, T. Matsumoto and T. Inokuma
- Organizer
  ACSIN-14 & ICSPM26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] Photoconduction in nitrogen-doped diamond films2018
- Author(s)
  Yuhei Kamei,Shinji Ikeda,Tsubasa Matsumoto,Takao Inokuma, Norio Tokuda
- Organizer
  ACSIN-14 & ICSPM26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K18980
[Presentation] Non-plasma Anisotropic Diamond Etching with High Rate and Selectivity2018
- Author(s)
  M. Nagai, K. Nakanishi, T. Tabakoya, H. Kato, T. Makino, S. Yamasaki, T. Matsumoto, T. Inokuma and N. Tokuda
- Organizer
  ACSIN-14 & ICSPM26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] 100 kA/cm2 Schottky-pn diodes on freestanding diamond (100) substrate2018
- Author(s)
  T. Matsumoto, R. Yoshida, T. Yamamoto, T. Teraji, O. Ariyada, H. Kato, S. Yamasaki, T. Inokuma, N. Tokuda
- Organizer
  Hasselt Diamond Workshop 2018
- Data Source
  KAKENHI-PROJECT-17K18980
[Presentation] ダイヤモンドパワーデバイス開発の最新動向と離陸への課題2017
- Author(s)
  徳田規夫
- Organizer
  第14回 PDEAパワーデバイスセミナー
- Invited
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] ダイヤモンドMOSFET における反転層確認とFET 動作実証2017
- Author(s)
  松本翼、加藤宙光、牧野俊晴、小倉政彦、竹内大輔、猪熊孝夫、徳田規夫、山崎聡
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] リンドープダイヤモンドにおけるNV中心の電荷安定性とスピン特性2017
- Author(s)
  丸山　祐一，加藤宙光，徳田規夫，牧野俊晴，山崎聡，下岡孝明，森下弘樹，藤原正規，水落憲和
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  神奈川県横浜市
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16H02088
[Presentation] 窒素ドープn 層/低抵抗p+-ダイヤモンド(100)CVD 自立基板を用いたショットキーpn ダイオード2017
- Author(s)
  吉田稜、山本貴大、長井雅嗣、松本翼、寺地徳之、有屋田修、加藤宙光、山崎聡、徳田規夫、猪熊孝夫
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] High-Rate and Anisotropic Diamond Etching by Oxidation-Reduction Reaction at NiO/Diamond Interface2017
- Author(s)
  Masatsugu Nagai, Taira Tabakoya, Tsubasa Matsumoto, Takao Inokuma, Norio Tokuda
- Organizer
  The 8th International Symposium on Surface Science
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02786
[Presentation] P(VDF-TrFE)をゲートとしたボロンドープダイヤモンドFET2017
- Author(s)
  森陽介、柄谷涼太、馬場一気、吉田稜、中嶋宇史、松本翼、徳田規夫、川江健
- Organizer
  第34回強誘電体応用会議
- Data Source
  KAKENHI-PROJECT-17H03248
[Presentation] 自然剥離を用いたドーム状ダイヤモンド自立膜の作製2016
- Author(s)
  伊藤　槙哉、叶田　翔平、松本　翼、徳田　規夫、猪熊　孝夫
- Organizer
  第30回ダイヤモンドシンポジウム
- Place of Presentation
  東京大学　駒場リサーチキャンパスコンベンションホール（東京都目黒区）
- Year and Date
  2016-11-16
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] Perfect selective alignment of nitrogen-vacancy centers in diamond2016
- Author(s)
  福井貴大，土井悠生，宮崎剛英，宮本良之，加藤宙光, 松本翼，牧野俊晴，山崎聡，徳田規夫，波多野睦子,坂川優希，森下弘樹，田嶌俊之，三輪真嗣，鈴木義茂，水落憲和
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市
- Year and Date
  2016-09-13
- Invited
- Data Source
  KAKENHI-PROJECT-16H02088
[Presentation] 革新的パワーデバイスの実現に向けた半導体ダイヤモンドの研究2016
- Author(s)
  徳田規夫
- Organizer
  第3回有機・無機エレクトロニクスシンポジウム
- Place of Presentation
  石川県政記念しいのき迎賓館（石川県金沢市）
- Year and Date
  2016-07-15
- Invited
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] マイクロ波プラズマCVD法によるダイヤモンド膜の成長2016
- Author(s)
  徳田規夫
- Organizer
  第63回CVD研究会
- Place of Presentation
  ひょうご共済会館（兵庫県神戸市）
- Year and Date
  2016-08-18
- Invited
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] マイクロ波プラズマCVD によるダイヤモンド単結晶膜の超高速ホモエピタキシャル成長2016
- Author(s)
  徳田規夫
- Organizer
  プラズマ材料科学第153委員会　第129回研究会
- Place of Presentation
  島根県産業技術センター（島根県松江市）
- Year and Date
  2016-12-09
- Invited
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] MPCVD法を用いたNi基板上のダイヤモンド成長2016
- Author(s)
  伊藤槙哉，叶田翔平，松本翼，徳田規夫，猪熊孝夫
- Organizer
  第3回有機・無機エレクトロニクスシンポジウム
- Place of Presentation
  石川県政記念しいのき迎賓館（石川県金沢市）
- Year and Date
  2016-07-15
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] MPCVD法を用いたNi上での自立多結晶ダイヤモンド膜の成長2015
- Author(s)
  伊藤槙哉、渡邊俊介、金田大輝、徳田規夫、猪熊孝夫
- Organizer
  第29回ダイヤモンドシンポジウム
- Place of Presentation
  東京理科大学（東京都葛飾区新宿）
- Year and Date
  2015-11-17
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] 革新的パワーデバイスの実現に向けた半導体ダイヤモンドの研究開発2015
- Author(s)
  徳田規夫
- Organizer
  金沢大学理工研究域サステナブルエネルギー研究センター第3回公開シンポジウム（依頼講演）
- Place of Presentation
  香林坊プラザホール（石川県金沢市）
- Year and Date
  2015-11-14
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] 球型共振器構造MPCVDによるダイヤモンド(111)膜の高速成長2015
- Author(s)
  馬場一気、金田大輝、渡邊俊介、徳田規夫、猪熊孝夫
- Organizer
  第29回ダイヤモンドシンポジウム
- Place of Presentation
  東京理科大学（東京都葛飾区新宿）
- Year and Date
  2015-11-17
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] Mechanism of anisotropic etching of diamond (111) surfaces by hydrogen plasma treatment2015
- Author(s)
  H. Kuroshima, N. Tokuda, T. Makino, S. Yamasaki, T. Inokuma
- Organizer
  International Conference on Diamond and Carbon Materials 2015
- Place of Presentation
  Bad Homburg, Germany
- Year and Date
  2015-09-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] Growth of Diamond Films on Nickel Substrates by Microwave Plasma-Enhanced CVD2015
- Author(s)
  Shinya Ito, Shunsuke Watanabe, Daiki Kaneta, Norio Tokuda, Takao Inokuma
- Organizer
  The 5th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
- Place of Presentation
  朱鷺メッセ（新潟県新潟市）
- Year and Date
  2015-06-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] Surface roughening of homoepitaxial diamond (111) films by oxygen addition2015
- Author(s)
  Ikki Baba, Daiki Kanata, Shunsuke Watanabe, Tohiharu Makino, Masahiko Ogura, Satoshi Yamasaki2, Norio Tokuda, Takao Inokuma
- Organizer
  The 5th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
- Place of Presentation
  朱鷺メッセ（新潟県新潟市）
- Year and Date
  2015-06-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] Growth of atomically flat diamond films2015
- Author(s)
  Norio Tokuda, Tsubasa Matsumoto, Satoshi Yamasaki, Takao Inokuma
- Organizer
  EMN 3CG 2015（招待講演）
- Place of Presentation
  Hong Kong, China
- Year and Date
  2015-12-14
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] Self-separation of freestanding diamond films from Ni substrates by MPCVD2015
- Author(s)
  S. Ito, S. Watanabe, D. Kaneta, N. Tokuda, T. Inokuma
- Organizer
  International Conference on Diamond and Carbon Materials 2015
- Place of Presentation
  Bad Homburg, Germany
- Year and Date
  2015-09-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] Fabrication of BiFeO_3/p-diamond hetero structure for power device applications Collaborative Conference on Materials2013
- Author(s)
  T. Kawae, N. Tokuda, Y. Takano, and A. Morimoto
- Organizer
  Research 2013 (CCMR2013)
- Place of Presentation
  Jeju, Korea
- Year and Date
  2013-06-24
- Invited
- Data Source
  KAKENHI-PROJECT-24656380
[Presentation] Fabrication of BiFeO3/p-diamond hetero structure for power device applications2013
- Author(s)
  T. Kawae, N. Tokuda, Y. Takano, and A. Morimoto
- Organizer
  Collaborative Conference on Materials Research 2013 (CCMR2013)
- Place of Presentation
  韓国、済州島
- Invited
- Data Source
  KAKENHI-PROJECT-24656380
[Presentation] Fatigue Characteristics of BFO/STO/B-doped Diamond Layered Structures International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies2013
- Author(s)
  K. Kinoshita, H. Kawasaki, T. Kawae, N. Tokuda, Y. Takano, S. Okamura, and A. Morimoto
- Organizer
  EM-NANO 2013
- Place of Presentation
  Kanazawa, Japan
- Year and Date
  2013-06-18
- Data Source
  KAKENHI-PROJECT-24656380
[Presentation] Fabrication of BiFeO3/B-doped diamond layered structure and its high temperature operation2013
- Author(s)
  T. Kawae, N. Tokuda, Y. Takano, and A. Morimoto
- Organizer
  Annual World Congress of Advanced Materials-2013 (WCAM-2013)
- Place of Presentation
  中国、Suzhou
- Invited
- Data Source
  KAKENHI-PROJECT-24656380
[Presentation] Fabrication of BiFeO_3/B-doped diamond layered structure and its high temperature operation Annual World Congress of Advanced Materials-20132013
- Author(s)
  T. Kawae, N. Tokuda, Y. Takano, and A. Morimoto
- Organizer
  WCAM-2013
- Place of Presentation
  Suzhou,China
- Year and Date
  2013-06-05
- Invited
- Data Source
  KAKENHI-PROJECT-24656380
[Presentation] 化学溶液法による多結晶ダイヤモンド上への(Bi,Pr)(Fe,Mn)O_3薄膜の作製と評価2013
- Author(s)
  川江健、川崎寛樹、中嶋宇史、徳田規夫、岡村総一郎、森本章治、高野義彦
- Organizer
  第29回強誘電体応用会議
- Place of Presentation
  コープイン京都
- Year and Date
  2013-05-24
- Data Source
  KAKENHI-PROJECT-24656380
[Presentation] Fatigue Characteristics of BFO/STO/B-doped Diamond Layered Structures2013
- Author(s)
  K. Kinoshita H. Kawasaki. T. Kawae, N. Tokuda, Y. Takano, S. Okamura, and A. Morimoto
- Organizer
  International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2013)
- Place of Presentation
  金沢市
- Data Source
  KAKENHI-PROJECT-24656380
[Presentation] Influence of Substrate Misorientation Angle and Direction in Diamond (111) Homoepitaxy by Plasma-Enhanced CVD2012
- Author(s)
  Norio Tokuda
- Organizer
  The sixth international New Diamond and Nano Carbons Conference
- Place of Presentation
  San Juan, Puerto Rico
- Year and Date
  2012-05-22
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] Formation of boron delta-doped diamond structures by lateral growth of diamond (111) films2012
- Author(s)
  Norio Tokuda
- Organizer
  International Conference on Diamond and Carbon Materials
- Place of Presentation
  Granada, Spain
- Year and Date
  2012-09-05
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] BiFeO3/SrTiO3/B添加ダイヤモンド積層構造の疲労特性評価2012
- Author(s)
  川崎寛樹、木下昴洋、野村幸寛、川江健、中嶋宇史、徳田規夫、高野義彦、岡村総一郎、森本章治
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-24656380
[Presentation] BiFeO_3/SrTiO_3/B添加ダイヤモンド積層構造の疲労特性評価2012
- Author(s)
  川崎寛樹、木下昴洋、野村幸寛、川江健、中嶋宇史、徳田規夫、高野義彦、岡村総一郎、森本章治
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学
- Year and Date
  2012-09-11
- Data Source
  KAKENHI-PROJECT-24656380
[Presentation] 化学溶液法による多結晶ダイヤモンド上への(Bi,Pr)(Fe,Mn)O3薄膜の作製と評価2012
- Author(s)
  川江健、川崎寛樹、中嶋宇史、徳田規夫、岡村総一郎、森本章治、高野義彦
- Organizer
  第29回強誘電体応用会議
- Place of Presentation
  コープイン京都
- Data Source
  KAKENHI-PROJECT-24656380
[Presentation] 完全平坦ダイヤモンド表面の形成2010
- Author(s)
  徳田規夫, 猪熊孝夫, 山部紀久夫, 大串秀世, 山崎聡
- Organizer
  表面技術協会第120回講演大会
- Place of Presentation
  幕張メッセ国際会議場(千葉県)
- Year and Date
  2010-09-18
- Data Source
  KAKENHI-PROJECT-20760455
[Presentation] Atomically controlled diamond surfaces2009
- Author(s)
  徳田規夫、牧野俊晴、小倉政彦、加藤宙光、梅沢仁、山部紀久夫、大串秀世、山崎聡
- Organizer
  The second international symposium on interdisciplinary Materials Science (ISIMS-2009)
- Place of Presentation
  茨城県つくば市つくば国際会議場
- Year and Date
  2009-03-10
- Data Source
  KAKENHI-PROJECT-20760455
[Presentation] 完全平坦ダイヤモンド表面の形成2009
- Author(s)
  徳田規夫, 猪熊孝夫, 山部紀久夫, 大串秀世, 山崎聡
- Organizer
  表面技術協会第120回講演大会
- Place of Presentation
  幕張メッセ国際会議場(千葉県)
- Year and Date
  2009-09-18
- Data Source
  KAKENHI-PROJECT-20760455
[Presentation] Atomically controlled diamond surfaces2009
- Author(s)
  Norio Tokuda, Toshiharu Makino, Masahiko Ogura, Hiromitsu Kato, Hitoshi Umezawa, Kikuo Yamabe, Hideyo Okushi, Satoshi Yamasaki
- Organizer
  The second international symposium on interdisciplinary Materials Science (ISIMS-2009)
- Place of Presentation
  つくば国際会議場(茨城県)
- Year and Date
  2009-03-10
- Data Source
  KAKENHI-PROJECT-20760455
[Presentation] マイクロ波プラズマCVDによるステップフリーダイヤモンド(111)表面の形成2008
- Author(s)
  徳田規夫、牧野俊晴、小倉政彦、山部紀久夫、大串秀世、山崎聡
- Organizer
  第38回結晶成長国内会議(NCCG-38)
- Place of Presentation
  仙台市戦災復興記念館(宮城県)
- Year and Date
  2008-11-06
- Data Source
  KAKENHI-PROJECT-20760455
[Presentation] マイクロ波プラズマ中のダイヤモンド(111)膜の成長とエッチング2008
- Author(s)
  徳田規夫、牧野俊晴、小倉政彦、山部紀久夫、大串秀世、山崎聡
- Organizer
  2008年秋季第69回応用物理学会学術講演大会
- Place of Presentation
  愛知県春日井市中部大学
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-20760455
[Presentation] マイクロ波プラズマCVDによるステップフリーダイヤモンド(111)表面の形成2008
- Author(s)
  徳田規夫、牧野俊晴、小倉政彦、山部紀久夫、大串秀世、山崎聡
- Organizer
  第38回結晶成長国内会議(NCCG-38)
- Place of Presentation
  宮城県仙台市仙台市戦災復興記念館
- Year and Date
  2008-11-06
- Data Source
  KAKENHI-PROJECT-20760455
[Presentation] マイクロ波プラズマ中のダイヤモンド(111)膜の成長とエッチング2008
- Author(s)
  徳田規夫、牧野俊晴、小倉政彦、山部紀久夫、大串秀世、山崎聡
- Organizer
  2008年秋季第69回応用物理学会学術講演大会
- Place of Presentation
  中部大学(愛知県)
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-20760455
[Presentation] ウェットアニール処理によるダイヤモンドMESFET作製プロセスの提案
- Author(s)
  中西一浩，南山拓真，宮田大輔，辻裕司, 徳田規夫, 小倉政彦，山崎聡，森本章治, 川江健, 猪熊孝夫
- Organizer
  平成26年度　応用物理学会　北陸・信越支部　学術講演会
- Place of Presentation
  富山大学
- Year and Date
  2014-11-07 – 2014-11-08
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] ウェットアニール処理によるダイヤモンド MESFET作製
- Author(s)
  中西一浩，南山拓真，宮田大輔，辻裕司, 徳田規夫, 小倉政彦，山崎聡，森本章治, 川江健, 猪熊孝夫
- Organizer
  第28回ダイヤモンドシンポジウム
- Place of Presentation
  東京電機大学
- Year and Date
  2014-11-19 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] ウェットアニール処理による(100)ダイヤモンドの表面ラフネス評価
- Author(s)
  宮田大輔,南山拓真, 徳田規夫，竹内大輔，山崎聡，猪熊孝夫
- Organizer
  第75回応用物理学会秋季講演大会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] OH終端p型(111)ダイヤモンドへのオーミック接触の形成
- Author(s)
  南山拓真，宮田大輔，長南幸直，徳田規夫，小倉政彦，竹内大輔，山崎聡，猪熊孝夫
- Organizer
  平成26年度　応用物理学会　北陸・信越支部　学術講演会
- Place of Presentation
  富山大学
- Year and Date
  2014-11-07 – 2014-11-08
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] ウェットアニールによるダイヤモンド(111)表面のOH終端化
- Author(s)
  宮田大輔, 神谷昇吾, 徳田規夫，牧野俊晴, 竹内大輔，山崎聡，猪熊孝夫
- Organizer
  平成26年度　応用物理学会　北陸・信越支部　学術講演会
- Place of Presentation
  富山大学
- Year and Date
  2014-11-07 – 2014-11-08
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] CVD単結晶ダイヤモンド(100)自立基板の開発
- Author(s)
  渡邊俊介, 森本隆介, 金田大輝,徳田規夫,加藤宙光，梅沢仁，山崎聡, 有屋田修，猪熊孝夫
- Organizer
  平成26年度　応用物理学会　北陸・信越支部　学術講演会
- Place of Presentation
  富山大学
- Year and Date
  2014-11-07 – 2014-11-08
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] Electrical characteristics of boron delta-doped diamond (111) structures
- Author(s)
  T. Minamiyama, N. Tokuda, M. Ogura, S. Yamasaki and T. Inokuma
- Organizer
  12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12)
- Place of Presentation
  Tsukuba, Japan
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] 酸素終端ダイヤモンド(111)表面上ALD-Al2O3膜を用いたp型ダイヤモンドMOSキャパシタの電気的特性
- Author(s)
  上田　諒浩，宮田大輔，徳田規夫，井村将隆，小出康夫，小倉政彦，山崎聡，猪熊孝夫
- Organizer
  第28回ダイヤモンドシンポジウム
- Place of Presentation
  東京電機大学
- Year and Date
  2014-11-19 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] Hydrogen termination of diamond surfaces
- Author(s)
  T. Chonan, N. Tokuda, M. Ogura, S. Yamasaki and T. Inokuma
- Organizer
  12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12)
- Place of Presentation
  Tsukuba, Japan
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] ポストウェットアニール処理を用いたダイヤモンドMESFETの作製
- Author(s)
  中西一浩，南山拓真，宮田大輔，辻裕司, 徳田規夫, 小倉政彦，山崎聡，森本章治, 川江健, 猪熊孝夫
- Organizer
  第75回応用物理学会秋季講演大会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] ホウ素ドープダイヤモンド(100)膜の高速成長
- Author(s)
  金田大輝，渡邊俊介,徳田規夫，小倉政彦，加藤宙光，梅沢仁，山崎聡，有屋田修，猪熊孝夫
- Organizer
  平成26年度　応用物理学会　北陸・信越支部　学術講演会
- Place of Presentation
  富山大学
- Year and Date
  2014-11-07 – 2014-11-08
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] 球型共振器構造MPCVDによるホウ素ドープダイヤモンド膜の高速成長
- Author(s)
  金田大輝，渡邊俊介,徳田規夫，小倉政彦，加藤宙光，梅沢仁，山崎聡，有屋田修，猪熊孝夫
- Organizer
  第28回ダイヤモンドシンポジウム
- Place of Presentation
  東京電機大学
- Year and Date
  2014-11-19 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] ポストウェットアニールによる酸素終端ダイヤモンド(111)表面上のオーミック接触の形成
- Author(s)
  南山拓真，宮田大輔，長南幸直，徳田規夫，小倉政彦，竹内大輔，山崎聡，猪熊孝夫
- Organizer
  第28回ダイヤモンドシンポジウム
- Place of Presentation
  東京電機大学
- Year and Date
  2014-11-19 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] Atomically controlled diamond surfaces and interfaces
- Author(s)
  N. Tokuda, D. Miyata, A. Ueda, T. Chonan, T. Minamiyama, T. Inokuma, M. Imura, Y. Koide, M. Ogura, T. Makino, D. Takeuchi, S. Yamasaki
- Organizer
  2014 International Conference on Diamond and Carbon Materials
- Place of Presentation
  Madrid, Spain
- Year and Date
  2014-09-07 – 2014-09-11
- Invited
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] CVD単結晶ダイヤモンド(100)自立基板の開発
- Author(s)
  渡邊俊介, 森本隆介, 金田大輝,徳田規夫,加藤宙光，梅沢仁，山崎聡, 有屋田修，猪熊孝夫
- Organizer
  平成26年度応用物理学会北陸・信越支部学術講演会
- Place of Presentation
  富山大学
- Year and Date
  2014-11-07 – 2014-11-08
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] 球型共振器構造MPCVDを用いたホウ素ドープダイヤモンド(100)膜のホモエピタキシャル高速成長
- Author(s)
  金田大輝，渡邊俊介,徳田規夫，小倉政彦，加藤宙光，梅沢仁，山崎聡，有屋田修，猪熊孝夫
- Organizer
  第75回応用物理学会秋季講演大会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] 半絶縁性CVDダイヤモンド(111)膜の電気的特性
- Author(s)
  向瀬貴樹，金田大輝，渡邊俊介，森本隆介，徳田規夫，山崎聡，猪熊孝夫
- Organizer
  第75回応用物理学会秋季講演大会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] ウェットアニール処理によるダイヤモンドの表面形態と表面伝導層の評価
- Author(s)
  宮田大輔,南山拓真, 徳田規夫，竹内大輔，山崎聡，猪熊孝夫
- Organizer
  第28回ダイヤモンドシンポジウム
- Place of Presentation
  東京電機大学
- Year and Date
  2014-11-19 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] 超低抵抗率ホウ素δドープダイヤモンド構造
- Author(s)
  南山拓真，徳田規夫，小倉政彦，山崎聡，猪熊孝夫
- Organizer
  平成25年度応用物理学会北陸・信越支部学術講演会
- Place of Presentation
  石川県金沢市
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] ウェットアニールダイヤモンド(111)上ALD-Al2O3膜を用いたMOSキャパシタの電気的特性
- Author(s)
  上田　諒浩，宮田大輔，徳田規夫，井村将隆，小出康夫，小倉政彦，山崎聡，猪熊孝夫
- Organizer
  第75回応用物理学会秋季講演大会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] ポストウェットアニールによるp型(111)ダイヤモンドへのオーミック接触の形成
- Author(s)
  南山拓真，宮田大輔，長南幸直，徳田規夫，小倉政彦，竹内大輔，山崎聡，猪熊孝夫
- Organizer
  第75回応用物理学会秋季講演大会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] Atomically controlled diamond: homoepitaxy, doping, and surface structures
- Author(s)
  Norio Tokuda, Satoshi Yamasaki, Takao Inokuma
- Organizer
  2013 International Conference on Solid State Devices and Materials (SSDM)
- Place of Presentation
  Hilton Fukuoka Sea Hawk, Fukuoka, Japan
- Invited
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] 球型共振器構造MPCVDを用いたダイヤモンド(100)膜のホモエピタキシャル高速成長
- Author(s)
  渡邊俊介, 森本隆介, 金田大輝,徳田規夫,加藤宙光，梅沢仁，山崎聡, 有屋田修，猪熊孝夫
- Organizer
  第75回応用物理学会秋季講演大会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] Atomically flat oxidized diamond (111) surfaces
- Author(s)
  N. Tokuda, S. Kamiya, T. Makino, D. Takeuchi, S. Yamasaki, T. Inokuma
- Organizer
  International Conference on Diamond and Carbon Materials 2013
- Place of Presentation
  Riva del Garda, Italy
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] 球型共振器構造MPCVDを用いたダイヤモンド(111)ホモエピタキシャル高速成長
- Author(s)
  森本隆介，渡邊俊介、矢板潤矢、徳田規夫，小倉政彦、山崎聡、猪熊孝夫
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  京都府京田辺市
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] 異方性エッチングによる原子的平坦なダイヤモンド（111）表面の形成
- Author(s)
  黒島裕貴，徳田規夫,　牧野俊晴，山崎聡，猪熊孝夫
- Organizer
  第28回ダイヤモンドシンポジウム
- Place of Presentation
  東京電機大学
- Year and Date
  2014-11-19 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] 原子的平坦 OH 終端ダイヤモンド (111) 表面の形成
- Author(s)
  宮田大輔，神谷昇吾，徳田規夫，牧野俊晴，竹内大輔，山崎　聡，猪熊孝夫
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  神奈川県相模原市
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] 球型共振器構造MPCVDを用いたダイヤモンド(100)膜のホモエピタキシャル高速成長
- Author(s)
  渡邊俊介, 森本隆介, 金田大輝,徳田規夫,加藤宙光，梅沢仁，山崎聡, 有屋田修，猪熊孝夫
- Organizer
  第75回応用物理学会秋季講演会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-26600096
[Presentation] Boron Delta-doped Diamond Structures
- Author(s)
  Takuma Minamiyama, Norio Tokuda, Masahiko Ogura, Satoshi Yamasaki, and Takao Inokuma
- Organizer
  The 4th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2013)
- Place of Presentation
  Kanazawa, Japan
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] Hydrogen-terminated Diamond (111) Surface by Hydrogen Annealing
- Author(s)
  Tatsuma Chonan, Norio Tokuda, Masahiko Ogura, Satoshi Yamasaki, and Takao Inokuma
- Organizer
  The 4th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2013)
- Place of Presentation
  Kanazawa, Japan
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] グラフェン・オン・ダイヤモンドにおけるダイヤモンド(111)表面の水素終端化
- Author(s)
  長南幸直，徳田規夫, 小倉政彦, 牧野俊晴, 山崎聡, 猪熊孝夫
- Organizer
  第75回応用物理学会秋季講演大会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] ホウ素δ-ドーピングによる電気的特性の改善
- Author(s)
  南山拓真，徳田規夫，小倉政彦、山崎聡、猪熊孝夫
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  京都府京田辺市
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] 水素プラズマ処理による原子的に平坦なダイヤモンド(111)表面の選択的形成
- Author(s)
  黒島裕貴，徳田規夫,　牧野俊晴，山崎聡，猪熊孝夫
- Organizer
  第75回応用物理学会秋季講演大会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-24686074
[Presentation] 超低抵抗率ホウ素δドープダイヤモンド構造
- Author(s)
  南山拓真，徳田規夫，小倉政彦，山崎聡，猪熊孝夫
- Organizer
  第18回（2013年度）北陸・信越支部発表奨励賞授賞式・受賞記念講演会
- Place of Presentation
  富山県富山市
- Invited
- Data Source
  KAKENHI-PROJECT-24686074

1. Mizuochi Norikazu (00323311)

# of Collaborated Projects: 3 results

# of Collaborated Products: 8 results
2. KAWAE Takeshi (30401897)

# of Collaborated Projects: 2 results

# of Collaborated Products: 18 results
3. Kato Hiromitsu (00415655)

# of Collaborated Projects: 2 results

# of Collaborated Products: 15 results
4. Yamasaki Satoshi (80358241)

# of Collaborated Projects: 2 results

# of Collaborated Products: 2 results
5. MORIMOTO Akiharu (60143880)

# of Collaborated Projects: 1 results

# of Collaborated Products: 11 results
6. TAKANO Yoshihiko (10354341)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
7. 大曲新矢 (40712211)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
8. 波多野睦子 (00417007)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 牧野俊晴 (20360258)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. 白川昌宏 (00202119)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. 大木出 (80418574)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
12. 早瀬潤子 (50342746)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 渡邊幸志 (50392684)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 岩本敏 (40359667)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. ITO Shinya

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
16. IMURA Masataka

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
17. 松本翼

# of Collaborated Projects: 0 results

# of Collaborated Products: 3 results
18. 張旭芳

# of Collaborated Projects: 0 results

# of Collaborated Products: 3 results

tokuda norio 徳田 規夫

TOKUDA Norio 徳田 規夫

Research Projects

Research Products

Co-Researchers

Simultaneous imaging of AC magnetic field and temperature using diamond quantum sensor based on electron spin double resonance

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Quantum sensing research by utilizing the quantum state of NV centers in diamond

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Development of diamond power electronicsPrincipal Investigator

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Room temperature quantum simulator of diamond surface nuclear lattice

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Development of innovative synthesis process of ammonia using diamondPrincipal Investigator

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Low-loss vertical-type diamond power MOSFETPrincipal Investigator

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Fabrication of low-loss diamond power FET using giant poralization of ferroelectrics

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Diamond quantum nano-sensor with high sensitivity and high resolution

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Basic study for development of inch-scale diamond wafersPrincipal Investigator

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Control of surface carrier of carbon materials by giant remnant polarization

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Basic study for development of ultra-low loss diamond power devicesPrincipal Investigator

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Large-area formation of atomically flat diamond (111) surface and creation of the functionsPrincipal Investigator

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[Book] Novel Aspects of Diamond (Chapter 1. Homoepitaxial Diamond Growth by Plasma-Enhanced Chemical Vapor Depositionを担当）2014

Author(s)

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tokuda norio 徳田規夫

TOKUDA Norio 徳田規夫