Okabe Takao 岡部貴雄

Researcher Number	80649400
Other IDs
Affiliation (Current)	2025: 東京大学, 生産技術研究所, 特任助教
Affiliation (based on the past Project Information) *help	2022 – 2025: 東京大学, 生産技術研究所, 特任助教 2021: 東京理科大学, 先進工学部電子システム工学科, 助教
Review Section/Research Field	Principal Investigator Basic Section 18040:Machine elements and tribology-related Except Principal Investigator Basic Section 18040:Machine elements and tribology-related / Basic Section 19020:Thermal engineering-related
Keywords	Principal Investigator 流体軸受 / イオン液体 / 蛍光観察 / 高真空 / アウトガス / 冷却 / 半導体製造装置 / 超高真空 Except Principal Investigator 低温 / 真空 … More / イオン液体 / 流体軸受 / 電極 / 燃料電池 Less

半導体露光用高真空対応イオン液体軸受の低温特性の解明
- Principal Investigator
  
  杣谷啓
- Project Period (FY)
  2025 – 2027
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18040:Machine elements and tribology-related
- Research Institution
  Daido University
Elucidation of Ionic Liquid Behavior in Fluid Film Bearing-Clearance in Ultra-High VacuumPrincipal Investigator
- Principal Investigator
  
  岡部貴雄
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18040:Machine elements and tribology-related
- Research Institution
  The University of Tokyo
In operando observation of solid oxide cells under real operating conditions
- Principal Investigator
  
  Shikazono Naoki
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 19020:Thermal engineering-related
- Research Institution
  The University of Tokyo
Investigation on an Outgassing Mechanism of Fluid Lubricated Bearings Using Ionic Liquids for Ultra-High Vacuum CircumstancePrincipal Investigator
- Principal Investigator
  
  岡部貴雄
- Project Period (FY)
  2021 – 2024
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 18040:Machine elements and tribology-related
- Research Institution
  The University of Tokyo
  Tokyo University of Science

All 2023 2022 2021

All Journal Article Presentation Patent

[Journal Article] Direct synthesis of fluoropolymer particles in ionic liquids via the photopolymerization of solid lubricants2023
- Author(s)
  Kobayashi Yuma、Somaya Kei、Miyamoto Junji、Okabe Takao
- Journal Title
  
  Tribology International
  
  Volume: 188 Pages: 108731-108731
- DOI
  10.1016/j.triboint.2023.108731
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K14068
[Journal Article] Development of a Hydrostatic Bearing in High Vacuum Using an Ionic Liquid for a Semiconductor Fabrication Device2023
- Author(s)
  Takao Okabe, Kei Somaya
- Journal Title
  
  Advances in Science and Technology
  
  Volume: 139 Pages: 33-40
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K14068
[Journal Article] Development of ionic liquid circulation system in high-vacuum chamber for semiconductor device fabrication2023
- Author(s)
  Okabe Takao、Somaya Kei
- Journal Title
  
  Vacuum
  
  Volume: 207 Pages: 111562-111562
- DOI
  10.1016/j.vacuum.2022.111562
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K14068
[Journal Article] Development of a Hydrostatic Bearing in High Vacuum Using an Ionic Liquid for a Semiconductor Fabrication Device2023
- Author(s)
  Takao Okabe, Kei Somaya
- Journal Title
  
  Key Engineering Materials
  
  Volume: Special issue of IC3MT2023
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K14068
[Patent] 基板処理装置及び基板保持方法2023
- Inventor(s)
  岡部貴雄　他
- Industrial Property Rights Holder
  岡部貴雄　他
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2023-078693
- Filing Date
  2023
- Data Source
  KAKENHI-PROJECT-21K14068
[Patent] 成膜方法及び成膜装置2023
- Inventor(s)
  岡部貴雄　他
- Industrial Property Rights Holder
  岡部貴雄　他
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2023-078598
- Filing Date
  2023
- Data Source
  KAKENHI-PROJECT-21K14068
[Patent] 潤滑剤の製造方法および潤滑剤2022
- Inventor(s)
  杣谷啓，小林優馬，岡部貴雄
- Industrial Property Rights Holder
  杣谷啓，小林優馬，岡部貴雄
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2022-152419
- Filing Date
  2022
- Data Source
  KAKENHI-PROJECT-21K14068
[Patent] 液体循環システム、基板処理装置及び液体循環方法2021
- Inventor(s)
  岡部貴雄
- Industrial Property Rights Holder
  岡部貴雄
- Industrial Property Rights Type
  特許
- Filing Date
  2021
- Data Source
  KAKENHI-PROJECT-21K14068
[Presentation] Modeling and prediction of Ni dynamic morphology change in patterned Ni/YSZ electrode2023
- Author(s)
  Tao, J., Sciazko, A., Onishi, J., Ouyang, Z., Komatsu, Y., Yao, G., Okabe, T. and Shikazono, N.
- Organizer
  第32回SOFC研究発表会
- Data Source
  KAKENHI-PROJECT-21H01258
[Presentation] Lubrication Properties of Ionic Liquid with Polymer Particles Dispersing2022
- Author(s)
  Yuma Kobayashi, Kei Somaya, Takao Okabe
- Organizer
  7th World Tribology Congress (WTC 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K14068
[Presentation] Semiconductor Wafer Floating System for High Vacuum Chamber Using an Ionic Liquid2022
- Author(s)
  Okabe Takao
- Organizer
  The 7th World Tribology Congress (WTC2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K14068
[Presentation] イオン液体を用いた非接触単極モータを搭載した真空対応スピンドルの開発2022
- Author(s)
  杣谷啓, 小林優馬, 岡部貴雄
- Organizer
  日本設計工学会 2022年度秋季大会研究発表講演会
- Data Source
  KAKENHI-PROJECT-21K14068
[Presentation] Development of an ionic liquid circulation system in a high-vacuum chamber2022
- Author(s)
  Takao Okabe, Kei Somaya
- Organizer
  2022 International Conference on Machining, Materials and Mechanical Technologies (IC3MT2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K14068
[Presentation] 高真空対応の流体潤滑機構（イオン液体を用いた半導体製造装置用高真空対応流体軸受機構）2022
- Author(s)
  岡部貴雄, 杣谷啓
- Organizer
  日本設計工学会 2022年度秋季大会研究発表講演会
- Data Source
  KAKENHI-PROJECT-21K14068
[Presentation] Development of an ionic liquid circulation system in a high-vacuum chamber2022
- Author(s)
  Okabe Takao
- Organizer
  International Conference on Machining, Materials and Mechanical Technologies 2022 (IC3MT 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K14068
[Presentation] Semiconductor Wafer Floating System for High Vacuum Chamber Using an Ionic Liquid2022
- Author(s)
  Takao Okabe, Kei Somaya
- Organizer
  7th World Tribology Congress (WTC 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K14068
[Presentation] Lubrication Properties of Ionic Liquid with SUS304 Particle Dispersing by Plasma Sputtering Deposition2022
- Author(s)
  Kei Somaya, Junji Miyamoto, Yuma Kobayashi, Takao Okabe
- Organizer
  7th World Tribology Congress (WTC 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K14068
[Presentation] イオン液体を用いた高真空用流体潤滑軸受機構2021
- Author(s)
  岡部貴雄
- Organizer
  日本機械学会機素潤滑設計部門講演会
- Data Source
  KAKENHI-PROJECT-21K14068

1. Shikazono Naoki (30345087)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
2. 谷口淳 (40318225)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
3. 杣谷啓 (70581429)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. 宮本潤示 (50713046)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Okabe Takao 岡部 貴雄

Research Projects

Research Products

Co-Researchers

半導体露光用高真空対応イオン液体軸受の低温特性の解明

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Elucidation of Ionic Liquid Behavior in Fluid Film Bearing-Clearance in Ultra-High VacuumPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

In operando observation of solid oxide cells under real operating conditions

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Investigation on an Outgassing Mechanism of Fluid Lubricated Bearings Using Ionic Liquids for Ultra-High Vacuum CircumstancePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

[Journal Article] Direct synthesis of fluoropolymer particles in ionic liquids via the photopolymerization of solid lubricants2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Development of a Hydrostatic Bearing in High Vacuum Using an Ionic Liquid for a Semiconductor Fabrication Device2023

Author(s)

Journal Title

Data Source

[Journal Article] Development of ionic liquid circulation system in high-vacuum chamber for semiconductor device fabrication2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Development of a Hydrostatic Bearing in High Vacuum Using an Ionic Liquid for a Semiconductor Fabrication Device2023

Author(s)

Journal Title

Data Source

[Patent] 基板処理装置及び基板保持方法2023

Inventor(s)

Industrial Property Rights Holder

Industrial Property Rights Type

Industrial Property Number

Filing Date

Data Source

[Patent] 成膜方法及び成膜装置2023

Inventor(s)

Industrial Property Rights Holder

Industrial Property Rights Type

Industrial Property Number

Filing Date

Data Source

[Patent] 潤滑剤の製造方法および潤滑剤2022

Inventor(s)

Industrial Property Rights Holder

Industrial Property Rights Type

Industrial Property Number

Filing Date

Data Source

[Patent] 液体循環システム、基板処理装置及び液体循環方法2021

Inventor(s)

Industrial Property Rights Holder

Industrial Property Rights Type

Filing Date

Data Source

[Presentation] Modeling and prediction of Ni dynamic morphology change in patterned Ni/YSZ electrode2023

Author(s)

Organizer

Data Source

[Presentation] Lubrication Properties of Ionic Liquid with Polymer Particles Dispersing2022

Author(s)

Organizer

Okabe Takao 岡部貴雄