SUZUKI Haruka 鈴木陽香

Researcher Number	80779356
Other IDs
Affiliation (Current)	2023: 名古屋大学, 工学研究科, 講師
Affiliation (based on the past Project Information) *help	2021 – 2022: 名古屋大学, 工学研究科, 講師 2016 – 2020: 名古屋大学, 工学研究科, 助教
Review Section/Research Field	Principal Investigator Basic Section 14030:Applied plasma science-related / Plasma electronics Except Principal Investigator Plasma electronics / Basic Section 14030:Applied plasma science-related
Keywords	Principal Investigator 大気圧プラズマ / 大気圧マイクロ波プラズマ / 水蒸気プラズマ / 大気遮蔽 / アッシング / マイクロ波 / マイクロ波放電 / マイクロ波プラズマ / 表面プロセス / 電子温度 … More / パルスプラズマ / プラズマ電位 / プロセスプラズマ / シース / 誘導結合型プラズマ … More Except Principal Investigator マイクロ波プラズマ / 大気圧プラズマ / プラズマ加工 / プラズマCVD / 廃棄物処理 / 弱減圧プラズマ Less

気体流および液体流を用いた弱減圧マイクロ波プラズマ生成と応用
- Principal Investigator
  
  豊田浩孝
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Nagoya University
高周波プロセスプラズマにおいて真空容器壁面の状態がプラズマに与える影響の評価Principal Investigator
- Principal Investigator
  
  鈴木陽香
- Project Period (FY)
  2021 – 2022
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Nagoya University
Development of electron temperature control technique for atmospheric pressure microwave plasma to promote radical productionPrincipal Investigator
- Principal Investigator
  
  Suzuki Haruka
- Project Period (FY)
  2018 – 2020
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Nagoya University
Atmospheric-pressure plasma process using high-density and high-purity water-derived reactive species produced by a water-vapor microwave plasmaPrincipal Investigator
- Principal Investigator
  
  SUZUKI Haruka
- Project Period (FY)
  2016 – 2017
- Research Category
  
  Grant-in-Aid for Research Activity Start-up
- Research Field
  
  Plasma electronics
- Research Institution
  Nagoya University
Wide range radical production by atmospheric pressure microwave plasma with molecular gas and applications
- Principal Investigator
  
  Toyoda Hirotaka
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma electronics
- Research Institution
  Nagoya University

All 2022 2021 2020 2019 2018 2017 2016

All Journal Article Presentation

[Journal Article] Spatial Uniformity Evaluation of Atmospheric-Pressure Microwave Line Plasma for Wide-Area Surface Treatment2021
- Author(s)
  Haruka Suzuki, Hirotsugu Koma, Tomohiro Ogasawara, Yosuke Koike, Hirotaka Toyoda
- Journal Title
  
  Plasma and Fusion Research
  
  Volume: 16 Issue: 0 Pages: 1406046-1406046
- DOI
  10.1585/pfr.16.1406046
- NAID
  130008033373
- ISSN
  1880-6821
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18K13531
[Journal Article] 大気圧マイクロ波放電による高密度長尺ラインプラズマ2019
- Author(s)
  豊田浩孝、鈴木陽香
- Journal Title
  
  応用物理
  
  Volume: Vol.88No.2 Pages: 101-104
- NAID
  130007709464
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H03893
[Journal Article] Production of atmospheric pressure microwave plasma with dielectric half-mirror resonator and its application to polymer surface treatment2018
- Author(s)
  Kensuke Sasai, Kazuki Keyamura, Haruka Suzuki, and Hirotaka Toyoda
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: Vol.57No.6
- NAID
  210000149131
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H03893
[Journal Article] Atmospheric pressure water-vapor plasma in an air-shielded environment by water flow2018
- Author(s)
  Hikaru Senba, Haruka Suzuki and Hirotaka Toyoda
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: Vol.58No.SA
- NAID
  210000135214
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H03893
[Journal Article] Enhancement of liquid treatment efficiency by microwave plasma under flow-induced reduced pressure2017
- Author(s)
  Haruka Suzuki1and Hirotaka Toyoda
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 56 Issue: 2 Pages: 026201-026201
- DOI
  10.7567/jjap.56.026201
- NAID
  210000148431
- ISSN
  0021-4922, 1347-4065
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] RF Voltage Division of in RF-biased High-density Plasma with Floating Liner2022
- Author(s)
  Yukinori Chiba, Manabu Kyuzo, Haruka Suzuki, Hirotaka Toyoda
- Organizer
  ISPlasma2022/IC-PLANTS2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K13907
[Presentation] Influence of small grounded surface on plasma property in an inductively-coupled plasma with floating liner2021
- Author(s)
  Manabu Kyuzo, Yukinori Chiba, Haruka Suzuki, and Hirotaka Toyoda
- Organizer
  42nd International Symposium on DryProcess
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K13907
[Presentation] Influence of metal exposure on the plasma potential in RF-biased high-density plasma with floating liner2021
- Author(s)
  Yukinori Chiba, Manabu Kyuzo, Haruka Suzuki and Hirotaka Toyoda
- Organizer
  The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology(APSPT-12)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K13907
[Presentation] Ashing Treatment of Polyimide Film by Atmospheric-pressure Microwave Line Plasma with Ar/O22021
- Author(s)
  Haruka Suzuki, Tomohiro Ogasawara, Yuki Iwata, Hirotaka Toyoda
- Organizer
  ISPlasma2021/IC-PLANTS2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] パルスマイクロ波励起大気圧酸素添加アルゴンプラズマによる広幅アッシング処理2021
- Author(s)
  小笠原知裕, 岩田悠揮, 鈴木陽香, 豊田浩孝
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] Heat flux evaluation of the atmospheric pressure microwave line plasma from spatio-temporal temperature measurement of the slot-plate2020
- Author(s)
  Manh Hung Chu, Haruka Suzuki, Hirotaka Toyoda
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] Film Surface Treatment with O2/Ar Line Plasma under Atmospheric Pressure2020
- Author(s)
  Haruka Suzuki, Hirotsugu Koma, Tomohiro Ogasawara, Manh Hung Chu, Hirotaka Toyoda
- Organizer
  The 73rd Annual Gaseous Electronics Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] Temperature measurement of slot-plate in an atmospheric-pressure microwave linear plasma2020
- Author(s)
  Manh Hung Chu, Haruka Suzuki, Hirotaka Toyoda
- Organizer
  ISPlasma/IC-PLANTS2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] 大気圧長尺マイクロ波ラインプラズマによる表面親水化処理2020
- Author(s)
  小笠原知裕, 小間浩嗣, 鈴木陽香, 本田剛, 豊田浩孝
- Organizer
  令和2年度電気・電子・情報関係学会東海支部連合大会
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] 大気圧マイクロ波プラズマの大面積かつ高速表面処理への応用2020
- Author(s)
  鈴木陽香, 小笠原知裕, Chu Manh Hung, 岩田悠揮, 豊田浩孝
- Organizer
  プラズマ・核融合学会　第37回年会
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] メートル級長尺スロット型プラズマ源における大気圧マイクロ波プラズマの顕微計測2019
- Author(s)
  小間　浩嗣、小池　洋右、鈴木　陽香、豊田　浩孝、
- Organizer
  SPP-36/SPMS-32、第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] シミュレーションを援用した大気圧マイクロ波プラズマ源の非対称断面導波管内電磁界分布の解析2019
- Author(s)
  Chu Manh Hung, 鈴木陽香, 豊田浩孝
- Organizer
  第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] シミュレーションを援用した大気圧マイクロ波プラズマ源の非対称断面導波管内電磁界分布の解析 A Systematic Analysis of Modified Waveguide Structure for Atmospheric-Pressure Microwave Plasma Source via Simulations2019
- Author(s)
  チュー　マン・フン、鈴木　陽香、豊田　浩孝
- Organizer
  SPP-36/SPMS-32、第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Time-resolved Measurement of Cross-Sectional Structure of a Narrow Gap Plasma Produced by an Atmospheric Pressure Microwave Discharge2019
- Author(s)
  Yoshiki Baba, Haruka Suzuki and Hirotaka Toyoda
- Organizer
  ISPlasma/IC-PLANTS2019,Nagoya Institute of Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Optimized waveguide structure for atmospheric pressure microwave plasma2019
- Author(s)
  Manh Hung Chu,Haruka Suzuki ,Hirotaka Toyoda
- Organizer
  ISPlasma/IC-PLANTS2019,Nagoya Institute of Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Large-area surface treatment using microwave plasma excited in meter-length slot with sub-millimeter gap2019
- Author(s)
  Haruka Suzuki, Hirotsugu Koma, Manh Hung Chu, Hansin Bae, Yoshiki Baba, Hirotaka Toyoda
- Organizer
  The 10th of International Workshop on Microplasmas　（IWM-10）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] Microscopic Measurement of Long Microwave Plasma at Atmospheric Pressure2019
- Author(s)
  Hirotsugu Koma, Yosuke Koike, Haruka Suzuki,Hirotaka Toyoda
- Organizer
  ISPlasma/IC-PLANTS2019,Nagoya Institute of Technolog
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Oxygen Radical Measurement of Atmospheric Pressure Microwavw Line Plasma by Vacuum Uｌtraviolet Absorption Spectroscop2019
- Author(s)
  Hansin Bae, Koike Yosuke, Hirotsugu Koma, Haruka Suzuki Hirotaka Toyoda
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] スロット型大気圧マイクロ波プラズマの時空間分解計測2019
- Author(s)
  馬場賀己，鈴木陽香，豊田浩孝
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Time-resolved microscopic measurement of cross-sectional structure of slot excited atmospheric pressure microwave plasma スロット励起大気圧マイクロ波プラズマの断面構造の時分解顕微観測2019
- Author(s)
  Yoshiki Baba, Haruka Suzuki, Hirotaka Toyoda 馬場賀己, 鈴木陽香, 豊田浩孝
- Organizer
  SPP-36/SPMS-32、第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Time-resolved Measurement of Pulsed-microwave Excited Atmospheric-pressure Long-scale Slot Plasma2019
- Author(s)
  チューマンフン，鈴木陽香，豊田浩孝
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] Oxygen radical measurement of atmospheric pressure microwave plasma employing vacuum ultraviolet absorption spectroscopy2019
- Author(s)
  Hansin Bae, Koike Yosuke, Hirotsugu Koma, Haruka Suzuki Hirotaka Toyoda
- Organizer
  ISPlasma/IC-PLANTS2019,Nagoya Institute of Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Optimized waveguide structure for atmospheric pressure microwave plasma2019
- Author(s)
  Manh Hung Chu, Haruka Suzuki, Hirotaka Toyoda
- Organizer
  11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] 大気圧長尺マイクロ波プラズマによる大面積高速表面処理2019
- Author(s)
  小間浩嗣，杉山敦士，鈴木陽香，本田剛，豊田浩
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] メートル級長尺大気圧マイクロ波プラズマの顕微計測2018
- Author(s)
  鈴木陽香、小池洋右、小間浩嗣、馬場賀己、豊田浩孝
- Organizer
  応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Optimal design of atmospheric-pressure plasma source for industrial application2018
- Author(s)
  Haruka Suzuki
- Organizer
  The 40th International Symposium on Dry Process
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Long-scale atmospheric-pressure microwave plasma -production mechanism and its application-2018
- Author(s)
  H. Toyoda, H. Suzuki Y. Koike, H. Koma, Y. Baba, J.H. Qiu, M.H. Chu, A. Sugiyama
- Organizer
  JAPAN-RUB Workshop on Plasma Science
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Water-vapor Atmospheric Pressure Microwave Plasma in an Air-Shielded Environment by Water Flow2018
- Author(s)
  Haruka Suzuki, Hikaru Senba, Hirotaka Toyoda
- Organizer
  ISPlasma2018/IC-PLANTS2018
- Data Source
  KAKENHI-PROJECT-16H06859
[Presentation] スロット励起大気圧マイクロ波プラズマにおけるスロット断面構造の顕微観測2018
- Author(s)
  馬場賀己,　鈴木陽香,豊田浩孝
- Organizer
  平成30年度電気・電子・情報関係学会東海支部連合大会講演論文集
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] スロット励起マイクロ波プラズマを用いた水蒸気プラズマ処理プロセス/Water Vapor Plasma Treatment Process using Slot-Excited Microwave Plasma2018
- Author(s)
  鈴木陽香、豊田浩孝
- Organizer
  第28回日本MRS年次大会, 28th Annual Meeting of MRS-Japan 2018
- Invited
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 大気圧長尺マイクロ波プラズマにおける電力吸収の空間分布2018
- Author(s)
  小池洋右，田村宥人，鈴木陽香，豊田浩孝
- Organizer
  第65回応用物理学会春季学術講演会講演
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 大面積かつ高速表面処理のための大気圧プラズマ装置開発2018
- Author(s)
  鈴木　陽香
- Organizer
  最先端プラズマプロセス：未来への挑戦ー産官学連携による新たなイノベーションー
- Invited
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 大気圧下でのメートル級マイクロ波プラズマの生成と応用2018
- Author(s)
  鈴木陽香、豊田浩孝
- Organizer
  プラズマ核融合学会第35回年会
- Invited
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Scaling of Microwave Absorption in Atmospheric Pressure Microwave Line Plasma2018
- Author(s)
  Ivan Ganachev, Haruka Suzuki, and Hirotaka Toyoda
- Organizer
  The Eighteenth Biennial IEEE Conference on Electromagnetic Field Computation (CEFC2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Ring-shaped microwave plasma production in liquid flow environment for nanoparticle synthesis2018
- Author(s)
  S. Fujimura, S. Yang, K. Sasai, H. Suzuki and H. Toyoda
- Organizer
  The 40th International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 新規大気圧マイクロ波プラズマ源の開発と応用2018
- Author(s)
  鈴木陽香
- Organizer
  高機能トライボ表面プロセス部会第12回例会「トライボロジーと表面技術」
- Invited
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 大気圧マイクロ波ラインプラズマにおける酸素原子の紫外吸収分光計測2018
- Author(s)
  BAE Hansin，小池洋右，小間浩嗣，鈴木陽香，豊田浩孝
- Organizer
  プラズマ核融合学会第35回年会
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 大気圧下でのメートル級マイクロ波プラズマの生成と応用2018
- Author(s)
  鈴木陽香、豊田浩孝
- Organizer
  第35回プラズマ・核融合学会年会
- Invited
- Data Source
  KAKENHI-PROJECT-18K13531
[Presentation] Observation of cross sectional plasma structure in a gap of an atmospheric pressure microwave discharge2018
- Author(s)
  Hirotaka Toyoda Yoshiki Baba Haruka Suzuki
- Organizer
  71st Annual Gaseous Electronics Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Power Absorption Mechanism of Atmospheric-Pressure Microwave Line Plasma2018
- Author(s)
  Haruka Suzuki, Yosuke Koike, Yuto Tamura, Yoshiki Baba and Hirotaka Toyoda
- Organizer
  ISPlasma2018 / IC-PLANTS2018
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] High speed photoresist removal using slot-excited atmospheric-pressure microwave O2/CF4 plasma2018
- Author(s)
  Shota Ishikaw, Haruka Suzuki, Tsuyoshi Honda and Hirotaka Toyoda
- Organizer
  The 40th International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 大気圧メートル級長尺マイクロ波ラインプラズマの顕微計測2018
- Author(s)
  小間　浩嗣、小池　洋右、鈴木　陽香、豊田　浩孝
- Organizer
  平成30年度電気・電子・情報関係学会東海支部連合大会講演論文集
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 電磁界シミュレーションを用いた大気圧長尺マイクロ波プラズマにおける定在波抑制2018
- Author(s)
  小池洋右、小間浩嗣、鈴木陽香、豊田浩孝
- Organizer
  応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Space-Resolved Measurement of Microwave Power along Waveguide in Atmospheric Pressure Microwave Line Plasma2018
- Author(s)
  Yosuke Koike, Haruka Suzuki, Yuto Tamura, Yoshiki Baba and Hirotaka Toyoda
- Organizer
  ISPlasma2018 / IC-PLANTS2018
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 改良導波管および連続発振マイクロ波電力によるメートル級長尺大気圧ラインプラズマの効率的生成2017
- Author(s)
  鈴木陽香，田村宥人，猪俣弥雄起, 伊藤仁，関根誠，堀勝，豊田浩孝
- Organizer
  第34回プラズマプロセシング研究会／第29回プラズマ材料科学シンポジウム
- Place of Presentation
  北海道大学（北海道・札幌市）
- Year and Date
  2017-01-17
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 水流により遮蔽された空間での大気圧プラズマジェット生成2017
- Author(s)
  仙波輝 , 小池洋右 , 鈴木陽香 , 豊田浩孝
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜, 横浜, 日本
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16H06859
[Presentation] Long-scale N2 line plasma production under atmospheric pressure2017
- Author(s)
  Haruka Suzuki, Yuto Tamura, Yaoki Inomata, Hitoshi Itoh, Makoto Sekine, Masaru Hori, and Hirotaka Toyoda
- Organizer
  9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
- Place of Presentation
  中部大学（愛知県・春日井市）
- Year and Date
  2017-03-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 大気圧マイクロ波プラズマCVDによるSiO2膜形成及び膜評価2017
- Author(s)
  石川翔太、鈴木陽香、豊田浩孝
- Organizer
  Plasma Conference 2017
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 長尺ラインプラズマ生成のための改良型導波管の電磁界シミュレーション2017
- Author(s)
  田村宥人，鈴木陽香，猪俣弥雄起, 伊藤仁，関根誠，堀勝，豊田浩孝
- Organizer
  第34回プラズマプロセシング研究会／第29回プラズマ材料科学シンポジウム
- Place of Presentation
  北海道大学（北海道・札幌市）
- Year and Date
  2017-01-16
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Power Absorption Mechanism of Atmospheric Microwave Line Plasma2017
- Author(s)
  H. Suzuki, Y. Koike, Y. Tamura, Y. Baba, and H. Toyoda
- Organizer
  DPS2017
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 高速表面処理に向けた新しい大気圧プラズマ源の開発2017
- Author(s)
  鈴木陽香
- Organizer
  プラズマ材料科学153委員会 30周年記念講演会
- Invited
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Improvement of SiO2 film properties synthesized by plasma-enhanced chemical vapor deposition using slot-type microwave plasma with O 2/TEOS2017
- Author(s)
  S. Ishikawa , M. Yamamoto, H. Suzuki, and H. Toyoda
- Organizer
  IUMRS-ICAM 2017
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Microwave plasma production inside the micro-gap with metergap with meter -scale length2017
- Author(s)
  H. Suzuki and H. Toyoda
- Organizer
  IWM 2017
- Invited
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] マイクロ波励起長尺大気圧プラズマにおけるプラズマ維持機構の検討2017
- Author(s)
  田村宥人，猪俣弥雄起 , 鈴木陽香 , 豊田浩孝
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県・横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] スロット励起大気圧マイクロ波プラズの電力消費に関する電磁界シミュレーョン2017
- Author(s)
  鈴木陽香，小池洋右 , 田村宥人 , 馬場賀己 , 豊田浩孝
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 水流により遮蔽された空間での大気圧プラズマジェット生成2017
- Author(s)
  仙波輝 , 小池洋右 , 鈴木陽香 , 豊田浩孝
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県・横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Shielding of plasma jets from ambient air by water flow certain2017
- Author(s)
  Hikaru Senba, Yosuke Koike, Haruka Suzuki and Hirotaka Toyoda
- Organizer
  9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
- Place of Presentation
  CHUBU UNIVERSITY, Aichi, Japan
- Year and Date
  2017-03-01
- Data Source
  KAKENHI-PROJECT-16H06859
[Presentation] Meter -scale microwave plasma production with various discharge gases for large-area surface treatment under atmospheric pressure2017
- Author(s)
  H. Suzuki, Y. Tamura, Y. Inomata, and H. Toyoda
- Organizer
  IUMRS-ICAM 2017
- Invited
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] インラインマイクロ波プラズマ処理の高流速化による有機物分解効率の向上2017
- Author(s)
  堤和紀，滝藤奨，藤村昇平, 伊藤美智子，高島成剛，鈴木陽香，豊田浩孝
- Organizer
  第34回プラズマプロセシング研究会／第29回プラズマ材料科学シンポジウム（合同会議）
- Place of Presentation
  北海道大学, 札幌, 日本
- Year and Date
  2017-01-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06859
[Presentation] 電磁界シミュレーションを用いた大気圧マイクロ波ラインプラズマの均一性向上の検討2017
- Author(s)
  小池洋右、田村宥人、鈴木陽香、豊田浩孝
- Organizer
  Plasma Conference 2017
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Film quality improvement in slot-type microwave plasma CVD of SiO22017
- Author(s)
  Masaki Yamamoto, Shota Ishikawa, Haruka Suzuki, and Hirotaka Toyoda
- Organizer
  9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
- Place of Presentation
  中部大学（愛知県・春日井市）
- Year and Date
  2017-03-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Development of atmospheric pressure microwave plasma source for large-area surface treatment2017
- Author(s)
  H. Suzuki and H. Toyoda
- Organizer
  The 22th KJ workshop
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 水流遮蔽水蒸気マイクロ波プラズマの生成とその応用2017
- Author(s)
  鈴木陽香, 仙波輝, 豊田浩孝
- Organizer
  Plasma Conference 2017
- Data Source
  KAKENHI-PROJECT-16H06859
[Presentation] 大気圧マイクロ波ラインプラズマにおける電力吸収機構2017
- Author(s)
  田村宥人，小池洋右 , 鈴木陽香 , 豊田浩孝
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] マイクロ波励起メートル級大気圧プラズマの生成とその特性2017
- Author(s)
  鈴木陽香，田村宥人，猪俣弥雄起，関根誠，堀勝，豊田浩孝
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県・横浜市）
- Year and Date
  2017-03-17
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 高速表面処理に向けた新しい大気圧プラズマ源の開発2017
- Author(s)
  鈴木陽香
- Organizer
  プラズマ材料科学第153委員会 30周年記念講演会
- Invited
- Data Source
  KAKENHI-PROJECT-16H06859
[Presentation] Power absorption of atmospheric-pressure microwave-line-plasma2017
- Author(s)
  HIROTAKA TOYODA, HARUKA SUZUKI, YUTO TAMURA, YOSUKE KOIKE, YOSHIKI BABA
- Organizer
  GEC2017
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] スロット励起大気圧マイクロ波プラズマCVDによるSiO2薄膜形成2017
- Author(s)
  石川翔太，鈴木陽香，豊田浩孝
- Organizer
  平成29年度電気・電子・情報関係学会東海支部連合大会
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] マイクロ波インライン液体処理における反応領域の空間分布計測2017
- Author(s)
  堤和紀，滝藤奨，藤村昇平, 鈴木陽香，豊田浩孝
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜, 横浜, 日本
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16H06859
[Presentation] スロット励起大気圧マイクロ波プラズマにおける消費電力シミュレーション2017
- Author(s)
  小池洋右，田村宥人，馬場賀己，鈴木陽香，豊田浩孝
- Organizer
  平成29年度電気・電子・情報関係学会東海支部連合大会
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Optical measurement of meter-scale microwave line plasma under atmospheric pressure2017
- Author(s)
  H. Suzuki, Y. Tamura, Y. Inomata, and H. Toyoda
- Organizer
  ICPIG 2017
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 水流により遮蔽された空間での水蒸気マイクロ波プラズマ生成2017
- Author(s)
  仙波輝, 小池洋右, 鈴木陽香, 豊田浩孝
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H06859
[Presentation] Improvement of Liquid Treatment Efficiency using Microwave In-Line Plasma System with Narrow Flow Path2016
- Author(s)
  Haruka Suzuki, Sho Takitou, Hirotaka Toyoda
- Organizer
  The 6th International Conference on Microelectronics and Plasma Technology (ICMAP2016)
- Place of Presentation
  Dream Center, Gyeongju, Korea
- Year and Date
  2016-09-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06859
[Presentation] 窒素ガスを用いたマイクロ波大気圧ラインプラズマの生成2016
- Author(s)
  田村宥人，鈴木陽香，伊藤仁，関根誠，堀勝，豊田浩孝
- Organizer
  平成28年度電気・電子・情報関係学会東海支部連合大会
- Place of Presentation
  豊田工業高等専門学校
- Year and Date
  2016-09-03
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] High speed deposition of SiO2 lm by slot-type microwave CVD system2016
- Author(s)
  HIROTAKA TOYODA, MASAKI YAMAMOTO, HARUKA SUZUKI
- Organizer
  69th Annual Gaseous Electronics Conference
- Place of Presentation
  Bochum (Germany)
- Year and Date
  2016-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] High-speed -camera observation of plasma behavior in atmospheric-pressure microwave line plasma2016
- Author(s)
  H. Suzuki, H. Ito, M. Sekine, M. Hori, H. Toyoda
- Organizer
  7th International Workshop on Plasma Spectroscopy
- Place of Presentation
  名鉄犬山ホテル（愛知県・犬山市）
- Year and Date
  2016-06-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 改良型導波管構造によるマイクロ波励起純窒素大気圧ラインプラズマの生成2016
- Author(s)
  鈴木陽香，田村宥人，伊藤仁，関根誠，堀勝，豊田浩孝
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ（新潟県・新潟市）
- Year and Date
  2016-09-15
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] O2/TEOS スロット型マイクロ波プラズマCVD によるSiO2 膜形成2016
- Author(s)
  山本匡毅、鈴木陽香、豊田浩孝
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ（新潟県・新潟市）
- Year and Date
  2016-09-16
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] 100% N2 atmospheric-pressure microwave-line-plasma production with a modi ed waveguide structure2016
- Author(s)
  HARUKA SUZUKI, YUTO TAMURA, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI, HIROTAKA TOYODA
- Organizer
  69th Annual Gaseous Electronics Conference
- Place of Presentation
  Bochum (Germany)
- Year and Date
  2016-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893
[Presentation] Plasma -enhanced chemical vapor deposition of SiO2 films by slot type microwave plasma with O2/TEOS2016
- Author(s)
  Haruka Suzuki, Masaki Yamamoto, and Hirotaka Toyoda
- Organizer
  The 38th International Symposium on Dry Process
- Place of Presentation
  北海道大学（北海道・札幌市）
- Year and Date
  2016-11-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03893

1. Toyoda Hirotaka (70207653)

# of Collaborated Projects: 2 results

# of Collaborated Products: 56 results
2. SENBA Hikaru

# of Collaborated Projects: 1 results

# of Collaborated Products: 5 results
3. Tamura Yuto

# of Collaborated Projects: 1 results

# of Collaborated Products: 19 results
4. Yamamoto Masaki

# of Collaborated Projects: 1 results

# of Collaborated Products: 5 results
5. Inomata Yaoki

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
6. Koike Yusuke

# of Collaborated Projects: 1 results

# of Collaborated Products: 19 results
7. Baba Hiroki

# of Collaborated Projects: 1 results

# of Collaborated Products: 13 results
8. Ishikawa Shota

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results

SUZUKI Haruka 鈴木 陽香

Research Projects

Research Products

Co-Researchers

気体流および液体流を用いた弱減圧マイクロ波プラズマ生成と応用

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

高周波プロセスプラズマにおいて真空容器壁面の状態がプラズマに与える影響の評価Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of electron temperature control technique for atmospheric pressure microwave plasma to promote radical productionPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Atmospheric-pressure plasma process using high-density and high-purity water-derived reactive species produced by a water-vapor microwave plasmaPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Wide range radical production by atmospheric pressure microwave plasma with molecular gas and applications

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Spatial Uniformity Evaluation of Atmospheric-Pressure Microwave Line Plasma for Wide-Area Surface Treatment2021

Author(s)

Journal Title

DOI

NAID

ISSN

Language

Data Source

[Journal Article] 大気圧マイクロ波放電による高密度長尺ラインプラズマ2019

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Production of atmospheric pressure microwave plasma with dielectric half-mirror resonator and its application to polymer surface treatment2018

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Atmospheric pressure water-vapor plasma in an air-shielded environment by water flow2018

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Enhancement of liquid treatment efficiency by microwave plasma under flow-induced reduced pressure2017

Author(s)

Journal Title

DOI

NAID

ISSN

Data Source

[Presentation] RF Voltage Division of in RF-biased High-density Plasma with Floating Liner2022

Author(s)

Organizer

Data Source

[Presentation] Influence of small grounded surface on plasma property in an inductively-coupled plasma with floating liner2021

Author(s)

Organizer

Data Source

[Presentation] Influence of metal exposure on the plasma potential in RF-biased high-density plasma with floating liner2021

Author(s)

Organizer

Data Source

[Presentation] Ashing Treatment of Polyimide Film by Atmospheric-pressure Microwave Line Plasma with Ar/O22021

Author(s)

Organizer

Data Source

SUZUKI Haruka 鈴木陽香

[Presentation] メートル級長尺スロット型プラズマ源における大気圧マイクロ波プラズマの顕微計測2019