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Anggraini SriAyu  Anggraini SriAyu

ORCIDConnect your ORCID iD *help
Researcher Number 80784123
Other IDs
Affiliation (Current) 2023: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員
Affiliation (based on the past Project Information) *help 2021: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究員
Review Section/Research Field
Principal Investigator
Basic Section 21050:Electric and electronic materials-related
Keywords
Principal Investigator
piezoelectric / thin films / nitride / ScAlN / polarity / defect / sputtering / vacancy / Piezoelectricity / aluminum nitride / polarity inversion / scandium / thin film
  • Research Projects

    (1 results)
  • Research Products

    (3 results)
  •  Controlling the polarity of ScAlN via formation of cation/anion vacancyPrincipal Investigator

    • Principal Investigator
      Anggraini SriAyu
    • Project Period (FY)
      2021 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 21050:Electric and electronic materials-related
    • Research Institution
      National Institute of Advanced Industrial Science and Technology

All 2021

All Presentation Patent

  • [Patent] 窒化物材料およびそれからなる圧電体並びにその圧電体を用いたMEMSデバイス、トランジスタ、インバーター、トランスデューサー、SAWデバイスおよび強誘電体メモリ2021

    • Inventor(s)
      S.A. Anggraini et al
    • Industrial Property Rights Holder
      国立研究開発法人産業技術総合研究所
    • Industrial Property Rights Type
      特許
    • Filing Date
      2021
    • Overseas
    • Data Source
      KAKENHI-PROJECT-21K04168
  • [Presentation] Inversing the polarity of scandium aluminum nitride (ScAlN) piezoelectric thin films by using Si addition2021

    • Author(s)
      Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
    • Organizer
      MRS Fall Meeting 2021
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21K04168
  • [Presentation] Polarity inversion of scandium aluminum nitride (ScAlN) piezoelectric thin films by using Ge addition2021

    • Author(s)
      Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
    • Organizer
      The 82rd JSAP Autumn Meeting 2021
    • Data Source
      KAKENHI-PROJECT-21K04168

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