Anggraini SriAyu ＡｎｇｇｒａｉｎｉＳｒｉＡｙｕ

ORCID

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Researcher Number	80784123
Other IDs
Affiliation (Current)	2023: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員
Affiliation (based on the past Project Information) *help	2021: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究員
Review Section/Research Field	Principal Investigator Basic Section 21050:Electric and electronic materials-related
Keywords	Principal Investigator piezoelectric / thin films / nitride / ScAlN / polarity / defect / sputtering / vacancy / Piezoelectricity / aluminum nitride / polarity inversion / scandium / thin film

Research Projects
(1 results)
Research Products
(3 results)

Controlling the polarity of ScAlN via formation of cation/anion vacancyPrincipal Investigator
- Principal Investigator
  
  Anggraini SriAyu
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21050:Electric and electronic materials-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology

All Presentation Patent

[Patent] 窒化物材料およびそれからなる圧電体並びにその圧電体を用いたＭＥＭＳデバイス、トランジスタ、インバーター、トランスデューサー、ＳＡＷデバイスおよび強誘電体メモリ2021
- Inventor(s)
  S.A. Anggraini et al
- Industrial Property Rights Holder
  国立研究開発法人産業技術総合研究所
- Industrial Property Rights Type
  特許
- Filing Date
  2021
- Overseas
- Data Source
  KAKENHI-PROJECT-21K04168
[Presentation] Inversing the polarity of scandium aluminum nitride (ScAlN) piezoelectric thin films by using Si addition2021
- Author(s)
  Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
- Organizer
  MRS Fall Meeting 2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K04168
[Presentation] Polarity inversion of scandium aluminum nitride (ScAlN) piezoelectric thin films by using Ge addition2021
- Author(s)
  Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
- Organizer
  The 82rd JSAP Autumn Meeting 2021
- Data Source
  KAKENHI-PROJECT-21K04168