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Anggraini SriAyu
Anggraini SriAyu
Connect your ORCID iD
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Researcher Number
80784123
Other IDs
Affiliation (Current)
2023: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員
Affiliation (based on the past Project Information)
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2021: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究員
Review Section/Research Field
Principal Investigator
Basic Section 21050:Electric and electronic materials-related
Keywords
Principal Investigator
piezoelectric / thin films / nitride / ScAlN / polarity / defect / sputtering / vacancy / Piezoelectricity / aluminum nitride / polarity inversion / scandium / thin film
Research Projects
(
1
results)
Research Products
(
3
results)
Project Start Year (Newest)
Project Start Year (Oldest)
Controlling the polarity of ScAlN via formation of cation/anion vacancy
Principal Investigator
Principal Investigator
Anggraini SriAyu
Project Period (FY)
2021 – 2023
Research Category
Grant-in-Aid for Scientific Research (C)
Review Section
Basic Section 21050:Electric and electronic materials-related
Research Institution
National Institute of Advanced Industrial Science and Technology
All
2021
All
Presentation
Patent
[Patent] 窒化物材料およびそれからなる圧電体並びにその圧電体を用いたMEMSデバイス、トランジスタ、インバーター、トランスデューサー、SAWデバイスおよび強誘電体メモリ
2021
Inventor(s)
S.A. Anggraini et al
Industrial Property Rights Holder
国立研究開発法人産業技術総合研究所
Industrial Property Rights Type
特許
Filing Date
2021
Overseas
Data Source
KAKENHI-PROJECT-21K04168
[Presentation] Inversing the polarity of scandium aluminum nitride (ScAlN) piezoelectric thin films by using Si addition
2021
Author(s)
Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
Organizer
MRS Fall Meeting 2021
Int'l Joint Research
Data Source
KAKENHI-PROJECT-21K04168
[Presentation] Polarity inversion of scandium aluminum nitride (ScAlN) piezoelectric thin films by using Ge addition
2021
Author(s)
Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
Organizer
The 82rd JSAP Autumn Meeting 2021
Data Source
KAKENHI-PROJECT-21K04168
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