Kobayashi Hiroshi 小林宏史

… Alternative Names

小林宏史コバヤシヒロシ

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Researcher Number	80838855
Other IDs
Affiliation (Current)	2025: 東京電機大学, 工学部, 教授
Affiliation (based on the past Project Information) *help	2022: 東京電機大学, 工学部, 教授 2020 – 2021: 東京電機大学, 工学部, 准教授
Review Section/Research Field	Except Principal Investigator Basic Section 28050:Nano/micro-systems-related
Keywords	Except Principal Investigator 放物面ミラー / 投影露光 / 立体面 / 投影像 / リソグラフィ / 一方向照明 / コリメート照明 / マジックミラー / 放物面鏡 / ヘルスモニタ … More / 大パターン / 曲面リソグラフィ / 回転放物面ミラー / 立体面投影露光 Less

Research on lithography using projection exposure of stereophonic surface
- Principal Investigator
  
  Horiuchi Toshiyuki
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Tokyo Denki University

All 2023 2022 2021 2020

All Journal Article Presentation

[Journal Article] Demonstration of stereophonic projection lithography using parabolic mirror optics and collimated illumination from one side2023
- Author(s)
  Horiuchi Toshiyuki、Iwasaki Jun-ya、Kobayashi Hiroshi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 62 Issue: SG Pages: SG1026-SG1026
- DOI
  10.35848/1347-4065/acbbd7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K05293
[Journal Article] Feasibility of stereophonic projection lithography applying a parabolic magic mirror system2022
- Author(s)
  Horiuchi Toshiyuki、Kobayashi Hiroshi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: SD Pages: SD1042-SD1042
- DOI
  10.35848/1347-4065/ac5e4c
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K05293
[Journal Article] Patterning-Area Expansion of Parabolic-Mirror Projection Optics for Lithography Using One-Sided and Collimated Illumination2022
- Author(s)
  Toshiyuki Horiuchi、Jun-ya Iwasaki、Hiroshi Kobayashi
- Journal Title
  
  IOSR Journal of Applied PHysics
  
  Volume: 14(5)Series-2 Pages: 12-20
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K05293
[Journal Article] Stereophonic projection lithography using parabolic mirrors2021
- Author(s)
  Horiuchi Toshiyuki、Kobayashi Hiroshi
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 11908 Pages: 2-2
- DOI
  10.1117/12.2597232
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 平面レチクルを用いた対向放物面ミラー立体投影露光の可能性2023
- Author(s)
  堀内敏行，小林宏史
- Organizer
  第70回応用物理学会春季学術講演会, 講演予稿集 15a-D209-5, 06-005
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] Situation of Stereophonic Lithography Using Parabolic Mirrors, Abstract p.592023
- Author(s)
  Toshiyuki Horiuchi, Jun-ya Iwasaki, Hiroshi Kobayashi
- Organizer
  Photomask Japan 2023, The 29th Symposium on Photomask and NGL Mask Technology, p. 59
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 一方向照明の適用による放物面鏡投影露光レジストパターンの改善2022
- Author(s)
  堀内敏行, 小林宏史
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] Stereophonic Lithography Using a Parabolic Mirror Projection System and One-sided Illumination2022
- Author(s)
  T. Horiuchi, J. Iwasaki, and H. Kobayashi
- Organizer
  ODF’22 (Sapporo, Japan), Technical Digest, OThA4A-03
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 青色発光ダイオードでコリメート照明した対向放物面鏡立体投影リソグラフィによるスプーン面へのパターン形成の実証2022
- Author(s)
  堀内敏行，小林宏史
- Organizer
  第83回応用物理学会秋季学術講演会, 講演予稿集 20a-C101-4, 06-004
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] PERFORMANCES OF STEREOPHONIC PROJECTION LITHOGRAPHY USING A PARABOLLIC MIRROR SET ILLUMINATED BY COLLIMATED LIGHT2022
- Author(s)
  T. Horiuchi, J. Iwasaki, H. Kobayashi
- Organizer
  35th Int. Microprocesses and Nonotechnol. Conf, (Tokushima, Japan), 11P-4-1
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] INVESTIGATION OF PROJECTION EXPOSURE SYSTEM USING A PAIR OF PARABOLIC MIRRORS2021
- Author(s)
  Toshiyuki Horiuchi and Hiroshi Kobayashi
- Organizer
  MNC 2021, 34th International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 透過原図物体を用いた対向放物面ミラー立体投影露光の検討2021
- Author(s)
  堀内敏行, 小林宏史
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 対向放物面ミラープロトタイプ露光装置を用いたレジストパターン形成の実証2021
- Author(s)
  堀内敏行, 小林宏史
- Organizer
  第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] Stereophonic Projection Exposure Using a Pair of Parabolic Mirrors2021
- Author(s)
  Toshiyuki Horiuchi and Hiroshi Kobayashi
- Organizer
  Photomask Japan 2021, The 27th Symposium on Photomask and NGL Mask Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 放物面ミラーを用いた立体リソグラフィ投影露光光学系の検討2021
- Author(s)
  堀内敏行, 小林宏史
- Organizer
  令和3年電気学会基礎・材料・共通部門大会
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] マジックミラー光学系を用いた立体面投影露光リソグラフィの基礎検討2020
- Author(s)
  堀内敏行, 小林宏史
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20K05293

1. Horiuchi Toshiyuki (00297582)

# of Collaborated Projects: 1 results

# of Collaborated Products: 16 results

Kobayashi Hiroshi 小林 宏史

小林 宏史 コバヤシ ヒロシ

Research Projects

Research Products

Co-Researchers

Research on lithography using projection exposure of stereophonic surface

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

[Journal Article] Demonstration of stereophonic projection lithography using parabolic mirror optics and collimated illumination from one side2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Feasibility of stereophonic projection lithography applying a parabolic magic mirror system2022

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Patterning-Area Expansion of Parabolic-Mirror Projection Optics for Lithography Using One-Sided and Collimated Illumination2022

Author(s)

Journal Title

Data Source

[Journal Article] Stereophonic projection lithography using parabolic mirrors2021

Author(s)

Journal Title

DOI

Data Source

[Presentation] 平面レチクルを用いた対向放物面ミラー立体投影露光の可能性2023

Author(s)

Organizer

Data Source

[Presentation] Situation of Stereophonic Lithography Using Parabolic Mirrors, Abstract p.592023

Author(s)

Organizer

Data Source

[Presentation] 一方向照明の適用による放物面鏡投影露光レジストパターンの改善2022

Author(s)

Organizer

Data Source

[Presentation] Stereophonic Lithography Using a Parabolic Mirror Projection System and One-sided Illumination2022

Author(s)

Organizer

Data Source

[Presentation] 青色発光ダイオードでコリメート照明した対向放物面鏡立体投影 リソグラフィによるスプーン面へのパターン形成の実証2022

Author(s)

Organizer

Data Source

[Presentation] PERFORMANCES OF STEREOPHONIC PROJECTION LITHOGRAPHY USING A PARABOLLIC MIRROR SET ILLUMINATED BY COLLIMATED LIGHT2022

Author(s)

Organizer

Data Source

[Presentation] INVESTIGATION OF PROJECTION EXPOSURE SYSTEM USING A PAIR OF PARABOLIC MIRRORS2021

Author(s)

Organizer

Data Source

[Presentation] 透過原図物体を用いた対向放物面ミラー立体投影露光の検討2021

Author(s)

Organizer

Data Source

[Presentation] 対向放物面ミラープロトタイプ露光装置を用いたレジストパターン形成の実証2021

Author(s)

Organizer

Data Source

[Presentation] Stereophonic Projection Exposure Using a Pair of Parabolic Mirrors2021

Author(s)

Organizer

Data Source

[Presentation] 放物面ミラーを用いた立体リソグラフィ投影露光光学系の検討2021

Author(s)

Organizer

Data Source

[Presentation] マジックミラー光学系を用いた立体面投影露光リソグラフィの基礎検討2020

Author(s)

Organizer

Data Source

Kobayashi Hiroshi 小林宏史

小林宏史コバヤシヒロシ

[Presentation] 青色発光ダイオードでコリメート照明した対向放物面鏡立体投影リソグラフィによるスプーン面へのパターン形成の実証2022