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KIMURA Takayasu
木邑 隆保
Connect your ORCID iD
*help
Researcher Number
90052711
External Links
Affiliation (based on the past Project Information)
*help
1998 – 2002: 芝浦工業大学, 工学部, 教授
Review Section/Research Field
Except Principal Investigator
機械工作・生産工学
Keywords
Except Principal Investigator
CMP / 研磨剤 / pH / シリカ / プラナリゼーション / ゾル・ゲル法 / Siウエハー / 研磨布 / planerization / sol-gel method
…
More
/ slurry / Si water / pad / silica / 研磨 / 微小ボール / ガラス球 / 遠心力 / 真円度 / ラップ盤 / 研磨加工 / 研磨スラリー / ゾルゲル法 / 球研磨 / 真球度 / シリカ粒子 / カップ研磨方式 / POLISHING / SMALL BALL / GLASS BALL / CENTRIFUGAL FORCE / ROUNDNESS / LAPPING MACHINE / LAPPING SLURRY / SILICA
Less
Research Projects
(
2
results)
Co-Researchers
(
3
People)
Project Start Year (Newest)
Project Start Year (Oldest)
PRECISION FINISHING OF MONO-CRYSTAL SILICON BALLS FOR SPHERICAL SEMI-CONDUCTORS
Principal Investigator
SHIBATA Junji
Project Period (FY)
2001 – 2002
Research Category
Grant-in-Aid for Scientific Research (C)
Research Field
機械工作・生産工学
Research Institution
SHIBAURA INSTITUTE OF TECHNOLOGY
A basic study on CMP mechanism and production of CMP slurry
Principal Investigator
SHIBATA Junii
Project Period (FY)
1998 – 2000
Research Category
Grant-in-Aid for Scientific Research (B).
Research Field
機械工作・生産工学
Research Institution
SHIBAURA INSTITUTE OF TECHNOLOGY
# of Projects (Dsc)
# of Projects (Asc)
1.
SHIBATA Junii
(30052822)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
2.
OHTA Masato
(50052874)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
3.
UEKI Tadahiro
(50052890)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
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