• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

KIMURA Takayasu  木邑 隆保

ORCIDConnect your ORCID iD *help
Researcher Number 90052711
External Links
Affiliation (based on the past Project Information) *help 1998 – 2002: 芝浦工業大学, 工学部, 教授
Review Section/Research Field
Except Principal Investigator
機械工作・生産工学
Keywords
Except Principal Investigator
CMP / 研磨剤 / pH / シリカ / プラナリゼーション / ゾル・ゲル法 / Siウエハー / 研磨布 / planerization / sol-gel method … More / slurry / Si water / pad / silica / 研磨 / 微小ボール / ガラス球 / 遠心力 / 真円度 / ラップ盤 / 研磨加工 / 研磨スラリー / ゾルゲル法 / 球研磨 / 真球度 / シリカ粒子 / カップ研磨方式 / POLISHING / SMALL BALL / GLASS BALL / CENTRIFUGAL FORCE / ROUNDNESS / LAPPING MACHINE / LAPPING SLURRY / SILICA Less
  • Research Projects

    (2 results)
  • Co-Researchers

    (3 People)
  •  PRECISION FINISHING OF MONO-CRYSTAL SILICON BALLS FOR SPHERICAL SEMI-CONDUCTORS

    • Principal Investigator
      SHIBATA Junji
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      機械工作・生産工学
    • Research Institution
      SHIBAURA INSTITUTE OF TECHNOLOGY
  •  A basic study on CMP mechanism and production of CMP slurry

    • Principal Investigator
      SHIBATA Junii
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      機械工作・生産工学
    • Research Institution
      SHIBAURA INSTITUTE OF TECHNOLOGY
  • 1.  SHIBATA Junii (30052822)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 2.  OHTA Masato (50052874)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 3.  UEKI Tadahiro (50052890)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

URL: 

Are you sure that you want to connect your ORCID iD to this researcher?
* This action can be performed only by the researcher themselves.

この研究者とORCID iDの連携を行いますか?
※ この処理は、研究者本人だけが実行できます。

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi