FUJIMOTO Hiroshi 藤本博

Researcher Number	90075911
Affiliation (based on the past Project Information) *help	2002 – 2004: 大同工業大学, 情報学部, 助教授
Review Section/Research Field	Principal Investigator 電子デバイス・機器工学
Keywords	Principal Investigator SIMS / electron beam doping / pn junction / photoluminescence / 電子線照射 / 電子ビームドーピング / 不純物添加 / p n接合 / フォトルミネッセンス / CVD法 … More / SIMS法 / BCl_3 / PCl_3 / B doping / P doping / kick-out machanism / GaAs / Si / diamond / electron irradiation / impurity doping Less

Impurity doping into semiconductors by electron irradiation with low energyPrincipal Investigator
- Principal Investigator
  
  FUJIMOTO Hiroshi
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  Daido Institute of Technology

All 2003

All Journal Article

[Journal Article] Electron beam doping of impurity atoms into semiconductors by superdiffusion2003
- Author(s)
  Takao Wada, Hiroshi Fujimoto
- Journal Title
  
  phys.stat.sol.(C) O, No.2
  
  Pages: 788-794
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550338
[Journal Article] Electron beam doping (superdiffusion) technique in semiconductors at room temperature2003
- Author(s)
  Takao Wada, Hiroshi Fujimoto
- Journal Title
  
  Defect and Diffusion Forum Vols.221-223
  
  Pages: 23-30
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550338
[Journal Article] Superdiffusion of impurity atoms in damage-free regions of semiconductors2003
- Author(s)
  Takao Wada, Hiroshi Fujimoto
- Journal Title
  
  phys.stat.sol.(C) O, No.2
  
  Pages: 780-787
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550338
[Journal Article] Diodes fabricated by electron beam doping (superdiffusion) technique in semiconductors at room temperature2003
- Author(s)
  Takao Wada, Hiroshi Fujimoto
- Journal Title
  
  Defect and Deffusion Forum Vols.221-223
  
  Pages: 23-30
- Data Source
  KAKENHI-PROJECT-14550338
[Journal Article] Electron beam doping of impurity atoms into semiconductors by superdiffusion2003
- Author(s)
  Takao Wada, Hiroshi Fujimoto
- Journal Title
  
  phys.stat.sol.(C) 0, No.2
  
  Pages: 788-794
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550338
[Journal Article] Electron beam doping of impurity atoms into semiconductors by kick-out mechanism2003
- Author(s)
  Takao Wada, Hiroshi Fujimoto
- Journal Title
  
  Psica status solidi (C) 0.No.2
  
  Pages: 788-794
- Data Source
  KAKENHI-PROJECT-14550338
[Journal Article] Superdiffusion of impurity atoms in damage-free regions of semiconductors2003
- Author(s)
  Takao Wada, Hiroshi Fujimoto
- Journal Title
  
  Phisica status solidi (c) 0.No.2
  
  Pages: 780-787
- Data Source
  KAKENHI-PROJECT-14550338
[Journal Article] Superdiffusion of impurity atoms in damage-free regions of semiconductors2003
- Author(s)
  Takao Wada, Hiroshi Fujimoto
- Journal Title
  
  phys.stat.sol.(C) 0, No.2
  
  Pages: 780-787
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550338

1. WADA Takao (60023040)

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results

FUJIMOTO Hiroshi 藤本 博

Research Projects

Research Products

Co-Researchers

Impurity doping into semiconductors by electron irradiation with low energyPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Electron beam doping of impurity atoms into semiconductors by superdiffusion2003

Author(s)

Journal Title

Description

Data Source

[Journal Article] Electron beam doping (superdiffusion) technique in semiconductors at room temperature2003

Author(s)

Journal Title

Description

Data Source

[Journal Article] Superdiffusion of impurity atoms in damage-free regions of semiconductors2003

Author(s)

Journal Title

Description

Data Source

[Journal Article] Diodes fabricated by electron beam doping (superdiffusion) technique in semiconductors at room temperature2003

Author(s)

Journal Title

Data Source

[Journal Article] Electron beam doping of impurity atoms into semiconductors by superdiffusion2003

Author(s)

Journal Title

Description

Data Source

[Journal Article] Electron beam doping of impurity atoms into semiconductors by kick-out mechanism2003

Author(s)

Journal Title

Data Source

[Journal Article] Superdiffusion of impurity atoms in damage-free regions of semiconductors2003

Author(s)

Journal Title

Data Source

[Journal Article] Superdiffusion of impurity atoms in damage-free regions of semiconductors2003

Author(s)

Journal Title

Description

Data Source

FUJIMOTO Hiroshi 藤本博