SUGINO Takashi 杉野隆

… Alternative Names

杉野隆スギノタカシ

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Researcher Number	90206417
Other IDs
Affiliation (Current)	2025: 大阪大学, 大学院工学研究科, 教授
Affiliation (based on the past Project Information) *help	2009: 大阪大学, 工学研究科, 教授 2007 – 2008: 大阪大学, 大学院・工学研究科, 教授 2002: 大阪大学, 大学院・工学研究科, 助教授 2001: 大阪大学, 大学院・工学系研究科, 助教授 1997 – 1998: 大阪大学, 大学院・工学研究科, 助教授 … More 1997: OSAKA UNIVERSITY,GRADUATE SCHOOL OF ENGINEERING,ASSOCIATE PROFESSOR, 工学研究科, 助教授 1994 – 1997: 大阪大学, 工学部, 助教授 1989: 神戸大学, 工学部, 助教授 1988: 大阪大学, 工学部, 助教授 Less
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / Applied materials science/Crystal engineering Except Principal Investigator 電子デバイス・機器工学 / Electronic materials/Electric materials / Applied materials / Electron device/Electronic equipment / Structural/Functional materials / Material processing/treatments / 機械工作・生産工学
Keywords	Principal Investigator 禁止帯幅 / 水素プラズマ / 冷陰極 / phosphorus-doped diamond / diamond contact / metal / field emission / cold cathode / O_2 plasma / H_2 plasm … More / surface modification / diamond / リン添加ダイヤモンド / ダイヤモンド接合 / 金属 / フィールドエミッション / 酸素プラズマ / 表面改質 / ダイヤモンド / bandgap / electrical resistivity / infrared absorption spectrum / transmission electron diffraction / N_2 remote plasma / BCl_3 / plasma-assisted CVD / boron nitride / X線光電子分光測定 / 赤外吸収測定 / 希釈ガス依存性 / 透過電子顕微鏡 / 電気抵抗率 / 赤外吸収スペクトル / 透過電子線回折 / 窒素リモートプラズマ / 三塩化ホウ素 / プラズマアシスト気相成長法 / 窒化ホウ素 / プラズマアシスト化学気相成長法 / FTIR / XPS / フィールドエミッション特性 / BCN薄膜 … More Except Principal Investigator 表面改質 / Flat Panel Display / Silicide / Leakage Current / Polysilicon / Thin Film Transistor / Tunneling Current / Schottky Barrier / フラットディスプレイ / フラットパネルディスプレイ / シリサイド / リ-ク電流 / ポリシリコン / 薄膜トランジスター / トンネル電流 / ショットキー障壁 / phosphorus-doped diamond / surface modification / field emission / electron emission / diamond contact / metal / cold cathode / tunnel injection of electron / diamond / 負性電子親和力 / 内部電界電子放出 / 金属-ダイヤモンド接合 / ダイヤモンド界面 / リン添加ダイヤモンド / フィールドエミッション / 電子放出 / ダイヤモンド接合 / 金属 / 冷陰極 / トンネル注入 / ダイヤモンド / MISダイオード / ショットキー障壁接合 / 水素パシベーション / IIIーV化合物 / EL2 / ショットキ-接合 / 水素化 / エキシマレ-ザ / 光励起プロセス / III-V化合物半導体 / LSI / 窒化ホウ素 / 低誘電率 / 配線 / LowK / メチルBN / BCN / ドライエッチング / LSI配線 / 低誘電率(Low-k) / メチル窒化ホウ素 / テロ対策 / 粉末 / 安全 / 携帯 / 固体燃料 / ギ酸アンモニウム / 固体高分子型 / 燃料電池 / 表面の電子・化学機能 / 表面ナノ加工 / 表面ナノ構造 / 電子デバイス応用 / 化学的・バイオ応用 / 機械的応用 / 薄膜 / アダマント / 表面機能設計 / トライボロジー / 炭素系材料 / コーティング / ナノ構造材料 / アダマント材料 Less

メチルBN系低誘電率膜のLSI先端配線への応用
- Principal Investigator
  
  青木秀充
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka University
カルボン酸系固形燃料を用いたマイクロ燃料電池の研究開発
- Principal Investigator
  
  青木秀充
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Structural/Functional materials
- Research Institution
  Osaka University
アダマント薄膜表面のナノ機能デザイン
- Principal Investigator
  
  光田好孝
- Project Period (FY)
  2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Material processing/treatments
- Research Institution
  The University of Tokyo
アダマント材料によるナノ構造メカニカルコーティング
- Principal Investigator
  
  大竹尚登
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tokyo Institute of Technology
プラズマアシスト気相成長法によるホウ素-炭素-窒素薄膜の作製と冷陰極への応用Principal Investigator
- Principal Investigator
  
  杉野隆
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Osaka University
Modification of diamond surfaces by plasma process and its application to cold cathodePrincipal Investigator
- Principal Investigator
  
  SUGINO Takashi
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Osaka University
DEVELOPMENT OF TUNNELING-CURRENT-CONTROLLED THIN FILM TRANSISTORS APPLYING SCHOTTKY CONTACTS
- Principal Investigator
  
  SHIRAFUJI Junji
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  FUKUI UNIVERSITY OF TECHNOLOGY
  Osaka University
Tunnel injection of electron into diamond and its application to cold cathode
- Principal Investigator
  
  SHIRAFUJI Junji
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Osaka University
Formation of cubic boron nitride films by photo/plasma-assisted chemical vapor deposition methodPrincipal Investigator
- Principal Investigator
  
  SUGINO Takashi
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Osaka University
In-situ光化学プロセスによるIII-V化合物半導体表面の安定化に関する研究
- Principal Investigator
  
  SHIRAFUJI Junji
- Project Period (FY)
  1988 – 1989
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Applied materials
- Research Institution
  Osaka University

All 2010 2009 2008 2007

All Journal Article Presentation

[Journal Article] Dry etching properties of methyl-BCN film with C_4F_8 gas for Cu/low-k interconnection2010
- Author(s)
  Hidemitsu Aoki, Makoto Hara, Takuroh Masuzumi, Farid Ahmed, Chiharu Kimura, Takashi Sugino
- Journal Title
  
  Diamond and Related Materials (in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] Effect of the radio-frequency power on the dielectric properties of hydrogen-containing boron carbon nitride films deposited by plasma-assisted chemical vapor deposition using tris(dimethylamino)boron gas2010
- Author(s)
  Hidemitsu Aoki, Takuro Masuzumi, Makoto Hara, Daisuke Watanabe, Chiharu Kimura, Takashi Sugino
- Journal Title
  
  Thin Solid Films Vol.518 lssue8
  
  Pages: 2102-2104
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] Suppression of Fluorine Diffusion into Methyl-BCN Film using Low Temperature Etching2010
- Author(s)
  Makoto Hara, Takuro Masuzumi, Zhiming Lu, Chiharu Kimura, Hidemitsu Aoki, Takashi Sugino
- Journal Title
  
  Japanese Journal of Applied Physics (in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] Influence of Cu Electroplating Solutions on Boron Carbon Nitride (BCN)Film.2009
- Author(s)
  H. Aoki, M. Hara, T. Masuzumi, M. K. Mazumder, N. Ooi, D. Watanabe, C. Kimura, T. Sugino
- Journal Title
  
  Applied Surface Science 255 (6)
  
  Pages: 3719-3722
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] Influence of oxygen plasma treatment on boron carbon nitride(BCN)mms composition.2009
- Author(s)
  H. Aoki, T. Masuzumi, D. Watanabe, M. K. Mazumder, H. Sota, C. Kimura, T. Sugino
- Journal Title
  
  Applied Surface Science 255 (6)
  
  Pages: 3635-3638
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] メチルBCN膜のRFバイアスによる膜質依存性2009
- Author(s)
  増住拓朗、原誠、青木秀充、呂志明、木村千春、杉野隆
- Journal Title
  
  電子情報通信学会(電子デバイス研究会) 109(81)
  
  Pages: 15-20
- NAID
  110007338322
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] Synthesis of methyl boron nitride film as low-k insulating filmfor LSI interconnection.2009
- Author(s)
  H. Aoki, S. Tokuyama, T. Masuzumi, M. Hara, M. K. Mazumder, D. Watanabe, C. Kimura, T. Sugino
- Journal Title
  
  Diamond and Related Materials In Press
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] Properties of Boron Carbon Nitride (BCN)film after plasmaashing.2009
- Author(s)
  M. K. Mazumder, H. Aoki, T. Masuzumi, M. Hara, D. Watanabe, C. Kimura。M. Fukagawa, M. Umeda, M. Kusuharaand. T. Sugino
- Journal Title
  
  Diamond and Related Materials Vol. 18
  
  Pages: 419-422
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] Dry etching properties of boron carbon nitride (BCN)films usingcarbon fluoride gas.2008
- Author(s)
  H. Aoki, T. Sasada, D. Watanabe, M. K. Mazumder, C. Kimura, T. Sugino
- Journal Title
  
  Diamond and Related Materials 17
  
  Pages: 1800-1804
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] A methyl BN film by using tris-di-methyl-amino-boron (TMAB)for future Low-K interlayer.2008
- Author(s)
  H. Aoki, S. Tokuyama, M. K. Mazumder, D. Watanabe, C. Kimura, T. Sugino
- Journal Title
  
  Proc. SPIE Vol. 6984, 69841W
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] Characterization of BCN film after wet process forinterconnection integration.2008
- Author(s)
  D. Watanabe, H. Aoki, R. Moriyama, M. K. Mazumder, C. Kimura, T. Sugino
- Journal Title
  
  Diamond and Related Materials Vol. 17
  
  Pages: 669-672
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] Improvement of anodic oxidation reaction of a fuel cell using ammonium formate with Pt-Pd catalysts.2008
- Author(s)
  H. Aoki, T. Nitta, S. Kuwabata, C. Kimura, T. Sugino
- Journal Title
  
  Electrochemical Soc. Transactions Vol. l6, No. 2
  
  Pages: 849-853
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19656181
[Journal Article] Improvement of anode oxidation reaction of a fuel cell using ammoniumformate with Pt-Ir catalysts. (Pt-Ir触媒によるギ酸アンモニウム燃料電池のアノード酸化反応の向上)2008
- Author(s)
  Kazutoshi Ohyama, Takashi Sugino, Tomohiro Nitta, Chiharu Kimura, Hidemitsu Aoki
- Journal Title
  
  IEEJ Trans. EIS (電気学会論文誌C) Vol. 128, No. 11
  
  Pages: 1600-1604
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19656181
[Journal Article] Properties of Methyl Boron Nitride Film for Next GenerationLow-K Interconnection.2008
- Author(s)
  S. Tokuyama, M. K. Mazumder, D. Watanabe, C. Kimura。H. Aoki, T. Sugino
- Journal Title
  
  Japanese Journal of Applied Physics Vol. 47, No. 4
  
  Pages: 2492-2495
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360160
[Journal Article] Evaluation of Solid Ammonium Formate Oxidation for Polymer Electrolyte Fuel Cells2007
- Author(s)
  K. Ohyama, C.Kimura, M.Aoki, S.Kuwabata, T.Sugino
- Journal Title
  
  Electrochemical Soc. Transactions Vol.4,No.1
  
  Pages: 1010-1010
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19656181
[Presentation] Influence of oxygen plasma treatment on properties of Methyl-BCN film2010
- Author(s)
  Zhiming Lu, Makoto Hara, Takuro Masuzumi, Makoto Nishizaki, Chinaru Kimura, Hidemitsu Aoki, Takasi Sugino
- Organizer
  The 4th International Conference on New Diamond and Nano Carbons
- Place of Presentation
  Suzhou, China
- Year and Date
  2010-05-18
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Annealing effect of methyl-boron carbon nitride film after dry etching2010
- Author(s)
  Hidemitsu Aoki, Makoto Hara, Takuro Masuzumi, Zhiming Lu, Makoto Nishizaki, Chiharu Kimura, Takashi Sugino
- Organizer
  The 4th International Conference on New Diamond and Nano Carbons
- Place of Presentation
  Suzhou, China
- Year and Date
  2010-05-18
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Methyl-BCN膜の湿度による膜質への影響2010
- Author(s)
  西崎誠, 原誠, 増住拓郎, 呂志明, 青木秀充, 木村千春, 杉野隆
- Organizer
  2010年春季第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学(平塚市)
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] 酸素プラズマ種によるメチルBCN膜の膜質への影響2010
- Author(s)
  呂志明, 原誠, 増住拓朗, 西崎誠, 木村千春, 青木秀充, 杉野隆
- Organizer
  2010年春季第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学(平塚市)
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] メチルBCN膜のRFバイアスによる膜質依存性2009
- Author(s)
  増住拓朗, 原誠, 青木秀充, 呂志明, 木村千春, 杉野隆
- Organizer
  電子情報通信学会 (電子デバイス研究会)2009表面
- Place of Presentation
  東京工業大学(目黒区)
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] CF4を用いた低温ドライエッチングによるMethyl-BCN膜特性への影響2009
- Author(s)
  原誠, 増住拓朗, 呂志明, 青木秀充, 木村千春, 杉野隆
- Organizer
  H21年度電気学会関西支部連合大会
- Place of Presentation
  大阪大学(吹田市)
- Year and Date
  2009-11-07
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Influence of properties of boron carbon nitride (BCN) film on oxygen and hydrogen2009
- Author(s)
  T.Masuzumi, M.Hara, H.Aoki, Z Lu, C.Kimura, T.Sugino
- Organizer
  5th International Workshop on reactions involving oxygen and hydrogen
- Place of Presentation
  Osaka Univ. (吹田市)
- Year and Date
  2009-06-17
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] O_2プラズマによるMethyl-BCN膜への影響評価2009
- Author(s)
  呂志明, 原誠, 増住拓朗, 木村千春, 青木秀充, 杉野隆
- Organizer
  第23回ダイヤモンドシンポジウム(2009)
- Place of Presentation
  千葉工業大学(習志野市)
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] メチルBCN膜の酸素プラズマアッシングによる膜質への影響評価2009
- Author(s)
  呂志明, 原誠, 増住拓朗, 青木秀充, 木村千春, 杉野隆
- Organizer
  H21年度電気学会関西支部連合大会
- Place of Presentation
  大阪大学(吹田市)
- Year and Date
  2009-11-07
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] 紫外光照射によるMethyl-BCN膜特性への影響評価2009
- Author(s)
  増住拓朗, 原誠, 呂志明, 青木秀充, 木村千春, 杉野隆
- Organizer
  H21年度電気学会関西支部連合大会
- Place of Presentation
  大阪大学(吹田市)
- Year and Date
  2009-11-07
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Suppression of Fluorine Diffusion into Low-k Material (Methyl-BCN) using Low Temperature Etching2009
- Author(s)
  M.Hara, T.Masuzumi, L.Zhiming, C.Kimura, H.Aoki, T.Sugino
- Organizer
  2009 International Conference on Solid State Devices and Materials (SSDM)
- Place of Presentation
  Sendai International Hotel (Sendai)
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Dry etching properties of methyl-BCN film with C4F8 gas for Cu/LowK interconnection2009
- Author(s)
  H.Aoki, M.Hara, T.Masuzumi, D.Watanabe, C.Kimura, T.Sugino
- Organizer
  2009 International Conference on Solid State Devices and Materials (SSDM)
- Place of Presentation
  Sendai International Hotel (Sendai)
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] 還元水による析出Pt触媒を用いたギ酸アンモニウム燃料電池の基礎評価2009
- Author(s)
  新田智弘, 青木秀充, 木村千春, 杉野隆
- Organizer
  2009年春季第56回応用物理学関係連合講演会
- Place of Presentation
  筑波大学
- Year and Date
  2009-03-31
- Data Source
  KAKENHI-PROJECT-19656181
[Presentation] UV照射に対するMethyl-BCN膜の特性評価2009
- Author(s)
  増住拓朗, 原誠, 呂志明, 青木秀充, 木村千春, 杉野隆
- Organizer
  2009年秋季第70回応用物理学会学術講演会
- Place of Presentation
  富山大学(富山市)
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Influence of methyl group on the dielectric constant of boron carbon nitride film containing methyl group2009
- Author(s)
  T.Masuzumi, M.Hara, M.K.Mazumder, D.Watanabe, H.Aoki, C.Kimura, T.Sugino
- Organizer
  New Diamond and Nano Carbons (NDNC2009)
- Place of Presentation
  Michigan, USA (Traverse City)
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] 低温ドライエッチングを用いたMethyl-BCN膜の特性評価2009
- Author(s)
  原誠, 増住拓朗, 呂志明, 青木秀充, 木村千春, 杉野隆
- Organizer
  2009年秋季第70回応用物理学会学術講演会
- Place of Presentation
  富山大学(富山市)
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Boron Carbon Nitride Film containing Hydrogen for 22nm Node Low-K Interconnection2009
- Author(s)
  H.Aoki, T.Masuzumi, M.Hara, D.Watanabe, C.Kimura, T.Sugino
- Organizer
  VLSI-TSA (Technology, Systems, and Applications) 2009
- Place of Presentation
  Taiwan(新竹市)
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] メチルBCN膜の酸素プラズマアッシングによる膜質への影響評価2009
- Author(s)
  呂志明, 原誠, 増住拓朗, 青木秀充, 木村千春, 杉野隆
- Organizer
  2009年秋季第70回応用物理学会学術講演会
- Place of Presentation
  富山大学(富山市)
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] TMABを用いたH含有BCN膜のRFパワー依存性2008
- Author(s)
  増住拓朗原誠渡邊大祐木村千春青木秀充杉野隆
- Organizer
  電気学会関西支部連合大会(2008)
- Place of Presentation
  京都工芸繊維大学
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] BCN膜へのCu電解メッキ液による影響2008
- Author(s)
  渡邊大祐, 青木秀充, 原誠, M. K. マズンデル, 増住拓郎, 大井直樹, 木村千春, 杉野隆
- Organizer
  2008年秋季第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Properties of Boron Carbon Nitride(BCN)mm after plasma ashing.2008
- Author(s)
  M. K. Mazumder, H. Aoki, T. Masuzumi, M. Hara, N. Ooi, D. Watanabe, C. Kimura, M. Fukagawa, M. Umeda, M. Kusuhara, T. Sugino.
- Organizer
  New Diamond and Nano Carbons(NDNC2008)
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Suppression of Cu Oxidation using Environmentally FriendlyInhibitors in the Ambience of High Temperature and High Humidity for Cu/Low-K. .2008
- Author(s)
  M. Hara, D. Watanabe, C. Kimura, H. Aoki, T. Sugino
- Organizer
  2008 International Conference on Solid State Devices and Materials (SSDM)
- Place of Presentation
  Tukuba、Japan
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] ギ酸アンモニウム燃料を用いた燃料電池特性の評価2008
- Author(s)
  大山和俊、新田智弘、木村千春、青木秀充、杉野隆
- Organizer
  2008年春季第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-19656181
[Presentation] TMABで作製したメチル窒化ホウ素膜のRFパワー依存性2008
- Author(s)
  増住拓朗, 原誠, 渡邊大祐, 木村千春, 青木秀充, 杉野隆
- Organizer
  第22回ダイヤモンドシンポジウム(2008)
- Place of Presentation
  早稲田大学
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Properties of boron carbon nitride(BCN)film after plasma ashing.2008
- Author(s)
  T. Masuzumi, M. K. Mazumder, H. Aoki, M. Hara, D. Watanabe, C. Kimura, T. Sugino
- Organizer
  The 27th Electronic Materials Symposium
- Place of Presentation
  Shizuoka、Japan
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Influence of Cu Electroplating Solution on Boron Carbon Nitride(BCN).2008
- Author(s)
  H. Aoki, M. Hara, M. K. Mazumder, T. Masuzumi, N. Ooi, D. Watanabe, C. Kimura, T. Sugino.
- Organizer
  New Diamond and Nano Carbons(NDNC2008)
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] ギ酸アンモニウム燃料電池を用いた酸化活性の温度依存性2008
- Author(s)
  新田智弘, 青木秀充, 木村千春, 杉野隆
- Organizer
  2008年秋季第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Year and Date
  2008-09-03
- Data Source
  KAKENHI-PROJECT-19656181
[Presentation] TMABを用いたMethyl doped BN膜のRFパワー依存性2008
- Author(s)
  増住拓朗, 原誠, M. K. マズンデル, 木村千春, 青木秀充, 杉野隆
- Organizer
  2008年秋季第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Pt-Pd触媒を用いたギ酸アンモニウム燃料電池の基礎評価2008
- Author(s)
  新田智弘, 大山和俊, 木村千春, 青木秀充, 杉野隆
- Organizer
  2008年春季第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-19656181
[Presentation] Anode oxidation reaction of a fuel cell using solid ammonium formate.2008
- Author(s)
  H. Aoki, T. Nitta, S. Kuwabata, C. Kimura, T. Sugino
- Organizer
  4^<th> International Workshop on reactions involving oxygenand hydrogen
- Place of Presentation
  Osaka University
- Year and Date
  2008-08-22
- Data Source
  KAKENHI-PROJECT-19656181
[Presentation] Improvement of anodic oxidation reaction of a fuel cell using ammoniumformate with Pt-Pd catalysts.2008
- Author(s)
  H. Aoki, T. Nitta, S. Kuwabata, C. Kimura, T. Sugino
- Organizer
  ECS2007 214th
- Place of Presentation
  Honolulu USA
- Year and Date
  2008-10-12
- Data Source
  KAKENHI-PROJECT-19656181
[Presentation] Synthesis of Methyl Boron Nitride Film as Low-K InsulatingFilm for LSI Interconnection.2008
- Author(s)
  H. Aoki, S. Tokuyama, T. Masuzumi, M. K. Mazumder, D. Watanabe, M. Hara, C. Kimura, T. Sugino
- Organizer
  19th European Conference on Diamond, Diamond-LikeMaterials, Carbon Nanotubes, and Nitrides
- Place of Presentation
  Sitges, Spain
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] 配線プロセスのためのBCN薄膜上への積層メタル層評価2008
- Author(s)
  原誠, 増住拓朗, M. K. マズンデル, 渡邊大祐, 木村千春, 青木秀充, 杉野隆
- Organizer
  2008年秋季第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Data Source
  KAKENHI-PROJECT-20360160
[Presentation] Pt-Ir触媒を用いたギ酸アンモニウム燃料電池の特性評価2007
- Author(s)
  大山和俊木村千春青木秀充杉野隆
- Organizer
  電気学会関西支部連合大会
- Place of Presentation
  神戸大学
- Year and Date
  2007-11-21
- Data Source
  KAKENHI-PROJECT-19656181
[Presentation] Evaluation of Solid Ammonium Formate Oxidation for Polymer Electrolyte Fuel Cells2007
- Author(s)
  K. Ohyama, C. Kimura, M. Aoki, S. Kuwabata, T. Sugino
- Organizer
  ECS2007 212th
- Place of Presentation
  Washington D.C.
- Year and Date
  2007-10-07
- Data Source
  KAKENHI-PROJECT-19656181

1. SHIRAFUJI Junji (70029065)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
2. HATTORI Reiji (60221503)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
3. 大竹尚登 (40213756)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. 光田好孝 (20212235)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. 澤邊厚仁 (70187300)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. 青木秀充 (10419468)

# of Collaborated Projects: 2 results

# of Collaborated Products: 21 results
7. 木村千春 (90372630)

# of Collaborated Projects: 2 results

# of Collaborated Products: 21 results
8. 平田敦 (50242277)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 鈴木哲也 (10286635)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. 川原田洋 (90161380)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. 八田章光 (50243184)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 本郷昭三 (00029232)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. YOSHINOUCHI Jun

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

SUGINO Takashi 杉野 隆

杉野 隆 スギノ タカシ

Research Projects

Research Products

Co-Researchers

メチルBN系低誘電率膜のLSI先端配線への応用

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カルボン酸系固形燃料を用いたマイクロ燃料電池の研究開発

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アダマント薄膜表面のナノ機能デザイン

Principal Investigator

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アダマント材料によるナノ構造メカニカルコーティング

Principal Investigator

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プラズマアシスト気相成長法によるホウ素-炭素-窒素薄膜の作製と冷陰極への応用Principal Investigator

Principal Investigator

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Modification of diamond surfaces by plasma process and its application to cold cathodePrincipal Investigator

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DEVELOPMENT OF TUNNELING-CURRENT-CONTROLLED THIN FILM TRANSISTORS APPLYING SCHOTTKY CONTACTS

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Tunnel injection of electron into diamond and its application to cold cathode

Principal Investigator

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Formation of cubic boron nitride films by photo/plasma-assisted chemical vapor deposition methodPrincipal Investigator

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In-situ光化学プロセスによるIII-V化合物半導体表面の安定化に関する研究

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[Journal Article] Dry etching properties of methyl-BCN film with C_4F_8 gas for Cu/low-k interconnection2010

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[Journal Article] Effect of the radio-frequency power on the dielectric properties of hydrogen-containing boron carbon nitride films deposited by plasma-assisted chemical vapor deposition using tris(dimethylamino)boron gas2010

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[Journal Article] Suppression of Fluorine Diffusion into Methyl-BCN Film using Low Temperature Etching2010

Author(s)

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[Journal Article] Influence of Cu Electroplating Solutions on Boron Carbon Nitride (BCN)Film.2009

Author(s)

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SUGINO Takashi 杉野隆

杉野隆スギノタカシ