KAKEHI Yoshiharu 筧芳治

… Alternative Names

筧芳治カケヒヨシハル

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Researcher Number	90359406
Other IDs
Affiliation (Current)	2025: 地方独立行政法人大阪産業技術研究所, 和泉センター, 研究室長 2025: 地方独立行政法人大阪府立産業技術総合研究所, その他部局等, 主幹研究員
Affiliation (based on the past Project Information) *help	2017 – 2019: 地方独立行政法人大阪産業技術研究所, 和泉センター, 主任研究員 2018: 地方独立行政法人大阪産業技術研究所, 電子・機械システム研究部, 主任研究員
Review Section/Research Field	Principal Investigator Inorganic materials/Physical properties Except Principal Investigator Electronic materials/Electric materials
Keywords	Principal Investigator 歪抵抗薄膜 / 薄膜 / セラミックス / 電子・電気材料 / スパッタリング / ひずみ抵抗薄膜 / オイルレス / 高温圧力センサ / 酸炭化物薄膜 Except Principal Investigator TFT … More / 半導体物性 / 電子・電気材料 / 熱処理 / ZTO / フレキシブルデバイス / 酸化物アモルファス半導体 / レアメタルフリー / 薄膜トランジスタ / フレキシブル / 酸化物薄膜 Less

Development of high sensitivity high-temperature oilless pressure sensor with temperature compensation functionPrincipal Investigator
- Principal Investigator
  
  KAKEHI Yoshiharu
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Inorganic materials/Physical properties
- Research Institution
  Osaka Research Institute of Industrial Science and Technology
Development of rare metal free high performance flexible oxide transistors and logic circuits
- Principal Investigator
  
  SATOH Kazuo
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Osaka Research Institute of Industrial Science and Technology

All 2020 2019 2018 2017 2016

All Journal Article Presentation

[Journal Article] Investigation on the gate insulator thickness dependence of ZnO-SnO2 thin film transistors2019
- Author(s)
  Satoh Kazuo、Yamada Yoshiharu、Kanaoka Yusuke、Murakami Shuichi、Kakehi Yoshiharu、Sakurai Yoshiaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Issue: 3 Pages: 038004-038004
- DOI
  10.7567/1347-4065/ab01f7
- NAID
  210000135452
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K06288
[Journal Article] Effect of postannealing on properties of ZnO-SnO2 thin film transistors2018
- Author(s)
  Satoh Kazuo、Murakami Shuichi、Kanaoka Yusuke、Yamada Yoshiharu、Kakehi Yoshiharu、Sakurai Yoshiaki
- Journal Title
  
  Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
  
  Volume: 36 Issue: 2
- DOI
  10.1116/1.5003283
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K06288
[Journal Article] Effect of post annealing on properties of ZnO-SnO2 thin film transistors2017
- Author(s)
  Kazuo Satoh, Shuichi Murakami, Yusuke Kanaoka, Yoshiharu Yamada, Yoshiharu Kakehi and Yoshiaki Sakurai
- Journal Title
  
  Proceedings of the Fourteenth International Symposium on Sputtering and Plasma Processes
  
  Volume: － Pages: 221-223
- NAID
  130005175703
- Data Source
  KAKENHI-PROJECT-16K06288
[Presentation] 2 層型ひずみ抵抗薄膜 (TiCxOy/SiCxOy) を用いた高温オイルレス圧力センサの開発2020
- Author(s)
  筧芳治，佐藤和郎，小栗泰造，近藤裕佑，山田義春
- Organizer
  日本セラミックス協会2020年年会
- Data Source
  KAKENHI-PROJECT-17K06811
[Presentation] MgOバッファ膜を用いたTiCxOy高温ひずみ抵抗薄膜の特性改善2019
- Author(s)
  筧芳治，佐藤和郎，小栗泰造，山田義春，近藤裕佑
- Organizer
  日本セラミックス協会2019年年会
- Data Source
  KAKENHI-PROJECT-17K06811
[Presentation] Characteristics of ZnO-SnO2 Thin Film Transistors on Flexible Substrates2019
- Author(s)
  Kazuo Satoh, Shuichi Murakami, Yusuke Kanaoka, Yoshiharu Yamada, Yoshiharu Kakehi, Yusuke Kondo and Yoshiaki Sakurai
- Organizer
  11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials(ISPlasma2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06288
[Presentation] Development of high-temperature oilless pressure sensors using TiCxOy piezoresistive films2019
- Author(s)
  Yoshiharu Kakehi, Yoshiharu Yamada, Yusuke Kondo, Tomoatsu Ozaki, Taizo Oguri, Kazuo Satoh
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06811
[Presentation] 2層型ひずみ抵抗薄膜を用いた直圧式高温圧力センサの開発2019
- Author(s)
  筧芳治，佐藤和郎，小栗泰造，山田義春，近藤裕佑
- Organizer
  2019年第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17K06811
[Presentation] スパッタリング法により作製したZnO-SnO2 を用いた薄膜トランジスタの熱処理効果2018
- Author(s)
  佐藤和郎，村上修一，金岡祐介，山田義春，筧芳治，近藤裕佑，櫻井芳昭
- Organizer
  2018年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06288
[Presentation] 磁気中性線放電プラズマによるオイルレス圧力センサ用ストレインゲージ薄膜のドライエッチング2018
- Author(s)
  佐藤和郎，筧芳治，金岡祐介,　小栗泰造，近藤裕佑，山田義春
- Organizer
  2018年第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-17K06811
[Presentation] フレキシブル基板上に作製したZnO-SnO2薄膜トランジスタの特性2018
- Author(s)
  佐藤和郎，村上修一，金岡祐介，山田義春，筧芳治，近藤裕佑，櫻井芳昭
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K06288
[Presentation] Investigation on the Gate Insulator Thickness Dependence of ZnO-SnO2 Thin Film Transistors2018
- Author(s)
  Kazuo Satoh, Yoshiharu Yamada, Yusuke Kanaoka, Shuichi Murakami, Yoshiharu Kakehi and Yoshiaki Sakurai
- Organizer
  10th Anniversary International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06288
[Presentation] Effect of oxygen addition on the electromechanical property of TiC thin films2018
- Author(s)
  Yoshiharu Kakehi, Yoshiharu Yamada, Yusuke Kondo, Taizo Oguri, Kazuo Satoh
- Organizer
  ISPlasma2018/IC-PLANTS2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06811
[Presentation] TiC薄膜を用いたストレインゲージ特性に及ぼす酸素添加の効果2018
- Author(s)
  筧　芳治、佐藤　和郎、小栗　泰造、近藤　裕佑、山田　義春
- Organizer
  日本セラミックス協会2018年年会
- Data Source
  KAKENHI-PROJECT-17K06811
[Presentation] MgO バッファ膜が高温オイルレス圧力センサ用ひずみ抵抗薄膜TiCxOy の特性に与える影響2018
- Author(s)
  筧芳治，佐藤和郎，小栗泰造，山田義春，近藤裕佑
- Organizer
  2018年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-17K06811
[Presentation] Effect of MgO Buffer Layers on Electromechanical Property of TiCxOy Thin Films for High-temperature Strain Gauges2018
- Author(s)
  Yoshiharu Kakehi, Yoshiharu Yamada, Yusuke Kondo, Taizo Oguri, Kazuo Satoh
- Organizer
  14th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures(ACSIN-14) & 26th International Colloquium on Scanning Probe Microscopy (ICSPM26)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06811
[Presentation] Effect of post annealing on properties of ZnO-SnO2 thin film transistors2017
- Author(s)
  Kazuo Satoh, Shuichi Murakami, Yusuke Kanaoka, Yoshiharu Yamada, Yoshiharu Kakehi and Yoshiaki Sakurai
- Organizer
  The Fourteenth International Symposium on Sputtering and Plasma Processes (ISSP2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06288
[Presentation] 熱処理がZnO-SnO2を用いた薄膜トランジスタ特性に与える影響（III）2017
- Author(s)
  佐藤和郎，村上修一，金岡祐介，山田義春，筧芳治，近藤裕佑，櫻井芳昭
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K06288
[Presentation] Low temperature fabrication of ZnO-SnO2 thin film transistors2017
- Author(s)
  Kazuo Satoh, Shuichi Murakami, Yusuke Kanaoka, Yoshiharu Yamada, Yusuke Kondo, Yoshiharu Kakehi, Yoshiaki Sakurai and Satoru Kaneko
- Organizer
  5th Nano Today Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06288
[Presentation] 熱処理がZnO-SnO2を用いた薄膜トランジスタ特性に与える影響（II）2017
- Author(s)
  佐藤和郎，村上修一，金岡祐介，中山健吾，山田義春，筧芳治，櫻井芳昭
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  横浜市
- Year and Date
  2017-03-16
- Data Source
  KAKENHI-PROJECT-16K06288
[Presentation] 熱処理がZnO-SnO2を用いた薄膜トランジスタ特性に与える影響2016
- Author(s)
  佐藤　和郎，村上　修一，金岡　祐介，山田　義春，筧　芳治，櫻井　芳昭
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟市
- Year and Date
  2016-09-14
- Data Source
  KAKENHI-PROJECT-16K06288

1. SATOH Kazuo (30315163)

# of Collaborated Projects: 2 results

# of Collaborated Products: 21 results
2. 小栗泰造 (80359413)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
3. 櫻井芳昭 (50359387)

# of Collaborated Projects: 1 results

# of Collaborated Products: 12 results
4. 金岡祐介 (60443537)

# of Collaborated Projects: 1 results

# of Collaborated Products: 12 results
5. 村上修一 (70359420)

# of Collaborated Projects: 1 results

# of Collaborated Products: 12 results

KAKEHI Yoshiharu 筧 芳治

筧 芳治 カケヒ ヨシハル

Research Projects

Research Products

Co-Researchers

Development of high sensitivity high-temperature oilless pressure sensor with temperature compensation functionPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of rare metal free high performance flexible oxide transistors and logic circuits

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Investigation on the gate insulator thickness dependence of ZnO-SnO2 thin film transistors2019

Author(s)

Journal Title

DOI

NAID

Data Source

[Journal Article] Effect of postannealing on properties of ZnO-SnO2 thin film transistors2018

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Effect of post annealing on properties of ZnO-SnO2 thin film transistors2017

Author(s)

Journal Title

NAID

Data Source

[Presentation] 2 層型ひずみ抵抗薄膜 (TiCxOy/SiCxOy) を用いた高温オイルレス圧力センサの開発2020

Author(s)

Organizer

Data Source

[Presentation] MgOバッファ膜を用いたTiCxOy高温ひずみ抵抗薄膜の特性改善2019

Author(s)

Organizer

Data Source

[Presentation] Characteristics of ZnO-SnO2 Thin Film Transistors on Flexible Substrates2019

Author(s)

Organizer

Data Source

[Presentation] Development of high-temperature oilless pressure sensors using TiCxOy piezoresistive films2019

Author(s)

Organizer

Data Source

[Presentation] 2層型ひずみ抵抗薄膜を用いた直圧式高温圧力センサの開発2019

Author(s)

Organizer

Data Source

[Presentation] スパッタリング法により作製したZnO-SnO2 を用いた薄膜トランジスタの熱処理効果2018

Author(s)

Organizer

Data Source

[Presentation] 磁気中性線放電プラズマによるオイルレス圧力センサ用ストレインゲージ薄膜のドライエッチング2018

Author(s)

Organizer

Data Source

[Presentation] フレキシブル基板上に作製したZnO-SnO2薄膜トランジスタの特性2018

Author(s)

Organizer

Data Source

[Presentation] Investigation on the Gate Insulator Thickness Dependence of ZnO-SnO2 Thin Film Transistors2018

Author(s)

Organizer

Data Source

[Presentation] Effect of oxygen addition on the electromechanical property of TiC thin films2018

Author(s)

Organizer

Data Source

[Presentation] TiC薄膜を用いたストレインゲージ特性に及ぼす酸素添加の効果2018

Author(s)

Organizer

Data Source

[Presentation] MgO バッファ膜が高温オイルレス圧力センサ用ひずみ抵抗薄膜TiCxOy の特性に与える影響2018

Author(s)

Organizer

KAKEHI Yoshiharu 筧芳治

筧芳治カケヒヨシハル