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KAWAI Kentaro  川合 健太郎

ORCIDConnect your ORCID iD *help
Researcher Number 90514464
Other IDs
External Links
Affiliation (based on the past Project Information) *help 2023: 大阪大学, 大学院工学研究科, 招へい研究員
2016 – 2021: 大阪大学, 工学研究科, 助教
2011 – 2016: 大阪大学, 工学(系)研究科(研究院), 助教
2013: 大阪大学, 大学院工学研究科, 助教
Review Section/Research Field
Principal Investigator
Basic Section 30010:Crystal engineering-related / Basic Section 28050:Nano/micro-systems-related / Nano/Microsystems / Intelligent mechanics/Mechanical systems
Except Principal Investigator
Production engineering/Processing studies / Basic Section 28050:Nano/micro-systems-related / Nano/Microsystems
Keywords
Principal Investigator
マイクロ・ナノデバイス / ナノポア / ナノポアセンシング / イオンビーム加工 / 常圧CVD / センサデバイス / 二硫化モリブデン / 自己組織化 / ナノ加工 / グラフェン … More / ニューマチック / microvalve / hydraulic / pneumatic / robotics / MEMS / マイクロバルブ / 方向制御 / 空気圧アクチュエータ / 流体回路 / ロボティクス … More
Except Principal Investigator
SERS / ナノプロセス / DNA / ナノポアセンシング / 半導体表面 / 光エッチング / フッ素化剤 / グラフェン / ナノポアシーケンシング / 流体デバイス / MEMS / ナノマイクロ加工 / 三次元形状 / 修正加工 / 創成加工 / フォトエッチング / エッチング / N-フルオロピリジニウム塩 / 形状創成 / 3次元形状 / シリコン / 光転写 / N-フルオロピリジニウム塩 Less
  • Research Projects

    (8 results)
  • Research Products

    (99 results)
  • Co-Researchers

    (8 People)
  •  シリコンオンサファイア表面を用いた二硫化タングステン二次元結晶膜高配向大面積成長Principal Investigator

    • Principal Investigator
      川合 健太郎
    • Project Period (FY)
      2023 – 2025
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 30010:Crystal engineering-related
    • Research Institution
      Osaka University
  •  Fabrication of nanopore sensing device using two-dimensional MoS2 crystalPrincipal Investigator

    • Principal Investigator
      Kawai Kentaro
    • Project Period (FY)
      2019 – 2021
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 28050:Nano/micro-systems-related
    • Research Institution
      Osaka University
  •  Micro/Nano Fusion Process based Nanopore Sensing Device for Optical and Electrical Combined Detection

    • Principal Investigator
      TABATA OSAMU
    • Project Period (FY)
      2019 – 2021
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 28050:Nano/micro-systems-related
    • Research Institution
      Kyoto University of Advanced Science
  •  Hybrid nanopore sensing using molecular mechanicsPrincipal Investigator

    • Principal Investigator
      Kawai Kentaro
    • Project Period (FY)
      2017 – 2018
    • Research Category
      Grant-in-Aid for Young Scientists (B)
    • Research Field
      Nano/Microsystems
    • Research Institution
      Osaka University
  •  Establishment of fundamental technology for nanopore sensing device based on opto-electro detection principle by fusion process of MEMS and DNA

    • Principal Investigator
      TABATA OSAMU
    • Project Period (FY)
      2016 – 2018
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Nano/Microsystems
    • Research Institution
      Kyoto University
  •  FORMATION OF THREE-DIMENSIONAL SHAPES IN SEMICONDUCTOR SURFACES FOR FUNCTIONAL DEVICES THROUGH PHOTOCHEMICAL REACTION WITH ELECTROPHILIC FLUORINATION AGENTS

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      2014 – 2016
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  Drive system of pneumatic actuators for autonomous robot using microfluidic circuitPrincipal Investigator

    • Principal Investigator
      KAWAI Kentaro
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Young Scientists (B)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      Osaka University
  •  Shape formation in silicon surface by transfer photo-etching using chemical reaction at fluorinating agent-silicon interface

    • Principal Investigator
      UCHIKOSHI Junichi
    • Project Period (FY)
      2011 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University

All 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 Other

All Journal Article Presentation Patent

  • [Journal Article] Surface‐enhanced Raman spectroscopy with gold nanoparticle dimers created by sacrificial DNA origami technique2020

    • Author(s)
      Yamashita Naoki、Park Seongsu、Kawai Kentaro、Hirai Yoshikazu、Tsuchiya Toshiyuki、Tabata Osamu
    • Journal Title

      Micro & Nano Letters

      Volume: 15 Issue: 6 Pages: 384-389

    • DOI

      10.1049/mnl.2019.0416

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19H02571
  • [Journal Article] Specific Binding of DNA Origami on a Nanoscale Pattern Formed by AFM Lithography2019

    • Author(s)
      山下直輝, 朴 晟洙, 馬 志鵬, 川合 健太郎, 平井 義和, 土屋 智由, 田畑 修
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 139 Issue: 5 Pages: 95-102

    • DOI

      10.1541/ieejsmas.139.95

    • NAID

      130007641238

    • ISSN
      1341-8939, 1347-5525
    • Year and Date
      2019-05-01
    • Language
      Japanese
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Journal Article] Revealing the Influential Factor on Dimerizing of Triangular DNA Origami by Linker2018

    • Author(s)
      稲垣達也, 朴晟洙, 山下直輝, 馬志鵬, 川合健太郎, 平井義和, 土屋智由, 田畑修
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 138 Issue: 5 Pages: 171-177

    • DOI

      10.1541/ieejsmas.138.171

    • NAID

      130006729888

    • ISSN
      1341-8939, 1347-5525
    • Year and Date
      2018-05-01
    • Language
      Japanese
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Journal Article] Nanopore Fabrication of Two-Dimensional Materials on SiO2 Membranes Using He Ion Microscopy2018

    • Author(s)
      T. Hayashi, K. Arima, N. Yamashita, S. Park, Z. Ma, O. Tabata, K. Kawai
    • Journal Title

      IEEE Transactions on Nanotechnology

      Volume: 17 Issue: 4 Pages: 727-730

    • DOI

      10.1109/tnano.2018.2840721

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H03841, KAKENHI-PROJECT-17K14099
  • [Journal Article] Nanopore Fabrication of Two-Dimensional Materials on SiO2 Membranes Using He Ion Microscopy2018

    • Author(s)
      Takumi Hayashi, Kenta Arima, Naoki Yamashita, Seongsu Park, Zhipeng Ma, Osamu Tabata, Kentaro Kawai
    • Journal Title

      IEEE Transactions on Nanotechnology

      Volume: Accepted

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Journal Article] Photoetching method that provides improved silicon-on-insulator layer thickness uniformity in a defined area2017

    • Author(s)
      Yuki Miyata, Yasunori Nakamukai, Cassia Tiemi Azevedo, Miho Morita, Junichi Uchikoshi, Kentaro Kawai, Kenta Arima, Mizuho Morita
    • Journal Title

      Microelectronic Engineering

      Volume: 印刷中

    • Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Journal Article] Photoetching method that provides improved silicon-on-insulator layer thickness uniformity in a defined area2017

    • Author(s)
      Miyata Yuki、Nakamukai Yasunori、Azevedo Cassia Tiemi、Morita Miho、Uchikoshi Junichi、Kawai Kentaro、Arima Kenta、Morita Mizuho
    • Journal Title

      Microelectronic Engineering

      Volume: 180 Pages: 93-95

    • DOI

      10.1016/j.mee.2017.06.008

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17K14099, KAKENHI-PROJECT-16H03841
  • [Journal Article] Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs2017

    • Author(s)
      Ma Zhipeng、Huang Yunfei、Park Seongsu、Kawai Kentaro、Kim Do-Nyun、Hirai Yoshikazu、Tsuchiya Toshiyuki、Yamada Hirofumi、Tabata Osamu
    • Journal Title

      Small

      Volume: 14 Issue: 1 Pages: 1702028-1702028

    • DOI

      10.1002/smll.201702028

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H06122, KAKENHI-PROJECT-16H03841, KAKENHI-PROJECT-17K14099
  • [Journal Article] Formation of Gold Nanoparticle Dimers on Silicon by Sacrificial DNA Origami Technique2017

    • Author(s)
      Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    • Journal Title

      Micro & Nano Letters

      Volume: 12 Issue: 11 Pages: 854-859

    • DOI

      10.1049/mnl.2017.0426

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Journal Article] Measuring the Influence of Crossover in the Radial Structural and Mechanical Properties of DNA Origami Nanotube2017

    • Author(s)
      Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Journal Article] Effect of metal particles on the Si etching rate with N-fluoropyridinium salts2016

    • Author(s)
      Masaki Otani, Kentaro Kawai, Kentaro Tsukamoto, Takabumi Nagai, Kenji Adachi, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 10 Pages: 1080031-3

    • DOI

      10.7567/jjap.55.108003

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H03902, KAKENHI-PROJECT-26289017, KAKENHI-PROJECT-16K14133
  • [Journal Article] Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers2016

    • Author(s)
      Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 6S1 Pages: 06GL04-06GL04

    • DOI

      10.7567/jjap.55.06gl04

    • NAID

      210000146667

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Journal Article] Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry2013

    • Author(s)
      Junichi Uchikoshi, Yoshinori Hayashi, Noritaka Ajari, Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Journal Title

      Nanoscale Research Letters

      Volume: 8 Issue: 1 Pages: 2751-7

    • DOI

      10.1186/1556-276x-8-275

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560123, KAKENHI-PROJECT-24656101, KAKENHI-PROJECT-24686020
  • [Journal Article] Characterization of Si etching with N-fluoropyridinium salt2012

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikoshi, Masaki Otani, Toshinori Hirano, Yutaka Ie, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, and Mizuho Morita
    • Journal Title

      Current Applied Physics

      Volume: 12

    • URL

      http://www.sciencedirect.com/science/journal/15671739/12/supp/S4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Journal Article] Characterization of Si etching with N-fluoropyridinium salt2012

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikoshi, Masaki Otani, Toshinori Hirano, Yutaka Ie, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, Mizuho Morita
    • Journal Title

      Current Applied Physics

      Volume: 12

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Patent] エッチング処理用組成物及びエッチング処理方法2016

    • Inventor(s)
      川合 健太郎、森田 瑞穂、足達 健二、永井 隆文
    • Industrial Property Rights Holder
      ダイキン工業株式会社、国立大学法人大阪大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-03-04
    • Overseas
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Patent] エッチング処理用組成物及びエッチング処理方法2015

    • Inventor(s)
      足達 健二、永井 隆文、森田 瑞穂、川合 健太郎
    • Industrial Property Rights Holder
      ダイキン工業株式会社、国立大学法人大阪大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-043031
    • Filing Date
      2015-03-04
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] DNA シーケンシングデバイスのためのマイクロ流路を用いたナノピラー/横型ナノポア集積化2021

    • Author(s)
      野田晃平, 辻友希, 杉田祥吾, 山村和也, 有馬健太, 川合健太郎
    • Organizer
      2021年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19H02571
  • [Presentation] ヘリウムイオン顕微鏡でのナノポア形成における加工前処理条件の検討2021

    • Author(s)
      杉田祥吾,野田晃平,有馬健太,山村和也,川合健太郎
    • Organizer
      精密工学会2021年度関西地方定期学術講演会
    • Data Source
      KAKENHI-PROJECT-19K05233
  • [Presentation] DNA ナノポアセンシングのための MoS2自立膜形成プロセスの開発2021

    • Author(s)
      野田晃平,杉田祥吾,有馬健太,山村和也,川合健太郎
    • Organizer
      精密工学会2021年度関西地方定期学術講演会
    • Data Source
      KAKENHI-PROJECT-19K05233
  • [Presentation] Fabrication and observation of nanopore in two-dimensional materials using Helium ion microscope2021

    • Author(s)
      Kentaro Kawai
    • Organizer
      34th International Microprocesses and Nanotechnology Conference (MNC 2021)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19K05233
  • [Presentation] DNAナノポアシーケンシングデバイスのための3次元形状へのMoS2自立膜のCVD成膜2021

    • Author(s)
      野田晃平,杉田祥吾,有馬健太,山村和也,川合健太郎
    • Organizer
      2021年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19K05233
  • [Presentation] ヘリウムイオン顕微鏡でのナノポア形成における加工前処理条件の検討2021

    • Author(s)
      杉田祥吾,野田晃平,有馬健太,山村和也,川合健太郎
    • Organizer
      精密工学会2021年度関西地方定期学術講演会
    • Data Source
      KAKENHI-PROJECT-19H02571
  • [Presentation] Fabrication and observation of nanopore in two-dimensional materials using Helium ion microscope2021

    • Author(s)
      Kentaro Kawai
    • Organizer
      34th International Microprocesses and Nanotechnology Conference (MNC 2021)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02571
  • [Presentation] DNA シーケンシングデバイスのためのマイクロ流路を用いたナノピラー/横型ナノポア集積化プロセスの開発2021

    • Author(s)
      野田晃平,辻友希,杉田祥吾,山村和也,有馬健太,川合健太郎
    • Organizer
      2021年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19K05233
  • [Presentation] Reproducible formation of graphene nanopore within 10 nm using helium ion microscope2020

    • Author(s)
      S. Sugita, T. Tsuji, K. Arima, K. Yamamura, K. Kawai
    • Organizer
      18th International Conference on Precision Engineering (ICPE2020)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19K05233
  • [Presentation] Reproducible formation of graphene nanopore within 10 nm using helium ion microscope2020

    • Author(s)
      S. Sugita, T. Tsuji, K. Arima, K. Yamamura, K. Kawai
    • Organizer
      8th International Conference on Precision Engineering (ICPE2020)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02571
  • [Presentation] Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimers Created by Sacrificial DNA Origami Technique2019

    • Author(s)
      Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    • Organizer
      The 14th International Conference on Nano/Micro Engineered and Molecular Systems
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02571
  • [Presentation] ガリウムを触媒とするエタノール雰囲気中でのグラフェン膜CVD2019

    • Author(s)
      辻 友希、有馬 健太、山村 和也、川合 健太郎
    • Organizer
      第66回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Presentation] Freestanding graphene CVD growth on insulating substrate using Ga catalyst2019

    • Author(s)
      Tomoki Tsuji, Kenta Arima, Kazuya Yamamura, and Kentaro Kawai
    • Organizer
      The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02571
  • [Presentation] Rapid assembly of DNA origami in microfluidic temperature gradient2019

    • Author(s)
      K. Kawai, K. Hara, K. Arima, K. Yamamura, O. Tabata
    • Organizer
      The 20th International Conference on Solid-State Sensors, Actuators and Microsystems(Transducers 2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19K05233
  • [Presentation] DNA origami assembly in gradient temperature in microfluidic channel2019

    • Author(s)
      Kentaro Kawai, Hara Keita, Kenta Arima, Kazuya Yamamura, Osamu Tabata
    • Organizer
      The 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Presentation] DNA origami assembly in gradient tempareture microfluidic channel2019

    • Author(s)
      K. Kawai, K. Hara, K. Arima, K. Yamamura, O. Tabata
    • Organizer
      The 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19K05233
  • [Presentation] Freestanding graphene CVD growth on insulating substrate using Ga catalyst2019

    • Author(s)
      T. Tsuji, K. Arima, K. Yamamura, K. Kawai
    • Organizer
      The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19K05233
  • [Presentation] 犠牲DNAオリガミ技術によって形成した金ナノ粒子二量体を用いた表面増強ラマン分光法による分子検出2019

    • Author(s)
      山下直輝,朴晟洙,馬志鵬,川合健太郎,平井義和,土屋智由,田畑修
    • Organizer
      第36回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-19H02571
  • [Presentation] Rapid assembly of DNA origami in microfluidic temperature gradient2019

    • Author(s)
      Kentaro Kawai, Keita Hara, Kenta Arima, Kazuya Yamamura, Osamu Tabata
    • Organizer
      The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02571
  • [Presentation] DNA origami assembly in gradient tempareture microfluidic channel2019

    • Author(s)
      Kentaro Kawai, Keita Hara, Kenta Arima, Kazuya Yamamura, Osamu Tabata
    • Organizer
      The 14th International Conference on Nano/Micro Engineered and Molecular Systems
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02571
  • [Presentation] Effect of Temperature Distribution in Microtube and Microfluidic Channel for DNA Origami Assembly2018

    • Author(s)
      K. Hara, T. Inagaki, N. Yamashita, K. Arima, K. Yamamura, O. Tabata, K. Kawai
    • Organizer
      The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Presentation] Nanopore Fabrication and DNA sensing on Two-Dimensional Materials using Helium Ion Microscopy2018

    • Author(s)
      Kentaro Kawai, Takumi Hayashi, Kenta Arima, Kazuya Yamamura, Osamu Tabata
    • Organizer
      The 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] 三次元DNAオリガミ構造作製におけるアニール条件及びDNA濃度比の影響2018

    • Author(s)
      中村亮太、原 啓太、有馬 健太、山村 和也、田畑 修、川合 健太郎
    • Organizer
      第35回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] マイクロ流路を用いたDNA自己組織ナノ構造体の高速作製2018

    • Author(s)
      原 啓太、稲垣 達也、山下 直輝、有馬 健太、山村 和也、田畑 修、川合 健太郎
    • Organizer
      第35回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] Nanopore Fabrication and DNA sensing on Two-Dimensional Materials using Helium Ion Microscopy2018

    • Author(s)
      Kentaro Kawai, Takumi Hayashi, Kenta Arima, Kazuya Yamamura, Osamu Tabata
    • Organizer
      The 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Presentation] Effect of Temperature Distribution in Microtube and Microfluidic Channel for DNA Origami Assembly2018

    • Author(s)
      K. Hara, T. Inagaki, N. Yamashita, K. Arima, K. Yamamura, O. Tabata, K. Kawai
    • Organizer
      The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2018)
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] 三次元DNAオリガミ構造作製におけるアニール条件及びDNA濃度比の影響2018

    • Author(s)
      中村亮太、原 啓太、有馬 健太、山村 和也、田畑 修、川合 健太郎
    • Organizer
      第35回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Presentation] マイクロ流路を用いたDNA自己組織ナノ構造体の高速作製2018

    • Author(s)
      原 啓太、稲垣 達也、山下 直輝、有馬 健太、山村 和也、田畑 修、川合 健太郎
    • Organizer
      第35回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Presentation] リンカーによる三角形DNAオリガミ二量体形成における支配要因の解明2017

    • Author(s)
      稲垣達也, 朴晟洙, 山下直輝, 馬志鵬, 川合健太郎, 平井義和, 土屋智由, 田畑修
    • Organizer
      平成29年度電気学会センサ・マイクロマシン部門総合研究会
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] ヘリウムイオン顕微鏡を用いたSiO2膜上の単分子膜へのナノポア形成2017

    • Author(s)
      林 拓海、川合 健太郎、有馬 健太、森田 瑞穂
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県横浜市
    • Year and Date
      2017-03-14
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] Rapid Folding of DNA Nanostructures in Microfluidic Channel2017

    • Author(s)
      K. Hara, K. Arima, O. Tabata, K. Kawai
    • Organizer
      The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] Nanopore Fabrication to Two Dimensional Crystals by Adjusting Dose and focus of Helium Ion Microscope2017

    • Author(s)
      Kentaro Kawai,Takumi Hayashi, Kenta Arima, Osamu Tabata
    • Organizer
      応用物理学会秋季大会シンポジウム
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] Nanopore Fabrication to Two Dimensional Crystals by Adjusting Dose and focus of Helium Ion Microscope2017

    • Author(s)
      Kentaro Kawai,Takumi Hayashi, Kenta Arima, Osamu Tabata
    • Organizer
      応用物理学会秋季大会シンポジウムRecent GFIS /advanced ion source microscopy technologies and its future prospects for R & D of materials and devices
    • Invited
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Presentation] ヘリウムイオン顕微鏡を用いたSiO2 膜上の単分子膜へのナノポア形成2017

    • Author(s)
      林拓海、有馬健太、川合健太郎
    • Organizer
      2017年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] Nanopore Fabrication of Two-Dimensional Materials on SiO2 Membranes Using He Ion Microscopy2017

    • Author(s)
      akumi Hayashi, Kenta Arima, Naoki Yamashita, Seongsu Park, Zhipeng Ma, Osamu Tabata, Kentaro Kawai
    • Organizer
      12th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] NANOPORE SENSING DEVICE INTEGRATING NANOPILLAR ARRAY FOR DNA TRANSLOCATION CONTROL2017

    • Author(s)
      Takahiro Tanaka, Syogo Kanetani, Kenta Arima, Kentaro Kawai
    • Organizer
      The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Presentation] NANOPORE SENSING DEVICE INTEGRATING NANOPILLAR ARRAY FOR DNA TRANSLOCATION CONTROL2017

    • Author(s)
      Takahiro Tanaka, Syogo Kanetani, Kenta Arima, Kentaro Kawai
    • Organizer
      The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] ナノピラー/ 横型ナノポア集積化DNAセンシングデバイスの開発2017

    • Author(s)
      田中貴大、金谷省吾、有馬健太、川合健太郎
    • Organizer
      2017年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] Nanopore Fabrication of Two-Dimensional Materials on SiO2 Membranes Using He Ion Microscopy2017

    • Author(s)
      Takumi Hayashi, Kenta Arima, Naoki Yamashita, Seongsu Park, Zhipeng Ma, Osamu Tabata, Kentaro Kawai
    • Organizer
      12th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. (IEEE-NEMS 2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Presentation] Formation of Gold Nanoparticle Dimers on Silicon by Sacrificial DNA Origami Technique2017

    • Author(s)
      Naoki Yamashita, Zhipeng Ma, Seongsu park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    • Organizer
      The 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] 犠牲DNAオリガミ技術とナノギャップを有する金ナノ粒子二量体作製への応用2017

    • Author(s)
      山下直輝, 朴晟洙, 馬志鵬, 川合健太郎, 平井義和, 土屋智由, 田畑修
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] Nanopore Fabrication on Graphene and SiO2 Membrane Using Helium Ion Microscope for DNA Sensing Device2017

    • Author(s)
      Kentaro Kawai,Takumi Hayashi, Kenta Arima, Osamu Tabata
    • Organizer
      Workshop on Microsystems Technologies and Applications for IOT - A MicRO Alliance
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Presentation] RAPID FOLDING OF DNA NANOSTRUCTURES IN MICROFLUIDIC CHANNEL2017

    • Author(s)
      Keita Hara, Kenta Arima, Osamu Tabata, Kentaro Kawai
    • Organizer
      The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17K14099
  • [Presentation] Different Crossover/Nick Designs of 2D DNA Origami2017

    • Author(s)
      馬志鵬, 山下直輝, 朴晟洙, 川合健太郎, 平井義和, 土屋智由, 田畑修
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるSi表面ランダムダブルテクスチャ形成2016

    • Author(s)
      熊田 竜也、川合 健太郎、永井 隆文、足達 健二、有馬 健太、森田 瑞穂
    • Organizer
      応用物理学会
    • Place of Presentation
      東京工業大学 大岡山キャンパス(東京都目黒区)
    • Year and Date
      2016-03-19
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] Nanopore Formation in Electrolyte Solution to SiO2 Membrane Using Pulse-Voltage Injection2016

    • Author(s)
      Kentaro Kawai, Yuichi Shibuno, Takumi Hayashi, Zhipeng Ma, Naoki Yamashita, Seongsu Park, Kosuke Tanabe, Kenta Arima, Mizuho Morita, Osamu Tabata
    • Organizer
      The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016)
    • Place of Presentation
      Miyagi, Japan
    • Year and Date
      2016-04-17
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] Radial Mechanical Property of a Crossover Density-Varied DNA Nanotube2016

    • Author(s)
      Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, and Osamu Tabata
    • Organizer
      The 29th International Microprocesses and Nanotechnology Conference (MNC 2016)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] Control of nanopore formation to insulator membrane in electrolyte solution2016

    • Author(s)
      Kentaro Kawai, Takumi Hayashi, Yuichi Shibuno, Zhipeing Ma, Naoki Yamashita, Seongsu Park, Kenta Arima, Mizuho Morita, Osamu Tabata
    • Organizer
      The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS2016)
    • Place of Presentation
      Dublin, Ireland
    • Year and Date
      2016-10-09
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] 絶縁薄膜への電圧印可による液中ナノポア形成2016

    • Author(s)
      川合健太郎,有馬健太,森田瑞穂,渋野雄一,朴 晟洙,山下直輝,馬 志鵬,田畑 修
    • Organizer
      平成28年電気学会E部門総合研究会 E部門合同研究会
    • Place of Presentation
      石川県金沢市
    • Year and Date
      2016-06-29
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] Nanopore Formation to thin SiO2 membrane in electrolyte Solution using dielectric breakdown2016

    • Author(s)
      Kentaro Kawai, Takumi Hayashi, Yuichi Shibuno, Zhipeing Ma, Naoki Yamashita, Seongsu Park, Kenta Arima, Mizuho Morita, Osamu Tabata
    • Organizer
      Eurosensors 2016
    • Place of Presentation
      Budapest, Hungary
    • Year and Date
      2016-09-04
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] Mechanical Stability for the Connections of DNA Origami Using Anti-Parallel/Parallel Double Crossovers2016

    • Author(s)
      Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    • Organizer
      The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016)
    • Place of Presentation
      Miyagi, Japan
    • Year and Date
      2016-04-17
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03841
  • [Presentation] マイクロ流体回路を用いた空圧人工筋高出力ロボットの作製2014

    • Author(s)
      川合健太郎, 有馬健太, 森田瑞穂
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京
    • Data Source
      KAKENHI-PROJECT-24760207
  • [Presentation] Development of Silicon Photo-Etching with N-Fluoropyridinium Salts2014

    • Author(s)
      Kenji Adachi, Takabumi Nagai, Junichi Uchikoshi, Masaki Otani, Toshinori Hirano, Kentaro Kawai, Mizuho Morita
    • Organizer
      INTERNATIONAL CONFERENCE ON FLUORINE CHEMISTRY
    • Place of Presentation
      Pacifico Yokohama(Kanagawa・Yokohama)
    • Year and Date
      2014-05-29
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] Texturing Low Reflecting Surface of Random Double Inverted Pyramids Using N-fluoropyridinium Salt2014

    • Author(s)
      Tatsuya Kumada, Kentaro Kawai, Toshinori Hirano, Masaki Otani, Takabumi Nagai, Kenji Adachi, Kenta Arima, and Mizuho Morita
    • Organizer
      40th IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE
    • Place of Presentation
      Denver(USA)
    • Year and Date
      2014-06-11
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] Mask-less formation of anti-reflecting inverted-pyramids to single-crystal Si solar cell by N-fluoropyridinium salts2014

    • Author(s)
      Kentaro Kawai, Tatsuya Kumada, Takabumi Nagai, Kenji Adachi, Kenta Arima and Mizuho Morita
    • Organizer
      EMN Summer Meeting
    • Place of Presentation
      Cancun(Mexico)
    • Year and Date
      2014-06-10
    • Invited
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] Nomally-closed valve integration for pneumatic actuators2013

    • Author(s)
      Kentaro Kawai, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Organizer
      The 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2013)
    • Place of Presentation
      Barcelona, Spain
    • Data Source
      KAKENHI-PROJECT-24760207
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコンのランダム逆ピラミッドの形成2013

    • Author(s)
      足達健二、永井隆文、平野利典、大谷真輝、川合健太郎、打越純一、森田瑞穂
    • Organizer
      第36回フッ素化学討論会
    • Place of Presentation
      つくば国際会議場(つくば市)
    • Year and Date
      2013-10-04
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] ロボット駆動のためのマイクロバルブ集積化制御回路の開発2013

    • Author(s)
      川合 健太郎, 打越 純一, 有馬 健太, 森田 瑞穂
    • Organizer
      精密工学会 2013年度春季大会
    • Place of Presentation
      東京工業大学)
    • Data Source
      KAKENHI-PROJECT-24760207
  • [Presentation] Nomally-closed valve integration for pneumatic actuators2013

    • Author(s)
      K. Kawai, J. Uchikoshi, K. Arima, and M. Morita
    • Organizer
      Proc. The 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2013)
    • Place of Presentation
      Barcelona, Spain
    • Data Source
      KAKENHI-PROJECT-24760207
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコンのランダム逆ピラミッドの形成2013

    • Author(s)
      平野利典、打越純一、大谷真輝、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      厚木市
    • Year and Date
      2013-03-28
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Efficient and Scalable Liquid Handling in Micro/Nano-fluidic System for biomedical applications2013

    • Author(s)
      K. Kawai, J. Uchikoshi, K. Arima, and M. Morita
    • Organizer
      Collaborative Conf. on 3D & Materials Research (CC3DMR 2013)
    • Place of Presentation
      Jeju, Korea
    • Invited
    • Data Source
      KAKENHI-PROJECT-24760207
  • [Presentation] Nomally-closed valve integration for pneumatic actuators2013

    • Author(s)
      Kentaro Kawai, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Organizer
      The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2013
    • Place of Presentation
      Barcelona. Spain
    • Data Source
      KAKENHI-PROJECT-24760207
  • [Presentation] Efficient and Scalable Liquid Handling in Micro/Nano-fluidic System2013

    • Author(s)
      Kentaro Kawai, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Organizer
      The Collaborative Conference on Materials Research (CCMR) 2013
    • Place of Presentation
      Jeju, South Korea
    • Invited
    • Data Source
      KAKENHI-PROJECT-24760207
  • [Presentation] Efficient and Scalable Liquid Handling in Micro/Nano-fluidic System for biomedical applications2013

    • Author(s)
      K. Kawai, J. Uchikoshi, K. Arima, and M. Morita
    • Organizer
      Abstracts of Collaborative Conf. on 3D & Materials Research (CC3DMR 2013)
    • Place of Presentation
      Jeju, Korea
    • Invited
    • Data Source
      KAKENHI-PROJECT-24760207
  • [Presentation] ロボット駆動のためのマイクロバルブ集積化制御回路の開発2013

    • Author(s)
      川合健太郎, 打越純一, 有馬健太, 森田瑞穂
    • Organizer
      2013年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京
    • Data Source
      KAKENHI-PROJECT-24760207
  • [Presentation] Development of Silicon Photo-Etching with N-Fluoropyridinium Salts2012

    • Author(s)
      Junichi Uchikoshi, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2012-10-24
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Formation of Three-Dimensional Shape in Silicon Surface by Photo-Etching with N-Fluoropyridinium Salts2012

    • Author(s)
      Masaki Otani, Junichi Uchikoshi, Toshinori Hirano, Kentaro Tsukamoto, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるSi表面テクスチャの形成2012

    • Author(s)
      大谷真輝、打越純一、塚本健太郎、平野利典、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      2012年度精密工学会春季大会学術講演会
    • Place of Presentation
      八王子市
    • Year and Date
      2012-03-15
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Absolute Flatness Measurements of Silicon Mirrors by A Three-Intersections Method Using Near-Infrared Interferometry2012

    • Author(s)
      Junichi Uchikoshi, Yoshinori Hayashi, Noritaka Ajari, Katsumi Oda, Taro Arai, Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Optical property of random inverted-pyramid textures on Si surface by etching with Nfluoropyridinium salts2012

    • Author(s)
      Masaki Otani, Junichi Uchikoshi, Kentaro Tsukamoto, Toshinori Hirano, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, and Mizuho Morita
    • Organizer
      PACIFIC RIM MEETING ON ELECTROCHEMICAL AND SOLID-STATE SCIENCE
    • Place of Presentation
      Honolulu, Hawaii, U.S.A.
    • Year and Date
      2012-10-10
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いたエッチングによるSiのランダム逆ピラミッドの形成2012

    • Author(s)
      平野利典、打越純一、大谷真輝、塚本健太郎、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      2012年度精密工学会秋季大会学術講演会
    • Place of Presentation
      北九州市
    • Year and Date
      2012-09-14
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Formation of Si Random Inverted-Pyramids by Etching with N-Fluoropyridinium Salts2012

    • Author(s)
      Toshinori Hirano, Junichi Uchikoshi, Masaki Otani, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Metal Particulates on Si Etching with N-Fluoropyridinium Salts2011

    • Author(s)
      Masaki Otani, Junichi Uchikoshi, Kentaro Tsukamoto, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2011-10-10
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Cu assisted etching with N-fluoropyridinium salts2011

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikoshi, Masaki Otani,Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2011-10-10
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Metal Particulates on Si Etching with N-fluoropyridinium Salts2011

    • Author(s)
      Masaki Otani, Junichi Uchikoshi, Kentaro Tsukamoto, Takabumi Nagai, Kenji Adachi,Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Cu assisted etching of Si with N-fluoropyridinium salt2011

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikosh, Masaki Otani, Takabumi Nagai, Kenji Adachi,Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコン表面の精密位置合わせ3次元形状創成2011

    • Author(s)
      大谷真輝、打越純一、塚本健太郎、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      2011年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢市
    • Year and Date
      2011-09-22
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコン表面の精密位置合わせ3次元形状創成2011

    • Author(s)
      大谷真輝、打越純一、塚本健太郎、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      2011年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢市
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコンのランダム逆ピラミッドの形成

    • Author(s)
      足達健二、永井隆文、平野利典、大谷真輝、川合健太郎、打越純一、森田瑞穂
    • Organizer
      第36回フッ素化学討論会
    • Place of Presentation
      つくば国際会議場(茨城県)
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いたエッチングによるSiのランダム逆ピラミッドの形成

    • Author(s)
      平野利典,打越純一,大谷真輝,塚本健太郎,永井隆文,足達健二,川合健太郎,有馬健太,森田瑞穂
    • Organizer
      2012年度精密工学会秋季大会学術講演会
    • Place of Presentation
      北九州市
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Optical property of random inverted-pyramid textures on Si surface by etching with N-fluoropyridinium salts

    • Author(s)
      Masaki Otani, Junichi Uchikoshi, Kentaro Tsukamoto, Toshinori Hirano, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, and Mizuho Morita
    • Organizer
      PACIFIC RIM MEETING ON ELECTROCHEMICAL AND SOLID-STATE SCIENCE
    • Place of Presentation
      Honolulu, Hawaii, U.S.A.
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコンのランダム逆ピラミッドの形成

    • Author(s)
      平野利典,打越純一,大谷真輝,永井隆文,足達健二,川合健太郎,有馬健太,森田瑞穂
    • Organizer
      第60 回応用物理学会春季学術講演会
    • Place of Presentation
      厚木市
    • Data Source
      KAKENHI-PROJECT-23560123
  • 1.  MORITA Mizuho (50157905)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 27 results
  • 2.  TABATA OSAMU (20288624)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 26 results
  • 3.  菅野 公二 (20372568)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 4.  UCHIKOSHI Junichi (90273581)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 21 results
  • 5.  ADACHI Kenji (60521739)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 4 results
  • 6.  山下 直輝 (50847746)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results
  • 7.  有馬 健太
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 1 results
  • 8.  山田 啓文
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 1 results

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