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MORITA Shinzo  森田 慎三

ORCIDConnect your ORCID iD *help
… Alternative Names

森田 愼三  モリタ シンゾウ

森田 慎三

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Researcher Number 00076548
Affiliation (based on the past Project Information) *help 1991: Nagoya University, Center for Co-operative Research in Advanced Science and Technology, 先端技術共同研究センター, 助教授
1990: 名古屋大学先端技術共同研究センター, 助教授
1988 – 1989: Dept. of Engineering, Nagoya University, Associate Professor, 工学部, 助教授
1986: 名古屋大学, 工学部, 助教授
Review Section/Research Field
Principal Investigator
機械工作
Except Principal Investigator
電子材料工学 / 工業物理化学
Keywords
Principal Investigator
Electronic static motor / Effect of carrier gas / Submicron pattern fabrication / Plasma polymerized alpha-methyle-styrene / plasma polymerized styrene / three dementional machining / Plasma polymerized resist / キャリヤガス効果 / 電子線リングラフィ立体加工法 / 静電モ-タ加工 … More / キセリヤ-ガス効果 / 静電モ-タ-加工 / キャリヤ-ガス効果 / サブミクロンパタ-ン加工 / プラズマ重合αメチルスチレンネガレジスト / プラズマ重合スチレンネガレジスト / 電子線リソグラフィ立体加工法 / プラズマ重合レジスト … More
Except Principal Investigator
Laser interferometer / X-ray source / Dry process / Plasma polymerization / X-ray resist / X-ray lithography / プラズマ重合装置 / 二重双光路レーザ干渉膜厚計 G値 / 自己現像 / アラインメント / レーザ干渉膜厚計 / X線源 / ドライプロセス / プラズマ重合 / X線レジスト / X線リソグラフィ / プラズマ診断 / プラズマ分子工学 / プラズマプロセシング / 低温プラズマ / プラズマ反応 Less
  • Research Projects

    (3 results)
  • Co-Researchers

    (12 People)
  •  Development and application of the three dimentional fabrication method of micro-mechanical device using plasma polymerized resistPrincipal Investigator

    • Principal Investigator
      MORITA Shinzo
    • Project Period (FY)
      1989 – 1991
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      機械工作
    • Research Institution
      Nagoya University
  •  プラズマプロセシングによる高性能材料合成に関する研究

    • Principal Investigator
      長田 義仁
    • Project Period (FY)
      1986
    • Research Category
      Grant-in-Aid for Co-operative Research (B)
    • Research Field
      工業物理化学
    • Research Institution
      Ibaraki University
  •  Research on Resist for X-ray and E-B Total Dry Vacuum Lithography

    • Principal Investigator
      HATTORI Shuzo
    • Project Period (FY)
      1984 – 1986
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      電子材料工学
    • Research Institution
      Nagoya University
  • 1.  HATTORI Shuzo (10023003)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 2.  長田 義仁 (60007804)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 3.  明石 和夫 (00013095)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 4.  鯉沼 秀臣 (70011187)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 5.  岡崎 幸子 (30053523)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 6.  津田 穣 (90009506)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 7.  HANE Kazuhiro (50164893)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  松田 文夫 (60109303)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  UCHIKAWA Yoshiki (20023260)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  MARUSE Susumu (20022981)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  IEDA Masayuki (50022984)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  UCHIDA Yoshiyuki (20023187)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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