YAMAMOTO Masaki 山本正樹

… Alternative Names

YAMAMOAT Masaki 山本正樹

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Researcher Number	00137887
Affiliation (based on the past Project Information) *help	2001 – 2007: Tohoku University, Institute of Multidisciplinary Research for Advanced Materials, Professor, 多元物質科学研究所, 教授 1998 – 2000: Tohoku University, Research Institute for Scientific Measurements, Professor, 科学計測研究所, 教授 1995 – 1997: 東北大学, 科学計測研究所, 助教授 1990 – 1993: Research Institute for Scientific Mesurements, Tohoku university, Associate Prof, 科学計測研究所, 助教授 1990: 東北大学科学計測研究所, 助教授 1988 – 1989: 東北大学, 科学計測研究所, 助手
Review Section/Research Field	Principal Investigator Applied optics/Quantum optical engineering / Engineering / Science and Engineering / 物理計測・光学 / Applied materials / 電子機器工学 Except Principal Investigator 物理計測・光学 / Applied optics/Quantum optical engineering / 広領域 / 結晶学 / Applied materials science/Crystal engineering
Keywords	Principal Investigator 多層膜 / 軟X線 / エリプソメトリー / 超薄膜 / 偏光解析法 / polarimetry / ellipsometry / スパッタリング / 多層膜鏡 / 軟X線移相子 … More / 軟X線偏光子 / 光学定数 / Growth rate monitor / Ellipsometer / Sputtering / Period thickness distribution control / Laser Plasma / Microscope / Multilayer / Soft X-ray / 成膜レートモニター / エリプソメーター / 周期膜厚分布制御 / レーザープラズマ / 顕微鏡 / DEBRIS REGECTION / WAVEFRONT ERROR CORRECTION / WAVEFRONT ERROR / PRECISION IMAGING-MIRROR / MULTILAYER MIRROR / SYNTHETIC MULTILAYERS / INTERFEROMETRY / SOFT X-RAY / 結像光学系 / 波面計測 / 干渉計 / ビームスプリッタ / デブリ除去 / 波面補正 / 波面誤差 / 精密結像鏡 / 光学超薄膜 / 干渉計測 / high accuracy measurement / refractive index inhomogeneity / back face reflection / perfect cireular polarization / alignment method / spectroscopic ellipsometer / ArFレーザー / KrFレーザー / エキシマレーザー / 高正確度測走 / 高正確度測定 / 屈折率不均一 / 裏面反射 / 完全円偏光 / 校正法 / 分光エリプソメーター / conpensator / phase shifter / polarizer / multilager / extreme ultra-violet / soft-X-ray / 移相子 / 位相子 / 彩相子 / 偏光子 / 極紫外線 / Soft-X-Ray Ellipsometry / Transmission Multilayr / Soft-X-Ray Phase Shifter / Soft-X-Ray Polarizer / Optical Constants / Ultra-thin Film / Multilayr / Soft-X-Ray / 軟X線偏光解析 / 透過多層膜 / イオンビームスパッタ成膜 / 連続均質膜 / アモルファス超薄膜 / ミリング / X線 / 極紫外光 / 電磁波 / 波面制御 / 反射波面 / 界面現象 / その場観察 / 多結晶質薄膜 / 非晶質薄膜 / 金属超格子 / 軟X線多層膜 / 偏光解析 / 耐熱光学素子 / 屈折率分散 / 薄膜 / 屈折率分布 / 光導波路 … More Except Principal Investigator 氷結晶 / 擬似液体層 / 形態形成 / 表面融解 / 光学定数 / 超薄膜 / 結晶粒界 / 界面張力 / 偏光解析法 / 粒界 / 界面融解転移 / 薄膜形成技術 / X線結像光学系評価法 / X線望遠鏡 / X線顕微鏡 / 結晶X線光学 / 軟X線光学の基礎 / X線結像光学 / soft x-ray spectro-reflectometer / soft x-ray optics / ultrathin film / optical constant / multilayer / soft x-ray / 軟X線分光反射率計 / 軟X線光学素子 / 多層膜 / 軟X線 / photoemission / fluorescence / reflection / absorption / ultraviolet / Schwarzschild objective / microspectroscopy / シュワルツシルド縮小光学系 / シュパルツシルト縮小光学系 / 光電子分光 / 蛍光 / 反射 / 吸収 / 真空紫外 / シュバルツシルト縮小光学系 / 顕微分光計 / Optical constant / Ultrathin film / Reflectivity / Reflection mirror / Multilayr mirror / He resonance line / Vacuum ultraviolet / Extreme ultraviolet / 極端紫外光 / 反射率 / 反射鏡 / 多層膜鏡 / ヘリウム共鳴線 / 真空紫外光 / 極紫外光 / Grain boundary / Ice crystal / Ellipsometry / Grain boundary melting / Surface melting / Quasi-liquid layr / 偏光解析 / 疑似液体層 / 凝似液体層 / 界面の融解転移 / 界面融解相転移 / 透過分光型偏光解析法 / 雪氷物性 / 融解転移 / 透過分光偏光解析法 / 界面カイネティクス / 固液界面 / 分子動力学 / 鏡面加工と評価 / 界面カイネティック係数 / 自己拡散係数 / 分子動力学法 / コヒ-レントX線光学 Less

High-resolution, element-specific microscope using a laser-produced-plasma soft X-ray sourcePrincipal Investigator
- Principal Investigator
  
  YAMAMOTO Masaki
- Project Period (FY)
  2003 – 2007
- Research Category
  
  Grant-in-Aid for Specially Promoted Research
- Review Section
  
  Science and Engineering
  Engineering
- Research Institution
  Tohoku University
多層膜表面ミリングによる反射波面の制御Principal Investigator
- Principal Investigator
  
  TSURU Toshihide, 山本正樹
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tohoku University
DEVELOPMENT OF SOFT X-RAY INTERFEROMETRY WITH SYNTHETIC MULTILAYERS AND APPLICATION TO WAVEFRONT MEASUREMENTS AND CONTROL OF PRECISION IMAGING MIRRORSPrincipal Investigator
- Principal Investigator
  
  YAMAMOTO Masaki
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  TOHOKU UNIVERSITY
氷結晶粒界面における融解相転移の実験的検証とその氷物性研究に果たす役割
- Principal Investigator
  
  古川義純
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Hokkaido University
Development of Multiple microspectometer in the Visible/Vacuum-Ultraviolet Region
- Principal Investigator
  
  WATANABE Makoto
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  TOHOKU UNIVERSITY
Development of soft-X-ray multilayer polarizing elements amd their application to soft-X-ray ellipsometryPrincipal Investigator
- Principal Investigator
  
  YAMAMOTO Masaki
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tohoku University
Generation of perfect circular polarizations and thesr use for development of a precise alignment method for spectroscopic ellipsometersPrincipal Investigator
- Principal Investigator
  
  YAMAMOTO Masaki
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tohoku University
ナノメーター周期の多層膜形成過程のエリプソメトリーモニター周期定常値による研究Principal Investigator
- Principal Investigator
  
  山本正樹
- Project Period (FY)
  1996
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tohoku University
Development fo High Reflectivity Multilayr Mirrors in the Extreme Ultraviolet Region(60nm-20nm)
- Principal Investigator
  
  WATANABE Makoto
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  広領域
- Research Institution
  TOHOKU UNIVERSITY
氷結晶の表面、下地との界面及び粒界面における擬似液体層の微視的構造の研究
- Principal Investigator
  
  古川義純
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hokkaido University
氷結晶の表面、下地との界面及び粒界面における擬似液体層の微視的構造の研究
- Principal Investigator
  
  古川義純
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hokkaido University
X線結像光学(成果とりまとめ)
- Principal Investigator
  
  山下広順
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagoya University
Development of Soft-X-Ray Multilayrs and Novel Multilayr OpticsPrincipal Investigator
- Principal Investigator
  
  YAMAMOTO Masaki
- Project Period (FY)
  1992 – 1993
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  物理計測・光学
- Research Institution
  TOHOKU UNIVERSITY
X線結像光学(総括班)
- Principal Investigator
  
  山下広順
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  宇宙科学研究所
氷結晶の表面、下地との界面及び粒界面における擬似液体層の微視的構造の研究
- Principal Investigator
  
  FURUKAWA Yoshinori
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hokkaido University
エリプソメトリ-による光導波路の断面の屈折率プロファイルの非破壊測定Principal Investigator
- Principal Investigator
  
  山本正樹
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  電子機器工学
- Research Institution
  Tohoku University
軟X線光学の基礎Principal Investigator
- Principal Investigator
  
  山本正樹
- Project Period (FY)
  1989 – 1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Tohoku University
Study of the melting transition at the interface of ice crystal using an ellipsometry
- Principal Investigator
  
  FURUKAWA Yoshinori
- Project Period (FY)
  1989 – 1990
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  結晶学
- Research Institution
  Hokkaido University
アモルファス超薄膜の連続化膜厚Principal Investigator
- Principal Investigator
  
  山本正樹
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Applied materials
- Research Institution
  Tohoku University
Study of Soft X-Ray Optical Constants of Thin Films and Development of Soft X-Ray Multilayer Optics
- Principal Investigator
  
  NAMIOKA Takeshi
- Project Period (FY)
  1988 – 1990
- Research Category
  
  Grant-in-Aid for General Scientific Research (A)
- Research Field
  
  物理計測・光学
- Research Institution
  Tohoku University

All 2007 2005 2004 2003

All Journal Article Presentation Book

[Book] EUV光源の開発と応用第II編「EUVリソグラフィ用のマスクとレジスト技術」第1章「X線多層膜の物理」2007
- Author(s)
  山本正樹
- Publisher
  (株)シーエムシー出版
- Data Source
  KAKENHI-PROJECT-15002001
[Book] EUV光源の開発と応用第II編EUVリソグラフィ用のマスクとレジスト技術第1章X線多層膜の物理2007
- Author(s)
  山本正樹
- Publisher
  (株)シーエムシー出版
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Development of Multilayer Imaging Mirrors for a Laboratory Soft X-ray Microscope2007
- Author(s)
  T. Harada, T. Hatano, M. Yamamoto
- Journal Title
  
  Photon Factory News 25
  
  Pages: 28-32
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Physics of X-ray multilayers[in Japanese]2007
- Author(s)
  M. Yamamoto
- Journal Title
  
  Development and Application of Extreme Ultraviolet Light Source CMC Publ.
  
  Pages: 183-196
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] X線ミラー多層膜2005
- Author(s)
  山本正樹
- Journal Title
  
  機械の研究 57
  
  Pages: 74-81
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] X線ミラー多層膜2005
- Author(s)
  山本正樹
- Journal Title
  
  機械の研究 57
  
  Pages: 74-81
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] X-ray multilayer mirrors[in Japanese]2005
- Author(s)
  M. Yamamoto
- Journal Title
  
  Kikaino-Kenkyu. 57
  
  Pages: 74-81
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] ナノテク研究を加速する超光学の開発-元素で色付いたナノ世界を50nmの超解像で撮る軟X線顕微鏡-2003
- Author(s)
  山本正樹
- Journal Title
  
  応用光学 3
  
  Pages: 20-22
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Development of super-optics accelerating nano-technology research ; Soft X-ray microscope for 50-nm super resolution view of nano-world colored by atomic elements[in Japanese]2003
- Author(s)
  M. Yamamoto
- Journal Title
  
  Ouyou-Kougaku 3
  
  Pages: 20-22
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] A tracking ellipsometer of picometer sensitivity enabling 0.1% sputtering-rate monitoring of EUV nanometer multilayer fabrication2003
- Author(s)
  M. Yamamoto
- Journal Title
  
  Thin Solid Films 433
  
  Pages: 224-229
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 軟X 線多層膜光工学と結像光学への展望2007
- Author(s)
  山本正樹
- Organizer
  第9回X線結像光学シンポジウム
- Place of Presentation
  名古屋
- Year and Date
  2007-11-02
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 軟X線多層膜光工学と結像光学への展望2007
- Author(s)
  山本正樹
- Organizer
  第9回X線結像光学シンポジウム
- Place of Presentation
  名古屋
- Year and Date
  2007-11-02
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Soft X-ray mulilayer Optical Engineering and future scope for Imaging Optics[in Japanese]2007
- Author(s)
  M. Yamamoto
- Organizer
  The 9th Symposium of X-ray Imaging Optics
- Place of Presentation
  Japan, Nagoya
- Year and Date
  2007-11-02
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Development of soft X-ray wavefront control technology for imagine multilaver mirrors2005
- Author(s)
  M. Yamamoto
- Organizer
  2nd International Symposium on Technologies and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources
- Place of Presentation
  Japan, Tsukuba
- Year and Date
  2005-02-03
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Development of soft X-ray wavefront control technology for imaging multilayer mirrors2005
- Author(s)
  M. Yamamoto
- Organizer
  2nd International Symposium on Technologies and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources
- Place of Presentation
  Japan, Tsukuba
- Year and Date
  2005-02-03
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Development of high performance multilayer mirrors for soft X-ray imaging optics[in Japanese]2004
- Author(s)
  M. Yamamoto
- Organizer
  June monthly meeting of Japan Vacuum Society in 2004
- Place of Presentation
  Japan, Tokyo
- Year and Date
  2004-06-18
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Picometer sensitivity monitoring of soft X-ray mirror multilayer by in-situ ellipsometry of real-time thickness analysis[in Japanese]2004
- Author(s)
  T. Tsuru, T. Tsutou, M. Yamamoto
- Organizer
  The 51st Spring Meeting, 2004, Japan Society of Applied Physics and Related Societies
- Place of Presentation
  Japan, Hachiouji
- Year and Date
  2004-03-28
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Development of an EUV interferometer with a laser produced plasma source for figure error measurements2004
- Author(s)
  M. Yamamoto
- Organizer
  The 7th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
- Place of Presentation
  Japan, Rusutsu
- Year and Date
  2004-03-11
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Precise thickness control of ultra-thin film fabrication by an in-situ ellipsometer[in Japanese]2004
- Author(s)
  Y. Kinoshita, T. Tsuru, T. Ohigashi, T. Hatano, M. Yamamoto
- Organizer
  The 4th Meeting of IMRAM
- Place of Presentation
  Sendai
- Year and Date
  2004-12-03
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 軟X線結像光学用の高性能多層膜ミラー開発2004
- Author(s)
  山本正樹
- Organizer
  平成16年度日本真空協会6月研究例会
- Place of Presentation
  東京
- Year and Date
  2004-06-18
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Precise thickness control of EUV beam splitter fabrication by an automatic null ellipsometer[in Japanese]2004
- Author(s)
  Y. Kinoshita, T. Tsuru, M. Yamamoto
- Organizer
  The 65th Autumn Meeting, 2004, Japan Society of Applied Physics and Related Societies
- Place of Presentation
  Japan, Sendai
- Year and Date
  2004-09-03
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Development of Super resolution element specific microscope with use of LPP soft X-ray source[in Japanese]2003
- Author(s)
  M. Yamamoto
- Organizer
  The 7th Symposium of X-ray Imaging Optics
- Place of Presentation
  Japan, Sendai
- Year and Date
  2003-11-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] An ellipsoraetric picometer sputtering-rate monitor for exact EUV multilayer fabrication2003
- Author(s)
  M. Yamamoto
- Organizer
  2nd International EUVL Symposium
- Place of Presentation
  Belgium, Antwerp
- Year and Date
  2003-10-01
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] An accurate method of λ/4 plate characterization in the condition of use on the ellipsometer2003
- Author(s)
  M. Yamamoto
- Organizer
  The 3rd International Conference on Spectroscopic Ellipsometry (ICSE)
- Place of Presentation
  Austria, Vienna
- Year and Date
  2003-07-10
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] An ellipsometric picometer sputtering-rate monitor for exact EUV multilayer fabrication2003
- Author(s)
  M. Yamamoto
- Organizer
  2nd International EUVL Symposium
- Place of Presentation
  Belgium, Antwerp
- Year and Date
  2003-10-01
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001

1. YANAGIHARA Mihiri (40174552)

# of Collaborated Projects: 7 results

# of Collaborated Products: 0 results
2. FURUKAWA Yoshinori (20113623)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
3. HATANO Tadashi (90302223)

# of Collaborated Projects: 3 results

# of Collaborated Products: 2 results
4. SATO Shigetu (10005796)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
5. TSURU Toshihide (30306526)

# of Collaborated Projects: 3 results

# of Collaborated Products: 3 results
6. EJIMA Takeo (80261478)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
7. WATANABE Makoto (00025397)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. 山下広順 (80022622)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
9. 難波義治 (40029129)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. 青木貞雄 (50016804)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
11. 松下正 (40092332)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
12. 石崎武志 (80212877)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
13. KURODA Toshio (70080447)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. TOYODA Mitsunori (40375168)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. NAMIOKA Takeshi (90015743)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. TAKASHIMA Koshi (10006140)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. 福谷博仁 (40011580)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. 菅原英直 (30023724)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. 後藤明 (20205587)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

YAMAMOTO Masaki 山本 正樹

YAMAMOAT Masaki 山本 正樹

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High-resolution, element-specific microscope using a laser-produced-plasma soft X-ray sourcePrincipal Investigator

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多層膜表面ミリングによる反射波面の制御Principal Investigator

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DEVELOPMENT OF SOFT X-RAY INTERFEROMETRY WITH SYNTHETIC MULTILAYERS AND APPLICATION TO WAVEFRONT MEASUREMENTS AND CONTROL OF PRECISION IMAGING MIRRORSPrincipal Investigator

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Development of soft-X-ray multilayer polarizing elements amd their application to soft-X-ray ellipsometryPrincipal Investigator

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Generation of perfect circular polarizations and thesr use for development of a precise alignment method for spectroscopic ellipsometersPrincipal Investigator

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ナノメーター周期の多層膜形成過程のエリプソメトリーモニター周期定常値による研究Principal Investigator

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Development of Soft-X-Ray Multilayrs and Novel Multilayr OpticsPrincipal Investigator

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YAMAMOTO Masaki 山本正樹

YAMAMOAT Masaki 山本正樹

[Book] EUV光源の開発と応用第II編「EUVリソグラフィ用のマスクとレジスト技術」第1章「X線多層膜の物理」2007