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静電気学会誌
Volume: 43 Pages: 67-72
10.11501/3215600
IEEJ Transactions on Electrical and Electronic Engineering
Volume: 14 Pages: 1732-1738
10.1002/tee.22998
Vacuum
Volume: 166 Pages: 184-190
International Journal of Plasma Environmental Science & Technology
Volume: 12 Pages: 120-124
Volume: 13 Pages: 14-20
10.1016/j.vacuum.2019.04.008
IEEE Transaction on Inductry Applications
Volume: 53 Pages: 3989-3994
10.1109/tia.2017.2691313
IEEE Transactions on Industry Applications
Volume: 52 Pages: 4345-4350
10.1109/tia.2016.2582120
Phys. Status Solidi c
Volume: 10 Pages: 1708-1711
10.1002/pssc.201300358
Surf. Coat. Technol
Volume: 206 Pages: 929-933
10.1016/j.surfcoat.2011.04.041
Volume: 204 Pages: 2881-2891
10.1016/j.surfcoat.2010.03.004
電気学会プラズマ研究会資料 PST-08-13
Pages: 33-38
10025666551
第25回「プラズマプロセシング研究会」SPP-25プロシーディングス P1-27
Pages: 161-162
The 25th Symposium on Plasma Processing P1-27
The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology, IEE Japan PST-08-13
The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan PST-07-29
Pages: 29-34
電気学会プラズマ研究会資料 PST-07-29
10019514039
8th Asia-Paeific Conference on Plasma Science and Teehnelogy and 19th Symposium on Plasma Science for Materials, Cairns in Australia http://wwwrsphysse.anu.edu.au/~mdl112/apcpst/Abst
Pages: 257-257
New Diamond and Frontier Carbon Technology Vol.16,No.2
Pages: 97-106
Proceeding of the 6^<th> International Conference on Reactive Plasmas and 23^<rd> Symposium on Plasma Processing AP061201・P-1A-06
Pages: 171-172
Proceeding of the 6th International Conference on Reactive plasmas and 23rd Symposium on Plasma Processing APO61201・P-1A-06
第54回応用物理学関係連合講演会講演予稿集 1・29(P-C-8)
Pages: 185-185
8th Asia-Pacific Conference on Plasma Science and Technology and 19th Symposium on Plasma Science for Materials, Cairnsin Australia http://wwwrshsse.anu.edu.au/~mdl112/apcpst/AbstractBook.pdf
8th Asia-Pacific Conference on Plasma Science and Technology and 19th Symposium on Plasma Science for Materials, Cairns in Australia (AbstractBook.pdf)
THE 18th SYMPOSIUM ON PLASMA SCIENCE FOR MATERIALS ISSN 1342-7210
Pages: 54-54
第65回応用物理学会学術講演会講演予稿集 No.2・29a-E-1
Pages: 1027-1027
プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-071
Pages: 615-616
プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-072
Pages: 617-618
Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing 2-055
Pages: 327-328
第18回プラズマ材料科学シンポジウム ISSN1342-7210
Pages: 55-55
第66回応用物理学会学術講演会講演予稿集 NO.0・8p-N-5
Pages: 33-33
第65回応用物理学会学術講演会講演予稿集 No.2・30a-E-6
Pages: 1092-1092
Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing P3-072
プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P2-055
プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-070
Pages: 613-614
Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing 3-070
Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing P3-071
電気学会プラズマ研究会資料 PST-04-28
Pages: 91-96
第65回応用物理学会学術講演会 講演予稿集 No.1 1a-ZB-8
Pages: 365-365
The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan PST-04-28