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MATSUNAMI Hiroyuki
松波 弘之
Connect your ORCID iD
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Researcher Number
50026035
External Links
Affiliation (based on the past Project Information)
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1995 – 2002: Kyoto University, Faculty of Engineering, professor, 工学研究科, 教授
1997: 京大, 工学(系)研究科, 教授
1986 – 1994: 京都大学, 工学部, 教授
1985: 京都大学, 工, 教授
Review Section/Research Field
Principal Investigator
電子材料工学
/
Applied materials
/
Applied materials science/Crystal engineering
/
Electronic materials/Electric materials
/
Physics
Except Principal Investigator
電子材料工学
/
Electronic materials/Electric materials
/
Applied materials
/
エネルギー学一般・原子力学
/
Applied physics, general
Keywords
Principal Investigator
シリコンカーバイド / エピタキシャル成長 / silicon carbide / パワーデバイス / イオン注入 / MOSFET / シリコン / 表面超構造 / 価電子制御 / power device
…
More
/ 熱酸化 / pn接合ダイオード / Silicon Carbide / フォトルミネセンス / epitaxial growth / ヘテロ接合 / 光励起プロセス / X線励起 / 光照射効果 / 表面反応 / III-V族半導体 / 原子層エピタキシー / メゾスコピック構造 / 太陽電池 / 電位障壁 / 表面再結合 / シリコンカ-バイド / ステップフロ-成長 / step-flow growth / シリコンカーバイド(SiC) / Thermal Oxidation / pn Junction Diode / Schottky Barrier Diode / 深い準位 / 不純物ド-ピング / photoluminescence / ion implantation / 広禁制帯幅半導体 / SiC / 高効率太陽電池 / 電位井戸 / 薄膜太陽電池 / 半導体 / 二酸化シリコン / 有機金属分子線エピタキシ / シンクロトロン放射光 / 分子軌道法 / IIIーV族半導体 / 酸化膜 / 光反応素過程の解明 / シンクトロン放射光 / 絶縁物半導体界面 / 気相反応 / 酸化物 / X線固相成長 / ガスソース分子線成長法 / しきい値イオン化質量分析法 / ラジカル / 分子線エピタキシ- / メチルラジカル / ガスソース分子線 / ヘテロエピタキシャル成長 / キャリア閉じ込め効果 / 窒化シリコン / パワ-デバイス / 絶縁破壊電界 / 低温成長 / ポリタイプ制御 / 低温結晶成長 / breakdown field / low-temperature growth / polytype control / 気相エピタキシ- / 成長機構 / Schottky障壁ダイオード / 結晶成長 / 不純物ドーピング / Power Device / Vapor Phase Epitaxy / Growth Mechanism / 結晶評価 / deep level / 有機金属分子線エピタキシ- / 光励起反応 / 光励起原子層エピタキシ- / その場観察 / 反射高速電子回折法 / ガリウムリン / 飽和吸着 / 反射高速電子線回折法 / 原子層エピタキシ- / 質量分析 / 反射電子線回析 / MOMBE / Photo-chemical reaction / Surface reaction / Photo-induced ALE / In-situ observation / RHEED / GaP / Saturated adsorption / Schottkyダイオード / Power Device- / Ion Implantation / MOSトランジスタ / ショットキー障壁 / Widegap semiconductor / Epitaxial Growth / Mos Transitor / Schottky Barrier / pn diode / thermal oxidation / 高融点結晶 / 光イオン化 / refractory crystals / 電界効果型トランジスタ / プラズマエッチング / field effect transistor / アモルファス半導体 / 異種接合 / ホットエレクトロン / トンネル伝導 / アモルファスシリコン / アモルファスシリコンカ-ボン / 超構造 / 超格子 / 熱電子放出伝導 / アモルファスシリコンカーボン / キャリア輸送過程 / 膜内水素 / 光電子分光法 / amorphous semiconductor / heterojunction / hot-electron / tunneling conduction / amorphous silicon / amorphous silicon carbon / superstructure / 青色発光ダイオ-ド / ド-ピング / 等電子トラップ / 原子ステップ制御エピタキシ- / 注入効率 / 青色発光ダイオード / 気相エピタキシャル法 / 原子ステップ制御 / blue LED / doping / isoelectronic trap
…
More
Except Principal Investigator
太陽電池 / 広禁制帯幅半導体 / 表面超格子 / シリコンカ-バイド / 原子層エピタキシ- / 複合プラズマ / ECRプラズマ / エチレンの分解 / マイクロ波放電 / プラズマの時定数 / プラズマの有効長 / シリコン / 格子整合 / 反射電子線回折法 / 原子層制御成長 / パルスプロセス / ホローカソード / 光CVD / 化学的気相堆積法 / シリコンカーバイド / ガリウムリン / SiGe / MOSFET / 光励起プロセス / 反応過程の制御 / 表面反応の研究 / 膜形成の基礎 / 反応の計測・診断 / エピタキシャル成長 / 自己制限機構 / 高速反射電子線回折法 / 非晶質シリコン / 極紫外光 / 局在準位密度 / 内部光電子放出法 / 一定生電流法 / 光化学反応 / 赤外吸収分光法 / 水素結合構造 / 活性種 / 発光中心 / ホロ-カソ-ド / 反射電子回線折法 / 局在中心 / ステップ制御エピタキシ- / 原子層エピタキシー / 表面超構造 / 青色発光ダイオード / 有機金属分子線成長法 / 窒化ガリウム / 超高真空 / 可視発光材料 / 有機アミン / 高速反射電子線回析 / レーザ誘起反応 / 原子層エピタキシャル成長 / その場観測 / 反射高速電子線回折法 / 有機金属分子線エピタキシャル成長法 / 二次イオン質量分析法 / 表面反応 / 有機金属 / 分子線エピタキシ- / 光励起 / 反射高速電子線回折 / 高効率太陽電池 / 有機金属気相成長法 / タンデム型太陽電池 / ヘテロエピタキシ- / 光起電力素子 / 波長分割方式 / 太陽光発電 / マイクロ波プラズマ / 二酸化シリコン膜 / 質量分析法 / 複探針法 / 励起活性種 / アモルファスシリコンカーボン / 積層プラズマ / 極薄Si酸化膜 / 点欠陥緩和過程 / 高アスペクト比 / 低抵抗コンタクト抵抗 / 量子化学計算 / 電界効果型トランジスタ / 強誘電体 / Si高精度化プロセス / Si / Ge歪超格子 / 極薄酸化膜 / 低抵抗コンタクト / 高アスペクト比プロセス / Siプロセス量子化学研究 / 欠損測定 / ヘテロ界面 / 欠陥緩和 / 無損傷化 / ultra thin Si oxide / point defect relaxation process / high aspect ratio / low contact resistance / quantum chemistry calculation / field effect transistor / ferroelectric / 極微領域ホトルミネセンス像 / 極低温測定 / 極微領域電子構造 / レーザー顕微鏡 / 半導体極微構造 / ピエゾアクチュエータ / 半導体特性マッピング / photoluminescence / high spatial resolution / low temperature / confocal microscope / electronic structure / piezo actuator / photoluminescence image / nano structure / パワーデバイス / 酸化膜 / 半導体界面 / チャネル移動度 / Silicon Carbide / Power Device / Oxide / Semiconductor Interface / Channel Mobility
Less
Research Projects
(
42
results)
Co-Researchers
(
35
People)
Project Start Year (Newest)
Project Start Year (Oldest)
High-Voltage, High-Efficiency, High-Speed Power MOSFET Using Wide Bandgap Semiconductor SiC
Principal Investigator
KIMOTO Tsunenobu
Project Period (FY)
2001 – 2002
Research Category
Grant-in-Aid for Scientific Research (B)
Research Field
Electronic materials/Electric materials
Research Institution
KYOTO UNIVERSITY
高効率パワーデバイス用シリコンカーバイドの高品位結晶成長と物性制御
Principal Investigator
Principal Investigator
松波 弘之
Project Period (FY)
1997
Research Category
Grant-in-Aid for international Scientific Research
Research Institution
Kyoto University
Control of Electronic Properties of Wide Bandgap Semiconductor and Application to Energy Electronics
Principal Investigator
Principal Investigator
MATSUNAMI Hiroyuki
Project Period (FY)
1997 – 2000
Research Category
Grant-in-Aid for Specially Promoted Research
Review Section
Physics
Research Institution
KYOTO UNIVERSITY
Atomic-Level Control of SiC and Device Applications
Principal Investigator
Principal Investigator
MATSUNAMI Hiroyuki
Project Period (FY)
1996
Research Category
Grant-in-Aid for international Scientific Research
Research Institution
KYOTO UNIVERSITY
Topographic analyzer for electronic structures of semiconductors
Principal Investigator
SARAIE Junji
,
吉本 昌広
Project Period (FY)
1996 – 1997
Research Category
Grant-in-Aid for Scientific Research (A)
Research Field
Applied physics, general
Research Institution
KYOTO INSTITUTE OF TECHNOLOGY
Kyoto University
表面超構造制御原子層エピタキシ-のためのフリーラジカルの作製
Principal Investigator
Principal Investigator
松波 弘之
Project Period (FY)
1995
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
Ultimate Materials and Processes for Integrated Intelligent System
Principal Investigator
HORIIKE Yasuhiro
Project Period (FY)
1995 – 1998
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
The University of Tokyo
Toyo University
表面超構造制御原子層エピタキシ-のためのフリーラジカルの作製
Principal Investigator
Principal Investigator
松波 弘之
Project Period (FY)
1994
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
レーザ励起による表面反応ダイナミクスの究明とエピタキシャル成長の原子層レベル制御
Principal Investigator
冬木 隆
Project Period (FY)
1994
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
広禁制帯幅半導体との複合による極限高効率シリコン太陽電池の開発
Principal Investigator
冬木 隆
Project Period (FY)
1994 – 1995
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
エネルギー学一般・原子力学
Research Institution
Kyoto University
Electronic Behavior ofWide-Gap Semiconductor and Devices
Principal Investigator
Principal Investigator
MATSUNAMI Hiroyuki
Project Period (FY)
1994 – 1995
Research Category
Grant-in-Aid for international Scientific Research
Research Institution
KYOTO UNIVERSITY
Microscopic analysis on surface reaction induced by laser irradiation and its application to atomic layr epitaxy
Principal Investigator
Principal Investigator
MATSUNAMI Hiroyuki
Project Period (FY)
1994 – 1995
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
Applied materials science/Crystal engineering
Research Institution
KYOTO UNIVERSITY
Application of Wide Bandgap Semiconductor SiC for Power Devices
Principal Investigator
Principal Investigator
MATSUNAMI Hiroyuki
Project Period (FY)
1994 – 1995
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
Electronic materials/Electric materials
Research Institution
KYOTO UNIVERSITY
表面超構造制御原子層エピタキシーのためのフリーラジカルの作製
Principal Investigator
Principal Investigator
松波 弘之
Project Period (FY)
1993
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
レーザ誘起原子層エピタキシーによる純正III-V族半導体結晶の製作
Principal Investigator
吉本 昌広
Project Period (FY)
1993
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
Electronic materials/Electric materials
Research Institution
Kyoto University
格子整合系複合材料を用いたシリコン太陽電池の極限高効率化
Principal Investigator
冬木 隆
Project Period (FY)
1992
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
表面制御原子層エピタキシー法によるSiC純正結晶の製作と光物性制御
Principal Investigator
冬木 隆
Project Period (FY)
1992
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
反応過程の制御
Principal Investigator
Principal Investigator
松波 弘之
Project Period (FY)
1992
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
有機金属分子線成長法による光素子用ワイドギヤップ材料窒化ガリウムの純正結晶の製作
Principal Investigator
吉本 昌広
Project Period (FY)
1992
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電子材料工学
Research Institution
Kyoto University
Crystal Growth of Widegap Semiconductor SiC with High-Purity and Application to Power Devices
Principal Investigator
Principal Investigator
MATSUNAMI Hiroyuki
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
電子材料工学
Research Institution
KYOTO UNIVERSITY
格子整合系複合材料を用いたシリコン太陽電池の極限高効率化
Principal Investigator
冬木 隆
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
表面制御原子層エピタキシ-法によるSiC純正結晶の製作と光物性制御
Principal Investigator
冬木 隆
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
反応過程の制御
Principal Investigator
Principal Investigator
松波 弘之
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
格子整合系複合材料を用いたシリコン太陽電池の極限高効率化
Principal Investigator
冬木 隆
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
表面制御エピタキシ-法によるSiC純正結晶の製作と光物性制御
Principal Investigator
冬木 隆
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
複合プラズマの生成と反応の制御
Principal Investigator
板谷 良平
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
反応過程の制御
Principal Investigator
Principal Investigator
松波 弘之
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
Crystal Growth of High-Quality SiC by Step-Controlled Epitaxy and its Application for Power Devices
Principal Investigator
Principal Investigator
MATSUNAMI Hiroyuki
Project Period (FY)
1990 – 1991
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
電子材料工学
Research Institution
Kyoto University
半導体における光励起プロセスの基礎
Principal Investigator
高橋 清
Project Period (FY)
1989
Research Category
Grant-in-Aid for Co-operative Research (B)
Research Institution
Tokyo Institute of Technology
表面超格子を用いた単結晶シリコンカ-バイドの原子層制御エピタキシ-
Principal Investigator
FUYUKI Takashi
Project Period (FY)
1989 – 1990
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
Applied materials
Research Institution
Kyoto University
キャリヤ閉じ込め効果を用いた新構造超薄型高効率太陽電池の開発
Principal Investigator
Principal Investigator
松波 弘之
Project Period (FY)
1989
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
複合プラズマの生成と反応の制御
Principal Investigator
板谷 良平
Project Period (FY)
1989 – 1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
極紫外域高エネルギ-光子を用いた安定構造非晶質シリコン系薄膜の形成
Principal Investigator
冬木 隆
Project Period (FY)
1989 – 1990
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
電子材料工学
Research Institution
Kyoto University
キャリア閉じ込め効果を用いた新構造高効率太陽電池の最適化
Principal Investigator
Principal Investigator
松波 弘之
Project Period (FY)
1988
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
複合プラズマの生成と反応の制御
Principal Investigator
板谷 良平
Project Period (FY)
1988
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
Carrier dynamics in amorphous semiconductor superstructures
Principal Investigator
Principal Investigator
MATSUNAMI Hiroyuki
Project Period (FY)
1988 – 1989
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
Applied materials
Research Institution
Kyoto University
Development of SiC Blue Light-Emitting Diodes Utilizing Step-Controlled Epitaxy
Principal Investigator
Principal Investigator
MATSUNAMI Hiroyuki
Project Period (FY)
1988 – 1989
Research Category
Grant-in-Aid for Developmental Scientific Research
Research Field
電子材料工学
Research Institution
Kyoto University
励起活性種ダイナミックスの解析と薄膜形成の精密制御への応用
Principal Investigator
冬木 隆
Project Period (FY)
1987 – 1988
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電子材料工学
Research Institution
Kyoto University
キャリヤ閉じ込め効果を用いた新構造高効率太陽電池
Principal Investigator
Principal Investigator
松波 弘之
Project Period (FY)
1987
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
光発電素子の高効率化とシステム設計
Principal Investigator
高橋 清
Project Period (FY)
1984 – 1986
Research Category
Grant-in-Aid for Energy Research
Research Institution
Tokyo Institute of Technology
Low Temperature Epitaxial Growth of Refractory Crystals by Photo-ionization
Principal Investigator
Principal Investigator
MATSUNAMI Hiroyuki
Project Period (FY)
1984 – 1985
Research Category
Grant-in-Aid for General Scientific Research (A)
Research Field
Applied materials
Research Institution
Kyoto University
Fabrication of active devices using semiconducting SiC for use in heavy environment
Principal Investigator
Principal Investigator
MATSUNAMI Hiroyuki
Project Period (FY)
1984 – 1985
Research Category
Grant-in-Aid for Developmental Scientific Research
Research Field
電子材料工学
Research Institution
Kyoto University
# of Projects (Dsc)
# of Projects (Asc)
1.
FUYUKI Takashi
(10165459)
# of Collaborated Projects:
28 results
# of Collaborated Products:
0 results
2.
YOSHIMOTO Masahiro
(20210776)
# of Collaborated Projects:
27 results
# of Collaborated Products:
0 results
3.
KIMOTO Tsunenobu
(80225078)
# of Collaborated Projects:
19 results
# of Collaborated Products:
0 results
4.
浜川 圭弘
(10029407)
# of Collaborated Projects:
4 results
# of Collaborated Products:
0 results
5.
板谷 良平
(90025833)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
6.
池畑 隆
(00159641)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
7.
真瀬 寛
(30007611)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
8.
小宮山 宏
(80011188)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
9.
千川 純一
(20175459)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
10.
津田 穣
(90009506)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
11.
高橋 清
(10016313)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
12.
久保 寔
(80089127)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
13.
CHOYKE W.j.
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
14.
HORIIKE Yasuhiro
(20209274)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
15.
HATTORI Takeo
(10061516)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
16.
SHIRAKI Yasuhiro
(00206286)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
17.
YASUDA Yukio
(60126951)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
18.
TACHIBANA Aketomo
(40135463)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
19.
SARAIE Junji
(90026154)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
20.
MATSUMURA Nobuo
(60107357)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
21.
SUDA Jun
(00293887)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
22.
英 貢
(90124734)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
23.
小長井 誠
(40111653)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
24.
村田 好正
(10080467)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
25.
八坂 保能
(30109037)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
26.
本間 琢也
(30134208)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
27.
後川 昭雄
(20013625)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
28.
青木 昌治
(80010619)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
29.
鶴島 稔夫
(10236953)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
30.
PENSL G.
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
31.
PENSL G
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
32.
CHOYKE W.J
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
33.
安達 伸雄
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
34.
GERHARD Pens
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
35.
WOLFGANG.J. チョイケ
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
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