Ito So 伊東聡

… Alternative Names

ITO So 伊東聡

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Researcher Number	00624818
Other IDs
Affiliation (Current)	2025: 富山県立大学, 情報工学部, 准教授
Affiliation (based on the past Project Information) *help	2020 – 2023: 富山県立大学, 工学部, 准教授 2019: 東北大学, 工学研究科, 助教 2017 – 2018: 富山県立大学, 工学部, 准教授 2015 – 2016: 東北大学, 工学研究科, 助教 2012 – 2015: 東北大学, 工学(系)研究科(研究院), 助教 2014: 東北大学, 大学院工学研究科, 助教 2012: 東北大学, 大学院・工学研究科, 助教
Review Section/Research Field	Principal Investigator Production engineering/Processing studies / Basic Section 18020:Manufacturing and production engineering-related Except Principal Investigator Production engineering/Processing studies / Basic Section 18020:Manufacturing and production engineering-related
Keywords	Principal Investigator マイクロプローブ / 計測工学 / 超精密計測 / マイクロスリット / マイクロノズル / 寸法計測 / ナノメトロロジー / 自動化 / 光応用計測 / 三次元計測 … More / きさげ / 斜入射干渉計 / micro-CMM / CMM / 三次元測定 / 校正 / 回転基準球 / 機械工作・生産工学 / メトロロジー / スロットダイ / 実時空間校正 / 精密位置決め / 寸法測定 / マイクロCMM / 表面・界面物性 / 全方位検出 / 接触検出 / 形状計測 / 微小球 / ナノピペット / スタイラス / プロービング / シェアフォース … More Except Principal Investigator 超精密計測 / 加工学 / 生産工学 / 角度センサ / 超解像技術 / 折り返し雑音 / 超解像度 / サンプリング / ナイキスト周波数 / 同時サンプリング / 超解像度技術 / サンプリング定理 / 折返し雑音 / エイリアシング / フェムト秒レーザ / 加工計測 / 精密位置決め / 分解能 / 反射格子 / 感度 / フォトダイオード / レーザ / アッべ誤差 / アッベ誤差 / センサ / 光 / 超高感度 / ステージ / 誤差 / 角度 / 計測 / 超精密位置決め / 回折格子 / 多軸角度計測 / 3軸レーザオートコリメータ Less

近赤外光源を用いた斜入射干渉計によるきさげ表面微細形状の大面積精密三次元計測Principal Investigator
- Principal Investigator
  
  伊東聡
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Toyama Prefectural University
In-situ calibration of microprobe with nanometric accuracy using a rotating reference spherePrincipal Investigator
- Principal Investigator
  
  Ito So
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Toyama Prefectural University
A study on super-resolution techniques using multi-channel synchronous sampling
- Principal Investigator
  
  Kamiya Kazuhide
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Toyama Prefectural University
Absolute measurement of long micro slit width by non-contact type twin micro-probing systems with high speed scanning of twin micro probe and real time space calibrationPrincipal Investigator
- Principal Investigator
  
  Ito So
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Toyama Prefectural University
  Tohoku University
Frontier of the precision optical metrology created by the ultra-precision optical nano-grid reference artifact and the absolute optical scale comb
- Principal Investigator
  
  Gao Wei
- Project Period (FY)
  2015 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
２軸干渉グリッド定在波一括転写と自律的精度保証による次世代光ナノグリッド基準創出
- Principal Investigator
  
  高偉
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
Study of three dimensional measurement by utilizing a high-sensitive microprobe based on the micro liquid pillarPrincipal Investigator
- Principal Investigator
  
  Ito So
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
Development of a three-axis laser autocollimator for measurement of angular error motions of a next-generation ultra-precision positioning stage
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
Study of dimensional measurement of micro-hole by using a high-sensitivity probing system with a nanopipette ball probePrincipal Investigator
- Principal Investigator
  
  ITO So
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University

[Book] Bilingual edition 精密計測学 Precision Metrology2024
- Author(s)
  高偉．清水裕樹，水谷康弘，道畑正岐，河野大輔，吉田一朗，伊東聡，清水浩貴
- Total Pages
  192
- Publisher
  朝倉書店
- ISBN
  9784254201789
- Data Source
  KAKENHI-PROJECT-23K03606
[Book] Precision Manufacturing. Metrology2019
- Author(s)
  So Ito
- Total Pages
  39
- Publisher
  Springer
- ISBN
  9789811049125
- Data Source
  KAKENHI-PROJECT-16K05999
[Book] (Book chapter) Handbook of Manufacturing, "Chapter 10"2019
- Author(s)
  Yuki Shimizu, So Ito, Jungchul Lee, Shigeaki Goto, Hiraku Matsukuma, and Wei Gao
- Total Pages
  28
- Publisher
  World Scientific
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Book chapter) 機械設計「精密位置決めにおける多軸センサの活用」2016
- Author(s)
  伊東聡，清水裕樹，高偉
- Total Pages
  6
- Publisher
  日刊工業新聞社
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Book chapter) 機械技術「高機能高速工具サーボによる3次元微細形状加工技術のイノベーション」2016
- Author(s)
  清水裕樹, 陳遠流, 盧泳辰, 伊東聡, 高偉
- Total Pages
  5
- Publisher
  日刊工業新聞社
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Book chapter) 機械の研究「長ストロークステージ向けの精密姿勢角センサの開発」2016
- Author(s)
  清水裕樹, 石川龍弥, 片岡智史, 陳遠流, 伊東聡, 高偉
- Total Pages
  7
- Publisher
  養賢堂
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Book chapter) 自動化推進「光学式超精密多軸位置決めセンサ」2015
- Author(s)
  高偉, 清水裕樹, 伊東聡, 陳遠流
- Total Pages
  24
- Publisher
  JAAA自動化推進協会
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Chapter) 精密位置決めセンサの基礎と最新技術2015
- Author(s)
  伊東聡，高偉
- Total Pages
  6
- Publisher
  Interlab
- Data Source
  KAKENHI-PROJECT-24360050
[Book] (Chapter) 精密位置決めのための角度センサ活用2014
- Author(s)
  清水裕樹，伊東聡，高偉
- Total Pages
  7
- Publisher
  日刊工業新聞
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe2023
- Author(s)
  Aruga Masakazu、Ito So、Kato Daichi、Matsumoto Kimihisa、Kamiya Kazuhide
- Journal Title
  
  Frontiers in Manufacturing Technology
  
  Volume: 3 Pages: 01-10
- DOI
  10.3389/fmtec.2023.1104742
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K04195
[Journal Article] Expansion of measurement area of hand-scraped surface using stitching method for oblique-incident interferometer2023
- Author(s)
  ARUGA Masakazu、ITO So、TSUGAWA Fuma、MATSUMOTO Kimihisa、KAMIYA Kazuhide
- Journal Title
  
  JAMDSM
  
  Volume: 17 Issue: 1 Pages: JAMDSM0010-JAMDSM0010
- DOI
  10.1299/jamdsm.2023jamdsm0010
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K04195
[Journal Article] Preparation of undecanoic acid-terminated Si particles from rice husks2022
- Author(s)
  Matsumoto Kimihisa、Kamiya Kazuhide、Ito So、Yasuda Hidehiro
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: SB Pages: SB1009-SB1009
- DOI
  10.35848/1347-4065/ac2e7c
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04195
[Journal Article] Design and Development of Oblique-Incident Interferometer for Form Measurement of Hand-Scraped Surfaces2021
- Author(s)
  Ito So、Kameoka Daiki、Matsumoto Kimihisa、Kamiya Kazuhide
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 4 Issue: 2 Pages: 69-76
- DOI
  10.1007/s41871-020-00089-w
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04195
[Journal Article] An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges2018
- Author(s)
  Yindi Cai, Yuan-Liu Chen, Malu Xu, Yuki Shimizu, So Ito, Hiraku Matsukuma and Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Issue: 5 Pages: 054004-054004
- DOI
  10.1088/1361-6501/aaa913
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] An edge reversal method for precision measurement of cutting edge radius of single point diamond tools2017
- Author(s)
  Yuan-Liu Chen, Yindi Cai, Malu Xu, Yuki Shimizu, So Ito and Wei Gao
- Journal Title
  
  Precision Engineering
  
  Volume: 50 Pages: 380-387
- DOI
  10.1016/j.precisioneng.2017.06.012
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Surface Profile Measurement of Micro-Optics by Using a Long Stroke Atomic Force Microscope2017
- Author(s)
  So Ito, Min-Lei Li, Zhi-Gang Jia, Yuan-Liu Chen, Yuki Shimizu, Wei Gao
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 870 Pages: 102-107
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K05999
[Journal Article] Optical frequency domain angle measurement in a femtosecond laser autocollimator2017
- Author(s)
  Yuan-Liu Chen, Yuki Shimizu, Jun Tamada, Yukitoshi Kudo, Shuhei Madokoro, Kazuki Nakamura and Wei Gao
- Journal Title
  
  Optics Express
  
  Volume: 25 Issue: 14 Pages: 16725-16738
- DOI
  10.1364/oe.25.016725
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Precision Measurement of Z -Slide Vertical Error Motion of an Ultra-Precision Lathe by Using Three-probe Method2017
- Author(s)
  Zengyuan Niu, Yuan-Liu Chen, Daiki Matsuura, Jung Chul Lee, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao, Jeong Seok Oh and Chun Hong Park
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 18 Issue: 5 Pages: 651-660
- DOI
  10.1007/s12541-017-0078-4
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] An optical lever by using a mode-locked laser for angle measurement2017
- Author(s)
  Yuki Shimizu, Yukitoshi Kudo, Yuan-Liu Chen, So Ito, Wei Gao
- Journal Title
  
  Precision Engieering
  
  Volume: 47 Pages: 72-80
- DOI
  10.1016/j.precisioneng.2016.07.006
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Auto-tracking single point diamond cutting on non-planar brittlematerial substrates by a high-rigidity force controlled fast tool servo2017
- Author(s)
  Yuan-Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
- Journal Title
  
  Precision Engineering
  
  Volume: In press Pages: 253-261
- DOI
  10.1016/j.precisioneng.2017.02.014
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
[Journal Article] Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer2016
- Author(s)
  YUKI SHIMIZU, RYO AIHARA, ZONGWEI REN, YUAN-LIU CHEN, SO ITO, AND WEI GAO
- Journal Title
  
  Optics EXPRESS
  
  Volume: 24 Issue: 24 Pages: 27521-27535
- DOI
  10.1364/oe.24.027521
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Determination of the zero-position for an optical angle sensor2016
- Author(s)
  Jun TAMADA, Yukitoshi KUDO, Yuan-Liu CHEN, Yuki SHIMIZU and Wei GAO
- Journal Title
  
  JAMDSM
  
  Volume: 10 Issue: 5 Pages: JAMDSM0072-JAMDSM0072
- DOI
  10.1299/jamdsm.2016jamdsm0072
- NAID
  130005266534
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-24226004
[Journal Article] Ductile cutting of silicon microstructures with surface inclination measurement and　compensation by using a force sensor integrated single point diamond tool2016
- Author(s)
  Yuan-Liu Chen, Yindi Cai, Yuki Shimizu, So Ito, Wei Gao, Bing-Feng Ju
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume: 26 Issue: 2 Pages: 025002-025002
- DOI
  10.1088/0960-1317/26/2/025002
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
[Journal Article] On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact2016
- Author(s)
  Y. L. Chen, Y. Cai, Y. Shimizu, S. Ito, W. Gao, B. F. Ju
- Journal Title
  
  Precision Engineering
  
  Volume: 43 Pages: 462-467
- DOI
  10.1016/j.precisioneng.2015.09.011
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
[Journal Article] A highly stable noncontact SPM for surface profile measurement and its application to insulating samples2016
- Author(s)
  Shigeaki GOTO, Minglei LI, So ITO, Yuki SHIMIZU and Wei GAO
- Journal Title
  
  JAMDSM
  
  Volume: 10 Issue: 5 Pages: JAMDSM0081-JAMDSM0081
- DOI
  10.1299/jamdsm.2016jamdsm0081
- NAID
  130005266667
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Molecular dynamics simulation of subnanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting2016
- Author(s)
  Y. Cai, Y. L. Chen, Y. Shimizu, S. Ito, W. Gao
- Journal Title
  
  Applied Surface Science
  
  Volume: 369 Pages: 354-365
- DOI
  10.1016/j.apsusc.2016.02.046
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
[Journal Article] A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits2016
- Author(s)
  So Ito, Hirotaka Kikuchi, Yuanliu Chen, Yuki Shimizu, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi
- Journal Title
  
  Applied Sciences
  
  Volume: 6 Issue: 5 Pages: 156-156
- DOI
  10.3390/app6050156
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16K05999
[Journal Article] Mode-locked laser autocollimator with an expanded measurement range2016
- Author(s)
  Yuan-Liu Chen, Yuki Shimizu, Yukitoshi Kudo, So Ito and Wei Gao
- Journal Title
  
  Optics EXPRESS
  
  Volume: 24 Issue: 14 Pages: 15554-15569
- DOI
  10.1364/oe.24.015554
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Molecular dynamics simulation of elastic?plastic deformation associated with tool?workpiece contact in force sensor?integrated fast tool servo2016
- Author(s)
  Yindi Cai, Yuan-Liu Chen, Yuki Shimizu, So Ito and Wei Gao
- Journal Title
  
  Journal of Engineering Manufacture, Proc IMechE Part B.
  
  Volume: - Issue: 11 Pages: 1-10
- DOI
  10.1177/0954405416673116
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
[Journal Article] Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer2016
- Author(s)
  Yindi CAI, Xinghui LI, Ryo AIHARA, Ren ZONGWEI, Yuki SHIMIZU, So ITO and Wei GAO
- Journal Title
  
  JAMDSM
  
  Volume: 10 Issue: 5 Pages: JAMDSM0080-JAMDSM0080
- DOI
  10.1299/jamdsm.2016jamdsm0080
- NAID
  130005266659
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions2016
- Author(s)
  Yuki Shimizu, Siew Leng Tan, Dai Murata, Taiji Maruyama, So Ito, Yuan-Liu Chen, Wei Gao
- Journal Title
  
  Optics Express
  
  Volume: 24 Issue: 3 Pages: 2788-2805
- DOI
  10.1364/oe.24.002788
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system2016
- Author(s)
  So Ito, Yuan-Liu Chen, Yuki Shimizu, Hirotaka Kikuchi, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi
- Journal Title
  
  Precision Engineering
  
  Volume: 43 Pages: 525-529
- DOI
  10.1016/j.precisioneng.2015.09.016
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26820018, KAKENHI-PROJECT-16K05999
[Journal Article] Design of a Laser Autocollimator-based Optical Sensor with a Rangefinder for Error Correction of Precision Slide Guideways2015
- Author(s)
  Siew Leng Tan, Yuki Shimizu, Takayuki Meguro, So Ito, and Wei Gao
- Journal Title
  
  INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
  
  Volume: 16-3 Issue: 3 Pages: 423-431
- DOI
  10.1007/s12541-015-0058-5
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder2014
- Author(s)
  Xinghui Li, Yuki Shimizu, Takeshi Ito, Yindi Cai, So Ito, and Wei Gao
- Journal Title
  
  Optical Engineering, 53(12), 122405.
  
  Volume: 53
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Development of a probing system for micro-CMM by utilizing shear-force detection2014
- Author(s)
  So Ito, Issei Kodama, Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: Vol.25 Issue: 6 Pages: 064011-064011
- DOI
  10.1088/0957-0233/25/6/064011
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760097
[Journal Article] A micro optical probe for edge contour evaluation of diamond cutting tools2014
- Author(s)
  S.H. Jang, Y. Shimizu, S. Ito and W. Gao
- Journal Title
  
  Journal of Sensors and Senosr Systems
  
  Volume: 3 Pages: 69-76
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Measurement of Cutting Edge Width of a Rotary Cutting Tool by Using a Laser Displacement Sensor2014
- Author(s)
  So Ito, Sho Sekine, Yuki Shimizu, Wei Gao, Tsutomu Fukuda, Akira Kato, Kouji Kubota
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: Vol.8, No. 1 Pages: 28-33
- NAID
  130007673916
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760097
[Journal Article] Measurement of Cutting Edge Width of a Rotary Cutting Tool by Using a Laser Displacement Sensor2014
- Author(s)
  So Ito, Sho Sekine, Yuki Shimizu, Wei Gao, Tsutomu Fukuda, Akira Kato and Kouji Kubota
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 8 Pages: 28-33
- NAID
  130007673916
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760097
[Journal Article] Design and testing of a four-probe optical sensor head for three-axis surface encoder with a mosaic scale grating2014
- Author(s)
  Yuki Shimizu, Takeshi Ito, Xinghui Li, WooJae Kim and Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 25 Issue: 9 Pages: 094002-094002
- DOI
  10.1088/0957-0233/25/9/094002
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] A two-axis Lloyd’s mirror interferometer for fabrication of two-dimensional diffraction gratings2014
- Author(s)
  Xinghui Li, Wei Gao, Yuki Shimizu, So Ito
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 63 Issue: 1 Pages: 461-464
- DOI
  10.1016/j.cirp.2014.02.001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Three-axis vibration measurement by using a grating-interferometric vibrometer2014
- Author(s)
  So Ito, Ryo Aihara, Woo Jae Kim, Yuki Shimizu and Wei Gao
- Journal Title
  
  Advanced Optical Technologies
  
  Volume: 3 Issue: 4 Pages: 435-440
- DOI
  10.1515/aot-2014-0028
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage2013
- Author(s)
  Xinghui Li, Wei Gao, Hiroshi Muto, Yuki Shimizu, So Ito, Songyi Dian
- Journal Title
  
  Precision Engineering,
  
  Volume: 37 Pages: 771-781
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] An Electrostatic Force Probe for Surface Profile Measurement in Noncontact Condition2013
- Author(s)
  So Ito, Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Gaofa He and Wei Gao
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 7 Pages: 714-419
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760097
[Journal Article] Characterization of Electrostatic Force for Scanning Electrostatic Force Microscopy of Micro-structured Surface2013
- Author(s)
  Zhigang Jia, So Ito, Keiichiro Hosobuchi, Shigeaki Goto, Yuki Shimizu, Gaofa He, Wei Gao
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: Vol. 14 Issue: 9 Pages: 1543-1549
- DOI
  10.1007/s12541-013-0208-6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656093, KAKENHI-PROJECT-24760097
[Journal Article] Precision tool setting for fabrication of a microstructure array2013
- Author(s)
  Wei Gao, Yuan-Liu Chen, Kang-Won Lee, Young-Jin-Noh, Yuki Shimizu, So Ito
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 62 Pages: 523-526
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Fabrication of Scale Gratings for Surface Encoders by Using Laser Interference Lithography with 405 nm Laser Diodes2013
- Author(s)
  Xinghui Li, Yuki Shimizu, So Ito, Wei Gao
- Journal Title
  
  INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING,
  
  Volume: 14 Pages: 1979-1988
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Construction and verification of a linear-rotary micro-stage with a millimeter-scale range2013
- Author(s)
  Yuxin Peng, So Ito, Yasumasa Sakurai, Yuki Shimizu, and Wei Gao
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 14 Issue: 9 Pages: 1623-1628
- DOI
  10.1007/s12541-013-0219-3
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760097
[Journal Article] Improvement of an air-bearing displacement sensor with nanometric resolution2012
- Author(s)
  So Ito, Kang-Won Lee, Yuki Shimizu, Wei Gao
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 945-950
- DOI
  10.4028/www.scientific.net/kem.523-524.945
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760097
[Journal Article] Development of a Self-Sensing probe for Local Depositions in Liquid Condition
- Author(s)
  So Ito and Futoshi Iwata
- Journal Title
  
  International Journal of Nanomanufacturing
  
  Volume: (in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760097
[Patent] 絶対角測定装置及び絶対角測定方法2014
- Inventor(s)
  清水裕樹，高偉，伊東聡，工藤幸利
- Industrial Property Rights Holder
  清水裕樹，高偉，伊東聡，工藤幸利
- Industrial Property Rights Type
  特許
- Filing Date
  2014-09-22
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] 形状偏差の自律的測定を導入したCMMプローブ球の精密測定2024
- Author(s)
  津田樹，伊東聡，神谷和秀，松本公久
- Organizer
  2024年度精密工学会春季学術講演会第31回「学生会員卒業研究発表講演会」
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] 近赤外線光源を用いた斜入射干渉計によるきさげ面の表面形状測定2024
- Author(s)
  山岸巧，伊東聡，宮本大輝，松本公久，神谷和秀
- Organizer
  2024年度精密工学会春季学術講演会第31回「学生会員卒業研究発表講演会」
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] マイクロプローブ球直径の精密計測法の比較2024
- Author(s)
  犬飼大地, 伊東聡, 富岡剛大, 松本公久, 神谷和秀
- Organizer
  2024年度精密工学会春季学術講演会第31回「学生会員卒業研究発表講演会」
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] 非接触輪郭形状測定機を用いたマイクロプローブ先端球の計測－第2報　精密ゲージを用いた直径及び形状偏差計測との比較－2024
- Author(s)
  富岡剛大，伊東聡，犬飼大地，松本公久，神谷和秀
- Organizer
  2024年度精密工学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] 表面相互作用力検出型マイクロプローブによる精密微細穴内部の非破壊計測2023
- Author(s)
  犬飼大地，伊東聡, 富岡剛大, 松本公久, 神谷和秀
- Organizer
  2023年度精密工学会北陸信越支部学術講演会
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] 回転基準器によるCMMプローブ形状誤差のその場測定2023
- Author(s)
  伊東聡
- Organizer
  測定計測展2023，精密測定機器、座標測定機セミナー
- Invited
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] 法線方向プロービングを用いた微細穴内径の精密計測2023
- Author(s)
  伊東聡，有賀正和，富岡剛大，松本公久，神谷和秀
- Organizer
  2023年度砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] 非接触輪郭形状測定機を用いたマイクロプローブ先端球の計測2023
- Author(s)
  富岡剛大，伊東聡，犬飼大地，松本公久，神谷和秀，片岡智史
- Organizer
  2023年度精密工学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] 近赤外線レーザを用いた斜入射干渉計によるきさげ加工面の形状測定2023
- Author(s)
  山岸巧，伊東聡，松本公久，神谷和秀
- Organizer
  2023年度精密工学会北陸信越支部学術講演会
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] Form error measurement of CMM probe tip ball based on interpolation method2023
- Author(s)
  So Ito, Daisuke Yamashita, Shiori Toyomoto, Kouki Tsuchida, Kimihisa Matsumoto, Kazuhide Kamiya
- Organizer
  The 15th International Symposium on Measurement Technology and Intelligent Instruments
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] 形状偏差の自律的測定を導入したCMMプローブを用いた5軸加工機の加工精度評価2023
- Author(s)
  津田樹，伊東聡，松本公久，神谷和秀
- Organizer
  2023年度精密工学会北陸信越支部学術講演会
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] 非接触輪郭形状測定機を用いたマイクロプローブ先端球測定の不確かさ評価2023
- Author(s)
  富岡剛大，伊東聡，犬飼大地，松本公久，神谷和秀，片岡智史
- Organizer
  2023年度精密工学会北陸信越支部学術講演会
- Data Source
  KAKENHI-PROJECT-23K03606
[Presentation] 反転法の考え方を導入したプローブ先端球の形状誤差測定2022
- Author(s)
  土田昂季，伊東聡，豊本栞，有賀正和，松本公久，神谷和秀
- Organizer
  第14回生産加工・工作機械部門講演会
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] 表面相互作用力検出型マイクロプローブによるレーザ加工微細穴の内径測定第2報　プローブ接近方向によるプロービング精度変化の検証2022
- Author(s)
  有賀正和，伊東聡，富岡剛大，松本公久，神谷和秀
- Organizer
  2022年度精密工学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] 斜入射干渉計によるきさげ加工面のマイクロ表面形状の測定2022
- Author(s)
  伊東聡，有賀正和，津川楓馬
- Organizer
  2022年度精密工学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] 回転基準球を用いたCMMプローブ先端球の形状測定第2報　真円度測定機との比較による算出原理の検証2022
- Author(s)
  伊東聡，山下大輔，松本公久，神谷和秀
- Organizer
  2022年度精密工学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] Three-dimensional measurement of a micro-hole by a microprobing system with method of local surface interaction force detection2022
- Author(s)
  Masakazu Aruga, So Ito, Takehiro Tomioka, Kimihisa Matsumoto, Kazuhide Kamiya
- Organizer
  The 19th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] マイクロプローブを用いたレーザ加工微細穴内部の三次元計測2022
- Author(s)
  有賀正和，伊東聡，富岡剛大，松本公久，神谷和秀
- Organizer
  第14回生産加工・工作機械部門講演会
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] 表面相互作用力検出型マイクロプローブを用いた微細穴内部の三次元測定に関する研究2021
- Author(s)
  有賀正和，伊東聡，松本公久，神谷和秀
- Organizer
  2021年度精密工学会北陸信越支部学術講演会
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] エイリアシングを活用したサンプリング定理の拡張2021
- Author(s)
  仁科友輔，神谷和秀，伊東聡，松本公久
- Organizer
  2021年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04210
[Presentation] Preparation of undecenoic-acid-terminated Si nanocrystals from rice husks2021
- Author(s)
  Kimihisa Matsumoto, Kazuhide Kamiya, So Ito, Hidehiro Yasuda
- Organizer
  The 8th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] 小型斜入射干渉計の導入によるきさげ加工面の精密測定に関する研究2021
- Author(s)
  伊東聡
- Organizer
  Optics & Photonics Japan 2021 (OPJ2021)
- Invited
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] きさげ面および微細穴の知的センシング2021
- Author(s)
  伊東聡
- Organizer
  公益社団法人砥粒加工学会未来志向形精密加工工具の開発に関する専門委員会 (FT専門委員会) 第38回オンライン研究会
- Invited
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] 表面相互作用力検出型マイクロプローブによるレーザ加工微細穴の内径測定2021
- Author(s)
  伊東聡，加藤大智，有賀正和，神谷和秀，松本公久
- Organizer
  2021年度精密工学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] Evaluation of characteristics of microprobing system using detection of surface interaction force2021
- Author(s)
  So Ito, Daichi Kato, Kimihisa Matsumoto, Kazuhide Kamiya
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] The study of wide-range measurement of the hand-scraped surface plate using a stitching method2021
- Author(s)
  Masakazu Aruga, So Ito, Kimihisa Matsumoto, Kazuhide Kamiya
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] 回転基準球を用いたCMMプローブ先端形状の精密計測　(第1報)　―内挿法を用いた形状誤差分離の高精度化に関する検証―2020
- Author(s)
  山下大輔，伊東聡，神谷和秀，松本公久
- Organizer
  2020年度精密工学会北陸信越支部学術講演会
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] スティッチング処理を用いたきさげ加工面の広範囲測定に関する研究2020
- Author(s)
  有賀正和，伊東聡，松本公久，神谷和秀
- Organizer
  2021年度精密工学会春季学術講演会第28回「学生会員卒業研究発表講演会」
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] 表面相互作用力検出型マイクロプローブを用いた微小開孔の内径測定に関する研究2020
- Author(s)
  伊東聡，加藤大智，上野貴也，神谷和秀，松本公久
- Organizer
  2020年度精密工学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] ピンゲージを用いたマイクロプローブ先端形状の測定2020
- Author(s)
  上野貴也，伊東聡，加藤大智，松本公久，神谷和秀
- Organizer
  2020年度精密工学会北陸信越支部学術講演会
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] きさげ面形状測定のための斜入射干渉計の開発2020
- Author(s)
  伊東聡，亀岡大貴，有賀正和，神谷和秀，松本公久
- Organizer
  2020年度砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] 回転基準球を用いたCMMプローブ先端球の形状測定 -第1報　内挿法の導入による形状復元の検証-2020
- Author(s)
  伊東聡，山下大輔，神谷和秀，松本公久
- Organizer
  2021年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] Dimensional measurement of micrometer-scale aperture using a surface interaction force detection type microprobe2020
- Author(s)
  Daichi Kato, So Ito, Kazuhide Kamiya, Kimihisa Matsumoto
- Organizer
  18th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] Uncertainty evaluation of form error measurement of probe tip ball using a rotating reference sphere2020
- Author(s)
  So Ito, Daichi Kato, Daisuke Tsutsumi, Kazuhide Kamiya, Kimihisa Matsumoto
- Organizer
  18th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04195
[Presentation] 回転基準球を用いたCMMプローブ先端球直径の精密計測に関する研究2019
- Author(s)
  伊東聡，堤大輔，神谷和秀，松本公久，川堰宣隆
- Organizer
  2019年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] Development of a microprobe using a detection of surface interaction force2018
- Author(s)
  Yusuke Shima, So Ito, Kazuhide Kamiya, Kimihisa Matsumoto
- Organizer
  17th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] Uncertainty analysis of slot die coater gap width measurement by using a shear mode microprobing system2018
- Author(s)
  伊東聡
- Organizer
  2018年度精密工学会北陸信越支部学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] 回転基準球を用いたCMMプローブの直径の自律的な精密計測に関する研究2018
- Author(s)
  堤大輔，島由丞，伊東聡，神谷和秀，松本公久，川堰宣隆
- Organizer
  2018年度精密工学会北陸居信越支部学術講演会
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] せん断力検出型マイクロプローブに働く表面相互作用力に関する研究2018
- Author(s)
  伊東聡，神谷和秀，松本公久，高偉
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] Study for multiaxial microprobing system based on the detection a local surface interaction force2018
- Author(s)
  So ITO, Yusuke SHIMA, Kimihisa MATSUMOTO, Kazuhide KAMIYA
- Organizer
  The 8th International Conference on Positioning Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] Surface form measurement of a small roll workpiece2017
- Author(s)
  Toshiki Saito, Yuki Machida, Yuki Shimizu, Yuan-Liu Chen and Wei Gao
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Study for the adhesion force of a microprobing system with the shear-mode detection2017
- Author(s)
  So Ito, Hirotaka Kikuchi, Wei Gao
- Organizer
  13th International Symposium on Measurement Technology and Intelligent Instruments
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] せん断力検出型マイクロプローブによるマイクロ構造の精密寸法計測2017
- Author(s)
  伊東聡
- Organizer
  2017年度精密工学会北陸信越支部学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] マイクロプローブのその場校正法を用いたマイクロスリット溝幅の精密測定2017
- Author(s)
  伊東聡，陳遠流，菊地浩貴，小林遼，清水裕樹，高偉
- Organizer
  2017年度砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] Diamond cutting of brittle materials on inclined surfaces based on a thrust force controlled cutting strategy2016
- Author(s)
  Yuan-Liu Chen, K. Tohyama, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  The 5th International Conference on Nanomanufacturing (nanoMan2016)
- Place of Presentation
  University of Macau, Macau, China
- Year and Date
  2016-08-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Measurement of the Repetition Rate　Stability of a Mode-Locked Laser2016
- Author(s)
  楊紹青，陳遠流，伊東総，清水裕樹，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Measurement of the Gap Width of the Slot Die Coater by Using a Shear-mode Detection Micro-probe2016
- Author(s)
  1So Ito, Hirotaka Kikuchi, YuanLiu Chen, Yuki Shimizu, Gao Wei
- Organizer
  The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
- Place of Presentation
  宮城県松島町　ホテル松島大観荘
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] 低測定力測定機を用いた工具刃先の形状測定に関する研究2016
- Author(s)
  渡邉佑，高偉，清水裕樹，伊東聡，山本泰河，金山利彦
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Measurement of the Optical Frequency Stability of a Mode-Locked Laser2016
- Author(s)
  Shaoqing YANG, Yuan-liu CHEN, So ITO, Yuki SHIMIZU, Wei GAO
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] せん断力検出型マイクロプローブによる三次元精密計測に関する研究2016
- Author(s)
  伊東聡
- Organizer
  第44回計測分科会年会，2016年度計測分科会形状計測研究会
- Place of Presentation
  香川県高松市　サンポートホール高松
- Invited
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] スロットダイコーターの精密計測に関する研究　　第2報マイクロプローブによる溝幅分布測定システムの構築‐2016
- Author(s)
  伊東聡，菊地浩貴，陳遠流，清水裕樹，高偉，高橋和彦，金山利彦，荒川訓明，林敦
- Organizer
  2016年度精密工学会春季大会学術講演会
- Place of Presentation
  東京理科大学，千葉県野田市
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-26820018
[Presentation] Profile Measurement of a Micro Cutting Edge by using a Contact-type Stylus Probe with Low Measuring Force2016
- Author(s)
  Yu WATANABE, Sho SEKINE, So ITO, Yuki SHIMIZU, Wei GAO, Taiga YAMAMOTO, Toshihiko KANAYAMA
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 2軸ロイドミラー干渉計による回折格子製作に関する研究2016
- Author(s)
  真野和樹，相原涼，李星輝，伊東聡，清水裕樹，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A Long Stroke Atomic Force Microscope for Surface Profile Measurement of Micro-optics2016
- Author(s)
  So ITO, Minglei LI, Yuanliu CHEN, Yanhao XU, Zengyuan NIU, Masaya FURUTA, Yuki SHIMIZU, Wei GAO
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] シングルセル受光素子を用いた光学式角度センサの高感度化に関する研究2016
- Author(s)
  間所周平，丸山泰司，清水裕樹，伊東聡，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Molecular dynamics simulation of scanning process in Atomic Force Microscope form measurement2016
- Author(s)
  Y.D. Cai, Y.L. Chen, Yuki Shimizu, So Ito and W. Gao
- Organizer
  The 5th International Conference on Nanomanufacturing (nanoMan2016)
- Place of Presentation
  University of Macau, Macau, China
- Year and Date
  2016-08-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Profile measurement of a steep slope surface by using a long　stroke scanning probe microscope2016
- Author(s)
  徐延昊，陳遠流，伊東総，清水裕樹，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] スロットダイコーターの精密計測に関する研究 ‐第3 報マイクロプローブ先端球のその場校正の不確かさ評価‐2016
- Author(s)
  伊東聡，菊地浩貴，小林遼，陳遠流，清水裕樹，高偉，高橋和彦，金山利彦，荒川訓明，林敦
- Organizer
  2016年度精密工学会秋季大会学術講演会
- Place of Presentation
  茨城県水戸市　茨城大学
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] An optical configuration for the Lloyd’s mirror interferometer for fabrication of gratings having symmetrical profiles2016
- Author(s)
  任宗偉，相原涼，清水裕樹，伊東聡，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Development of precision length measurement system using a micro-probe for micro-slit of the slot die coater2016
- Author(s)
  So Ito, Yuanliu Chen, Hirotaka Kikuchi, Ryo Kobayashi, Yuki Shimizu, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi
- Organizer
  16th International Conference on Precision Engineering
- Place of Presentation
  静岡県浜松市　アクトシティー浜松
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] マイクロプローブを用いたスロットダイコーターの精密溝幅計測に関する研究2016
- Author(s)
  伊東聡，陳遠流，菊地浩貴，清水裕樹，高偉，高橋和彦，金山利彦，荒川訓明，林敦
- Organizer
  日本機械学会2016年度年次大会
- Place of Presentation
  福岡県福岡市　九州大学
- Year and Date
  2016-09-11
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] 光周波数コム光源を用いた光学式センサに関する研究2016
- Author(s)
  上原健太郎，工藤幸利，陳遠流，清水裕樹，伊東聡，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Analysis of a Lloyd's Mirror Interferometer for Fabrication of Gratings2016
- Author(s)
  Zongwei REN, Ryo AIHARA, Yuki SHIMIZU, So ITO, Yuan-Liu Chen, Wei GAO
- Organizer
  IEEE 16th International Conference on Nanotechnology (IEEE NANO 2016)
- Place of Presentation
  仙台国際センター (宮城県仙台市)
- Year and Date
  2016-08-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] In-process Tilt Measurement of a Brittle Material Workpiece by using a Force-sensor Integrated Diamond Cutting Tool2016
- Author(s)
  Keisuke TOHYAMA, Yuan-liu CHEN, So ITO, Yuki SHIMIZU, Wei GAO
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] On-line qualification of an effective diameter for micro-probing system with method of shear-force detection2016
- Author(s)
  So Ito, Yuanliu Chen, Hirotaka Kikuchi, Ryo Kobayashi, Yuki Shimizu, Wei Gao
- Organizer
  The 5th International Conference on Nanomanufacturing (nanoMan2016)
- Place of Presentation
  中国マカオ
- Year and Date
  2016-08-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05999
[Presentation] 白色共焦点顕微鏡の光学系設計に関する研究2016
- Author(s)
  仲村拓，清水裕樹，伊東聡，陳遠流，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] XYZマイクロステージに関する研究2016
- Author(s)
  安達圭祐，清水裕樹，伊東聡，高偉，丹羽英二，佐々木祥弘
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Investigation on the sensitivity of an optical angle sensor based on laser autocollimation2016
- Author(s)
  Yuki SHIMIZU, Taiji MARUYAMA, Yuan-Liu CHEN, So ITO and Wei GAO
- Organizer
  Optical Measurement Technology and Instrument (OTA2016)
- Place of Presentation
  China National Convention Center, Beijing China
- Year and Date
  2016-05-09
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Precision On-machine Measurement of Error Motion of Carriage Slide on a Drum Roll Lathe2016
- Author(s)
  Zengyuan NIU, Yuan-LIU CHEN, Daiki MATSUURA, Yuki SHIMIZU, So ITO, Wei GAO, Jeongseok OH, Chunhong Park
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 水平走査型測定法による小型円筒試料の精密形状測定2016
- Author(s)
  齋藤俊樹，町田裕貴，清水裕樹，伊東聡，高偉，山崎宏，柴本裕輔，花岡浩毅
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Molecular dynamics simulation of form measurement process of soft materials using atomic force microscope2016
- Author(s)
  Yindi Cai, Yuan-Liu Chen, Yuki Shimizu, So Ito, and Wei Gao
- Organizer
  IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2016)
- Place of Presentation
  ホテル松島大観荘（宮城県宮城郡松島町）
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Optical Analysis of a Confocal Microscope2016
- Author(s)
  Taku NAKAMURA, Yuki SHIMIZU, So ITO, Yuan-liu CHEN, Wei GAO
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A Design Study of an XYZ Micro-stage2016
- Author(s)
  Yuki SHIMIZU, Takuma SUGAWARA, Keisuke ADACHI, So ITO, Wei GAO
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Development of an orthogonal two-axis Lloyd’s mirror interferometer for fabrication of two-axis scale grating2016
- Author(s)
  Zongwei Ren, Yuki Shimizu, Ryo Aihara, Yuan-Liu Chen, So Ito, Wei Gao
- Organizer
  The 12th China-Japan International Conferences on Ultra-Precision Machining Processes (CJUMP2016)
- Place of Presentation
  Hunan Fenglin Hotel, Hunan, China
- Year and Date
  2016-11-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 力センサ搭載型ダイヤモンド切削工具を用いた脆性材料ワークのインプロセスチルト測定2016
- Author(s)
  遠山佳祐，陳遠流，清水裕樹，伊東聡，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Determination of the origin position for an angle sensor with a femtosecond laser2015
- Author(s)
  Jun Tamada,Yukitoshi Kudo,Yuan-Liu Chen,Yuki Shimizu,So Ito,Wei Gao
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2015)
- Place of Presentation
  京都リサーチパーク（京都府京都市）
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Surface Profile Measurement of Micro-optics by Using a Long Stroke AFM2015
- Author(s)
  Minglei Li, So Ito, Zhigang Jia, Yuki Shimizu, Wei Gao
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  National Taiwan University, Taipei, Taiwan
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] On-line Qualification of Probe Tip Ball Diameter for Gap Width Measurement2015
- Author(s)
  So Ito, Hirotaka Kikuchi, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26820018
[Presentation] Micro-probing system for slit width measurement by using a shear-force detection2015
- Author(s)
  So Ito, Hirotaka Kikuchi, Yuan-Liu Chen, Yuki Shimizu, Wei Gao
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  京都リサーチパーク，京都府京都市
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26820018
[Presentation] 3ビームロイドミラー干渉計による2軸回折格子加工に関する研究2015
- Author(s)
  相原涼，李星輝，Yindi Cai，伊東聡，清水裕樹，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 2次元格子とフィゾー干渉計の一括自律校正に関する研究-自律校正法の提案-2015
- Author(s)
  大野敦子，金于載，Yindi Cai，陳遠流，清水裕樹，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 超高感度角度センサに関する研究2015
- Author(s)
  丸山泰司，清水裕樹，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] スロットダイコーターの精密計測に関する研究　-第1報　測定子の有効直径のオンライン測定-2015
- Author(s)
  菊地浩貴，伊東聡，高偉，高橋和彦，金山利彦，荒川訓明，林敦
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学，宮城県仙台市
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-26820018
[Presentation] Laser interference lithography with a modified two-axis Lloyd’s mirror interferometer for fabrication of two-dimensional micro patterns2015
- Author(s)
  Yindi Cai, Xinghui Li,Ryo Aihara,Yuki Shimizu,So Ito,Wei Gao
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2015)
- Place of Presentation
  京都リサーチパーク（京都府京都市）
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A two-axis Lloyd's mirror interferometer for fabrication of two dimensional diffraction gratings2015
- Author(s)
  Xinghui Li, Wei Gao, Yuki Shimizu, So Ito
- Organizer
  2014 CIRP Winter meetings
- Place of Presentation
  Nantes, France
- Year and Date
  2015-01-23
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] 平面ステージ精密制御用多自由度光センサに関する研究2015
- Author(s)
  古田雅也，李星輝，Yindi Cai，清水裕樹，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 光周波数コムを用いた角度スケールコムに関する研究2015
- Author(s)
  清水裕樹，玉田純，工藤幸利，陳遠流，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A three-axis angle sensor with a linear encoder scale reflector2015
- Author(s)
  Yuki Shimizu, Taiji Maruyama, So Ito, Wei Gao
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  National Taiwan University, Taipei, Taiwan
- Year and Date
  2015-09-22
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 微小球付きナノピペットプローブを用いたマイクロ構造物の寸法測定に関する研究2014
- Author(s)
  伊東聡,小玉一成,高偉
- Organizer
  2014年度精密工学会学術講演会
- Place of Presentation
  東京大学,東京 A74
- Year and Date
  2014-03-20
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] Development of a nanopipette ball probe for Micro-CMM2014
- Author(s)
  So Ito, Issei Kodama, Hirotaka Kikuchi Wei Gao
- Organizer
  International Symposium on Micro/Nano Mechanical Machining and Manufacturing (ISMNM2014)
- Place of Presentation
  Xi'an, China
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 微小球付きナノピペットプローブを用いたマイクロ構造物の寸法測定に関する研究2014
- Author(s)
  伊東聡，小玉一成，高偉
- Organizer
  2014年度精密工学会学術講演会
- Place of Presentation
  東京大学，東京
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 超高感度角度センサに関する研究2014
- Author(s)
  村田大，清水裕樹，伊東聡，高偉
- Organizer
  精密工学会学術講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究－第 4 報周波数変調プローブの三軸方向の感度評価－2014
- Author(s)
  菊地浩貴，伊東聡，高偉
- Organizer
  2014年度精密工学会東北支部学術講演会
- Place of Presentation
  弘前大学，青森県
- Year and Date
  2014-11-29
- Data Source
  KAKENHI-PROJECT-26820018
[Presentation] 光学式3軸角度センサの小型化に関する研究2014
- Author(s)
  丸山泰司，清水裕樹，Siew-Leng TAN，村田大，伊東聡，高偉
- Organizer
  2014年度精密工学会東北支部学術講演会
- Place of Presentation
  青森県弘前市弘前大学
- Year and Date
  2014-11-29
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] XYZ三軸振動センサに関する研究-第二報信号処理系の最適化と微小振動計測について-2014
- Author(s)
  相原涼，伊藤武志，伊東聡，清水裕樹，高偉
- Organizer
  2014年度精密工学会東北支部学術講演会
- Place of Presentation
  青森県弘前市弘前大学
- Year and Date
  2014-11-29
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] マイクロ構造物寸法計測のための微小球付きナノピペットプローブの開発2014
- Author(s)
  伊東聡，小玉一成，菊地浩貴，高偉
- Organizer
  2014年度砥粒加工学会学術講演会
- Place of Presentation
  岩手大学，岩手県
- Year and Date
  2014-09-12
- Data Source
  KAKENHI-PROJECT-26820018
[Presentation] Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection2013
- Author(s)
  So Ito, Issei Kodama, Wei Gao
- Organizer
  6th International Symposium of Precision Mechanical Measurement (ISPMM2013)
- Place of Presentation
  Guizhou, China
- Year and Date
  2013-08-12
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] Investigation of a femtosecond laser for measurement of angular displacement2013
- Author(s)
  Yukitoshi KUDO, Siew-Leng TAN, Yuki SHIMIZU, So ITO, and Wei GAO
- Organizer
  LEM21
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Construction of a surface profile measurement system by using a nanopipette ball probe with shear-force detection2013
- Author(s)
  Issei KODAMA, So ITO, Wei GAO
- Organizer
  The 7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Proc. of 7th LEM21
- Place of Presentation
  Matsushima, Japan
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] Construction of a surface measurement system by using a nanopipette ball probe with shear-force detection2013
- Author(s)
  Issei Kodama, So Ito and Wei Gao
- Organizer
  The 7th International Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  松島，宮城県
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] Development of a Nanopipette Ball Probe for Form Measurement of Micrometer-Scale Structures2013
- Author(s)
  So Ito, Issei Kodama, Wei Gao
- Organizer
  The 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII)
- Place of Presentation
  Aachen, Germany
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究 ―第3報　周波数変調検出による接触検出の高感度化―2013
- Author(s)
  伊東聡，小玉一成，高偉
- Organizer
  2013年精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学，大阪府
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] Development of a Nanopipette Ball Probe for Form Measurement of Micrometer-Scale Structures2013
- Author(s)
  So Ito, Issei Kodama and Wei Gao
- Organizer
  The 11th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  Aachen, Germany
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 超高感度角度センサに関する研究2013
- Author(s)
  村田大,清水裕樹,伊東聡,高偉
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学(東京都)
- Year and Date
  2013-03-14
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection2013
- Author(s)
  So Ito, Issei Kodama and Wei Gao
- Organizer
  6th International Symposium of Precision Mechanical Measurement
- Place of Presentation
  Guizhou, China
- Invited
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] Dimensional Measurement of Micrometer-scale Structures with a Nanopipette Ball Probe by Using Shear-froce Detection2013
- Author(s)
  So Ito, Issei Kodama, Wei Gao
- Organizer
  6th International Symposium on Precision Mechanical Measurement
- Place of Presentation
  Guizhou, China
- Invited
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究―第3報周波数変調検出による接触検出の高感度化―2013
- Author(s)
  伊東聡,小玉一成,高偉
- Organizer
  2013年精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学,大阪府吹田市,(2013,G31)
- Year and Date
  2013-09-13
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] An ultra-sensitive angle sensor based on laser autocollimation for stage motion measurement2013
- Author(s)
  Dai MURATA, Siew-Leng TAN, Yuki SHIMIZU, So ITO, and Wei GAO
- Organizer
  LEM21
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Surface Profile Measurement of Micro-optics by using a Scanning Electrostatic Force Microscope2013
- Author(s)
  So Ito, Zhigang Jia, Shigeaki Goto, Gaofa He, Keiichiro Hosobuchi, Yuki Shimizu and Wei Gao
- Organizer
  5th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Place of Presentation
  Taipei, Taiwan
- Invited
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究　－第2報　形状計測システムの開発と評価－2013
- Author(s)
  伊東聡、小玉一成、高偉
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学(東京)
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] Development of a Nanopipette Ball Probe for Form Measurement of Micrometer-Scale Structures2013
- Author(s)
  So Ito, Issei Kodama, Wei Gao
- Organizer
  11th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  Aachen, Germany
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究―第2報形状計測システムの開発と評価―2013
- Author(s)
  伊東聡,小玉一成,高偉
- Organizer
  2013年精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学,東京,2013,N08
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 微小球付きナノピペットプローブに関する研究2012
- Author(s)
  小玉一成,伊東聡,高偉
- Organizer
  2012年度精密工学会東北支部学術講演会
- Place of Presentation
  山形大学,米沢市
- Year and Date
  2012-12-01
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] Development of self-sensing probe with a high aspect ratio shape for AFM observation in a liquid condition2012
- Author(s)
  So Ito and Futoshi Iwata
- Organizer
  European Society for Precision Engineering and Nanotechnology (euspen) 2012
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 微小球付きナノピペットプローブに関する研究2012
- Author(s)
  小玉一成、伊東聡、高偉
- Organizer
  2012年度精密工学会東北支部学術講演会
- Place of Presentation
  山形大学(米沢市)
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 光学式3軸角度センサの高精度化に関する研究2012
- Author(s)
  村田大,清水裕樹,伊東聡,高偉
- Organizer
  2012年度精密工学会東北支部学術講演会
- Place of Presentation
  山形大学工学部(米沢市)
- Year and Date
  2012-12-01
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Low-cost and compact interference lithography of grating fabrication for surface encoder2012
- Author(s)
  Xinghui Li, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  2012年度精密工学会東北支部学術講演会
- Place of Presentation
  山形大学工学部(米沢市)
- Year and Date
  2012-12-01
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Fabrication of diffraction gratings for surface encoders by using a Lloyd's mirror interferometer with a 405 nm laser diode2012
- Author(s)
  Xinghui Li, Yuki Shimizu, So Ito, Wei Gao, Lijiang Zeng
- Organizer
  8th International Symposium on Precision Engineering Measurements and Instrumentation
- Place of Presentation
  Chengdu, China
- Year and Date
  2012-08-10
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] A nanopipette ball probe for dimensional measurement of micro-structures2012
- Author(s)
  So Ito, Issei Kodama, Wei Gao
- Organizer
  International Conference of Manufacturing Technology Engineers 2012 (ICMTE)
- Place of Presentation
  Seoul, Korea, Proceedings of the ICMTE
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究―装置の設計と基本特性の評価―2012
- Author(s)
  伊東聡,小玉一成,高偉
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学,北九州市,(2012,N44)
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究　－装置の設計と基本特製の評価－2012
- Author(s)
  伊東聡、小玉一成、高偉
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学(北九州市)
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] A nanopipette ball probe for dimensional measurement of micro-structure2012
- Author(s)
  So Ito, Issei Kodama, Wei Gao
- Organizer
  International Conference of Manufacturing Technology Engineers
- Place of Presentation
  Seoul, Korea
- Invited
- Data Source
  KAKENHI-PROJECT-24760097
[Presentation] Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography
- Author(s)
  Xinghui Li, Yindi Cai, Ryo Aihara, Yuki Shimizu, So Ito and Wei Gao
- Organizer
  3rd International Conference on Optical and Photonic ENgineering (icOPEN2015)
- Place of Presentation
  Singapore, Singapore
- Year and Date
  2015-04-14 – 2015-04-16
- Invited
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Development of a nanopipette ball probe for Micro-CMM
- Author(s)
  So Ito, Issei Kodama, Hirotaka Kikuchi, Wei Gao
- Organizer
  International Symposium on Micro/Nano Mechanical Machining and Manufacturing
- Place of Presentation
  Xi’an, China
- Year and Date
  2014-04-21 – 2014-04-24
- Invited
- Data Source
  KAKENHI-PROJECT-26820018
[Presentation] A six degree-of-freedom surface motor-driven stage with aerostatic bearings
- Author(s)
  Masaya Furuta, Yuki Shimizu, So Ito and Wei Gao
- Organizer
  The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
- Place of Presentation
  福岡県北九州市北九州国際会議場
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Dimensional Measurement of Micro Pinhole by Probing System with a Nanopipette Ball Stylus
- Author(s)
  So Ito, Hirotaka Kikuchi, Issei Kodama, Wei Gao
- Organizer
  The 16th International Conference on Positioning Technology
- Place of Presentation
  北九州国際会議場，福岡県
- Year and Date
  2014-11-18 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-26820018
[Presentation] Development of a six-degree-of-freedom surface encoder
- Author(s)
  Yindi Cai, Yuki Shimizu, Xinghui Li, So Ito and Wei Gao
- Organizer
  The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
- Place of Presentation
  福岡県北九州市北九州国際会議場
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] 光学式3軸角度センサの小型化に関する研究
- Author(s)
  丸山泰司，清水裕樹, 伊東聡, 高偉
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京都文京区東洋大学白山キャンパス
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] A miniaturized three-axis angle sensor
- Author(s)
  Taiji Maruyama, Siew-Leng Tan, Yuki Shimizu, Dai Murata, So Ito, and Wei Gao
- Organizer
  The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
- Place of Presentation
  福岡県北九州市北九州国際会議場
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Measurement of three-axis vibration of an air-bearing stage
- Author(s)
  Ryo Aihara, Takeshi Ito, So Ito, Yuki Shimizu and Wei Gao
- Organizer
  The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
- Place of Presentation
  福岡県北九州市北九州国際会議場
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] A multi-probe surface encoder for multi-degree-of-freedom position measurement
- Author(s)
  Yuki Shimizu, Ryo Aihara, Yingdi Cai, Xinghui Li, So Ito and Wei Gao
- Organizer
  The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
- Place of Presentation
  福岡県北九州市北九州国際会議場
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24360050

1. GAO Wei (70270816)

# of Collaborated Projects: 3 results

# of Collaborated Products: 81 results
2. SHIMIZU Yuki (70606384)

# of Collaborated Projects: 3 results

# of Collaborated Products: 80 results
3. Kamiya Kazuhide (00244509)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
4. 松隈啓 (90728370)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
5. 陳遠流 (90794058)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
6. 松本公久 (40457122)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results

Ito So 伊東 聡

ITO So 伊東 聡

Research Projects

Research Products

Co-Researchers

近赤外光源を用いた斜入射干渉計によるきさげ表面微細形状の大面積精密三次元計測Principal Investigator

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In-situ calibration of microprobe with nanometric accuracy using a rotating reference spherePrincipal Investigator

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A study on super-resolution techniques using multi-channel synchronous sampling

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Absolute measurement of long micro slit width by non-contact type twin micro-probing systems with high speed scanning of twin micro probe and real time space calibrationPrincipal Investigator

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Frontier of the precision optical metrology created by the ultra-precision optical nano-grid reference artifact and the absolute optical scale comb

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２軸干渉グリッド定在波一括転写と自律的精度保証による次世代光ナノグリッド基準創出

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Study of three dimensional measurement by utilizing a high-sensitive microprobe based on the micro liquid pillarPrincipal Investigator

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Development of a three-axis laser autocollimator for measurement of angular error motions of a next-generation ultra-precision positioning stage

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Study of dimensional measurement of micro-hole by using a high-sensitivity probing system with a nanopipette ball probePrincipal Investigator

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[Book] Bilingual edition 精密計測学 Precision Metrology2024

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[Book] Precision Manufacturing. Metrology2019

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[Book] (Book chapter) Handbook of Manufacturing, "Chapter 10"2019

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[Book] (Book chapter) 機械設計「精密位置決めにおける多軸センサの活用」2016

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Ito So 伊東聡

ITO So 伊東聡