MATSUDA Kazunori 松田和典

Researcher Number	10192337
Other IDs
Affiliation (Current)	2025: 大阪大学, 大学院工学研究科, 招へい教授
Affiliation (based on the past Project Information) *help	2023: 徳島文理大学, 理工学部, 教授 2022: 大阪大学, 大学院工学研究科, 招へい教授 2022: 大阪大学, 大学院工学研究科, 教授 2019 – 2021: 徳島文理大学, 理工学部, 教授 2006 – 2007: 徳島文理大学, 工学部ナノ物質工学科, 教授 2004 – 2005: 鳴門教育大学, 学校教育学部, 准教授
Review Section/Research Field	Principal Investigator Basic Section 21050:Electric and electronic materials-related / Microdevices/Nanodevices Except Principal Investigator Basic Section 62030:Learning support system-related
Keywords	Principal Investigator ピエゾ抵抗効果 / 歪 / スピン・オン・グラス / 非線形性 / スピンオングラス法 / スパッタ法 / 反転層 / 酸化膜 / 低温プロセス / 酸素ドナー … More / 格子欠陥 / ホール効果 / ピゾ抵抗効果 / 抵抗の温度特性 / 空孔 / ノンドープ / 水素ラジカル / 水素アニール / 荷電状態 / 欠陥準位 / 結晶欠陥 / 温度依存性 / 結晶歪 / ゲルマニウム / Mass action Law / Piezoresistance Effects / Piezocanacitance Effect / Strain-induced Effects / Silicon Device / 状態密度 / 質量作用の法則 / 質量作用の / ピエゾキャパシタンス効果 / 歪効果 / シリコンデバイス … More Except Principal Investigator 微細化 / リソグラフィ / デバイスプロセス / フォトリソグラフィ / 半導体デバイス / デバイス / 半導体 / 熱拡散 / 微細加工 Less

Semiconductor device foundry achieved at a nanotech platform established on an average science lab.
- Principal Investigator
  
  長岡史郎
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 62030:Learning support system-related
- Research Institution
  Kagawa National College of Technology
Piezoresistance Effects of p-type GePrincipal Investigator
- Principal Investigator
  
  MATSUDA Kazunori
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21050:Electric and electronic materials-related
- Research Institution
  Osaka University
  Tokushima Bunri University
Strain-induced Effects on the Depletion Layer and Dissociation of Inert Hydrogen by Hot CarriersPrincipal Investigator
- Principal Investigator
  
  MATSUDA Kazunori
- Project Period (FY)
  2004 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Tokushima Bunri University
  Naruto University of Education

All 2024 2023 2022 2021 2020 2019 2008 2007 2006 2005 2004

All Journal Article Presentation Book

[Book] ナノデバイスへの量子力学2006
- Author(s)
  D.K.フェリー著, 落合勇一, 打波守, 松田和典, 石橋幸治
- Total Pages
  450
- Publisher
  シュプリンガー・フェアラーク東京
- Data Source
  KAKENHI-PROJECT-16510099
[Journal Article] Effects of Hydrogen Radical Treatment on Piezoresistance Coefficients of Germanium2023
- Author(s)
  (1)K.Matsuda, M.Yamamoto, M.Mikawa, S.Nagaoka, N.Mori and K.Tsutui,
- Journal Title
  
  Applied Physics Express,
  
  Volume: 16巻　5号 Issue: 4 Pages: 82-86
- DOI
  10.35848/1882-0786/acc8b4
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22K12308, KAKENHI-PROJECT-19K04478
[Journal Article] High Temperature Piezoresistance of Silicon Carbide and Galium Nitrede Materials2022
- Author(s)
  T.Sugiura, N.Takahashi, R.Sakota, K.Matsuda, N.Nakano
- Journal Title
  
  IEEE Journal of The Electron Devices Society
  
  Volume: 10 Pages: 203-211
- DOI
  10.1109/jeds.2022.3150915
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K04478
[Journal Article] Nanotech Platoform Established for Average Technical Education Science laboratories2021
- Author(s)
  S.Nagaoka, M.Yamamoto, T.Tsuji, T.Shimazu, R.W.Joshstion, K.Matsuda, F.Shimokawa, H.Horibe
- Journal Title
  
  Proceedings of International Symposium on Advances in Technology Education
  
  Volume: - Pages: 86-91
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K04478
[Journal Article] Nonlinear Piezoresistance Coefficients of Semiconductors2019
- Author(s)
  Kazunori Matsuda, Hiroki Uyama and Kazuo Tsutsui
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 126 Pages: 1-3
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04478
[Journal Article] Origin of the Piezoresistance Effects in p-Type Silicon at High Temperature2019
- Author(s)
  Kazunori Matsuda, Shiro Nagaoka and Hirosi Kajiyama
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Pages: 1-3
- NAID
  210000156808
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04478
[Journal Article] Piezosistance Effect of n-type Silicon ; Temperature and Concentration Dependence, Stress Dependent Effective Masses(*Kojundo Chemical Lab.)2007
- Author(s)
  Yozo Kanda, Kazunori Matsuda
- Journal Title
  
  Technical Proceedings of the Nanotech International Conference on Modeling and Simulation of Microsystems
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16510099
[Journal Article] Piezosistance Effect of n-type Slilcon : Temperatutre and Concentration Dependence, Stress Dependent Effective Masses(*Kojundo Chemical Lab.)2006
- Author(s)
  Yozo Kanda, Kazunori Matsuda
- Journal Title
  
  AIP Conference Proceedings
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16510099
[Journal Article] Piezoresistance Effect of n-type Silicon; Temperature and Concentarion dependence,Stress Dependent Effectove Masses2006
- Author(s)
  Y.Kanda, k.Matsuda
- Journal Title
  
  Int'1 conf on the Physics Semiconductors ICPS-28
- Data Source
  KAKENHI-PROJECT-16510099
[Journal Article] Stress-Induced Effect on Intrinsic Fermi Level and Capacitance in Depletion Layer in Silicon2005
- Author(s)
  Kazunori Matsuda
- Journal Title
  
  Proceedings of the 2005 International Meeting for Future Electron Devices
  
  Pages: 95-96
- Data Source
  KAKENHI-PROJECT-16510099
[Journal Article] Stress-Induced Effect on Intrinsic Depletion Layer in Silicon2005
- Author(s)
  Kazunori Matsuda
- Journal Title
  
  Proceedings of the 2005 International Meeting for Future Electron Devices
  
  Pages: 95-96
- Data Source
  KAKENHI-PROJECT-16510099
[Journal Article] Piezoresistance effect on p-type silicon(*Kojundo Chemical Lab.)2004
- Author(s)
  Yozo Kanda, Kazunori Matsuda
- Journal Title
  
  AlP Conference Proceedings
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16510099
[Journal Article] Piezoresistance Effect on p-type Silicon2004
- Author(s)
  Yozo Kanda, Kazunori Matsuda
- Journal Title
  
  Proceedings of the 27^<th> International Conference on the Physics Semiconductors
- Data Source
  KAKENHI-PROJECT-16510099
[Journal Article] Strain-Dependent Hole Masses and Piezoresistive Properties of Silicon2004
- Author(s)
  Kazunori Matsuda
- Journal Title
  
  Journal of Computational Electronics 3
  
  Pages: 273-276
- Data Source
  KAKENHI-PROJECT-16510099
[Journal Article] Strain-Dependent Hole Masses and Piezoresistive Properties of Silicon2004
- Author(s)
  Kazunori Matsuda
- Journal Title
  
  Journal of Computational Electronics. 3
  
  Pages: 273-276
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16510099
[Presentation] A Study of Resolution Improvement of the Simplified Contact Photo Lithography Using Phase Shift Method for EE Education2024
- Author(s)
  S. Nagaoka*, T. Shimizu, M. Yamamoto, R. W. Johnston, K. Matsuda and H. Horibe
- Organizer
  5th Malaysia-Japan International Conference on Nanoscience, Nanotechnology and Nanoengineering 2024 (MJIC2024)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] Effects of Hydrogen Radicals Treatment of Piezoresistance Coefficients of Germanium2023
- Author(s)
  K.Matsuda, M.Yamamoto, M.Mikawa, S.Nagaoka, K.Tsutsui
- Organizer
  International Conference on Physics of Semiconductors
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] A Study of Resolution an Overlay Accuracy of a Simplified Photo Lithography Process for EE Education Use2023
- Author(s)
  (4)T.Shimizu, M.Yamamoto, R.Johnston, K.Matsuda, H. Horibe and S.Nagaoka,
- Organizer
  4th MALAYSIA- JAPAN International Conference on Nanoscience, Nanotechnology & Nanoengineering 2023 (MJIC 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] Feasibility Study of a Simplified Nanotech Platform and Device Evaluation Procedure Established for Average Educational Science Laboratories2023
- Author(s)
  S.Nagaoka, M.Yamamoto, T.Shimizu, R.Johnston, K.Matsuda and H.Horibe
- Organizer
  4th MALAYSIA-JAPAN International Conference on Nanoscience, Nanotechnology & Nanoengineering 2023 (MJIC 2023),
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] 教育用簡素化微細加工プロセスのレジストパタン解像度と重ね合せ精度改善に関する一考察2023
- Author(s)
  土井彩乃、清水共、川染勇人、山本雅史、ロバートジョンストン、松田和典、堀邊英夫、長岡史郎
- Organizer
  令和５年度電気・電子・情報関係学会四国支部連合大会、11ー5
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] Geのピエゾ抵抗係数に対する水素処理効果2022
- Author(s)
  松田，山本，三河，長岡，谷川，國本，筒井
- Organizer
  2022年第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] Effects of Hydrogen Radicals Treatment of Piezoresistance Coefficients of Germanium2022
- Author(s)
  K.Matsuda, M.Yamamoto, M.Mikasa, S.Nagaoka, K.Tsutsui,
- Organizer
  International Conference on Physics of Semiconductors,2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] Piezocapacitande Effects on Depletion Charge Capacitanceof Metal-Oxide-Siicon2022
- Author(s)
  H.Uyama,T,Kunimoro,K.Takakura, K.Matsuda
- Organizer
  International Conference on the Physics of Semiconductors 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] Effects of Hydrogen Radical Treatment on Piezoresistance Coefficients of Germanium2022
- Author(s)
  K. Matsuda, M.Yamamoto, M.Mikawa, S.Nagaoka, K.Tsutui
- Organizer
  International Conference on the Physics of Semiconductors 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] A Study of a Simplified Integrated Circuit Fabrication Method for Use in a Nanotech Platform for Average technical Education Science Laboratories2021
- Author(s)
  S.Nagaoka, M.Yamamoto, T.shimizu,R.Hohnston, T.Shikama and K.Matsuda,
- Organizer
  3rd Malaysia-Japan International Conference on Nanoscience, Nanotechnology & Nanoengineering (MJIC) 2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] CZ法で作製したGeピエゾ抵抗係数2021
- Author(s)
  藤村，太田，三好，木村，谷川，梶山，松田
- Organizer
  2021年応用物理・物理学会中四国支部合同学術講演会
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] p型Geの異常ピエゾ抵抗係数2021
- Author(s)
  松田，筒井，山本，長岡，梶山
- Organizer
  第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] 半導体界面における真性フェルミレベルの結晶歪効果2021
- Author(s)
  松田和典，中山憲一，谷川浩司，高倉健一郎
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] Geのピエゾ抵抗効果（Ⅰ）2020
- Author(s)
  松田和典，生田壮馬，中谷友哉，長岡史郎，筒井一生
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] 理科室で構築する工学教育用半導体デバイス設計製作評価環境2020
- Author(s)
  長岡史郎，山本雅史，鹿間共一，清水共，Robert Johnston，松田和典，下川房男，堀邉英夫
- Organizer
  応用物理学会
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] 室温におけるp型Siピエゾ抵抗効果の2バンド分離モデル2020
- Author(s)
  松田和典，生田壮馬，宇山裕貴，梶山博司
- Organizer
  日本物理学会2020年秋季大会
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] Nanotech Platform Established for Average Technical Education Science Laboratories2020
- Author(s)
  S.Nagaoka, M.Yamamoto, T.Tsuji, T.Shikama, T.Shimizu, R.W.Johston, K.Matsuda, F.Shimokawa and H.Horibe
- Organizer
  The Transactions of ISATE2019, The 13th International Symposium on Advances in Technology Education
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] Stress-induced Effects on the Depletion Layer Capacitance of Silicon2008
- Author(s)
  K.Matsuda, Y.Kanda, and Y.Itoh
- Organizer
  NSTI Nanotech 2008, 11th Int'l Conf.on Modeling and Simulation of Microsystems
- Place of Presentation
  Boston MA,USA
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16510099
[Presentation] Yozo Kanda and Yuji Itoh : Stress-induced Effects on the Depletion Layer Capacitance of Silicon2008
- Author(s)
  Kazunori Matsuda
- Organizer
  Nanotech 2008 International Conference on Modeling and Simulation of Microsystems
- Place of Presentation
  Boston, Massachusetts USA
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16510099
[Presentation] (*Kojundo Chemical Lab.) : Shear Piezoresistance Coefficient II44 of n-type Silicon2007
- Author(s)
  Yozo Kanda*, Kazunori Matsuda
- Organizer
  Nanotech 2007 International Conference on Modeling and Simulation of Microsystems
- Place of Presentation
  Santa Clara, California USA
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16510099
[Presentation] Shear Piezoresistance Coeffcient π44 of n-type Silicon2007
- Author(s)
  Y.Kanda and K.Matsuda
- Organizer
  NSTI Nanotech 2007, 10th Int'l Conf.on Modeling and Simulation of Microsystems
- Place of Presentation
  Santa Clara CA, USA
- Data Source
  KAKENHI-PROJECT-16510099
[Presentation] Shear Piezoresistance Coefficient π44 of n-type Silicon2007
- Author(s)
  Y.Kanda and K.Matsuda
- Organizer
  NSTI Nanotech 2007, 10th Int'l Conf.on Modeling and Simulation of Microsystems
- Place of Presentation
  Santa Clara CA,USA
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16510099
[Presentation] (*Kojundo Chemical Lab.) : Piezosistance Effect of n-type Silicon ; Temperature and Concentration Dependence, Stress Dependent Effective Masses2006
- Author(s)
  Yozo Kanda*, Kazunori Matsuda
- Organizer
  International Conference on the Physics Semiconductors
- Place of Presentation
  Vienna, Austria
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16510099
[Presentation] Stress-Induced Effect on Intrinsic Fermi Level and Capacitance in Depletion Layer in Silicon silicon2005
- Author(s)
  Kazunori Matsuda
- Organizer
  2005 International Meeting for Future of Electron Devices
- Place of Presentation
  Kyoto Univ
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16510099
[Presentation] (*Kojundo Chemical Lab.) : Piezoresistance effect on p-type International Conference on the Physics Semiconductors ICPS-272004
- Author(s)
  Yozo Kanda*, Kazunori Matsuda
- Place of Presentation
  Flagstaff, Arizona USA
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16510099

1. 長岡史郎 (30300635)

# of Collaborated Projects: 2 results

# of Collaborated Products: 16 results
2. 筒井一生 (60188589)

# of Collaborated Projects: 1 results

# of Collaborated Products: 5 results
3. 山本雅史 (60733821)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
4. 清水共 (40455168)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
5. JOHNSTON ROBERT (60743698)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
6. 堀邊英夫 (00372243)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results

MATSUDA Kazunori 松田 和典

Research Projects

Research Products

Co-Researchers

Semiconductor device foundry achieved at a nanotech platform established on an average science lab.

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Piezoresistance Effects of p-type GePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Strain-induced Effects on the Depletion Layer and Dissociation of Inert Hydrogen by Hot CarriersPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Book] ナノデバイスへの量子力学2006

Author(s)

Total Pages

Publisher

Data Source

[Journal Article] Effects of Hydrogen Radical Treatment on Piezoresistance Coefficients of Germanium2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] High Temperature Piezoresistance of Silicon Carbide and Galium Nitrede Materials2022

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Nanotech Platoform Established for Average Technical Education Science laboratories2021

Author(s)

Journal Title

Data Source

[Journal Article] Nonlinear Piezoresistance Coefficients of Semiconductors2019

Author(s)

Journal Title

Data Source

[Journal Article] Origin of the Piezoresistance Effects in p-Type Silicon at High Temperature2019

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Piezosistance Effect of n-type Silicon ; Temperature and Concentration Dependence, Stress Dependent Effective Masses(*Kojundo Chemical Lab.)2007

Author(s)

Journal Title

Description

Data Source

[Journal Article] Piezosistance Effect of n-type Slilcon : Temperatutre and Concentration Dependence, Stress Dependent Effective Masses(*Kojundo Chemical Lab.)2006

Author(s)

Journal Title

Description

Data Source

[Journal Article] Piezoresistance Effect of n-type Silicon; Temperature and Concentarion dependence,Stress Dependent Effectove Masses2006

Author(s)

Journal Title

Data Source

[Journal Article] Stress-Induced Effect on Intrinsic Fermi Level and Capacitance in Depletion Layer in Silicon2005

Author(s)

Journal Title

Data Source

[Journal Article] Stress-Induced Effect on Intrinsic Depletion Layer in Silicon2005

Author(s)

Journal Title

Data Source

[Journal Article] Piezoresistance effect on p-type silicon(*Kojundo Chemical Lab.)2004

Author(s)

Journal Title

Description

Data Source

[Journal Article] Piezoresistance Effect on p-type Silicon2004

Author(s)

Journal Title

MATSUDA Kazunori 松田和典