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All Journal Article Presentation Book Patent
J. Phys. D: Appl. Phys.
Volume: 51
10.1088/1361-6463/aad47c
J. Appl. Phys.
Volume: 122 Pages: 0433031-8
10.1063/1.4993902
Encyclopedia of Plasma Technology
Volume: 1 Pages: 82-91
Phys. Stat. Sol. (a)
Volume: 212
Phys. Status Solidi A
Volume: 212 Pages: 1571-1577
10.1002/pssa.201532328
J. Vac. Sci. Technol. A
Volume: vol.32 (published online 31 October 2013)
10.1116/1.4828369
Nanoscale Research Letters
Volume: 8 Pages: 201-201
10.1186/1556-276x-8-201
J. Phys. : Conference Series
Volume: (印刷中)
Volume: 8 Pages: 202-202
10.1186/1556-276x-8-202
J. Non-Cryst. Solids
Volume: 358 Pages: 2462-2465
Plasma Chem. Plasma Process
Volume: (印刷中) Pages: 533-545
10.1007/s11090-012-9363-2
Current Appl. Phys
Volume: vol.12
10.1016/j.cap.2012.04.015
Volume: 32 Pages: 533-545
Volume: (印刷中) Pages: 2462-2465
10.1016/j.jnoncrysol.2011.12.081
J.Nanosci.Nanotechnol.
J.Phys. : Condens. Matter
Volume: 23 Pages: 1-22
Journal of Physics-Condensed Matter
Volume: vol.23 Pages: 1-22
10.1088/0953-8984/23/39/394205
Thin Solid Films
Volume: 519 Pages: 258-262
Thin Solid Films 519
Pages: 258-262
Plasma Chem.Plasma Process.
Volume: 30 Pages: 579-590
Plasma Chem.Plasma Process. 30
Pages: 579-590
Journal of Applied Physics 106
Pages: 0135211-6
ECS Trans. 25
Pages: 309-315
ECS Transactions 25[8]
Pages: 405-412
ECS Trans. vol.25
J.Appl.Phys. 106
J. Appl. Phys
Volume: 106 Pages: 0135211-6
Surf. Interface Anal 40
Pages: 984-987
Journal of Appllied Physics 104
Surf. Interface Anal. vol.40
Thin Solid Films vol.517
Pages: 242-244
Surf. Interface Anal. 40(in press)
Jpn. J. Appl. Phys 47
Pages: 1884-1888
Thin Solid Films 517
Volume: 104 Pages: 0535221-8
応用物理 75
Pages: 1031-1036
10019855405
応用物理 vol.75
Physica Status Solidi C (DOI 10.1002/pssc.200982693)
Pages: 2010-2010
J. Phys.: Conference Series
Physica Status Solidi C (DOI 10.1002/pssc.200982805)