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MOMOSE Takeshi  百瀬 健

ORCIDConnect your ORCID iD *help
Researcher Number 10611163
Other IDs
Affiliation (Current) 2025: 熊本大学, 半導体・デジタル研究教育機構, 教授
Affiliation (based on the past Project Information) *help 2023: 熊本大学, 半導体・デジタル研究教育機構, 准教授
2016 – 2022: 東京大学, 大学院工学系研究科(工学部), 講師
2015: 東京大学, 工学(系)研究科(研究院), 講師
2014: 東京大学, 大学院工学系研究科, 助教
2012 – 2014: 東京大学, 工学(系)研究科(研究院), 助教
2011 – 2012: 東京大学, 大学院・工学系研究科, 助教
Review Section/Research Field
Principal Investigator
Reaction engineering/Process system / Basic Section 27020:Chemical reaction and process system engineering-related / Nanomaterials engineering / Functional materials/Devices / Material processing/treatments
Except Principal Investigator
Basic Section 27010:Transport phenomena and unit operations-related / Reaction engineering/Process system / Reaction engineering/Process system
Keywords
Principal Investigator
超臨界流体 / 製膜 / 有機半導体 / 有機薄膜太陽電池 / 3Dプリンタ / 導波管 / テラヘルツ波 / 金属コーティング / 超臨界流体薄膜堆積法 / 材料合成プロセス … More / プロセス / ナノ充填 / 3次元メモリ / 強誘電体薄膜 / 超臨界 / Cu / 3次元実装 / 溶解度 / 光学材料 / ナノ充填技術 / ULSI / MEMS … More
Except Principal Investigator
超臨界流体 / 超臨界堆積法 / 結晶核生成 / 密度汎関数法 / 臨界核 / 亜臨界水 / 超臨界水 / 離散要素法 / 分子シミュレーション / 晶析 / 核生成 / 化合物太陽電池 / 太陽電池 / 化合物半導体 / 金属・酸化膜積層構造形成 / 薄膜形成 / メモリーデバイス / ステップカバレッジ / 電極金属 / 超臨界 / BiTiO3 / SrTiO3 / SrRuO3 / 電極形成 / ナノキャパシタ / 強誘電体 / 超臨界流体薄膜合成 / 強 誘電体 / 高誘電体 / 電極 / FeRAM / DRAM / プロセス開発 / 薄膜合成 Less
  • Research Projects

    (9 results)
  • Research Products

    (60 results)
  • Co-Researchers

    (10 People)
  •  Development of metallic coating technique onto 3D-printed polymer for fabrication of Terahertz wireless communication devicesPrincipal Investigator

    • Principal Investigator
      Momose Takeshi
    • Project Period (FY)
      2020 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 27020:Chemical reaction and process system engineering-related
    • Research Institution
      Kumamoto University
      The University of Tokyo
  •  Development of practical simulator to design crystallization and surface reaction process in supercritical fluids

    • Principal Investigator
      Honma Tetsuo
    • Project Period (FY)
      2019 – 2022
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 27010:Transport phenomena and unit operations-related
    • Research Institution
      Hachinohe National College of Technology
  •  Fabrication of ordered bulk hetero junction photovoltaics using supercritical fluidPrincipal Investigator

    • Principal Investigator
      Momose Takeshi
    • Project Period (FY)
      2016 – 2019
    • Research Category
      Grant-in-Aid for Young Scientists (A)
    • Research Field
      Reaction engineering/Process system
    • Research Institution
      The University of Tokyo
  •  Fabrication of multi-component oxide using supercritical fluid deposition for ferroelectric random access memoryPrincipal Investigator

    • Principal Investigator
      Momose Takeshi
    • Project Period (FY)
      2014 – 2016
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Nanomaterials engineering
    • Research Institution
      The University of Tokyo
  •  Realization of high-efficiency 3-D structured solar cells with compound semiconductor via supercritical fluid conformal deposition

    • Principal Investigator
      TOMAI Takaaki
    • Project Period (FY)
      2013 – 2014
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Reaction engineering/Process system
    • Research Institution
      Tohoku University
  •  Single-step fabrication of untra narrow through silicon via for 3-dimensional integration of electronic devicesPrincipal Investigator

    • Principal Investigator
      Momose Takeshi
    • Project Period (FY)
      2013 – 2015
    • Research Category
      Grant-in-Aid for Young Scientists (A)
    • Research Field
      Reaction engineering/Process system
    • Research Institution
      The University of Tokyo
  •  Studies to improve conversion efficiency of thin film organic photovoltaic cells via development of novel filling process of organic semiconductor materialsPrincipal Investigator

    • Principal Investigator
      MOMOSE Takeshi
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Functional materials/Devices
    • Research Institution
      The University of Tokyo
  •  ULSI/MEMS対応マルチスケール薄膜堆積技術の構築Principal Investigator

    • Principal Investigator
      百瀬 健
    • Project Period (FY)
      2011 – 2012
    • Research Category
      Grant-in-Aid for Research Activity Start-up
    • Research Field
      Material processing/treatments
    • Research Institution
      The University of Tokyo
  •  Nano-capacitor fabrication process development by using supercritical fluid

    • Principal Investigator
      SHIMOGAKI Yukihiro
    • Project Period (FY)
      2010 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Reaction engineering/Process system
    • Research Institution
      The University of Tokyo

All 2024 2023 2022 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 2010 Other

All Journal Article Presentation

  • [Journal Article] Supercritical fluid deposition for conformal Cu film formation on sub-millimeter-scale structures used to fabricate terahertz waveguides2022

    • Author(s)
      Huang Yuyuan、Deura Momoko、Shimoyama Yusuke、Shimogaki Yukihiro、Momose Takeshi
    • Journal Title

      Applied Physics Express

      Volume: 15 Issue: 7 Pages: 075502-075502

    • DOI

      10.35848/1882-0786/ac737b

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Journal Article] Suitability of metallic materials for constructing metal-coated dielectric terahertz waveguides2022

    • Author(s)
      Huang Yuyuan、Konishi Kuniaki、Deura Momoko、Shimoyama Yusuke、Yumoto Junji、Kuwata-Gonokami Makoto、Shimogaki Yukihiro、Momose Takeshi
    • Journal Title

      Journal of Applied Physics

      Volume: 131 Issue: 10 Pages: 105106-105106

    • DOI

      10.1063/5.0075639

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Journal Article] Development of a model for evaluating propagation loss of metal-coated dielectric terahertz waveguides2021

    • Author(s)
      Huang Yuyuan、Konishi Kuniaki、Deura Momoko、Shimoyama Yusuke、Yumoto Junji、Kuwata-Gonokami Makoto、Shimogaki Yukihiro、Momose Takeshi
    • Journal Title

      Journal of Applied Physics

      Volume: 130 Issue: 5 Pages: 055104-055104

    • DOI

      10.1063/5.0058662

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Journal Article] Experimental Approach to Estimate Diffusivity of Metal Organics in Supercritical CO2 at High Temperatures2017

    • Author(s)
      チョウ ユウ、下山 裕介、百瀬 健、霜垣 幸浩
    • Journal Title

      The Journal of Supercritical Fluids

      Volume: V. 120 part2 Pages: 209-217

    • DOI

      10.1016/j.supflu.2016.05.048

    • Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15J09484, KAKENHI-PROJECT-26600040
  • [Journal Article] Solubility of bis-(2,2,6,6-tetramethyl-3,5-heptanedionato)copper(II) in mixed supercritical CO2 and H2 systems for application in supercritical fluid deposition of Cu2015

    • Author(s)
      Takeshi Momose, Aiko Kondo, Tatsuya Kamiya, Hideo Yamada, Junji Ohara, Yasuhiro Kitamura, Hirohisa Uchida, Yukihiro Shimogaki, and Masakazu Sugiyama
    • Journal Title

      Journal of Supercritical Fluids

      Volume: 未定 Pages: 193-200

    • DOI

      10.1016/j.supflu.2015.04.002

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-25709075
  • [Journal Article] Strontium ruthenium oxide deposition in supercritical carbon dioxide using a closed reactor system2013

    • Author(s)
      Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Journal Title

      J.Supercritical Fluid

      Volume: 79 Pages: 244-250

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Journal Article] Ethanol-Assisted Flow-Type Supercritical Fluid Deposition of SrRuO3 for Stoichiometric Film Formation2013

    • Author(s)
      Kyubong Jung, Yu Zhao, Takeshi Momose ,and Yukihiro Shimogaki
    • Journal Title

      ECS Solid State Letters

      Volume: 2

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Journal Article] Strontium ruthenium oxide deposition in supercritical carbon dioxide using a closed reactor system2013

    • Author(s)
      Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Journal Title

      The Journal of Supercritical Fluid

      Volume: In Press Pages: 244-250

    • DOI

      10.1016/j.supflu.2013.03.008

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Journal Article] Step Coverage Quality of Cu Films by Supercritical Fluid Deposition Compared with Chemical Vapor Deposition2010

    • Author(s)
      T.Momose, M.Sugiyama, E.Kondoh, Y.Shimogaki
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49

    • NAID

      210000068539

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Supercritical fluid deposition for semiconductors2024

    • Author(s)
      Takeshi Momose
    • Organizer
      The Society of Chemical Engineering, Japan, 89th annual Meeting (international session)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Development of low-resistivity copper thin film formation process on polymer using supercritical fluid deposition2023

    • Author(s)
      Yusuke Nakajima, Yukihiro Shimogaki, and Takeshi Momose
    • Organizer
      ADMETA Plus 2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] 超臨界流体薄膜堆積法の基礎と半導体応用2023

    • Author(s)
      百瀬健
    • Organizer
      公益社団法人 新化学技術推進協会
    • Invited
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] 超臨界流体薄膜堆積法によるポリマー上への低抵抗率銅薄膜形成プロセスの開発2023

    • Author(s)
      中嶋 佑介,霜垣 幸浩,百瀬 健
    • Organizer
      化学工学会第54回秋季大会
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] 超臨界流体薄膜堆積法を用いた誘電体上の低抵抗率銅薄膜形成に向けた前処理条件の検討2023

    • Author(s)
      中嶋佑介,Huang Yuyuan,霜垣幸浩,百瀬健
    • Organizer
      化学工学会第88年会
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] 高アスペクト比構造へのCu-SCFDプロセス最適設計に向けたCu(tmhd)2のscCO2への溶解度と拡散係数の測定2022

    • Author(s)
      師井 滉平,Huang Yuyuan,出浦 桃子,下山 裕介,霜垣 幸浩,百瀬 健
    • Organizer
      化学工学会第53回秋季大会
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Suitability of metallic materials for metal-coated dielectric terahertz waveguides2022

    • Author(s)
      Yuyuan Huang、Kuniaki Konishi、Momoko Deura、Yusuke Shimoyama、Junji Yumoto、Makoto Kuwata-Gonokami、Yukihiro Shimogaki、Takeshi Momose
    • Organizer
      第69回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Investigation of Cu coating by supercritical fluid deposition on high aspect ratio features for THz wave devices2022

    • Author(s)
      Yuyuan Huang, Kuniaki Konishi, Momoko Deura, Yusuke Shimoyama, Junji Yumoto, Makoto Kuwata-Gonokami, Yukihiro Shimogaki, Takeshi Momose
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Propagation loss mechanism in metal-coated dielectric terahertz wave parallel-plate waveguide2021

    • Author(s)
      Yuyuan Huang、Kuniaki Konishi、Momoko Deura、Yusuke Shimoyama、Junji Yumoto、Makoto Kuwata-Gonokami、Yukihiro Shimogaki、Takeshi Momose
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Propagation loss of metal-coated dielectric parallel-plate waveguide in transverse-electric (TE) mode2021

    • Author(s)
      Yuyuan Huang、Kuniaki Konishi、Momoko Deura、Yusuke Shimoyama、Junji Yumoto、Makoto Kuwata-Gonokami、Yukihiro Shimogaki、Takeshi Momose
    • Organizer
      第68回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Physical Model For Evaluating Propagation Loss Of Metal-coated Dielectric Terahertz Waveguides2021

    • Author(s)
      3.Yuyuan Huang, Kuniaki Konishi, Momoko Deura, Yusuke Shimoyama, Junji Yumoto, Makoto Kuwata-Gonokami, Yukihiro Shimogaki, Takeshi Momose
    • Organizer
      46th International Conference on Infrared, Millimeter, and Terahertz Waves
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Supercritical fluid deposition of Cu for sub-millimeter-scale features2021

    • Author(s)
      Huang Yuyuan・Deura Momoko・Shimoyama Yusuke・Shimogaki Yukihiro・Momose Takeshi
    • Organizer
      第52回化学工学会秋季大会
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Supercritical fluid deposition technique enabling metallic coating onto 3D-printed polymer for fabrication of high-aspect-ratio THz devices2020

    • Author(s)
      Takeshi Momose, Kuniaki Konishi, Yu Zhao, Hirotaka Morishita, Tetsuya Tsuchida, Yuyuan Huang, Hiroyuki Yasukochi, Kentaro Soeda, Momoko Deura, Yusuke Shimoyama, Junji Yumoto, Makoto Kuwata-Gonokami, and Yukihiro Shimogaki
    • Organizer
      45th International Conference on Infrared, Millimeter, and Terahertz Waves
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Film thickness dependence on propagation loss of coated metal in terahertz waveguides2020

    • Author(s)
      Yuyuan Huang、Kuniaki Konishi、Momoko Deura、Yusuke Shimoyama、Junji Yumoto、Makoto Kuwata-Gonokami、Yukihiro Shimogaki、Takeshi Momose
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Material evaluation for inner metallic coating of hollow dielectric THz waveguides2020

    • Author(s)
      Yuyuan Huang, Kuniaki Konishi, Momoko Deura, Yusuke Shimoyama, Junji Yumoto, Makoto Kuwata-Gonokami, Yukihiro Shimogaki, Takeshi Momose
    • Organizer
      45th International Conference on Infrared, Millimeter, and Terahertz Waves
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Impact of surface oxidation on wave propagation of Cu-coated THz waveguides2020

    • Author(s)
      Yuyuan Huang、Kuniaki Konishi、Momoko Deura、Yusuke Shimoyama、Junji Yumoto、Makoto Kuwata-Gonokami、Yukihiro Shimogaki、Takeshi Momose
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-20H02511
  • [Presentation] Crystalline ultra-thin tetracene film formation by temperature-driven supercritical fluid deposition2019

    • Author(s)
      1.Yanshao Lee, Momoko Deura, Yusuke Shimoyama, Yukihiro Shimogaki, and Takeshi Momose
    • Organizer
      18th Asian Pacific Confederation of Chemical Engineering Congress (APCChE 2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06127
  • [Presentation] Ultra-thin continuous crystalline tetracene film formation by temperature-driven supercritical fluid deposition2019

    • Author(s)
      レイ ゲンショウ,出浦 桃子,下山 裕介,霜垣 幸浩,百瀬 健
    • Organizer
      化学工学会 第84年会
    • Data Source
      KAKENHI-PROJECT-16H06127
  • [Presentation] Tetracene thin film formation for organic photovoltaics by temperature-driven supercritical fluid deposition2018

    • Author(s)
      黎 彦劭,出浦 桃子,下山 裕介,霜垣 幸浩,百瀬 健
    • Organizer
      化学工学会 第50回秋季大会
    • Data Source
      KAKENHI-PROJECT-16H06127
  • [Presentation] 超臨界流体の温度勾配を利用したテトラセン製膜技術の構築2017

    • Author(s)
      木下 圭,下山 裕介,霜垣 幸浩,百瀬 健
    • Organizer
      第19回化学工学会学生発表会
    • Place of Presentation
      東京農工大学,小金井,東京
    • Data Source
      KAKENHI-PROJECT-16H06127
  • [Presentation] Supercritical fluid deposition of conformal oxide films: 3-dimentionally-stacked RuO2/TiO2/RuO2 structures for MIM capacitors2017

    • Author(s)
      Yu Zhao, Yusuke Shimoyama, Takeshi Momose, Yukihiro Shimogaki
    • Organizer
      Electron Devices Technology and Manufacturing Conference 2017
    • Place of Presentation
      富山,日本
    • Year and Date
      2017-02-28
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26600040
  • [Presentation] Thin film deposition using chemical reaction in supercritical fluid for high-aspect-ratio 3-dimensional features2017

    • Author(s)
      チョウ ユウ,下山 裕介,百瀬 健,霜垣 幸浩
    • Organizer
      化学工学会 第82年会
    • Place of Presentation
      芝浦工業大学,豊洲,東京
    • Year and Date
      2017-03-06
    • Data Source
      KAKENHI-PROJECT-26600040
  • [Presentation] 超臨界流体を用いたBi4Ti3O12製膜における反応機構解析2016

    • Author(s)
      チョウ ユウ,下山 裕介,百瀬 健,霜垣 幸浩
    • Organizer
      化学工学会 第48回秋季大会
    • Place of Presentation
      徳島大学,徳島,徳島
    • Year and Date
      2016-09-06
    • Data Source
      KAKENHI-PROJECT-26600040
  • [Presentation] 超臨界流体により形成したRuO2薄膜の結晶化に向けたアニール処理2016

    • Author(s)
      チョウ ユウ,下山 裕介,百瀬 健,霜垣 幸浩
    • Organizer
      化学工学会 第81年会
    • Place of Presentation
      関西大学,大阪府,大阪市
    • Year and Date
      2016-03-13
    • Data Source
      KAKENHI-PROJECT-26600040
  • [Presentation] Supercritical fluid deposition of metals and metal oxides for electronic device applications2015

    • Author(s)
      Takeshi Momose
    • Organizer
      The 7th China-Japan Symposium on Chemical Engineering
    • Place of Presentation
      Beijing, China
    • Year and Date
      2015-10-16
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-25709075
  • [Presentation] コンフォーマルな超臨界流体堆積におけるCO2圧力の影響2015

    • Author(s)
      チョウ ユウ,百瀬 健,下山 裕介,霜垣 幸浩
    • Organizer
      化学工学会 第47回秋季大会
    • Place of Presentation
      北海道大学,北海道,札幌市
    • Year and Date
      2015-09-09
    • Data Source
      KAKENHI-PROJECT-26600040
  • [Presentation] New approach to estimate diffusivity of metal organics in supercritical CO2 at high temperatures2015

    • Author(s)
      Yu Zhao, Takeshi Momose, Shimoyama Yusuke, and Yukihiro Shimogaki
    • Organizer
      11th International Symposium on Supercritical Fluids
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2015-10-11
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26600040
  • [Presentation] 反応速度論に基づく超臨界CO2流体中 拡散係数の新規推定方法2015

    • Author(s)
      チョウ ユウ,百瀬 健,下山 裕介,霜垣 幸浩
    • Organizer
      化学工学会 第47回秋季大会
    • Place of Presentation
      北海道大学,北海道,札幌市
    • Year and Date
      2015-09-09
    • Data Source
      KAKENHI-PROJECT-26600040
  • [Presentation] 超臨界流体の温度変化を利用した新規アントラセン製膜技術2014

    • Author(s)
      豊倉祥太,高原梢,近藤愛子,百瀬健,内田博久,霜垣幸浩
    • Organizer
      第16回化学工学会学生発表会(東京大会)
    • Place of Presentation
      東京工業大学大岡山キャンパス,東京
    • Data Source
      KAKENHI-PROJECT-24655168
  • [Presentation] 超臨界流体の温度変化を利用した新規アントラセン製膜技術2014

    • Author(s)
      豊倉祥太, 高原梢江, 近藤愛子, 百瀬健, 内田博久, 霜垣幸浩
    • Organizer
      第16回化学工学会学生発表会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2014-03-01
    • Data Source
      KAKENHI-PROJECT-24655168
  • [Presentation] 超臨界流体を用いたTiO2多孔質薄膜中へのCuInS2埋め込み成膜プロセスの評価2014

    • Author(s)
      渡辺伸司, 笘居高明, 中安祐太, 百瀬健, 本間格
    • Organizer
      化学工学会第79年会
    • Place of Presentation
      岐阜
    • Data Source
      KAKENHI-PROJECT-25630353
  • [Presentation] 超臨界流体を用いたCuInS2のTiO2多孔質膜中への埋め込み成膜による3D-CIS太陽電池構造の作製2014

    • Author(s)
      笘居 高明, 渡辺 伸司, 中安 祐太, 百瀬健, 本間格
    • Organizer
      化学工学会第79年会
    • Place of Presentation
      岐阜
    • Data Source
      KAKENHI-PROJECT-25630353
  • [Presentation] Kinetics study of TiO2 deposition in supercritical CO2 using Micro-/Macro-cavity method2013

    • Author(s)
      Kyubong Jun, Yu Zhao, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      化学工学会第78年会
    • Place of Presentation
      大阪大学豊中キャンパス
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Solubility measurement of Cu(tmhd)2 and Mn(pmcp)2 in supercritical CO2/H2 mixture for supercritical fluid deposition2013

    • Author(s)
      Takeshi Momose, Aiko Kondo, Hideo Yamada, Junji Ohara, Yasuhiro, Kitamura, Hirohisa Uchida, Yukihiro Shimogaki, and Masakazu Sugiyama
    • Organizer
      9th World Congress of Chemical Engineering (WCCE9)
    • Place of Presentation
      Soul, Korea
    • Data Source
      KAKENHI-PROJECT-25709075
  • [Presentation] Supercritical fluid deposition (SCFD) of crystallized TiO2 with alcohol assistance2013

    • Author(s)
      Yu Zhao, Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      E-MRS Spring Conference 2013
    • Place of Presentation
      Strasbourg, France.
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Conformal step coverage TiO2 deposition using supercritical CO22013

    • Author(s)
      Kyubong Jung, Yu Zhao, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      Materials for Advanced Metallization 2013
    • Place of Presentation
      Leuven, Bergium.
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Supercritical fluid deposition of crystallized TiO2 with assistance of alcohol2013

    • Author(s)
      Yu Zhao, Kyubong Jun, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      化学工学会第78年会
    • Place of Presentation
      大阪大学豊中キャンパス
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Deposition Mechanism of Metal Oxide for FeRAM Electrode using Flow Type Supercritical Fluid Deposition Reactor2012

    • Author(s)
      Kyubong Jung, Yu Zhao, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid-state Science
    • Place of Presentation
      Hawaii, USA.
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Low temperature process for Strontium Ruthenium Oxide in Supercritical Carbon Dioxide2012

    • Author(s)
      Kyubong Jung, Takeshi Momose, and YukihiroShimogaki
    • Organizer
      10th International Symposium on Supercritical Fluids
    • Place of Presentation
      San Francisco, USA.
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] 超臨界流体を利用した次世代DRAM用高誘電体薄膜作製プロセスの開発2012

    • Author(s)
      渡邊圭, 百瀬健, 霜垣幸浩
    • Organizer
      化学工学会
    • Place of Presentation
      工学院大学(新宿)
    • Year and Date
      2012-03-15
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Supercritical Fluid Deposition of Bismuth Titanate for Embedded FeRAM Applications2012

    • Author(s)
      Yu Zhao, Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid-state Science
    • Place of Presentation
      Hawaii, USA.
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Novel Supercritical Fluid Deposition Technique of SiO2 using Flow Channel Reactor2012

    • Author(s)
      百瀬健
    • Organizer
      ISSF 2012 : 10th International Symposium on Sup ercritical Fluids
    • Place of Presentation
      Hyatt Regency San Francisco, USA
    • Year and Date
      2012-05-15
    • Data Source
      KAKENHI-PROJECT-23860016
  • [Presentation] Precursors Selection for TiO2 Thin Film Deposition in Supercritical CO22012

    • Author(s)
      Yu Zhao, Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      International Union of Materials Research Societies- International Conference on Electronic Materials
    • Place of Presentation
      Yokohama
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] フローチャネル型製膜装置によるSiO2-SCFD2012

    • Author(s)
      百瀬健
    • Organizer
      化学工学会
    • Place of Presentation
      工学院大学
    • Year and Date
      2012-03-15
    • Data Source
      KAKENHI-PROJECT-23860016
  • [Presentation] RuO2 Deposition Using Supercritical Fluid Deposition (SCFD)2011

    • Author(s)
      Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      Advanced Metallization Conference 2011, Asian Session
    • Place of Presentation
      Tokyo
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Ru and Pt Films Fabrication for 3D Capacitor Electrodes Using Supercritical Fluid Deposition Technique2011

    • Author(s)
      Kei Watanabe, Takeshi Momose, and YukihiroShimogaki
    • Organizer
      Advanced Metallization Conference 2011, Asian Session
    • Place of Presentation
      Tokyo
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] 超臨界流体堆積法を用いた量論組成Bi4Ti3O12製膜

    • Author(s)
      チョウ ユウ,鄭 珪捧,百瀬 健,霜垣 幸浩
    • Organizer
      化学工学会 第46回秋季大会
    • Place of Presentation
      九州大学,博多,福岡
    • Year and Date
      2014-09-17 – 2014-09-19
    • Data Source
      KAKENHI-PROJECT-26600040
  • [Presentation] CuInS2 DEPOSITION INTO TiO2 NANOPOROUS THIN FILM USING SUPERCRITICAL FLUID

    • Author(s)
      Yoji Yasui, Shinji Watanabe, Takaaki Tomai, Takeshi Momose, Itaru Honma
    • Organizer
      International Symposium on Chemical- Environmental-Biomedical Technology
    • Place of Presentation
      Taiwan, Chang Gung
    • Year and Date
      2014-09-10 – 2014-09-14
    • Data Source
      KAKENHI-PROJECT-25630353
  • [Presentation] Conformal Deposition of Crystalline Bi4Ti3O12 Using Supercritical Fluid Deposition for 3D-Structure Ferroelectric Memories

    • Author(s)
      Yu Zhao, Kyubong Jung, Takeshi Momose, Yukihiro Shimogaki
    • Organizer
      Material Research Society, Fall meeting, 2015
    • Place of Presentation
      Boston, USA
    • Year and Date
      2014-11-29 – 2014-12-04
    • Data Source
      KAKENHI-PROJECT-26600040
  • [Presentation] 超臨界流体堆積法を用いた強誘電体メモリ用Bi4Ti3O12の均一製膜

    • Author(s)
      チョウ ユウ,百瀬 健,霜垣 幸浩
    • Organizer
      化学工学会 第80年会
    • Place of Presentation
      芝浦工業大学,豊洲,東京
    • Year and Date
      2015-03-19 – 2015-03-21
    • Data Source
      KAKENHI-PROJECT-26600040
  • [Presentation] Solubility measurement and correlation of Cu(tmhd)2 and Mn(pmcp)2 in mixture of scCO2 + H2 for supercritical fluid deposition

    • Author(s)
      Takeshi Momose, Aiko Kondo, Tatsuya Kamiya, Hideo Yamada, Junji Ohara, Yasuhiro Kitamura, Hirohisa Uchida, Yukihiro Shimogaki, and Masakazu Sugiyama
    • Organizer
      14th Euro Meeting on Supercritical Fluids
    • Place of Presentation
      Marseille, France
    • Year and Date
      2014-05-18 – 2014-05-21
    • Data Source
      KAKENHI-PROJECT-25709075
  • 1.  SHIMOGAKI Yukihiro (60192613)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 15 results
  • 2.  TOMAI Takaaki (80583351)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results
  • 3.  Honma Tetsuo (10369910)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 4.  秋月 信 (30707188)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 5.  佐藤 剛史 (60375524)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 6.  小西 邦昭 (60543072)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 11 results
  • 7.  NAKAYASU Yuta
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 8.  WATANABE Shinji
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results
  • 9.  YASUI Yoji
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results
  • 10.  チョウ ユウ
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 2 results

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