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Shimogaki Yukihiro  霜垣 幸浩

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… Alternative Names

SHIMOGAKI Yukihiro  霜垣 幸浩

霜垣 幸浩  シモガキ ユキヒロ

SHIMOGAMI Yukihiro  霜垣 幸浩

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Researcher Number 60192613
Other IDs
External Links
Affiliation (Current) 2022: 東京大学, 大学院工学系研究科(工学部), 教授
Affiliation (based on the past Project Information) *help 2012: 東京大学, 工学(系)研究科(研究院), 教授
2010 – 2012: 東京大学, 大学院・工学系研究科, 教授
2007: The University of Tokyo, 大学院・工学系研究科, 准教授
2004: 国立大学法人東京大学, 大学院・工学系研究課, 助教授
1998 – 2003: Univ.of Tokyo, Graduate School of Engineering, Associate Professor, 大学院・工学系研究科, 助教授 … More
2000: 東京大学, 大学院・工学系研究科, 教授
1998: 東京大学, 大学院工学系研究科, 助教授
1997 – 1998: Univ.of Tokyo, School of Engineering, Associate Professor, 工学系研究科, 助教授
1996: 東京大学, 工学系研究科, 講師
1995: Dept.of Chemical System Engineering, University of Tokyo, 大学院・工学系研究科, 講師
1991 – 1994: 東京大学, 工学部, 講師 Less
Review Section/Research Field
Principal Investigator
反応・分離工学 / Science and Engineering / Material processing/treatments / Reaction engineering/Process system / Material processing/treatments / Applied materials science/Crystal engineering
Except Principal Investigator
Applied optics/Quantum optical engineering / 電子デバイス・機器工学 / Science and Engineering / 電子材料工学 / Applied materials science/Crystal engineering / エネルギー学一般
Keywords
Principal Investigator
化合物半導体 / エッチング / シミュレーション / プラズマCVD / ステップカバレッジ / 低誘電率 / 核発生 / 変調操作 / CVD / MOVPE … More / ECRプラズマ / 塩素ラジカル / マイクロロ-ディング効果 / 熱CVD / タングステンシリサイド / 温度勾配 / 気相反応 / 気相中間体 / 膜組成 / シリコン酸化膜 / CVD法 / SiO_2 / エッチングプロセス / ECR-RIBE / InP / デバイス製造プロセス / 表面・界面物性 / 半導体超微細化 / 吸着・表面反応 / 薄膜作製 / ULSI配線形成 / カーボンナノチューブ配線 / 超臨界流体製膜 / 高密度核発生 / Coナノ粒子 / 超臨界流体 / 薄膜合成 / プロセス開発 / DRAM / FeRAM / 電極 / 高誘電体 / 強 誘電体 / 超臨界流体薄膜合成 / 強誘電体 / ナノキャパシタ / 電極形成 / SrRuO3 / SrTiO3 / BiTiO3 / 超臨界 / 電極金属 / メモリーデバイス / 薄膜形成 / 金属・酸化膜積層構造形成 / バリアメタル / 薄膜成長 / 結晶化 / 不純物制御 / 比抵抗 / CDV / Barrier Metal / Sequential Process / Nucleation / Thin Film Growth / Crystallization / Impurity Control / Resistivity / 結晶成長 / 選択成長 / 反応機構 / その場観察 / シュミレーション / 集積化 / Compound Semiconductor / Crystal Growth / Selective Growth / Reaction Mechanism / In Situ Monitoring / Simulation / Integration … More
Except Principal Investigator
MOVPE / 半導体レーザ / 分布帰還型レーザ / DFBレーザ / InP / 結合量子井戸 / 偏光無依存光変調 / 量子井戸 / 偏光無依存 / Coupled quantum well / Quantum well with mass dependent width / Polarization independent optical modulation / 利得結合 / semiconductor laser / DFB laser / InGaAs / SEED / 進行波型光変調器 / 歪み量子井戸 / 量子細線 / 波長トリミング / MOCVD / 選択成長 / MOVE / GDC / WDM / 光フリップフロップ / インテグレーション / 集積回路 / シリコン / 超機能化 / システム / 微細加工 / インターフェース / 半導体 / ヘルスケアチップ / 多機能化 / 超機能グローバル / 超高速・低消費 / ヒューマン・インターフェース・デバイス / モバイル端末 / 異分野融合 / チップ搭載チップ / 半導体プロセス / 異種材料 / 放物線量子井戸 / 有効質量依存幅量子井戸 / 伸張歪み量子井戸 / 量子閉じ込めシュタルク効果 / 方向性結合器型光スイッチ / 光双安定素子 / ポテンシャル制御 / 伸張歪み / 放物線ポテンシャル / 光変調 / スイッチ / 歪量子井戸 / 伸張歪 / 臨界膜厚 / X線回折 / 偏光無依存光スイッチング / 多重量子井戸 / 結合係数変調 / 分子線エピタキシ-(MBF) / 歪量子井戸・歪超格子 / 放物線型ポテンシャル / 電気光学効果 / 電界デカップリング効果 / 偏光無依存スイッチング / Parabolic potential quantum well / Tensile-strained quantum well / Quantum confined Stark effect / Directional cou ; ler optical switch / Bistable optical device / 結合係数 / 量子井戸無秩序化 / 波長可変 / 電界吸収変調器 / distributed-feedback laser / gain coupling / coupling coefficient / quantum well disordering / wavelength tunable / electro-absorption modulator / 質量依存幅量子井戸 / 偏向無依存光変調 / InGaAs疑似基板 / InAlAs / 5段階非対称結合量子井戸 / JnAlAs / 超高速光変調 / lnGaAs pseudo substrate / lnGaAs / lnAlAs / lnP / Traveling wave optical modulator / Five-step asymmetric coupled quantum well / 吸収性回折格子 / 発振波長トリミング / レーザトライオード / アナログ変調歪み / InGaAsP / 歪み多重量子井戸 / Distributed feedback laser / Gain coupling / Absorptive grating / Wavelength trimming / Laser triode / Analog modulation distortion / Quantum wire / 分光エリプソメトリ / 成長シミュレーション / MMIカプラ / 光アンプゲートスイッチ / MOVE2 / シミュレーション / 気相拡散 / Selective-area growth / Spectroscopic ellipsometry / Growth simulation / MMI coupler / Optical amplifier gate switch / 光変調器 / 光スイッチ / 変調ポテンシャル量子井戸 / ポテンシャル制御量子井戸 / 偏光無依存光変調器 / ブルーチャープ光変調器 / 光制御デバイス / InPドライエッチング / 非対称結合量子井戸 / 半導体光変調器 / 半導体光スイッチ / 屈折率変調 / 電界光吸収 / マッハツェンダー干渉計 / Optical modulator / Optical switch / Quantum well / Modified-potential quantum well / Potential-tailored quantum well / Traveling-wave optical modulator / Polarization-independent optical modulator / Blue-chip optical modulator / 燃料電池自動車 / 炭化水素燃料 / ドライメタン / 固体酸化物 / 燃料電池 / 燃料極反応機構 / 電気自動車 / ドライメタン燃料 / fuel cell electric vehicle / hydrocarbon fuel / dry methane / solid oxide / fuel cell / anode reaction mechanism / DFBレーザアレイ / 光双安定 / 波長多重 / 波長変換 / quantum wire / distributed feedback laser / DFB laser array / wavelength trimming / optical bistability / optical flip-flop / 有機金属気相エピキタシー / 能動 / 受動集積 / 多モード干渉カプラ / 双安定半導体レーザ / 光論理ゲート / 有機金属気相エピタキシー / 電界吸収光非線形性 / 方向性結合器 / metal-organic vapor phase epitaxy / selective area growth / active / passive integration / multimode interference coupler / bistable laser diode / optical logic gate / all-optical flip-flop Less
  • Research Projects

    (21 results)
  • Research Products

    (32 results)
  • Co-Researchers

    (29 People)
  •  Nano-capacitor fabrication process development by using supercritical fluidPrincipal Investigator

    • Principal Investigator
      SHIMOGAKI Yukihiro
    • Project Period (FY)
      2010 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Reaction engineering/Process system
    • Research Institution
      The University of Tokyo
  •  超臨界流体を利用したULSIカーボンナノチューブ配線用ナノ触媒粒子の高密度合成Principal Investigator

    • Principal Investigator
      霜垣 幸浩
    • Project Period (FY)
      2007
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Material processing/treatments
    • Research Institution
      The University of Tokyo
  •  Research and development of semiconductor digital all-optical devices and integrated circuits

    • Principal Investigator
      NAKANO Yoshiaki
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      The University of Tokyo
  •  変調操作CVD法による薄膜形成における初期核発生・成長過程の制御Principal Investigator

    • Principal Investigator
      霜垣 幸浩
    • Project Period (FY)
      2001 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      The University of Tokyo
  •  超機能化グローバル・インターフェース・インテグレーション研究

    • Principal Investigator
      堀池 靖浩
    • Project Period (FY)
      2000 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      National Institute for Materials Science
      The University of Tokyo
  •  Novel wavelength division multiplexed optical functional devices based on semiconductor lasers

    • Principal Investigator
      NAKANO Yoshiaki
    • Project Period (FY)
      2000 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      The University of Tokyo
  •  Advanced ULSI multilevel metallization using non-steady state by Flow Modulation techniquePrincipal Investigator

    • Principal Investigator
      SHIMOGAKI Yukihiro
    • Project Period (FY)
      1999 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Material processing/treatments
    • Research Institution
      The University of Tokyo
  •  Research and development of selective area MOVPE process for the fabrication of monolithic OEIC devicesPrincipal Investigator

    • Principal Investigator
      SHIMOGAKI Yukihiro
    • Project Period (FY)
      1999 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Applied materials science/Crystal engineering
    • Research Institution
      The University of Tokyo
  •  Improvement of conversion efficiency of solid oxide fuel cell to apply to electric vehicle

    • Principal Investigator
      IHARA Manabu
    • Project Period (FY)
      1998 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      エネルギー学一般
    • Research Institution
      TOHOKU UNIVERSITY
  •  Selective-area metal-organic vapor phase epitaxy for monolithically-integrated semiconductor photonic circuits

    • Principal Investigator
      NAKANO Yoshiaki
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Applied materials science/Crystal engineering
    • Research Institution
      The University of Tokyo
  •  Research on Optical Modulators and Switches Based on Potential-Tailored Quantum Microstructures for the Advanced Optical Communication Infrastructure

    • Principal Investigator
      TADA Kunio
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Applied optics/Quantum optical engineering
    • Research Institution
      Yokohama National University
      The University of Tokyo
  •  ECR-RIBEによる化合物半導体エッチングプロセスの反応工学的解析Principal Investigator

    • Principal Investigator
      霜垣 幸浩
    • Project Period (FY)
      1996
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      反応・分離工学
    • Research Institution
      The University of Tokyo
  •  Development of ultrahigh performance semiconductor lasers for photonic information infrastructure

    • Principal Investigator
      TADA Kunio
    • Project Period (FY)
      1996 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Applied optics/Quantum optical engineering
    • Research Institution
      University of Tokyo
  •  CVD製膜における微小温度勾配が製膜速度と物性に及ぼす効果Principal Investigator

    • Principal Investigator
      霜垣 幸浩
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      The University of Tokyo
  •  酸化物薄膜のCVD合成及びエッチングプロセスの反応工学的解析と低誘導率化Principal Investigator

    • Principal Investigator
      霜垣 幸浩
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      反応・分離工学
    • Research Institution
      The University of Tokyo
  •  Joint Research on Gain-Coupled DFB Semiconductor Laser

    • Principal Investigator
      TADA Kunio
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for international Scientific Research
    • Research Institution
      University of Tokyo
  •  Optical properties of modified potential quantum micro structures and their application to optical modulationlswiching devices

    • Principal Investigator
      TADA Kunio
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Applied optics/Quantum optical engineering
    • Research Institution
      University of Tokyo
  •  CVD製膜における微小温度勾配が製膜速度物性に及ぼす効果Principal Investigator

    • Principal Investigator
      霜垣 幸浩
    • Project Period (FY)
      1994
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      The University of Tokyo
  •  CVDプロセスとエッチングプロセスの反応工学的比較考察Principal Investigator

    • Principal Investigator
      霜垣 幸浩
    • Project Period (FY)
      1994
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      反応・分離工学
    • Research Institution
      The University of Tokyo
  •  ECRプラズマエッチング装置による化合物半導体エッチング反応機構の解明Principal Investigator

    • Principal Investigator
      霜垣 幸浩
    • Project Period (FY)
      1993
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      反応・分離工学
    • Research Institution
      The University of Tokyo
  •  Advanced photonic functional materials based on quantum microstructures with atomic scale precision and their application to optical modulation / switching

    • Principal Investigator
      TADA Kunio
    • Project Period (FY)
      1991 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      電子材料工学
    • Research Institution
      University of Tokyo

All 2013 2012 2011 2010 2005 2004 2003

All Journal Article Presentation

  • [Journal Article] Strontium ruthenium oxide deposition in supercritical carbon dioxide using a closed reactor system2013

    • Author(s)
      Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Journal Title

      J.Supercritical Fluid

      Volume: 79 Pages: 244-250

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Journal Article] Ethanol-Assisted Flow-Type Supercritical Fluid Deposition of SrRuO3 for Stoichiometric Film Formation2013

    • Author(s)
      Kyubong Jung, Yu Zhao, Takeshi Momose ,and Yukihiro Shimogaki
    • Journal Title

      ECS Solid State Letters

      Volume: 2

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Journal Article] Strontium ruthenium oxide deposition in supercritical carbon dioxide using a closed reactor system2013

    • Author(s)
      Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Journal Title

      The Journal of Supercritical Fluid

      Volume: In Press

    • DOI

      10.1016/j.supflu.2013.03.008

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Journal Article] Step Coverage Quality of Cu Films by Supercritical Fluid Deposition Compared with Chemical Vapor Deposition2010

    • Author(s)
      T.Momose, M.Sugiyama, E.Kondoh, Y.Shimogaki
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49

    • NAID

      210000068539

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Journal Article] Initial Cu Growth in Cu-Seeded and Ru-Lined Narrow Trenches for Supercritical Fluid Cu Chemical Deposition2010

    • Author(s)
      E.Kondoh, M.Matsubara, K.Tamai, Y.Shimogaki
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49

    • NAID

      210000068522

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Journal Article] Surface kinetics in MOVPE of InP and InGaP analyzed by flow modulation method2005

    • Author(s)
      Takayuki Nakano, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Conference Proceedings CD, 17th International Conference on Indium Phosphide and Related Materials(IPRM '05), Glasgow, UK, May 8-12 WP-20

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Effect of temperature and substrate misorientation on the surface reaction kinetics of selective area MOVPE2005

    • Author(s)
      Haizheng Song, Xueliang Song, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Conference Proceedings CD, 17th International Conference on Indium Phosphide and Related Materials(IPRM '05), Glasgow, UK, May 8-12 WP-17

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Prediction method for the bandgap profiles of InGaAsP multiple quantum well structures fabricated by selective area metal-organic vapor phase epitaxy2005

    • Author(s)
      Tomonari Shioda, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano
    • Journal Title

      Conference Proceedings CD, 17th International Conference on Indium Phosphide and Related Materials(IPRM '05), Glasgow, UK, May 8-12 WP-16

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Simulation and design of the emission wavelength of multiple quantum well structures fabricated by selective area metal-organic vapor phase epitaxy2004

    • Author(s)
      Tomonari Shioda, Takeshi Doi, Abdullah Al Amin, Xue-Liang Song, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano
    • Journal Title

      Confenrence Synopsis, the 3rd Asian Conference on Chemical Vapor Deposition, Taipei, Taiwan, Novermber 12-14 B22

      Pages: 63-64

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] The effect of group V precursor on selective area MOVPE of InP/GaAs-related materials2004

    • Author(s)
      Ho-jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Journal of Crystal Growth vol.261, no.2-3

      Pages: 419-426

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Examination of sub-surface in MOVPE by time modulation growth2004

    • Author(s)
      Takayuki Nakano, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Extended Abstracts of the 23rd Electronic Materials Symposium, Izu-Nagaoka, Shizuoka, July 7-9 D8

      Pages: 79-82

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] The role of the surface adsorption layer during InGaAsP MOVPE growth analyzed by the flow modulation method2004

    • Author(s)
      Takayuki Nakano, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Workbook, 12th International Conference on Metal-Organic Vapor Phase Epitaxy, p.9, Maui, Hawaii, May 30-June 4

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Fundamental kinetics determining growth rate profiles of InP and GaAs in MOCVD with horizontal reactor2004

    • Author(s)
      Ik-Tae Im, Ho-jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Journal of Crystal Growth vol.261, no.2-3

      Pages: 214-224

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Polycrystals growth on dielectric masks during InP/GaAs selective MOVPE2004

    • Author(s)
      Masakazu Sugiyama, Ho-jin Oh, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Journal of Crystal Growth vol.261, no.2-3

      Pages: 411-418

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Understanding the abnormal growth of InP-related materials in selective-area MOVPE2004

    • Author(s)
      Noriaki Waki, Takayuki Nakano, Ho-jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Extended Abstracts of the 23rd Electronic Materials Symposium, Izu-Nagaoka, Shizuoka, July 7-9 D5

      Pages: 69-72

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Measurement of surface reaction rate constants and reactor-scale simulation of growth rate and composition in InGaAsP MOVPE2004

    • Author(s)
      Masakazu Sugiyama, Ho-Jin Oh, Ik-Tae Im, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Workbook, 12th International Conference on Metal-Organic Vapor Phase Epitaxy, p.29, Maui, Hawaii, May 30-June 4

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Study on the surface reaction kinetics of InGaAsP related materials MOCVD through analyses of growth rate distribution in the selective area growth2003

    • Author(s)
      Ho-Jin Oh, Ik-Tae Im, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Conference Proceedings, 15th International Conference on Indium Phosphide and Related Materials(IPRM '03), Santa Barbara, California, May 12-16 ThP1

      Pages: 397-400

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Comparison of organic and hydride group V precursors in terms of surface kinetics in wide-gap selective area metalorganic vapor phase epitaxy2003

    • Author(s)
      Ho-Jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Japanese Journal of Applied Physics vol.42, part 2, no.10A

    • NAID

      10011766948

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Electron cyclotron resonance reactive ion etching of III-V semiconductors by cyclic injection of CH4/H2/Ar and O2 with constant Ar flow2003

    • Author(s)
      Nobuo Haneji, Goh Segami, Tatsuya Suzuki, Taro Arakawa, Kunio Tada, Yukihiro Shimogaki, Yoshiaki Nakano
    • Journal Title

      Japanese Journal of Applied Physics vol.42, part 1, no.6B

      Pages: 3958-3961

    • NAID

      210000053700

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Journal Article] Surface reaction kinetics in metalorganic vapor phase epitaxy of GaAs through analyses of growth rate profile in wide-gap selective-area growth2003

    • Author(s)
      Ho-Jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
    • Journal Title

      Japanese Journal of Applied Physics vol.42, part 1, no.10

      Pages: 6284-6291

    • NAID

      10012448627

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205055
  • [Presentation] Kinetics study of TiO2 deposition in supercritical CO2 using Micro-/Macro-cavity method2013

    • Author(s)
      Kyubong Jun, Yu Zhao, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      化学工学会第78年会
    • Place of Presentation
      大阪大学豊中キャンパス
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Supercritical fluid deposition (SCFD) of crystallized TiO2 with alcohol assistance2013

    • Author(s)
      Yu Zhao, Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      E-MRS Spring Conference 2013
    • Place of Presentation
      Strasbourg, France.
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Conformal step coverage TiO2 deposition using supercritical CO22013

    • Author(s)
      Kyubong Jung, Yu Zhao, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      Materials for Advanced Metallization 2013
    • Place of Presentation
      Leuven, Bergium.
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Supercritical fluid deposition of crystallized TiO2 with assistance of alcohol2013

    • Author(s)
      Yu Zhao, Kyubong Jun, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      化学工学会第78年会
    • Place of Presentation
      大阪大学豊中キャンパス
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Deposition Mechanism of Metal Oxide for FeRAM Electrode using Flow Type Supercritical Fluid Deposition Reactor2012

    • Author(s)
      Kyubong Jung, Yu Zhao, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid-state Science
    • Place of Presentation
      Hawaii, USA.
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Low temperature process for Strontium Ruthenium Oxide in Supercritical Carbon Dioxide2012

    • Author(s)
      Kyubong Jung, Takeshi Momose, and YukihiroShimogaki
    • Organizer
      10th International Symposium on Supercritical Fluids
    • Place of Presentation
      San Francisco, USA.
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] 超臨界流体を利用した次世代DRAM用高誘電体薄膜作製プロセスの開発2012

    • Author(s)
      渡邊圭, 百瀬健, 霜垣幸浩
    • Organizer
      化学工学会
    • Place of Presentation
      工学院大学(新宿)
    • Year and Date
      2012-03-15
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Supercritical Fluid Deposition of Bismuth Titanate for Embedded FeRAM Applications2012

    • Author(s)
      Yu Zhao, Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid-state Science
    • Place of Presentation
      Hawaii, USA.
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Precursors Selection for TiO2 Thin Film Deposition in Supercritical CO22012

    • Author(s)
      Yu Zhao, Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      International Union of Materials Research Societies- International Conference on Electronic Materials
    • Place of Presentation
      Yokohama
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] 超臨界流体を利用したDRAM, FeRAM電極用Ru薄膜及びPt薄膜の作製2011

    • Author(s)
      渡邊圭, 霜垣幸浩
    • Organizer
      化学工学会第76回年会
    • Place of Presentation
      東京農工大学小金井キャンパス
    • Year and Date
      2011-03-23
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] RuO2 Deposition Using Supercritical Fluid Deposition (SCFD)2011

    • Author(s)
      Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
    • Organizer
      Advanced Metallization Conference 2011, Asian Session
    • Place of Presentation
      Tokyo
    • Data Source
      KAKENHI-PROJECT-22360329
  • [Presentation] Ru and Pt Films Fabrication for 3D Capacitor Electrodes Using Supercritical Fluid Deposition Technique2011

    • Author(s)
      Kei Watanabe, Takeshi Momose, and YukihiroShimogaki
    • Organizer
      Advanced Metallization Conference 2011, Asian Session
    • Place of Presentation
      Tokyo
    • Data Source
      KAKENHI-PROJECT-22360329
  • 1.  NAKANO Yoshiaki (50183885)
    # of Collaborated Projects: 9 results
    # of Collaborated Products: 15 results
  • 2.  TADA Kunio (00010710)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 0 results
  • 3.  MURAI Tohru (60107571)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 4.  江頭 靖幸 (70223633)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 5.  MOMOSE Takeshi (10611163)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 15 results
  • 6.  ARAKAWA Taro (40293170)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 7.  IHARA Manabu (90270884)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  KUMAGAI Akibumi (60006319)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  KATO Masaki (80312982)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  SUGIYAMA Masakazu (90323534)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 14 results
  • 11.  SHIMIZU Hiromasa (50345170)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  堀池 靖浩 (20209274)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  財満 鎭明 (70158947)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  角南 英夫 (10311804)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  益 一哉 (20157192)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  岩井 洋 (40313358)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 17.  SUDOH Tsurugi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 18.  LUO Yi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 19.  LAGASSE Paul
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 20.  HIRATA Takaaki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 21.  OHBA Takayuki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 22.  HAMAMURA Hirotaka
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 23.  モルティエル ヘールト
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 24.  バーツ ルル
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 25.  コルドレン ラリー
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 26.  MORTHIER Geert
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 27.  BAETS Roel
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 28.  COLDREN Larry A.
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 29.  コンドレン ラリー
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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