SHINDO Haruo 進藤春雄

… Alternative Names

Shindo Haruo 進藤春雄

SINDO Hayuo 進藤春男

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Researcher Number	20034407
Other IDs
External Links
Affiliation (Current)	2025: 株式会社プラズマ理工学研究所, 研究開発部, 教授 2025: 地方独立行政法人神奈川県立産業技術総合研究所, 電子技術部, 非常勤研究員
Affiliation (based on the past Project Information) *help	2017 – 2019: 株式会社プラズマ理工学研究所, 研究開発部, 教授 2006 – 2011: 東海大学, 情報理工学部, 教授 2004 – 2005: 東海大学, 電子情報学部, 教授 1999 – 2000: 東海大学, 工学部, 教授 1992 – 1994: 福山大学, 工学部, 助教授 1991: 広島大学, 工学部, 講師 1987 – 1988: 広島大学, 工学部, 助手
Review Section/Research Field	Principal Investigator Plasma science / プラズマ理工学 / Science and Engineering Except Principal Investigator Plasma science / プラズマ理工学 / 電子材料工学
Keywords	Principal Investigator プラズマ加工 / 大面積プラズマ / プラズマ・核融合 / プラズマ土壌改質 / 航空機翼材表面処理 / マイクロ波大気圧プラズマ / 大規模直線型マイクロ波照射源 / 大規模直線型プラズマ / 大規模表面処理 / 大規模直線型マイクロ波放射源 … More / 大規模プラズマ表面処理 / マイクロ波直線プラズマ / 大規模直線型大気圧プラズマ / FPDプロセス / 半導体プロセス / 大気圧プラズマ / 大面積プラズマ処理 / 大規模直線型マイクロ波プラズマ / Diagnostic Tool of High Free uencv Plasmas / Insulated Vessel Containing Plasmas / Electron Density / Electron Energy Distribution / Electron Temperature / High Frequency Plasmas / Parallel Plate Plasma / Reactive Ion Etching / 電子エネルギー分布 / ナノ材料 / マイクロナノデバイス / 高周波プラズマ / プラズマ測定 / マイクロマシン / 半導体超微細化 / 高周波プラズマ分析装置 / 絶縁壁プラズマ測定 / 電子密度測定 / 電子エネルギー分布測定 / 電子温度測定 / 高周波プラズマ測定 / 平行平板プラズマ / 反応性プラズマエッチング(RIE) / Oxygen plasma process / Shallow trench oxidation / Insulation for cell isolation / Silicon trench oxidation / Low temparature silicon oxidation / High rate and low damage oxidation / Negative oxygen ion / Silicon oxidation / プラズマプロセス / サブオキサイド / 低温シリコン酸化 / 低損傷酸化膜 / 高速シリコン酸化 / 素子分離用酸化膜 / 酸素負イオン酸化 / シリコン酸化膜 / ナノサイズシリコントレンチエッチング / ナノサイズシリコントレンチ酸化 / マイクロ波酸素プラズマ / ナノ界面プロセス / 低温低損傷プロセス / ナノシリコントレンチエッチング / ナノシリコントレンチ酸化 / イクロ波酸素プラズマ / 負イオンプラズマプロセス / 表面波プラズマ / 負イオンプラズマ / 大規模マイクロ波プラズマ / 大規模ラインプラズマ / 大面積プラスティック表面処理 / フレキシブルエレクトロニクス / 太陽電池薄膜CVD / フラットパネルディスプレー / 大面積プラズマプロセス / コンフォーマルスパッタ堆積 / ECRスパッタ / 分数波共鳴 / ECRプラズマ … More Except Principal Investigator vanadium dioxide / epitaxial growth / ICP-assisted sputtering / バナジウム酸化膜 / エピタキシャル成長 / ICP支援スパッタ装置 / 機能性酸化物 / Laptop Personal Computer / Wall on the TV / Plasma Display / ラップトップパソコン / ハイビジョン / 壁掛テレビ / プラズマディスプレイ / stoichiometry / planer structure / switching phenomenon / resistive change / metal-insulator transition / ププラズマプロセス / メモリーデバイス / プラズマプロセス / 相転移 / スイッチングデバイス / ICP支援スパッタ成膜法 / neutral particle control / high heat flux / sheet plasma / measurement of negative ions / reduction of heat load / nuclear fusion / divertor control / partially detached plasma / 核融合 / ダイバータ / 熱流速 / 励起分子 / 負イオン / 中性粒子制御 / 高熱流 / シートプラズマ / 負イオン計測 / 熱除去 / 核融合装置 / ダイバータ制御 / 部分非接触プラズマ / in-situ sputtering / negative oxygen ion / high-density plasma / titanium dioxide / oxide material / アニール挙動 / アナターゼ型Ti酸化膜 / ルチル型Ti酸化膜 / 酸素ラジカル生成 / In-situ連続成膜 / 酸素負イオン生成 / 高密度プラズマ生成 / チタン酸化膜 / alloy precipitation / grain boundary / in-situ SEM observation / ECR sputtering / sustained self-sputtering / molecular dynamics simulation / void / elctromigration / スパッタリング / アルミニウム / 表面拡散 / CuAl合金 / 金属薄膜 / マイクロ波プラズマ / エレクトロマイグレ-ション / STM / コンタクト埋め込み / 結晶粒界拡散 / ボイド移動 / 分子動力学計算 / マグネトロンスパッタ / 抵抗振動 / ECRスパッタ / 析出合金 / 結晶粒界 / 分子動力学シミュレーション / 自己維持スパッタ / 高磁場ECRスパッタ / ボイド / 電子顕微鏡その場観察 / エレクトロマイグレーション Less

A Study on Production Technology of Large-Scaled Linear Atmosheric Pressure Microwave PlasmaPrincipal Investigator
- Principal Investigator
  
  Shindo Haruo
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Plasma Research Laboratory Co., Ltd.
表面波共鳴点断熱拡散法による負イオンプラズマ生成とナノファブリケーションへの応用Principal Investigator
- Principal Investigator
  
  進藤春雄
- Project Period (FY)
  2010 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Tokai University
Research on Large-Scaled Line Plasma Production by MicrowavePrincipal Investigator
- Principal Investigator
  
  SHINDO Haruo
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Tokai University
Crystal with Metal-Insulator Transition by Plasma Processing Technique and Its Application to Switching Devices
- Principal Investigator
  
  OKIMURA Kunio
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Tokai University
A Study on a New Method to Measure Electron Energy Distribution in High Frequency PlasmasPrincipal Investigator
- Principal Investigator
  
  SHINDO Haruo
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Tokai University
Study on the Epitaxial Growth of Oxide Films in Sputtering focusing on Negative Oxygen Ion Behavior
- Principal Investigator
  
  OKIMURA Kunio
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Tokai University
The study of control of "partial" detached plasma and heat transport
- Principal Investigator
  
  TONEGAWA Akira
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Tokai University
Negative Ion Silicon Oxidation in Oxygen Plasma with High Rate and Low Damage.Principal Investigator
- Principal Investigator
  
  SHINDO Haruo
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Tokai University
電子サイクロトン分数波共鳴プラズマの生成とスパンタ応用Principal Investigator
- Principal Investigator
  
  進藤春雄
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Fukuyama University
Investigation and control of a directional atomic flow induced by a high density electron current in an ultra fine metalic interconnection
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1991 – 1993
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  電子材料工学
- Research Institution
  HIROSHIMA UNIVERSITY
High Speed Driving Operation in Surface-Discharge AC Plasma Display Panels
- Principal Investigator
  
  UCHIIKE Heiju
- Project Period (FY)
  1987 – 1988
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  HIROSHIMA UNIVERSITY

All 2019 2018 2017 2012 2011 2010 2009 2008 2007 2006

All Journal Article Presentation Patent

[Journal Article] Aspect ratio dependence of silicon trench oxidation in downstream of microwave oxygen plasma2019
- Author(s)
  S. Takahashi, Y. Taniuchi, M. Utsumi, and H. Shindo
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Issue: 1 Pages: 016508-016508
- DOI
  10.7567/1347-4065/aaee8e
- NAID
  210000135250
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05736
[Journal Article] 大規模表面処理のための直線型マイクロ波プラズマ2018
- Author(s)
  進藤春雄　桑畑周司　磯村雅夫
- Journal Title
  
  自動車技術（招待論文）
  
  Volume: 72 Pages: 74-80
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05736
[Journal Article] 表面処理のための大気圧直線型マイクロ波プラズマ2017
- Author(s)
  進藤春雄、桑畑周司、磯村雅夫
- Journal Title
  
  Journal of Vacuum Technologies of Japan
  
  Volume: 60 Pages: 105-111
- NAID
  130005466792
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05736
[Journal Article] Generation of microwave-excited atmospheric-pressure line plasma and its application2017
- Author(s)
  Hiroshi Kuwahata, Hiroshi Miyata, Masao Isomura and Haruo Shindo
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 12 Pages: 126201-126201
- DOI
  10.7567/jjap.56.126201
- NAID
  210000148462
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05736
[Journal Article] Silicon Trench Oxidation in Downstream of Microwave Oxygen Plasma2011
- Author(s)
  Syuuji TAKAHASHI, Haruo SHINDO
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 50(To be published)
- NAID
  40018868739
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110517
[Journal Article] Silicon Trench Oxidation in Downstream of Microwave Oxygen Plasma2011
- Author(s)
  S.Takahashi, H.Shindo
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 50
- NAID
  40018868739
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110517
[Journal Article] 大規模マイクロ波ラインプラズマの開発2011
- Author(s)
  進藤春雄
- Journal Title
  
  プラズマ核融合学会誌
  
  Volume: 87(小特集招待論文) Pages: 18-24
- NAID
  110008441038
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] 大規模マイクロ波ラインプラズマの開発2011
- Author(s)
  進藤春雄
- Journal Title
  
  Journal of Plasma and Fusion Research Vol.87、No.1
  
  Pages: 18-23
- NAID
  110008441038
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] Deep silicon trench oxidation in downstream of surface-wave oxygen plasma2011
- Author(s)
  J.Koike, Y.Igarashi, Y.Taniuchi, H.Shindo
- Journal Title
  
  Proceedings of the 11th International Symposium on Sputtering and Plasma Process
  
  Pages: 16-19
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110517
[Journal Article] High-Aspect Silicon Trench Oxidation in Downstream of Surface-wave Oxygen Plasma2011
- Author(s)
  Y.Taniuchi, H.Shindo
- Journal Title
  
  Abstract of the 58th International Symposium of American Vacuum Society
  
  Pages: 102-102
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110517
[Journal Article] Large-Scaled ECR Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide2010
- Author(s)
  Haruo SHINDO、Yasuhito KIMURA、Takashi HIRAO
- Journal Title
  
  Abstract of 18th International conference on Gas Discharges and Their Applications
  
  Pages: 422-425
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] 大規模マイクロ波ラインプラズマの生成2010
- Author(s)
  進藤春雄
- Journal Title
  
  ケミカルエンジニヤリング Vol.55、No.12
  
  Pages: 52-58
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] Deep Silicon Trench Oxidation in Downstream of Surface-wave Oxygen Plasma2010
- Author(s)
  Jyun Koike, Yuuto Igarashi, Haruo Shindo
- Journal Title
  
  Bulletin of the American Physical Society
  
  Volume: 55 Pages: 103-103
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110517
[Journal Article] 大規模マイクロ波ラインプラズマの生成2010
- Author(s)
  進藤春雄
- Journal Title
  
  ケミカルエンジニリング
  
  Volume: 55(招待論文) Pages: 940-946
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] Large-Scaled Linear Plasma Production by Microwave in a Narrowed Rectangular Waveguide2010
- Author(s)
  Haruo Shindo, Yasuhito Kimura, Takashi Hirao
- Journal Title
  
  Abstract of 24th Symposium on Plasma Physics and Technology
  
  Pages: 78-79
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] 2 m Long-Linear Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide with a Long Slot Antenna2010
- Author(s)
  Haruo Shindo, Yasuhito Kimura
- Journal Title
  
  Abstract of 57th International Symposium of American Vacuum Society
  
  Pages: 112-112
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] Large-Scaled ECR Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide2010
- Author(s)
  Haruo Shindo, Yasuhito Kimura, Takashi Hirao
- Journal Title
  
  Proceedings of International Conference on Gas Discharges and Their Applications
  
  Pages: 422-425
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] 2m Long Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide2009
- Author(s)
  Haruo Shindo、Yasuhito Kimura
- Journal Title
  
  Advances in Applied Plasma Science Vol.7
  
  Pages: 211-214
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] Microwave Excited Line-Shaped Plasma by Narrowed Rectangular Waveguide2009
- Author(s)
  H.Shindo, Y.Kimura
- Journal Title
  
  Abstract of 7^<th> Int. Workshop on Microwave Discharges
  
  Pages: 38-38
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] 2m Long Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide2009
- Author(s)
  H.Shindo, Y.Kimura
- Journal Title
  
  Proceedings of 7^<th> Int. Symposium on Applied Plasma Science
  
  Pages: 211-214
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] A New Method of Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide2009
- Author(s)
  Yasuhito Kimura、Hideki Kawaguchi、Shin Kagami、Masakazu Furukawa、Haruo Shindo
- Journal Title
  
  Applied Physics Express 2
- NAID
  10027012707
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] A New Method of Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide2009
- Author(s)
  Y.Kimura, H.Kawaguchi, S.Kagamil, M.Furukawa, H.Shindo
- Journal Title
  
  Applied Physics Express 2
- NAID
  10027012707
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] 2m Long Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide2009
- Author(s)
  H.Shindo, Y.Kimura
- Journal Title
  
  Abstract of 17^<th> Int. Colloquium on Plasma Processes
  
  Pages: 111-111
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] 2m Long Line Plasma Production by Microwave in a Narrowed Rectangular Waveguideq2009
- Author(s)
  H. Shindo、Y.Kimura
- Journal Title
  
  17^<th> International Colloquium on Plasma Processes
  
  Pages: 111-111
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] Mode Transition Enhancement by Permittivity of Window materials in Low Frequency Plasmas2009
- Author(s)
  Yaousuke JINBO, Masashi KIKU-CHI, Haruo SHINDO
- Journal Title
  
  Applied Physics Express 2
- NAID
  10025084238
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] LARGE-SCALED LINE PLASMA PRODUCTION BY EV ANESCENT MICROWAVE IN A NARROWED RECTANGULAR WAVEGUIDE2008
- Author(s)
  H. Shindo、Y.Kimura、N.Sato、M.Suzuki
- Journal Title
  
  X VII International Conference on Gas Discharges and Their Applications
  
  Pages: 417-420
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] 2m Long-Line Plasma Production by Evanescent Microwave in Narrowed Rectangular Waveguide2008
- Author(s)
  Yasuhito KIMURA Haruo SHINDO
- Journal Title
  
  Proceedings of 55^<th> International Symposium of American Vacuum Society
  
  Pages: 111-111
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] Large-Scaled Line Plasma Production by Evanescent Microwave in a Narrowed Rectangular Waveguide2008
- Author(s)
  Haruo SHINDO Yasuhito KIMURA
- Journal Title
  
  Proceedings of 17^<th> International Symposium on Gas Discharges
  
  Pages: 417-420
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540486
[Journal Article] A new method to measure electron energy distribution function in radio-frequency plasmas in insulated vessel2007
- Author(s)
  Kouta Kusaba and Haruo Shindo
- Journal Title
  
  Abstract of 28th International.Conference on Phenomena in Ionized Gases
  
  Pages: 206-206
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540496
[Journal Article] Optimum Frequency for Inductively Coupled Plasma Generation with a Single-Loop Antenna2007
- Author(s)
  Kouta, Kusaba, Yuichi, Kitamura, Haruo, Shindo
- Journal Title
  
  Japanese Journal of Applied Physics Vol. 46, No. 12
- NAID
  210000063834
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Journal Article] A new method to measure electron energy distribution function in radio-frequency plasmas in insulated vessel2007
- Author(s)
  Kouta Kusaba and Haruo Shindo
- Journal Title
  
  Abstract of 28th International. Conference on Phenomena in Ionized Gases
  
  Pages: 206-206
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540496
[Journal Article] A new emissive-probe method for electron temperature measurement in radio-frequency plasmas2007
- Author(s)
  Kouta, Kusaba, Haruo, Shindo
- Journal Title
  
  Review of Scientific Instruments Vol. 78, No. 12
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Journal Article] A new method to measure electron energy distribution function in radio-frequency plasmas in insulated vessel2007
- Author(s)
  Kouta, Kusaba, Haruo, Shindo
- Journal Title
  
  Abstract of 28th International. Conference on Phenomena in Ionized Gases, Prague, Czech
  
  Pages: 206-206
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Journal Article] Optimum Frequency for Inductively Coupled Plasma Generation with a Single-Loop Antenna2007
- Author(s)
  Kouta Kusaba, Yuichi Kitamura and Haruo Shindo
- Journal Title
  
  Japanese Journal of Applied Physics 46
- NAID
  210000063834
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540496
[Journal Article] A new emissive-probe method for electron temperature measurement in radio-frequency plasmas2007
- Author(s)
  Kouta Kusaba and Haruo Shindo
- Journal Title
  
  Review of Scientific Instruments 78
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540496
[Journal Article] Electron Energy Distribution Function Measurement in Radio-Frequency Plasmas Produced in Insulated Vessels2006
- Author(s)
  Haruo SHINDO, Kouta KUSABA
- Journal Title
  
  Proceedings of 52nd International Symposium of American Vacuum Society
- Data Source
  KAKENHI-PROJECT-18540496
[Journal Article] 高周波プラズマ診断におけるエミッシブプローブ特性解析2006
- Author(s)
  草場康太, 進藤春雄
- Journal Title
  
  第67回応用物理学会学術講演会講演予稿集 No.1
  
  Pages: 157-157
- Data Source
  KAKENHI-PROJECT-18540496
[Journal Article] エミッシブプローブによる高周波プラズマ診断(IV)2006
- Author(s)
  草場康太, 遠藤雅克, 進藤春雄
- Journal Title
  
  第53回応用物理学関係連合講演会講演予稿集 No.1
  
  Pages: 147-147
- Data Source
  KAKENHI-PROJECT-18540496
[Patent] Dry Etching Method and Dry Etching Apparatus2011
- Inventor(s)
  Syuuji TAKHASHI, Haruo SHINDO
- Industrial Property Rights Holder
  富士フィルム(株), (学)東海大学
- Filing Date
  2011-04-12
- Overseas
- Data Source
  KAKENHI-PUBLICLY-22110517
[Patent] Plasma Oxidation Method and Oxidation Apparatus Application2011
- Inventor(s)
  Syuuji TAKHASHI, Haruo SHINDO
- Industrial Property Rights Holder
  富士フィルム(株), (学)東海大学
- Filing Date
  2011-04-12
- Overseas
- Data Source
  KAKENHI-PUBLICLY-22110517
[Patent] Plasma Oxidation Method and Oxidation Apparatus Application2011
- Inventor(s)
  Syuuji TAKHASHI, Haruo SHINDO
- Industrial Property Rights Holder
  富士フィルム(株), (学)東海大学
- Filing Date
  2011-04-13
- Overseas
- Data Source
  KAKENHI-PUBLICLY-22110517
[Patent] Plasma Oxidation Method and Oxidation Apparatus Application2011
- Inventor(s)
  Syuuji TAKHASHI, Haruo SHINDO
- Industrial Property Rights Holder
  富士フィルム(株), (学)東海大学
- Filing Date
  2011-04-12
- Overseas
- Data Source
  KAKENHI-PUBLICLY-22110517
[Patent] プラズマ酸化方法及びプラズマ酸化装置2010
- Inventor(s)
  進藤春雄, 高橋修治
- Industrial Property Rights Holder
  東海大学富士フィルム
- Industrial Property Number
  2010-092291
- Filing Date
  2010-04-13
- Data Source
  KAKENHI-PUBLICLY-22110517
[Presentation] Fundamental Study of Electrostatic Acceleration of Laser Ablation Plasma2018
- Author(s)
  K. Yano, H. Horisawa, and H. Shindo
- Organizer
  The 71st Gaseous Electronics Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05736
[Presentation] 直線型マイクロ波プラズマ生成のための導波管内電磁界2018
- Author(s)
  宮翔真, 亀山高範, 内海倫明, 桑畑周司, 磯村雅夫, 進藤春雄
- Organizer
  応用物理学会
- Data Source
  KAKENHI-PROJECT-17K05736
[Presentation] レーザー誘起プラズマの静電加速に向けた基礎研究2018
- Author(s)
  矢野楓，浜田彩香，堀澤秀之，進藤春雄
- Organizer
  宇宙科学連合講演会
- Data Source
  KAKENHI-PROJECT-17K05736
[Presentation] 高誘電率放電管による表面波プラズマの周波数依存性2012
- Author(s)
  時枝孝典, 関根温志, 谷内康行, 内海倫明, 渋谷猛久, 進藤春雄
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PUBLICLY-22110517
[Presentation] マイクロ波酸素プラズマ下流域におけるシリコントレンチの異方性酸化2012
- Author(s)
  谷内康行, 山田利宜, 内海倫明, 磯村雅夫, 進藤春雄
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PUBLICLY-22110517
[Presentation] 高誘電率放電管による表面波プラズマの周波数依存性2011
- Author(s)
  時枝孝典, 関根温志, 谷内康行, 内海倫明, 渋谷猛久, 進藤春雄
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-08-29
- Data Source
  KAKENHI-PUBLICLY-22110517
[Presentation] 大規模マイクロ波ラインプラズマの電子密度の軸方向分布2011
- Author(s)
  渡部智, 木村康人, 進藤春雄
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-20540486
[Presentation] マイクロ波酸素プラズマにおけるシリコン酸化特性のアスペクト比依存性2011
- Author(s)
  小池潤, 五十嵐裕人, 進藤春雄
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-27
- Data Source
  KAKENHI-PUBLICLY-22110517
[Presentation] マイクロ波酸素プラズマ下流域におけるシリコントレンチ酸化のアスペクト比依存2011
- Author(s)
  谷内康行, 山田利宜, 内海倫明, 磯村雅夫, 進藤春雄
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PUBLICLY-22110517
[Presentation] 大規模マイクロ波ラインプラズマの生成(III)2010
- Author(s)
  木村康人、増田哲也、矢吹和輝、柴田林太郎、進藤春雄
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学
- Data Source
  KAKENHI-PROJECT-20540486
[Presentation] 大規模マイクロ波ラインプラズマの電子密度の電力依存性2010
- Author(s)
  渡部智、岡部優登、木村康人、進藤春雄
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Data Source
  KAKENHI-PROJECT-20540486
[Presentation] マイクロ波酸素プラズマ下流域におけるシリコン酸化特性のバイアス依存性2010
- Author(s)
  小池潤, 五十嵐裕人, 進藤春雄
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-17
- Data Source
  KAKENHI-PUBLICLY-22110517
[Presentation] 2m長マイクロ波ラインプラズマの生成2009
- Author(s)
  木村康人、進藤春雄
- Organizer
  第70回応用物理学会学術講演会
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-20540486
[Presentation] Large-Scaled ECR Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide2009
- Author(s)
  H.Shindo, Y.Kimura, T.Hirao
- Organizer
  American Vacuum Society 56^<th> Int. Symposium
- Place of Presentation
  San Jose, USA
- Year and Date
  2009-11-12
- Data Source
  KAKENHI-PROJECT-20540486
[Presentation] 大規模マイクロ波ラインプラズマの生成(II)2009
- Author(s)
  木村康人、進藤春雄
- Organizer
  第56回応用物理学関係連合講演会
- Place of Presentation
  筑波大学
- Data Source
  KAKENHI-PROJECT-20540486
[Presentation] エミッシブプローブによる高誘電率放電管内のSF_6プラズマ診断とSiエッチング特性2008
- Author(s)
  草場康太, 進藤春雄
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学
- Year and Date
  2008-03-27
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Presentation] エミッシブプローブ法による誘導結合型プラズマ特性診断2008
- Author(s)
  草場康太, 進藤春雄
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学
- Year and Date
  2008-03-27
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Presentation] 大規模マイクロ波ラインプラズマの生成2008
- Author(s)
  木村康人、進藤春雄
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Data Source
  KAKENHI-PROJECT-20540486
[Presentation] Emissive Probe Measurements in SF_6 Etching Plasma in High Permittivity Discharge Tube(in Japanese)2008
- Author(s)
  Kouta, Kusaba, Haruo, Shindo
- Organizer
  The 55th Japan Meeting on Applied and Related Physics
- Place of Presentation
  Chiba
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Presentation] Diagnostics of Inductively Coupled Plasma by an Emissive Probe New Method(in Japanese)2008
- Author(s)
  Kouta, Kusaba, Haruo, Shindo
- Organizer
  The 55th Japan Meeting on Applied and Related Physics
- Place of Presentation
  Chiba
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Presentation] A New Diagnostic Method of Very-Frequency Plasmas Produced in Insulated Vessels2007
- Author(s)
  Haruo, Shindo, Kouta, Kusaba
- Organizer
  American Vacuum Society 54th International Synposium
- Place of Presentation
  Seattle, USA
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Presentation] A New Diagnostic Method of Very-Frequency Plasmas Produced in Insulated Vessels2007
- Author(s)
  Haruo Shindo and Kouta Kusaba
- Organizer
  American Vacuum Society 54th International Synposium
- Place of Presentation
  Convention Center Seattle,WA
- Year and Date
  2007-10-18
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Presentation] A New Diagnostic Method of Very-Frequency Plasmas Produced in Insulated Vessels2007
- Author(s)
  Haruo Shindo and Kouta Kusaba
- Organizer
  American Vacuum Society 54th International Synpo sium
- Place of Presentation
  Convention Center Seattle,WA
- Year and Date
  2007-10-18
- Data Source
  KAKENHI-PROJECT-18540496
[Presentation] 高周波プラズマ診断におけるエミッシブプローブ特性解析2006
- Author(s)
  草場康太, 進藤春雄
- Organizer
  第67回応用物理学会学術講演会
- Place of Presentation
  立命館大学
- Year and Date
  2006-08-30
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Presentation] Emissive Probe Cnaracteristics in Measurements in Radio-Frequency Plasmas(in Japanese)2006
- Author(s)
  Kouta, Kusaba, Haruo, Shindo
- Organizer
  The 67th Japan meeting on Appne Physics
- Place of Presentation
  Kyoto
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Presentation] Electron Energy Distribution Function Measurement in Radio-Frequency Plasmas Produced in Insulated Vessels2006
- Author(s)
  Kouta, Kusaba, Haruo, Shindo
- Organizer
  American Vacuum Society 53rd International Synposium
- Place of Presentation
  San Francisco, USA
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540496
[Presentation] Electron Energy Distribution Function Measurement in Radio-Frequency Plasmas Produced in Insulated Vessels2006
- Author(s)
  Kouta Kusaba and Haruo Shindo
- Organizer
  American Vacuum Society 53rd International Synposium
- Place of Presentation
  Moscone West San Francisco,CA
- Year and Date
  2006-11-17
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18540496

1. OKIMURA Kunio (00194473)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
2. HORIIKE Yasuhiro (20209274)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
3. SHINGUBARA Shoso (10231367)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. SAKAUE Hiroyuki (50221263)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. INUSHIMA Takashi (20266381)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. TONEGAWA Akira (90197905)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. SHIBUYA Takehisa (90235599)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. IWAO Toru (80386359)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. UCHIIKE Heiju (90034389)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. 磯村雅夫 (70365998)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
11. KANEKO Hisashi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

SHINDO Haruo 進藤 春雄

Shindo Haruo 進藤 春雄

SINDO Hayuo 進藤 春男

Research Projects

Research Products

Co-Researchers

A Study on Production Technology of Large-Scaled Linear Atmosheric Pressure Microwave PlasmaPrincipal Investigator

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表面波共鳴点断熱拡散法による負イオンプラズマ生成とナノファブリケーションへの応用Principal Investigator

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Review Section

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Research on Large-Scaled Line Plasma Production by MicrowavePrincipal Investigator

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Crystal with Metal-Insulator Transition by Plasma Processing Technique and Its Application to Switching Devices

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A Study on a New Method to Measure Electron Energy Distribution in High Frequency PlasmasPrincipal Investigator

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Study on the Epitaxial Growth of Oxide Films in Sputtering focusing on Negative Oxygen Ion Behavior

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The study of control of "partial" detached plasma and heat transport

Principal Investigator

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Negative Ion Silicon Oxidation in Oxygen Plasma with High Rate and Low Damage.Principal Investigator

Principal Investigator

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電子サイクロトン分数波共鳴プラズマの生成とスパンタ応用Principal Investigator

Principal Investigator

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Investigation and control of a directional atomic flow induced by a high density electron current in an ultra fine metalic interconnection

Principal Investigator

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High Speed Driving Operation in Surface-Discharge AC Plasma Display Panels

Principal Investigator

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[Journal Article] Aspect ratio dependence of silicon trench oxidation in downstream of microwave oxygen plasma2019

Author(s)

Journal Title

DOI

NAID

Data Source

[Journal Article] 大規模表面処理のための直線型マイクロ波プラズマ2018

Author(s)

SHINDO Haruo 進藤春雄

Shindo Haruo 進藤春雄

SINDO Hayuo 進藤春男