Matsuo Shigeki 松尾繁樹

… Alternative Names

松尾繁樹マツオシゲキ

MATSUO Shigeki 松尾繁樹

松尾茂樹マツオシゲキ

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Researcher Number	20294720
Other IDs
External Links
Affiliation (Current)	2025: 芝浦工業大学, 工学部, 教授
Affiliation (based on the past Project Information) *help	2021 – 2023: 芝浦工業大学, 工学部, 教授 2014 – 2016: 芝浦工業大学, 工学部, 教授 2011 – 2012: 徳島大学, ソシオテクノサイエンス研究部, 准教授 2007 – 2012: 徳島大学, 大学院・ソシオテクノサイエンス研究部, 准教授 2006: 徳島大学, 大学院・ソシオテクノサイエンス研究部, 助教授 … More 2005: 徳島大学, 大学院工学研究科, 助教授 2005: 徳島大学, 工学研究科, 助教授 2002 – 2004: 徳島大学, 大学院・工学研究科, 助教授 1997 – 2001: Univ.of Tokushima, Faculty of Engi., Research Associate, 工学部, 助手 Less
Review Section/Research Field	Principal Investigator Production engineering/Processing studies / Intelligent mechanics/Mechanical systems / Intelligent mechanics/Mechanical systems / Basic Section 18020:Manufacturing and production engineering-related Except Principal Investigator Intelligent mechanics/Mechanical systems / Science and Engineering / Basic Section 24020:Marine engineering-related / Functional materials/Devices
Keywords	Principal Investigator フェムト秒レーザー / シリコン / エッチング / レーザー加工 / 周期構造 / レーザー着色 / 構造色 / レーザー誘起表面周期構造 / 着色 / レーザー誘起表面周期好悪像 … More / 酸化 / 窒化 / レーザー / ナノマイクロ加工 / フッ硝酸 / 赤外パルス / サファイア / フェムト秒レーザー加工 / マイクロマシン / 光ピンセット / マイクロ・ナノデバイス / 多焦点 / 回析光学素子 / アブレーション / マイクロロッドアレイ / フォトポリマー / フォトマスク / マイクロレンズアレイ / 多光子吸収 / ダイアモンド構造 / 位相 / フォトニック結晶 / 干渉 / マクロマシン / マイクロマシニング / ファイバープロープ / エバッセント場 / スピンコート / レジスト / フォトリソグラフィー / 原子間力顕微鏡 / NSOM / 近接場顕微鏡 … More Except Principal Investigator マイクロマシン / DNA / 近接場顕微鏡 / 白金 / 酸化チタン / PCR / micro-machine / PDMS / エッチング / ゼオライト / NSOM / 電極反応 / PMMA / MEMS / 光学計測 / フリーフォール型 / マイクロプラスチック / 海洋観測 / 姿勢推定 / メッシュフィルタ / イメージセンサ / 蛍光分析 / レーザースペックル / ガラス球 / 海洋観測システム / 海洋マイクロプラスチック / Surface Plasmon Resonance / Gold Colloid / Photomanipulation / Nanoactuator / Nanomachine / 表面プラズモン共鳴 / 金コロイド / 光マニピュレーション / ナノアクチュエーター / ナノマシン / etching / micro-chip / a gene / マイクロチップ / 遺伝子 / biosensor / pulling experiment / high voltage / chemical modification / joining in room temperature / ポリイオン / シランカップリング処理 / バイオセンサー / 引っ張り試験 / 高電圧 / 化学修飾 / 室温接合 / luminescence / multiphoton process / anneal / change in refractive index / femtosecond pulse / silica glass / three-dimensional optical memory / three-dimensional optical data storage / 三次元メモリ / 欠陥 / 発光 / 多光子過程 / アニール / 屈折率変化 / フェムト秒パルス / 石英ガラス / 三次元光メモリ / 三次元光記録 / forming resolution / microstructure / micromachining / photo polymer / stereolithopraphy / micromachine / 加工分解能 / 微小構造物 / マイクロマシニング / 高分子材料 / 光造形法 / レーザー加工 / ガラス / 金ナノ粒子 / プラズモン / レーザートラピング / 多光束干渉 / フォトニック結晶 / 光ピンセット / ナノ材料 / 共焦点顕微鏡 / 蛍光スペクトル / 色素 / 走査型電子顕微鏡 / 共焦点レーザー顕微鏡 / 蛍光顕微鏡 / 蛍光色素 / レジスト / フォトリソグラフィー / 電子線リソグラフィー / 微細ハニカム構造 / シリケイト / 一次元 / ナノチューブ / ペリレン / 微粒子 / ナノ界面 / ローダミン / フォトレジスト / ニアフィールド光 / ファイバープローブ / ナノマシニング / 表面準位 / ナノパタ-ニング / 塩化白金酸 / 光還元反応 / 光触媒反応 / ロ-ダミン / ポリシラン誘導体 / レーザー発振 / 微粒子共振器 / 光カー効果 / 非線形光学効果 Less

Vivid laser coloring by nitridation and surface periodic structure formationPrincipal Investigator
- Principal Investigator
  
  松尾繁樹
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Shibaura Institute of Technology
Development of in-situ underwater observation system that enables to detect super micro plastics
- Principal Investigator
  
  Koike Yoshikazu
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 24020:Marine engineering-related
- Research Institution
  Shibaura Institute of Technology
Development of three-dimensional micro processing techniques using near-infrared femtosecond laserPrincipal Investigator
- Principal Investigator
  
  Matsuo Shigeki
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Shibaura Institute of Technology
Development of new microprocessing technology of silicon crystalline substrate: internal, three-dimensional, arbitrary-shape removal processingPrincipal Investigator
- Principal Investigator
  
  MATSUO Shigeki
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokushima
表面プラズモン増強電場を利用した透明無機材料光化学エッチングの高光利用効率化
- Principal Investigator
  
  橋本修一
- Project Period (FY)
  2008
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  The University of Tokushima
Development and application of optically-driven micro rotator that rotates inside transparent solid substratePrincipal Investigator
- Principal Investigator
  
  MATSUO Shigeki
- Project Period (FY)
  2008 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokushima
レーザートラッピングを用いた円柱型ゼオライト微粒子フォトニック結晶の作製
- Principal Investigator
  
  橋本修一
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Functional materials/Devices
- Research Institution
  The University of Tokushima
ゼオライト結晶を利用した微小領域光化学反応の計測
- Principal Investigator
  
  橋本修一
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  The University of Tokushima
フェムト秒レーザーを用いた広領域一括微細加工技術の開発Principal Investigator
- Principal Investigator
  
  松尾繁樹
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokushima
Development of Nonoactuators by Using of Light Radiation Pressure
- Principal Investigator
  
  MISAWA Hiroaki
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  HOKKAIDO UNIVERSITY
  The University of Tokushima
単一光プロセスによる三次元周期構造物の作製とそのフォトニック結晶への応用Principal Investigator
- Principal Investigator
  
  松尾繁樹
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokushima
プローブ顕微鏡を用いた光半導体電極ナノ界面における電子移動反応制御
- Principal Investigator
  
  三澤弘明
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  The University of Tokushima
近接場顕微鏡によるナノマシニング技術の開発
- Principal Investigator
  
  三澤弘明
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  The University of Tokushima
Development of Integrated Micro-Chip Device for DNA Analysis
- Principal Investigator
  
  MISAWA Hiroaki
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for University and Society Collaboration
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokushima
プローブ顕微鏡を用いた光半導体電極ナノ界面における電子移動反応制御
- Principal Investigator
  
  三澤弘明
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  The University of Tokushima
近接場顕微鏡によるナノマシシング技術の開発
- Principal Investigator
  
  三澤弘明
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  The University of Tokushima
ナノチューブ中に集積化した一次元金属フタロシアニンの光物性の解明
- Principal Investigator
  
  三澤弘明
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Review Section
  
  Science and Engineering
- Research Institution
  The University of Tokushima
エバネッセント場造形法による光の限界を超えるマイクロマシニング技術の開発Principal Investigator
- Principal Investigator
  
  松尾繁樹 (松尾茂樹)
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokushima
Development of New Technology for Micro-Machine Fabrication
- Principal Investigator
  
  MISAWA Hiroaki
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokushima
微粒子共振器による光電場閉じ込めを利用した新しい有機非線形光学材料の開発
- Principal Investigator
  
  MISAWA Hiroaki
- Project Period (FY)
  1997
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokushima
プローブ顕微鏡を用いた光半導体電極ナノ界面における電子移動反応制御
- Principal Investigator
  
  三澤弘明
- Project Period (FY)
  1997
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokushima
近接場顕微鏡によるナノマシニング技術の開発
- Principal Investigator
  
  三澤弘明
- Project Period (FY)
  1997
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokushima
Development of Ultra-high Density Three-dimensional Optical Data storage System
- Principal Investigator
  
  MISAWA Hiroaki
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokushima
Development of new micromachining technology by laser microfabrication technique
- Principal Investigator
  
  MISAWA Hiroaki
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokushima

All 2024 2023 2017 2016 2015 2013 2012 2011 2010 2009 2008 2005

All Journal Article Presentation Patent

[Journal Article] Scanning strategy-dependent etching rate in the formation of through-via holes by femtosecond laser-assisted etching2024
- Author(s)
  Matsuda Shogo、Matsuo Shigeki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 63 Issue: 5 Pages: 052001-052001
- DOI
  10.35848/1347-4065/ad3da2
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22K03845
[Journal Article] Laser Fabrication of Miniature Internal Thread in Glass Substrate2017
- Author(s)
  Hiroyuki Degawa, Noriaki Urano, Shigeki Matsuo
- Journal Title
  
  Micromachines
  
  Volume: 8 Issue: 2 Pages: 48-48
- DOI
  10.3390/mi8020048
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26289019
[Journal Article] Subnanosecond-laser-induced periodic surface structures on prescratched silicon substrate2016
- Author(s)
  Motoharu Hongo, Shigeki Matsuo
- Journal Title
  
  Applied Physics Express
  
  Volume: 9 Issue: 6 Pages: 062703-062703
- DOI
  10.7567/apex.9.062703
- NAID
  210000137933
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26289019
[Journal Article] Reduction of Pulse-to-Pulse Fluctuation in Laser Pulse Energy using the Optical Kerr Effect2012
- Author(s)
  S. Matsuo, L. Yan, J. Si, T. Tomita and S. Hashimoto
- Journal Title
  
  Optics Letters
  
  Volume: (掲載決定, 2012年5月掲載予定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Matrix calculus for axially symmetric polarized beam2011
- Author(s)
  S. Matsuo
- Journal Title
  
  Optics Express
  
  Volume: Vol.19 Issue: 13 Pages: 12815-12824
- DOI
  10.1364/oe.19.012815
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Hashimoto and Tatsuya Okada, Femtosecond Laser-Assisted Etching of Fluoride Crystals2011
- Author(s)
  S. Matsuo, K. Iwasa, T. Tomita, S.
- Journal Title
  
  Journal of Laser Micro/ Nanoengineering
  
  Volume: Vol.6 Issue: 3 Pages: 245-248
- DOI
  10.2961/jlmn.2011.03.0014
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Micro Three-dimensional Removal Processing inside Sapphire Substrate2010
- Author(s)
  K. Tokumi, S. Matsuo, S. Kiyama, T. Tomita and S. Hashimoto
- Journal Title
  
  Journal of Laser Micro/ Nanoengineering
  
  Volume: Vol.5 Issue: 2 Pages: 179-182
- DOI
  10.2961/jlmn.2010.02.0015
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Micro Three-dimensional Removal Processing inside Sapphire Substrate2010
- Author(s)
  K. Tokumi, S. Matsuo, S. Kiyama, T. Tomita, S. Hashimoto
- Journal Title
  
  Journal of Laser Micro/Nanoengineering Vol.5
  
  Pages: 179-182
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH2009
- Author(s)
  S. Matsuo, H. Sumi, S. Kiyama, T. Tomita and S. Hashimoto
- Journal Title
  
  Applied Surface Science
  
  Volume: Vol.255 Issue: 24 Pages: 9758-9760
- DOI
  10.1016/j.apsusc.2009.04.065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH2009
- Author(s)
  Matsuo, H. Sumi, S. Kiyama, T. Tomita, S. Hashimoto
- Journal Title
  
  Applied Surface Science Vol.255
  
  Pages: 9758-9760
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Laser Fabrication and Manipulation of an Optical Rotator Embedded inside a Transparent Solid Material2009
- Author(s)
  S. Kiyama, T. Tomita, S. Matsuo, S. Hashimoto
- Journal Title
  
  Journal of Laser Micro/Nanoengineering Vol.4
  
  Pages: 18-21
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Examination of etching agent and etching mechanism on femtosecond laser microfabrication of channels inside vitreous silica substrates2009
- Author(s)
  S. Kiyama, S. Matsuo, S. Hashimoto and Y. Morihira
- Journal Title
  
  The Journal of Physical Chemistry C
  
  Volume: Vol.113 Issue: 27 Pages: 11560-11566
- DOI
  10.1021/jp900915r
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Laser Fabrication and Manipulation of an Optical Rotator Embedded inside a Transparent Solid Material2009
- Author(s)
  S. Kiyama, T. Tomita, S. Matsuo and S. Hashimoto
- Journal Title
  
  Journal of Laser Micro/ Nanoengineering
  
  Volume: Vol.4 Issue: 1 Pages: 18-21
- DOI
  10.2961/jlmn.2009.01.0004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH2009
- Author(s)
  S.Matsuo, et al.
- Journal Title
  
  Applied Surface Science 255
  
  Pages: 9758-9760
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Laser microfabrication and rotation of ship-in-a-bottle optical rotators2008
- Author(s)
  Matsuo S., et al
- Journal Title
  
  Applied Physics Letters 93
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Three-Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses2008
- Author(s)
  S. Matsuo, K. Tokumi, T. Tomita and S. Hashimoto
- Journal Title
  
  Laser Chemistry
  
  Volume: Vol.2008 Pages: 1-4
- DOI
  10.1155/2008/892721
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Masuhara, Laser microfabrication and rotation of ship-in-a-bottle optical rotators2008
- Author(s)
  S. Matsuo, S. Kiyama, Y. Shichijo, T. Tomita, S. Hashimoto, Y. Hosokawa, H.
- Journal Title
  
  Applied Physics Letters Vol.93
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Laser microfabrication and rotation of ship-in-a-bottle optical rotators2008
- Author(s)
  S. Matsuo, S. Kiyama, Y. Shichijo, T. Tomita, S. Hashimoto, Y. Hosokawa and H. Masuhara
- Journal Title
  
  Applied Physics Letters
  
  Volume: Vol.93 Issue: 5
- DOI
  10.1063/1.2967872
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Laser microfabrication and rotation of ship-in-a-bottle optical rotators2008
- Author(s)
  S. Matsuo
- Journal Title
  
  Applied Physics Letters 93
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19655069
[Journal Article] Three-Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses2008
- Author(s)
  Matsuo S., et al
- Journal Title
  
  Laser Chemistry 2008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Hashimoto, Three- Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses2008
- Author(s)
  S. Matsuo, K. Tokumi, T. Tomita, S.
- Journal Title
  
  Laser Chemistry Vol.2008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360115
[Journal Article] Femtosecond Laser Microfabrication of Periodic Structures using a Microlens Array2005
- Author(s)
  Shigeki Matsuo
- Journal Title
  
  Applied Physics A Vol.80,No.4
  
  Pages: 683-685
- Data Source
  KAKENHI-PROJECT-16760205
[Patent] レーザー光束制御装置、レーザー光束エネルギー安定化装置、レーザー光束制御方法、及びレーザー光束エネルギー安定化方法2011
- Inventor(s)
  松尾繁樹
- Industrial Property Rights Holder
  徳島大学
- Filing Date
  2011-09-02
- Overseas
- Data Source
  KAKENHI-PROJECT-20360115
[Patent] レーザー光束制御装置及びレーザー光束エネルギー安定化装置2010
- Inventor(s)
  松尾繁樹
- Industrial Property Rights Holder
  徳島大学
- Industrial Property Number
  2010-203367
- Filing Date
  2010-09-10
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] フェムト秒レーザーを用いた間欠加工現象発生の検討2024
- Author(s)
  平野斗真，松尾繁樹
- Organizer
  レーザー学会学術講演会第44回年次大会
- Data Source
  KAKENHI-PROJECT-22K03845
[Presentation] 水素混合窒素ガスの吹き付けによる金属材料のレーザー窒化2024
- Author(s)
  松尾繁樹，水野陽登，近藤敏彰
- Organizer
  第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-22K03845
[Presentation] フェムト秒レーザーを用いた異種透明材料の接合可能性の検討2023
- Author(s)
  佐藤純也，松尾繁樹
- Organizer
  レーザー学会学術講演会第43回年次大会
- Data Source
  KAKENHI-PROJECT-22K03845
[Presentation] 電子物性の異なるシリコン結晶基板の非線形光学係数の比較2017
- Author(s)
  杉本幸大造，松尾繁樹
- Organizer
  レーザー学会東京支部研究会
- Place of Presentation
  東京都港区
- Data Source
  KAKENHI-PROJECT-26289019
[Presentation] 短パルスレーザーによるPDMS内部の除去加工2017
- Author(s)
  林克幸，松尾繁樹
- Organizer
  応用物理学会春季学術講演会
- Place of Presentation
  神奈川県横浜市
- Data Source
  KAKENHI-PROJECT-26289019
[Presentation] サブナノ秒レーザーを用いた液中アブレーションによるガラスの内部加工2017
- Author(s)
  出川洋之，浦野徳章，中川寛之，村上廉和，松尾繁樹
- Organizer
  レーザー学会学術講演会
- Place of Presentation
  徳島県徳島市
- Data Source
  KAKENHI-PROJECT-26289019
[Presentation] サブナノ秒レーザーによるシリコン・ガラスの微細加工2017
- Author(s)
  松尾繁樹
- Organizer
  電気学会　光・量子デバイス研究会
- Place of Presentation
  三重県伊勢市
- Data Source
  KAKENHI-PROJECT-26289019
[Presentation] Sub-nanosecond laser induced periodic surface structures on pre-scratched Silicon surface2016
- Author(s)
  Motoharu Hongo, Shigeki Matsuo
- Organizer
  17th International Symposium on Laser Precision Microfabrication
- Place of Presentation
  Xi'an, China
- Year and Date
  2016-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289019
[Presentation] Intermittent release of stress can form periodic surface holes on glass: subsurface technique in femtosecond laser study2016
- Author(s)
  Shigeki Matsuo, Shuichi Hashimoto
- Organizer
  International Symposium on Optomechatronics Technology
- Place of Presentation
  Itabashi, Tokyo, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289019
[Presentation] Subnanosecond laser processing of bulk and surface of silicon2016
- Author(s)
  Shigeki Matsuo
- Organizer
  Progress in Ultrafast Laser Modifications of Materials
- Place of Presentation
  Neuchatel Switzerland
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289019
[Presentation] Subnanosecond laser processing of bulk and surface of silicon2016
- Author(s)
  Shigeki Matsuo
- Organizer
  2nd workshop on Progress on Ultrafast Laser Modifications of Materials
- Place of Presentation
  ヌーシャテル, Switzerland
- Year and Date
  2016-06-13
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289019
[Presentation] Subnanosecond laser induced periodic surface structures on pre-scratched silicon surface2016
- Author(s)
  Motoharu Hongo and Shigeki Matsuo
- Organizer
  17th International Symposium on Laser Precision Microfabrication
- Place of Presentation
  Xi’an, China
- Year and Date
  2016-05-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289019
[Presentation] フェムト秒レーザーを用いるガラス内部への三次元微細形状除去加工2015
- Author(s)
  松尾繁樹
- Organizer
  第82回レーザ加工学会講演会
- Place of Presentation
  産業技術総合研究所臨海副都心センター
- Year and Date
  2015-01-14
- Data Source
  KAKENHI-PROJECT-26289019
[Presentation] フェムト秒レーザーを用いた透明固体内部加工2015
- Author(s)
  松尾繁樹
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2015-03-12
- Invited
- Data Source
  KAKENHI-PROJECT-26289019
[Presentation] Three-Dimensional Micro Modification and Selective Etching of Crystalline Silicon Using 1.56-μm Subpicosecond Laser Pulses2013
- Author(s)
  松尾繁樹
- Organizer
  CLEO Pacific Rim
- Place of Presentation
  国立京都国際会館（京都府）
- Data Source
  KAKENHI-PROJECT-23656109
[Presentation] Three-Dimensional Micro Modification and Selective Etching of Crystalline Silicon Using 1.56-μmSubpicosecond Laser Pulses2013
- Author(s)
  松尾繁樹他
- Organizer
  CLEO Pacific Rim
- Place of Presentation
  国立京都国際会館(京都府)
- Data Source
  KAKENHI-PROJECT-23656109
[Presentation] ガラスのフェムト秒レーザー支援エッチングにおける照射パラメータ依存性2012
- Author(s)
  松尾繁樹
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学(東京都)
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Femtosecond laser-assisted etching of Fluoride crystals2011
- Author(s)
  Shigeki Matsuo, et al
- Organizer
  The 12th International Symposium on Laser Precision Microfabrication
- Place of Presentation
  高松市
- Year and Date
  2011-06-08
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] 軸対称偏光の行列計算法:ジョーンズ計算法の拡張2011
- Author(s)
  松尾繁樹
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学(山形県)
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Optical rotator inside glass substrate fabricated by femtosecond laser processing2011
- Author(s)
  Shigeki Matsuo
- Organizer
  International Symposium on Optomechatronic Technologies 2011
- Place of Presentation
  香港中文大学(香港)(招待講演)
- Year and Date
  2011-11-02
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] フッ化物結晶のフェムト秒レーザー支援エッチング2011
- Author(s)
  松尾繁樹, 他
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  厚木市
- Year and Date
  2011-03-26
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Optical rotator inside glass substrate fabricated by femtosecond laser processing2011
- Author(s)
  S. Matsuo
- Organizer
  ISOT2011 International Symposium on Optomechatronic Technologies
- Place of Presentation
  香港中文大学(香港)
- Year and Date
  2011-11-02
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Rotation Formulas in the Jones Calculus Extended to Axially Symmetrically Polarized Beam2011
- Author(s)
  Shigeki Matsuo
- Organizer
  Frontiers in Optics 2011
- Place of Presentation
  サンノゼコンベンションセンター(アメリカ)
- Year and Date
  2011-10-20
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] フェムト秒レーザーパルスを照射したガラスのエッチング特性の温度・濃度依存性2010
- Author(s)
  松尾繁樹, 他
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎市
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] ガラスのフェムト秒レーザー支援エッチングにおける選択性のエッチング条件依存性2010
- Author(s)
  松尾繁樹, 他
- Organizer
  2010年光化学討論会
- Place of Presentation
  千葉市
- Year and Date
  2010-09-10
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Femtosecond laser-assisted micro removal processing inside transparent solids2010
- Author(s)
  S. Matsuo
- Organizer
  The 7th Asia-Pacific Laser Symposium
- Place of Presentation
  Seogwipo KAL Hotel(韓国済州島)
- Year and Date
  2010-05-12
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Femtosecond laser-assisted micro removal processing inside transparent solids2010
- Author(s)
  S. Matsuo
- Organizer
  The 7th Asia-Pacific Laser Symposium
- Place of Presentation
  Seogwipo, Korea
- Year and Date
  2010-05-12
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] フェムト秒レーザー照射によるガラスのエッチングレート増大のメカニズム2010
- Author(s)
  松尾繁樹, 他
- Organizer
  レーザー学会第408回研究会
- Place of Presentation
  尾道市
- Year and Date
  2010-11-29
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] フェムト秒レーザを用いた透明固体材料の内部微細加工技術の開発2009
- Author(s)
  松尾繁樹
- Organizer
  第72回レーザ加工学会
- Place of Presentation
  名古屋市
- Year and Date
  2009-12-17
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Microfluidic devices のための埋め込み型可動構造物の作製2009
- Author(s)
  松尾繁樹, 他
- Organizer
  レーザー学会学術講演会第29回年次大会
- Place of Presentation
  徳島市
- Year and Date
  2009-01-11
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Micro three-dimensional removal processing inside sapphire substrate2009
- Author(s)
  S.Matsuo, et al.
- Organizer
  The 5th International Congress on Laser Advanced Materials Processing
- Place of Presentation
  神戸
- Year and Date
  2009-06-30
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Laser Internal Modification Plus Wet Etching for Micro- structuring Crystalline and Glassy Materials2009
- Author(s)
  S. Matsuo
- Organizer
  The 28th International Congress on Applications of Lasers & Electro-Optics
- Place of Presentation
  Orlando, U.S.A.(招待講演)
- Year and Date
  2009-11-03
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Laser Internal Modification Plus Wet Etching for Micro-structuring Crystalline and Glassy Materials2009
- Author(s)
  S. Matsuo
- Organizer
  The 28th International Congress on Applications of Lasers & Electro-Optics
- Place of Presentation
  Hilton in Walt Disney World Resort(Orlando, U.S.A.)
- Year and Date
  2009-11-03
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Laser Internal Modification Plus Wet Etching for Micro-structuring Crystalline and Glassy Materials2009
- Author(s)
  S.Matsuo
- Organizer
  The 28th International Congress on Applications of Lasers & Electro-Optics
- Place of Presentation
  Orlando
- Year and Date
  2009-11-03
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Micro three-dimensional removal processing inside sapphire substrate2009
- Author(s)
  S. Matsuo et al.
- Organizer
  The 5th International Congress on Laser Advanced Materials Processing
- Place of Presentation
  神戸コンベンションセンター(神戸市)
- Year and Date
  2009-06-30
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Three-dimensional Microstructuring inside Transparent Solid Substrates Assisted by Femtosecond Laser Pulses2009
- Author(s)
  Matsuo S., et al
- Organizer
  PIERS 2009 in Beijing
- Place of Presentation
  Beijing
- Year and Date
  2009-03-25
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Micro three-dimensional removal processing inside sapphire substrate2009
- Author(s)
  S. Matsuo, et al.
- Organizer
  The 5th International Congress on Laser Advanced Materials Processing
- Place of Presentation
  Kobe, Japan
- Year and Date
  2009-06-30
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Optically Driven Micro Rotator embedded in Solid Substrate2008
- Author(s)
  Matsuo S., et al
- Organizer
  Microprocesses and Nanotechnology 2008
- Place of Presentation
  福岡市
- Year and Date
  2008-10-29
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] フェムト秒レーザー照射と高温エッチングによるサファイアの内部加工2008
- Author(s)
  松尾繁樹, 他
- Organizer
  第27回固体・表面光化学討論会
- Place of Presentation
  徳島市
- Year and Date
  2008-11-22
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Femtosecond laser assisted etching of borosilicate glasses2008
- Author(s)
  Matsuo S., et al
- Organizer
  the 9th International Symposium on Laser Precision Microfabrication
- Place of Presentation
  Qubec city
- Year and Date
  2008-06-17
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Laser fabrication and manipulation of optical rotator embedded inside a transparent solid material2008
- Author(s)
  Matsuo S., et al
- Organizer
  the 9th International Symposium on Laser Precision Microfabrication
- Place of Presentation
  Qubec city
- Year and Date
  2008-06-17
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] ホウケイ酸ガラスのフェムト秒レーザー誘起選択エッチング2008
- Author(s)
  松尾繁樹, 他
- Organizer
  第27回固体・表面光化学討論会
- Place of Presentation
  徳島市
- Year and Date
  2008-11-22
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] フェムト秒レーザー支援エッチング加工よる微小流体制御素子の開発2008
- Author(s)
  松尾繁樹, 他
- Organizer
  第27回固体・表面光化学討論会
- Place of Presentation
  徳島市
- Year and Date
  2008-11-22
- Data Source
  KAKENHI-PROJECT-20360115
[Presentation] Femtosecond laser assisted etching of borosilicate glasses with aqueous solution of KOH2008
- Author(s)
  Matsuo S., et al
- Organizer
  6th International Conference on Photo-Excited Processes and Applications
- Place of Presentation
  札幌市
- Year and Date
  2008-09-09
- Data Source
  KAKENHI-PROJECT-20360115

1. MISAWA Hiroaki (30253230)

# of Collaborated Projects: 13 results

# of Collaborated Products: 0 results
2. 橋本修一 (70208445)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
3. NAOI Yoshiki (90253228)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. JUODKAZIS Saulius (80332823)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. YAMAGUCHI Akira

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. KUWAJIMA Masamichi (00205262)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. TAKAGI Hitoshi (20171423)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. KINOUCHI Yosuke (80035807)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. NAGASHINO Hirohumi (40035655)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. TSUBOI Yasuyuki (00283698)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. Koike Yoshikazu (30251672)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 富田卓郎 (90359547)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 二井信行 (10508378)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 長澤純人 (30400279)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. 荒川久幸 (40242325)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. 西川宏之 (40247226)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. ラジャゴパランウママヘスワリ (40270706)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. 李素潤 (80837336)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. 横井秀樹 (90251636)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. 張暁賓 (40647111)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. 近藤敏彰 (20513716)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
22. SUZUKI Yoshihisa

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. TANAMURA Yoshihiro

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. SAULIUS Juodkazis

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. ANDRIUS Marcinkevicius

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. VYGANTAS Mizeikis

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Matsuo Shigeki 松尾 繁樹

松尾 繁樹 マツオ シゲキ

MATSUO Shigeki 松尾 繁樹

松尾 茂樹 マツオ シゲキ

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Vivid laser coloring by nitridation and surface periodic structure formationPrincipal Investigator

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Development of three-dimensional micro processing techniques using near-infrared femtosecond laserPrincipal Investigator

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Development of new microprocessing technology of silicon crystalline substrate: internal, three-dimensional, arbitrary-shape removal processingPrincipal Investigator

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Development and application of optically-driven micro rotator that rotates inside transparent solid substratePrincipal Investigator

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フェムト秒レーザーを用いた広領域一括微細加工技術の開発Principal Investigator

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単一光プロセスによる三次元周期構造物の作製とそのフォトニック結晶への応用Principal Investigator

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Matsuo Shigeki 松尾繁樹

松尾繁樹マツオシゲキ

MATSUO Shigeki 松尾繁樹

松尾茂樹マツオシゲキ