Takenaka Mitsuru 竹中充

… Alternative Names

TAKENAKA Mitsuru 竹中充

Less

Researcher Number	20451792
Other IDs
Affiliation (Current)	2025: 東京大学, 大学院工学系研究科(工学部), 教授
Affiliation (based on the past Project Information) *help	2020 – 2024: 東京大学, 大学院工学系研究科(工学部), 教授 2016 – 2018: 東京大学, 大学院工学系研究科(工学部), 准教授 2016: 東京大学, 大学院工学系研究科, 准教授 2011 – 2016: 東京大学, 工学(系)研究科(研究院), 准教授 2013: 東京大学, 大学院工学系研究科, 准教授 … More 2013: 東京大学, 工学系研究科, 准教授 2010: 東京大学, 工学系研究科, 准教授 2007 – 2010: 東京大学, 大学院・工学系研究科, 准教授 2007: The University of Tokyo, 大学院・工学系研究科, 講師 Less
Review Section/Research Field	Principal Investigator Electron device/Electronic equipment / Medium-sized Section 21:Electrical and electronic engineering and related fields / Electron device/Electronic equipment / Basic Section 21060:Electron device and electronic equipment-related Except Principal Investigator Electronic materials/Electric materials / Thin film/Surface and interfacial physical properties / Engineering / Science and Engineering / Science and Engineering
Keywords	Principal Investigator 光集積回路 / 化合物半導体 / センシング / ゲルマニウム / 中赤外光 / 光変調器 / CMOSフォトニクス / III-V族半導体 / 量子井戸混合 / コンピューティング … More / 光通信 / 光デバイス / 光電子融合集積回路 / ウェハボンディング / シリコンフォトニクス / トランジスタ / III-V MOSFET / CMOS photonics / 基板貼り合わせ / MOSトランジスタ / 光スイッチ / III-V-OI基板 / 基板貼り合せ / InGaAs MOSFET / 受光器 / 細線導波路 / 光電子集積回路 / InAlAs酸化膜 / 半導体物性 / 電子デバイス・機器 / ウェット酸化 / InP / InGaAs / InAlAs / MOSFET … More Except Principal Investigator 移動度 / MOSFET / ゲルマニウム / サブバンド / 反転層 / 結晶成長 / エネルギーバンド / IV族半導体 / Ⅳ族半導体 / 集積回路 / ゲルマニウム錫 / 表面・界面物性 / 結晶工学 / 半導体物性 / LSI / 欠陥 / 高キャリア移動度 / ひずみ / スズ / ゲートスタック / スズ(錫) / 表面・界面 / CMOS / エピタキシャル成長 / 歪 / 錫 / 酸化膜信頼性 / 界面準位 / クーロン散乱 / 表面ラフネス / ひずみSi / 強磁性 / スピン / 面方位 / GOI Less

Development of fundamental technologies for III-V semiconductor membrane photonic integrated circuits using quantum well intermixingPrincipal Investigator
- Principal Investigator
  
  竹中充
- Project Period (FY)
  2023 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 21:Electrical and electronic engineering and related fields
- Research Institution
  The University of Tokyo
On-chip molecular sensing using Ge mid-infrared photonic integrated circuitPrincipal Investigator
- Principal Investigator
  
  Takenaka Mitsuru
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  The University of Tokyo
Optical sensing chip based on Ge mid-infrared integrated photonicsPrincipal Investigator
- Principal Investigator
  
  竹中充
- Project Period (FY)
  2017 – 2018
- Research Category
  
  Grant-in-Aid for JSPS Fellows
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  The University of Tokyo
Establishment of Fundamental Engineering of Sn-related Group-IV Semiconductor Materials for Multi-Functional and Low-Power Electronics
- Principal Investigator
  
  ZAIMA SHIGEAKI
- Project Period (FY)
  2014 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Nagoya University
Research on platform technologies for electronic-photonic integrated circuits based on III-V CMOS photonicsPrincipal Investigator
- Principal Investigator
  
  Takenaka Mitsuru
- Project Period (FY)
  2014 – 2017
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  The University of Tokyo
Understanding of carrier transport properties of Ge-On-Insulator CMOS and establishment of performance enhancement engineering
- Principal Investigator
  
  Takagi Shinichi
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  The University of Tokyo
Understanding of carrier transport mechanism in Ge MOS interfaces and establishment of mobility enhancement technologies
- Principal Investigator
  
  TAKAGI Shinichi
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  The University of Tokyo
Design of Electronic Properties and Development of High-Mobility Channel Technology for Low Power/High-Speed Nano-CMOS Devices
- Principal Investigator
  
  ZAIMA Shigeaki
- Project Period (FY)
  2010 – 2013
- Research Category
  
  Grant-in-Aid for Specially Promoted Research
- Review Section
  
  Science and Engineering
  Engineering
- Research Institution
  Nagoya University
Construction of III-V CMOS PhotonicsPrincipal Investigator
- Principal Investigator
  
  TAKENAKA Mitsuru
- Project Period (FY)
  2010 – 2013
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  The University of Tokyo
Understanding of mechanisms dominating inversion-layer mobility in strained-Si MOSFETs and establishment of guideline for the mobility enhancement
- Principal Investigator
  
  TAKAGI Shinichi
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  The University of Tokyo
III-V-OI MOS structure by using selective wet oxidation of InAlAs layerPrincipal Investigator
- Principal Investigator
  
  TAKENAKA Mitsuru
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Young Scientists (Start-up)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  The University of Tokyo
Nano-structure functional devices based Ge-based channels
- Principal Investigator
  
  TAKAGI Shinichi
- Project Period (FY)
  2006 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  The University of Tokyo

[Journal Article] Numerical evaluation of bandwidth and optical loss in InP-organic hybrid optical modulator with doping optimization2024
- Author(s)
  Sakumoto Hiroya、Nakayama Taketoshi、Miyatake Yuto、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 63 Issue: 2 Pages: 02SP52-02SP52
- DOI
  10.35848/1347-4065/ad189b
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23H00172
[Journal Article] Proposal of Low-Loss Non-Volatile Mid-Infrared Optical Phase Shifter Based on Ge2Sb2Te3S22023
- Author(s)
 Miyatake Yuto、Makino Kotaro、Tominaga Junji、Miyata Noriyuki、Nakano Takashi、Okano Makoto、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
- Journal Title
 
 IEEE Transactions on Electron Devices
 
 Volume: 70 Issue: 4 Pages: 2106-2112
- DOI
 10.1109/ted.2023.3235865
- Peer Reviewed
- Data Source
 KAKENHI-PROJECT-20H02198, KAKENHI-PROJECT-22KJ0549
[Journal Article] Design of compact and low-loss S-bends by CMA-ES2023
- Author(s)
  Miyatake Yuto、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
- Journal Title
  
  Optics Express
  
  Volume: 31 Issue: 26 Pages: 43850-43850
- DOI
  10.1364/oe.504866
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22KJ0549, KAKENHI-PROJECT-23H00172
[Journal Article] Efficient optical phase modulator based on an III?V metal-oxide-semiconductor structure with a doped graphene transparent electrode2022
- Author(s)
  Piyapatarakul Tipat、Tang Hanzhi、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 62 Issue: SC Pages: SC1008-SC1008
- DOI
  10.35848/1347-4065/aca59c
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H02198
[Journal Article] Ge-on-insulator Platform for Mid-infrared Photonic Integrated Circuits2022
- Author(s)
  Takenaka Mitsuru、Zhao Ziqiang、Ho Chong Pei、Fujigaki Takumi、Piyapatarakul Tipat、Miyatake Yuto、Tang Rui、Toprasertpong Kasidit、Takagi Shinichi
- Journal Title
  
  ECS Transactions
  
  Volume: 109 Issue: 4 Pages: 47-58
- DOI
  10.1149/10904.0047ecst
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Journal Article] Non-volatile compact optical phase shifter based on Ge2Sb2Te5 operating at 2.3 μm2022
- Author(s)
 Miyatake Yuto、Ho Chong Pei、Pitchappa Prakash、Singh Ranjan、Makino Kotaro、Tominaga Junji、Miyata Noriyuki、Nakano Takashi、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
- Journal Title
 
 Optical Materials Express
 
 Volume: 12 Issue: 12 Pages: 4582-4582
- DOI
 10.1364/ome.473987
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
 KAKENHI-PROJECT-20H02198, KAKENHI-PROJECT-22KJ0549
[Journal Article] Numerical analysis of optical phase modulator operating at 2 μm wavelength using graphene/III?V hybrid metal-oxide-semiconductor capacitor2022
- Author(s)
  Piyapatarakul Tipat、Tang Hanzhi、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: SC Pages: SC1031-SC1031
- DOI
  10.35848/1347-4065/ac4443
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H02198
[Journal Article] Low-loss Ge waveguide at the 2-μm band on an n-type Ge-on-insulator wafer2021
- Author(s)
  Zhao Ziqiang、Lim Cheol-Min、Ho Chongpei、Sumita Kei、Miyatake Yuto、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
- Journal Title
  
  Optical Materials Express
  
  Volume: 11 Issue: 12 Pages: 4097-4097
- DOI
  10.1364/ome.444071
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H02198
[Journal Article] Ge-on-insulatorを用いた近赤外・中赤外集積フォトニクス2020
- Author(s)
  竹中充，高木信一
- Journal Title
  
  レーザー研究
  
  Volume: 48 Pages: 535-539
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H02198
[Journal Article] High-efficiency Ge thermo-optic phase shifter on Ge-on-insulator platform2019
- Author(s)
  T. Fujigaki, S. Takagi, and M. Takenaka
- Journal Title
  
  Optics Express
  
  Volume: 27 Issue: 5 Pages: 6451-6458
- DOI
  10.1364/oe.27.006451
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220605
[Journal Article] Numerical analysis of Ge/Si hybrid MOS optical modulator operating at mid-infrared wavelength2019
- Author(s)
  Y. Taguchi, S. Takagi, and, M. Takenaka
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 58 Issue: SB Pages: SBBE03-SBBE03
- DOI
  10.7567/1347-4065/aafb52
- NAID
  210000135336
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26220605
[Journal Article] Tunable germanium-on-insulator band-stop optical filter using thermo-optic effect2019
- Author(s)
  C. P. Ho, Z. Zhao, Q. Li, S. Takagi, and M. Takenaka
- Journal Title
  
  IEEE Photonics Journal
  
  Volume: 印刷中 Issue: 2 Pages: 1-1
- DOI
  10.1109/jphot.2019.2904050
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220605, KAKENHI-PROJECT-17F17071
[Journal Article] III-V/Si Hybrid MOS Optical Phase Shifter for Si Photonic Integrated Circuits2019
- Author(s)
  Takenaka Mitsuru、Han Jae-Hoon、Boeuf Frederic、Park Jin-Kwon、Li Qiang、Ho Chong Pei、Lyu Dongsheng、Ohno Shuhei、Fujikata Junichi、Takahashi Shigeki、Takagi Shinichi
- Journal Title
  
  Journal of Lightwave Technology
  
  Volume: 37 Issue: 5 Pages: 1474-1483
- DOI
  10.1109/jlt.2019.2892752
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17F17071
[Journal Article] Design and characterization of Ge passive waveguide components on Ge-on-insulator wafer for mid-infrared photonics2018
- Author(s)
  J. Kang, S. Takagi, and M. Takenaka
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 57 Issue: 4 Pages: 042202-042202
- DOI
  10.7567/jjap.57.042202
- NAID
  210000148818
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26220605
[Journal Article] InGaAsP Mach-Zehnder interferometer optical modulator monolithically integrated with InGaAs driver MOSFET on a III-V CMOS photonics platform2018
- Author(s)
  J.-K. Park, S. Takagi, and M. Takenaka
- Journal Title
  
  Optics Express
  
  Volume: 26 Issue: 4 Pages: 4842-4852
- DOI
  10.1364/oe.26.004842
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26709022
[Journal Article] Ge photodetector monolithically integrated with amorphous Si waveguide on wafer-bonded Ge-on-insulator substrate2018
- Author(s)
  J. Kang, S. Takagi, and M. Takenaka
- Journal Title
  
  Optics Express
  
  Volume: 26 Issue: 23 Pages: 30546-30555
- DOI
  10.1364/oe.26.030546
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220605
[Journal Article] Mid-infrared high-Q germanium microring resonator2018
- Author(s)
  T. H. Xiao, Z. Zhao, W. Zhou, C. Y. Chang, S. Y. Set, M. Takenaka, H. K. Tsang, Z. Cheng, and K. Goda
- Journal Title
  
  Optics Letters
  
  Volume: 43 Issue: 12 Pages: 2885-2888
- DOI
  10.1364/ol.43.002885
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Journal Article] High-Q germanium optical nanocavity2018
- Author(s)
  Xiao Ting-Hui、Zhao Ziqiang、Zhou Wen、Takenaka Mitsuru、Tsang Hon Ki、Cheng Zhenzhou、Goda Keisuke
- Journal Title
  
  Photonics Research
  
  Volume: 6 Issue: 9 Pages: 925-925
- DOI
  10.1364/prj.6.000925
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K13798, KAKENHI-PROJECT-26220605
[Journal Article] Ultra-power-efficient 2 × 2 Si Mach-Zehnder interferometer optical switch based on III-V/Si hybrid MOS phase shifter2018
- Author(s)
  Li Q.、Han J.-H.、Ho C. P.、Takagi S.、Takenaka M.
- Journal Title
  
  Optics Express
  
  Volume: 26 Issue: 26 Pages: 35003-35003
- DOI
  10.1364/oe.26.035003
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17F17071
[Journal Article] Tunable Grating Coupler by Thermal Actuation and Thermo-Optic Effect2018
- Author(s)
  Ho Chong Pei、Zhao Ziqiang、Li Qiang、Takagi Shinichi、Takenaka Mitsuru
- Journal Title
  
  IEEE Photonics Technology Letters
  
  Volume: 30 Issue: 17 Pages: 1503-1506
- DOI
  10.1109/lpt.2018.2857469
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17F17071
[Journal Article] Low-loss graphene-based optical phase modulator operating at mid-infrared wavelength2018
- Author(s)
  Y. Yamaguchi, S. Takagi, and M. Takenaka
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 57 Issue: 4S Pages: 04FH06-04FH06
- DOI
  10.7567/jjap.57.04fh06
- NAID
  210000148944
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26220605
[Journal Article] Numerical analysis of carrier-depletion InGaAsP optical modulator with lateral PN junction formed on III-V-on-insulator wafer2017
- Author(s)
  N. Sekine, J.-H. Jan, S. Takagi, and M. Takenaka
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 56 Issue: 4S Pages: 04CH09-04CH09
- DOI
  10.7567/jjap.56.04ch09
- NAID
  210000147623
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26709022
[Journal Article] Focusing subwavelength grating coupler for mid-infrared suspended membrane germanium waveguides2017
- Author(s)
  J. Kang, Z. Cheng, W. Zhou, T.-H. Xiao, K.-L. Gopalakrisna, M. Takenaka, H. K. Tsang, and K. Goda
- Journal Title
  
  Optics Letters
  
  Volume: 42 Issue: 11 Pages: 2094-2097
- DOI
  10.1364/ol.42.002094
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Journal Article] InP-based photonic integrated circuit platform on SiC wafer2017
- Author(s)
  M. Takenaka and S. Takagi
- Journal Title
  
  Optics Express
  
  Volume: 25 Issue: 24 Pages: 29993-30000
- DOI
  10.1364/oe.25.029993
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26709022
[Journal Article] Heterogeneous CMOS Photonics Based on SiGe/Ge and III-V Semiconductors Integrated on Si Platform2017
- Author(s)
  Mitsuru Takenaka,Younghyun Kim, Jaehoon Han, Jian Kang, Yuki Ikku, Yongpeng Cheng, Jinkwon Park, Misa Yoshida, Seiya Takashima, Shinich Takagi
- Journal Title
  
  IEEE Journal of Selected Topics in Quantum Electronics
  
  Volume: 23 Issue: 3 Pages: 8200713-8200713
- DOI
  10.1109/jstqe.2017.2660884
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15J08956, KAKENHI-PROJECT-26709022
[Journal Article] Efficient low-loss InGaAsP/Si hybrid MOS optical modulator2017
- Author(s)
  J.-H. Han, F. Boeuf, J. Fujikata, S. Takahashi, S. Takagi, and M. Takenaka
- Journal Title
  
  Nature Photonics
  
  Volume: 11 Issue: 8 Pages: 486-490
- DOI
  10.1038/nphoton.2017.122
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26709022
[Journal Article] Mid-infrared germanium photonic crystal cavity2017
- Author(s)
  T. H. Xiao, Z. Zhao, W. Zhou, M. Takenaka, H. K. Tsang, Z. Cheng, and K. Goda
- Journal Title
  
  Optics Letters
  
  Volume: 42 Issue: 15 Pages: 2882-2885
- DOI
  10.1364/ol.42.002882
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220605
[Journal Article] Benchmarking Si, SiGe and III-V/Si hybrid SIS Optical Modulators for Datacenter Applications2017
- Author(s)
  F. Boeuf, J.-H. Han, S. Takagi, and M. Takenaka
- Journal Title
  
  J. Light. Technol.
  
  Volume: 35 Issue: 18 Pages: 4047-4055
- DOI
  10.1109/jlt.2017.2728365
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26709022
[Journal Article] Evaluation of mobility degradation factors and performance improvement of ultrathin-body Germanium-on-insulator (GOI) MOSFETs by GOI thinning using plasma oxidation2016
- Author(s)
  X. Yu, J. Kang, M. Takenaka and S. Takagi
- Journal Title
  
  IEEE Trans. Electron Devices,
  
  Volume: 64 Issue: 4 Pages: 1418-1425
- DOI
  10.1109/ted.2017.2662217
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Challenges and opportunities of near and mid-infrared photonics based on SiGe and Ge2016
- Author(s)
  M. Takenaka, Y. Kim, J. Han, J. Kang, and S. Takagi
- Journal Title
  
  ECS Trans.
  
  Volume: 75 Issue: 8 Pages: 447-459
- DOI
  10.1149/07508.0447ecst
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26220605, KAKENHI-PROJECT-26709022
[Journal Article] Properties of slow traps of ALD Al2O3/GeOx/Ge nMOSFETs with plasma post oxidation2016
- Author(s)
  M. Ke, X. Yu, C. Chang, M. Takenaka and S. Takagi
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 109 Issue: 3 Pages: 032101-032101
- DOI
  10.1063/1.4958890
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Characterization of ultrathin-body Germanium-on-insulator (GeOI) structures and MOSFETs on flipped Smart-Cut GeOI substrates2016
- Author(s)
  X. Yu, J. Kang, R. Zhang, M. Takenaka and S. Takagi
- Journal Title
  
  Solid-State Electronics
  
  Volume: 115 Pages: 120-125
- DOI
  10.1016/j.sse.2015.08.021
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] InGaAsP variable optical attenuator with lateral P-I-N junction formed by Ni-InGaAsP and Zn diffusion on III-V on insulator wafer2016
- Author(s)
  J.-K. Park, J. Han, M. Takenaka, and S. Takagi
- Journal Title
  
  MRS Advances
  
  Volume: 48 Issue: 48 Pages: 3295-3300
- DOI
  10.1557/adv.2016.339
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26709022
[Journal Article] Analysis of interface trap density of plasma post-nitrided Al2O3/SiGe MOS interface with high Ge content using high-temperature conductance method2016
- Author(s)
  J. Han, M. Takenaka, and S. Takagi
- Journal Title
  
  J. Appl. Phys.
  
  Volume: 120 Issue: 12 Pages: 125707-125707
- DOI
  10.1063/1.4963877
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26220605, KAKENHI-PROJECT-14J09221
[Journal Article] III-V/Ge MOS Device Technologies for Low Power Integrated Systems2016
- Author(s)
  S. Takagi, M. Noguchi, M. Kim, S.-H. Kim, C.-Y. Chang, M. Yokoyama, K. Nishi, R. Zhang, M. Ke and M. Takenaka
- Journal Title
  
  Solid State Electron.
  
  Volume: 125 Pages: 82-102
- DOI
  10.1016/j.sse.2016.07.002
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Impact of Postdeposition Annealing Ambient on the Mobility of Ge nMOSFETs with 1-nm EOT Al2O3/GeOx/Ge Gate-Stacks2016
- Author(s)
  R. Zhang, X. Yu, M. Takenaka and S. Takagi
- Journal Title
  
  IEEE Trans. Electron Devices
  
  Volume: 63 Issue: 2 Pages: 558-564
- DOI
  10.1109/ted.2015.2509961
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Low temperature formation of higher-k cubic phase HfO2 by atomic layer deposition on GeOx/Ge structures fabricated by in-situ thermal oxidation2016
- Author(s)
  R. Zhang, P. C. Huang, N. Taoka, M. Yokoyama, M. Takenaka and S. Takagi
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 108 Issue: 5 Pages: 052903-052903
- DOI
  10.1063/1.4941538
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Effect of III-V on insulator structure on quantum well intermixing2016
- Author(s)
  S. Takashima, Y. Ikku, M. Takenaka, and S. Takagi
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 55 Issue: 4S Pages: 04EH13-04EH13
- DOI
  10.7567/jjap.55.04eh13
- NAID
  210000146360
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26709022
[Journal Article] III-V/Ge MOS Device Technologies for Low Power Integrated Systems2016
- Author(s)
  S. Takagi, M. Noguchi, M. Kim, S.-H. Kim, C.-Y. Chang, M. Yokoyama, K. Nishi, R. Zhang, M. Ke and M. Takenaka
- Journal Title
  
  Solid-State Electronics
  
  Volume: 108
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Novel Ge waveguide platform on Ge-on-insulator wafer for mid-infrared photonic integrated circuits2016
- Author(s)
  J. Kang, M. Takenaka, and S. Takagi
- Journal Title
  
  Optics Express
  
  Volume: 24 Issue: 11 Pages: 11855-11864
- DOI
  10.1364/oe.24.011855
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26220605
[Journal Article] Low resistivity lateral P-I-N junction formed by Ni-InGaAsP alloy for carrier injection InGaAsP photonic devices2016
- Author(s)
  Jin-Kwon Park, Mitsuru Takenaka and Shinichi Takagi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 4S Pages: 04EH04-04EH04
- DOI
  10.7567/jjap.55.04eh04
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15J08956, KAKENHI-PROJECT-26709022
[Journal Article] Impact of thermal annealing on Ge-on-Insulator substrate fabricated by wafer bonding2016
- Author(s)
  J. Kang, X. Yu, M. Takenaka and S. Takagi
- Journal Title
  
  Materials Science in Semiconductor Processing
  
  Volume: 42 Pages: 259-263
- DOI
  10.1016/j.mssp.2015.07.021
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26220605
[Journal Article] Low-dark-current waveguide InGaAs metal-semiconductor-metal photodetector monolithically integrated with InP grating coupler on III–V CMOS photonics platform2016
- Author(s)
  Y. Cheng, Y. Ikku, M. Takenaka, and S. Takagi
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 55 Issue: 4S Pages: 04EH01-04EH01
- DOI
  10.7567/jjap.55.04eh01
- NAID
  210000146348
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26709022
[Journal Article] Quantitative evaluation of slow traps near Ge MOS interfaces by using time response of MOS capacitance2015
- Author(s)
  K. Tanaka, R. Zhang, M. Takenaka and S. Takagi
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 54
- NAID
  210000144949
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Tunneling FET Technologies Using III-V and Ge Materials2015
- Author(s)
  S. Takagi, M. Kim, M. Noguchi, K. Nishi, and M. Takenaka
- Journal Title
  
  ECS Transactions
  
  Volume: 69 (10) Issue: 10 Pages: 99-108
- DOI
  10.1149/06910.0099ecst
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Properties of ultrathin-body condensation Ge-On-Insulator films thinned by additional thermal oxidation2015
- Author(s)
  W.-K. Kim, M. Takenaka and S. Takagi
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 54 Issue: 4S Pages: 04DA05-04DA05
- DOI
  10.7567/jjap.54.04da05
- NAID
  210000144952
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] III-V/Ge Channel MOS Device Technologies in Nano CMOS era2015
- Author(s)
  S. Takagi, R. Zhang, J. Suh, S.-H. Kim, M. Yokoyama, K. Nishi and M. Takenaka
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 54 Issue: 6S1 Pages: 06FA01-06FA01
- DOI
  10.7567/jjap.54.06fa01
- NAID
  210000145217
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] MOS Interface Control Technologies for Advanced III-V/ Ge Devices2015
- Author(s)
  S. Takagi, C. Y. Chang, M. Yokoyama, K. Nishi, R. Zhang, M. Ke, J. H. Han, and M. Takenaka
- Journal Title
  
  ECS Transactions
  
  Volume: 69(5) Issue: 5 Pages: 37-51
- DOI
  10.1149/06905.0037ecst
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Ultrathin body Germanium-on-insulator (GeOI) Pseudo-MOSFETs fabricated　by transfer of epitaxial Ge films on III-V substrates2015
- Author(s)
  X. Yu, R. Zhang, J. Kang, T. Maeda, T. Itatani, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Journal Title
  
  ECS Solid State Letters
  
  Volume: 4 Issue: 2 Pages: P15-P18
- DOI
  10.1149/2.0031502ssl
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] “Impact of back interface passivation on electrical properties of ultrathin-body Germanium-on-insulator (GeOI) MOSFETs2015
- Author(s)
  X. Yu, J. Kang, R. Zhang, W.-L. Cai, M. Takenaka and S. Takagi
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 147 Pages: 196-200
- DOI
  10.1016/j.mee.2015.04.063
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Surface leakage reduction in MSM InGaAs photodetector on III-V CMOS photonics platform2015
- Author(s)
  Y. Cheng, Y. Ikku, M. Takenaka, and S. Takagi,
- Journal Title
  
  IEEE Photonics Technology Letters
  
  Volume: 27 Issue: 14 Pages: 120-125
- DOI
  10.1109/lpt.2015.2432052
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26709022
[Journal Article] Fabrication and MOS interface properties of ALD AlYO3/GeOx/Ge gate stacks with plasma post oxidation2015
- Author(s)
  M. Ke, X. Yu, R. Zhang, J. Kang, C. Chang, M. Takenaka and S. Takagi
- Journal Title
  
  Microelectron. Eng.
  
  Volume: 147 Pages: 244-248
- DOI
  10.1016/j.mee.2015.04.079
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Suppression of dark current in GeOx-passivated germanium metal-semiconductor-metal photodetector by plasma post-oxidation2015
- Author(s)
  J. Kang, R. Zhang, M. Takenaka, and S. Takagi
- Journal Title
  
  Optics Express Letters
  
  Volume: 23 Issue: 13 Pages: 16967-16976
- DOI
  10.1364/oe.23.016967
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26220605
[Journal Article] Effects of additional oxidation after Ge condensation on electrical properties of germanium-on-insulator p-channel MOSFETs2015
- Author(s)
  J.-K. Suh, N. Taoka, M. Takenaka and S. Takagi
- Journal Title
  
  Solid-State Electronics
  
  Volume: 117 Pages: 77-87
- DOI
  10.1016/j.sse.2015.11.014
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Fabrication and MOS interface properties of ALD AlYO3/GeOx/Ge gate stacks with plasma post oxidation2015
- Author(s)
  M. Ke, X. Yu, R. Zhang, J. Kang, C. Chang, M. Takenaka and S. Takagi
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 147
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Direct wafer bonding technology for large-scale InGaAs-on-insulator transistors2014
- Author(s)
  S.H. Kim., Y. Ikku, M. Yokoyama, R. Nakane, J. Li, Y.-C. Kao, M. Takenaka, and S. Takagi
- Journal Title
  
  Appl. Phys. Lett
  
  Volume: 105 Issue: 4 Pages: 043504-043504
- DOI
  10.1063/1.4891493
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26709022
[Journal Article] Impact of Channel Orientation on Electrical Properties of Ge p- and n-MOSFETs with 1-nm EOT Al2O3/GeOx/Ge Gate-Stacks Fabricated by Plasma Postoxidation2014
- Author(s)
  R. Zhang, X. Yu, M. Takenaka and S. Takagi
- Journal Title
  
  IEEE Trans. Electron Devices
  
  Volume: 61 Issue: 11 Pages: 3668-3675
- DOI
  10.1109/ted.2014.2359678
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Material Challenges and Opportunities in Ge/III-V channel MOSFETs2014
- Author(s)
  S. Takagi, S.-H. Kim, M. Yokoyama, K. Nishi, R. Zhang and M. Takenaka
- Journal Title
  
  ECS Transaction
  
  Volume: 64 Issue: 11 Pages: 99-110
- DOI
  10.1149/06411.0099ecst
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Sb-Doped S/D Ultrathin body Ge-On-insulator nMOSFET fabricated by improved Ge condensation process2014
- Author(s)
  W.-K. Kim, K. Kuroda, T. Osada, M. Hata, M. Takenaka and S. Takagi
- Journal Title
  
  IEEE Trans. Electron Devices
  
  Volume: 61 Issue: 10 Pages: 3379-3385
- DOI
  10.1109/ted.2014.2350457
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] Impact of plasma postoxidation temperature on the electrical properties of Al_2O_3/GeO_X/Ge pMOSFETs and nMOSFETs2014
- Author(s)
  R. Zhang, J-C. Lin, X. Yu, M. Takenaka, S. Takagi
- Journal Title
  
  IEEE Transaction on Electron Devices
  
  Volume: 61 Issue: 2 Pages: 416-422
- DOI
  10.1109/ted.2013.2295822
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J09309, KAKENHI-PROJECT-22000011, KAKENHI-PROJECT-23246058
[Journal Article] Physical Origins of High Normal Field Mobility Degradation in Ge p- and n-MOSFETs with GeOx/Ge MOS Interfaces Fabricated by Plasma Post Oxidation2014
- Author(s)
  R. Zhang, X. Yu, M. Takenaka and S. Takagi
- Journal Title
  
  IEEE Trans. Electron Devices
  
  Volume: 61 Issue: 7 Pages: 2316-2323
- DOI
  10.1109/ted.2014.2325604
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249038
[Journal Article] InGaAs MSM photodetector monolithically integrated with InP photonic-wire waveguide on III-V CMOS photonics platform2014
- Author(s)
  Y. Cheng, Y. Ikku, M. Takenaka, and S. Takagi
- Journal Title
  
  IEICE Electron. Express
  
  Volume: 11 Issue: 16 Pages: 20140609-20140609
- DOI
  10.1587/elex.11.20140609
- NAID
  130004678211
- ISSN
  1349-2543
- Language
  English
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26709022
[Journal Article] III-V CMOS フォトニクスを用いた光電子融合集積回路プラットフォーム技術2014
- Author(s)
  竹中充, 一宮佑希, 程勇鵬, 金相賢, 高木信一
- Journal Title
  
  電子情報通信学会和文論文誌C
  
  Volume: vol.J97-C, No.3 Pages: 95-103
- Data Source
  KAKENHI-PROJECT-22686034
[Journal Article] III-V CMOSフォトニクスを用いた光電子融合集積回路プラットフォーム技術2014
- Author(s)
  竹中充，一宮佑希，程勇鵬，金相賢，高木　信一
- Journal Title
  
  電子情報通信学会和文論文誌C
  
  Volume: J97-C Pages: 95-103
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22686034
[Journal Article] Physical understanding of electron mobility in asymmetrically strained InGaAs-on-insulator metal-oxide-semiconductor field-effect transistors fabricated by lateral strain relaxation2014
- Author(s)
  S. H. Kim, M. Yokoyama, N. Taoka, R. Nakane, T. Yasuda, H. Yamada, N. Fukuhara, M. Hata, M. Takenaka and S. Takagi
- Journal Title
  
  Applied Physics Letters
  
  Volume: 104 Issue: 11 Pages: 113509-113509
- DOI
  10.1063/1.4869221
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J07612, KAKENHI-PROJECT-22686034
[Journal Article] III-V/Ge MOS Transistor Technologies for Future ULSI (invited)2013
- Author(s)
  S. Takagi and M. Takenaka
- Journal Title
  
  ECS Transactions
  
  Volume: 54 (1) Pages: 39-54
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] Impact of Fermi level pinning due to interface traps inside conduction band on the inversion-layer mobility in InxG_a_<1-x> As metal-oxide-semiconductor field effect transistors2013
- Author(s)
 N. Taoka, M. Yokoyama, S. -H. Kim, R. Suzuki, S. Lee, R. Iida, T. Hoshii, W. Jevasuwan, T. Maeda, T. Yasuda, O. Ichikawa, N. Fukuhara, M. Hata, M. Takenaka, and S. Takagi
- Journal Title
 
 IEEE Transactions on device and materials reliability
 
 Volume: 13 Issue: 4 Pages: 456-462
- DOI
 10.1109/tdmr.2013.2289330
- Peer Reviewed
- Data Source
 KAKENHI-PROJECT-12J07612, KAKENHI-PROJECT-22686034
[Journal Article] Performance Enhancement Technologies in III-V/Ge MOSFETs (invited)2013
- Author(s)
  S. Takagi, M. Yokoyama, S.-H. Kim, R. Zhang and M. Takenaka
- Journal Title
  
  ECS Transactions
  
  Volume: 58(9) Pages: 137-148
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] Impact of Fermi level pinning inside conduction band on electron mobility in InGaAs metal-oxide-semiconductor field-effect transistors2013
- Author(s)
  N. Taoka, M. Yokoyama, S. -H. Kim, R. Suzuki, S. Lee, R. Iida, T. Hoshii, W. Jevasuwan, T. Maeda, T. Yasuda, O. Ichikawa, N. Fukuhara, M. Hata, M. Takenaka, and S. Takagi
- Journal Title
  
  Applied Physics Letters
  
  Volume: 103 Issue: 14 Pages: 143509-143509
- DOI
  10.1063/1.4824474
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J07612, KAKENHI-PROJECT-22686034
[Journal Article] III-V/Ge CMOS device technologies for high performance logic applications (invited)2013
- Author(s)
  S. Takagi, M. Yokoyama, S.-H. Kim, R. Suzuki, R. Zhang, N. Taoka, and M. Takenaka
- Journal Title
  
  ECS Transactions
  
  Volume: 53 (3) Pages: 85-96
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] High Mobility Ge p- and n-MOSFETs with 0.7 nm EOT using HfO2/Al2O3/GeOx/Ge gate stacks fabricated by plasma post oxidation2013
- Author(s)
  R. Zhang, P.-C. Huang, J.-C. Lin, N. Taoka, M. Takenaka, and S. Takagi
- Journal Title
  
  IEEE Trans. Electron Devices
  
  Volume: 60 Pages: 927-934
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22000011
[Journal Article] Ge gate stacks based on Ge oxide interfacial layers and the impact on MOS device properties2013
- Author(s)
  S.Takagi, R.Zhang, and M.Takenaka
- Journal Title
  
  Micoroelectron. Eng.
  
  Volume: 109 Pages: 389-395
- DOI
  10.1016/j.mee.2013.04.034
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] III-V/Ge CMOS device technologies for high performance logic applications2013
- Author(s)
  S.Takagi, M.Yokoyama, S.-H.Kim, R.Suzuki, R.Zhang, N.Taoka and M.Takenaka
- Journal Title
  
  ECS Trans.
  
  Volume: 53(3) Issue: 3 Pages: 85-96
- DOI
  10.1149/05303.0085ecst
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] Invited : III-V/Ge MOS transistor technologies for future ULSI future IC technology and novel devices2013
- Author(s)
  S. Takagi and M. Takenaka
- Journal Title
  
  ECS Trans.
  
  Volume: VOL. 54 Issue: 1 Pages: 39-54
- DOI
  10.1149/05401.0039ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22000011, KAKENHI-PROJECT-22686034, KAKENHI-PROJECT-23246058
[Journal Article] High Mobility Ge p- and n-MOSFETs with 0.7 nm Ultrathin EOT using HfO2/Al2O3/GeOx/Ge Gate Stacks Fabricated by Plasma Post Oxidation2013
- Author(s)
  R.Zhang, P.-C.Huang, J.-C.Lin, N.Taoka, M.Takenaka and S.Takagi
- Journal Title
  
  IEEE Trans. Electron Devices
  
  Volume: vol.60, no.3 Issue: 2 Pages: 927-934
- DOI
  10.1109/ted.2011.2176495
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] ductor-compatible IIInGaAsP grating couplers fabricated using complementary-metal-oxide-semiconI-V-on-insulator on Si2013
- Author(s)
  Mitsuru Takenaka, Masafumi Yokoyama, Masakazu Sugiyama, Yoshiaki Nakano, and Shinichi Takagi
- Journal Title
  
  Applied Physics Express
  
  Volume: vol. 6 Issue: 4 Pages: 42501-42501
- DOI
  10.7567/apex.6.042501
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226008, KAKENHI-PROJECT-22686034
[Journal Article] Limiting factors of channel mobility in III-V/Ge MOSFETs2013
- Author(s)
  S.Takagi, M.S.-H.Kim, R.Zhang, N.Taoka, Yokoyama and M.Takenaka
- Journal Title
  
  ECS Trans.
  
  Volume: 53(3) Issue: 3 Pages: 97-105
- DOI
  10.1149/05303.0003ecst
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] High Mobility CMOS Technologies using III-V/Ge Channels on Si platform2013
- Author(s)
  S. Takagi, S. -H. Kim, M. Yokoyama, R. Zhang, N. Taoka, Y. Urabe, T. Yasuda, H. Yamada, O. Ichikawa, N. Fukuhara, M. Hata and M. Takenaka
- Journal Title
  
  Solid Stale Electronics
  
  Volume: 88 Pages: 2-8
- DOI
  10.1016/j.sse.2013.04.020
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J07612, KAKENHI-PROJECT-23246058
[Journal Article] Impact of plasma post oxidation temperature on interface trap density and roughness at GeOx/Ge interfaces2013
- Author(s)
  R. Zhang, J. C. Lin, X. Yu, M. Takenaka, S. Takagi
- Journal Title
  
  Microelectron. Eng.
  
  Volume: 109 Pages: 97-100
- DOI
  10.1016/j.mee.2013.03.034
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J09309, KAKENHI-PROJECT-23246058
[Journal Article] Biaxially strained Extremely-thin Body I_<n0.53>G_<a0.47>As-On-Insulator MOSFETs on Si substrates and Physical Understanding on their electron mobility2013
- Author(s)
 S. -H. Kim, M. Yokoyama, R. Nakane, O. Ichikawa, T. Osada, M. Hata, M. Takenaka and S. Takagi
- Journal Title
 
 Journal of Applied Physics
 
 Volume: 114 Issue: 16 Pages: 164512-164512
- DOI
 10.1063/1.4828481
- Peer Reviewed
- Data Source
 KAKENHI-PROJECT-12J07612, KAKENHI-PROJECT-22686034
[Journal Article] Limiting factors of channel mobility in III-V/Ge MOSFETs2013
- Author(s)
  S. Takagi, M. S.-H. Kim, R. Zhang, N. Taoka, Yokoyama and M. Takenaka
- Journal Title
  
  ECS Transactions
  
  Volume: 53 (3) Pages: 97-105
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] Atomic layer-by-layer oxidation of Ge (100) and (111) surfaces by plasma post oxidation of Al2O3/Ge structures2013
- Author(s)
  R. Zhang, P.-C. Huang, J.-C. Lin, M. Takenaka and S. Takagi
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 102 Issue: 8 Pages: 81603-81603
- DOI
  10.1063/1.4794013
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22000011, KAKENHI-PROJECT-23246058
[Journal Article] Invited : Performance enhancement technologies in III-V/Ge MOSFETs Ge-based and III-V technologies2013
- Author(s)
  S. Takagi, Rui Zhang, S. -H. Kim, M. Yokoyama, and M. Takenaka
- Journal Title
  
  ECS Trans.
  
  Volume: VOL. 59 Issue: 9 Pages: 137-148
- DOI
  10.1149/05809.0137ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22000011, KAKENHI-PROJECT-22686034, KAKENHI-PROJECT-23246058
[Journal Article] MOS interface control of high mobility channel materials for realizing ultrathin EOT gate stacks2012
- Author(s)
  S.Takagi, R.Zhang, R.Suzuki N.Taoka, M.Yokoyama and M.Takenaka
- Journal Title
  
  ECS Trans.
  
  Volume: 50(4) Issue: 4 Pages: 107-122
- DOI
  10.1149/05004.0107ecst
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] High-mobility Ge pMOSFET with 1-nm EOT Al2O3/GeOx/Ge gate stack fabricated by plasma post oxidation2012
- Author(s)
  R. Zhang, T. Iwasaki, N. Taoka, M. Takenaka, and S. Takagi
- Journal Title
  
  IEEE Trans. Electron Devices
  
  Volume: 59 Pages: 335-341
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22000011
[Journal Article] Electron mobility enhancement of extremely thin body In_<0.7>Ga_<0.3>As-on-insulator metal-oxide-semiconductor field-effect transistors on Si substrates by metal-oxide-semiconductor interface buffer layers2012
- Author(s)
 S. H. Kim, M. Yokoyama, N. Taoka, R. Iida, S. Lee, R. Nakane, Y. Urabe, N. Miyata, T. Yasuda, H. Yamada, N. Fukuhara, M. Hata, M. Takenaka, and S. Takagi
- Journal Title
 
 Appl. Phys. Express
 
 Volume: Vol.5 Issue: 1 Pages: 14201-14201
- DOI
 10.1143/apex.5.014201
- NAID
 10030154895
- Peer Reviewed
- Data Source
 KAKENHI-PROJECT-22686034
[Journal Article] Low-driving-current InGaAsP photonic-wire optical switches using III-V CMOS photonics platform2012
- Author(s)
  Y. Ikku, M. Yokoyama, O. Ichikawa, M. Hata, M. Takenaka, and S. Takagi
- Journal Title
  
  Optics Express Letters
  
  Volume: vol.20, no.26 Issue: 26 Pages: B357-B357
- DOI
  10.1364/oe.20.00b357
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22686034
[Journal Article] Evidence of layer-by-layer oxidation of Ge surfaces by plasma oxidation through Al2O32012
- Author(s)
  R.Zhang, P.-C.Huang, M.Takenaka and S.Takagi
- Journal Title
  
  ECS Trans.
  
  Volume: 50(9) Issue: 9 Pages: 699-706
- DOI
  10.1149/05009.0699ecst
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] Impact of GeOx interfacial layer thickness on Al2O3/Ge MOS interface properties2011
- Author(s)
  R. Zhang, T. Iwasaki, N. Taoka, M. Takenaka, S. Takagi
- Journal Title
  
  Microelecton. Engineering
  
  Volume: 88 Issue: 7 Pages: 1533-1536
- DOI
  10.1016/j.mee.2011.03.130
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22000011, KAKENHI-PROJECT-23246058
[Journal Article] Suppression of ALD-induced degradation of Ge MOS interface properties by low power plasma nitridation of GeO22011
- Author(s)
  R. Zhang, T. Iwasaki, N. Taoka, M. Takenaka, and S. Takagi
- Journal Title
  
  J. Electrochem. Soc.
  
  Volume: 158 Issue: 8 Pages: G178-G178
- DOI
  10.1149/1.3599065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22000011, KAKENHI-PROJECT-23246058
[Journal Article] High performance extremely thin body InGaAs-on-insulator metal-oxide semiconductor field-effect transistors on Si substrates with Ni-InGaAs metal source/drain2011
- Author(s)
  S. H. Kim, M. Yokoyama, N. Taoka, R. Iida, S. Lee, R. Nakane, Y. Urabe, N. Miyata, T. Yasuda, H. Yamada, N. Fukuhara, M. Hata, M. Takenaka, and S. Takagi
- Journal Title
  
  Appl. Phys. Express
  
  Volume: Vol.4 Issue: 11 Pages: 114201-114201
- DOI
  10.1143/apex.4.114201
- NAID
  10030153611
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22686034
[Journal Article] Suppression of Interface State Generation in Si MOSFETs with Biaxially-Tensile Strain2011
- Author(s)
  Y.Zhao, M.Takenaka, S.Takagi
- Journal Title
  
  in Electron Device Letters 32(accepted)
- Data Source
  KAKENHI-PROJECT-20246055
[Journal Article] Prospective and critical issues of III-V/Ge CMOS on Si platform2011
- Author(s)
  S.Takagi and M.Takenaka
- Journal Title
  
  ECS Trans.
  
  Volume: 35(3) Issue: 3 Pages: 279-298
- DOI
  10.1149/1.3569921
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] High Mobility Ge-based CMOS Device Technologies2011
- Author(s)
  S.Takagi, S.Dissanayake and M.Takenaka
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vol.470 Pages: 1-7
- DOI
  10.4028/www.scientific.net/kem.470.1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] Device and integration technologies of III-V/Ge channel CMOS2011
- Author(s)
  S.Takagi, M.Yokoyama, Y.-H.Kim and M.Takenaka
- Journal Title
  
  ECS Trans.
  
  Volume: 41(7) Issue: 7 Pages: 203-218
- DOI
  10.1149/1.3633300
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] Al_2O_3/GeO_x/Ge gate stacks with low interface trap density fabricated by electron cyclotron resonance plasma postoxidation2011
- Author(s)
  R.Zhang, T.Iwasaki, N.Taoka, M.Takenaka, S.Takagi
- Journal Title
  
  Appl.Phys.Lett.
  
  Volume: 98
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22000011
[Journal Article] Highly strained-SiGe-on-insulator p-channel metal-oxide-semiconductor field-effective transistors fabricated by applying Ge condensation technique to strained-Si-on-insulator substrates2011
- Author(s)
  J. Suh, R. Nakane, N. Taoka, M. Takenaka, and S. Takagi
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 99 Issue: 14 Pages: 142108-142108
- DOI
  10.1063/1.3647631
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22000011, KAKENHI-PROJECT-23246058
[Journal Article] Al2O3/GeOx/Ge Gate Stacks with Low Interface Trap Density Fabricated by Electron Cyclotron Resonance Plasma Post Oxidation2011
- Author(s)
  R.Zhang, T.Iwasaki, N.Taoka, M.Takenaka and S.Takagi
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: vol.98 Issue: 11 Pages: 112902-112902
- DOI
  10.1063/1.3564902
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] MOS interface control technologies for III-V/Ge channel MOSFETs2011
- Author(s)
  S.Takagi, R.Zhang, T.Hoshii and M.Takenaka
- Journal Title
  
  ECS Trans.
  
  Volume: 41(3) Issue: 3 Pages: 3-20
- DOI
  10.1149/1.3633015
- Data Source
  KAKENHI-PROJECT-23246058
[Journal Article] Novel Characterization Scheme of Si/SiO_2 Interface Roughness for Surface Roughness Scattering-limited Mobilities of Electrons and Holes in Unstrained-and Strained-Si MOSFETs2010
- Author(s)
  Y.Zhao, H.Matsumoto, T.Sato, S.Koyama, M.Takenaka, S.Takani
- Journal Title
  
  IEEE Trans.Electron Devices
  
  Volume: 57 Pages: 2057-2066
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20246055
[Journal Article] A Novel Characterization Scheme of Si/SiO2 Interface Roughness for Surface Roughness Scattering-limited Mobilities of Electrons and Holes in Unstrained- and Strained-Si MOSFETs2010
- Author(s)
  Y.Zhao, H.Matsumoto T.Sato, S.Koyama, M.Takenaka, S.Takagi
- Journal Title
  
  IEEE Trans.Electron Devices 57
  
  Pages: 2057-2066
- Data Source
  KAKENHI-PROJECT-20246055
[Journal Article] High Performance Ultrathin(110)-Oriented Ge-On-Insulator pMOSFETs Fabricated by Ge Condensation Technique2010
- Author(s)
  S.Dissanayake, S.Sugahara, M.Takenaka, S.Takagi
- Journal Title
  
  Applied Physics Express 3
  
  Pages: 41302-41302
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Experimental Determination of Shear Stress induced Electron Mobility Enhancements in Si and Biaxially Strained-Si Metal-Oxide-Semiconductor Field-Fffect Transistors2010
- Author(s)
  O.Weber, M.Takenaka, S.Takagi
- Journal Title
  
  Jpn.J.Appl.Rhys.
  
  Volume: 49 Pages: 74101-74101
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20246055
[Journal Article] Experimental Determination of Shear Stress induced Electron Mobility Enhancements in Si and Biaxially Strained-Si Metal Oxide Semiconductor Field-Effect Transistors2010
- Author(s)
  O.Weber, M.Takenaka, S.Takagi
- Journal Title
  
  Jpn.J.Appl.Phys. 49
  
  Pages: 74101-74101
- NAID
  40017216105
- Data Source
  KAKENHI-PROJECT-20246055
[Journal Article] Ge/III-V Channel Engineering for future CMOS2009
- Author(s)
  S.Takagi, M.Sugiyama, T.Yasuda, M.Takenaka
- Journal Title
  
  ECS Transactions 19
  
  Pages: 9-20
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Evaluation of Electron and Hole Mobility at Identical Metal-Oxide-Semiconductor Interfaces by using Metal Source/Drain Ge-On-Insulator Metal-Oxide-Semiconductor Field-Effect Transistors2009
- Author(s)
  K.Morii, S.Dissanayake, S.Tanabe, R.Nakane, M.Takenaka, S.Sugahara, S.Takagi
- Journal Title
  
  Japanese Journal of Applied Physics 48
- NAID
  210000066561
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Interfacial Control and Electrical Properties of Ge MOS structures2009
- Author(s)
  S. Takagi, N. Taoka, M. Takenaka
- Journal Title
  
  ECS Trans. vol.19,no.2
  
  Pages: 67-85
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Ge/III-V Channel Engineering for future CMOS2009
- Author(s)
  S. Takagi, M. Sugiyama, T. Yasuda, M. Takenaka
- Journal Title
  
  ECS Trans. vol.19,no.5
  
  Pages: 9-20
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Investigation of InAlAs oxide/InP metal-oxide-semiconductor structures formed by wet thermal oxidation2009
- Author(s)
  S. Nakagawa, M. Yokoyama, O. Ichikawa, M. Hata, M. Tanaka, M. Takenaka. S. Takagi
- Journal Title
  
  Japanese Journal of Applied Physics 48(掲載確定in press)
- NAID
  210000066604
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19860024
[Journal Article] On Surface Roughness Scattering-limited Mobilities of Electrons and Holes in Biaxially-tensile Strained Si MOSFETs2009
- Author(s)
  Y.Zhao, M.Takenaka, S.Takagi
- Journal Title
  
  IEEE Electron Device Letters 30
  
  Pages: 987-989
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20246055
[Journal Article] Investigation of InAlAs oxide/InP metal-oxide-semiconductor structures formed bywet thermal oxidation2009
- Author(s)
  S. Nakagawa, M. Yokoyama, O. Ichikawa, M.Hata, M. Tanaka, M. Takenaka, S. Takagi
- Journal Title
  
  Japanese Journal ofApplied Physics (JJAP) vol.48, No.2
- Data Source
  KAKENHI-PROJECT-19860024
[Journal Article] Surface Orientation Dependence of Interface Properties of GeO2/Ge metal-oxide-semiconductor Structures Fabricated by Thermal Oxidation2009
- Author(s)
  T.Sasada, Y.Nakakita, M.Takenaka, S.Takagi
- Journal Title
  
  Journal of Applied Physics 106
  
  Pages: 73716-73716
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] On Surface Roughness Scatteringlimited Mobilities of Electrons and Holes in Biaxially-tensile Strained Si MOSFETs2009
- Author(s)
  Y.Zhao, M.Takenaka, S.Takagi
- Journal Title
  
  IEEE Electron Device Letters 30
  
  Pages: 987-989
- Data Source
  KAKENHI-PROJECT-20246055
[Journal Article] Evaluation of Electron and Hole Mobility at Identical Metal-Oxide-Semiconductor Interfaces by using Metal Source/Drain Ge-On-Insulator Metal-Oxide- Semiconductor Field-Effect Transistors2009
- Author(s)
  K. Morii, S. Dissanayake, S. Tanabe, R. Nakane, M. Takenaka, S. Sugahara, S. Takagi
- Journal Title
  
  Jpn. J. Appl. Phys. vol.48,no.4
- NAID
  210000066561
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Surface Orientation Dependence of Interface Properties of GeO2/Ge metal-oxide-semiconductor Structures Fabricated by Thermal Oxidation2009
- Author(s)
  T. Sasada, Y. Nakakita, M. Takenaka, S. Takagi
- Journal Title
  
  J. Appl. Phys. vol.106
  
  Pages: 73716-73716
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Interfacial Control and Electrical Properties of Ge MOS structures2009
- Author(s)
  S.Takagi, N.Taoka, M.Takenaka
- Journal Title
  
  ECS Transactions 19
  
  Pages: 67-85
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Comprehensive Understanding of Coulomb Scattering Mobility in Biaxially-Strained Si MOSFETs2009
- Author(s)
  Y.Zhao, M.Takenaka, S.Takagi
- Journal Title
  
  IEEE Trans.Electron Devices 56
  
  Pages: 1152-1156
- Data Source
  KAKENHI-PROJECT-20246055
[Journal Article] (110) Ultra-thin GOI Layers Fabricated by Ge Condensation Method2008
- Author(s)
  S. Dissanayake, Y. Shuto, S. Sugahara, M. Takenaka, S. Takagi
- Journal Title
  
  Thin Solid Films Vol.517,Issue1
  
  Pages: 178-180
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Carrier-transport-enhanced channel CMOS for improved power consumption and performance2008
- Author(s)
  S. Takagi, T. Irisawa, T. Tezuka, T. Numata, S. Nakaharai, N. Hirashita, Y. Moriyama, K. Usuda, E. Toyoda, S. Dissanayake, M. Shichijo, R. Nakane, S. Sugahara, M. Takenaka and N. Sugiyama
- Journal Title
  
  IEEE Trans. Electron Devices(Invited Paper) Vol. 55, No. 1
  
  Pages: 21-39
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] (110) Ultra-thin GOI Layers Fabricated by Ge Condensation Method2008
- Author(s)
  S. Dissanayake, Y. Shuto, S. Sugahara, M. Takenaka and S. Takagi
- Journal Title
  
  Thin Solid Films Vol. 517, Issue 1
  
  Pages: 178-180
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Evidence of low interface trap density in GeO2/Ge Metal-Oxide-Semiconductor structures fabricated by thermal oxidation2008
- Author(s)
  H. Matsubara, T. Sasada, M. Takenaka and S. Takaai
- Journal Title
  
  Appl. Phys. Lett 93
  
  Pages: 32104-32104
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Evidence of low interface trap density in GeO2/Ge Metal-Oxide-Semiconductor structures fabricated by thermal oxidation2008
- Author(s)
  H. Matsubara, T. Sasada, M. Takenaka and S. Takagi
- Journal Title
  
  Appl. Phys. Lett. Vol. 93, Issue. 3
  
  Pages: 32104-32104
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Carrier-transport-enhanced channel CMOS for improved power consumption and performance (lnvited Paper)2008
- Author(s)
  S. Takagi, T. lrisawa, T. Tezuka, T.Numata, S. Nakaharai, N. Hirashita, Y. Moriyama, K. Usuda, E. Toyoda, S. Dissanayake, M. Shichijo, R. Nakane, S. Sugahara, M. Takenaka and N. Sugiyama
- Journal Title
  
  IEEE Transaction on Electron Devices 55
  
  Pages: 21-39
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Carrier-transport-enhanced channel CMOS for improved power consumption and performance2008
- Author(s)
  S. Takagi, T. Irisawa, T. Tezuka, T. Numata, S. Nakaharai, N. Hirashita, Y. Moriyama, K. Usuda, E. Toyoda, S. Dissanayake, M. Shichijo, R. Nakane, S. Sugahara, M. Takenaka, N. Sugiyama
- Journal Title
  
  IEEE Trans. Electron Devices Vol.55,No.1
  
  Pages: 21-39
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] Evidence of low interface trap density in GeO2/Ge Metal-Oxide- Semiconductor structures fabricated by thermal oxidation2008
- Author(s)
  H. Matsubara, T. Sasada, M. Takenaka, S. Takagi
- Journal Title
  
  Appl. Phys. Lett. Vol.93,Issue.3
  
  Pages: 32104-32104
- Data Source
  KAKENHI-PROJECT-18063005
[Journal Article] (110)Ultra-thin GOI Layers Fabricated by Ge Condensation Method2008
- Author(s)
  S. Dissanayake, Y. Shuto, S. Sugahara, M. Takenaka and S. Takagi
- Journal Title
  
  Thin Solid Films 517
  
  Pages: 178-180
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18063005
[Patent] ＭＯＳ型光変調器及びその製造方法2016
- Inventor(s)
  竹中充、韓在勲、高木信一
- Industrial Property Rights Holder
  竹中充、韓在勲、高木信一
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2016-160229
- Filing Date
  2016-08-17
- Data Source
  KAKENHI-PROJECT-26709022
[Patent] 半導体基板、半導体基板の製造方法および半導体装置2008
- Inventor(s)
  竹中充、高木信一、秦雅彦、市川磨
- Industrial Property Rights Holder
  国立大学法人東京大学、住友化学株式会社
- Filing Date
  2008-03-26
- Data Source
  KAKENHI-PROJECT-19860024
[Patent] 半導体基板, 半導体基板の製造方法および半導体装置2008
- Inventor(s)
  竹中充, 高木信一, 秦雅彦, 市川磨
- Industrial Property Rights Holder
  東京大学, 住友化学株式会社
- Filing Date
  2008-03-26
- Data Source
  KAKENHI-PROJECT-19860024
[Presentation] AI用シリコンプログラマブル光回路2024
- Author(s)
  竹中充
- Organizer
  電子情報通信学会総合大会
- Invited
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] 低損失光位相シフタに向けたSb2S3の最適成膜条件の探索2024
- Author(s)
  按田智大, 宮武悠人, 牧野孝太郎, 富永淳二, 宮田典幸, 岡野誠, トープラサートポンカシディット, 高木信一, 竹中充
- Organizer
  第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] 相変化材料Ge2Sb2Te3S2を用いたプログラマブル光回路2024
- Author(s)
  竹中充, 宮武悠人, 牧野孝太郎, 富永淳二, 宮田典幸, 中野隆志, 岡野誠, トープラサートポンカシディット, 高木信一
- Organizer
  レーザー学会第44回年次大会
- Invited
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] Photonic tensor core with low-insertion-loss, non-volatile Ge2Sb2Te3S2 intensity modulators2023
- Author(s)
  Y. Miyatake, R. Tang, K. Makino, J. Tominaga, N. Miyata, M. Okano, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  European Conference on Optical Communication (ECOC2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] Photonic matrix multiplication with Ge2Sb2Te3S2 intensity modulators,2023
- Author(s)
  Y. Miyatake, R. Tang, K. Makino, J. Tominaga, N. Miyata, M. Okano, K. Toprasertpong, S Takagi, and M. Takenaka
- Organizer
  13th International Symposium on Photonics and Electronics Convergence (ISPEC2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] Transparent in-line optical power monitor integrated with MOS optical phase shifter using InP/Si hybrid integration2023
- Author(s)
  T. Akazawa, K. Sumita, S. Monfray, F. Boeuf, K. Toprasertpong, S. Takagi, M. Takenaka
- Organizer
  European Conference on Optical Communication (ECOC2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] Ge2Sb2Te3S2を用いた不揮発性相変化中赤外光位相シフタ2023
- Author(s)
  宮武悠人, 牧野孝太郎, 富永淳二, 宮田典幸, 中野隆志, 岡野　誠, トープラサートポンカシディット, 高木信一, 竹中　充
- Organizer
  電気学会ナノエレクトロニクス機能化・応用技術調査専門委員会
- Invited
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] InP/Siハイブリッド光パワーモニタとMOS型光位相シフタの一体集積2023
- Author(s)
  赤澤智熙, 隅田圭, モンフレステファン, ブフフレデリック, トープラサートポンカシディット, 高木信一, 竹中充
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] Numerical evaluation of modulation bandwidth and insertion loss in InP-EO polymer hybrid optical modulator with doping optimization2023
- Author(s)
  H. Sakumoto, T. Nakayama, Y. Miyatake, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  International Conference on Solid State Devices and Materials (SSDM2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] FeFET 駆動型不揮発性ハイブリッドMOS 位相シフタの Endurance・Retention 特性2023
- Author(s)
  藤田将大, 唐睿, 湯涵智, トープラサートポンカシディット, 高木信一, 竹中充
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] III-V CMOS photonics platform for universal photonics applications2023
- Author(s)
  M. Takenaka, N. Sekine, K. Sumita, H. Sakumoto, S. Fu, K. Toprasertpong, and S. Takag
- Organizer
  th International Conference on Optics, Photonics, and Lasers (OPL2023)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] Optical power monitor for photonic integrated circuit using waveguide phototransistor2023
- Author(s)
  T. Akazawa, K. Sumita, S. Monfray, F. Boeuf, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  Photonic Device Workshop 2023 (PDW2023)
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] 異種材料集積シリコン光回路を用いた深層学習アクセラレータ2023
- Author(s)
  竹中充
- Organizer
  微小光学研究会
- Invited
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] Ge2Sb2Te3S2を用いた不揮発性相変化中赤外光位相シフタ2023
- Author(s)
  宮武悠人, 牧野孝太郎, 富永淳二, 宮田典幸, 中野隆志, 岡野　誠, トープラサートポンカシディット, 高木信一, 竹中　充
- Organizer
  電子情報通信学会シリコン材料・デバイス研究会（SDM）
- Invited
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Memory characteristics of FeFET-driven hybrid MOS optical phase shifter2023
- Author(s)
  M. Fujita, R. Tang, H. Tang, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  13th International Symposium on Photonics and Electronics Convergence (ISPEC2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] Heterogeneous integration of III-V and phase change material for Si programmable photonic integrated circuits2023
- Author(s)
  M. Takenaka
- Organizer
  13th International Symposium on Photonics and Electronics Convergence (ISPEC2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] 低挿入損失・不揮発性Ge2Sb2Te3S2強度変調器を用いた光行列演算2023
- Author(s)
  宮武悠人, 唐睿, 牧野孝太郎, 富永淳二, 宮田典幸, 岡野誠, トープラサートポンカシディット, 高木信一, 竹中充
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] Low-power add-drop microring resonator switch with positive/negative phase tuning using InGaAsP/Si hybrid MOS phase shifter2023
- Author(s)
  Y. Wakita, R. Tang, H. Tang, S. Ohno, T. Akazawa, Y. Miyatake, S. Monfray, F. Boeuf, K. Toprasertpong, S Takagi, M. Takenaka
- Organizer
  European Conference on Optical Communication (ECOC2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] Demonstration of add-drop ring resonator switch using InGaAsP/Si hybrid MOS phase shifter2023
- Author(s)
  Y. Wakita, R. Tang, H. Tang, S. Ohno, T. Akazawa, S. Monfray, F. Boeuf, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  13th International Symposium on Photonics and Electronics Convergence (ISPEC2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00172
[Presentation] ウェハ接合を用いた光集積回路およびコンピューティング応用2022
- Author(s)
  竹中　充
- Organizer
  電子実装工学研究所（IMSI）第3回会員会
- Invited
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] CAM-ESに基づく小型低損失2×2カプラの設計2022
- Author(s)
  宮武悠人, トープラサートポンカシディット, 高木信一, 竹中充
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Record-low loss non-volatile mid-infrared PCM optical phase shifter based on Ge2Sb2Te3S22022
- Author(s)
  Y. Miyatake, K. Makino, J. Tominaga, N. Miyata, T. Nakano, M. Okano, K. Toprasertpong, S. Takagi, M. Takenaka
- Organizer
  International Electron Devices Meeting (IEDM2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Compact, low-loss, fabrication-tolerant, and thermally stable 2x2 Si optical coupler designed by CMA-ES2022
- Author(s)
  Y. Miyatake, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  International Conference on Solid State Devices and Materials (SSDM2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Ge-on-insulator platform for mid-infrared photonic integrated circuits2022
- Author(s)
  M. Takenaka, Z. Zhao, T. Piyapatarakul, Y. Miyatake, K. Toprasertpong, and S. Takagi
- Organizer
  242th ECS Meeting
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] 極薄III-V族半導体を用いたSiハイブリッド光集積回路および光コンピューティング応用2022
- Author(s)
  竹中充
- Organizer
  学振R025産学協力委員会第11回研究会
- Invited
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Optimization of Compact and Low-loss 2×2 Si Optical Coupler based on CMA-ES2022
- Author(s)
  Y. Miyatake, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  12th International Symposium on Photonics and Electronics Convergence (ISPEC2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Numerical analysis of III-V MOS optical modulator with graphene transparent electrode for efficient phase modulation2022
- Author(s)
  Tipat Piyapatarakul, Hanzhi Tang, Kasidit Toprasertpong, Shinichi Takagi, Mitsuru Takenaka
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Design of the III-V MOS optical modulator with doped graphene electrode for efficient, high-speed phase modulation2022
- Author(s)
  T. Piyapatarakul, H. Tang, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  12th International Symposium on Photonics and Electronics Convergence (ISPEC2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Analysis of III-V MOS optical modulator with transparent doped graphene gate electrode2022
- Author(s)
  T. Piyapataraku, H. Tang, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  International Conference on Solid State Devices and Materials (SSDM2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] III-V/Si hybrid integration for scalable optical switching and computing2022
- Author(s)
  M. Takenaka, H. Tang, K. Watanabe, T. Ochiai, T. Akazawa, Y. Miyatake, S. Ohno, K. Sumita, S. Monfray, F. Boeuf, R. Tang, K. Toprasertpong, and S. Takagi
- Organizer
  International Conference on Photonics in Switching and Computing (PSC2022)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Ge ring modulator based on carrier-injection phaser shifter operating at two micrometer band2021
- Author(s)
  Z. Zhao, C.-P. Ho, Q. Li, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  European Conference on Optical Communication (ECOC2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] 波長2.4μmで動作する相変化材料を用いた中赤外光位相シフタ2021
- Author(s)
  宮武悠人, 何鐘培, 牧野孝太郎, 富永淳二, 宮田典幸, 中野隆志, 関根尚希, トープラサートポンカシディット, 高木信一, 竹中充
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Materials drive Si photonics2021
- Author(s)
  M. Takenaka, K. Toprasertpong, and S. Takagi
- Organizer
  34th International Microprocesses and Nanotechnology Conference (MNC2021)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Germanium mid-infrared integrated photonics on GeOI platform2021
- Author(s)
  M. Takenaka, Z. Zhao, C.-P. Ho, T. Fujigaki, K. Toprasertpong, and S. Takagi
- Organizer
  Conference on Lasers and Electro-Optics (CLEO2021)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Reduction of optical loss of phase-change phase shifter based on Ge2Sb2Te5 operating at mid-infrared wavelength2021
- Author(s)
  Y. Miyatake, C.-P. Ho, K. Makino, J. Tominaga, N. Miyata, T. Nakano, N. Sekine, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  11th International Symposium on Photonics and Electronics Convergence (ISPEC2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Enhancement of the Ge sub-bandgap photo-response at 2-μm band by photo-gating effect2021
- Author(s)
  Z. Zhao, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Investigation of Optical Phase-shift by Free-carrier effect in Germanium Waveguides for Mid-infrared Photonics2020
- Author(s)
  Z. Zhao, C. Ho, Q. Li, Z. Lin, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Experimental evaluation of the free-carrier plasma dispersion effect in germanium2020
- Author(s)
  Z. Zhao, C.-P. Ho, Q. Li, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  10th International Symposium on Photonics and Electronics Convergence (ISPEC2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Mid-infrared non-volatile compact optical phase shifter based on Ge2Sb2Te52020
- Author(s)
  Y. Miyatake, C.-P. Ho, P. Pitchappa, R. Singh, K. Makino, J. Tominaga, N. Miyata, T. Nakano, N. Sekine, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  European Conference on Optical Communication (ECOC 2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Two-micrometer monolithic germanium waveguide photodetector integrated with lateral PIN junction2020
- Author(s)
  Z. Zhao, C.-P. Ho, Q. Li, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  10th International Symposium on Photonics and Electronics Convergence (ISPEC2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] 相変化材料を用いた中赤外光位相シフタの提案2020
- Author(s)
  宮武悠人, 何鐘培, 牧野孝太郎, 富永淳二, 宮田典幸, 中野隆志, 関根尚希, トープラサートポンカシディット, 高木信一, 竹中充
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Non-volatile compact optical phase shifter based on Ge2Sb2Te5 operating at mid-infrared wavelength2020
- Author(s)
  Y. Miyatake, C. P. Ho, P. Pitchappa, R. Singh, K. Makino, J. Tominaga, N. Miyata, T. Nakano, N. Sekine, K. Toprasertpong, S. Takagi, and M. Takenaka
- Organizer
  10th International Symposium on Photonics and Electronics Convergence (ISPEC2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02198
[Presentation] Investigation of Franz-Keldysh effect and carrier depletion effect in III-V/Si hybrid MOS optical modulator2019
- Author(s)
  Q. Li, C.-H. Ho, S. Takagi, and, M. Takenaka
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-17F17071
[Presentation] Efficient Optical Modulator by Reverse-biased III-V/Si Hybrid MOS Capacitor based on FK Effect and Carrier Depletion2019
- Author(s)
  Q. Li, C. P. Ho, S. Takagi, and M. Takenaka
- Organizer
  Optical Fiber Communication Conference (OFC2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17F17071
[Presentation] フォトニクス応用に向けたIII-V on SiCプラットフォームの検討2018
- Author(s)
  三條嵩明, 関根尚希, 高木信一, 竹中充
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] III-V/Si hybrid MOS optical phase modulator for Si photonic integrated circuits2018
- Author(s)
  M. Takenaka, J. Han, F. Boeuf, J.-K. Park, Q. Li, C. P. Ho, D. Lyu, S. Ohno, J. Fujikata, S. Takahashi, and S. Takagi
- Organizer
  European Conference on Optical Communication (ECOC 2018)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17F17071
[Presentation] Fabrication of Si racetrack optical modulator with III-V/Si hybrid MOS phase shifter2018
- Author(s)
  Q. Li, C.-P. Ho, S. Takagi, and M. Takenaka
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17F17071
[Presentation] Fabrication of High-Q Ring Resonator using n-type GeOI wafer2018
- Author(s)
  Z. Zhao, C. Ho, S. Takagi, and M. Takenaka
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Investigation of a germanium-on-insulator band-stop filter2018
- Author(s)
  C. P. Ho, Z. Zhao, Q. Li, S. Takagi, and M. Takenaka
- Organizer
  8th International Symposium on Photonics and Electronics Convergence (ISPEC2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17F17071
[Presentation] Fabrication of high-Q ring resonator using low loss GeOI wafer2018
- Author(s)
  Z. Zhao, C. P. Ho, S. Takagi, and M. Takenaka
- Organizer
  8th International Symposium on Photonics and Electronics Convergence (ISPEC2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17F17071
[Presentation] Low-power Ge thermo-optic phase shifter on Ge-on-Insulator platform2018
- Author(s)
  T. Fujigaki, S. Takagi, and M. Takenaka
- Organizer
  European Conference on Optical Communication (ECOC 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Electronic-photonic integrated circuits based on heterogeneous integration of III-V, Ge, and 2D materials on Si2018
- Author(s)
  M. Takenaka
- Organizer
  Korean Institute of Science and Technology (KIST)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] 中赤外フォトニクスのためのGe/Si ハイブリッド MOS型光変調器の提案2018
- Author(s)
  田口富隆, 高木信一, 竹中充
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Low-crosstalk, low-power Mach-Zehnder interferometer optical switch based on III-V/Si hybrid MOS phase shifter2018
- Author(s)
  Q. Li, J.-H. Han, C. Ho, S. Takagi, and M. Takenaka
- Organizer
  Optical Fiber Communication Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Low-crosstalk, low-power Mach-Zehnder interferometer optical switch based on III-V/Si hybrid MOS phase shifter2018
- Author(s)
  Q. Li, J.-H. Han, C. Ho, S. Takagi, and M. Takenaka
- Organizer
  Optical Fiber Communication Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17F17071
[Presentation] Demonstration of Mach-Zehnder interferometer optical switch with InGaAsP/Si hybrid MOS optical phase shifter2018
- Author(s)
  Q. Li, S. Takagi, M. Takenaka
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Demonstration of Si racetrack resonator based on III-V/Si hybrid MOS phase shifter2018
- Author(s)
  Q. Li, C. P. Ho, S. Takagi, and M. Takenaka
- Organizer
  8th International Symposium on Photonics and Electronics Convergence (ISPEC2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17F17071
[Presentation] Efficient low-loss InGaAsP/Si hybrid MOS optical modulator2018
- Author(s)
  韓在勲, Boeuf Frederic, 藤方潤一, 高橋重樹, 高木信一, 竹中充
- Organizer
  第65回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Ge-on-insulator platform for mid-infrared integrated photonics2018
- Author(s)
  M. Takenaka, and S. Takagi
- Organizer
  IEEE Summer Topicals Meeting Series
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Si hybrid MOS optical phase shifter for switching and computing2018
- Author(s)
  M. Takenaka, J. Han, Q. Li, C.P. Ho, D. Lyu, S. Ohno, and S. Takagi
- Organizer
  Photonics in Switching and Computing (PSC 2018)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17F17071
[Presentation] Proposal of Ge/Si hybrid MOS optical modulator operating at mid-infrared wavelengths2018
- Author(s)
  Y. Taguchi, S. Takagi, and M. Takenaka
- Organizer
  International Conference on Solid State Devices and Materials (SSDM)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Investigation of Low-loss Mid-infrared Waveguide Using n-type Ge2018
- Author(s)
  Z. Zhao, C. Ho, S. Takagi, and M. Takenaka
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Fabrication of high-Q ring resonator using low loss GeOI wafer2018
- Author(s)
  Z. Zhao, C. P. Ho, S. Takagi, and M. Takenaka
- Organizer
  8th International Symposium on Photonics and Electronics Convergence (ISPEC2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] ゲルマニウムを用いた中赤外集積フォトニクスへの展開2018
- Author(s)
  竹中充, 高木信一
- Organizer
  第65回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] High-efficiency, low-loss optical phase modulator based on III-V/Si hybrid MOS capacitor2018
- Author(s)
  M. Takenaka, J.-H. Han, J.-K. Park, F. Boeuf, J. Fujikata, S. Takahashi, and S. Takagi
- Organizer
  Optical Fiber Communication Conference
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Investigation of a germanium-on-insulator band-stop filter2018
- Author(s)
  C. P. Ho, Z. Zhao, Q. Li, S. Takagi, and M. Takenaka
- Organizer
  8th International Symposium on Photonics and Electronics Convergence (ISPEC2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] 酸化物半導体/IV族半導体を用いた超低消費電力トンネルトランジスタ2018
- Author(s)
  藤垣匠, 高木信一, 竹中充
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Design Optimization of Ultralow Capacitance InGaAs Waveguide Photodetector on III-V CMOS photonics platform2018
- Author(s)
  P. Cheng, S. Takagi, M. Takenaka
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Heterogeneous integration of III-V/Ge on Si for photonic integrated circuits2018
- Author(s)
  M. Takenaka, and S. Takagi
- Organizer
  Progress In Electromagnetics Research Symposium (PIERS2018)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Monolithic integration of InGaAsP MZI modulator and InGaAs driver MOSFET using III-V CMOS photonics2017
- Author(s)
  J. Park, S. Takagi, and M. Takenaka
- Organizer
  Optical Fiber Communication Conference
- Place of Presentation
  Los Angeles Convention Center, Los Angeles, USA
- Year and Date
  2017-03-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] 異種半導体集積Siフォトニクスを用いた高効率光変調器への展開2017
- Author(s)
  竹中充, 高木　信一
- Organizer
  電子情報通信学会ソサイエティ大会
- Invited
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] III-V/Si hybrid MOS optical phase shifter toward low-crosstalk switching2017
- Author(s)
  Q. Li, S. Takagi, and M. Takenaka
- Organizer
  7th International Symposium on Photonics and Electronics Convergence
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Low-optical-loss graphene-based phase modulator operating at mid-infrared wavelength2017
- Author(s)
  Y. Yamaguchi, S. Takagi, and M. Takenaka
- Organizer
  International Conference on Solid State Devices and Materials (SSDM2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] III-V/Ge MOSFETs and TFETs for Ultra-Low Power Logic LSIs2017
- Author(s)
  S. Takagi and M. Takenaka
- Organizer
  2017 International Symposium on VLSI Technology, Systems and Applications (2017 VLSI-TSA)
- Place of Presentation
  Ambassador Hotel Hsinchu, Hsinchu, Taiwan
- Year and Date
  2017-04-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Near-infrared and mid-infrared integrated photonics based on Ge-on-insulator platform2017
- Author(s)
  M. Takenaka, J. Kang, T. Fujigaki, and S. Takagi
- Organizer
  IEEE Photonics Conference (IPC 2017)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Investigation of a bandpass filter on Germanium-on-Insulator photonic platform2017
- Author(s)
  C. P. Ho, Z. Zhao, S. Takagi, and M. Takenaka
- Organizer
  7th International Symposium on Photonics and Electronics Convergence (ISPEC2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] III-V-based low power CMOS devices on Si platform2017
- Author(s)
  S. Takagi, D. H. Ahn, T. Gotow, M. Noguchi, K. Nishi, S.-H. Kim, M. Yokoyama, C.-Y. Chang, S.-H. Yoon, C. Yokoyama and M. Takenaka
- Organizer
  IEEE International Conference on Integrated Circuit Design & Technology (ICICDT)
- Place of Presentation
  Avaya Auditorium, Austin, USA
- Year and Date
  2017-05-23
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] 酸化濃縮プロセスにおける冷却方法がGeOI中の圧縮ひずみに及ぼす効果2017
- Author(s)
  金佑彊, 竹中充, 高木信一
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Pure phase modulation based on graphene operating at wavelength of 3000 nm2017
- Author(s)
  Y. Yamaguchi, S. Takagi, and M. Takenaka
- Organizer
  24th Congress of the international Commission for Optics (ICO-24)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] 貼り合わせ法を用いた高性能InGaAsP/Si hybrid MOS型光変調器2017
- Author(s)
  韓在勲, 高木信一, 竹中充
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県横浜市）
- Year and Date
  2017-03-14
- Invited
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] High-Efficiency O-Band Mach-Zehnder modulator based on InGaAsP/Si hybrid MOS capacitor2017
- Author(s)
  J. Han, S. Takagi, and M. Takenaka
- Organizer
  Optical Fiber Communication Conference
- Place of Presentation
  Los Angeles Convention Center, Los Angeles, USA
- Year and Date
  2017-03-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Electronic-photonic integrated circuits based on heterogeneous integration of Ge/III-V on Si2017
- Author(s)
  M. Takenaka
- Organizer
  Silicon Photonic Workshop, European Conference on Optical Communication
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Influence of ALD High-k film deposition on plasma oxidation GeOx/Ge gate stacks2017
- Author(s)
  M. Ke, M. Takenaka, and S. Takagi
- Organizer
  10th International Workshop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar, "Atomically Controlled Processing for Ultralarge Scale Integration
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2017-02-13
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Wavelength dependence of Ge thermo-optic switch operating at mid-infrared wavelength range2017
- Author(s)
  T. Fujigaki, S. Takagi, and M. Takenaka
- Organizer
  7th International Symposium on Photonics and Electronics Convergence (ISPEC2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] III-V/SiハイブリッドMOS構造を用いた高効率光位相変調およびユニバーサル光集積回路への展開2017
- Author(s)
  竹中充
- Organizer
  第27回シリコンフォトニクス研究会
- Invited
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] プラズマ酸化により形成したAl2O3/GeOx/Ge MOS界面の遅い準位の起源2017
- Author(s)
  柯夢南, シャオ・ユウ, 張志宇, 竹中充, 高木信一
- Organizer
  第22回電子デバイス界面テクノロジー研究会―材料・プロセス・デバイス特性の物理―
- Place of Presentation
  東レ研修センター（静岡県三島市）
- Year and Date
  2017-01-20
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] MOS Interface Defect Control in Ge/IIIV Gate Stacks2017
- Author(s)
  S. Takagi, M. Ke, C. Y. Chang, C. Yokoyama, M. Yokoyama, T. Gotow, K. Nishi, and M. Takenaka
- Organizer
  232nd Electrochemical Society (ECS) Meeting, D01: Semiconductors, Dielectrics, and Metals for Nanoelectronics 15: In Memory of Samares Kar
- Place of Presentation
  Gaylord National Resort and Convention Center, National Harbor, USA
- Year and Date
  2017-10-01
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Reduction of slow trap density of Al2O3/GeOx/n-Ge MOS interfaces by inserting ultrathin Y2O3 interfacial layers2017
- Author(s)
  M. Ke, M. Takenaka, and S. Takagi
- Organizer
  20th Conference on Insulating Films on Semiconductors (INFOS 2017)
- Place of Presentation
  Seminaris SeeHotel Potsdam, Potsdam, Germany
- Year and Date
  2017-06-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] High-efficiency phase modulation based on Si hybrid MOS structure2017
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  Progress In Electromagnetics Research Symposium
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Structure optimization of InGaAsP/Si hybrid MOS optical modulator for high-efficiency phase modulation2017
- Author(s)
  Q. Li, J.-H. Han, F. Boeuf, S. Takagi, and M. Takenaka
- Organizer
  24th Congress of the international Commission for Optics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Ultra-low Power MOSFETs and Tunneling FETs using III-V and Ge2017
- Author(s)
  S. Takagi and M. Takenaka
- Organizer
  International Workshop on Nanodevice Technologies 2017 (IWNT 2017)
- Place of Presentation
  広島大学（広島県東広島市）
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Investigation on Mg ion implantation for carrier-depletion InGaAsP optical modulator with vertical PN junction2017
- Author(s)
  N. Sekine, J.-H. Han, S. Takagi, and M. Takenaka
- Organizer
  24th Congress of the international Commission for Optics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] High Performance 4.5-nm-Thick Compressively-Strained Ge-on-Insulator pMOSFETs Fabricated by Ge Condensation with Optimized Temperature Control2017
- Author(s)
  W.-K. Kim, M. Takenaka and S. Takagi
- Organizer
  Symposium on VLSI technology
- Place of Presentation
  京都リーガローヤルホテル（京都府京都市）
- Year and Date
  2017-06-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Investigation of a bandpass filter on Germanium-on-Insulator photonic platform2017
- Author(s)
  C.-P. Ho, Z. Zhao, S. Takagi, and M. Takenaka
- Organizer
  7th International Symposium on Photonics and Electronics Convergence
- Data Source
  KAKENHI-PROJECT-17F17071
[Presentation] 低損失グラフェン中赤外光変調器の検討2017
- Author(s)
  山口夕貴, 高木信一, 竹中充
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Si photonics based on heterogeneous integration2017
- Author(s)
  M. Takenaka
- Organizer
  Tsinghua University-the University of Tokyo Joint Symposium
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] プラズマ後酸化によるALD Al2O3/Y2O3/GeOx/Geゲートスタックの電気特性2017
- Author(s)
  柯夢南, 竹中充, 高木信一
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Performance benchmarking of InGaAsP, Si0.8Ge0.2 and Si-based photonics homojunction and heterojunction PN modulators2017
- Author(s)
  F. Boeuf, N. Sekine, S. Takagi, and M. Takenaka
- Organizer
  International Conference on Solid State Devices and Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] 異種材料集積を用いたSiフォトニクス2017
- Author(s)
  竹中充
- Organizer
  第9回フォトニクス・イノベーションセミナー（シリコンフォトニクスの進展と展望）
- Invited
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Low-crosstalk optical switch with InGaAsP/Si hybrid MOS optical phase shifter2017
- Author(s)
  Q. Li, S. Takagi, and M. Takenaka
- Organizer
  International Conference on Solid State Devices and Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] III-V CMOSフォトニクス・プラットフォーム上L字接合をもつキャリア空乏型InGaAsP光変調器の検討2017
- Author(s)
  関根尚希, 高木信一, 竹中充
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Numerical investigation of ultralow-capacitance InGaAs photodetector on III-V/a-Si hybrid platform2017
- Author(s)
  P. Cheng, S. Takagi, and M. Takenaka
- Organizer
  7th International Symposium on Photonics and Electronics Convergence
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Optimization of modulation efficiency of InGaAsP/Si hybrid MOS optical modulator2017
- Author(s)
  Q. Li, S. Takagi, and M. Takenaka
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] 温度サイクルを減らした酸化濃縮法による高圧縮ひずみ極薄膜Ge-OI 構造の実現2016
- Author(s)
  金佑彊, 竹中充, 高木信一
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学（東京都目黒区）
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] CMOS photonics technologies based on heterogeneous integration of SiGe/Ge and III-V on Si2016
- Author(s)
  M. Takenaka, Y. Kim, J. Han, J. Kang, Y. Ikku, Y. Cheng, J. Park, and S. Takagi
- Organizer
  SPIE Photonics Europe
- Place of Presentation
  SQUARE Brussels Meeting Center, Brussels, Belgium
- Year and Date
  2016-04-04
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] 極低電力LSIのための先端Ge MOSデバイス技術2016
- Author(s)
  高木信一, シャオ・ユウ, 張睿, 柯夢南, 竹中充
- Organizer
  第80回半導体・集積路技術シンポジウム
- Place of Presentation
  東京理科大学森戸記念館（東京都新宿区）
- Invited
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Challenges and opportunities of near and mid-infrared photonics based on SiGe and Ge2016
- Author(s)
  M. Takenaka, Y. Kim, J. Han, J. Kang, and S. Takagi
- Organizer
  230th ECS Meeting
- Place of Presentation
  Hawaii, USA
- Year and Date
  2016-10-04
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Control of slow traps of ALD Al2O3/Ge-based gate stacks with post plasma process2016
- Author(s)
  M. Ke, X. Yu, M. Takenaka and S. Takagi
- Organizer
  9th International Workshop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar, "Atomically Controlled Processing for Ultralarge Scale Integration”
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2016-01-11
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Heterogeneous integration of SiGe/Ge and III-V on Si for CMOS photonics2016
- Author(s)
  M. Takenaka, and S. Takagi
- Organizer
  International Meeting for Future of Electron Devices, Kansai
- Place of Presentation
  Avanti Kyoto Hall, Ryukoku Univeristy, Kyoto
- Year and Date
  2016-06-23
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Numerical analysis of InGaAsP carrier-depletion optical modulator on III-V CMOS photonics platform2016
- Author(s)
  N. Sekine, J. Han, M. Takenaka, and S. Takagi
- Organizer
  International Conference on Solid State Devices and Materials
- Place of Presentation
  Tsukuba International Congress Center, Tsukuba, Ibaragi
- Year and Date
  2016-09-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Al2O3/GeOx/Ge MOS界面の遅い準位密度に与える界面構造の影響2016
- Author(s)
  柯夢南, ユウ・シャオ, 竹中充, 高木信一
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学（東京都目黒区）
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Heterogeneous integration of SiGe/Ge and III-V on Si for CMOS photonics2016
- Author(s)
  M. Takenaka, and S. Takagi
- Organizer
  International Meeting for Future of Electron Devices
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2016-06-23
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Heterogeneous integration of SiGe/Ge and III-Vs on Si for electronic-photonic integrated circuit2016
- Author(s)
  M. Takenaka, and S. Takagi
- Organizer
  JSPS-OSA joing session
- Place of Presentation
  Toki Messe, Niigata, Niigata
- Year and Date
  2016-09-16
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Estimation of modulation efficiency enhancement using an InGaAsP/Si hybrid MOS optical modulator2016
- Author(s)
  J.-H. Han, S. Takagi, and M. Takenaka
- Organizer
  6th International Symposium on Photonics and Electronics Convergence
- Place of Presentation
  Eneos Hall, The University of Tokyo, Meguro-ku, Komaba, Tokyo
- Year and Date
  2016-11-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Design and characterization of Ge passive waveguide components on Ge-on-Insulator for mid-infrared photonics2016
- Author(s)
  J. Kang, X. Yu, M. Takenaka, and S. Takagi
- Organizer
  Optical Fiber Communication Conference (OFC2016)
- Place of Presentation
  Tu3E.4, Anahaim
- Year and Date
  2016-03-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] 極薄膜Ge-On-Insulator(GOI) p-MOSFETのキャリア輸送特性2016
- Author(s)
  ユウ・シャオ, 亢健, 竹中充,　高木信―
- Organizer
  電子情報通信学会SDM研究会・応用物理学会シリコンテクノロジー分科会共催研究集会「先端CMOSデバイス・プロセス技術（IEDM特集）」
- Place of Presentation
  機械振興会館（東京都港区）
- Year and Date
  2016-01-28
- Invited
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Extremely high modulation efficiency III-V/Si hybrid MOS optical modulator fabricated by direct wafer bonding2016
- Author(s)
  J. Han, M. Takenaka, and S. Takagi
- Organizer
  International Electron Devices Meeting
- Place of Presentation
  Hilton San Francisco Union Square, San Francisco, USA
- Year and Date
  2016-12-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Ge-on-insulator platform for near and mid-infrared integrated photonics2016
- Author(s)
  M. Takenaka
- Organizer
  6th International Symposium on Photonics and Electronics Convergence (ISPEC2016)
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2016-11-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] CMOS photonics technologies based on heterogeneous integration of SiGe/Ge and III-V on Si2016
- Author(s)
  M. Takenaka, Y. Kim, J. Han, J. Kang, Y. Ikku, Y. Cheng, J. Park, and S. Takagi
- Organizer
  SPIE Photonics Europe
- Place of Presentation
  Brussels, Belgium
- Year and Date
  2016-04-04
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Si/III-V CMOS photonics for low-power electronic-photonic integrated circuits on Si platform2016
- Author(s)
  M. Takenaka, and S. Takagi
- Organizer
  Conference on Lasers and Electro-Optics (CLEO2016)
- Place of Presentation
  San Jose, USA
- Year and Date
  2016-06-10
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] CMOS photonics based on SiGe and Ge for near and mid-infrared photonic integrated circuits2016
- Author(s)
  M. Takenaka, Y. Kim, J. Han, J. Kang, and S. Takagi
- Organizer
  International Conference on Solid State Devices and Materials (SSDM2016)
- Place of Presentation
  Tsukuba, Japan
- Year and Date
  2016-09-28
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Design and characterization of Ge passive waveguide components at 2-μm band for mid-infrared integrated photonics2016
- Author(s)
  J. Kang, M. Takenaka, and S. Takagi
- Organizer
  6th International Symposium on Photonics and Electronics Convergence (ISPEC2016)
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2016-11-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Carrier Transport Properties in Extremely-Thin Body GOI p-MOSFETs2016
- Author(s)
  S. Takagi, X. Yu, J. Kang and M. Takenaka
- Organizer
  Workshop on Atomically Controlled Processing for Ultra-large Scale Integration
- Place of Presentation
  Forschungszentrum Julich, Julich, Germany
- Year and Date
  2016-11-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] 貼り合わせInGaAsP/Si ハイブリッド MOS 型光変調器に関する検討2016
- Author(s)
  韓在勲, 竹中充, 高木信一
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ（新潟県新潟市）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Feasibility study of III-V/Si hybrid MOS optical modulators consisting of n-InGaAsP/Al2O3/p-Si MOS capacitor formed by wafer bonding2016
- Author(s)
  J. Han, M. Takenaka, and S. Takagi
- Organizer
  International Conference on Group IV Photonics
- Place of Presentation
  Grand Kempinski Hotel, Shanghai, China
- Year and Date
  2016-08-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Heterogeneous integration of SiGe/Ge and III-Vs on Si for electronic-photonic integrated circtuis2016
- Author(s)
  M. Takenaka, and S. Takagi
- Organizer
  JSPS-OSA joing session
- Place of Presentation
  Niigata, Japan
- Year and Date
  2016-10-16
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Si上異種半導体集積によるCMOSフォトニクス2016
- Author(s)
  竹中　充, 金　栄現, 韓　在勲, 亢　健, 一宮佑希, 程　勇鵬, 朴　珍權, 金　相賢, 高木信一
- Organizer
  電子情報通信学会SDM研究会・応用物理学会シリコンテクノロジー分科会共催研究集会
- Place of Presentation
  機会振興会館（東京都港区）
- Year and Date
  2016-01-28
- Invited
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] III-V CMOSフォトニクス・プラットフォーム上キャリア注入型InGaAsP可変光減衰器2016
- Author(s)
  朴　珍權, 韓在勲, 竹中充, 高木信一
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ（新潟県新潟市）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Si上異種半導体集積による光電子集積回路技術2016
- Author(s)
  竹中充, 高木信一
- Organizer
  プラナリゼーションCMPとその応用技術専門委員会第150回研究会
- Place of Presentation
  名古屋大学ES総合館ESホール（名古屋市千種区）
- Year and Date
  2016-06-20
- Invited
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Investigation of Ge thermo-optic switch on the Ge CMOS Photonics platform2016
- Author(s)
  T. Fujigaki, J. Kang, S. Takagi, and M. Takenaka
- Organizer
  6th International Symposium on Photonics and Electronics Convergence (ISPEC2016)
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2016-11-29
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Si/III-V CMOS photonics for low-power electronic-photonic integrated circuits on Si platform2016
- Author(s)
  M. Takenaka, and S. Takagi
- Organizer
  Conference on Lasers and Electro-Optics
- Place of Presentation
  San Jose Convention Center, San Jose, USA
- Year and Date
  2016-06-05
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Ge waveguide photodetector on wafer-bonded Ge-on-insulator substrate monolithically integrated with amorphous Si waveguide2016
- Author(s)
  J. Kang, M. Takenaka, and S. Takagi
- Organizer
  European Conference on Optical Communication (ECOC 2016)
- Place of Presentation
  Düsseldorf, Germany
- Year and Date
  2016-09-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] GeOxNy 層の挿入によるAl2O3/n-Ge MOS界面の遅い準位密度低減2016
- Author(s)
  柯夢南, シャオ・ユウ, 竹中充, 高木信一
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ（新潟県新潟市）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Fabrication and MOS interface properties of ALD AlYO3/GeOx/Ge gate stacks with plasma post oxidation2015
- Author(s)
  M. Ke, X. Yu, R. Zhang, J. Kang, C. Chang, M. Takenaka, and S. Takagi
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場（愛知県名古屋市）
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Experimental Study on Carrier Transport Properties in Extremely-Thin Body Ge-on-Insulator (GOI) p-MOSFETs with GOI Thickness down to 2 nm2015
- Author(s)
  X. Yu, J. Kang, M. Takenaka and S. Takagi
- Organizer
  International Electron Device Meeting (IEDM)
- Place of Presentation
  Hilton Washington, Washington DC., USA
- Year and Date
  2015-12-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] MOS Interface Control Technologies for Advanced III-V/ Ge Devices2015
- Author(s)
  S. Takagi, C. Y. Chang, M. Yokoyama, K. Nishi, R. Zhang, M. Ke, J. H. Han, and M. Takenaka
- Organizer
  228th Fall meeting of the Electrochemical Society, D04 - Semiconductors, Dielectrics, and Metals for Nanoelectronics 13
- Place of Presentation
  Hyatt Regency Hotel, Pheonix, Arizona, USA
- Year and Date
  2015-10-11
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Low Power MOS Device Technologies based on Heterogeneous Integration2015
- Author(s)
  S. Takagi and M. Takenaka
- Organizer
  2015 International Electron Devices and Materials Symposia (IEDMS)
- Place of Presentation
  Kun Shan University, Tainan, Taiwan
- Year and Date
  2015-11-19
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Tunneling FET Technologies Using III-V and Ge Materials2015
- Author(s)
  S. Takagi, M. Kim, M. Noguchi, K. Nishi, and M. Takenaka
- Organizer
  228th Fall meeting of the Electrochemical Society, G04 - ULSI Process Integration 9
- Place of Presentation
  Hyatt Regency Hotel, Pheonix, Arizona, USA
- Year and Date
  2015-10-11
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Fabrication and MOS interface properties of ALD AlYO3/GeOx/Ge gate stacks with plasma post oxidation2015
- Author(s)
  M. Ke, X. Yu, R. Zhang, J. Kang, C. Chang, M. Takenaka and S. Takagi
- Organizer
  19th Conference on "Insulating Films on Semiconductors" (INFOS)
- Place of Presentation
  University of Udine, Udine, Italy
- Year and Date
  2015-06-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] First demonstration of Ge waveguide platform on Ge-on-Insulator for mid-infrared integrated photonics2015
- Author(s)
  J. Kang, M. Takenaka, and S. Takagi
- Organizer
  European Conference on Optical Communication (ECOC 2015)
- Place of Presentation
  Barcelona, P.2.10
- Year and Date
  2015-09-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Impact of Thermal Annealing on Ge-on-Insulator Substrate Fabricated by Wafer Bonding2015
- Author(s)
  J. Kan, X. Yu, M. Takenaka, and S. Takagi
- Organizer
  E-MRS Spring Meeting
- Place of Presentation
  Symposium Z.5, Lille, France
- Year and Date
  2015-05-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] III-V CMOS photonics on Si for high-performance electronic-photonic integrated circuits2015
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  8th International Conference on Materials for Advanced Technologies
- Place of Presentation
  Suntech, Singapore
- Year and Date
  2015-07-02
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Impact of back interface passivation on electrical properties of ultrathin-body Germanium-on-insulator (GeOI) MOSFETs2015
- Author(s)
  X. Yu, J. Kang, R. Zhang, W.-L. Cai, M. Takenaka and S. Takagi
- Organizer
  19th Conference on "Insulating Films on Semiconductors" (INFOS)
- Place of Presentation
  University of Udine, Udine, Italy
- Year and Date
  2015-06-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Impact of GeOx passivation on dark current for wafer-bonded Ge-on-Insulator metal-semiconductor-metal photodetector2015
- Author(s)
  J. Kang, M. Takenaka and S. Takagi
- Organizer
  International Conference on Group IV Photonics (GFP2015)
- Place of Presentation
  WP18, Vancouver, Canada
- Year and Date
  2015-08-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] 低消費LSIのためのIII-V族半導体およびGe/ひずみSOIトンネルFETテクノロジー2015
- Author(s)
  高木信一, 金閔洙, 野口宗隆, ジ・サンミン, 西康一, 竹中充
- Organizer
  応用物理学会シリコンテクノロジー分科会共催研究集会第184回研究集会「先端CMOSデバイス・プロセス技術（VLSIシンポジウム特集）」
- Place of Presentation
  甲南大学ネットワークキャンパス東京（東京都千代田区）
- Year and Date
  2015-08-17
- Invited
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Ni-InGaAsP alloy for low-resistivity lateral PIN junction formation in carrier-injected InGaAsP photonic devices2015
- Author(s)
  J.-K. Park, M. Takenaka, and S. Takagi
- Organizer
  5th International Symposium on Photonics and Electronics Convergence
- Place of Presentation
  Ito Hall, The University of Tokyo, Bunkyo-ku, Hongo, Tokyo
- Year and Date
  2015-12-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] A novel Ge waveguide platform on Ge-on-Insulator substrate for mid-infrared photonics2015
- Author(s)
  J. Kang, X. Yu, M. Takenaka, and S. Takagi
- Organizer
  5th International Symposium on Photonics and Electronics Convergence (ISPEC2015)
- Place of Presentation
  Tokyo
- Year and Date
  2015-12-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Impact of back interface passivation on electrical properties of ultrathin-body Germanium-on-insulator (GeOI) MOSFETs2015
- Author(s)
  X. Yu, J. Kang, R. Zhang, W.-L. Cai, M. Takenaka and S. Takagi
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場（愛知県名古屋市）
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Ge/SiGe CMOS device technology for future logic LSIs2015
- Author(s)
  S. Takagi, W.-K. Kim, X. Yu, J.-h. Han, R. Zhang and M. Takenaka
- Organizer
  E-MRS Spring meeting 2015, Symposium K, "Transport and photonics in group IV-based nanodevices"
- Place of Presentation
  Lille Grand Palace, Lille, France
- Year and Date
  2015-05-11
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Properties of slow traps of ALD Al2O3/GeOx/Ge gate stacks with plasma post oxidation2015
- Author(s)
  M. Ke, X. Yu, M. Takenaka and S. Takagi
- Organizer
  46th IEEE Semiconductor Interface Specialists Conference (SISC)
- Place of Presentation
  Key Bridge Marriott, Arlington, USA
- Year and Date
  2015-12-03
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] III-V-OI基板上における量子井戸インターミキシングの検討2015
- Author(s)
  高島成也、一宮佑希、竹中充、高木信一
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス（神奈川県平塚市）
- Year and Date
  2015-03-12
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] III-V/Ge MOSFETs and Tunneling FETs on Si platform for Low Power Logic Applications2015
- Author(s)
  S. Takagi and M. Takenaka
- Organizer
  13th International Meeting for Future of Electron Devices, Kansai (IMFEDK)
- Place of Presentation
  龍谷大学アバンティ京都ホール（京都府京都市）
- Year and Date
  2015-06-04
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Advanced Nano CMOS using Ge/III-V semiconductors for Low Power Logic LSIs2015
- Author(s)
  S. Takagi and M. Takenaka
- Organizer
  15th IEEE International Conference on Nanotechnology
- Place of Presentation
  Angelicum Congress Centre, Rome, Italy
- Year and Date
  2015-07-27
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Ge/III-V MOS Device Technologies for Low Power Integrated Systems2015
- Author(s)
  S. Takagi and M. Takenaka
- Organizer
  45th European Solid-State Device Conference (ESSDERC)
- Place of Presentation
  Messe Congress Graz Betriebsgesellschaft, Graz, Austria
- Year and Date
  2015-09-14
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Gate stack technologies for high mobility channel MOSFETs2015
- Author(s)
  S. Takagi, R. Zhang, C.-Y. Chang, J.-H. Han, M. Yokoyama and M. Takenaka
- Organizer
  2015 MRS Spring Meeting & Exhibit, Sympoium AA, “Materials for Beyond the Roadmap Devices in Logic, Power and Memory”
- Place of Presentation
  Moscone West Convention Cener, San Francisco, USA
- Year and Date
  2015-04-06
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] CMOS photonics technologies based on heterogeneous integration of SiGe/Ge and III-V on Si2015
- Author(s)
  M. Takenaka, Y. Kim, J. Han, J. Kang, Y. Ikku, Y. Cheng, J.-K. Park, S.-H Kim, and S. Takagi
- Organizer
  International Electron Devices Meeting
- Place of Presentation
  Washington Hilton, Washington D.C, USA
- Year and Date
  2015-12-09
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] CMOS photonics technologies based on heterogeneous integration of SiGe/Ge and III-V on Si2015
- Author(s)
  M. Takenaka, Y. Kim, J. Han, J. Kang, Y. Ikku, Y. Cheng, J.-K. Park, S.-H Kim, and S. Takagi
- Organizer
  International Electron Devices Meeting (IEDM’15)
- Place of Presentation
  31.5, Washington D.C.
- Year and Date
  2015-12-09
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] III-V and Ge tunneling FET technologies for low power LSIs2015
- Author(s)
  S. Takagi, M.-S. Kim, M. Noguchi, S.-M. Ji, K. Nishi and M. Takenaka
- Organizer
  Symposia on VLSI Technology
- Place of Presentation
  京都リーガローヤルホテル（京都府京都市）
- Year and Date
  2015-06-16
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] III-V on SiC基板を用いた光集積回路プラットフォームの提案2015
- Author(s)
  竹中充，高木信一
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場（愛知県名古屋市熱田区）
- Year and Date
  2015-09-14
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Tunneling FET Device Technologies Using III-V and Ge Materials2015
- Author(s)
  S. Takagi, M. Kim, M. Noguchi, K. Nishi, M. Takenaka
- Organizer
  4th Berkeley Symposium on Energy Efficient Electronic Systems (E3S)
- Place of Presentation
  University of California, Berkeley, California, USA
- Year and Date
  2015-10-02
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] High Mobility Ge CMOS Devices with Ultrathin EOT Gate Stacks Fabricated by Plasma Post Oxidation2015
- Author(s)
  Rui Zhang, Mitsuru Takenaka, Shinichi Takagi
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場（愛知県名古屋市）
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] II-V-OI基板のパターニングによるボイド低減の検討2015
- Author(s)
  高島成也, 一宮佑希, 竹中充, 高木信一
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場（愛知県名古屋市熱田区）
- Year and Date
  2015-09-14
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] III-V CMOS device technologies on Si platform2014
- Author(s)
  S. Takagi and M. Takenaka
- Organizer
  E-MRS Fall Meeting
- Place of Presentation
  Warsaw University of Technology, Warsaw, Poland
- Year and Date
  2014-09-16
- Invited
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] nチャネルGel-xSnx MOSFETの電流-電圧特性へのSn組成依存性2014
- Author(s)
  浅野孝典, 田岡紀之, 加藤公彦, 坂下満男, 張睿, 横山正史, 竹中充, 高木信一、財満鎭明
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Year and Date
  2014-03-18
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] 容量値の時間応答を利用したGe MOS界面における遅い準位の定量的評価2014
- Author(s)
  田中克久，張睿，竹中充，高木信一
- Organizer
  2014年第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス（神奈川県相模原市）
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] 小型低クロストークInGaAsP細線導波路光スイッチの作製2014
- Author(s)
  一宮佑希，横山正史，竹中充，高木信一
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学札幌キャンパス（北海道札幌市）
- Year and Date
  2014-09-18
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Ge-on-Insulator Substrate Fabrication for Ge CMOS Photonics Platform2014
- Author(s)
  J. Kang, X. Yu, M. Takenaka, and S. Takagi
- Organizer
  4th International Symposium on Photonics and Electronics Convergence (ISPEC2014)
- Place of Presentation
  ENEOS hall, The University of Tokyo
- Year and Date
  2014-11-18
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] InGaAs MSM photodetector with InAlAs and InP cap layers on III-V CMOS photonics platform for low dark current operation2014
- Author(s)
  Y. Cheng, Y. Ikku, M. Takenaka, and S. Takagi
- Organizer
  4th International Symposium on Photonics and Electronics Convergence
- Place of Presentation
  ENEOS hall, The University of Tokyo, Meguro, Tokyo
- Year and Date
  2014-11-18
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] III-V/Ge CMOS Device Technologies for Future Logic LSIs2014
- Author(s)
  S.Takagi and M.Takenaka
- Organizer
  7th International SiGe Technology and Device Meeting (ISTDM)
- Place of Presentation
  Swissotel Merchant Court, Singapore, Singapore
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Ge-on-Insulator fabrication by smartcut technology for Ge CMOS photonics platform2014
- Author(s)
  亢健，玉虓，竹中充，高木信一
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-18
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] Ultrathin body Germanium-on-insulator (GeOI) MOSFETs fabricated by transfer of epitaxial Ge films on III-V substrates2014
- Author(s)
  X.Yu, R.Zhang, J.Kang, T.Osada, M.Hata, M.Takenaka and S.Takagi
- Organizer
  21st International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)
- Place of Presentation
  Ambassador Hotel Hsinchu, Hsinchu, Taiwan
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Ultrathin body Germanium-on-insulator (GeOI) MOSFETs fabricated by transfer of epitaxial Ge films on III-V substrates2014
- Author(s)
  X. Yu, R. Zhang, J. Kang, T. Maeda, T. Itatani, T. Osada, M. Hata, M. Takenaka and S. Takagi
- Organizer
  2014年第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス（神奈川県相模原市）
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Ultra-small, low-crosstalk, electrically-driven InGaAsP photonic-wire optical switches on III-V CMOS photonics platform2014
- Author(s)
  Y. Ikku, M.Yokoyama, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  Optical Fiber Communication Conference (OFC2014)
- Place of Presentation
  San Francisco
- Year and Date
  2014-03-13
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] High Mobility Strained-Ge pMOSFETs with 0.7-nm Ultrathin EOT using Plasma Post Oxidation HfO2/Al2O3/GeOx Gate Stacks2014
- Author(s)
  R. Zhang, W. Chern, X. Yu, M. Takenaka, J. L. Hoyt and S. Takagi
- Organizer
  2014年第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス（神奈川県相模原市）
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Low-crosstalk carrier-injection Mach-Zehnder interferometer optical switches with 50-μm-long phase shifters on III-V CMOS photonics platform2014
- Author(s)
  Y. Ikku, M. Yokoyama, M. Takenaka, and S. Takagi
- Organizer
  4th International Symposium on Photonics and Electronics Convergence
- Place of Presentation
  ENEOS hall, The University of Tokyo, Meguro, Tokyo
- Year and Date
  2014-11-18
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] ark current reduction of waveguide InGaAs MSM photodetector on III-V CMOS photonics platform by InAlAs cap layer2014
- Author(s)
  Y. Cheng，一宮佑希，竹中充，高木信一
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学札幌キャンパス（北海道札幌市）
- Year and Date
  2014-09-17
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Sb拡散ソース・ドレインを有する酸化濃縮基板上反転型極薄膜Ge-on-Insulator nMOSFET2014
- Author(s)
  金佑彊, 金栄現, 金相賢, 長田剛規, 秦雅彦, 竹中充, 高木信一
- Organizer
  2014年第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス（神奈川県相模原市）
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] III-V CMOS photonics platform for low-power and low-crosstalk photonic-wire switches and modulators2014
- Author(s)
  M. Takenaka, Y. Ikku, and S. Takagi
- Organizer
  Advanced Photonics for Communications
- Place of Presentation
  Hilton San Diego, San Dieog, USA
- Year and Date
  2014-07-15
- Invited
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Low-resistance lateral junction formation for laser diodes on III-V CMOS photonics platform2014
- Author(s)
  Y. Ikku, and M. Takenaka, and S. Takagi
- Organizer
  24th IEEE International Semiconductor Laser Conference
- Place of Presentation
  Meliá Palas Atenea, Palma de Mallorca, Spain
- Year and Date
  2014-09-08
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] III-V-OI 基板の耐熱性向上技術および低抵抗横型PIN 接合形成技術2014
- Author(s)
  一宮佑希, 竹中充, 高木信一
- Organizer
  電子情報通信学会レーザ・量子エレクトロニクス研究会
- Place of Presentation
  機会振興会館（東京都港区）
- Year and Date
  2014-12-19
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Performance Enhancement Technologies in III-V/Ge MOSFETs2013
- Author(s)
  S. Takagi, M. Yokoyama, S.-H. Kim, R. Zhang and M. Takenaka
- Organizer
  224th Fall meeting of the Electrochemical Society, ULSI Process Integration 8
- Place of Presentation
  The Hilton San Francisco Hotel, San Francisco, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] MOS interface engineering for high-mobility Ge CMOS2013
- Author(s)
  M. Takenaka, R. Zhang, S. Takagi
- Organizer
  IEEE International Reliability Physics Symposium (IRPS'13)
- Place of Presentation
  Monterey, USA(招待講演)
- Year and Date
  2013-04-17
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] Examination of physical origins limiting effective mobility of Ge MOSFETs and the improvement by atomic deuterium annealing2013
- Author(s)
  R. Zhang, J-C. Lin, X. Yu, M. Takenaka, and S. Takagi
- Organizer
  VLSI Symposium
- Place of Presentation
  Rihga Royal Hotel, Kyoto
- Year and Date
  2013-06-11
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] III-V/Ge MOS Transistor Technologies for Future ULSI2013
- Author(s)
  S. Takagi and M. Takenaka
- Organizer
  International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors
- Place of Presentation
  Grand Hôtel de Paris, Villard de Lans, France
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Examination of Physical Origins Limiting Effective Mobility of Ge MOSFETs and the Improvement by Atomic Deuterium Annealing2013
- Author(s)
  R. Zhang, J-C. Lin, X. Yu, M. Takenaka and S. Takagi
- Organizer
  2013 Symposia on VLSI Technology
- Place of Presentation
  リーガロイヤルホテル京都（京都府京都市）
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] III-V/Ge MOS Transistor Technologies for Future ULSI2013
- Author(s)
  S.Takagi and M.Takenaka
- Organizer
  International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors
- Place of Presentation
  Grand Hotel de Paris, Villard de Lans, France
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] III-V CMOSフォトニクスプラットフォームと光インターコネクションへの展開2013
- Author(s)
  竹中充，一宮佑希，キムサンヒョン，横山正史，高木信一
- Organizer
  電子情報通信学会総合大会
- Place of Presentation
  岐阜大学、岐阜
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] MOS interface engineering for high-mobility Ge CMOS2013
- Author(s)
  M.Takenaka, R.Zhang, and S.Takagi
- Organizer
  International Reliability Physics Symposium (IRPS)
- Place of Presentation
  Hyatt Regency Monterey, Monterey, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] High Mobility Strained-Ge pMOSFETs with 0.7-nm Ultrathin EOT using Plasma Post Oxidation HfO2/Al2O3/GeOx Gate Stacks and Strain Modulation2013
- Author(s)
  R.Zhang, W.Chern, X.Yu, M.Takenaka, J.L.Hoyt and S.Takagi
- Organizer
  International Electron Device Meeting (IEDM)
- Place of Presentation
  Washington Hilton, Washington, DC, USA
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] High mobility strained-Ge pMOSFETs with 0.7-nm ultrathin EOT using plasma post oxidation Hf02/Al203/GeOx gate stacks and strain modulation2013
- Author(s)
  R. Zhang, W. Chern, X. Yu, M. Takenaka, J. L. Hoyt, S. Takagi
- Organizer
  International Electron Devices Meeting (IEDM' 13)
- Place of Presentation
  Wasnington Hilton, Washington D. C., U.S.A.
- Year and Date
  2013-12-11
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] Limiting factors of channel mobility in III-V/Ge MOSFETs2013
- Author(s)
  S. Takagi, M. S.-H. Kim, R. Zhang, N. Taoka, Yokoyama and M. Takenaka
- Organizer
  223rd Spring Meeting of Electrochemical Society, E5 Symposium on Silicon compatible materials, processes and technologies for Advanced Integrated Circuits and Emerging Applications 3
- Place of Presentation
  The Sheraton Centre Toronto Hotel, Toronto, Canada
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] III-V/Ge device engineering for CMOS photonics2013
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  8th international conference on processing and manufacturing of advanced materials (THERMEC2013)
- Place of Presentation
  Rio Hotel, Las Vegas, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] III-V/Ge CMOS device technologies2013
- Author(s)
  S.Takagi and M.Takenaka
- Organizer
  20th Symposium on Nano Device Technology (SNDT)
- Place of Presentation
  International Conference Hall of Nano Device Laboratory, Hsinchu, Taiwan
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] MOS interface control in III-V/Ge gate stacks and the impact on MOSFET performance2013
- Author(s)
  S. Takagi, R. Zhang, N. Taoka, R. Suzuki, S.-H. Kim, M. Yokoyama, and M. Takenaka
- Organizer
  2013 MRS (Material Research Society) Spring Meeting, Symposium CC “Gate Stack Technology for End-of-Roadmap Devices in Logic, Power, and Memory”
- Place of Presentation
  Moscone Center, San Francisco, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] High Quality Ge Gate Stacks Technologies by Using Plasma Oxidation2013
- Author(s)
  S. Takagi, R. Zhang and M. Takenaka
- Organizer
  JSPS Core-to-Core Program Seminar, “Atomically Controlled Processing for Ultralarge Scale Integration”
- Place of Presentation
  九州大学医学部百年講堂（福岡県福岡市）
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] High Mobility CMOS Technologies using III-V/Ge Channels2013
- Author(s)
  S.Takagi and M.Takenaka
- Organizer
  IEEE Nanotechnology Materials and Devices Conference (NMDC)
- Place of Presentation
  National Cheng Kung University, Tainan, Taiwan
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Ge gate stacks based on Ge oxide interfacial layers and the impact on MOS device properties2013
- Author(s)
  S.Takagi, R.Zhang and M.Takenaka
- Organizer
  18th Conference of "Insulating Films on Semiconductors" (INFOS)
- Place of Presentation
  The Jagiellonian University, Cracow, Poland (plenary)
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Characterization of Interface Properties of Au/Al2O3/GeOx/Ge MOS Structures2013
- Author(s)
  J.-C. Lin, R. Zhang, N. Taoka, M. Takenaka and S. Takagi
- Organizer
  6th International Symposium on Control of Semiconductor Interfaces (ISCSI)
- Place of Presentation
  九州大学医学部百年講堂（福岡県福岡市）
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Ultra-thin body MOS device technologies using high mobility channel materials2013
- Author(s)
  S. Takagi, S.-H. Kim, M. Yokoyama, W.-K. Kim, R. Zhang and M. Takenaka, “Ultra-thin body MOS device technologies using high mobility channel materials
- Organizer
  IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference
- Place of Presentation
  Hyatt Regency Monterey Hotel, Monterey, USA
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Heterogeneous integration for CMOS photonics2013
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  3rd International Symposium on Photonics and Electronics Convergence (ISPEC2013)
- Place of Presentation
  Tokyo
- Year and Date
  2013-11-20
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Impact of Plasma Post Oxidation Temperature on Interface Trap Density and Roughness at GeOx/Ge Interfaces2013
- Author(s)
  R.Zhang, Ju-Chin Lin, X.Yu, M.Takenaka and S.Takagi
- Organizer
  18th Conference of "Insulating Films on Semiconductors" (INFOS)
- Place of Presentation
  The Jagiellonian University, Cracow, Poland
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Characterization of Interface Traps in Au/Al2O3/GeOx/Ge MOS Structures2013
- Author(s)
  J.-C. Lin, R. Zhang, N. Taoka, M. Takenaka and S. Takagi
- Organizer
  2013年秋季第74回応用物理学会学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス（京都府京田辺市）
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] 酸化濃縮基板へのSbドーピングにより作製した極薄膜Ge-on-Insulator nMOSFETs2013
- Author(s)
  金佑彊, 忻宇飛, 金栄現, 金相賢, 長田剛規, 秦雅彦, 竹中充, 高木信一
- Organizer
  2013年秋季第74回応用物理学会学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス（京都府京田辺市）
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] 原子層平坦GeOx/Ge界面によるGe MOSFETsの高電界領域移動度の向上2013
- Author(s)
  張睿，黄博勤，林汝静，竹中充，高木信一
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] MOS interface engineering for high-mobility Ge CMOS2013
- Author(s)
  M. Takenaka, R. Zhang, S. Takagi
- Organizer
  IEEE International Reliability Physcis Symposium (IRPS' 13)
- Place of Presentation
  Hyatt Regency Monterey Hotel and Spa, Monterey, U.S.A.
- Year and Date
  2013-04-17
- Invited
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] Waveguide InGaAs MSM photodetector for chip-scale optical interconnects on III-V CMOS photonics platform2013
- Author(s)
  Y. Cheng, Y. Ikku, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  Asia Communications and Photonics Conference (ACP2013)
- Place of Presentation
  Beijin
- Year and Date
  2013-11-14
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] MOS interface control in III-V/Ge gate stacks and the impact on MOSFET performance2013
- Author(s)
  S.Takagi, R.Zhang, N.Taoka, R.Suzuki, S.-H.Kim, M.Yokoyama, and M.Takenaka
- Organizer
  2013 MRS (Material Research Society) Spring Meeting, Symposium CC "Gate Stack Technology for End-of-Roadmap Devices in Logic, Power, and Memory"
- Place of Presentation
  Moscone Center, San Francisco, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] III-V CMOSフォトニクスを用いたInGaAsP細線導波路光スイッチ2013
- Author(s)
  一宮佑希，横山正史，市川磨，秦雅彦，竹中充，高木信一
- Organizer
  電子情報通信学会総合大会
- Place of Presentation
  岐阜大学、岐阜
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] III-V/Ge CMOSフォトニクス実現に向けたデバイス技術2013
- Author(s)
  竹中充, 高木信一
- Organizer
  第77回半導体・集積回路技術シンポジウム
- Place of Presentation
  東京工業大学蔵前会館（東京都目黒区）
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Low-crosstalk 2 × 2 InGaAsP photonic-wire optical switches using III-V CMOS photonics platform2013
- Author(s)
  Y. Ikku, M. Yokoyama, N. Noguchi, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  European Conference on Optical Communication (ECOC'13)
- Place of Presentation
  London
- Year and Date
  2013-09-24
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] 0.7 nm超薄EOT HfO2/Al2O3/GeOx/Geゲートスタックを用いた高移動度Ge CMOS2013
- Author(s)
  張睿，林汝静，黄博勤，田岡紀之，竹中充，高木信一
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] Sb-diffused source/drain ultra-thin body Ge-on insulator nMOSFETs fabricated by Ge condensation2013
- Author(s)
  W. K. Kim, Y. Kin, Y. H. Kim, S. H. Kim, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  International Conference on Solid State Devices and Materials (SSDM2013)
- Place of Presentation
  Hilton Fukuoka Sea Hawk, Fukuoka city, Fnkuoka
- Year and Date
  2013-09-27
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] High performance sub-20-nm-channel-length extremely-thin body InAs-on-Insulator tri-gate MOSFETs with high short channel effect immunity and Vth tunability2013
- Author(s)
  S.-H. Kim, M. Yokoyama, R. Nakane, M. Ichikawa, T. Osada, M. Hata, M. Takenaka, S. Takagi
- Organizer
  International Electron Devices Meeting (IEDM'13)
- Place of Presentation
  Washington D. C
- Year and Date
  2013-12-10
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Ge oxide growth by plasma oxidation of Ge substrates through Al2O3 Layers2013
- Author(s)
  R. Zhang, J.-C. Lin, M. Takenaka, and S. Takagi
- Organizer
  5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] III-V CMOSフォトニクスを用いた低電流駆動光スイッチ2013
- Author(s)
  一宮佑希，横山正史，市川磨，秦雅彦，竹中充，高木信一
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学、神奈川
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] III-V/Ge CMOS device technologies for high performance logic applications2013
- Author(s)
  S. Takagi, M. Yokoyama, S.-H. Kim, R. Suzuki, R. Zhang, N. Taoka, and M. Takenaka
- Organizer
  223rd Spring Meeting of Electrochemical Society, E5 Symposium on Silicon compatible materials, processes and technologies for Advanced Integrated Circuits and Emerging Applications 3
- Place of Presentation
  The Sheraton Centre Toronto Hotel, Toronto, Canada
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] III-V/Ge MOS Interface Control Using and High k Films2013
- Author(s)
  S.Takagi, R.Zhang, R.Suzuki, C.-Y.Chang, N.Taoka, S.-H.Kim, M.Yokoyama and M.Takenaka
- Organizer
  15th Asian Chemical Congress (15ACC)
- Place of Presentation
  Resorts World Sentosa, Singapore, Singapore
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] III-V/Ge device engineering for CMOS photonics2013
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  International Conference on Processing & Manufacturing of Advanced Materials (THERMEC2013)
- Place of Presentation
  Las Vegas
- Year and Date
  2013-12-03
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] III-V/Ge device engineering for CMOS photonics2013
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  International Conference on Processing Manufacturing of Advanced Materials (THERMEC2013)
- Place of Presentation
  Rio Hotel, Las Vegas, U.S.A.
- Year and Date
  2013-11-20
- Invited
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] MOS interface control of high mobility channel materials for advanced CMOS applications2013
- Author(s)
  S.Takagi, R.Zhang, R.Suzuki, N.Taoka, M.Yokoyama and M.Takenaka
- Organizer
  3rd Molecular Materials Meeting (M3)
- Place of Presentation
  Singapore, Singapore
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Heterogeneous integration for CMOS photonics2013
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  3rd International Symposium on Photonics and Electronics Convergence (ISPEC2013)
- Place of Presentation
  Eneos Hall, Meguro-ku, Tokyo
- Year and Date
  2013-11-20
- Invited
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] Examination of Physical Origins Limiting Effective Mobility of Ge MOSFETs and the Improvement by Atomic Deuterium Annealing2013
- Author(s)
  R.Zhang, J-C.Lin, X.Yu, M.Takenaka and S.Takagi
- Organizer
  2013 Symposia on VLSI Technology
- Place of Presentation
  リーガロイヤルホテル京都(京都府京都市)
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Ultra-thin body MOS device technologies using high mobility channel materials2013
- Author(s)
  S.Takagi, S.-H.Kim, M.Yokoyama, W.-K.Kim, R.Zhang and M.Takenaka
- Organizer
  IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference
- Place of Presentation
  Hyatt Regency Monterey Hotel and Spa, Monterey, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Ge p- and n-MOSFETの高電界領域での移動度劣化機構の解析2013
- Author(s)
  張睿，黄博勤，林汝静，竹中充，高木信一
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] Suppression of Surface States inside Conduction Band and Effective Mobility Improvement of Ge nMOSFETs by Atomic Deuterium Annealing2013
- Author(s)
  R. Zhang, J-C. Lin, X. Yu, M. Takenaka and S. Takagi
- Organizer
  2013年秋季第74回応用物理学会学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス（京都府京田辺市）
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Ge gate stacks based on Ge oxide interfacial layers and the impact on MOS device properties2013
- Author(s)
  S. Takagi, R. Zhang and M. Takenaka
- Organizer
  18th Conference of "Insulating Films on Semiconductors" (INFOS)
- Place of Presentation
  The Jagiellonian University, Cracow, Poland
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] InPとAl2O3パッシベーションによるInGaAsP細線導波路の損失改善2012
- Author(s)
  一宮佑希、横山正史、市川磨、秦雅彦、竹中充、高木信一
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学、愛媛
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Propagation-loss reduction in InGaAsP photonic-wire waveguides by InP and Al_2O_3 passivation layers2012
- Author(s)
  Y. Ikku, M. Yokoyama, O. Ichikawa, M. Hata, M. Takenaka and S. Takagi
- Organizer
  16th European Conference on Integrated Optics (ECIO'12)
- Place of Presentation
  Barcelona
- Year and Date
  2012-04-18
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] High Mobility Ge n- and p-MOSFETs with ～1nm EOT Al2O3/GeOx/Ge Gate Stacks2012
- Author(s)
  張睿、田岡紀之、黄博勤、竹中充、高木信一
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] Low-driving-current InGaAsP photonic-wire optical switches using III-V CMOS photonics platform2012
- Author(s)
  Y. Ikku, M. Yokoyama, O. Ichikawa, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  European Conference on Optical Communication
- Place of Presentation
  Amsterdam, Netherland
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Physical mechanism determining Ge p- and n-MOSFETs mobility in high ns region and mobility improvement by atomically flat GeOx/Ge interfaces2012
- Author(s)
  R. Zhang, P.C. Huang, J.C. Lin, M. Takenaka, S. Takagi
- Organizer
  International Electron Devices Meeting (IEDM’12)
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] InGaAsP photonic-wire Mach-Zehnder interferometer switches fabricated on III-V CMOS photonics platform2012
- Author(s)
  Y. Ikku, M. Yokoyama, O. Ichikawa, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  2nd International Symposium on Photonics and Electronics Convergence
- Place of Presentation
  The University of Tokyo, Tokyo
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] III-V/Ge integration on Si platform for electronic-photonic integrated circuits2012
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
- Place of Presentation
  Okinawa Seinen-kaikan, Okinawa
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Propagation-loss reduction in InGaAsP photonic-wire waveguides by InP and Al2O3 passivation layers2012
- Author(s)
  Y. Ikku, M. Yokoyama, O. Ichikawa, M. Hata, M. Takenaka and S. Takagi
- Organizer
  European Conference on Integrated Optics
- Place of Presentation
  Barcelona, Spain
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] High Mobility CMOS Technologies using III-V/Ge Channels on Si platform2012
- Author(s)
  S.Takagi, M.Takenaka
- Organizer
  13th International Conference on Ultimate Integration on Silicon (ULIS 2012)
- Place of Presentation
  Grenoble, France(invited)
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] High mobility Ge pMOSFETs with 0.7 nm ultrathin EOT using HfO2/Al2O3/GeOx/Ge gate stacks fabricated by plasma post oxidation2012
- Author(s)
  R. Zhang, P.-C. Huang, N. Taoka, M. Takenaka, S. Takagi
- Organizer
  VLSI Symposium
- Place of Presentation
  Honolulu, USA
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] III-V/Ge integration on Si platform for electronic-photonic integrated circuits2012
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD'12)
- Place of Presentation
  Naha
- Year and Date
  2012-06-29
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] 高性能光電子集積回路に向けたIII-V CMOSフォトニクスプラットフォーム技術2012
- Author(s)
  竹中充、一宮佑希、キムサンヒョン、横山正史、高木信一
- Organizer
  電子情報通信学会ソサイエティ大会
- Place of Presentation
  富山大学、富山
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Advanced Nano CMOS Platform using High Mobility Channel Materials2012
- Author(s)
  S.Takagi, M.Takenaka
- Organizer
  International Symposium on Secure-Life Electronics-Advanced Electronics and Information Systems for Quality Life and Society-
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] III-V/Ge Channel MOS Transistor Technologies for Advanced CMOS2012
- Author(s)
  S.Takagi, S,-H, Kim, R.Zhang, M.Yokoyama, N.Taoka and M.Takenaka
- Organizer
  2011 International Conference on Solid State Devices and Materials (SSDM 2011)
- Place of Presentation
  国立京都国際会館、京都府
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] III-V/Ge integration on Si platform for electronic-photonic integrated circuits2012
- Author(s)
  M. Takenaka
- Organizer
  Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD)
- Place of Presentation
  沖縄青年会館、沖縄県
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Evidence of layer-by-layer oxidation of Ge surfaces by plasma oxidation through Al2O32012
- Author(s)
  R. Zhang, P. Huang, J. Lin, M. Takenaka, and S. Takagi
- Organizer
  The PRiME 2012 Joint International (222nd) ECS Meeting
- Place of Presentation
  Honolulu, USA
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] High Mobility Ge n- and p-MOSFETs with 1nm EOT Al2O3/GeOx/Ge Gate stacks2012
- Author(s)
  R.Zhang, N.Taoka, P.-C.Huang, M.Takenaka, S.Takagi
- Organizer
  2012年春季第59回応用物理学関係連合講演会
- Place of Presentation
  東京(受賞講演)
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] MOS interface and channel engineering for high-mobility Ge/III-V CMOS2012
- Author(s)
  S.Takagi, R.Zhang, S.-H Kim, N.Taoka, M.Yokoyama, J.-K.Suh, R.Suzuki, Y.Asakura, C.Zota and M.Takenaka
- Organizer
  2012 International Electron Devices Meeting (IEDM)
- Place of Presentation
  San Francisco, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Physical Mechanism Determining Ge p- and n-MOSFETs Mobility in High Ns Region and Mobility Improvement by Atomically Flat GeOx/Ge Interfaces2012
- Author(s)
  R.Zhang, P.-C.Huang, J.-C.Lin, M.Takenaka and S.Takagi
- Organizer
  2012 International Electron Devices Meeting (IEDM)
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] 0.7 nm超薄EOT HfO2/Al2O3/GeOx/Geゲートスタックを用いた高移動度Ge pMOSFETs2012
- Author(s)
  張睿、林汝静、黄博勤、田岡紀之、竹中充、高木信一
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] High Mobility CMOS Technologies using III-V/Ge Channels on Si platform2012
- Author(s)
  S.Takagi and M.Takenaka
- Organizer
  13th International Conference on Ultimate Integration on Silicon (ULIS 2012)
- Place of Presentation
  Grenoble, France
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Low-driving-current InGaAsP photonic-wire optical switches using III-V CMOS photonics platform2012
- Author(s)
  Y. Ikku, M. Yokoyama, O. Ichikawa, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  European Conference on Optical Communication (ECOC'12)
- Place of Presentation
  Amsterdam
- Year and Date
  2012-09-18
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Evidence of layer-by-layer oxidation of Ge surfaces by plasma oxidation through Al2O32012
- Author(s)
  R.Zhang, P.-C.Huang, M.Takenaka and S.Takagi
- Organizer
  Symposium on 5th International SiGe, Ge, & Related Compounds : Materials, Processing, and Devices, Symposium E of the 222nd Electrochemical Society (ECS) Meeting
- Place of Presentation
  Honolulu, USA
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Sub-60 nm deeply-scaled channel length extremely-thin body InxGa1-xAs-on-insulator MOSFETs on a Si with Ni-InGaAs metal S/D and MOS interface buffer Engineering2012
- Author(s)
  S. H. Kim, M. Yokoyama, N. Taoka, R. Nakane, T. Yasuda, O. Ichikawa, N. Fukuhara, M. Hata, M. Takenaka, S. Takagi
- Organizer
  VLSI Symposium
- Place of Presentation
  Honolulu, United Sates of America
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] High Mobility Ge pMOSFETs with 0.7 nm Ultrathin EOT using HfO2/Al2O3/GeOx/Ge Gate Stacks Fabricated by Plasma Post Oxidation2012
- Author(s)
  R.Zhang, P.C.Huang, N.Taoka, M.Takenaka and S.Takagi
- Organizer
  Symposium on VLSI technology
- Place of Presentation
  Honolulu, USA
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Advanced CMOS Technologies using III-V/Ge Channels2011
- Author(s)
  S.Takagi, M.Takenaka
- Organizer
  11th International Symposium on VLSI Technology, System and Applications (VLSI-TSA)
- Place of Presentation
  Hsinchu, Taiwan(invited)
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] 1-nm-thick EOT High Mobility Ge n- and p-MOSFETs with Ultrathin GeOx/Ge MOS Interfaces Fabricated by Plasma Post Oxidation2011
- Author(s)
  R.Zhang, N.Taoka, P.Huang, M.Takenaka and S.Takagi
- Organizer
  International Electron Devices Meeting (IEDM)
- Place of Presentation
  Washington DC., USA
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] MOS Interface Properties of Ge Gate Stacks based on Ge oxides and the Impact on MOS Device Performance2011
- Author(s)
  S.Takagi, R.Zhang, N.Taoka and M.Takenaka
- Organizer
  41th IEEE Semiconductor Interface Specialists Conference (SISC 2011)
- Place of Presentation
  Arlington, VA, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] プラスマ後酸化法による1 nm EOT Al2O3/GeOx/Geゲートスタックを用いた高移動度Ge pMOSFETs2011
- Author(s)
  張睿、田岡紀之、岩崎敬志、竹中充、高木信一
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] Impact of GeOx Interfacial Layer Thickness of Al2O3/Ge HOS interface Properties2011
- Author(s)
  R.Zhang, T.Iwasaki, N.Taoka, M.Takenaka, S.Takagi
- Organizer
  7th Conference on Insulating Films on Semiconductor
- Place of Presentation
  Grenoble, France
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Impact of GeOx Interfacial Layer Thickness of Al2O3/Ge MOS interface Properties2011
- Author(s)
  R.Zhang, T.Iwasaki, N.Taoka, M.Takenaka, S.Takagi
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学(神奈川県)
- Year and Date
  2011-03-27
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] メタルS/D 構造及びMOS interface buffer 層の導入による極薄膜 InGaAs-OI MOSFET の高性能化2011
- Author(s)
  金相賢、横山正史、田岡紀之、飯田亮、李成薫、中根了昌、卜部友二、宮田典幸、安田哲二、山田永、福原昇、秦雅彦、竹中充、高木信一
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学、山形
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Mobility Enhancement of Strained-SGOI p-Channel MOSFETs by Applying Ge Condensation Technique to Strained-SOI Substrates2011
- Author(s)
  J.Suh, R.Nakane, N.Taoka, M.Takenaka, S.Takagi
- Organizer
  第72回応用物理学関係連合講演会
- Place of Presentation
  山形
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] ALD Al2O3 activated direct wafer bonding for III-V CMOS photonics platform2011
- Author(s)
  Y. Ikku, M. Yokoyama, R. Iida, M. Sugiyama, Y. Nakano, M. Takenaka, S. Takagi
- Organizer
  Indium Phosphide and Related Materials
- Place of Presentation
  Berlin, Germany
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Impact of GeOx Interfacial Layer Thickness of Al2O3/Ge MOS interface Properties2011
- Author(s)
  R.Zhang, T.Iwasaki, N.Taoka, M.Takenaka and S.Takagi
- Organizer
  17th Conference on "Insulating Films on Semiconductors"
- Place of Presentation
  Grenoble, France
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] High Mobility Ge pMOSFETs with 1nm Thin EOT using Al2O3/GeOx/Ge Gate Stacks Fabricated by Plasma Post Oxidation2011
- Author(s)
  R.Zhang, T.Iwasaki, N.Taoka, M.Takenaka, S.Takagi
- Organizer
  Symposium on VLSI technology
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Non-Si Channel MOS Device Technologies in Nano-CMOS era2011
- Author(s)
  S.Takagi, M.Takenaka
- Organizer
  2011 Tsukuba Nanotechnology Symposium (TNS' 11)
- Place of Presentation
  つくば、茨城(invited)
- Year and Date
  2011-12-15
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Mobility enhancement of strained-SGOI p-channel MOSFETs by applying Ge condensation technique to strained-SOI substrates2011
- Author(s)
  徐準教、中根了昌、田岡紀之、竹中充、高木信一
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] 1-nm-thick EOT high mobility Ge n- and p-MOSFETs with ultrathin GeOx/Ge MOS interfaces fabricated by plasma post oxidation2011
- Author(s)
  R. Zhang, N. Taoka, P. Huang, M. Takenaka, S. Takagi
- Organizer
  International Electron Devices Meeting (IEDM2011)
- Place of Presentation
  Washington D.C., USA
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] III-V on Silicon for high-speed electronics and CMOS photonics2011
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  Indium Phosphide and Related Materials (IPRM'11)
- Place of Presentation
  Berlin
- Year and Date
  2011-05-23
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Device and integration technologies of III-V/Ge channel CMOS2011
- Author(s)
  S.Takagi, M.Yokoyama, Y.-H.Kim, M.Takenaka
- Organizer
  Symposium on ULSI Process Integration 7, Symposium E4 of the 220th Electrochemical Society (ECS) Meeting
- Place of Presentation
  Boston, Massachusetts, USA(invited)
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] プラスマ後酸化法による1 nm EOT Al2O3/GeOx/Geゲートスタックを用いた高移動度Ge pMOSFET2011
- Author(s)
  張睿, 岩崎敬志, 田岡紀之, 竹中充, 高木信一
- Organizer
  応用物理学会シリコンテクノロジー分科会第139回研究集会
- Place of Presentation
  東京(招待講演)
- Year and Date
  2011-07-21
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Enhancement technologies and physical understanding of electron mobility in III-V n-MOSFETs with strain and MOS interface buffer engineering2011
- Author(s)
  S.H. Kim, M. Yokoyama, N. Taoka, R. Nakane, T. Yasuda, M. Ichikawa, N. Fukuhara, M. Hata, M. Takenaka, S. Takagi
- Organizer
  International Electron Devices Meeting
- Place of Presentation
  Washington D.C., United States of America
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Highly-Strained SGOI p-Channel MOSFETs Fabricated by Applying Ge Condensation Technique to Strained-SOI Substrates2011
- Author(s)
  J.-K.Suh, R.Nakane, N.Taoka, M.Takenaka, S.Takagi
- Organizer
  37th Device Research Conference (DRC)
- Place of Presentation
  Santa Barbara, CA, USA
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] High Nobility Ge pMOSFETs with 1nm Thin EOT Al2O3/GeOx/Ge Gate stacks2011
- Author(s)
  R.Zhang, N.Taoka, T.Iwasaki, M.Takenaka, S.Takagi
- Organizer
  第72回応用物理学関係連合講演会
- Place of Presentation
  山形
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Highly-Strained SGOI p-Channel MOSFETs Fabricated by Applying Ge Condensation Technique to Strained-SOI Substrates2011
- Author(s)
  J.-K.Suh, R.Nakane, N.Taoka, M.Takenaka and S.Takagi
- Organizer
  37th Device Research Conference (DRC)
- Place of Presentation
  Santa Barbara, USA
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] 1-nm-thick EOT High Mobility Ge n- and p-MOSFETs with Ultrathin GeOx/Ge MOS Interfaces Fabricated by Plasma Post Oxidation2011
- Author(s)
  R.Zhang, N.Taoka, P.Huang, M.Takenaka, S.Takagi
- Organizer
  International Electron Devices Meeting (IEDM)
- Place of Presentation
  Washington DC, DSA
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] High performance extremely-thin body III-V-on-insulator MOSFETs on a Si substrate with Ni-InGaAs metal S/D and MOS interface buffer engineering2011
- Author(s)
  S.H. Kim, M. Yokoyama, N. Taoka, R. Iida, S. Lee, R. Nakane, Y. Urabe, N. Miyata, T. Yasuda, H. Yamada, N. Fukuhara, M. Hata, M. Takenaka and S. Takagi
- Organizer
  VLSI Symposium
- Place of Presentation
  Rihga Royal Hotel Kyoto, Kyoto
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Prospective and critical issues of III-V/Ge CMOS on Si platform2011
- Author(s)
  S.Takagi, M.Takenaka
- Organizer
  219th Electrochemical Society Meeting, Symposium E3 : International Symposiu on Graphene, Ge/III-V, Nanowires and Emerging Materials for Post-CMOS Applications -3
- Place of Presentation
  Montreal, Canada(invited)
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Non-Si材料チャネルMOSトランジスタの研究開発動向2011
- Author(s)
  高木信一, 竹中充
- Organizer
  日本学術振興会ナノプローブテクノロジー第167委員会第63回研究会
- Place of Presentation
  神奈川(招待講演)
- Year and Date
  2011-07-28
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Highly-strained SGOI p-channel MOSFETs fabricated by applying Ge condensation technique to strained-SOI substrates2011
- Author(s)
  J. Suh, R. Nakane, N. Taoka, M. Takenaka, and S. Takagi
- Organizer
  Device Research Conference (DRC 2011)
- Place of Presentation
  Santa Barbara, USA
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] MOS Interface Properties of Ge Gate Stacks based on Ge oxides and the Impact on MOS Device Performance2011
- Author(s)
  S.Takagi, R.Zhang, N.Taoka, M.Takenaka
- Organizer
  41th IEEE Semiconductor Interface Specialists Conference (SISC 2011)
- Place of Presentation
  Arlington, VA, USA(invited)
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] High Mobility Material Channel CMOS Technologies based on Heterogeneous Integration (Keynote Speech)2011
- Author(s)
  S.Takagi, M.Takenaka
- Organizer
  11th International Workshop on Junction Technology (IWJT2011)
- Place of Presentation
  Kyoto, Japan(invited)
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] MOS interface control technologies for III-V/Ge channel MOSFETs2011
- Author(s)
  S.Takagi, R.Zhang, T.Hoshii, M.Takenaka
- Organizer
  Symposium on High Dielectric Constant and other Dielectric Materials for Nanoeleectronics and Photonics 9, Symposium E4 of the 220th Electrochemical Society (ECS) Meeting
- Place of Presentation
  Boston, Massachusetts, USA(invited)
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] Impact of GeOx interfacial layer thickness of Al2O3/Ge MOS interface Properties2011
- Author(s)
  R. Zhang, T. Iwasaki, N. Taoka, M. Takenaka and S. Takagi
- Organizer
  17th Conference on Insulating Films on Semiconductors (INFOS' 11)
- Place of Presentation
  Grenoble, France
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] ALD Al2O3を用いたIII-V CMOS Photonics用貼り合わせ基板の特性改善2011
- Author(s)
  一宮佑希、横山正史、飯田亮、杉山正和、中野義昭、竹中充、高木信一
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-26
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] III-V CMOS technologies on Si platform2011
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  MRS Spring Meeting
- Place of Presentation
  San Francisco, United States of America
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] High Mobility Ge pMOSFETs with ~ 1nm Thin EOT using Al2O3/GeOx/Ge Gate Stacks Fabricated by Plasma Post Oxidation2011
- Author(s)
  R.Zhang, T.Iwasaki, N.Taoka, M.Takenaka and S.Takagi
- Organizer
  VLSI symp.
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-23246058
[Presentation] III-V CMOS technologies on Si platform2011
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  MRS Spring Meeting
- Place of Presentation
  San Francisco
- Year and Date
  2011-04-27
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] III-V on Silicon for high-speed electronics and CMOS photonics2011
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  Indium Phosphide and Related Materials
- Place of Presentation
  Berlin, Germany
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] High mobility Ge pMOSFETs with ~ 1nm thin EOT using Al2O3/GeOx/Ge Gate Stacks fabricated by plasma post oxidation2011
- Author(s)
  R. Zhang, T. Iwasaki, N. Taoka, M. Takenaka and S. Takagi
- Organizer
  VLSI Symposium., 4A-1, , June 2011
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] 気相拡散によるソース・ドレイン接合を用いた高性能GeO2/Ge nMOSFET2010
- Author(s)
  森井清仁, 岩崎敬志, 中根了昌, 竹中充, 高木信一
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学、神奈川県
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] High Mobility CMOS Technologies using Ge-based Channels2010
- Author(s)
  高木信一, 竹中充
- Organizer
  5th international SiGe Technology and Device Meeting(ISTDM)
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Evidence of Correlation between Surtace Roughness and Intertace States Generationin Unstrained and Strained-Si MOSFETs2010
- Author(s)
  Y.Zhao, M.Takenaka, S. Takagi
- Organizer
  2010 Symposium on VLSI Technology
- Place of Presentation
  Horwlulu, Hawaii, USA
- Year and Date
  2010-06-17
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] 気相拡散により形成したソース・ドレイン接合を用いた高性能GeO2/Ge nMOSFET2010
- Author(s)
  森井清仁, 岩崎敬志, 中根了昌, 竹中充, 高木信一
- Organizer
  電気学会「グリーンITにおける化合物半導体電子デバイス」調査専門委員会
- Place of Presentation
  大岡山、東京
- Year and Date
  2010-03-26
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] 二軸引張りひずみSi MOS電子・正孔反転層における界面電荷・基板不純物によるクーロン散乱に与える影響の統一的な物理機構2010
- Author(s)
  趙毅, 竹中充, 高木信一
- Organizer
  第57回応物理学関係連合講演会
- Place of Presentation
  東海大学、神奈川県
- Year and Date
  2010-03-18
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] MOVPEを用いた気相ドーピングによる高品質Ge n+/p接合の形成およびGe nMOSFETへの応用2010
- Author(s)
  竹中充, 森井清仁, 高木信一
- Organizer
  電気学会シリコンナノデバイス集積化技術調査専門委員会・化合物半導体電子デバイス調査専門委員会合同委員会「高移動度化技術」
- Place of Presentation
  早稲田、東京
- Year and Date
  2010-03-05
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] 高精度TEMと新しいデータ分析方法によるMOS界面ラフネス移動度及びその引張り歪みの影響の定量評価2010
- Author(s)
  趙毅, 松本弘昭, 佐藤岳志, 小山晋, 竹中充, 高木信一
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  東京大学、神奈川県
- Year and Date
  2010-03-18
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] 酸化濃縮法により生成したSGOI中の圧縮ひずみと酸化前基板構造の関係2010
- Author(s)
  富山健太郎, Dissanayake Sanjeewa, 竹中充, 高木信一
- Organizer
  第57回応用物理学関係迎合講演会
- Place of Presentation
  東海大学、神奈川県
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] III-V CMOS photonicsプラットフォーム実現に向けたグレーティングカプラの作製2010
- Author(s)
  竹中充、横山正史、杉山正和、中野義昭、高木信一
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] 二軸引張りひずみSi MOS電子・正孔反転層における界面電荷・基板不純物によるクーロン散乱に与える影響の統一的な物理機構2010
- Author(s)
  趙毅, 竹中充, 高木信一
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学、神奈川県
- Year and Date
  2010-03-18
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] 高性能光電子集積回路実現に向けたIII-V CMOSプラットフォーム技術2010
- Author(s)
  竹中充、横山正史、杉山正和、中野義昭、高木信一
- Organizer
  電子情報通信学会レーザ・量子エレクトロニクス研究会
- Place of Presentation
  千歳アルカディアプラザ
- Year and Date
  2010-08-26
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Evidence of Correlation between Surface Roughness and Interface States Generation in Unstrained and Strained-Si MOSFETs2010
- Author(s)
  Y.Zhao, M.Takenaka, S.Takagi
- Organizer
  2010 Symposium on VLSI Technology
- Place of Presentation
  Honolulu, Hawaii, USA
- Year and Date
  2010-06-17
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] Suppression of ALD-induced degradation of Ge MOS interface properties by low power plasma nitridation of GeO_22010
- Author(s)
  R.Zhang, T.Iwasaki, M.Takenaka, S.Takagi
- Organizer
  International Conference on Solid State Devices and Materials (SSDM'10)
- Place of Presentation
  東京大学(東京都)
- Year and Date
  2010-09-22
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] Si MOS界面ラフネス散乱による移動度とひずみの効果(招待講演)2010
- Author(s)
  高木信一, 趙毅, 竹中充, 松本弘昭, 佐藤岳志, 小山晋
- Organizer
  応用物理学会シリコンテクノロジー分科会第121回研究集会「半導体シリコン単結晶ウェーハを特徴づける評価技術」
- Place of Presentation
  学習院大学、東京
- Year and Date
  2010-03-12
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] High Mobility Ge CMOS Technologies2010
- Author(s)
  高木信一, 竹中充
- Organizer
  5th International Workshop on New Group IV Semiconductor Nanoelectronics
- Place of Presentation
  Sendai, Japan
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Si MOS界面ラフネス散乱による移動度とひずみの効果2010
- Author(s)
  高木信一, 趙毅, 竹中充, 松本弘昭, 佐藤岳志, 小山晋
- Organizer
  応用物理学会シリコンテクノロジー分科会第121回研究集会「半導体シリコン単結晶ウェーハを特徴づける評価技術」
- Place of Presentation
  学習院大学、東京(招待講演)
- Year and Date
  2010-03-12
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] A Plasma Assisted Top-to-Bottom Assembly of Ge/GeOx/Al2O3 Gate Stack with Superior Electrical Properties2010
- Author(s)
  R.Zhang, T.Iwasaki, N.Taoka, M.Takenaka, S.Takagi
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学(長崎県)
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] Suppression of ALD-Induced Degradation on ultra thin GeO2 using Low Power Plasma Nitridation2010
- Author(s)
  R.Zhang, T.Iwasaki, N.Taoka, M.Takenaka, S.Takagi
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学(長崎県)
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] Thin EOT and low D_<it>Al_2O_3/GeO_x/Ge Gate stacks fabricated by novel post-oxidation method2010
- Author(s)
 R.Zhang, T.Iwasaki, N.Taoka, M.Takenaka, S.Takagi
- Organizer
 IEEE Semiconductor Interface Specialists conference (SISC'10)
- Place of Presentation
 Washington D.C., USA
- Year and Date
 2010-12-03
- Data Source
 KAKENHI-PROJECT-22000011
[Presentation] III-V/Ge CMOS technologies on Si platform2010
- Author(s)
  高木信一, 竹中充
- Organizer
  Symposium on VLSI Technology
- Place of Presentation
  Honolulu, Hawaii
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] 高精度TEMと新しいデータ分析方法によるMOS界面ラフネス移動度及びその引張り歪みの影響の定量評価2010
- Author(s)
  趙毅, 松本弘昭, 佐藤岳志, 小山晋, 竹中充, 高木信一
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学、神奈川県
- Year and Date
  2010-03-18
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] Electrical Properties of(110)-oriented Ultra-thin GOI p-MOSFETs Fabricated by Ge Condensation Technique2009
- Author(s)
  S.Dissanayake, Y.Shuto, S.Sugahara, M.Takenaka, S.Takagi
- Organizer
  第70回応用物理学会学術講演会
- Place of Presentation
  富山大学、富山県
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] High Performance(110)-oriented GOI pMOSFETs Fabricated by Ge Condensation Technique2009
- Author(s)
  S.Dissanayake, S.Sugahara, M.Takenaka, S.Takagi
- Organizer
  International Conference on Solid Sate Devices and Materials(SSDM2009)
- Place of Presentation
  Sendai, Japan
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] 高精度TEMと新しいデータ分析方法によるMOS界面ラフネス移動度の定量評価及び引張り歪からの影響2009
- Author(s)
  趙毅, 松本弘昭, 佐藤岳志, 小山晋, 竹中充, 高木信一
- Organizer
  第73回半導体・集積回路技術シンポジウム
- Place of Presentation
  東京農工大学、東京
- Year and Date
  2009-07-10
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] Fabrication of III-V MOS structureby using selective oxidation of InAlAs2009
- Author(s)
  S. Nakagawa, M. Yokoyama, O. Ichikawa,M. Hata, M. Tanaka, M. Takenaka, S.Takagi
- Organizer
  International Conference on Solid StateDevices and Materials (SSDM'08)
- Place of Presentation
  G-9-4,Tsukuba
- Year and Date
  2009-09-26
- Data Source
  KAKENHI-PROJECT-19860024
[Presentation] Interfacial Control and Electrical Properties of Ge MOS structures2009
- Author(s)
  S.Takagi, N.Taoka, M.Takenaka
- Organizer
  10th International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics, 215th Meeting of The Electrochemical Society
- Place of Presentation
  San Francisco, USA
- Year and Date
  2009-05-25
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Advanced Nano CMOS Platform using Ge/III-V Channels2009
- Author(s)
  S. Takagi, M. Sugiyama and M. Takenaka
- Organizer
  First International Symposium on Atomically Controlied Fabrication Technology-Surface and Thin Film Processing-
- Place of Presentation
  Osaka, Japan(invited)
- Year and Date
  2009-02-17
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Ge/III-V Channel Engineering for future CMOS (invited)2009
- Author(s)
  S. Takagi, M. Sugiyama, T. Yasuda, M. Takenaka
- Organizer
  1st International Symposium on Graphene and Emerging Materials for Post-CMOS Applications, 215 th Meeting of The Electrochemical Society
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Impact of plasma nitridation of thermally-grown GeO2/Ge MIS structures on the GeO2 film and interface properties2009
- Author(s)
  T.Iwasaki, N.Taoka, M.Takenaka, S.Takagi
- Organizer
  40th IEEE Semiconductor Interface Specialists Conference(SISC)
- Place of Presentation
  Washington D.C., USA
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] High Performance (110)-oriented GOI pMOSFETs Fabricated by Ge Condensation Technique2009
- Author(s)
  S. Dissanayake, S. Sugahara, M. Takenaka, S. Takagi
- Organizer
  SSDM
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] High Performance GeO2/Ge nMOSFETs with Source/Drain Junctions Formed by Gas Phase Doping2009
- Author(s)
  森井清仁, 岩崎敬志, 中根了昌, 竹中充, 高木信一
- Organizer
  International Electron Device Meeting(IEDM)
- Place of Presentation
  Baltimore, USA
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Interfacial Control and Electrical Properties of Ge MOS structures (invited)2009
- Author(s)
  S. Takagi, N. Taoka, M. Takenaka
- Organizer
  10th International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics, 215 th Meeting of The Electrochemical Society
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] High Performance GeO2/Ge nMOSFETs with Source/Drain Junctions Formed by Gas Phase Doping2009
- Author(s)
  K. Morii, T. Iwasaki, R. Nakane, M. Takenaka, S. Takagi
- Organizer
  International Electron Device Meeting
- Place of Presentation
  Baltimore, USA
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Comprehensive Understanding of Surface Roughness Limited Mobility in Unstrained-and Strained-Si MOSFETs by Novel Characterization Scheme of Si/SiO2 Interface Roughness2009
- Author(s)
  Y.Zhao, H.Matsumoto, T.Sato, S.Koyama, M.Takenaka, S.Takagi
- Organizer
  Symposium on VLSI Technology
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2009-06-15
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] Ge/III-V Channel Engineering for future CMOS2009
- Author(s)
  S.Takagi, M.Sugiyama, T.Yasuda, M.Takenaka
- Organizer
  1st International Symposium on Graphene and Emerging Materials for Post-CMOS Applications, 215th Meeting of The Electrochemical Society
- Place of Presentation
  San Francisco, USA
- Year and Date
  2009-05-25
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Comprehensive Understanding of Surface Roughness Limited Mobility in Unstrained- and Strained-Si MOSFETs by Novel Characterization Scheme of Si/SiO2 Interface Roughness2009
- Author(s)
  Y.Zhao, H.Matsumoto, T.Sato, S.Koyama, M.Takenaka, S.Takagi
- Organizer
  Symposium on VLSI Technology
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2009-06-15
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] Gas phase doping of arsenic into germanium by using MOVPE system for source/drain formation of high performance Ge nMOSFETs2009
- Author(s)
  M. Takenaka, M. Sugiyama, Y. Nakano, S. Takagi
- Organizer
  Symposium I: Silicon and Germanium issues for future CMOS devices, E-MRS 2009
- Place of Presentation
  Strasbourg (France)
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Impact of plasma nitridation of thermally-grown GeO2/Ge MIS structures on the GeO2 film and interface properties2009
- Author(s)
  T. Iwasaki, N. Taoka, M. Takenaka, S. Takagi
- Organizer
  40th IEEE Semiconductor Interface Specialists Conference
- Place of Presentation
  Washington D.C., USA
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Gas phase doping of arsenic into germanium by using MOVPE system for source/drain formation of high performance Ge nMOSFETs2009
- Author(s)
  M.Takenaka, M.Sugiyama, Y.Nakano, S.Takagi
- Organizer
  Symposium I : Silicon and Germanium issues for future CMOS devices, E-MRS 2009
- Place of Presentation
  Strasbourg, France
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Interface-controlled Self-Align Source/Drain Ge pMOSFETs Using Thermally-Oxidized GeO2 Interfacial Layers2008
- Author(s)
  Y. Nakakita, R. Nakane, T. Sasada, H. Matsubara, M. Takenaka and S. Takagi
- Organizer
  International Electron Device Meeting (IEDM)
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Fabrication of III-V MOS structure by using selective oxidation of InAlAs2008
- Author(s)
  S. Nakagawa, M. Yokoyama, O. Ichikawa, M. Hata, M. Tanaka, M. Takenaka. S. Takagi
- Organizer
  International Conference on Solid State Devices and Materials
- Place of Presentation
  つくば
- Year and Date
  2008-09-26
- Data Source
  KAKENHI-PROJECT-19860024
[Presentation] Evaluation of Electron and Hole Mobility at Identical MOS Interfaces by using Metal Source/Drain GOI MOSFETs2008
- Author(s)
  K. Morii, S. Dissanayake, S. Tanabe, R. Nakane, M. Takenaka, S. Sugahara and S. Takaai
- Organizer
  2008 International Conference on Solid State Devices and Materials (SSDM)
- Place of Presentation
  Tsukuba, Japan
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Improvement of Interface Properties of GeO2/Ge MOS Structures Fabricated by Thermal Oxidation2008
- Author(s)
  T. Sasada, H. Matsubara, M. Takenaka and S. Takaai
- Organizer
  2008 International Conference on Solid State Devi ces and Materials (SSDM)
- Place of Presentation
  Tsukuba, Japan
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Interface-controlled Self-Align Source/Drain Ge pMOSFETs Using Thermally-Oxidized GeO2 Interfacial Layers2008
- Author(s)
  Yosuke Nakakita, Ryosho Nakane, Takashi Sasada, Hiroshi Matsubara, M. Takenaka, S. Takagi
- Organizer
  International Electron Device Meeting
- Place of Presentation
  San Fracisco, USA
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Improvement of Interface Properties of GeO2/Ge MOS Structures Fabricated by Thermal Oxidation2008
- Author(s)
  T. Sasada, H. Matsubara, M. Takenaka, S. Takagi
- Organizer
  2008 International Conference on Solid State Devices and Materials
- Place of Presentation
  Tsukuba, Japan
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Comprehensive understanding of surface roughness and Coulomb scattering mobility in biaxially-strained Si MOSFETs2008
- Author(s)
  Y.Zhao, M.Takenaka and S.Takagi
- Organizer
  International Electron Device Meeting(IEDM)
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] Evaluation of Electron and Hole Mobility at Identical MOS Interfaces by using Metal Source/Drain GOI MOSFETs2008
- Author(s)
  Kiyohito Morii, Sanjeewa Dissanayake, Satoshi Tanabe, Ryosho Nakane, Mitsuru Takenaka, Satoshi Sugahara, Shinichi Takagi
- Organizer
  2008 International Conference on Solid State Devices and Materials
- Place of Presentation
  Tsukuba, Japan
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Surface Orientation Dependence of Interface Properties of GeO2/Ge MOS Structures Fabricated by Thermal Oxidation2008
- Author(s)
  Takashi Sasada, Yosuke Nakakita, Mitsuru Takenaka, Shinichi Takagi
- Organizer
  39th IEEE Semiconductor Interface Specialists Conference
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Comprehensive understanding of surface roughness and Coulomb scattering mobility in biaxiallystrained Si MOSFETs2008
- Author(s)
  Y.Zhao, M.Takenaka, S.Takagi
- Organizer
  International Electron Device Meeting (IEDM)
- Place of Presentation
  San Francisco, USA
- Year and Date
  2008-12-15
- Data Source
  KAKENHI-PROJECT-20246055
[Presentation] InAlAs選択酸化によるIII-V MOS界面構造の形成2008
- Author(s)
  中川翔太, 横山正史, 市川磨, 秦雅彦, 田中雅明, 竹中充, 高木信一
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学理工学部
- Year and Date
  2008-03-29
- Data Source
  KAKENHI-PROJECT-19860024
[Presentation] Interface-controlled Self-Align Source/Drain Ge pMOSFETs Using Thermally-Oxidized GeO2 Interfacial Layers2008
- Author(s)
  Y. Nakakita, R. Nakane, T. Sasada, H. Matsubara, M. Takenaka and S. Takagi
- Organizer
  International Electron Device Meeting, pp. 877-880
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Electrical Characteristics of (110)-oriented Ultra-thin GOI p-MOSFETs Fabricated by Ge Condensation Method2008
- Author(s)
  Sanjeewa Dissanayake, Yusuke Shuto, Satoshi Sugahara, Mitsuru Takenaka, Shinichi Takagi
- Organizer
  2008年秋季第69回応用物理学会学術講演会
- Place of Presentation
  於中部大学
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Superior MOS Interface Properties of GeO2/Ge Structures Fabricated by Ozone Oxidation2007
- Author(s)
  S. Takagi, H. Matsubara, M. Nishikawa, T. Sasada, R. Nakane, S. Sugahara, M. Takenaka
- Organizer
  5th International Symposium on Control of Semiconductor Interfaces (ISCSI-V)
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Superior MOS Interface Properties of GeO2/Ge Structures Fabricated by Ozone Oxidation2007
- Author(s)
  S. Takagi, H. Matsubara, M. Nishikawa, T. Sasada, R. Nakane, S. Sugahara and M. Takenaka
- Organizer
  5th International Symposium on Control of Semiconductor Interfaces-for Next Generation ULSI Process Integrations- (ISCSI-V)
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2007-11-13
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Fabrication of(110)GOI Layers by Ge Condensation of SiGe/(110)SOI Structure and Application to pMOSFET Devices2007
- Author(s)
  S. Dissanayake, S. Sugahara, M. Takenaka and S. Takagi
- Organizer
  2nd International Conference on Industrial and Information Systems(ICIIS 2007)
- Place of Presentation
  University of Peradeniya, Sri Lanka
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Effect of Annealing on (100) and (110) Oriented pseudo-GOI pMOSFETs Fabricated by Ge Condensation Method2007
- Author(s)
  S. Dissanayake, S. Tanabe, S. Sugahara, M. Takenaka and S. Takagi
- Organizer
  5th International Symposium on Control of Semiconductor Interfaces (ISCSI-V), pp. 233-234
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Effects of Atomic Hydrogen Annealing on Reduction of Leakage Current in Ultrathin Si/Ge/Si-On-Insulator Metal Source/Drain p-Channel MOSFETs2007
- Author(s)
  S. Takagi, T. Uehara, S. Tanabe, H. Matsubara, R. Nakane, M. Takenaka and S. Sugahara
- Organizer
  34th International Symposium on Compound Semiconductors (ISCS2007)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2007-10-16
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Carrier-Transport-Enhanced CMOS using New Channel Materials and Structures (invited)2007
- Author(s)
  S. Takagi, T. Irisawa, T. Tezuka, S. Nakaharai, K. Usuda, N. Hirashita, M. Takenaka and N. Sugiyama
- Organizer
  International Semiconductor Device Research Symposium (ISDRS)
- Place of Presentation
  Maryland, USA
- Year and Date
  2007-12-13
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Fabrication of (110) GOI Layers by Ge Condensation of SiGe/ (110) SOI Structure and Application to pMOSFET Devices2007
- Author(s)
  S. Dissanayake, S. Sugahara, M. Takenaka, S. Takagi
- Organizer
  2nd International Conference on Industrial and Information Systems (ICIIS 2007)
- Place of Presentation
  Sri Lanka
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Evaluation of SiO2/GeO2/Ge MIS Interface Properties by Low Temperature Conductance Method2007
- Author(s)
  H. Matsubara, H. Kumagai, S. Sugahara, M. Takenaka, S. Takagi
- Organizer
  Ext. Abs. SSDM
- Place of Presentation
  Tsukuba, Japan
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Understanding and Control of Ge MIS Interface Properties (invited)2007
- Author(s)
  S. Takagi, T. Maeda, N. Taoka, M. Nishizawa, Y. Morita, K. Ikeda, Y. Yamashita, M. Harada, T. Yamamoto, N. Sugiyama, M. Nishikawa, H. Kumagai, H. Matsubara, R. Nakane, M. Takenaka and S. Sugahara
- Organizer
  4th International Symposium on Advanced Gate Stack Technology
- Place of Presentation
  Dallas, USA
- Year and Date
  2007-09-27
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Examination of Additive Mobility Enhancements for Uniaxial Stress Combined with Biaxially Strained Si, Biaxially Strained SiGe and Ge Channel MOSFETs2007
- Author(s)
  O. Weber, T. Irisawa, T. Numata, M. Harada, N. Taoka, Y. Yamashita, T. Yamamoto, N. Sugiyama, M. Takenaka, S. Takagi
- Organizer
  International Electron Device Meeting
- Place of Presentation
  Washington DC., USA
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Effects of Atomic Hydrogen Annealing on Reduction of Leakage Current in Ultrathin Si/Ge/Si-On-Insulator Metal Source/Drain p-Channel MOSFETs2007
- Author(s)
  S. Takagi, T. Uehara, S. Tanabe, H. Matsubara, R. Nakane, M. Takenaka, S. Sugahara
- Organizer
  34th International Symposium on Compound Semiconductors
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Evaluation of SiO2/GeO2/Ge MlS Interface Properties by Low Temperature Conductance Method2007
- Author(s)
  H. Matsubara, H. Kumagai, S. Sugahara and M. Takenaka and S. Takagi
- Organizer
  International Conference on Solid State Devices and Materials(SSDM)
- Place of Presentation
  Tsukuba, Japan
- Year and Date
  2007-09-19
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Effect of Annealing on (100) and (110) Oriented pseudo-GOI pMOSFETs Fabricated by Ge Condensation Method2007
- Author(s)
  S. Dissanayake, S. Tanabe, S. Sugahara, M. Takenaka and S. Takagi
- Organizer
  5th International Symposium on Control of Semiconductor Interfaces-for Next Generation ULSI Process Integrations- (ISCSI-V)
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2007-11-14
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Effects of Annealing on (110) GOI Layers Fabricated by Ge Condensation Method2007
- Author(s)
  S. Dissanayake, Y. Shuto, S. Sugahara, M. Takenaka, S. Takagi
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  於北海道工業大学
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Effect of Annealing on (100) and (110) Oriented pseudo-GOI pMOSFETs Fabricated by Ge Condensation Method2007
- Author(s)
  S. Dissanayake, S. Tanabe, S. Sugahara, M. Takenaka, S. Takagi
- Organizer
  5th International Symposium on Control of Semiconductor Interfaces (ISCSI-V)
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] 異種半導体集積CMOSおよびフォトニクス融合への展望
- Author(s)
  竹中充
- Organizer
  光産業技術振興協会第4回フォトニックデバイス・応用技術研究会
- Place of Presentation
  上智大学（東京都千代田区）
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Waveguide InGaAs photodetector with Schottky barrier enhancement layer on III-V CMOS photonics platform
- Author(s)
  Y. Cheng, Y. Ikku, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  Indium Phosphide and Related Materials
- Place of Presentation
  Le Corum, Montpellier, France
- Year and Date
  2014-05-11 – 2014-05-15
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Mobility improvement of ultrathin-body Germanium-on-insulator (GeOI) MOSFETs on flipped Smart-Cut GeOI substrates
- Author(s)
  X. Yu, J. Kang, R. Zhang, M. Takenaka and S. Takagi
- Organizer
  Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
- Place of Presentation
  Aula Prodi, Bologna, Italy
- Year and Date
  2015-01-26 – 2015-01-28
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Surface orientation depdendence of electro-optic effects in InGaAsP for lateral pin-junction InGaAsP photonic-wire modulators
- Author(s)
  Y. Ikku, M. Takenaka, and S. Takagi
- Organizer
  Indium Phosphide and Related Materials
- Place of Presentation
  Le Corum, Montpellier, France
- Year and Date
  2014-05-11 – 2014-05-15
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Low-crosstalk 2 x 2 InGaAsP photonic-wire optical switches using III-V CMOS photonics platform
- Author(s)
  Y. Ikku, M. Yokoyama, N. Noguchi, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  European Conference on Optical Communication
- Place of Presentation
  the ExCeL centre, London, UK
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Ultra-small, low-crosstalk, electrically-driven InGaAsP photonic-wire optical switches on III-V CMOS photonics platform
- Author(s)
  Y. Ikku, M.Yokoyama, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  Optical Fiber Communication Conference
- Place of Presentation
  Moscone center, San Francisco, USA
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Performance enhancement technologies in III-V/Ge MOSFETS
- Author(s)
  S. Takagi, R. Zhang, S.-H. Kim, M. Yokoyama, M. Takenaka
- Organizer
  224th ECS Meeting
- Place of Presentation
  The Hilton San Francisco Hotel, San Francisco, USA
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Gate stack technologies for high mobility channel MOSFETs
- Author(s)
  S. Takagi, R. Zhang, C.-Y. Chang, J.-H. Han, M. Yokoyama and M. Takenaka
- Organizer
  2015 MRS Spring Meeting & Exhibit, Sympoium AA, “Materials for Beyond the Roadmap Devices in Logic, Power and Memory”
- Place of Presentation
  Moscone West Convention Center, San Francisco, USA
- Year and Date
  2015-04-06 – 2015-04-10
- Invited
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] 異種半導体集積を用いたCMOSフォトニクス
- Author(s)
  竹中充、高木信一
- Organizer
  レーザー学会第34回年次大会
- Place of Presentation
  北九州国際会議場（福岡県北九州市）
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Multi-bandgap III-V on insulator wafer fabricated by quantum well intermixing for III-V CMOS photonics platform
- Author(s)
  M. Kuramochi, M. Takenaka, Y. Ikku, and S. Takagi
- Organizer
  Indium Phosphide and Related Materials
- Place of Presentation
  Le Corum, Montpellier, France
- Year and Date
  2014-05-11 – 2014-05-15
- Data Source
  KAKENHI-PROJECT-26709022
[Presentation] Reduction in crosstalk of carrier-injection mach-zehnder interferometer optical switches by using III-V CMOS photonics platform
- Author(s)
  Y. Ikku, M. Yokoyama, M. Noguchi, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  3rd International Symposium on Photonics and Electronics Convergence
- Place of Presentation
  Eneos Hall, Meguro-ku, Tokyo
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] III-V/Ge CMOS Device Technologies for Future Logic LSIs
- Author(s)
  S. Takagi and M. Takenaka
- Organizer
  7th International SiGe Technology and Device Meeting (ISTDM)
- Place of Presentation
  Swissotel Merchant Court, Singapore, Singapore
- Year and Date
  2014-06-02 – 2014-06-04
- Invited
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Waveguide InGaAs MSM photodetector for chip-scale optical interconnects on III-V CMOS photonics platform
- Author(s)
  Y. Cheng, Y. Ikku, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  Asia Communications and Photonics Conference
- Place of Presentation
  Beijing International Convention Center, Beijin, China
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Strained extremely-thin body In0.53Ga0.47As-On-Insulator MOSFETs on Si substrates
- Author(s)
  S. H. Kim, M. Yokoyama, R. Nakane, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  VLSI Symposium
- Place of Presentation
  Rihga Royal Hotel Kyoto, Kyoto, Kyoto
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Electrical Properties of (110)-oriented Ultra-thin GOI p-MOSFETs Fabricated by Ge Condensation Technique
- Author(s)
  S. Dissanayake, Y. Shuto, S. Sugahara, M. Takenaka, S. Takagi
- Organizer
  2008年秋季応用物理学会
- Data Source
  KAKENHI-PROJECT-18063005
[Presentation] Study of Thermal Annealing Effect on Smartcut Ge-on-Insulator Substrate
- Author(s)
  Jian Kang, Xiao Yu, Mitsuru Takenaka, Shinichi Takagi
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-26220605
[Presentation] II-V CMOSフォトニクス•プラットフォーム上導波路型InGaAs MSMフォトディテクタの作製
- Author(s)
  程勇鵬, 一宮佑希, 市川磨, 長田剛規, 秦雅彦, 竹中充, 高木信一
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス（神奈川県相模原市）
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Mobility improvement of ultrathin-body Germanium-on-insulator (GeOI) MOSFETs on flipped Smart-Cut GeOI substrates
- Author(s)
  X. Yu, J. Kang, R. Zhang, M. Takenaka and S. Takagi
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス（神奈川県平塚市）
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] III-V/Ge CMOSフォトニクス実現に向けたデバイス技術
- Author(s)
  竹中　充，高木信一
- Organizer
  電気化学会電子材料委員会第77回半導体・集積回路技術シンポジウム
- Place of Presentation
  東京工業大学（東京都目黒区）
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] nGaAsP細線導波路光スイッチに向けたZn拡散によるp+InGaAsPの形成
- Author(s)
  一宮佑希，野口宗隆，横山正史，市川　磨，長田剛規，秦　雅彦，竹中　充，高木信一
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス（京都府京田辺市）
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Ultrathin body Germanium-on-insulator (GeOI) MOSFETs fabricated by transfer of epitaxial Ge films on III-V substrates
- Author(s)
  X. Yu, R. Zhang, J. Kang, T. Osada, M. Hata, M. Takenaka and S. Takagi
- Organizer
  21st International Symposium on VLSI Technology, Systems and Applications (2014 VLSI-TSA)
- Place of Presentation
  Ambassador Hotel, Hsinchu, Taiwan
- Year and Date
  2014-04-28 – 2014-04-30
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Heterogeneous integration for CMOS photonics
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  3rd International Symposium on Photonics and Electronics Convergence
- Place of Presentation
  Eneos Hall, Meguro-ku, Tokyo
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] プラスマ後酸化法による1 nm EOT Al2O3/GeOx/Geゲートスタックを用いた高移動度Ge pMOSFET
- Author(s)
  張睿、岩崎敬志、田岡紀之、竹中充、高木信一
- Organizer
  応用物理学会シリコンテクノロジー分科会第139回研究集会「VLSIシンポジウム特集（先端CMOSデバイス・プロセス技術）」
- Place of Presentation
  東京
- Invited
- Data Source
  KAKENHI-PROJECT-22000011
[Presentation] High performance extremely-thin body InAs-On-Insulator MOSFETs on Si with Ni-InGaAs metal S/D by contact resistance reduction technology
- Author(s)
  S. H. Kim, M. Yokoyama, R. Nakane, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  VLSI Symposium
- Place of Presentation
  Rihga Royal Hotel Kyoto, Kyoto, Kyoto
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Analysis on channel thickness fluctuation scattering in InGaAs-OI MOSFETs
- Author(s)
  S. H. Kim, M. Yokoyama, R. Nakane, O. Ichikawa, T. Osada, M. Hata, M. Takenaka and S. Takagi
- Organizer
  Indium Phosphide and Related Materials
- Place of Presentation
  Kobe Convention Center, Kobe, Hyogo
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Physical understanding of electron mobility in uniaxially strained InGaAs-OI MOSFETs
- Author(s)
  S.-H. Kim, M. Yokoyama, R. Nakane, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
- Organizer
  43rd European Solid-State Device Research Conference (ESSDERC’13)
- Place of Presentation
  Marriott Bucharest Grand Hotel, Bucharest, Romaina
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] InGaAsP細線導波路光スイッチにおける低クロストーク動作
- Author(s)
  一宮佑希, 横山正史, 野口宗隆, 市川磨, 長田剛規, 秦雅彦, 竹中充, 高木信一
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス（神奈川県相模原市）
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] III-V/Ge device engineering for CMOS photonics
- Author(s)
  M. Takenaka and S. Takagi
- Organizer
  International Conference on Processing & Manufacturing of Advanced Materials
- Place of Presentation
  Rio Hotel, Las Vegas, USA
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] High mobility CMOS technologies using III-V/Ge channels
- Author(s)
  S. Takagi and M. Takenaka
- Organizer
  IEEE Nanotechnology Materials and Devices Conference
- Place of Presentation
  National Cheng Kung University, Tainan, Taiwan
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] High performance sub-20-nm-channel-length extremely-thin body InAs-on-Insulator tri-gate MOSFETs with high short channel effect immunity and Vth tunability
- Author(s)
  S.-H. Kim, M. Yokoyama, R. Nakane, M. Ichikawa, T. Osada, M. Hata, M. Takenaka, S. Takagi
- Organizer
  International Electron Devices Meeting
- Place of Presentation
  Washington Hilton, Washington D. C., USA
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] Quantitative evaluation of slow traps near Ge MOS interfaces by using time response of MOS capacitance
- Author(s)
  K. Tanaka, R. Zhang, M. Takenaka and S. Takagi
- Organizer
  46th International Conference on Solid State Devices and Materials (SSDM)
- Place of Presentation
  つくば国際会議場（茨城県つくば市）
- Year and Date
  2014-09-09 – 2014-09-11
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] Material Challenges and Opportunities in Ge/III-V channel MOSFETs
- Author(s)
  S. Takagi, S.-H. Kim, M. Yokoyama, K. Nishi, R. Zhang and M. Takenaka
- Organizer
  226th Fall meeting of the Electrochemical Society, P3 - High Purity and High Mobility Semiconductors 13
- Place of Presentation
  Moon Palace Resort, Cancun, Mexico
- Year and Date
  2014-10-05 – 2014-10-10
- Invited
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] III-V/Ge Channel MOS Device Technologies in Nano CMOS era
- Author(s)
  S. Takagi and M. Takenaka
- Organizer
  27th International Microprocesses and Nanotechnology Conference (MNC)
- Place of Presentation
  ヒルトン福岡シーホーク（福岡県福岡市）
- Year and Date
  2014-11-04 – 2014-11-07
- Data Source
  KAKENHI-PROJECT-26249038
[Presentation] III-V/Ge MOS transistor technologies for future ULSI
- Author(s)
  Shinichi Takagi and Mitsuru Takenaka
- Organizer
  International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors
- Place of Presentation
  Grand Hotel de Paris, Grenoble, France
- Invited
- Data Source
  KAKENHI-PROJECT-22686034
[Presentation] 量子井戸インターミキシグを用いた III-V CMOSフォトニクス用マルチバンドギャップ貼り合せ基板の作製
- Author(s)
  倉持美沙，竹中充，一宮佑希，高木信一
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス（神奈川県相模原市）
- Data Source
  KAKENHI-PROJECT-22686034

1. TAKAGI Shinichi (30372402)

# of Collaborated Projects: 5 results

# of Collaborated Products: 259 results
2. ZAIMA Shigeaki (70158947)

# of Collaborated Projects: 2 results

# of Collaborated Products: 1 results
3. NAKATSUKA Osamu (20334998)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. SUGAHARA Satoshi (40282842)

# of Collaborated Projects: 1 results

# of Collaborated Products: 29 results
5. SAKASHITA Mitsuo (30225792)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
6. TANAKA Nobuo (40126876)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. TAKEUCHI Wakana (90569386)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. KUROSAWA Masashi (40715439)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 齋藤晃 (50292280)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. HO CHONG PEI

# of Collaborated Projects: 1 results

# of Collaborated Products: 26 results
11. 杉山正和

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
12. 中野義昭

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
13. CHENG Zhenzhou

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Takenaka Mitsuru 竹中 充

TAKENAKA Mitsuru 竹中 充

Research Projects

Research Products

Co-Researchers

Development of fundamental technologies for III-V semiconductor membrane photonic integrated circuits using quantum well intermixingPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

On-chip molecular sensing using Ge mid-infrared photonic integrated circuitPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Optical sensing chip based on Ge mid-infrared integrated photonicsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Establishment of Fundamental Engineering of Sn-related Group-IV Semiconductor Materials for Multi-Functional and Low-Power Electronics

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Research on platform technologies for electronic-photonic integrated circuits based on III-V CMOS photonicsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Understanding of carrier transport properties of Ge-On-Insulator CMOS and establishment of performance enhancement engineering

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Understanding of carrier transport mechanism in Ge MOS interfaces and establishment of mobility enhancement technologies

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Design of Electronic Properties and Development of High-Mobility Channel Technology for Low Power/High-Speed Nano-CMOS Devices

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Construction of III-V CMOS PhotonicsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Understanding of mechanisms dominating inversion-layer mobility in strained-Si MOSFETs and establishment of guideline for the mobility enhancement

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

III-V-OI MOS structure by using selective wet oxidation of InAlAs layerPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Nano-structure functional devices based Ge-based channels

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

[Journal Article] Numerical evaluation of bandwidth and optical loss in InP-organic hybrid optical modulator with doping optimization2024

Author(s)

Journal Title

Takenaka Mitsuru 竹中充

TAKENAKA Mitsuru 竹中充