SHIBATA Junii 柴田順二

… Alternative Names

SHIBATA Junji 柴田順二

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Researcher Number	30052822
External Links
Affiliation (based on the past Project Information) *help	2006: SHIBAURA INSTITUTE OF TECHNOLOGY, PROFESSOR, 専門職大学院工学マネジメント研究科, 教授 2004 – 2005: SHIBAURA Institute of Technology, Graduate School of Engineering Management, Professor, 大学院・工学マネジメント研究科, 教授 2003: 芝浦工業大学, 工学マネジメント研究科, 教授 1998 – 2002: 芝浦工業大学, 工学部, 教授 1991 – 1992: 芝浦工業大学, 工学部, 教授 … More 1988 – 1991: 芝浦工業大学, 機械工学第二学科, 教授 1990: Shibaura Institute of Tech. Mech. Eng. Professor, 工学部・機械工学第二学科, 教授 1987: SHIBAURA INSTITUTE OF TECHNOLOGY,Dept. of Mechanical Eng. II., 機械工学・第二学科, 助教授 1986: 芝工大, 工学部, 助教授 Less
Review Section/Research Field	Principal Investigator 機械工作 / Production engineering/Processing studies / 機械工作・生産工学 Except Principal Investigator 機械工作
Keywords	Principal Investigator CMP / Si / 研磨 / シリカ / ガラス / スラリー / pH / Siウエハー / 研磨剤 / Plasticity Index … More / Wear of Fixed Abrasives / Aluminum Substrate / PVA Fixed Abrasives / Elasticity of Fixed Abrasives / Surface Roughness / Flatness / Lapping / 加工精度 / 砥石摩耗 / アルミニウムサブストレート / 平面ホーニング / 加工面粗さ / 平面ホ-ニング / 固定砥粒 / 負荷曲線 / パワ-スペクトル / 構造関数 / 塑性指数 / 砥石の摩耗 / アルミニウムサブストレ-ト / PVA砥石 / 砥石の弾性 / 仕上面粗さ / 平坦度 / Diamond Lapping Film / Flat Honing / New Ceramics / ファインセラミックスの研磨 / 光ファイバの端面研磨 / 平面ホーニング加工 / ファインセラミックス / ダイヤモンドラッピングシート / SOLID CONTACT / SLURRY / GLASS / PHYSICAL ACTION / CHEMICAL ACTION / POLISHING PAD / ポリウレタン / 微小変形 / 表面トポグラフィ / 実接触面積 / 物理的作用 / 化学的作用 / 研磨パット / Slurry / Colloidal Silica / Sol-gel / Copper / Glass / Polishing / ウエハー / メタル / CPM / 研磨抵抗 / 作用点 / Prestonの定理 / パッド / 砥粒間隔 / 粒径 / スラリー濃度 / CNP / コロイダルシリカ / ゾル-ゲル法 / 銅 / SILICA / LAPPING SLURRY / LAPPING MACHINE / ROUNDNESS / CENTRIFUGAL FORCE / GLASS BALL / SMALL BALL / POLISHING / カップ研磨方式 / シリカ粒子 / 真球度 / 球研磨 / ゾルゲル法 / 研磨スラリー / 研磨加工 / ラップ盤 / 真円度 / 遠心力 / ガラス球 / 微小ボール / silica / pad / Si water / slurry / sol-gel method / planerization / 研磨布 / ゾル・ゲル法 / プラナリゼーション / nano-machining / spherical indenter / micro-contact / micro-indentation / cutting edge / ductile mode chip / nano-size chip / Ceramics / 延性型切り屑 / 降伏応力 / 塑性 / 接触変形 / 押込み / 球状圧子 / 脆性材料 … More Except Principal Investigator Non-Contact Measurement / 3-D Form Measurement / Expert System / Fuzzy Control / Robot / Polishing Tools / Automatic Polishing / Metal Molds / 非接触計測 / 三次元形状計測 / エキスパ-トシステム / ファジィ制御 / ロボット / 研磨工具 / 自動研磨 / 金型製造 Less

A STUDY ON CONTACT MECHANISM AND CMP ACTION OF POLISHING PADPrincipal Investigator
- Principal Investigator
  
  SHIBATA Junji
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  SHIBAURA INSTITUTE OF TECHNOLOGY
A BASIC STUDY ON METAL CMP MECHANISM AND A TRIAL FOR PRODUCING CMP SLURRY BY SOL-GEL METHODPrincipal Investigator
- Principal Investigator
  
  SHIBATA Junji
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  SHIBAURA INSTITUTE OF TECHNOLOGY
PRECISION FINISHING OF MONO-CRYSTAL SILICON BALLS FOR SPHERICAL SEMI-CONDUCTORSPrincipal Investigator
- Principal Investigator
  
  SHIBATA Junji
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  SHIBAURA INSTITUTE OF TECHNOLOGY
A basic study on CMP mechanism and production of CMP slurryPrincipal Investigator
- Principal Investigator
  
  SHIBATA Junii
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  機械工作・生産工学
- Research Institution
  SHIBAURA INSTITUTE OF TECHNOLOGY
Deformation behavior of materials under sub-mum (nano) interferencePrincipal Investigator
- Principal Investigator
  
  SHIBATA Junji
- Project Period (FY)
  1991 – 1992
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  SHIBAURA INSTITUTE OF TECHNOLOGY
Development of the new technology of machining, measuring and control for advanced manufacturing system of metal molds
- Principal Investigator
  
  INASAKI Ichiro
- Project Period (FY)
  1990 – 1991
- Research Category
  
  Grant-in-Aid for Co-operative Research (A)
- Research Field
  
  機械工作
- Research Institution
  Faculty of Science and Technology, KEIO University
Precision Lapping of Substrata Such As Aluminum, etc. by Fixed AbrasivesPrincipal Investigator
- Principal Investigator
  
  SHIBATA Junji
- Project Period (FY)
  1988 – 1990
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  Shibaura Institute of Technology
Flat Honing of New Ceramics with Diamond Lapping FilmPrincipal Investigator
- Principal Investigator
  
  SHIBATA Junji
- Project Period (FY)
  1986 – 1987
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  SHIBAURA INSTITUTE OF TECHNOLOGY

All 2005 2004

All Journal Article

[Journal Article] 固体接触面の機密性2005
- Author(s)
  長谷川智之, 柴田順二
- Journal Title
  
  砥粒加工学会ABTEC2005講演論文集
  
  Pages: 99-100
- Data Source
  KAKENHI-PROJECT-17560104
[Journal Article] Air tightness at solid contact interface2005
- Author(s)
  T.HASEGAWA, J.SHIBATA
- Journal Title
  
  Proceedings of ABTEC 2005
  
  Pages: 355-356
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560104
[Journal Article] Development of fixed Abrasive tools utilizing sol-gel method2005
- Author(s)
  Y.TANI, Y.MIYATA, J.SHIBATA, Y.KAMIMURA
- Journal Title
  
  Journal of the Japan Society for Abrasive Technology Vol.49, No.5
  
  Pages: 264-268
- NAID
  10015520160
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560104
[Journal Article] ゾルゲル法を利用した固定砥粒工具の開発2005
- Author(s)
  谷, 宮田, 柴田, 上村
- Journal Title
  
  砥粒加工学会誌 49・5
  
  Pages: 264-268
- NAID
  10015520160
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560104
[Journal Article] 固体接触面の機密性2005
- Author(s)
  長谷川, 柴田
- Journal Title
  
  2005年度砥粒加工学会学術講演会講演論文集
  
  Pages: 355-356
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560104
[Journal Article] ポリシングにおける研磨作用点に関する考察2004
- Author(s)
  李鋼成, 柴田順二, 大田正人
- Journal Title
  
  2004年度砥粒加工学会学術講演会講演論文集 2004年度
  
  Pages: 57-58
- Data Source
  KAKENHI-PROJECT-15560101
[Journal Article] A Basic Study on CMP Mechanism and a Trial to produce CMP Slurry by Sol-gel Method2004
- Author(s)
  J.SHIBATA, M.OHTA, A.Oda
- Journal Title
  
  Advances in Abrasive Technology-7^<th> International Symposium in Abrasive
  
  Pages: 389-392
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560101
[Journal Article] A Basic Study on CMP Mechanism and a Trial to produce CMP Slurry by Sol-gel Method2004
- Author(s)
  J.SHIBATA, M.OHTA, A.Oda
- Journal Title
  
  Advances in Abrasive Technology -7^<th> International Symposium in Abrasives
  
  Pages: 389-392
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560101
[Journal Article] A Basic study on CMP Mechanism and a Trial to Produce CMP Slurry by Sol-gel Method2004
- Author(s)
  Junji Shibata, Masato Ota, Akiyoshi Oda
- Journal Title
  
  Advances in Abrasive Technology 7 (3^<rd> INTERNATIONAL CONFERENCE AND EXHIBITION ON DESIGN ANDPRODUCTION OF DIES AND MOLDS 2004) ISAAT2004
  
  Pages: 389-392
- Data Source
  KAKENHI-PROJECT-15560101

1. OHTA Masato (50052874)

# of Collaborated Projects: 4 results

# of Collaborated Products: 3 results
2. UEKI Tadahiro (50052890)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
3. KIMURA Takayasu (90052711)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. INASAKI Ichiro (30051650)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. AOYAMA Tojiro (70129302)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. MITSUI Kimiyuki (90219668)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. TAKEUCHI Yoshimi (50107546)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. MIYOSHI Takashi (00002048)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

SHIBATA Junii 柴田 順二

SHIBATA Junji 柴田 順二

Research Projects

Research Products

Co-Researchers

A STUDY ON CONTACT MECHANISM AND CMP ACTION OF POLISHING PADPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

A BASIC STUDY ON METAL CMP MECHANISM AND A TRIAL FOR PRODUCING CMP SLURRY BY SOL-GEL METHODPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

PRECISION FINISHING OF MONO-CRYSTAL SILICON BALLS FOR SPHERICAL SEMI-CONDUCTORSPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

A basic study on CMP mechanism and production of CMP slurryPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Deformation behavior of materials under sub-mum (nano) interferencePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of the new technology of machining, measuring and control for advanced manufacturing system of metal molds

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Precision Lapping of Substrata Such As Aluminum, etc. by Fixed AbrasivesPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Flat Honing of New Ceramics with Diamond Lapping FilmPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] 固体接触面の機密性2005

Author(s)

Journal Title

Data Source

[Journal Article] Air tightness at solid contact interface2005

Author(s)

Journal Title

Description

Data Source

[Journal Article] Development of fixed Abrasive tools utilizing sol-gel method2005

Author(s)

Journal Title

NAID

Description

Data Source

[Journal Article] ゾルゲル法を利用した固定砥粒工具の開発2005

Author(s)

Journal Title

NAID

Description

Data Source

[Journal Article] 固体接触面の機密性2005

Author(s)

Journal Title

Description

Data Source

[Journal Article] ポリシングにおける研磨作用点に関する考察2004

SHIBATA Junii 柴田順二

SHIBATA Junji 柴田順二