MIYOSHI Takashi 三好隆志

… Alternative Names

岸浪健史キシナミタケシ

KISHINAMI Takeshi 岸浪建史

Less

Researcher Number	00002048
Affiliation (based on the past Project Information) *help	2006: Osaka University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授 2006: 阪大, 工学(系)研究科(研究院), 教授 1998 – 2005: Osaka university, Department of Mechanical Engineering and Systems, Professor, 大学院・工学研究科, 教授 1993 – 1997: 大阪大学, 工学部, 教授 1993 – 1994: 北海道大学, 工学部, 教授 … More 1991: Faculty of Engineering, Osaka University, Dept. of Mechanical Engineering for In, 工学部, 教授 1986 – 1990: Ass. Professor of Hokkaido University, Precision Engneering., 工学部, 助教授 1986: 北海道大学, 工学部, 助手 Less
Review Section/Research Field	Principal Investigator 機械工作・生産工学 / 機械工作 / Production engineering/Processing studies Except Principal Investigator 機械工作・生産工学 / 機械工作 / Production engineering/Processing studies / 設計工学・機械要素・トライボロジー
Keywords	Principal Investigator ナノテクノロジー / 光放射圧 / 研磨加工 / 半導体 / CMP / Laser applied measurement / 光応用計測 / Optical measurement / 表面欠陥 / レーザトラッピング … More / シリコンウエハ / 平坦化 / ナノ粒子 / レーザ応用計測 / ナノインプロセス計測 / laser trapping / optical radiation pressure / 微粒子 / 金型 / Silicon wafer / nanotechnology / 超精密 / フーリエ変換 / 逆散乱 / インプロセス計測 / Fraunhofer diffraction / In-process measurement / 光散乱 / 超精密加工 / Fraunhofer回折 / 微細加工 / 平坦加工 / フラーレン / Mold and die / Polishing robot / Polishing operation / Knowledge acquisition / Expert / エキスパートシステム / 動作解析 / 磨きの自動化 / 金型磨き作業 / 磨きロボット / 知識獲得 / エキスパ-ト / Spherical grinding wheel / Mold cavity / Dual-axis grinding / Diamond grinding tool / Ceramics / 研削工具 / 自動仕上加工 / 研削仕上 / ダイヤモンド砥石 / 曲面仕上加工 / 球体研削砥石 / 金型自由曲面 / 二軸回転研削 / ダイヤモンド研削 / セラミックス / semiconductor / silicon wafer / planarization / polishing process / レーザトラップ / Semiconductor / Laser light scattering / SiO2 thin film / CMP process / Nano-inprocess measurement / Surface defect / 薄膜表面 / CMP加工 / Fourier transform / Nano in-process measurement / 3D Micro-Profile / Phase retrieval / Optical Inverse Scattering / レーザー応用計測 / マイクロ加工計測 / 微細形状計測 / 位相回復 / Particle / 3D position / Linnik interferometer / Radiation pressure force / Position detecting probe / Laser trapping in air / Microparts / Nano-CMM / Mirau干渉計 / マイクロパ-ツ / 3次元位置座標 / Linnik干渉計 / 位置検出プローブ / 大気中レーザトラッピング / マイクロパーツ / ナノCMM / optical processing / diamond grain / mechanochemical polishing / micro-machining / ダイヤモンド / マイクロ加工 / Surface fitting / Master model / CAD model / 3-D free form surface / Reverse engineering / On-machine measurement / 3-D form measurement / 形状処理 / 曲面あてはめ / マスタモデル / CADモデル / 自由曲面 / リバースエンジニアリング / オンマシン計測 / 3次元形状計測 / BSO crystal / Photorefractive crystal / Nano-technology / Contamination / Surface defects inspection / BSO / ミ-散乱 / BSO結晶 / 光誘起屈折率効果結晶 / 微小付着異物 / 表面欠陥検査 / シリコンウェハ / exponential density filter / optical Fourier transform / inverse scattering phase retrieval / fine profile measurement / inprocess measurement / micromachining / 指数型光減少フィルタ / 光学的フーリエ変換 / 逆散乱位相法 / 微細形状測定 / マイクロマシニング / Fine scratch / Ultra-fine surface / Non-contact measurement / Diamond turning / Ultra-precision / 非接触測定 / Fraunhoter回折 / 表面粗さ / 微細傷 / ナノメ-タ / ダイヤモンド切削 / インプロセス測定 / 研磨スラリー / Cu-CMP / フラーレンC60 / レーザ加工 / ナノ加工 / カーボン / UVレーザ / 水酸化フラーレン / 超平坦加工 / カーボンナノ粒子 / 超砥粒 / スラリー … More Except Principal Investigator CAM / 光放射圧 / CAD / マイクロ部品 / Radiation pressure / Laser trapping / レーザトラッピング / マイクロプローブ / Micropart / FDTD simulation / Microparts / ナノCMM / エキスパ-トシステム / 自由曲面 / エキスパートシステム / 金型 / Automatic Programming System / 6-axis NC Electric Discharge Machining / Electric Discharge Machining / 輪郭制御ソフトウエア / NC放電加工 / 放電創成加工法 / 自動プログラミングシステム / 創成放電加工 / 6軸NC制御放電加工 / 放電加工 / Free-form surface / Computer Integrated Manufacturing System / Automatic machining / Automatic Design / Model / Mold / Die / 曲面加工 / モールドフロー解析 / 金型用CAD / 金型設計 / 生産工程設計 / 流動解析 / 金型製作 / キャビティ面 / 金型仕上作業 / 非接触形状測定 / 3次元測定機 / CAT / FEM / CAE / 形状モデル / 表面計測 / コンピュ-タ統合生産システム / 自動加工 / 自動設計 / 模型 / Operation Planning / Process Planning / Hierachical CAM System / Flexible Manufacturing System / 自動プログラミング / 作業設計 / 工程設計 / 階層処理CAM / FA / CIM / FMS / Multi-scale measurement / Nanometrology / Surface fine figure / Three dimensional surface / Microprobe / 複合計測 / ナノ計測 / 表面微細形状 / 3次元形状 / Vibro-probe / Silica particle / Optical fiber / Micro-probe / Nano-CMM / 大気中トラップ / 振動型プローブ / シリカ微粒子 / 光ファイバー / Solidification process analysis / Color doped resin / Overthang form / Image exposure / LCD mask / Stereolithography / 濃淡画像マスク / 動的露光法 / 動画像マスク / FDTDシミュレーション / 樹脂硬化プロセス解析 / 色素添加光硬化性樹脂 / オーバーハング形状 / 面露光法 / 微小部品 / 液晶マスク / 光造形 / Probe tip / Evanescent Light / IR Laser / COP / Nano-defect / Sub-surface / Silicon wafer / エバネセント光検出ユニット / AFM探針 / 赤外エバネセント場 / COP欠陥 / プローブ / 有限差分時間領域法 / エバネセント場 / 赤外レーザ / 加工表面層欠陥 / シリコンウェハ / Optical torque / Particle / Micromachining / Machining tool / Diamond thin film / Silicon mold / Radiation pressure force / 光硬化性樹脂 / TDFD法 / ナノ加工痕 / 円偏光 / 光放射圧トルク / 回転微粒子 / マイクロ加工 / 加工ツール / ダイヤモンド薄膜 / シリコンモールド / マイクロパーツ / Active vibration control / Crystalline lattice / Virtual CMM / Miniature robot / Optical probe / Coordinate metrology / Software datum / Nanometer metrology / 微動テーブル / 超小型自走機械 / 自律校正 / 能動制振 / 結晶格子 / 仮想三次元測定機 / 超小型精密自走機械 / 光プローブ / 座標計測 / ナノメートル計測 / ソフトウェアデータム / modelling / formulation / knowledge acquisition / manufacturing knowledge / 知識 / 生産 / モデリング / 形式化 / 知識獲得 / 生産知識 / Computer model / Curved surface / Autonomous measurement / Normal vector / Position vector / Non-contact measurement / 計算機モデル / 曲面 / 自動計測 / 法線ベクトル / 位置ベクトル / 非接触測定 / Non-Contact Measurement / 3-D Form Measurement / Expert System / Fuzzy Control / Robot / Polishing Tools / Automatic Polishing / Metal Molds / 非接触計測 / 三次元形状計測 / ファジィ制御 / ロボット / 研磨工具 / 自動研磨 / 金型製造 / Expert system / Productive data / Scratch flaw / Surface roughness / Skill machinist / Automatic polishing / Finishing / Die and mold / 知識工学 / 金型仕上熟練工 / 生産情報 / 表面傷 / 仕上げ面粗さ / 熟練工 / 技能 / 仕上加工 / ナノ加工 / 強制振動 / 共振現象 / レンズ効果 / レーザアブレーション / 微粒子 Less

フラーレンナノ粒子の光放射圧制御による超平坦化CMP加工に関する研究Principal Investigator
- Principal Investigator
  
  三好隆志
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
カーボン機能ナノ粒子の光放射圧運動制御による超微細加工に関する研究Principal Investigator
- Principal Investigator
  
  三好隆志
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
微粒子レンズを用いた共振レーザアブレーションによる自律型ナノ加工に関する研究
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
フラーレンナノ粒子の光放射圧制御とその超平坦化CMP加工への応用に関する研究Principal Investigator
- Principal Investigator
  
  三好隆志
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Study on Multi-scale Nano-measurement of Microparts using Optically Oscillated Microprobe
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2003 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
DEVELOPMENT OF THE NANO-CMP PROCESS APPARATUS CONTROLLED BY OPTICAL RADISTION PRESSUREPrincipal Investigator
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  OSAKA UNIVERSITY
Study on Laser Trapping Probe for Measuring Fine Machined 3-D Form with High Aspect Ratio
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Study on Nano-inprocess measurement of CMP defects on SiO2 filmed wafer surfacePrincipal Investigator
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of Nonlaminate Stereolithography System Using TFTLCD
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Nano-Defects Inspection in Polished Silicon Wafer Sub-Surface Using IR Evanescent Light
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Nano In-Process Measurement of 3D Micro-Profile Using Optical Inverse ScatteringPrincipal Investigator
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of Micromachining Tool Driven by Radiation Pressure
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Study on Micro-machining Using a Small Particle Controlled by Optical Pressure.Principal Investigator
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of Laser Trapping Probe for The Nano-CMMPrincipal Investigator
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Study on Advanced Coordinate Metrology
- Principal Investigator
  
  SHIMOKOHBE Akira
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Tokyo Institute of Technology
STUDY ON NANO-INPROCESS MEASUREMENT OF SILICON WAFER SURFACE DEFECTSPrincipal Investigator
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of A Non-contact 3-D Free Form Surface Measuring System in Aid of The Maser Model Based DesignPrincipal Investigator
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
A Study on Methodology and Modelling for Knowledge Acquisition in Manufacturing Domain
- Principal Investigator
  
  IWATA Kazuaki
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Study on nano-inprocess measurement for flexible micromachinigPrincipal Investigator
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of Autonomous Measuring System for Curved Surfaces by Using Non-Contact Probe to Continuously Detect Normal Direction and Position
- Principal Investigator
  
  AOYAMA Hideki
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Keio University
  Tomakomai National College of Technology
Development of the new technology of machining, measuring and control for advanced manufacturing system of metal molds
- Principal Investigator
  
  INASAKI Ichiro
- Project Period (FY)
  1990 – 1991
- Research Category
  
  Grant-in-Aid for Co-operative Research (A)
- Research Field
  
  機械工作
- Research Institution
  Faculty of Science and Technology, KEIO University
In-Process Measuring System for U1tra-Precision Diamond Turned SurfacePrincipal Investigator
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1989 – 1990
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B).
- Research Field
  
  機械工作
- Research Institution
  Hokkaido University
Development and Construction of the Expert System for Finishing Operation of dies and Molds.
- Principal Investigator
  
  SAITO Katsumasa
- Project Period (FY)
  1989 – 1990
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research
- Research Field
  
  機械工作
- Research Institution
  Hokkaido University
Analysis and Automation of Polishing Motion of a Skilled Machinist by Handwork for Mold and DiePrincipal Investigator
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1988 – 1989
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  Hokkaido University
An integration of CAD/CAM/CAE System for Design and Manufacturing of Die and Mold.
- Principal Investigator
  
  SAITO Katsumasa
- Project Period (FY)
  1986 – 1988
- Research Category
  
  Grant-in-Aid for General Scientific Research (A)
- Research Field
  
  機械工作
- Research Institution
  Hokkaido University
Study on Finishing of Curved High Performance Ceramic Surface by using a Semispherical Diamond Grinding ToolPrincipal Investigator
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1986 – 1987
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  Hokkaido University
Development of 6-axis Numerical Contouring Control Electric Discharge Machining
- Principal Investigator
  
  SAITO Katsumasa
- Project Period (FY)
  1986 – 1987
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research
- Research Field
  
  機械工作
- Research Institution
  Hokkaido University
A Study of Integrated CAM system for Flexile Manufacturing System
- Principal Investigator
  
  KISHINAMI Takeshi
- Project Period (FY)
  1985 – 1986
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  Hokkaido University

All 2006 2005 2004 2003

All Journal Article Patent

[Journal Article] The 3D) manipulation of a microsphere for nano-CMM probe using single fiber optical trapping2006
- Author(s)
  Sang In Eom, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
- Journal Title
  
  Proceedings of Optics and Photonics 2006 (SPIE) Vol.6326, (CD_ROM)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] UVレーザを用いた微粒子トラップによる微細加工に関する研究2006
- Author(s)
  日高敏揮, 高谷裕浩, 三好隆志, 林照剛
- Journal Title
  
  日本機械学会第6回生産加工・工学機械部門講演会講演論文集 (in print)
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] Evaluation of Laser Trapping Probe Properties for Coordinate Measurement2006
- Author(s)
  Masaki Michihata, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
- Journal Title
  
  Instrumentation and Computer-Vision System (SPIE) Vol. 6375
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 光放射圧を利用した微粒子制御によるナノ仕上げ加工に関する研究(第2報) -局所マイクロ領域におけるナノ平滑化特性-2006
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩, 林照剛
- Journal Title
  
  2006年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 1195-1196
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] The 3D manipulation of a microsphere for nano-CMM probe using single fiber optical trapping2006
- Author(s)
  Sang In Eom, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
- Journal Title
  
  Proceedings of Optics and Photonics 2006 (SPIE) Vol. 6326(CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] A Novel Surface Finishing Technique for Microparts Using an Optically Controlled Microparticle Tool2006
- Author(s)
  Yasuhiro Takaya, Kenshiro Hida, Takashi Miyoshi, Torutake Hayashi
- Journal Title
  
  CIRP ANNALS VOL.55/1
  
  Pages: 613-616
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] A Novel Surface Finishing Technique for Microparts Using an Optically Controlled Microparticle tool2006
- Author(s)
  H.Tanada, K.Hida, T.Miyoshi, T.Hayashi
- Journal Title
  
  CIRP Annals - 2006 Manufacturing Technology 55/1
  
  Pages: 613-616
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] Study on nano-3D position detection using laser trapping probe with circular motion2006
- Author(s)
  Yuto Nagasaka, Yasuhiro TAKAYA, Takashi MIYOSHI, Terutake Hayashi
- Journal Title
  
  The 6th Manufacturing ＆ Machine Tool Conference, Hayama
  
  Pages: 129-130
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] レーザトラップを用いたナノ3次元位置検出プローブに関する研究? 2次元振動プローブの特性評価?2006
- Author(s)
  長坂雄人, 高谷裕浩, 三好隆志, 林照剛
- Journal Title
  
  日本機械学会第6回生産加工・工作機械部門講演会葉山
  
  Pages: 129-130
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Evaluation of Laser Trapping Probe Properties for Coordinate Measurement2006
- Author(s)
  Masaki Michihata, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
- Journal Title
  
  Instrumentation and Computer-Vision System (SPIE) Vol.6375
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] レーザトラッピングプローブを用いた高精度3次元座標計測に関する研究2006
- Author(s)
  道畑正岐, 高谷裕浩, 三好隆志, 林照剛
- Journal Title
  
  2006年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 1053-1054
- NAID
  130005027106
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Novel CMP Technique for Copper Surface Finishing with Fullerene Nano-Particle2006
- Author(s)
  H.Tanada, T.Miyoshi, Y.Takaya, T.Hayashi, K.Suzuki
- Journal Title
  
  Proceeding of ASPE 21st Annual Meeting (ASPE'06), Monterey, California
  
  Pages: 595-598
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] Study on High Precise-3-Dimensional Coordinate Measurement with Laser Trapping Probe2006
- Author(s)
  Masaki MICHIHATA, Yasuhiro TAKAYA, Takashi MIYOSHI, Terutake HAYASHI
- Journal Title
  
  Proceedings of 2006 JSPE general meeting in spring, Tokyo
  
  Pages: 1053-1054
- NAID
  130005027106
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 光放射圧を利用した微粒子制御によるナノ仕上加工に関する研究-局所マイクロ領域におけるナノ平滑化特性-2006
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩, 林照剛
- Journal Title
  
  2006年度精密工学会春季大会学術講演会講演論文集 (in press)
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] フラーレンナノ粒子を用いたCu-CMPの研究-研磨の基本特性2006
- Author(s)
  田名田祐樹, 三好隆志, 高谷裕浩, 林照剛
- Journal Title
  
  2006年度精密工学会関西地方定期学術講演会講演論文集
  
  Pages: 15-16
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] レーザトラップを用いたナノ3次元位置検出プローブに関する研究-2次元振動プローブの特性評価-2006
- Author(s)
  長坂雄人, 高谷裕浩, 三好隆志, 林照剛
- Journal Title
  
  日本機械学会第6回生産加工・工作機械部門講演会葉山
  
  Pages: 129-130
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] A Novel Surface Finishing Technique for Microparts Using an Optically Controlled Microparticle Tool2006
- Author(s)
  Yasuhiro Takaya, Kenshiro Hida, Takashi Miyoshi, Terutake Hayashi
- Journal Title
  
  CIRP ANNALS VOL. 55/1
  
  Pages: 613-616
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber - Fundamental Analysis of the Optical Fiber Trapping2005
- Author(s)
  Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI
- Journal Title
  
  Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21) Nagoya
  
  Pages: 365-370
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber -Fundamental Analysis of the Optical Fiber Trapping2005
- Author(s)
  Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI
- Journal Title
  
  Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21) Nagoya
  
  Pages: 365-370
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Dynamic Properties Measurement of Vibrating Microprobe for Nano-Position Sensing Using Radiation Pressure Control2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
- Journal Title
  
  SPIE Vol. 5930, (CD-ROM)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Dynamic Properties Measurement of Vibrating Microprobe for Nano-Position Sensing Using Radiation Pressure Control2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
- Journal Title
  
  SPIE Vol. 5930(CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber-Fundamental Analysis of the Optical Fiber Trapping2005
- Author(s)
  Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI
- Journal Title
  
  Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21), Nagoya
  
  Pages: 365-370
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Nano-Position Sensing Using Optically Motion-controlled Microprobe with PSD Based on Laser Trapping Technique2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Syuichi Dejima, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL. 54/1
  
  Pages: 467-470
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第13報)-横方向強制振動型プローブの振動検出系の改良-2005
- Author(s)
  今井敬次郎, 高谷裕浩, 三好隆志
- Journal Title
  
  2005年度精密工学会春季大会学術講演会論文集東京(発表予定)
- NAID
  130004657757
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 光放射圧を利用した微粒子制御によるナノ仕上加工に関する研究-加工特性の解析-2005
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩, 林照剛
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 943-944
- NAID
  130004657252
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] Laser-assisted CMP for Copper Wafer2005
- Author(s)
  T.Ha, K.Kimura, T.Miyoshi, Y.Takaya
- Journal Title
  
  Material Science Forum Vol.2(in press)
- Data Source
  KAKENHI-PROJECT-15656041
[Journal Article] Nano-finishing Using a Micro-particle Controlled by Optical Radiation Force2005
- Author(s)
  Kenshiro Hida, Takashi Miyoshi, Yasuhiro Takaya, Terutake Hayashi
- Journal Title
  
  Proceedings of the 20^<th> American Society for Precision Engineering Annual Meeting (ASPE'05) Vol.37
  
  Pages: 464-467
- NAID
  130004657252
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] Nano-fishing Using a Micro-perticle Controlled by Optical Radiation Force2005
- Author(s)
  Kenshiro Hida, Takashi Miyoshi, Yasuhiro Takaya, Terutake Hayashi
- Journal Title
  
  Proceedings of the 20th American Society for Precision Engineering Annual Meeting (ASPE'05) USA
  
  Pages: 464-467
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] Laser - assisted CMP for Copper Wafer2005
- Author(s)
  Taeho Ha, Keiichi Kimura, Takashi Miyoshi, Yasuhiro Takaya
- Journal Title
  
  Trans Tech Publications, Material Science Forum Vol.502
  
  Pages: 351-356
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第13報)-横方向強制振動型プローブの振動検出系の改良-2005
- Author(s)
  今井敬次郎, 高谷裕浩, 三好隆志
- Journal Title
  
  2005年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 1013-1014
- NAID
  130004657757
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Nano-Position Sensing Using Optically Motion-controlled Microprobe with PSD Based on Laser Trapping Technique2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Syuichi Dejima, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL.54/1
  
  Pages: 467-470
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Dynamic Properties Measurement of Vibrating Microprobe for Nano-Position Sensing Using Radiation Pressure Control2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
- Journal Title
  
  SPIE Vol.5930(CD-ROM)
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 光放射圧を利用した微粒子制御によるナノ仕上げ加工に関する研究 -加工特性の解析-2005
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩, 林照剛
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集京都
  
  Pages: 943-944
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] Nano-Position Sensing Using Optically Motion-controlled Microprobe with PSD) Based on Laser Trapping Technique2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL.54/1
  
  Pages: 467-470
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control2004
- Author(s)
  Yasuhiro Takaya, K.Imal, Taeho Ha, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL.53/1
  
  Pages: 389-392
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] レーザ複合ナノCMP平坦加工に関する研究-レーザ照射によるCu表面層の除去加工特性2004
- Author(s)
  宮本利樹, 三好隆志, 高谷裕浩, 木村景一, 鈴木恵友
- Journal Title
  
  2004年度精密工学会関西地方定期学術講演会講演論文集大阪
  
  Pages: 41-42
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control2004
- Author(s)
  Yasuhiro Takaya, K.Imai, Taeho Ha, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL. 53/1
  
  Pages: 389-392
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Laser Planarization Process for Copper Surface2004
- Author(s)
  K.Kimura, Y.Takaya, T.Miyoshi, T.Miyamoto
- Journal Title
  
  Proc.of The 1st Pac-Rim Int.Conference on Planarization CMP and its Application Technology Vol.1
  
  Pages: 173-178
- Data Source
  KAKENHI-PROJECT-15656041
[Journal Article] Laser Planarization Process Assisted by Chemical Mechanical Polishing for Copper Surface2004
- Author(s)
  Yasuhiro Takaya, Keiichi Kimura, Takashi Miyoshi, Toshiki Miyamoto, Keisuke Suzuki
- Journal Title
  
  Proceedings of the 19th American Society for Precision Engineering Annual Meeting (ASPE'04) Vol.34
  
  Pages: 705-708
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第12報)-横方向強制振動型プローブ測定物近傍での振動特性-2004
- Author(s)
  今井敬次郎, 高谷裕浩, 三好隆志
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会論文集島根
  
  Pages: 993-994
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Position Sensitivity of Micro Probe with Transverse Vibration Using Optical Trap2004
- Author(s)
  Keijiro Imai, Yasuhiro Takaya, Takashi Miyoshi, Taeho Ha, Keiichi
- Journal Title
  
  Proceedings of International Symposium on Photonics in Measurement 2004 Frankfurt
  
  Pages: 277-284
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Laser Planarization Process for Copper Surface2004
- Author(s)
  K.Kimura, Y.Takaya, T.Miyoshi, T.Miyamoto
- Journal Title
  
  Proc.of The 1st Pac-Rim Int.Conference on Planarization CMP and its Application Technology Vol.1
  
  Pages: 173-178
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第12報)?横方向強制振動型プローブの測定物近傍での振動特性?2004
- Author(s)
  今井敬次郎, 高谷裕浩, 三好隆志
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会論文集島根
  
  Pages: 993-994
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Laser Planarization Process Assisted by Chemical Mechanical Polishing for Copper Surface2004
- Author(s)
  Y.Takaya, K.Kimura, T.Miyoshi, T.Miyamoto, K.Suzuki
- Journal Title
  
  Proc.of the 19th American Society for Precision Engineering Annual Meeting (ASPE'04) Vol.34
  
  Pages: 705-708
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control2004
- Author(s)
  Yasuhiro Takaya, K.Imai, Taeho Ha, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL.53/1
  
  Pages: 389-392
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] レーザ複合ナノCMP平坦加工に関する研究2004
- Author(s)
  宮本利樹, 三好隆志, 高谷裕浩, 木村景一
- Journal Title
  
  精密工学会2004年度関西地方定期公演会論文集
  
  Pages: 41-42
- Data Source
  KAKENHI-PROJECT-15656041
[Journal Article] Position Sensitivity of Micro Probe with Transverse Vibration Using Optical Trap2004
- Author(s)
  Keijiro Imai, Yasuhiro Takaya, Takashi Miyoshi, Taeho Ha, Keiichi Kimura
- Journal Title
  
  Proceedings of International Symposium on Photonics in Measurement 2004 VDI-Berich te 1844
  
  Pages: 277-284
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Nano-CMM probing technique using optical fiber trapping (2nd report)-Fundamental analysis of laser trapping using optical fiber-2004
- Author(s)
  Takaki HASHIMOTO, Yasuhiro TAKAYA, Takashi MIYOSHI
- Journal Title
  
  Proceedings of 2004 JSPE general meeting in spring, Tokyo
  
  Pages: 673-674
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Position Sensitivity of Micro Probe with Transverse Vibration Using Optical Trap2004
- Author(s)
  Keijiro Imai, Yasuhiro Takaya, Takashi Miyoshi, Taeho Ha, Keiichi Kimura
- Journal Title
  
  Proceedings of International Symposium on Photonics in Measurement 2004, VDI-Berichte 1844
  
  Pages: 277-284
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 光放射圧を利用した微粒子制御によるナノ加工に関する研究2004
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩
- Journal Title
  
  精密工学会2004年度関西地方定期公演会論文集
  
  Pages: 43-44
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] 光放射圧を利用した微粒子制御によるナノ仕上加工に関する研究2004
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩
- Journal Title
  
  2004年度精密工学会関西地方定期学術講演会講演論文集大阪
  
  Pages: 43-44
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] 光ファイバを用いたナノCMMプローブの研究(第2報)-光ファイバによるレーザトラッピング基礎特性解析-2004
- Author(s)
  橋本隆希, 高谷裕浩, 三好隆志
- Journal Title
  
  2004年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 673-674
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Study of Probing Technique for Nano-CMM Using Laser Trap(12nd Report)-Basic Characteristic of Vibration Probe-2004
- Author(s)
  Keijiro IMAI, Yasuhiro TAKAYA, Takashi MIYOSHI
- Journal Title
  
  Proceedings of 2004 JSPE general meeting in autumn, Shimane
  
  Pages: 993-994
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] レーザ複合ナノCMP平坦加工に関する研究2004
- Author(s)
  宮本利樹, 三好隆志, 高谷裕浩, 木村景一
- Journal Title
  
  精密工学会2004年度関西地方定期公演会論文集
  
  Pages: 41-42
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] Fundamental Properties of The Forced Vibrational Laser Traooing Probe for The Nano-CMM2003
- Author(s)
  Yasuhiro TAKAYA, Keijiro IMAI, Taeho Ha, Takashi MIYOSHI
- Journal Title
  
  Proceedings of 2003 JSPE Hokkaido branch meeting, Muroran
  
  Pages: 3-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Nano-CMM Probe using' Optical Fiber Trapping-Trapping Force Simulation using FDTD Method-2003
- Author(s)
  Takaki HASHIMOTO, Yasuhiro TAKAYA, Takashi MIYOSHI, Ryuusuke NAKAJIMA
- Journal Title
  
  Proceedings of 2003 JSPE Kansai Branch regular meeting, Osaka
  
  Pages: 71-72
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Fundamental Analysis on the Novel 3-D Probing Technique for Microparts Using the Optical Fiber Trapping2003
- Author(s)
  Takaki Hashimoto, Yasuhiro Takaya, Takashi Miyoshi. Ryusuke Nakajima
- Journal Title
  
  Proceedings of the 18th American Society for Precision Engineering Annual Meeting, Portland
  
  Pages: 83-86
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 強制振動型ナノCMMレーザトラッピングプローブの基本特性2003
- Author(s)
  高谷裕浩, 今井敬次郎, 河兌坪, 三好隆志
- Journal Title
  
  2003年度精密工学会北海道支部学術講演会講演論文集室蘭
  
  Pages: 3-4
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Fundamental Analysis on the Novel 3-D Probing Technique for Microparts Using the Optical Fiber Trapping2003
- Author(s)
  Takaki Hashimoto, Yasuhiro Takaya, Takashi Miyoshi, Ryusuke Nakajima
- Journal Title
  
  Proceedings of the 18th American Society for Precision Engineering Annual Meeting Portland
  
  Pages: 83-86
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 光ファイバを用いたナノCMMプローブの研究 -トラップカのFDTDシミユレーションー2003
- Author(s)
  橋本隆希, 高谷裕浩, 三好隆志, 中島隆介
- Journal Title
  
  2003年度精密工学会関西地方定期学術講演会講演論文集大阪
  
  Pages: 71-72
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Patent] 研磨スラリー2005
- Inventor(s)
  三好隆志他4名
- Industrial Property Rights Holder
  大阪大学他1企業
- Industrial Property Number
  2005-263163
- Filing Date
  2005-08-16
- Data Source
  KAKENHI-PROJECT-17656052
[Patent] 被加工物の目的材料除去を行う加工方法及び加工装置2004
- Inventor(s)
  高谷裕浩, 三好隆志, 木村景一
- Industrial Property Number
  2004-088359
- Filing Date
  2004-03-25
- Data Source
  KAKENHI-PROJECT-16656052
[Patent] 被加工物の目的材料除去を行う加工方法および加工装置2004
- Inventor(s)
  高谷裕浩, 三好隆志, 木村景一
- Industrial Property Number
  2004-088359
- Filing Date
  2004-03-25
- Data Source
  KAKENHI-PROJECT-16656052

1. TAKAYA Yasuhiro (70243178)

# of Collaborated Projects: 17 results

# of Collaborated Products: 59 results
2. TAKAHASHI Satoru (30283724)

# of Collaborated Projects: 9 results

# of Collaborated Products: 0 results
3. SAITO Katsumasa (40001169)

# of Collaborated Projects: 7 results

# of Collaborated Products: 0 results
4. MIYOSHI Takashi (30001796)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
5. HAYASHI Terutake (00334011)

# of Collaborated Projects: 3 results

# of Collaborated Products: 21 results
6. KANAI Satoru (90194878)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
7. NARAHARA Hiroyuki (80208082)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. SHIMADA Shoichi (20029317)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
9. KOUDA Seido

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. 河兌坪

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
11. INASAKI Ichiro (30051650)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. AOYAMA Tojiro (70129302)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. MITSUI Kimiyuki (90219668)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. TAKEUCHI Yoshimi (50107546)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. SHIBATA Junji (30052822)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. AOYAMA Hideki (40149894)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. IWATA Kazuaki (30031066)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. HIRAI Shinichi (90212167)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. ONOSATO Masahiko (80177279)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. SHIRAI Yoshiaki (50206273)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. HANASAKI Shinsaku (50029097)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. SHIMOKOHBE Akira (40016796)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. TAKAMASU Kiyoshi (70154896)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. TAKADA Koji (80126474)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. KIYONO Satoshi (40005468)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. OZONO Shigeo (10010878)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. SHIBATA Takayuki (10235575)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
28. SAKAI Makoto

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. SASAKI Tetsuo

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
30. SAWABE Masaji

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
31. SAWADA Yuzo

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
32. OOSUGI Yukihisa

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
33. MURAKAMI Kohei

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
34. MATSUMIYA Sadayuki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
35. KIMURA Keiichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
36. TANAKA Mamoru

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
37. 鈴木恵友

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
38. 沢辺雅二

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

MIYOSHI Takashi 三好 隆志

岸浪 健史 キシナミ タケシ

KISHINAMI Takeshi 岸浪 建史

Research Projects

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Co-Researchers

フラーレンナノ粒子の光放射圧制御による超平坦化CMP加工に関する研究Principal Investigator

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カーボン機能ナノ粒子の光放射圧運動制御による超微細加工に関する研究Principal Investigator

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フラーレンナノ粒子の光放射圧制御とその超平坦化CMP加工への応用に関する研究Principal Investigator

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DEVELOPMENT OF THE NANO-CMP PROCESS APPARATUS CONTROLLED BY OPTICAL RADISTION PRESSUREPrincipal Investigator

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Study on Nano-inprocess measurement of CMP defects on SiO2 filmed wafer surfacePrincipal Investigator

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Nano In-Process Measurement of 3D Micro-Profile Using Optical Inverse ScatteringPrincipal Investigator

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Study on Micro-machining Using a Small Particle Controlled by Optical Pressure.Principal Investigator

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Development of Laser Trapping Probe for The Nano-CMMPrincipal Investigator

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MIYOSHI Takashi 三好隆志

岸浪健史キシナミタケシ

KISHINAMI Takeshi 岸浪建史