TAKAYA Yasuhiro 高谷裕浩

Researcher Number	70243178
Other IDs
External Links
Affiliation (Current)	2022: 大阪大学, 大学院工学研究科, 教授
Affiliation (based on the past Project Information) *help	2016 – 2022: 大阪大学, 工学研究科, 教授 2012 – 2015: 大阪大学, 工学(系)研究科(研究院), 教授 2013: 大阪大学, 大学院工学研究科, 教授 2010 – 2011: 大阪大学, 大学院・工学研究科, 教授 2009: Osaka University, 工学研究科, 教授 … More
Review Section/Research Field	Principal Investigator Production engineering/Processing studies / 機械工作・生産工学 / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Basic Section 18020:Manufacturing and production engineering-related / Mechanics of materials, Production engineering, Design engineering, and related fields Except Principal Investigator 機械工作・生産工学 / Production engineering/Processing studies / Intelligent mechanics/Mechanical systems / Basic Section 21030:Measurement engineering-related / Materials/Mechanics of materials / Measurement engineering / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
Keywords	Principal Investigator 光放射圧 / レーザトラッピング / マイクロ部品 / 加工現象解析 / 電子増強ラマン散乱効果 / レーザ応用計測 / インプロセス計測 / ナノテクノロジー / フェムト秒パルスレーザ / 水酸化フラーレン … More Except Principal Investigator 光放射圧 / ナノテクノロジー / CMP / 研磨加工 / ナノ粒子 / 半導体 / 平坦化 / シリコンウエハ / レーザトラッピング / 光応用計測 / Laser applied measurement / ゴーストイメージング / 偏光計測 / フラーレン / 平坦加工 / 微細加工 / ナノ加工 / レーザ加工 / コヒーレントフォノン / パルストレインビーム / パルストレイン / インプロセス計測 / 逆散乱 / フーリエ変換 / 超精密 / nanotechnology / 表面欠陥 / Silicon wafer / Optical measurement / 微粒子 / optical radiation pressure / laser trapping / ナノインプロセス計測 / レーザ応用計測 / エリプソメトリ / 光相関イメージング / フォトンカウンティング / 光スピンホール効果 / 光相関 / 弱測定 / 光周波数コム / スラリー / 超砥粒 / カーボンナノ粒子 / 超平坦加工 / 水酸化フラーレン / UVレーザ / カーボン / フラーレンC60 / Cu-CMP / 研磨スラリー / 計測工学 / ナノメートル計測 / 機械工学・生産工学 / 三次元計測 / フェムト秒レーザ / 原子加工 / 非平衡状態 / フェムト秒パルス / コヒーレント振動 / 原子直接加工 / 蛍光偏光法 / ブラウン運動 / 回転拡散係数 / 回転ブラウン運動 / 粘性計測 / 偏光解消 / デバイストークスアインシュタインの法則 / マイクロCMM / 直径計測 / Whispering gallery mode / テーパファイバ / WGM / マイクロ球 / マイクロプローブ / 真球度 / フェムト秒レーザー / 表面励起加工 / コヒーレント励起 / インコヒーレント励起 / アブレーション / ダブルパルス / 表面励起 / レーザー加工 / ダメージレス加工 / 表面加工 / レーザーアブレーション / レーザーアブレ－ション / マイクロマシニング / 微細形状測定 / 逆散乱位相法 / 光学的フーリエ変換 / 指数型光減少フィルタ / micromachining / inprocess measurement / fine profile measurement / inverse scattering phase retrieval / optical Fourier transform / exponential density filter / シリコンウェハ / 表面欠陥検査 / 微小付着異物 / 光誘起屈折率効果結晶 / BSO結晶 / Fraunhofer回折 / ミ-散乱 / BSO / Surface defects inspection / Contamination / In-process measurement / Nano-technology / Photorefractive crystal / BSO crystal / 3次元形状計測 / オンマシン計測 / リバースエンジニアリング / 自由曲面 / CADモデル / マスタモデル / 曲面あてはめ / 金型 / 形状処理 / 3-D form measurement / On-machine measurement / Reverse engineering / 3-D free form surface / CAD model / Master model / Surface fitting / マイクロ加工 / 超精密加工 / ダイヤモンド / micro-machining / mechanochemical polishing / diamond grain / optical processing / ナノCMM / マイクロパーツ / 大気中レーザトラッピング / 位置検出プローブ / Linnik干渉計 / 3次元位置座標 / マイクロパ-ツ / Mirau干渉計 / Nano-CMM / Microparts / Laser trapping in air / Position detecting probe / Radiation pressure force / Linnik interferometer / 3D position / Particle / 位相回復 / 微細形状計測 / マイクロ加工計測 / レーザー応用計測 / Optical Inverse Scattering / Phase retrieval / 3D Micro-Profile / Nano in-process measurement / Fourier transform / Fraunhofer diffraction / CMP加工 / 薄膜表面 / 光散乱 / Surface defect / Nano-inprocess measurement / CMP process / SiO2 thin film / Laser light scattering / Semiconductor / レーザトラップ / polishing process / planarization / silicon wafer / semiconductor / 画像計測 / 高感度画像計測 / 蛍光顕微鏡 / エリプソメータ / エリプソメトリー / シングルピクセルイメージング / ディープラーニング / 微弱光イメージング / 欠陥検出 / 散乱光計測 / 散乱光イメージング / 光相関顕微鏡 / コンプレッシブセンシング / 超微弱光イメージング / 光子イメージング / 散乱光検出 / 高感度イメージング / 3次元リソグラフィ / タルボット効果 / 高アスペクト比構造 / 機械学習 / ホログラフィ / 三次元リソグラフィ / フォトリソグラフィ / 一括露光 / 3次元微細加工 / グラフェン / モアレ / 電子ビーム / 表面粗さ / 微細構造計測 / 表面粗さ計測 / 超薄膜計測 / 光弾性計測 / 残留応力測定 / スピンホール効果 / 表面形状計測 / 量子光学効果 / 量子もつれ / 超解像顕微鏡 / 相関計測 Less

Study on Nano-in-process Measurement of Glass Surface Layer using Electron Enhanced Raman Scattering Spectroscopy (EERS) in Laser FilamentationPrincipal Investigator
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Osaka University
量子もつれ光子対プローブによる光相関超解像イメージング
- Principal Investigator
  
  水谷康弘
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21030:Measurement engineering-related
- Research Institution
  Osaka University
The Fundamentals of Engineered Surface Metrology based on Quantum Effect of Photon ScatteringPrincipal Investigator
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  2021 – 2024
- Research Category
  
  Grant-in-Aid for Challenging Research (Pioneering)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  Osaka University
Surface measurement with sub-nano order resolution by using Spin Hall effect of light generated by optical frequency comb
- Principal Investigator
  
  水谷康弘
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21030:Measurement engineering-related
- Research Institution
  Osaka University
Real time and localized analysis of pulse laser fine-machining mechanism based on Raman scattering with optical frequency combPrincipal Investigator
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  Osaka University
Study on Nano-Surface Integrity Measurement of Machined Glass Component using Entangled Photon ProbePrincipal Investigator
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Osaka University
Large area of 3D fabrication by atomic Moire using graphene and electron beam
- Principal Investigator
  
  Mizutani Yasuhiro
- Project Period (FY)
  2018 – 2019
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  Osaka University
Fundamental study on Metrology dressed photon probe for analyzing atomic clusters in machining phenomenaPrincipal Investigator
- Principal Investigator
  
  Takaya Yasuhiro
- Project Period (FY)
  2017 – 2018
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Research Field
  
  Mechanics of materials, Production engineering, Design engineering, and related fields
- Research Institution
  Osaka University
Study on Inverse Scattering Method using Optical Frequency Comb for Measuring Surface Topography with Wide Range of Spatial FrequencyPrincipal Investigator
- Principal Investigator
  
  Takaya Yasuhiro
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Ghost imaging for detecting sub-nano defect
- Principal Investigator
  
  Mizutani Yasuhiro
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Measurement engineering
- Research Institution
  Osaka University
Ghost Imaging Ellipsometry
- Principal Investigator
  
  Mizutani Yasuhiro
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Osaka University
Raman spectrum analysis for measuring temperature and material property on the nano-machined surface by short pulse laserPrincipal Investigator
- Principal Investigator
  
  Takaya Yasuhiro
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
In-process nano surface processing control by using time resolved coherent phonon excitation on semiconductor target with
- Principal Investigator
  
  Hayashi Terutake
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Kyushu University
  Osaka University
Laser micro-machining using photonic nanojets controlled by in-situ measurementPrincipal Investigator
- Principal Investigator
  
  Takaya Yasuhiro
- Project Period (FY)
  2012 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Study on ultra-precision viscosity measurement using a fluorescent probe
- Principal Investigator
  
  HAYASHI Terutake
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Osaka University
Sphere measurement using whispering gallery mode
- Principal Investigator
  
  MICHIHATA Masaki
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Analysis of polishing machanism using chemical reactive nanoparticles based on Raman spectrum enhanced by localized and propagating surface plasmon resonancePrincipal Investigator
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterningPrincipal Investigator
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
A novel fabrication technique based on coherent phonon oscillation by using femto pulse train beam
- Principal Investigator
  
  HAYASHI Terutake
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
自己組織化加工制御のためのナノ3次元構造インプロセス計測に関する基礎研究Principal Investigator
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
ナノスケール生産基盤におけるコア計測技術に関する企画調査
- Principal Investigator
  
  高増潔
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokyo
フェムト秒時間分解変位計測に関する基礎研究Principal Investigator
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
フラーレンナノ粒子の光放射圧制御による超平坦化CMP加工に関する研究
- Principal Investigator
  
  三好隆志
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
カーボン機能ナノ粒子の光放射圧運動制御による超微細加工に関する研究
- Principal Investigator
  
  三好隆志
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
微粒子レンズを用いた共振レーザアブレーションによる自律型ナノ加工に関する研究Principal Investigator
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
フラーレンナノ粒子の光放射圧制御とその超平坦化CMP加工への応用に関する研究
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Study on Multi-scale Nano-measurement of Microparts using Optically Oscillated MicroprobePrincipal Investigator
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2003 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
DEVELOPMENT OF THE NANO-CMP PROCESS APPARATUS CONTROLLED BY OPTICAL RADISTION PRESSURE
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  OSAKA UNIVERSITY
Study on Laser Trapping Probe for Measuring Fine Machined 3-D Form with High Aspect RatioPrincipal Investigator
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Study on Nano-inprocess measurement of CMP defects on SiO2 filmed wafer surface
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of Nonlaminate Stereolithography System Using TFTLCDPrincipal Investigator
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Nano-Defects Inspection in Polished Silicon Wafer Sub-Surface Using IR Evanescent LightPrincipal Investigator
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Nano In-Process Measurement of 3D Micro-Profile Using Optical Inverse Scattering
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of Micromachining Tool Driven by Radiation PressurePrincipal Investigator
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
超精密加工表面層のマイクロクラック・インプロセス計測法に関する研究Principal Investigator
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Study on Micro-machining Using a Small Particle Controlled by Optical Pressure.
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of Laser Trapping Probe for The Nano-CMM
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
ナノ3次元座標測定機のためのレーザトラップ非接触プローブに関する基礎的研究Principal Investigator
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
STUDY ON NANO-INPROCESS MEASUREMENT OF SILICON WAFER SURFACE DEFECTS
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of A Non-contact 3-D Free Form Surface Measuring System in Aid of The Maser Model Based Design
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
超精密ダイヤモンド工具切れ刃の非接触先端形状計測に関する研究Principal Investigator
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
位相共役光を用いた超精密3次元曲面の自動形状計測に関する研究Principal Investigator
- Principal Investigator
  
  高谷裕浩
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Study on nano-inprocess measurement for flexible micromachinig
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University

[Book] Progress in Optomechatronic Technologies "chapter 4"2014
- Author(s)
  Atsushi Adachi, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya
- Total Pages
  205
- Publisher
  Springer International Publishing
- Data Source
  KAKENHI-PROJECT-24656102
[Journal Article] Study on Laser Micro Machining Using a Photonic Nanojet (1st report) —Fundamental Characteristics of Laser Micro Machining Using a Photonic Nanojet—2020
- Author(s)
  上野原努, 水谷康弘, 高谷裕浩
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 86 Issue: 1 Pages: 113-119
- DOI
  10.2493/jjspe.86.113
- NAID
  130007782514
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K21919, KAKENHI-PROJECT-18J10140
[Journal Article] Fabrication of 3D Nano-Periodic Structure Using Multiple Exposure Lithography by Talbot Effect2019
- Author(s)
  中西弘樹, 篠崎充, 水谷康弘, 高谷裕浩
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 85 Issue: 8 Pages: 710-716
- DOI
  10.2493/jjspe.85.710
- NAID
  130007687564
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18K18811
[Journal Article] Comparison of intensity distribution of photonic nanojet according to Gaussian beam and radially polarization beam incidence2019
- Author(s)
  Uenohara Tsutomu、Mizutani Yasuhiro、Takaya Yasuhiro
- Journal Title
  
  Precision Engineering
  
  Volume: 60 Pages: 274-279
- DOI
  10.1016/j.precisioneng.2019.07.019
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K21919, KAKENHI-PROJECT-18J10140
[Journal Article] Wide-range Axial Position Measurement for Jumping Behavior of Optically Trapped Microsphere near Surface using Chromatic Confocal Sensor2015
- Author(s)
  Shin-ichi Ueda, Masaki Michihata, Terutake Hayashi and Yasuhiro Takaya
- Journal Title
  
  Int. J. of Optmechatronics
  
  Volume: 9 Pages: 131-140
- DOI
  10.1080/15599612.2015.1034901
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24246028
[Journal Article] Measurement of stylus-probe sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery mode2014
- Author(s)
  Masaki Michihata, Ayano Fukui, Terutake Hayashi, Yasuhiro Takaya
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 55
- DOI
  10.1016/j.cirp.2014.02.002
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656102
[Journal Article] 蛍光偏光法を用いたナノ粒子粒径計測に関する研究（第１報）－蛍光DNAプローブを用いた回転拡散係数測定システムの開発－2014
- Author(s)
  石崎佑樹，林　照剛，道畑正岐，高谷裕浩
- Journal Title
  
  精密工学会誌
  
  Volume: 2 Pages: 214-219
- NAID
  130003394534
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656088
[Journal Article] 蛍光偏光法を用いたナノ粒子粒径計測に関する研究(第1報)-蛍光DNAプローブを用いた回転拡散係数測定システムの開発-2014
- Author(s)
  石崎佑樹,林照剛,道畑正岐,高谷裕浩
- Journal Title
  
  精密工学会誌
  
  Volume: VOl.80, No.3 Pages: 214-219
- NAID
  130003394534
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656088
[Journal Article] Measurement of stylus-probe sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery mode2014
- Author(s)
  M. Michihata, T. Hayashi, A. Adachi, Y. Takaya
- Journal Title
  
  CIRP Annals
  
  Volume: vol. 63, no. 1(in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656102
[Journal Article] ポリグリセロール修飾ナノダイヤモンドを用いた銅膜の平坦化加工に関する研究2014
- Author(s)
  村井亮太,高谷裕浩,林照剛,道畑正岐,小松直樹
- Journal Title
  
  砥粒加工学会誌
  
  Volume: Vol.58, No.2 Pages: 97-102
- NAID
  130004835699
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656104
[Journal Article] Development of nanoparticle sizing system using fluorescence polarization2013
- Author(s)
  Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, and Kok Fonog Lee
- Journal Title
  
  ACTA IMEKO
  
  Volume: Vol. 2, No. 2 Pages: 67-72
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656088
[Journal Article] Kazumasa Kano, Surface analysis of the chemical polishing process using a fullerenol slurry by Raman spectroscopy under surface plasmon excitation2013
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Ryota Murai
- Journal Title
  
  Annals of the CIRP
  
  Volume: ol.62, Issue 1 Pages: 571-574
- DOI
  10.1016/j.cirp.2013.03.019
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656104
[Journal Article] New technique for single-beam gradient-force optical trapping in air2013
- Author(s)
  M.Michihata, T.Yoshikane, T.Hayashi, Y.Takaya
- Journal Title
  
  International journal of Optomechatronics
  
  Volume: 7 Pages: 46-59
- DOI
  10.1080/15599612.2012.760122
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656102
[Journal Article] Development of nanoparticle sizing system integrated with optical microscopy using fluorescence polarization2012
- Author(s)
  Terutake Hayashi, Yasuhiro Takaya and Masaki Michihata
- Journal Title
  
  International Journal of Nanomanufacturing
  
  Volume: Vol. 8, Nos. 1/2 Pages: 54-56
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656088
[Journal Article] Dimensional measurement of microform with high aspect ratio using an opticaly controlled particle with standing wave scale sensing2012
- Author(s)
  Yasuhiro Takaya, Michihata, Terutake Hayashi, Taisuke Washitani
- Journal Title
  
  Annals of the CIRP
  
  Volume: Vol.61, Issue 1 Pages: 479-482
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24246028
[Journal Article] Chemical mechanical polishing of patterend copper wafer surface using water-soluble fullerenol slurry2011
- Author(s)
  Yasuhiro Takaya, Hirotaka Kishida, Terutake Hayashi, Masaki Michihata
- Journal Title
  
  Annals of the CIRP
  
  Volume: Vol.60 Pages: 567-570
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360064
[Journal Article] Chemical mechanical polishing of patterned copper wafer surface using water-soluble fullerenol slurry2011
- Author(s)
  Yasuhiro Takaya, Hirotaka Kishida, Terutake Hayashi, Masaki Michihata, Ken Kokubo
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: Vol.60, Issue1 Pages: 567-570
- Data Source
  KAKENHI-PROJECT-21360064
[Journal Article] Performance of water-soluble fullerenol as novel functional molecular abrasive grain for polishing nanosurfaces2009
- Author(s)
  Yasuhiro Takaya, Hideaki Tachika, Terutake Hayashi, Ken Kokubo, Keisuke Suzuki
- Journal Title
  
  The 59th CIRP general assembly, CIRP Annals. Manufacturing Technology
  
  Volume: Vol.58, Issue1 Pages: 495-498
- Data Source
  KAKENHI-PROJECT-21360064
[Journal Article] Performance of water-soluble fullerenol as novel functional molecular abrasive grain for polishing nanosurfaces2009
- Author(s)
  Yasuhiro Takaya, Hideaki Tachika, Terutake Hayashi, Ken Kokubo, Keisuke Suzuki
- Journal Title
  
  CIRP Annals 1巻
  
  Pages: 495-498
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360064
[Journal Article] 水酸化フラーレンスラリーを用いたCu-CMP加工に関する研究2009
- Author(s)
  田近英之, 高谷裕浩, 林照剛, 田名田祐樹, 小久保研, 鈴木恵友
- Journal Title
  
  精密工学会誌 Vol.75 No.4
  
  Pages: 489-495
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360064
[Journal Article] 水酸化フラーレンスラリーを用いたCu-CMP加工法に関する研究-研磨特性の検証-2009
- Author(s)
  田近英之, 高谷裕浩, 林照剛, 田名田祐樹, 小久保研, 鈴木恵友
- Journal Title
  
  精密工学会誌論文集,精密工学会誌
  
  Volume: Vol.75, No.4 Pages: 489-495
- NAID
  130000421625
- Data Source
  KAKENHI-PROJECT-21360064
[Journal Article] フェムト秒パルスレーザ干渉を用いた短時間分解能計測2007
- Author(s)
  長井孝之(阪大), 高谷裕浩
- Journal Title
  
  平成18年度関西学生会卒業研究発表講演会大阪
- Data Source
  KAKENHI-PROJECT-18656047
[Journal Article] Evaluation of Laser Trapping Probe Properties for Coordinate Measurement2006
- Author(s)
  Masaki Michihata, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
- Journal Title
  
  Instrumentation and Computer-Vision System (SPIE) Vol. 6375
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] A Novel Surface Finishing Technique for Microparts Using an Optically Controlled Microparticle Tool2006
- Author(s)
  Yasuhiro Takaya, Kenshiro Hida, Takashi Miyoshi, Torutake Hayashi
- Journal Title
  
  CIRP ANNALS VOL.55/1
  
  Pages: 613-616
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Study on nano-3D position detection using laser trapping probe with circular motion2006
- Author(s)
  Yuto Nagasaka, Yasuhiro TAKAYA, Takashi MIYOSHI, Terutake Hayashi
- Journal Title
  
  The 6th Manufacturing ＆ Machine Tool Conference, Hayama
  
  Pages: 129-130
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Evaluation of Laser Trapping Probe Properties for Coordinate Measurement2006
- Author(s)
  Masaki Michihata, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
- Journal Title
  
  Instrumentation and Computer-Vision System (SPIE) Vol.6375
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] レーザトラッピングプローブを用いた高精度3次元座標計測に関する研究2006
- Author(s)
  道畑正岐, 高谷裕浩, 三好隆志, 林照剛
- Journal Title
  
  2006年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 1053-1054
- NAID
  130005027106
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] レーザトラップを用いたナノ3次元位置検出プローブに関する研究-2次元振動プローブの特性評価-2006
- Author(s)
  長坂雄人, 高谷裕浩, 三好隆志, 林照剛
- Journal Title
  
  日本機械学会第6回生産加工・工作機械部門講演会葉山
  
  Pages: 129-130
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 輪帯エバネッセント照明による回路パターン付きSiウエハの表面異物欠陥検出法に関する研究(第1報): 欠陥検出原理とその検証実験2006
- Author(s)
  吉岡淑江, 三好隆志, 高谷裕浩, 高橋哲
- Journal Title
  
  精密工学会誌 72・7
  
  Pages: 878-883
- NAID
  110004744884
- Data Source
  KAKENHI-PROJECT-18636002
[Journal Article] The 3D) manipulation of a microsphere for nano-CMM probe using single fiber optical trapping2006
- Author(s)
  Sang In Eom, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
- Journal Title
  
  Proceedings of Optics and Photonics 2006 (SPIE) Vol.6326, (CD_ROM)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] UVレーザを用いた微粒子トラップによる微細加工に関する研究2006
- Author(s)
  日高敏揮, 高谷裕浩, 三好隆志, 林照剛
- Journal Title
  
  日本機械学会第6回生産加工・工学機械部門講演会講演論文集 (in print)
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] 光放射圧を利用した微粒子制御によるナノ仕上げ加工に関する研究(第2報) -局所マイクロ領域におけるナノ平滑化特性-2006
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩, 林照剛
- Journal Title
  
  2006年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 1195-1196
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] レーザトラップを用いたナノ3次元位置検出プローブに関する研究? 2次元振動プローブの特性評価?2006
- Author(s)
  長坂雄人, 高谷裕浩, 三好隆志, 林照剛
- Journal Title
  
  日本機械学会第6回生産加工・工作機械部門講演会葉山
  
  Pages: 129-130
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Novel CMP Technique for Copper Surface Finishing with Fullerene Nano-Particle2006
- Author(s)
  H.Tanada, T.Miyoshi, Y.Takaya, T.Hayashi, K.Suzuki
- Journal Title
  
  Proceeding of ASPE 21st Annual Meeting (ASPE'06), Monterey, California
  
  Pages: 595-598
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] Study on High Precise-3-Dimensional Coordinate Measurement with Laser Trapping Probe2006
- Author(s)
  Masaki MICHIHATA, Yasuhiro TAKAYA, Takashi MIYOSHI, Terutake HAYASHI
- Journal Title
  
  Proceedings of 2006 JSPE general meeting in spring, Tokyo
  
  Pages: 1053-1054
- NAID
  130005027106
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 光放射圧を利用した微粒子制御によるナノ仕上加工に関する研究-局所マイクロ領域におけるナノ平滑化特性-2006
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩, 林照剛
- Journal Title
  
  2006年度精密工学会春季大会学術講演会講演論文集 (in press)
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] The 3D manipulation of a microsphere for nano-CMM probe using single fiber optical trapping2006
- Author(s)
  Sang In Eom, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
- Journal Title
  
  Proceedings of Optics and Photonics 2006 (SPIE) Vol. 6326(CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] フラーレンナノ粒子を用いたCu-CMPの研究-研磨の基本特性2006
- Author(s)
  田名田祐樹, 三好隆志, 高谷裕浩, 林照剛
- Journal Title
  
  2006年度精密工学会関西地方定期学術講演会講演論文集
  
  Pages: 15-16
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] A Novel Surface Finishing Technique for Microparts Using an Optically Controlled Microparticle Tool2006
- Author(s)
  Yasuhiro Takaya, Kenshiro Hida, Takashi Miyoshi, Terutake Hayashi
- Journal Title
  
  CIRP ANNALS VOL. 55/1
  
  Pages: 613-616
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第13報)-横方向強制振動型プローブの振動検出系の改良-2005
- Author(s)
  今井敬次郎, 高谷裕浩, 三好隆志
- Journal Title
  
  2005年度精密工学会春季大会学術講演会論文集東京(発表予定)
- NAID
  130004657757
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Nano-Position Sensing Using Optically Motion-controlled Microprobe with PSD Based on Laser Trapping Technique2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Syuichi Dejima, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL.54/1
  
  Pages: 467-470
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Dynamic Properties Measurement of Vibrating Microprobe for Nano-Position Sensing Using Radiation Pressure Control2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
- Journal Title
  
  SPIE Vol.5930(CD-ROM)
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber -Fundamental Analysis of the Optical Fiber Trapping2005
- Author(s)
  Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI
- Journal Title
  
  Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21) Nagoya
  
  Pages: 365-370
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Dynamic Properties Measurement of Vibrating Microprobe for Nano-Position Sensing Using Radiation Pressure Control2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
- Journal Title
  
  SPIE Vol. 5930, (CD-ROM)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Study of probing technique for nano-CMM using laser trap- improvement of vibration detection unit-2005
- Author(s)
  Keijiro IMAI, Yasuhiro TAKAYA, Takashi MIYOSH1
- Journal Title
  
  Proceedings of 2005 JSPE general meeting in spring, Tokyo
  
  Pages: 1003-1004
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Dynamic Properties Measurement of Vibrating Microprobe for Nano-Position Sensing Using Radiation Pressure Control2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
- Journal Title
  
  SPIE Vol. 5930(CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber-Fundamental Analysis of the Optical Fiber Trapping2005
- Author(s)
  Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI
- Journal Title
  
  Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21), Nagoya
  
  Pages: 365-370
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 光放射圧を利用した微粒子制御によるナノ仕上加工に関する研究-加工特性の解析-2005
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩, 林照剛
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 943-944
- NAID
  130004657252
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] Laser-assisted CMP for Copper Wafer2005
- Author(s)
  T.Ha, K.Kimura, T.Miyoshi, Y.Takaya
- Journal Title
  
  Material Science Forum Vol.2(in press)
- Data Source
  KAKENHI-PROJECT-15656041
[Journal Article] Laser - assisted CMP for Copper Wafer2005
- Author(s)
  Taeho Ha, Keiichi Kimura, Takashi Miyoshi, Yasuhiro Takaya
- Journal Title
  
  Trans Tech Publications, Material Science Forum Vol.502
  
  Pages: 351-356
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] Nano-Position Sensing Using Optically Motion-controlled Microprobe with PSD) Based on Laser Trapping Technique2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL.54/1
  
  Pages: 467-470
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Nano-fishing Using a Micro-perticle Controlled by Optical Radiation Force2005
- Author(s)
  Kenshiro Hida, Takashi Miyoshi, Yasuhiro Takaya, Terutake Hayashi
- Journal Title
  
  Proceedings of the 20th American Society for Precision Engineering Annual Meeting (ASPE'05) USA
  
  Pages: 464-467
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第13報)-横方向強制振動型プローブの振動検出系の改良-2005
- Author(s)
  今井敬次郎, 高谷裕浩, 三好隆志
- Journal Title
  
  2005年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 1013-1014
- NAID
  130004657757
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber - Fundamental Analysis of the Optical Fiber Trapping2005
- Author(s)
  Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI
- Journal Title
  
  Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21) Nagoya
  
  Pages: 365-370
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Nano-Position Sensing Using Optically Motion-controlled Microprobe with PSD Based on Laser Trapping Technique2005
- Author(s)
  Yasuhiro Takaya, Keijiro Imai, Syuichi Dejima, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL. 54/1
  
  Pages: 467-470
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Nano-finishing Using a Micro-particle Controlled by Optical Radiation Force2005
- Author(s)
  Kenshiro Hida, Takashi Miyoshi, Yasuhiro Takaya, Terutake Hayashi
- Journal Title
  
  Proceedings of the 20^<th> American Society for Precision Engineering Annual Meeting (ASPE'05) Vol.37
  
  Pages: 464-467
- NAID
  130004657252
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] 光放射圧を利用した微粒子制御によるナノ仕上げ加工に関する研究 -加工特性の解析-2005
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩, 林照剛
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集京都
  
  Pages: 943-944
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control2004
- Author(s)
  Yasuhiro Takaya, K.Imai, Taeho Ha, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL. 53/1
  
  Pages: 389-392
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Laser Planarization Process for Copper Surface2004
- Author(s)
  K.Kimura, Y.Takaya, T.Miyoshi, T.Miyamoto
- Journal Title
  
  Proc.of The 1st Pac-Rim Int.Conference on Planarization CMP and its Application Technology Vol.1
  
  Pages: 173-178
- Data Source
  KAKENHI-PROJECT-15656041
[Journal Article] 光放射圧を利用した微粒子制御によるナノ仕上加工に関する研究2004
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩
- Journal Title
  
  2004年度精密工学会関西地方定期学術講演会講演論文集大阪
  
  Pages: 43-44
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] Nano-CMM probing technique using optical fiber trapping (2nd report)-Fundamental analysis of laser trapping using optical fiber-2004
- Author(s)
  Takaki HASHIMOTO, Yasuhiro TAKAYA, Takashi MIYOSHI
- Journal Title
  
  Proceedings of 2004 JSPE general meeting in spring, Tokyo
  
  Pages: 673-674
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Position Sensitivity of Micro Probe with Transverse Vibration Using Optical Trap2004
- Author(s)
  Keijiro Imai, Yasuhiro Takaya, Takashi Miyoshi, Taeho Ha, Keiichi Kimura
- Journal Title
  
  Proceedings of International Symposium on Photonics in Measurement 2004, VDI-Berichte 1844
  
  Pages: 277-284
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 光放射圧を利用した微粒子制御によるナノ加工に関する研究2004
- Author(s)
  檜田健史郎, 三好隆志, 高谷裕浩
- Journal Title
  
  精密工学会2004年度関西地方定期公演会論文集
  
  Pages: 43-44
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] レーザ複合ナノCMP平坦加工に関する研究2004
- Author(s)
  宮本利樹, 三好隆志, 高谷裕浩, 木村景一
- Journal Title
  
  精密工学会2004年度関西地方定期公演会論文集
  
  Pages: 41-42
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] レーザ複合ナノCMP平坦加工に関する研究-レーザ照射によるCu表面層の除去加工特性2004
- Author(s)
  宮本利樹, 三好隆志, 高谷裕浩, 木村景一, 鈴木恵友
- Journal Title
  
  2004年度精密工学会関西地方定期学術講演会講演論文集大阪
  
  Pages: 41-42
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第12報)-横方向強制振動型プローブ測定物近傍での振動特性-2004
- Author(s)
  今井敬次郎, 高谷裕浩, 三好隆志
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会論文集島根
  
  Pages: 993-994
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Position Sensitivity of Micro Probe with Transverse Vibration Using Optical Trap2004
- Author(s)
  Keijiro Imai, Yasuhiro Takaya, Takashi Miyoshi, Taeho Ha, Keiichi
- Journal Title
  
  Proceedings of International Symposium on Photonics in Measurement 2004 Frankfurt
  
  Pages: 277-284
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Laser Planarization Process for Copper Surface2004
- Author(s)
  K.Kimura, Y.Takaya, T.Miyoshi, T.Miyamoto
- Journal Title
  
  Proc.of The 1st Pac-Rim Int.Conference on Planarization CMP and its Application Technology Vol.1
  
  Pages: 173-178
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第12報)?横方向強制振動型プローブの測定物近傍での振動特性?2004
- Author(s)
  今井敬次郎, 高谷裕浩, 三好隆志
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会論文集島根
  
  Pages: 993-994
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Study of Probing Technique for Nano-CMM Using Laser Trap(12nd Report)-Basic Characteristic of Vibration Probe-2004
- Author(s)
  Keijiro IMAI, Yasuhiro TAKAYA, Takashi MIYOSHI
- Journal Title
  
  Proceedings of 2004 JSPE general meeting in autumn, Shimane
  
  Pages: 993-994
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control2004
- Author(s)
  Yasuhiro Takaya, K.Imal, Taeho Ha, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL.53/1
  
  Pages: 389-392
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Laser Planarization Process Assisted by Chemical Mechanical Polishing for Copper Surface2004
- Author(s)
  Yasuhiro Takaya, Keiichi Kimura, Takashi Miyoshi, Toshiki Miyamoto, Keisuke Suzuki
- Journal Title
  
  Proceedings of the 19th American Society for Precision Engineering Annual Meeting (ASPE'04) Vol.34
  
  Pages: 705-708
- Data Source
  KAKENHI-PROJECT-16656052
[Journal Article] Laser Planarization Process Assisted by Chemical Mechanical Polishing for Copper Surface2004
- Author(s)
  Y.Takaya, K.Kimura, T.Miyoshi, T.Miyamoto, K.Suzuki
- Journal Title
  
  Proc.of the 19th American Society for Precision Engineering Annual Meeting (ASPE'04) Vol.34
  
  Pages: 705-708
- Data Source
  KAKENHI-PROJECT-16206017
[Journal Article] Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control2004
- Author(s)
  Yasuhiro Takaya, K.Imai, Taeho Ha, Takashi Miyoshi
- Journal Title
  
  CIRP ANNALS VOL.53/1
  
  Pages: 389-392
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] レーザ複合ナノCMP平坦加工に関する研究2004
- Author(s)
  宮本利樹, 三好隆志, 高谷裕浩, 木村景一
- Journal Title
  
  精密工学会2004年度関西地方定期公演会論文集
  
  Pages: 41-42
- Data Source
  KAKENHI-PROJECT-15656041
[Journal Article] Position Sensitivity of Micro Probe with Transverse Vibration Using Optical Trap2004
- Author(s)
  Keijiro Imai, Yasuhiro Takaya, Takashi Miyoshi, Taeho Ha, Keiichi Kimura
- Journal Title
  
  Proceedings of International Symposium on Photonics in Measurement 2004 VDI-Berich te 1844
  
  Pages: 277-284
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 光ファイバを用いたナノCMMプローブの研究(第2報)-光ファイバによるレーザトラッピング基礎特性解析-2004
- Author(s)
  橋本隆希, 高谷裕浩, 三好隆志
- Journal Title
  
  2004年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 673-674
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Fundamental Properties of The Forced Vibrational Laser Traooing Probe for The Nano-CMM2003
- Author(s)
  Yasuhiro TAKAYA, Keijiro IMAI, Taeho Ha, Takashi MIYOSHI
- Journal Title
  
  Proceedings of 2003 JSPE Hokkaido branch meeting, Muroran
  
  Pages: 3-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 強制振動型ナノCMMレーザトラッピングプローブの基本特性2003
- Author(s)
  高谷裕浩, 今井敬次郎, 河兌坪, 三好隆志
- Journal Title
  
  2003年度精密工学会北海道支部学術講演会講演論文集室蘭
  
  Pages: 3-4
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Fundamental Analysis on the Novel 3-D Probing Technique for Microparts Using the Optical Fiber Trapping2003
- Author(s)
  Takaki Hashimoto, Yasuhiro Takaya, Takashi Miyoshi, Ryusuke Nakajima
- Journal Title
  
  Proceedings of the 18th American Society for Precision Engineering Annual Meeting Portland
  
  Pages: 83-86
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Nano-CMM Probe using' Optical Fiber Trapping-Trapping Force Simulation using FDTD Method-2003
- Author(s)
  Takaki HASHIMOTO, Yasuhiro TAKAYA, Takashi MIYOSHI, Ryuusuke NAKAJIMA
- Journal Title
  
  Proceedings of 2003 JSPE Kansai Branch regular meeting, Osaka
  
  Pages: 71-72
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] Fundamental Analysis on the Novel 3-D Probing Technique for Microparts Using the Optical Fiber Trapping2003
- Author(s)
  Takaki Hashimoto, Yasuhiro Takaya, Takashi Miyoshi. Ryusuke Nakajima
- Journal Title
  
  Proceedings of the 18th American Society for Precision Engineering Annual Meeting, Portland
  
  Pages: 83-86
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Journal Article] 光ファイバを用いたナノCMMプローブの研究 -トラップカのFDTDシミユレーションー2003
- Author(s)
  橋本隆希, 高谷裕浩, 三好隆志, 中島隆介
- Journal Title
  
  2003年度精密工学会関西地方定期学術講演会講演論文集大阪
  
  Pages: 71-72
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206016
[Patent] 微細構造体及びその製造方法2019
- Inventor(s)
  水谷康弘，高谷裕浩，中西宏樹，江崎隆，牧浦良彦
- Industrial Property Rights Holder
  水谷康弘，高谷裕浩，中西宏樹，江崎隆，牧浦良彦
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2019-203528
- Filing Date
  2019
- Data Source
  KAKENHI-PROJECT-18K18811
[Patent] 微細構造体及びその製造方法2019
- Inventor(s)
  水谷康弘，高谷裕浩，中西宏樹，江崎隆，牧浦良彦
- Industrial Property Rights Holder
  水谷康弘，高谷裕浩，中西宏樹，江崎隆，牧浦良彦
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2019-203525
- Filing Date
  2019
- Data Source
  KAKENHI-PROJECT-18K18811
[Patent] レーザー加工装置，レーザー加工方法及び加工物の製造方法2014
- Inventor(s)
  林　照剛，高谷裕浩，道畑正岐
- Industrial Property Rights Holder
  林　照剛，高谷裕浩，道畑正岐
- Industrial Property Rights Type
  特許
- Filing Date
  2014
- Data Source
  KAKENHI-PROJECT-25289017
[Patent] 被加工物の目的材料除去を行う加工方法及び加工装置2004
- Inventor(s)
  高谷裕浩, 三好隆志, 木村景一
- Industrial Property Number
  2004-088359
- Filing Date
  2004-03-25
- Data Source
  KAKENHI-PROJECT-16656052
[Patent] 被加工物の目的材料除去を行う加工方法および加工装置2004
- Inventor(s)
  高谷裕浩, 三好隆志, 木村景一
- Industrial Property Number
  2004-088359
- Filing Date
  2004-03-25
- Data Source
  KAKENHI-PROJECT-16656052
[Presentation] Development of Ellipsometry Based on Spin Hall Effect of Light (5th report) -2D distribution of SHEL shift for evaluation of sub-nanometer surface topography-2021
- Author(s)
  LI ZHEHAN, 水谷康弘, 上野原努, 田所利康, 高谷裕浩
- Organizer
  2021年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02154
[Presentation] SUB-MICROMETER SCALE LASER MACHINING USING POSITION CONTROLLED PHOTONIC NANOJET2020
- Author(s)
  Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  Leading Edge Manufacturing/Materials&Processing
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K21919
[Presentation] フォトニックナノジェットを利用した液中レーザナノ加工に関する研究(第3報) 長焦点深度特性による加工特性2020
- Author(s)
  上野原努, レザアウリアラーマン, 水谷康弘, 高谷裕浩
- Organizer
  2020年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19K21919
[Presentation] 後方散乱光のラマン分光によるガラスマイクロクラック計測に関する研究2020
- Author(s)
  坂下初音, 上野原努, 水谷康弘, 高谷裕浩
- Organizer
  日本機械学会関西学生会2019 年度学生員卒業研究発表講演会
- Data Source
  KAKENHI-PROJECT-19H02042
[Presentation] 光後方散乱パターンの空間周波数解析に基づくガラス加工表面のマイクロクラック形状の評価2020
- Author(s)
  並河峻佑, 上野原努, 水谷康弘, 高谷裕浩
- Organizer
  2020年度砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02042
[Presentation] 光スピンホール効果エリプソメトリの開発（第4報）表面粗さ計測の解析的検討2020
- Author(s)
  Li Zhehan, 水谷康弘, 上野原努, 高谷裕浩
- Organizer
  2020年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02154
[Presentation] もつれ光子対を用いた表面形状計測の高分解能化に関する基礎研究2020
- Author(s)
  家中乾太, 上野原努, 水谷康弘, 高谷裕浩
- Organizer
  日本機械学会関西学生会2019 年度学生員卒業研究発表講演会
- Data Source
  KAKENHI-PROJECT-19H02042
[Presentation] Detection of Surface Roughness by Ellipsometry based on Spin Hall Effect of Light2020
- Author(s)
  Zhehan Li, Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  ICPE2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02154
[Presentation] タルボット効果を用いた広範囲 3 次元リソグラフィ(第4報) -入射光の複素振幅分布制御による構造の周期および形状制御-2020
- Author(s)
  中西弘樹, 上野原努, 水谷康弘, 牧浦良彦, 高谷裕浩
- Organizer
  2020 年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-18K18811
[Presentation] Surface shape measurement by using entanglement photon state (the 2nd report) -interference and distance measurement-2020
- Author(s)
  Zhang Congxian, 家中乾大, 上野原努, 水谷康弘, 高谷裕浩
- Organizer
  2020年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02042
[Presentation] IN-LIQUID LASER NANOMACHINING BY PHOTONIC NANOJET IN LASER TRAPPING SYSTEM2020
- Author(s)
  Reza Aulia Rahman, Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  Leading Edge Manufacturing/Materials&Processing
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K21919
[Presentation] フォトニックナノジェットを用いたレーザアブレーション加工のリアルタイムモニタリングに関する研究2020
- Author(s)
  安田諒, 上野原努, 水谷康弘, 高谷裕浩
- Organizer
  関西学生会2020年度学生員卒業研究発表講演
- Data Source
  KAKENHI-PROJECT-19K21919
[Presentation] In-Liquid Laser Nanomachining by Photonic Nanojet in Optical Tweezers Configuration2019
- Author(s)
  Reza Aulia Rahman, Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  ISMQC 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K21919
[Presentation] Fabrication of three dimensional nano-periodic structure by the Talbot lithography using multiple exposure2019
- Author(s)
  Hiroki Nakanishi, Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  Proc. SPIE 11142
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18811
[Presentation] Fabrication of Three Dimensional High Aspect Ratio Structure by Talbot Lithography2019
- Author(s)
  Ryu Ezaki, Yasuhiro Mizutani, Yoshihiko Makiura, Hiroshi Yokota, Yasuhiro Takaya
- Organizer
  ASPEN2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18811
[Presentation] Study on In-Liquid Laser Nanomachining by Photonic Nanojet in Optical Tweezers Configuration (1st report) - Investigation on machining realization by numerical simulations -2019
- Author(s)
  RAHMAN Reza Aulia, UENOHARA Tsutomu, MIZUTANI Yasuhiro, and TAKAYA Yasuhiro
- Organizer
  2019年度精密工学会学術講演会秋季大会講演会
- Data Source
  KAKENHI-PROJECT-19K21919
[Presentation] High-speed ghost imaging with deep learning2019
- Author(s)
  Yasuhiro Mizutani, Otoki Yagi, Yasuhiro Takaya
- Organizer
  Optical Technology and Measurement for Industrial Applications (OPTM2019)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] Shape control of nano periodic structure using hologram-assisted Talbot lithography2019
- Author(s)
  Hroki Nakanishi, Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  ISMTII2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18811
[Presentation] Laser micro machining using a photonic nanojet controlled by intensity distribution of incident laser2019
- Author(s)
  Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  ISMTII 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K21919
[Presentation] タルボット効果を用いた広範囲3次元リソグラフィ (第2報) -多重露光を援用した3次元ナノ周期構造の作製-2019
- Author(s)
  中西弘樹, 水谷康弘, 高谷裕浩
- Organizer
  2019年度精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-18K18811
[Presentation] タルボットリソグラフィにおけるホログラムを用いたナノ周期構造の形状制御2019
- Author(s)
  中西弘樹, 水谷康弘, 牧浦良彦, 横田博, 高谷裕浩
- Organizer
  日本光学会年次学術講演会Optics&PhotonicsJapan2019
- Data Source
  KAKENHI-PROJECT-18K18811
[Presentation] 3D surface measurement for tens-nanometers-scale groove using entanglement photons2019
- Author(s)
  Congxiang Zhang, Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  ASPEN2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02042
[Presentation] High-speed single pixel imaging with deep learning2019
- Author(s)
  Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  OIT2019
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02154
[Presentation] タルボット効果を用いたフォトリソグラフィによる高アスペクト比構造の作製2019
- Author(s)
  江崎隆, 水谷康弘, 高谷裕浩
- Organizer
  日本機械学会関西学生会2018年度学生員卒業研究発表講演会
- Data Source
  KAKENHI-PROJECT-18K18811
[Presentation] 広帯域光周波数コム散乱分光による表面トポグラフィ計測に関する基礎的研究 -光周波数コムファイバーレーザの広帯域化-2019
- Author(s)
  高橋一平，水谷康弘，高谷裕浩
- Organizer
  2019年精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16H04246
[Presentation] タルボット効果を用いた広範囲3次元リソグラフィ(第3報) -高分子膜への構造転写手法の開発-2019
- Author(s)
  江崎隆，水谷康弘，金子新，牧浦良彦，横田博，高谷裕浩
- Organizer
  2019年度精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-18K18811
[Presentation] Measurement of microcrack on machined glass surface based on Fourier analysis of laser backscattering pattern2019
- Author(s)
  Shunsuke Namikawa, Yasuhiro Mizutani, Genichiro Hagiwara, Satoshi Kawarabata, Yasuhiro Takaya
- Organizer
  ASPEN2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02042
[Presentation] タルボット効果を用いた広範囲3次元リソグラフィ(第2報)多重露光を援用した3次元ナノ周期構造の作製2019
- Author(s)
  中西弘樹, 水谷康弘, 高谷裕浩
- Organizer
  2019年度精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-18K18811
[Presentation] フォトニックナノジェットを利用した微細加工に関する研究(第８報) ～マイクロ球に照射する集光ビームパラメータによる加工制御～2019
- Author(s)
  上野原努，高谷裕浩，水谷康弘
- Organizer
  2019年度精密工学会学術講演会秋季大会講演会
- Data Source
  KAKENHI-PROJECT-19K21919
[Presentation] 量子もつれフォトンを利用した新計測原理に関する基礎研究　-量子もつれ光源の開発と計測手法の提案-2019
- Author(s)
  Congxiang Zhang, 水谷康弘，高谷裕浩
- Organizer
  2019度精密工学会学術講演会秋季大会
- Data Source
  KAKENHI-PROJECT-19H02042
[Presentation] 全反射照明による多波長光相関イメージングを用いたサブマイクロスケール3次元形状計測に関する研究 (第1報)基本原理の検証2018
- Author(s)
  八木音樹, 水谷康弘, 高谷裕浩
- Organizer
  日本機械学会 2018年度年次大会
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] Fundamental study on entangled photon probe for quantum optical metrology - Development of the entangled photon source -2018
- Author(s)
  Fumitake Yano, Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  The Japan Society for Precision Engineering 17th International Conference on Precision Engineering (ICPE2018)
- Data Source
  KAKENHI-PROJECT-17K18828
[Presentation] First photon ghost imaging by single photon counting2018
- Author(s)
  Yasuhiro Mizutani, Hiroki Taguchi, Yasuhiro Takaya
- Organizer
  International symposium on optomechatoronic technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] 量子もつれ光子プローブに関する研究―　量子もつれ光源の評価　―2018
- Author(s)
  矢野史剛，高谷裕浩，水谷康弘
- Organizer
  日本機械学会関西学生会2017年度学生員卒業研究発表講演会
- Data Source
  KAKENHI-PROJECT-17K18828
[Presentation] 微弱励起光による光相関を用いた蛍光イメージングに関する研究（第３報）検出器の時間分解能が画像コントラストに及ぼす影響2018
- Author(s)
  田口　寛樹，水谷　康弘，高谷　裕浩
- Organizer
  2018年精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] Fundamental Study on Photon Metrology - Role of photon as information media for measurement -2018
- Author(s)
  Yasuhiro Takaya and Yasuhiro Mizutani
- Organizer
  CIRP 2018 Winter Meetings
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K18828
[Presentation] ３次元表面トポグラフィ計測のための光周波数コムファイバーレーザの広帯域化2018
- Author(s)
  高橋一平，高谷裕浩，水谷康弘
- Organizer
  2018年度精密工学会関西地方定期学術講演会
- Data Source
  KAKENHI-PROJECT-16H04246
[Presentation] Fundamental study on entangled photon probe for quantum optical metrology - Development of the entangled photon source -2018
- Author(s)
  Ippei Takahashi, Yasuhiro Takaya and Yasuhiro Mizutani
- Organizer
  The Japan Society for Precision Engineering 17th International Conference on Precision Engineering (ICPE2018),
- Data Source
  KAKENHI-PROJECT-16H04246
[Presentation] 次元表面トポグラフィ計測のための光周波数コムファイバーの発振特性の調査2017
- Author(s)
  乾　和磨，高谷裕浩，水谷康弘
- Organizer
  2017年精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16H04246
[Presentation] First Photon Detection Ghost Imaging2017
- Author(s)
  Hiroki Taguchi, Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  OSA Imaging and Applied Optics Congress
- Place of Presentation
  San Francisco, USA
- Year and Date
  2017-06-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13914
[Presentation] 微弱励起光による光相関を用いた蛍光イメージングに関する研究(第 2 報）単一光子検出における高感度イメージング法の検討2017
- Author(s)
  田口寛樹, 水谷康弘, 高谷裕浩
- Organizer
  2017年度精密工学会春季学術講演会
- Place of Presentation
  慶應大学（神奈川県・横浜市）
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15K13914
[Presentation] Ghost imaging for single photon counting2017
- Author(s)
  Yasuhiro Mizutani, Hiroki Taguchi, Yasuhiro Takaya
- Organizer
  The 7th Korea-Japan Workshop on Digital Holography and Information Photonics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] 3次元表面トポグラフィ計測のための光周波数コムファイバーレーザーの発振特性2017
- Author(s)
  乾　和磨，高谷裕浩，水谷康弘
- Organizer
  精密工学会2017年度関西地方定期学術講演会
- Data Source
  KAKENHI-PROJECT-16H04246
[Presentation] 微弱励起光による光相関を用いた蛍光イメージングに関する研究（第２報）単一光子検出における高感度イメージング法の検討2017
- Author(s)
  田口寛樹，水谷康弘，高谷裕浩
- Organizer
  2017年　精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] First Photon Detection Ghost Imaging2017
- Author(s)
  Hiroki Taguchi, Yasuhiro Mizutani and Yasuhiro Takaya
- Organizer
  OSA Imaging and Applied Optics Congress 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] 全反射照明を用いた多波長光相関による 3 次元形状計測に関する研究2017
- Author(s)
  八木音樹，水谷康弘，高谷裕浩
- Organizer
  精密工学会関西支部講演会 2017
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] 光スピンホール効果エリプソメトリの開発(第一報)基本原理の検証2017
- Author(s)
  藤田寛之，水谷康弘，高谷裕浩
- Organizer
  2017年度精密工学会春季学術講演会
- Place of Presentation
  東京理科大学（千葉県・野田市）
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15K13914
[Presentation] 微弱励起光による光相関を用いた蛍光イメージングに関する研究(第 1 報) 光相関イメージングにおける効率的な照明法の検討2016
- Author(s)
  田口寛樹，水谷康弘，高谷裕浩
- Organizer
  2016年　精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] Illumination Pattern Analysis for Fluorescent Ghost Imaging2016
- Author(s)
  Yasuhiro Mizutani, Hiroki Taguchi, Yasuhiro Takaya
- Organizer
  INTERNATIONAL SYMPOSIUM ON OPTICAL MEMORY 2016
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] Ghost Imaging Ellipsometry2016
- Author(s)
  Yasuhiro Mizutani, Yasuhiro Takaya, Yukitoshi Otani
- Organizer
  International symposium on Optomechatoronic Technology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] サブ nm オーダ分解能を有するスピンホール効果プローブの開発2016
- Author(s)
  水谷康弘，上田和徳，高谷裕浩1
- Organizer
  精密工学会2016年春季大会
- Place of Presentation
  千葉
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15K13914
[Presentation] 微弱励起光による光相関を用いた蛍光イメージングに関する研究(第1報) 光相関イメージングにおける効率的な照明法の検討2016
- Author(s)
  田口寛樹, 水谷康弘, 高谷裕浩
- Organizer
  2016年度精密工学会秋季学術講演会
- Place of Presentation
  茨城大学（茨城県・水戸市）
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-15K13914
[Presentation] Single-pixel imaging by Hadamard transform and ghost imaging and its application for hyperspectral imaging2016
- Author(s)
  Yasuhiro Mizutani, Kyuki Shibuya, Hiroki Taguchi, Tetsuo Iwata, Yasuhiro Takaya, Takeshi Yasui
- Organizer
  Photonics ASIA, Proc. SPIE Vol. 10021
- Place of Presentation
  中国，北京市
- Year and Date
  2016-10-12
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13914
[Presentation] 光相関による微弱蛍光イメージング2016
- Author(s)
  田口寛樹, 水谷康弘, 高谷裕浩
- Organizer
  2016年度精密工学会関西地方定期学術講演会
- Place of Presentation
  島津製作所（京都府・京都市）
- Year and Date
  2016-07-12
- Data Source
  KAKENHI-PROJECT-15K13914
[Presentation] Ghost imaging ellipsometry2016
- Author(s)
  Yasuhiro Mizutani, Yasuhiro Takaya, Yukitoshi Otani
- Organizer
  International Symposium on Optomechatoronic Technology
- Place of Presentation
  板橋文化センター（東京都・板橋区）
- Year and Date
  2016-11-07
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13914
[Presentation] 微弱光イメージングを可能にするゴーストイメージング2016
- Author(s)
  水谷康弘，渋谷九輝，高谷裕浩
- Organizer
  レーザー学会学術講演会第36回年次大会
- Place of Presentation
  名古屋
- Year and Date
  2016-01-10
- Invited
- Data Source
  KAKENHI-PROJECT-15K13914
[Presentation] フォトニックナノジェットを利用した微細加工に関する研究 (第2報) ―ビームの位置制御による加工特性の解明―2016
- Author(s)
  上野原努，高谷裕浩，水谷康弘
- Organizer
  2016年度精密工学会学術講演会春季大会
- Place of Presentation
  東京理科大学　野田キャンパス（千葉県・野田市）
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Single-pixel imaging by Hadamard transform and its application for hyperspectral imaging2016
- Author(s)
  Yasuhiro Mizutani, b, Kyuki Shibuya, Hiroki Taguchi, Tetsuo Iwata, Yasuhiro Takaya, and Takeshi Yasui
- Organizer
  Photonics ASIA 2016
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] 光放射圧プローブを用いた表面微細形状の評価技術に関する研究（第3報） ―レーザ捕捉微小球レンズの試料面近傍における位置制御―2016
- Author(s)
  山口悠希，道畑正岐，水谷康弘，高谷裕浩
- Organizer
  2016年度精密工学会学術講演会春季大会
- Place of Presentation
  東京理科大学　野田キャンパス（千葉県・野田市）
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 光相関による微弱蛍光イメージング2016
- Author(s)
  田口寛樹，水谷康弘，高谷裕浩
- Organizer
  2016年度精密工学会関西支部講演会
- Data Source
  KAKENHI-PROJECT-16H04375
[Presentation] 光放射圧プローブを用いた表面微細形状の評価技術に関する研究（第2報） ―レーザトラッピングされたマイクロ球によるイメージング―2016
- Author(s)
  金鐘剛，道畑正岐，高谷裕浩，水谷康弘
- Organizer
  2016年度精密工学会学術講演会春季大会
- Place of Presentation
  東京理科大学　野田キャンパス（千葉県・野田市）
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 表面増強ラマン分光法による反応性ナノ粒子を用いたCu-CMPの化学的研磨作用分析2016
- Author(s)
  旭真史，高谷裕浩，水谷康弘
- Organizer
  2016年度精密工学会学術講演会春季大会
- Place of Presentation
  東京理科大学　野田キャンパス（千葉県・野田市）
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-26630027
[Presentation] 光放射圧プローブによる表面微細形状計測に関する研究2015
- Author(s)
  金　鐘剛，道畑正岐，高谷裕浩
- Organizer
  精密工学会2015年度関西地方定期学術講演会
- Place of Presentation
  京都工芸繊維大学(京都府・京都市)
- Year and Date
  2015-06-23
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Fluorescence microscope by using computational ghost imaging2015
- Author(s)
  Yasuhiro Mizutani, Kyuki Shibuya, Yoshihiko Makiura, Hiroki Maruoka, Tetsuo Iwata, and Yasuhiro Takaya
- Organizer
  International Symposium on Optomechatronics Technology (ISOT 2015)
- Place of Presentation
  ニューシャテル，スイス
- Year and Date
  2015-10-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13914
[Presentation] Experimental study on measurement the surface topography by laser trapping probe2015
- Author(s)
  Jonggang Kim, Masaki Michihata, Yasuhiro Takaya
- Organizer
  Asian Society for Precision Engineering and Nanotechnology
- Place of Presentation
  Harbin (China)
- Year and Date
  2015-08-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] フォトニックナノジェットを利用した微細加工に関する研究(第1報) ～ビームの位置制御技術の検討2015
- Author(s)
  上野原努，高谷裕浩，水谷康弘
- Organizer
  2015年度精密工学会学術講演会秋季大会
- Place of Presentation
  東北大学(宮城県・仙台市)
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 表面テクスチャ観察に用いる光放射圧制御微小球レンズの運動解析2015
- Author(s)
  山口悠希，道畑正岐，高谷裕浩
- Organizer
  精密工学会2015年度関西地方定期学術講演会
- Place of Presentation
  京都工芸繊維大学(京都府・京都市)
- Year and Date
  2015-06-23
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Optically trapped microprobe for nano-profile measurement based on interpolation method of standing wave scale using chromatic system2015
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Shinichi Ueda
- Organizer
  XXII MEKO World Congress
- Place of Presentation
  Prague (Czech Republic)
- Year and Date
  2015-08-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Analysis of chemical reaction in Cu-CMP with reactive nanoparticles based on Raman spectra enhanced by surface plasmon2015
- Author(s)
  Masafumi ASAHI, Yasuhiro TAKAYA, Masaki MICHIHATA
- Organizer
  Leading Edge Manufacturing in 21st Century
- Place of Presentation
  京都リサーチパーク (京都府・京都市)
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630027
[Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定 (第5報)　―定在場スケール内挿によるスキャニング測定―2015
- Author(s)
  上田真一，高谷裕浩，道畑正岐
- Organizer
  2015年度精密工学会学術講演会春季大会
- Place of Presentation
  東洋大学 (東京都)
- Year and Date
  2015-03-17
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 表面増強ラマン分光法による水酸化フラーレンを用いたCu-CMPの化学反応プロセス解析―表面増強ラマン分光装置の検証―2015
- Author(s)
  旭真史，高谷裕浩，水谷康弘
- Organizer
  2015年度砥粒加工学会学術講演会
- Place of Presentation
  慶応大学（神奈川県・横浜市）
- Year and Date
  2015-09-09
- Data Source
  KAKENHI-PROJECT-26630027
[Presentation] 表面テクスチャ観察に用いる微小球レンズの光放射圧運動制御に関する研究2015
- Author(s)
  山口悠希，高谷裕浩，道畑正岐
- Organizer
  2014年度日本機械学会関西学生会卒業研究発表講演会
- Place of Presentation
  京都大学 (京都市)
- Year and Date
  2015-03-14
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究（第3 報）－DNA を用いたナノ粒子計測プローブの開発－2014
- Author(s)
  林　照剛，石崎佑樹，道畑正岐，高谷裕浩，田中慎一
- Organizer
  2014年度精密工学会春期全国大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] フェムトパルストレインによるコヒーレントフォノン励起加工に関する研究(第二報) -コヒーレントフォノン励起状態の時間分解計測-2014
- Author(s)
  林照剛, 大菊崇弘, 道畑正岐, 高谷裕浩
- Organizer
  精密工学会春期全国大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-25289017
[Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究（第二報）－粒径と蛍光DNAプローブの回転拡散係数の関係性についての検討－2014
- Author(s)
  石崎佑樹，林照剛，道畑正岐，高谷裕浩
- Organizer
  2014年度精密工学会春期全国大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] WGM共振を利用した微小球の直径計測 (第2報) -WGM波長スペクトルを用いた球径の推定方法-2014
- Author(s)
  道畑正岐，足立篤，林照剛，高谷裕浩
- Organizer
  2014年度精密工学会学術講演会春季大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] フェムトパルストレインによるコヒーレントフォノン励起加工に関する研究(第三報) -テラヘルツ帯域でのエネルギー伝達機構の検討-2014
- Author(s)
  林照剛, 大島玄喜, 道畑正岐, 高谷裕浩
- Organizer
  精密工学会春期全国大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-25289017
[Presentation] Measurement of axial position of a microsphere using chromatic confocal system for probe system based on the laser trapping with the standing wave scale2014
- Author(s)
  Shin-ichi Ueda, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
- Organizer
  International Symposium on Optomechatronic Technologies 2014
- Place of Presentation
  University of Washington (Seattle, USA)
- Year and Date
  2014-11-06
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] フォトニックナノジェットを利用した表面微細加工に関する研究2014
- Author(s)
  上野原努，道畑正岐，高谷裕浩，林照剛
- Organizer
  2014年度砥粒加工学会学術講演会 (ABTEC2014)
- Place of Presentation
  岩手大学(岩手市)
- Year and Date
  2014-09-11
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定(第 4 報) ～マイクロ球光軸方向位置の共焦点計測～2014
- Author(s)
  上野原努，道畑正岐，高谷裕浩，林照剛
- Organizer
  2014年度精密工学会学術講演会秋季大会
- Place of Presentation
  鳥取大学 (鳥取市)
- Year and Date
  2014-09-16
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 局在型表面プラズモン励起ラマン分光による水酸化フラーレンのCu-CMP加工特性解析2014
- Author(s)
  旭真史,高谷裕浩,林照剛,道畑正岐
- Organizer
  日本機械学会関西支部学生員卒業研究発表講演会
- Place of Presentation
  大阪府立大学(堺市)
- Year and Date
  2014-03-17
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] 表面プラズモン励起ラマン計測による水酸化フラーレン分子加工原理に関する研究2014
- Author(s)
  村井亮太,高谷裕浩,林照剛,道畑正岐
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京大学(東京都)
- Year and Date
  2014-03-20
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究(第二報)-粒径と蛍光DNAプローブの回転拡散係数の関係性についての検討-2014
- Author(s)
  石崎佑樹,林照剛,道畑正岐,高谷裕浩
- Organizer
  2014年度精密工学会学術講演会春季大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] WGM共振を利用した微小球の直径計測(第2報) -WGM波長スペクトルを用いた球径の推定方法-2014
- Author(s)
  道畑正岐,足立篤,林照剛,高谷裕浩
- Organizer
  2014年度精密工学会学術講演会春季大会講演論文集
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究(第3報)-DNAを用いたナノ粒子計測プローブの開発-2014
- Author(s)
  林照剛,石崎佑樹,道畑正岐,高谷裕浩,田中慎一
- Organizer
  2014年度精密工学会学術講演会春季大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] Development of nanoparticles sizing method based on fluorescence polarization2013
- Author(s)
  Yuki Ishizaki,Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
- Organizer
  ISMQC2013
- Place of Presentation
  University, Cracow, Poland (Best paper award)
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] Study on surface processing by using femto-second pulse train beam with excitation of coherent phonon2013
- Author(s)
  Terutake Hayashi, Yusuke Fukuta, Masaki Michihata, and Yasuhiro Takaya
- Organizer
  28th Annual Meeting of the American Society for Precision Engineering, (ASPE2013)
- Place of Presentation
  St. Paul, Minnesota, USA,
- Data Source
  KAKENHI-PROJECT-25289017
[Presentation] Optimization of coupling condition in distance between the sphere and the tapered fiber for diameter measurement of microsphere by using WGM resonance2013
- Author(s)
  Atsushi Adachi, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya
- Organizer
  International Symposium on Optomechatronic Technologies (ISOT2013)
- Place of Presentation
  Jeju island, South Korea
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定（第２報）―定在場中でのプローブ球の挙動解析―2013
- Author(s)
  鷲谷泰佑，道畑正岐，林照剛，高谷裕浩
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学（東京）
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] CMMによる高精度測定のための微小球共振を用いたプローブ球の直径測定2013
- Author(s)
  峨家諒介、道畑正岐、林照剛、高谷裕浩
- Organizer
  2013年度精密工学会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] WGモード解析に基づくマイクロプローブの直径計測原理に関する研究2013
- Author(s)
  足立篤,道畑正岐,林照剛,高谷裕浩
- Organizer
  2012年度日本機械学会関西学生会卒業研究発表講演会
- Place of Presentation
  大阪工業大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] Fundamental Study on Chemical Mechanical Polishing of Copper Wafer Surface using Water-soluble Fullerenol as a Functional Molecule2013
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi
- Organizer
  The collaborative conference on Materials Research (CCMR) 2013
- Place of Presentation
  Jeju Island（South Korea）
- Invited
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] WGM共振を利用した微小球の直径計測(第1報) -結合条件が共振ピークに与える影響-2013
- Author(s)
  足立篤,道畑正岐,林照剛,高谷裕浩
- Organizer
  2013年度精密工学会学術講演会秋季大会講演論文集
- Place of Presentation
  関西大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] 表面微細構造を用いた光放射圧プローブスタイラスの捕捉（第２報）―基板材料と表面離脱性の関係―2013
- Author(s)
  吉兼匡昭，道畑正岐，林照剛，高谷裕浩
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学（東京）
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Fundamental verification of diameter measurement of a micro-CMM probe by using whispering gallery mode resonance2013
- Author(s)
  M. Michihata, R. Gake, T. Hayashi, Y. Takaya
- Organizer
  Proc. the 11th international symposium on measurement technology and intelligent instruments
- Place of Presentation
  Aachen/Braunschweig, Germany
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] Fundamental Study on Chemical Mechanical Polishing of Copper Wafer Surface using Water-soluble Fullerenol as a Functional Molecule2013
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi
- Organizer
  The collaborative conference on Materials Research (CCMR) 2013
- Place of Presentation
  Jeju Island(South Korea)
- Invited
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] Micro-probing system for coordinate metrology using a particle controlled by optical radiation pressure based on standing wave scale sensing method2013
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi
- Organizer
  International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN) 2013
- Place of Presentation
  Singapore
- Invited
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定(第3報)～スケールの内挿誤差の検討～2013
- Author(s)
  上田真一，道畑正岐，林照剛，高谷裕浩
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学 (吹田市)
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Fundamental verification of diameter measurement of a micro-CMM probe by using whispering gallery mode resonance2013
- Author(s)
  Masaki Michihata, Ryosuke Gake, Terutake Hayashi, Yasuhiro Takaya
- Organizer
  The 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII)
- Place of Presentation
  Aachen
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] CMMによる高精度測定のための微小球共振を用いたプローブ球の直径測定2013
- Author(s)
  峨家諒介,道畑正岐,林照剛,高谷裕浩
- Organizer
  2013年度精密工学会学術講演会春季大会講演論文集
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] Fundamental verification of diameter measurement of a micro-CMM probe by using whispering gallery mode resonance2013
- Author(s)
  Masaki Michihata, Ryosuke Gake, Terutake Hayashi, Yasuhiro Takaya
- Organizer
  The 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII)
- Place of Presentation
  Aachen/Braunschweig, Germany
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] Development of nanoparticles sizing method based on fluorescence polarization2013
- Author(s)
  Yuki Ishizaki, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
- Organizer
  ISMQC2013
- Place of Presentation
  University, Cracow, Poland
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] Optimization of coupling condition in distance between the sphere and the tapered fiber for diameter measurement of microsphere by using WGM resonance2013
- Author(s)
  A. Adachi, M. Michihata, T. Hayashi, Y. Takaya
- Organizer
  International symposium on optomechatronic technologies
- Place of Presentation
  Jeju island, South Korea, M1C-3
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] 表面微細構造を用いた光放射圧プローブスタイラスの捕捉（第2報）~基板材質と表面離脱性の関係~2013
- Author(s)
  吉兼匡昭、道畑正岐、林照剛、高谷裕浩
- Organizer
  2013年度精密工学会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] WGM共振を利用した微小球の直径計測 (第1報) -結合条件が共振ピークに与える影響-2013
- Author(s)
  足立篤，道畑正岐，林照剛，高谷裕浩
- Organizer
  2013年度精密工学会学術講演会秋季大会
- Place of Presentation
  関西大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] Mode selective probing method of micro trench structure using optically trapped probe2012
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi and Taisuke Washitani
- Organizer
  ISOT’12 (International Symposium on Optomechatronic Technologies)
- Place of Presentation
  Paris (France)
- Invited
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Development of Nano Particle Sizing System Using Fluorescence Polarization2012
- Author(s)
  Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, and Kok Foong Lee
- Organizer
  XX IMEKO World Congress Metrology for Green Growth
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] Development of a Novel Surface Processing System Using Femtosecond Pulse Train2012
- Author(s)
  Yusuke Fukuta, Terutake Hayashi, Masaki Michihata and Yasuhiro Takaya,
- Organizer
  International Conference on Precision Engineering
- Place of Presentation
  To be published
- Data Source
  KAKENHI-PROJECT-21656041
[Presentation] Scanning measurement of step height and freeform surface by using optically trapped microsphere2012
- Author(s)
  Masaki Michihata, Yasuhiro Takaya, Taisuke Washitani, Terutake Hayashi
- Organizer
  The 12th euspen International Conference
- Place of Presentation
  Stockholm (Sweden)
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 水酸化フラーレンを用いたCu-CMPにおける化学反応過程の解明(第一報)-In-situラマン分光分析装置の開発ー2012
- Author(s)
  鹿野和昌, 高谷裕浩, 林照剛, 道畑正岐, 小久保研
- Organizer
  精密工学会, 2012年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  首都大学東京
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] New technique of single-beam gradient-force laser trapping in air condition2012
- Author(s)
  Masaki MICHIHATA, Tadaaki YOSHIKANE, Terutake HAYASHI and Yasuhiro TAKAYA
- Organizer
  ISOT’12 (International Symposium on Optomechatronic Technologies)
- Place of Presentation
  Paris (France)
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] フェムトパルストレインによる表面原子加工システムの開発2012
- Author(s)
  福田悠介, 林照剛, 道畑正岐, 高谷裕浩
- Organizer
  2012年度精密工学会春季大会学術講演会(2012)
- Place of Presentation
  金沢大学
- Year and Date
  2012-09-22
- Data Source
  KAKENHI-PROJECT-21656041
[Presentation] In Situ Raman Analysis of Chemical Reaction for Copper CMP Using Water-soluble Fullerenol2011
- Author(s)
  Kazumasa Kano, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata and Ken Kokubo
- Organizer
  Asian Symposium for Precision Engineering and Nanotechnology 2011
- Place of Presentation
  China, Hong Kong
- Year and Date
  2011-11-17
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] 水酸化フラーレンを用いたCu-CMP加工に関する研究(第3報)-パターンウエハの研磨特製の評価-2011
- Author(s)
  岸田裕貴, 高谷裕浩, 林照剛, 道畑正岐, 小久保研
- Organizer
  精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東洋大学
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] フェムトパルストレインによる表面原子加工技術の開発2011
- Author(s)
  福田悠介, 林照剛, 道畑正岐, 高谷裕浩
- Organizer
  2011年度精密工学会秋期大会学術講演会講演論文集
- Place of Presentation
  金沢大学
- Year and Date
  2011-09-22
- Data Source
  KAKENHI-PROJECT-21656041
[Presentation] 水酸化フラーレンを用いたCu-CMP加工における表面反応層の形成2010
- Author(s)
  岸田裕貴, 高谷裕浩, 林照剛, 道畑正岐, 小久保研
- Organizer
  2010年度精密工学会秋季大会学術講演会講演論文集(JSPE)
- Place of Presentation
  名古屋大学
- Year and Date
  2010-09-27
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] Verification of Generation and Removal Process of Surface Brittle Film, In Polishing Water Soluble Fullerenol, Proc2010
- Author(s)
  Kazumasa Kano, Terutake Hayashi, Yasuhiro Takaya, Ken Kokubo
- Organizer
  10th International Symposium on Measurement and Quality Control(ISMQC)
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-08
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] Weakly Copper-Fullerenol Layer on Chemical Mechanical Polishing Using Water Soluble Fullerenol, Proc2010
- Author(s)
  Hirotaka Kishida, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata, Ken Kokubo
- Organizer
  2010 American Society for Precision Engineering(ASPE)
- Place of Presentation
  Atlanta, USA
- Year and Date
  2010-11-02
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] 水酸化フラーレンにおける脆性膜の生成および除去過程の検討2010
- Author(s)
  鹿野和昌, 高谷裕浩, 林照剛
- Organizer
  精密工学会2010年度関西地方定期学術講演会
- Place of Presentation
  京都大学
- Year and Date
  2010-05-28
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] Performance of water-soluble fullerenol as novel functional molecular abrasive grain for polishing nanosurfaces2009
- Author(s)
  Yasuhiro Takaya, Hideaki Tachika, Terutake Hayashi, Ken Kokubo, Keisuke Suzuki
- Organizer
  The 59th CIRP general assembly
- Place of Presentation
  Boston, USA
- Year and Date
  2009-08-26
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] Effect of Fullerene Poly-hydroxide on Cu-CMP Process2009
- Author(s)
  Hirotaka Kishida, Terutake hayashi, Yasuhiro Takaya
- Organizer
  The 5th International Conference on Leading Edge Manufacturing in 21st
- Place of Presentation
  Century, Japan
- Year and Date
  2009-12-03
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] フェムト秒レーザ干渉を用いた超時間分解能ナノ変位計測に関する研究2008
- Author(s)
  中塚雄貴, 高谷裕浩, 林照剛
- Organizer
  2007年度日本機械学会関西支部学生員卒業研究発表講演会
- Place of Presentation
  大阪大学
- Year and Date
  2008-03-17
- Data Source
  KAKENHI-PROJECT-18656047
[Presentation] Development of a Novel Surface Processing System Using Femtosecond Pulse Train
- Author(s)
  Yusuke Fukuta, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
- Organizer
  14th International Conference on Precision Engineering (ICPE 2012)
- Place of Presentation
  Awaji, Hyogo(2012年11月発表予定)
- Data Source
  KAKENHI-PROJECT-21656041
[Presentation] フェムトパルストレインによるコヒーレントフォノン励起加工に関する研究(第 2 報) -コヒーレントフォノンの時間分解計測システムの開発-
- Author(s)
  大菊崇弘, 林照剛, 道畑正岐, 高谷裕浩
- Organizer
  精密工学会春期全国大会
- Place of Presentation
  東洋大学
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-25289017
[Presentation] 局在型表面プラズモン励起ラマン分光による水酸化フラーレンのCu-CMP加工特性解析
- Author(s)
  旭真史，高谷裕浩，林照剛，道畑正岐
- Organizer
  日本機械学会関西支部学生員卒業研究発表講演会
- Place of Presentation
  大阪府立大学 (堺市)
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] フォトニック・ナノジェットを利用した微細加工に関する基礎研究
- Author(s)
  上野原努，高谷裕浩，林照剛，道畑正岐
- Organizer
  日本機械学会関西支部学生員卒業研究発表講演会
- Place of Presentation
  大阪府立大学 (堺市)
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] フォトニック・ナノジェットの生成に関する研究 ―ベッセルビーム照明条件の検討―
- Author(s)
  大島玄喜，高谷裕浩，林照剛，道畑正岐
- Organizer
  2013年度精密工学会関西地方定期学術講演会
- Place of Presentation
  大阪工業大学(大阪市)
- Data Source
  KAKENHI-PROJECT-24246028

1. MIYOSHI Takashi (00002048)

# of Collaborated Projects: 17 results

# of Collaborated Products: 59 results
2. HAYASHI Terutake (00334011)

# of Collaborated Projects: 12 results

# of Collaborated Products: 93 results
3. Mzutani Yasuhiro (40374152)

# of Collaborated Projects: 12 results

# of Collaborated Products: 66 results
4. TAKAHASHI Satoru (30283724)

# of Collaborated Projects: 9 results

# of Collaborated Products: 0 results
5. MICHIHATA Masaki (70588855)

# of Collaborated Projects: 8 results

# of Collaborated Products: 73 results
6. 上野原努 (10868920)

# of Collaborated Projects: 3 results

# of Collaborated Products: 2 results
7. SHIMADA Shoichi (20029317)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. KOUDA Seido

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
9. 河兌坪

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. KOKUBO Ken (20304008)

# of Collaborated Projects: 1 results

# of Collaborated Products: 12 results
11. SHIBATA Takayuki (10235575)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. NARAHARA Hiroyuki (80208082)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 高増潔 (70154896)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 高偉 (70270816)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
15. 高辻利之 (20357362)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. 笹島和幸 (80170702)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. 古谷涼秋 (50219119)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. 岩田哲郎 (50304548)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
19. SAWADA Yuzo

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. OOSUGI Yukihisa

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. MURAKAMI Kohei

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. MATSUMIYA Sadayuki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. KIMURA Keiichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. Takahashi Ippei

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
25. Tanida Koudai

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. 鈴木恵友

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

TAKAYA Yasuhiro 高谷 裕浩

Research Projects

Research Products

Co-Researchers

Study on Nano-in-process Measurement of Glass Surface Layer using Electron Enhanced Raman Scattering Spectroscopy (EERS) in Laser FilamentationPrincipal Investigator

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The Fundamentals of Engineered Surface Metrology based on Quantum Effect of Photon ScatteringPrincipal Investigator

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Real time and localized analysis of pulse laser fine-machining mechanism based on Raman scattering with optical frequency combPrincipal Investigator

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Study on Nano-Surface Integrity Measurement of Machined Glass Component using Entangled Photon ProbePrincipal Investigator

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Fundamental study on Metrology dressed photon probe for analyzing atomic clusters in machining phenomenaPrincipal Investigator

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Study on Inverse Scattering Method using Optical Frequency Comb for Measuring Surface Topography with Wide Range of Spatial FrequencyPrincipal Investigator

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Raman spectrum analysis for measuring temperature and material property on the nano-machined surface by short pulse laserPrincipal Investigator

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Laser micro-machining using photonic nanojets controlled by in-situ measurementPrincipal Investigator

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TAKAYA Yasuhiro 高谷裕浩