Takahashi Satoru 高橋哲

… Alternative Names

Researcher Number	30283724
Other IDs	https://orcid.org/0000-0002-6555-9409
External Links
Affiliation (Current)	2022: 東京大学, 先端科学技術研究センター, 教授
Affiliation (based on the past Project Information) *help	2012 – 2022: 東京大学, 先端科学技術研究センター, 教授 2014: 東京大学, 大学院工学系研究科, 教授 2013: 東京大学, 工学系研究科, 教授 2011 – 2013: 東京大学, 工学(系)研究科(研究院), 准教授 2012: 東京大学, 大学院・工学系研究科, 准教授 … More
Review Section/Research Field	Principal Investigator Production engineering/Processing studies / 機械工作・生産工学 / Basic Section 18020:Manufacturing and production engineering-related / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields Except Principal Investigator 機械工作・生産工学 / Production engineering/Processing studies / Intelligent mechanics/Mechanical systems / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Basic Section 18020:Manufacturing and production engineering-related
Keywords	Principal Investigator ナノ欠陥 / 欠陥検査 / エバネッセント光 / 加工計測 / マイクロマシン / 光造形 / 光硬化性樹脂 / レーザ応用計測 / 光散乱パターン / インプロセス計測 … More Except Principal Investigator 光放射圧 / ナノメートル計測 / レーザトラッピング / 三次元計測 / 不確かさ推定 / マイクロ加工 / 微粒子 / optical radiation pressure / laser trapping / ナノCMM / マイクロパーツ / Nano-CMM / Microparts / Radiation pressure force / Particle / Silicon wafer / FDTD simulation / ナノインプロセス計測 / レーザ応用計測 / シリコンウエハ / 半導体 / Micropart / CMP / Whispering gallery mode / 屈折率 / 形状測定 / 超精密加工 / 微細加工 / ダイヤモンド / micro-machining / mechanochemical polishing / diamond grain / optical processing / 大気中レーザトラッピング / 位置検出プローブ / Linnik干渉計 / 3次元位置座標 / マイクロパ-ツ / Mirau干渉計 / Laser trapping in air / Position detecting probe / Linnik interferometer / 3D position / シリコンモールド / ダイヤモンド薄膜 / 加工ツール / 回転微粒子 / 光放射圧トルク / 円偏光 / ナノ加工痕 / TDFD法 / 光硬化性樹脂 / Silicon mold / Diamond thin film / Machining tool / Micromachining / Optical torque / シリコンウェハ / 加工表面層欠陥 / 赤外レーザ / エバネセント場 / 有限差分時間領域法 / プローブ / COP欠陥 / 赤外エバネセント場 / AFM探針 / エバネセント光検出ユニット / Sub-surface / Nano-defect / COP / IR Laser / Evanescent Light / Probe tip / 逆散乱 / 位相回復 / フーリエ変換 / 微細形状計測 / マイクロ加工計測 / レーザー応用計測 / Optical Inverse Scattering / Phase retrieval / 3D Micro-Profile / Nano in-process measurement / Fourier transform / Fraunhofer diffraction / Optical measurement / 表面欠陥 / CMP加工 / 薄膜表面 / 光散乱 / Surface defect / Nano-inprocess measurement / Laser applied measurement / CMP process / SiO2 thin film / Laser light scattering / Semiconductor / 光造形 / 液晶マスク / 微小部品 / 面露光法 / オーバーハング形状 / 色素添加光硬化性樹脂 / 樹脂硬化プロセス解析 / FDTDシミュレーション / 動画像マスク / 動的露光法 / 濃淡画像マスク / Stereolithography / LCD mask / Image exposure / Overthang form / Color doped resin / Solidification process analysis / ナノテクノロジー / 研磨加工 / 平坦化 / レーザトラップ / nanotechnology / polishing process / planarization / silicon wafer / semiconductor / マイクロ部品 / マイクロプローブ / 光ファイバー / シリカ微粒子 / 振動型プローブ / 大気中トラップ / Micro-probe / Laser trapping / Optical fiber / Silica particle / Vibro-probe / Radiation pressure / 測定の不確かさ / 三次元測定機 / 座標測定 / 精度評価 / 次世代生産システム / 校正 / 不確かさ / uncertainty of measurement / coordinate measuring machine / coordinate metrology / accuracy evaluation / next generation manufacturing system / calibration / 座標計測 / 光計測 / 三次元形状測定 / WGM / 光共振器 / 球体 / 直径 / テーパ光ファイバー / 光共振 / 標準計測 / 微小球共振 / 微小球 / 直径計測 / モード解析 / テーパファイバー / 伝搬定数 / 自律校正 / Goos-Haenchenシフト / 偏光 / 近接場プローブ / 定在波 / テーパ光ファイバ Less

次世代機能デバイス実現のための高品位・超高アスペクト比微細穴加工システムの開発Principal Investigator
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  The University of Tokyo
1nm表面異物欠陥の自律探索を実現する動的位相差検出型・近接場液相プローブ計測法Principal Investigator
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  2021 – 2022
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  The University of Tokyo
質量標準トレーサビリティ体系のための超高精度・広範囲なシリコン球体計測
- Principal Investigator
  
  道畑正岐
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  The University of Tokyo
動的位相同期制御による局在光場を用いた次世代微細機能構造のナノ欠陥超解像計測Principal Investigator
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  The University of Tokyo
空間局在光場並列制御によるナノ除去加工分解能・新概念光励起加工法の挑戦Principal Investigator
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  The University of Tokyo
Measurement of 3-dimensional standard shape in micro-scale using whispering gallery mode resonance
- Principal Investigator
  
  Michihata Masaki
- Project Period (FY)
  2018 – 2020
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  The University of Tokyo
High Sensitive Optical Detection of Nano Particulate Defects with Autonomous Search-and-Split Liquid ProbePrincipal Investigator
- Principal Investigator
  
  TAKAHASHI SATORU
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Development of localized light-controlled cell-in-microfactories for the production of composite microparticle functional structuresPrincipal Investigator
- Principal Investigator
  
  Takahashi Satoru
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Challenging exploratory research on super resolution measurement of nano defects for next-generation functional fine structures by controlling dynamic localized light distributionPrincipal Investigator
- Principal Investigator
  
  TAKAHASHI Satoru
- Project Period (FY)
  2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Practical application of uncertainty estimation method in three dimensional measurement for high precision of next generation three dimensional shape
- Principal Investigator
  
  Takamasu Kiyoshi
- Project Period (FY)
  2014 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Fundamental research on cell-in-micro-factory based on active parallel controlling of localized light energyPrincipal Investigator
- Principal Investigator
  
  TAKAHASHI Satoru
- Project Period (FY)
  2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Development of laser-assisted micro removal processing tool controlled by the spatial light field allowing nanoscale correction for 3-D micro objectsPrincipal Investigator
- Principal Investigator
  
  TAKAHASHI Satoru
- Project Period (FY)
  2011 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Challenging exploratory research on non-destructive internalPrincipal Investigator
- Principal Investigator
  
  TAKAHASHI Satoru
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Estimation Method of Unvertainty on Nanometer Three Dimensional Measurement
- Principal Investigator
  
  TAKAMASU Kiyoshi
- Project Period (FY)
  2010 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Microfabrication of three-dimensional metal structures using localized photon interaction and photocatalyst nanoparticlesPrincipal Investigator
- Principal Investigator
  
  TAKAHASHI Satoru
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
エバネッセント・マルチフォトンプローブによる超精密平坦加工面のナノ欠陥高速計測法Principal Investigator
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
エバネッセント局在フォトンを利用したナノ光造形法に関する基礎的研究Principal Investigator
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
赤外エバネッセント光による次世代半導体ウエハ機能薄膜のナノ欠陥計測法に関する研究Principal Investigator
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Study on uncertainty of measurement of coordinate metrology for next generation manufacturing system
- Principal Investigator
  
  TAKAMASU Kiyoshi
- Project Period (FY)
  2004 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokyo
暗視野輪帯光学系を用いたSiウエハ加工表面欠陥計測に関する研究Principal Investigator
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
DEVELOPMENT OF THE NANO-CMP PROCESS APPARATUS CONTROLLED BY OPTICAL RADISTION PRESSURE
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  OSAKA UNIVERSITY
Study on Laser Trapping Probe for Measuring Fine Machined 3-D Form with High Aspect Ratio
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Study on Nano-inprocess measurement of CMP defects on SiO2 filmed wafer surface
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of Nonlaminate Stereolithography System Using TFTLCD
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
半導体微細回路パターンのナノインプロセス欠陥計測に関する研究Principal Investigator
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Nano-Defects Inspection in Polished Silicon Wafer Sub-Surface Using IR Evanescent Light
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Nano In-Process Measurement of 3D Micro-Profile Using Optical Inverse Scattering
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of Micromachining Tool Driven by Radiation Pressure
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
位相共役波を用いた三次元フォトリソグラフィに関する研究Principal Investigator
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Study on Micro-machining Using a Small Particle Controlled by Optical Pressure.
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of Laser Trapping Probe for The Nano-CMM
- Principal Investigator
  
  MIYOSHI Takashi
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University

[Book] ナノ・マイクロスケール機械工学2014
- Author(s)
  石原直，加藤千幸，光石衛，渡邉聡編，高増潔，高橋哲他
- Total Pages
  266
- Publisher
  東京大学出版
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] In-Process Diameter Measurement Technique for Micro-Optical Fiber with Standing Wave Illumination2021
- Author(s)
  Michihata Masaki、Zheng Zhao、Funaiwa Daiki、Murakami Sojiro、Kadoya Shotaro、Takahashi Satoru
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 4 Pages: 28-36
- DOI
  10.1007/s41871-020-00081-4
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18K18803
[Journal Article] Development of measuring system of whispering gallery mode resonances for evaluating a diameter of microsphere2019
- Author(s)
  MICHIHATA Masaki、KOBAYASHI Yumeki、CHU Bohuai、TAKAMASU Kiyoshi、TAKAHASHI Satoru
- Journal Title
  
  Transactions of the JSME (in Japanese)
  
  Volume: 85 Issue: 880 Pages: 19-00226
- DOI
  10.1299/transjsme.19-00226
- NAID
  130007772938
- ISSN
  2187-9761
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18K18803
[Journal Article] Radial mode number identification on whispering gallery mode resonances for diameter measurement of microsphere2019
- Author(s)
  Kobayashi Yumeki、Michihata Masaki、Zhao Zheng、Chu Bohuai、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 30 Pages: 065201-065201
- DOI
  10.1088/1361-6501/ab1241
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18K18803
[Journal Article] Fabrication of nano/micro dual-periodic structures by multi-beam evanescent wave interference lithography using spatial beats2019
- Author(s)
  Masui Shuzo、Torii Yuki、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Optics Express
  
  Volume: 27 Pages: 31522-31522
- DOI
  10.1364/oe.27.031522
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18J21820, KAKENHI-PROJECT-15H02214
[Journal Article] In-process measurement for cure depth control of nano stereolithography using evanescent light2019
- Author(s)
  S. Takahashi, D. Kong, M. Michihata, K. Takamasu
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 68 Pages: 527-530
- DOI
  10.1016/j.cirp.2019.04.072
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02214
[Journal Article] A new measurement method to simultaneously determine group refractive index and thickness of a sample using low-coherence tandem interferometry2019
- Author(s)
  Winarno Agustinus、Takahashi Satoru、Matsumoto Hirokazu、Takamasu Kiyoshi
- Journal Title
  
  Precision Engineering
  
  Volume: 55 Pages: 254-259
- DOI
  10.1016/j.precisioneng.2018.09.013
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Diameter Measurement of a Microsphere Based on Whispering Gallery Mode Resonance2018
- Author(s)
  MICHIHATA Masaki、CHU Bohuai、ZHAO Zheng、HAYASHI Kohei、TAKAMASU Kiyoshi、TAKAHASHI Satoru
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 84 Issue: 1 Pages: 77-84
- DOI
  10.2493/jjspe.84.77
- NAID
  130006301970
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Linewidth roughness of advanced semiconductor features using focused ion beam and planar-transmission electron microscope as reference metrology2018
- Author(s)
  Takamasu Kiyoshi、Takahashi Satoru、Kawada Hiroki、Ikota Masami
- Journal Title
  
  Journal of Micro/Nanolithography, MEMS, and MOEMS
  
  Volume: 17 Pages: 1-1
- DOI
  10.1117/1.jmm.17.4.041010
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Surface Imaging Technique by an Optically Trapped Microsphere in Air Condition2018
- Author(s)
  Michihata Masaki、Kim Jonggang、Takahashi Satoru、Takamasu Kiyoshi、Mizutani Yasuhiro、Takaya Yasuhiro
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 1 Pages: 32-38
- DOI
  10.1007/s41871-018-0004-0
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H04900, KAKENHI-PROJECT-26249006
[Journal Article] Modified Linnik microscopic interferometry for quantitative depth evaluation of diffraction-limited microgroove2018
- Author(s)
  Ye Shiwei、Takahashi Satoru、Michihata Masaki、Takamasu Kiyoshi
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Pages: 054011-054011
- DOI
  10.1088/1361-6501/aab008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
[Journal Article] Noncontact method of point-to-point absolute distance measurement using tandem low-coherence interferometry2018
- Author(s)
  Winarno Agustinus、Masuda Shusei、Takahashi Satoru、Matsumoto Hirokazu、Takamasu Kiyoshi
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Pages: 025006-025006
- DOI
  10.1088/1361-6501/aaa16e
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] In-Process Measurement of Thickness of Cured Resin in Evanescent-Wave-Based Nano-stereolithography Using Critical Angle Reflection2018
- Author(s)
  Kong Deqing、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 1 Pages: 112-124
- DOI
  10.1007/s41871-018-0013-z
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
[Journal Article] In-process Measurement of Gradient Boundary of Resin in Evanescent-wave-based Nano-stereolithography using Reflection Interference Near Critical Angle2018
- Author(s)
  Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Journal Title
  
  Journal of Photopolymer Science and Technology
  
  Volume: 31（3） Issue: 3 Pages: 441-446
- DOI
  10.2494/photopolymer.31.441
- NAID
  130007481467
- ISSN
  0914-9244, 1349-6336
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02214
[Journal Article] One- shot stereolithography for biomimetic micro hemisphere covered with relief structure2018
- Author(s)
  Suzuki Yuki、Suzuki Kunikazu、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Precision Engineering
  
  Volume: 54 Pages: 353-360
- DOI
  10.1016/j.precisioneng.2018.07.004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
[Journal Article] A Simulation Study of Plasmonic Substrate for In-Process Measurement of Refractive Index in Nano-Stereolithography2017
- Author(s)
  Michihata Masaki、Kong Deqing、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Int. J. Automation Technol.
  
  Volume: 11 Issue: 5 Pages: 772-780
- DOI
  10.20965/ijat.2017.p0772
- NAID
  130007505873
- ISSN
  1881-7629, 1883-8022
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Theoretical analyses of in-process depth measurements of fine microgrooves based on near-field optical response2017
- Author(s)
  Takahashi S.、Jin C.、Ye S.、Michihata M.、Takamasu K.
- Journal Title
  
  CIRP Annals
  
  Volume: 66 Pages: 503-506
- DOI
  10.1016/j.cirp.2017.04.064
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Scanning dimensional measurement using laser-trapped microsphere with optical standing-wave scale2017
- Author(s)
  Michihata Masaki、Ueda Shin-ichi、Takahashi Satoru、Takamasu Kiyoshi、Takaya Yasuhiro
- Journal Title
  
  Optical Engineering
  
  Volume: 56 Pages: 064103-064103
- DOI
  10.1117/1.oe.56.6.064103
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Diagonal in space of coordinate measuring machine verification using an optical-comb pulsed interferometer with a ball-lens target2016
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering
  
  Volume: 78 Pages: 381-387
- DOI
  10.1016/j.measurement.2015.07.053
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630087, KAKENHI-PROJECT-26249006
[Journal Article] Non-contact precision profile measurement to rough-surface objects with optical frequency combs2016
- Author(s)
  Onoe Taro、Takahashi Satoru、Takamasu Kiyoshi、Matsumoto Hirokazu
- Journal Title
  
  Measurement Science Technology
  
  Volume: 27 Pages: 124002-124002
- DOI
  10.1088/0957-0233/27/12/124002
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Calibration for the sensitivity of multi-beam angle sensor using cylindrical plano-convex lens2016
- Author(s)
  Chen Meiyun、Takahashi Satoru、Takamasu Kiyoshi
- Journal Title
  
  Precision Engineering
  
  Volume: 46 Pages: 254-262
- DOI
  10.1016/j.precisioneng.2016.05.004
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Evanescent Light Exposing System under Nitrogen Purge for Nano- Stereolithography2016
- Author(s)
  Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Journal Title
  
  Procedia CIRP
  
  Volume: 42 Pages: 77-80
- DOI
  10.1016/j.procir.2016.02.192
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02214
[Journal Article] Multi-beam angle sensor for flatness measurement of mirror using circumferential scan technology2016
- Author(s)
  Chen Meiyun、Takahashi Satoru、Takamasu Kiyoshi
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 17 Pages: 1093-1099
- DOI
  10.1007/s12541-016-0133-6
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor2015
- Author(s)
  Meiyun Chen, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering
  
  Volume: 42 Pages: 276-282
- DOI
  10.1016/j.precisioneng.2015.05.009
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball target2015
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering
  
  Volume: 41 Pages: 63-67
- DOI
  10.1016/j.precisioneng.2015.01.007
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630087, KAKENHI-PROJECT-26249006
[Journal Article] Super-Resolution Optical Measurement for Ultra-Precision Machined Surface Defects by Using Structured Light Illumination Shift (4th report)2015
- Author(s)
  工藤良太, 高橋哲, 高増潔
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 81 Issue: 7 Pages: 684-691
- DOI
  10.2493/jjspe.81.684
- NAID
  130005084685
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Research on three-dimensional microfabrication using photocatalytic reaction at the vicinity of beam waist2015
- Author(s)
  堀田陽亮，吉越久倫，松田恵介，道畑正岐，高増潔，高橋哲
- Journal Title
  
  Transactions of the JSME (in Japanese)
  
  Volume: 81 Issue: 832 Pages: 15-00309-15-00309
- DOI
  10.1299/transjsme.15-00309
- NAID
  130005118095
- ISSN
  2187-9761
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Concept for laser-assisted nano removal beyond the diffraction limit using photocatalyst nanoparticles2015
- Author(s)
  S. Takahashi, Y. Horita, F. Kaji, Y. Yamaguchi, M. Michihata, K. Takamasu
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 未定 Pages: 201-204
- DOI
  10.1016/j.cirp.2015.04.041
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-23246028, KAKENHI-PROJECT-26249006
[Journal Article] Super-Resolution Optical Measurement for Ultra-Precision Machined Surface Defects by Using Structured Light Illumination Shift (3rd report)2015
- Author(s)
  工藤良太, 高橋哲, 高増潔
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 81 Issue: 6 Pages: 562-569
- DOI
  10.2493/jjspe.81.562
- NAID
  130005074035
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Performance evaluation of a coordinate measuring machine’s axis using a high-frequency repetition mode of a mode-locked fiber laser2014
- Author(s)
  Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 15 (8) Pages: 1507-1512
- DOI
  10.1007/s12541-014-0498-3
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26630087, KAKENHI-PROJECT-26249006
[Journal Article] A novel dark field in-process optical inspection method for micro-openings on mirrored surfaces beyond the diffraction limit using active phase control2014
- Author(s)
  S. Takahashi, H. Yokozeki, D. Fujii, R. Kudo, K. Takamasu
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 63 Pages: 465-468
- DOI
  10.1016/j.cirp.2014.03.035
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26630018, KAKENHI-PROJECT-26249006
[Journal Article] Profile measurement of aspheric surfaces using scanning deflectometry and rotating autocollimator with wide measuring range2014
- Author(s)
  Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 25 (6) Pages: 0640081-7
- DOI
  10.1088/0957-0233/25/6/064008
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26630087, KAKENHI-PROJECT-26249006
[Journal Article] Fabrication and Composition Control of Three-Dimensional Dielectric Metal Microstructure Using Photocatalyst Nanoparticles2014
- Author(s)
  Hisamichi Yoshigoe, Shotaro Kadoya, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 8(4) Pages: 523-529
- NAID
  130007674071
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-23246028
[Journal Article] Lateral resolution improvement of laser-scanning imaging for nano defects detection2014
- Author(s)
  Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Advanced Optical Technologies
  
  Volume: 3(4) Pages: 425-433
- DOI
  10.1515/aot-2014-0030
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26630018
[Journal Article] Random error analysis of profile measurement of large aspheric optical surface using scanning deflectometry with rotation stage Original Research Article2013
- Author(s)
  Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering 37, No.3 (2013)
  
  Volume: 37 Pages: 599-605
- DOI
  10.1016/j.precisioneng.2013.01.005
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Study on nano thickness inspection for residual layer of nanoimprint lithography using near-field optical enhancement of metal tip2013
- Author(s)
  S. Takahashi, Y. Ikeda, K. Takamasu
- Journal Title
  
  CIRP Annals
  
  Volume: 62 Pages: 527-530
- DOI
  10.1016/j.cirp.2013.03.020
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656097
[Journal Article] Spatial positioning measurements up to 150 m using temporal coherence of optical frequency comb2013
- Author(s)
  Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Precision Engineering
  
  Volume: 37 Pages: 635-639
- DOI
  10.1016/j.precisioneng.2013.01.008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Fundamental study on nanoremoval processing method for microplastic structures using photocatalyzed oxidation2012
- Author(s)
  Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 610-614
- DOI
  10.4028/www.scientific.net/kem.523-524.610
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23246028
[Journal Article] Development of a non-contact precision measurement technique using optical frequency combs2012
- Author(s)
  Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 877-882
- DOI
  10.4028/www.scientific.net/kem.523-524.877
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Sub-Nanometer Line Width and Line Profile Measurement Using STEM Images with Metal Coating2012
- Author(s)
  Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 957-960
- DOI
  10.4028/www.scientific.net/kem.523-524.957
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] New Non-contact Measurement of Small Inside-diameter Using Tandem Lowcoherence Interferometer and Optical Fiber Devices2012
- Author(s)
  Kenta Matsui, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 871-876
- DOI
  10.4028/www.scientific.net/kem.523-524.871
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Submicroneter thickness layer fabrication for layer-by-layer microstereo1ithography using evanescent light2012
- Author(s)
  S. Takahashi, Y. Kajihara, K. Takamasu
- Journal Title
  
  Annals of the CIRP
  
  Volume: 61 Pages: 219-222
- DOI
  10.1016/j.cirp.2012.03.069
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23246028, KAKENHI-PROJECT-24686006
[Journal Article] Space position measurement using long-path heterodyne interferometer with optical frequency comb2012
- Author(s)
  Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Optics Express
  
  Volume: 20 Pages: 2725-2732
- DOI
  10.1364/oe.20.002725
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Influence of standing wave phase error on super-resolution optical inspection for periodic microstructures2012
- Author(s)
  R. Kudo, S. Usuki, S. Takahashi, K. Takamasu
- Journal Title
  
  Meas. Sci. Technol
  
  Volume: 23 Pages: 0540071-13
- DOI
  10.1088/0957-0233/23/5/054007
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656097
[Journal Article] Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices: Uncertainty propagation analysis and experiments2012
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering
  
  Volume: 36 Pages: 91-96
- DOI
  10.1016/j.precisioneng.2011.07.012
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Absolute measurement of gauge block without wringing using tandem low-coherence interferometry2012
- Author(s)
  AgustinusWinarno, Satoru Takahashi, AkikoHirai, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Meas. Sci. Technol
  
  Volume: 23 Pages: 1250011-8
- DOI
  10.1088/0957-0233/23/12/125001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Height measurement of single nanoparticles based on evanescent field modulation2012
- Author(s)
  Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, S. Takahashi, K. Takamasu
- Journal Title
  
  International Journal of Nanomanufacturing
  
  Volume: 8 Pages: 419-430
- DOI
  10.1504/ijnm.2012.051105
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Absolute Measurement ｏｆ　Ｂａｓelines up to　403 m Using Heterodyne Temporal Coherence Interferometer with Optical Frequency Comb2012
- Author(s)
  Narin　Chanthawong ，Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  MEASUREMENT SCIENCE AND TECHNOLOGY
  
  Volume: 23 Pages: 0540031-6
- DOI
  10.1088/0957-0233/23/5/054003
- NAID
  10030593263
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Super resolution optical measurements of nanodefects on Si wafer surface using infrared standing evanescent wave2011
- Author(s)
  S. Takahashi, R. Kudo, S. Usuki, K. Takamasu
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 60 Pages: 523-526
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656097
[Journal Article] Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy2011
- Author(s)
  Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Journal Title
  
  Precision Engineering
  
  Volume: 35 Pages: 686-692
- DOI
  10.1016/j.precisioneng.2011.05.001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Super resolution opticalmeasurements of nanodefects on Siwafer surface using infrared standing evanescent wave2011
- Author(s)
  S. Takahashi, R. Kudo, S. Usuki, K. Takamasu
- Journal Title
  
  CIRP Annals
  
  Volume: 60 Pages: 523-526
- DOI
  10.1016/j.cirp.2011.03.053
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656097
[Journal Article] Time-of-flight method using multiple pulse train interference as a time recorder2011
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Optics Express
  
  Volume: 19(6) Pages: 4881-4889
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage2011
- Author(s)
  Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Journal Title
  
  Precision Engineering
  
  Volume: 35 Pages: 424-430
- DOI
  10.1016/j.precisioneng.2011.01.004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Theoretical Analysis of Length Measurement Using Interference of Multiple Pulse Trains of a Femtosecond Optical Frequency Comb2011
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 50(2)
- NAID
  40018283309
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Simulation-Based Analysis of Influence of Error on Super-Resolution Optical Inspection2011
- Author(s)
  Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Int.J.of Automation Technology
  
  Volume: 5(2) Pages: 167-172
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Laser direct fabrication of three-dimensional microstructures using photocatalyst nanoparticles2010
- Author(s)
  Satoru Takahashi, Keisuke Matsuda, Hisamichi Yoshigoe, Kiyoshi Takamasu
- Journal Title
  
  Proceedings of CIRP-HPC 1
  
  Pages: 381-384
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Development of In-process Visualization System for Laser-Assisted Three-Dimensional Microfabrication using Photocatalyst Nanoparticles2010
- Author(s)
  Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 11,6 Pages: 811-815
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Development of In-process Visualization System for Laser-Assisted Three-Dimensional Microfabrication using Photocatalyst Nanoparticles2010
- Author(s)
  Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing 11, 6
  
  Pages: 811-815
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Development of In-process Visualization System for Laser-assisted Three-dimensional Microfabrication using Photocatalyst Nanoparticles2010
- Author(s)
  Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 11(6) Pages: 811-815
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] A novel resist surface profilometer for next-generation photolithography using mechano-optical arrayed probe system2010
- Author(s)
  S.Takahashi, K.Watanabe, K.Takamasu
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: 59 Pages: 521-524
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM2010
- Author(s)
  Ping Yang, Shusaku Shibata, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Journal Title
  
  Key Engineering Materials
  
  Volume: 447-448 Pages: 590-594
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Optical Devices-Error Analysis and Pre-experiment-2010
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 447-448 Pages: 604-608
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Laser direct fabrication of three-dimensional microstructures using photocatalyst nanoparticles2010
- Author(s)
  Satoru Takahashi, Keisuke Matsuda, Hisamichi Yoshigoe, Kiyoshi Takamasu
- Journal Title
  
  Proceedings of CIRP-HPC
  
  Volume: 1 Pages: 381-384
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Uncertainty Estimation in Intelligent Coordinate and Profile Measurement2010
- Author(s)
  Kiyoshi Takamasu, Satoru Takahashi, Xin Chen
- Journal Title
  
  Key Engineering Materials
  
  Volume: 447-448 Pages: 564-568
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Study on resist layer thickness measurement for nanoimprint lithography based on near-field optics2009
- Author(s)
  S. Takahashi, S. Minamiguchi, T. Nakao, S. Usuki, K. Takamasu
- Journal Title
  
  International Journal Surface Science and Engineering (印刷中(掲載確定))
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Novel laser applications to 3-D micromachining and high-resolution measurement for micor/nano-manufacturing2009
- Author(s)
  S.Takahashi, K.Takamasu
- Journal Title
  
  Jsme News -Surface Engineering and Science- 20, 2
  
  Pages: 8-11
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] In-process visualization of laser-assisted three-dimensional microfabrication using photocatalyst nanoparticles2009
- Author(s)
  Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Proceedings of ASPEN2009
  
  Volume: 206
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] In-process visualization of laser-assisted three-dimensional microfabrication using photocatalyst nanoparticles2009
- Author(s)
  Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Proceedings of ASPEN 2009,2C6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Novel laser applications to 3-D micromachining and high-reso lution measurement for micor/nano-manufacturing2009
- Author(s)
  S.Takahashi, K.Takamasu
- Journal Title
  
  Jsme News -Surface Engineering and Science-
  
  Volume: 20, 2 Pages: 8-11
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System2008
- Author(s)
  S. Liu, K. Watanabe, S. Takahashi, K. Takamasu
- Journal Title
  
  Key Engineering Materials 381-382
  
  Pages: 407-410
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Development of an in-process confocal positioning system for nano-stereolithography using evaenscent light2008
- Author(s)
  Y.Kajihara, T.Takeuchi, S.Takahashi, K.Takamasu
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing 9, 3
  
  Pages: 51-54
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] 変調照明シフトによる超精密加工表面の超解像光学式欠陥計測に関する研究(第2報)-定在は照明シフト実験による解像原理の実験的検証-2008
- Author(s)
  臼杵深, 西岡宏晃, 高橋哲, 高増潔
- Journal Title
  
  精密工学会誌 74,6(掲載確定・印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] 変調照明シフトによる超精密加工表面の超解像光学式欠陥計測に関する研究(第1報)-解像特性の理論的検討-2008
- Author(s)
  臼杵深, 西岡宏晃, 高橋哲, 高増潔
- Journal Title
  
  精密工学会誌 74,5(掲載確定・印刷中)
- NAID
  110006668363
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] Evanescent light photopolymerization and measurement of cure depth in nanostereolithography2008
- Author(s)
  Y. Kajihara, Y. Inazuki, T. Takeuchi, S. Takahashi, K. Takamasu
- Journal Title
  
  Applied Physics Letters 92
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System2008
- Author(s)
  S.Liu, K.Watanabe, S.Takahashi, K.Takamasu
- Journal Title
  
  Key Emgineering Materials 381-382
  
  Pages: 407-410
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Evanescent light photopolymerization and measurement of cure depth in nanostereolithography2008
- Author(s)
  Y.Kajihara, Y.Inazuki, T.Takeuchi, S.Takahashi, K.Takamasu
- Journal Title
  
  Applied Physics Letters 92
  
  Pages: 931201-3
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Development of an in-process confocal positioning system for nano-stereolithography using evaenscent light2008
- Author(s)
  Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing 9,3
  
  Pages: 51-54
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Theoretical and numerical analysis of lateral resolution improvement characteristics for fluorescence microscopy using standing evanescent light with image retrieval2008
- Author(s)
  S. Takahashi, S. Okada, H. Nishioka, S. Usuki and K Takarnagu
- Journal Title
  
  Measurement Science and Technology 19
  
  Pages: 84006-84006
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Theoretical and numerical analysis of lateral resolution improvement characteristics for fluorescence microscopy using standing evanescent light with image retrieval2008
- Author(s)
  S Takahashi, S Okada, H Nishioka, S Usuki and K Takamasu
- Journal Title
  
  Measurement Science and Technology 19(掲載確定・印刷)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] Study on Nano-Stereolithography Using Evanescent Light (2nd report)-Photofabrication of Fine Lattice Structures Using Standing Evanescent Light2007
- Author(s)
  Yusuke Kajihara, Yuichi Inazuki, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Journal of Japan Society for Precision Engineering 73,8
  
  Pages: 934-939
- NAID
  110006368886
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] ナノ・マイクロファブリケーションにおける機能表面の先端光計測技術2007
- Author(s)
  高橋哲, 高増潔
- Journal Title
  
  トライボロジー 234
  
  Pages: 19-21
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第3報)-離散的サンプルを用いた解像特性の実験的検討-2007
- Author(s)
  臼杵深, 西岡宏晃, 高橋哲, 高増潔
- Journal Title
  
  2007年度精密工学会春季大会学術講演会講演論文集芝浦
  
  Pages: 353-354
- NAID
  130005028470
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] エバネッセント光を利用したナノ光造形疾に関する研究(第2報)一定在エバネッセント光を利用2007
- Author(s)
  幌原優介, 稲月友一, 高橋哲, 高増潔
- Journal Title
  
  精密工学会誌 73,8
  
  Pages: 934-939
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] 近接場光を用いたナノインプリント残膜測定法に関する研究(第2報)-残膜計測メカニズムの検討-2007
- Author(s)
  高橋哲, 南口修一, 中尾敏之, 臼杵深, 高増潔
- Journal Title
  
  2007年度精密工学会春季大会学術講演会講演論文集芝浦
  
  Pages: 301-302
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第2報)-定在エバネッセント光を利用2007
- Author(s)
  梶原優介, 稲月友一, 高橋哲, 高増潔
- Journal Title
  
  精密工学会誌 73,8
  
  Pages: 934-939
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] 定在エバネッセント光を用いた超解像顕微法に関する研究(第3報)-解像特性の理論的検討-2007
- Author(s)
  岡田真一, 西岡宏晃, 臼杵深, 高橋哲, 高増潔
- Journal Title
  
  2007年度精密工学会春季大会学術講演会講演論文集芝浦
  
  Pages: 351-352
- NAID
  130005028469
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] A Super-Resolution Microscopy with Standing Evanescent Light and Image Reconstruction Method2006
- Author(s)
  Hiroaki Nishioka, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Proc. of IMEKO XVIII World Congress 12
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] Development of super-resolution optical inspection system for semiconductor defects using standing wave illumination shift2006
- Author(s)
  S.Usuki, H.Nishioka, S.Takahashi, K.Takamasu
- Journal Title
  
  Proc.of SPIE Vol. 6375
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第1報)-欠陥検出特性の検討2006
- Author(s)
  臼杵深, 西岡宏晃, 高橋哲, 高増潔
- Journal Title
  
  2006年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 268-269
- NAID
  130005027136
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] 定在エバネッセント光を用いた超解像顕微法に関する研究(第2報)-エバネッセント光散乱結像装置の開発-2006
- Author(s)
  岡田真一, 西岡宏晃, 臼杵深, 高橋哲, 高増潔
- Journal Title
  
  2006年度精密工学会秋季大会学術講演会講演論文集宇都宮
  
  Pages: 169-170
- NAID
  130004658005
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第2報)-定在波照明シフ卜による変調散乱光検出実験-2006
- Author(s)
  臼杵深, 西岡宏晃, 高橋哲, 高増潔
- Journal Title
  
  2006年度精密工学会秋季大会学術講演会講演論文集宇都宮
  
  Pages: 171-172
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第6報)-ナノ光造形装置による三次元造形-2006
- Author(s)
  梶原優介, 武内徹, 高橋哲, 高増潔
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集東京電機
  
  Pages: 773-774
- NAID
  130005027597
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] 近接場光を用いたナノインプリント残膜測定法に関する研究(第1報)-膜厚変化に対する近接場光応答特性の解析-2006
- Author(s)
  南口修一, 臼杵深, 中尾敏之, 高橋哲, 高増潔
- Journal Title
  
  2006年度精密工学会秋季大会学術講演会講演論文集宇都宮
  
  Pages: 187-188
- NAID
  130004658015
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] Computer Simulation of Nano-Void Inspection in Low-k Dielectric Materials2005
- Author(s)
  S.Usuki, T.Nakao, S.Takahashi, K.Takamasu
- Journal Title
  
  Proceedings of the 5th International Conference and 7th General Meeting of the european society for precision engineering and nanotechnology Montpellier
  
  Pages: 85-88
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第4報)-三次元造形における分解能制御の検討-2005
- Author(s)
  稲月友一, 梶原優介, 高橋哲, 高増潔
- Journal Title
  
  2005年度精密工学会春季大会学術講演会講演論文集慶応
  
  Pages: 39-40
- NAID
  130004657419
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第5報)-ナノ光造形装置の試作と基本機能の検証-2005
- Author(s)
  梶原優介, 武内徹, 高橋哲, 高増潔
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集京都
  
  Pages: 1001-1002
- NAID
  130004656647
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] ナノ・マイクロファブリケーションにおける光学的計測技術のアプローチ2005
- Author(s)
  高橋哲, 三好隆志
- Journal Title
  
  日本機械学会誌 108(1040)
  
  Pages: 537-539
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] 暗視野エバネッセント照明による回路パターン付きSiウエハ表面異物欠陥検出法に関する研究(第4報)-擬似回路パターン表面上付着欠陥試料を用いたエバネッセント照明条件の検討-2005
- Author(s)
  吉岡淑江, 三好隆志, 高谷裕浩, 高橋哲
- Journal Title
  
  2005年度精密工学会春季大会学術講演会講演論文集慶応
  
  Pages: 1043-1044
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] Development of an Evanescent Light Measurement System for Si Wafer Microdefect Detection2005
- Author(s)
  S.Takahashi
- Journal Title
  
  Key Engineering Materials 295-296
  
  Pages: 15-20
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第4報) -三次元造形における分解能制御の検討-2005
- Author(s)
  稲月友一, 梶原優介, 高橋哲, 高増潔
- Journal Title
  
  2005年度精密工学会春季大会学術講演会講演論文集慶応
  
  Pages: 39-40
- NAID
  130004657419
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] 近接場光学を用いた半導体デバイスLow-k材のnano-void計測2005
- Author(s)
  中尾敏之, 臼杵深, 高橋哲, 高増潔
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集京都
  
  Pages: 489-490
- NAID
  130004656999
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] エバネッセント光を利用した微細加工および高分解能計測2005
- Author(s)
  高橋哲
- Journal Title
  
  2005年度精密工学会秋季大会シンポジウム資料京都
  
  Pages: 33-38
- NAID
  10016122999
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] エバネッセント光を用いた微小構造造形2005
- Author(s)
  高橋哲, 梶原優介, 高増潔
- Journal Title
  
  第63回レーザ加工学会講演論文集大阪
  
  Pages: 162-168
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] エバネッセント光を利用した微細加工および高分解能計測2005
- Author(s)
  高橋哲
- Journal Title
  
  2005年度精密工学会秋季大会シンポジウム資料京都
  
  Pages: 33-38
- NAID
  10016122999
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] ナノ光造形法への新しいレーザー応用技術2005
- Author(s)
  高橋哲, 梶原優介, 高増潔
- Journal Title
  
  成形加工 17(3)
  
  Pages: 161-166
- NAID
  10016675506
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] Development of an Evanescent Light Measurement System for Si Wafer Microdefect Detection2005
- Author(s)
  S.TAKAHASHI, R.NAKAJIMA, T.MIYOSHI, Y.TAKAYA, K.TAKAMASU
- Journal Title
  
  Measurement Technology and Intelligent Instruments VI, Key Engineering Materials 295-296
  
  Pages: 15-20
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] 定在エバネッセント光による超解像顕微法の提案2005
- Author(s)
  西岡宏晃, 高橋哲, 高増潔
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集京都
  
  Pages: 487-488
- NAID
  130004656998
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] Photofabrication of Periodic submicron structures using standing evanescent light for Nano-Stereolithography2005
- Author(s)
  S.Takahashi, Y.Inazuki, Y.Kajihara, K.Takamasu
- Journal Title
  
  Proceedings of the 20th American Society for Precision Engineering Annual Meeting Norfolk
  
  Pages: 371-374
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第2報)-積層プロセスの検討-2004
- Author(s)
  梶原優介, 稲月友一, 高橋哲, 高増潔
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会講演論文集島根
  
  Pages: 941-942
- NAID
  130004655839
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] プラズモン共鳴を用いた半導体基板上異物検出法に関する研究2004
- Author(s)
  中尾敏之, 臼杵深, 高橋哲, 三好隆志, 高谷裕浩, 高増潔
- Journal Title
  
  2004年度砥粒加工学術講演会講演論文集滋賀
  
  Pages: 209-210
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第1報)-定在エバネッセント強度分布の適用-2004
- Author(s)
  稲月友一, 梶原優介, 高橋哲, 高増潔
- Journal Title
  
  2004年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 1285-1286
- NAID
  130004656593
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第3報)-回路パターンが欠陥検出に及ぼす影響の理論的検討-2004
- Author(s)
  吉岡淑江, 三好隆志, 高谷裕浩, 高橋哲
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会講演論文集島根
  
  Pages: 1003-1004
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] Study of Nano-Stereolithography Using Evaenscent Light2004
- Author(s)
  Yusuke Kajihara, Yuichi Inazuki, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Proceedings of the 19th American Society for Precision Engineering Annual Meeting Vol.34
  
  Pages: 149-152
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第3報)-定在エバネッセント強度分布制御法の確立-2004
- Author(s)
  稲月友一, 梶原優介, 高橋哲, 高増潔
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会講演論文集島根
  
  Pages: 943-944
- NAID
  130004655840
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] Nano-defects inspection of semiconductor wafer using evanescent wave2004
- Author(s)
  S.Takahashi, R.Nakajima, T.Miyoshi, Y.Takaya, T.Yoshioka, T.Hariyama, K.Kimura, T.Nakao, K.Takamasu
- Journal Title
  
  Proc.of International Symposium on Photonics in Measurement Frankfurt
  
  Pages: 307-316
- Data Source
  KAKENHI-PROJECT-16686009
[Journal Article] Study on Particle Detection for Patterned Wafers by Evanescent Light Illumination2004
- Author(s)
  T.Yoshioka, T.Miyoshi, Y.Takaya, S.Takahashi
- Journal Title
  
  Proc.of 4^<th> euspen International Conference Glasgow
  
  Pages: 338-339
- Data Source
  KAKENHI-PROJECT-16686009
[Patent] 母型の製造方法2016
- Inventor(s)
  高橋哲，鈴木裕貴，鈴木邦和，道畑正岐，高増潔，田中大直，西村涼
- Industrial Property Rights Holder
  東京大学，JXエネルギー株式会社
- Industrial Property Rights Type
  特許
- Filing Date
  2016-08-17
- Overseas
- Data Source
  KAKENHI-PROJECT-15H02214
[Patent] 照明装置および顕微観察装置2013
- Inventor(s)
  高橋哲,高増潔,工藤良太,臼杵深
- Industrial Property Rights Holder
  東京大学
- Filing Date
  2013-02-25
- Overseas
- Data Source
  KAKENHI-PROJECT-23656097
[Patent] 照明装置および顕微観察装置2013
- Inventor(s)
  高橋哲，高増潔，工藤良太，臼杵深
- Industrial Property Rights Holder
  高橋哲，高増潔，工藤良太，臼杵深
- Industrial Property Rights Type
  特許
- Filing Date
  2013-02-25
- Overseas
- Data Source
  KAKENHI-PROJECT-23656097
[Patent] 顕微観察装置2012
- Inventor(s)
  高橋哲,工藤良太,高増潔
- Industrial Property Rights Holder
  東京大学
- Industrial Property Number
  2012-178326
- Filing Date
  2012-08-10
- Data Source
  KAKENHI-PROJECT-23656097
[Patent] 顕微観察装置2012
- Inventor(s)
  高橋哲，工藤良太，高増潔
- Industrial Property Rights Holder
  高橋哲，工藤良太，高増潔
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2012-178326
- Filing Date
  2012-08-10
- Data Source
  KAKENHI-PROJECT-23656097
[Patent] 形状形成方法2010
- Inventor(s)
  高橋哲, 高増潔
- Industrial Property Rights Holder
  高橋哲, 高増潔
- Filing Date
  2010-10-08
- Data Source
  KAKENHI-PROJECT-20360062
[Patent] 移動システム2005
- Inventor(s)
  高増潔, 高橋哲, 小谷潔, 大和淳司
- Industrial Property Rights Holder
  高増潔, 高橋哲, 小谷潔, 大和淳司
- Industrial Property Number
  2005-134471
- Filing Date
  2005-05-02
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第6報) －光放射圧遠隔操作による一体化連結構造の創成－2020
- Author(s)
  圓道和奏，増井周造，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2021年度春期精密工学会学術講演会
- Data Source
  KAKENHI-PROJECT-19K21913
[Presentation] WGM共振を利用した微小級の直径計測(第14報) -WGM光強度分布センシングのためのガラスプローブ先端形状の検討-2020
- Author(s)
  劉羽辛，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2021年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 定在波照明を用いたマイクロ光ファイバのインプロセス直径計測(第3報) -サブマイクロ光ファイバの計測のための測定原理の拡張-2020
- Author(s)
  村上宗二郎，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2021年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] WGM共振を利用した微小球の直径計測(第13報) -光損失が共振波長に及ぼす影響の検討-2020
- Author(s)
  劉羽辛，門屋祥太郎，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度精密工学会学術講演会秋季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 定在波照明を用いたマイクロ光ファイバのインプロセス直径計測(第2報) -計測精度改善の検討-2019
- Author(s)
  船岩大輝，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] System development for microsphere measurement based on whispering gallery mode resonance2019
- Author(s)
  Masaki Michihata, Yumeki Kobayashi, Bohuai Chu, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMQC2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Coherent optical microscopy for micro-structured surface inspection beyond diffraction limit2019
- Author(s)
  Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 定在波照明を用いた表面微細加工構造の長作動距離超解像欠陥検査2019
- Author(s)
  久米大将，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] In-process measurement technique of micro-fiber diameter with interfered scattering pattern of two beam irradiation2019
- Author(s)
  Masaki Michihata, Zheng Zhao, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMTII2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] A novel optical super-resolution microscopy for coherent imaging system for micro-structured surface inspection2019
- Author(s)
  Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  19th international conference of the european society for precision engineering and nanotechnology (euspen 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] Linewidth and Roughness Measurement of SAOP by Using FIB and Planer-TEM as Reference Metrology2019
- Author(s)
  Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Stefan Decoster, Frederic Lazzarino, Gian Lorusso
- Organizer
  SPIE Advanced Lithography, San Jose, USA
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 2光束照明における光散乱検出に基づくマイクロ光ファイバー直径計測の基礎的研究2019
- Author(s)
  道畑正岐，趙正，高増潔，高橋哲
- Organizer
  日本機械学会 2019年度年次大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Fabrication of dual-periodic nanostructures with multi-exposure interference lithography using Lloyd’s mirror2019
- Author(s)
  S. Masui, M. Michihata, K. Takamasu, S. Takahashi
- Organizer
  8th International Conference of Asian Society for Precision Engineering and Nanotechnology(ASPEN2019）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Numerical analysis of near-field light intensity of whispering gallery mode on microsphere surface with SNOM probe2019
- Author(s)
  Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  OPTM2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 微細構造基板を利用した超解像イメージングに関する研究（第2報）－ディープラーニングによる再構成能力の評価－2019
- Author(s)
  市川廉，久米大将，道畑正岐，高増潔，高橋哲，西川正俊
- Organizer
  2020年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] Sensing near-field light distribution for microsphere measurement based on whispering gallery mode2019
- Author(s)
  Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMTII2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 光共振損失を用いたSPMプローブチップ評価に関する研究2019
- Author(s)
  津田信道，儲博懐，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第5報) －マイクロレジンの空間位置制御によるマイクロ粒子アセンブリ－2019
- Author(s)
  福井健太，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度春期精密工学会学術講演会
- Data Source
  KAKENHI-PROJECT-19K21913
[Presentation] 光共振を利用したマイクロ球形状のナノ精度計測2019
- Author(s)
  道畑正岐，小林夢輝，趙正，儲博懐，高増潔，高橋哲
- Organizer
  レーザー学会第39回年次大会
- Invited
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Improvement of quantitative depth evaluation for diffraction-limited microgroove using LED light source2018
- Author(s)
  Ye Shiwei, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  XXII World Congress of the International Measurement Confederation （IMEKO 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Analyzing tapered fiber - microsphere coupling for diameter measurement of microsphere using whispering gallery mode resonance2018
- Author(s)
  Yumeki Kobayashi, Zheng Zhao, Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  International Conference on Precision Engineering (ICPE) 2018
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Analysing Tapered Fiber-Microsphere Coupling for Diameter Measurement of Microsphere Using Whispering Gallery Mode Resonance2018
- Author(s)
  Yumeki Kobayashi, Zheng Zhao, Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control2018
- Author(s)
  Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第3報）－FDTD法によるマイクロ粒子の整理駆動現象の解明－2018
- Author(s)
  古谷成康，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018 年度精密工学会秋季大会学術講演会，函館，2018
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Self-Calibration Method of Nanometer Profile Measurement on Large Aspheric Optical Surface2018
- Author(s)
  Tomohiko Takamura, Yohan Kondo, Youichi Bitou, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Basic Study on Laser Additive Processing for Nanostructures Based on Optical Trapping Potential2018
- Author(s)
  Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Scattered Field Analysis for Diameter Measurement of Tapered Optical Fiber Under Counter-Propagating-Beam Illumination2018
- Author(s)
  Zheng Zhao, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Investigation of super-resolution microscopy by use of a nano-patterned substrate2018
- Author(s)
  Ryoko Sakuma, Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering （ICPE 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] In-Process Measurement of Resin's Curing Degree in Micro-Stereolithography Using Internal Reflection at Critical Angle2018
- Author(s)
  D. Kong, M. Michihata, K. Takamasu, S. Takahashi
- Organizer
  XXII World Congress of the International Measurement Confederation (IMEKO 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第 4 報）一定在波制御によるマイクロ粒子整列・搬送に関する研究一2018
- Author(s)
  藤原和，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2019年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第 3 報）一FDTD 法によるマイクロ粒子の整理駆動現象の解明一2018
- Author(s)
  古谷成康，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Line Width Roughness of Advanced Semiconductor Features by Using FIB and Planar-TEM as Reference Metrology2018
- Author(s)
  Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota
- Organizer
  SPIE Advanced Lithography, San Jose, USA
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Whispering gallery mode 共振を用いたマイクロ球径計測－比較計測による計測精度評価－2018
- Author(s)
  道畑正岐，小林夢輝，儲博懐，高増潔，高橋哲
- Organizer
  第12回日本機械学会生産加工・工作機械部門講演会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] WGM共振を利用した微小球の直径計測(第11報) -共振波長解析に基づく半径モード番号の推定-2018
- Author(s)
  小林夢輝，趙正，儲博懐，道畑正岐，高増潔，高橋哲
- Organizer
  2018年度精密工学会学術講演会秋季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Improvement of Quantitative Depth Evaluation for Diffraction-Limited Microgroove Using LED Light Source2018
- Author(s)
  Ye Shiwei1, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  XXII World Congress of the International Measurement Confederation (IMEKO 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第2 報）－界面近接光波の任意制御によるマイクロ粒子整理・搬送システムの検討－，2018
- Author(s)
  古谷成康，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018 年度精密工学会春季大会学術講演会，中央大学，2018，P33
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 臨界角照明を用いたナノ光造形硬化樹脂のインプロセス計測（基本原理の検証）2018
- Author(s)
  道畑正岐，孔徳卿，高増潔，高橋哲
- Organizer
  日本機械学会 2018年度年次大会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Development of a Laser Tracker Using Absolute Length Measurement Technique by an Optical Comb Pulsed Interferometer2018
- Author(s)
  Shusei Masuda, Tomohiko Takamura, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] In-Process Measurement of Resin’s Curing Degree in Micro-Stereolithography Using Internal Reflection at Critical Angle2018
- Author(s)
  D. Kong, M. Michihata, K. Takamasu, S. Takahashi
- Organizer
  XXII World Congress of the International Measurement Confederation （IMEKO 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製（第2 報）－サブ波長表面構造の造形と光学特性評価－，2018
- Author(s)
  増井周造，鈴木裕貴，道畑正岐，高増潔，高橋哲，柴沼俊彦，田中大直
- Organizer
  2018 年度精密工学会春季大会学術講演会，中央大学，2018，K08
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Ultra high precision diameter measurement of a microsphere based on whispering gallery mode resonances2018
- Author(s)
  Masaki Michihata, Yumeki Kobayashi, Zheng Zhao, Bouhai Chu, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  The 1st JSPE affiliate workshop -Metrology and measurement
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] WGM共振を利用した微小球の直径計測(第12報) -共振波長計測安定化に向けた測定装置の高度化-2018
- Author(s)
  小林夢輝，儲博懐，道畑正岐，高増潔，高橋哲
- Organizer
  2018年度精密工学会学術講演会秋季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering （ICPE 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] In-Situ Measurement of the Refractive Index and Geometrical Length for Determining the Location of Optical Part Using a Tandem Low-Coherence Interferometry2018
- Author(s)
  Agustinus Winarno, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control2018
- Author(s)
  Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control - Analysis on handling performance of microparticles based on near-surface light wave -2018
- Author(s)
  Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering （ICPE 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Investigation of Super-Resolution Microscopy by Use of a Nano-Patterned Substrate2018
- Author(s)
  Ryoko Sakuma, Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製（第 3 報）一うなりによる干渉強度分布の変調特性検討一2018
- Author(s)
  増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製（第1 報）－RCWA 法を用いた光学特性解析－，2017
- Author(s)
  増井周造，鈴木裕貴，道畑正岐，高増潔，高橋哲
- Organizer
  －，2017 年度精密工学会秋季大会学術講演会，大阪大学，2017，L23
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  Conference on Lasers and Electro-Optics (CLEO2017)
- Place of Presentation
  San Jose, USA
- Year and Date
  2017-05-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  CLEO2017, San Jose, USA
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] High sensitive and super resolution optical inspection of nanodefects on Si wafer surface using infrared standing evanescent wave2017
- Author(s)
  Satoru Takahashi
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Non-Contact Remote Measurement of Internal Distance Between Two Plane Mirrors by Using a Tandem Low-Coherence Interferometer2017
- Author(s)
  Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu, Takao Kitayama, Ryota Kudo, Katsuyoshi Endo
- Organizer
  ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Accuracy Evaluation of Optical Comb Probe for Coordinate Measuring Machines Verification2017
- Author(s)
  Shohei Hara, Winarno Agustinus, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第27報）-エバネッセント光による面内形状制御性の解析-2017
- Author(s)
  松本侑己，鈴木裕貴，道畑正岐，高増潔，高橋哲，工藤宏人
- Organizer
  2017年度精密工学会春季学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Precision Profile Measurement for Small Aspheric Optical Surface by an Multi-beam Angle Sensor2017
- Author(s)
  Jumpei Miyachi, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Double Imaging Micro-Stereolithography for One-Shot Curing of Surface Micro-Structure Unit2017
- Author(s)
  Yuki Matsumoto, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] The Development of an Absolute Internal Distance Measurement Between Two Ball Lenses Within Sub-Micro Accuracy2017
- Author(s)
  Agustinus Winarno, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] In-process measurement on the thickness of photosensitive resin in evanescent wave-based nano-stereolithography2017
- Author(s)
  Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究 (第6報) -数値流体力学を用いた液相プローブの挙動特性に関する解析-2017
- Author(s)
  浅井祥平，橘一輝，道畑正岐，高増潔，高橋哲
- Organizer
  2017年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Evaluation Strategy of Spheroidal Distortion for Micro-Sphere Based on Whispering Gallery Mode Resonance2017
- Author(s)
  K.Hayashi, B. Chu, Z. Zhao, M. Michihata, K. Takamasu, S. Takahashi
- Organizer
  59th Ilmenau Scientific Colloquium, Ilmenau, Germany
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Thoretical Analysis of Multi-Beam Interference Lithography Combining Evanescent and Propagation Light2017
- Author(s)
  Shuzo Masui, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Coordinate measuring machine verification using an optical comb probe with ball-lens targets2017
- Author(s)
  Shohei Hara, Winarno Agustinus, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] New Developments for Next-generation Precision Engineering Opened with Localized Light Energy Control2017
- Author(s)
  Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] New Developments for Next-generation Precision Engineering Opened with Localized Light Energy Control2017
- Author(s)
  Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Nanometer Profile Measurement on Large Aspheric Optical Surface2017
- Author(s)
  Xiang Guo, Satoru Takahashi, Yohan Kondo, Youichi Bitou, Kiyoshi Takamasu
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  CLEO2017, San Jose, USA
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第26報）ー多光束干渉によるミリオーダ領域のサブミクロン表面微細構造創製ー2017
- Author(s)
  鈴木裕貴，松本侑己，道畑正岐，高増潔，高橋哲
- Organizer
  2017年度精密工学会春季学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Non-contact method of an absolute length measurement between two ball-lenses using a tandem low-coherence interferometer2017
- Author(s)
  Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Thoretical Analysis of Multi-Beam Interference Lithography Combining Evanescent and Propagation Light2017
- Author(s)
  Shuzo Masui, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 3D-Profile Measurement of Advanced Semiconductor Features by Using FIB as Reference Metrology2017
- Author(s)
  Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota
- Organizer
  SPIE Advanced Lithography
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] New Developments on Micro/nano Manufacturing Science based on Evanescent Light2017
- Author(s)
  Satoru Takahashi
- Organizer
  IMCC2017（17th International Manufacturing Conference in China）& ICMTE2017（6th International Conference of Manufacturing Technology Engineers
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Experimental verification of a novel in-process depth measurements of diffraction limited micro-groove based on near-field optical response2017
- Author(s)
  Shiwei Ye, Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究 (第5報) -位相利用高感度観察装置による検出-2017
- Author(s)
  橘一輝，浅井祥平，道畑正岐，高増潔，高橋哲
- Organizer
  2017年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Development of nanoparticle detection method based on a new principle combining volatile liquid and optical observation method: Study of highly sensitive optical detection system2017
- Author(s)
  Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Accuracy Improvement in Diameter Measurement of Microsphere Based on Whispering Gallery Mode2017
- Author(s)
  Masaki Michihata, Bohuai Chu, Zhao Zheng, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  59th Ilmenau Scientific Colloquium, Ilmenau, Germany
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] High sensitive and super resolution optical inspection of nanodefects on Si wafer surface using infrared standing evanescent wave2017
- Author(s)
  Satoru Takahashi
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Monitor Resin Curing Degree for In-process Measurement in Micro-stereolithography2017
- Author(s)
  Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 光触媒ナノ加工工具に関する基礎的研究（第9報）－ナノ粒子位置同定法の検討－2016
- Author(s)
  増井周造・堀田陽亮・道畑正岐・高増　潔・高橋　哲
- Organizer
  2016年度精密工学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Non-Destructive Optical Depth Inspection of Sub-Diffraction Limit Fine Holes -Theoretical analysis of optical responses based on FDTD method-2016
- Author(s)
  Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects2016
- Author(s)
  Kazuki Tachibana，Shohei Asai，Masaki Michihata，Kiyoshi Takamasu，Satoru Takahashi
- Organizer
  Conference on Lasers and Electro-Optics (CLEO2016)
- Place of Presentation
  San Jose, USA
- Year and Date
  2016-06-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Precision absolute distance measurement technique onto rough surface object using self-beat signals of optical frequency comb2016
- Author(s)
  Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  euspen2016, 16th International Conference & Exhibition
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Improved back-focal-plane interferometry for monitoring nanoparticle position2016
- Author(s)
  Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  International Symposium on Optomechatronic Technology 2016
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2016-11-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Theoretical analysis of improved back-focal-plane interferometry for monitoring nanoparticle position2016
- Author(s)
  Shuzo Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPE2016, 31st ASPE Annual Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Theoretical Analysis of Improved Back-Focal-Plane Interferometry for Monitoring Nanoparticle Position2016
- Author(s)
  Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  ASPE2016 Annual Meeting
- Place of Presentation
  Portland, USA
- Year and Date
  2016-10-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 全方位姿勢制御型光触媒ナノ加工工具に関する研究（第2報）－液相内における工具創製の実験的検討－2016
- Author(s)
  堀田陽亮・儲　博懐・増井周造・道畑正岐・高増　潔・高橋　哲
- Organizer
  2016年度精密工学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Optical Detection of Fine Particulate Defects with Autonomous Search-and-split Liquid Probe -Characteristics analysis of optical detection-2016
- Author(s)
  Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Development of non-destructive optical depth measurement of sub-diffraction limit fine holes2016
- Author(s)
  Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  nanoMan2016, 5th International Conference on Nanomanufacturing
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Theoretical Analysis of Improved Back-Focal-Plane Interferometry for Monitoring Nanoparticle Position2016
- Author(s)
  Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  31st Annual Meeting of the American Society for Precision Engineering
- Place of Presentation
  Portland, Oregon, USA
- Year and Date
  2016-10-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Improved back-focal-plane interferometry for monitoring nanoparticle position2016
- Author(s)
  Shuzou Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISOT2016, International Symposium on Optomechatronics Technologies
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Optical detection of fine particulate defects by autonomous searching liquid probe: theoretical design of high sensitive phase detection system2016
- Author(s)
  Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  International Symposium on Optomechatronic Technology 2016
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2016-11-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Calibration of refractive index in microsphere diameter measurement based on analysis of polarized whispering gallery mode2016
- Author(s)
  Bohuai Chu, Masaki Michihata, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISOT2016, International Symposium on Optomechatronics Technologies
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Development of 3D form measurement of semiconductor structure - Measurement of FinFET profile using TEM and CD-SEM images2016
- Author(s)
  Yuki Iwaki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  euspen2016, 16th International Conference & Exhibition
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究(第3報) 基板上液相プローブの挙動に関する解析2016
- Author(s)
  浅井祥平，橘一輝，道畑正岐，高増潔，高橋哲
- Organizer
  2016年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究(第2報) FDTDシミュレーションに基づいた光学的検出特性解析2016
- Author(s)
  橘一輝，浅井祥平，道畑正岐，高増潔，高橋哲
- Organizer
  2016年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究（第4報）-液相プローブ高感度観察装置の検討-2016
- Author(s)
  橘一輝，浅井祥平，道畑正岐，高増潔，高橋哲
- Organizer
  2016年度精密工学会秋季大会学術講演会
- Place of Presentation
  茨城
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] In-process measurement for micro-stereolithography using surface plasmon resonance2016
- Author(s)
  Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Non-contact Precision Profile Measurement to Rough Surface Objects with Optical Frequency Combs2016
- Author(s)
  Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] A tunable surface-plasmon-resonance substrate for in-process measurement of micro-stereolithography2016
- Author(s)
  Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISOT2016, International Symposium on Optomechatronics Technologies
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] エバネッセント露光型ナノ光造形法に関する研究―エバネッセント露光用光硬化性樹脂の開発―2016
- Author(s)
  松本侑己，鈴木裕貴，道畑正岐，高増潔，高橋哲
- Organizer
  日本機械学会　第11回生産加工・工作機械部門講演会
- Place of Presentation
  愛知
- Year and Date
  2016-10-22
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第25報）ー機能性評価に向けた表面微細構造創製装置の開発ー2016
- Author(s)
  鈴木裕貴，松本侑己，道畑正岐，高増潔，高橋哲
- Organizer
  2016年度精密工学会春秋学術講演会
- Place of Presentation
  茨城
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Fabrication of Functional Microstructures by Multi-Beam Interference Lithography Using Evanescent Light2016
- Author(s)
  Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Challenge of Evanescent Light Exposing Micro-Stereolithography2016
- Author(s)
  S. Takahashi
- Organizer
  JSAP-OSA Joint Symposia 2016
- Place of Presentation
  Niigata, Japan
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Optical Detection of Fine Particulate Defects with Autonomous Search-and-split Liquid Probe -Characteristics analysis of optical detection-2016
- Author(s)
  Kazuki TACHIBANA, Shohei ASAI, Masaki MICHIHATA, Kiyoshi TAKAMASU, Satoru TAKAHASHI
- Organizer
  16th International Conference on Precision Engineering
- Place of Presentation
  Hamamatsu, Japan
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] 後側焦点面干渉法を用いた光触媒ナノ加工粒子変位計測の高感度化2016
- Author(s)
  増井周造・堀田陽亮・道畑正岐・高増　潔・高橋　哲
- Organizer
  日本機械学会2016年度年次大会
- Place of Presentation
  九州
- Year and Date
  2016-09-11
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Evanescent Light Exposing System under Nitrogen Purge for Nano-Stereolithography2016
- Author(s)
  Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  18th CIRP Conference on Electro Physical and Chemical Machining
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects2016
- Author(s)
  Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  CLEO2016, Conference on Lasers and Electro-Optics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation on Dynamic Interacion with Defects2016
- Author(s)
  Kazuki Tachibana; Shohei Asai; Masaki Michihata; Kiyoshi Takamasu; Satoru Takahashi
- Organizer
  CLEO2016, Laser Science to Photonic Applications
- Place of Presentation
  San Jose, USA
- Year and Date
  2016-06-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Omnidirectional one-shot exposure micro-stereolithography for biomimetic hemisphere with micro structured surface2016
- Author(s)
  Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPE2016, 31st ASPE Annual Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Proposal of in-process measurement for micro-stereolithography using surface plasmon resonance2016
- Author(s)
  Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  LANE2016, 9th International Conference on Photonic Technologies
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Optical detection of fine particulate defects by autonomous searching liquid probe: Theoretical design of high sensitive phase detection system2016
- Author(s)
  Kazuki Tachibana, Shouhei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISOT2016, International Symposium on Optomechatronics Technologies
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 光触媒ナノ工具に関する基礎的研究（第10報）－銀担持による工具チップ性能の向上－2016
- Author(s)
  儲　博懐・堀田陽亮・増井周造・道畑正岐・高増　潔・高橋　哲
- Organizer
  2016年度精密工学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 3D-Profile Measurement of Advanced2016
- Author(s)
  Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Gian F. Lorusso, Naoto Horiguchi
- Organizer
  SPIE Advanced Lithography 2016
- Place of Presentation
  San Jose (USA)
- Year and Date
  2016-02-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 後側焦点面干渉法を用いた光触媒ナノ加工粒子変位計測の高感度化2016
- Author(s)
  増井周造，堀田陽亮，道畑正岐，高増潔，高橋哲
- Organizer
  日本機械学会年次大会2016
- Place of Presentation
  福岡
- Year and Date
  2016-09-12
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Development of Advanced Measurement Method of 3D Semiconductor Structure - 3D-Profile Measurement of FinFET using CD-SEM and TEM Images -2016
- Author(s)
  Yuki Iwaki, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 全方位姿勢制御型光触媒ナノ加工工具に関する研究（第1報）－姿勢制御ユニット創製に関する実験的検討－2015
- Author(s)
  堀田陽亮・儲　博懐・道畑正岐・高増　潔・高橋　哲
- Organizer
  2015年度精密工学会秋季学術講演会
- Place of Presentation
  東北
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Fundamental study on fabrication of multi-functional micro device based on micro-beads using photocatalytic reaction2015
- Author(s)
  Yosuke Horita, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015),
- Place of Presentation
  Harbin (China)
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] High-sensitive optical measurement of fine particulate defects on Si wafer surface with liquid probe2015
- Author(s)
  Kazuki Tachibana, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  京都リサーチパーク（京都府・京都市）
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Line Profile Measurement of Advanced-FinFET Features by Reference Metrology2015
- Author(s)
  Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Atsuko Yamaguchi, Gian F. Lorusso, Naoto Horiguchi
- Organizer
  SPIE Advanced Lithography
- Place of Presentation
  San Jose (USA)
- Year and Date
  2015-02-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Self Calibration Method for Nanometer Profile Measurement on Large Aspheric Optical Surface2015
- Author(s)
  Yumi Iwago, Tomohiko Takamura, Yohan Kondo, Youichi Bitou, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  Taipei (Taiwan)
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] High-sensitive optical measurement of fine particulate defects on Si wafer surface with liquid probe2015
- Author(s)
  Kazuki TACHIBANA，Masaki MICHIATA，Satoru TAKAHASHI，Kiyoshi TAKAMASU
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Absolute precision measurement for space coordinates metrology using an optical-comb pulsed interferometer with a ball lens target2015
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  15th euspen International Conference (euspen2015)
- Place of Presentation
  Leuven (Belgium)
- Year and Date
  2015-06-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Non-contact precision profile measurement to rough surface objects with optical frequency combs2015
- Author(s)
  Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  Taipei (Taiwan)
- Year and Date
  2015-09-22
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 蛍光修飾を要さない回折限界超越観察技術の開発2015
- Author(s)
  高橋哲
- Organizer
  応用物理学会／第135回微小光学研究会
- Place of Presentation
  東京
- Year and Date
  2015-03-05
- Invited
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] 光学的ナノ異物検出を可能とする高感度液相プローブ計測法の研究2015
- Author(s)
  橘一輝，高橋哲，高増潔:
- Organizer
  日本機械学会2015年度年次大会講演論文集
- Place of Presentation
  北海道
- Year and Date
  2015-09-14
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Roundness measurement machine using multi-beam angle sensor - experimental verification of multi-beam angle sensor2015
- Author(s)
  Chen Meiyun, Genki Miyazaki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  15th euspen International Conference (euspen2015)
- Place of Presentation
  Leuven (Belgium)
- Year and Date
  2015-06-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Fundamental study on fabrication of multi-functional micro device based on micro-beads using photocatalytic reaction2015
- Author(s)
  Yosuke Horita, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu and Satoru Takahashi
- Organizer
  The 6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015)
- Place of Presentation
  Harbin, China
- Year and Date
  2015-08-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Super-Resolution Optical Measurement Method Using Standing Wave Illumination with Three-Beam Interference2015
- Author(s)
  Hiromasa Kume, Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  Taipei (Taiwan)
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Improvement of lateral shape controlling with nitrogen purge for nano-stereolithography using evanescent light2015
- Author(s)
  Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  京都リサーチパーク（京都府・京都市）
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 光職場ナノ粒子を用いた3次元微細構造創製に関する研究(第3報)-FDTD法を用いた電磁波機能素子への応用可能性の検討-2014
- Author(s)
  吉越久倫, 門屋祥太郎, 高橋哲, 高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2014-03-19
- Data Source
  KAKENHI-PROJECT-25630018
[Presentation] 光触媒反応を用いた微細機能ビーズの創製に関する研究2014
- Author(s)
  門屋祥太郎，吉越久倫，高橋哲，高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-25630018
[Presentation] 光触媒反応を用いた微細機能ビーズの創製に関する研究2014
- Author(s)
  門屋祥太郎, 吉越久倫, 高橋哲, 高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2014-03-19
- Data Source
  KAKENHI-PROJECT-25630018
[Presentation] Precision measurement technique for rough surface object using self-beat signals of optical frequency comb2014
- Author(s)
  Taro Onoe, Zongluo Yang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  14th euspen International Conference
- Place of Presentation
  Dubrovnik (Croatia)
- Year and Date
  2014-06-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 光触媒ナノ粒子を用いた3次元微細構造創製に関する研究（第3報）－FDTD法を用いた電磁波機能素子への応用可能性の検討－2014
- Author(s)
  吉越久倫，門屋祥太郎，高橋哲，高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-25630018
[Presentation] 光によるマイクロ製造科学の新展開2014
- Author(s)
  高橋哲
- Organizer
  第34回理研シンポジウム「マイクロファブリケーション研究の最新動向～光応用加工・精密計測，レーザー加工の最前線～」
- Place of Presentation
  理化学研究所和光研究所
- Year and Date
  2014-05-23
- Invited
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Nanometer Profile Measurement of Aspheric Surface Using Scanning Deflectometry and Rotating Autocollimator: Self-Calibration Method of Autocollimator2014
- Author(s)
  Kiyoshi Takamasu, Kyohei Ishikawa, Tomihiko Takamura, Muzheng Xiao, Satoru Takahashi
- Organizer
  ASPE/ASPEN Summer Topical Meeting
- Place of Presentation
  Hawaii (USA)
- Year and Date
  2014-06-25
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Roughness and Line Profile Measurement of Photoresist and FinFET Features by Cross-Section STEM Image for Reference Metrology2014
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada:
- Organizer
  SPIE Advanced Lithography 2014, San Jose, USA, 2014年2月24日～27日
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Measurement of Surface Roundness Using a Multi-Beam Angle Sensor2014
- Author(s)
  Meiyun Chen, Soichiro Ueda, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  11th Laser Metrology for Precision Measurement and Inspection in Industry
- Place of Presentation
  つくば国際会議場（茨城県つくば市）
- Year and Date
  2014-09-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Non-Contact Measurement Technique for Dimensional Metrology Using Optical Comb2014
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  11th Laser Metrology for Precision Measurement and Inspection in Industry
- Place of Presentation
  つくば国際会議場（茨城県つくば市）
- Year and Date
  2014-09-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Experimental Analysis of Laser-Assisted Microfabrication Using TiO2 Nanoparticles2013
- Author(s)
  H. Yoshigoe, S. Takahashi, K. Takamasu
- Organizer
  Proceedings of the 13th euspen International Conference, Berlin, Germany, 2013年5月28日～30日
- Place of Presentation
  Berlin, Germany
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 光触媒ナノ工具に関する基礎的研究（第2報）－光放射圧を利用した加工位置制御法の検討－2013
- Author(s)
  関野貴宏，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ粒子を用いた3次元微細構造創製に関する研究2013
- Author(s)
  吉越久倫，向井康仁，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Line Width and Line Profile Measurement of Photoresist Using STEM Images2013
- Author(s)
  Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第16報）－可変NA伝搬光・エバネッセント光ハイブリッド露光システムの開発－2013
- Author(s)
  宮川幸大，松澤亮，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学，東京都
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Edge Determination Methodology for Cross-Section STEM Image of Photoresist Feature Used for Reference Metrology2013
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  SPIE Advanced Lithography 2013
- Place of Presentation
  San Jose, USA
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] System Using Evanescent Light and Propagating Light for High Throughput Fabrication,2013
- Author(s)
  K. Miyakawa, R. Matsuzawa, S. Takahashi, K. Takamasu:
- Organizer
  ASPE2013, St. Paul, Minnesota, USA, 2013，2013年10月20日～25日
- Place of Presentation
  St. Paul, Minnesota, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 半導体の線幅標準に関する研究（第10報）－AFM及びSTEMによるレジスト形状測定－2013
- Author(s)
  沖藤春樹，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 高誘電率マイクロ機能構造の創製に関する研究2013
- Author(s)
  向井康仁，吉越久倫，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Study on lateral resolution improvement of laser-scanning imaging for nano defects inspection2013
- Author(s)
  H. Yokozeki, R. Kudo, S. Takahashi , K . Takamasu
- Organizer
  The 11th International Symposium on Measurement Technology and Intelligent Instruments(オーラル採択済み)
- Place of Presentation
  アーヘン(ドイツ)
- Year and Date
  2013-07-03
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 光触媒ナノ工具に関する基礎的研究（第2報）－光放射圧を利用した加工位置制御法の検討－2013
- Author(s)
  関野貴宏，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学，東京都
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] スポット照明の重複シフトによる光学式超解像検査法－提案手法の理論的検討－2013
- Author(s)
  工藤良太，横関宏樹，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Study on lateral resolution improvement of laser-scanning imaging for nano defects inspection2013
- Author(s)
  H. Yokozeki, R. Kudo, S. Takahashi, K. Takamasu
- Organizer
  The 11th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  アーヘン，ドイツ
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Coherent Imaging Algorithm of Super-Resolution Optical Inspection with Structured Light Shift2013
- Author(s)
  Ryota Kudo, Hiroki Yokozeki, Satoru Takahashi, Kiyoshi Takamasu:
- Organizer
  LEM21, The 7th International Conference on Leading Edge Manufacturing in 21st CenturyMiyagi, Japan，2013年11月7日～8日
- Place of Presentation
  ホテル松島大観荘，宮城
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] High-accuracy calibration of CMM using temporal-coherence fiber interferometer with fast-repetition comb laser2013
- Author(s)
  Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Experimental Analysis of Laser-Assisted Microfabrication Using TiO2 Nanoparticles2013
- Author(s)
  H. Yoshigoe, S. Takahashi, K. Takamasu
- Organizer
  13th euspen International Conference
- Place of Presentation
  Berlin, Germany
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 回折限界超越を狙ったレーザー応用技術2013
- Author(s)
  高橋哲
- Organizer
  日本オプトメカトロニクス協会フォトンテクノロジー技術部会講演会
- Place of Presentation
  機械振興会館，東京都
- Invited
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ粒子を用いた3次元微細構造創製に関する研究2013
- Author(s)
  吉越久倫，向井康仁，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学，東京都
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 半導体の線幅標準に関する研究(第10報)-AFM及びSTEMによるレジスト形状測定-2013
- Author(s)
  沖藤春樹,高橋哲,高増潔
- Organizer
  2012年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2013-03-13
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Study on Lateral Resolution Improvement of Laser-Scanning Imaging for Nano Defects Inspection2013
- Author(s)
  Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ISMTII2013, The 11thinternational Symposium of Measurement Technology and Intelligent Instruments, 2013年7月1日～5日，Aachen, Germany
- Place of Presentation
  Aachen, Germany
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 高誘電率マイクロ機能構造の創製に関する研究2013
- Author(s)
  向井康仁，吉越久倫，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学，東京都
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Study on Photocatalyzed Nano-removal Processing Tool for Microstereolithography2013
- Author(s)
  Yuki Yamaguchi, Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Non-contact precision distance measurement technique using two optical frequency combs2013
- Author(s)
  Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement on Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Autocollimator -Error Analysis and Measurement Experiments by Using Autocollimator with Wide Measuring Range-2013
- Author(s)
  Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ISMTII2013, The 11thinternational Symposium of Measurement Technology and Intelligent Instruments, 2013年7月1日～5日，Aachen, Germany
- Place of Presentation
  Aachen, Germany
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] スポット照明の重複シフトによる光学式超解像検査法-提案手法の理論的検討-2013
- Author(s)
  工藤良太,横関宏樹,高橋哲,高増潔
- Organizer
  2012年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2013-03-13
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第16報）－可変NA伝搬光・エバネッセント光ハイブリッド露光システムの開発－2013
- Author(s)
  宮川幸大，松澤亮，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] フォトレジスト形状の断面STEM 画像からエッジを決定する方法2013
- Author(s)
  沖藤春樹，高橋哲，高増潔
- Organizer
  第3回ユーザーズミーティングプログラム　パーク・システムズ・ジャパン，東京
- Place of Presentation
  ベルサール神田，東京
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] DESIGN VALUE USE TYPE SUPER-RESOLUTION OPTICAL INSPECTION FOR MICROFABRICATED STRUCTURE DEFECTS BY USING STANDING WAVE ILLUMINATION SHIFT2012
- Author(s)
  R. Kudo, S. Takahashi, K. Takamasu
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  釜山，韓国
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] DESIGN VALUE USE TYPE SUPER-RESOLUTION OPTICAL INSPECTION FOR MICROFABRICATED STRUCTURE DEFECTS BY USING STANDING WAVE ILLUMINATION SHIFT2012
- Author(s)
  R. Kudo, S. Takahashi , K. Takamasu
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  釜山(韓国)
- Year and Date
  2012-09-10
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 光触媒ナノ工具に関する基礎的研究2012
- Author(s)
  関野貴宏，高橋哲，高増
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学，福岡県
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface with Improved Deflectometry Method - Principle Introduction and Experimental Verification -2012
- Author(s)
  Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第13報)-FDTD法を用いた微細配線の散乱特性解析-2012
- Author(s)
  天野佑基,工藤良太,高橋哲,高増潔
- Organizer
  2012年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Sub-nanometer line width and line profile measurement for CD-SEM calibration by using STEM2012
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  SPIE Advanced Lithography 2012
- Place of Presentation
  Sanjose，USA
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第14報)-コヒーレント結像逐次再構成型超解像法-2012
- Author(s)
  工藤良太,高橋哲,高増潔,臼杵深
- Organizer
  2012年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 半導体の線幅標準に関する研究(第9報)-STEM画像を用いたレジスト形状の測定-2012
- Author(s)
  沖藤春樹,高橋哲,高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  福岡
- Year and Date
  2012-09-14
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査（第13報）－FDTD法を用いた微細配線の散乱特性解析－2012
- Author(s)
  天野佑基，工藤良太，高橋哲，高増潔
- Organizer
  2012年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Sub-nanometer calibration of line width measurement and line edge detection by using STEM and sectional SEM2012
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  SPIE Advanced Lithography 2012
- Place of Presentation
  San Jose, USA
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査（第15報）-コヒーレント結像逐次再構成型超解像装置の開発-2012
- Author(s)
  工藤良太，高橋哲，高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 半導体の線幅標準に関する研究（第9報）-STEM画像を用いたレジスト形状の測定-2012
- Author(s)
  沖藤春樹，高橋哲，高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Super-heterodyne Interferometer for Length-Measurement Using the Beat Signal of Laser Diodes and the Optical Frequency Comb2012
- Author(s)
  X. N. Wang, S. Takahashi, K. Takamasu, H. Matsumoto
- Organizer
  12th euspen International Conference
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第15報)-コヒーレント結像逐次再構成型超解像装置の開発-2012
- Author(s)
  工藤良太,高橋哲,高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  福岡
- Year and Date
  2012-09-14
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Round Robin Tests of Uncertainty Estimation for Coordinate Metrology by Software Error Propagation2012
- Author(s)
  K. Takamasu, S. Takahashi, R. Furutani, M. Abbe
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Super-ResolutionVisual Inspection for Microstructures Manufacturing2012
- Author(s)
  Satoru Takahashi
- Organizer
  The 3rd International Conference on Digital Manufacturing & Automation
- Place of Presentation
  桂林(中国)
- Year and Date
  2012-08-15
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Super-Resolution Visual Inspection for Microstructures Manufacturing2012
- Author(s)
  Satoru Takahashi
- Organizer
  The 3rd International Conference on Digital Manufacturing & Automation
- Place of Presentation
  桂林，中国
- Invited
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 光励起型三次元ナノマイクロ加工法の新展開2012
- Author(s)
  高橋哲
- Organizer
  第126回ラドテック研究会講演会
- Place of Presentation
  学士会館本館，東京都
- Invited
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotation Devices - Development of Three Dimensional Measuring Facility and Experiment -2012
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satom Takahashi, Kiyoshi Takamasu
- Organizer
  12th euspen International Conference
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Sub-nanometer line width and line profile measurement for CD-SEM calibration by using STEM2012
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  SPIE Advanced Lithography 2012
- Place of Presentation
  Sanjose USA
- Year and Date
  2012-02-15
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査（第14報）－コヒーレント結像逐次再構成型超解像法－2012
- Author(s)
  工藤良太，高橋哲，高増潔，臼杵深
- Organizer
  2012年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第15報）ｰエバネッセント露光における樹脂硬化メカニズムの解析ｰ2012
- Author(s)
  宮川幸大，高橋哲，高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学，福岡県
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Design Value Use Type Super-Resolution Optical Inspection for Microfabricated Structure Defects by Using Standing Wave Illumination Shift2012
- Author(s)
  R. Kudo, S. Takahashi, K. Takamasu
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第15報）ｰエバネッセント露光における樹脂硬化メカニズムの解析ｰ2012
- Author(s)
  宮川幸大，高橋哲，高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Step Gauge Measurement Using High-Frequency Repetitions of a Mode-Locked Fiber Laser2012
- Author(s)
  C. Narin, S. Takahashi, K. Takamasu, H. Matsumoto
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 光触媒ナノ工具に関する基礎的研究2012
- Author(s)
  関野貴宏，高橋哲，高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 近赤外エバネッセント定在波を用いた半導体ウエハ表面の超解像光学式欠陥検査(第2報)-フィルタによるエラーの影響抑制-2011
- Author(s)
  工藤良太,高橋哲,高増潔
- Organizer
  2011年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  金沢
- Year and Date
  2011-09-22
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Absolute Distance Measurement Using Long-Path Heterodyne Interferometer with Optical Frequency Comb2011
- Author(s)
  Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  FIO/LS Technical Digest, OSA
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices2011
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  SPIE Optics+Photonics
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Development of high precision Coordinate Measuring Machine - Uncertainty analysis of multi-probe method2011
- Author(s)
  Tomohiko Takamura, Ping Yang, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices - Error Analysis and Experiments -2011
- Author(s)
  Muzheng Xiao, Satomi Jujo, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  11th euspen International Conference
- Place of Presentation
  Como, Italy
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Sub-nanometer line width and line profile measurement for CD-SEM calibration by using STEM2011
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  Proc.SPIE AL 2011
- Place of Presentation
  San Jose, USA
- Year and Date
  2011-02-28
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 近赤外エバネッセント定在波を用いた半導体ウエハ表面の超解像光学式欠陥検査（第2報）－フィルタによるエラーの影響抑制－2011
- Author(s)
  工藤良太，高橋哲，高増潔
- Organizer
  2011年度精密工学会秋季大会学術講演会
- Place of Presentation
  金沢
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Experimental analysis of influence of error on super-resolution optical inspection using standing wave illumination2011
- Author(s)
  Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第5報)-創製構造体の気相下観察に基づく加工特性の解析-2011
- Author(s)
  吉越久倫, 関野貴宏, 高橋哲, 高増潔
- Organizer
  2011年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東洋大学
- Year and Date
  2011-03-16
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第1報）－酸化チタン光触媒ナノ粒子による微細除去加工基本機能の検証－2011
- Author(s)
  関野貴宏，高橋哲，高増潔
- Organizer
  2011年度精密工学会秋季大会学術講演会
- Place of Presentation
  金沢大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine2011
- Author(s)
  Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Organizer
  SPIE Optics+Photonics
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] On-machine profile measurement by multiple sensors scanning method with two kinds of algorithms2011
- Author(s)
  Guoqing Ding, Xin Chen, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Self-calibration for two-dimensional stage using least squares solution2011
- Author(s)
  Xin Chen, Guoqing Ding, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Interferometric Estimation of the Offset-Frequency of Optical Frequency Comb2011
- Author(s)
  Hirokazu Matsumoto, Xiaonan Wang, Dong Wei, Satoshi Takahashi, Kiyoshi Takamasu
- Organizer
  FIO/LS Technical Digest, OSA
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Experimental evaluation of long path heterodyne interferometers with optical-frequency comb and continuous-wave laser2011
- Author(s)
  Xiaonan Wang, Satoru Takahashi , Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Experimental analysis of influence of error on super-resolution optical inspection using standing wave illumination2011
- Author(s)
  Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments, ISMTII2011
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] A motion errors and profile measurement system using three laser interferometers and one autocollimator for a high-precision micro-coordinate measuring machine2011
- Author(s)
  P. Yang, T. Takamura, S. Takahashi, K. Takamasu, O. Sato, S. Osawa, T. Takatsuji
- Organizer
  11th euspen International Conference
- Place of Presentation
  Como, Italy
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Experimental analysis of influence of error on super-resolution optical inspection using standing wave2011
- Author(s)
  R. Kudo, S. Usuki, S. Takahashi, K.Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Year and Date
  2011-07-01
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Height Measurement of a Particle in Evanescent Field Controlling Penetration Depth2010
- Author(s)
  Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] A Novel Exposure Method Based on Dissolved Oxygen Control for Nano-Stereolithography Using Evanescent Light2010
- Author(s)
  Satoru Takahashi, Toshimune Nagano, Yusuke Kajihara, Kiyoshi Takamasu
- Organizer
  Proc.ASPE2010
- Place of Presentation
  Atlanta, USA
- Year and Date
  2010-11-01
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Laser Direct Fabrication of 3-D metal microstructures using photocatalyst nanoparticles2010
- Author(s)
  高橋哲
- Organizer
  CIRP August Meeting, STC E
- Place of Presentation
  ピサ
- Year and Date
  2010-08-27
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] A Three Laser Interferometers and One Autocollimator System for Measuring the Yaw and Straightness Errors of a X-Y Stage on High Precision CMM2010
- Author(s)
  Ping Yang, Shusaku Shibata, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] A novel length measurement interferometer based on a femtosecond optical frequency comb introduced multi-pulse trains' interference2010
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  Proc.EOS 2010
- Place of Presentation
  Paris, France
- Year and Date
  2010-10-26
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Micro 3-D Fabrication and Nano Scale Metrology by Controlling Localized Light Energy2010
- Author(s)
  高橋哲, 高増潔
- Organizer
  4th TU-SNU-UT Joint Symposium
- Place of Presentation
  Tokyo
- Year and Date
  2010-03-12
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] Resolution Characteristics of Super-Resolution Optical Inspection Using Standing Wave Illumination2010
- Author(s)
  Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Advanced Absolute Length Metrology Based On Pulse Trains' Constructive Interference-Towards Measurements of Meter Order with an Accuracy of Nano Order-2010
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Laser Direct Fabrication of 3-D metal microstructures using photocataly st nanoparticles2010
- Author(s)
  S.Takahashi
- Organizer
  CHIP August Meeting, STC E
- Place of Presentation
  イタリア・ピサ
- Year and Date
  2010-08-27
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] Improvement of Gauge Block Measurement Without Wringing Using Tandem Low-coherence Interferometer2010
- Author(s)
  W.Agustinus, A.Hirai, S.Takahashi, K.Takamasu, H.Matsumoto
- Organizer
  Proc.of the euspen International Conference
- Place of Presentation
  Delft, Netherlands
- Year and Date
  2010-06-02
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Micro 3-D Fabrication and Nano Scale Metrology by Controlling Localized Light Energy2010
- Author(s)
  Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  4th TU-SNU-UT Joint Symposium
- Place of Presentation
  Tokyo,武田ホール
- Year and Date
  2010-03-12
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] Sub-nanometer Uncertainty Evaluation of Line Width Measurement by Si Lattice Structures of STEM Image2010
- Author(s)
  K.Takamasu, K.Kuwabara, S.Takahashi, T.Mizuno, H.Kawada
- Organizer
  Proc.of the euspen International Conference
- Place of Presentation
  Delft, Netherlands
- Year and Date
  2010-06-02
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Mirror-Enlarging Measuring Range of Autocollimator-2010
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第4報)-インプロセス観察に基づく創製特性の実験的検討-2010
- Author(s)
  松田恵介, 吉越久倫, 高橋哲, 高増潔
- Organizer
  2010年度精密工学会秋季大会学術講演会講演論文集
- Year and Date
  2010-03-17
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] New Optical Distance Measurement Without a Prism Refractor Using an Optical Frequency Comb Laser2010
- Author(s)
  Kazumasa Isaka, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Super-Heterodyne Interferometric Length Measurement Using the Repetition Frequency of an Optical Frequencies Comb2010
- Author(s)
  Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第3報)-3次元創製プロセスの顕微観察-2009
- Author(s)
  松田恵介, 高橋哲, 高増潔
- Organizer
  2009年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  神戸大学
- Year and Date
  2009-09-07
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第5報)-定在波照明の2方向シフトを用いた2次元超解像特性の検討-2008
- Author(s)
  工藤良太, 臼杵深, 高橋哲, 高増潔
- Organizer
  2008年度精密工学会春季大会学術講演会
- Place of Presentation
  明治大学
- Year and Date
  2008-03-17
- Data Source
  KAKENHI-PROJECT-18656041
[Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第2報)-創製構造体の気相取り出し方法の実験的検討-2008
- Author(s)
  吉田大助, 武内徹, 高橋哲, 高増潔
- Organizer
  2008年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] レジスト表面形状の計測(第五報)-マルチトポセンサの提案-2008
- Author(s)
  徳田雄一郎高橋哲, 高増潔
- Organizer
  2008年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Development of residual layer thickness measurement system for nano-imprint lighography based on near-field optics2008
- Author(s)
  S. Takahashi, T. Nagao, S. Minamiguchi, S. Usuki, K. Takarnagu
- Organizer
  The euspen international conference
- Place of Presentation
  Zurich
- Year and Date
  2008-05-19
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第5報)-定在波照明の2方向シフトを用いた2次元超解像特性の検討-2008
- Author(s)
  工藤良太, 臼杵深, 高橋哲, 高増潔
- Organizer
  2008年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 半導体の線幅標準に関する研究(第3報)-STEM画像による線幅のエッジおよびピッチの決定2008
- Author(s)
  桑原一樹, 澤内佑介, 高橋哲, 高増潔
- Organizer
  2008年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System2007
- Author(s)
  Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Uncertainty Estimation for Coordinate Metrology: Calibration, Form Deviation and Strategy of Measurement2007
- Author(s)
  K. Takamasu, S. Takahashi, M. Abbe, R. Furutani
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Experimenta Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift2007
- Author(s)
  S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 定在エバネッセント光を用いた超解像顕微法に関する研究(第4報)-定在波シフトによる変調散乱光観察実験-2007
- Author(s)
  岡田真一, 臼杵深, 高橋哲, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Analysis of Lateral Resoltition Improvement for Fluorescence Microscopy using Standing Evanescent Light2007
- Author(s)
  S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Thin Film Thickness Measurement for Evaluation of Residual layer of Nano-Imprint Lithography Using Near-Field Optics2007
- Author(s)
  S. Minamiguchi, S. Usuki, S. Takahashi, K. Takamasu
- Organizer
  ISMQC2007
- Place of Presentation
  India
- Year and Date
  2007-11-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Experimental Verification fbr Super-resolution Optical Inspection fbr Semiconductor Defect by using Standing Wave Illumination Shift2007
- Author(s)
  Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kioshi Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light2007
- Author(s)
  S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
- Organizer
  8th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  東北大学,仙台
- Year and Date
  2007-09-25
- Data Source
  KAKENHI-PROJECT-18656041
[Presentation] Uncertainty Estimation for Coordinate Metrology : Calibration, Form Deviation and Strategy of Measurement2007
- Author(s)
  K. Takamasu, S. Takahashi, M. Abbe, R. Furutani
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illuminatio Shift2007
- Author(s)
  S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift2007
- Author(s)
  S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] エバネッセント光を利用したナノ光造形法の研究(第9報)-DMDによるエバネッセント強度分布制御法の検討-2007
- Author(s)
  武内徹, 梶原優介, 高橋哲, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Lisht2007
- Author(s)
  S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 定在エバネッセント光を用いた超解像顕微法に関する研究(第4報)-定在波シフトによる変調散乱光観察実験-2007
- Author(s)
  岡田真一, 臼杵深, 高橋哲, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Year and Date
  2007-09-14
- Data Source
  KAKENHI-PROJECT-18656041
[Presentation] Development of laser-assisted microfabrication sysetm for three-dimensional metal structures by photocatalysis2007
- Author(s)
  S. Takahashi, M. Okuno, Y. Kajihara, K. Takamasu
- Organizer
  Euspen 2007
- Place of Presentation
  Germany
- Year and Date
  2007-05-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 近接場光を用いたナノインプリント残膜測定法に関する研究(第3報)-偏光特性を利用した残膜厚計測-2007
- Author(s)
  南口修一, 臼杵深, 高橋哲, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] An Optical and Confocal Microscopic System for Nanostereolithography Using Evanescent Light Eliminate of the Nonlinearity in Heterode Interferometer2007
- Author(s)
  Y. Kajihara, T. Takeuchi, S. Takahashi K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift2007
- Author(s)
  S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
- Organizer
  8th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  東北大学,仙台
- Year and Date
  2007-09-26
- Data Source
  KAKENHI-PROJECT-18656041
[Presentation] Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light2007
- Author(s)
  S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 半導体の線幅標準に関する研究(第2報)-ラインエッジの不確かさ要因-2007
- Author(s)
  澤内佑介, 高橋哲, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Thin Film Thickness Measurement for Evaluation of Residual layer of Nano-Imprint Lithography Using Near-Field Optics2007
- Author(s)
  S. Minamiguchi, S. Usuki, S. Takahashi, K. Takamasu
- Organizer
  ISMQC 2007
- Place of Presentation
  India
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Uncertainty Estimation for Coordinate Metrology:Calibration, Form Deviation and Strategy of Measurement2007
- Author(s)
  K. Takamasu, S. Takahashi, M. Abbe, R. Furutani
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] An Optical and Confocal Microscopic System for Nanostereolithography Using Evanescent Light Eliminate of the Nonlinearity in Heterodyne Interferometer2007
- Author(s)
  Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 光触媒ナノ粒子を用いた3次元微細構造創製に関する研究（第4報）－THz波制御素子への応用可能性の検討－
- Author(s)
  吉越久倫，堀田陽亮，高橋哲,　高増潔
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ粒子を用いた3次元微細構造創製に関する研究（第2報）－創製構造物の機能化に向けた実験的検討－
- Author(s)
  吉越久倫，門屋祥太郎，高橋哲，高増潔
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  大阪
- Year and Date
  2013-09-11 – 2013-09-13
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Fundamental study on the world’s thinnest layered micro-stereolithography using evanescent light
- Author(s)
  S. Takahashi, H. Tahara, K. Miyakawa, Y. Kajihara, and K. Takamasu
- Organizer
  ASPE2014 Spring Topical Meeting
- Place of Presentation
  Berkerley, USA
- Year and Date
  2014-04-14 – 2014-04-16
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ工具に関する基礎的研究（第5報）－光放射圧制御加工の実験的検証－
- Author(s)
  山口祐樹，加地史弥，高橋哲，高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2014-03-18 – 2014-03-20
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Study on Photocatalyzed Nano-removal Processing Tool for Microstereolithography
- Author(s)
  Yuki Yamaguchi, Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013)
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2013-11-13 – 2013-11-15
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] エバネッセント光の工学応用～一括露光型マイクロ光造形法の露光エネルギーへの展開とその展望～
- Author(s)
  高橋哲
- Organizer
  第82回レーザ加工学会講演会
- Place of Presentation
  東京
- Year and Date
  2015-01-13 – 2015-01-14
- Invited
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査（第19 報）－3 光束干渉定在波照明の自動生成法の検討－
- Author(s)
  久米大将，横関宏樹，高橋哲，高増潔
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] スポット重複移動情報を用いた光学式超解像検査法の開発
- Author(s)
  金成碩，久米大将，横関宏樹，高橋哲，高増潔
- Organizer
  日本機械学会2015年度年次大会
- Place of Presentation
  北海道
- Year and Date
  2015-09-13 – 2015-09-16
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] Experimental Analysis of Laser-Assisted Microfabrication Using TiO2 Nanoparticles
- Author(s)
  H. Yoshigoe, S. Takahashi, K. Takamasu
- Organizer
  the 13th euspen International Conference (euspen2013)
- Place of Presentation
  Berlin, Germany
- Year and Date
  2013-05-28 – 2013-05-30
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ工具に関する基礎的研究（第８報）－放射圧動的制御による高安定トラップ－
- Author(s)
  加地史弥，堀田陽亮，高橋　哲，高増　潔
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] スポット照明の重複シフトによる光学式超解像検査法（第4報）－スポット照明超解像型基礎実験装置の基本的機能検証－
- Author(s)
  横関宏樹，工藤良太，高橋哲，高増潔
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] スポット照明の重複シフトによる光学式超解像検査法(第5報) －離散的サンプルを用いた提案超解像原理の実験的検証－
- Author(s)
  横関宏樹，久米大将，高橋哲，高増潔
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] 光触媒ナノ工具に関する基礎的研究（第6報）－インプロセス工具位置観察ユニットの実装－
- Author(s)
  加地史弥，山口祐樹，高橋哲，高増潔
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] レーザー集光点近傍の光触媒反応を用いた3次元微細構造創製に関する研究
- Author(s)
  堀田陽亮，吉越久倫，高橋哲，高増潔
- Organizer
  日本機械学会第10回生産加工・工作機械部門講演会
- Place of Presentation
  徳島
- Year and Date
  2014-11-15 – 2014-11-16
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ工具に関する基礎的研究（第７報）－回折限界を超えた微細除去加工の検討－
- Author(s)
  堀田陽亮，加地史弥，高橋　哲，高増　潔
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Challenge of Spatial Resolution Improvement of Optical Measurement Method Based on Localized Light Energy
- Author(s)
  S. Takahashi
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2015-09-22 – 2015-09-25
- Invited
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査（第18報）－コヒーレント結像逐次再構成型超解像による二次元超解像法のシミュレーションによる検討－
- Author(s)
  工藤良太，高橋哲，高増潔
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] Theoretical Analysis of the Spatial Process Resolution of Evanescent Light Exposure for Nano-stereolithography
- Author(s)
  Hiroyuki TAHARA, Kodai MIYAKAWA, Toshimune NAGANO, Satoru TAKAHASHI and Kiyoshi TAKAMASU
- Organizer
  the 15th International Conference on Precision Engineering
- Place of Presentation
  Kanazawa
- Year and Date
  2014-07-23 – 2014-07-25
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ工具に関する研究（第3報）－微小除去加工特性の実験的解析－
- Author(s)
  山口祐樹，加地史弥，高橋哲，高増潔
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  大阪
- Year and Date
  2013-09-11 – 2013-09-13
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Analysis of TiO2 nanotool handling characteristics for microplastic structures based on laser trapping technique
- Author(s)
  Fumiya KAJI, Yuki YAMAGUCHI, Satoru TAKAHASHI and Kiyoshi TAKAMASU
- Organizer
  the 15th International Conference on Precision Engineering
- Place of Presentation
  Kanazawa
- Year and Date
  2014-07-23 – 2014-07-25
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ加工工具に関する基礎的研究（第4報）－光放射圧によるTiO2工具チップ把持特性－
- Author(s)
  加地史弥，山口祐樹，高橋哲，高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2014-03-18 – 2014-03-20
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 微細加工構造の超回折限界光学式計測法の開発
- Author(s)
  久米大将，横関宏樹，工藤良太，高橋哲，高増潔
- Organizer
  日本機械学会第10回生産加工・工作機械部門講演会
- Place of Presentation
  徳島
- Year and Date
  2014-11-15 – 2014-11-16
- Data Source
  KAKENHI-PROJECT-26630018

1. TAKAMASU Kiyoshi (70154896)

# of Collaborated Projects: 12 results

# of Collaborated Products: 334 results
2. MIYOSHI Takashi (00002048)

# of Collaborated Projects: 9 results

# of Collaborated Products: 0 results
3. TAKAYA Yasuhiro (70243178)

# of Collaborated Projects: 9 results

# of Collaborated Products: 0 results
4. Michihata Masaki (70588855)

# of Collaborated Projects: 6 results

# of Collaborated Products: 66 results
5. 門屋祥太郎 (60880234)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
6. FURUTANI Ryoshu (50219119)

# of Collaborated Projects: 2 results

# of Collaborated Products: 4 results
7. SHIMADA Shoichi (20029317)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. 西川正俊 (30444516)

# of Collaborated Projects: 2 results

# of Collaborated Products: 1 results
9. KOUDA Seido

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. MATSUMOTO Hirokazu (00358045)

# of Collaborated Projects: 1 results

# of Collaborated Products: 20 results
11. MISUMI Ichiko (40358099)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. SATO Osamu (60392619)

# of Collaborated Projects: 1 results

# of Collaborated Products: 52 results
13. SHIBATA Takayuki (10235575)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. NARAHARA Hiroyuki (80208082)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. OOSUGI Yukihisa

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. MURAKAMI Kohei

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. MATSUMIYA Sadayuki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. KIMURA Keiichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Takahashi Satoru 高橋 哲

TAKAHASHI Satoru 高橋 哲

Research Projects

Research Products

Co-Researchers

次世代機能デバイス実現のための高品位・超高アスペクト比微細穴加工システムの開発Principal Investigator

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1nm表面異物欠陥の自律探索を実現する動的位相差検出型・近接場液相プローブ計測法Principal Investigator

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動的位相同期制御による局在光場を用いた次世代微細機能構造のナノ欠陥超解像計測Principal Investigator

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空間局在光場並列制御によるナノ除去加工分解能・新概念光励起加工法の挑戦Principal Investigator

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High Sensitive Optical Detection of Nano Particulate Defects with Autonomous Search-and-Split Liquid ProbePrincipal Investigator

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Development of localized light-controlled cell-in-microfactories for the production of composite microparticle functional structuresPrincipal Investigator

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Challenging exploratory research on super resolution measurement of nano defects for next-generation functional fine structures by controlling dynamic localized light distributionPrincipal Investigator

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Fundamental research on cell-in-micro-factory based on active parallel controlling of localized light energyPrincipal Investigator

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Development of laser-assisted micro removal processing tool controlled by the spatial light field allowing nanoscale correction for 3-D micro objectsPrincipal Investigator

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Challenging exploratory research on non-destructive internalPrincipal Investigator

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Takahashi Satoru 高橋哲

TAKAHASHI Satoru 高橋哲