Nagaoka Shiro 長岡史郎

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NAGAOKA Shiro 長岡史郎

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Researcher Number	30300635
Other IDs
Affiliation (Current)	2025: 大阪公立大学, 大学院工学研究科, 客員教授
Affiliation (based on the past Project Information) *help	2016 – 2023: 香川高等専門学校, 電子システム工学科, 教授 2006 – 2007: 詫間電波工業高等専門学校, 電子工学科, 教授 2005: 詫間電波工業高等専門学校, 電子工学科, 助教授
Review Section/Research Field	Principal Investigator Basic Section 62030:Learning support system-related / Science education Except Principal Investigator Basic Section 21060:Electron device and electronic equipment-related / Basic Section 21050:Electric and electronic materials-related / Foreign language education
Keywords	Principal Investigator デバイス / リソグラフィ / 熱拡散 / 微細化 / デバイスプロセス / フォトリソグラフィ / 半導体デバイス / 半導体 / 微細加工 / 電子デバイス・機器 … More / リソグラフィー / バイポーラトランジスタ / MOS FET / pn接合 / Sol Gel / 教育 / 簡素化 / 集積回路 / ｐｎ接合 / Sol-Geｌ / プロセス / 工学教育 / p-n接合 / Sol-Gel … More Except Principal Investigator 水素ラジカル / WBT / ESP / 除去速度 / 分解 / 酸素ラジカル / ノボラック樹脂 / 感光剤 / 触媒毒 / 架橋・硬化 / 分子軌道計算 / 深紫外線励起発光分光法 / ラマン分光法 / 微量フォースセンサーシステム / 酸素微量添加 / ポリマー分解 / PAC介在架橋 / レジスト / 酸素添加 / ポリマー / ラジカル / 歪 / スピン・オン・グラス / 非線形性 / スピンオングラス法 / スパッタ法 / 反転層 / 酸化膜 / 低温プロセス / 酸素ドナー / 格子欠陥 / ホール効果 / ピゾ抵抗効果 / 抵抗の温度特性 / 空孔 / ノンドープ / 水素アニール / 荷電状態 / 欠陥準位 / 結晶欠陥 / 温度依存性 / 結晶歪 / ピエゾ抵抗効果 / ゲルマニウム / English Teaching / Learning through Media / Video Learning / Science / English / 理工係 / 英語教育 / メディア教育 / ビデオ教材 / 理工系 / 英語 Less

Semiconductor device foundry achieved at a nanotech platform established on an average science lab.Principal Investigator
- Principal Investigator
  
  長岡史郎
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 62030:Learning support system-related
- Research Institution
  Kagawa National College of Technology
Piezoresistance Effects of p-type Ge
- Principal Investigator
  
  MATSUDA Kazunori
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21050:Electric and electronic materials-related
- Research Institution
  Osaka University
  Tokushima Bunri University
Elucidation of the effect of a trace amount of oxygen addition on the decomposition and removal of polymer materials using hydrogen radicals
- Principal Investigator
  
  Yamamoto Masashi
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  Kagawa National College of Technology
A nanotechnology platform established in average science laboratoriesPrincipal Investigator
- Principal Investigator
  
  Nagaoka Shiro
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Science education
- Research Institution
  Kagawa National College of Technology
The Development of an English Learning Video for Science and Engineering Education, and the Study of its Application
- Principal Investigator
  
  MORI Kazunori
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Foreign language education
- Research Institution
  Takuma National College of Technology

All 2024 2023 2022 2021 2020 2019 2018 2017 2016

All Journal Article Presentation

[Journal Article] Effects of Hydrogen Radical Treatment on Piezoresistance Coefficients of Germanium2023
- Author(s)
  (1)K.Matsuda, M.Yamamoto, M.Mikawa, S.Nagaoka, N.Mori and K.Tsutui,
- Journal Title
  
  Applied Physics Express,
  
  Volume: 16巻　5号 Issue: 4 Pages: 82-86
- DOI
  10.35848/1882-0786/acc8b4
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22K12308, KAKENHI-PROJECT-19K04478
[Journal Article] Removal of Novolac Photoresist with Various Concentrations of Photo-active Compound Using H<sub>2</sub>/O<sub>2</sub> Mixtures Activated on a Tungsten Hot-wire Catalyst2021
- Author(s)
  Akita Koki、Sogo Shota、Sogame Ryusei、Yamamoto Masashi、Nagaoka Shiro、Umemoto Hironobu、Horibe Hideo
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 34 Issue: 5 Pages: 499-504
- DOI
  10.2494/photopolymer.34.499
- NAID
  130008119601
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2021-06-11
- Language
  English
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Nanotech Platoform Established for Average Technical Education Science laboratories2021
- Author(s)
  S.Nagaoka, M.Yamamoto, T.Tsuji, T.Shimazu, R.W.Joshstion, K.Matsuda, F.Shimokawa, H.Horibe
- Journal Title
  
  Proceedings of International Symposium on Advances in Technology Education
  
  Volume: - Pages: 86-91
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K04478
[Journal Article] Evaluation of Decomposition Property of Photoresist by Oxygen Radicals Using Helium-Oxygen Mixtures2020
- Author(s)
  Yamamoto Masashi、Akita Koki、Nagaoka Shiro、Umemoto Hironobu、Horibe Hideo
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 33 Issue: 4 Pages: 433-437
- DOI
  10.2494/photopolymer.33.433
- NAID
  130007867637
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2020-07-01
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Effects of Nitrogen Dilution on the Photoresist Removal Rate by Hydrogen Radicals2020
- Author(s)
  Yamamoto Masashi、Nishioka Hiroto、Akita Koki、Nagaoka Shiro、Umemoto Hironobu、Horibe Hideo
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 33 Issue: 4 Pages: 427-431
- DOI
  10.2494/photopolymer.33.427
- NAID
  130007867636
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2020-07-01
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Relationship between Oxygen Additive Amount and Photoresist Removal Rate Using H Radicals Generated on an Iridium Hot-Wire Catalyst2019
- Author(s)
  Yamamoto Masashi、Shiroi Tomohiro、Shikama Tomokazu、Nagaoka Shiro、Umemoto Hironobu、Horibe Hideo
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 32 Issue: 4 Pages: 609-614
- DOI
  10.2494/photopolymer.32.609
- NAID
  130007744433
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2019-06-24
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Photoresist removal using hydrogen radicals produced by tantalum hot-wire catalyst2019
- Author(s)
  Yamamoto Masashi、Shiroi Tomohiro、Shikama Tomokazu、Nagaoka Shiro、Horibe Hideo
- Journal Title
  
  American Institute of Physics Conference Proceedings
  
  Volume: 2151 Pages: 020010-020010
- DOI
  10.1063/1.5124640
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Oxygen additive effects on decomposition rate of poly(vinyl phenol)-based polymers using hydrogen radicals produced by a tungsten hot-wire catalyst2019
- Author(s)
  Yamamoto Masashi、Nagaoka Shiro、Ohdaira Keisuke、Umemoto Hironobu、Horibe Hideo
- Journal Title
  
  Thin Solid Films
  
  Volume: 679 Pages: 22-26
- DOI
  10.1016/j.tsf.2019.03.035
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Origin of the Piezoresistance Effects in p-Type Silicon at High Temperature2019
- Author(s)
  Kazunori Matsuda, Shiro Nagaoka and Hirosi Kajiyama
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Pages: 1-3
- NAID
  210000156808
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04478
[Journal Article] Removal of Polymers for KrF and ArF Photoresist Using Hydrogen Radicals Containing a Small Amount of Oxidizing Radicals2018
- Author(s)
  M. Yamamoto, T. Taki, T. Sunada, T. Shikama, S. Nagaoka, H. Umemoto　and H. Horibe
- Journal Title
  
  J. Photopolym. Sci. Technol.
  
  Volume: 31(3) Pages: 419-424
- NAID
  130007481491
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] Proposal for Reducing Pattern Position Alignment Error of A Simplified Photo Lithography Method for Education2018
- Author(s)
  S. Nagaoka, M. Yamamoto, T. Tsuji, K. Matsuda, T. Shimizu, R. W. Johnston, T. Shikama, F. Shimokawa and H. Horibe
- Journal Title
  
  The Proceedings of 12th Internationa Symposium on Advances in Technology Education
  
  Volume: 1 Pages: 512-517
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] シリコン太陽電池作製実験教材とその科学技術教育活動への応用2018
- Author(s)
  辻琢人, 長岡史郎, 若原昭浩
- Journal Title
  
  電気評論
  
  Volume: 103 Pages: 73-76
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] 科研費による研究成果の社会還元・普及事業へのシリコン太陽電池作製教材の応用2017
- Author(s)
  辻琢人、長岡史郎，若原昭浩
- Journal Title
  
  工学教育
  
  Volume: 65 Pages: 38-41
- NAID
  130006110335
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] Fundamental Study of the Simplified Micro Diffusion Bipolar Transistor as the Educational Resource2017
- Author(s)
  S. Nagaoka, M. Yamamoto, T. Tsuji, T. Shimizu, R. W. Johnston, H. Horibe, F. Shimokawa,T. Shikama and M. Rusop
- Journal Title
  
  Transactions of ISATE 2017 The 11th International Symposium on Advances in Technology Education
  
  Volume: 1 Pages: 275-279
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] Pressure Dependence of Photoresist Removal Rate Using Hydrogen Radicals2017
- Author(s)
  M. Yamamoto, T. Shiroi, S. Nagaoka, T. Shikama, H. Umemoto, K. Ohdaira, T. Nishiyama and H. Horibe
- Journal Title
  
  . Photopolym. Sci. Technol.
  
  Volume: 30(3) Pages: 297-301
- NAID
  130005950262
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] A proposal of the Simplified IC Fab Establishied in the Average Science Laboratory for Cultivating Scientific Mind2016
- Author(s)
  長岡史郎，辻琢人，山本雅史，R.W.Johnston，清水共，鹿間共一
- Journal Title
  
  The Transactons of ISATE2016, The 10th International Symposium on Advances in Technology Education
  
  Volume: - Pages: 13-16
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] A Study of the Simplified IC FAB for the Science and Technical Education2016
- Author(s)
  高垣信巨，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Journal Title
  
  The Proceeding of the 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
  
  Volume: - Pages: 161-165
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] A feasibility study of the selective and simultaneous thermal impurity diffusion process on the silicon substrate2016
- Author(s)
  西園寺嶺，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Journal Title
  
  The Proceeding of the 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
  
  Volume: - Pages: 166-171
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Study of Resolution Improvement of the Simplified Contact Photo Lithography Using Phase Shift Method for EE Education2024
- Author(s)
  S. Nagaoka*, T. Shimizu, M. Yamamoto, R. W. Johnston, K. Matsuda and H. Horibe
- Organizer
  5th Malaysia-Japan International Conference on Nanoscience, Nanotechnology and Nanoengineering 2024 (MJIC2024)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] Development of an Educational Grating Using a Photomask and of an Educational Scenario Using It2024
- Author(s)
  Ayano Doi, Hayato Kawazome, Shiro Nagaoka
- Organizer
  5th Malaysia-Japan International Conference on Nanoscience, Nanotechnology and Nanoengineering 2024 (MJIC2024)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] A Study of Resolution an Overlay Accuracy of a Simplified Photo Lithography Process for EE Education Use2023
- Author(s)
  (4)T.Shimizu, M.Yamamoto, R.Johnston, K.Matsuda, H. Horibe and S.Nagaoka,
- Organizer
  4th MALAYSIA- JAPAN International Conference on Nanoscience, Nanotechnology & Nanoengineering 2023 (MJIC 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] Feasibility Study of a Simplified Nanotech Platform and Device Evaluation Procedure Established for Average Educational Science Laboratories2023
- Author(s)
  S.Nagaoka, M.Yamamoto, T.Shimizu, R.Johnston, K.Matsuda and H.Horibe
- Organizer
  4th MALAYSIA-JAPAN International Conference on Nanoscience, Nanotechnology & Nanoengineering 2023 (MJIC 2023),
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] ラミネートフォトマスクによる曲面への微細加工の産業応用2023
- Author(s)
  長岡史郎
- Organizer
  産業技術振興会シーズ発表会、萌芽的研究実施事例、No3
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] Effects of Hydrogen Radicals Treatment of Piezoresistance Coefficients of Germanium2023
- Author(s)
  K.Matsuda, M.Yamamoto, M.Mikawa, S.Nagaoka, K.Tsutsui
- Organizer
  International Conference on Physics of Semiconductors
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] 教育用簡素化微細加工プロセスのレジストパタン解像度と重ね合せ精度改善に関する一考察2023
- Author(s)
  土井彩乃、清水共、川染勇人、山本雅史、ロバートジョンストン、松田和典、堀邊英夫、長岡史郎
- Organizer
  令和５年度電気・電子・情報関係学会四国支部連合大会、11ー5
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] Effects of Hydrogen Radicals Treatment of Piezoresistance Coefficients of Germanium2022
- Author(s)
  K.Matsuda, M.Yamamoto, M.Mikasa, S.Nagaoka, K.Tsutsui,
- Organizer
  International Conference on Physics of Semiconductors,2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] タングステンHot-Wireで活性化したH2/O2混合ガスによるノボラック系ポジ型レジストの除去速度低下の原因の検討2022
- Author(s)
  山本雅史、秋田航希，馬庭知宏，浅川万知，長岡史郎，堀邊英夫
- Organizer
  第20回Cat-CVD研究会(佐賀・オンライン)，pp.21-23
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] Geのピエゾ抵抗係数に対する水素処理効果2022
- Author(s)
  松田，山本，三河，長岡，谷川，國本，筒井
- Organizer
  2022年第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] Effects of Hydrogen Radical Treatment on Piezoresistance Coefficients of Germanium2022
- Author(s)
  K. Matsuda, M.Yamamoto, M.Mikawa, S.Nagaoka, K.Tsutui
- Organizer
  International Conference on the Physics of Semiconductors 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] タングステンHot-Wireで活性化したH2/O2混合ガスによるノボラック系ポジ型レジストの除去速度低下の原因の検討2022
- Author(s)
  山本雅史、秋田航希，馬庭知宏，浅川万知，長岡史郎，堀邊英夫
- Organizer
  第20回Cat-CVD研究会
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] タングステン加熱触媒体で活性化したH2/O2混合ガスを用いたPAC量の異なるノボラックレジストの除去2021
- Author(s)
  秋田航希，十川翔太，十亀龍星，山本雅史，長岡史郎，梅本宏信，堀邊英夫
- Organizer
  第38回国際フォトポリマーコンファレンス
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] タングステン Hot-Wire で活性化した H2/O2 混合ガスによるノボラックレジストの除去性の検討2021
- Author(s)
  山本雅史，秋田航希，十川翔太，十亀龍星，長岡史郎，梅本宏信，堀邊英夫
- Organizer
  第18回Cat-CVD研究会
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] p型Geの異常ピエゾ抵抗係数2021
- Author(s)
  松田，筒井，山本，長岡，梶山
- Organizer
  第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] A Study of a Simplified Integrated Circuit Fabrication Method for Use in a Nanotech Platform for Average technical Education Science Laboratories2021
- Author(s)
  S.Nagaoka, M.Yamamoto, T.shimizu,R.Hohnston, T.Shikama and K.Matsuda,
- Organizer
  3rd Malaysia-Japan International Conference on Nanoscience, Nanotechnology & Nanoengineering (MJIC) 2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] Geのピエゾ抵抗効果（Ⅰ）2020
- Author(s)
  松田和典，生田壮馬，中谷友哉，長岡史郎，筒井一生
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] He/O2混合ガスを用いたOラジカルによるレジストの分解特性の評価2020
- Author(s)
  秋田航希，山本雅史，長岡史郎，鹿間共一，大平圭介，梅本宏信，堀邊英夫
- Organizer
  第17回Cat-CVD研究会（オンライン），P-07
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] Nanotech Platform Established for Average Technical Education Science Laboratories2020
- Author(s)
  S.Nagaoka, M.Yamamoto, T.Tsuji, T.Shikama, T.Shimizu, R.W.Johston, K.Matsuda, F.Shimokawa and H.Horibe
- Organizer
  The Transactions of ISATE2019, The 13th International Symposium on Advances in Technology Education
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] 水素ラジカルを用いたレジスト除去速度における窒素希釈効果2020
- Author(s)
  西岡寛人，山本雅史，長岡史郎，鹿間共一，大平圭介，梅本宏信，堀邊英夫
- Organizer
  第17回Cat-CVD研究会（オンライン），P-08
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] 理科室で構築する工学教育用半導体デバイス設計製作評価環境2020
- Author(s)
  長岡史郎，山本雅史，鹿間共一，清水共，Robert Johnston，松田和典，下川房男，堀邉英夫
- Organizer
  応用物理学会
- Data Source
  KAKENHI-PROJECT-19K04478
[Presentation] 活性種とポリマーとの反応について2020
- Author(s)
  山本雅史，秋田航希，西岡寛人，谷野柊，濱崎智行，長岡史郎，鹿間共一，大平圭介，関口淳，梅本宏信，堀邊英夫
- Organizer
  第17回Cat-CVD研究会（オンライン），15
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] He/O2混合ガス中で生成したOラジカルのレジストとの反応性評価2020
- Author(s)
  山本雅史，秋田航希，長岡史郎，大平圭介，梅本宏信，堀邊英夫
- Organizer
  第81回応用物理学会秋季学術講演会（オンライン），9p-Z25-5
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] 理科室で構築する工学教育用半導体デバイス設計製作評価環境2020
- Author(s)
  長岡史郎，山本雅史，鹿間共一，清水共，ジョンストン・ロバート・ウェストン，松田和典，下川房男，堀邊英夫
- Organizer
  第67回応用物理学会春季学術講演会講演予稿集（2020上智大学四谷キャンパス） 14a-PA1-22
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] 水素ラジカルを用いたKrF/ArFレジスト用ベース樹脂の除去速度における酸素添加効果2019
- Author(s)
  山本雅史，城井智弘，長岡史郎，大平圭介，梅本宏信，堀邊英夫
- Organizer
  第16回Cat-CVD研究会（姫路），14-15（2019）
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] ffect of Oxygen Addition on Rate of Photoresist Removal Using Hydrogen Radicals Produced by a Tungsten Hot-Wire Catalyst2019
- Author(s)
  M. Yamamoto, T. Shiroi, T. Shikama, S. Nagaoka, H.Umemoto, and H. Horibe
- Organizer
  The 10th International Conference on Nanoscience and Nanotechnology 2019 (NANO-SciTech 2019)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 理科室で構築するナノテクプラットフォーム　－設備等の限られた環境下における半導体デバイスの設計製作評価を可能にする環境の構築－2019
- Author(s)
  國澤悠，山本雅史，清水共，ジョンストン・ロバート・ウェストン，堀邊英夫，下川房男，長岡史郎
- Organizer
  第20回システムインテグレーション部門講演会（高松），3B1微細構造デバイス，2226-2231（2019）
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] Geのピエゾ効果(2)2019
- Author(s)
  松田和典,長岡史郎
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A study for reducing pattern position alignment error of a simplified photo lithography method for the nanotech platform established at the average science laboratory2019
- Author(s)
  H. Kunisawa, M. Yamamoto, T. Shimizu, R. W. Johnston, F. Shimokawa, H. Horibe, M. Rusop, and S. Nagaoka
- Organizer
  The 10th International Conference on Nanoscience and Nanotechnology 2019 (NANO-SciTech 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 電子線レジストの感度曲線を用いたレジスト解像度パタンのモンテカルロシミュレーション2019
- Author(s)
  宮﨑翔，山本雅史，河田純，堀邊英夫，長岡史郎
- Organizer
  第20回システムインテグレーション部門講演会（高松），3B1微細構造デバイス，2232-2235（2019）
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] イリジウム加熱触媒体で生成した水素ラジカルを用いたレジスト除去速度と酸素添加量との関係2019
- Author(s)
  山本雅史，城井智弘，鹿間共一，長岡史郎，梅本宏信，堀邊英夫
- Organizer
  第36回国際フォトポリマーコンファレンス（千葉），B4-03（2019）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] Photoresist Removal Using Hydrogen Radicals Produced by Tantalum Hot- Wire Catalyst2018
- Author(s)
  M. Yamamoto, T. Shiroi, T. Shikama, S. Nagaoka, and H. Horibe
- Organizer
  9th International Conference on Nanoscience and Nanotechnology 2018, (Nano-SciTech2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Proposal of Totally Simplified Educational Semiconductor Device Fabrication Process under Normal Air Environment2018
- Author(s)
  S.Nagaoka,M.Yamamoto,T.Tsuji,T.Shimizu,R.W.Johnston, T. Shikama, and H.Horibe
- Organizer
  9th International Conference on Nanoscience and Nanotechnology 2018, (Nano-SciTech2018)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Products Of The Decomposition In Photoresist Removal Using Hydrogen Radicals2018
- Author(s)
  M.Yamamoto, H.Umemoto, S.Nagaoka, T.Shikama and H.Horibe
- Organizer
  The 14th Eco-Energy and Materials Science and Engineering Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Flow Rate Dependence of Resist Removal Rate Using Hydrogen Radicals2018
- Author(s)
  T. Shiroi, M. Yamamoto, T. Shikama, S. Nagaoka, and H. Horibe
- Organizer
  9th International Conference on Nanoscience and Nanotechnology 2018, (Nano-SciTech2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 酸素を微量添加した水素ラジカルを用いたKrF/ArFレジスト用ベースポリマーの除去2018
- Author(s)
  1)山本雅史，砂田拓人，滝智洋，鹿間共一，長岡史郎，梅本宏信，堀邊英夫
- Organizer
  第35回国際フォトポリマーコンファレンス（千葉）
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Oxygen Additive Effects on Decomposition Rate of Poly(vinyl phenol)-based Polymers Using Hydrogen Radicals Produced by a Tungsten Hot-wire Catalyst2018
- Author(s)
  M. Yamamoto, S. Nagaoka, K. Ohdaira, H. Umemoto, and H. Horibe
- Organizer
  10th International Conference on Hot Wire (Cat) & Initiated Chemical Vapor Deposition (HWCVD10)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Fundamental Study of Resist Pattern Resolution Control with a Resist Sensitivity Curve for Electron Beam Lithography2018
- Author(s)
  S. Nagaoka, J. Kawata, M.Yamamoto and H. Horibe
- Organizer
  The 14th Eco-Energy and Materials Science and Engineering Symposium (EMSES 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Product of the Decomposition in Photoresist Removal using Hydrogen Radicals2018
- Author(s)
  M. Yamamoto, H. Umemoto, S. Nagaoka, T. Shikama, and H. Horibe
- Organizer
  The 14th Eco-Energy and Materials Science and Engineering Symposium (EMSES 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Fundamental Study of Resist PatternResolution Control with a Resist Sensitivity Curve for Electron Beam Lithography2018
- Author(s)
  S.Nagaoka,J.Kawata,M.Yamamoto and H. Horibe
- Organizer
  The 14th Eco-Energy and Materials Science and Engineering Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A p-n Junction for the Simplified nMOS FET Fabrication using Alignment-less Lithography2017
- Author(s)
  高垣信巨，長岡史郎、辻琢人，山本雅史，R.W.Jhonston,堀邊英夫，清水共
- Organizer
  The International Seminar on Electronics Engineering and NANO Technology (ISEENT2017)
- Place of Presentation
  香川高専　詫間キャンパス，香川県
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Feasibility Study of Selective and Simultaneous Thermal Diffusions for Simplified MOS Devie Fabrication2017
- Author(s)
  長岡史郎，塩田幸輝，辻琢人，山本雅史，R.W.Johnsotn, 堀邊英夫，清水共
- Organizer
  International Conference on Nanoscience & Nanotechnology 2017（NANO-SciTech2017),
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM), Malaysia
- Year and Date
  2017-02-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Geのピエゾ効果2017
- Author(s)
  松田和典,檜原優希，長岡史郎,神田洋三
- Organizer
  応用物理学会2017年（平成29年）春季講演会
- Place of Presentation
  パシフィコ横浜，神奈川県
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Fabrication and Evaluation of the Silicon Single Crystal p-n Junction using the Sol-Gel BSG Thin Film2017
- Author(s)
  塩田幸輝，長岡史郎
- Organizer
  The International Seminar on Electronics Engineering and NANO Technology (ISEENT2017),
- Place of Presentation
  香川高専　詫間キャンパス，香川県
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 二層レジストを用いた酸素プラズマによるドライ現像2017
- Author(s)
  高垣信巨、長岡史郎、辻琢人、山本雅史、ロバート・ジョンストン、堀邊英夫、清水共
- Organizer
  第14回CAT－CVD研究会
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 二層フォトレジストのドライ現像と不純物の熱拡散プロセスへの応用2017
- Author(s)
  西園寺嶺、長岡史郎、辻琢人、山本雅史、ロバート・ジョンストン、堀邊英夫、清水共
- Organizer
  第14回CAT－CVD研究会
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A p-n Junction Study for nMOS FET Fabrication using Alignment-less Lithography2017
- Author(s)
  高垣信巨，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  NANO-SciTech2017, International Conference on Nanoscience & Nanotechnology 2017
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM),Malaysia
- Year and Date
  2017-02-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Improvement of Insulative Behavior of Perovskite Structured PbTiO3 Thin Films Prepared by Sol-gel Spin Coating Method2017
- Author(s)
  Z. Nurbaya, M.H. Wahid,　M.D. Rozana, S.A.H. Alrokayan, H.A. Khan,S. Nagaoka and M.Rusop
- Organizer
  The International Seminar on Electronics Engineering and NANO Technology (ISEENT2017)
- Place of Presentation
  香川高専　詫間キャンパス，香川県
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Si,Geの室温のおける価電子バンド変形ポテンシャル2017
- Author(s)
  松田和典、長岡史郎、神田洋三
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Highly Conductive of MEH-PPV: ZnO Nanocomposite Thin Film at Various ZnO Composition Via Spin Coating for OLEDs Applications2017
- Author(s)
  N.E.A. Azhar, S.S.Shariffudin, Salman A.H.Alrokayan, Haseeb A. Khan, S.Nagaoka, M.Rusop
- Organizer
  The International Seminar on Electronics Engineering and NANO Technology (ISEENT2017)
- Place of Presentation
  香川高専　詫間キャンパス，香川県
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Nanostructured ZnO Based MSM Gas Sensor2017
- Author(s)
  A.K. Shafura, I. Saurdi, N.D.Md Sin, U.M. Noor, M.H. Mamat,S.A.H. Alrokayan, H.A. Khan, S.Nagaoka, M. Rusop
- Organizer
  The International Seminar on Electronics Engineering and NANO Technology (ISEENT2017)
- Place of Presentation
  香川高専　詫間キャンパス，香川県
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 水素ラジカルを用いたレジスト除去における酸素添加2017
- Author(s)
  城井智弘、山本雅史、長岡史郎、梅本弘信　、大平圭介、西山聖、堀邊英夫
- Organizer
  第14回CAT－CVD研究会
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Measurement of Rate of Photoresist Removal by Hydrogen Radicals using Thin Film Interference2017
- Author(s)
  山本雅史，長岡史郎，鹿間共一，堀邊英夫，清水共
- Organizer
  NANO-SciTech2017, International Conference on Nanoscience & Nanotechnology 2017
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM), Malaysia
- Year and Date
  2017-02-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 水素ラジカルを用いたレジスト除去における除去速度の圧力依存性2017
- Author(s)
  城井智弘，山本雅史，長岡史郎，鹿間共一，梅本宏信，大平圭介，西山聖，堀邊英夫
- Organizer
  第64回応用物理学会春季学術講演会（東京）
- Place of Presentation
  パシフィコ横浜，神奈川県
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Fundamental Study of the Fabrication Process for the Micro Alloy Silicon Transistor Using Silicon Anisotropic Etching2017
- Author(s)
  真鍋海，長岡史郎，塩田幸輝, 下川房男
- Organizer
  The International Seminar on Electronics Engineering and NANO Technology (ISEENT2017)
- Place of Presentation
  香川高専　詫間キャンパス，香川県
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Boron Selective Thermal Impurity Diffusion Method that Support a Simplified pMOS FET Fabrication Process2017
- Author(s)
  西園寺嶺，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  NANO-SciTech2017, International Conference on Nanoscience & Nanotechnology 2017
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM),Malaysia
- Year and Date
  2017-02-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Boron Selective Thermal Diffusion for the Simplified pMOS FET Fabrication Process2017
- Author(s)
  西園寺嶺，長岡史郎、辻琢人，山本雅史，R.W.Jhonston,堀邊英夫，清水共
- Organizer
  The International Seminar on Electronics Engineering and NANO Technology (ISEENT2017)
- Place of Presentation
  香川高専　詫間キャンパス，香川県
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 水素ラジカルを用いたレジスト除去における酸素添加の効果2016
- Author(s)
  山本雅史,梅本宏信,大平圭介,鹿間恭一,長岡史郎,西山聖,堀邊英夫
- Organizer
  2016年度応用物理学会中四国支部若手半導体研究会
- Place of Presentation
  加計学園前島研修所, 岡山県
- Year and Date
  2016-07-29
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 理科室で実現するナノテクプラットフォームと技術開発教育への応用2016
- Author(s)
  長岡史郎
- Organizer
  産業技術振興会シーズ発表会
- Place of Presentation
  リーガホテルゼスト高松, 香川県
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 窒化シリコン薄膜を用いた超微細デバイス用基板の作製～電子線リソグラフィの高解像度化とその応用～2016
- Author(s)
  長岡史郎
- Organizer
  文部科学省ナノテクノロジープラットフォーム事業微細加工プラットフォーム第２回広島大学・山口大学・香川大学・ＦＡＩＳ合同シンポジウム
- Place of Presentation
  山口大学　常盤キャンパス, 山口県
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Study of the Simplified IC FAB for the Science and Technical Education2016
- Author(s)
  高垣信巨，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  the 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
- Place of Presentation
  Vocational College Universitas Gadjah MADA, Indonesia
- Year and Date
  2016-10-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A feasibility study of the selective and simultaneous thermal impurity diffusion process on the silicon substrate2016
- Author(s)
  西園寺嶺，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  The 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
- Place of Presentation
  Vocational College Universitas Gadjah MADA, Indonesia
- Year and Date
  2016-10-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Graphical Representation and Origin of Piezoresistance Effect in Germanium2016
- Author(s)
  松田和典,長岡史郎,神田洋三
- Organizer
  The 33rd International conference on the Physics of semiconductors (ICPS2016)
- Place of Presentation
  Beijing International Convention Center, ：People's Republic of China
- Year and Date
  2016-07-31
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A proposal of the Simplified IC Fab Establishied in the Average Science Laboratory for Cultivating Scientific Mind2016
- Author(s)
  長岡史郎，辻琢人，鹿間共一，山本雅史，R.W.Johnsotn，清水共
- Organizer
  The 10th International Symposium on Advances in Technology Education
- Place of Presentation
  School of Engineering, TOHOKU University, Miyagi Japan
- Year and Date
  2016-09-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992

1. Yamamoto Masashi (60733821)

# of Collaborated Projects: 3 results

# of Collaborated Products: 53 results
2. 堀邊英夫 (00372243)

# of Collaborated Projects: 3 results

# of Collaborated Products: 43 results
3. MATSUDA Kazunori (10192337)

# of Collaborated Projects: 2 results

# of Collaborated Products: 16 results
4. 清水共 (40455168)

# of Collaborated Projects: 2 results

# of Collaborated Products: 18 results
5. JOHNSTON ROBERT (60743698)

# of Collaborated Projects: 2 results

# of Collaborated Products: 17 results
6. 鹿間共一 (70206069)

# of Collaborated Projects: 2 results

# of Collaborated Products: 44 results
7. MORI Kazunori (60353330)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. MINAMI Takayuki (80190700)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. HIGASHIDA Yoji (20381014)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. MURAKAMI Jyunichi (70200269)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. ONO Akira (40290811)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 高吉清文 (00179566)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 下川房男 (90580598)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
14. 筒井一生 (60188589)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results

Nagaoka Shiro 長岡 史郎

NAGAOKA Shiro 長岡 史郎

Research Projects

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Co-Researchers

Semiconductor device foundry achieved at a nanotech platform established on an average science lab.Principal Investigator

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Piezoresistance Effects of p-type Ge

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Elucidation of the effect of a trace amount of oxygen addition on the decomposition and removal of polymer materials using hydrogen radicals

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A nanotechnology platform established in average science laboratoriesPrincipal Investigator

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The Development of an English Learning Video for Science and Engineering Education, and the Study of its Application

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[Journal Article] Effects of Hydrogen Radical Treatment on Piezoresistance Coefficients of Germanium2023

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[Journal Article] Removal of Novolac Photoresist with Various Concentrations of Photo-active Compound Using H<sub>2</sub>/O<sub>2</sub> Mixtures Activated on a Tungsten Hot-wire Catalyst2021

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[Journal Article] Nanotech Platoform Established for Average Technical Education Science laboratories2021

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[Journal Article] Evaluation of Decomposition Property of Photoresist by Oxygen Radicals Using Helium-Oxygen Mixtures2020

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[Journal Article] Effects of Nitrogen Dilution on the Photoresist Removal Rate by Hydrogen Radicals2020

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[Journal Article] Relationship between Oxygen Additive Amount and Photoresist Removal Rate Using H Radicals Generated on an Iridium Hot-Wire Catalyst2019

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Nagaoka Shiro 長岡史郎

NAGAOKA Shiro 長岡史郎