KIYONO Satoshi 清野慧

… Alternative Names

清野〓キヨノサトシ

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Researcher Number	40005468
External Links
Affiliation (based on the past Project Information) *help	2006: Tohoku University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授 1997 – 2005: Tohoku University, Department of Mechatronics, Professor, 大学院・工学研究科, 教授 1993 – 1996: 東北大学, 工学部, 教授 1988 – 1991: 東北大学, 工学部, 助教授 1986: Associate prof., Faculty of Eng., Tohoku Univ., 工学部, 助教授
Review Section/Research Field	Principal Investigator 機械工作・生産工学 / 機械工作 / 設計工学・機械要素・トライボロジー / Intelligent mechanics/Mechanical systems / 機械要素 / Production engineering/Processing studies Except Principal Investigator 機械工作 / Production engineering/Processing studies / 設計工学・機械要素・トライボロジー / Intelligent mechanics/Mechanical systems
Keywords	Principal Investigator accuracy / 精度 / 自律校正 / angle grid / sensor / 高速工具サーボ / 角度格子 / センサ / 角度情報 / 多自由度 … More / 位置姿勢検出 / self-calibration / 基準 / 形状 / autonomous / metrology / 自律 / 校正 / Precision measurement / 精密測定 / 形状測定 / ポリゴン鏡 / 計測 / Chain of Triangles for sampling points / 2-Points Method / Precision Lovel / Flatness / Straightness / Precision Measurement / ディジタルフィルタ / 3角形連鎖法 / 2点法 / 精密水準器 / 平面度 / 真直度 / closed-loop control / slope / multi-degee-of-freedom / surface motor / position measurement / 制御 / エンコーダ / 他自由度 / 高精度化 / クローズドループ制御 / サーフェスモータ / scanning laser beam / angle information / multi degrees of freedom / position and attitude detection / 光走査 / zero-adjustment error / three-probe method / probe / linear collider / long cylinder / straightness / 3点法 / 加速器 / 母線 / 円筒 / 測定 / reference / absolute / displacement / profile / in situ / サブナノメートル / 絶対 / 変位 / その場 / lapping pat / PZT actuator / actuator / lever / profile generation / machining / 砥粒 / 圧電アクチュエータ / 弾性レバ- / 圧力転写加工 / 形状創成 / 加工 / Absolute calibration / Critical angle / Self-calibration / Calibration / Angle sensor / 絶対校正 / 臨界角 / 角度センサ / Transmission error of gears / High speed shaft / Optical operation / Differential measurement / Autocollimator / Polygon mirror / Synchronism error / 半導体レ-ザ / 精密回転軸 / 歯車のかみ合い誤差 / 高速回転軸 / 歯車のかみ合いの誤差 / 光学的演算 / 差動測定 / オ-トコリメ-ション / 回転同期誤差 / レンズアクチュエータ / 傾斜補正 / 走査基準 / 光スキッド / 光触針 / 非接触測定 / 粗さ / 精密切削加工 / 駆動機構 / マイクロパターン / リニアモータ / モータ / 自動校正 / 回転円盤 / 分割誤差 / 角度基準 … More Except Principal Investigator On Machine Measurement / Precision Measurement / Mirror Shape / Differential Measurement / Autocollimation / Laser Diode / レーザオートコリメーション / 迅速測定 / 走査基準 / 精密測定 / 鏡面 / オンマシン測定 / 差動測定 / 走査型測定 / 鏡面形状 / オ-トコリメ-ション / 半導体位置検出素子 / 半導体レ-ザ / fast tool servo / Force sensor / Stiffness / measurement force / Three-dimensional / Micro-structured surface / Nanofabrication / Nanometrology / 力センサ / 誤差 / 剛性 / 測定力 / 3次元 / 微細形状 / ナノ加工 / ナノ計測 / Active vibration control / Crystalline lattice / Virtual CMM / Miniature robot / Optical probe / Coordinate metrology / Software datum / Nanometer metrology / 微動テーブル / 超小型自走機械 / ナノCMM / 自律校正 / 能動制振 / 結晶格子 / 仮想三次元測定機 / 超小型精密自走機械 / 光プローブ / 座標計測 / ナノメートル計測 / ソフトウェアデータム / 角度センサ / マルチビーム / バルーン型プローブ / フォトダイオード / 硬さセンサ / マイクロセンサ / 生体内異物 / 触診 / 癌 / ドリフトの除去 / 走査範囲の拡大 / あらさ形状 / スキッド式 / 原子間力顕微鏡(AFM) / 走査型トンネル顕微鏡(STM) / He-Neレ-ザ / PSD(半導体位置検出素子) / 不変光路長 / 光学測定 / ステ-ジの移動精度 / ピッチ角とヨ-角 / 移動真直度 Less

プロービング用マイクロモータのための新原理モータのフィジビリティテストPrincipal Investigator
- Principal Investigator
  
  清野慧
- Project Period (FY)
  2004
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
High-accuracy Fabrication of Large Area Micro-Structured Metrology Surface by a Nano-Machining Probe with Surface Profile Measurement Function
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
マイクロ角度センサアレイを用いた微小癌触診用小型硬さ分布測定プローブの開発
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tohoku University
Development of a surface encoder for next generation three-axis precision stagesPrincipal Investigator
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  2002 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tohoku University
A new method of position and attitude detection based on an angle sensorPrincipal Investigator
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tohoku University
Straightness Measurement of Long Cylinder for Construction of Linear ColliderPrincipal Investigator
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  TOHOKU UNIVERSITY
Development of Absolute Self-Calibration Systems for Displacement and Profile Measuring Instruments with Subnanometric AccuracyPrincipal Investigator
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Tohoku University
ポリゴン鏡角度形状の超精密測定用差動プローブの試作研究Principal Investigator
- Principal Investigator
  
  清野慧
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Tohoku University
Study on Advanced Coordinate Metrology
- Principal Investigator
  
  SHIMOKOHBE Akira
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Tokyo Institute of Technology
Basic Study on Ultra-Precision Self-Profile-GenerationPrincipal Investigator
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tohoku University
Ultra-Precision Angle Sensor Using Critical Prisms and Its Self-Calibration SystemPrincipal Investigator
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tohoku University
あらさ測定のためのスキッド式STMとAFMの研究
- Principal Investigator
  
  鎌田治
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  Tohoku University
Precision Measuring System for the Error of Synchronism of Two Rotating ShaftsPrincipal Investigator
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1990 – 1991
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  機械要素
- Research Institution
  Tohoku University
高速走り真直度の光学的評価法
- Principal Investigator
  
  KAMADA Osamu
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  Tohoku University
粗さ測定における対象の多様化と測定の迅速化のための光スキッド法に関する研究Principal Investigator
- Principal Investigator
  
  清野〓
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  Tohoku University
Development of a Differential Laser Autocollimation Probe for precision measurement of mirror shapes
- Principal Investigator
  
  KAMADA Osamu
- Project Period (FY)
  1988 – 1989
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research
- Research Field
  
  機械工作
- Research Institution
  TOHOKU UNIVERSITY
Research of a fast and accurate measuring method for guide planes of ultra precision machinePrincipal Investigator
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1985 – 1986
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  TOHOKU UNIVERSITY

All 2006 2005 2004

All Journal Article Patent

[Journal Article] Dual正弦波格子型サーフェスエンコーダに関する研究2006
- Author(s)
  高偉, 鶴見直也, 渡辺陽司, 木村彰秀, 清野慧
- Journal Title
  
  精密工学会誌 72・3
  
  Pages: 382-386
- NAID
  130004655856
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] On-machine measurement of a cylindrical surface with sinusoidal micro-structures by an optical slope sensor2006
- Author(s)
  W.Gao, M.Tano, S.Sato, S.Kiyono
- Journal Title
  
  Precision Engineering 30(印刷中)
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Precision measurement and decoupled control of a planar motion stage2006
- Author(s)
  Song Yi Dian, Wei Gao, Katsutoshi Horie, Satoshi Kiyono
- Journal Title
  
  Journal of CSME Vol.27, No.5
  
  Pages: 567-574
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Sawyer型平面モータの精密位置決めに関する研究-位置決めシステムの提案と微小位置決め実験-2005
- Author(s)
  高偉, 田野誠, 清野慧, 冨田良幸, 佐々木卓也
- Journal Title
  
  精密工学会誌 (印刷中)
- NAID
  110001824158
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning2005
- Author(s)
  Shuichi DEJIMA, Wei GAO, Kei KATAKURA, Satoshi KIYONO
- Journal Title
  
  Precision Engineering (印刷中)
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] 光干渉型サーフェスエンコーダに関する研究2005
- Author(s)
  渡辺陽司, 高偉, 清水浩貴, 清野慧
- Journal Title
  
  精密工学会誌 71・8
  
  Pages: 1051-1055
- NAID
  10016679183
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Development of a nanomachining probe with nanometrology function -On-machine nanometrology experiment by the probe -2005
- Author(s)
  Wei Gao, Yasuto Kud, Satoshi Kiyono
- Journal Title
  
  Proceedings of the JSPE Spring Meeting(in Japanese)
  
  Pages: 1293-1294
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] 形状測定機能を持つナノ加工プローブに関する研究-機上形状計測加工実験-2005
- Author(s)
  工藤康人, 高偉, 清野慧
- Journal Title
  
  精密工学会春季大会講演論文集
  
  Pages: 1293-1294
- NAID
  130004657913
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Precision Positioning of a Five Degree-of-Freedom Planar Motion Stage2005
- Author(s)
  Shuichi Dejima, Wei Gao, Hiroki Shimizu, Satoshi Kiyono, Yoshiyuki Tomita
- Journal Title
  
  Mechatronics 15・8
  
  Pages: 969-987
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] 高速工具サーボによる大面積正弦波微細格子基準面の高精度創成2005
- Author(s)
  田野誠, 高偉, 荒木武, 清野慧
- Journal Title
  
  日本機械学会論文集(C) 71・712
  
  Pages: 3602-3607
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] 形状測定機能を持つナノ加工プローブの研究-加工プローブにおける加工評価実験-2004
- Author(s)
  高偉, 工藤康人, 清野慧
- Journal Title
  
  日本機械学会年次大会講演論文集
  
  Pages: 317-318
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] A Hybrid Nano-Probe for Precision Nanofabrication of Complex Surfaces2004
- Author(s)
  W.Gao, S.Genda, Y.Kudo, S.Kiyono, J.Patten
- Journal Title
  
  Proceedings of 8th International Conference on Control, Automation, Robotics and Vision
  
  Pages: 173-177
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Fabrication and Measurement of a cylinder surface with sinusoidal micro-structures2004
- Author(s)
  Makoto TANO, Shinji SATO, Wei GAO, Satoshi KIYONO
- Journal Title
  
  Proc.of the 1st Int.Conf.on Positioning Technology
  
  Pages: 327-328
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Surface Motor-Driven Planar Motion Stage Integrated with an XYθ_Z A Surface Encoder for Precision Positioning2004
- Author(s)
  Wei Gao, Shuichi Dejima, Hiroaki Yanai, Kei Katakura, Satoshi Kiyono, Yoshiyuki Tomita
- Journal Title
  
  Precision Engineering 28・3
  
  Pages: 329-337
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Development of a nanomachining probe with nanometrology function -Nanomachining experiment by the probe -2004
- Author(s)
  Wei Gao, Yasuto Kud, Satoshi Kiyono
- Journal Title
  
  Proceedings of the JSME Annual Meeting(in Japanese)
  
  Pages: 317-318
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Fabrication of a Multi-cell Photodiode for a MDOF Surface Encoder2004
- Author(s)
  Y.Watanabe, W.Gao, H.Shimizu, S.Kiyono
- Journal Title
  
  Proceedings of the 2nd International Symposium on Nanomanufacturing
  
  Pages: 591-595
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Controller Design and Adjustment for a Three DOF Planar Motion2004
- Author(s)
  Shuichi Dejima, Wei Gao, Kei Katakura, Satoshi Kiyono, Yoshiyuki Tomita
- Journal Title
  
  Proc.of the 1st Int.Conf.on Positioning Technology
  
  Pages: 343-344
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Design of a nanomachining probe with nanometrology function2004
- Author(s)
  Wei Gao, Yasuto Kudo, Satoshi Kiyono, John A Patten
- Journal Title
  
  Proceedings of First International Symposium on Standard Materials And Metrology for Nanotechnology
  
  Pages: 110-113
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Evaluation of an Instrument for Nanomachining and Nanometrology2004
- Author(s)
  Wei Gao, Yasuto Kudo, Satoshi Kiyono, John Patten
- Journal Title
  
  Proceedings of The 2nd International Symposium on Precision Mechanical Measurements (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Design of a nanomachining probe with nanometrology function2004
- Author(s)
  Wei Gao, Yasuto Kudo, Satoshi Kiyono, John A Patten
- Journal Title
  
  Proceedings First International Symposium on Standard Materials And Metrology for Nanotechnology
  
  Pages: 110-113
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Evaluation of an Instrument for Nanomachining and Nanometrology2004
- Author(s)
  Wei Gao, Yasuto Kudo, Satoshi Kiyono, John Patten
- Journal Title
  
  The 2nd International Symposium on Precision Mechanical Measurements (CD-ROM)
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] A Hybrid Nano-Probe for Precision Nanofabrication of Complex Surfaces2004
- Author(s)
  W.Gao, S.Genda, Y.Kudo, S.Kiyono, J.Patten
- Journal Title
  
  8th International Conference on Control, Automation, Robotics and Vision
  
  Pages: 173-177
- Data Source
  KAKENHI-PROJECT-15360063
[Patent] 計測加工一体型装置2004
- Inventor(s)
  高偉, 清野慧
- Industrial Property Rights Holder
  株式会社東北テクノアーチ
- Industrial Property Number
  2004-349434
- Filing Date
  2004-12-02
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Patent] ステージ装置2004
- Inventor(s)
  高偉, 清野慧, 富田良幸, 田野誠
- Industrial Property Rights Holder
  (株)東北テクノアーチ
- Filing Date
  2004-03-19
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Patent] 検出装置及びステージ装置2004
- Inventor(s)
  高偉, 清野慧, 富田良幸, 渡辺陽司
- Industrial Property Rights Holder
  (株)東北テクノアーチ
- Filing Date
  2004-04-27
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Patent] 検出装置2004
- Inventor(s)
  清野慧, 渡辺陽司, 高偉, 清水浩貴
- Industrial Property Rights Holder
  (株)東北テクノアーチ
- Filing Date
  2004-05-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Patent] 検出装置及びステージ装置2004
- Inventor(s)
  高偉, 清野慧, 渡辺陽司, 富田良幸, 牧野健一, 平田徹
- Industrial Property Rights Holder
  (株)東北テクノアーチ
- Filing Date
  2004-06-29
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017

1. GAO Wei (70270816)

# of Collaborated Projects: 7 results

# of Collaborated Products: 22 results
2. ARAKAWA Akira (60184264)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
3. SHIMIZU Hiroki (50323043)

# of Collaborated Projects: 4 results

# of Collaborated Products: 3 results
4. ZHANG Shizhou (30282099)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
5. KAMADA Osamu (00006131)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
6. YAMANAKA Masashi (20292229)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
7. 青木純 (40374954)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. UDA Yutaka

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
9. SHIMOKOHBE Akira (40016796)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. TAKAMASU Kiyoshi (70154896)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. MIYOSHI Takashi (00002048)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. TAKADA Koji (80126474)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. OZONO Shigeo (10010878)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. KURIYAGAWA Tsunemoto (90170092)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. ISAWA Yoshiaki (00143016)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. HITOMI Nobuteru (30300669)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. HIGASHI Yashuo (70208742)

# of Collaborated Projects: 1 results

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18. JU Bingfeng (10431529)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. 佐藤松雄 (00006149)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. 林玉地 (90270818)

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# of Collaborated Products: 0 results
21. 松本健郎 (30209639)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. 田牧純一 (30005516)

# of Collaborated Projects: 1 results

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23. MARUYAMA Noboru

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. KOIZUMI Susumu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. TOYAMA Taizo

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. OKAZAKI Yuichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. SATOH Eiich

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
28. 高津宣夫

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. 単学伝

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
30. SHAN Xuechan

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

KIYONO Satoshi 清野 慧

清野 〓 キヨノ サトシ

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プロービング用マイクロモータのための新原理モータのフィジビリティテストPrincipal Investigator

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High-accuracy Fabrication of Large Area Micro-Structured Metrology Surface by a Nano-Machining Probe with Surface Profile Measurement Function

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マイクロ角度センサアレイを用いた微小癌触診用小型硬さ分布測定プローブの開発

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Development of a surface encoder for next generation three-axis precision stagesPrincipal Investigator

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A new method of position and attitude detection based on an angle sensorPrincipal Investigator

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Straightness Measurement of Long Cylinder for Construction of Linear ColliderPrincipal Investigator

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Development of Absolute Self-Calibration Systems for Displacement and Profile Measuring Instruments with Subnanometric AccuracyPrincipal Investigator

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ポリゴン鏡角度形状の超精密測定用差動プローブの試作研究Principal Investigator

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Study on Advanced Coordinate Metrology

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Basic Study on Ultra-Precision Self-Profile-GenerationPrincipal Investigator

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Ultra-Precision Angle Sensor Using Critical Prisms and Its Self-Calibration SystemPrincipal Investigator

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あらさ測定のためのスキッド式STMとAFMの研究

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Precision Measuring System for the Error of Synchronism of Two Rotating ShaftsPrincipal Investigator

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KIYONO Satoshi 清野慧

清野〓キヨノサトシ