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SHIMOKOHBE Akira  下河辺 明

ORCIDConnect your ORCID iD *help
… Alternative Names

下河邉 明  シモコウベ アキラ

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Researcher Number 40016796
External Links
Affiliation (based on the past Project Information) *help 1993 – 2006: 東京工業大学, 精密工学研究所, 教授
1999: 東京工業大学, 精密工業研究所, 教授
1989 – 1991: Department of Mechanical Engineering for Production, Faculty of Engineering, Tokyo Institute of Technology, Professor, 工学部・生産機械工学科, 教授
1987 – 1988: 東京工業大学, 精密工学研究所, 助教授
Review Section/Research Field
Principal Investigator
機械工作・生産工学 / 設計工学・機械要素・トライボロジー / 機械工作 / Production engineering/Processing studies / 機械要素 / Intelligent mechanics/Mechanical systems
Except Principal Investigator
Design engineering/Machine functional elements/Tribology / Biomedical engineering/Biological material science / Intelligent mechanics/Mechanical systems / 設計工学・機械要素・トライボロジー / 機械工作・生産工学 / 電子デバイス・機器工学 / Physical properties of metals
Keywords
Principal Investigator
MEMS / 金属ガラス / アモルファス / 微細加工 / 磁気軸受 / 圧電素子 / 能動制振 / 薄膜 / 物性 / 空気ねじ … More / Repetitive Control / Magnetic Bearing / 回転精度 / 繰り返し制御 / ファジイ制御 / 最適制御 / 位置決め / Mechatronics / Piezoelectric actuator / 能動化 / メカトロニクス / 超精密機構 / 超精密位置決め / 空気軸受 / プローブ / Ultra Precise Mechanism / Piezoelectric Actuator / Ultra Precise Positioning / Active Damping / Controlled Bearing / Air Bearing / Arc plasma / Physical properties / Micro actuator / Metallic glass / Amorphous / Thin film / Micro fabication / アークプラズマ / マイクロアクチュエータ / genetic algorithm / rotational accuracy / magnetic bearing / micro-actuator / light enhanced magnetization / precision positioning / nanometer / motion control / 磁気形状記憶 / 磁気軸 / GaAs-Fe / サブナノモーション / GA / マイクロアクチュータ / 光誘起磁性 / ナノメートル / 精密位置決め / モーションコントロール / optical pickup / information instruments / electrostatic actuator / metallic glass / amorphous / thin film / micromachining / 抵抗率 / Sensorless control / Micro Dynamics / Robust Control / Redundant mechanism / Nano-meter positioning / Motion Dynamics / 波動歯車 / ニューロ制御 / 電磁石 / 電磁アクチュエータ / 制御 / 冗長メカニズム / ダイナミクス / ナノモーション / AXIAL FORCE / STIFFNESS / NON-CONTACT / POSITIONING / PERMANENT MAGNET / MAGNETIC LEAD SCREW / 有限要素法 / 軸方向剛性 / 螺旋着磁 / 偏心 / 剛性 / 永久磁石 / 磁気ねじ / Gear / Coordinate Measuring Machine / Production / Design / トランスミッション / 校正 / 三次元測定器 / 歯車 / 三次元測定機 / 生産 / 設計 / Positioning Accuracy / Rotational Accuracy / Profile Error / Optimal Control / モデルの同定 / 静電容量型変位計 / 位置決め精度 / 形状誤差 / Active vibration control / Crystalline lattice / Virtual CMM / Miniature robot / Optical probe / Coordinate metrology / Software datum / Nanometer metrology / 微動テーブル / 超小型自走機械 / ナノCMM / 自律校正 / 結晶格子 / 仮想三次元測定機 / 超小型精密自走機械 / 光プローブ / 座標計測 / ナノメートル計測 / ソフトウェアデータム / Ball screw / Coarse and fine positioning mechanism / Optimal control / neural network control / Fuzzy control / PID control / Positioning / ヒステリシス特性 / ばね特性 / 電磁モータ / 転がり案内 / 位置決め分解能の評価 / 位置決め分解能 / フィルタリング / ボールねじ / 粗微動機構 / ニューラルネットワーク制御 / ファジィ制御 / PID制御 / Measurement of absolute distance / Measurement of displacement / Measurement of surface roughness / Laser heterodyne interferometer / Selfoc lens / Optical fiber coupler / Laser diode / Non contact sensor / 応答速度 / 光アイソレータ / ヘテロダイン干渉 / 周波数変調 / 絶対距離測定 / 表面粗さ測定 / 変位測定 / ヘテロダイン干渉計 / セルフォックレンズ / 光ファイバカプラ / レーザダイオード / 非接触センサ / Precision mechanisms / positioning / Active damping / Active bearing / Air bearing / 能動空気軸受 / 三次元座標測定 / 多重位相差 / 伝達時間 / 三角測量法 / 超音波 / プロセス / マイクロミラー / 薄膜金属ガラス / マイクロブロー成型 / マイクロ成型 / 光学 / ひずみ / 引張り / 半導体レーザ / 温度測定 / レーザフォーミング … More
Except Principal Investigator
磁気軸受 / MEMS / Magnetic Bearing / 金属ガラス / アモルファス / 薄膜 / 微細加工 / Blood Pump / Hemolysis / Centrifugal Pump / Artificial Heart / 血液ポンプ / 溶血 / 遠心ポンプ / 人工心臓 / Optical Scattering / Blood Cell Biomechanics / Flow Visualization / Computational Fluid Dynamics / Hydrodynamic Levitated Centrifugal Blood Pump / Magnetic levitated Centrifugal Blood Pump / Total Artificial Heart / Pulsatile Ventricular Assist Device / オーダーメード人工心臓 / 抗血栓性 / ナノ表面修飾 / CFD数値解析 / 補助人工心臓(VAD) / 全置換型人工心臓(TAH) / 連続流血液ポンプ / 動圧軸受け / 磁気軸受け / 補助人工心臓 / 耐久試験 / 電気機械カプリング / 数値流体解析 / ナノテクノロジー / 経皮エネルギー伝送 / マイクロプロセッサ / 解剖学的適合性 / 光散乱 / 血球バイオメカニクス / 流れの可視化 / 数値流体解析(CFD) / 動圧軸受心血液ポンプ / 磁気浮上遠心血液ポンプ / 全置換型人工心臓 / 拍動流補助人工心臓 / optical pickup / information instruments / electrostatic actuator / metallic glass / amorphous / thin film / micromachining / 物性 / 情報機 / 光磁気ディスク / 光ピックアップ / 情報機器 / 静電アクチュエータ / Runout / Repetitive Control / Precision Positioning / Rotational accuracy / ナノメートル / 真円度 / 位置決め精度 / 静電容量型変位計 / バイアス電流 / 繰り返し制御 / 回転精度 / Measurement / Microfabrication / Surface Structure / High Vacuum / Miniature Robot / 電子デバイス / 測定 / 加工 / 表面微細構造 / 超高真空 / 超小型自走機械 / 微細梁 / 光誘起磁化 / GaAs / 偏光 / スピントロニクス / 光誘起磁性体 / マイクロアクチュエータ / 受動部品 / オンチップ / インダクタ / シリコン / 集積回路 / TTT曲線 / 過冷却液体域 / レーザフォーミング / マイクロマイン / 半導体レーザー / マイクロマシン / ニューロトランジスタ / 光集積回路 / 光インターコネクト / 並列光情報処理 / 微小光学 / 光通信 / 半導体レーザ Less
  • Research Projects

    (25 results)
  • Research Products

    (110 results)
  • Co-Researchers

    (46 People)
  •  Centrifugal type artificial heart of high durability using a magnetic bearing

    • Principal Investigator
      SHINSHI Tadahiko
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Design engineering/Machine functional elements/Tribology
    • Research Institution
      Tokyo Institute of Technology
  •  光・磁気駆動型マイクロアクチュエータの基礎研究

    • Principal Investigator
      進士 忠彦
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Design engineering/Machine functional elements/Tribology
    • Research Institution
      Tokyo Institute of Technology
  •  Research on thin film metallic glasses as MEMS material and those three dimensional fabrication methodsPrincipal Investigator

    • Principal Investigator
      SHIMOKOHBE Akira
    • Project Period (FY)
      2003 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Tokyo Institute of Technology
  •  薄膜ガラス材料を用いたOpt-MEMSPrincipal Investigator

    • Principal Investigator
      下河辺 明
    • Project Period (FY)
      2002
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      Tokyo Institute of Technology
  •  マイクロメカニクス技術を用いたGHz帯可変インダクタの開発

    • Principal Investigator
      益 一哉
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      Tokyo Institute of Technology
  •  Comprehensive Basic Research for Development of Advanced, Innovative Permanent Artificial Heart Systems

    • Principal Investigator
      TAKATANI Setsuo
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Biomedical engineering/Biological material science
    • Research Institution
      Tokyo Medical and Dental University
  •  バルク金属ガラスの高精度微細成形Principal Investigator

    • Principal Investigator
      下河辺 明
    • Project Period (FY)
      2001
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      機械工作・生産工学
    • Research Institution
      Tokyo Institute of Technology
  •  Research of sub-nano motion mechanismPrincipal Investigator

    • Principal Investigator
      SHIMOKOHBE Akira
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Tokyo Institute of Technology
  •  Study and prototype fabrication of out of plane microactuator

    • Principal Investigator
      HATA Seiichi
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      Tokyo Institute of Technology
  •  レーザマイクロフォーミングによる金属ガラス薄膜微小構造物の形状制御Principal Investigator

    • Principal Investigator
      下河辺 明
    • Project Period (FY)
      2000
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      機械工作・生産工学
    • Research Institution
      Tokyo Institute of Technology
  •  薄膜金属ガラスの研究

    • Principal Investigator
      秦 誠一
    • Project Period (FY)
      2000
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Physical properties of metals
    • Research Institution
      Tokyo Institute of Technology
  •  Three dimensional micro forming of thin film metallic glass cantilevers and its application for micro probesPrincipal Investigator

    • Principal Investigator
      SHIMOKOHBE Akira
    • Project Period (FY)
      2000 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Tokyo Institute of Technology
  •  Precision Magnetic Bearing with Nanometer Rotational Accuracy

    • Principal Investigator
      SHINSHI Tadahiko
    • Project Period (FY)
      1999 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      設計工学・機械要素・トライボロジー
    • Research Institution
      Tokyo Institute of Technology
  •  Dynamics and Control of Nano-Motion MechanismsPrincipal Investigator

    • Principal Investigator
      SHIMOKOHBE Akira
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (A).
    • Research Field
      機械工作・生産工学
    • Research Institution
      Tokyo Institute of Technology
  •  Advanced Design and Production EngineeringPrincipal Investigator

    • Principal Investigator
      SHIMOKOHBE Akira
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for international Scientific Research
    • Research Field
      機械工作・生産工学
    • Research Institution
      Tokyo Institute of Technology
  •  Prototyping for High Stiffness Magnetic Lead ScrewPrincipal Investigator

    • Principal Investigator
      SHIMOKOUHBE Akira
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      設計工学・機械要素・トライボロジー
    • Research Institution
      TOKYO INSTITUTE OF TECHNOLOGY
  •  超並列光エレクトロニクス

    • Principal Investigator
      伊賀 健一
    • Project Period (FY)
      1995 – 2000
    • Research Category
      Grant-in-Aid for COE Research
    • Research Institution
      Tokyo Institute of Technology
  •  Study on Advanced Coordinate MetrologyPrincipal Investigator

    • Principal Investigator
      SHIMOKOHBE Akira
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      設計工学・機械要素・トライボロジー
    • Research Institution
      Tokyo Institute of Technology
  •  Trial Study of Ultra-Precision Magnetic BearingPrincipal Investigator

    • Principal Investigator
      SHIMOKOHBE Akira
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      設計工学・機械要素・トライボロジー
    • Research Institution
      Tokyo Institute of Technology
  •  Study on Measurement and Control of Dynamic Behavior of Subnano-mechanismPrincipal Investigator

    • Principal Investigator
      SHIMOKOHBE Akira
    • Project Period (FY)
      1994 – 1995
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      設計工学・機械要素・トライボロジー
    • Research Institution
      Tokyo Institute of Technology
  •  Development of Microfabrication and Measurement System by Multiple Miniature Robots with Micro Tools in High Vacuum Chamber

    • Principal Investigator
      AOYAMA Hisayuki
    • Project Period (FY)
      1994 – 1995
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      SHIZUOKA UNIVERSITY
  •  Development of In-process Optical Sensor for Ultra Precision MachiningPrincipal Investigator

    • Principal Investigator
      SHIMOKOHBE Akira
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Tokyo Institute of Technology
  •  Active Air Rotary BearingPrincipal Investigator

    • Principal Investigator
      SHIMOKOHBE Akira
    • Project Period (FY)
      1990 – 1991
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      機械工作
    • Research Institution
      Tokyo Institute of Technology
  •  An Active Air BearingPrincipal Investigator

    • Principal Investigator
      SHIMOKOHBE Akira
    • Project Period (FY)
      1988 – 1989
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      機械工作
    • Research Institution
      Tokyo Institute of Technology
  •  空間運動精度の測定法に関する研究Principal Investigator

    • Principal Investigator
      下河辺 明
    • Project Period (FY)
      1987
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      機械要素
    • Research Institution
      Tokyo Institute of Technology

All 2007 2006 2005 2004 2003 Other

All Journal Article Patent

  • [Journal Article] Dynamic Characteristics of a Magnetically-Levitated Impeller in a Centrifugal Blood Pump2007

    • Author(s)
      Junichi Asama, Tadahiko Shinshi, Hideo Hoshi, Setsuo Takatani, Akira Shimokohbe
    • Journal Title

      Artificial Organs 31, 4

      Pages: 301-311

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17360070
  • [Journal Article] Dynamic Characteristics of a Magnetically-Levitated Impeller in a Centrifugal Blood Pump2007

    • Author(s)
      Junichi Asama, Tadahiko Shinshi, Hideo Hoshi, Setsuo Takatani, Akira Shimokohbe
    • Journal Title

      Artificial Organs 31,4

      Pages: 301-311

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17360070
  • [Journal Article] Combinatorial Arc Plasma Deposition of Thin Films2006

    • Author(s)
      Seiichi HATA, Ryusuke YAMAUCHI, Junpei SAKURAI, Akira SHIMOKOHBE
    • Journal Title

      Jpn.J.Appl.Phys. 45・4A

    • NAID

      40007227498

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Detection of Left ventricular function from the Mag-Lev impeller behavior2006

    • Author(s)
      Hoshi H, Asama J, Shinshi T, Shimokohbe A, Takatani S
    • Journal Title

      Artif Organs 30(5)

      Pages: 324-338

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14208103
  • [Journal Article] マイクロ磁気軸受モータの研究2006

    • Author(s)
      黒木次郎, 進士忠彦, 李 黎川, 下河辺明
    • Journal Title

      精密工学会誌 72,5

      Pages: 662-667

    • NAID

      110004717819

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17360070
  • [Journal Article] A compact, high-efficiency and low hemolytic centrifugal blood pump with a magnetically levitated impeller2006

    • Author(s)
      J.Asama, T.Shinshi, H.Hoshi, S.Takatani, A.Shimokohbe
    • Journal Title

      Artificial Organs 30,3

      Pages: 160-167

    • Data Source
      KAKENHI-PROJECT-17360070
  • [Journal Article] Rotary Microactuator -Investigation of Shape and Driving Method-2006

    • Author(s)
      Seiichi Hata, Hiroaki Akamatu, Takashi Fukushige, Akira Shimokohbe
    • Journal Title

      Proceedings of 2006 fall meeting of JSPE

      Pages: 925-926

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] 回転型マイクロアクチュエータ-形状,駆動方法の検討-2006

    • Author(s)
      秦 誠一, 赤松宏明, 福重孝志, 下河辺 明
    • Journal Title

      2006年度精密工学会春季大会学術講演会講演論文集

      Pages: 927-928

    • NAID

      130005027682

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] マイクロ磁気軸受モータの研究2006

    • Author(s)
      黒木次郎, 進士忠彦, 李黎川, 下河辺明
    • Journal Title

      精密工学会誌 72, 5

      Pages: 662-667

    • NAID

      110004717819

    • Data Source
      KAKENHI-PROJECT-17360070
  • [Journal Article] Detection of left ventricular function from the Mag-Lev impeller behavior2006

    • Author(s)
      Hideo Hoshi, Junichi Asama, Chikara Hara, Wataru Hijikata, Tadahiko Shinshi, Akira Shimokohbe, Setsuo Takatani
    • Journal Title

      Artificial Organs 30, 5

      Pages: 377-383

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17360070
  • [Journal Article] ビルトインセンサによる静電マイクロアクチュエータの変位制御2006

    • Author(s)
      林 健彦, 福重孝志, 秦 誠一, 下河辺 明
    • Journal Title

      2006年度精密工学会春季大会学術講演会講演論文集

      Pages: 925-926

    • NAID

      130005027681

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Detection of left ventricular function from the Mag-Lev impeller behavior2006

    • Author(s)
      Hideo Hoshi, Junichi Asama, Chikara Hara, Wataru Hijikata, Tadahiko Shinshi, Akira Shimokohbe, Setsuo Takatani
    • Journal Title

      Artificial Organs 30,5

      Pages: 377-383

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17360070
  • [Journal Article] MEMS complete blood count sensors designed to reduce noises from electolysis gas2006

    • Author(s)
      Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      Microelectronic Engineering 83,[4-9]

      Pages: 1646-1650

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Micro-Magnetic Bearing Motor2006

    • Author(s)
      Jiro Kuroki, Tadahiko Shinshi, Lichuan Li, Akira Shimokohbe
    • Journal Title

      Journal of the Japan Society for Precision Engineering 72, 5

      Pages: 662-667

    • NAID

      110004717819

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17360070
  • [Journal Article] MEMS complete blood count sensors designed to recce noises from electolysis gas2006

    • Author(s)
      Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      Microelectronic Engineering 83, [4-9]

      Pages: 1646-1650

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A compact highly efficient and low hemolytic centrifugal blood pump with a magnetically levitated impeller.2006

    • Author(s)
      Asama J, Shinshi T, Hoshi H, Takatani S, Shimokohbe A
    • Journal Title

      Artif Organs 30(3)

      Pages: 184-191

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14208103
  • [Journal Article] 回転型マイクロアクチュエータ -形状、駆動方法の検討-2006

    • Author(s)
      秦 誠一, 赤松宏明, 福重孝志, 下河辺 明
    • Journal Title

      2006年度精密工学会春季大会学術講演会講演論文集

      Pages: 927-928

    • NAID

      130005027682

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Displacement control of an elastic microactuator using a built-in sensor2006

    • Author(s)
      Takehiko Hayashi, Takashi Fukushige, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      Proceedings of 2006 fall meeting of JSPE

      Pages: 927-928

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] 薄膜金属ガラスを用いた多自由度流体マイクロアクチュエータの提案2005

    • Author(s)
      吉田和弘, 堀井宣孝, 秦 誠一, 横田眞一, 下河辺 明
    • Journal Title

      日本機械学会関東支部山梨ブロック山梨講演会講演論文集

      Pages: 213-214

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A complete blood count micro sensor designed to reduce noise from electrolysis gas2005

    • Author(s)
      R.Tanabe, S.Hata, A.Shimokohbe
    • Journal Title

      Abstracts of 31st International Conference on Micro- and Nano-Engineering 2005 (MNE2005)

      Pages: 622-623

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Integrated conical spring linear actuators for tilting-mirror applications2005

    • Author(s)
      T.Fukushige, S.Hata, A.Shimokohbe
    • Journal Title

      Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005)

      Pages: 12-13

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A MEMS Conical Spring Actuator Array2005

    • Author(s)
      T.Fukushige, S.Hata, A.Shimokohbe
    • Journal Title

      IEEE/ASME Journal of Microelectromechanical Systems 14,[2]

      Pages: 243-253

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Magnetically suspended centrifugal blood pump with a radial magnetic driver2005

    • Author(s)
      Hoshi H, Kataoka H, Ohuchi K, Asama J, Shinshi T, Shimokohbe A, Takatani S
    • Journal Title

      ASAIO J 51・1

      Pages: 60-64

    • Data Source
      KAKENHI-PROJECT-14208103
  • [Journal Article] Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystalliztion Temperature2005

    • Author(s)
      Junpei sakurai, Seiichi Hata, Ryusuke Yamauchi, Akira Shimokohbe
    • Journal Title

      Proc. of 2005 MRS Fall Meeting (CD-ROM)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Thin Film Metallic Glasses as New MEMS Materials2005

    • Author(s)
      Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Technical Digest of The 18th IEEE International Conference on MEMS 2005

      Pages: 479-482

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A MEMS complete blood count sensor with vanes2005

    • Author(s)
      Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      Proc. of 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems

      Pages: 357-361

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses2005

    • Author(s)
      Ryusuki Yamauchi, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Proc. of 2005 MRS Fall Metting (CD-ROM)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Basic Research on an Out-of-plane Rotating Microactuator2005

    • Author(s)
      Hiroaki Akamatu, Seiichi Hata, Takashi Fukushige, Akira Shimokohbe
    • Journal Title

      Proceedings of 2005 spring meeting of JSPE

      Pages: 955-956

    • NAID

      130004657259

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] カソーディックアークプラズマ蒸着を用いたコンビナトリアルマテリアル合成I2005

    • Author(s)
      秦 誠一, 山内隆介, 桜井淳平, 下河邉 明
    • Journal Title

      2005年秋季 第66回応用物理学会学術講演会予稿集

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Disposable, Maglev Centrifugal Blood Pump : Design and in vitro Performance2005

    • Author(s)
      Hoshi H, Asama J, Shinshi T, Ohuchi K, Mizuno T, Arai H, Shimokohbe A, Takatani S
    • Journal Title

      Artif Organs 29(7)

      Pages: 520-526

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14208103
  • [Journal Article] Micro blow forming of thin film metallic glass2005

    • Author(s)
      Keita Nishigaya, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Proceedings of 2005 spring meeting of JSPE

      Pages: 477-478

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A MEMS Conical Spring Actuator Array2005

    • Author(s)
      T.Fukushige, S.Hata, A.Shimokohbe
    • Journal Title

      IEEE/ASME Journal of Microelectromechanical Systems 14・2

      Pages: 31-42

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] カソーディックアークプラズマ蒸着を用いたコンビナトリアルマテリアル合成II2005

    • Author(s)
      山内隆介, 秦 誠一, 桜井淳平, 下河邉 明
    • Journal Title

      2005年秋季 第66回応用物理学会学術講演会予稿集

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy2005

    • Author(s)
      Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Proc.of 2005 MRS Fall Meeting (CD-ROM)

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy2005

    • Author(s)
      Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Proc. of 2005 MRS Fall Meeting (CD-ROM)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass2005

    • Author(s)
      Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa, Akira Shimokohbe
    • Journal Title

      Proc. of 18th International Congress of Mechanical Engineering (CD-ROM)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] MEMS用材料としての薄膜金属ガラスとその微細加工2005

    • Author(s)
      秦 誠一, 桜井淳平, 下河辺 明
    • Journal Title

      日本鉄鋼協会第11回ヤングサイエンティストフォーラム講演論文集

      Pages: 18-19

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] 薄膜金属ガラスのマイクロブロー成形2005

    • Author(s)
      西ヶ谷啓太, 秦 誠一, 桜井淳平, 下河辺明
    • Journal Title

      2005年度精密工学会春季大会学術講演会講演論文集

      Pages: 477-478

    • NAID

      130004657459

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature2005

    • Author(s)
      Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi, Akira Shimokohbe
    • Journal Title

      Proc.of 2005 MRS Fall Meeting (CD-ROM)

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass2005

    • Author(s)
      Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa, Akira Shimokohbe
    • Journal Title

      Proc.of 18th International Congress of Mechanical Engineering (CD-ROM)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] The proposal of a multi-flexibility fluid micro-actuator made of thin film metallic glass2005

    • Author(s)
      Kazuhiro Yoshida, Yoshinobu Horii, Seiichi Hata, Shinichi Yokota, Akira Shimokohbe
    • Journal Title

      Proceedings of the Japan Society of Mechanical Engineers Kanto branch Yamanashi block Yamanashi meeting

      Pages: 213-214

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Disposable magnetic bearing centrifugal blood pump for extracorporeal circulation support2005

    • Author(s)
      Hoshi H, Asama J, Ohuchi K, Shinshi T, Shimokohbe A, Takatani S
    • Journal Title

      Artif Organs

    • Data Source
      KAKENHI-PROJECT-14208103
  • [Journal Article] A complete blood count micro sensor designed to reduce noise from electrolysis gas2005

    • Author(s)
      R.Tanabe, S.Hata, A.Shimokohbe
    • Journal Title

      Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005)

      Pages: 622-623

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Thin film metallic glass as MEMS material and its micro fabrication2005

    • Author(s)
      Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      The 11th young scientist forum of the Iron and Steel Institute of Japan

      Pages: 18-19

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A MEMS complete blood count sensor with vanes2005

    • Author(s)
      Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      Proc.of 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems

      Pages: 357-361

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range2005

    • Author(s)
      T.Fukushige, S.Hata, Takehiko Hayashi, A.Shimokohbe
    • Journal Title

      Proc. IPACK2005 (CD-ROM)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Disposable, Maglev Centrifugal Blood Pump : Design and in vitro Performance.2005

    • Author(s)
      Hoshi H, Asama J, Shinshi T, Ohuchi K, Mizuno T, Arai H, Shimokohbe A, Takatani S.
    • Journal Title

      Artif Organs 29(7)

      Pages: 520-526

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14208103
  • [Journal Article] 基板面外回転マイクロアクチュエータの基礎研究2005

    • Author(s)
      赤松宏明, 秦 誠一, 福重 孝志, 下河辺 明
    • Journal Title

      2005年度精密工学会秋季大会学術講演会講演論文集

      Pages: 955-956

    • NAID

      130004657259

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Disposable, Maglev Centrifugal Blood Pump : Design and In Vitro Performance2005

    • Author(s)
      H.Hoshi, J.Asama, T.Shinshi, K.Ohuchi, T.Mizuno, H.Arai, A.Shimokohbe, S.Takatani
    • Journal Title

      Artificial Organs 29,7

      Pages: 520-526

    • Data Source
      KAKENHI-PROJECT-17360070
  • [Journal Article] MEMS用材料としての薄膜金属ガラスとその微細加工2005

    • Author(s)
      秦 誠一, 桜井淳平, 下河辺明
    • Journal Title

      日本鉄鋼協会第11回ヤングサイエンティストフォーラム講演論文集

      Pages: 18-19

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass2005

    • Author(s)
      Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa, Akira, Shimokohbe
    • Journal Title

      Proc.of 18th International Congress of Mechanical Engineering (COBEM 2005) (CD-ROM)

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range2005

    • Author(s)
      T.Fukushige, S.Hata, Takehiko Hayashi, A.Shimokohbe
    • Journal Title

      Proc.IPACK2005 (CD-ROM)

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses2005

    • Author(s)
      Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Proc.of 2005 MRS Fall Meeting (CD-ROM)

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A MEMS Conical Spring Actuator Array, IEEE/ASME Journal of Microelectromechanical Systems2005

    • Author(s)
      T.Fukushige, S.Hata, A.Shimokohbe
    • Journal Title

      IEEE/ASME Journal of Microelectromechanical Systems 14, [2]

      Pages: 243-253

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Combinatorial Materials Synthesis using Cathodic Arc Plasma Deposition I2005

    • Author(s)
      Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Proceedings of 2005 Autumn JSAP annual meeting

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Combinatorial Materials Synthesis using Cathodic Arc Plasma Deposition II2005

    • Author(s)
      Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Proceedings of 2005 Autumn JSAP annual meeting

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] アナログ的基板面外変位静電マイクロアクチュエータ2004

    • Author(s)
      秦 誠一, 林 健彦, 福重孝志, 下河辺明
    • Journal Title

      2004年度精密工学会秋季大会学術講演会講演論文集

      Pages: 887-888

    • NAID

      130004655810

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] 薄膜金属ガラスを用いた微細中空構造の製作-窒化銅を発ガス材として用いたマイクロブロー成形-2004

    • Author(s)
      西ヶ谷啓太, 秦 誠一, 桜井淳平, 下河辺明
    • Journal Title

      2004年度精密工学会秋季大会学術講演会講演論文集

      Pages: 555-556

    • NAID

      130004655626

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Fabrication of micro hollow structure using thin film metallic glass - Micro blow molding using Cu_3N as outgas material -2004

    • Author(s)
      Keita Nishigaya, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Proceedings of 2004 fall meeting of JSPE

      Pages: 555-556

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking2004

    • Author(s)
      T.Fukushige, S.Hata, A.Shimokohbe
    • Journal Title

      Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004)

      Pages: 15-16

    • NAID

      130004656508

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking2004

    • Author(s)
      T.Fukushige, S.Hata, A.Shimokohbe
    • Journal Title

      Proceedings of European Society for Precision Engineering and Nanotechnology

      Pages: 15-16

    • NAID

      130004656508

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] New design for a compact centrifugal blood pump with a maganetically levitated rotor2004

    • Author(s)
      Asama J, Shinshi T, Hoshi H, Takatani S, Shimokohbe A.
    • Journal Title

      Artif Organs 29(1)

      Pages: 26-35

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14208103
  • [Journal Article] 光磁化デバイス2004

    • Author(s)
      進士忠彦, 下河辺明, 宗片比呂夫, 野口浩史, Jamil Kaosa
    • Journal Title

      第51回応用物理学関連連合講演会シンポジウム概要集

      Pages: 55-55

    • Data Source
      KAKENHI-PROJECT-15656044
  • [Journal Article] A New Design for A Compact Centrifugal Blood Pump With A Magnetically Levitated Rotor.2004

    • Author(s)
      Asama J, Shinshi T, Hoshi H, Takatani S, Shimokohbe A
    • Journal Title

      ASAIO J 50・6

      Pages: 550-556

    • Data Source
      KAKENHI-PROJECT-14208103
  • [Journal Article] 2-DOF thin film metallic glss microactuator2004

    • Author(s)
      S.Hata, H.W.JEONG, A.Shimokohbe
    • Journal Title

      Proceedings of European Society for Precision Engineering and Nanotechnology

      Pages: 9-10

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] 2-DOF thin film metallic glass microactuator2004

    • Author(s)
      S.Hata, H.W.JEONG, A.Shimokohbe
    • Journal Title

      Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004)

      Pages: 9-10

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] An out-of-plane analog motion electrostatic microactuator2004

    • Author(s)
      Seiichi Hata, Takehiko Hayashi, Takashi Fukushige, Akira Shimokohbe
    • Journal Title

      Proceedings of 2004 fall meeting of JSPE

      Pages: 877-888

    • NAID

      130004655810

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Novel fabrication method of metallic glass thin film using carousel type sputtering system2004

    • Author(s)
      J.Sakurai, S.Hata, A.Shimokohbe
    • Journal Title

      Proc.Smart Materials, Nano- and Micro-Smart Systems CD-ROM

    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Novel fabrication method of metallic glass thin film using carousel type sputtering system2004

    • Author(s)
      J.Sakurai, S.Hata, A.Shimokohbe
    • Journal Title

      Proc. of SPIE Micro- and Nanotechnology : Materials, Processes, Packaging, and Systems II

      Pages: 260-267

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A new driving method for electrostatic MEMS actuators to prevent sticking2004

    • Author(s)
      Takashi Fukushige, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      Proceedings of 2004 spring meeting of JSPE

      Pages: 1129-1130

    • NAID

      130004656508

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] 静電型MEMSアクチュエータの新しい固着防止駆動方法2004

    • Author(s)
      福重孝志, 秦 誠一, 下河辺明
    • Journal Title

      2004年度精密工学会春季大会学術講演会講演論文集

      Pages: 1129-1130

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] On-Chip Variable Inductor Using Microelectromechanical Systems Technology2003

    • Author(s)
      Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU, Akira SHIMOKOHBE
    • Journal Title

      Jpn.J.Appl.Phys. 42

      Pages: 2190-2192

    • NAID

      10010801393

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] On-Chip Variable Inductor Using Microelectromechanical Systems Technology2003

    • Author(s)
      Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU, Akira SHIMOKOHBE
    • Journal Title

      Jpn. J. Appl. Phys 42

      Pages: 2190-2192

    • NAID

      10010801393

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] High output force and high integrated out-of-plane microactuator2003

    • Author(s)
      Takashi Fukushige, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      Proceedings of 2003 fall meeting of JSPE

      Pages: 576-576

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Effect of prescription for mechanical property and electric resistivity of a CuTi alloy weld slag thin film.2003

    • Author(s)
      Junpei Sakurai, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      Proceedings of JMRS

      Pages: 541-541

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Fabrication of micro hollow structure using thin film metallic glass - Improvement of fabrication process and discussion of deformation mechanism -2003

    • Author(s)
      Seiichi Hata, Takashi Yamanaka, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Proceedings of 2003 fall meeting of JSPE

      Pages: 575-575

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] 高出力・高集積基板面外駆動マイクロアクチュエータ2003

    • Author(s)
      福重孝志, 秦 誠一, 下河辺明
    • Journal Title

      2003年度精密工学会秋季大会学術講演会講演論文集

      Pages: 576-576

    • NAID

      130005026972

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] 薄膜金属ガラスを用いた集積化マイクロプローブ(第2報) -薄膜金属ガラスの低電気抵抗化-2003

    • Author(s)
      桜井淳平, 秦 誠一, 下河辺明
    • Journal Title

      2003年度精密工学会秋季大会学術講演会講演論文集

      Pages: 391-391

    • NAID

      130005026769

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Reduction of electrical resistivity in PdCuSi thin film metallic glass2003

    • Author(s)
      J.Sakurai, S.Hata, A.Shimokohbe
    • Journal Title

      Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (CD-ROM)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Micro dome shape structures made of thin film metallic glass2003

    • Author(s)
      Seiichi Hata, Takashi Yamanaka, Jyunpei Sakurai, Akira Shimokohbe
    • Journal Title

      Micro System Technology 2003

      Pages: 180-187

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Large-output-force out-of-plane MEMS actuator array2003

    • Author(s)
      T.Fukushige, S.Hata, A.Shimokohbe
    • Journal Title

      Proceedings of SPIE International Symposium on Microelectronics, MEMS and Nanotechnology 5276

      Pages: 240-248

    • NAID

      130005026972

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] 薄膜金属ガラスを用いた微細中空構造の製作-プロセスの改良と変形に関する考察-2003

    • Author(s)
      秦 誠一, 山中 崇, 桜井淳平, 下河辺明
    • Journal Title

      2003年度精密工学会秋季大会学術講演会講演論文集

      Pages: 575-575

    • NAID

      130005026971

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Integrated micro probe made of thin film metallic glass - low resistivity of thin film metallic glass -2003

    • Author(s)
      Junpei Sakurai, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      Proceedings of 2003 fall meeting of JSPE

      Pages: 391-391

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] CuTi合金スパッタ薄膜の機械的特性及び電気抵抗率に及ぼす 時効の効果2003

    • Author(s)
      桜井淳平, 秦 誠一, 下河辺明
    • Journal Title

      日本金属学会講演概要

      Pages: 541-541

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Integrated conical spring linear actuators for tilting-mirror applications

    • Author(s)
      T.Fukushige, S.Hata, A.Shimokohbe
    • Journal Title

      Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005) (2005.9 Vienna, Austria)

      Pages: 12-13

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Built-in Capacitive Displacement Sensor with Long Full-Scale Range for Electrostatic Microactuators

    • Author(s)
      Takashi Fukushige, Takehiko Hayashi, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines (in press)

    • NAID

      10019289577

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Large-output-force out-of-plane MEMS actuator array

    • Author(s)
      T.Fukushige, S.Hata, A.Shimokohbe
    • Journal Title

      Proceedings of SPIE International Symposium on Microelectronics, MEMS and Nanotechnology (2003.12.Perth, Australia) vol.5276

      Pages: 240-248

    • NAID

      130005026972

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] 2-DOF thin film metallic glass microactuator

    • Author(s)
      S.Hata, H.W.JEONG, A.Shimokohbe
    • Journal Title

      Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004) (2004.6.Glasgow, Scotland)

      Pages: 9-10

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking

    • Author(s)
      T.Fukushige, S.Hata, A.Shimokohbe
    • Journal Title

      Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004) (2004.6.Glasgow, Scotland)

      Pages: 15-16

    • NAID

      130004656508

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Micro dome shape structures made of thin film metallic glass

    • Author(s)
      Seiichi Hata, Takashi Yamanaka, Jyunpei Sakurai, Akira Shimokohbe
    • Journal Title

      Micro System Technology 2003 (MST '03) (2003.10.7-8 Munich, Germany)

      Pages: 180-187

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A complete blood count micro sensor designed to reduce noise from electrolysis gas

    • Author(s)
      R.Tanabe, S.Hata, A.Shimokohbe
    • Journal Title

      Abstracts of 31st International Conference on Micro- and Nano-Engineering 2005 (MNE2005) (2005.9 Vienna, Austria)

      Pages: 622-623

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy

    • Author(s)
      Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Proc.of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Thin Film Metallic Glasses as New MEMS Materials

    • Author(s)
      Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Technical Digest of The 18th IEEE International Conference on MEMS 2005 (2005.1. Miami, USA)

      Pages: 479-482

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses

    • Author(s)
      Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
    • Journal Title

      Proc.of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] A MEMS complete blood count sensor with vanes for reduction in influence of electrolysis gas

    • Author(s)
      Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines (in press)

    • NAID

      10017600546

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Novel fabrication method of metallic glass thin film using carousel type sputtering system

    • Author(s)
      J.Sakurai, S.Hata, A.Shimokohbe
    • Journal Title

      Proc.of SPIE Micro- and Nanotechnology : Materials, Processes, Packaging, and Systems II (2004.12. Sydney, Australia)

      Pages: 260-267

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Combinatorial Search for Low Resistivity PdCuSi Thin Film Metallic Glass

    • Author(s)
      Ryusuke YAMAUCHI, Seiichi HATA, Junpei SAKURAI, Akira SHIMOKOHBE
    • Journal Title

      Jpn. J. Appl. Phys. (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature

    • Author(s)
      Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi, Akira Shimokohbe
    • Journal Title

      Proc.of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Reduction of electrical resistivity in PdCuSi thin film metallic glass

    • Author(s)
      J.Sakurai, S.Hata, A.Shimokohbe
    • Journal Title

      Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM'03) (2003.9.10-12 Nagoya, Japan) (CD-ROM)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Combinatorial Search for Low Resistivity PdCuSi Thin Film Metallic Glass

    • Author(s)
      Ryusuke YAMAUCHI, Seiichi HATA, Junpei SAKURAI, Akira SHIMOKOHBE
    • Journal Title

      Jpn.J.Appl.Phys. (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Built-in Capacitive Displacement Sensor with Long Full-Scale Range for Electrostatic Microactuators

    • Author(s)
      Takashi Fukushige, Takehiko Hayashi, Seiichi Hata, Akira Shimokohbe
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines. (in press)

    • NAID

      10019289577

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Journal Article] Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range

    • Author(s)
      T.Fukushige, S.Hata, Takehiko Hayashi, A.Shimokohbe
    • Journal Title

      Proc.IPACK2005 (2005.6. San Francisco, USA) (CD-ROM)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Patent] 熱特性測定装置, 及び熱特性測定方法2005

    • Inventor(s)
      秦 誠一, 桜井淳平, 山内隆介, 下河辺明
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2005-157876
    • Filing Date
      2005-05-30
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Patent] ガラス転移温度測定装置, 及びガラス転移温度測定方法2005

    • Inventor(s)
      秦 誠一, 桜井淳平, 下河辺明
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2005-157869
    • Filing Date
      2005-05-30
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Patent] ガラス転移温度測定装置,及びガラス転移温度測定方法2005

    • Inventor(s)
      秦 誠一, 桜井 淳平, 下河辺 明
    • Industrial Property Rights Holder
      理工学振興会
    • Industrial Property Number
      2005-157869
    • Filing Date
      2005-04-28
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Patent] マイクロ中空デバイス及びCBCセンサ並びにそれらの製造方法2005

    • Inventor(s)
      田邊 力也, 秦 誠一, 下河辺 明
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2005-238268
    • Filing Date
      2005-08-19
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Patent] コンビナトリアルマテリアル用評価基板2005

    • Inventor(s)
      秦 誠一, 山内隆介, 桜井淳平, 下河辺明
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2005-131915
    • Filing Date
      2005-04-28
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Patent] 使い捨て磁気浮上式血液ポンプ2005

    • Inventor(s)
      進士 忠彦, 下河辺 明, 朝間 淳一, 原 力, 土方 亘, 高谷 節雄, 星 英男
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2005-256278
    • Filing Date
      2005-09-05
    • Data Source
      KAKENHI-PROJECT-17360070
  • [Patent] 熱特性測定装置,及び熱特性測定方法2005

    • Inventor(s)
      秦 誠一, 桜井 淳平, 山内 隆介, 下河辺 明
    • Industrial Property Rights Holder
      理工学振興会
    • Industrial Property Number
      2005-157876
    • Filing Date
      2005-05-30
    • Data Source
      KAKENHI-PROJECT-15206015
  • [Patent] コンビナトリアルマテリアル用評価基板2005

    • Inventor(s)
      秦 誠一, 山内 隆介, 桜井 淳平, 下河辺 明
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2005-131915
    • Filing Date
      2005-04-28
    • Data Source
      KAKENHI-PROJECT-15206015
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    # of Collaborated Projects: 11 results
    # of Collaborated Products: 0 results
  • 2.  SHINSHI Tadahiko (60272720)
    # of Collaborated Projects: 10 results
    # of Collaborated Products: 18 results
  • 3.  HATA Seiichi (50293056)
    # of Collaborated Projects: 9 results
    # of Collaborated Products: 84 results
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    # of Collaborated Projects: 4 results
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    # of Collaborated Projects: 3 results
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    # of Collaborated Projects: 1 results
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    # of Collaborated Projects: 1 results
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  • 36.  SUGAWARA Ryosuke
    # of Collaborated Projects: 1 results
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  • 37.  HARA Tsutomu
    # of Collaborated Projects: 1 results
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  • 38.  HORIKAWA Oswaldo
    # of Collaborated Projects: 1 results
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  • 39.  HASHIMOTO Jyunnichi
    # of Collaborated Projects: 1 results
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  • 40.  KATAGIRI Sohichi
    # of Collaborated Projects: 1 results
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    # of Collaborated Projects: 1 results
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  • 42.  ICHIHARA Jun-ichi
    # of Collaborated Projects: 1 results
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