NAKANO Motohiro 中野元博

… Alternative Names

NAKANO Notohiro 中野元裕

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Researcher Number	40164256
Other IDs
External Links
Affiliation (based on the past Project Information) *help	2016 – 2019: 大阪大学, 工学研究科, 准教授 2012 – 2015: 大阪大学, 工学(系)研究科(研究院), 准教授 2014: 大阪大学, 大学院工学研究科, 准教授 2011 – 2012: 大阪大学, 大学院・工学研究科, 准教授 2010: 大阪大学, 工学研究科, 准教授 … More 2007 – 2008: 大阪大学, 大学院・工学研究科, 准教授 2007: 大阪大学, 工学研究科, 准教授 2005 – 2006: 大阪大学, 大学院工学研究科, 助教授 1998 – 2005: 大阪大学, 大学院・工学研究科, 助教授 1998 – 1999: 大阪大学, 工学研究科, 助教授 1997: 大阪大学, 工学部, 助教授 1992 – 1994: 大阪大学, 工学部, 助教授 1990: Osaka Univ., Precision Eng., Lecturer, 工学部, 講師 1986 – 1989: 大阪大学, 工学部, 助手 Less
Review Section/Research Field	Principal Investigator Biomedical engineering/Biomaterial science and engineering / Electron device/Electronic equipment / Nuclear fusion studies / Materials/Mechanics of materials / 機械材料工学 / Production engineering/Processing studies / Aerospace engineering Except Principal Investigator Production engineering/Processing studies / 機械材料工学 / 広領域 / Aerospace engineering / Applied physics, general / 機械工作・生産工学
Keywords	Principal Investigator プラズマ / Laser / 状態方程式 / CFRP / 衝撃波 / キャピラリ / 軟X線顕微鏡 / 生物・生体工学 / Pulse-power / Plasma … More / Extreme-ultraviolet (EUV) / Semiconductor production / パルス放電 / デバイス設計・製造プロセス / パルスパワー / レーザー / 極端紫外光 / 半導体デバイス製造 / PENUMBRAL TECHNIQUE / SHOCK TEMPERATURE MEASURMENT / LASER PLASMA / INERTIAL FUSION / INTENSE LASER / SHOCK WAVE / ULTRA HIGH PRESSURE / EQUATION OF STATE / 画像再構成 / 半影 / レーザープラズマX線 / 核融合 / 半影法 / 衝撃温度計測 / レーザープラズマ / 慣性核融合 / 高強度レーザー / 超高圧 / Finite element analysis / High-speed flaming camera / Interlaminar delamination / Spallation / Orbital debris / Shock wave / 超高速ガメラ / 超高速カメラ / スポール / 破壊 / 層間はく離 / 航空宇宙材料 / 有限要素解析 / 超高速フレーミングカメラ / 眉間はく離 / スポール破壊 / スペースデブリ / レーザ / Loading rate effect / Alumina / Fracture criterion / Stress sitensity factor / Fracture toughness / Ceramics / Mixed-mode fracture / Impact fracture / 衝激破壊試験 / 負荷速度依存性 / アルミナ / 衝撃破壊基準 / 動的破壊じん性 / 動的応力拡大係数 / ファインセラミックス / 混合モード破壊 / 衝撃破壊試験 / 放電生成プラズマ / 水の窓軟X線顕微鏡 / 放射線技術工学 / Point Diffraction Interierometer / Point Diffraction Interferometer / PDI / 精密加工計測 / 光ファイバ / 位相シフト干渉計 / PDI(Point Diffraction Interferometer) / 加工計測 / 精密位置決め / 応力棒法 / 高速変形 / 銅 / 衝撃ねじり試験 / 構成方程式 / 波動伝播解析 / 弾粘塑性 / ひずみ速度履歴 … More Except Principal Investigator 破壊じん性 / 極低温 / 構造材料 / 超電導マグネット / シングルモード光ファイバ / fiber optic plate / Fracture Toughness / 転位 / 溶接強度 / 疲労特性 / 引張強度 / 負荷速度 / 塑性変形 / 位相シフト干渉計 / 光ファイバ / 回折球面波 / Thermal Activation Theoty / Dislocation / Yield Stress / Flow Stress / High Strain Rate / Cryogenic Temperature / 双晶 / 熱活性化過程 / 降伏応力 / 変形応力 / 高ひずみ速度 / spherical diffraction wave / measurement error / aspherical surface measurement / absolute surface figure measurement / single-mode optical fiber / phase-shifting interferometry / point diffraction interferometry / デジタルCCDカメラ / 7フレームアルゴリズム / 位相シフト干渉計測法 / 点回折干渉計測法 / 大口径光学素子 / HeNeレーザー / Point Diffraction Inteferometer / 点回折球面波干渉計 / 非球面観測 / 計測誤差 / 非球面計測 / 絶対形状計測 / 位相シフト干渉計測 / 点回折干渉計測 / Hot electron Jet / Light Self Focus / Multilayered Flyer / Laser induced shock / Ultraintense Laser / 衝撃波 / cm^2 / 集光強度10^<19>W / 高速電子ジェット / 光自己集束 / 多層膜フライヤー / レーザー誘起衝撃波 / 超高強度レーザー / Termal Activation Mechanism / Brittle-to-Ductile Transition / Birefringence Observation / Alkali Halide Single Crystal / Dislocation Emission / 延性-ぜい遷移 / Kcl単結晶 / 延性ーぜい性遷移 / 応力遮蔽効果 / KClーKBr固溶体単結晶 / KCl単結晶 / 破壊じん性試験法 / 引張試験法 / フッ化マグネシウム / 分光反射率 / 銀 / 表面プラズモン共鳴 / 誘電体薄膜 / ナノ構造 / 光の近接場 / 金属/誘電体/金属構造 / 近接場光学顕微鏡 / 光導波路 / 伝搬モード解析 / 真空蒸着 / 金属-誘電体-金属構造 / 有限要素法 / 金属薄膜 / 集束イオンビーム加工 / 表面プラズモンポラリトン / 放物面計測 / 非球面形状計測 / ガラスレスCCDカメラ / デジタルホログラフィー / 表面形状計測 / Helmholtz-Kirchhoffの積分定理 / デジタルホログラフ / phase-shifting interferometer / point diffraction interferometer / 点光源回折干渉計 / 熱応力解析 / 熱伝導解析 / 自己集束 / 亀裂 / 吸収係数 / レーザ内部加工 / レーザスクライブ / 硬脆材料 / レーザ加工 / 計測の再現性 / 高精度絶対形状計測 / 光干渉計測 / He-Neレーザー / 位相シフト干渉法 / 点光源 Less

3D Design of Microscope for Soft X-Ray Imaging using Polycapillary Focusing OpticsPrincipal Investigator
- Principal Investigator
  
  NAKANO MOTOHIRO
- Project Period (FY)
  2016 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Biomedical engineering/Biomaterial science and engineering
- Research Institution
  Osaka University
Developments of Plasma Soft X-ray Source for Microscopic Observation of Organelles in Living Cells with Focusing CapillaryPrincipal Investigator
- Principal Investigator
  
  NAKANO Motohiro
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Biomedical engineering/Biomaterial science and engineering
- Research Institution
  Osaka University
Study of Twin Waveguiding Optical Probe with Plasmonic MIM Band Enhancer
- Principal Investigator
  
  OSHIKANE Yasushi
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied physics, general
- Research Institution
  Osaka University
Profile Measurement System of Phase-Shifting Point Diffraction Interferometer with Spherical Reference Wavefronts Generated byTwo Optical FibersPrincipal Investigator
- Principal Investigator
  
  NAKANO Motohiro
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
PRECISION MICROPROCESSING OF PERMEABLE HARD BRITTLE MATERIAL BY NANOSECOND- OR CW-LASER AND ITS INTELLECTUALIZATION
- Principal Investigator
  
  OHMURA Etsuji
- Project Period (FY)
  2007 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Development of Phase-Shifting Point Diffraction Interferometer Assisted by Fiber Optic Window : Highly-Reproducible Absolute Surface Figure Measurement of Large Aperture Aspherical Mirrors
- Principal Investigator
  
  KATAOKA Toshihiko
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Development of High Performance EUV Light Source Using Condensed Cone-center-axis Plasma Generated by Laser with Nano-second Pulse-powerPrincipal Investigator
- Principal Investigator
  
  NAKANO Motohiro
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka University
Absolute surface figure measurement of aspherical surfaces with diffracted wavefronts as reference waves emitted from two optical fibers
- Principal Investigator
  
  KATAOKA Toshihiko
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
回折点光源・位相シフト干渉法を応用した平担面の超高精度絶対形状計測法の検討
- Principal Investigator
  
  KATAOKA Toshihiko
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
SIMULTANEOUS MEASUREMENT OF SHOCK-WAVE VELOCITY AND ULTRA-HIGH DENSITY WITH PENUMBRAL X-RAY BACKLIGHT TECHNIQUEPrincipal Investigator
- Principal Investigator
  
  NAKANO Motohiro
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Nuclear fusion studies
- Research Institution
  OSAKA UNIVERSITY
レーザ誘起衝撃波を用いた航空宇宙材料の衝撃破壊に関する研究Principal Investigator
- Principal Investigator
  
  NAKANO Motohiro, 岸田敬三
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Osaka University
Laser induced ultra-intense shock waves in relativistic regime
- Principal Investigator
  
  TANAKA Kazuo a.
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  広領域
- Research Institution
  Osaka University
ひずみ速度履歴の影響を受ける弾粘塑性波伝播のハイブリッド法に基づく数値解析Principal Investigator
- Principal Investigator
  
  中野元博
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Aerospace engineering
- Research Institution
  Osaka University
Dynamic fracture initiation criterion in ceramics under combined mode impact loadingPrincipal Investigator
- Principal Investigator
  
  NAKANO Motohiro
- Project Period (FY)
  1992 – 1993
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械材料工学
- Research Institution
  Osaka University
Temperature Dependence of Fracture Toughness and Dislocation Emission at Crack Tip
- Principal Investigator
  
  KISHIDA Keizo
- Project Period (FY)
  1989 – 1990
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Aerospace engineering
- Research Institution
  Osaka University
超電導マグネット用極低温構造材料の破壊強度特性とその評価(各種強度特性の材料工学的考察とデータベース化)
- Principal Investigator
  
  岸田敬三
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Fusion Research
- Research Institution
  Osaka University
超電導マグネット用極低温構造材料の破壊強度特性とその評価 (極低温下の疲労特性と最適溶接法の開発)
- Principal Investigator
  
  岸田敬三
- Project Period (FY)
  1987
- Research Category
  
  Grant-in-Aid for Fusion Research
- Research Institution
  Osaka University
超電導マグネット用極低温構造材料の破壊強度特性とその評価
- Principal Investigator
  
  岸田敬三
- Project Period (FY)
  1986
- Research Category
  
  Grant-in-Aid for Fusion Research
- Research Institution
  Osaka University
Deformatio and Fracture of Materials at High Strain Rates and Cryogenic Temperature
- Principal Investigator
  
  KISHIDA Keizo
- Project Period (FY)
  1986 – 1987
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械材料工学
- Research Institution
  Osaka University

All 2015 2014 2013 2012 2011 2010 2009 2008 2007 2006 2005 2004

All Journal Article Presentation Book Patent

[Book] Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers, Selected Topics on Optical Fiber Technology, Part 2, Chapter 142012
- Author(s)
  Oshikane Yasushi, Nakano Motohiro and Inoue Haruyuki
- Total Pages
  67
- Publisher
  (Moh. Yasin, Sulaiman W. Harun and Hamzah Arof, eds.), InTech, Croatia
- Data Source
  KAKENHI-PROJECT-22560109
[Book] Selected Topics on Optical Fiber Technology, Part 2, Chapter 14, Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers2012
- Author(s)
  Oshikane Yasushi, Nakano Motohiro, Inoue Haruyuki
- Publisher
  InTech (ISBN 978-953-51-0091-1)
- Data Source
  KAKENHI-PROJECT-22560109
[Journal Article] 3D-FEM analysis of SPP excitation through nanoholes in asymmetric metal-insulator-metal structure at tip of circular truncated conical fiber2014
- Author(s)
  Yasushi Oshikane, Kensuke Murai, Motohiro Nakano
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 9163 Pages: 1-7
- DOI
  10.1117/12.2060641
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-24560060
[Journal Article] ステルスダイシングにおける応力拡大係数を用いた亀裂進展解析2010
- Author(s)
  大村悦二、小川健輔、熊谷正芳、中野誠、福満憲志、森田英毅
- Journal Title
  
  日本機械学会論文集, A編 Vol.76, No.764
  
  Pages: 446-448
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] ステルスダイシングにおける応力拡大係数を用いた亀裂進展解析2010
- Author(s)
  大村悦二・小川健輔・熊谷正芳・中野誠・福満憲志・森田英毅
- Journal Title
  
  日本機械学会論文集,A編 76(掲載決定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] ステルスダイシングにおける応力拡大係数を用いた亀裂進展解析2010
- Author(s)
  大村悦二, 小川健輔, 熊谷正芳, 中野誠, 福満憲志, 森田英毅
- Journal Title
  
  日本機械学会論文集, A 編 Vol. 76, No. 764
  
  Pages: 446-448
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] ステルスダイシングにおける応力拡大係数を用いた亀裂進展解析2010
- Author(s)
  大村悦二、小川健輔、熊谷正芳、中野誠、福満憲志、森田英毅
- Journal Title
  
  日本機械学会論文集, A編
  
  Volume: 76 Pages: 446-448
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] Analysis of Crack Propagation in Stealth Dicing Using Stress Intensity Factor2009
- Author(s)
  E.Ohmura, K.Ogawa, M.Kumagai, M.Nakano, K.Fukumitsu, H.Morita
- Journal Title
  
  On-line Proceedings of the 5th International Cong ress on Laser Advanced Materials Processing (LA MP2009)
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] Analysis of Processing Mechanism in stealth Dicing of Ultra Thin Silicon Wafer2008
- Author(s)
  E. Ohmura, M. Kumagai, M. Nakano, K. Kuno, K. Fukumitsu, H. Morita
- Journal Title
  
  Journal of Advanced Me-chanical Design, Systems, and Manufacturing 2
  
  Pages: 540-549
- NAID
  130000080854
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer2008
- Author(s)
  Etsuji Ohmura, Masayoshi Kumagai, Makoto Nakano, Koji Kuno, Kenshi Fukumitsu, Hideki Morita
- Journal Title
  
  Journal of Advanced Mechanical Design, Systems, and Manufacturing Vol.2, No.4
  
  Pages: 540-549
- NAID
  130000080854
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer2008
- Author(s)
  Etsuji Ohmura, Masayoshi Kumagai, Makoto Nakano, Koji Kuno, Kenshi Fukumitsu, Hideki Morita
- Journal Title
  
  Journal of Advanced Mechanical Design, Systems, and Manufacturing Vol. 2, No. 4
  
  Pages: 540-549
- NAID
  130000080854
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] 透過性パルスレーザによる極薄シリコンウェハの内部改質2008
- Author(s)
  大村悦二、熊谷正芳、福満憲志、中野誠、内山直己、森田英毅
- Journal Title
  
  精密工学会誌 Vol.74, No.3
  
  Pages: 275-281
- NAID
  110006647632
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] 透過性パルスレーザによる極薄シリコンウェハの内部改質2008
- Author(s)
  大村悦二・熊谷正芳・福満憲志・中野誠・内山直己・森田英毅
- Journal Title
  
  精密工学会誌 74(印刷中)
- NAID
  110006647632
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] Numerical Reconstruction of Wavefront in Phase-Shifting Point Diffraction Interferometer by Digital Holography2008
- Author(s)
  Toshiaki Matsuura, Satoru Okagaki, Yasushi Oshikane, Haruyuki Inoue, Motohiro Nakano, Toshihiko Kataoka
- Journal Title
  
  Surface and Inter face Analysis Vol. 40
  
  Pages: 1028-1032
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360066
[Journal Article] 高性能レーザプラズマEUV(Extreme-ultraviolet)光源の開発-繰り返し発光特性の評価-2007
- Author(s)
  中野元博, 吉川隆弥, 大谷祐子, 井上晴行, 押鐘寧, 片岡俊彦
- Journal Title
  
  2007年度精密工学会春季大会学術講演会講演論文集
  
  Pages: 773-774
- NAID
  130005028703
- Data Source
  KAKENHI-PROJECT-17360161
[Journal Article] Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer2007
- Author(s)
  Etsuji Ohmura, Masayoshi Kumagai, Makoto Nakano, Koji Kuno, Kenshi Fukumitsu, Hideki Morita
- Journal Title
  
  Proc. the International Conference on Leading Edge Manufacturing in 21st Century, 2007, Fukuoka Japan
  
  Pages: 861-866
- NAID
  130000080854
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] Measurement Accuracy in Phase-Shifting Point Diffraction Interferometer with Two Optical Fibers2007
- Author(s)
  Toshiaki MATSUURA, Satoru OKAGAKI, Takaaki NAKAMURA, Yasushi OSHIKANE, Haruyuki INOUE, Motohiro NAKANO, andToshihiko KATAOKA
- Journal Title
  
  Optical Review Vol. 14
  
  Pages: 401-405
- NAID
  10020010020
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360066
[Journal Article] Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer2007
- Author(s)
  E. Ohmura, M. Kumagai, M. Nakano, K. Kuno, K. Fukumitsu, H.Morita
- Journal Title
  
  Proceedings of the Int. Conf. on Leading Edge Manufacturing in 21st Century, LEM21
  
  Pages: 861-866
- NAID
  130000080854
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer2007
- Author(s)
  Etsuji Ohmura, Masayoshi Kumagai, Makoto Nakano, Koji Kuno, Kenshi Fukumitsu, Hideki Morita
- Journal Title
  
  Proc. the International Conference on Leading Edge Manufacturing in 21st Century, 2007, Fukuoka Japan(LEM21 The Best Paper Award受賞論文)
  
  Pages: 861-866
- NAID
  130000080854
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] Internal Modification of Ultra Thin Silicon Wafer by Permeable Pulse Laser2007
- Author(s)
  E. Ohmura, M. Kumagai, K. Fukumitsu, K. Kuno, M. Nakano, H. Morita
- Journal Title
  
  Online Proceedings of LPM2007-the 8th Int. Symp. on Laser Precision Microfabrication
- NAID
  110006647632
- Data Source
  KAKENHI-PROJECT-19360065
[Journal Article] ファイバ型PS-PDI装置(Phase-Shifting Point Diffraction Interferometer)の開発-光ファイバからの回折球面波同士の干渉計測による精度の検証-2007
- Author(s)
  松浦敏晋, 岡垣覚, 中村崇亮, 押鐘寧, 井上晴行, 中野元博, 片岡俊彦
- Journal Title
  
  2007年度精密工学会春季大会学術講演会講演論文集
- NAID
  130005028613
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] ファイバ型PS/PDIによる大口径ミラーの計測2007
- Author(s)
  松浦敏晋, 岡垣覚, 中村崇亮, 押鐘寧, 井上晴行, 中野元博, 片岡俊彦
- Journal Title
  
  第54回応用物理学関経連合講演会講演予稿集
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] Development of High Performance EUV Light Source by Laser Produced Plasma-Target Design and Evaluation of EUV Conversion Efficiency-2006
- Author(s)
  T.Yoshikawa, Y.Otani, M.Nakano, T.Kataoka, H.Inoue, Y.Oshikane
- Journal Title
  
  Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology
  
  Pages: 133-134
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360161
[Journal Article] FOW(Fiber Optic Window)を用いた絶対形状計測用ファイバ型PS-PDI(Phase-Shifting Point Diffraction Interferometer)装置の開発2006
- Author(s)
  中村崇亮, 岡垣覚, 松浦敏晋, 押鐘寧, 片岡俊彦, 井上晴行, 中野元博
- Journal Title
  
  精密工学会2006年度関西地方定期学術講演会講演論文集
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] FOW(Fiber Optic Window)投影面を用いた大口径ミラー絶対形状計測用ファイバ型PS-PDI(Phase-Shifting Point Diffraction Interferometer)装置の開発2006
- Author(s)
  岡垣覚, 中村崇亮, 松浦敏晋, 片岡俊彦, 押鐘寧, 井上晴行, 中野元博
- Journal Title
  
  2006年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 161-161
- NAID
  130004658297
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] Development of High Performance EUV Light Source by Laser Produced Plasma -Target Design and Evaluation of EUV Conversion Efficiency-2006
- Author(s)
  T.Yoshikawa, Y.Otani, M.Nakano, T.Kataoka, H.Inoue, Y.Oshikane
- Journal Title
  
  Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology
  
  Pages: 133-134
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360161
[Journal Article] 高性能レーザプラズマEUV(Extreme-ultraviolet)光源の開発-ターゲット構造とEUV変換効率の評価-2006
- Author(s)
  中野元博, 吉川隆弥, 大谷祐子, 片岡俊彦, 井上晴行, 押鐘寧
- Journal Title
  
  2006年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 585-586
- NAID
  130004658236
- Data Source
  KAKENHI-PROJECT-17360161
[Journal Article] 高輝度レーザプラズマEUV(Extreme-ultraviolet)光源の開発-ターゲット設計と特性評価-2006
- Author(s)
  吉川隆弥, 大谷祐子, 中野元博, 片岡俊彦, 井上晴行, 押鐘寧
- Journal Title
  
  2006年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 73-74
- Data Source
  KAKENHI-PROJECT-17360161
[Journal Article] ナノ秒レーザ誘起円錐孔アプレーション・プラズマの発光計測2006
- Author(s)
  中野元博, 細谷明弘, 吉川隆弥, 大谷祐子, 山内良昭, 片岡俊彦
- Journal Title
  
  2006年度精密工学会春季大会学術講演論文集
- Data Source
  KAKENHI-PROJECT-17360161
[Journal Article] 光ファイバ型点光源を2つ用いたPDI干渉計による大口径ミラーの形状計測2005
- Author(s)
  押鐘寧, 片岡俊彦, 中村崇亮, 岡垣覚, 中野元博, 井上晴行
- Journal Title
  
  第66回応用物理学会学術講演会講演予稿集
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] 大口径ミラーの絶対形状評価のためのファイバ型2光源PDI干渉計測装置の開発-ミラー保持方法の改良とノイズの低減-2005
- Author(s)
  岡垣覚, 中村崇亮, 押鐘寧, 片岡俊彦, 井上晴行, 中野元博
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集
- NAID
  130004657236
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] EUV光源開発のためのパルスレーザーによる高密度プラズマ生成と発光計測2005
- Author(s)
  細谷明弘, 吉川隆弥, 中野元博, 山内良昭, 片岡俊彦
- Journal Title
  
  2005年度精密工学会秋季大会学術講演論文集
- NAID
  130004656964
- Data Source
  KAKENHI-PROJECT-17360161
[Journal Article] ファイバ光源を利用したPDI計測装置による大口径ミラーの絶対形状計測2004
- Author(s)
  押鐘寧, 片岡俊彦, 中村崇亮, 井上晴行, 中野元博
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会講演論文集
- NAID
  130004655911
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] ファイバ光源を利用したPDI計測装置による大口径ミラーの絶対形状計測2004
- Author(s)
  押鐘寧, 片岡俊彦, 中村崇亮, 中野元博, 井上晴行
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 1069-1070
- NAID
  130004655911
- Data Source
  KAKENHI-PROJECT-16360067
[Patent] レーザプラズマ光源2007
- Inventor(s)
  中野元博, 片岡俊彦
- Industrial Property Rights Holder
  大阪大学
- Industrial Property Number
  2007-213321
- Filing Date
  2007-08-20
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360161
[Presentation] 水の窓領域軟Ｘ線顕微鏡用レーザ生成プラズマ光源の開発　－集光による高輝度化に向けた反射膜の検討－2015
- Author(s)
  星野広海，本郷優子，押鐘寧，村井健介，中野元博
- Organizer
  精密工学会2015年度関西地方定期学術講演会
- Place of Presentation
  京都工芸繊維大学 (松ヶ崎キャンパス)
- Year and Date
  2015-06-23
- Data Source
  KAKENHI-PROJECT-25282132
[Presentation] 水の窓領域軟Ｘ線顕微鏡用レーザ生成プラズマ光源の開発2014
- Author(s)
  本郷優子、荻佑介、押鐘寧、中野元博
- Organizer
  精密工学会2014年度関西地方定期学術講演会
- Place of Presentation
  近畿大学 (東大阪キャンパス)
- Year and Date
  2014-07-04
- Data Source
  KAKENHI-PROJECT-25282132
[Presentation] ナノ構造を有する光ファイバ先端部の光電磁場集中・伝搬に関する有限要素解析2014
- Author(s)
  押鐘寧，服部航，中野元博，村井健介
- Organizer
  精密工学会　2014年度　関西地方学術講演会
- Place of Presentation
  近畿大学　東大阪キャンパス(大阪府東大阪市)
- Year and Date
  2014-07-04
- Data Source
  KAKENHI-PROJECT-24560060
[Presentation] Three Dimensional Electromagnetic Simulation of SPP Control at Apex of Circular Truncated Conical Fiber with MIM/Twin Nano-Hole Structure2014
- Author(s)
  Yasushi Oshikane, Motohiro Nakano, Kensuke Murai
- Organizer
  COMSOL Conference Tokyo 2014
- Place of Presentation
  秋葉原UDX(東京都千代田区)
- Year and Date
  2014-12-04
- Data Source
  KAKENHI-PROJECT-24560060
[Presentation] MIM構造とナノ開孔対を有する円錐台形状の光ファイバ先端における電磁場伝搬の解析ー有限要素解析による３次元電磁場と伝搬モードの診断ー2014
- Author(s)
  押鐘寧，村井健介，中野元博
- Organizer
  2014年度　精密工学会　秋季大会　学術講演会
- Place of Presentation
  鳥取大学　鳥取キャンパス(鳥取県鳥取市)
- Year and Date
  2014-09-16
- Data Source
  KAKENHI-PROJECT-24560060
[Presentation] MIM構造におけるPlasmonic効果の可視光通信フィルタや近接場プローブへの応用に向けて2013
- Author(s)
  押鐘　寧，村井　健介，東　孝哉，山本　史彦，中野　元博，井上　晴行
- Organizer
  第10回　プラズモニクスシンポジウム
- Place of Presentation
  神戸大学六甲台キャンパス
- Data Source
  KAKENHI-PROJECT-24560060
[Presentation] Plasmonic active spectral filter in VIS-NIR region using metal-insulator-metal (MIM) structure on glass plate2012
- Author(s)
  Yasushi Oshikane, Kensuke Murai, Takaya Higashi, Fumihiko Yamamoto, Motohiro Nakano, Haruyuki Inoue
- Organizer
  SPIE Optics+Photonics 2012
- Place of Presentation
  米国　サンディエゴコンベンションセンター
- Data Source
  KAKENHI-PROJECT-24560060
[Presentation] 金属-誘電体-金属構造における表面プラズモン共鳴を利用した可視域アクティブフィルタの開発2012
- Author(s)
  押鐘　寧，東　孝哉，山本　史彦，村井　健介，井上　晴行，中野　元博
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学
- Data Source
  KAKENHI-PROJECT-24560060
[Presentation] Phase-Shifting Point Diffraction Interferometer with Two Point Light Sources of Single-Mode Optical Fibers2011
- Author(s)
  N. Ogawa, T. Nishioka, M. Nakano, Y. Oshikane, H. Inoue
- Organizer
  Fourth international symposium on Atomically Controlled Fabrication Technology
- Place of Presentation
  Osaka University
- Year and Date
  2011-11-24
- Data Source
  KAKENHI-PROJECT-22560109
[Presentation] 2本の光ファイバからの点光源回折球面波を基準とする位相シフト干渉計-ファイバ保持方法の改良とノイズの低減-2011
- Author(s)
  小川尚利,西岡孝純,中野元博,押鐘寧,井上晴行
- Organizer
  2011年度精密工学会秋季大会学術講演会
- Place of Presentation
  金沢大学
- Year and Date
  2011-09-20
- Data Source
  KAKENHI-PROJECT-22560109
[Presentation] Phase-Shifting Point Diffraction Interferometer with Two Point light Sources of Single-Mode Optical Fibers2011
- Author(s)
  N.Ogawa, T.Nishioka, M.Nakano, Y.Oshikane, H.Inoue
- Organizer
  Fourth international symposium on Atomically Controlled Fabrication Technology
- Place of Presentation
  Osaka
- Year and Date
  2011-11-01
- Data Source
  KAKENHI-PROJECT-22560109
[Presentation] Phase-Shifting Point Diffraction Interferometer with Spherical Reference Wavefronts Generated by two Optical Fibers2010
- Author(s)
  N.Ogawa, Y.Oshikane, H.Inoue, M.Nakano
- Organizer
  Third International Symposium on Atomically Controlled Fabrication Technology
- Place of Presentation
  大阪大学(大阪市)
- Year and Date
  2010-11-24
- Data Source
  KAKENHI-PROJECT-22560109
[Presentation] 透過性パルスレーザによるシリコン内部の亀裂伸展解析-ステルスダイシングの加工メカニズムに関する研究-2010
- Author(s)
  川人佑太・大村悦二・中野誠・福満憲志・森田英毅
- Organizer
  2010年度精密工学会春季大会学術講演会
- Place of Presentation
  さいたま
- Year and Date
  2010-03-17
- Data Source
  KAKENHI-PROJECT-19360065
[Presentation] 2本の光ファイバからの点光源回折球面波を基準とする位相シフト干渉計-非球面凹面ミラーの表面形状計測精度-2010
- Author(s)
  小川尚利, 中野元博, 押鐘寧, 井上晴行, 山内和人
- Organizer
  2010年度精密工学会秋季大会学術講演会
- Place of Presentation
  名古屋大学(名古屋市)
- Year and Date
  2010-09-27
- Data Source
  KAKENHI-PROJECT-22560109
[Presentation] 2本の光ファイバからの点光源回折球面波を基準とする位相シフト干渉計-非球面凹面ミラーの表面形状計測精度-2010
- Author(s)
  小川尚利,中野元博,押鐘寧,井上晴行,山内和人、
- Organizer
  2010年度精密工学会秋季大会学術講演会
- Place of Presentation
  名古屋大学
- Year and Date
  2010-09-27
- Data Source
  KAKENHI-PROJECT-22560109
[Presentation] Analysis of Crack Propagation Induced by Laser Irradiation in Stealth Dicing2009
- Author(s)
  Etsuji Ohmura, Kensuke Ogawa, Masayoshi Kumagai, Makoto Nakano, Kenshi Fukumitsu, Hideki Morita
- Organizer
  The Fifth International Congress on Laser Advanced Materials Processing (LAMP2009)
- Place of Presentation
  神戸
- Year and Date
  2009-06-02
- Data Source
  KAKENHI-PROJECT-19360065
[Presentation] Analysis of Crack Propagation Induced by Laser Irradiation in Stealth Dicing2009
- Author(s)
  E.Ohmura, K.Ogawa, M.Kum agai, M.Nakano, K.Fukumitsu, H.Morita
- Organizer
  The Fifth International Congress on Laser Advan ced Materials Processing, LAMP2009
- Place of Presentation
  神戸
- Year and Date
  2009-07-02
- Data Source
  KAKENHI-PROJECT-19360065
[Presentation] ステルスダイシングにおける内部亀裂進展シミュレーション2009
- Author(s)
  小川健輔, 大村悦二, 熊谷正芳, 中野誠, 福満憲志, 平田好則
- Organizer
  2009年度精密工学会春季大会学術講演会
- Place of Presentation
  東京都
- Year and Date
  2009-03-13
- Data Source
  KAKENHI-PROJECT-19360065
[Presentation] Crack Propagation Analysis During Pulse Duration in Stealth Dicing2009
- Author(s)
  Etsuji Ohmura, Kensuke Ogawa, Masayoshi Kumagai, Makoto Nakano, Kenshi Fukumitsu, Hideki Morita
- Organizer
  The 28th International Congress on Application of Laser and Electro-Optics 2009 (ICALEO2009)
- Place of Presentation
  Orlando
- Year and Date
  2009-11-03
- Data Source
  KAKENHI-PROJECT-19360065
[Presentation] Crack Propagation Analysis During Pulse Duration in Stealth Dicing2009
- Author(s)
  E.Ohmura, K.Ogawa, M.Kumagai, M.Nakano, K.Fukumitsu, H.Morita
- Organizer
  The 28th International Congress on Application of Laser and Electro-Optics 2009, ICALEO2009
- Place of Presentation
  オーランド(米国)
- Year and Date
  2009-11-03
- Data Source
  KAKENHI-PROJECT-19360065
[Presentation] ステルスダイシングにおける応力拡大係数を用いたき裂進展解析2009
- Author(s)
  大村悦二・小川健輔・熊谷正芳・中野誠・福満憲志・森田英毅
- Organizer
  材料力学カンファレンスM&M2009
- Place of Presentation
  札幌
- Year and Date
  2009-07-24
- Data Source
  KAKENHI-PROJECT-19360065
[Presentation] ステルスダイシングにおけるシリコンウェハの温度場解析2008
- Author(s)
  大村悦二, 熊谷正芳, 福満憲志, 中野誠, 渥美一弘, 森田英毅
- Organizer
  2008年度精密工学会秋季大会学術講演会
- Place of Presentation
  仙台市
- Year and Date
  2008-09-18
- Data Source
  KAKENHI-PROJECT-19360065
[Presentation] Temperature field analysis of silicon wafer in stealth dicing2008
- Author(s)
  Etsuji Ohmura, Masayoshi Kumagai, Kenshi Fukumitsu, Makoto Nakano, Kazuhiro Atsumi, Hideki Morita
- Organizer
  The 27th International Congress on Application of Laser and Electro-Optics 2008 (ICALEO2008)
- Place of Presentation
  Temecula
- Year and Date
  2008-10-22
- Data Source
  KAKENHI-PROJECT-19360065
[Presentation] Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer2007
- Author(s)
  Etsuji Ohmura, Masayoshi Kumagai, Makoto Nakano, Koji Kuno, Kenshi Fukumitasu, Hideki Morita
- Organizer
  International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  福岡
- Year and Date
  2007-11-09
- Data Source
  KAKENHI-PROJECT-19360065
[Presentation] Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer2007
- Author(s)
  E. Ohmura, M. Kumagai, M. Nakano, K. Kuno, K. Fukumitsu, H. Morita
- Organizer
  International Conference on Leading Edge Manufacturing in 21st Century, LEM21
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2007-11-09
- Data Source
  KAKENHI-PROJECT-19360065
[Presentation] 極薄シリコンウェハのステルスダイシング2007
- Author(s)
  大村悦二・熊谷正芳・中野誠・渥美一弘・森田英毅
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川市
- Year and Date
  2007-09-13
- Data Source
  KAKENHI-PROJECT-19360065

1. KISHIDA Keizo (00029068)

# of Collaborated Projects: 8 results

# of Collaborated Products: 0 results
2. KATAOKA Toshihiko (50029328)

# of Collaborated Projects: 7 results

# of Collaborated Products: 0 results
3. YAMAUCHI Yoshiaki (00252619)

# of Collaborated Projects: 6 results

# of Collaborated Products: 2 results
4. OSHIKANE Yasushi (40263206)

# of Collaborated Projects: 6 results

# of Collaborated Products: 27 results
5. INOUE Haruyuki (30304009)

# of Collaborated Projects: 4 results

# of Collaborated Products: 18 results
6. TANAKA Kazuo (70171741)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
7. 前川一郎 (70018464)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
8. 庄子哲雄 (80091700)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
9. 高橋秀明 (10005267)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. 松縄朗 (20029119)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
11. OHMURA Etsuji (90144435)

# of Collaborated Projects: 1 results

# of Collaborated Products: 26 results
12. MATSUURA Toshiaki (60525145)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
13. MURAI Kensuke (00358144)

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
14. NORIMATSU Takayoshi (50135753)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. KITAGAWA Yoneyoshi (40093405)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. KODAMA Ryosuke (80211902)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. YOKOYAMA Takashi (60093944)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. 島本進

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. 片岡秀彦

# of Collaborated Projects: 0 results

# of Collaborated Products: 17 results

NAKANO Motohiro 中野 元博

NAKANO Notohiro 中野 元裕

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3D Design of Microscope for Soft X-Ray Imaging using Polycapillary Focusing OpticsPrincipal Investigator

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Developments of Plasma Soft X-ray Source for Microscopic Observation of Organelles in Living Cells with Focusing CapillaryPrincipal Investigator

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Profile Measurement System of Phase-Shifting Point Diffraction Interferometer with Spherical Reference Wavefronts Generated byTwo Optical FibersPrincipal Investigator

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Development of High Performance EUV Light Source Using Condensed Cone-center-axis Plasma Generated by Laser with Nano-second Pulse-powerPrincipal Investigator

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SIMULTANEOUS MEASUREMENT OF SHOCK-WAVE VELOCITY AND ULTRA-HIGH DENSITY WITH PENUMBRAL X-RAY BACKLIGHT TECHNIQUEPrincipal Investigator

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レーザ誘起衝撃波を用いた航空宇宙材料の衝撃破壊に関する研究Principal Investigator

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ひずみ速度履歴の影響を受ける弾粘塑性波伝播のハイブリッド法に基づく数値解析Principal Investigator

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Dynamic fracture initiation criterion in ceramics under combined mode impact loadingPrincipal Investigator

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NAKANO Motohiro 中野元博

NAKANO Notohiro 中野元裕