SHIMIZU Yasuo 清水康雄

Researcher Number	40581963
Other IDs	https://orcid.org/0000-0002-6844-8165
Affiliation (based on the past Project Information) *help	2020 – 2022: 国立研究開発法人物質・材料研究機構, 磁性・スピントロニクス材料研究拠点, NIMS特別研究員 2010 – 2019: 東北大学, 金属材料研究所, 助教
Review Section/Research Field	Principal Investigator Basic Section 21060:Electron device and electronic equipment-related / Nanomaterials engineering / Biomedical engineering/Biomaterial science and engineering / Electronic materials/Electric materials Except Principal Investigator Nuclear engineering / Medium-sized Section 31:Nuclear engineering, earth resources engineering, energy engineering, and related fields / Medium-sized Section 21:Electrical and electronic engineering and related fields / Electron device/Electronic equipment
Keywords	Principal Investigator ３次元アトムプローブ / 半導体 / 量子構造 / 同位体 / フォトニクス / ナノワイヤ / 透過電子顕微鏡 / 元素分析 / 硬さ / 元素分布 … More / 生体材料 / 歯学 / 複合クラスター / ナノ材料 / 電子・電気材料 … More Except Principal Investigator 3次元アトムプローブ / 原子力材料 / 照射欠陥 / 劣化機構 / 陽電子消滅 / 原子炉高経年化 / 粒界脆化 / 粒界偏析 / 応力下その場観察 / ウィークビーム走査型透過電子顕微鏡法 / 応用下その場観察 / 量子計測 / 確率的情報処理回路・システム / 量子物性制御デバイス / 量子物性制御 / 決定論的ドーピング法 / 透過電子顕微鏡 / 微小欠陥分布 / 元素分布 / トモグラフィー / 3次元トモグラフィー / 電子顕微鏡 / 原子炉材料 / 拡散 / マイクロ・ナノデバイス / ドーパント / 粒界拡散 / アトムプローブ / 事故時加熱環境 / 圧力容器 / 圧力容器鋼 / ナノ組織変化 / 先端分析手法 / 高温環境 / 原子炉構造材料 / 電子炉高経年化 / レーザー / 真空破面蒸着 / 応力腐食割れ Less

Three-dimensional atomic-scale control of co-doped elemental distributions towards high-efficiency luminescent devicesPrincipal Investigator
- Principal Investigator
  
  清水康雄
- Project Period (FY)
  2020 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  National Institute for Materials Science
Revealing Irradiation Hardening Mechanisms by a new in-situ observation method with sub-nm scale resolution
- Principal Investigator
  
  Nagai Yasuyoshi
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 31:Nuclear engineering, earth resources engineering, energy engineering, and related fields
- Research Institution
  Tohoku University
Development of single dopant circuit by deterministic doping and application to stochastic processing
- Principal Investigator
  
  Shinada Takahiro
- Project Period (FY)
  2018 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 21:Electrical and electronic engineering and related fields
- Research Institution
  Tohoku University
Study of Radiation Damage Mechanisms of Structural Materials in Nuclear Reactors by Defect structure - Elemental distribution Tomography
- Principal Investigator
  
  Nagai Yasuyoshi
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Nuclear engineering
- Research Institution
  Tohoku University
Establishment of analysis of single nanowire by atom probe tomography in combination with transmission electron microscopyPrincipal Investigator
- Principal Investigator
  
  Shimizu Yasuo
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Nanomaterials engineering
- Research Institution
  Tohoku University
Dopant diffusion paths in polycrystalline silicon gate of three-dimensional metal-oxide-semiconductor field effect transistor investigated by atom probe tomography
- Principal Investigator
  
  Inoue Koji
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tohoku University
Three-dimensional nanoscale elemental analysis in human teeth by atom probe tomography towards their soundness evaluationPrincipal Investigator
- Principal Investigator
  
  SHIMIZU Yasuo
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Biomedical engineering/Biomaterial science and engineering
- Research Institution
  Tohoku University
Atomic scale observation of grain boundary segregation in nuclear materials by atom probe tomography and study on mechanism of grain boundary degradation
- Principal Investigator
  
  NAGAI Yasuyoshi
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Nuclear engineering
- Research Institution
  Tohoku University
Interaction of coimplanted heterogeneous dopants in semiconductor materials investigated using three-dimensional atom probePrincipal Investigator
- Principal Investigator
  
  SHIMIZU Yasuo
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Tohoku University
Atomic scale observation of grain boundary segregation in nuclear materials by atom probe tomography and study on mechanism of grain boundary degradation
- Principal Investigator
  
  NAGAI Yasuyoshi
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Nuclear engineering
- Research Institution
  Tohoku University

All 2022 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 Other

All Journal Article Presentation Book

[Book] 日本分析化学会編、試料分析講座半導体・電子材料分析, (第6章三次元アトムプローブ(APT)担当)2013
- Author(s)
  朝山匡一郎、伊藤寛征、井上耕治、植田和弘、上殿明良、表和彦、小林慶規、齋藤正裕、笹川薫、清水康雄、末包高史、高野明雄、張利、永井康介、中村誠、福嶋球琳男、藤田高弥、藤村聖史、星野英樹、松下光英、山田隆、行嶋史郎
- Publisher
  丸善出版 (ISBN-13: 978-4621087008)
- Data Source
  KAKENHI-PROJECT-24760246
[Book] 日本分析化学会編, 試料分析講座半導体・電子材料分析2013
- Author(s)
  朝山匡一郎，伊藤寛征，井上耕治，植田和弘，上殿明良，表和彦，小林慶規，齋藤正裕，笹川薫，清水康雄，末包高史，高野明雄，張利，永井康介，中村誠，福嶋球琳男，藤田高弥，藤村聖史，星野英樹，松下光英，山田隆，行嶋史郎
- Total Pages
  328
- Publisher
  丸善出版
- Data Source
  KAKENHI-PROJECT-24760246
[Journal Article] Variation in atomistic structure due to annealing at diamond/silicon heterointerfaces fabricated by surface activated bonding2022
- Author(s)
  Ohno Yutaka、Liang Jianbo、Yoshida Hideto、Shimizu Yasuo、Nagai Yasuyoshi、Shigekawa Naoteru
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: SF Pages: SF1006-SF1006
- DOI
  10.35848/1347-4065/ac5d11
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00359, KAKENHI-PROJECT-23K21083
[Journal Article] AlGaN/GaN/3C-SiC on diamond HEMTs with thick nitride layers prepared by bonding-first process2022
- Author(s)
  Kagawa Ryo、Kawamura Keisuke、Sakaida Yoshiki、Ouchi Sumito、Uratani Hiroki、Shimizu Yasuo、Ohno Yutaka、Nagai Yasuyoshi、Liang Jianbo、Shigekawa Naoteru
- Journal Title
  
  Applied Physics Express
  
  Volume: 15 Issue: 4 Pages: 041003-041003
- DOI
  10.35848/1882-0786/ac5ba7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00359
[Journal Article] Fabrication of β-Ga2O3/Si heterointerface and characterization of interfacial structures for high power device applications2022
- Author(s)
  Liang Jianbo、Takatsuki Daiki、Higashiwaki Masataka、Shimizu Yasuo、Ohno Yutaka、Nagai Yasuyoshi、Shigekawa Naoteru
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: SF Pages: SF1001-SF1001
- DOI
  10.35848/1347-4065/ac4c6c
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00359, KAKENHI-PROJECT-19H02182
[Journal Article] Radiation-enhanced diffusion of copper in iron studied by three-dimensional atom probe2021
- Author(s)
  Toyama T.、Zhao C.、Yoshiie T.、Yamasaki S.、Uno S.、Shimodaira M.、Miyata H.、Suzudo T.、Shimizu Y.、Yoshida K.、Inoue K.、Nagai Y.
- Journal Title
  
  Journal of Nuclear Materials
  
  Volume: 556 Pages: 153176-153176
- DOI
  10.1016/j.jnucmat.2021.153176
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05323, KAKENHI-PROJECT-20H00359
[Journal Article] Room temperature direct bonding of diamond and InGaP in atmospheric air2021
- Author(s)
  Liang Jianbo、Nakamura Yuji、Ohno Yutaka、Shimizu Yasuo、Nagai Yasuyoshi、Wang Hongxing、Shigekawa Naoteru
- Journal Title
  
  Functional Diamond
  
  Volume: 1 Issue: 1 Pages: 110-116
- DOI
  10.1080/26941112.2020.1869435
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00359
[Journal Article] Insight into segregation sites for oxygen impurities at grain boundaries in silicon2021
- Author(s)
  Y. Ohno, J. Ren, S. Tanaka, M. Kohyama, K. Inoue, Y. Shimizu, Y. Nagai, H. Yoshida
- Journal Title
  
  Applied Physics Express
  
  Volume: 14 Issue: 4 Pages: 041003-041003
- DOI
  10.35848/1882-0786/abe80d
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18K05009, KAKENHI-PROJECT-20K04613, KAKENHI-PROJECT-20H00359
[Journal Article] Atom probe tomography of high-performance Si solar cells2021
- Author(s)
  清水康雄
- Journal Title
  
  Oyo Buturi
  
  Volume: 90 Issue: 10 Pages: 610-616
- DOI
  10.11470/oubutsu.90.10_610
- NAID
  130008101098
- ISSN
  0369-8009, 2188-2290
- Year and Date
  2021-10-05
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04613
[Journal Article] Crystallite distribution analysis based on hydrogen content in thin-film nanocrystalline silicon solar cells by atom probe tomography2021
- Author(s)
  Y. Shimizu, H. Sai, T. Matsui, K. Taki, T. Hashiguchi, H. Katayama, M. Matsumoto, A. Terakawa, K. Inoue, and Y. Nagai
- Journal Title
  
  Applied Physics Express
  
  Volume: 14 Issue: 1 Pages: 016501-016501
- DOI
  10.35848/1882-0786/abd13f
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04613
[Journal Article] Fabrication of high-quality GaAs/diamond heterointerface for thermal management applications2021
- Author(s)
  Jianbo Liang, Yuji Nakamura, Tianzhuo Zhan, Yutaka Ohno, Yasuo Shimizu, Kazu Katayama, Takanobu Watanabe, Hideto Yoshida, Yasuyoshi Nagai, Hongxing Wang, Makoto Kasu, Naoteru Shigekawa
- Journal Title
  
  Diamond & Related Materials
  
  Volume: 111 Pages: 108207-108207
- DOI
  10.1016/j.diamond.2020.108207
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02616, KAKENHI-PROJECT-20H00359
[Journal Article] Segregation mechanism of arsenic dopants at grain boundaries in silicon2021
- Author(s)
  Y. Ohno, T. Yokoi, Y. Shimizu, J. Ren, K. Inoue, Y. Nagai, K. Kutsukake, K. Fujiwara, A. Nakamura, K. Matsunaga, and H. Yoshida
- Journal Title
  
  Science and Technology of Advanced Materials: Methods
  
  Volume: 1 Issue: 1 Pages: 169-180
- DOI
  10.1080/27660400.2021.1969701
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K04613, KAKENHI-PROJECT-20H00359
[Journal Article] Multiscale characterization of the joint bonded by Cu@Ag core@shell nanoparticles2020
- Author(s)
  Tu Y.、Zhu P. L.、Li G.、Ouyang Q. L.、Chang H.、Zhou F. R.、Shimizu Y.、Inoue K.、Nagai Y.、Sun R.、Wong C. P.
- Journal Title
  
  Applied Physics Letters
  
  Volume: 116 Issue: 21 Pages: 213101-213101
- DOI
  10.1063/5.0007534
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Journal Article] Characterization of Nanoscopic Cu/Diamond Interfaces Prepared by Surface-Activated Bonding: Implications for Thermal Management2020
- Author(s)
  J. Liang, Y. Ohno, Y. Yamashita, Y. Shimizu, S. Kanda, N. Kamiuchi, S-W Kim, K. Koyama, Y. Nagai, M. Kasu, and N. Shigekawa
- Journal Title
  
  Appl. Nano Materials
  
  Volume: 3 Issue: 3 Pages: 2455-2462
- DOI
  10.1021/acsanm.9b02558
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02616, KAKENHI-PROJECT-18K19034, KAKENHI-PROJECT-20H00359
[Journal Article] 3D impurity profiles of doped/intrinsic amorphous-silicon layers composing textured silicon heterojunction solar cells detected by atom probe tomography2020
- Author(s)
  Y. Shimizu, B. Han, N. Ebisawa, Y. Ichihashi, T. Hashiguchi, H. Katayama, M. Matsumoto, A. Terakawa, K. Inoue, and Y. Nagai
- Journal Title
  
  Applied Physics Express
  
  Volume: 13 Issue: 12 Pages: 126503-126503
- DOI
  10.35848/1882-0786/abcd70
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04613, KAKENHI-PROJECT-20H00359
[Journal Article] Oxidation-enhanced Si self-diffusion in isotopically modulated silicon nanopillars2020
- Author(s)
  Kiga Ryotaro、Hayashi Sayaka、Miyamoto Satoru、Shimizu Yasuo、Nagai Yasuyoshi、Endoh Tetsuo、Itoh Kohei M.
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 127 Issue: 4 Pages: 045704-045704
- DOI
  10.1063/1.5134105
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00359
[Journal Article] Outstanding tensile properties of a precipitation-strengthened FeCoNiCrTi0.2 high-entropy alloy at room and cryogenic temperatures2019
- Author(s)
  Tong Y.、Chen D.、Han B.、Wang J.、Feng R.、Yang T.、Zhao C.、Zhao Y.L.、Guo W.、Shimizu Y.、Liu C.T.、Liaw P.K.、Inoue K.、Nagai Y.、Hu A.、Kai J.J.
- Journal Title
  
  Acta Materialia
  
  Volume: 165 Pages: 228-240
- DOI
  10.1016/j.actamat.2018.11.049
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PLANNED-18H05456
[Journal Article] Effect of carbon on boron diffusion and clustering in silicon: Temperature dependence study2018
- Author(s)
  Tu Y.、Shimizu Y.、Kunimune Y.、Shimada Y.、Katayama T.、Ide T.、Inoue M.、Yano F.、Inoue K.、Nagai Y.
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 124 Issue: 15 Pages: 155702-155702
- DOI
  10.1063/1.5048313
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-18H03766
[Journal Article] Composition evolution of gamma prime nanoparticles in the Ti-doped CoFeCrNi high entropy alloy2018
- Author(s)
  Han Bin、Wei Jie、Tong Yang、Chen Da、Zhao Yilu、Wang Jing、He Feng、Yang Tao、Zhao Can、Shimizu Yasuo、Inoue Koji、Nagai Yasuyoshi、Hu Alice、Liu Chain Tsuan、Kai Ji Jung
- Journal Title
  
  Scripta Materialia
  
  Volume: 148 Pages: 42-46
- DOI
  10.1016/j.scriptamat.2018.01.025
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-15H05413, KAKENHI-PLANNED-18H05456
[Journal Article] Industrial application of atom probe tomography to semiconductor devices2018
- Author(s)
  A. D. Giddings, S. Koelling, Y. Shimizu, R. Estivill, K. Inoue, W. Vandervorst, and W. K. Yeoh
- Journal Title
  
  Scripta Materialia
  
  Volume: 148 Pages: 82-90
- DOI
  10.1016/j.scriptamat.2017.09.004
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413, KAKENHI-PROJECT-16H02446
[Journal Article] Blocking of deuterium diffusion in poly-Si/Al2O3/HfxSi1?xO2/SiO2 high-k stacks as evidenced by atom probe tomography2018
- Author(s)
  Tu Y.、Han B.、Shimizu Y.、Kunimune Y.、Shimada Y.、Katayama T.、Ide T.、Inoue M.、Yano F.、Inoue K.、Nagai Y.
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 112 Issue: 3 Pages: 032902-032902
- DOI
  10.1063/1.5010256
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-15H05413
[Journal Article] Atom probe study of erbium and oxygen co-implanted silicon2017
- Author(s)
  Shimizu Yasuo、Tu Yuan、Abdelghafar Ayman、Yano Maasa、Suzuki Yudai、Tanii Takashi、Shinada Takahiro、Prati Enrico、Celebrano Michele、Finazzi Marco、Ghirardini Lavinia、Inoue Koji、Nagai Yasuyoshi
- Journal Title
  
  Proceedings of 2017 Silicon Nanoelectronics Workshop
  
  Volume: 2017 Pages: 99-100
- DOI
  10.23919/snw.2017.8242316
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Journal Article] Nanoscopic analysis of oxygen segregation at tilt boundaries in silicon ingots using atom probe tomography combined with TEM and ab initio calculations2017
- Author(s)
  OHNO Y.、INOUE K.、FUJIWARA K.、KUTSUKAKE K.、DEURA M.、YONENAGA I.、EBISAWA N.、SHIMIZU Y.、INOUE K.、NAGAI Y.、YOSHIDA H.、TAKEDA S.、TANAKA S.、KOHYAMA M.
- Journal Title
  
  Microscopy
  
  Volume: 268 Issue: 3 Pages: 230-238
- DOI
  10.1111/jmi.12602
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-15H03535, KAKENHI-PROJECT-15H05413
[Journal Article] Room-temperature 1.54 um photoluminescence from Er:Ox centers at extremely low concentration in silicon2017
- Author(s)
  M. Celebrano, L. Ghirardini, M. Finazzi, Y. Shimizu, Y. Tu, K. Inoue, Y. Nagai, T. Shinada, Y. Chiba, A. Abderghafar, M. Yano, T. Tanii, E. Prati
- Journal Title
  
  Opt. Lett. 42 (2017) 3311
  
  Volume: 42 Issue: 17 Pages: 3311-3314
- DOI
  10.1364/ol.42.003311
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H02751, KAKENHI-PROJECT-15H05413
[Journal Article] Atom probe tomographic assessment of the distribution of germanium atoms implanted in a silicon matrix through nano-apertures2017
- Author(s)
  Tu Y、Han B、Shimizu Y、Inoue K、Fukui Y、Yano M、Tanii T、Shinada T、Nagai Y
- Journal Title
  
  Nanotechnology
  
  Volume: 28 Issue: 38 Pages: 385301-385301
- DOI
  10.1088/1361-6528/aa7f49
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-17H02751, KAKENHI-PROJECT-15H05413
[Journal Article] Influence of laser power on atom probe tomographic analysis of boron distribution in silicon2017
- Author(s)
  Y. Tu, H. Takamizawa, B. Han, Y. Shimizu, K. Inoue, T. Toyama, F. Yano, A. Nishida, Y. Nagai
- Journal Title
  
  Ultramicroscopy
  
  Volume: 173 Pages: 58-63
- DOI
  10.1016/j.ultramic.2016.11.023
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-15H05413, KAKENHI-PROJECT-26289097
[Journal Article] Impact of local atomic stress on oxygen segregation at tilt boundaries silicon2017
- Author(s)
  Y. Ohno, K. Inoue, K. Fujiwara, K. Kutsukake, M. Deura, I. Yonenaga, N. Ebisawa, Y. Shimizu, K. Inoue, Y. Nagai, H. Yoshida, S. Takeda, S. Tanaka, M. Kohyama
- Journal Title
  
  Applied Physics Letters
  
  Volume: 110 Issue: 6
- DOI
  10.1063/1.4975814
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-26246016, KAKENHI-PROJECT-15H03535, KAKENHI-PROJECT-15H05413
[Journal Article] Weak-beam scanning transmission electron　microscopy for quantitative dislocation density measurement in steels2017
- Author(s)
  K. Yoshida, M. Shimodaira, T. Toyama, Y. Shimizu, K. Inoue, T. Yoshiie, K. J. Milan, R. Gerard, Y. Nagai
- Journal Title
  
  Microscopy
  
  Volume: 66 Pages: 120-130
- DOI
  10.1093/jmicro/dfw111
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-15H05413, KAKENHI-PROJECT-16H05966
[Journal Article] Predoping effects of boron and phosphorous on arsenic diffusion along grain boundaries in polycrystalline silicon investigated by atom probe tomography2016
- Author(s)
  H. Takamizawa, Y. Shimizu, K. Inoue, Y. Nozawa, T. Toyama, F. Yano, M. Inoue, A. Nishida, Y. Nagai
- Journal Title
  
  Applied Physics Express
  
  Volume: 9 Issue: 10 Pages: 253-256
- DOI
  10.7567/apex.9.106601
- NAID
  210000138076
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-15H05413, KAKENHI-PROJECT-26289097, KAKENHI-PROJECT-26709073
[Journal Article] Suppression of segregation of the phosphorus δ-doping layer in germanium by incorporation of carbon2016
- Author(s)
  M. Yamada, K. Sawano, M. Uematsu, Y. Shimizu, K. Inoue, Y. Nagai, and K. M. Itoh
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 3 Pages: 031304-031304
- DOI
  10.7567/jjap.55.031304
- NAID
  210000146129
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05413, KAKENHI-PROJECT-25600079, KAKENHI-PROJECT-26220602, KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-26286044
[Journal Article] Boron distributions in individual core-shell Ge/Si and Si/Ge heterostructured nanowires2016
- Author(s)
  B. Han, Y. Shimizu, J. Wipakorn, K. Nishibe, Y. Tu, K. Inoue, N. Fukata, Y. Nagai
- Journal Title
  
  Nanoscale
  
  Volume: 8 Issue: 47 Pages: 19811-19815
- DOI
  10.1039/c6nr04384d
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-26246021, KAKENHI-PROJECT-15H05413
[Journal Article] Recombination activity of nickel, copper, and oxygen atoms segregating at grain boundaries in mono-like silicon crystals2016
- Author(s)
  Y. Ohno, K. Kutsukake, M. Deura, I. Yonenaga, Y. Shimizu, N. Ebisawa, K. Inoue, Y. Nagai, H. Yoshida, S. Takeda
- Journal Title
  
  Applied Physics Letters
  
  Volume: 109 Issue: 14
- DOI
  10.1063/1.4964440
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-15H03535, KAKENHI-PROJECT-15H05413
[Journal Article] Impact of carbon co-implantation on boron distribution and activation in silicon studied by atom probe tomography and spreading resistance measurements2016
- Author(s)
  Y. Shimizu, H. Takamizawa, K. Inoue, F. Yano, S. Kudo, A. Nishida, T. Toyama, and Y. Nagai
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 2 Pages: 026501-026501
- DOI
  10.7567/jjap.55.026501
- NAID
  210000146038
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05413, KAKENHI-PROJECT-26289097, KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-26709073
[Journal Article] Boron distributions in individual core-shell Ge/Si and Si/Ge heterostructured nanowires2016
- Author(s)
  B. Han, Y. Shimizu, J. Wipakorn, K. Nishibe, Y. Tu, K. Inoue, N. Fukata, and Y. Nagai
- Journal Title
  
  Nanoscale
  
  Volume: 8 Pages: 19811-19815
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26289097
[Journal Article] Evolution of shape, size, and areal density of a single plane of Si nanocrystals embedded in SiO2 matrix studied by atom probe tomography2016
- Author(s)
  B. Han, Y. Shimizu, G. Seguini, E. Arduca, C. Castro, G. Ben Assayag, K. Inoue, Y. Nagai, S. Schamm-Chardon, and M. Perego
- Journal Title
  
  RSC Advances
  
  Volume: 6 Issue: 5 Pages: 3617-3622
- DOI
  10.1039/c5ra26710b
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413, KAKENHI-PROJECT-16H02446
[Journal Article] Quantitative analysis of hydrogen in SiO2/SiN/SiO2 stacks using atom probe tomography2016
- Author(s)
  Y. Kunimune, Y. Shimada, Y. Sakurai, M. Inoue, A. Nishida, B. Han, Y. Tu, H. Takamizawa, Y. Shimizu, K. Inoue, F. Yano, Y. Nagai, T. Katayama, and T. Ide
- Journal Title
  
  AIP Advances
  
  Volume: 6 Issue: 4
- DOI
  10.1063/1.4948558
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16H02446, KAKENHI-PROJECT-15H05413, KAKENHI-PROJECT-26289097
[Journal Article] Microstructural evolution of RPV steels under proton and ion irradiation studied by positron annihilation spectroscopy2015
- Author(s)
  J. Jiang, Y.C. Wu,　X.B. Liu, R.S. Wang, Y. Nagai, K. Inoue, Y. Shimizu, T. Toyama
- Journal Title
  
  J. Nucl. Mater.
  
  Volume: 458 Pages: 326-334
- DOI
  10.1016/j.jnucmat.2014.12.113
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24246155
[Journal Article] Phosphorus and boron diffusion paths in polycrystalline silicon gate of a trench-type three-dimensional metal-oxide-semiconductor field effect transistor investigated by atom probe tomography2015
- Author(s)
  B. Han, H. Takamizawa, Y. Shimizu, K. Inoue, Y. Nagai, F. Yano, Y. Kunimune, M. Inoue, and A. Nishida
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 107 Issue: 2 Pages: 023506-023506
- DOI
  10.1063/1.4926970
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26289097
[Journal Article] Effects of Post-irradiation Annealing and Reirradiation on Microstructure in Surveillance Test Specimens of the Loviisa-1 Reactor Studied by Atom Probe Tomography and Positron Annihilation2014
- Author(s)
  T.Toyama, A.Kuramoto, Y.Nagai, K.Inoue, Y.Nozawa, Y.Shimizu, Y.Matsukawa, M.Hasegawa, M.Valo
- Journal Title
  
  Journal of Nuclear Materials
  
  Volume: 449 Issue: 1-3 Pages: 207-212
- DOI
  10.1016/j.jnucmat.2014.01.036
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22686058, KAKENHI-PROJECT-24246155
[Journal Article] Behavior of phosphorous and contaminants from monolayer doping combined with a conventional spike annealing method2014
- Author(s)
  Y. Shimizu, H. Takamizawa, K. Inoue, F. Yano, Y. Nagai, L. Lamagna, G. Mazzeo, M. Perego, and E. Prati
- Journal Title
  
  Nanoscale
  
  Volume: Vol. 6, Issue 2 Issue: 2 Pages: 706-710
- DOI
  10.1039/c3nr03605g
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760246
[Journal Article] The diffusivity and solubility of copper in ferromagnetic iron at lower temperatures studied by atom probe tomography2014
- Author(s)
  T. Toyama, F. Takahama, A. Kuramoto, H. Takamizawa, Y. Nozawa, N. Ebisawa, M. Shimodaira, Y. Shimizu, K. Inoue, Y. Nagai
- Journal Title
  
  Scripta Materialia
  
  Volume: 83 Pages: 5-8
- DOI
  10.1016/j.scriptamat.2014.03.009
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24246155, KAKENHI-PROJECT-26709073
[Journal Article] Three-dimensional evaluation of gettering ability of Σ3{111} grain boundaries in silicon by atom probe tomography combined with transmission electron microscopy2013
- Author(s)
  Y. Ohno, K. Inoue, Y. Tokumoto, K. Kutsukake, I. Yonenaga, N. Ebisawa, H. Takamizawa, K. Inoue, Y. Nagai, H. Yoshida and S. Takeda
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 103 Issue: 10
- DOI
  10.1063/1.4820140
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656380, KAKENHI-PROJECT-24760246
[Journal Article] Three-dimensional dopant characterization in actual metal-oxide-semiconductor devices of 65 nm node by atom probe tomography.2013
- Author(s)
  K. Inoue, H. Takamizawa, Y. Shimizu, T. Toyama, F. Yano, A. Nishida, T. Mogami, K. Kitamoto, T. Miyagi, J. Kato, S. Akahori, N. Okada, M. Kato, H. Uchida, Y. Nagai
- Journal Title
  
  Applied Physics Express
  
  Volume: 4 Issue: 4 Pages: 046502-046502
- DOI
  10.7567/apex.6.046502
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J08082, KAKENHI-PROJECT-24760246
[Journal Article] Three-dimensional characterization of deuterium implanted in silicon using atom probe tomography2013
- Author(s)
  H. Takamizawa, K. Hoshi, Y. Shimizu, F. Yano, K. Inoue, S. Nagata, T. Shikama, and Y. Nagai
- Journal Title
  
  Applied Physics Express
  
  Volume: Vol. 6 Issue: 6 Pages: 066602-066602
- DOI
  10.7567/apex.6.066602
- NAID
  10031181995
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760246
[Journal Article] Atomic-scale characterization of germanium isotopic multilayers by atom probe tomography2013
- Author(s)
  Y. Shimizu, H. Takamizawa, Y. Kawamura, M. Uematsu, T. Toyama, K. Inoue, E.. E.. Haller, K. M. Itoh, Y. Nagai
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 113 Issue: 2 Pages: 0261011-3
- DOI
  10.1063/1.4773675
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J08082, KAKENHI-PROJECT-22241024, KAKENHI-PROJECT-24560413, KAKENHI-PROJECT-24760246
[Journal Article] Elemental Distribution Analysis of Semiconductor Nanostructures with Atom Probe Tomography2013
- Author(s)
  清水康雄, 井上耕治, 高見澤悠, 矢野史子, 永井康介
- Journal Title
  
  Journal of the Vacuum Society of Japan
  
  Volume: 56 Issue: 9 Pages: 340-347
- DOI
  10.3131/jvsj2.56.340
- NAID
  10031195256
- ISSN
  1882-2398, 1882-4749
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760246
[Journal Article] Correlation between threshold voltage and channel boron concentration in silicon-based negative-type metal-oxide-emiconductor field-effect transistors studied by atom probe tomography.2012
- Author(s)
  H. Takamizawa, Y. Shimizu, K. Inoue, T.Toyama, F. Yano, A. Nishida, T. Mogami, N. Okada, M. Kato, H. Uchida, K. Kitamoto, T. Miyagi, J, Kato, and Y. Nagai
- Journal Title
  
  Applied Physics Letters
  
  Volume: 100 Issue: 25
- DOI
  10.1063/1.4730437
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J08082, KAKENHI-PROJECT-24760246
[Journal Article] レーザー３次元アトムプローブによる半導体材料中のドーパント分布解析2012
- Author(s)
  井上耕治, 清水康雄, 高見澤悠
- Journal Title
  
  日本物理学会誌
  
  Volume: 67 Pages: 645-649
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] Grain boundary segregation of arsenic dopants in silicon crystal revealed by atom probe tomography combined with low-temperature focused ion beam2022
- Author(s)
  Y. Ohno, Y. Shimizu, K. Inoue, Y. Nagai, T. Yokoi, A. Nakamura, K. Matsunaga, H. Yoshida
- Organizer
  Summit of Materials Science 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] GaN/ダイヤモンド接合界面の特性評価2022
- Author(s)
  梁剣波、清水康雄、大野裕、永井康介、重川直輝
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] シリコン粒界におけるヒ素ドーパントの偏析機構2021
- Author(s)
  大野裕, 清水康雄, JieRen, 横井達也, 井上耕治, 永井康介, 吉田秀人, 沓掛健太朗, 藤原航三, 中村篤智, 松永克志
- Organizer
  2021年度大洗・アルファ合同研究会
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Nanostructural analysis of Al/β-Ga2O3 interface fabricated using surface activated bonding2021
- Author(s)
  K. Sawai, J. Liang, Y. Shimizu, Y. Ohno, Y. Nagai, N. Shigekawa
- Organizer
  2021 7th International Workshop on Low Temperature Bonding for 3D Integration
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Fabrication of Ga2O3/3C-SiC direct bonding for efficient surface heat dissipation2021
- Author(s)
  H. Nagai, K. Kawamura, Y. Sakaida, H. Uratani, Y. Shimizu, Y. Ohno, Y. Nagai, N. Shigekawa, and J. Liang
- Organizer
  2021 7th International Workshop on Low Temperature Bonding for 3D Integration
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Fabrication of GaN/SiC/diamond structure for efficient thermal management of power device2021
- Author(s)
  R. Kagawa, K. Kawamura, Y. Sakaida，S. Ouchi，H. Uratani, Y. Shimizu, Y. Ohno, Y. Nagai, N. Shigekawa, and J. Liang
- Organizer
  2021 7th International Workshop on Low Temperature Bonding for 3D Integration
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Fabrication of Ga2O3/Si direct bonding interface for high power device applications2021
- Author(s)
  J. Liang, D. Takatsuki, Y. Shimizu, M. Higashiwaki, Y. Ohno, Y. Nagai, and N. Shigekawa
- Organizer
  2021 7th International Workshop on Low Temperature Bonding for 3D Integration
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] 3DAPとWB-STEMを組み合わせた中性子照射鋼材中の硬化因子の定量解析2021
- Author(s)
  吉田健太、嶋田雄介、清水康雄、杜玉峰、外山健、井上耕治、永井康介
- Organizer
  日本顕微鏡学会第77回学術講演会
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Precise analysis of segregation sites for As dopants at Si grain boundaries2021
- Author(s)
  Y. Ohno, T. Yokoi, Y. Shimizu, J. Ren, K. Inoue, Y. Nagai, K. Kutsukake, K. Fujiwara, A. Nakamura, K. Matsunaga, H. Yoshida
- Organizer
  Materials Research Meeting 2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Fabrication and Characterization of GaN/Diamond bonding interface2021
- Author(s)
  A. Kobayashi, Y. Shimizu, Y. Ohno, S. W. Kim, K. Koyama, M. Kasu, Y. Nagai, N. Shigekawa, and J. Liang
- Organizer
  2021 7th International Workshop on Low Temperature Bonding for 3D Integration
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Structural analysis of diamond/silicon heterointerfaces fabricated by surface activated bonding at room temperature2021
- Author(s)
  Y. Ohno, J. Liang, H. Yoshida, Y. Shimizu, Y. Nagai and N. Shigekawa
- Organizer
  2021 7th International Workshop on Low Temperature Bonding for 3D Integration
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Polarization inverted GaN/GaN junctions fabricated by surface-activated bonding2021
- Author(s)
  K. Sawai, J. Liang, Y. Shimizu, Y. Ohno, Y. Nagai, and N. Shigekawa
- Organizer
  2021 7th International Workshop on Low Temperature Bonding for 3D Integration
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Mechanism of direct bonding via surface activation to fabricate Si/GaAs heterointerfaces towards tandem solar cells2020
- Author(s)
  Y. Ohno, J. Liang, N. Shigekawa, H. Yoshida, S. Takeda, R. Miyagawa, Y. Shimizu, and Y. Nagai
- Organizer
  2020 European Materials Research Society
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Microscopic picture of direct bonding via surface activation for low-resistance Si/wide-gap semiconductor heterointerfaces2020
- Author(s)
  Y. Ohno, J. Liang, N. Shigekawa, H. Yoshida, R. Miyagawa, Y. Shimizu, and Y. Nagai
- Organizer
  PRiME2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] 3次元アトムプローブによる純鉄粒界中のCu拡散係数の直接導出2020
- Author(s)
  宮田穂高、外山健、下平昌樹、趙燦、柴原理恵、藏野功、野沢康子、清水康雄、井上耕治、永井康介
- Organizer
  日本金属学会2020年秋期講演大会
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Direct bonding of GaAs and diamond for high power device applications2020
- Author(s)
  J. Liang, Y. Nakamura, Y. Ohno, Y. Shimizu, T.Z. Zhan, T. Watanabe, N. Kamiuchi, Y. Nagai, and N. Shigekawa
- Organizer
  PRiME2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Direct observation of Cu diffusivity in Pure Iron Grain Boundary by Atom Probe Tomography2020
- Author(s)
  H. Miyata, T. Toyama, M. shimodaira, C. Zhao, R. Shibahara, K. Kurano, Y. Nozawa, Y. Shimizu, K. Inoue, Y. Nagai
- Organizer
  GIMRT REMAS 2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Mechanism of low-temperature direct bonding via surface activation for Si/diamond and Si/GaAs heterointerfaces2020
- Author(s)
  Y. Ohno, J. Liang, N. Shigekawa, H. Yoshida, R. Miyagawa, Y. Shimizu, and Y. Nagai
- Organizer
  International Conference on the Physics of Semiconductors 2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] How to fabricate low-resistance heterointerfaces for tandem cells by direct bonding at low temperatures2020
- Author(s)
  Y. Ohno, J. Liang, N. Shigekawa, H. Yoshida, R. Miyagawa, Y. Shimizu, and Y. Nagai
- Organizer
  37th EU PVSEC
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Atom probe analysis of dopant distribution in commercial solar cells2020
- Author(s)
  Y. Shimizu
- Organizer
  GIMRT Joint International Symposium on Radiation Effects in Materials and Actinide Science
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04613
[Presentation] Mechanism of surface activated bonding for low-resistance Si/diamond and Si/GaAs heterointerfaces2020
- Author(s)
  Y. Ohno, J. Liang, N. Shigekawa, H. Yoshida, R. Miyagawa, Y. Shimizu, and Y. Nagai
- Organizer
  The 15th International Conference Beam Injection Assessment of Microstructures in Semiconductors
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Characterization of the diamond/GaAs direct bonding interfaces fabricated by surface activated bonding2020
- Author(s)
  Y. Nakamura, Y. Shimizu, Y. Ohno, S. W. Kim, K. Koyama, H. X. Wang, N. Shigekawa, and J. Liang
- Organizer
  14th International Conference on New Diamond and Nano Carbons
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Formation process of high thermal-stability diamond/Si and diamond/GaAs heterointerfaces by surface activated bonding2020
- Author(s)
  Y. Ohno, J. Liang, Y. Shimizu, H. Yoshida, N. Shigekawa
- Organizer
  2020 Joint MRS Spring and Fall Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] Characterization of GaN/diamond interface prepared by surface activated bonding for thermal management2020
- Author(s)
  J. Liang, A. Kobayashi, Y. Shimizu, Y. Ohno, S. W. Kim, K. Koyama, M. Kasu, and N. Shigekawa
- Organizer
  Compound Semiconductor Week
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00359
[Presentation] ３次元アトムプローブを用いた薄膜微結晶シリコン太陽電池の微結晶分布の視覚化2020
- Author(s)
  清水康雄, 瀧謙司, 橋口大樹, 片山博貴, 松本光弘, 寺川朗, 齋均, 松井卓矢, 井上耕治, 永井康介
- Organizer
  第17回「次世代の太陽光発電システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-20K04613
[Presentation] MOSトランジスタへのErイオン注入と1.5 μm帯光励起電流の計測2019
- Author(s)
  藤本宇郁, 魏啓楠, 鈴木雄大, 清水康雄, 井上耕治, 永井康介, M.Celebrano, E. Prati, L. Ghirardini, M. Finazzi, 品田高宏, 谷井孝至
- Organizer
  東北大学金属材料研究所付属量子エネルギー材料科学国際研究センター　2019年度大洗アルファ合同研究会
- Data Source
  KAKENHI-PROJECT-18H03766
[Presentation] シリコン同位体ナノピラー構造中における酸化増速自己拡散のアトムプローブ観測2019
- Author(s)
  木我亮太郎, 林彩弥佳, 宮本聡, 清水康雄, 永井康介, 遠藤哲郎, 伊藤公平
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] 3次元PLイメージング法で同定したハイパフォーマンス多結晶シリコンインゴット中の転位発生点近傍の透過電子顕微鏡解析2019
- Author(s)
  大野裕, 田島和哉, 沓掛健太朗, 清水康雄, 永井康介, 宇佐美徳隆
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Opportunities of deterministic doping technology for quantum and stochastic processing2019
- Author(s)
  Takahiro Shinada, Takashi Tanii, Takahide Oya, Yasuo Shimizu, Koji Inoue, Yukio Kawano and Enrico Prati
- Organizer
  235th ECS Meeting
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H03766
[Presentation] 表面活性化接合によるGaAs/GaAs界面における元素分布評価2019
- Author(s)
  清水康雄, 海老澤直樹, 大野裕, 梁剣波, 重川直輝, 井上耕治, 永井康介
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Recombination activity of inclined Σ3{111} asymmetric grain boundaries in high-performance Si ingots2018
- Author(s)
  Y. Ohno, K. Kutsukake, T. Tamaoka, S. Takeda, N. Ebisawa, Y. Shimizu, K. Inoue, Y. Nagai, and N. Usami
- Organizer
  The 8th Forum on the Science and Technology of Silicon Materials 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] シリコン結晶中のΣ9{111}/{115}非対称粒界に形成される多形構造2018
- Author(s)
  大野裕、吉田秀人、竹田精治、横井達也、中村篤智、松永克志、清水康雄、永井康介
- Organizer
  第74回日本電子顕微鏡学会学術講演会
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Effect of coimplanted carbon on boron behavior in silicon: SIMS and atom probe study2018
- Author(s)
  Y. Shimizu, Y. Tu, F. Yano, K. Inoue, and Y. Nagai
- Organizer
  20th Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS-20)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Controlled Creation of Erbium-Oxygen Centers in Silicon by Deterministic Ion Implantation for Room-Temperature Photoluminescence at Telecom Wavelength2018
- Author(s)
  T. Tanii, Y. Suzuki, K. Gi, M. Celebrano, L. Ghirardini, P. Biagioni, M. Finazzi, Y. Shimizu, Y. Tu, K. Inoue, Y. Nagai, E. Prati, T. Shinada
- Organizer
  22nd International Conference on Ion Implantation Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H03766
[Presentation] Chemical nanoanalyses at grain boundaries by joint use of scanning transmission electron microscopy and atom probe tomography2018
- Author(s)
  Y. Ohno, K. Inoue, K. Fujiwara, K. Kutsukake, M. Deura, I. Yonenaga, N. Ebisawa, Y. Shimizu, K. Inoue, Y. Nagai, H. Yoshida, S. Takeda, S. Tanaka, and M. Kohyama
- Organizer
  AiMES 2018 ECS and SMEQ Joint International Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Σ3{111}対称傾角粒界の不純物偏析能とキャリア再結合速度に対する傾角のずれの影響2018
- Author(s)
  大野裕、沓掛健太朗、玉岡武泰、竹田精治、清水康雄、海老澤直樹、井上耕治、永井康介、宇佐美徳隆
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Recombination activity of inclined Σ3{111} grain boundaries in high-performance Si ingots2018
- Author(s)
  Y. Ohno, K Kutsukake, T. Tamaoka, S. Takeda, Y. Shimizu, N. Ebisawa, K. Inoue, Y. Nagai, and N. Usami
- Organizer
  2018 Materials Research Society (MRS) Fall Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Chemical nano-analysis at Si grain boundaries by atom probe tomography combined with STEM and ab-initio calculations2018
- Author(s)
  Y. Ohno, K. Kutsukake, I. Yonenaga, N. Ebisawa, Y. Shimizu, K. Inoue, Y. Nagai, H. Yoshida, S. Takeda, T. Yokoi, A. Nakamura, and K. Matsunaga
- Organizer
  The 8th Forum on the Science and Technology of Silicon Materials 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Mechanism of Oxygen Sergegation in Multicrystalline Sillicon2018
- Author(s)
  Y. Ohno, K. Inoue, K. Fujiwara, K. Kutsukake, M. Deura, I. Yonenaga, N. Ebisawa, Y. Shimizu, K. Inoue,Y. Nagai, T. Yokoi, K. Nakamura, K. Matsunaga, H. Yoshida, S. Takeda, S. Tanaka, M. Kohyama
- Organizer
  10th International Workshop on Crystalline Silicon for Solar Cells (CSSC-10)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Structural bistability in Σ9{111}/{115} asymmetric grain boundary in Si ingots2018
- Author(s)
  Y. Ohno, H. Yoshida, S. Takeda, T. Yokoi, A. Nakamura, K. Matsunaga, Y. Shimizu, Y. Nagai
- Organizer
  19th International Conference on Extended Defects in Semiconductors (EDS2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Oxidation-enhanced Si self-diffusion in isotopically modulated nanopillars2018
- Author(s)
  R. Kiga, S. Hayashi, S. Miyamoto, Y. Shimizu, T. Endoh, Y. Nagai, and K. M. Itoh
- Organizer
  2018 Materials Research Society (MRS) Fall Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Impurity distribution at Si/GaAs heterointerfaces fabricated by surface-activated bonding analyzed by atom probe tomography2018
- Author(s)
  Y. Shimizu, N. Ebisawa, Y. Ohno, J. Liang, N. Shigekawa, K. Inoue, and Y. Nagai
- Organizer
  2018 Materials Research Society (MRS) Fall Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Dopant Behavior in Semiconductor Materials and Nanostructures Analyzed by Atom Probe Tomography2018
- Author(s)
  Y. Shimizu
- Organizer
  第19回「イオンビームによる表面・界面解析」特別研究会
- Invited
- Data Source
  KAKENHI-PROJECT-18H03766
[Presentation] シリコン中におけるエルビウム-酸素複合体の室温での光学的活性の理解2018
- Author(s)
  清水康雄、Y. Tu、アブデルガファ愛満、鈴木雄大、魏啓楠、谷井孝至、品田高宏、Prati Enrico、Celebrano Michele、Finazzi Marco、Ghirardini Lavinia、井上耕治、永井康介
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-18H03766
[Presentation] 鉄中の銅拡散に対する電子線照射効果2018
- Author(s)
  外山健、Zhao Can、義家敏正、下平昌樹、清水康雄、井上耕治、永井康介
- Organizer
  日本原子力学会2018年春の年会
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Atom probe study of silicon-based device structures2018
- Author(s)
  Y. Shimizu, B. Han, Y. Tu, K. Inoue, and Y. Nagai
- Organizer
  Atom Probe Tomography and Microscopy (APT&M) 2018
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Controlled Creation of Erbium-Oxygen Centers in Silicon by Deterministic Ion Implantation for Room-Temperature Photoluminescence at Telecomm Wavelength2018
- Author(s)
  T. Tanii, Y. Suzuki, K. Gi, M. Celebrano, L. Ghirardini, P. Biagioni, M. Finazzi, Y. Shimizu, Y. Tu, K. Inoue, Y. Nagai, E. Prati, and T. Shinada
- Organizer
  22nd International Conference on Ion Implantation Technology (IIT 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Atom probe study of impurity distribution at Si/GaAs heterointerfaces fabricated by surface-activated bonding2018
- Author(s)
  Y. Shimizu, N. Ebisawa, Y. Ohno, J. Liang, N. Shigekawa, K. Inoue, and Y. Nagai
- Organizer
  Summit of Materials Science 2018 (SMS2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] シリコン中におけるエルビウム－酸素複合体の室温での光学的活性の理解2018
- Author(s)
  清水康雄、Tu Yuan、アブデルガファ愛満、鈴木雄大、魏啓楠、谷井孝至、品田高宏、P. Enrico、C. Michele、F. Marco、G.　Lavinia、井上耕治、永井康介
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Atom probe study of silicon-based device structures2018
- Author(s)
  Y. Shimizu
- Organizer
  Atom Probe Tomography and Microscopy (APT&M) 2018
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H03766
[Presentation] Atom probe tomography investigation of silicon self-diffusion in isotopically modulated nanopillars2018
- Author(s)
  R. Kiga, S. Hayashi, S. Miyamoto, Y. Shimizu, T. Endoh, Y. Nagai, and K. M. Itoh
- Organizer
  20th Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS-20)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Growth mechanism of polymorphism of asymmetric Sigma-9{115}/{111} interfaces in silicon2018
- Author(s)
  Y. Ohno, T. Yokoi, A. Nakamura, K. Matsunaga, H. Yoshida, S. Takeda, Y. Shimizu, Y. Nagai
- Organizer
  34th International Conference on the Physics of Semiconductors (ICPS2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] データ科学を活用した高品質多結晶材料創製に向けて2018
- Author(s)
  宇佐美徳隆、沓掛健太朗、松本哲也、工藤博章、横井達矢、清水康雄、大野裕
- Organizer
  日本セラミックス協会第31回秋季シンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Oxidation-enhanced Si self-diffusion in isotopically modulated nanopillars2018
- Author(s)
  R. Kiga, S. Hayashi, S. Miyamoto, Y. Shimizu, T. Endoh, Y. Nagai, and K. M. Itoh
- Organizer
  2018 MRS Fall Meeting and Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Impurity distribution at Si/GaAs heterointerfaces fabricated by surface-activated bonding analyzed by atom probe tomography2018
- Author(s)
  Y. Shimizu, N. Ebisawa, Y. Ohno, J. Liang, N. Shigekawa, K. Inoue, and Y. Nagai
- Organizer
  2018 MRS Fall Meeting and Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Recombination activity of inclined Σ3{111} grain boundaries in high-performance Si ingots2018
- Author(s)
  Y. Ohno, K Kutsukake, T. Tamaoka, S. Takeda, Y. Shimizu, N. Ebisawa, K. Inoue, Y. Nagai, and N. Usami
- Organizer
  2018 MRS Fall Meeting and Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] アトムプローブ法を用いたシリコン中のエルビウム不均一分布評価2017
- Author(s)
  清水康雄、Y. Tu、アブデルガファ愛満、矢野真麻、鈴木雄大、谷井孝至、品田高宏、E. Prati、M. Celebrano、M. Finazzi、L. Ghirardini、井上耕治、永井康介
- Organizer
  第133回東北大学金属材料研究所講演会
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] 3D-APで調べた鉄中の銅拡散に対する電子線照射効果2017
- Author(s)
  外山健、下平昌樹、C.　Zhao、戸村恵子、海老澤直樹、吉田健太、清水康雄、井上耕治、永井康介、義家敏正
- Organizer
  日本金属学会2017年春期大会
- Place of Presentation
  首都大学東京
- Year and Date
  2017-03-15
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Direct observation of trapping of implanted deuterium in poly-Si/Al2O3/HfxSi1-xO2/SiO2 high-k stacks2017
- Author(s)
  Y. Tu, B. Han, Y. Shimizu, M. Inoue, Y. Kunimune, Y. Shimada, T. Katayama, T. Ide, S. Nagata, K. Inoue, and Y. Nagai
- Organizer
  2017 Materials Research Society Fall Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Direct Observation of Trapping of Implanted Deuterium in Poly-Si/Al2O3/HfxSi1-xO2/SiO2 High-k Stacks2017
- Author(s)
  Y. Tu, B. Han, Y. Shimizu, M. Inoue, Y. Kunimune, Y. Shimada, T. Katayama, T. Ide, S. Nagata, K. Inoue, Y. Nagai
- Organizer
  2017 MRS Fall Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Chemicalnanoanalysesat grain boundariesby joint use of atom probe tomography and TEMcombined with ab-initio calculations2017
- Author(s)
  Y. Ohno, K. Inoue, K. Fujiwara, K. Kutsukake, M. Deura, I. Yonenaga, N. Ebisawa, Y. Shimizu, K. Inoue, Y. Nagai, H. Yoshida, S. Takeda, S. Tanaka M. Kohyama
- Organizer
  European Materials Research Society (E-MRS) 2017 Spring Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] シリコン中に形成されたエルビウム不均一分布の３次元アトムプローブ評価2017
- Author(s)
  清水康雄、Y. Tu, アブデルガファ愛満、矢野真麻、鈴木雄大、谷井孝至、品田高宏、Prati Enrico、井上耕治、永井康介
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Irradiation effects on diffusivity of copper in ferromagnetic iron studied by atom probe tomography2017
- Author(s)
  T. Toyama, M. Shimodaira, K. Tomura, N. Ebisawa, K. Nagumo, Y. Shimizu, K. Inoue, Y. Nagai
- Organizer
  2017 TMS Annual Meeting & Exhibition
- Place of Presentation
  San Diego, California, USA
- Year and Date
  2017-02-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] ３次元アトムプローブ法を用いた材料解析：原理と応用2017
- Author(s)
  清水康雄
- Organizer
  日本学術振興会結晶加工と評価技術第145委員会第156回研究会
- Invited
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Effect of carbon on boron clustering and diffusion in silicon studied by atom probe tomography2017
- Author(s)
  Y. Tu, Y. Shimizu, M. Inoue, Y. Kunimune, Y. Shimada, T. Katayama, T. Ide, K. Inoue, Y. Nagai
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Dopant Distribution Analysis Core-Shell Nanowires by Atom Probe Tomography2017
- Author(s)
  Y. Shimizu, B. Han, W. Jevasuwan, K. Nishibe, Y. Tu, K. Inoue, N. Fukata, Y. Nagai
- Organizer
  2017 MRS Fall Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Atom Probe Study of Erbium and Oxygen Co‐Implanted Silicon2017
- Author(s)
  Y. Shimizu, Y. Tu, A. Abdelghafar, M. Yano, Y. Suzuki, T. Tanii, T. Shinada, E. Prati, M. Celebrano, M. Finazzi, L. Ghirardini, K. Inoue, Y. Nagai
- Organizer
  2017 Silicon Nanoelectronics Workshop
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Atom probe study of semiconductor-based nanostructure2017
- Author(s)
  Y. Shimizu
- Organizer
  15th International Conference on Advanced Materials
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] シリコン中の傾角粒界における酸素の偏析機構2017
- Author(s)
  大野裕、井上海平、藤原航三、沓掛健太朗、出浦桃子、米永一郎、海老澤直樹、清水康雄、井上耕治、永井康介、吉田秀人、竹田精治、田中真悟、香山正憲
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Atom probe tomographic study on implanted deuterium in Al2O3/HfxSi1-xO2/SiO2 stacks2017
- Author(s)
  Y. Tu, B. Han, Y. Shimizu, Y. Kunimune, Y. Shimada, M. Inoue, K. Inoue, S. Nagata, and Y. Nagai
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜、横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] モノライクシリコンにおける不純物の粒界偏析機構2017
- Author(s)
  大野裕、沓掛健太朗、出浦桃子、米永一郎、清水康雄、井上耕治、海老澤直樹、永井康介、吉田秀人、竹田精治
- Organizer
  日本物理学会第72回年次大会
- Place of Presentation
  大阪大学豊中キャンパス
- Year and Date
  2017-03-17
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Dislocations on Sigma-5{013} grain boundaries in mono-cast Si; atomistic structure and effects on mechanical properties2017
- Author(s)
  Y. Ohno, K. Kutsukake, M. Deura, I. Yonenaga, H. Yoshida, S. Takeda, Y. Shimizu, N. Ebisawa, K. Inoue, Y. Nagai
- Organizer
  2017 MRS Spring Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Dopant distribution analysis core-shell nanowires by atom probe tomography2017
- Author(s)
  Y. Shimizu, B. Han, W. Jevasuwan, K. Nishibe, Y. Tu, K. Inoue, N. Fukata, and Y. Nagai
- Organizer
  2017 Materials Research Society Fall Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Effect of carbon on boron clustering and diffusion in silicon studied by atom probe tomography2017
- Author(s)
  Y. Tu, Y. Shimizu, M. Inoue, Y. Kunimune, Y. Shimada, T. Katayama, T. Ide, K. Inoue, and Y. Nagai
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] シリコン中に形成されたエルビウム不均一分布の３次元アトムプローブ評価2017
- Author(s)
  清水康雄, Yuan Tu, アブデルガファ愛満, 矢野真麻, 鈴木雄大, 谷井孝至, 品田高宏, Enrico Prati, 井上耕治, 永井康介
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜、横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Atom probe study of erbium and oxygen co-implanted silicon2017
- Author(s)
  Y. Shimizu, Y. Tu, A. Abdelghafar, M. Yano, Y. Suzuki, T. Tanii, T. Shinada, E. Prati, M. Celebrano, M. Finazzi, L. Ghirardini, K. Inoue, and Y. Nagai
- Organizer
  2017 Silicon Nanoelectronics Workshop
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Atom Probe Tomographic Study on Implanted Deuterium in Al2O3/HfxSi1-xO2/SiO2 Stacks2017
- Author(s)
  Y. Tu, B. Han, Y. Shimizu, Y. Kunimune, Y. Shimada, M. Inoue, K. Inoue, S. Nagata, Y. Nagai
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Dopant detection in silicon nanostructures by atom probe tomography2017
- Author(s)
  Y. Shimizu and K. Inoue
- Organizer
  4th Bilateral Italy-Japan Seminar: Innovative Solutions for Single Atom Applications in Photonics and Nanoelectronics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] 3次元アトムプローブ-TEM複合法によるSi中の格子間酸素不純物の粒界偏析評価2017
- Author(s)
  大野裕、井上海平、藤原航三、沓掛健太朗、出浦桃子、米永一郎、海老澤直樹、清水康雄、井上耕治、永井康介、吉田秀人、竹田清治、田中真悟、香山正憲
- Organizer
  第73回日本顕微鏡学会学術講演会
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] シリコン中に共注入した酸素がエルビウム分布に与える影響2017
- Author(s)
  清水康雄, Yuan Tu, アブデルガファ愛満, 鈴木雄大, 魏啓楠, 谷井孝至, 品田高宏, Enrico Prati, Michele Celebrano, Marco Finazzi, Lavinia Ghirardini, 井上耕治, 永井康介
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Mechanism of oxygen segregation at tilt boundaries in Siingots2017
- Author(s)
  Y. Ohno, K. Inoue, K. Fujiwara, K. Kutsukake, M. Deura, I. Yonenaga, N. Ebisawa, Y. Shimizu, K. Inoue, Y. Nagai, H. Yoshida, S. Takeda, S. Tanaka M. Kohyama
- Organizer
  ICDS 2017 29th International Conference on Defects in Semiconductors
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Dopant detection in silicon nanostructures by atom probe tomography2017
- Author(s)
  Y. Shimizu
- Organizer
  4th Bilateral Italy-Japan Seminar: Innovative Solutions for Single Atom Applications in Photonics and Nanoelectronics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Influence of high power laser on B distribution in Si obtained by atom probe tomography2016
- Author(s)
  5.Y. Tu, H. Takamizawa, Y. Shimizu, K. Inoue, T. Toyama, F. Yano, A. Nishida, and Y. Nagai:
- Organizer
  Atom Probe Tomography & Microscopy (APT&M)
- Place of Presentation
  Gyeongju, South Korea
- Year and Date
  2016-06-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289097
[Presentation] Characterization of Si nanocrystals embedded in SiO2 matrix by atom probe tomography2016
- Author(s)
  B. Han, Y. Shimizu, G. Seguini, E. Arduca, C. Castro, G. Ben Assayag, K. Inoue, Y. Nagai, S. Schamm-Chardon, and M. Perego
- Organizer
  Energy Materials and Nanotechnology (EMN) Meeting on Nanocrystals
- Place of Presentation
  西安、中国
- Year and Date
  2016-10-17
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Atom probe study of structural characteristics of Si nanocrystals embedded in SiO2 matrix2016
- Author(s)
  B. Han, Y. Shimizu, G. Seguini, E. Arduca, C. Castro, G. Ben Assayag, K. Inoue, Y. Nagai, S. Schamm-Chardon, and M. Perego
- Organizer
  Atom Probe Tomography & Microscopy 2016
- Place of Presentation
  慶州、韓国
- Year and Date
  2016-06-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Characterization of boron doping in individual Ge/Si core-shell nanowires investigated by atom probe tomography2016
- Author(s)
  B. Han, Y. Shimizu, K. Inoue, W. Jevasuwan, N. Fukata, and Y. Nagai
- Organizer
  2016 Materials Research Society Spring Meeting
- Place of Presentation
  Phoenix, Arizona, USA
- Year and Date
  2016-03-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Influence of high power laser on B distribution in Si obtained by atom probe tomography2016
- Author(s)
  Y. Tu, H. Takamizawa, Y. Shimizu, K. Inoue, T. Toyama, F. Yano, A. Nishida, and Y. Nagai
- Organizer
  Atom Probe Tomography & Microscopy 2016
- Place of Presentation
  慶州、韓国
- Year and Date
  2016-06-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] 先端ナノエレクトロニクス材料の元素分布分析2016
- Author(s)
  清水康雄
- Organizer
  第106回総研セミナー
- Place of Presentation
  東京都市大学総合研究所
- Invited
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Nanoscopic segregation ability of large-angle tilt boundaries in Si2016
- Author(s)
  Y. Ohno, K. Inoue, K. Kutsukake, M. Deura, I. Yonenaga, N. Ebisawa, Y. Shimizu, K. Inoue, Y. Nagai, H. Yoshida, S. Takeda, R. Taniguchi, H. Otubo, S. R. Nishitani
- Organizer
  Extended Defects in Semiconductors 2016
- Place of Presentation
  Les Issambres, France
- Year and Date
  2016-09-25
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Grain boundary segregation of nickel, copper, and oxygen atoms in a mono-like Si crystal2016
- Author(s)
  Y. Ohno, K. Kutsukake, M. Deura, I. Yonenaga, Y. Shimizu, K. Inoue, N. Ebisawa, Y. Nagai, H. Yoshida, and S. Takeda
- Organizer
  9th International Workshop on Crystalline Silicon for Solar Cells (CSSC-9) & 3rd Silicon Materials Workshop
- Place of Presentation
  Arizona State University, USA
- Year and Date
  2016-10-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Segregation mechanism at small angle tilt boundaries in Si2016
- Author(s)
  Y. Ohno, K. Inoue, K. Kutsukake, M. Deura, I. Yonenaga, N. Ebisawa, Y. Shimizu, K. Inoue, Y. Nagai, H. Yoshida, S. Takeda, R. Taniguchi, H. Otubo, S. R. Nishitani
- Organizer
  Extended Defects in Semiconductors 2016
- Place of Presentation
  Les Issambres, France
- Year and Date
  2016-09-25
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Direct Observation of Single Ion Implanted Dopants Distribution in Silicon by Atom Probe Tomography2016
- Author(s)
  Y. Tu, B. Han, Y. Shimizu, K, Inoue, Y, Nagai, M. Yano, Y. China, T. Tanji, T. Shinada
- Organizer
  2016 Materials Research Society (MRS) Fall Meeting & Exhibit
- Place of Presentation
  Boston, Massachusetts, USA
- Year and Date
  2016-11-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] シリコン中の大角粒界における不純物の偏析能2016
- Author(s)
  大野裕、井上海平、藤原航三、沓掛健太朗、出浦桃子、米永一郎、清水康雄、井上耕治、海老澤直樹、永井康介、吉田秀人、竹田清治、田中真悟、香山正憲
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] モノライクシリコンにおける不純物の粒界偏析2016
- Author(s)
  大野裕、沓掛健太朗、出浦桃子、米永一郎、清水康雄、井上耕治、海老澤直樹、永井康介、吉田秀人、竹田清治
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Segregation abilities of large-angle tilt boundaries in silicon2016
- Author(s)
  Y. Ohno, K. Inoue, K. Kutsukake, M. Deura, I. Yonenaga, N. Ebisawa, Y. Shimizu, K. Inoue, Y. Nagai, H. Yoshida, S. Takeda, S. Tanaka, M. Kohyama
- Organizer
  第131回東北大学金属材料研究所講演会（100周年記念国際会議Summit of Materials Science 2016 (SMS2016)）
- Place of Presentation
  東北大学金属材料研究所
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Atom probe tomographic study of dopant distribution controlling for future silicon nanoelectronics,2016
- Author(s)
  1Y. Shimizu, B. Han, Y. Tu, K. Inoue, and Y. Nagai:
- Organizer
  Summit of Materials Science 2016 (SMS2016),
- Place of Presentation
  Tohoku University, Sendai
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289097
[Presentation] Atom Probe Study on Phosphorus-Doped Si Nanocrystals Embedded in SiO2 Matrix2016
- Author(s)
  Y. Shimizu, B. Han, G. Seguini, E. Arduca, C. Castro, G. Ben Assayag, K. Inoue, Y. Nagai, S. Schamm-Chardon, M. Perego
- Organizer
  第132回東北大学金属材料研究所講演会
- Place of Presentation
  東北大学金属材料研究所
- Year and Date
  2016-11-24
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] 半導体・酸化物材料の３次元アトムプローブ分析2016
- Author(s)
  清水康雄
- Organizer
  第26回日本MRS年次大会
- Place of Presentation
  産業貿易センタービル、横浜
- Year and Date
  2016-12-19
- Invited
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Atom Probe Tomography Study of Boron Distribution in Individual Si / Ge Core-Shell Nanowires2016
- Author(s)
  B. Han, Y. Shimizu, W. Jevasuwan, K. Nishibe, K. Inoue, N. Fukata, Y. Nagai
- Organizer
  第131回東北大学金属材料研究所講演会（100周年記念国際会議Summit of Materials Science 2016 (SMS2016)）
- Place of Presentation
  東北大学金属材料研究所
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] TEM-3次元アトムプローブ複合法によるSi中の傾角粒界の不純物偏析能の評価2016
- Author(s)
  大野裕、井上海平、出浦桃子、沓掛健太朗、米永一郎、海老澤直樹、清水康雄, 井上耕治, 永井康介, 吉田秀人, 竹田精治, 田中真悟, 香山正憲
- Organizer
  日本顕微鏡学会第72回学術講演会
- Place of Presentation
  仙台国際センター
- Year and Date
  2016-06-14
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Atom probe tomographic study of human tooth materials2016
- Author(s)
  Y. Shimizu, T. A. Bakhsh, A. Sadr, J. Espigares, J. Tagami, B. Han, Y. Tu, K. Yoshida, K. Inoue, and Y. Nagai
- Organizer
  Atom Probe Tomography & Microscopy 2016
- Place of Presentation
  慶州、韓国
- Year and Date
  2016-06-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26560234
[Presentation] 先端デバイス開発のための３次元アトムプローブ分析技術の応用例2016
- Author(s)
  清水康雄
- Organizer
  カメカテクニカルセミナー2016
- Place of Presentation
  くるまプラザ貸会議室、東京
- Invited
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Three-Dimensional Analysis of Phosphorus-Doped Si Nanocrystals Embedded in SiO2 Matrix by Atom Probe Tomography2016
- Author(s)
  Y. Shimizu, B. Han, G. Seguini, E. Arduca, C. Castro, G. B. Assayag, K. Inoue, Y. Nagai, S. Schamm-Chardon, Mi. Perego
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Segregation ability of oxygen and carbon atoms at large-angle grain boundaries in Si2016
- Author(s)
  Y. Ohno, K. Inoue, K. Fujiwara, K. Kutsukake, M. Deura, I. Yonenaga, Y. Shimizu, K. Inoue, N. Ebisawa, Y. Nagai, H. Yoshida, S. Takeda, S. Tanaka, and M. Kohyama
- Organizer
  9th International Workshop on Crystalline Silicon for Solar Cells (CSSC-9) & 3rd Silicon Materials Workshop
- Place of Presentation
  Arizona State University, USA
- Year and Date
  2016-10-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Three-dimensional analysis of phosphorus-doped Si nanocrystals embedded in SiO2 matrix by atom probe tomography2016
- Author(s)
  Y. Shimizu, B. Han, G. Seguini, E. Arduca, C. Castro, G. Ben Assayag, K. Inoue, Y. Nagai, S. Schamm-Chardon, and M. Perego
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ、新潟
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Effect of high power laser on analysis of B distribution in Si by Atom Probe Tomography2016
- Author(s)
  Y. Tu, H. Takamizawa, Y. Shimizu, K. Inoue, T. Toyama, F. Yano, A. Nishida, Y. Nagai
- Organizer
  第131回東北大学金属材料研究所講演会（100周年記念国際会議Summit of Materials Science 2016 (SMS2016)）
- Place of Presentation
  東北大学金属材料研究所
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] ３次元アトムプローブ法の半導体応用の現状と最近の話題2016
- Author(s)
  清水康雄
- Organizer
  日本学術振興会ナノプローブテクノロジー第167委員会第81回研究会
- Place of Presentation
  東京大学駒場キャンパス
- Year and Date
  2016-01-12
- Invited
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Hydrogen distribution analysis in Al2O3 films by atom probe tomography2016
- Author(s)
  Y. Shimizu, B. Han, Y. Tu, K. Inoue, F. Yano, M. Inoue, Y. Kunimune, Y. Shimada, T. Katayama, T. Ide, and Y. Nagai
- Organizer
  2016 Materials Research Society (MRS) Fall Meeting & Exhibit
- Place of Presentation
  Boston, Massachusetts, USA
- Year and Date
  2016-11-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Hydrogen distribution analysis in Al2O3 films by atom probe tomography2016
- Author(s)
  Y. Shimizu, B. Han, Y. Tu, K. Inoue, F. Yano, M. Inoue, Y. Kunimune, Y. Shimada, T. Katayama, T. Ide, and Y. Nagai
- Organizer
  2016 Materials Research Society Fall Meeting & Exhibit
- Place of Presentation
  ボストン、米国
- Year and Date
  2016-11-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Characterization of Si Nanocrystals Embedded in SiO2 Matrix by Atom Probe Tomography2016
- Author(s)
  B. Han, Y. Shimizu, G. Seguini, E. Arduca, C. Castro, G. B. Assayag, K. Inoue, Y. Nagai, S. Schamm-Chardon, M. Perego
- Organizer
  EMN Meeting on Nanocrystals
- Place of Presentation
  Xi’an, China
- Year and Date
  2016-10-17
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Atom Probe Tomographic Study of Dopant Distribution Controlling for Future Silicon Nanoelectronics2016
- Author(s)
  Y. Shimizu, B. Han, Y. Tu, K. Inoue, Y. Nagai
- Organizer
  第131回東北大学金属材料研究所講演会（100周年記念国際会議Summit of Materials Science 2016 (SMS2016)）
- Place of Presentation
  東北大学金属材料研究所
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02446
[Presentation] Characterization of dopant in individual Si/Ge core-shell nanowires investigated by atom probe tomography2016
- Author(s)
  B. Han, Y. Shimizu, W. Jevasuwan, K. Nishibe, K. Inoue, N. Fukata, and Y. Nagai
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Direct observation of single ion implanted dopants distribution in silicon by atom probe tomography2016
- Author(s)
  Y. Tu, B. Han, Y. Shimizu, K. Inoue, M. Yano, Y. Chiba, T. Tanii, T. Shinada, and Y. Nagai
- Organizer
  2016 Materials Research Society Fall Meeting & Exhibit
- Place of Presentation
  ボストン、米国
- Year and Date
  2016-11-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] Elemental distributions in semiconductor-based device structures analyzed by atom probe tomography2015
- Author(s)
  Y. Shimizu, B. Han, Y. Tu, K. Inoue, and Y. Nagai
- Organizer
  2015 International Symposium for Advanced Materials Research
- Place of Presentation
  台湾
- Year and Date
  2015-08-16
- Invited
- Data Source
  KAKENHI-PROJECT-26289097
[Presentation] Elemental distributions in semiconductor-based device structures analyzed by atom probe tomography2015
- Author(s)
  Y. Shimizu, B. Han, Y. Tu, K. Inoue, and Y. Nagai
- Organizer
  2015 International Symposium for Advanced Materials Research
- Place of Presentation
  日月潭、台湾
- Year and Date
  2015-08-16
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] 3D atomic-scale-analysis of elemental distribution in silicon nanoelectronics2015
- Author(s)
  Y. Shimizu and K. Inoue
- Organizer
  3rd Bilateral Italy-Japan Seminar Silicon nanoelectronics for advanced applications
- Place of Presentation
  京都
- Year and Date
  2015-06-16
- Invited
- Data Source
  KAKENHI-PROJECT-26289097
[Presentation] Boron distribution in individual Ge/Si core-shell nanowires investigated by atom probe tomography2015
- Author(s)
  B. Han, Y. Shimizu, K. Inoue, W. Jevasuwan, N. Fukata, and Y. Nagai
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-15H05413
[Presentation] 多結晶シリコントレンチゲート構造中のドーパント拡散の３次元評価2014
- Author(s)
  高見澤悠, 清水康雄, 井上耕治, 矢野史子, 永井康介, 国宗依信, 井上真雄, 西田彰男, 池田昌弘
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス（神奈川県相模原市）
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] 3次元アトムプローブによる原子炉圧力容器鋼中のCuの拡散係数の導出2014
- Author(s)
  下平昌樹、外山健、高濱郁彦、海老澤直樹、野沢康子、清水康雄、井上耕治、永井康介
- Organizer
  第127回東北大学金属材料研究所講演会
- Place of Presentation
  東北大学金属材料研究所
- Year and Date
  2014-05-28
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] 3次元アトムプローブ法を用いた分子ドーピング形成によるシリコン表面上のリンと不純物原子の挙動評価2014
- Author(s)
  清水康雄、高見澤悠、井上耕治、矢野史子、永井康介、L. Lamagna、G. Mazzeo、M. Perego、E. Prati
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Year and Date
  2014-03-19
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] ３次元アトムプローブ法を用いた分子ドーピング形成によるシリコン表面上のリンと不純物原子の挙動評価2014
- Author(s)
  清水康雄, 高見澤悠, 井上耕治, 矢野史子, 永井康介, L. Lamagna, G. Mazzeo, M. Perego, E. Prati
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス（神奈川県相模原市）
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] 3次元アトムプローブによるFe中Cuの拡散係数および固溶限の測定2014
- Author(s)
  永井康介、高濱郁彦、下平昌樹、藏本明、外山健、清水康雄、井上耕治
- Organizer
  日本物理学会第69回年次大会
- Place of Presentation
  東海大学
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] 3次元アトムプローブを用いたA533B鋼中のCuの拡散係数の導出2014
- Author(s)
  下平昌樹、高濱郁彦、外山健、海老澤直樹、野沢康子、清水康雄、井上耕治、永井康介
- Organizer
  日本金属学会2014年春期講演大会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] ３次元アトムプローブによる半導体デバイス中の元素分布解析2013
- Author(s)
  清水康雄
- Organizer
  電子情報技術産業協会半導体ロードマップ専門委員会WG14専門部会（メトロロジ：計測WG）
- Place of Presentation
  JEITA会議室（東京）
- Invited
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] アトムプローブを用いたFe中のCuの拡散定数測定2013
- Author(s)
  永井康介、高濱郁彦、藏本明、外山健、清水康雄、井上耕治
- Organizer
  日本物理学会2013年秋季大会
- Place of Presentation
  徳島大学
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] 3 次元アトムプローブ法を用いたFe 中のCu の拡散係数の導出2013
- Author(s)
  高濱郁彦、藏本明、外山健、清水康雄、井上耕治、永井康介
- Organizer
  日本金属学会2013年春期講演大会
- Place of Presentation
  東京理科大学
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] 3次元アトムプローブによるシリコン中の重水素分布観察2013
- Author(s)
  高見澤悠, 星勝也, 清水康雄, 井上耕治, 矢野史子, 永田晋二, 四竈樹男, 永井康介
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] 三次元アトムプローブによる溝埋め込み多結晶Si中の不純物分布評価2013
- Author(s)
  矢野史子, 高見澤悠, 清水康雄, 井上耕治, 永井康介, 国宗依信, 井上真雄, 西田彰男, 池田昌弘
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] Diffusion coefficient of Cu in Fe2013
- Author(s)
  Y. Nagai, T. Toyama, F. Takahama,A. Kuaramoto, Y. Shimizu, K. Inoue
- Organizer
  IGRDM-17
- Place of Presentation
  Embiez Island, France
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] 3D analysis of arsenic diffusion in phosphorus or boron pre-doped polycrystalline silicon2013
- Author(s)
  H. Takamizawa, Y. Shimizu, K. Inoue, F. Yano, and Y. Nagai
- Organizer
  JSAP-MRS Joint Symposia for 2013 JSAP Autumn Meeting
- Place of Presentation
  Doshisha University (Kyoto)
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] Dopant analysis of semiconductor devices with atom probe tomography2013
- Author(s)
  Y. Shimizu, H. Takamizawa, K. Inoue, F. Yano, and Y. Nagai
- Organizer
  14th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University
- Place of Presentation
  Seikei University (Tokyo)
- Invited
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] Elemental distribution analysis in semiconductor-based MOS devices with atom probe tomography2013
- Author(s)
  Y. Shimizu, H. Takamizawa, K. Inoue, F. Yano, and Y. Nagai
- Organizer
  JSAP-MRS Joint Symposia for 2013 JSAP Autumn Meeting
- Place of Presentation
  Doshisha University (Kyoto)
- Year and Date
  2013-09-17
- Invited
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] Dopant diffusion in poly-silicon filled in trench structures analyzed by atom probe tomography2013
- Author(s)
  K. Inoue, H. Takamizawa, Y. Shimizu, F. Yano, Y. Nagai, Y. Kunimune, M. Inoue, A. Nishida, and M. Ikeda
- Organizer
  JSAP-MRS Joint Symposia for 2013 JSAP Autumn Meeting
- Place of Presentation
  Doshisha University (Kyoto)
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] Dopant analysis of semiconductor devices with atom probe tomography2013
- Author(s)
  Y. Shimizu, H. Takamizawa, K. Inoue, F. Yano, and Y. Nagai
- Organizer
  14th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University
- Place of Presentation
  Tokyo
- Year and Date
  2013-04-25
- Invited
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] New applications in atom probe tomography2013
- Author(s)
  D. J. Larson, J. W. Valley, T. Ushikubo, M. K. Miller, H. Takamizawa, Y. Shimizu, L. M. Gordon, D. Joester, A. D. Giddings, D. A. Reinhard, T. J. Prosa, D. P. Olson, D. F. Lawrence, P. H. Clifton, R. M. Ulfig, I. Y. Martin, and T. F. Kelly
- Organizer
  Microscopy & Microanalysis 2013 Meeting
- Place of Presentation
  Indianapolis, USA
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] シリコン中に共注入した炭素がホウ素活性化に与える影響2013
- Author(s)
  清水康雄、高見澤悠、矢野史子、井上耕治、永井康介
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-27
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] ３次元アトムプローブによる半導体デバイス中のドーパント分布解析2013
- Author(s)
  清水康雄
- Organizer
  （独）日本学術振興会材料の微細組織と機能性第133委員会第1分科会第218回研究会
- Place of Presentation
  東京工業大学キャンパスイノベーションセンター（東京都港区）
- Invited
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] 3次元アトムプローブを用いた強磁性α-Fe中のCuの拡散係数の導出2013
- Author(s)
  高濱郁彦、藏本明、外山健、清水康雄、井上耕治、永井康介
- Organizer
  日本金属学会2013年秋期講演大会
- Place of Presentation
  金沢大学
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] 半導体デバイスの３次元アトムプローブ解析2013
- Author(s)
  清水康雄, 高見澤悠, 井上耕治, 永井康介
- Organizer
  第29回分析電子顕微鏡討論会
- Place of Presentation
  幕張メッセ国際会議場（千葉県美浜区）
- Invited
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] ３次元アトムプローブによる半導体ナノ構造中の元素分布評価2013
- Author(s)
  清水康雄
- Organizer
  カメカテクニカルセミナー2013
- Place of Presentation
  くるまプラザ貸会議室（東京都港区）
- Invited
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] 3次元アトムプローブを用いた強磁性α‐Fe中のCuの拡散係数と固溶限の導出2013
- Author(s)
  髙濱郁彦、藏本明、外山健、清水康雄、井上耕治、永井康介
- Organizer
  金研ワークショップ「より安全な原子力技術、核融合技術に向けての材料研究の展開」
- Place of Presentation
  東北大学金属材料研究所
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] 3次元アトムプローブを用いたFe中のCuの拡散係数の導出2013
- Author(s)
  髙濱郁彦、蔵本明、外山健、清水康雄、井上耕治、永井康介
- Organizer
  第125回金研講演会
- Place of Presentation
  東北大学金属材料研究所
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] Atom probe tomography of germanium isotopic multilayer structures2012
- Author(s)
  Y. Shimizu, H. Takamizawa, Y. Kawamura, M. Uematsu, K. M. Itoh, E. E. Haller, T. Toyama, and Y. Nagai
- Organizer
  2012 Materials Research Society Fall Meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2012-11-26
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] ３次元アトムプローブ法を用いた同位体ゲルマニウム多層膜界面における平坦性評価2012
- Author(s)
  清水康雄, 高見澤悠, 外山健, 河村踊子, 植松真司, 伊藤公平, E. E. Haller, 永井康介
- Organizer
  第73回秋季応用物理学会学術講演会
- Place of Presentation
  愛媛大学・松山大学
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] Atom probe tomography of fin-structure prepared by focused ion beam direct deposition2012
- Author(s)
  H. Takamizawa, Y. Shimizu, Y. Nozawa, T. Toyama, H. Morita, Y. Yabuuchi, M. Ogura, and Y. Nagai
- Organizer
  2012 Materials Research Society Fall Meeting
- Place of Presentation
  Boston, USA
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] Tomographic study of spatial resolution in laser-assisted atom probe using semiconductor isotopic heterostructures2012
- Author(s)
  Y. Shimizu, H. Takamizawa, Y. Kawamura, M. Uematsu, K. M. Itoh, T. Toyama, and Y. Nagai
- Organizer
  The 53rd International Field Emission Symposium
- Place of Presentation
  Tuscaloosa, USA
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] Enlarged boron concentration fluctuation in MOSFET channel after source/drain extension fabrication studied by atom probe tomography2012
- Author(s)
  H. Takamizawa, Y. Shimizu, K. Inoue, T. Toyama, N. Okada, M. Kato, H. Uchida, F. Yano, A. Nishida, T. Mogami, and Y. Nagai
- Organizer
  The 53rd International Field Emission Symposium
- Place of Presentation
  Tuscaloosa, USA
- Data Source
  KAKENHI-PROJECT-24760246
[Presentation] Diffusivity and Solubility of Cu in Fe and A533B Measured by Atom Probe Tomography
- Author(s)
  Y. Nagai, M. Shimodaira, T. Toyama, Y. Shimizu, K. Inoue, N. Ebisawa
- Organizer
  TMS2015
- Place of Presentation
  Orlando, Florida (USA)
- Year and Date
  2015-03-15 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] Dopant Drive-in Path Analysis in Poly-silicon Filled in Trench type 3D-MOSFET using Atom Probe Tomography
- Author(s)
  K. Inoue, H. Takamizawa, Y. Shimizu, B. Han, Y. Nagai, F. Yano,Y. Kunimune, M. Inoue and A. Nishida
- Organizer
  International Conference on Solid State Devices and Materials 2014
- Place of Presentation
  筑波国際会議場（茨城県つくば市）
- Year and Date
  2014-09-08 – 2014-09-11
- Data Source
  KAKENHI-PROJECT-26289097
[Presentation] Three-dimensional elemental analysis of human enamel and dentin by laser-assisted atom probe tomography
- Author(s)
  Y. Shimizu, B. Han, H. Takamizawa, T. A. Bakhsh, A. Sadr, J. Tagami, K. Inoue, and Y. Nagai
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-26560234
[Presentation] 3次元アトムプローブによって調べたA533B鋼中のCu拡散
- Author(s)
  永井康介、高濱郁彦、下平昌樹、外山健、清水康雄、井上耕治
- Organizer
  日本物理学会2014年秋季大会
- Place of Presentation
  中部大学
- Year and Date
  2014-09-07 – 2014-09-10
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] Nuclear Materials Study by Age-Momentum Correlation Method
- Author(s)
  Y. Nagai, K. Nagumo, K. Inoue, T. Toyama, M. Shimodaira, Y. Shimizu
- Organizer
  The International Workshop on Positron Studies of Defects 2014 (PSD-14)
- Place of Presentation
  Kyoto University
- Year and Date
  2014-09-14 – 2014-09-19
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] Estimation of diffusivity and solubility by atom probe tomography: Revisit to traditional study using a state-of-the-art technique
- Author(s)
  Y. Nagai, M. Shimidaira, T. Toyama, N. Ebisawa, Y. Nozawa, Y. Shimizu, K. Inoue
- Organizer
  2014 Materials Research Society Fall Meeting
- Place of Presentation
  Massachusetts (USA)
- Year and Date
  2014-11-30 – 2014-12-05
- Invited
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] ３次元アトムプローブを用いた材料解析例
- Author(s)
  清水康雄
- Organizer
  2014年夏の電子顕微鏡解析技術フォーラム
- Place of Presentation
  時之栖（静岡県御殿場市）
- Year and Date
  2014-08-22 – 2014-08-23
- Data Source
  KAKENHI-PROJECT-26560234
[Presentation] A533B鋼中のCu拡散：粒界拡散の観察
- Author(s)
  下平昌樹、外山健、海老澤直樹、清水康雄、井上耕治、永井康介
- Organizer
  日本金属学会2014年秋期講演大会
- Place of Presentation
  名古屋大学
- Year and Date
  2014-09-24 – 2014-09-26
- Data Source
  KAKENHI-PROJECT-24246155
[Presentation] Nuclear material studies by positron annihilation spectroscopy
- Author(s)
  Y. Nagai, K. Inoue, T. Toyama, K. Nagumo, Y. Shimizu, N. Ebisawa, M. Hasegawa
- Organizer
  11th International Workshop on Positron and Positronium Chemistry (PPC-11)
- Place of Presentation
  Cidade de Goa (India)
- Year and Date
  2014-11-09 – 2014-11-14
- Invited
- Data Source
  KAKENHI-PROJECT-24246155

1. NAGAI Yasuyoshi (10302209)

# of Collaborated Projects: 7 results

# of Collaborated Products: 140 results
2. INOUE Koji (50344718)

# of Collaborated Projects: 7 results

# of Collaborated Products: 120 results
3. NISHIYAMA Yutaka (60414596)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
4. TOYAMA Takeshi (50510129)

# of Collaborated Projects: 4 results

# of Collaborated Products: 27 results
5. KATSUYAMA Jinya (00403155)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
6. MATSUKAWA Yoshitaka (70566356)

# of Collaborated Projects: 2 results

# of Collaborated Products: 1 results
7. NAGUMO Kazuaki (40719259)

# of Collaborated Projects: 2 results

# of Collaborated Products: 3 results
8. 吉田健太 (10581118)

# of Collaborated Projects: 2 results

# of Collaborated Products: 38 results
9. HATAKEYAMA Masahiko (30375109)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. YAMAGUCHI Masatake (50360417)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. SADR Alireza (20567755)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
12. FUKATA Naoki (90302207)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
13. Shinada Takahiro (30329099)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
14. 谷井孝至 (20339708)

# of Collaborated Projects: 1 results

# of Collaborated Products: 5 results
15. 大矢剛嗣 (30432066)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
16. 河野行雄 (90334250)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
17. 嶋田雄介 (20756572)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
18. 鈴土知明 (60414538)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. SUZUDO tomoaki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. TOKUMOTO Yuki

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
21. KASU Makoto

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results
22. 米永一郎

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
23. 大野裕

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results

SHIMIZU Yasuo 清水 康雄

Research Projects

Research Products

Co-Researchers

Three-dimensional atomic-scale control of co-doped elemental distributions towards high-efficiency luminescent devicesPrincipal Investigator

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Revealing Irradiation Hardening Mechanisms by a new in-situ observation method with sub-nm scale resolution

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Development of single dopant circuit by deterministic doping and application to stochastic processing

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Study of Radiation Damage Mechanisms of Structural Materials in Nuclear Reactors by Defect structure - Elemental distribution Tomography

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Establishment of analysis of single nanowire by atom probe tomography in combination with transmission electron microscopyPrincipal Investigator

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Dopant diffusion paths in polycrystalline silicon gate of three-dimensional metal-oxide-semiconductor field effect transistor investigated by atom probe tomography

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Three-dimensional nanoscale elemental analysis in human teeth by atom probe tomography towards their soundness evaluationPrincipal Investigator

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Atomic scale observation of grain boundary segregation in nuclear materials by atom probe tomography and study on mechanism of grain boundary degradation

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Interaction of coimplanted heterogeneous dopants in semiconductor materials investigated using three-dimensional atom probePrincipal Investigator

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Atomic scale observation of grain boundary segregation in nuclear materials by atom probe tomography and study on mechanism of grain boundary degradation

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[Book] 日本分析化学会編、試料分析講座半導体・電子材料分析, (第6章三次元アトムプローブ(APT)担当)2013

Author(s)

Publisher

Data Source

[Book] 日本分析化学会編, 試料分析講座 半導体・電子材料分析2013

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Total Pages

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[Journal Article] Variation in atomistic structure due to annealing at diamond/silicon heterointerfaces fabricated by surface activated bonding2022

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[Journal Article] AlGaN/GaN/3C-SiC on diamond HEMTs with thick nitride layers prepared by bonding-first process2022

Author(s)

SHIMIZU Yasuo 清水康雄

[Book] 日本分析化学会編, 試料分析講座半導体・電子材料分析2013