EDA Hiroshi 江田弘

… Alternative Names

江田弘エダヒロシ

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Researcher Number	60007995
Other IDs
External Links
Affiliation (based on the past Project Information) *help	1996 – 2007: 茨城大学, 工学部, 教授 1993: 茨城大学, 工学部, 教授 1989 – 1990: 茨城大学, 工学部, 教授
Review Section/Research Field	Principal Investigator 機械工作・生産工学 / 機械工作 / Production engineering/Processing studies Except Principal Investigator 機械工作・生産工学 / Production engineering/Processing studies / Intelligent mechanics/Mechanical systems / Dynamics/Control
Keywords	Principal Investigator 超磁歪材料 / 電子顕微鏡 / アクチュエータ / 超磁歪効果 / センサ / 超精密位置決め / Shape based pattern matching / Tool path generation / Force feedback control / Pixel coordinates … More / Mechanical / control / Vision sensing / Egg cell / Micro Manipulation system / クローン技術 / 画素座標 / 細胞操作 / 自動化 / ビジュアルセンシング制御 / 形状ベースマッチング / ツールパス生成 / 力覚フィードバック / 画素座標系 / 機械座標系 / 制御 / ビジュアルセンシング / 卵細胞 / マイクロマニピュレーション / Grinding / Fixed abrasives / Alignment control / Ultraprecision positioner / Giant magnetostrictive material / Silicon wafer / 省エネ / 局所クリーンルーム / 研削加工 / 固定砥粒 / 姿勢制御 / 微小位置決め装置 / シリコンウエハ / ACTUATOR / IMAGE PROCESSING / MAN-MACHINE-INTERFACE / MANIPULATOR / MICRO FABRICATION / MICRO MANIFACTURING / MICRO MACHINING / ELECTRON MICROSCOPE / マン-マシンインターフェイス / マンーマシンインターフェイス / 画像処理 / マン-マシン-インターフェイス / マニピュレータ / マイクロファブリケーション / マイクロマニファクチャリング / マイクロマシニング / MICRO SCRATCHING / LAPPING, POLISHING / GRINDING / MICRO PLASTICITY / DUCTILE-MODE MACHINING / MAGNETISM, ELECTRON AND OPTICAL COMPONENT / MULTIPURPOSE MACHINE TOOL / GLASS / サブナノメータ加工 / 動画観察 / 引っかき試験機 / き裂なし加工 / セラミックス / ガラス / 微小引っかき実験 / 研磨 / 研削 / 微小塑性領域 / 延性モード加工 / 磁気・電子・光学部品 / 多目的加工機械 / ガラス材料 / sintered giant magnetostrictive material / actuator / Tb-Dy-Fe alloy / giant magnetostrictive torque sensor / 3 dimension vibration sensor / high band width giant magnetostrictive material / giant magnetostrictive pump / giant magnetostrictive material / 超磁歪焼結材料 / Tb-Dy-Fe合金 / 超磁歪トルクセンサ / 超磁歪ポンプ / 3次元振動センサ / ダイナミカルシステム / 薄板積層デバイス / 磁場中粉末成形 / 広帯域超磁歪材料 / エッチング / き裂 / 塑性変形 / 引っかき / セメンタイト / 炭素鋼 / 遠隔監視装置 / アクチュエーター / トモグラフィ / 地球環境 / 加速度センサー / H∞制御理論 / フイードバック制御 / 構造物制振機構 / 振動解析 / Sub-angstrom-meter / 超加工機械 / Ni.Cu.Cの超精密加工 / 水素無含有表面創成 / 超精密加工表面創成 / 超冷中性子反射鏡・回折鏡 / 超冷中性子貯臓チャンバ / トモブラフィ-開発 / デバイス / Tb_<0.3>Dy_<0.7>Fe_<1.8>Mn_<0.2>Co_<0.2> / 超磁歪アクチュエ-タ / 超磁歪希土類合金 / 磁気回路設計 / 希土類合金 / Tb_×Dy_<(1-y)>Fe_2(Mn.Co) … More Except Principal Investigator 加工変質層 / ECM / CAM / 化学・機械融合加工 / Residual stress / Defect free / Chemo-Mechanical Grinding / Power devices / Damaged layer / Fixed abrasive technology / Extremely thin Si wafer / 完全表面 / 固定砥流加工技術 / 残留応力 / 無歪み / パワー・デバイス / 固定砥粒加工技術 / 極薄Siウエハ / Meso-micro mechanical machining / Desktop Machine / Micro EDM / Micro cutting / Multifunction / Non-Simaterial / Micro-machining / メゾーマイクロ・メカニカル・マニュファクチャリング / メゾ-マイクロ・メカニカル・マニュファクチャリング / デスクトップ・マシン / マイクロ・EDM / マイクロ・カッティング / マルチ・ファンクション / 非シリコン材料 / マイクロ・マシンニング / MOLECULAR DYNAMICS / WORK AFFECTED LAYER / STRAIN RATE / PLASTIC WAVE / PLASTIC FLOW / GRINDING / ULTRA PRECISION MACHINING / SUPER HIGH-SPEED MACHINING / 表面性状 / 風損 / 砥石 / 分子動力学 / ひずみ速度 / 塑性波 / 塑性流動 / 研削 / 超精密加工 / 超高速加工 / layered manufacturing / Multi-axis machining / NURBS interpolation / hardware acceleration / subdivision surface / Mold manufacturing / 積層造形法 / 多軸加工 / NURBS補間 / ハードウェアの利用 / 細分割曲面 / 金型加工 / Rare-earth Alloy / Thermal Expansion / Smart Material / Actuator / Positioner / Positioning Device / Giant Magnetostrictive Material / 微動機構 / 力検出 / フィードバック制御 / 熱補償制御 / 位置決めアクチュエータ / 希土類合金 / 熱膨張 / 機能性材料 / アクチュエータ / ポジショナ / 位置決め装置 / 超磁歪材料 / 平坦度 / 分散補償器 / CMG / 極薄ウエハ / 単結晶シリコン / エタロン / キーワード / 複合材料 / セルフセンシング / 光ファイバー / 形状記憶合金 / 圧電アクチュエータ / システム融合設計 Less

Research on Manufacturing Technology of Etalon : A Core Element of Tunable Dispersion Compensator for Optical Communication, by means of CMG Process
- Principal Investigator
  
  ZHOU Libo
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Research on Chemo-Mechanical Grinding Process for Extremely-thin Si Wafer Used in Next Generation Power Devices
- Principal Investigator
  
  ZHOU Libo
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
不錆高強度の鋼炭化物適用のマイクロファブリケーションの萌芽研究Principal Investigator
- Principal Investigator
  
  江田弘
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Development of Automated Cell Manipulation SystemPrincipal Investigator
- Principal Investigator
  
  EDA Hiroshi
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  IBARAKI UNIVERSITY
Development of Multifunctional Micro-Machining System and its Core Technologies
- Principal Investigator
  
  LIBO Zhou
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Ibaraki University
インテリジェント材料・流体システムに関する国際会議の企画調査
- Principal Investigator
  
  谷順二
- Project Period (FY)
  2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Dynamics/Control
- Research Institution
  Tohoku University
高・低温環境対応テレメータ式超磁歪加速度センサの企画調査-地球環境モニタリング-Principal Investigator
- Principal Investigator
  
  江田弘
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Ibaraki University
Development of Basic Software for Skill-less Manufacturing of Molds and Dies
- Principal Investigator
  
  INUI Masatomo
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Ibaraki University
DEVELOPMENT OF 600m/s SUPER HIGH-SPEED AND NANOMETER ORDER ULTRA PRECISION MACHINE TOOL
- Principal Investigator
  
  SHIMIZU Jun
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  IBARAKI UNIVERSITY
DEVELOPMENT OF ONE-STOP MACHINING SYSTEM AND CORE TECHNOLOGIES FOR LARGE-DIAMETER Si WAFER BEING POTENTIALLY USED FROM YEAR 2003Principal Investigator
- Principal Investigator
  
  EDA Hiroshi
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for University and Society Collaboration
- Research Field
  
  機械工作・生産工学
- Research Institution
  IBARAKI UNIVERSITY
超磁歪アクチュエータ・センサー適用の構造物制振機構とデバイスの創作Principal Investigator
- Principal Investigator
  
  江田弘
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  機械工作・生産工学
- Research Institution
  Ibaraki University
DEVELOPMENT OF MICRO PROCESS AND MICRO FABRICATION SYSTEM AND EXPERIMENT UNDER SCANNING ELECTRON MICROSCOPEPrincipal Investigator
- Principal Investigator
  
  EDA Hiroshi
- Project Period (FY)
  1998 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  IBARAKI UNIVERSITY
THE CREATION RESEARCH OF SUB NANOMETER MACHINING SYSTEM OF MAGNETISM, ELECTRON AND OPTICAL COMPONENT GLASS AND MULTIPURPOSE MACHINE TOOLPrincipal Investigator
- Principal Investigator
  
  EDA Hiroshi
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Ibaraki University
Study on Compact Fine Positioner with Thermal Compensation Capability
- Principal Investigator
  
  YAMAMOTO Yoshio
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tokai University
  Ibaraki University
Study on the Development of Giant Magnetostrictive Materials for Applications of Dynamical Systems in Wide Frequency RangePrincipal Investigator
- Principal Investigator
  
  EDA Hiroshi
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Ibaraki University
超冷中性子による超精密加工表面の表面性状・構成元素の同時分析に関する研究Principal Investigator
- Principal Investigator
  
  江田弘
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Ibaraki University
超磁歪アクチュエ-タのAC特性評価に関する研究Principal Investigator
- Principal Investigator
  
  江田弘
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  Ibaraki University
超磁歪アクチュエ-タに関する研究-新素材の開発とデバイスへの応用-Principal Investigator
- Principal Investigator
  
  江田弘
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  Ibaraki University

All 2009 2008 2007 2006 2005 2004 2003 2002 Other

All Journal Article Presentation Book Patent

[Book] マイクロマシン技術総覧/「第I編第2章第7節:磁歪」,「第III編第3章第2節:超磁歪アクチュエータ」,「第IV編第1章第3節:マイクロアクチュエータの応用」分担2003
- Author(s)
  江田弘, 周立波(共著)
- Total Pages
  753
- Publisher
  産業技術サービスセンター
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Book] Micro Machine Technology Pandect (in Japanese)2003
- Author(s)
  Hiroshi Eda, Libo Zhou (coauthor)
- Publisher
  Sangyo Technology service center
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Book] ものづくり機械の原理2002
- Author(s)
  江田弘, 他多数
- Total Pages
  184
- Publisher
  日刊工業新聞社出版
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Book] Machining Data File2002
- Author(s)
  Hiroshi Eda
- Publisher
  Technical Research Institute, Japan Society for the Promotion of Machine Industry
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Book] 加工技術データファイル(基礎編,研削研磨加工)2002
- Author(s)
  江田弘
- Total Pages
  5
- Publisher
  (財)機械振興協会技術研究所
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Book] Principle of Machining tools2002
- Author(s)
  Hiroshi Eda (coauthor & editor)
- Publisher
  The Nikkan Kogyo Shimbun LTD.
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Fundamental Research on Generation of Nanostructure by Means of Local Anodic Oxidation2009
- Author(s)
  Yumetaka Suehisa, Toshiaki Aoki, Jun Shimizu, Libo Zhou and Hiroshi Eda
- Journal Title
  
  Key Engineering Materials 389-390
  
  Pages: 424-429
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on Improvement of Material Removal Rate in Chemo-mechanical Grinding (CMG) of Si Wafer2009
- Author(s)
  J. Sasaki, T. Tsumga, B. SoltaniH, T. Mitsuta, Y.B. Tian, J. Shimizu, L. Zhou, H. Eda, Y. Tashiro, H. Iwase and S. Kamiya
- Journal Title
  
  Key Engineering Materials 389-390
  
  Pages: 13-17
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on Improvement of Material Removal Rate in Chemo-mechanical Grinding (CMG) of Si Wafer2009
- Author(s)
  J. Sasaki, T. Tsuruga, B. Soltani., H, T. Mitsuta, Y.B. Tian, J. Shimizu, L. Zhou, H. Eda, Y. Tashiro, H. Iwase, S. Kamiya
- Journal Title
  
  Key Engineering Materials Vols.389-390
  
  Pages: 13-17
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on reaction mechanism of Si and pure CeO_2 for chemical-mechanical-grinding process2009
- Author(s)
  S. Kamiya, H. Iwase, K. Kishita, L. Zhou, H. Eda, Y. Yoshida
- Journal Title
  
  J.of Vacuum Science and Technology B Vol.27, No.3
  
  Pages: 1496-1502
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Fundamental Study on Influence of Surface Topography on Photocatalytic Reaction2009
- Author(s)
  Keisuke Azusawa, Yuta Ishii, Jun Shimizu, Libo Zhou and Hiroshi Eda
- Journal Title
  
  Key Engineering Materials 389-390
  
  Pages: 417-423
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on reaction mechanism of Si and pure CeO_2 for chemical-mechanical-grinding process2009
- Author(s)
  Sumio Kamiya, Hisao Iwase, Keisuke Kishita, Libo Zhou, Hiroshi Eda, Yuji Yoshida
- Journal Title
  
  Journal of Vacuum Science and Technology B 27/3
  
  Pages: 1496-1502
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Adhesion Effect on Material Removal and Tool Wear in Diamond Grinding of Silicon Wafer2008
- Author(s)
  Jun Shimizu, Hiroshi Eda, Libo Zhou, Hidemitsu Okabe
- Journal Title
  
  Tribology Online Vol.3, No.5
  
  Pages: 248-253
- NAID
  130000067618
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] 微小引っかきによるシリコンウエハ研削現象の解析2008
- Author(s)
  清水淳, 周立波, 山本武幸, 津村貴史, 岡部秀光, 江田弘
- Journal Title
  
  砥粒加工学会誌 52/10
  
  Pages: 601-606
- NAID
  10021923685
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] 微小引っかきによるシリコンウエハ研削現象の解析2008
- Author(s)
  清水淳, 周立波, 山本武幸, 津村貴史, 岡部秀光, 江田弘
- Journal Title
  
  砥粒加工学会誌 Vol.52, No.10
  
  Pages: 601-606
- NAID
  10021923685
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Adhesion Effect on Material Removal and Tool Wear in Diamond Grinding of Silicon Wafer2008
- Author(s)
  Jun Shimizu, Hiroshi Eda, Libo Zhou, Hidemitsu Okabe
- Journal Title
  
  Tribology Online 3/5
  
  Pages: 248-253
- NAID
  130000067618
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Effect of Grinding Wheel Stiffness on Nannarinding Process2008
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  International Journal of Abrasive Technology 1/3・4
  
  Pages: 316-326
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Effect of Grinding Wheel Stiffness on Nanogrinding Process2008
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int'l J.of Abrasive Technology Vol.1, No.3/4
  
  Pages: 316-326
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Fabrication and evaluation for extremely thin Si wafer2007
- Author(s)
  L. Zhou, B. S. Hosseini, T. Tsuruga, J. Shimizu, H. Eda, S. Kamiya, H. Iwase, Y. Tashiro
- Journal Title
  
  Int.J.Abrasive Technology Vol.1, No.1
  
  Pages: 94-105
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Research on Chemo-Mechanical-Grinding (CMG) of large size silica glass substrate2007
- Author(s)
  Takeshi SHIINA, Libo ZHOU, Zhongjun QIU, Takeyuki YAMAMOTO, Jun SHIMIZU, Hiroshi EDA
- Journal Title
  
  Proceeding of 4th LEM21
  
  Pages: 65-68
- NAID
  130007890884
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Nano Grinding-Influence of Tool Stiffness-2007
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int. J. Manufacturing Science ＆ Technology (印刷中)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Study on Path Control Scheme for Vision Guided Micro Manipulation System2007
- Author(s)
  Hirotaka OJIMA, Hiroyuki ASANO, Genki SHIMIZU, Libo ZHOU, Jun SHIMIZU and Hiroshi EDA
- Journal Title
  
  Proceeding of 4th LEM21
  
  Pages: 605-608
- NAID
  130007891031
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Development of On-machine 3D Measuring System for Large Size Si Wafer Thinning Process2007
- Author(s)
  T. Mitsuta, B. Soltani, T. Tsuruga, J. Sasaki, L. Zhou, J. Shimizu and H. Eda
- Journal Title
  
  Proceedings of ISAAT2007
  
  Pages: 75-81
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] 画像情報を用いたダイヤモンドバイト自動研磨システムの開発2007
- Author(s)
  仇中軍, 周立波, 尾嶌裕隆, 江田弘, 今井亨, 山田昌隆
- Journal Title
  
  砥粒加工学会誌 5/51
  
  Pages: 285-289
- NAID
  10020137378
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on Thinning Process of Large Size Si wafer2007
- Author(s)
  T. Tsuruga, B. Soltani, J. Sasaki, T. Mitsuta, J. Shimizu, L. Zhou and H. Eda
- Journal Title
  
  Proceedings of ISAAT2007
  
  Pages: 67-73
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Development of High Performance Wheels for Chemo-Mechanical-Grinding2007
- Author(s)
  Yoshiaki Tashiro, Masaaki Kenmochi, Bahman Soitani, Tatsuya Tsuruga, Libo Zhou, Jun Shimizu and Hiroshi Eda
- Journal Title
  
  Proceeding of 4th LEM21
  
  Pages: 69-72
- NAID
  130007890888
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Nano-Grinding-Influence of Tool Stiffness-2007
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int. J. Manufacturing Science & Technology 1/9
  
  Pages: 69-75
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Fabrication and evaluation for extremely thin Si wafer2007
- Author(s)
  Libo Zhou, Bahman Soltani Hosseini, Tatsuya Tsuruga, Jun Shimizu, Hiroshi Eda, Sumio Kamiya, Hisao Iwase and Yoshiaki Tashiro
- Journal Title
  
  Int. J. Abrasive Technology 1/1
  
  Pages: 94-105
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Fundamental Study on Cleavage-Cutting of Silicon Wafer by Ultra-Short Pulsed Laser2007
- Author(s)
  Atsushi HAGIYA, Takeyuki YAMAMOTO, Hirotaka OJIMA, Libo ZHOU, Jun SHIMIZU and Hiroshi EDA
- Journal Title
  
  Proceeding of 4th LEM21
  
  Pages: 879-882
- NAID
  130007890953
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Simulation and Experimental Study on Nanoscracthig of Silicon Wafer2007
- Author(s)
  Jun Shimizu, Hidemotsu Okabe, Takashi Tsumura, Yumetaka Suehisa, Libo Zhou and Hiroshi EDA
- Journal Title
  
  Proceedings of Int'l Conference on Tribology in Manufacturing Process (ICTMP) 2007
  
  Pages: 307-310
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on Nanomachining Process of Si Wafer using an Atomic Force Microscope2007
- Author(s)
  Jun SHIMIZU, Takashi TSUMURA, Yumetaka SUEHISA, Libo ZHOU, Hiroshi EDA
- Journal Title
  
  Proceeding of 4th LEM21
  
  Pages: 153-156
- NAID
  130007890917
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Nano Grinding-Influence of Tool Stiffness-2007
- Author(s)
  J. Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int.J.Manufacturing Science & Technology Vol.9, No.1
  
  Pages: 69-75
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] 3D Data Acquisition and Configuration by Means of Binocular Stereopsis2007
- Author(s)
  H. Otsuka, Y. Myrakami, Z. Qiu, H. Ojima, L. Zhou, J. Shimizu and H. Eda
- Journal Title
  
  Proceedings of the 35th International MATADOR Conference
  
  Pages: 393-396
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of AFM/FFM Surface Observation: Influence of Probe Tip Shape2007
- Author(s)
  J.Shimizu, L.Zhou and H.Eda
- Journal Title
  
  Proceedings of the 35th International MATADOR Conference
  
  Pages: 271-274
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Defect-free Favrication for Single Crystal Silicon Substrate by Chemo-Mechanical Grinding2006
- Author(s)
  L.Zhou, H.Eda, J.Shimizu, S.Kamiya, H.Iwase, S.Kimura
- Journal Title
  
  Annals of the CIRP 55・1
  
  Pages: 313-316
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Study on subsurface damage generated in ground Si wafer2006
- Author(s)
  Soltani Hossini Bahman, Libo Zhou, Tsuruga Tatsuya, Jun Shimizu, Hiroshi Eda, Sumio Kamiya, Hisao Iwase
- Journal Title
  
  Proceedings of 1lth International Conference on Precision Engineering (ICPE)
  
  Pages: 309-303
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Study on subsurface damage generated in ground Si wafer2006
- Author(s)
  Soltani Hossini Bahman, Libo Zhou, Tsuruga Tatsuya, Jun Shimizu, Hiroshi Eda, Sumio Kamiya, Hisao Iwase
- Journal Title
  
  Proceedings of 11th International Conference on Precision Engineering(ICPE)
  
  Pages: 309-313
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Visual Feedback Control of a Micro Lathe2006
- Author(s)
  Hirotaka Ojima, Katsuhiro Saito, Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Proceedings of 11th International conference on Precision engineering (ICPE)
  
  Pages: 133-137
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Study on subsurface damage generated in ground Si wafer2006
- Author(s)
  Soltani Hossini Bahman, Libo Zhou, Tsuruga Tatsuya, Jun Shimizu, Hiroshi Eda, Sumio Kamiya, Hisao Iwase
- Journal Title
  
  Proceedings of 11th International Conference on Precision Engineering (ICPE)
  
  Pages: 309-313
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] 顕微鏡観察視野外を含む接触圧と接触点維持制御機能を有する半導体デバイス評価用プロービングシステムの開発2006
- Author(s)
  石川友彦, 江田弘, 周立波, 清水淳, 尾嶌裕隆, 山本佳男, 川上辰男
- Journal Title
  
  砥粒加工学会誌 50・6
  
  Pages: 318-323
- NAID
  10019172718
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Defect-free Fabrication for Single Crystal Silicon Substrate by Chemo-Mechanical Grinding2006
- Author(s)
  L.Zhou, H.Eda, J.Shimizu, S.Kamiya, H.Iwase, S.Kimura
- Journal Title
  
  Annals of the CIRP 1/55
  
  Pages: 313-316
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Defect-free Fabrication for Single Crystal Silicon Substrate by Chemo-Mechanical Grinding2006
- Author(s)
  L.Zhou, H.Eda, J.Shimizu, S.Kamiya, H.Iwase, S.Kimura
- Journal Title
  
  Annals of the CIRP 55・1
  
  Pages: 313-316
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Experimental and Simulation Research on Influence of Temperature on Nano-Scratching Process of Silicon Wafer2006
- Author(s)
  H.Okabe, T.Tsumura, J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 379-384
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Path control scheme for vision guided micro manipulation system2006
- Author(s)
  Hiroyuki Asano, Tomohiko Ishikawa, Libo Zhou, Jun Shimizu, Hirotaka Ojima, Zhongjun Qiu, Hiroshi Eda
- Journal Title
  
  Proceedings of 11th International Conference on Precision Engineering(ICPE)
  
  Pages: 321-322
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation of Vibration-Assisted Micro and Nanocutting : Influences of Vibration, Acceleratin and Velocity2006
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  International Journal of Nanomanufacturing 1・1
  
  Pages: 105-116
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Analysis of Anisotropic Friction at an Atomic-Scale2006
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Proc.of 3rd Asia Int.Conf.on Tribology (ASIATRIB 2006)
  
  Pages: 525-526
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Study on Structure Transformation of Si Wafer in Grinding Process2006
- Author(s)
  Libo Zhou, Makoto Yamaguchi, Jun Shimizul, Hiroshi Eda
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 373-378
- NAID
  40015624684
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Experimental and Simulation Research Research on Influence of Temperature on Nano-Scratching Process of Silicon Wafer2006
- Author(s)
  H.Okabe, T.Tsumura, J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 379-384
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Vision Controlled Bio-Cell Manipulation System2006
- Author(s)
  Libo ZHOU, Zhongjun QIU, Tomohiko ISHIKAWA, Tatsuo KAWAKAMI, Hiroshi EDA
- Journal Title
  
  Int. J. Manufacturing Technology and Management 9・1/2
  
  Pages: 130-143
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Microstructural Analysis for Si wafer after CMG Process2006
- Author(s)
  Sumio Kamiya, Hisao Iwase, Tetsuya Nagaike, Libo Zhou, Hiroshi Eda, Shun'ichirn Kimura
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 367-372
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Analysis of Anisotropic Friction at an Atomic-Scale2006
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Proc. of 3rd Asia Int. Conf. on Tribology(ASIATRIB 2006)
  
  Pages: 525-526
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Analysis of Anisotropic Friction at an Atomic-Scale2006
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Proc. of 3rd Asia Int. Conf. on Tribology (ASIATRIB 2006)
  
  Pages: 525-526
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Study on Structure Transformation of Si Wafer in Grinding Process2006
- Author(s)
  Libo Zhou, Makoto Yamaguchi, Jun Shimizu1, Hiroshi Eda
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 373-378
- NAID
  40015624684
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Microstructural Analysis for Si wafer after CMG Process2006
- Author(s)
  Sumio Kamiya, Hisao Iwase, Tetsuya Nagaike, Libo Zhou, Hiroshi Eda, Shun-ichiro Kimura
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 367-372
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Microstructural Analysis for Si wafer after CMG Process2006
- Author(s)
  Sumio Kamiya, Hisao Iwase, Tetsuya Nagaike, Libo Zhou, Hiroshi Eda, Shun'ichiro Kimura
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 367-372
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Analysis on Vibration Assisted Cutting - Effect of Vibration Parameter -2005
- Author(s)
  Jun Shimizu, Hidekazu Tanaka, Libc Zhou, Hirotaka Ojima, Hiroshi Eda
- Journal Title
  
  Proceedings of International Conference Leading Edge Manufacturing in 21 Century 2
  
  Pages: 861-864
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Chemo-Mechanical Grinding (CMG) Process (Surface and Sub-surface Analysis of Si Wafer Produced by CMG)2005
- Author(s)
  L.Zhou, Y.Kumagai, J.Shimizu, H.Eda, S.Kamiya, H.Iwase, S.Kimura
- Journal Title
  
  Proceedings of International Conference Leading Edge Manufacturing in 21 Century 2
  
  Pages: 889-892
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] A Novel Fixed Abrasive Process: Chemo-Mechanical Grinding Technology2005
- Author(s)
  Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  International Journal of Manufacturing Technology and Management 7・5/6
  
  Pages: 441-451
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Effects of Tool Stiffness and Infeed Scheme on Planarization (Integrated model for simulation of planarization process)2005
- Author(s)
  Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  International Journal of Manufacturing Technology and Management 7・5/6
  
  Pages: 490-503
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Effects of Tool Stiffness and Infeed Scheme on Planarization, (Integrated model for simulation of planarization process)2005
- Author(s)
  Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  International Journal of Manufacturing Technology and Management 7・5/6
  
  Pages: 490-503
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation of Friction Process in AFM/FFM Surface Observation2005
- Author(s)
  J.Shimizu, L.Zhou, H.Eda, H.Ojima
- Journal Title
  
  Synopsis of Int. Tribology Conference 349
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] SiウエハのChemo-Mechanical-Grinding(CMG)に関する研究-第2報:固定砥粒によるφ300mmSiウエハの完全表面創成-2005
- Author(s)
  周立波, 清水淳, 江田弘, 木村俊一郎
- Journal Title
  
  精密工学会誌 71・4
  
  Pages: 466-470
- NAID
  10015505910
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Analysis on Elementary Process of Coating by High-Temperature and High-Speed Droplet (Flattening Process and Atomic Behavior of Droplet)2005
- Author(s)
  J.Shimizu, E.Ohmura, Y.Kobayashi, S.Kiyoshima, H.Eda
- Journal Title
  
  J.JSME Trans.C (in Japanese) 71(701)
  
  Pages: 298-303
- NAID
  110004728867
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] A Novel Fixed Abrasive Process : Chemo-Mechanical Grinding Technology2005
- Author(s)
  Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  International Journal of Manufacturing Technology and Management 7・5/6
  
  Pages: 441-451
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation of Friction Process in AFM/FFM Surface Observation,2005
- Author(s)
  J.Shimizu, L.Zhou, H.Eda, H.Ojima
- Journal Title
  
  Synopsis of Int.Tribology Conference
  
  Pages: 349-349
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Simulation on Planarization Process of Patterned Si Wafer (Establishment of an analytical model)2005
- Author(s)
  Libo Zhou, Hitomi Ohkubo, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  J.JSME Trans.C (in Japanese) 72(701)
  
  Pages: 725-730
- NAID
  110006264589
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] 高温高速液滴による皮膜形成素過程の分子動力学解析(液滴の扁平過程と原子挙動)2005
- Author(s)
  清水淳, 大村悦二, 小林圭史, 清島祥一, 江田弘
- Journal Title
  
  日本機械学会論文集(C編) 71・701
  
  Pages: 298-303
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development and Evaluation of CMG Wheels made by Electrophoretic Deposition2005
- Author(s)
  Libo Zhou, Isao Toita, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Journal of the Japan Society of Abrasive Technology 3/55
  
  Pages: 130-133
- NAID
  10017285120
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] SiウエハのChemo-Mechanical-Grinding(CMG)に関する研究-第2報 : 固定低位によるφ300mm Siウエハの完全表面創成-2005
- Author(s)
  周立波, 清水淳, 江田弘, 木村伸一郎
- Journal Title
  
  精密工学会誌 71・4
  
  Pages: 466-470
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Siウエハの Chemo-Mechanical-Grinding(CMG)に関する研究-第2報 : 固定砥粒によるφ300mm Siウエハの完全表面創成-2005
- Author(s)
  周立波, 清水淳, 江田弘, 木村俊一郎
- Journal Title
  
  精密工学会誌 71・4
  
  Pages: 466-470
- NAID
  10015505910
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] 高温高速液滴による皮膜形成素過程の分子動力学解析 (液滴の偏平過程と原子挙動)2005
- Author(s)
  清水淳, 大村悦二, 小林圭史, 清島祥一, 江田弘
- Journal Title
  
  日本機械学会論文集(C編) 71・701
  
  Pages: 298-303
- NAID
  110006264528
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Development of a Vision Guided Lathe2005
- Author(s)
  Katsuhiro SAITO, Hirotaka OJIMA, Libc ZHOU, Hiroshi EDA
- Journal Title
  
  Proceedings of International Conference Leading Edge Manufacturing in 21 Century 3
  
  Pages: 1229-1234
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] 高温高速液滴による皮膜形成素過程の分子動力学解析(液滴の偏平過程と原子挙動)2005
- Author(s)
  清水淳, 大村悦二, 小林圭史, 清島祥一, 江田弘
- Journal Title
  
  日本機械学会論文集(C編) 71・701
  
  Pages: 298-303
- NAID
  110006264528
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Research on Chemo-Mechanical Grinding of Si Wafer, 2^<nd> Report : Generation of Defect free surface on Φ300mm Si Wafer2005
- Author(s)
  Libo Zhou, Jun Shimizu, Hiroshi Eda, Shun'ichiro Kimura
- Journal Title
  
  Journal of the Japan Society of Precision Engineering 4/71
  
  Pages: 466-470
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] パターンウエハの平坦化シミュレーション(モデルの理論構築)2005
- Author(s)
  周立波, 大久保瞳, 清水淳, 江田弘
- Journal Title
  
  日本機械学会論文集C編 71・702
  
  Pages: 725-730
- NAID
  110006264589
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Planarization Process of Patterned Si Wafer (Improvements in accuracy of simulation model)2005
- Author(s)
  Hitomi Okubo, Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Proceedings of International Conference Leading Edge Manufacturing in 21 Century 2
  
  Pages: 883-890
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] パターンウエハの平坦化シミュレーション(モデルの理論構築)2005
- Author(s)
  周立波, 大久保瞳, 清水淳, 江田弘
- Journal Title
  
  日本機械学会論文集C編 71・702
  
  Pages: 725-730
- NAID
  110006264589
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation of Friction Process in AFM/FFM Surface Observation2005
- Author(s)
  J.Shimizu, L.Zhou, H.Eda, H.Ojima
- Journal Title
  
  Synopsis of Int. Tribology Conference
  
  Pages: 349-349
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] 電気泳動法によるCMG砥石の開発とその性能評価2005
- Author(s)
  周立波, 戸井田勲, 清水淳, 江田弘
- Journal Title
  
  加工学会誌 50・3
  
  Pages: 130-133
- NAID
  10017285120
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] パターンウエハの平坦化シミュレーション(モデルの理論構築)2005
- Author(s)
  周立波, 大久保瞳, 清水淳, 江田弘
- Journal Title
  
  日本機械学会論文集C編 71・702
- NAID
  110006264589
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] 高温高速液滴による皮膜形成素過程の分子動力学解析(液滴の扁平過程と原子挙動)2005
- Author(s)
  清水淳, 大村悦二, 小林圭史, 清島祥一, 江田弘
- Journal Title
  
  日本機械学会論文集(C編) 71・701
  
  Pages: 298-303
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Recycling Type Filtration Machine by Means of Solid-Liquid Automation Separation System for Machining Fluids2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the Global Symposium on Recycling, Waste Treatment and Clean Technology (Spain)
  
  Pages: 1999-2008
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Effects of Ultra High-Frequency Vibration for Nanomachining2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proceedings of the 4th euspen International conference (Scotland/UK)
  
  Pages: 113-114
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Effects of Ultra High-Frequency Vibration for Nanomachining,2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 113-114
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Molecular Dynamics Analysis of Ultra High-Acceleration and Vibration Cutting2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Key Engineering Materials 257-258
  
  Pages: 21-26
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Manipulation System for Bio-applications2004
- Author(s)
  L.Zhou, K.Nishida, Z.Qiu, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 165-166
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Development of Recycling Type Filtration Machine by Means of Solid-Liquid Automation Separation System for Machining Fluids2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the Global Symposium on Recycling, Waste Treatment and Clean Technology(REWAS'2004). Spain
  
  Pages: 1999-2008
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Cell Manipulation System under Microscope2004
- Author(s)
  Z.Qio, L.Zhou, K.Nishida, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 1st Int'l Conference on Precision Technology
  
  Pages: 457-461
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] [Introduction of Laboratory] Micro Machining and Fabrication Laboratory, Department of Systems Engineering, Faculty of Engineering, Ibaraki University2004
- Author(s)
  H.Eda, L.Zhou, J.Shimizu, H.Ojima, T.Yamamoto
- Journal Title
  
  J.JSAT (in Japanese) Vol.70(9)
  
  Pages: 1165-1166
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Finish Grinding Conditions for Optimum Physical Properties and Metallurgic Structure in High-Temperature Rolling of Stainless Steels2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the 2nd Int.Conf.on Thermomechanical Processing of Steels (Liege, Belgium)
  
  Pages: 387-394
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Application of Molecular Dynamics Simulation in Micro/Nano Tribology2004
- Author(s)
  H.Eda, J.Shimizu
- Journal Title
  
  Japanese J.of Tribology 49・3
  
  Pages: 223-232
- NAID
  10013113666
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Application of Molecular Dynamics Simulation in Micro/Nano Tribology2004
- Author(s)
  H.Eda, J.Shimizu
- Journal Title
  
  Japanese Journal of Tribology Vol.49(3)
  
  Pages: 223-232
- NAID
  10013113666
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Axisymmetric Aspherical Form Generation for Large Diameter Optical Components2004
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials Vol.257-258
  
  Pages: 101-106
- NAID
  110002512005
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] AUTOMATED CELL MANIPULATION SYSTEM BY USE OF VISUAL INFORMATION2004
- Author(s)
  Libo Zhou, Zhongjun Qiu, Keisuke Nishida, Tomohiko Ishikawa, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Proceedings of 4^<th> International Workshop on Microfactories (Shanhai/China)
  
  Pages: 152-159
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Axisymmetric Aspherical Form Generation for Large Diamond Optical Components2004
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials 257-258
  
  Pages: 101-106
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Recycling Type Filtration Machine by Means of Solid-Liquid Automation Separation System for Machining Fluids2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the Global Symposium on Recycling, Waste Treatment and Clean Technology (REWAS'2004), Spain
  
  Pages: 1999-2008
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] マイクロ・ナノトライボロジーにおける分子動力学シミュレーションの適用2004
- Author(s)
  江田弘, 清水淳
- Journal Title
  
  トライボロジスト 49・6
  
  Pages: 466-472
- NAID
  10013113666
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Development of Cell Manipulation System under Microscope2004
- Author(s)
  Z.Qio, L.Zhou, K.Nishida, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of the 1st Int'l Conference on Positioning Technology (Shizuoka/Japan)
  
  Pages: 457-461
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Effects of Ultra High-Frequency Vibration for Nanomachining2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 113-114
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Effects of Ultra High-Frequency Vibration for Nanomachining2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 113-114
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Simulation on Planarization Process of Device Wafer2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of ISAAT 2004
  
  Pages: 393-396
- NAID
  110002512007
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] AUTOMATED CELL MANIPULATION SYSTEM BY USE OF VISUAL INFORMATION2004
- Author(s)
  L.Zhou, Z.Qiu, K.Nishida, T.Ishikawa, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of 4th International Workshop on Microfactories
  
  Pages: 152-159
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Recycling Type Filtration Machine by Means of Solid-Liquid Automation Separation System for Machining Fluids2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the Global Symposium on Recycling, Waste Treatment and Clean Technology(REWAS'2004) Spain
  
  Pages: 1999-2008
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Axisymmetric Aspherical Form Generation for Large Diameter Optical Components2004
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials 257-258
  
  Pages: 101-106
- NAID
  110002512005
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Ultra High-Acceleration and Vibration Cutting2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Key Engineering Materials Vol.257-258
  
  Pages: 21-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Finish Grinding Conditions for Optimum Physical Properties and Metallurgic Structure in High-Temperature Rolling of Stainless Steels2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the 2nd Int.Conf.on Thermomechanical Processing of Steels (TMP 2004) Liege, Belgium
  
  Pages: 387-394
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation on Flattening Process of a High-Temperature and High-Speed Droplet2004
- Author(s)
  J.Shimizu, E.Ohmura, Y.Kobayashi, S.Kiyoshima, H.Eda
- Journal Title
  
  Proc.Int.Thermal Spray Conf., (ITSC'2004), Osaka (CD-ROM)
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Automated Cell Manipulation System by Use of Visual Information2004
- Author(s)
  L.Zhou, Z.Qiu, K.Nishida, T.Ishikawa, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of 4th International Workshop on Microfactories
  
  Pages: 152-159
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Simulation on Planrization Process of Device Wafer2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of ISAAT 2004
  
  Pages: 393-396
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Application of Molecular Dynamics Simulation in Micro/Nano Tribology2004
- Author(s)
  H.Eda, J.Shimizu
- Journal Title
  
  Journal of Japanese Society of Tribologists (in Japanese) Vol.49(6)
  
  Pages: 466-472
- NAID
  10013113666
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Cell Manipulation System under Microscope2004
- Author(s)
  Z.Qio, L.Zhou, K.Nishida, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 1st Int'l Conference on Precision Technology
  
  Pages: 457-461
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Planarization Process of Device Wafer2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  Proc.of the 3rd Int. Conf.and Exhibition on Design and Production of Dies and Molds 7th Int.Symposium on Advances in Abrasive Technology, (ISAAT 2004), Turkey
  
  Pages: 393-396
- NAID
  110002512007
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Simulation on Effects of Ultra High-Frequency Vibration for Nanomachining2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proceedings of the 4th euspen International conference, Glasgow, UK
  
  Pages: 113-114
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Finish Grinding Conditions for Optimum Physical Properties and Metallurgic Structure in High-Temperature Rolling of Stainless Steels2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the 2nd Int.Conf.on Thermomechanical Processing of Steels (TMP 2004), Liege, Belgium
  
  Pages: 387-394
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Finish Grinding Conditions for Optimum Physical Properties and Metallurgic Structure in High-Temperature Rolling of Stainless Steels2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the 2nd Int.Conf.on Thermomechanical Processing of Steels (TMP 2004). Liege, Belgium
  
  Pages: 387-394
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Simulation on Planarization Process of Device Wafer2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of ISAAT 2004
  
  Pages: 393-396
- NAID
  110002512007
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Axisymmetric Aspherical Form Generation for Large Diamond Optical Components2004
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials 257-258
  
  Pages: 101-106
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Cell Manipulation System under Microscope2004
- Author(s)
  Z.Qiu, L.Zhou, K.Nishida, J.Shimizu.H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 1st Int'l Conference on Precision Technology
  
  Pages: 457-461
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Development of Manipulation System for Bio-applications2004
- Author(s)
  L.Zhou, Z.Qio, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 165-166
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Micro Manipulation System for Bio-applications2004
- Author(s)
  L.Zhou, K.Nishida, Z.Qio, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of the 4th euspen International conference (Scotland,/UK)
  
  Pages: 165-166
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Manipulation System for Bio-applications2004
- Author(s)
  L.Zhou, Z.Qio J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 165-166
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Micro Machining and Fabrication Laboratory, Department of Systems Engineering, Faculty of Engineering, Ibaraki University2004
- Author(s)
  H.Eda, L.Zhou, J.Shimizu, H.Ojima, T.Yamamoto
- Journal Title
  
  [Introduction of Laboratory] Database of leading-edge processing technology (JSPE) (in Japanese)
  
  Pages: 30-31
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] AUTOMATED CELL MANIPULATION SYSTEM BY USE OF VISUAL INFORMATION2004
- Author(s)
  L.Zhou, Z.Qiu, K.Nishida, T.Ishikawa, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of 4th International Workshop on Microfactories, China
  
  Pages: 152-159
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Ultra High-Acceleration and Vibration Cutting2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Key Engineering Materials 257-258
  
  Pages: 21-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Micro Manipulation System for Bio-applications2004
- Author(s)
  L.Zhou, K.Nishida, Z.Qiu, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of the 4th euspen International conference, Glasgow, UK
  
  Pages: 165-166
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Planarization Process of Device Wafer2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of ISAAT 2004 (Bursa/Turkey)
  
  Pages: 393-396
- NAID
  110002512007
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Recycling Type Filtration Machine by Means of Solid-Liquid Automation Separation System for Machining Fluids2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the Global Symposium on Recycling, Waste Treatment and Clean Technology (REWAS'2004), Spain
  
  Pages: 1999-2008
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Finish Grinding Conditions for Optimum Physical Properties and Metallurgic Structure in High-Temperature Rolling of Stainless Steels2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the 2nd Int.Conf.on Thermomechanical Processing of Steels (TMP 2004), Liege, Belgium
  
  Pages: 387-394
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation on Flattening Process of a High-Temperature and High-Speed Droplet2004
- Author(s)
  J.Shimizu, E.Ohmura, Y.Kobayashi, S.Kiyoshima, H.Eda
- Journal Title
  
  Proc.Int.Thermal Spray Conf., (ITSC'2004) (Osaka) 042.pdf(CD-ROM)
  
  Pages: 7-12
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] AUTOMATED CELL MANIPULATION SYSTEM BY USE OF VISUAL INFORMATION2004
- Author(s)
  L.Zhou, Z.Qiu, K.Nishida, T.Ishikawa, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of 4th International Workshop on Microfactories
  
  Pages: 152-159
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Planarization of Patterned Si Wafer, (Establishment of an Analysis Model)2004
- Author(s)
  Libo Zhou, Hitomi Ohkubo, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Transaction of the Japan Society of Mechanical Engineers, C Edition 702/71
  
  Pages: 725-730
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Cell Manipulation System under Microscope2004
- Author(s)
  Z.Qiu, L.Zhou, K.Nishida, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of the 1st Int'l Conference on Positioning Technology
  
  Pages: 457-461
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation on Flattening Process of a High-Temperature and High-Speed Droplet2004
- Author(s)
  J.Shimizu, E.Ohmura, Y.Kobayashi, S.Kiyoshima, H.Eda
- Journal Title
  
  Proc.Int.Thermal Spray Conf.,(ITSC'2004),Osaka
  
  Pages: 7-12
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Planarization Process of Device Wafer, Proc.of the 3rd Int.Conf. and Exhibition on Design and Production of Dies and Molds2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  7th Int.Symposium on Advances in Abrasive Technology, (ISAAT 2004), Turkey
  
  Pages: 393-396
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation on Flattening Process of a High-Temperature and High-Speed Droplet2004
- Author(s)
  J.Shimizu, E.Ohmura, Y.Kobayashi, S.Kiyoshima, H.Eda
- Journal Title
  
  Proc.Int.Thermal Spray Conf., (ITSC'2004), Osaka (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Material Removal Mechanism Beyond Plastic Wave Propagation Rate2003
- Author(s)
  Libo Zhou, Jun Shimizu, Akihito Muroya, Hiroshi Eda
- Journal Title
  
  Precision Engineering 27,2
  
  Pages: 109-116
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Sliding Friction and Wear Mechanism, -Behaviors of Zero Wear-Wear transition Region -2003
- Author(s)
  Jun Shimizu, Hiroshi Eda, Libo Zhou
- Journal Title
  
  Tribologist (in Japanese) Vol.48(9)
  
  Pages: 741-751
- NAID
  10011734712
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Chemo-Mechanical Grinding (CMG) Process2003
- Author(s)
  L.Zhou, S.Kawai, S.Kimura, J.Shimizu, H.Eda
- Journal Title
  
  Proc.of Int.Conf.on Leading Edge Manufacturing in 21st Century, (LEM21), Niigata
  
  Pages: 316-321
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] 金属粒子適用マイクロファブリケーションの基礎研究,第1報:鋼の微少引っかきに及ぼす第2相合金の影響2003
- Author(s)
  谷山久法, 江田弘, 清水淳, 周立波, 中沢由加里, 佐藤潤一
- Journal Title
  
  砥粒加工学会誌 47,5
  
  Pages: 263-268
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Sliding Friction and Wear Mechanism -Behaviors of Zero-Wear Transition Regions -2003
- Author(s)
  J.Shimizu, H.Eda, L.Zhou
- Journal Title
  
  Japanese J.of Tribology 48(5)
  
  Pages: 437-452
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Multifunctional Micro-Machining System and its Applications2003
- Author(s)
  L.Zhou, Y.Yaguchi, T.Fuji, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials Vol.238-239
  
  Pages: 3-8
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of Material Removal Mechanism beyond Propagation Speed of Plastic Wave2003
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proc.of Int.Conf.on Leading Edge Manufacturing in 21st Century, (LEM21), Niigata
  
  Pages: 309-315
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Material Removal Mechanism Beyond Plastic Wave Propagation Rate2003
- Author(s)
  Libo Zhou, Jun Shimizu, Akihito Muroya, Hiroshi Eda
- Journal Title
  
  Precision Engineering Vol.27(2)
  
  Pages: 109-116
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] φ300シリコンウエハ超精密研削加工シミュレーション2003
- Author(s)
  佐川克雄, 江田弘, 周立波, 清水淳, 白石昌武
- Journal Title
  
  砥粒加工学会誌 47,8
  
  Pages: 440-445
- NAID
  10011753390
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Biological-Micro-Manipulation System in Scanning Electron Microscope2003
- Author(s)
  H.Eda, T.Ishikawa, Y.Tomita, Y.Yamamoto, L.Zhou, T.Kawakami, J.Shimizu
- Journal Title
  
  Proc.of 2003 Int.Symposium on Micromechatronics and Human Science (MHS2003), Nagoya
  
  Pages: 211-214
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Three Dimensional Kinematical Analyses for Surface Grinding of Large Scale Substrate2003
- Author(s)
  Libo ZHOU, Kazuhiro SHINOHARA, Jun SHIMIZU, Hiroshi EDA
- Journal Title
  
  Precision Engineering Vol.27(2)
  
  Pages: 175-184
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Multifunctional Micro-Machining System and Applications2003
- Author(s)
  L.Zhou, Y.Yaguchi, T.Fujii, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials 238-239
  
  Pages: 15-18
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Three Dimensional Kinematical Analyses for Surface Grinding of Large Scale Substrate2003
- Author(s)
  Libo ZHOU, Kazuhiro SHINOHARA, Jun SHIMIZU, Hiroshi EDA
- Journal Title
  
  Precision Engineering 27,2
  
  Pages: 175-184
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Experimental Investigation of Micro Scratching on Two Phases Alloy Steel - Plastic Flow Mechanism of Ferrite and Cementite Phase -2003
- Author(s)
  H.Taniyama, H.Eda, L.Zhou, J.Shimizu, J.Sato
- Journal Title
  
  Key Engineering Materials 238-239
  
  Pages: 3-8
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Manipulation of the Universal Rotational Mechanism for Biological Application2003
- Author(s)
  T.Ishikawa, H.Eda, Y.Yamamoto, K.Kawakami, L.Zhou, J.Shimizu
- Journal Title
  
  Proc.of 2003 Int'l Symposium on Microelectronics and Human Science, Nagoya, Oct.(IEEE Robotics & Automation 2003)
  
  Pages: 215-220
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Basic research on microfabrication applied to metal particles, -1^<st> report : Effect of second phase in steels on microscratching -2003
- Author(s)
  Hisanori Taniyama, Hiroshi Eda, Jun Shimizu, Libo Zhou, Yukari Nakazawa, Jun'ichi Sato
- Journal Title
  
  J.JSAT (in Japanese) Vol.47(5)
  
  Pages: 263-268
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] すべり摩擦・摩耗機構の分子動力学解析-ゼロ摩耗-摩耗遷移領域の挙動-2003
- Author(s)
  清水淳, 江田弘, 周立波
- Journal Title
  
  トライボロジスト 48,9
  
  Pages: 741-751
- NAID
  10011734712
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] 巨大重量主軸台の原子レベル超磁歪位置決め/アライメントシステムの開発,-φ300Siウエハ超加工機械の中核技術-2003
- Author(s)
  江田弘, 中野博民, 近藤良, 周立波, 森輝夫, 清水淳
- Journal Title
  
  精密工学会誌 69,1
  
  Pages: 100-104
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Biological-Micro-Manipulation System in Scanning Electron Microscope2003
- Author(s)
  H.Eda, T.Ishikawa, Y.Tomita, Y.Yamamoto, L.Zhou, T.Kawakami, J.Shimizu
- Journal Title
  
  Proc.of 2003 Int'l Symposium on Microelectronics and Human Science,(IEEE Robotics & Automation 2003)
  
  Pages: 211-214
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Chemo-Mechanical Grinding (CMG) Process2003
- Author(s)
  L.Zhou, S.Kawai, S.Kimura, J.Shimizu, H.EDA
- Journal Title
  
  Proc.of International Conference on LEM21 (Niigata)
  
  Pages: 316-321
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Atomic Level GMM Positioning/Alignment System for Driving a Gigantic Weight Spindle, -Core Technology for Advanced φ300mm Si Wafer Ultraprecision Machine Tool -2003
- Author(s)
  Hiroshi EDA, Hirotami NAKANO, Ryou KONDO, Libo ZHOU, Teruo MORI, Jun SHIMIZU
- Journal Title
  
  J.JSPE (in Japanese) Vol.69(1)
  
  Pages: 100-104
- NAID
  110001373477
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Sliding Friction and Wear Mechanism - Behaviors of Zero Wear-Wear Transition Regions -2003
- Author(s)
  J.Shimizu, H.Eda, L.Zhou
- Journal Title
  
  Japanese J.of Tribology 48・5
  
  Pages: 437-452
- NAID
  10011734712
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Simulation of ultra precision grinding of φ300 Si wafer2003
- Author(s)
  Katsuo Sagawa, Hiroshi Eda, Libo Zhou, Jun Shimizu, Masatake Shiraishi
- Journal Title
  
  J.JSAT (in Japanese) Vol.47(8)
  
  Pages: 440-445
- NAID
  10011753390
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Manipulation of the Universal Rotational Mechanism for Biological Application2003
- Author(s)
  T.Ishikawa, H.Eda, Y.Yamamoto, T.Kawakami, L.Zhou, J.Shimizu
- Journal Title
  
  Proc.of 2003 Int.Symposium on Micromechatronics and Human Science (MHS2003), Nagoya
  
  Pages: 215-220
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Experimental Investigation of Micro Scratching on Two Phases Alloy Steel -Plastic Flow Mechanism of the Ferrite and Cementite Phase -2003
- Author(s)
  H.Taniyama, H.Eda, L.Zhou, J.Shimizu, J.Sato
- Journal Title
  
  Key Engineering Materials Vol.238-239
  
  Pages: 15-18
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of Material Removal Mechanism beyond Propagation Speed of Plastic Wave2003
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Proc.of International Conference on LEM21 (Niigata)
  
  Pages: 309-315
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Synthesis and Characterization of c-Axis Oriented Apatite Aggregates2003
- Author(s)
  K.Ohta, M.Kikuchi, J.Tanaka, H.Eda
- Journal Title
  
  Key Engineering Materials 240-242
  
  Pages: 517-520
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Sliding Friction and Wear Mechanism - Behaviors of Zero-Wear Transition Regions -2003
- Author(s)
  J.Shimizu, H.Eda, L.Zhou
- Journal Title
  
  Japanese J.of Tribology 48,5
  
  Pages: 437-452
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation and Experimental Analysis of Super High-Speed Grinding of Ductile Material2002
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Proc.of 10th Int.Manufacturing Conf.in China (IMCC 2002), China (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] 3D Kinematic Analysis of Large Scale Substrate Surface Grinding.2002
- Author(s)
  Libo ZHOU, Jun SHIMIZU, Kazuhiro SHINOHARA, Hiroshi EDA
- Journal Title
  
  Proceedings of ASPE 2002 Annual Meeting
  
  Pages: 140-143
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] State-of-the-art Technologies and Kinematical Analysis for One-Stop Finishing of φ300mm Si Wafer2002
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Proc.of 10th Int.Manufacturing Conf.in China (IMCC 2002), China (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] State-of-the-art Technologies and Kinematical Analysis for One-Stop Finishing of φ300mm Si Wafer2002
- Author(s)
  Libo ZHOU, Jun SHIMIZU, Hiroshi EDA
- Journal Title
  
  J.Materials Processing Technology Vol.129(1-3)
  
  Pages: 34-40
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] State-of-the-art Technologies and Kinematical Analysis for One-Stop Finishing of φ300mm Si Wafer2002
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Proc.of 10th Int.Manufacturing Conf.in China (CD-ROM)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] 熱・電・磁場附加による工具機能の改善に関する研究2002
- Author(s)
  周立波, 福田勇夫, 清水淳, 江田弘, 加藤明彦, 谷山久法
- Journal Title
  
  砥粒加工学会誌 46,10
  
  Pages: 507-510
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] State-of-the-art Technologies and Kinematical Analysis for One-Stop Finishing of φ300mm Si Wafer2002
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Journal of Materials Processing Technology 129,1-3
  
  Pages: 34-40
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of Contact Process in AFM/FFM Surface Observation2002
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Proc.of 2^<nd> Asia Int.Conf.on Tribology, Korea
  
  Pages: 61-62
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Cutting tool performance enhanced with thermal/electrical/magnetic processing2002
- Author(s)
  Libo ZHOU, Isao FUKUDA, Jun SHIMIZU, Hiroshi EDA, Akihiko KATO, Hisanori TANIYAMA
- Journal Title
  
  J.JSAT (in Japanese) Vol.46(10)
  
  Pages: 506-509
- NAID
  10010081510
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Crystal Dependence in Micro Scratching of Carbon Steel -Groove Formation of Cementite and Ferrite Phases -2002
- Author(s)
  H.Taniyama, H.Eda, J.Sato, J.Shimizu, L.Zhou
- Journal Title
  
  Proc.of 2^<nd> Asia Int.Conf.on Tribology Korea
  
  Pages: 197-198
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] 3D Kinematical Analysis of Large Scale Substrate Surface Grinding2002
- Author(s)
  L.Zhou, J.Shimizu, K.Shinohara, H.Eda
- Journal Title
  
  Proc.of American Society for Precision Engineering 2002 Annual Meeting, USA
  
  Pages: 140-143
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Research on Chemo-Mechanical-Grinding (CMG) of Si wafer, -1^<st> Report : Development of CMG Wheel -2002
- Author(s)
  Libo ZHOU, Shinji KAWAI, Masayuki HONDA, Jun SHIMIZU, Hiroshi EDA, Kazuaki YAKITA
- Journal Title
  
  J.JSPE (in Japanese) Vol.68(12)
  
  Pages: 1559-1563
- NAID
  110001373342
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Chemo-Mechanical-Grinding2002
- Author(s)
  Libo Zhou, Yuji Yoshida, Hiroshi Eda
- Journal Title
  
  Machine and Tool (in Japanese) Vol.46(5)
  
  Pages: 33-38
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] [Introduction of Laboratory] Micro Machining and Fabrication Laboratory, Department of Systems Engineering, Faculty of Engineering, Ibaraki University2002
- Author(s)
  H.Eda, L.Zhou, J.Shimizu, T.Yamamoto
- Journal Title
  
  J.JSAT (in Japanese) Vol.46(5)
  
  Pages: 230-231
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of the Contact Process in AFM Surface Observations2002
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Tribotest Journal 9,2
  
  Pages: 101-115
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of Contact Process in AFM/FFM Surface Observation2002
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Proc.Int.Conf.ASIATRIB2002, Korea
  
  Pages: 61-62
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation and Experimental Analysis of Super High-Speed Grinding of Ductile Material2002
- Author(s)
  Jun SHIMIZU, Libo ZHOU, Hiroshi EDA
- Journal Title
  
  Journal of Materials Processing Technology 129,1-3
  
  Pages: 19-24
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] SiウエハのChemo-Mechanical-Grinding(CMG)に関する研究-第1報:CMG砥石の開発-2002
- Author(s)
  周立波, 河合真二, 本田将之, 清水淳, 江田弘, 焼田和明
- Journal Title
  
  精密工学会誌 68,12
  
  Pages: 1559-1563
- NAID
  110001373342
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation and Experimental Analysis of Super High-Speed Grinding of Ductile Material2002
- Author(s)
  Jun SHIMIZU, Libo ZHOU, Hiroshi EDA
- Journal Title
  
  J.Materials Processing Technology Vol.129(1-3)
  
  Pages: 19-24
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation and Experimental Analysis of Super High-Speed Grinding of Ductile Material2002
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Proc.of 10th Int.Manufacturing Conf.in China (CD-ROM)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of Contact Process in AFM Surface Observations2002
- Author(s)
  J.Shimizu, L.ZHOU, H.EDA
- Journal Title
  
  Tribotest Journal Vol.9(2)
  
  Pages: 101-115
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Crystal Dependence in Micro Scratching of Carbon Steel - Groove Formation on Pearlite -2002
- Author(s)
  H.Taniyama, H.Eda, J.Sato, J.Shimizu, L.Zhou
- Journal Title
  
  Proc.Int.Conf.ASIATRIB2002, Korea
  
  Pages: 197-198
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of Nano Grinding -Influence of Tool Stiffness-
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int. J. Manufacturing Science ＆ Technology, (印刷中)
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] SiウエハのChemo-Mechanical-Grinding(CMG)に関する研究 -第2報:固定砥粒によるφ300mm Siウエハの完全表面創成-
- Author(s)
  周立波, 清水淳, 江田弘, 木村伸一郎
- Journal Title
  
  精密工学会誌 (掲載待ち)
- NAID
  10015505910
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] SiウエハのChemo-Mechanical-Grinding(CMG)に関する研究 -第2報:固定砥粒によるφ300mm Siウエハの完全表面創成-
- Author(s)
  周立波, 清水淳, 江田弘, 木村伸一郎
- Journal Title
  
  精密工学会誌 (掲載待ち)
- NAID
  10015505910
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation of Nano Grinding-Influence of Tool Stiffness-
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int.J.Manufacturing Science ＆ Technology, Key Engineering Materials (to be published)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Patent] 工作物表面加工方法2009
- Inventor(s)
  神谷純生, 岩瀬久雄, 長池哲也, 江田弘, 周立波
- Industrial Property Rights Holder
  トヨタ自動車 (株)
- Acquisition Date
  2009-03-27
- Data Source
  KAKENHI-PROJECT-19360056
[Patent] Attitude control device and precision machining apparatus2007
- Inventor(s)
  神谷純生, 岩瀬久雄, 長池哲也, 江田弘, 周立波
- Industrial Property Rights Holder
  トヨタ自動車(株)
- Acquisition Date
  2007-04-27
- Overseas
- Data Source
  KAKENHI-PROJECT-19360056
[Patent] Precision machining apparatus and precision machining method2007
- Inventor(s)
  神谷純生, 岩瀬久雄, 長池哲也, 江田弘, 周立波
- Industrial Property Rights Holder
  トヨタ自動車(株)
- Acquisition Date
  2007-08-06
- Overseas
- Data Source
  KAKENHI-PROJECT-19360056
[Patent] Attitude control device and precision machining apparatus2007
- Inventor(s)
  神谷純生, 岩瀬久雄, 長池哲也, 江田弘, 周立波
- Industrial Property Rights Holder
  トヨタ自動車(株)
- Acquisition Date
  2007-09-01
- Overseas
- Data Source
  KAKENHI-PROJECT-19360056
[Patent] Attitude control device and precision machining apparatus2007
- Inventor(s)
  神谷純生, 岩瀬久雄, 長池哲也, 江田弘, 周立波
- Industrial Property Rights Holder
  トヨタ自動車(株)
- Acquisition Date
  2007-06-20
- Overseas
- Data Source
  KAKENHI-PROJECT-19360056
[Patent] Precision machining apparatus and precision machining method2007
- Inventor(s)
  神谷純生, 岩瀬久雄, 長池哲也, 江田弘, 周立波
- Industrial Property Rights Holder
  トヨタ自動車(株)
- Acquisition Date
  2007-06-24
- Overseas
- Data Source
  KAKENHI-PROJECT-19360056
[Patent] Attitude control device and precision machining apparatus2007
- Inventor(s)
  神谷純生, 岩瀬久雄, 長池哲也, 江田弘, 周立波
- Industrial Property Rights Holder
  トヨタ自動車(株)
- Acquisition Date
  2007-10-10
- Overseas
- Data Source
  KAKENHI-PROJECT-19360056
[Patent] 精密加工方法2005
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬久雄
- Industrial Property Rights Holder
  トヨタ自動車
- Industrial Property Number
  2005-107821
- Filing Date
  2005-04-04
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Patent] 精密加工装置および精密加工方法2005
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬久雄
- Industrial Property Rights Holder
  トヨタ自動車
- Industrial Property Number
  2005-226419
- Filing Date
  2005-08-04
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Patent] 精密加工装置および精密加工方法2004
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬久雄
- Industrial Property Rights Holder
  トヨタ自動車
- Industrial Property Number
  2004-380782
- Filing Date
  2004-12-28
- Data Source
  KAKENHI-PROJECT-15656033
[Patent] 姿勢制御装置および精密加工装置2004
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬久雄
- Industrial Property Rights Holder
  茨城大学, トヨタ自動車
- Industrial Property Number
  2004-379810
- Filing Date
  2004-12-28
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Patent] 精密加工装置および精密加工方法2004
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬
- Industrial Property Rights Holder
  茨城大学, トヨタ自動車
- Industrial Property Number
  2004-380782
- Filing Date
  2004-12-28
- Data Source
  KAKENHI-PROJECT-14350065
[Patent] 姿勢制御装置および精密加工装置2004
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬
- Industrial Property Rights Holder
  トヨタ自動車
- Industrial Property Number
  2004-379810
- Filing Date
  2004-12-28
- Data Source
  KAKENHI-PROJECT-16360061
[Patent] 姿勢制御装置および精密加工装置2004
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬久雄
- Industrial Property Rights Holder
  トヨタ自動車
- Industrial Property Number
  2004-379810
- Filing Date
  2004-12-28
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Patent] 精密加工装置および精密加工方法2004
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬久雄
- Industrial Property Rights Holder
  トヨタ自動車
- Industrial Property Number
  2004-380782
- Filing Date
  2004-12-28
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Patent] 精密加工装置および精密加工方法2004
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬
- Industrial Property Rights Holder
  トヨタ自動車
- Industrial Property Number
  2004-380782
- Filing Date
  2004-12-28
- Data Source
  KAKENHI-PROJECT-16360061
[Patent] 姿勢制御装置および精密加工装置2004
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬久雄
- Industrial Property Rights Holder
  トヨタ自動車
- Industrial Property Number
  2004-379810
- Filing Date
  2004-12-28
- Data Source
  KAKENHI-PROJECT-15656033
[Patent] 精密加工装置および精密加工方法2004
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬久雄
- Industrial Property Rights Holder
  茨城大学, トヨタ自動車
- Industrial Property Number
  2004-380782
- Filing Date
  2004-12-28
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Patent] 姿勢制御装置および精密加工装置2004
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬
- Industrial Property Rights Holder
  茨城大学, トヨタ自動車
- Industrial Property Number
  2004-379810
- Filing Date
  2004-12-28
- Data Source
  KAKENHI-PROJECT-14350065
[Patent] 工作物表面加工方法2003
- Inventor(s)
  江田弘, 周立波, 神谷純生, 岩瀬久雄
- Industrial Property Rights Holder
  茨城大学, トヨタ自動車
- Industrial Property Number
  2003-371192
- Filing Date
  2003
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Patent] 微細操作用マイクロマニピュレータ2003
- Inventor(s)
  齋藤浩之, 周立波, 江田弘, 川上辰男, 石川友彦, 太田一史
- Industrial Property Rights Holder
  茨城大学
- Industrial Property Number
  2003-047341
- Filing Date
  2003
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Presentation] 化学作用を模擬したシリコンウエハ研削・研磨加工の分子動力学シミュレーション2008
- Author(s)
  清水淳, 周立波, 江田弘
- Organizer
  2008年度精密工学会春季大会
- Place of Presentation
  明治大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 細胞操作用マイクロマニピュレータの最適経路生成に関する研究2008
- Author(s)
  尾嶌裕隆, 土屋大基, 周立波, 清水淳, 江田弘
- Organizer
  2008年度精密工学会春季大会
- Place of Presentation
  明治大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Study on Reaction Mechanism of Si and pure CeO_2 for CMG Process2008
- Author(s)
  S Kamiya, H. Iwase, K. Kishita, L. Zhou, H. Eda, Y. Yoshida
- Organizer
  The 1st International Conference on Nanomanufacturing
- Place of Presentation
  Singapore
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 光触媒膜に関する基礎的研究-表面性状の影響-2008
- Author(s)
  梓沢慶介, 石井勇多, 清水淳, 周立波, 江田弘
- Organizer
  2008年度精密工学会春季大会
- Place of Presentation
  明治大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] シリコンウエハ研削における凝着の影響の分子動力学シミュレーション2008
- Author(s)
  清水淳, 江田弘, 周立波
- Organizer
  トライボロジー会議2008春
- Place of Presentation
  国立オリンピック記念青少年総合センター
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 超短パルスレーザによる単結晶ダイヤモンド加工に関する研究2008
- Author(s)
  溝口高史, 萩谷淳史, 山本武幸, 清水淳, 周立波, 江田弘
- Organizer
  精密工学会・第15回学生会員卒業研究発表
- Place of Presentation
  明治大学
- Year and Date
  2008-03-17
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] ステレオ法による三次元計測および形状データ構築2008
- Author(s)
  大塚春樹, 笹本侑弥, 尾嶌裕隆, 周立波, 清水淳, 江田弘
- Organizer
  2008年度精密工学会春季大会
- Place of Presentation
  明治大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Simulation and Experimental Study on Nanoscracthig of Silicon Wafer2007
- Author(s)
  J. Shimizu, H. Okabe, T. Tsumura, Y. Suehisa, L. Zhou, H. EDA
- Organizer
  Proceedings of Int'l Conference on Tribology in Manufacturing Process (ICTMP) 2007
- Place of Presentation
  Yokohama/Japan
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 大口径Siウェハ加工プロセスの評価技術に関する研究2007
- Author(s)
  ソルタニ・ホセイニ・バーマン, 光田孝仁, 佐々木淳一, 敦賀達也, 清水淳, 周立波, 江田弘
- Organizer
  ABTEC2007
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Research on CMG of large size silica glass substrate2007
- Author(s)
  T. Shina, L. Zhou, Z.J Qiu, T. Yamamoto, J. Shimizu, H. Eda
- Organizer
  Proceeding of LEM21
- Place of Presentation
  Fukuoka/Japan
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] ステレオ法によるSEM画像からの3次元計測および形状復元2007
- Author(s)
  笹本侑弥, 大塚春樹, 周立波, 尾嶌裕隆, 清水淳, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] プローブ陽極酸化を用いたSi基板上のナノ構造の創成に関する研究2007
- Author(s)
  青木俊暁, 陶久夢高, 清水淳, 周立波, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Development of High Performance Wheels for Chemo-Mechanical-Grinding2007
- Author(s)
  Y. Tashiro, M. Kenmochi, B. Soitani, T. Tsuruga, L. Zhou, J. Shimizu, H. Eda
- Organizer
  Proceeding of LEM21
- Place of Presentation
  Fukuoka/Japan
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Study on Nanomachining Process of Si Wafer using an Atomic Force Microscope2007
- Author(s)
  J. SHIMIZU, T. TSUMURA, Y. SUEHISA, L. ZHOU, H. EDA
- Organizer
  Proceeding of LEM21
- Place of Presentation
  Fukuoka/Japan
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Siウエハのナノ引っかきによるナノ構造創成の検討2007
- Author(s)
  津村貴史, 大谷健太郎, 清水淳, 周立波, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] ポテンシャルパラメータ制御を施したシリコンウエハ研削の分子動力学シミュレーションーシミュレーションモデルの提案-2007
- Author(s)
  清水淳, 岡部秀光, 周立波, 江田弘
- Organizer
  2007年度精密工学会秋季大会
- Place of Presentation
  旭川高専
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 石英ガラスのCMG加工に関する研究2007
- Author(s)
  土屋大基, 椎名剛志, 周立波, 山本武幸, 清水淳, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 分子動力学シミュレーションによる摩擦異方性の微視的解析2007
- Author(s)
  清水淳, 江田弘, 周立波
- Organizer
  トライボロジー会議2007春
- Place of Presentation
  国立オリンピック記念青少年総合センター
- Year and Date
  2007-05-29
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 金型の微細加工に関する研究2007
- Author(s)
  川瀬大智, 山本武幸, 周立波, 清水淳.江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] SPMによるナノ構造の創成に関する研究-加工パラメータの陽極酸化パターンに及ぼす影響-2007
- Author(s)
  陶久夢高, 青木俊暁, 清水淳, 周立波, 江田弘
- Organizer
  2007年度精密工学会秋季大会
- Place of Presentation
  旭川高専
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] TiO2膜の基本特性に関する研究2007
- Author(s)
  梓沢慶介, 石井勇多, 清水淳, 周立波, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 工具剛性がナノ研削に及ぼす影響の分子動力学シミュレーション2007
- Author(s)
  清水淳, 周立波, 江田弘
- Organizer
  ABTEC2007
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 超短パルスレーザによるSiウエハ割断法に関する研究2007
- Author(s)
  溝口高史, 萩谷淳史, 山本武幸, 周立波, 清水淳, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Development of On-machine 3D Measuring System for Large Size Si Wafer Thinning Process, Advances in Abrasive technology X2007
- Author(s)
  T. Mitsuta, B. Soltani, T. Tsuruga, J. Sasaki, L. Zhou, J. Shimizu, H. Eda
- Organizer
  Proceedings of ISAAT2007
- Place of Presentation
  Detroit/USA
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Study on Thinning Process of Large Size Si wafer, Advances in Abrasive technology X2007
- Author(s)
  T. Tsuruga, B. Soltani, J. Sasaki, T. Mitsuta, J. Shimizu, L. Zhou, H. Eda
- Organizer
  Proceedings of ISAAT2007
- Place of Presentation
  Detroit/USA
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 研削加工におけるSiウエハの構造変化2007
- Author(s)
  周立波, 清水淳, 江田弘, Han Huang
- Organizer
  ABTEC2007
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-19360056

1. SHIMIZU Jun (40292479)

# of Collaborated Projects: 10 results

# of Collaborated Products: 198 results
2. ZHOU Libo (90235705)

# of Collaborated Projects: 8 results

# of Collaborated Products: 187 results
3. YAMAMOTO Yoshio (20272114)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
4. NAKANO Hirotami (90257329)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
5. OJIMA Hirotaka (90375361)

# of Collaborated Projects: 3 results

# of Collaborated Products: 15 results
6. INUI Masatomo (90203215)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
7. 田村祐二 (80007624)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. KAMIYA Sumio

# of Collaborated Projects: 2 results

# of Collaborated Products: 7 results
9. 仇中軍

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. YAMAMOTO Takeyuki (40396594)

# of Collaborated Projects: 1 results

# of Collaborated Products: 18 results
11. MA Shugen (20250988)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. SUZUKI Hiromasa (40187761)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. MAEKAWA Katsuhiro (20126329)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. MORISHIGE Koichi (90303015)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. KONDO Ryo (90186867)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. 山中一雄 (90125807)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. 住谷秀保 (30206594)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. 大村悦二 (90144435)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. 谷順二 (30006192)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. 荒井賢一 (40006268)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. 古屋泰文 (20133051)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. 神山新一 (80006171)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. 松本英治 (71036548)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. 谷山久法 (80110211)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. IWASE Hisao

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
26. YAMASHITA Teruki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. TASHIRO Yoshiaki

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
28. TIAN Yebin

# of Collaborated Projects: 1 results

# of Collaborated Products: 24 results
29. INAGAKI Masatoshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
30. WATANABE Kazushi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
31. KAWAKAMI Tatuso

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
32. ISHIKAWA Tomohiko

# of Collaborated Projects: 1 results

# of Collaborated Products: 13 results
33. 館義雄

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
34. 稲村正寿

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
35. 飯田克彦

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
36. QIO Zhongjun

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
37. 太田一史

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
38. 木村俊一郎

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results

EDA Hiroshi 江田 弘

江田 弘 エダ ヒロシ

Research Projects

Research Products

Co-Researchers

Research on Manufacturing Technology of Etalon : A Core Element of Tunable Dispersion Compensator for Optical Communication, by means of CMG Process

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Research on Chemo-Mechanical Grinding Process for Extremely-thin Si Wafer Used in Next Generation Power Devices

Principal Investigator

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不錆高強度の鋼炭化物適用のマイクロファブリケーションの萌芽研究Principal Investigator

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Development of Automated Cell Manipulation SystemPrincipal Investigator

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Development of Multifunctional Micro-Machining System and its Core Technologies

Principal Investigator

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インテリジェント材料・流体システムに関する国際会議の企画調査

Principal Investigator

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高・低温環境対応テレメータ式超磁歪加速度センサの企画調査-地球環境モニタリング-Principal Investigator

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Development of Basic Software for Skill-less Manufacturing of Molds and Dies

Principal Investigator

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DEVELOPMENT OF 600m/s SUPER HIGH-SPEED AND NANOMETER ORDER ULTRA PRECISION MACHINE TOOL

Principal Investigator

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Research Institution

DEVELOPMENT OF ONE-STOP MACHINING SYSTEM AND CORE TECHNOLOGIES FOR LARGE-DIAMETER Si WAFER BEING POTENTIALLY USED FROM YEAR 2003Principal Investigator

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超磁歪アクチュエータ・センサー適用の構造物制振機構とデバイスの創作Principal Investigator

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DEVELOPMENT OF MICRO PROCESS AND MICRO FABRICATION SYSTEM AND EXPERIMENT UNDER SCANNING ELECTRON MICROSCOPEPrincipal Investigator

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THE CREATION RESEARCH OF SUB NANOMETER MACHINING SYSTEM OF MAGNETISM, ELECTRON AND OPTICAL COMPONENT GLASS AND MULTIPURPOSE MACHINE TOOLPrincipal Investigator

Principal Investigator

Project Period (FY)

EDA Hiroshi 江田弘

江田弘エダヒロシ