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Jpn. J. Appl. Phys.
Volume: 58 Issue: 3 Pages: 038002-038002
10.7567/1347-4065/aafb64
210000135350
Volume: 57 Issue: 3S1 Pages: 03DA02-03DA02
10.7567/jjap.57.03da02
120006584034
Volume: 56 Issue: 8 Pages: 088003-088003
10.7567/jjap.56.088003
120006486935
Jpn.J.Appl.Phys.
Volume: 49
120002515707
Jpn. J. Appl. Phys
Volume: Vol.49, No.10
Mat. Res. Soc. Symp. Proc.
Volume: Vol.1153 Pages: 77-82
Thin Solid Films
Volume: Vol.517, Issue 20 Pages: 5830-5836
Mat.Res.Soc.Symp.Proc. Vol.811
Proc.The 7th International Symp.on Sputtering and Plasma Processes Vol.AP P-4
Pages: 491-494
Jpn.J.Appl.Phys Vol.43, No.4B
Pages: 2220-2225
10012949833
IEEE Transaction on Electron Devices Vol.51, No.5
Pages: 820-823
IEEE Transaction on Electron Devices Vol.51,No.5
Jpn.J.Appl.Phys Vol.43,No.4B
Proc. The 7th International Symp. on Sputtering and Plasma Processes AP P-4
Jpn.J.Appl.Phys. Vol.43, No.4B
