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All Journal Article Presentation
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 456 Pages: 12-15
10.1016/j.nimb.2019.06.042
Proceedings of 22nd International Conference on Ion Implantation Technology
Volume: 印刷中
Technical Digest of 31st International Microprocesses and Nanotechnology Conference
Volume: 31
Appl. Phys. Lett.
Volume: 113
10.1063/1.5079763
120006546830
Microelectronic Engineering
Volume: 141 Pages: 203-206
10.1016/j.mee.2015.03.049
Jpn. J. Appl. Phys.
Volume: 54 Issue: 6S1 Pages: 06FF10-06FF10
10.7567/jjap.54.06ff10
210000145234
J. Vac. Sci. and Technol. B
Volume: Vol. 32
10.1116/1.4864307
Surface and Interface Analysis
Volume: 46 Pages: 1192-1195
10.1002/sia.5590
Proc. Intern. Display Workshop
Volume: 21 Pages: 599-601
J. Vac. Sci. & Technol. B
10.1116/1.4790518
J. App. Phys.
10.1063/1.4801887
10.1116/1.4769976
Volume: 110 Pages: 358-360
10.1016/j.mee.2013.02.062
信学技報(IEICE Technical Report)
Volume: Vol.113 Pages: 41-45
http://www.ieice.org/ken/paper/20131023vBg8/
Volume: 113 Pages: 41-45
Technical Digest of 25th International Vacuum Nanoelectronics Conference (IEEE Catalog No. CFP12VAC-PRT)
Pages: 68-69
Proceedings of the 19th International Conference on Ion Implantation Technology (IIT 2012) AIP Conference Proceedings
Volume: 1946 Pages: 164-166
Volume: (On-line)
10.1002/sia.4878
Volume: 97 Pages: 144-146
10.1016/j.mee.2012.04.028
Pages: 44-45
Volume: - Pages: 44-45
Volume: 44 Pages: 732-735
Jpn.J.Appl.Phys. in print.
210000070717
Proceedings of the 24th International Vacuum Nanoelectronics Conference
Pages: 109-110
Jpn.J.Appl.Phys
Volume: (印刷中)
Nucl.Instr.Meth.B in press
Proceedings of 18th International Conference on Ion Implantation Technology (IIT 2010)
Pages: 229-232
J. Vac. Sci. Technol B28(in press)
J.Vac.Sci.Technol.B
Volume: 28
J.Vac.Sci.Technol.B 28
Proceedings of 18th International Conference on Ion Implantation Technology (IIT2010) AIP Conference Proceedings
Volume: 1321 Pages: 229-232
Jpn J.of Appl.Phys. 48
J. Vacuum Science & Technology B 27(2)(In press)
Japanese Journal of Applied Physics 48(in press)
Japanese Journal of Applied Physics 48
J. Vac. Sci. Technol B27
Pages: 721-724
J.Vac.Sci.Technol.B 27
Journal of Vacuum Science & Technology B 27
Journal of Vacuum Science & Technology.B 25,(4)
Pages: 1310-1314
Journal of Vacuum Science & Technology B25(4)
Journal of Vacuum Science & Technology B25, (4)
Japanese Journal of Applied Physics Vol.44
Pages: 5683-5686
10016677807
Japanese Journal of Applied Physics 44
Physica E-22
Pages: 288-291
Physica vol.E-22
