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Adachi Kenji  足達 健二

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ADACHI Kenji  足達 健二

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Researcher Number 60521739
Affiliation (Current) 2025: 大阪大学, 大学院工学研究科, その他
Affiliation (based on the past Project Information) *help 2016: 大阪大学, 大学院工学研究科, 招へい教授
Review Section/Research Field
Except Principal Investigator
Production engineering/Processing studies
Keywords
Except Principal Investigator
ナノマイクロ加工 / 光エッチング / 三次元形状 / フッ素化剤 / 半導体表面
  • Research Projects

    (1 results)
  • Research Products

    (7 results)
  • Co-Researchers

    (3 People)
  •  FORMATION OF THREE-DIMENSIONAL SHAPES IN SEMICONDUCTOR SURFACES FOR FUNCTIONAL DEVICES THROUGH PHOTOCHEMICAL REACTION WITH ELECTROPHILIC FLUORINATION AGENTS

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      2014 – 2016
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University

All 2016 2015 2014

All Journal Article Presentation Patent

  • [Journal Article] Effect of metal particles on the Si etching rate with N-fluoropyridinium salts2016

    • Author(s)
      Masaki Otani, Kentaro Kawai, Kentaro Tsukamoto, Takabumi Nagai, Kenji Adachi, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 10 Pages: 1080031-3

    • DOI

      10.7567/jjap.55.108003

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H03902, KAKENHI-PROJECT-26289017, KAKENHI-PROJECT-16K14133
  • [Patent] エッチング処理用組成物及びエッチング処理方法2016

    • Inventor(s)
      川合 健太郎、森田 瑞穂、足達 健二、永井 隆文
    • Industrial Property Rights Holder
      ダイキン工業株式会社、国立大学法人大阪大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-03-04
    • Overseas
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Patent] エッチング処理用組成物及びエッチング処理方法2015

    • Inventor(s)
      足達 健二、永井 隆文、森田 瑞穂、川合 健太郎
    • Industrial Property Rights Holder
      ダイキン工業株式会社、国立大学法人大阪大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-043031
    • Filing Date
      2015-03-04
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるSi表面ランダムダブルテクスチャ形成2016

    • Author(s)
      熊田 竜也、川合 健太郎、永井 隆文、足達 健二、有馬 健太、森田 瑞穂
    • Organizer
      応用物理学会
    • Place of Presentation
      東京工業大学 大岡山キャンパス(東京都目黒区)
    • Year and Date
      2016-03-19
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] Texturing Low Reflecting Surface of Random Double Inverted Pyramids Using N-fluoropyridinium Salt2014

    • Author(s)
      Tatsuya Kumada, Kentaro Kawai, Toshinori Hirano, Masaki Otani, Takabumi Nagai, Kenji Adachi, Kenta Arima, and Mizuho Morita
    • Organizer
      40th IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE
    • Place of Presentation
      Denver(USA)
    • Year and Date
      2014-06-11
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] Mask-less formation of anti-reflecting inverted-pyramids to single-crystal Si solar cell by N-fluoropyridinium salts2014

    • Author(s)
      Kentaro Kawai, Tatsuya Kumada, Takabumi Nagai, Kenji Adachi, Kenta Arima and Mizuho Morita
    • Organizer
      EMN Summer Meeting
    • Place of Presentation
      Cancun(Mexico)
    • Year and Date
      2014-06-10
    • Invited
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] Development of Silicon Photo-Etching with N-Fluoropyridinium Salts2014

    • Author(s)
      Kenji Adachi, Takabumi Nagai, Junichi Uchikoshi, Masaki Otani, Toshinori Hirano, Kentaro Kawai, Mizuho Morita
    • Organizer
      INTERNATIONAL CONFERENCE ON FLUORINE CHEMISTRY
    • Place of Presentation
      Pacifico Yokohama(Kanagawa・Yokohama)
    • Year and Date
      2014-05-29
    • Data Source
      KAKENHI-PROJECT-26289017
  • 1.  MORITA Mizuho (50157905)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 4 results
  • 2.  川合 健太郎 (90514464)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 4 results
  • 3.  有馬 健太
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 1 results

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