ONUKI JIN 大貫仁

… Alternative Names

OONUKI Jin 大貫仁

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Researcher Number	70315612
Other IDs
External Links
Affiliation (Current)	2025: 茨城大学, 応用理工学野, その他
Affiliation (based on the past Project Information) *help	2015: 茨城大学, 理工学研究科, 特任教授 2015: 茨城大学, 工学部, 教授 2014 – 2015: 茨城大学, 理工学研究科, 教授 2014: 茨城大学, 工学部, 特任教授 2004 – 2013: 茨城大学, 工学部, 教授
Review Section/Research Field	Principal Investigator Structural/Functional materials / Material processing/Microstructural control engineering Except Principal Investigator Material processing/treatments / Electron device/Electronic equipment
Keywords	Principal Investigator 抵抗率 / LSI / 結晶粒径 / 配線抵抗率 / TEG / Cu配線 / Oxygen / Cu Plating / High-purity Plating Material / Cu Interconnects … More / Grain Size / Low Resistivity / 配線の密着性向上 / 配線の低抵抗化 / 技術ノード35nm / エレクトロマイグレーション / ナノスクラッチ試験 / 標準偏差 / 平均結晶粒径 / 硫酸銅純度 / Cu配線形成 / LSI用Cu配線 / 耐エレクトロマイグレーション性 / 密着性 / 分子動力学法 / めっき材料 / 酸素濃度 / 高純度プロセス / 均一・大粒径 / 高純度めっき材 / 模擬デバイス / 低ひずみ / TSV / 低歪 / 化合物 / 3次元実装 / 不純物 / Cuめっき / 低抗率 / ３次元実装 / Cu-TSV / 配線評価用TEG / パルスめっき技術 / 添加剤フリーめつき技術 / 超高純度めっき材料 / ULSI / 微細構造 / 微量不純物 / Cuの高純度化 / 分子動力学シミュレーション / 革新的高導電性 / 超高純度めっき材 / 添加剤フリー / Cu 配線 / 収差補正STEM / クレヴァス / Ru膜 / 添加剤フリーめっき / 収差補正TEM / 粒界不純物 / 超高純度硫酸銅 / 情報材料 / 電子 … More Except Principal Investigator zinc vaporization / oxygen plasma / orientation control / momentum control / stoichiometry control / ponderomotive force / transparent conductive film / plasma processing / 亜鉛蒸発 / 透明導電膜 / 低気圧PVD / 酸素プラズマ / 配向性制御 / 運動量制御 / 組成比制御 / 動重力(時間平均マックスウェル応力) / ECR低温プラズマ / 酸化物材料プラズマ合成 / ヒートサイクル試験 / Al-Cu合金 / ワイヤボンデイング / 硬さ / 組織観察 / 接合 / 時効処理 / 析出 / θ相 / アルミ銅合金ワイヤ / 垂直記録 / テラビット級ハードディスク / CoPt膜 / サーボ信号 / 磁気転写 / ハードディスク / 記憶・記録 Less

Low strain and high aspect ratio Cu-TSVsPrincipal Investigator
- Principal Investigator
  
  Onuki Jin
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/Microstructural control engineering
- Research Institution
  Ibaraki University
Development of high-temperature operation power semiconductor for the aluminum copper alloy wire bonding
- Principal Investigator
  
  TASHIRO SUGURU
- Project Period (FY)
  2012 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Material processing/treatments
- Research Institution
  Ibaraki University
Development of novel magnetic printing technology for servo signal writing on hard disks over 1 Tbit/square inch
- Principal Investigator
  
  SUGITA Ryuji
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Ibaraki University
Nano-structure Control of Cu Interconnects by a Very High Purity Plating Processes and Its Application to Next-generation LSIs.Principal Investigator
- Principal Investigator
  
  ONUKI Jin (OONUKI Jin)
- Project Period (FY)
  2008 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Structural/Functional materials
- Research Institution
  Ibaraki University
Development of Cu Interconnects for 20nm Technology Node LSIPrincipal Investigator
- Principal Investigator
  
  ONUKI Jin
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Structural/Functional materials
- Research Institution
  Ibaraki University
Development of plasma synthesis technology for advanced complex compound materials based on mass-selective momentum control
- Principal Investigator
  
  SATO Naoyuki
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  Ibaraki University

All 2016 2015 2013 2012 2011 2010 2009 2008 2007 2006 2005 2004 Other

All Journal Article Presentation Patent

[Journal Article] Grain Size Distribution at the Bottom Region in Very Narrow Cu Interconnects2016
- Author(s)
  Takashi Inami, Kunihiro Tamahashi, Takashi Namekawa,Akio Chiba, and Jin Onuki
- Journal Title
  
  Electrochemistry
  
  Volume: 84 Pages: 151-155
- NAID
  130005131412
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25289258
[Journal Article] Pinning Effect of Fe(ClO) and Ti(ClO) Compounds on Cu Grain Growth in Very Narrow Cu Wires2015
- Author(s)
  Takatoshi Nagano, Yashushi Sasajima, Bobuhiro Ishikawa, Kunihiro Tamahashi,Kishio Hidaka,and Jin Onuki
- Journal Title
  
  ECS Electrochemistry Letters
  
  Volume: 4
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25289258
[Journal Article] Effectiveness of a periodic annealing method to coarsen Cu grains in very narrow trenches2015
- Author(s)
  Yasushi Sasajima, Tatsuya Miyamoto, Takatoshi Saitoh, Takahiro Yokoyama and Jin Onuki
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 131 Pages: 43-50
- DOI
  10.1016/j.mee.2014.10.006
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25289258
[Journal Article] Influence of Additive-Free process on the Microstructure of Very Narrow Cu Wires in the Lower Region of a Trench2013
- Author(s)
  Y.Ke,T.Namekawa,K.Tamahashi and J.Onuki
- Journal Title
  
  Influence of Additive-Free process on the Microstructure of Very Narrow Cu Wires in the Lower Region of a Trench
  
  Volume: 54 Pages: 255-259
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Electron backscatter diffraction analysis of electrodeposited nano-scale copper wires2013
- Author(s)
  Y.Ke,T.Konkova,S.Mironov,K.Tamahashi,and J.Onuki
- Journal Title
  
  Thin Solid Films
  
  Volume: 掲載確定
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Development of Grain Size Evaluating Process in Very Narrow Cu Interconnects2013
- Author(s)
  Takashi Inami,Kishio Hidaka,Shohei Terada and Jin Onuki
- Journal Title
  
  ECS Electrochemistry Letters
  
  Volume: Vol.2
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25289258
[Journal Article] Electron backscatter diffraction analysis of electrodeposited nano-scale copper wires2013
- Author(s)
  T.Nagano,Y.Sasajima,K.Tamahashi, and J.Onuki
- Journal Title
  
  Thin Solid Films
  
  Volume: (掲載確定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Structural response of nano-scale damascene copper lines to annealing2013
- Author(s)
  T.Konkova,Y.Ke,S.Mironov,and J.Onuki
- Journal Title
  
  Electrochemistry
  
  Volume: (掲載確定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] EBSD analysis of microstructures along the depth direction in very narrow Cu wires2013
- Author(s)
  Y.Ke, T.Namekawa,K.Tamahaashi, and J.Onuki
- Journal Title
  
  Electrochemistry
  
  Volume: 81 Pages: 246-250
- NAID
  10031139478
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Cs-corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu interconnect2013
- Author(s)
  T.Nagano,Y.Sasajima,K.Tamahashi, and J.Onuki
- Journal Title
  
  ECS Electrochemistry Letters
  
  Volume: 掲載確定
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Resistivity Reduction in Very Narrow Cu Wiring2013
- Author(s)
  Jin Onuki,Yasushi Sasajima,Kunihiro Tamahashi,Ke-YiQing,S.Terada,K.Hidaka and S.Itoh
- Journal Title
  
  J.Electrochem.Soc.
  
  Volume: Vol.160
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25289258
[Journal Article] Influence of Additive-Free process on the Microstructure of Very Narrow Cu Wires in the Lower Region of a Trench2013
- Author(s)
  Y.Ke,T.Namekawa,K.Tamahashi and J.Onuki
- Journal Title
  
  Influence of Additive-Free process on the Microstructure of Very Narrow Cu Wires in the Lower Region of a Trench
  
  Volume: 54巻 Pages: 255-259
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Searching for barrier materials for Cu wire in LSI2013
- Author(s)
  Yasushi Sasajima, Takatoshi Nagano, and Jin Onuki
- Journal Title
  
  ECS Journal of Solid State Science and Technology
  
  Volume: Vol.2 Pages: 351-356
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25289258
[Journal Article] EBSD analysis of microstructures along the depth direction in very narrow Cu wires2013
- Author(s)
  Y.Ke, T.Namekawa, K.Tamahaashi, and J.Onuki
- Journal Title
  
  Electrochemistry
  
  Volume: 81巻 Pages: 246-250
- NAID
  10031139478
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Cs-corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu interconnect2013
- Author(s)
  Y.Ke,T.Konkova,S.Mironov,K.Tamahashi,and J.Onuki
- Journal Title
  
  ECS Electrochemistry Letters
  
  Volume: (掲載確定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Effect of annealing temperature on a structure of electrodeposited nano-scale copper wires2012
- Author(s)
  Y.Ke,T.Konkova,M.Sergey, J.Onuki
- Journal Title
  
  Letters on Materials
  
  Volume: 2巻 Pages: 198-201
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Void Generation Mechanism in Cu Filling Process by Electroplating for Ultra-Fine Trenches2012
- Author(s)
  Y. Sasajima, T. Satoh,K. Tamahashi and J.Onuki
- Journal Title
  
  Mater. Trans.
  
  Volume: 53 Pages: 1507-1514
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Effect of annealing temperature on a structure of electrodeposited nano-scale copper wires2012
- Author(s)
  Y.Ke,T.Konkova,M.Sergey,and J.Onuki
- Journal Title
  
  Letters on Materials
  
  Volume: 2 Pages: 198-201
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Void Generation Mechanism in Cu Filling Process by Electroplating for Ultra-Fine Trenches2012
- Author(s)
  Y.Sasajima, T.Satoh,K. Tamahashi and J.Onuki
- Journal Title
  
  Mater. Trans
  
  Volume: 53巻 Pages: 1507-1514
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Development of a Nondestructive Method Utilizing X-ray Diffraction for the Evaluation of Grain Size Distributions of Cu Interconnects2011
- Author(s)
  T.Inami, J.Onuki, M.Isshiki
- Journal Title
  
  Electrochemical and Solid-State Letters
  
  Volume: 14
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] 高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011
- Author(s)
  田代優, 打越雅仁, 三村耕司, 一色実, 大貫仁
- Journal Title
  
  本金属学会誌 75掲載決定
- NAID
  10029368773
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Substrate temperature dependence of electrical and structural properties of Ru films2011
- Author(s)
  Takatoshi Nagano, Kazuya Inokuchi, Kunihiro Tamahashi, Nobuhiro Ishikawa, Yasushi Sasajima, Jin Onuki
- Journal Title
  
  Thin Solid Films
  
  Volume: 520 Issue: 1 Pages: 374-379
- DOI
  10.1016/j.tsf.2011.07.046
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] 高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011
- Author(s)
  田代優, 門田裕行, 伊藤雅彦, 打越雅仁, 三村耕司, 一色実, 大貫仁
- Journal Title
  
  日本金属学会誌
  
  Volume: 75(掲載決定)
- NAID
  10029368773
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] 微細Cu配線の微細構造と抵抗率に及ぼす硫酸銅純度の影響2011
- Author(s)
  田代優, 大貫仁
- Journal Title
  
  日本金属学会誌 5
  
  Pages: 223-228
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] 超微細Cu配線の微細構造と抵抗率に及ぼす硫酸銅純度の影響2011
- Author(s)
  田代優、K, P.Khoo、大貫仁
- Journal Title
  
  日本金属学会誌
  
  Volume: 75 Pages: 223-228
- NAID
  10028175938
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Texture and Grain Size Investigation in the Copper Plated Through-Siliconvia for Three Dimensional Chip Stacking Using Electron Backscattering Diffraction2011
- Author(s)
  H.Kadota, R.Kanno, M.Itou, J.Onuki
- Journal Title
  
  Electrochemical and Solid-State Letters
  
  Volume: 14
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Development of a Nondestructive Method Utilizing X-ray Diffraction for the Evaluation of Grain Size Distributions of Cu Interconnects2011
- Author(s)
  T.Inami, J.Onuki, M.Isshiki
- Journal Title
  
  Electrochemical and Solid-State Letters 14
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Effect of Additive-Free Plating and High Heating Rate Annealing on the Formation of Low Resistivity Fine Cu Wires2011
- Author(s)
  Jin onuki, Kunihiro Tamahashi, Takashi Namekawa, Yasushi Sasajima
- Journal Title
  
  Materials Trans.
  
  Volume: 52 Pages: 1818-1823
- NAID
  10029530409
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Effect of Additive-Free Plating and High Heating Rate Annealing on the Formation of Low Resistivity Fine Cu Wires2011
- Author(s)
  J.Onuki, K.Tamahashi, T.Namekawa, Y.Sasajima
- Journal Title
  
  Materials Trans.
  
  Volume: 52巻 Pages: 1818-1823
- NAID
  10029530409
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] 高流速めっき法による短時間Cu貫通電極形成および電極の微細組織2011
- Author(s)
  門田裕行、菅野龍一、伊藤雅彦、大貫仁
- Journal Title
  
  エレクトロニクス実装学会誌
  
  Volume: 14 Pages: 513-518
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Effect of Impurities on the Grain Growth of Polycrystalline Cu Thin Films2011
- Author(s)
  Yasushi Sasajima, Takeshiro Nagai, Jin Onuki
- Journal Title
  
  Electrochemistry
  
  Volume: 79 Pages: 869-875
- NAID
  10029657068
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Impact of High Heating Rate, Low Temperature and Short Time Annealing on the Realization of Low Resistivity Cu Wire2010
- Author(s)
  J.Onuki, K.Tamahashi, T.Namekawa, Y.Sasajima
- Journal Title
  
  Materials Transaction 51
  
  Pages: 1715-1717
- NAID
  10026600440
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Grain coarsening mechanism of Cu thin films by rapid annealing2010
- Author(s)
  Y.Sasajima, J.Kageyama, K.P.Khoo, J Onuki
- Journal Title
  
  Thin Solid Films
  
  Volume: 518 Pages: 6883-6890
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Impact of High Heating Rate, Low Temperature and Short Time Annealing on the Realization of Low Resistivity Cu Wire2010
- Author(s)
  J.Onuki, K.Tamahashi, T.Namekawa, Y.Sasa jima
- Journal Title
  
  Materials Transaction
  
  Volume: 51 Pages: 1715-1717
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Effect of the Purity of Plating Materials on the Reduction of Resitivity of Cu Wires for Future LSIs2010
- Author(s)
  J.Onuki, S.Tashiro, K.P.Khoo, N.Ishikawa, Y.Chonan, T.Kimura, H.Akahoshi
- Journal Title
  
  J.Electrochem.Soc 157
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Reduction in resistivity of 50nm wide Cu wire by high heating rate and short time annealing utilizing misorientation energy2010
- Author(s)
  J.Onuki, K.P.Khoo, Y.Sasajima, Y.Chonan, T.Kimura
- Journal Title
  
  J.Appl.Phys. 108
  
  Pages: 0443021-7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Reduction in resistivity of 50nm wide Cu wire by high heating rate and short time annealing utilizing misorientation energy2010
- Author(s)
  J.Onuki, K.P.Khoo, Y.Sasajima, Y.Chonan, T.Kimura
- Journal Title
  
  J.Appl.Phys.
  
  Volume: 108巻 Pages: 0443021-0443027
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Effect of the Purity of Plating Materials on the Reduction of Resitivity of Cu Wires for Future LSIs2010
- Author(s)
  J.Onuki, S.Tashiro, K.P.Khoo, N.Ishikawa, Y.Chonan, T.Kimura, H.Akahoshi
- Journal Title
  
  J.Electrochem.Soc.
  
  Volume: 157
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Effect of the Purity of Plating Materials on the Reduction of Resistivity of Cu Wires for Future LSIs2010
- Author(s)
  J.Onuki, S.Tashiro, K. P. Khoo, N. Ishikawa, Y.Chonan, T.Kimura, H. Akahoshi
- Journal Title
  
  J.Electrochem.Soc.
  
  Volume: 157巻
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Texture investigation in the trench depth direction of very narrow copper wires less than 100nm wide using electron backscatter diffraction2010
- Author(s)
  K.P.Khoo, J.Onuki
- Journal Title
  
  Thin Solid Films 518
  
  Pages: 3413-3416
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Reduction in resistivity of 50nm wide Cu wire by high heating rate andshort time annealing utilizing misorientation energy2010
- Author(s)
  J.Onuki, K.P.Khoo, Y.SasajimaY.Chonan, T.Kimura
- Journal Title
  
  J.Appl.Phys.
  
  Volume: 108 Pages: 0443021-0443027
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Texture investigation in the trench depth direction of very narrow copper wires less than 100nm wide using electron backscatter diffraction2010
- Author(s)
  K.P.Khoo, 大貫仁
- Journal Title
  
  Thin Solid Films 518
  
  Pages: 3413-3416
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Molecular dynamic simulation of grain growth of Cu film2010
- Author(s)
  Takatoshi Kato, Takeshiro Nagai, Yasushi Sasajima, 大貫仁
- Journal Title
  
  Material Transaction 51
  
  Pages: 664-669
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Grain coarsening mechanism of Cuthin films by rapid annealing2010
- Author(s)
  Y.Sasajima, J.Kageyama, K.P.Khoo, J Onuki
- Journal Title
  
  Thin Solid Films 518
  
  Pages: 6883-6890
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Purification of CuC12 by anion-exchange separation using multi-column method2010
- Author(s)
  M.Uchikoshi, Y.Yamada, Y.Baba, J.Onuki, K.Mimura, M.Isshiki
- Journal Title
  
  High Temperature Materials and Processes
  
  Volume: 29 Pages: 469-481
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] MD Simulation of Void Generation during Annealing Process of Copper Wiring2009
- Author(s)
  Takeshiro Nagai, Yasushi Sasajima, 大貫仁
- Journal Title
  
  Materials Transactions 50
  
  Pages: 2373-2377
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] 質量選択的運動量制御に向けた亜鉛・酸素混合プラズマ中の透明導電膜合成2008
- Author(s)
  佐藤直幸・小松良寛・池畑隆・山内智・大貫仁
- Journal Title
  
  電気学会プラズマ研究会資料 PST-08-13
  
  Pages: 33-38
- NAID
  10025666551
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] 質量選択的運動量制御に向けたECR各種混合プラズマ中の動重力効果の観察2008
- Author(s)
  佐藤直幸・薮内祐二・菅谷聡一・池畑隆・山内智・大貫仁
- Journal Title
  
  第25回「プラズマプロセシング研究会」SPP-25プロシーディングス P1-27
  
  Pages: 161-162
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] MD Simulation of Defect Generation During Annealing Process of Copper wiring2008
- Author(s)
  T., Akabane・Y., sasajima・J., Onuki
- Journal Title
  
  Trans.Mater.Research Soc. Of Japan 33(印刷中)
- NAID
  130007809432
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Phase Field Simulation of Heat Treatment Process of Cu Wiring2008
- Author(s)
  J. Kageyama, Y. Sasajima and J. Onuki
- Journal Title
  
  Trans. Mater. Research Soc. Of Japan Vol.33(in printing)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] The investigation of the ponderomotive force effect in ECR gas mixture plasma for mass-selective momentum control2008
- Author(s)
  Naoyuki Sato, Yuji Yabuuchi, Souichi Sugaya, Takashi Ikehata, Satoshi Yamauchi and Jin Oonuki
- Journal Title
  
  The 25th Symposium on Plasma Processing P1-27
  
  Pages: 161-162
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Cu超微細配線構造の安定性に及ぼす結晶方位の影響2008
- Author(s)
  永井傑朗、赤羽智明、篠嶋妥、大貫仁
- Journal Title
  
  日本金属学会誌 72
  
  Pages: 698-702
- NAID
  10024273191
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] The synthesis of transparent conductive film in the zinc-oxygen mixture plasma for mass-selective momentum control2008
- Author(s)
  Naoyuki Sato, Yoshihiro Komatsu, Takashi Ikehata, Satoshi Yamauchi, and Jin Oonuki
- Journal Title
  
  The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology, IEE Japan PST-08-13
  
  Pages: 33-38
- NAID
  10025666551
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Phase Field Simulation of Heat Treatment Process of Cu Wiring2008
- Author(s)
  J., Kageyama・Y., Sasajima・J., Onuki
- Journal Title
  
  Trans. Mater.Research Soc. Of Japan 33(印刷中)
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Phase field simulation of heat treatment process of Cu ultra fine wire2008
- Author(s)
  .unpei Kageyama, Yasushi Sasajima, Minoru Ichimura and Jin Onuki
- Journal Title
  
  Trans. Material Research Society of Japan (2008) Vol.33(印刷中)
- NAID
  130007809456
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] MD Simulation of Defect Generation during Annealing Process of Copper Wiring2008
- Author(s)
  Tomoaki Akabane, Yasushi Sasajima and Jin Onuki
- Journal Title
  
  Trans. Material Research Society of Japan (2008) Vol.33(印刷中)
- NAID
  130007809432
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] MD Simulation of Defect Generation During Annealing Process of Copper Wiring2008
- Author(s)
  T. Akabane, Y. Sasajima and J. Onuki
- Journal Title
  
  Trans. Mater. Research Soc. of Japan Vol.33(in printing)
- NAID
  130007809432
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Coatings Adhesion Evaluation by Nanoscaratching Simulation Using the Molecular Dynamic Method2007
- Author(s)
  T. Akabane. Y. Sasajima and J. Onuki
- Journal Title
  
  Jpn. J. Appl. Phys. Vol.46
  
  Pages: 3024-3028
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Cu配線の現状と将来2007
- Author(s)
  大貫仁、田代優、K. P. Khoo
- Journal Title
  
  金属 77
  
  Pages: 5-9
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Special Issue on Cu Metallization, Current Status and Future Prospect of Cu Interconnects2007
- Author(s)
  J. Onuki, S. Tashiro and K. P. Khoo
- Journal Title
  
  Kinzoku Vol.77
  
  Pages: 837-841
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Nanoscratching of Metallic ThinFilm on Silicon Substrate : A Molecular Dynamic Study2007
- Author(s)
  K. Akabane, Y. Sasajima and J. Onuki
- Journal Title
  
  J. of Electronic Materials Vol.36
  
  Pages: 1174-1180
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] The investigation of the ponderomotive force's enhancement accompanying with the extraction of lower energy lectrons from ECR oxygen plasma for mass-selective momentum control2007
- Author(s)
  Yuji yabuuchi, Souichi Sugaya, Naoyuki Sato, Takashi Ikehata, Satoshi Yamauchi, and Jin Oonuki
- Journal Title
  
  The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan PST-07-29
  
  Pages: 29-34
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Aspect Ratio Dependence of the Resistivity of Fine Line Cu lnterconnects2007
- Author(s)
  K.P., Khoo・J., Onuki・T., Nagano・Y., Chonan
- Journal Title
  
  Jpn.J.Appl.Phys. 46
  
  Pages: 4070-4073
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Coatings Adhesion Evaluation by Nanoscratching Simulation Using the Molecular Dynamic Method2007
- Author(s)
  T., Akabane・Y., Sasajima・J., Onuki
- Journal Title
  
  Jpn. J. Appl. Phys. 46
  
  Pages: 3024-3028
- NAID
  40015357721
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] 質量選択的運動量制御に向けたECR酸素プラズマの低温部引き出しと動重力増強の観察2007
- Author(s)
  藪内祐二・菅谷聡一・佐藤直幸・池畑隆・山内智・大貫仁
- Journal Title
  
  電気学会プラズマ研究会資料 PST-07-29
  
  Pages: 29-34
- NAID
  10019514039
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Nanoscratching of Metallic Thin Film on Silicon Substrate2007
- Author(s)
  K., Akabane・Y., Sasajima・J., Onuki
- Journal Title
  
  J. of Electronic Materials 36
  
  Pages: 1174-1180
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Microstructure of 50nm Cu lnterconnects along the Longitudinal Direction2007
- Author(s)
  K.P., Khoo・J., Onuki・T., Nagano・S., Tashiro・Y., Chonan・H., Akahoshi・T., Haba・T., Tobita・M., Chiba・K., lshikawa
- Journal Title
  
  Material.Trans. 48
  
  Pages: 2703-2707
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Determination of the Phase-Field Parameters for Computer Simulation of Heat Treatment Process of Ultra Thin Al Film2007
- Author(s)
  J.Kageyamal, Y.Sasajima, M.Ichimura, J.Onuki
- Journal Title
  
  Materials Transactions Vol.48 No.8(Accepted for publication)
- NAID
  10019516987
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Special Issue on Cu Metallization, Summary2007
- Author(s)
  J. Onuki
- Journal Title
  
  Kinzoku Vol.77
  
  Pages: 835-836
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Determination of the Phase-Field Parameters for Computer Simulation of Heat Treatment Process of Ultra Thin Al Film2007
- Author(s)
  J. Kageyama, Y. Sasajima, M. Ichimura and J. Onuki
- Journal Title
  
  Mater. Trans. Vol.48
  
  Pages: 1998-2001
- NAID
  10019516987
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] The Development of an Innovative Process of Large Grained and Low Resistivity Cu Wires less than hp45nm ULSI2007
- Author(s)
  S.Tashiro, K.P.Khoo, T.Nagano, J.Onuki
- Journal Title
  
  In Proc.IITC(International Interconnect Technology Conference) June (Accepted for Presentation)
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Determination of the Phase-Field Parameters for Computer Simulation of Heat Treatment Process of Ultra Thin Al Film2007
- Author(s)
  J., Kageyama・Y., Sasajima・M., lchimura・J., Onuki
- Journal Title
  
  Mater.Trans. 48
  
  Pages: 1998-2001
- NAID
  10019516987
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Microstructure of 50nm Cu Interconnects along the Longitudinal Direction2007
- Author(s)
  K. P. Khoo, J. Onuki, T. Nagano, S. Tashiro, Y. Chonan, H. Akahoshi, T. Haba, T. Tobita, M. Chiba and K. Ishikawa
- Journal Title
  
  Mater. Trans. Vol.48
  
  Pages: 2703-2707
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Aspect Ratio Dependence of the Resistivity of Fine Line Cu Interconnects2007
- Author(s)
  K. P. Khoo, J. Onuki, T. Nagano and Y. Chonan
- Journal Title
  
  Jpn. J. Appl. Phys. Vol.46
  
  Pages: 4070-4073
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] これだけは知っておきたい最新の配線・実装技術、Cu配線の現状と将来2007
- Author(s)
  大貫仁・田代優・K.P., Khoo
- Journal Title
  
  金属 77
  
  Pages: 837-841
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Coatings Adhesion Evaluation by Nanoscratching Simulation Using the Molecular Dynamics Method2007
- Author(s)
  T.Akabane, Y.Sasajima, J.Onuki
- Journal Title
  
  Jpn.J.Applied Physics Vol.46 No.5A(Accepted for publication)
- NAID
  40015357721
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] これだけは知っておきたい最新の配線・実装技術、特集にあたって2007
- Author(s)
  大貫仁
- Journal Title
  
  金属 77
  
  Pages: 835-836
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] The flux measurement of ions incident upon the substrate in ECR oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006
- Author(s)
  Naoyuki, Sato・Kousuki, Kinoshita・Takashi, Ikehata・Satoshi, Yamauchi・Jin, Oonuki
- Journal Title
  
  8th Asia-Paeific Conference on Plasma Science and Teehnelogy and 19th Symposium on Plasma Science for Materials, Cairns in Australia http://wwwrsphysse.anu.edu.au/~mdl112/apcpst/Abst
  
  Pages: 257-257
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006
- Author(s)
  N. Y. Sato, K. Kinoshita, Y. Nakano, T. Lkehata, S. Yamauchi and J. Oonuki
- Journal Title
  
  Proceeding of the 6th International Conference on Reactive Plasmas and 23nd Symposium on Plasma Processing AP061201・P-1A-06
  
  Pages: 171-172
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Observation of Microstructure in the Longitudinal Direction of Very narrow Cu linterconnects2006
- Author(s)
  K.P., Khoo・J., Onuki・T., Nagano・Y., Chonan・H., Akahoshi・T., Tobita・M., Chiba・T., Saitou・K., lshikawa
- Journal Title
  
  Jpn.J.Appl.Phys. 45
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006
- Author(s)
  N.Y, Sato・K, Kinoshita・Y, Nakano・T, Ikehata・S, Yamauchi・J, Oonuki
- Journal Title
  
  Proceeding of the 6^<th> International Conference on Reactive Plasmas and 23^<rd> Symposium on Plasma Processing AP061201・P-1A-06
  
  Pages: 171-172
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Computer Simulation of Silicon Nanoscratch Test2006
- Author(s)
  T. Akabane, Y. Sasajima and J. Onuki
- Journal Title
  
  Mater. Trans. Vol.47
  
  Pages: 1090-1097
- NAID
  10017412640
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006
- Author(s)
  Y.Sato, K.Kinoshita, Y.Nakano, T.Ikehata, S.Yamauchi, J.Oonuki
- Journal Title
  
  Proceeding of the 6th International Conference on Reactive plasmas and 23rd Symposium on Plasma Processing APO61201・P-1A-06
  
  Pages: 171-172
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Computer Simulation of Silicon Manoscratch Test2006
- Author(s)
  T., Akabane・Y., Sasajima・J., Onuki
- Journal Title
  
  Mater. Trans. 47
  
  Pages: 1090-1097
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Filling a narrow and High Aspect-Ratio Trench with Electro-Cu Plating2006
- Author(s)
  Y., Chonan・J., Onuki・T., Nagano・H., Akahoshi・T., ltabashi・T., Saitou・K.P., Khoo
- Journal Title
  
  Mater. Trans. 47
  
  Pages: 1417-1419
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Controlling the Resistivity of Fine Line Cu Interconnects2006
- Author(s)
  K.P.Khoo, J.Onuki, T.Nagano, Y.Chonan et al.
- Journal Title
  
  Proc. of ADMETA(advanced Metallilzation Coference) 2006
  
  Pages: 58-59
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Observation of Microstructures in the Longitudinal Direction of Very narrow Cu Interconnects2006
- Author(s)
  K. P. Khoo, J. Onuki, T. Nagano, Y. Chonan, H. Akahoshi, T. Tobita M. Chiba, T. Saitou and K. Ishikawa
- Journal Title
  
  Jpn. J. Appl. Phys. Vol.45
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] 質量選択的運動量制御による複合化合物材料のプラズマ合成に向けた低気圧低温プラズマの生成2006
- Author(s)
  佐藤直幸, 木下廣介, 池畑隆, 山内智, 大貫仁
- Journal Title
  
  第54回応用物理学関係連合講演会講演予稿集 1・29(P-C-8)
  
  Pages: 185-185
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Filling 80nm-ide and High-Aspect-Ratio-Trench with Pulse Wave Copper Electroplating and Observation of Microstructure2006
- Author(s)
  Y., Chonan・J., Onuki・T., Nagano・K.P., Khoo・T., Aoyama・H., Akahoshi・T., Haba・T., Saitou
- Journal Title
  
  Jpn.J.Appl.Phys. 45
  
  Pages: 8604-8607
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Filling 80nm-ide and High-Aspect-Ratio-Trench with Pulse Wave Copper Electroplating and Observation of Microstructure2006
- Author(s)
  Y. Chonan, J. Onuki, T. Nagano, K. P. Khoo, T. Aoyama, H. Akahoshi, T. Haba and T. Saitou
- Journal Title
  
  Jpn. J. Appl. Phys. Vol.45
  
  Pages: 8604-8607
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Computer Simulation of Si Nano-scratch Test2006
- Author(s)
  篠嶋妥, 大貫仁
- Journal Title
  
  Material Transaction Vol.47, No.4
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] The flux measurement of ions incident upon on the substrate in ECR oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006
- Author(s)
  Naoyuki Sato, Kousuke Kinoshita, Takashi Ikehata, Satoshi Yamauchi,and Jin Oonuki
- Journal Title
  
  8th Asia-Pacific Conference on Plasma Science and Technology and 19th Symposium on Plasma Science for Materials, Cairnsin Australia http://wwwrshsse.anu.edu.au/~mdl112/apcpst/AbstractBook.pdf
  
  Pages: 257-257
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Filling a narrow and High Aspect-Ratio Trench with Electro-Cu Plating2006
- Author(s)
  Y. Chonan, J. Onuki, T. Nagano, H. Akahoshi, T. Itabashi, T. Saitou and K. P. Khoo
- Journal Title
  
  Mater. Trans. Vol.47
  
  Pages: 1417-1419
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] The flux measurement of ion incident upon on the substrate in ECR oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006
- Author(s)
  Naoyuki Sato, Kousuke Kinoshita, Takashi Ikehata, Satoshi Yamauchi, Jin Oonuki
- Journal Title
  
  8th Asia-Pacific Conference on Plasma Science and Technology and 19th Symposium on Plasma Science for Materials, Cairns in Australia (AbstractBook.pdf)
  
  Pages: 257-257
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] The flux suppression of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005
- Author(s)
  N. Y. Sato, K. Kinoshita, Y. Nakano, T. Ikehata, S. Yamauchi and J. Oonuki
- Journal Title
  
  THE 18th SYMPOSIUM ON PLASMA SCIENCE FOR MATERIALS ISSN 1342-7210
  
  Pages: 54-54
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] 質量選択的運動量制御による酸化物薄膜の合成に向けた磁場中酸素プラズマの電圧-電流特性2005
- Author(s)
  中野恭嗣, 佐藤直幸, 池畑隆, 山内智, 大貫仁
- Journal Title
  
  第65回応用物理学会学術講演会講演予稿集 No.2・29a-E-1
  
  Pages: 1027-1027
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Production of zinc-oxide mixture plasma for ZnO film synthesis based on mass-selective momentum control2005
- Author(s)
  Naoyuki, Sato・Satoshi, Yamauchi・Takashi, Ikehata・Yasushi, Nakano・Jin, Oonuki
- Journal Title
  
  プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-071
  
  Pages: 615-616
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Characteristics of the magnetized rf oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005
- Author(s)
  Yasushi Nakano, Naoyuki Sato, Takashi Ikehata, Satoshi Yamauchi, Jin Oonuki
- Journal Title
  
  プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-072
  
  Pages: 617-618
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Production of zinc-oxide mixture plasma for ZnO film synthesis based on mass-selective momentum control2005
- Author(s)
  Naoyuki Sato, Satoshi Yamauchi, Takashi Ikehata, Yasushi Nakano, Jin Oonuki
- Journal Title
  
  プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-071
  
  Pages: 615-616
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] The flux measurement of ions incident upon the substrate in zinc oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005
- Author(s)
  K.Kinoshita, N.Y.Sato, Y.Nakano, T.Ikehata, S.Yamauchi, J.Oonuki
- Journal Title
  
  第18回プラズマ材料科学シンポジウム ISSN1342-7210
  
  Pages: 55-55
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] 質量選択的運動量制御・磁場中酸素プラズマを用いた酸化物薄膜の合成(シンポジウム招待講演30分)2005
- Author(s)
  佐藤直幸, 中野恭嗣, 木下廣介, 池畑隆, 山内智, 大貫仁
- Journal Title
  
  第66回応用物理学会学術講演会講演予稿集 NO.0・8p-N-5
  
  Pages: 33-33
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] 質量選択的運動量制御によるZnO薄膜の合成に向けた磁場中酸素プラズマへの亜鉛蒸気導入2005
- Author(s)
  佐藤直幸, 中野恭嗣, 池畑隆, 山内智, 大貫仁
- Journal Title
  
  第65回応用物理学会学術講演会講演予稿集 No.2・30a-E-6
  
  Pages: 1092-1092
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Characteristics of the magnetized rf oxygen plasma for ZnO film synthesis besed on mass-selective momentum control2005
- Author(s)
  Yasushi Nakano, Naoyuki Sato, Takashi Ikehata, Satoshi Yamauchi and Jin Oonuki
- Journal Title
  
  Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing P3-072
  
  Pages: 617-618
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] The flux suppression of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005
- Author(s)
  K. Kinoshita, N. Y. Sato, Y. Nakano, T. Ikehata, S. Yamauchi and J. Oonuki
- Journal Title
  
  THE 18th SYMPOSIUM ON PLASMA SCIENCE FOR MATERIALS ISSN 1342-7210
  
  Pages: 55-55
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] The flux suppression of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentrm control2005
- Author(s)
  N.Y, Sato・K, Kinoshita・Y, Nakano・T, Ikehata・S, Yamauchi・J, Oonuki
- Journal Title
  
  第18回プラズマ材料科学シンポジウム ISSN1342-7210
  
  Pages: 54-54
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Characteristics of the magnetized rf oxygen plasma for ZnO film synthesis based on mass-selective momentrm control2005
- Author(s)
  Yasushi, Nakano・Naoyuki, Sato・Takashi, Ikehata・Satoshi, Yamauchi・Jin Oonuki
- Journal Title
  
  プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-072
  
  Pages: 617-618
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] The flux suppression of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005
- Author(s)
  N Y.Sato, K.Kinoshita, Y.Nakano, T.Ikehata, S.Yamauchi, J.Oonuki
- Journal Title
  
  第18回プラズマ材料科学シンポジウム ISSN1342-7210
  
  Pages: 54-54
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Plasma synthesis of zinc-oxide thin film based on mass-selective momentum control2005
- Author(s)
  Naoyuki Sato, Satoshi Yamauchi, Takashi Ikehata, Yasushi Nakano, Jin Oonuki
- Journal Title
  
  プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-070
  
  Pages: 613-614
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Plasma synthesis of zinc-oxide thin film based on mass-selective momentum control2005
- Author(s)
  Naoyuki Sato, Satoshi Yamauchi, Takashi Ikehata, Yasushi Nakano, and Jin Oonuki
- Journal Title
  
  Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing 3-070
  
  Pages: 613-614
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Plasma synthesis of zinc-oxide thin film based on mass-selective momentum control2005
- Author(s)
  Haoyuki, Sato・Satoshi, Yamauchi・Takashi, Ikehata・Yasushi, Nakano・Jin, Oonuki
- Journal Title
  
  プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-070
  
  Pages: 613-614
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] The flux measurement of ions incident upon the substrate in zinc oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005
- Author(s)
  K, Kinoshita・N.Y, Sato・Y, Nakano・T, Ikehata・S, Yamauchi・J, Oonuki
- Journal Title
  
  第18回プラズマ材料科学シンポジウム ISSN1342-7210
  
  Pages: 55-55
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Production of zinc-oxide mixture plasma for ZnO film synthesis based on mass-selective momentum control2005
- Author(s)
  Naoyuki Sato, Satoshi Yamauchi, Takashi Ikehata, Yasushi Nakano, and Jin Oonuki
- Journal Title
  
  Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing P3-071
  
  Pages: 615-616
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] 動重力効果を利用したイオンの選択的運動量制御によるZnO薄膜合成の実験準備2004
- Author(s)
  佐藤直幸・中野恭嗣・池畑隆・山内智・大貫仁
- Journal Title
  
  電気学会プラズマ研究会資料 PST-04-28
  
  Pages: 91-96
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] 複合化合物材料の合成に向けた選択的運動量制御型プラズマ成膜技術の開発2004
- Author(s)
  佐藤直幸, 中野恭嗣, 池畑隆, 山内智, 大貫仁
- Journal Title
  
  第65回応用物理学会学術講演会講演予稿集 No.1 1a-ZB-8
  
  Pages: 365-365
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] The preliminary experiment of the ZnO thin film synthesis by mass-selective momentum control based on the ponderomotive force on the magnetizedions2004
- Author(s)
  Naoyuki Sato, Yasushi Nakano, Takashi Ikehata, Satoshi Yamauchi, Jin Oonuki
- Journal Title
  
  The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan PST-04-28
  
  Pages: 91-96
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] 動重力効果を利用したイオンの選択的運動量制御によるZnO薄膜合成の実験準備2004
- Author(s)
  佐藤直幸, 中野恭嗣, 池畑隆, 山内智, 大貫仁
- Journal Title
  
  電気学会プラズマ研究会資料 PST-04-28
  
  Pages: 91-96
- Data Source
  KAKENHI-PROJECT-16360356
[Journal Article] Influence of grain size distributions on the resistivity of 80 nm wide u interconnects
- Author(s)
  K.P.Khoo, J.Onuki, T.Nagano, Y.Chonan, H.Akahoshi, T.Tobita, M.Chiba, T.Saito, K.Ishikawa
- Journal Title
  
  Jpn.J.Appl.Phys.Letter (掲載決定)
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Influence on the Electro-migration Resistance by Line Width and Average Grain Size along the Longitudinal Direction of Very Narrow Cu Wires
- Author(s)
  K.P.Khoo, Suguru Tashiro, 大貫仁
- Journal Title
  
  Material Transactions (印刷中)
- NAID
  10027018498
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] 三次元実装用貫通電極の高速めっき技術
- Author(s)
  門田裕行、菅野龍一、伊藤雅彦、大貫仁
- Journal Title
  
  エレクトロニクス実装学会誌 (印刷中)
- NAID
  10026477725
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Observation of microstructures in the longitudinal direction of very arrow Cu interconnects
- Author(s)
  K.P.Khoo, J.Onuki, T.Nagano, Y.Chona n, H.Akahoshi, T.Tobita, M.Chiba, T.Saito, K.Ishikawa
- Journal Title
  
  Jpn.J.Appl.Phys.Letter (掲載決定)
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Aspect Ratio Dependence of the Resistivity of Fine Line Cu Interconnects
- Author(s)
  N.P.Khoo, J.Onuki, T.Nagano, Y.Chonan
- Journal Title
  
  Jpn. J. Appl. Phys. (Accepted for publication)
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Void Generation during the annealing process of narrow copper wires
- Author(s)
  Y. Sasajima, T. Akabane, T. Nagai, J. Onuki and Y. Chonan
- Journal Title
  
  Journal of Applied Physics (印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Filling 80nm wide and high aspect-ration trench by pulse wave electro-Cu plating and observation of microstructure
- Author(s)
  Y.Chonan, J.Onuki, T.Nagano, H.Akahoshi, K.P.Khoo, T.Aoyama, H.Akahoshi
- Journal Title
  
  Jpn.J.Appl.Phys. (掲載決定)
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Filling a Narrow and High Aspect Ration Trench with Electro-Cu Plating
- Author(s)
  Y.Chonan, J.Onuki, T.Nagano, H.Akaho shi, T.Itabashi, T.Saitou
- Journal Title
  
  Materials Transaction (掲載決定)
- Data Source
  KAKENHI-PROJECT-17206071
[Journal Article] Nanoscratching of metallic thin films on silicon substrate : a molecular dynamics study
- Author(s)
  T.Akabane, Y.Sasajima, J.Onuki
- Journal Title
  
  J.of Electronic Materials (Accepted for publication)
- Data Source
  KAKENHI-PROJECT-17206071
[Patent] Ru膜成膜装置、金属性膜装置、Ruバリアメタル層、配線構造2016
- Inventor(s)
  永野隆敏、大貫　仁、篠嶋　妥、玉橋邦裕、小沼重春
- Industrial Property Rights Holder
  永野隆敏、大貫　仁、篠嶋　妥、玉橋邦裕、小沼重春
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2016-086074
- Filing Date
  2016-04-22
- Data Source
  KAKENHI-PROJECT-25289258
[Patent] 超低抵抗率銅配線を有する半導体集積回路装置2015
- Inventor(s)
  篠嶋　妥、大貫　仁、永野隆敏
- Industrial Property Rights Holder
  篠嶋　妥、大貫　仁、永野隆敏
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-038589
- Filing Date
  2015-02-27
- Data Source
  KAKENHI-PROJECT-25289258
[Patent] 半導体集積回路装置及びその製造方法並びに該半導体集積回路装置に使用する低抵抗率銅配線の探索方法2013
- Inventor(s)
  大貫, 篠嶋, 永野, 玉橋, 千葉
- Industrial Property Rights Holder
  茨城大学
- Industrial Property Number
  2013-101708
- Filing Date
  2013-05-13
- Data Source
  KAKENHI-PROJECT-20226014
[Patent] 半導体集積回路装置及びその製造方法並びに該半導体集積回路装置に使用する低抵抗率銅配線の探索方法2013
- Inventor(s)
  大貫、篠嶋、永野、玉橋、千葉
- Industrial Property Rights Holder
  大貫、篠嶋、永野、玉橋、千葉
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2013-101708
- Filing Date
  2013-05-13
- Data Source
  KAKENHI-PROJECT-20226014
[Patent] 半導体集積回路装置用バリア材の探索方法2011
- Inventor(s)
  篠嶋妥、大貫仁、永野隆敏、玉橋邦裕
- Industrial Property Rights Holder
  国立大学法人茨城大学
- Industrial Property Number
  2011-030514
- Filing Date
  2011-02-16
- Data Source
  KAKENHI-PROJECT-20226014
[Patent] 金属層の結晶粒径及び粒径分布評価方法並びにそれを用いた半導体集積回路装置の製造方法2011
- Inventor(s)
  稲見隆、大貫仁
- Industrial Property Rights Holder
  国立大学法人茨城大学
- Industrial Property Number
  2011-022414
- Filing Date
  2011-02-04
- Data Source
  KAKENHI-PROJECT-20226014
[Patent] 半導体装置、半導体装置用基板および該基板の製造方法2011
- Inventor(s)
  門田裕行、菅野龍一、佐藤明、大貫仁
- Industrial Property Rights Holder
  日立協和エンジニア(株)、国立大学法人茨城大学
- Industrial Property Number
  2011-067619
- Filing Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-20226014
[Patent] 半導体集積回路装置用ルテニウムバリア膜とその作成方法及び該ルテニウムバリア膜を有する半導体集積回路装置とその製2011
- Inventor(s)
  永野隆敏、大貫仁、篠嶋妥、玉橋邦裕
- Industrial Property Rights Holder
  国立大学法人茨城大学
- Industrial Property Number
  2011-033019
- Filing Date
  2011-02-18
- Data Source
  KAKENHI-PROJECT-20226014
[Patent] 特許出願(発明の名称)半導体集積回路装置及びその製造方法2009
- Inventor(s)
  篠嶋妥、大貫仁、田代優、KyooKhyou Pin
- Industrial Property Rights Holder
  茨城大学
- Filing Date
  2009-12-03
- Overseas
- Data Source
  KAKENHI-PROJECT-20226014
[Patent] 半導体集積回路およびその製造方法2008
- Inventor(s)
  篠嶋、大貫、田代、K. P. Khoo
- Industrial Property Rights Holder
  茨城大
- Industrial Property Number
  2008-309890
- Filing Date
  2008-12-04
- Data Source
  KAKENHI-PROJECT-20226014
[Patent] 半導体集積回路装置及びその製造方法2008
- Inventor(s)
  篠嶋妥、大貫仁
- Industrial Property Rights Holder
  国立大学法人茨城大学
- Filing Date
  2008-12-04
- Overseas
- Data Source
  KAKENHI-PROJECT-20226014
[Patent] 半導体集積回路装置及びその製造方法2007
- Inventor(s)
  大貫仁
- Industrial Property Rights Holder
  茨城大学
- Industrial Property Number
  2007-106945
- Filing Date
  2007-04-16
- Data Source
  KAKENHI-PROJECT-17206071
[Patent] 半導体集積回路装置及びその製造方法2007
- Inventor(s)
  大貫、田代、K.P. Khoo.長野、石川、古屋
- Industrial Property Rights Holder
  茨城大学物質・材料研究機構 (株)ボンゾー
- Industrial Property Number
  2007-106945
- Filing Date
  2007-04-16
- Description
  「研究成果報告書概要(和文)」より
- Overseas
- Data Source
  KAKENHI-PROJECT-17206071
[Presentation] Investigation on Microstructure and Resistivity in Cu-TSVs for 3D Packaging2016
- Author(s)
  Akira Satoh,Hiroyuki Kadota, Takashi Inami,Kunihiro Tamahashi, Msahiko Itou,and Jin Onuki
- Organizer
  2016 International Conference on Electronics Packaging
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2016-04-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25289258
[Presentation] 第52回谷川・ハリス賞受賞記念講演環境対応高温半導体用独創的配線・実装材料の開発に関する研究2013
- Author(s)
  大貫仁
- Organizer
  日本金属学会
- Place of Presentation
  東京理科大学
- Year and Date
  2013-03-27
- Data Source
  KAKENHI-PROJECT-20226014
[Presentation] 基調講演,高純度めっきプロセスにより形成した超微細Cu配線の結晶構造と抵抗率2012
- Author(s)
  大貫仁
- Organizer
  日本金属学会
- Place of Presentation
  横浜国立大学(招待講演)
- Year and Date
  2012-03-29
- Data Source
  KAKENHI-PROJECT-20226014
[Presentation] LSI用微細Cu配線材料のナノ粒界評価技術2012
- Author(s)
  大貫仁
- Organizer
  日本金属学会
- Place of Presentation
  愛媛大学
- Year and Date
  2012-09-18
- Data Source
  KAKENHI-PROJECT-20226014
[Presentation] Invited Talk, Resistivity reduction for very narrow Cu wiring2011
- Author(s)
  大貫仁
- Organizer
  220th ECS (Electro Chemical Society) Meeting
- Place of Presentation
  Boston, USA(招待講演)
- Year and Date
  2011-10-11
- Data Source
  KAKENHI-PROJECT-20226014
[Presentation] ナノ構造制御による次世代LSI用低抵抗率Cu配線の形成2010
- Author(s)
  大貫仁
- Organizer
  日本金属学会2010秋期大会
- Place of Presentation
  北海道大学
- Year and Date
  2010-09-26
- Data Source
  KAKENHI-PROJECT-20226014
[Presentation] (講演)LSI用めっきCu配線の微細構造と抵抗率2010
- Author(s)
  大貫仁
- Organizer
  ナノプレーテイング研究会(日本金属学会)
- Place of Presentation
  慶応義塾大学日吉校舎
- Year and Date
  2010-04-16
- Data Source
  KAKENHI-PROJECT-20226014
[Presentation] LSI用めっきCu配線の微細構造と抵抗率2010
- Author(s)
  大貫仁
- Organizer
  ナノプレーテイング研究会(日本金属学会)
- Place of Presentation
  慶応義塾大学
- Year and Date
  2010-04-16
- Data Source
  KAKENHI-PROJECT-20226014
[Presentation] ナノ構造制御による次世代LSI用低抵抗率Cu配線の形成2010
- Author(s)
  大貫仁
- Organizer
  日本金属学会2010秋期大会
- Place of Presentation
  北海道大学(基調講演)
- Year and Date
  2010-09-26
- Data Source
  KAKENHI-PROJECT-20226014
[Presentation] Void Generation during Annealing Process of Very Narrow Copper Wires2008
- Author(s)
  Y. Sasajimal, T. Akabane, T. Nagai, Y Chonan and J. Onuki
- Organizer
  The IUMRS International Conference in Asia 2008
- Place of Presentation
  Nagoya
- Data Source
  KAKENHI-PROJECT-20226014
[Presentation] 質量選択的運動量制御に向けたZnO薄膜プラズマ合成中の抵抗率測定2008
- Author(s)
  小松良寛・佐藤直幸・池畑隆・山内智・大貫仁
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  船橋市,日本大学理工学部
- Year and Date
  2008-03-28
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Presentation] The Decelopment of an Innovative Process of Large Grained and Low Resistivity Cu Wires for less than hp 45nm ULSI2007
- Author(s)
  S. Tashiro, K. P. Khoo, T. Nagano, J. Onuki, Y. Chonan, H. Akahoshi, T. Tobita, M. Chiba, K. Ishikawa and N. Ishikawa
- Organizer
  IITC(International Interconnect Technology Conference, June)
- Place of Presentation
  Sangrancusco
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Presentation] 質量選択的運動量制御による複合化合物材料のプラズマ合成に向けた低気圧低温プラズマの生成2006
- Author(s)
  佐藤直幸・木下廣介・池畑隆・山内智・大貫仁
- Organizer
  第54回応用物理学関係連合講演会
- Place of Presentation
  相模原市,青山学院大学
- Year and Date
  2006-03-29
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Presentation] Controlling the Resistivity of Fine Line Cu Interconnects2006
- Author(s)
  K. P. Khoo, J. Onuki, T. Nagano and Y. Chonan
- Organizer
  ADMETA(Advanced Metallization Conference)
- Place of Presentation
  Tokyo
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17206071
[Presentation] Plasma application of mass-selective momentum control to complex compound synthesis2005
- Author(s)
  Naoyuki Sato, Yasushi Nakano, Takashi Ikehata, Satoshi Yamauchi, Jin Oonuki
- Organizer
  Extended Abstracts(The 65th Autumn Meeting, 2005) The Japan Society of Applied Physics No.1 1a-ZB-8
- Place of Presentation
  in Japanese
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Presentation] Voltage-current characteristics of the magnetized oxygen plasma for oxide film synthesis based on mass-selective momentum control2005
- Author(s)
  Y. Nakano. N. Y. Sato. T. Ikehata, S. Yamauchi&J. Oonuki
- Organizer
  Extended Abstracts(The 52nd Spring Meeting, 2005) The Japan Society of Applied Physics and Related Societies No.2 29a-E-1
- Place of Presentation
  in Japanese
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Presentation] 質量選択的運動量制御によるZnO薄膜の合成に向けた磁場中酸素プラズマへの亜鉛蒸気導入2005
- Author(s)
  佐藤直幸・中野恭嗣・池畑隆・山内智・大貫仁
- Organizer
  第52回応用物理学関係連合講演会
- Place of Presentation
  さいたま市,埼玉大学
- Year and Date
  2005-03-30
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Presentation] 質量選択的運動量制御による酸化物薄膜の合成に向けた磁場中酸素プラズマの電圧-電流特性2005
- Author(s)
  中野恭嗣・佐藤直幸・池畑隆・山内智・大貫仁
- Organizer
  第52回応用物理学関係連合講演会
- Place of Presentation
  さいたま市,埼玉大学
- Year and Date
  2005-03-29
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Presentation] 質量選択的運動量制御・磁場中酸素プラズマを用いた酸化物薄膜の合成(シンポジウム招待講演 30分)2005
- Author(s)
  佐藤直幸・中野恭嗣・木下廣介・池畑隆・山内智・大貫仁
- Organizer
  第66回応用物理学会学術講演会
- Place of Presentation
  徳島市,徳島大学
- Year and Date
  2005-09-08
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Presentation] 複合化合物材料の合成に向けた選択的運動量制御型プラズマ成膜技術の開発2005
- Author(s)
  佐藤直幸・中野恭嗣・池畑隆・山内智・大貫仁
- Organizer
  第65回応用物理学会学術講演会
- Place of Presentation
  仙台市,東北学院大学
- Year and Date
  2005-09-01
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Presentation] Introduction of zinc intot the magnetized oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005
- Author(s)
  N. Y. Sato, Y. Nakano, T. Ikehata, S. Yamauchi&J. Oonuki
- Organizer
  Extended Abstracts(The 52nd Spring Meeting, 2005) The Japan Society of Applied Physics and Related Societies No.2 30a-E-6
- Place of Presentation
  in Japanese
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Presentation] LSI用微細Cu配線材料のナノ粒界評価技術
- Author(s)
  大貫　仁
- Organizer
  日本金属学会
- Place of Presentation
  愛媛大学
- Invited
- Data Source
  KAKENHI-PROJECT-20226014
[Presentation] The resistivity measurement in the plasma deposition of ZnO thin film for mass-selective momentum control
- Author(s)
  Yoshihiro Komatsu, Naoyuki Sato, Takashi Ikehata, Satoshi Yamauchi, and Jin Oonuki
- Organizer
  Extended Abstracts(The 55th Spring Meeting, 2008) The Japan Society of Applied Physics and Related Societies No,1 28p-ZJ-10
- Place of Presentation
  in Japanese
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Presentation] Oxide film synthesis in the magnetized oxygen plasma based on mass-selective momentum control(invited on 8 Sep.2005)
- Author(s)
  N. Y. Sato, Y. Nakano, K. Kinoshita, T. Ikehata, S. Yamauchi&J. Oonuki
- Organizer
  Extended Abstracts(The 66th Autumn Meeting, 2005) The Japan Society of Applied Physics No,0 8p-N-5
- Place of Presentation
  in Japanese
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360356
[Presentation] 高純度微小銅めっきと抵抗減少機構
- Author(s)
  ⑤大貫　仁
- Organizer
  化学工学会
- Place of Presentation
  九州大学
- Year and Date
  2014-09-17 – 2014-09-18
- Invited
- Data Source
  KAKENHI-PROJECT-25289258
[Presentation] 第52回谷川・ハリス賞受賞記念講演　環境対応高温半導体用独創的配線・実装材料の開発に関する研究
- Author(s)
  大貫　仁
- Organizer
  日本金属学会
- Place of Presentation
  東京理科大学
- Invited
- Data Source
  KAKENHI-PROJECT-20226014

1. SASAJIMA Yasushi (80187137)

# of Collaborated Projects: 3 results

# of Collaborated Products: 41 results
2. AOYAMA Takashi (80363737)

# of Collaborated Projects: 2 results

# of Collaborated Products: 3 results
3. KONDO Kazuo (50250478)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. INAMI Takashi (20091853)

# of Collaborated Projects: 2 results

# of Collaborated Products: 5 results
5. NAGANO Takatoshi (70343621)

# of Collaborated Projects: 2 results

# of Collaborated Products: 5 results
6. TASHIRO Suguru (90272111)

# of Collaborated Projects: 2 results

# of Collaborated Products: 8 results
7. MIMURA Koji (00091752)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
8. ISHIKAWA Nobuhiro (00370312)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
9. CHONAN Yasunori (30363740)

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
10. ITO Shinji (50370317)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
11. UCHIKOSHI Masahito (60447191)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
12. OHTA Hiromichi (70168946)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. KIMURA Takashi (70370319)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
14. SUGITA Ryuji (20292477)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. KOMINE Takashi (90361287)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. SATO Naoyuki (80225979)

# of Collaborated Projects: 1 results

# of Collaborated Products: 46 results
17. IKEHATA Takashi (00159641)

# of Collaborated Projects: 1 results

# of Collaborated Products: 45 results
18. YAMAUCHI Satoshi (30292478)

# of Collaborated Projects: 1 results

# of Collaborated Products: 46 results
19. TOMOTA Yo (90007782)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. 一色実 (20111247)

# of Collaborated Projects: 1 results

# of Collaborated Products: 5 results

ONUKI JIN 大貫 仁

OONUKI Jin 大貫 仁

Research Projects

Research Products

Co-Researchers

Low strain and high aspect ratio Cu-TSVsPrincipal Investigator

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Development of high-temperature operation power semiconductor for the aluminum copper alloy wire bonding

Principal Investigator

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Development of novel magnetic printing technology for servo signal writing on hard disks over 1 Tbit/square inch

Principal Investigator

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Nano-structure Control of Cu Interconnects by a Very High Purity Plating Processes and Its Application to Next-generation LSIs.Principal Investigator

Principal Investigator

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Development of Cu Interconnects for 20nm Technology Node LSIPrincipal Investigator

Principal Investigator

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Development of plasma synthesis technology for advanced complex compound materials based on mass-selective momentum control

Principal Investigator

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[Journal Article] Grain Size Distribution at the Bottom Region in Very Narrow Cu Interconnects2016

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Journal Title

NAID

Data Source

[Journal Article] Pinning Effect of Fe(ClO) and Ti(ClO) Compounds on Cu Grain Growth in Very Narrow Cu Wires2015

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[Journal Article] Effectiveness of a periodic annealing method to coarsen Cu grains in very narrow trenches2015

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DOI

Data Source

[Journal Article] Influence of Additive-Free process on the Microstructure of Very Narrow Cu Wires in the Lower Region of a Trench2013

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[Journal Article] Electron backscatter diffraction analysis of electrodeposited nano-scale copper wires2013

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[Journal Article] Development of Grain Size Evaluating Process in Very Narrow Cu Interconnects2013

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[Journal Article] Electron backscatter diffraction analysis of electrodeposited nano-scale copper wires2013

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[Journal Article] Structural response of nano-scale damascene copper lines to annealing2013

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Data Source

[Journal Article] EBSD analysis of microstructures along the depth direction in very narrow Cu wires2013

Author(s)

Journal Title

NAID

Data Source

ONUKI JIN 大貫仁

OONUKI Jin 大貫仁

[Journal Article] 高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011