MATSUKUMA HIRAKU 松隈啓

… Alternative Names

Matsukuma Hiraku 松隈啓

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Researcher Number	90728370
Other IDs	https://orcid.org/0000-0001-8125-9708
Affiliation (Current)	2024: 東北大学, 工学研究科, 准教授
Affiliation (based on the past Project Information) *help	2021 – 2024: 東北大学, 工学研究科, 准教授 2017 – 2020: 東北大学, 工学研究科, 助教
Review Section/Research Field	Principal Investigator Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Basic Section 18020:Manufacturing and production engineering-related / Optical engineering, Photon science Except Principal Investigator Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Production engineering/Processing studies
Keywords	Principal Investigator 光周波数コム / 角度計測 / レーザー / 形状計測 / 運動計測 / 光演算装置 / 光計測 / デュアルコム分光 / 半導体レーザ / レーザー分光 … More / 半導体レーザー / ファイバーレーザー / 光技術 / 中赤外線 … More Except Principal Investigator 加工学 / 生産工学 / 超精密計測 / 絶対計測 / 分解能 / 位置 / 角度 / 変位 / 形状 / 自律校正 / 光周波数コム / トレーサビリティ / 精度 / ３次元計測 / 光応用計測 / フェムト秒レーザ / 角度センサ / 加工計測 / 精密位置決め Less

光演算装置による超精密計測の開拓Principal Investigator
- Principal Investigator
  
  松隈啓
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  Tohoku University
ループ光学系による10ピコメートル測定への挑戦Principal Investigator
- Principal Investigator
  
  松隈啓
- Project Period (FY)
  2023 – 2024
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  Tohoku University
同時フィルタリングデュアル光コム非線形分光法によるトレーサブルな超精密角度計測Principal Investigator
- Principal Investigator
  
  松隈啓
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Tohoku University
光コム次元変換光学とその場自律校正法の創出によるサブアトム級３次元超精密計測
- Principal Investigator
  
  高偉
- Project Period (FY)
  2020 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  Tohoku University
Precision angle measurement by conversion from time to angle based on autocollimationPrincipal Investigator
- Principal Investigator
  
  Matsukuma Hiraku
- Project Period (FY)
  2019 – 2020
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Tohoku University
Mid-infrared short-pulsed laser oscillation with development of basic technologiesPrincipal Investigator
- Principal Investigator
  
  Matsukuma Hiraku
- Project Period (FY)
  2017 – 2018
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Optical engineering, Photon science
- Research Institution
  Tohoku University
Frontier of the precision optical metrology created by the ultra-precision optical nano-grid reference artifact and the absolute optical scale comb
- Principal Investigator
  
  Gao Wei
- Project Period (FY)
  2015 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University

All 2023 2022 2021 2020 2019 2018 2017

All Journal Article Presentation Book Patent

[Book] (Book chapter)モード同期レーザを用いた共焦点プローブ－非走査測定と高分解能の両立－2020
- Author(s)
  佐藤遼，清水裕樹，仲村拓，松隈啓，高偉
- Total Pages
  5
- Publisher
  日本工業出版
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] 光技術コンタクト(Book chapter) 微細光学表面計測用プローブ顕微鏡技術2019
- Author(s)
  松隈　啓，清水裕樹，高　偉
- Total Pages
  5
- Publisher
  一般社団法人日本オプトメカトロニクス協会
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Book chapter) Handbook of Manufacturing, "Chapter 10"2019
- Author(s)
  Yuki Shimizu, So Ito, Jungchul Lee, Shigeaki Goto, Hiraku Matsukuma, and Wei Gao
- Total Pages
  28
- Publisher
  World Scientific
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] 高精度走査プローブ顕微鏡技術2018
- Author(s)
  清水裕樹，松隈啓，高偉
- Total Pages
  3
- Publisher
  先端加工機械技術振興協会
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Investigation of Angle Measurement Based on Direct Third Harmonic Generation in Centrosymmetric Crystals2023
- Author(s)
  Li Kuangyi、Lin Jiahui、Zhang Zhiyang、Sato Ryo、Shimizu Hiroki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 13 Issue: 2 Pages: 996-996
- DOI
  10.3390/app13020996
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Confocal probe based on the second harmonic generation for measurement of linear and angular displacements2023
- Author(s)
  Sato Ryo、Shimizu Yuki、Shimizu Hiroki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Optics Express
  
  Volume: 31 Issue: 7 Pages: 11982-11982
- DOI
  10.1364/oe.486421
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211, KAKENHI-PROJECT-22KJ0173
[Journal Article] Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser2022
- Author(s)
  Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 12 Issue: 9 Pages: 4736-4736
- DOI
  10.3390/app12094736
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211, KAKENHI-PROJECT-22KJ0173
[Journal Article] A Second Harmonic Wave Angle Sensor with a Collimated Beam of Femtosecond Laser2022
- Author(s)
  Astuti Wijayanti Dwi、Li Kuangyi、Sato Ryo、Matsukuma Hiraku、Shimizu Yuki、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 12 Issue: 10 Pages: 5211-5211
- DOI
  10.3390/app12105211
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer2022
- Author(s)
  Xiong Xin、Yin Chenguang、Quan Lue、Sato Ryo、Matsukuma Hiraku、Shimizu Yuki、Tamiya Hideaki、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 22 Issue: 23 Pages: 9348-9348
- DOI
  10.3390/s22239348
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Theoretical Investigation for Angle Measurement Based on Femtosecond Maker Fringe2022
- Author(s)
  Li Kuangyi、Astuti Wijayanti Dwi、Sato Ryo、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 12 Issue: 7 Pages: 3702-3702
- DOI
  10.3390/app12073702
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction2022
- Author(s)
  Quan Lue、Shimizu Yuki、Sato Ryo、Shin Dong Wook、Matsukuma Hiraku、Archenti Andreas、Gao Wei
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 16 Issue: 5 Pages: 572-581
- DOI
  10.20965/ijat.2022.p0572
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2022-09-05
- Language
  English
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Fabry-P?rot angle sensor using a mode-locked femtosecond laser source2022
- Author(s)
  Shin Dong Wook、Matsukuma Hiraku、Sato Ryo、Gao Wei
- Journal Title
  
  Optics Express
  
  Volume: 30 Issue: 26 Pages: 46366-46366
- DOI
  10.1364/oe.477435
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range2022
- Author(s)
  Hong Yifan、Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Shimizu Hiroki、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 22 Issue: 23 Pages: 9563-9563
- DOI
  10.3390/s22239563
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range2022
- Author(s)
  Hong Yifan、Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 22 Issue: 8 Pages: 3010-3010
- DOI
  10.3390/s22083010
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Self-calibration of a variable-line-spacing grating for an absolute optical encoder with a Fizeau interferometer2021
- Author(s)
  Xiong Xin、Quan Lue、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 32 Issue: 6 Pages: 064005-064005
- DOI
  10.1088/1361-6501/abe9de
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Measurement of the apex angle of a small prism by an oblique-incidence mode-locked femtosecond laser autocollimator2021
- Author(s)
  Shimizu Yuki、Kanda Yuri、Ma Xu、Ikeda Kakeru、Matsukuma Hiraku、Nagaike Yasunari、Hojo Masaki、Tomita Keita、Gao Wei
- Journal Title
  
  Precision Engineering
  
  Volume: 67 Pages: 339-349
- DOI
  10.1016/j.precisioneng.2020.10.013
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] An autocollimator with a mid-infrared laser for angular measurement of rough surfaces2021
- Author(s)
  Hiraku Matsukuma, Yun Asumi, Masashi Nagaoka, Yuki Shimizu, Wei Gao
- Journal Title
  
  Precision Engineering
  
  Volume: 67 Pages: 89-99
- DOI
  10.1016/j.precisioneng.2020.09.022
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K14857
[Journal Article] Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors2021
- Author(s)
  Matsukuma Hiraku、Adachi Keisuke、Sugawara Takuma、Shimizu Yuki、Gao Wei、Niwa Eiji、Sasaki Yoshihiro
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 4 Issue: 1 Pages: 53-66
- DOI
  10.1007/s41871-020-00091-2
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A new method for evaluation of the pitch deviation of a linear scale grating by an optical angle sensor2021
- Author(s)
  Quan Lue、Shimizu Yuki、Xiong Xin、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Precision Engineering
  
  Volume: 67 Pages: 1-13
- DOI
  10.1016/j.precisioneng.2020.09.008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation2021
- Author(s)
  Dwi Astuti Wijayanti、Matsukuma Hiraku、Nakao Masaru、Li Kuangyi、Shimizu Yuki、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 21 Issue: 2 Pages: 670-670
- DOI
  10.3390/s21020670
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation2021
- Author(s)
  Shimizu Yuki、Quan Lue、Shin Dong Wook、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Measurement: Sensors
  
  Volume: 18 Pages: 100135-100135
- DOI
  10.1016/j.measen.2021.100135
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A technique for measurement of a prism apex angle by optical angle sensors with a reference artefact2021
- Author(s)
  Shimizu Yuki、Ma Xu、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 32 Issue: 5 Pages: 054007-054007
- DOI
  10.1088/1361-6501/abd8a6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer2021
- Author(s)
  Xiong Xin、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 21 Issue: 21 Pages: 7412-7412
- DOI
  10.3390/s21217412
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] An absolute surface encoder with a planar scale grating of variable periods2021
- Author(s)
  Shimizu Yuki、Ishizuka Ryo、Mano Kazuki、Kanda Yuri、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Precision Engineering
  
  Volume: 67 Pages: 36-47
- DOI
  10.1016/j.precisioneng.2020.09.007
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source2021
- Author(s)
  Matsukuma Hiraku、Department of Finemechanics, Tohoku University 6-6-01 Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan、Sato Ryo、Shimizu Yuki、Gao Wei
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 15 Issue: 4 Pages: 529-536
- DOI
  10.20965/ijat.2021.p0529
- NAID
  130008062461
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2021-07-05
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211, KAKENHI-PROJECT-22KJ0173
[Journal Article] An application of the edge reversal method for accurate reconstruction of the three-dimensional profile of a single-point diamond tool obtained by an atomic force microscope2021
- Author(s)
  Zhang Kai、Shimizu Yuki、Matsukuma Hiraku、Cai Yindi、Gao Wei
- Journal Title
  
  The International Journal of Advanced Manufacturing Technology
  
  Volume: 117 Issue: 9-10 Pages: 2883-2893
- DOI
  10.1007/s00170-021-07879-6
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A Comparison of the Probes with a Cantilever Beam and a Double-Sided Beam in the Tool Edge Profiler for On-Machine Measurement of a Precision Cutting Tool2021
- Author(s)
  Wen Bo、Sekine Sho、Osawa Shinichi、Shimizu Yuki、Matsukuma Hiraku、Archenti Andreas、Gao Wei
- Journal Title
  
  Machines
  
  Volume: 9 Issue: 11 Pages: 271-271
- DOI
  10.3390/machines9110271
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A new signal processing method for a differential chromatic confocal probe with a modelocked femtosecond laser2020
- Author(s)
  Ryo Sato, Chong Chen, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: - Issue: 9 Pages: 094004-094004
- DOI
  10.1088/1361-6501/ab8905
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Optical Angle Sensor Technology Based on the Optical Frequency Comb Laser2020
- Author(s)
  Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 10 Issue: 11 Pages: 4047-4047
- DOI
  10.3390/app10114047
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] An Off-Axis Differential Method for Improvement of a Femtosecond Laser Differential Chromatic Confocal Probe2020
- Author(s)
  Chen Chong、Shimizu Yuki、Sato Ryo、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 10 Issue: 20 Pages: 7235-7235
- DOI
  10.3390/app10207235
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A differential strategy for measurement of a static force in a single point diamond cutting by a force‐controlled fast tool servo2020
- Author(s)
  Bo Wen, Yuki Shimizu, Hiraku Matsukuma, Keisuke Tohyama, Haruki Kurita, Yuan-Liu Chen, Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: - Issue: 7 Pages: 074014-074014
- DOI
  10.1088/1361-6501/ab7d6f
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Fabrication of a Two-dimensional Diffraction Grating with Isolated Photoresist Pattern Structures2020
- Author(s)
  Hiraku Matsukuma, Masanori Matsunaga, Kai Zhang, Yuki Shimizu and Wei Gao
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: -
- NAID
  130007869728
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] An insight on optical metrology in manufacturing2020
- Author(s)
  Shimizu Yuki、Chen Liang Chia、Kim Dae Wook、Chen Xiuguo、Li Xinghui、Matsukuma Hiraku
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 32 Pages: 042003-042003
- DOI
  10.1088/1361-6501/abc578
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01345, KAKENHI-PROJECT-20H00211
[Journal Article] Measurement Uncertainty Analysis of a Stitching Linear-Scan Method for the Evaluation of Roundness of Small Cylinders2020
- Author(s)
  Li Qiaolin、Shimizu Yuki、Saito Toshiki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 10 Issue: 14 Pages: 4750-4750
- DOI
  10.3390/app10144750
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] On-machine profile measurement of a micro cutting edge by using a contact-type compact probe unit2020
- Author(s)
  Bo Wen, Yuki Shimizu, Yu Watanabe, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Precision Engineering
  
  Volume: - Pages: 230-239
- DOI
  10.1016/j.precisioneng.2020.03.014
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] High-Precision Cutting Edge Radius Measurement of Single Point Diamond Tools Using an Atomic Force Microscope and a Reverse Cutting Edge Artifact2020
- Author(s)
  Zhang Kai、Cai Yindi、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 10 Issue: 14 Pages: 4799-4799
- DOI
  10.3390/app10144799
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe2020
- Author(s)
  Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Proceedings of the JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing (LEMP2020)
  
  Volume: -
- DOI
  10.1115/lemp2020-8626
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer2020
- Author(s)
  Xin Xiong, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: - Issue: 9 Pages: 094002-094002
- DOI
  10.1088/1361-6501/ab8b83
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] On-machine angle measurement of a precision V-groove on a ceramic workpiece2020
- Author(s)
  Shimizu Yuki、Gao Wei、Matsukuma Hiraku、Szipka Karoly、Archenti Andreas
- Journal Title
  
  CIRP Annals
  
  Volume: 69 Issue: 1 Pages: 469-472
- DOI
  10.1016/j.cirp.2020.03.011
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Design and Construction of a Low-Force Stylus Probe for On-machine Tool Cutting Edge Measurement2020
- Author(s)
  Matsukuma Hiraku、Wen Bo、Osawa Shinichi、Sekine Sho、Shimizu Yuki、Gao Wei
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 3 Issue: 4 Pages: 282-291
- DOI
  10.1007/s41871-020-00084-1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Accurate polarization control in nanorthogonal two-axis Lloyd's mirror interferometer for fabrication of two-dimensional scale gratings2019
- Author(s)
  Yuki Shimizu, Kazuki Mano, Kai Zhang, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Optical Engineering
  
  Volume: 58-9 Issue: 09 Pages: 92611-92611
- DOI
  10.1117/1.oe.58.9.092611
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] On-machine angle measurement of a precision V-groove on a ceramic workpiece2019
- Author(s)
  Yuki Shimizu, Wei Gao, Hiraku Matsukuma, K?roly Szipka, Andreas Archenti
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: 69-1
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings2019
- Author(s)
  Yuki Shimizu, Kazuki Mano, Hiroki Murakami, Shunsuke Hirota, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Precision Engineering
  
  Volume: 60 Pages: 280-290
- DOI
  10.1016/j.precisioneng.2019.07.022
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Analysis of temperature influence on a chromatic confocal probe with a mode-locked femtosecond laser2019
- Author(s)
  Ryo Sato, Yuki Shimizu, Hiraku Matsukuma and Wei Gao
- Journal Title
  
  Proceedings of the 14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)
  
  Volume: 1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Investigation and Improvement of Thermal Stability of a Chromatic Confocal Probe with a Mode-Locked Femtosecond Laser Source2019
- Author(s)
  Ryo Sato，Yuki Shimizu，Chong Chen，Hiraku Matsukuma，Wei Gao
- Journal Title
  
  Applied Sciences
  
  Volume: 9-19 Issue: 19 Pages: 4084-4084
- DOI
  10.3390/app9194084
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Integration of a Cr-N Thin Film Displacement Sensor into an XY Micro-stage for Closed-loop Nano-Positioning2019
- Author(s)
  Keisuke Adachi, Hiraku Matsukuma, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: In press Issue: 3 Pages: 131-139
- DOI
  10.1007/s41871-019-00040-8
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A New Optical Angle Measurement Method Based on Second Harmonic Generation with a Mode-Locked Femtosecond Laser2019
- Author(s)
  Hiraku Matsukuma, Shuhei Madokoro, Wijayanti Dwi Astuti, Yuki Shimizu, and Wei Gao
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 2 Issue: 4 Pages: 187-198
- DOI
  10.1007/s41871-019-00052-4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K14857, KAKENHI-PROJECT-15H05759
[Journal Article] Reduction in Cross Talk Errors in a Six Degree of Freedom Surface Encoder2019
- Author(s)
  Hiraku Matsukuma, Ryo Ishizuka, Masaya Furuta, Xinghui Li, Yuki Shimizu, Wei Gao
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 2-2 Issue: 2 Pages: 111-123
- DOI
  10.1007/s41871-019-00039-1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A PD-edge method associated with the laser autocollimation for measurement of a focused laser beam diameter2018
- Author(s)
  Yuki Shimizu, Taiji Maruyama, Shota Nakagawa, Yuan-Liu Chen, Hiraku Matsukuma and Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Issue: 7 Pages: 074006-074006
- DOI
  10.1088/1361-6501/aac0a6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Uncertainty Evaluation for Measurements of Pitch Deviation and Out-of-Flatness of Planar Scale Gratings by a Fizeau Interferometer in Littrow Configuration2018
- Author(s)
  Xin Xiong, Yuki Shimizu, Xiuguo Chen, Hiraku Matsukuma and Wei Gao
- Journal Title
  
  Applied Sciences
  
  Volume: 9 Issue: 12 Pages: 2539-2539
- DOI
  10.3390/app8122539
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Q-switched dual-wavelength pumped 3.5-μm erbium-doped mid-Infrared fiber laser2018
- Author(s)
  Nathaniel Bawden, Hiraku Matsukuma, Ori Henderson-Sapir, Elizaveta Klantsataya, Shigeki Tokita, David J. Ottaway
- Journal Title
  
  Proc. SPIE 10512, Fiber Lasers XV: Technology and Systems
  
  Volume: 10512 Pages: 28-28
- DOI
  10.1117/12.2288081
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K14124
[Journal Article] Error separation method for precision measurement of the Run-Out of a microdrill bit by using a laser scan micrometer measurement system2018
- Author(s)
  Zengyuan Niu, Yuan-Liu Chen, Yuki Shimizu, Hiraku Matsukuma, and Wei Gao
- Journal Title
  
  Journal of Manufacturing and Materials Processing
  
  Volume: 2 Issue: 1 Pages: 4-4
- DOI
  10.3390/jmmp2010004
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges2018
- Author(s)
  Yindi Cai, Yuan-Liu Chen, Malu Xu, Yuki Shimizu, So Ito, Hiraku Matsukuma and Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Issue: 5 Pages: 054004-054004
- DOI
  10.1088/1361-6501/aaa913
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] High quality-factor quartz tuning fork glass probe used in tapping mode atomic force microscopy for surface profile measurement2018
- Author(s)
  Yuan-Liu Chen, Yanhao Xu, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Issue: 6 Pages: 065014-065014
- DOI
  10.1088/1361-6501/aab998
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Actively Q-switched dual-wavelength pumped Er3+:ZBLAN fiber laser at 3.47μm2018
- Author(s)
  Bawden Nathaniel、Matsukuma Hiraku、Henderson-Sapir Ori、Klantsataya Elizaveta、Tokita Shigeki、Ottaway David J.
- Journal Title
  
  Optics Letters
  
  Volume: 43 Issue: 11 Pages: 2724-2724
- DOI
  10.1364/ol.43.002724
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01899, KAKENHI-PROJECT-17K14124
[Journal Article] Laser autocollimation based on an optical frequency comb for absolute angular position measurement2018
- Author(s)
  Yuan-Liu Chen, Yuki Shimizu, Jun Tamada, Kazuki Nakamura, Hiraku Matsukuma, Xiuguo Chen, and WeiGao
- Journal Title
  
  Precision Engineering
  
  Volume: 54 Pages: 284-293
- DOI
  10.1016/j.precisioneng.2018.06.005
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A stitching linear-scan method for roundness measurement of small cylinders2018
- Author(s)
  Yuan-Liu Chen, Yuki Machida, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: 67(1) Issue: 1 Pages: 535-538
- DOI
  10.1016/j.cirp.2018.04.009
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A Method for Expansion of Z-Directional Measurement Range in a Mode-Locked Femtosecond Laser Chromatic Confocal Probe2018
- Author(s)
  Chong Chen, Ryo Sato, Yuki Shimizu, Taku Nakamura, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Applied Sciences
  
  Volume: 9 Issue: 3 Pages: 454-454
- DOI
  10.3390/app9030454
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] The effects of microstructure on propagation of laser-driven radiative heat waves in under-dense high-Z plasma2018
- Author(s)
  J. D. Colvin, H. Matsukuma, K. C. Brown, J. F. Davis, G. E. Kemp, K. Koga, N. Tanaka, A. Yogo, Z. Zhang, H. Nishimura, and K. B. Fournier
- Journal Title
  
  Physics of Plasmas
  
  Volume: 25 Issue: 3 Pages: 032702-032702
- DOI
  10.1063/1.5012523
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K14124
[Journal Article] A chromatic confocal probe with a mode-locked femtosecond laser source2018
- Author(s)
  Xiuguo Chen, Taku Nakamura, Yuki Shimizu, Chong Chen, Yuan-Liu Chen, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Optics and Laser Technology
  
  Volume: 103 Pages: 359-366
- DOI
  10.1016/j.optlastec.2018.01.051
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] An optical angle sensor based on chromatic dispersion with a mode-locked laser source2018
- Author(s)
  Yuki SHIMIZU, Shuhei MADOKORO, Hiraku MATSUKUMA and Wei GAO
- Journal Title
  
  JAMDSM
  
  Volume: 12 Issue: 5 Pages: JAMDSM0096-JAMDSM0096
- DOI
  10.1299/jamdsm.2018jamdsm0096
- NAID
  130007498573
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions2018
- Author(s)
  Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan-Liu Chen, Xiuguo Chen, Hiraku Matsukuma and Wei Gao
- Journal Title
  
  Sensors
  
  Volume: 18 Issue: 2 Pages: 398-398
- DOI
  10.3390/s18020398
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Evaluation of the grating period based on laser diffraction by using a mode-locked femtosecond laser beam2018
- Author(s)
  Yuki SHIMIZU, Kentaro UEHARA, Hiraku MATSUKUMA and Wei GAO
- Journal Title
  
  JAMDSM
  
  Volume: 12 Issue: 5 Pages: JAMDSM0097-JAMDSM0097
- DOI
  10.1299/jamdsm.2018jamdsm0097
- NAID
  130007499852
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Plane-by-plane femtosecond laser inscription of first-order fiber Bragg gratings in fluoride glass fiber for in situ monitoring of lasing evolution2018
- Author(s)
  Goya Kenji、Matsukuma Hiraku、Uehara Hiyori、Hattori Satoshi、Sch?fer Christian、Konishi Daisuke、Murakami Masanao、Tokita Shigeki
- Journal Title
  
  Optics Express
  
  Volume: 26 Issue: 25 Pages: 33305-33305
- DOI
  10.1364/oe.26.033305
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18H01899, KAKENHI-PROJECT-17K14124
[Patent] 特許出願2021
- Inventor(s)
  清水裕樹，高偉，松隈啓，洪一帆
- Industrial Property Rights Holder
  清水裕樹，高偉，松隈啓，洪一帆
- Industrial Property Rights Type
  特許
- Filing Date
  2021
- Data Source
  KAKENHI-PROJECT-20H00211
[Patent] 回折格子ピッチ偏差測定装置2020
- Inventor(s)
  清水裕樹，高偉，松隈啓，権略，木村彰秀，青木敏彦
- Industrial Property Rights Holder
  清水裕樹，高偉，松隈啓，権略，木村彰秀，青木敏彦
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2020-036006
- Filing Date
  2020
- Data Source
  KAKENHI-PROJECT-15H05759
[Patent] 絶対位置測定装置および絶対位置測定方法2019
- Inventor(s)
  清水裕樹，高偉，松隈啓，石塚稜
- Industrial Property Rights Holder
  清水裕樹，高偉，松隈啓，石塚稜
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2019-057305
- Filing Date
  2019
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] デュアルコム分光オートコリメーションによる精密角度変位計測2023
- Author(s)
  松隈　啓，池田　翔，佐藤　遼，高　偉
- Organizer
  2023年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-21H01222
[Presentation] The theoretical investigation of angle measurement based on the third harmonic generation（THG） using focused beam2022
- Author(s)
  Li Kuangyi，Lin Jiahui，Ryo Sato，Hiraku Matsukuma，Wei Gao
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] An angle sensor based on second harmonic generation with a collimated femtosecond laser beam2022
- Author(s)
  Jiahui Lin，Kuangyi Li，Ryo Sato，Hiraku Matsukuma，Wei Gao
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] フィゾー型2軸サーフェスエンコーダに関する研究2022
- Author(s)
  洪一帆，清水裕樹，松隈啓，松岡良太，高偉
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Theoretical analysis on gauge block length measurement by a modulated synthetic wavelength method2022
- Author(s)
  Tao Liu, Jiucheng Wu, Ryo Sato, Hiraku Matsukuma, Wei Gao
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Feasibility study of precise angle measurements with a dual-differentical confocal probe2022
- Author(s)
  Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao, Andreas Fischer
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] モード同期フェムト秒レーザ共焦点プローブに関する研究 -測定対象物チルト角が極小点追跡法へ与える影響の調査-2022
- Author(s)
  佐藤遼，松隈啓，高偉
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Simulation analysis on gauge block length calibration by the method of Excess Fraction2022
- Author(s)
  LiuTao，Jiucheng Wu，Ryo Sato，Hiraku Matsukuma，Wei Gao
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Design and testing of a Fizeau-type two-axis surface encoder2022
- Author(s)
  Yifan Hong, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Eberhard Manske, Wei Gao
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Theoretical investigation of angle measurement based on third-harmonic generation (THG) with a femtosecond laser2022
- Author(s)
  Kuangyi Li, Jiahui Lin, Wijayanti Dwi Astuti, Ryo Sato, Hiraku Matsukuma, Wei Gao
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] フェムト秒レーザを用いたキャビティ間隔の検出方法2022
- Author(s)
  辛東昱，松隈啓，高偉
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Development of a wide-range differential angle sensor for calibration of image-scanning linear scale2022
- Author(s)
  Jiucheng Wu, Lue Quan, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Self-calibration for variable line spacing gratings by a lateral distance with Fizeau interferometer2022
- Author(s)
  Chenguang Yin, Wei Gao, Xin Xiong, Ryo Sato, Hiraku Matsukuma
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] 第二次高調波共焦点プローブに関する研究　ー角度計測に関する検討ー2022
- Author(s)
  佐藤　遼，清水　裕樹，清水　浩貴，松隈　啓，高　偉
- Organizer
  2023年度精密工学会春季大会学術講演会論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Uncertainty analysis of ultra-precision grating pitch calibration by using optical frequency comb2022
- Author(s)
  Dong Wook Shin, Ryo Sato, Hiraku Matsukuma, Yuki shimizu, Wei Gao
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] 短ピッチ格子を用いた平面ステージ計測用小型サーフェスエンコーダの設計2021
- Author(s)
  洪一帆，清水裕樹，松隈啓，松岡良太，高偉
- Organizer
  2021年度砥粒加工学会学術講演会論文集(C14) 2021/9/1
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Measurement of the angle of a small prism by a mode-locked femtosecond laser autocollimator2021
- Author(s)
  Kakeru Ikeda, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing (nanoMan2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] モード同期フェムト秒レーザを利用した回折格子の校正方法2021
- Author(s)
  Shin Dong Wook，Quan Lue，松隈啓，清水裕樹，高偉，Manske Eberhard
- Organizer
  2021年度砥粒加工学会学術講演会論文集 2021/9/1
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] モード同期フェムト秒レーザ共焦点プローブに関する研究-極小点追跡法を用いた合焦波長検出に関する検討-2021
- Author(s)
  佐藤遼，松隈啓，清水裕樹，高偉
- Organizer
  2021年度精密工学会秋季大会学術講演会講演論文集(講演番号 H31) 2021/9/21-23
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Calibration of grating periods based on laser diffraction method using optical frequency comb2021
- Author(s)
  Dong Wook Shin, Lue Quan, Hiraku Matsukuma, Yuki Shimizu, Wei Gao and Eberhard Manske
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Fabrication of a variable-line-spacing grating based on the non-othogonal Lloyd's interferometer2021
- Author(s)
  Shusaku Endo, Kai Zhang, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing (nanoMan2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Angular Measurement Method Utilizing Second Harmonic Generation2021
- Author(s)
  Wijayanti Dwi Astuti, Hiraku Matsukuma, Li Kuangyi, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing (nanoMan2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Design of a small-sized surface encoder with short-period planar gratings for stage motion measurement2021
- Author(s)
  Yifan Hong, Yuki Shimizu, Hiraku Matsukuma, Ryota Matsuoka, Wei Gao, Eberhard Manske
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] 3D profile measurement of a diamond tool without the effect of AFM probe tip radius2021
- Author(s)
  Kai ZHANG, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Investigation of Measurement Range of a Differential Chromatic Confocal Probe employing a Mode-Locked Femtosecond Laser2021
- Author(s)
  Ryo SATO, Hiraku MATSUKUMA, Yuki SHIMIZU, Wei GAO, Andreas FISCHER
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] マイクロ光学素子の角度計測に関する研究2021
- Author(s)
  池田翔，松隈啓，清水裕樹，高偉
- Organizer
  2021年度精密工学会東北支部学術講演会講演論文集(A05) 2021/11/6
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] マイクロ光学素子の角度計測に関する研究2021
- Author(s)
  池田翔，松隈啓，清水裕樹，高偉
- Organizer
  2021年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-21H01222
[Presentation] Evaluation of pitch deviation of a scale linear grating based on the laser autocollimation2021
- Author(s)
  Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Wei Gao, Eberhard Manske
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] 非直交型ロイドミラー干渉計によるVLS格子の製作に関する研究2021
- Author(s)
  遠藤秀作，村上裕記，松隈啓，清水裕樹，高偉
- Organizer
  2021年度精密工学会東北支部学術講演会講演論文集(A06) 2021/11/6
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] フェムト秒レーザを用いた絶対位置計測に関する研究2021
- Author(s)
  前原智，佐藤遼，松隈啓，清水裕樹，高偉
- Organizer
  2021年度精密工学会東北支部学術講演会講演論文集(A03) 2021/11/6
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation2021
- Author(s)
  Yuki Shimizu, Lue Quan, Dong Wook Shin, Hiraku Matsukuma, Wei Gao
- Organizer
  XXIII IMEKO World Congress
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Measurement of the angle of a small prism by a mode-locked femtosecond laser autocollimator2021
- Author(s)
  Kakeru Ikeda, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H01222
[Presentation] Development of a probe type profiler for measurement of a micro cutting edge2021
- Author(s)
  Wen Bo, Hiraku Matsukuma, Yuki Shimizu, Andreas Archenti, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing (nanoMan2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Fabrication of a two-dimensional diffraction grating with reduction of the effect of thermal expansion2021
- Author(s)
  Hiraku Matsukuma, Masanori Matsunaga, Yuki Shimizu, Wei Gao
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] An absolute surface encoder with a femtosecond laser and a planar scale grating of variable periods2021
- Author(s)
  Satoru Maehara, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing (nanoMan2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] ロイドミラー干渉計による微細格子製作に関する研究2020
- Author(s)
  村上裕記, 張凱, 松隈啓, 清水裕樹, 高偉
- Organizer
  2020年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Design of a small-sized surface encoder for stage motion measurement2020
- Author(s)
  洪一帆, 清水裕樹, 松隈啓, 松岡良太, 高偉
- Organizer
  2020年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] 光周波数コムによる精密角度計測2020
- Author(s)
  松隈　啓，清水裕樹，高　偉
- Organizer
  一般社団法人レーザー学会学術講演会第40回年次大会
- Invited
- Data Source
  KAKENHI-PROJECT-19K14857
[Presentation] Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe2020
- Author(s)
  Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Organizer
  The International Conference on Leading Edge Manufacturing/Materials and Processing (LEMP2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] On-machine angle measurement of a precision V-groove on a ceramic workpiece2020
- Author(s)
  Yuki Shimizu, Wei Gao, Hiraku Matsukuma, Karoly Szipka, Andreas Archenti
- Organizer
  CIRP Video paper sessions 2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Uncertainty analysis of roundness measurement of a small cylinder based on the stitching linear-scan method2020
- Author(s)
  李橋林, 齋藤俊樹, 町田裕貴, 松隈啓, 清水裕樹, 高偉
- Organizer
  2020年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Development of an optical angle sensor unit for the evaluation of pitch deviations2020
- Author(s)
  権略，松隈啓，清水裕樹，高偉
- Organizer
  2020年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Three-dimensional profile measurement of a single point diamond tool without the influence of the tip radius of an AFM probe2020
- Author(s)
  Kai Zhang, Yindi Cai, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  2020年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] An optical angle sensor based on second harmonic generation of a mode-locked laser2019
- Author(s)
  Hiraku Matsukuma, Shuhei Madokoro, Masaru Nakao, Yuki Shimizu, Wei Gao
- Organizer
  OPTICS & PHOTONICS International Congress 2019 (Optical Technology and Measurement for Industrial Applications (OPTM2019))
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K14857
[Presentation] 精密測定のためのファイバ型光周波数コムの開発2019
- Author(s)
  神田悠利，松隈啓，清水裕樹，稲場肇，高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Study on the stitching techinque for fast evaluation of the linear scale using a Fizeau interferometer2019
- Author(s)
  熊昕, 松隈啓, 清水裕樹, 高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Uncertainty analysis of roundness measurement of a small cylinder based on the stitching linear-scan method2019
- Author(s)
  李橋林，齋藤俊樹，町田裕貴，松隈啓，清水裕樹，高偉
- Organizer
  2019年度砥粒加工学会学術講演会（ABTEC2019）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 光周波数コムを用いた角度センサの研究2019
- Author(s)
  中村一貴，松隈啓，清水裕樹，高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 非直交型2 軸ロイドミラー干渉計の高精度化に関する研究 -ビームシェイパによるコリメート光強度分布の平坦化-2019
- Author(s)
  村上裕記，石塚稜，松永雅教，松隈啓，清水裕樹，高偉
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] フェムト秒レーザを用いた共焦点顕微鏡における光軸変位計測高安定化に関する研究2019
- Author(s)
  佐藤遼，松隈啓，清水裕樹，高偉
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Experimental research on measurement range of a chromatic pinhole illumination confocal probe by utilizing side-lobes of axial response2019
- Author(s)
  陳衝，松隈啓，佐藤遼，清水裕樹，高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 切削力制御加工のための高安定な切削力検出に関する研究2019
- Author(s)
  栗田悠生，文博，松隈啓，清水裕樹，高偉
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Design and verification of a measurement system for a micro tool cutting edge with a low measuring force2019
- Author(s)
  Bo WEN，Yu WATANABE，Hiraku MATSUKUMA，Yuki SHIMIZU，Wei GAO
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] On-machine Surface Metrology by a Force-Sensor Integrated Fast Tool Servo2019
- Author(s)
  文博，余建平，松隈啓，清水裕樹，高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Theoretical investigation of the lateral resolution of a chromatic confocal microscopy with a mode-locked femtosecond laser source2019
- Author(s)
  Chong CHEN，Ryo SATO，Hiraku MATSUKUMA，Yuki SHIMIZU，Wei GAO
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Analysis of temperature influence on a chromatic confocal probe with a mode-locked femtosecond laser2019
- Author(s)
  Ryo Sato, Yuki Shimizu, Hiraku Matsukuma and Wei Gao
- Organizer
  The 14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Design and Testing a High-Resolution Six-Degree-of-Freedom Surface Encoder2019
- Author(s)
  Hiraku Matsukuma, Ryo Ishizuka, Masaya Furuta, Xinghui Li, Yuki Shimizu, Wei Gao
- Organizer
  The 14th Internartional Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K14857
[Presentation] A nano-indentation system for precision measurement of a single point diamond tool2019
- Author(s)
  張凱，XuMalu，CaiYindi，松隈啓，清水裕樹，高偉
- Organizer
  2019年度砥粒加工学会学術講演会（ABTEC2019）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 光周波数コムを用いた絶対変位測定に関する研究2019
- Author(s)
  廣田駿介，安達圭祐，石塚稜，松隈啓，清水裕樹，高偉
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 2軸微細格子製作のための小型露光装置の開発2019
- Author(s)
  松永雅教，真野和樹，松隈啓，清水裕樹，高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 高強度レーザパルスによる非線形効果を用いた角度計測法に関する研究2019
- Author(s)
  松隈啓，間所周平，清水裕樹，高偉
- Organizer
  2019年度精密工学会春季大会学術講演会論文集
- Data Source
  KAKENHI-PROJECT-19K14857
[Presentation] Fast evaluation of variable line spacing gratings by using a Fizeau Interferometer2018
- Author(s)
  Xin XIONG, Xiuguo CHEN, Yuki SHIMIZU, Hiraku MATSUKUMA, and Wei GAO
- Organizer
  The 17th International Conference on Precision Engineering, ICPE2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] An Ultra-Sensitive Optical Angle Sensor for Pitch Deviations Measurement of Diffraction Gratings2018
- Author(s)
  Lue Quan, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu and Wei Gao
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Development of a fiber-laser-based frequency comb for precision dimensional metrology2018
- Author(s)
  Yuri KANDA, Hiraku MATSUKUMA, Shaoqing YANG, Yuki SHIMIZU, Hajime INABA, and Wei GAO
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] フェムト秒レーザを用いた共焦点顕微鏡の温度安定性に関する研究2018
- Author(s)
  佐藤　遼，松隈　啓，陳　衝，清水裕樹，高　偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage2018
- Author(s)
  Ryo Ishizuka, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Fast evaluation of a linear scale by using a Fizeau interferometer and stitching technique2018
- Author(s)
  Xin Xiong, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu and Wei Gao
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] An optical frequency comb operating in the mid-infrared region for wide-range and high-precision optical sensor2018
- Author(s)
  Yun Asumi, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A differential compensation strategy based piezoelectric force sensor system for force controlled ultra-precision diamond cutting2018
- Author(s)
  Yuan-Liu Chen, Keisuke Tohyama, Yuki Shimizu, Hiraku Matsukuma and Wei Gao
- Organizer
  The 6th International Conference on Nanomanufacturing, nanoMan20188
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 力センサを組み込んだ高速工具サーボによる切削力制御加工2018
- Author(s)
  栗田　悠生，松隈啓，遠山佳祐，清水裕樹，高偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 広帯域光周波数コムのための中赤外超短パルスレーザの開発2018
- Author(s)
  阿隅　結夢，松隈　啓，清水裕樹，高　偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A new method to evaluate pitch deviations of diffraction gratings by using optical angle sensor2018
- Author(s)
  権　略，松隈　啓，清水裕樹，高　偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Theoretical investigation of a femtosecond laser chromatic confocal probe with fiber illumination and pinhole illumination2018
- Author(s)
  CHONG CHEN, Xiuguo CHEN, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Organizer
  The 17th International Conference on Precision Engineering, ICPE2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 平面ステージ精密制御用多軸サーフェスエンコーダの高精度化に関する研究2018
- Author(s)
  石塚　稜，松隈　啓，清水裕樹，高　偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Theoretical investigation on measurement range of a femtosecond laser chromatic confocal probe by utilizing side-lobe of axial response2018
- Author(s)
  Chong Chen, Hiraku Matsukuma, Ryo Sato, Xiuguo Chen, Yuki Shimizu and Wei Gao
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Mid-infrared ultrashort pulse laser for precision metrology2018
- Author(s)
  Hiraku Matsukuma, Yoshiaki Kakimoto, Shigeki Tokita, Yuki Shimizu, Wei Gao
- Organizer
  6th International Conference on Nanomanufacturing
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K14124
[Presentation] 微細光学素子形状測定のための走査型プローブ顕微鏡に関する研究2018
- Author(s)
  長岡　将史，松隈　啓，清水裕樹，高　偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] An optical frequency comb operating in the mid-infrared region for wide-range and high-precision optical sensor2018
- Author(s)
  Yun Asumi, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  IEEE 2018 International conference on advanced manufacturing (ICAM2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K14124
[Presentation] 2軸ロイドミラー干渉計による回折格子製作に関する研究―コリメート光強度分布の評価―2017
- Author(s)
  真野　和樹，相原　涼，李　星輝，清水　裕樹，陳　遠流，陳　修国，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] On-machine Measurement of Workpiece Inclination for Double-face Turning2017
- Author(s)
  Bo Wen, Yuan-Liu Chen, Shu Wang, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Organizer
  The 7th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 回折格子の校正に関する研究2017
- Author(s)
  上原　健太郎，陳　遠流，清水　裕樹，陳　修国，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 平面ステージ精密制御用多自由度光センサのクロストーク誤差低減に関する研究2017
- Author(s)
  石塚　稜，古田　雅也，清水　裕樹，陳　遠流，陳　修国，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] エッジ反転法によるダイヤモンド工具刃先丸み半径の精密測定に関する研究2017
- Author(s)
  徐　馬禄，陳遠流，蔡　引※（※は女偏に弟），清水　裕樹，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Measurement of Workpiece Inclination by Using FS-FTS on a Diamond Turning Machine2017
- Author(s)
  Bo Wen, Yuan-Liu Chen, Shu Wang, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 小型円筒ワークの精密表面形状測定に関する研究2017
- Author(s)
  齋藤　俊樹，町田　祐貴，清水　裕樹，陳　遠流，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 超精密角度センサに関する研究2017
- Author(s)
  間所　周平，陳　遠流，清水　裕樹，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759

1. Gao Wei (70270816)

# of Collaborated Projects: 2 results

# of Collaborated Products: 130 results
2. 清水裕樹 (70606384)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
3. 陳遠流 (90794058)

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
4. 伊東聡 (00624818)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
5. SHIMIZU Yuki

# of Collaborated Projects: 0 results

# of Collaborated Products: 121 results
6. TOKITA Shigeki

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results

MATSUKUMA HIRAKU 松隈 啓

Matsukuma Hiraku 松隈 啓

Research Projects

Research Products

Co-Researchers

光演算装置による超精密計測の開拓Principal Investigator

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ループ光学系による10ピコメートル測定への挑戦Principal Investigator

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同時フィルタリングデュアル光コム非線形分光法によるトレーサブルな超精密角度計測Principal Investigator

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光コム次元変換光学とその場自律校正法の創出によるサブアトム級３次元超精密計測

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Precision angle measurement by conversion from time to angle based on autocollimationPrincipal Investigator

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Review Section

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Mid-infrared short-pulsed laser oscillation with development of basic technologiesPrincipal Investigator

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Frontier of the precision optical metrology created by the ultra-precision optical nano-grid reference artifact and the absolute optical scale comb

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[Book] (Book chapter)モード同期レーザを用いた共焦点プローブ－非走査測定と高分解能の両立－2020

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[Book] 光技術コンタクト(Book chapter) 微細光学表面計測用プローブ顕微鏡技術2019

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[Book] (Book chapter) Handbook of Manufacturing, "Chapter 10"2019

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[Book] 高精度走査プローブ顕微鏡技術2018

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[Journal Article] Investigation of Angle Measurement Based on Direct Third Harmonic Generation in Centrosymmetric Crystals2023

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[Journal Article] Confocal probe based on the second harmonic generation for measurement of linear and angular displacements2023

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[Journal Article] Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser2022

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MATSUKUMA HIRAKU 松隈啓

Matsukuma Hiraku 松隈啓