佐藤 一雄  Sato Kazuo

Microsystem Technologies, (DOI 10.1007/s00542-009-0956-5) (in press, Online published)

Sensors and Actuators A, Physical 157

ページ: 91-95

Microsystem Technologies 0956-5(in press)

J. Micromechanics and Microengineering 20

Journal of Micromechanics and Microengineering 20

日本機械学会論文集C2編「マイクロ・ナノ工学シンポジウム小特集」 (in press)

Japanese Journal of Applied Physics (in press, accepted Feb.)

40017116129

Sensors and Actuators A (Physical in press, accepted Feb.)

Sensors and Actuators A, Physical, accepted Feb. '10 (in press)

Sensors and Actuators A, Physical 157

ページ: 91-95

Japanese Journal of Applied Physics, accepted Feb. '10 (in press)

40017116129

日本機械学会論文集C2編「マイクロ・ナノ工学シンポジウム小特集」 (in press, accepted Feb.)

MEMS/NEMS工学全集((株)テクノシステム)

ページ: 111-115

J. Micromechanics and Microengineering 40682

J. Micromechanics and Microengineering 40835

Journal of Micromechanics and Microengineering 19-5

J. Micromechanics and Microengineering 40896

Sensor Letters 7-1

ページ: 11-16

J. Microelectromechanical Systems 40712

ページ: 1345-1356

Sensors and Actuators A 155(Physical)

ページ: 98-112

マイクロ・ナノデバイスのエッチング技術((株)シーエムシー出版)

ページ: 3-27

Sensors and Actuators A, Physical 154-2

ページ: 192-203

Sensors and Actuators A, Physical 156-2

ページ: 334-341

Sensors and Actuators A 154-2(Physical)

ページ: 192-203

Sensors and Actuators A, Physical 155

ページ: 98-112

Sensors and Actuators A 156-2(Physical)

ページ: 334-341

Journal of Microelectromechanical Systems 18-6

ページ: 1345-1356

Journal of Micromechanics and Microengineering 19-12

Sensor Letters 40725

ページ: 11-16

Journal of Micromechanics and Microengineering 19-10

Journal of Physics : Condensed Matter 20

Journal of Micromechanics and Microengineering 18-5

J. Physics: Condensed Matter 20

ECS Transactions 16-8

ページ: 133-140

Sensors and Actuators A 148-1(Physical)

ページ: 311-318

J. Micromechanics and Microengineering 40681

New Journal of Physics vol.10電子ジャーナル#13033

J. Microelectromechanical Systems 40591

ページ: 410-431

120001101515

Journal of Microelectromechanical Systems (印刷中)

120001101515

New Journal of Physics 10

ECS Transactions 40771

ページ: 133-140

Journal of Micromechanics and Microengineering vol.17,no.4

Journal of Micromechanics and Microengineering vol.17

ページ: 2299-2307

J. Micromechanics and Microengineering 40864

ページ: 2299-2307

J. Micromechanics and Microengineering 40650

Physical Review B vol.76,no.7論文#075315

Journal of Micromechanics and Microengineering vol.17

New Journal of Physics 9

Physical Review B 27942

New Journal of Physics vol.9電子ジャーナル#436

Journal of Micromechanics and Microengineering vol.17,no.4

J. Micromechanics and Microengineering 40833

J. Micromechanics and Microengineering 40650

Proc. the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28, Montreal 1

Sensors and Actuators A116

ページ: 264-271

Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, Montreal #5

ページ: 1-4

Proc.2004 MHS/Micro-Nano COE International Symposium, Oct.31-Nov.2,Nagoya 1

ページ: 121-125

Sensors and Materials 15-2

ページ: 93-99

Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, Montreal #4

ページ: 1-4

Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, Montreal #9

ページ: 1-1

Proc. the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28, Montreal 1

Journal of Micromechanics and Microengineering 14

ページ: 1462-1467

Sensors and Actuators A114

ページ: 516-520

J.Micromechanics and Microengineering 14

ページ: 1462-1467

Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28,Montreal 1

Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, Montreal #13

ページ: 1-6

Sensors and Actuators A114

ページ: 516-520

Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28,Montreal 1

Sensors and Actuators, A 116

ページ: 264-271

Sensors and Materials 15-2

ページ: 93-99

Proc.2004 MHS/Micro-Nano COE International Symposium, Oct.31-Nov.2,Nagoya 1

ページ: 127-132

Journal of Micromechanics and Microengineering 14

ページ: 1462-1467

Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28,Montreal 1

Proc. 2004 MHS/Micro-Nano COE International Symposium, Oct.31-Nov.2, Nagoya 1

ページ: 127-132

Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28,Montreal 1

Sensors and Actuators, A 114

ページ: 516-520

Proc. the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28, Montreal 1

Proc. 2004 MHS/Micro-Nano COE International Symposium, Oct.31-Nov.2, Nagoya 1

ページ: 121-125

Proc. the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28, Montreal 1

Sensors and Materials 15-1

ページ: 21-35

Sensors and Materials 15-1

ページ: 43-51

Tech.Dig.of JSME ISMME 2003,Tsuchiura 1

ページ: 446-454

Proc.IEEE the 16^<th> Intl.Conference on Micro Electro Mechanical Systems, Kyoto

ページ: 562-565

Proc.the 2003 Intl.Symposium on Micromechatronics and Human Science, Nagoya 1

ページ: 33-38

Sensors and Materials 15-1

ページ: 43-51

Proc.IEEE the 16^<th> Intl.Conference on Micro Electro Mechanical Systems, Kyoto 1

ページ: 562-565

Proc.the 3^<rd> Workshop on Physical Chemistry of Wet Etching of Silicon, Nara

ページ: 43-46

Proc.the 3^<rd> Workshop on Physical Chemistry of Wet Etching of Silicon, Nara

ページ: 78-81

Sensors and Actuators A97-98

ページ: 43-46

Proc.the 3^<rd> Workshop on Physical Chemistry of Wet Etching of Silicon, Nara 1

ページ: 43-46

Sensors and Actuators, A 97-98

ページ: 758-763

Proc.the 3^<rd> Workshop on Physical Chemistry of Wet Etching of Silicon, Nara 1

ページ: 78-81

Tech.Dig.JSME ISMME 2003, Tsuchiura

ページ: 446-454

Proc.2004 MHS/Micro-Nano COE Intl.Symposium, Nagoya

ページ: 121-125

Proc.2004 MHS/Micro-Nano COE Intl.Symposium, Nagoya

ページ: 127-132

Proc.the 2003 Intl.Symposium on Micromechatronics and Human Science, Nagoya

ページ: 33-38