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ONO Shoichi  小野 昭一

ORCIDConnect your ORCID iD *help
Researcher Number 00005232
Affiliation (based on the past Project Information) *help 1986 – 1993: 東北大学, 電気通信研究所, 教授
1985: 東北大学, 電通研, 教授
Review Section/Research Field
Principal Investigator
広領域 / プラズマ理工学
Except Principal Investigator
電子材料工学 / 電子機器工学 / プラズマ理工学
Keywords
Principal Investigator
マイクロ波管 / ペニオトロン / ジャイロトロン / プラズマ加熱 / 自由電子レーザ / Peniotron / Gyrotron / 自由電子レ-ザ / Free electron laser / Plasma heating … More / サイクロトロン共鳴 / ジヤイロトロン / プラズマ / 加熱 / 核融合 / サイクロトロン高速波管 / ミリ波管 / 自由電子レーザー / ECH / Auto-resonance / Cyclotron fast wave tube / Microwave / Plasma diagnostics / Free Electron Laser / Microwave Tube / Cyclotron Resonance / 自由電子レ-ザ- / ジャイロトロ / Microwave tube … More
Except Principal Investigator
CVD / マイクロ波管 / ECRプラズマ / ECR Plasma / シリコン / ヘテロ構造 / MOSFET / SiH_4 / GeH_4 / Si / 共鳴トンネル / 逆スミス・パーセル効果 / レーザー加速器 / ジャイロトロン / ペニオトロン / 自由電子レ-ザ / サイクロトロン共鳴 / プラズマ加熱 / 自由電子レ-ザ- / Gyrotron / Peniotron / Free electron laser / Electron cyclotron resonance / Microwave tube / Plasma heating / ラングミュア吸着 / エッチング遅れ時間 / 完全選択性 / 異方性 / 選択エピタキシ / 超高清浄化 / 窒素添加効果 / Langmuir's Adsorption / Etching Delay Time / Perfect Selectivity / Anisotropy / Selective Epitaxy / Ultraclean / Nitrogen Addition / シリコン-ゲルマニウム / ヘテロデバイス / 超微細デバイス / Silicon / Silicon-Germanium / Heterostructure / Heterodevice / Ultrasmall Device / トンネル効果 / 電界放射 / 冷陰極 / 真空マイクロエレクトロニクス / MOSデバイス / Tunnel effect / Field emission / Cold cathode / Vacuum microelectronics / MOS devices / 原子層成長 / 瞬時加熱 / ゲルマニウム / 集積回路 / エピタキシャル成長 / Atomic Layr Epitaxy / Chemical Vapor Deposition / Flash Heating / Resonant Tunneling / 選択性 / プラズマCVD / エッチング / エピタキシ / 吸着・反応 / ラジカル / イオン照射 / Selectivity / Plasma CVD / Etching / Epitaxy / Adsorption & Reaction / Radical / Ion Irradiation / ISP効果 / 金属回析格子 / サプミリ波レーザー / メカニカルチョッパー式EQスイッチCO_2レーザー / 粒子加速器 / サブミリ波 / Invers Dmith-Purcell Effect / Laser-Driven Linac / Metallic Grating / Submillimeter Wave Laser / EQ-Switched CO_2 Laser / トンネル現象 / 真空IC / 絶縁薄膜 / トンネル現像 / 真空管IC / 分子層エピタキシ / Tunnelling Phenomenon / Resonance Tunnelling / Vacuum ICs / Insulator Film / Vacuum Tube / 逆スミス・パ-セル効果 / レ-ザ-加速器 / 回析格子 / サブミリ波レ-ザ- / 回折格子 / サブミリ波レーザー / Inverse Smith-Purcell effect / Laser-driven linac / Submillimeter wave laser Less
  • Research Projects

    (13 results)
  • Co-Researchers

    (17 People)
  •  A STUDY OF ULTRASMALL DEVICE CONTAINING NANOMETER-CONTROLLED Si-Ge HETEROLAYER

    • Principal Investigator
      MUROTA Junichi
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電子材料工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  Studies of cold cathode for vacuum microelectronics

    • Principal Investigator
      YOKOO Kuniyoshi
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電子機器工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  STUDY ON DEVELOPMENT OF ATOMIC LAYER CONTROLLED CVD APPARATUS FOR FABRICATION PROCESS OF EXTREMELY LARGE SCALE INTEGRATED CIRCUITS

    • Principal Investigator
      MUROTA Junnichi
    • Project Period (FY)
      1992 – 1994
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      電子材料工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  Selectivity inversion in plasma processing at low temperatures

    • Principal Investigator
      MATSUURA Takashi
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      電子材料工学
    • Research Institution
      Tohoku University
  •  Studies on Cyclotron Higher Harmonic Auto-resonant PeniotronPrincipal Investigator

    • Principal Investigator
      ONO Shoich
    • Project Period (FY)
      1991 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      広領域
    • Research Institution
      Tohoku University
  •  DEVELOPMENT OF ANISOTROPIC ETCHING TECHNOLOGY WITH PERFECT SELECTIVITY USING LANGMUIR'S ADSORPTION LAYER

    • Principal Investigator
      MATSUURA Takashi
    • Project Period (FY)
      1991 – 1992
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      電子材料工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  Basic Studies on Auto-Resonant Peniotron Oscillator.

    • Principal Investigator
      KUNIYOSHI Yokoo
    • Project Period (FY)
      1989 – 1990
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Tohoku University
  •  Studies on Frequency Tunable High Power Submillimeter Wave Source.Principal Investigator

    • Principal Investigator
      ONO Shoichi
    • Project Period (FY)
      1988 – 1990
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      広領域
    • Research Institution
      Tohoku University
  •  The Inverse Smith-Purcell Effect at Submillimeter Wavelengths

    • Principal Investigator
      MIZUNO Koji
    • Project Period (FY)
      1988 – 1989
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電子機器工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  Basic studies of the vacuum ICs

    • Principal Investigator
      YOKOO Kuniyoshi
    • Project Period (FY)
      1987 – 1988
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電子材料工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  Development of a 140GHz 3rd cyclotron harmonic gyro-peniotron oscillatorPrincipal Investigator

    • Principal Investigator
      ONO Shoichi
    • Project Period (FY)
      1987 – 1988
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      プラズマ理工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  The inverse Smith-Purcell effect in the subillimeter region

    • Principal Investigator
      MIZUNO Koji
    • Project Period (FY)
      1986 – 1987
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電子機器工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  ジャイロトロンの超高周波数化とジャイロ・ペニオトロン動作Principal Investigator

    • Principal Investigator
      小野 昭一
    • Project Period (FY)
      1985
    • Research Category
      Grant-in-Aid for Fusion Research
    • Research Institution
      Tohoku University
  • 1.  KUNIYOSHI Yokoo (60005428)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 0 results
  • 2.  SATO Nobuyuki (10178759)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 0 results
  • 3.  MUROTA Junichi (70182144)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 0 results
  • 4.  MATSUURA Takashi (60181690)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 0 results
  • 5.  BAE Jongsock (20165525)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 6.  MIZUNO Koji (30005326)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 7.  TERUMICHI Yasushi (50025384)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 8.  OHMI Tadahiro (20016463)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 9.  HATAKEYAMA Rikizo (00108474)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  SHIMAWAKI Hidetaka (80241587)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  SATO Noriyoshi (40005252)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  TACHIKAWA Toshiaki (00020206)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  IDEHARA Toshitaka (80020197)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  SATO Taketoshi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  NAKAMURA Naoto
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  KUROKAWA Harushige
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 17.  BAE Jongsuck
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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