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ONO Shoichi
小野 昭一
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Researcher Number
00005232
Affiliation (based on the past Project Information)
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1986 – 1993: 東北大学, 電気通信研究所, 教授
1985: 東北大学, 電通研, 教授
Review Section/Research Field
Principal Investigator
広領域
/
プラズマ理工学
Except Principal Investigator
電子材料工学
/
電子機器工学
/
プラズマ理工学
Keywords
Principal Investigator
マイクロ波管 / ペニオトロン / ジャイロトロン / プラズマ加熱 / 自由電子レーザ / Peniotron / Gyrotron / 自由電子レ-ザ / Free electron laser / Plasma heating
…
More
/ サイクロトロン共鳴 / ジヤイロトロン / プラズマ / 加熱 / 核融合 / サイクロトロン高速波管 / ミリ波管 / 自由電子レーザー / ECH / Auto-resonance / Cyclotron fast wave tube / Microwave / Plasma diagnostics / Free Electron Laser / Microwave Tube / Cyclotron Resonance / 自由電子レ-ザ- / ジャイロトロ / Microwave tube
…
More
Except Principal Investigator
CVD / マイクロ波管 / ECRプラズマ / ECR Plasma / シリコン / ヘテロ構造 / MOSFET / SiH_4 / GeH_4 / Si / 共鳴トンネル / 逆スミス・パーセル効果 / レーザー加速器 / ジャイロトロン / ペニオトロン / 自由電子レ-ザ / サイクロトロン共鳴 / プラズマ加熱 / 自由電子レ-ザ- / Gyrotron / Peniotron / Free electron laser / Electron cyclotron resonance / Microwave tube / Plasma heating / ラングミュア吸着 / エッチング遅れ時間 / 完全選択性 / 異方性 / 選択エピタキシ / 超高清浄化 / 窒素添加効果 / Langmuir's Adsorption / Etching Delay Time / Perfect Selectivity / Anisotropy / Selective Epitaxy / Ultraclean / Nitrogen Addition / シリコン-ゲルマニウム / ヘテロデバイス / 超微細デバイス / Silicon / Silicon-Germanium / Heterostructure / Heterodevice / Ultrasmall Device / トンネル効果 / 電界放射 / 冷陰極 / 真空マイクロエレクトロニクス / MOSデバイス / Tunnel effect / Field emission / Cold cathode / Vacuum microelectronics / MOS devices / 原子層成長 / 瞬時加熱 / ゲルマニウム / 集積回路 / エピタキシャル成長 / Atomic Layr Epitaxy / Chemical Vapor Deposition / Flash Heating / Resonant Tunneling / 選択性 / プラズマCVD / エッチング / エピタキシ / 吸着・反応 / ラジカル / イオン照射 / Selectivity / Plasma CVD / Etching / Epitaxy / Adsorption & Reaction / Radical / Ion Irradiation / ISP効果 / 金属回析格子 / サプミリ波レーザー / メカニカルチョッパー式EQスイッチCO_2レーザー / 粒子加速器 / サブミリ波 / Invers Dmith-Purcell Effect / Laser-Driven Linac / Metallic Grating / Submillimeter Wave Laser / EQ-Switched CO_2 Laser / トンネル現象 / 真空IC / 絶縁薄膜 / トンネル現像 / 真空管IC / 分子層エピタキシ / Tunnelling Phenomenon / Resonance Tunnelling / Vacuum ICs / Insulator Film / Vacuum Tube / 逆スミス・パ-セル効果 / レ-ザ-加速器 / 回析格子 / サブミリ波レ-ザ- / 回折格子 / サブミリ波レーザー / Inverse Smith-Purcell effect / Laser-driven linac / Submillimeter wave laser
Less
Research Projects
(
13
results)
Co-Researchers
(
17
People)
Project Start Year (Newest)
Project Start Year (Oldest)
A STUDY OF ULTRASMALL DEVICE CONTAINING NANOMETER-CONTROLLED Si-Ge HETEROLAYER
Principal Investigator
MUROTA Junichi
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子材料工学
Research Institution
TOHOKU UNIVERSITY
Studies of cold cathode for vacuum microelectronics
Principal Investigator
YOKOO Kuniyoshi
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子機器工学
Research Institution
TOHOKU UNIVERSITY
STUDY ON DEVELOPMENT OF ATOMIC LAYER CONTROLLED CVD APPARATUS FOR FABRICATION PROCESS OF EXTREMELY LARGE SCALE INTEGRATED CIRCUITS
Principal Investigator
MUROTA Junnichi
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
電子材料工学
Research Institution
TOHOKU UNIVERSITY
Selectivity inversion in plasma processing at low temperatures
Principal Investigator
MATSUURA Takashi
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電子材料工学
Research Institution
Tohoku University
Studies on Cyclotron Higher Harmonic Auto-resonant Peniotron
Principal Investigator
Principal Investigator
ONO Shoich
Project Period (FY)
1991 – 1993
Research Category
Grant-in-Aid for General Scientific Research (A)
Research Field
広領域
Research Institution
Tohoku University
DEVELOPMENT OF ANISOTROPIC ETCHING TECHNOLOGY WITH PERFECT SELECTIVITY USING LANGMUIR'S ADSORPTION LAYER
Principal Investigator
MATSUURA Takashi
Project Period (FY)
1991 – 1992
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
電子材料工学
Research Institution
TOHOKU UNIVERSITY
Basic Studies on Auto-Resonant Peniotron Oscillator.
Principal Investigator
KUNIYOSHI Yokoo
Project Period (FY)
1989 – 1990
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
プラズマ理工学
Research Institution
Tohoku University
Studies on Frequency Tunable High Power Submillimeter Wave Source.
Principal Investigator
Principal Investigator
ONO Shoichi
Project Period (FY)
1988 – 1990
Research Category
Grant-in-Aid for General Scientific Research (A)
Research Field
広領域
Research Institution
Tohoku University
The Inverse Smith-Purcell Effect at Submillimeter Wavelengths
Principal Investigator
MIZUNO Koji
Project Period (FY)
1988 – 1989
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子機器工学
Research Institution
TOHOKU UNIVERSITY
Basic studies of the vacuum ICs
Principal Investigator
YOKOO Kuniyoshi
Project Period (FY)
1987 – 1988
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子材料工学
Research Institution
TOHOKU UNIVERSITY
Development of a 140GHz 3rd cyclotron harmonic gyro-peniotron oscillator
Principal Investigator
Principal Investigator
ONO Shoichi
Project Period (FY)
1987 – 1988
Research Category
Grant-in-Aid for Developmental Scientific Research
Research Field
プラズマ理工学
Research Institution
TOHOKU UNIVERSITY
The inverse Smith-Purcell effect in the subillimeter region
Principal Investigator
MIZUNO Koji
Project Period (FY)
1986 – 1987
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子機器工学
Research Institution
TOHOKU UNIVERSITY
ジャイロトロンの超高周波数化とジャイロ・ペニオトロン動作
Principal Investigator
Principal Investigator
小野 昭一
Project Period (FY)
1985
Research Category
Grant-in-Aid for Fusion Research
Research Institution
Tohoku University
# of Projects (Dsc)
# of Projects (Asc)
1.
KUNIYOSHI Yokoo
(60005428)
# of Collaborated Projects:
6 results
# of Collaborated Products:
0 results
2.
SATO Nobuyuki
(10178759)
# of Collaborated Projects:
6 results
# of Collaborated Products:
0 results
3.
MUROTA Junichi
(70182144)
# of Collaborated Projects:
5 results
# of Collaborated Products:
0 results
4.
MATSUURA Takashi
(60181690)
# of Collaborated Projects:
4 results
# of Collaborated Products:
0 results
5.
BAE Jongsock
(20165525)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
6.
MIZUNO Koji
(30005326)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
7.
TERUMICHI Yasushi
(50025384)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
8.
OHMI Tadahiro
(20016463)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
9.
HATAKEYAMA Rikizo
(00108474)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
10.
SHIMAWAKI Hidetaka
(80241587)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
11.
SATO Noriyoshi
(40005252)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
12.
TACHIKAWA Toshiaki
(00020206)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
13.
IDEHARA Toshitaka
(80020197)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
14.
SATO Taketoshi
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
15.
NAKAMURA Naoto
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
16.
KUROKAWA Harushige
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
17.
BAE Jongsuck
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
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