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ONO Shoichi
小野 昭一
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Researcher Number
00005232
Affiliation (based on the past Project Information)
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1986 – 1993 : 東北大学, 電気通信研究所, 教授
1985 : 東北大学, 電通研, 教授
Review Section/Research Field
Principal Investigator
広領域
/
プラズマ理工学
Except Principal Investigator
電子材料工学
/
電子機器工学
/
プラズマ理工学
Keywords
Principal Investigator
マイクロ波管 / ジャイロトロン / Gyrotron / プラズマ加熱 / ペニオトロン / 自由電子レーザ / Peniotron / 自由電子レ-ザ / サイクロトロン共鳴 / Free electron laser
…
More
/ Plasma heating / ジヤイロトロン / Plasma diagnostics / Cyclotron fast wave tube / Microwave / 核融合 / ECH / Microwave Tube / 自由電子レ-ザ- / Cyclotron Resonance / Free Electron Laser / Microwave tube / 加熱 / 自由電子レーザー / Auto-resonance / プラズマ / ジャイロトロ / サイクロトロン高速波管 / ミリ波管
…
More
Except Principal Investigator
CVD / SiH_4 / ECR Plasma / 逆スミス・パーセル効果 / レーザー加速器 / GeH_4 / ECRプラズマ / Si / ヘテロ構造 / MOSFET / マイクロ波管 / シリコン / 共鳴トンネル / Selective Epitaxy / Tunnelling Phenomenon / エッチング遅れ時間 / Gyrotron / Chemical Vapor Deposition / Langmuir's Adsorption / 選択エピタキシ / ラングミュア吸着 / 完全選択性 / トンネル効果 / Resonant Tunneling / サブミリ波レ-ザ- / Ultraclean / Electron cyclotron resonance / サイクロトロン共鳴 / Vacuum Tube / サブミリ波 / 粒子加速器 / Invers Dmith-Purcell Effect / Resonance Tunnelling / 超高清浄化 / Silicon-Germanium / 原子層成長 / Nitrogen Addition / メカニカルチョッパー式EQスイッチCO_2レーザー / プラズマ加熱 / Cold cathode / サブミリ波レーザー / Vacuum ICs / MOS devices / Metallic Grating / シリコン-ゲルマニウム / 自由電子レ-ザ- / ISP効果 / ペニオトロン / レ-ザ-加速器 / Anisotropy / イオン照射 / Atomic Layr Epitaxy / Silicon / 窒素添加効果 / Free electron laser / 瞬時加熱 / Laser-driven linac / エピタキシ / Microwave tube / Tunnel effect / Plasma heating / ヘテロデバイス / EQ-Switched CO_2 Laser / Etching / Etching Delay Time / 冷陰極 / Field emission / プラズマCVD / 吸着・反応 / 分子層エピタキシ / Vacuum microelectronics / 電界放射 / Insulator Film / Inverse Smith-Purcell effect / Laser-Driven Linac / Ion Irradiation / サプミリ波レーザー / 選択性 / Epitaxy / エピタキシャル成長 / 逆スミス・パ-セル効果 / Perfect Selectivity / トンネル現象 / 集積回路 / Adsorption & Reaction / Selectivity / 回折格子 / ジャイロトロン / ラジカル / Submillimeter Wave Laser / 真空管IC / 自由電子レ-ザ / ゲルマニウム / Ultrasmall Device / 絶縁薄膜 / Plasma CVD / Flash Heating / 超微細デバイス / 回析格子 / Heterodevice / Heterostructure / 金属回析格子 / Submillimeter wave laser / MOSデバイス / エッチング / 異方性 / Radical / トンネル現像 / 真空IC / Peniotron / 真空マイクロエレクトロニクス
Less
Research Projects
(
13
results)
Co-Researchers
(
17
People)
Project Start Year(Newest)
Project Start Year(Oldest)
A STUDY OF ULTRASMALL DEVICE CONTAINING NANOMETER-CONTROLLED Si-Ge HETEROLAYER
Principal Investigator
MUROTA Junichi
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子材料工学
Research Institution
TOHOKU UNIVERSITY
Studies of cold cathode for vacuum microelectronics
Principal Investigator
YOKOO Kuniyoshi
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子機器工学
Research Institution
TOHOKU UNIVERSITY
STUDY ON DEVELOPMENT OF ATOMIC LAYER CONTROLLED CVD APPARATUS FOR FABRICATION PROCESS OF EXTREMELY LARGE SCALE INTEGRATED CIRCUITS
Principal Investigator
MUROTA Junnichi
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
電子材料工学
Research Institution
TOHOKU UNIVERSITY
Selectivity inversion in plasma processing at low temperatures
Principal Investigator
MATSUURA Takashi
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電子材料工学
Research Institution
Tohoku University
Studies on Cyclotron Higher Harmonic Auto-resonant Peniotron
Principal Investigator
Principal Investigator
ONO Shoich
Project Period (FY)
1991 – 1993
Research Category
Grant-in-Aid for General Scientific Research (A)
Research Field
広領域
Research Institution
Tohoku University
DEVELOPMENT OF ANISOTROPIC ETCHING TECHNOLOGY WITH PERFECT SELECTIVITY USING LANGMUIR'S ADSORPTION LAYER
Principal Investigator
MATSUURA Takashi
Project Period (FY)
1991 – 1992
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
電子材料工学
Research Institution
TOHOKU UNIVERSITY
Basic Studies on Auto-Resonant Peniotron Oscillator.
Principal Investigator
KUNIYOSHI Yokoo
Project Period (FY)
1989 – 1990
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
プラズマ理工学
Research Institution
Tohoku University
Studies on Frequency Tunable High Power Submillimeter Wave Source.
Principal Investigator
Principal Investigator
ONO Shoichi
Project Period (FY)
1988 – 1990
Research Category
Grant-in-Aid for General Scientific Research (A)
Research Field
広領域
Research Institution
Tohoku University
The Inverse Smith-Purcell Effect at Submillimeter Wavelengths
Principal Investigator
MIZUNO Koji
Project Period (FY)
1988 – 1989
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子機器工学
Research Institution
TOHOKU UNIVERSITY
Basic studies of the vacuum ICs
Principal Investigator
YOKOO Kuniyoshi
Project Period (FY)
1987 – 1988
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子材料工学
Research Institution
TOHOKU UNIVERSITY
Development of a 140GHz 3rd cyclotron harmonic gyro-peniotron oscillator
Principal Investigator
Principal Investigator
ONO Shoichi
Project Period (FY)
1987 – 1988
Research Category
Grant-in-Aid for Developmental Scientific Research
Research Field
プラズマ理工学
Research Institution
TOHOKU UNIVERSITY
The inverse Smith-Purcell effect in the subillimeter region
Principal Investigator
MIZUNO Koji
Project Period (FY)
1986 – 1987
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子機器工学
Research Institution
TOHOKU UNIVERSITY
ジャイロトロンの超高周波数化とジャイロ・ペニオトロン動作
Principal Investigator
Principal Investigator
小野 昭一
Project Period (FY)
1985
Research Category
Grant-in-Aid for Fusion Research
Research Institution
Tohoku University
# of Projects (Dsc)
# of Projects (Asc)
1.
KUNIYOSHI Yokoo
(60005428)
# of Collaborated Projects :
6results
# of Collaborated Products :
0results
2.
SATO Nobuyuki
(10178759)
# of Collaborated Projects :
6results
# of Collaborated Products :
0results
3.
MUROTA Junichi
(70182144)
# of Collaborated Projects :
5results
# of Collaborated Products :
0results
4.
MATSUURA Takashi
(60181690)
# of Collaborated Projects :
4results
# of Collaborated Products :
0results
5.
BAE Jongsock
(20165525)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
6.
MIZUNO Koji
(30005326)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
7.
TERUMICHI Yasushi
(50025384)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
8.
OHMI Tadahiro
(20016463)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
9.
HATAKEYAMA Rikizo
(00108474)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
10.
SHIMAWAKI Hidetaka
(80241587)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
11.
SATO Noriyoshi
(40005252)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
12.
TACHIKAWA Toshiaki
(00020206)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
13.
IDEHARA Toshitaka
(80020197)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
14.
SATO Taketoshi
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
15.
NAKAMURA Naoto
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
16.
KUROKAWA Harushige
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
17.
BAE Jongsuck
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
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