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MORITA Shinzo
森田 慎三
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Researcher Number
00076548
Affiliation
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1991 : Nagoya University, Center for Co-operative Research in Advanced Science and Technology, 先端技術共同研究センター, 助教授
1990 : 名古屋大学先端技術共同研究センター, 助教授
1988 – 1989 : Dept. of Engineering, Nagoya University, Associate Professor, 工学部, 助教授
1986 : 名古屋大学, 工学部, 助教授
Review Section/Research Field
Principal Investigator
機械工作
Except Principal Investigator
工業物理化学
/
電子材料工学
Keywords
Principal Investigator
電子線リングラフィ立体加工法 / plasma polymerized styrene / 電子線リソグラフィ立体加工法 / Effect of carrier gas / Plasma polymerized alpha-methyle-styrene / three dementional machining / キセリヤ-ガス効果 / プラズマ重合スチレンネガレジスト / Plasma polymerized resist / プラズマ重合レジスト
…
More
/ キャリヤ-ガス効果 / Electronic static motor / 静電モ-タ-加工 / プラズマ重合αメチルスチレンネガレジスト / サブミクロンパタ-ン加工 / Submicron pattern fabrication / キャリヤガス効果 / 静電モ-タ加工
…
More
Except Principal Investigator
Laser interferometer / プラズマ分子工学 / X線源 / アラインメント / X-ray resist / プラズマ診断 / プラズマ重合装置 / ドライプロセス / X線リソグラフィ / プラズマプロセシング / X-ray source / プラズマ重合 / X-ray lithography / 低温プラズマ / レーザ干渉膜厚計 / 自己現像 / プラズマ反応 / Dry process / 二重双光路レーザ干渉膜厚計 G値 / Plasma polymerization / X線レジスト
Less
Research Projects
(
3
results)
Co-Researchers
(
12
People)
Project Start Year(Newest)
Project Start Year(Oldest)
Development and application of the three dimentional fabrication method of micro-mechanical device using plasma polymerized resist
Principal Investigator
Principal Investigator
MORITA Shinzo
Project Period (FY)
1989 – 1991
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
機械工作
Research Institution
Nagoya University
プラズマプロセシングによる高性能材料合成に関する研究
Principal Investigator
長田 義仁
Project Period (FY)
1986
Research Category
Grant-in-Aid for Co-operative Research (B)
Research Field
工業物理化学
Research Institution
Ibaraki University
Research on Resist for X-ray and E-B Total Dry Vacuum Lithography
Principal Investigator
HATTORI Shuzo
Project Period (FY)
1984 – 1986
Research Category
Grant-in-Aid for General Scientific Research (A)
Research Field
電子材料工学
Research Institution
Nagoya University
# of Projects (Dsc)
# of Projects (Asc)
1.
HATTORI Shuzo
(10023003)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
2.
長田 義仁
(60007804)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
3.
明石 和夫
(00013095)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
4.
鯉沼 秀臣
(70011187)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
5.
岡崎 幸子
(30053523)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
6.
津田 穣
(90009506)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
7.
HANE Kazuhiro
(50164893)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
8.
松田 文夫
(60109303)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
9.
UCHIKAWA Yoshiki
(20023260)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
10.
MARUSE Susumu
(20022981)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
11.
IEDA Masayuki
(50022984)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
12.
UCHIDA Yoshiyuki
(20023187)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
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