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Hane Kazuhiro  羽根 一博

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HANE Kazuhiro  羽根 一博

KAZUHIRO Hane  羽根 一博

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Researcher Number 50164893
Other IDs
External Links
Affiliation (Current) 2025: 東北大学, 未来科学技術共同研究センター, 特任教授
Affiliation (based on the past Project Information) *help 2020 – 2021: 東北大学, 未来科学技術共同研究センター, 教授(特任)
2015 – 2019: 東北大学, 工学研究科, 教授
2012 – 2015: 東北大学, 工学(系)研究科(研究院), 教授
2012 – 2013: 東北大学, 大学院工学研究科, 教授
2007 – 2011: Tohoku University, Graduate School of Engineering, Professor … More
2008: Tohoku University, 大学院工学研究科, 教授
2006: Tohoku University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授
1997 – 2005: Tohoku Univ., Dept.Mechatronics, Professor, 大学院・工学研究科, 教授
1994 – 2000: TOHOKU UNIVERSITY,FACULTY OF ENGINEERING,PROFESSOR, 工学部, 教授
1997: 東北大学, 大学院・工学研究科/教授
1995: 東北大学, 工学科, 教授
1994: Tohoku Univ., Facalty of Engineering, Prof., 工学部, 教授
1993: NAGOYA UNIVERSITY, FACULTY OF ENGINEERING, ASSOCIATE PROFESSOR, 工学部・電子工学科, 助教授
1993: 名古屋大学工学部, 電気工学科, 助教授
1990 – 1993: 名古屋大学, 工学部, 助教授
1992: 名古屋大学工学部, 電子機械工学科, 助教授
1990 – 1992: 名古屋大学, 工学部・電子機械工学科, 助教授
1989: 名古屋大学, 工学部, 助手
1989: 名古屋大学工学部, 電子機械工学科, 助手
1986: Research Associate, Faculty of Engineering, Nagoya University, 工学部, 助手 Less
Review Section/Research Field
Principal Investigator
Electron device/Electronic equipment / Science and Engineering / Intelligent mechanics/Mechanical systems / 機械工作・生産工学 / Medical systems / 電子デバイス・機器工学 / Measurement engineering / 材料力学 / Applied optics/Quantum optical engineering / Production engineering/Processing studies … More
Except Principal Investigator
… More Intelligent mechanics/Mechanical systems / 電子デバイス・機器工学 / Dynamics/Control / Electron device/Electronic equipment / Measurement engineering / 電子材料工学 / 機械力学・制御工学 / Science and Engineering / Applied physics, general / 機械工作・生産工学 / 機械工作 / Thin film/Surface and interfacial physical properties / Biomedical engineering/Biological material science / 複合化集積システム / 計測・制御工学 / 電子機器工学 / Applied physics, general Less
Keywords
Principal Investigator
マイクロマシニング / シリコン / マイクロマシン / MEMS / マイクロアクチュエータ / Micromachining / サブ波長格子 / エッチング / ナノメートル / ナノメートル加工 … More / リソグラフィ / エンコーダ / MEMS / フォトニック結晶 / 光通信 / 電子線描画 / 光学素子 / ポリマー / モールド / 近接場光 / 表面マイクロマシニング / プローブアレイ / プローブ技術 / プローブ / AFM / 高密度メモリ / センシングデバイス / レーザー / スキャナ / マイクロミラー / センシング / 破壊寿命 / 微小電気機械システム / 走査ミラー / 緑内障 / 網膜 / スマートグラス / 検査・診断システム / Optical switch / Filter / Micro-actuator / Photonic crystal / 光スイッチ / フィルタ / Lithography / Sensor / Robot / Silicon / Grating / Encoder / 回析格子 / 精密機器 / 光エンコーダ / 光リソグラフィ / 非平面リソグラフィ / ロボット用エンコーダ / ロータリーエンコーダ / 光計測 / センサ / ロボット / グレイティング / NANO-OPTICS / ETCHING / SUB-WAVELENGTH / MICROMACHINING / ANTI-REFLECTION / GRATING / 無反射表面 / 高アスペクト比エッチング / 回折格子 / 微細格子 / モスアイ構造 / 反射防止 / グレーティング / ナノ光学 / サブ波長 / 無反射 / グレーディング / Scanning probe microscopy / Charge deposition / High density memory / Atomic force microscopy / 分極反転 / 原子分子操作 / 原子分子加工 / 超高密度メモリー / 原子間力顕微鏡(AFM) / 誘電体薄膜 / 静電容量 / ディスクメモリー / 原子間力顕微鏡 / 電荷畜積 / 走査型プローブ顕微鏡 / 電荷蓄積 / Optical Pattern Generation / Optical Encoder / Non-Planar Lithography / Computer Generated Hologram / プラズマプロセス / 回路格子パターン / 立体加工 / 微細加工 / 計算機ホログラム / レーザ露光 / ホログラフィ / 光露光 / 非平面露光 / 計算機合成ホログラム / Adhesive Force / Young's Modulus / Micro-machining / Atomic force Microscope / Micro-machine / ナノメ-トル加工 / 非破壊検査 / トンネル顕微鏡 / アトミックフォ-ス顕微鏡 / 吸着力 / ヤング率 / マイクロマシーニング / アトミックフォース顕微鏡 / 光エレクトロニクス / マイクロリング / 電気光学効果 / 光集積回路 / ウエハ接合 / GaN導波路 / シリコンフォトニクス / PN結合 / 共鳴格子 / PN接合 / シリコン細線 / シリコン発光 / シリコンデバイス / 光集積デバイス / 窒化物半導体 / 集積化 / 光デバイス / フォトニック構造 / 可変フィルタ / くし型アクチュエータ / シリコンMEMS / 波長選択フィルタ / ナノインプリント / シリコンマイクロマシニング / サブミクロン構造 / モールディング / ナノマシニング / ナノ構造 / マイクロプローブ / メカトロニクス / カンチレバー / 光導波路 / アモルファスSi / ねじれ振動子 / ニアフィールド / 機械共振 … More
Except Principal Investigator
マイクロマシン / 光ファイバ / 光熱効果 / マイクロマシニング / MEMS / Micromachine / Photothermal Effect / Micromachining / アクチュエータ / 光導波路 / 並列処理 / Optical Fiber / 光ファイバー / Laser Diode / 形状記憶合金 / エッチング / 微細加工 / Optical fiber / カーボンナノチューブ / Actuator / Optical Interconnection / Wafer Level Integration / Parallel Processing / マイクロバンプ / ウエーハ張り合わせ技術 / システムオンチップ / ウエーハレベルインテグレーション / ウェーハ張り合わせ技術 / LSI集積化技術 / 半導体技術 / 光インターコネクション / システム オン チップ / ウェーハレベルインテグレーション / ナノマシニング / レーザ駆動 / quartz core cantilever / optical sensor / 石英コア振動子 / 光学センサ / 3次元積層技術 / 密度計 / Optical Actuator / 光学式アクチュエータ / レ-ザ / 光デバイス / マイクロ・ナノデバイス / 中性粒子ビーム / 集積化 / 高周波スパッタリング / マグネトロンスパッタリング / Lifetime / Level Excitation Cross Section / Emission Cross Section / Electron Collision / Non-Emissive Radical / <SiH_4> / Plasma Processing / LIF法 / 寿命 / 生成断面積 / 発光断面積 / 電子衝突 / ラジカル非発光種 / Si【H_4】 / プラズマプロセシング / nanocolumn / fin-type vertical MOSFET / low-k film / gate electrode etching / silicon oxynitride / negative ion / etching / neutral beam / 薄膜形成 / シリコン酸窒膜 / ナノ加工 / 半導体デバイス / エッチングダメージ / 起立ゲート型トランジスタ / 高誘電率膜 / 有機分子デバイス / 表面改質 / ナノカラム / フィン型MOSFET / 低誘電率絶縁膜 / ゲート電極加工 / シリコン酸窒化膜 / 負イオン / High Speed Data Transfer / Parallel Processing System / Optical Wave Guide / Wafer Bonding / Three-Dimensional Integration / Multiport Shared Memory / Three-Dimensionally Stacked Processor / ウェーハ張り合わせ / 高速データ転送 / 並列処理システム / ウェーハ貼り合わせ / 三次元積層化技術 / マルチポート共有メモリ / 三次元積層型プロセッサ / Tunable wavelength filter / Variable optical attenuator / Photochromism phenomenon / Light-light control / Optical communication devices / Micro-machining / 光-光制御デバイス / フォトクロミック材料 / フォトクロミズム / 光通信用デバイス / 可変波長フィルタ / 可変光減衰器 / フォトクロミズム現象 / 光-光制御 / 光通信デバイス / Endothelial cell / Tensile loading / Hydrostatic pressure / Shear stress / Response mechanism to mechanical stimuli / Actin filament / Integrin / Biomechanics / 局所ひずみ / FAT / GFP / 伸張負荷 / 細胞骨格 / 内皮細胞 / 引張負荷 / 静水圧負荷 / せん断応力 / 力学的応答機構 / アクチンフィラメント / インテグリン / バイオメカニクス / Plasma process / Etching / Lathe / 旋盤 / プラズマ加工 / 施盤 / Resonator / Data storage / Sensor / Nanomachine / 近接場光学顕微鏡 / 近接場光学 / アクチュエーター / 電界放出エミッタ / 静電アクチュエータ / 圧電アクチュエータ / 走査型プローブ顕微鏡 / 高密度記録 / 振動子 / データストレージ / センサ / ナノマシン / Light Wave Guide / Optical Device / アクチュータ / grating / encoder / resonant cavity / standing wave / interferometer / stacking structure / integration / photodiode / 直接接合 / 回析格子 / エンコーダ / 共振構造 / 定在波 / 干渉計 / 積層構造 / フォトダイオード / Large Scale Integration Technology / Semiconductor Technology / Micro-Bump / Wafer Bonding Technology / System on Chip / Optical Waveguide / micromachining / grating fiber / return Jight / resonapt characteristics / quartz core vibrator / 石英コア限動子 / グレーティングファイバ / 振動検出 / 戻り光 / 共振特性 / LSI / Semiconductor / Memory / System on a Chip / Three Dimensional Integration / メモリー / 3次元集積化技術 / micromachine / laser drive / three-dimensional laserbeam lithography / lasermicromanipulation / optical trap / レーザマイクロマニビュレーション / 光造形法 / レーザマイクロマニピュレーション / 光トラップ / Nanomachining / Nano pattern transfer / Microprobe for NSOM / Capacitive AFM probe / Precise micromachining / Gyroscope / Accelerometer / Highly sensitive pressure sensor / NSOM用プローブ / ナノパターン転写 / NMOS用プローブ / 容量型AFMプローブ / 高精度マイクロマシニング / ジャイロスコープ / 加速度センサ / 高感度圧力センサ / Wavelength / Laser Drive / Optical Filter / フィルター / 波長 / フィルタ / WAFER BONDING / 3D INTEGRATION / PARALLEL PROCESSING / NEURAL NETWORK / ASSOCIATION / LEARNING / REAL-TIME / IMAGE PROCESSING / 三次元積層技術 / 張り合わせ技術 / ニューラルネットワーク / 連想機能 / 学習機能 / リアルタイム / 視覚情報処理 / Ion sputtering / Shape memory alloy / Mictomachine / Optical actuator / イオンスパッタリング / 光学式アクチュエーター / ion sputtering apparatus / in-situ deposition thickness measurement / サイズ効果 / イオンスパッタ装置 / 動的膜厚測定 / ULSI / Deca-nano device / Device Simulation / Parallel Monte Carlo Analysis / Bus Bottle Neck / High Speed parallel Computing System / Three Dimensional Integrated Shard Memory / Three Dimensional Integration Technology / 大規模集積回路 / 極微細半導体素子 / デバイスシミュレーション / 並列モンテカルロ解析 / バスボトルネック / 超高速並列処理システム / 3次元集積型実共有メモリ / Viscosity Sensor / Density Sensor / Pressure Sensor / Photothermal Vibration / 粘度計 / 圧力センサー / Micro Gripper / Micro Vibrator / Microcantilver / Microactuator / TUNGSTEN CARBIDE FILM / TITANIUM NITRIDE FILM / FUNCTIONALLY GRADIENT FILM / FUNCTIONAL COATING / MAGNETRON SPUTTERING / RADIO FREQUENCY SPUTTERING / RADIATED SPUTTERING / TiN層 / 傾斜機能 / W膜 / TiN膜 / 傾斜機能膜 / 機能性コーティング / 反応性スパッタリング / ciliary movement / atomic force microscope / PVDF thin film / biomimetic actuator / PVDF薄膜 / 繊毛運動 / 原子間力顕微鏡 / PVOF薄膜 / バイオミメティックアクチュエータ / Liquid Density / Microcantilever / Optical Sensor / Microsensor / ファイバセンサ / 光熱振動 / Exchange-coupling / Magneto-striction / Multilayr / Magnetic Anisotropy / Super Lattice / Magneto-optics / 磁歪定数 / 磁気弾性異方性 / 磁性多層膜 / 磁歪 / 磁気異方性 / 交換結合膜 / 多層膜 / 人工格子膜 / 磁気光学効果 / 光磁気記録 / Water Flow Pump / Micro Cantilever / Shape-memory Alloy / Micro Vacuum Pump / 液中振動 / 光熟効果 / レーザ真空計 / 真空ポンプ / 水流ポンプ / 超小型片持ばり / レーザダイオード / 超小型真空ポンプ / Vacuum gauge / Laser / Photoacoustic effect / Photothermal effect / 真空計 / 光音響効果 / フォトサ-マル効果 / Electronic static motor / Effect of carrier gas / Submicron pattern fabrication / Plasma polymerized alpha-methyle-styrene / plasma polymerized styrene / three dementional machining / Plasma polymerized resist / キャリヤガス効果 / 電子線リングラフィ立体加工法 / 静電モ-タ加工 / キセリヤ-ガス効果 / 静電モ-タ-加工 / キャリヤ-ガス効果 / サブミクロンパタ-ン加工 / プラズマ重合αメチルスチレンネガレジスト / プラズマ重合スチレンネガレジスト / 電子線リソグラフィ立体加工法 / プラズマ重合レジスト / シリコンフォトニクス / 光回路 / 光電子集積システム・オン・チップ / シリコン貫通配線 / スーパーチップ / 光電子集積化 / 三次元集積化 / セルフアセンブリー / グラフォアセンブリー / 低電圧駆動 / 温度補償 / 静電駆動 / マイクロミラー / MEMSアクチュエータ / 時間変調 / オフセット / 高精度化 / せん断ゲージ / ひずみゲージ / 回転角センサ / 光スキャナ / マイクロアクチュエータ / 計測工学 / 光スイッチ / マイクロマシンプローブ / Bow-tieアンテナ型 / 表面プラズモン / Bow-tieアンテナ / 近接場光 / Pbセンター / 低ダメージエッチング / フェリチン / 量子ドット / フォトリソグラフィー / 先球ファイバ / 光減衰器 / セルフアライメント / フォトリソグラフィ / 追加工 / 蓄積電荷量 / フォトン / イオンエネルギー / オンウエハーモニタリング / モニタリング / 薄膜堆積 / 側壁導電性 / 電子エネルギー分布 / イオンエネルギー分布 / センサー / 光照射損傷 / プラズマプロセス / オンウエハモニタリング / 共鳴二光子イオン化分光 / 原子線散乱 / Mie粒子 / 分子モーター / 一分子計測 / ニアフィールド光学顕微鏡 / レーザートラッピング / 原子スピン偏極 / エバネッセント波の量子化 / トロポニンC / 1分子蛍光測定 / 全反射顕微鏡 / コントラスト特性 / 金属化カンチレバー / フォトン力学 / エバネッセント波の第二量子化 / 光ポンピング原子スピン偏極 / エバネッセントフォトン / アクチン / ミオシン / 電場増強効果 / 近接場振動分光 / 放射圧 / シリコン / マイクロ部品 / メカノケミカル加工 / 超音波加工 / WC / 傾斜機能コーティング / スパッタリング Less
  • Research Projects

    (56 results)
  • Research Products

    (302 results)
  • Co-Researchers

    (65 People)
  •  Study of wide-angle scanning micro mirror for self-driving and displayPrincipal Investigator

    • Principal Investigator
      Hane Kazuhiro
    • Project Period (FY)
      2017 – 2020
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Tohoku University
  •  Imaging retina using smart glassesPrincipal Investigator

    • Principal Investigator
      Hane Kazuhiro
    • Project Period (FY)
      2015 – 2017
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Medical systems
    • Research Institution
      Tohoku University
  •  Study of optical circuit platform for GaN/Si hybrid-photonicsPrincipal Investigator

    • Principal Investigator
      Hane Kazuhiro
    • Project Period (FY)
      2012 – 2015
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Applied optics/Quantum optical engineering
    • Research Institution
      Tohoku University
  •  Three-Dimensionarlly Stacked Optoelectronic System-on-Chip Fabricated Using Grapho-Assembly

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      2009 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Tohoku University
  •  Fundamental study on ultralow loss optical NEMS technology for realization of silicon nano-photonic circuits

    • Principal Investigator
      KANAMORI Yoshiaki
    • Project Period (FY)
      2009 – 2011
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Tohoku University
  •  共鳴格子を用いたシリコン発光素子の研究Principal Investigator

    • Principal Investigator
      羽根 一博
    • Project Period (FY)
      2008 – 2010
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Tohoku University
  •  Stabilized Temperature Characteristics, High-Speed Response, and Low-Voltage Driving of Micromirror

    • Principal Investigator
      SASAKI Minoru
    • Project Period (FY)
      2007 – 2008
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Toyota Technological Institute
  •  Study of optical micro systems by monolithic integration of silicon with nitride semiconductorPrincipal Investigator

    • Principal Investigator
      HANE Kazuhiro
    • Project Period (FY)
      2007 – 2011
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Tohoku University
  •  回転角センサー体型MEMS光スキャナ

    • Principal Investigator
      佐々木 実
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Tohoku University
  •  High functional telecommunication devices using MEMS technologyPrincipal Investigator

    • Principal Investigator
      HANE Kazuhiro
    • Project Period (FY)
      2005 – 2008
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Tohoku University
  •  サブ10nm量子ドットの超解像近接場分光

    • Principal Investigator
      寒川 誠二
    • Project Period (FY)
      2004 – 2005
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University
  •  立体的微細加工技術による曲面ナノモールディングPrincipal Investigator

    • Principal Investigator
      羽根 一博
    • Project Period (FY)
      2004 – 2006
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Tohoku University
  •  High Performance Parallel Processor System Using Three-Dimensional Processor Chip

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      2003 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Tohoku University
  •  Nanometer-scale processing and creation of novel functional materials using low energy high flux neutral beams

    • Principal Investigator
      SAMUKAWA Seiji
    • Project Period (FY)
      2003 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Thin film/Surface and interfacial physical properties
    • Research Institution
      Tohoku University
  •  超高精度プラズマプロセス用オンウエハーモニタリングシステムの構築

    • Principal Investigator
      SAMUKAWA Seiji
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University
  •  光ファイバ上に展開するマイクロマシニング加工

    • Principal Investigator
      佐々木 実
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      Tohoku University
  •  Tunable photonic devices fabricated by micro-nano machining for optical communicationPrincipal Investigator

    • Principal Investigator
      HANE Kazuhiro
    • Project Period (FY)
      2002 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      Tohoku University
  •  Roles of Integrins of Endothelial Cells in Response to Mechanical Stimuli

    • Principal Investigator
      SATO Masaaki
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Biomedical engineering/Biological material science
    • Research Institution
      Tohoku University
  •  Light-light control type communication devices using optical fiber micro-machining and photochromism phenomenon

    • Principal Investigator
      KUMAZAKI Hironori
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      Gifu National College of Technology
  •  Distributed Micro-Nanomachines which move with nanometer precision

    • Principal Investigator
      ESASHI Masahi
    • Project Period (FY)
      2001 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University
  •  Research on the micro turning process of optical fiber.

    • Principal Investigator
      INABA Seiki
    • Project Period (FY)
      2001 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      GIFU NATIONAL COLLEGE OF TECHNOLOGY
  •  ナノ構造創成のための光メカトロニクスに関する総括研究Principal Investigator

    • Principal Investigator
      羽根 一博
    • Project Period (FY)
      2000 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Tohoku University
  •  近接場光加工の大面積化に関する研究Principal Investigator

    • Principal Investigator
      羽根 一博
    • Project Period (FY)
      2000 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Tohoku University
  •  マイクロマシニングを用いたシリコン・ナノ・モールディングPrincipal Investigator

    • Principal Investigator
      羽根 一博
    • Project Period (FY)
      2000 – 2001
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      機械工作・生産工学
    • Research Institution
      Tohoku University
  •  Wafer-Scale Dynamic Neural-Network-System with Optical Waveguide

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      2000 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      Tohoku University
  •  Development of integrated optical measurement systems having layered structures

    • Principal Investigator
      SASAKI Minoru
    • Project Period (FY)
      2000 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Measurement engineering
    • Research Institution
      Tohoku University
  •  Development of Moving Light Wave Guide Structure including an Actuator for Optical MEMS

    • Principal Investigator
      MINAMI Kazuyuki
    • Project Period (FY)
      2000 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      複合化集積システム
    • Research Institution
      Yamaguchi University
  •  Wafer Level Parallel Processing System Using Cubic Integration Technology

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  Fabrication of micro rotary encoder for robot finger and precision machinesPrincipal Investigator

    • Principal Investigator
      HANE Kazuhiro
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Measurement engineering
    • Research Institution
      Tohoku University
  •  Development of photothermal vibrating sensor using optical fiber with a built-in Bragg grating

    • Principal Investigator
      KUMAZAKI Hironori
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Dynamics/Control
    • Research Institution
      GIFU NATIONAL COLLEGE OF TECHNOLOGY
  •  アモルファスSiを利用した光導波路一体型カンチレバーの製作Principal Investigator

    • Principal Investigator
      羽根 一博
    • Project Period (FY)
      1998
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas (A)
    • Research Institution
      Tohoku University
  •  STUDY OF ULTRA-FINE STRUCTURED OPTICAL COMPONENTS USIING MICROMACHININGPrincipal Investigator

    • Principal Investigator
      HANE Kazuhiro
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      TOHOKU UNIVERSITY
  •  Ultra Sensing Using Highly Precise Micromachining

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (A).
    • Research Field
      Measurement engineering
    • Research Institution
      Tohoku University
  •  PRODUCTION OF LASER-DRIVEN MICROMACHINES BY USING LASER MICRO-MANIPYULATION AND THREE-DIMENSION LASER BEAM LITHOGRAPHY

    • Principal Investigator
      INABA Seiki
    • Project Period (FY)
      1998 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      GIFU NATIONAL COLLEGE OF TECHNOLOGY
  •  ニアフィールドのフォトン力学

    • Principal Investigator
      河田 聡
    • Project Period (FY)
      1997 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas (A)
    • Research Institution
      Osaka University
  •  マイクロマシンプローブを用いたニアフィールドメモリの研究Principal Investigator

    • Principal Investigator
      羽根 一博
    • Project Period (FY)
      1997
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Tohoku University
  •  THREE-DIMENSIONALLY STACKED IMAGE PROCESSING SYSTEM WITH LEARNING FUNCTION

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      1997 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  INVESTIGATION ON LASER-DRIVEN MICROMACHINES USING OPTICAL FILTERS

    • Principal Investigator
      INABA Seiki
    • Project Period (FY)
      1997 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      GIFU NATIONAL COLLEGE OF TECHNOLOGY
  •  HIGH SPEED PARALLEL COMPUTER SYSTEM USING 3-DIMENTIONAL INTEGLATED SHARED MEMORY

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      1996 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  Development of photomechanical sensor for measurement of deposition thickness using optical fiber

    • Principal Investigator
      KUMAZAKI Hironori
    • Project Period (FY)
      1996 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Dynamics/Control
    • Research Institution
      Gifu National College of Technology
  •  Development of laser-driven micromachine using thin film of sputtered shape memory alloys

    • Principal Investigator
      KUMAZAKI Hironori
    • Project Period (FY)
      1996 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      Gifu National College Technology
  •  Non-planar lithography using holographic projectionPrincipal Investigator

    • Principal Investigator
      HANE Kazuhiro
    • Project Period (FY)
      1995 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Tohoku University
  •  DEVELOPMENT OF FIBER-SENSORS FOR DENSITY USING A MICROMACHINING TECHNIQUE

    • Principal Investigator
      INABA Seiki
    • Project Period (FY)
      1995 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Dynamics/Control
    • Research Institution
      GIFU NATIONAL COLLEGE OF TECHNOLOGY
  •  Study on high density disk data storage using atomic force micorscopyPrincipal Investigator

    • Principal Investigator
      HANE Kazuhiro
    • Project Period (FY)
      1995 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      Tohoku University
  •  DEVELOPMENT OF OPTICAL ACTUATORS FOR DRIVING MICROMACHINES

    • Principal Investigator
      INABA Seiki
    • Project Period (FY)
      1994 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Dynamics/Control
    • Research Institution
      GIFU NATIONAL COLLEGE OF TECHNOLOGY
  •  超音波メカノケミカル加工によるマイクロ部品の試作

    • Principal Investigator
      森 敏彦
    • Project Period (FY)
      1993
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Nagoya University
  •  Development of Biomimetic Actuator Using Ciliary Movement

    • Principal Investigator
      OKUMA Shigeru
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      計測・制御工学
    • Research Institution
      Nagoya University
  •  FUNCTIONAL COATING BY MEANS OF RADIATE RF MAGNETRON SPUTTERING

    • Principal Investigator
      MORI Tshihiko
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      NAGOYA UNIVERSITY
  •  マグネトロンスパッタリングによる傾斜機能コーティング

    • Principal Investigator
      MORI Tshihiko
    • Project Period (FY)
      1992
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      機械工作
    • Research Institution
      Nagoya University
  •  Research of Ultra High Density Magneto-optical Recording Material

    • Principal Investigator
      UCHIYAMA Susumu
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電子材料工学
    • Research Institution
      Nagoya University
  •  DEVELOPMENT OF OPTICAL SENSORS FOR LIQUID DENSITY USING A MICROMACHINING TECHNIQUE

    • Principal Investigator
      INABA Seiki
    • Project Period (FY)
      1992 – 1994
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      機械力学・制御工学
    • Research Institution
      GIFU NATIONAL COLLEGE OF TECHNOLOGY
  •  Studies on the evaluation techniques for micro-mechanical structures by using scanning probe microscopyPrincipal Investigator

    • Principal Investigator
      HANE Kazuhiro
    • Project Period (FY)
      1991 – 1992
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      材料力学
    • Research Institution
      NAGOYA UNIVERSITY
  •  DEVELOPMENT OF MICRO VACUUM PUMP USING A MICROMACHINING TECHNIQUE

    • Principal Investigator
      INABA Seiki
    • Project Period (FY)
      1991 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      機械力学・制御工学
    • Research Institution
      GIFU NATIONAL COLLEGE OF TECHNOLOGY
  •  Development and application of the three dimentional fabrication method of micro-mechanical device using plasma polymerized resist

    • Principal Investigator
      MORITA Shinzo
    • Project Period (FY)
      1989 – 1991
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      機械工作
    • Research Institution
      Nagoya University
  •  Development of a laser vacuum gauge using a photothermal effect

    • Principal Investigator
      INABA Seiki
    • Project Period (FY)
      1989 – 1991
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      電子機器工学
    • Research Institution
      Gifu National College of Technology
  •  Studies on non-emissive fragments of radicals of <SiH_4> used for plasma processing

    • Principal Investigator
      TOSHIO Goto
    • Project Period (FY)
      1985 – 1986
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電子材料工学
    • Research Institution
      Nagoya University

All 2022 2021 2020 2019 2018 2017 2015 2014 2013 2012 2011 2010 2009 2008 2007 2006 2005 2004 2003 Other

All Journal Article Presentation Book Patent

  • [Book] 自動運転車に向けた 電子機器・部品の開発と制御技術:28章 MEMSミラーの原理、構造とLiDARへの応用2022

    • Author(s)
      羽根一博(分担執筆)
    • Publisher
      技術情報協会
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Book] 自動運転・運転支援の実現に向けたセンサ開発: MEMSミラーの原理、構造とLiDARへの応用2020

    • Author(s)
      羽根一博(分担執筆)
    • Publisher
      シーエムシー出版
    • ISBN
      9784781314983
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Book] 距離画像センサの基礎と最先端:LiDARのためのMEMSミラー2020

    • Author(s)
      羽根一博(分担執筆)
    • Publisher
      S&T出版
    • ISBN
      9784907002831
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Book] 回折光学素子の数値解析とその応用(4.5.2 MEMSグレーティング)2011

    • Author(s)
      羽根一博(小舘, 神谷監修)
    • Publisher
      丸善出版
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Book] 光アライアンス:GaN発光素子とSi-MEMSの融合を目指して2010

    • Author(s)
      胡芳仁, 羽根一博
    • Publisher
      日本工業出版
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Book] Comprehensive Microsystems2008

    • Author(s)
      K. Hane, M. Sasaki
    • Publisher
      Elsevier
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Book] Comprehensive Microsystems 3.01 Micro-Mirrors2008

    • Author(s)
      羽根一博
    • Total Pages
      63
    • Publisher
      Elsevier
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Book] 光通信用ナノマシン2008

    • Author(s)
      羽根一博
    • Total Pages
      5
    • Publisher
      オプトロニクス
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Book] Micro-Mirrors(Comprehensive Microsystems)2008

    • Author(s)
      K. Hane, M. Sasaki
    • Publisher
      Elsevier
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Book] Comprehensive Microsystems-Fundamentals,technology and applications-2007

    • Author(s)
      Kazuhiro Hane, Minoru Sasaki
    • Publisher
      Elsevier Science Ltd.
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Book] MEMSデバイスの加工・実装・評価技術 第1節 MEMSにおけるエッチング技術2007

    • Author(s)
      羽根一博
    • Total Pages
      11
    • Publisher
      技術情報協会
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Book] ナノテクのための工学入門第5章マイクロマシニング・ナノマシニング2007

    • Author(s)
      羽根一博
    • Total Pages
      243
    • Publisher
      共立出版
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Book] Comprehensive Microsystems-Fundamentals, technology and applications- (Volume Three) : 3.01 Optical systems: Miero-mirrors2007

    • Author(s)
      編集:Yogesh Gianchandani, Osamu Tabata, Hans Zappe 分担:Kazuhiro Hane, Minoru Sasaki
    • Total Pages
      63
    • Publisher
      Elsevier Science Ltd
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Book] MEMS/NEMSの最先端技術と応用展開4.5フォトニック素子2007

    • Author(s)
      羽根一博
    • Total Pages
      1500
    • Publisher
      フロンティア出版
    • Data Source
      KAKENHI-PROJECT-14102022
  • [Book] MEMS/NEMS Advanced Technologies and Applications Chapter4 Applications of MEMS/NEMS to Optics and wireless telecommunication, 4.5 Photnic devices2006

    • Author(s)
      K.Hane
    • Total Pages
      285
    • Publisher
      Frontier
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14102022
  • [Book] MEMS/NENSの最先端技術と応用展開第4章MEMS/NEMSの光および無線通信への応用5.フォトニック素子2006

    • Author(s)
      羽根一博
    • Total Pages
      285
    • Publisher
      フロンティア出版
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Infrared slit light-based scanning type portable device for monitoring of cataract2022

    • Author(s)
      Neelam Kaushik, Takashi Sasaki, Hiroyuki Kamijo, Toru Nakazawa, Kazuhiro Hane
    • Journal Title

      Optical Engineering

      Volume: 61 Pages: 035103-035103

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Journal Article] EXTENSION OF FRACTURE LIFETIME OF SILICON SCANNING MICROMIRROR BY COATING WITH ATOMIC LAYER DEPOSITED ALUMINA THIN FILM2021

    • Author(s)
      Yuuki Fujita, Takashi Sasaki, Koichi Fukuda, Nguyen Thanh Tung, Fumio Ogawa, Toshiyuki Hashida, and Kazuhiro Hane
    • Journal Title

      Proceeding of Transducers

      Volume: 1 Pages: 549-552

    • DOI

      10.1109/transducers50396.2021.9495545

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Journal Article] Multileveled tunable silicon grating array bonded on large scale integration substrate by polymers2021

    • Author(s)
      Tomohiro Suzuki, Chernroj Sawasdivorn, Takashi Sasaki, Hiroshi Matsuura, and Kazuhiro Hane
    • Journal Title

      Journal of Optical Microsystems

      Volume: 1 Issue: 01 Pages: 135011-13

    • DOI

      10.1117/1.jom.1.1.013501

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Journal Article] Simple retinal imaging system using a MEMS scanning mirror2018

    • Author(s)
      Neelam Kaushik, Takashi Sasaki, Toru Nakazawa, Kazuhiro Hane
    • Journal Title

      Optical Engineering

      Volume: 57 Issue: 09 Pages: 095101-095101

    • DOI

      10.1117/1.oe.57.9.095101

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Journal Article] Wafer-level vacuum package of two-dimensional micro-scanner2018

    • Author(s)
      Hoang Manh Chu, Takashi Sasaki, Kazuhiro Hane
    • Journal Title

      Microsystem Technologies

      Volume: 24 Issue: 5 Pages: 2159-2168

    • DOI

      10.1007/s00542-017-3668-2

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Journal Article] Electro-optic guided-mode resonance tuning suppressible by optically induced screening in a vertically coupled hybrid GaN/Si microring resonator2018

    • Author(s)
      Thubthimthong B.、Sasaki T.、Hane K.
    • Journal Title

      Applied Physics Letters

      Volume: 112 Issue: 7 Pages: 071102-071102

    • DOI

      10.1063/1.5013227

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Journal Article] GaN microring waveguide resonators bonded to silicon substrate by a two-step polymer process2018

    • Author(s)
      Hashida Ryohei、Sasaki Takashi、Hane Kazuhiro
    • Journal Title

      Applied Optics

      Volume: 57 Issue: 9 Pages: 2073-2073

    • DOI

      10.1364/ao.57.002073

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Journal Article] Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity2017

    • Author(s)
      Takashi Izawa、Takashi Sasaki、Kazuhiro Hane
    • Journal Title

      Micromachines

      Volume: 8 Issue: 8 Pages: 240-240

    • DOI

      10.3390/mi8080240

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Journal Article] Asymmetrically and Vertically Coupled Hybrid Si/GaN Microring Resonators for On-Chip Optical Interconnects2015

    • Author(s)
      B. Thubthimthong, T. Sasaki, and K. Hane
    • Journal Title

      IEEE Photonics Journal

      Volume: 7 Issue: 4 Pages: 1-11

    • DOI

      10.1109/jphot.2015.2464721

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Group velocity enhancement for guided lightwave by the band-pulling effect in single-mode silicon comb photonic crystal wires2015

    • Author(s)
      Borriboon Thubthimthong and Kazuhiro Hane
    • Journal Title

      Journal of Optics

      Volume: 17 Issue: 5 Pages: 055104-055104

    • DOI

      10.1088/2040-8978/17/5/055104

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Design, fabrication and optical characteristics of freestanding GaN waveguides on silicon substrate2015

    • Author(s)
      Takuji Sekiya, Takashi Sasaki, and Kazuhiro Hane
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 33 Issue: 3

    • DOI

      10.1116/1.4917487

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Fabrication and Evaluation of Single-Crystal-Silicon Tunable Grating using Polymer-Based Membrane Transfer Bonding Process2015

    • Author(s)
      Sawasdivorn Chernroj, Hisayuki Onuma, Tomohiro Suzuki, Takashi Sasaki, Hiroshi Mastuura, Kazuhiro Hane
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 135 Issue: 9 Pages: 361-366

    • DOI

      10.1541/ieejsmas.135.361

    • NAID

      130005096102

    • ISSN
      1341-8939, 1347-5525
    • Language
      English
    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] AlN Nanowall Structures Grown on Si (111) Substrate by Molecular Beam Epitaxy2015

    • Author(s)
      Y. Tamura and K. Hane
    • Journal Title

      Nanoscale Research Letters

      Volume: 10 Issue: 1 Pages: 460-460

    • DOI

      10.1186/s11671-015-1178-7

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-13J08639, KAKENHI-PROJECT-24246019
  • [Journal Article] Time Response of a Microelectromechanical Silicon Photonic Waveguide Coupler Switch2014

    • Author(s)
      Syotaro Abe, Manh Hoang Chu, Takashi Sasaki, and Kazuhiro Hane
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: 26 Issue: 15 Pages: 1553-1556

    • DOI

      10.1109/lpt.2014.2329033

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] A silicon microring resonator with a nanolatch mechanism2014

    • Author(s)
      Syotaro Abe and Kazuhiro Hane
    • Journal Title

      Microsystem Technology

      Volume: 21 Issue: 9 Pages: 2019-2024

    • DOI

      10.1007/s00542-014-2283-8

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Platinum/porous GaN nanonetwork metal-semiconductor Schottky diodfor room temperature hydrogen sensorel2014

    • Author(s)
      Aihua Zhong, Takashi Sasaki, Kazuhiro Hane
    • Journal Title

      Sensors and Actuators A: Physical

      Volume: 209 Pages: 52-56

    • DOI

      10.1016/j.sna.2014.01.014

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] A Wide-Tuning Silicon Ring-Resonator Composed of Coupled Freestanding Waveguides2014

    • Author(s)
      Hoang Manh Chu, Kazuhiro Hane
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: 26 Issue: 14 Pages: 1411-1413

    • DOI

      10.1109/lpt.2014.2326405

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Comparative study of Schottky diode type hydrogen sensors based on ahoneycomb GaN nanonetwork and on a planar GaN film2014

    • Author(s)
      Aihua Zhong, Takashi Sasaki, and Kazuhiro Hane
    • Journal Title

      International Journal of Hydrogen Energy

      Volume: 39 Issue: 16 Pages: 8564-8575

    • DOI

      10.1016/j.ijhydene.2014.03.120

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Wavelength characteristics of gap-variable silicon nanowire waveguide coupler switch using micro actuator2013

    • Author(s)
      Y.Munemasa, Y.Akihama, K.Hane
    • Journal Title

      IEEEJ Trans. Sensors Micromachines

      Volume: vol.133 Pages: 85-89

    • NAID

      10031155390

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Journal Article] A microelectromechanically tunable microring resonator composed of freestanding silicon photonic waveguide couplers2013

    • Author(s)
      Ikeda and Kazuhiro Hane
    • Journal Title

      Applied Physics Letters

      Volume: 102 Issue: 22

    • DOI

      10.1063/1.4809733

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] A tunable notch filter using microelectromechanical microring with gap-variable busline coupler2013

    • Author(s)
      T. Ikeda, K. Hane
    • Journal Title

      Optics Express

      Volume: 21 Issue: 19 Pages: 22034-22042

    • DOI

      10.1364/oe.21.022034

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Journal Article] Characterization of GaN Nanowall Network and Optical Property of InGaN/GaN Quantum Wells by Molecular Beam Epitaxy2013

    • Author(s)
      Aihua Zhong and Kazuhiro Hane
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 8S Pages: 08JE13-08JE13

    • DOI

      10.7567/jjap.52.08je13

    • NAID

      210000142657

    • Peer Reviewed / Acknowledgement Compliant / Open Access
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Electric feed-through for vacuum package using double-side anodic bonding of silicon-on-insulator wafer2013

    • Author(s)
      H.M.Chu, H.N.Vu, K.Hane
    • Journal Title

      J. Electrostatics

      Volume: 71 Issue: 2 Pages: 130-133

    • DOI

      10.1016/j.elstat.2012.12.028

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Journal Article] Variable-gap silicon photonic waveguide coupler switch with a nanolatch mechanism2013

    • Author(s)
      Syotaro Abe and Kazuhiro Hane
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: 25 Issue: 7 Pages: 675-677

    • DOI

      10.1109/lpt.2013.2248354

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] A tunable notch filter using microelectromechanical microring with gap-variable busline coupler2013

    • Author(s)
      Taro Ikeda and Kazuhiro Hane
    • Journal Title

      Optics Express

      Volume: 21 Pages: 22034-22042

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Transmisison-width-tunable silicon-photonic microelectromechanical ring resonator2013

    • Author(s)
      M. Ordu, K. Hane
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: 25 Issue: 22 Pages: 2236-2238

    • DOI

      10.1109/lpt.2013.2285130

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-21226009, KAKENHI-PROJECT-24246019
  • [Journal Article] Wavelength Characteristics of a Gap-Variable Silicon Nanowire Waveguide Coupler Switch Using Micro Actuator2013

    • Author(s)
      Yasushi Munemasa, Yuta Akihama, Kazuhiro Hane
    • Journal Title

      電気学会論文誌E(センサ・マイクロマシン部門誌)

      Volume: 133 Pages: 85-89

    • NAID

      10031155390

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Design and fabrication of GaN crystal ultra-small lateral comb-drive actuators2012

    • Author(s)
      T. Tanae, H. Sameshima, K. Hane
    • Journal Title

      J. Vac. Sci. Technol

      Volume: B30(1)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Growth of GaN nanowall network on Si (111) substrate by molecular beam exitaxy2012

    • Author(s)
      Aihua Zhong and Kazuhiro Hane
    • Journal Title

      Nanoscale Research Letters

      Volume: 7 Issue: 1

    • DOI

      10.1186/1556-276x-7-686

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers2012

    • Author(s)
      Y.Akihama, K.Hane
    • Journal Title

      Light: Science Applications

      Volume: 1 Issue: 6 Pages: e16-e16

    • DOI

      10.1038/lsa.2012.16

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Journal Article] Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers2012

    • Author(s)
      Yuta Akihama and Kazuhiro Hane
    • Journal Title

      Light: Science & Applications

      Volume: 1

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Micro fluorescent analysis system integrating GaN-light-emitting-diode on a silicon platform2012

    • Author(s)
      Hiroto Nakazato, Hiroko Kawaguchi, Akio Iwabuchi and Kazuhiro Hane
    • Journal Title

      Lab on a Chip

      Volume: 12 Pages: 3419-3425

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Journal Article] Design and fabrication of GaN crystal ultra-small lateral comb-drive actuators2012

    • Author(s)
      T.Tanae, H.Sameshima, K.Hane
    • Journal Title

      Journal of Vacuum Science Technology

      Volume: B30 Issue: 1

    • DOI

      10.1116/1.3668114

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007, KAKENHI-PROJECT-24246019
  • [Journal Article] III-nitride grating grown on freestanding HfO2 gratings2011

    • Author(s)
      Y. Wang, T. Wu, F. Hu, Y. Kanamori, H. Zhu, K. Hane
    • Journal Title

      Nano.Res. Lett.

      Volume: 6(1)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] The resonant III-nitride grating reflector2011

    • Author(s)
      Y. Wang, T. Wu, T. Tanae, H. Zhu, K. Hane
    • Journal Title

      J. Micromech. Microeng

      Volume: 21(10)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] A GaN eletromechanical tunable grating on Si substrate2011

    • Author(s)
      Hidehisa Sameshima, Takuma Tanae, Kazuhiro Hane
    • Journal Title

      IEEE Photonics Technology letters

      Volume: 23 Pages: 281-283

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Patterned growth of InGaN/GaN quantum wells on freestanding GaN grating by molecular beam epitaxy2011

    • Author(s)
      Y. Wang, F. Hu, K. Hane
    • Journal Title

      Nano.Res. Lett.

      Volume: 6(1)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] III-nitride grating grown on freestanding HfO2 gratings2011

    • Author(s)
      Y.Wang, T.Wu, F.Hu, Y.Kanamori, H.Zhu, K.Hane
    • Journal Title

      Nanoscale Research Letters

      Volume: 6 Issue: 1

    • DOI

      10.1186/1556-276x-6-497

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications2011

    • Author(s)
      M. Wakui, H. Sameshima, F. Hu, K. Hane
    • Journal Title

      Microsys. Technol

      Volume: 17(1) Pages: 109-114

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] III-nitride grating grown on freestanding HfO_2 gratings2011

    • Author(s)
      Y. Wang, T. Wu, F. Hu, Y. Kanamori, H. Zhu, K. Hane
    • Journal Title

      Nano.Res. Lett

      Volume: 6(1)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Comb-drive GaN micro-mirror on a GaN-on-silicon platform2011

    • Author(s)
      Y. Wang, T. Sasaki, T. Wu, F. Hu, K. Hane
    • Journal Title

      J. Micromech. Microeng

      Volume: 21(3)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Lateral epitaxial overgrowth of GaN on a patterned GaN-on-silicon substrate by molecular beam epitaxy2011

    • Author(s)
      Y. Wang, F. Hu, K. Hane
    • Journal Title

      Semicond. Sci. Technol

      Volume: 26(4)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Lateral epitaxial overgrowth of GaN on a patterned GaN-on-silicon substrate by molecular beam epitaxy2011

    • Author(s)
      Y.Wang, F.Hu, K.Hane
    • Journal Title

      Semiconductor Science and Technology

      Volume: 26 Issue: 4 Pages: 045015-045015

    • DOI

      10.1088/0268-1242/26/4/045015

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Ultra-small silicon waveguide coupler switch using gap-variable mechanism2011

    • Author(s)
      Yuta Akihama, Yoshiaki Kanamori, and Kazuhiro Hane
    • Journal Title

      Optics Express

      Volume: 19巻 Pages: 23658-23663

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Journal Article] Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications2011

    • Author(s)
      Masashi Wakui, Hidehisa Sameshima, Fangren Hu, Kazuhiro Hane
    • Journal Title

      Microsystem Technologies

      Volume: 17 Pages: 109-114

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Comb-drive GaN micro-mirror on a GaN-on-silicon platform2011

    • Author(s)
      Y.Wang, T.Sasaki, T.Wu, F.Hu, K.Hane
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 21 Issue: 3 Pages: 035012-035012

    • DOI

      10.1088/0960-1317/21/3/035012

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Ultra-small silicon waveguide coupler switch using gap-variable mechanism2011

    • Author(s)
      Y.Akihama, Y.Kanamori, K.Hane
    • Journal Title

      Optics Express

      Volume: 1.19, 11 Issue: 24 Pages: 23658-23663

    • DOI

      10.1364/oe.19.023658

    • Year and Date
      2011-11-07
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Journal Article] The resonat III-nitride graitng reflector2011

    • Author(s)
      Y.Wang, T.Wu, T.Tanae, H.Zhu, K.Hane
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 21 Issue: 10 Pages: 105025-105025

    • DOI

      10.1088/0960-1317/21/10/105025

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Ultra-small silicon waveguide coupler switch using gap-variable mechanism2011

    • Author(s)
      Yuta Akihama, Yoshiaki Kanamori, Kazuhiro Hane
    • Journal Title

      Optics Express

      Volume: 19 Pages: 23658-23663

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Journal Article] A GaN Electromechanical Tunable Grating on Si Substrate2011

    • Author(s)
      H. Sameshima, T. Tanae, K. Hane
    • Journal Title

      IEEE Photon. Technol. Lett

      Volume: 23(5) Pages: 281-283

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Patterned growth of InGaN/GaN quantum wells on freestanding GaN grating by molecular beam epitaxy2011

    • Author(s)
      Y.Wang, F.Hu, K.Hane
    • Journal Title

      Nanoscale Research Letters

      Volume: 6

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Growth of GaN LED Structure on Si Substrate by ME and Monolithic Fabrication of GaN LED Cooling System2010

    • Author(s)
      M. Wakui, F. Hu, H. Sameshima, K. Hane
    • Journal Title

      IEEJ Transactions on Electrical and Electronic Engineering

      Volume: 5(2) Pages: 171-174

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Large area, freestanding GaN nanocolumn membrane with bottom subwavelength nanostructure2010

    • Author(s)
      Y. Wang, F. Hu, Y. Kanamori, T. Wu, K. Hane
    • Journal Title

      Optics Express

      Volume: 18(6) Pages: 5504-5511

    • NAID

      120003728410

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Freestanding GaN slab fabricated on patterned silicon on an insulator substrate2010

    • Author(s)
      Y. Wang, F. Hu, K. Hane
    • Journal Title

      Journal of Micromechanics and Microengineering 20(2)

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Monolithic-fabrication of Simicro-electro-mechanical structure with GaN ligth emitting diode2010

    • Author(s)
      R. Ito, M. Wakui, H. Sameshima, F. Hu, K. Hane
    • Journal Title

      Microsystem Technologies 16(in press)

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Growth of GaN LED Structure on Si Substrate by MBE and Monolithic Fabrication of GaN LED Cooling System2010

    • Author(s)
      M. Wakui, F. Hu, H. Sameshima, K. Hane
    • Journal Title

      IEEJ Transactions on Electrical and Electronic Engineering 5(2)

      Pages: 171-174

    • NAID

      10027368557

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Monolithic-fabrication of Si micro-electro-mechanical structure with GaN ligth emitting diode2010

    • Author(s)
      R. Ito, M. Wakui, H. Sameshima, F. Hu, K. Hane
    • Journal Title

      Microsystem Technologies

      Volume: 16(6) Pages: 1015-1020

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Growth of GaN LED Structure on Si Substrate by MBE and Monolithic Fabrication of GaN LED Cooling System2010

    • Author(s)
      Masashi Wakui, Fang-Ren Hu, Hidehisa Sameshima, Kazuhiro Hane
    • Journal Title

      IEEJ Transactions on Electrical and Electronic Engineering 5(2)

      Pages: 171-174

    • NAID

      10027368557

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Phase-shifter using submicron silicon waveguide couplers with ultra-small eletro-mechanical actuator2010

    • Author(s)
      Taro Ikeda, Kazunori Takahashi, Yoshiaki Kanamori, Kazuhiro Hane
    • Journal Title

      Optics Express

      Volume: vol.18 Pages: 7031-7037

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Journal Article] Fabrication and characterization of freestanding circular GaN grating2010

    • Author(s)
      Y. Wang, F. Hu, H. Sameshima, K. Hane
    • Journal Title

      Optics Express 18(2)

      Pages: 773-779

    • NAID

      120003728497

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Narrow-bandwidth tunable bandstop filters with circularly cylindrical self-suspended silicon gratings2010

    • Author(s)
      Jia-Sheng Ye, Yoshiaki Kanamori, Fang-Ren Hu, Kazuhiro Hane
    • Journal Title

      Optik (未定, 印刷中)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20656055
  • [Journal Article] Fabrication and characterization of freestanding circular GaN grating2010

    • Author(s)
      Y. Wang, F. Hu, H. Sameshima, K. Hane
    • Journal Title

      Optics Express

      Volume: 18(2) Pages: 773-779

    • NAID

      120003728497

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Monolithic-fabrication of Si micro-electro-mechanical structure with GaN ligth emitting diode2010

    • Author(s)
      Ryosuke Ito, Masashi Wakui, Hidehisa Sameshima, Fangren Hu, Kazuhiro Hane
    • Journal Title

      Microsystem Technologies 16(印刷中)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Freestanding GaN slab fabricated on patterned silicon on an insulator substrate2010

    • Author(s)
      Y. Wang, F. Hu, K. Hane
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 20(2)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Fabrication of Antireflective Subwavelength-Grating Structures on Optical Fiber End Faces Using Nanoimprinting Technique2010

    • Author(s)
      金森義明、大河内昌章、羽根一博
    • Journal Title

      日本機械学会論文集(C編)

      Volume: 76巻 Pages: 2854-2860

    • NAID

      110008095589

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Journal Article] Fabrication of Antireflective Subwavelength-Grating Structures on Optical Fiber End Faces Using Nanoimprinting Technique2010

    • Author(s)
      金森義明, 大河内昌章, 羽根一博
    • Journal Title

      日本機械学会論文集(C編)

      Volume: 76 Pages: 2854-2860

    • NAID

      110008095589

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Journal Article] 近赤光用サブ波長反射防止構造の光学設計および自己組織化ナノ微粒子を用いた製作2010

    • Author(s)
      金森義明, 灰田周平, 羽根一博
    • Journal Title

      電気学会論文誌E 130

      Pages: 92-96

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Journal Article] Narrow-bandwidth tunable bandstop filters with circularly cylindrical self-suspended silicon gratings2010

    • Author(s)
      Jia-Sheng Ye, Yoshiaki Kanamori, Fang-Ren Hu, Kazuhiro Hane
    • Journal Title

      Optik

      Volume: 121 Pages: 1389-1394

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20656055
  • [Journal Article] Fabrication and characterization of subwavelength nanostructures on freestanding GaN slab2010

    • Author(s)
      Y. Wang, F. Hu, Y. Kanamori, H. Sameshima, K. Hane
    • Journal Title

      Optics Express 18(3)

      Pages: 2940-2945

    • NAID

      120003728432

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Fabrication and characterization of sub wavelength nanostructures on freestanding GaN slab2010

    • Author(s)
      Y. Wang, F. Hu, Y. Kanamori, H. Sameshima, K. Hane
    • Journal Title

      Optics Express

      Volume: 18(3) Pages: 2940-2945

    • NAID

      120003728432

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Fabrication and characterization of subwavelength nanostructures on freestanding GaN slab2010

    • Author(s)
      Yongjin Wang, Fangren Hu, Yoshiaki Kanamori, Hidehisa Sameshima, Kazuhiro Hane
    • Journal Title

      Optics Express 18(3)

      Pages: 2940-2945

    • NAID

      120003728432

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Large area, freestanding GaN nanocolumn membrane with bottom subwavelength nanostructure2010

    • Author(s)
      Y. Wang, F. Hu, Y. Kanamori, T. Wu, K. Hane
    • Journal Title

      Optics Express 18(6)

      Pages: 5504-5511

    • NAID

      120003728410

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] 近赤光用サブ波長反射防止構造の光学設計および自己組織化ナノ微粒子を用いた製作2010

    • Author(s)
      金森義明、灰田周平、羽根一博
    • Journal Title

      電気学会論文誌E

      Volume: 130巻 Pages: 92-96

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Journal Article] Monolithic-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode2010

    • Author(s)
      Ryosuke Ito, Masashi Wakui, Hidehisa Sameshima, Fangren Hu, Kazuhiro Hane
    • Journal Title

      Microsystem Technologies

      Volume: 16 Pages: 1015-1020

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Fabrication of Subwavelength Gratings on Silicon Micro Lenses for MEMS Scanners at Optical Communication Wavelengths2009

    • Author(s)
      Yoshiaki Kanamori, Mao Miura, and Kazuhiro Hane
    • Journal Title

      電気学会論文誌E

      Volume: 129巻 Pages: 120-124

    • NAID

      10024776720

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Journal Article] Fabrication of Subwavelength Gratings on Silicon Micro Lenses for MEMS Scanners at Optical Communication Wavelengths2009

    • Author(s)
      Yoshiaki Kanamori, Mao Miura, Kazuhiro Hane
    • Journal Title

      電気学会論文誌E 129

      Pages: 120-124

    • NAID

      10024776720

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Journal Article] A Freestanding GaN/HfO_2 Membrane Grown by Molecular Beam Epitaxy for GaN-Si Hybrid MEMS2009

    • Author(s)
      H. Sameshima, M. Wakui, F. Hu, K. Hane
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics 15(5)

      Pages: 1332-1337

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] An ultrasmall wavelength-selective channel drop switch using a nanomechanical photonic crystal nanocavity2009

    • Author(s)
      Yoshiaki Kanamori, Kazunori Takahashi, and Kazuhiro Hane
    • Journal Title

      Applied Physics Letters

      Volume: 95巻 Pages: 171911-171911

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Journal Article] GaN-based nitride semiconductor films deposited on nitrified HfO_2/Si substrate by molecular beam epitaxy2009

    • Author(s)
      F. Hu, H. Samashima, M. Wakui, R. Ito, K. Hane
    • Journal Title

      Journal of Crystal Growth

      Volume: 311 Pages: 2996-2999

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] An ultrasmall wavelength-selective channel drop switch using a nanome chanical photonic crystal nanocavity2009

    • Author(s)
      Yoshiaki Kanamori, Kazunori Takahashi, Kazuhiro Hane
    • Journal Title

      Applied Physics Letters 95

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Journal Article] Freestanding GaN resonat gratings at telecommunication range2009

    • Author(s)
      Y. Wang, F. Hu, M. Wakui, K. Hane
    • Journal Title

      IEEE Photonics Technology Letters 21(17)

      Pages: 1184-1186

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Characteristics of Improved Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device2009

    • Author(s)
      Takuro AONUMA, Shinya KUMAGAI, Minoru SASAKI, Motoki TABATA, Kazuhiro HANE
    • Journal Title

      electrical wire (a) (b) Japanese Journal of Applied Physics Vol.48, No.4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Journal Article]2009

    • Author(s)
      羽根一博、桑野博喜、小野崇人
    • Journal Title

      MEMS/NEMS工学全集(テクノシステム)

      Pages: 669-677

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Submicron comb-drive actuators fabricated on thin single crystalline silicon layer2009

    • Author(s)
      K.Takanashi, E.Bulgan, Y.Kanamori, K.Hane
    • Journal Title

      IEEE Trans. Industrial Electron vol. 56

      Pages: 991-995

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] A Freestanding GaN/HfO2 Membrane Grown by Molecular Beam Epitaxy for GaN-Si Hybrid MEMS2009

    • Author(s)
      H. Sameshima, M. Wakui, F. Hu, K. Hane
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics

      Volume: 15(5) Pages: 1332-1337

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] An ultarasmall wavelength-selective channel drop switch using a nanomechanical photonic crystal nanocavity2009

    • Author(s)
      Yoshiaki Kanamori, Kazunori Takahashi, Kazuhiro Hane
    • Journal Title

      Applied Physics Letters 95(17)

      Pages: 171911-171913

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Journal Article] Fabrication and characterization of nanoscale resonant gratings on thin silicon membrane2009

    • Author(s)
      Y.Wang, Y.Kanamori, J.Ye, H.Sameshima, K.Hane
    • Journal Title

      Opt. Exp vol.17

      Pages: 4938-4943

    • NAID

      120003728409

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Freestanding GaN resonat gratings at telecommunication range2009

    • Author(s)
      Y. Wang, F. Hu, M. Wakui, K. Hane
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: 21(17) Pages: 1184-1186

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] GaN-based nitride semiconductor films deposited on nitrified HfO_2/Si substrate by molecular beam epitaxy2009

    • Author(s)
      F. Hu, H. Samashima, M. Wakui, R. Ito, K. Hane
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 2996-2999

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Simultaneous Realization of Stabilized Temperature Characteristics and Low-Voltage Driving of Micromirror Using Thin Film Torsion Bar of Tensile Poly-Si2009

    • Author(s)
      Minoru Sasaki, Masayuki Fujishima, Kazuhiro Hane, Hideo Miura
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics Vol.15

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Journal Article] Driving of micromirror and simultaneous detection of rotation angle using integrated piezoresistive sentsor2009

    • Author(s)
      M.Sasaki, M. Tabata, K.Hane
    • Journal Title

      J. Opt. A: Pure Appl. Opt vol. 11,(in press)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] MBE Fabrication of GaN-Based Light Emitting Diode on MOCVD Grown GaN-on-Si Template and Application for Optical MEMS2009

    • Author(s)
      M. Wakui, R. Ito, F. Hu, H. Sameshima, K. Hane
    • Journal Title

      電気学会論文誌E

      Volume: 129(3) Pages: 77-80

    • NAID

      10024776617

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] MBE Fabrication of GaN-Based Light Emitting Diode on MOCVD Grown GaN-on-Si Template and Application for Optical MEMS2009

    • Author(s)
      M. Wakui, R. Ito, F. Hu, H. Sameshima, K. Hane
    • Journal Title

      電気学会論文誌E 129(3)

      Pages: 77-80

    • NAID

      10024776617

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Design and fabrication of freestanding pitch-variable blazed grating on silicon-on-insulator wafer2009

    • Author(s)
      Y.Wang, Y.Kanamori, T.Sasaki, K.Hane
    • Journal Title

      J. Micromech. Microeng vol. 19

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Parameter optimization of narrow bandstop optical filters using the self-suspended subwavelength grating for TE polarization2008

    • Author(s)
      J.-S.Ye, Y.Kanamori, F-R.Hu, K.Hane
    • Journal Title

      J. Mod. Opt vol. 55

      Pages: 1519-1528

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Theoretical analysis of mechanical contact based submicron Si waveguide optical microswitch at telecommunication wavelength2008

    • Author(s)
      E.Bulgan, Y.Kanamori, K.Hane
    • Journal Title

      IEEJ Trans. SM vol. 127

      Pages: 80-84

    • NAID

      10021135026

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Large Displacement Micro XY-Stage with Paired Moving Plates2008

    • Author(s)
      Minoru SASAKI, Fuminori BONO, Kazuhiro HANE
    • Journal Title

      Japanese Journal of Applied Physics Vol.47, No.4

      Pages: 3226-3231

    • NAID

      10022548216

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Journal Article] GaN-Si-MEMS structure fabricated from nano-column GaN quantum well crystal grown on Si substrate2008

    • Author(s)
      F. Hu, R. Ito, Y. Zhao, K. Hane
    • Journal Title

      physica status solidi (C)

      Volume: 5(6) Pages: 1941-1943

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] An Optically flat micromirror using stretched membrane with crystallization-induced stress2008

    • Author(s)
      Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura
    • Journal Title

      Journal of Optics A : Pure and Applied Optics Vol.10

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Journal Article] Submicron silicon waveguide optical switch driven by microelectromechanical actuator2008

    • Author(s)
      E.Bulgan, Y.Kanamori, K.Hane
    • Journal Title

      Appl. Phys. Lett vol. 92

    • NAID

      120002070063

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Development of a compact hydrogen- annealing machine for surface transformation of silicon and its applications to micro-optical devices2008

    • Author(s)
      Y.Kanamori, K.Douzono, S.Fujihira, K.Hane
    • Journal Title

      J. Vac. Sci. Technol. A vol. 26

      Pages: 365-369

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Large Displacement Micro XY-Stage with Paired Moving Plates, Solid State Devices & Materials2008

    • Author(s)
      M. Sasaki, F. Bono, K. Hane
    • Journal Title

      Japanese Journal of Applied Physics 47, No.4

      Pages: 3226-3231

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Journal Article] Optically flat micromirror using stretched membrane with crystallization-induced stress2008

    • Author(s)
      M. Sasaki, T. Sasaki, K. Hane, H. Miura
    • Journal Title

      Journal of Optics A 10

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Journal Article] A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator2008

    • Author(s)
      K.Takahashi, Y.Kanamori, Y.Kokubun K.Hane
    • Journal Title

      Opt. Exp vol. 16

      Pages: 14421-14428

    • NAID

      120003911398

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Fabrication of analog and desital-modulated pitch-variable gratings using silicon-insulator substrate2008

    • Author(s)
      Y.Kanamori, T.Kobayashi, K.Hane
    • Journal Title

      Jpn. J. Appl. Phys vol. 47

      Pages: 5274-5277

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] GaN-Si-MEMS structure fabricated from nano-column GaN quantum well crystal grown on Si substrate2008

    • Author(s)
      F. Hu, R. Ito, Y. Zhao, K. Hane
    • Journal Title

      physica status solidi (C) 5(6)

      Pages: 1941-1943

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Control of guided resonance in a photonic crystal slab using microelectromechanical actuators2007

    • Author(s)
      Y.Kanamori, T.Kitani, K.Hane
    • Journal Title

      Appl. Phys. Lett vol. 90

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] InGaN/GaN quantum-well nanocolumn crystals on pillared Si substrate with InN as interlayer2007

    • Author(s)
      F. Hu, K. Ochi, Y. Zhao, K. Hane
    • Journal Title

      phys. stat. sol.

      Volume: 4(7) Pages: 2338-2341

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] A 100 nm thick InGaN/GaN multiple quantum-well column-crystallized thin film deposited on Si(111)substrate and its micromachining2007

    • Author(s)
      F. Hu, Y. Kanamori, K. Ochi, Y. Zhao, M. Wakui, K. Hane
    • Journal Title

      Nanotechnology

      Volume: 19(3)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Micromirror with two parallel rotation axes for external cavity diode laser2007

    • Author(s)
      M.Ishimori, M.Sasaki, K.Hane
    • Journal Title

      IEICE Trans. Electron vol. E90-C

      Pages: 72-77

    • NAID

      110007519559

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Tunable vertical comb for driving micromirror realized by bending drive wafer2007

    • Author(s)
      M.Sasaki, M.Ishimori, J.-H.Song, K.Hane
    • Journal Title

      IEICE Trans. Electron vol. E90-C

      Pages: 147-148

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Out-of-plane motion of 260-nm thick guided-mode resonant grating filter controlled by four micro-thermal actuators2007

    • Author(s)
      Y.Kanamori, T.Kitani, K.Hane
    • Journal Title

      Microsyst. Technol vol. 13

      Pages: 867-872

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror2007

    • Author(s)
      M. Sasaki, S. Yuki, K. Hane,
    • Journal Title

      IEEE J. Selected Topics in Quantum Elect ronics 13, Issue 2

      Pages: 290-296

    • NAID

      10022548226

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Journal Article] Geometrical characteristics of silicon cavities etiched in EDP2007

    • Author(s)
      H.Ju, T.Ohta, M.Ito, M.Sasaki, K.Hane, M.Hori
    • Journal Title

      J. Micromech. Microeng vol. 17

      Pages: 1012-1016

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Angled exposure method for patterning on three-dimensional structures2007

    • Author(s)
      V.K.Singh, M.Sasaki, K.Hane
    • Journal Title

      Jpn. J. Appl. Phys vol. 46

      Pages: 6449-6453

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Rigorous reflectance performance analysis of Si3N4 self-suspended subwavelength gratings2007

    • Author(s)
      J.S.Ye, Y.Kanamori, F.-R.Hu, K.Hane
    • Journal Title

      Opt. Commun vol. 270

      Pages: 233-237

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Nanocolumn InGaN/GaN quantum-well crystals on flat anf pillared Si substrates with nitrified Ga as a buffer layer2007

    • Author(s)
      F. Hu, K. Ochi, Y. Zhao, K. Hane
    • Journal Title

      Nanotechnology

      Volume: 18(27)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Photonic crystal waveguide switches with movable slabs2007

    • Author(s)
      K.Hane
    • Journal Title

      IEICE Transactions on Electronics E90-C・1

      Pages: 51-58

    • NAID

      110007519556

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Nanocolumn InGaN/GaN quantum-well crystals on flat anf pillared Si substrates with nitrified Ga as a buffer layer2007

    • Author(s)
      F. Hu, K. Ochi, Y. Zhao K. Hane
    • Journal Title

      Nanotechnology 18(27)

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Performance of tense thin-film torsion bar for large rotation and low-voltage driving of micromirror2007

    • Author(s)
      M.Sasaki, S.Yuki, K.Hane
    • Journal Title

      IEEE J. Selected Topics Quant. Electron vol. 13

      Pages: 290-296

    • NAID

      10022548226

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Photonic crystal waveguide switches with movable slabs2007

    • Author(s)
      K.Hane, et al.
    • Journal Title

      IEICE Transaction on Electronics E90-C-1

      Pages: 51-58

    • NAID

      110007519556

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Photonic crystal waveguide switches with movable slabs2007

    • Author(s)
      K.Hane, et al.
    • Journal Title

      IEICE Transaction on Electronics E90-C・1

      Pages: 51-58

    • NAID

      110007519556

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror2007

    • Author(s)
      Minoru Sasaki, Shinya Yuki, Kazuhiro Hane
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics Vol.13, Issue 2

      Pages: 290-296

    • NAID

      10022548226

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Journal Article] Narrow-band tunable optical filters using the self-suspended subwavelength grating2007

    • Author(s)
      J.S.Ye, Y.Kanemori, F.-R.Hu, K.Hane
    • Journal Title

      J. Mod. Opt vol. 54

      Pages: 827-832

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] A 100nm thick InGaN/GaN multiple quantum-well column-crystallized thin film deposited on Si(111) substrate and its micromachining2007

    • Author(s)
      F. Hu, Y. Kanamori, K. Ochi, Y. Zhao, M. Wakui, K. Hane
    • Journal Title

      Nanotechnology 19(3)

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] Micromachined surface emitting dye laser with a serf-suspended guided mode resonant grating2007

    • Author(s)
      N.Matsuyama, Y.Kanamori, J-S.Ye, K.Hane
    • Journal Title

      J. Opt. A: Pure Appl. Opt Vol. 9

      Pages: 940-944

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] InGaN/GaN quantum-well nanocolumn crystals on pillared Si substrate with InN as interlayer2007

    • Author(s)
      F. Hu, K. Ochi, Y. Zhao, K. Hane
    • Journal Title

      phys.stat.sol. 4(7)

      Pages: 2338-2341

    • Data Source
      KAKENHI-PROJECT-19106007
  • [Journal Article] A microtranslation table with scratch-drive actuators fabricated from silicon-on-insulator wafer2006

    • Author(s)
      Y.Kanamori, H.Yahagi, K.Hane
    • Journal Title

      Sensors and Actuators A 125・2

      Pages: 451-457

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Electrostatic actuator with segmented comb electrodes2006

    • Author(s)
      M.Sasaki, F.Bono, K.Hane
    • Journal Title

      IEEJ Trans. SM vol. 126

      Pages: 168-169

    • NAID

      10017538804

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar2006

    • Author(s)
      M.Sasaki, S.Yuki, K.Hane
    • Journal Title

      IEEE Photonics Technol. Lett vol. 18

      Pages: 1573-1575

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Guided-mode resonant grating filter fabricated on silicon-on-insulator substrate2006

    • Author(s)
      Y.Kanamori, T.Kitani, K.Hane
    • Journal Title

      Japanese Journal of Applied Physics 45・3A(in press)

    • NAID

      40007177968

    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Piezoresistive rotation angle sensor integrated in micromirror2006

    • Author(s)
      M.Sasaki, M.Tabata, T.Haga, and K.Hane
    • Journal Title

      Jpn. J. Appl. Phys vol. 45

      Pages: 3789-3793

    • NAID

      10022541010

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Piezoresistive rotation angle sensor integrated in micromirror2006

    • Author(s)
      M.Sasaki, K.Haga, M.Tabata, K.Hane
    • Journal Title

      Japanese Journal of Applied Physics 45(in press)

    • NAID

      10022541010

    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Guided-mode resonant grating filter fabricated on silicon-on-insulator substrate2006

    • Author(s)
      Y.Kanamori, T.Kitani, K.Hane
    • Journal Title

      Jpn. J. Appl. Phys vol. 45

      Pages: 1883-1885

    • NAID

      40007177968

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates2006

    • Author(s)
      Y.Kanamori, M.Shimono, K.Hane
    • Journal Title

      IEEE Photonics Technol. Lett vol. 18

      Pages: 2126-2128

    • NAID

      120000775232

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Exposure method for three-dimensional samples using phase shift mask2006

    • Author(s)
      M.Sasaki, T.Edwin, K.Hane
    • Journal Title

      IEEJ Trans. SM vol. 126

      Pages: 241-242

    • NAID

      10017586211

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Variable optical reflectance of a self-supported Si grating2006

    • Author(s)
      K.Hane, T.Kobayashi, F.-R.Hu, Y.Kanamori
    • Journal Title

      Appl. Phys. Lett vol. 88

    • NAID

      120000775228

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] 位相シフトマスクを利用した立体サンプルの露光法2006

    • Author(s)
      佐々木実, 陳俊中エドウィン, 羽根一博
    • Journal Title

      電気学会論文誌E (印刷中)

    • NAID

      10017582294

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Piezoresistive Rotation Angle Sensor Integrated in Micromirror2006

    • Author(s)
      M.Sasaki, Motoki Tabata, Tsukasa Haga, Kazuhiro Hane
    • Journal Title

      Japanese Journal of Applied Physics 45,No.4B(in press)

    • NAID

      10022541010

    • Data Source
      KAKENHI-PROJECT-17040003
  • [Journal Article] Variable optical reflectance of a self-supported Si grating2006

    • Author(s)
      K.Hane
    • Journal Title

      Applied Physics Letters 88・14

    • NAID

      120000775228

    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Self-supported subwavelength gratings with a broad band of high reflectance analyzed by the rigorous coupled-wave method2006

    • Author(s)
      J.S.Ye, Y.Kanamori, F.-R.Hu, K.Hane
    • Journal Title

      J. Mod. Opt vol. 53

      Pages: 1995-2004

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Deposition of thin and uniform photoresist on three-dimensional structures using fast flow in spray coating2005

    • Author(s)
      V.K.Singh, M.Sasaki, K.Hane, Y.Watanabe, H.Takamatsu, M.Kawakita, H.Hayashi
    • Journal Title

      J. Micromech. Microeng vol. 15

      Pages: 2339-2345

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Deposition of thin and uniform photoresist on three-dimensional structures using fast flow in spray coating2005

    • Author(s)
      V.K.Singh, M.Sasaki, K.Hane, Y.Watanabe, H.Takamatsu, M.Kawakita, H.Hayashi
    • Journal Title

      Journal of Micromechanics and Microengineering 15・12

      Pages: 2339-2345

    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] 高機能マイクロミラーデバイス2005

    • Author(s)
      佐々木実, 羽根一博
    • Journal Title

      光アライアンス,日本工業出版 16,No.12

      Pages: 30-34

    • Data Source
      KAKENHI-PROJECT-17040003
  • [Journal Article] ファイバ型光制御デバイスのための三次元的微細加工2005

    • Author(s)
      熊崎裕教, 稲葉成基, 羽根一博, 那須祐治
    • Journal Title

      電気学会論文誌E 125-E・5

      Pages: 211-215

    • NAID

      10015517870

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems2005

    • Author(s)
      V.K.Singh, M.Sasaki, J.-H.Song, K.Hane
    • Journal Title

      Jpn. J. Appl. Phys vol. 44

      Pages: 2016-2020

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Surface emission from solid polymer dye in a guided mode resonant grating filter structure2005

    • Author(s)
      T.Kobayashi, Y.Kanamori, K.Hane
    • Journal Title

      Applied Physics Letters 87・15

      Pages: 151106-151106

    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] A surface emitting solid polymer dye laser using a guided mode resonant grating for bio-optical detections2005

    • Author(s)
      T.Kobayashi, Y.Kanamori, K.Hane
    • Journal Title

      Proceedings of International Conference on Optical MEMS and Their Application

      Pages: 101-102

    • Data Source
      KAKENHI-PROJECT-16656047
  • [Journal Article] Surface emission from solid polymer dye in a guided mode resonant grating filter structure2005

    • Author(s)
      T.Kobayashi, Y.Kanamori, K.Hane
    • Journal Title

      Appl. Phys. Lett vol. 87

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Modified photo-sensors for grating-image type micro-encoder2005

    • Author(s)
      Y.Kanamori, R.Kamata, M.Mitamura, Y.Ito, K.Hane
    • Journal Title

      Microsystems Technology 11・8-10

      Pages: 980-986

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] ファイバ型光制御デバイスのための三次元的微細加工2005

    • Author(s)
      熊崎裕教, 稲葉成基, 羽根一博, 那須祐治
    • Journal Title

      電気学会論文誌(E センサ・マイクロマシン準部門誌) 125巻5号(印刷中)

    • NAID

      10015517870

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14550249
  • [Journal Article] Three-dimensional micro-machining for fiber type optical control devices2005

    • Author(s)
      H.Kumazaki, S.Inaba, K.Hane, Y.Nasu
    • Journal Title

      T.IEE Japan. (in press)

    • NAID

      10015517870

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14550249
  • [Journal Article] Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems2005

    • Author(s)
      V.K.Singh, M.Sasaki, J.-H.Song, K.Hane
    • Journal Title

      Japanese Journal of Applied Physics 44・4A

      Pages: 2016-2020

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Compact triangular sensor array constructed by wafer bending2005

    • Author(s)
      S.Endou, M.Ishimori, M.Sasaki, K.Hane
    • Journal Title

      Japanese Journal of Applied Physics 44・4B

      Pages: 2874-2878

    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] Development of MEMS-based Optical Surge Suppressor2005

    • Author(s)
      T.Hirata, I.Mitama, M.Abe, K.Makita, K.Shiba, K.Hane, M.Sasaki
    • Journal Title

      Proceedings of OFC/NFOEC 2005 Conference

    • Data Source
      KAKENHI-PROJECT-14655094
  • [Journal Article] Piezoresistive rotation angle sensor integrated in micromirror2005

    • Author(s)
      M.Sasaki, M.Tabata, T.Haga, K.Hane
    • Journal Title

      Extended abstracts of Int. Conf. on Solid State Devices and Materials, D-1-2(2005.9.13-15,Kobe).

      Pages: 72-73

    • NAID

      10022541010

    • Data Source
      KAKENHI-PROJECT-17040003
  • [Journal Article] Three-dimensional micro-machining for fiber type optical control devices2005

    • Author(s)
      H.Kumazaki, S.Inaba, K.Hane, Y.Nasu
    • Journal Title

      IEEj Transactions on Sensors and Micromachines Vol.125

    • NAID

      10015517870

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-13650291
  • [Journal Article] Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device2005

    • Author(s)
      Motoki Tabata, Minoru Sasaki, Kazuhiro Hane
    • Journal Title

      Proceedings of the 22nd Sensor Symposium

      Pages: 45-48

    • Data Source
      KAKENHI-PROJECT-17040003
  • [Journal Article] Fiber-optical switch using cam-micromotor driven by scratch drive Actuators2005

    • Author(s)
      Y.Kanamori, Y.Aoki, M.Sasaki, H.Hosoya, A.Wada, K.Hane
    • Journal Title

      Journal of Micromechanics and Microengineering 15

      Pages: 118-123

    • Data Source
      KAKENHI-PROJECT-14655094
  • [Journal Article] Three-dimensional micro-machining for fiber-type optical control devices2005

    • Author(s)
      H.Kumazaki, S.Inaba, K.Hane, Y.Nasu
    • Journal Title

      IEEJ Trans. SM vol. 125-E

      Pages: 211-215

    • NAID

      10015517870

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Journal Article] An Assembly Method for Ball Lens Using Wafer Bonding2004

    • Author(s)
      F.Nakai, M.Sasaki, K.Hane, K.Yokomizo, K.Hori
    • Journal Title

      Proceedings of International Conference Optical MEMS

      Pages: 116-117

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Applications of photochromic materials to light-light control devices2004

    • Author(s)
      H.Kumazaki, K.Nakashima, S.Inaba, K.Hane, M.Irie
    • Journal Title

      Optical Alliance Vol.15 No.5

      Pages: 18-18

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14550249
  • [Journal Article] Pitch-Variable Subwavelength Gratings Driven by Comb Actuators2004

    • Author(s)
      T.Kobayashi, Y.Kanamori, K.Hane
    • Journal Title

      Proceedings of International Conference Optical MEMS

      Pages: 198-199

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] An Assembly Method for Ball Lens Using Wafer Bonding2004

    • Author(s)
      F.Nakai, M.Sasaki, K.Hane, K.Yokomizo, K.Hori
    • Journal Title

      2004 IEEE/LEOS International Conference on Optical MEMS, P-26

      Pages: 116-117

    • Data Source
      KAKENHI-PROJECT-14655094
  • [Journal Article] Micromachining of optical fiber and its application2004

    • Author(s)
      S.Inaba, H.Kumazaki, K.Nakashima, F.Inoue, K.Hane
    • Journal Title

      Memoirs of Gifu National College of Technology Vol.39

      Pages: 105-108

    • NAID

      110004649478

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-13650291
  • [Journal Article] MEMS技術による光学システムの集積化2004

    • Author(s)
      佐々木実, 羽根一博, 金森義明
    • Journal Title

      光アライアンス Vol.15,No.6

      Pages: 1-5

    • Data Source
      KAKENHI-PROJECT-14655094
  • [Journal Article] Wavelength Selective Variable reflection Filters Using Movable Guided Mode resonance gratings2004

    • Author(s)
      Y.Kanamori, T.Kitani, K.Hane
    • Journal Title

      Proceedings of International Conference Optical MEMS

      Pages: 204-205

    • Data Source
      KAKENHI-PROJECT-16656047
  • [Journal Article] 解説フォトクロミック材料の光-光制御デバイスへの応用2004

    • Author(s)
      熊崎裕教, 中島健作, 稲葉成基, 羽根一博, 入江正浩
    • Journal Title

      月刊 光アライアンス 15巻5号

      Pages: 18-22

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14550249
  • [Journal Article] Resonant Cavity Thin Film Photodiode for Compact Displacement Sensor2004

    • Author(s)
      M.Sasaki, F.Nakai, X.Mi, K.Hane
    • Journal Title

      Japanese Journal of Applied Physics 43

      Pages: 2381-2386

    • NAID

      10012950324

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Flow Condition in Resist Spray and Patterning Performance for Three-Dimensional Photolithographyover Deep Structures2004

    • Author(s)
      V.Singh, M.Sasaki, K.Hane, M.Esashi
    • Journal Title

      Japanese Journal of Applied Physics 43

      Pages: 2387-2391

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Improved Resist Film Quality Prepared by Spray Coating for 3D-MEMS2004

    • Author(s)
      V.Singh, M.Sasaki, K.Hane, Y.Watanabe, M.Kawakita, H.Hayahi
    • Journal Title

      Proceedings of International Conference Optical MEMS

      Pages: 118-119

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Three-Dimensional SOI-MEMS Constructed by Buckled Bridges and Vertical Comb Drive Actuator2004

    • Author(s)
      M.Sasaki, D.Briand, W.Noell, N.de Rooij, K.Hane
    • Journal Title

      IEEE Journal of Selected Topics Quantum Electronics 10

      Pages: 455-461

    • NAID

      120002070119

    • Data Source
      KAKENHI-PROJECT-14102022
  • [Journal Article] Applications of photochromic materials to light-light control devices2003

    • Author(s)
      K.Nakashima, H.Kumazaki, S.Inaba, K.Hane, M.Irie
    • Journal Title

      Proceedings of 28^<th> Kogaku Symposium

      Pages: 81-81

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14550249
  • [Journal Article] フォトクロミック材料の光-光制御デバイスへの応用2003

    • Author(s)
      中島健作, 熊崎裕教, 稲葉成基, 羽根一博, 入江正浩
    • Journal Title

      第28回光学シンポジウム(光学技術・学術講演会)講演予稿集 AP O32216

      Pages: 81-82

    • NAID

      40006184983

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14550249
  • [Patent] 全方位走査ミラー2020

    • Inventor(s)
      羽根一博、佐々木敬
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2020
    • Acquisition Date
      2021
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Patent] 全方位走査ミラー2020

    • Inventor(s)
      羽根一博、佐々木敬
    • Industrial Property Rights Holder
      羽根一博、佐々木敬
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2020-037186
    • Filing Date
      2020
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Patent] 走査ミラーおよび走査ミラーの製造方法2020

    • Inventor(s)
      羽根一博、佐々木敬、藤田裕樹
    • Industrial Property Rights Holder
      羽根一博、佐々木敬、藤田裕樹
    • Industrial Property Rights Type
      特許
    • Filing Date
      2020
    • Acquisition Date
      2020
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Patent] 走査ミラーおよび走査ミラーの製造方法2019

    • Inventor(s)
      羽根一博、佐々木敬、藤田祐樹
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2019
    • Acquisition Date
      2020
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Patent] 光導波路デバイス及びその製造方法2008

    • Inventor(s)
      羽根一博 金森義明
    • Industrial Property Rights Holder
      東北大学
    • Patent Publication Number
      2008-268891
    • Filing Date
      2008-11-06
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Patent] 光導波路デバイス及びその製造方法2008

    • Inventor(s)
      羽根一博, 金森義明
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2008-043834
    • Filing Date
      2008-02-26
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Patent] 光フィルター装置及びその製造方法2007

    • Inventor(s)
      金森義明, 羽根一博
    • Industrial Property Rights Holder
      東北大学
    • Filing Date
      2007-03-02
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14102022
  • [Patent] 光フィルター装置及びその製造方法2007

    • Inventor(s)
      金森義明、羽根義明
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2007-076748
    • Filing Date
      2007-03-23
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Patent] 光フィルター装置及びその製造方法2007

    • Inventor(s)
      金森義明, 羽根一博
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2007-076748
    • Filing Date
      2007-03-23
    • Data Source
      KAKENHI-PROJECT-14102022
  • [Patent] 光導波路デバイス装置及びその製造方法2007

    • Inventor(s)
      羽根一博, 金森義明
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2007-076749
    • Filing Date
      2007-03-23
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Patent] 光導波路デバイス装置及びその製造方法2007

    • Inventor(s)
      羽根一博、金森義明
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2007-076749
    • Filing Date
      2007-03-23
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Patent] マイクロミラーデバイス及びマイクロミラーデバイスを利用した装置2006

    • Inventor(s)
      佐々木実, 羽根一博
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2006-141324
    • Filing Date
      2006-05-22
    • Data Source
      KAKENHI-PROJECT-17040003
  • [Patent] マイクロミラーデバイスとその製造方法,マイクロミラーデバイスの角度計測方法,およびマイクロミラーデバイス応用装置2005

    • Inventor(s)
      佐々木実、羽根一博
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2005-219851
    • Filing Date
      2005-07-29
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Patent] レーザー共振器装置およびその製造方法2005

    • Inventor(s)
      羽根一博、金森義明
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2005-185888
    • Filing Date
      2005-06-27
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Patent] マイクロミラーデバイス、マイクロミラーデバイスの製造方法、マイクロミラーデバイスの計測方法、及び、マイクロミラーデバイスを利用した装置2005

    • Inventor(s)
      佐々木実, 羽根一博
    • Industrial Property Rights Holder
      国立大学法人東北大学
    • Industrial Property Number
      2005-219851
    • Filing Date
      2005-07-29
    • Data Source
      KAKENHI-PROJECT-17040003
  • [Patent] サブ波長周期格子を用いたレーザー装置2005

    • Inventor(s)
      羽根一博、金森義明
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2005-158129
    • Filing Date
      2005-05-31
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Patent] 光学装置、光学装置組立体、光学装置集合体、光学素子固定手段、光学装置部品、光学装置の製造方法、光学装置の組立方法2004

    • Inventor(s)
      横溝 寛治, 堀 和仁, 羽根 一博, 佐々木 実
    • Industrial Property Rights Holder
      ソニー株式会社
    • Industrial Property Number
      2004-240276
    • Filing Date
      2004-08-20
    • Data Source
      KAKENHI-PROJECT-14655094
  • [Presentation] 光応用技術のためのMEMS2020

    • Author(s)
      羽根一博
    • Organizer
      精密工学会春季大会学術講演会
    • Invited
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Presentation] 全方位走査用ジンバル型スキャナの振動特性解析2020

    • Author(s)
      佐々木敬、鈴木克也、羽根一博
    • Organizer
      センサシンポジウム
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Presentation] Motion nonlinearity of gimbaled micromirror in omnidirectional scanning for LiDAR application2020

    • Author(s)
      Katsuya Suzuki, Takashi Sasaki, Kazuhiro Hane
    • Organizer
      IEEE International Conference on Nano/Micro Engineering and Molecular Systems
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Presentation] 全方位走査のためのジンバル型二軸共振MEMSスキャナ2019

    • Author(s)
      鈴木克也 佐々木敬 羽根一博
    • Organizer
      応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Presentation] Cycloidal scanning with MEMS micro mirror for an omnidirectional long range LiDAR2019

    • Author(s)
      Takeaki Kobayashi, Takashi Sasaki, Kazuhiro Hane
    • Organizer
      International Conference on Optical MEMS and Nanophotonics(OMN)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Presentation] 平行平板レバレッジ型走査ミラーの設計2019

    • Author(s)
      藤田裕樹、佐々木敬、羽根一博
    • Organizer
      精密工学会東北支部講演会
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Presentation] Nonlinear Spring Tuning by Electrostatic Combs in Micro Mirror Scanner2018

    • Author(s)
      Kazuhiro Hane
    • Organizer
      Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Presentation] MEMS photonic devices on hybrid Gan/Si platform2018

    • Author(s)
      Kazuhiro Hane
    • Organizer
      IEEE International Conference on Nano/Micro Engineered & Molecular Systems
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Presentation] Nonlinearity compensation of micro-mirror hard-spring by electrostatic combs2017

    • Author(s)
      Kazuhiro Hane
    • Organizer
      Transducers 2017
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H01267
  • [Presentation] Integrated Fluorescent Analysis System with Monolithic GaN Light Emitting Diode on Si Platform2012

    • Author(s)
      H. Nakazato, H. Kawaguchi, A. Iwabuchi, K. Hane
    • Organizer
      IEEE MEMS 2012
    • Place of Presentation
      Paris, France
    • Year and Date
      2012-01-30
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Integrated Fluorescent Analysis System with Monolithic GaN Light Emitting Diode on Si Platform2012

    • Author(s)
      H.Nakazato, H.Kawaguchi, A.Iwabuchi, K.Hane
    • Organizer
      MEMS 2012
    • Place of Presentation
      Paris, France
    • Year and Date
      2012-01-30
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Compound switch consisting of gap-variable silicon nanowire waveguide couplers2012

    • Author(s)
      Kazuhiro Hane
    • Organizer
      17th Opto-Electronics and Communicaiotns Conference
    • Place of Presentation
      Korea, Busan
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Presentation] 水素アニールによるSiエッチング加工面のラフネス低減2011

    • Author(s)
      佐藤裕一、金森義明、羽根一博
    • Organizer
      平成23年度電気学会E部門(センサ・マイクロマシン部門)総合研究会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2011-06-30
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] GaN comb-drive actuators on Si substrate2011

    • Author(s)
      T. Tanae, H. Sameshima, K. Hane
    • Organizer
      The 16th Int. Conf. Solid-State Sensors, Actuators and Microsystems, M3P
    • Place of Presentation
      Beijing, China
    • Year and Date
      2011-06-03
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Silicon submicron waveguide and MEMS tunable optical telecommunication devices2011

    • Author(s)
      K.Hane, Y.Kanamori
    • Organizer
      International Conference on Micro/Nano Optical Engineering (ICOME 2011)
    • Place of Presentation
      Changchun, China(招待講演)
    • Year and Date
      2011-06-13
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Presentation] Integration of MEMS actuators with nanophotonics : silicon submicron-wide waveguides for optical path changes2011

    • Author(s)
      K.Hane, Y.Kanamori
    • Organizer
      The16th Opto-Electronics and Communication Conferences (OECC2911)
    • Place of Presentation
      Kaohsiung, Taiwan(招待講演)
    • Year and Date
      2011-07-07
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Presentation] Silicon submicron waveguide and MEMS tunable optical telecommunication devices2011

    • Author(s)
      K.Hane, Y.Kanamori
    • Organizer
      International Conference on Micro/Nano Optical Engineering (ICOME 2011)
    • Place of Presentation
      Changchun, China(Invited)
    • Year and Date
      2011-06-13
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Comb-drive III-nitride micro mirror fabricated by fast atom beam etching2011

    • Author(s)
      Y. Wang, T. Sasaki, T. Wu, F. Hu, K. Hane
    • Organizer
      The 16th Int. Conf. Solid-State Sensors, Actuators and Microsystems, M3P
    • Place of Presentation
      Beijing, China
    • Year and Date
      2011-06-03
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] GaN Comb-Drive Actuators on Si Substrate2011

    • Author(s)
      T.Tanae, H.Sameshima, K.Hane
    • Organizer
      Transducers '11
    • Place of Presentation
      Beijing, China
    • Year and Date
      2011-06-03
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] 高温真空アニールによるSi深掘りエッチング面の平滑化と雰囲気ガスの影響2011

    • Author(s)
      佐藤裕一、金森義明、羽根一博
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学
    • Year and Date
      2011-08-29
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] Integration of MEMS actuators with nanophotonics : silicon submicron-wide waveguides for optical path changes2011

    • Author(s)
      K. Hane and Y. Kanamori
    • Organizer
      The16th Opt-Electron. Communi. Conf.(OECC2911)
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      2011-07-07
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Silicon submicron waveguide and MEMS tunable optical telecommunication devices2011

    • Author(s)
      K. Hane and Y. Kanamori
    • Organizer
      Int. Conf. Micro/Nano Opt. Eng.(ICOME2011)
    • Place of Presentation
      Changchun, China
    • Year and Date
      2011-06-13
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Integration of MEMS actuators with nanophotonics : silicon submicron-wide waveguides for optical path changes2011

    • Author(s)
      K.Hane, Y.Kanamori
    • Organizer
      The16th Opto-Electronics and Communication Conferences (OECC2911)
    • Place of Presentation
      Kaohsiung, Taiwan(Invited)
    • Year and Date
      2011-07-07
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] GaN pitch-variable grating fabricated on Si substrate2010

    • Author(s)
      羽根一博
    • Organizer
      International Conference on Optical MEMS & Nanophotonics
    • Place of Presentation
      札幌
    • Year and Date
      2010-08-10
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Submicron silicon waveguide Mach-Zehnder interferometer using micro electro-mechanical phase-shifter2010

    • Author(s)
      T. Ikeda, Y. Kanamori, and K. Hane
    • Organizer
      International Conference on Optical MEMS and Nanophotonics 2010
    • Place of Presentation
      札幌
    • Year and Date
      2010-08-09
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] Submicron silicon waveguide Mach-Zehnder interferometer using micro electro-mechanical phase-shifter2010

    • Author(s)
      Taro Ikeda, Yoshiaki Kanamori, Kazuhiro Hane
    • Organizer
      International Conference on Optical MEMS & Nanophotonics
    • Place of Presentation
      札幌
    • Year and Date
      2010-08-11
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Presentation] Submicron silicon waveguide Mach-Zehnder interferometer using microelectro-mechanical phase-shifter2010

    • Author(s)
      T.Ikeda, Y.Kanamori, K.Hane
    • Organizer
      International Conference on Optical MEMS and Nanophotonics 2010
    • Place of Presentation
      札幌
    • Year and Date
      2010-08-09
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] 可動シリコンマイクロリング共振器を用いた波長選択アドドロップスイッチの特性評価2010

    • Author(s)
      高橋一法、金森義明、國分泰雄、羽根一博
    • Organizer
      2010年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      平塚
    • Year and Date
      2010-03-17
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] GaN pitch-variable grating fabricated on Si substrate2010

    • Author(s)
      H. Sameshima, T. Tanae, K. Hane
    • Organizer
      Proc. Optical MEMS and Nanophotonics
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2010-08-10
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] 可動シリコンマイクロリング共振器を用いた波長選択アドドロップスイッチの特性評価2010

    • Author(s)
      高橋一法, 金森義明, 國分泰雄, 羽根一博
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      平塚
    • Year and Date
      2010-03-17
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] Fabrication of antireflective subwavelength gratings on the end faces of single mode optical fibers using UV nanoimprint lithography2010

    • Author(s)
      Masaaki Okochi, Yoshiaki Kanamori, and Kazuhiro Hane
    • Organizer
      2010 International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      小倉
    • Year and Date
      2010-10-26
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] Nanoscale epitaxial growth of GaN on freestanding circular GaN graitng2010

    • Author(s)
      Y. Wang, F. Hu, K. Hane
    • Organizer
      Proc. Optical MEMS and Nanophotonics
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2010-08-11
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] 近赤外光用サブ波長反射防止構造の光学設計および自己組織化微粒子を用いた製作2009

    • Author(s)
      金森義明、灰田周平、羽根一博
    • Organizer
      26th Sensor Symposium on Sensors、Micromachines and Applied Systems
    • Place of Presentation
      東京
    • Year and Date
      2009-10-15
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] Monolithically integration of GaN light-emitting diode and Si substrate with AlN/GaN superlattice and interlayer2009

    • Author(s)
      F. Hu, M. Wakui, H. Sameshima, R. Ito, K. Hane
    • Organizer
      2009 JSME-IIP/ASME-ISPS Joint Conf. Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2009-06-20
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Fabrication of variable-reflection photonic crystal MEMS filters using subwavelength-grating-embedded substrates2009

    • Author(s)
      Y. Kanamori, S. Haida, and K. Hane
    • Organizer
      2009 International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      札幌
    • Year and Date
      2009-11-16
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] GaN-LED grown on Si substrate by MBE/MOCVD and monolithic fabrication of a light distribution variable device2009

    • Author(s)
      M. Wakui, R. Ito, H. Sameshima, F. Hu, K. Hane
    • Organizer
      The 15th Int. Conf. Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      Denver U. S. A.
    • Year and Date
      2009-06-23
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Spherical silicon micro-mirrors bent by anodic bonding2009

    • Author(s)
      Takahiro Yamazaki, Ryohei Hokari, Kazuhiro Hane
    • Organizer
      IEEE/LEOS Int.Conference on Optical MEMS and Nano-Photonics
    • Place of Presentation
      Clearwater, USA.
    • Year and Date
      2009-08-18
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Presentation] Micromirror realized by combined surface and bulk micromachining using isotropic and anisotropic Si etching2009

    • Author(s)
      MINORU SASAKI, SHINYA KUMAGAI, KAZUHIRO HANE
    • Organizer
      First International Symposium on Advanced Plasma Science and its Applications
    • Place of Presentation
      名古屋
    • Year and Date
      2009-03-09
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] サブ波長反射防止構造が埋め込まれた反射率可変導波共鳴MEMSフィルタ2009

    • Author(s)
      金森義明、灰田周平、羽根一博
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-08
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] Connection characteristics of silicon nanowire waveguides and fabrication of physical contact switches2009

    • Author(s)
      Erdal Bulgan, Yoshiaki Kanamori, Kazuhiro Hane
    • Organizer
      IEEE 15th Int.Conference on Solid-State Sensors, Actuators and Microssytems
    • Place of Presentation
      Denver, USA.
    • Year and Date
      2009-06-23
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Presentation] 近赤外光用サブ波長反射防止構造の光学設計および自己組織化微粒子を用いた製作2009

    • Author(s)
      金森義明, 灰田周平, 羽根一博
    • Organizer
      26th Sensor Symposium on Sensors, Micromachines and Applied Systems
    • Place of Presentation
      東京
    • Year and Date
      2009-10-15
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] GaN-LED grown on Si substrate by MBE/MOCVD and monolithic fabrication of a light distribution variable device2009

    • Author(s)
      M. Wakui, R. Ito, H. Sameshima, F. Hu, K. Hane
    • Organizer
      The 15th Int. Conf. Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      Denver, U. S. A
    • Year and Date
      2009-06-23
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] サブ波長反射防止構造が埋め込まれた反射率可変導波共鳴MEMSフィルタ2009

    • Author(s)
      金森義明, 灰田周平, 羽根一博
    • Organizer
      2009年秋季 第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-08
    • Data Source
      KAKENHI-PROJECT-21656087
  • [Presentation] GaN-LED grown on Si substrate by MBE/MOCVD and monolithic fabrication of a light distribution variable device2009

    • Author(s)
      羽根一博
    • Organizer
      The 15th International Conference Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      Denver, U.S.A.
    • Year and Date
      2009-06-23
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress2008

    • Author(s)
      M. Sasaki, K. Hane, D. Briand, W. Noell, N. de Rooij
    • Organizer
      Proceedings of The 15th International Display Workshops, MEMS3-4
    • Place of Presentation
      Niigata, Japan
    • Year and Date
      2008-12-04
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device2008

    • Author(s)
      Takuro Aonuma, Shinya Kumagai, Minoru Sasaki, Motoki Tabata, Kazuhiro Hane
    • Organizer
      Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials, Tsukuba
    • Place of Presentation
      Tukuba, Japan
    • Year and Date
      2008-09-26
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Silicon substrate with antireflection subwavelength gratings for optical communication devices fabricated with nano-particle masks2008

    • Author(s)
      S.Haida, Y.Kanamori, K.Hane
    • Organizer
      21th Int. Microprocesses and Nanotechnology Conf
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-10-29
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Silicon Self-Suspended Resonant Grating Filters at Telecommunication Wavelength2008

    • Author(s)
      J.Ye, N.Matsuyama, Y.Kanamori, K.Hane
    • Organizer
      CLEO 2008
    • Place of Presentation
      San Jose, U.S.A
    • Year and Date
      2008-05-06
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Monolithic fabrication of GaN LEDs on Si wafer and GaN membrane structure for cooling system2008

    • Author(s)
      M. Wakui, F. Hu, H. Sameshima, K. Hane
    • Organizer
      Proc. Pwer MEMS
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2008-11-10
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Micromirror Using Thin Film Torsion Bar with Crystallization-Induced Stress2008

    • Author(s)
      Minoru Sasaki, Masayuki Fujishima, Hideo Miura, Kazuhiro Hane
    • Organizer
      The 2nd International Symposium on Next-Generation Actuators Leading Breakthroughs
    • Place of Presentation
      Makuhari, Japan
    • Year and Date
      2008-04-17
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Silicon microring resonator connected with submicron comb actuator2008

    • Author(s)
      K. Hane
    • Organizer
      International Conference on Optical MEMS and Nanophotoincs
    • Place of Presentation
      Freibrug, Germany
    • Year and Date
      2008-08-14
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Piezoresistive Rotation Angle Sensor in Micromirror for Feedback Control2008

    • Author(s)
      Takuro Aonuma, Minoru Sasaki, Shinya Kumagai, Motoki Tabata, Kazuhiro Hane
    • Organizer
      Proceedings of the 7th International Conference on Machine Automation
    • Place of Presentation
      Awaji, Japan
    • Year and Date
      2008-09-26
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Fabrication of variable drop filters with resonant cavities in photonic crystals using thin comb-drive actuators2008

    • Author(s)
      Y.Kanamori, K.Takahashi, K.Hane
    • Organizer
      21th Int. Microprocesses and Nanotechnology Conf
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-10-30
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Monolithic fabrication of GaN LEDs on Si wafer and GaN membrane structure for cooling system2008

    • Author(s)
      M. Wakui, F. Hu, H. Sameshima, K. Hane
    • Organizer
      Proc. Power MEMS 2008+ microEMS2008
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2008-11-10
    • Data Source
      KAKENHI-PROJECT-19106007
  • [Presentation] Stabilization of Temperature Characteristics of Micromirror for Low-Voltage Driving Using Thin Film Torsion Bar of Tensile Poly-Si2008

    • Author(s)
      Minoru Sasaki, Masayuki Fujishima, Kazuhiro Hane, Hideo Miura
    • Organizer
      Program of 2008 IEEE/LEOS Int. Conf. Optical MEMS and Nanophotonics
    • Place of Presentation
      Freiburg, Germany
    • Year and Date
      2008-08-13
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Nonlinear Rotational Spring with Tension for Stabilizing Electrostatically Driven Micromirror2008

    • Author(s)
      M. Sasaki, S. Kumagai, K. Hane
    • Organizer
      2008 International Symposium on Micro-NanoMechatronics and Human Science, Organized Session : SA-2 : Actuators
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2008-11-08
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] 対になったテーブルを走査する静電駆動型大変位マイクロXYステージ2007

    • Author(s)
      佐々木実, 坊野史典, 羽根一博
    • Organizer
      第19回「電磁力関連のダイナミクス」シンポジウム・講演論文集B146, pp.124-125
    • Place of Presentation
      早稲田
    • Year and Date
      2007-05-16
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] "DRIVING OF MICROMIRROR AND SIMULTANEOUS DETECTION OF ROTATION ANGLE USING INTEGRATED PIEZORESISTIVE SENSOR", Digest of Technical Papers of Transducers' 072007

    • Author(s)
      Minoru Sasaki, Motoki Tabata, Kazuhiro Hane
    • Organizer
      The 14th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      Lyon, France
    • Year and Date
      2007-06-13
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Optically Flat Micromirror Using Stretched Membrane with Crystallization-Induced Stress2007

    • Author(s)
      Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, and Hideo Miura
    • Organizer
      Proceedings of Optical MEMS & Nanophotonics 2007, International Conference on Optical MEMS and Nanophotonics, MC3
    • Place of Presentation
      Hualien, Taiwan
    • Year and Date
      2007-08-13
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror2007

    • Author(s)
      Minoru Sasaki, Shinya Yuki, Kazuhiro Hane
    • Organizer
      Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials, D-2-4, pp.92-93
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2007-09-19
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Driving of micromirror and simultaneous detection of rotation angle using integrated piezoresistive sensor2007

    • Author(s)
      M.Sasaki, M.Tabata, K.Hane
    • Organizer
      The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      Lyon France
    • Year and Date
      2007-06-10
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Large Displacement Micro XY-Stage with Paired Moving Plates2007

    • Author(s)
      Minoru Sasaki, Fuminori Bono, Kazuhiro Hane
    • Organizer
      Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2007-09-19
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Self-supported pitch-variable guided-mode resonant grating filters at telecom wavelength2007

    • Author(s)
      Y.Kanamori, N.Matsuyama, J.-S.Ye, K.Hane
    • Organizer
      Int. Conf. on Optical MEMS and Nanophotoincs
    • Place of Presentation
      Hualien, Taiwan
    • Year and Date
      2007-08-12
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Passivated Piezo-resistive Rotation Angle SensorIntegrated in Micromirror2007

    • Author(s)
      Minoru Sasaki, Motoki Tabata, and Kazuhiro Hane
    • Organizer
      Proceedings of Optical MEMS & Nanophotonics 2007,International Conference on Optical MEMS and Nanophotonics, ThB2
    • Place of Presentation
      Hualien, Taiwan
    • Year and Date
      2007-08-16
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Optically Flat Micromirror Using Stretched Membrane with Crystallization-Induced Stress2007

    • Author(s)
      Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura
    • Organizer
      Proceedings of The 4th Public Symposium on Next-Generation Actuators Leading Breakthroughs
    • Place of Presentation
      Okinawa, Japan
    • Year and Date
      2007-11-19
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Passivated Piezoresistive Rotation Angle Sensor Integrated in Micromirror2007

    • Author(s)
      Minoru Sasaki, Motoki Tabata, Kazuhiro Hane
    • Organizer
      Proc. of Optical MEMS & Nanophotonics 2007, International Conference on Optical MEMS and Nanophotonics, ThB2, pp.193-194
    • Place of Presentation
      Hualien, Taiwan
    • Year and Date
      2007-08-16
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Optically Flat Micromirror Using Stretched Membrane with Crystallization-Induced Stress2007

    • Author(s)
      Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura
    • Organizer
      International Conference on Optical MEMS and Nanophotonics
    • Place of Presentation
      Hualien, Taiwan
    • Year and Date
      2007-08-13
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Optically flat micromirror using stretched membrane with crystallization-induced stress2007

    • Author(s)
      M.Sasaki, T.Sasaki, K.Hane, H.Miura
    • Organizer
      Int. Conf. on Optical MEMS and Nanophotoincs
    • Place of Presentation
      Hualien, Taiwan
    • Year and Date
      2007-08-13
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] 「対になったテーブルを走査する静電駆動型大変位マイクロXY ステージ」B1462007

    • Author(s)
      佐々木実,坊野史典,羽根一博
    • Organizer
      第19回「電磁力関連のダイナミクス」シンポジウム
    • Place of Presentation
      早稲田大学
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Subwavelength gratings combined with MEMS2007

    • Author(s)
      K.Hane, J.-S.Ye, Y.Kanamori
    • Organizer
      The 14th Int. Display Workshops
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2007-12-06
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Optically Flat Micromirror Using Stretched Membrane with Crystallization-Induced Stress2007

    • Author(s)
      Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura
    • Organizer
      Proceedings of The 4th Public Symposium on Next-Generation Actuators Leading Breakthroughs, pp.49-52
    • Place of Presentation
      Okinawa, Japan
    • Year and Date
      2007-11-19
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Performance of tense thin film torsion bar for large-rotation and low-voltage driving of micromirror2007

    • Author(s)
      M.Sasaki, S.Yuki, K.Hane
    • Organizer
      2007 Int. Conf. on Solid State Devices and Materials
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2007-09-18
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror2007

    • Author(s)
      Minoru Sasaki, Shinya Yuki, Kazuhiro Hane
    • Organizer
      Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2007-09-19
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Large Displacement Micro XY-Stage with Paired Moving Plates2007

    • Author(s)
      Minoru Sasaki, Fuminori Bono, Kazuhiro Hane
    • Organizer
      Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials, D-2-2, pp.88-89
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2007-09-19
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Passivated piezoresistive rotation angle sensor integrated in micromirror2007

    • Author(s)
      M.Sasaki, M.Tabata, K.Hane
    • Organizer
      Int. Conf. on Optical MEMS and Nanophotoincs
    • Place of Presentation
      Hualien, Taiwan
    • Year and Date
      2007-08-16
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Mechanical-contact-based submicron- Si- waveguide optical microswitch at telecommunication wavelengths2007

    • Author(s)
      E.Bulgan, Y.Kanamori, K.Hane
    • Organizer
      Int. Conf. on Optical MEMS and Nanophotoincs, Hualien
    • Place of Presentation
      Taiwan
    • Year and Date
      2007-08-14
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Tunable optical filters with a nanostructured suspended grating2007

    • Author(s)
      J.-S.Ye, Y.Kanamori, F.-R.Hu, K.Hane
    • Organizer
      Int. Conf. on Nanoscience and Technology
    • Place of Presentation
      Beijing, China
    • Year and Date
      2007-06-04
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Optically Flat Micromirror Designs Using Stretched Membrane with Crystallization-Induced Stress2007

    • Author(s)
      Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, and Hideo Miura
    • Organizer
      Proceedings of 2007 IEEE/LEOS Annual Meeting Conference, ThC2
    • Place of Presentation
      Florida, USA
    • Year and Date
      2007-10-25
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Subwavelength gratings combined with MEMS2007

    • Author(s)
      K. Hane
    • Organizer
      The 14th International Display Workshops
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2007-12-06
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Optically Flat Micromirror Designs Using Stretched Membrane with Crystallization-Induced Stress2007

    • Author(s)
      Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura
    • Organizer
      Proceedings of 2007 IEEE LEOS Annual Meeting Conference, ThC2, pp.709-710.
    • Place of Presentation
      Lake Buena Vista, Florida, USA
    • Year and Date
      2007-10-25
    • Data Source
      KAKENHI-PROJECT-19016003
  • [Presentation] Fabrication of pitch-variable MEMS gratings using thermal and electronic actuators2007

    • Author(s)
      Y.Kanamori, T.Kobayashi, K.Hane
    • Organizer
      2007 Int. Microprocesses and Nanotechnology Conf
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2007-11-06
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Fiber-Bragg gratuned by micro-heater array2006

    • Author(s)
      V.K.Singh, M.Sasaki, K.Hane
    • Organizer
      5th Int. Conf. on Optics-photonics Design and Fabrication
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2006-12-07
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Tunable optical filters by using self-suspended subwavelength gratings2006

    • Author(s)
      J.-S.Ye, Y.Kanamori, F.-R.Hu, K.Hane
    • Organizer
      5th Int. Conf. on Optics-photonics Design and Fabrication
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2006-12-07
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Movable guided-mode resonant grating filters by four bimorph actuators for wavelength selective dynamic reflection control2006

    • Author(s)
      Y.Kanamori, T.Kitani, K.Hane
    • Organizer
      IEEE/LEOS Int. Conf. on Optical MEMs and Their Application
    • Place of Presentation
      Big Sky, U.S.A
    • Year and Date
      2006-08-22
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Optical MEMS and NEMS : Thin film micro/nano machining and integration2006

    • Author(s)
      K.Hane
    • Organizer
      The 49th Society of Vacuum Coaters Tech. Conf
    • Place of Presentation
      Washington, DC, U.S.A
    • Year and Date
      2006-04-25
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Silicon microring resonator connected with submicron comb actuator2006

    • Author(s)
      K.Takahashi, Y.Kanamori, K.Hane
    • Organizer
      Int. Conf. on Optical MEMS and Nanophotoincs
    • Place of Presentation
      Freibrug, Germany
    • Year and Date
      2006-08-14
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Photonic structure and materials combined with micro/nano-electro-mechanical systems2006

    • Author(s)
      K.Hane, F.-R.Hu, Y.Kanamori
    • Organizer
      The 1st Int. Workshop on Functional Materials and The 3rd Int. Workshop on Nanophysics and nanotechnology
    • Place of Presentation
      Halong, Vietnum
    • Year and Date
      2006-12-07
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] MENS for subwavelength optics2006

    • Author(s)
      K.Hane
    • Organizer
      The 6th US-Japan Joint Symposium on Nano systems
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2006-10-11
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] A surface emitting solid polymer dye laser using a guided mode resonant grating for bio-optical detections2005

    • Author(s)
      T.Kobayashi, Y.Kanamori, K.Hane
    • Organizer
      IEEE/LEOS Int. Conf. on Optical MEMs and Their Application
    • Place of Presentation
      Oulu, Finland
    • Year and Date
      2005-08-01
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Piezoresistive rotation angle sensor integrated in micromirror2005

    • Author(s)
      M.Sasaki, M.Tabata, T.Haga and K.Hane
    • Organizer
      Int. Conf. on Solid State Devices and Materials
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      2005-09-16
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Micro/nano opt-mechanical systems using silicon micromachining technology2005

    • Author(s)
      K.Hane, M.Sasaki, Y.Kanamori, F.R.Hu
    • Organizer
      Nanoengineering Symposium 2005
    • Place of Presentation
      Daeon, Korea
    • Year and Date
      2005-10-28
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Performance of tense thin film torsion bar for large-rotation and low-voltage driving of micromirror2005

    • Author(s)
      M.Sasaki, S.Yuuki, K.Hane
    • Organizer
      IEEE/LEOS Int. Conf. on Optical MEMs and Their Application
    • Place of Presentation
      Oulu, Finland
    • Year and Date
      2005-08-03
    • Data Source
      KAKENHI-PROJECT-17068002
  • [Presentation] Compound switch consisting of gap-variable silicon nanowire waveguide couplers

    • Author(s)
      Y.Akihama, Y.Munemasa, Y.Kanamori, K.Hane
    • Organizer
      17th Opto-Electronics and Communication Conf. (OECC2012)
    • Place of Presentation
      Busan, Korea
    • Data Source
      KAKENHI-PROJECT-21226009
  • [Presentation] Optical Micro-Electro-Mechanical Systems; Silicon-based integration for Opto-mechatronics

    • Author(s)
      Kazuhiro Hane
    • Organizer
      2013 International Symposium on Optomechatronic Technologies
    • Place of Presentation
      Korea, Cheju Island
    • Year and Date
      2013-10-28 – 2013-10-30
    • Invited
    • Data Source
      KAKENHI-PROJECT-24246019
  • [Presentation] シリコン導波路とMEMSアクチュエータの組み合わせによる光路制御 -;波長選択スイッチのためのMEMS可変マイクロリング-

    • Author(s)
      羽根 一博, ホアンマン チュ
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      東京(機械振興会館)
    • Data Source
      KAKENHI-PROJECT-21226009
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