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Optical Engineering
Volume: 61 Pages: 035103-035103
Proceeding of Transducers
Volume: 1 Pages: 549-552
10.1109/transducers50396.2021.9495545
Journal of Optical Microsystems
Volume: 1 Issue: 01 Pages: 135011-13
10.1117/1.jom.1.1.013501
Journal of Robotics and Mechatronics
Volume: 32 Issue: 2 Pages: 344-350
10.20965/jrm.2020.p0344
130007833342
Microsystem Technologies
Volume: 24 Issue: 5 Pages: 2159-2168
10.1007/s00542-017-3668-2
Applied Physics Letters
Volume: 112 Issue: 7 Pages: 071102-071102
10.1063/1.5013227
Applied Optics
Volume: 57 Issue: 9 Pages: 2073-2073
10.1364/ao.57.002073
Volume: 57 Issue: 09 Pages: 095101-095101
10.1117/1.oe.57.9.095101
Micromachines
Volume: 8 Issue: 8 Pages: 240-240
10.3390/mi8080240
Volume: 7 Issue: 4 Pages: 57-57
10.3390/mi7040057
Journal of Vacuum Science & Technology B
Volume: 33 Issue: 3
10.1116/1.4917487
IEEJ Transactions on Sensors and Micromachines
Volume: 135 Issue: 9 Pages: 361-366
10.1541/ieejsmas.135.361
130005096102
Volume: 135 Issue: 5 Pages: 165-170
10.1541/ieejsmas.135.165
130005067823
IEEE Photonics Journal
Volume: 7 Issue: 4 Pages: 1-11
10.1109/jphot.2015.2464721
IEEE Photonics Technology Letters
Volume: 26 Issue: 15 Pages: 1553-1556
10.1109/lpt.2014.2329033
Sensors and Actuators A: Physical
Volume: 209 Pages: 52-56
10.1016/j.sna.2014.01.014
電気学会論文誌E(センサマイクロマシン部門誌)
Volume: 8
130004677814
International Journal of Hydrogen Energy
Volume: 39 Issue: 16 Pages: 8564-8575
10.1016/j.ijhydene.2014.03.120