Sasaki Minoru 佐々木実

… Alternative Names

SASAKI Minoru 佐々木実

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Researcher Number	70282100
Other IDs
External Links
Affiliation (Current)	2025: 豊田工業大学, 工学(系)研究科(研究院), 教授
Affiliation (based on the past Project Information) *help	2019 – 2022: 豊田工業大学, 工学(系)研究科(研究院), 教授 2016: 豊田工業大学, 工学(系)研究科(研究院), 教授 2007 – 2015: Toyota Technological Institute, 工学部, 教授 2008: 豊田工業大学, 教授 2006: Tohoku University, Graduate School of Engineering, Associate professor, 大学院工学研究科, 助教授 … More 2001 – 2006: Tohoku Univ., Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 2000 – 2001: 東北大学, 大学院・工学研究科, 講師 1997 – 1999: Tohoku Univ., Dept.Mechatronics, Research Associate, 大学院・工学研究科, 助手 1996: 東北大学, 工学部, 助手 Less
Review Section/Research Field	Principal Investigator Science and Engineering / Measurement engineering / Basic Section 18020:Manufacturing and production engineering-related / Sports science / Science and Engineering / Measurement engineering / Microdevices/Nanodevices / Intelligent mechanics/Mechanical systems / 電子デバイス・機器工学 / Applied optics/Quantum optical engineering … More Except Principal Investigator … More Intelligent mechanics/Mechanical systems / 機械工作・生産工学 / Science and Engineering / Basic Section 21060:Electron device and electronic equipment-related / Astronomy / 電子デバイス・機器工学 / Measurement engineering / Plasma electronics / Applied physics, general / Intelligent mechanics/Mechanical systems / Electron device/Electronic equipment Less
Keywords	Principal Investigator マイクロマシン / マイクロ・ナノデバイス / 計測工学 / 静電駆動 / 光スキャナ / 集積化 / 先球ファイバ / 光ファイバ / 精密機械加工 / 空気抵抗低減 … More / 垂直軸風車ブレード / 異方性エッチング / 部分窒化 / 高アスペクト比 / 硬質めっき堆積 / 金型曲面 / 微細加工 / サメ肌リブレット / 三次元フォトリソグラフィ / grating / encoder / resonant cavity / standing wave / interferometer / stacking structure / integration / photodiode / 直接接合 / 回析格子 / エンコーダ / 共振構造 / 定在波 / 干渉計 / 積層構造 / フォトダイオード / 容量 / 容量検出 / スポーツ / 無拘束 / 長期安定性 / 皮膚 / 周波数特性 / 運動中の呼吸測定 / 締め付け無し / 容量計測 / 呼吸センサ / ウェアラブルセンサ / ガス界面 / シート状反応性プラズマ / 拡散長 / 平均自由行程 / Y形合流路 / 層流 / マイクロ流路 / MEMS / マイクロプラズマ / 反応性プラズマ / 温度特性 / Q値 / 感度 / 多結晶シリコン / 薄膜トーションバー / 張力 / 非線形バネ / 非線形効果 / 振動型 / 赤外線センサ / 低電圧駆動 / 温度補償 / マイクロミラー / MEMSアクチュエータ / 先端機能デバイス / 流体解析 / 3次元実装 / 垂直壁 / 3次元デバイス / 3次元フォトリソグラフィ / デバイス設計・製造プロセス / マイクロファブリケーション / 時間変調 / オフセット / 高精度化 / せん断ゲージ / ひずみゲージ / 回転角センサ / マイクロアクチュエータ / アクチュエータ / 光スイッチ / SOIウェーハ / vertical comb / ウェーハ折り曲げ / 三角測量 / SOIウェハ / 縦型櫛歯電極 / 三角測 / ウェハ折り曲げ / 光計測 / フォトリソグラフィー / 光減衰器 / セルフアライメント / フォトリソグラフィ / 追加工 / リソグラフィ / 表面マイクロマシニング / フィルタ / 減衰器 / アライメント / 3次元リソグラフィ / ロ-ダミン / ポリスチレン球 / 微粒子 / Siマイクロマシニング / レーザ発振 / 配列 / マイクロキャビティ / 色素レーザ … More Except Principal Investigator マイクロマシニング / シリコン / MEMS / マイクロマシン / Micromachining / マイクロアクチュエータ / リソグラフィ / エンコーダ / フォトニック結晶 / サブ波長格子 / 光通信 / エッチング / ナノメートル加工 / ナノメートル / プローブ / AFM / 高密度メモリ / 小型化 / Si微細加工技術 / 蓄電 / コイル / 超電導 / Siウェハ / めっき / 超電導蓄電コイル / シリコン微細加工プロセス / 銅酸化物高温超電導薄膜 / MOD法 / トレンチ / シリコンウェハ / 電力貯蔵 / 超電導コイル / 磁場計算 / 化学機械研磨(CMP) / 極低温冷凍機 / MOD成膜技術 / スパッタ成膜技術 / 銅めっき / シリコン微細加工技術（MEMS） / 超電導磁気エネルギー貯蔵 / 厚い回折格子 / 高分散分光 / 高次回折光 / 透過型回折格子 / 厳密結合波解析（RCWA）法 / 厳密結合波解析（RCWA） / Echelle spectroscopy / Volume grating / Optical switch / Filter / Micro-actuator / Photonic crystal / 光スイッチ / フィルタ / Lithography / Sensor / Robot / Silicon / Grating / Encoder / 回析格子 / 精密機器 / 光エンコーダ / 光リソグラフィ / 非平面リソグラフィ / ロボット用エンコーダ / ロータリーエンコーダ / 光計測 / センサ / ロボット / グレイティング / NANO-OPTICS / ETCHING / SUB-WAVELENGTH / MICROMACHINING / ANTI-REFLECTION / GRATING / 無反射表面 / 高アスペクト比エッチング / 回折格子 / 光学素子 / 電子線描画 / 微細格子 / モスアイ構造 / 反射防止 / グレーティング / ナノ光学 / サブ波長 / 無反射 / グレーディング / Scanning probe microscopy / Charge deposition / High density memory / Atomic force microscopy / 分極反転 / 原子分子操作 / 原子分子加工 / 超高密度メモリー / 原子間力顕微鏡(AFM) / 誘電体薄膜 / 静電容量 / ディスクメモリー / 原子間力顕微鏡 / 電荷畜積 / 走査型プローブ顕微鏡 / 電荷蓄積 / Optical Pattern Generation / Optical Encoder / Non-Planar Lithography / Computer Generated Hologram / プラズマプロセス / 回路格子パターン / 立体加工 / 微細加工 / 計算機ホログラム / レーザ露光 / ホログラフィ / 光露光 / 非平面露光 / 計算機合成ホログラム / 低温大気圧プラズマ / プラズマ医療 / 細胞 / プラズマ / マイクロ流体デバイス / 流れ解析 / マイクロ・ナノデバイス / マイクロ流路デバイス / 垂直面形成 / 配線形成 / 実装技術 / 光モジュール / 斜め露光 / スプレーコート / 垂直配線 / 三次元実装 / シリコンデバイス / 光集積デバイス / 窒化物半導体 / 集積化 / 光デバイス / フォトニック構造 / 可変フィルタ / くし型アクチュエータ / シリコンMEMS / 波長選択フィルタ / シリコンマイクロマシニング / サブミクロン構造 / モールディング / ポリマー / モールド / 表面マイクロマシニング / プローブアレイ / プローブ技術 / ナノマシニング / 近接場光 / カンチレバー / 光導波路 / アモルファスSi / ねじれ振動子 / ニアフィールド / 機械共振 Less

Fusing precision machining and three-dimensional photolithography and application to realize the shark skin inspired riblet surface for reducing air resistancePrincipal Investigator
- Principal Investigator
  
  Sasaki Minoru
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Toyota Technological Institute
Development of compact superconducting magnetic energy storage devices for volume demand based on the silicon microfabrication technology
- Principal Investigator
  
  MOTOHIRO Tomoyoshi
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  Nagoya University
Development of ultimate diffraction grating of high diffraction order with high dispersion
- Principal Investigator
  
  Ebizuka Noboru
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Astronomy
- Research Institution
  Institute of Physical and Chemical Research
Plasma-on-Chip
- Principal Investigator
  
  Kumagai Shinya
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Plasma electronics
- Research Institution
  Toyota Technological Institute
マイクロ流体界面に形成するシート状反応性プラズマPrincipal Investigator
- Principal Investigator
  
  佐々木実
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Toyota Technological Institute
Development of Wearable Respiratory Sensor and Practical ApplicationPrincipal Investigator
- Principal Investigator
  
  SASAKI Minoru
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Sports science
- Research Institution
  Toyota Technological Institute
Making device functions on microtrench sidewall through three-dimensional photolithograpy
- Principal Investigator
  
  KUMAGAI Shinya
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Applied physics, general
- Research Institution
  Toyota Technological Institute
Highly sensitive infra-red sensor using non-linear vibrationPrincipal Investigator
- Principal Investigator
  
  SASAKI Minoru
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Measurement engineering
- Research Institution
  Toyota Technological Institute
Research on three dimensional wiring by 3-D patterning and vertical shape forming technologies.
- Principal Investigator
  
  OOHIRA Fumikazu
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Kagawa University
Stabilized Temperature Characteristics, High-Speed Response, and Low-Voltage Driving of MicromirrorPrincipal Investigator
- Principal Investigator
  
  SASAKI Minoru
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Toyota Technological Institute
Study of optical micro systems by monolithic integration of silicon with nitride semiconductor
- Principal Investigator
  
  HANE Kazuhiro
- Project Period (FY)
  2007 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tohoku University
High-performance MEMS devices realized by three-dimensional photolithographyPrincipal Investigator
- Principal Investigator
  
  SASAKI Minoru
- Project Period (FY)
  2006 – 2008
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Toyota Technological Institute
  Tohoku University
回転角センサー体型MEMS光スキャナPrincipal Investigator
- Principal Investigator
  
  佐々木実
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Tohoku University
High functional telecommunication devices using MEMS technology
- Principal Investigator
  
  HANE Kazuhiro
- Project Period (FY)
  2005 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Tohoku University
光ファイバ上に展開するマイクロマシニング加工Principal Investigator
- Principal Investigator
  
  佐々木実
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tohoku University
マイクロアクチュエータと複合した集積型光計測システムPrincipal Investigator
- Principal Investigator
  
  佐々木実
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Measurement engineering
- Research Institution
  Tohoku University
Tunable photonic devices fabricated by micro-nano machining for optical communication
- Principal Investigator
  
  HANE Kazuhiro
- Project Period (FY)
  2002 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  Tohoku University
近接場光加工の大面積化に関する研究
- Principal Investigator
  
  羽根一博
- Project Period (FY)
  2000 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Tohoku University
3次元フォトリソグラフィによる追加工と光システムの集積化Principal Investigator
- Principal Investigator
  
  佐々木実
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  Tohoku University
マイクロマシニングを用いたシリコン・ナノ・モールディング
- Principal Investigator
  
  羽根一博
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tohoku University
Development of integrated optical measurement systems having layered structuresPrincipal Investigator
- Principal Investigator
  
  SASAKI Minoru
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Measurement engineering
- Research Institution
  Tohoku University
Fabrication of micro rotary encoder for robot finger and precision machines
- Principal Investigator
  
  HANE Kazuhiro
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Measurement engineering
- Research Institution
  Tohoku University
アモルファスSiを利用した光導波路一体型カンチレバーの製作
- Principal Investigator
  
  羽根一博
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Tohoku University
STUDY OF ULTRA-FINE STRUCTURED OPTICAL COMPONENTS USIING MICROMACHINING
- Principal Investigator
  
  HANE Kazuhiro
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  TOHOKU UNIVERSITY
マイクロマシンプローブを用いたニアフィールドメモリの研究
- Principal Investigator
  
  HANE Kazuhiro
- Project Period (FY)
  1997
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Tohoku University
配列したマイクロ共振器を用いたレーザ発振器の開発と応用Principal Investigator
- Principal Investigator
  
  佐々木実
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tohoku University
Non-planar lithography using holographic projection
- Principal Investigator
  
  HANE Kazuhiro
- Project Period (FY)
  1995 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tohoku University
Study on high density disk data storage using atomic force micorscopy
- Principal Investigator
  
  HANE Kazuhiro
- Project Period (FY)
  1995 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tohoku University

[Book] アクチュエータ研究開発の最前線2011
- Author(s)
  樋口俊郎、大岡昌博、佐々木実
- Publisher
  株式会社エヌ・ティー・エス
- Data Source
  KAKENHI-PROJECT-21656105
[Book] 新アクチュエータ開発最前線-The Next-Generation Actuators-張力を持つ薄膜を利用した静電駆動型マイクロミラーの高速化と低電圧化2011
- Author(s)
  佐々木実(分担)第2編第2章第5節
- Publisher
  株式会社ビーケーシー(印刷中)(仮称)
- Data Source
  KAKENHI-PROJECT-21656105
[Book] Next-Generation Actuators Leading Breakthroughs2010
- Author(s)
  Minoru Sasaki
- Publisher
  Springer
- Data Source
  KAKENHI-PROJECT-21656105
[Book] Next-Generation Actuators Leading Breakthroughs, Part III, Micro Actuators, 11. High-Performance Electrostatic Micromirrors2010
- Author(s)
  Minoru Sasaki
- Total Pages
  438
- Publisher
  Springer, ISBN978-1-84882-990-9
- Data Source
  KAKENHI-PROJECT-21656105
[Book] レジスト膜を利用した立体加工2009
- Author(s)
  佐々木実
- Publisher
  テクノシステム
- Data Source
  KAKENHI-PROJECT-18681023
[Book] 「MEMS/NEMS工学全集」3. 11. 2レジスト膜を利用した立体加工2009
- Author(s)
  監修桑野博喜、分担佐々木実
- Publisher
  (株)テクノシステム(2009. 4.22発刊)
- Data Source
  KAKENHI-PROJECT-18681023
[Book] Comprehensive Microsystems2008
- Author(s)
  K. Hane, M. Sasaki
- Publisher
  Elsevier
- Data Source
  KAKENHI-PROJECT-19106007
[Book] エレクトロニクス実装学会誌(講座ちょっとMEMS第8回),Vol.11, No.32008
- Author(s)
  佐々木実
- Publisher
  配線やデバイスの立体化に可能性を開く3次元フォトリソグラフィ(1)成膜
- Data Source
  KAKENHI-PROJECT-18681023
[Book] 「次世代センサハンドブック」第10章アクチュエータ10.3静電アクチュエータ2008
- Author(s)
  監修 : 藍光郎、分担佐々木実
- Publisher
  (株)培風館(2008年7月8日初版発行)ISBN978-4-563-06768-7C3055
- Data Source
  KAKENHI-PROJECT-19016003
[Book] 講座ちょっとMEMS 第6回 MEMSデバイス製作とアセンブリをマッチングする試み2008
- Author(s)
  佐々木実, 羽根一博
- Total Pages
  4
- Publisher
  エレクトロニクス実装学会誌(Vol.11, No.1, Jan.2008)
- Data Source
  KAKENHI-PROJECT-18681023
[Book] 配線やデバイスの立体化に可能性を開く3次元フォトリソグラフィ(2)露光2008
- Author(s)
  佐々木実,羽根一博
- Publisher
  エレクトロニクス実装学会誌
- Data Source
  KAKENHI-PROJECT-18681023
[Book] Micro-Mirrors(Comprehensive Microsystems)2008
- Author(s)
  K. Hane, M. Sasaki
- Publisher
  Elsevier
- Data Source
  KAKENHI-PROJECT-19106007
[Book] MEMS用途フォトリソグラフィプロセス2008
- Author(s)
  佐々木実
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-18681023
[Book] 「微細転写・加工技術全集」第4章第3[3]節「MEMS用途フォトリソグラフィプロセス」2008
- Author(s)
  分担佐々木実
- Publisher
  (株)技術情報協会(第1版第1刷2008年8月29日)ISBN978-4-86104-248-5C3053
- Data Source
  KAKENHI-PROJECT-18681023
[Book] 第10章アクチュエータ,10.3静電アクチュエータ2008
- Author(s)
  佐々木実
- Publisher
  培風館
- Data Source
  KAKENHI-PROJECT-19016003
[Book] エレクトロニクス実装学会誌(講座ちょっとMEMS第9回), Vol.11, No.42008
- Author(s)
  佐々木実
- Publisher
  配線やデバイスの立体化に可能性を開く3次元フォトリソグラフィ(2)露光
- Data Source
  KAKENHI-PROJECT-18681023
[Book] 配線やデバイスの立体化に可能性を開く3次元フォトリソグラフィ(1)成膜2008
- Author(s)
  佐々木実,羽根一博,青柳誠司
- Publisher
  エレクトロニクス実装学会誌
- Data Source
  KAKENHI-PROJECT-18681023
[Book] MEMSデバイス製作とアセンブリをマッチングする試み2008
- Author(s)
  佐々木実,羽根一博
- Publisher
  エレクトロニクス実装学会誌
- Data Source
  KAKENHI-PROJECT-18681023
[Book] レジスト塗布・露光技術2007
- Author(s)
  佐々木実
- Publisher
  シーエムシー出版
- Data Source
  KAKENHI-PROJECT-18681023
[Book] Comprehensive Microsystems-Fundamentals,technology and applications-2007
- Author(s)
  Kazuhiro Hane, Minoru Sasaki
- Publisher
  Elsevier Science Ltd.
- Data Source
  KAKENHI-PROJECT-19016003
[Book] Comprehensive Microsystems-Fundamentals, technology and applications- (Volume Three) : 3.01 Optical systems: Miero-mirrors2007
- Author(s)
  編集:Yogesh Gianchandani, Osamu Tabata, Hans Zappe 分担:Kazuhiro Hane, Minoru Sasaki
- Total Pages
  63
- Publisher
  Elsevier Science Ltd
- Data Source
  KAKENHI-PROJECT-19016003
[Book] MEMSマテリアルの最新技術、第2章第1節レジスト塗布・露光技術2007
- Author(s)
  監修:江刺正喜, 分担:佐々木実
- Total Pages
  10
- Publisher
  シーエムシー出版
- Data Source
  KAKENHI-PROJECT-18681023
[Book] ナノオプティクス・ナノフォトニクスのすべて-ナノ光技術の基礎から実用まで- 9.MEMSデバイスと集積化2006
- Author(s)
  佐々木実
- Total Pages
  352
- Publisher
  フロンティア出版
- Data Source
  KAKENHI-PROJECT-17040003
[Journal Article] 100 m-level Spiral Silicon Micro-Trenches with 3-Step Smooth Sidewalls to Deposit Superconducting Material for Miniaturized Magnetic Energy Storage2022
- Author(s)
  Sasaki Minoru、Noh Joo-Hyong、Takai Osamu、Motohiro Tomoyoshi
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 142 Issue: 5 Pages: 78-84
- DOI
  10.1541/ieejsmas.142.78
- ISSN
  1341-8939, 1347-5525
- Year and Date
  2022-05-01
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02195
[Journal Article] Microtextured Die Using Silicon Stencil Mask for Micro-machining of Stainless Steel2022
- Author(s)
  Gang Han, Minoru Sasaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: SA Pages: SA1012-SA1012
- DOI
  10.35848/1347-4065/ac1c3b
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04132
[Journal Article] 三次元フォトリソグラフィ2021
- Author(s)
  佐々木実
- Journal Title
  
  機能材料, 12月号特集「フォトレジスト最前線」
  
  Volume: 41
- Data Source
  KAKENHI-PROJECT-19K04132
[Journal Article] Estimation of the Electricity Storage Volume Density of Compact SMESs of a New Concept Based on Si Microfabrication Technologies2021
- Author(s)
  Motohiro Tomoyoshi、Sasaki Minoru、Noh Joo-hyong、Takai Osamu
- Journal Title
  
  Magnetochemistry
  
  Volume: 7 Issue: 3 Pages: 44-44
- DOI
  10.3390/magnetochemistry7030044
- NAID
  120007180197
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H02195
[Journal Article] 微細加工技術を用いた超電導磁気エネルギー貯蔵デバイスの開発における表面処理技術2020
- Author(s)
  元廣友美、佐々木実、盧柱亨
- Journal Title
  
  工業材料
  
  Volume: 68(2) Pages: 66-74
- Data Source
  KAKENHI-PROJECT-19H02195
[Journal Article] Estimation of Electricity Storage Density of Compact SMESs Composed of Si-wafer Stacks Loaded with Superconducting Thin Film Coils in Spiral Trenches under the Constraints of the Critical Magnetic Flux Density2020
- Author(s)
  Motohiro T、Sasaki M、Noh J-H、Takai O、Honma H
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 1590 Issue: 1 Pages: 012045-012045
- DOI
  10.1088/1742-6596/1590/1/012045
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H02195
[Journal Article] Estimation of electricity storage capacity of compact SMESs composed of stacks of Si-wafers loaded with superconducting thin film coils in spiral trenches formed by MEMS process2019
- Author(s)
  Ichiki Y、Ichiki A、Hioki T、Sasaki M、Noh J-H、Takai O、Honma H、Motohiro T
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 1293 Issue: 1 Pages: 012058-012058
- DOI
  10.1088/1742-6596/1293/1/012058
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H02195
[Journal Article] Plasma-on-chip device for stable irradiation of cells cultured in media with a low-temperature atmospheric pressure plasma2016
- Author(s)
  T. Okada, C.-Y. Chang, M. Kobayashi, T. Shimizu, M. Sasaki, S. Kumagai
- Journal Title
  
  Archives of Biochemistry and Biophysics
  
  Volume: in press Pages: 11-18
- DOI
  10.1016/j.abb.2016.04.001
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600130
[Journal Article] Development of plasma-on-chip: Plasma treatment for individual cells cultured in media2016
- Author(s)
  S. Kumagai, C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 1S Pages: 01AF01-01AF01
- DOI
  10.7567/jjap.55.01af01
- NAID
  210000145988
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600130
[Journal Article] An Atmospheric Pressure Inductively Coupled Microplasma Source of Vacuum Ultraviolet Light2014
- Author(s)
  R. Sato, D. Yasumatsu, S. Kumagai, K. Takeda, M. Hori, M. Sasaki
- Journal Title
  
  Sensors and Actuators A
  
  Volume: 215 Pages: 144-149
- DOI
  10.1016/j.sna.2013.09.018
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-24110720
[Journal Article] Theoretical Calculation of Electromagnetic Field of Floating Metal Wire for Inductively Coupled Micro Plasma Using Spiral Coil2013
- Author(s)
  Kyyoul Yun, Keisuke Fujisaki, Minoru Sasaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 52 Issue: 1S Pages: 01AA02-01AA02
- DOI
  10.7567/jjap.52.01aa02
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-24110720
[Journal Article] A Wearable Capacitive Sensor to Monitor Human Respiratory Rate2013
- Author(s)
  Subrata Kumar Kundu, Shinya Kumagai, Minoru Sasaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 52 Issue: 4S Pages: 04CL05-04CL05
- DOI
  10.7567/jjap.52.04cl05
- Data Source
  KAKENHI-PROJECT-24650397
[Journal Article] Investigation of Optical Flatness of Stretched Membrane Drum-Type Micromirror2012
- Author(s)
  Subrata Kumar Kundu, Akiyoshi Hikita, Shinya Kumagai, Minoru Sasaki
- Journal Title
  
  Journal of Lightwave Technology
  
  Volume: Vol.30 Issue: 10 Pages: 1377-1385
- DOI
  10.1109/jlt.2012.2186432
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21656105
[Journal Article] Minimising plasma irradiation area by micronozzle device towards single-cell treatment2012
- Author(s)
  Ryutaro Shimane, Shinya Kumagai, Masaru Hori, Minoru Sasaki
- Journal Title
  
  Micro and Nano Letters
  
  Volume: 7 Issue: 12 Pages: 1210-1212
- DOI
  10.1049/mnl.2012.0555
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-24110720
[Journal Article] Multiple-Height Microstructure Fabricated by Deep Reactive IonEtchingd Selective Ashing of Resist Layer Cmbined with Ultraviolet Curing2012
- Author(s)
  Shinya Kumagai, Akiyoshi Hikita, Takuya Iwamoto, Takashi Tomikawa, Masaru Hori, Minoru Sasaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: Vol.51 Issue: 1S Pages: 01AB04-01AB04
- DOI
  10.1143/jjap.51.01ab04
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21656105
[Journal Article] Comb-drive GaN micro-mirror on a GaN-on-silicon platform2011
- Author(s)
  Y. Wang, T. Sasaki, T. Wu, F. Hu, K. Hane
- Journal Title
  
  J. Micromech. Microeng
  
  Volume: 21(3)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19106007
[Journal Article] Comb-drive GaN micro-mirror on a GaN-on-silicon platform2011
- Author(s)
  Y.Wang, T.Sasaki, T.Wu, F.Hu, K.Hane
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume: 21 Issue: 3 Pages: 035012-035012
- DOI
  10.1088/0960-1317/21/3/035012
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19106007
[Journal Article] Characteristics of Improved Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device2009
- Author(s)
  Takuro AONUMA, Shinya KUMAGAI, Minoru SASAKI, Motoki TABATA, Kazuhiro HANE
- Journal Title
  
  electrical wire (a) (b) Japanese Journal of Applied Physics Vol.48, No.4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19016003
[Journal Article] Simultaneous Realization of Stabilized Temperature haracteristics and Low-Voltage Driving of Micromirror Using Thin Film Torsion Bar of Tensile Poly-Si2009
- Author(s)
  Minoru Sasaki
- Journal Title
  
  IEEE Journal of Selected Topics in Quantum Electronics 15(掲載確定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19016003
[Journal Article] Simultaneous Realization of Stabilized Temperature Characteristics and Low-Voltage Driving of Micromirror Using Thin Film Torsion Bar of Tensile Poly-Si2009
- Author(s)
  M.Sasaki, M.Fujishima, K.Hane, H.Miura
- Journal Title
  
  IEEE Journal of Selected Topics in Quantum Electronics 15, No.5
  
  Pages: 1455-1462
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21656105
[Journal Article] Simultaneous Realization of Stabilized Temperature Characteristics and LowVoltage Drivingof Micromirror Using Thin Film Torsion Bar of Tensile Poly-Si2009
- Author(s)
  M. Sasaki, M. Fujishima, K. Hane, H. Miura
- Journal Title
  
  IEEE Journal of Selected Topics in Quantum Electronics
  
  Volume: Vol.15, No.5 Pages: 1455-1462
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21656105
[Journal Article] Simultaneous Realization of Stabilized Temperature Characteristics and Low-Voltage Driving of Micromirror Using Thin Film Torsion Bar of Tensile Poly-Si2009
- Author(s)
  Minoru Sasaki, Masayuki Fujishima, Kazuhiro Hane, Hideo Miura
- Journal Title
  
  IEEE Journal of Selected Topics in Quantum Electronics Vol.15
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19016003
[Journal Article] Driving of micromirror and simultaneous detection of rotation angle using integrated piezoresistive sentsor2009
- Author(s)
  M.Sasaki, M. Tabata, K.Hane
- Journal Title
  
  J. Opt. A: Pure Appl. Opt vol. 11,(in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Design and fabrication of freestanding pitch-variable blazed grating on silicon-on-insulator wafer2009
- Author(s)
  Y.Wang, Y.Kanamori, T.Sasaki, K.Hane
- Journal Title
  
  J. Micromech. Microeng vol. 19
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Driving of micromirror and simultaneous detection of rotation angle using integrated piezoresistive sentsor2009
- Author(s)
  M. Sasaki
- Journal Title
  
  Journal of Optics A : Pure Applied Optics 11(in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Large Displacement Micro XY-Stage with Paired Moving Plates2008
- Author(s)
  Minoru SASAKI, Fuminori BONO, Kazuhiro HANE
- Journal Title
  
  Japanese Journal of Applied Physics Vol.47, No.4
  
  Pages: 3226-3231
- NAID
  10022548216
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19016003
[Journal Article] An Optically flat micromirror using stretched membrane with crystallization-induced stress2008
- Author(s)
  Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura
- Journal Title
  
  Journal of Optics A : Pure and Applied Optics Vol.10
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19016003
[Journal Article] Development of MEMS Capacitive Sensor Using a MOSFET Structure2008
- Author(s)
  H. Izumi, Y. Matsumoto, S. Aoyagi, Y. Harada, S. Shingubara, M. Sasaki, K. Hane, H. Tokunaga
- Journal Title
  
  電気学会論文誌E 128-E, No.3
  
  Pages: 102-107
- NAID
  10021135078
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681023
[Journal Article] Large Displacement Micro XY-Stage with Paired Moving Plates, Solid State Devices & Materials2008
- Author(s)
  M. Sasaki, F. Bono, K. Hane
- Journal Title
  
  Japanese Journal of Applied Physics 47, No.4
  
  Pages: 3226-3231
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19016003
[Journal Article] Optically flat micromirror using stretched membrane with crystallization-induced stress2008
- Author(s)
  M. Sasaki, T. Sasaki, K. Hane, H. Miura
- Journal Title
  
  Journal of Optics A 10
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19016003
[Journal Article] Development of MEMS Capacitive Sensor Using a MOSFET Structure2008
- Author(s)
  Hayato Izumi, Yohei Matsumoto, Seiji Aoyagi, Yusaku Harada, Shoso Shingubara, Minoru Sasaki, Kazuhiro Hane, Hiroshi Tokunaga
- Journal Title
  
  電気学会論文誌E Vol.128-E, No.3
  
  Pages: 102-107
- NAID
  10021135078
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681023
[Journal Article] Tunable vertical comb for driving micromirror realized by bending drive wafer2007
- Author(s)
  M.Sasaki
- Journal Title
  
  IEICE Transactions on Electronics E90-C・1
  
  Pages: 147-148
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Micromirror with two parallel rotation axes for external cavity diode laser2007
- Author(s)
  M.Ishimori, M.Sasaki, K.Hane
- Journal Title
  
  IEICE Trans. Electron vol. E90-C
  
  Pages: 72-77
- NAID
  110007519559
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Tunable vertical comb for driving micromirror realized by bending drive wafer2007
- Author(s)
  M.Sasaki, M.Ishimori, J.-H.Song, K.Hane
- Journal Title
  
  IEICE Trans. Electron vol. E90-C
  
  Pages: 147-148
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror2007
- Author(s)
  Minoru Sasaki
- Journal Title
  
  IEEE J. Selected Topics in Quantum Electronics 13(印刷中)
- NAID
  10022548226
- Data Source
  KAKENHI-PROJECT-17040003
[Journal Article] Tunable vertical comb for driving micromirror realized by bending device wafer2007
- Author(s)
  Minoru SASAKI
- Journal Title
  
  IEICE Transaction on Electronics E90-C・1
  
  Pages: 147-148
- NAID
  110007519571
- Data Source
  KAKENHI-PROJECT-17040003
[Journal Article] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror2007
- Author(s)
  M. Sasaki, S. Yuki, K. Hane,
- Journal Title
  
  IEEE J. Selected Topics in Quantum Elect ronics 13, Issue 2
  
  Pages: 290-296
- NAID
  10022548226
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19016003
[Journal Article] Geometrical characteristics of silicon cavities etiched in EDP2007
- Author(s)
  H.Ju, T.Ohta, M.Ito, M.Sasaki, K.Hane, M.Hori
- Journal Title
  
  J. Micromech. Microeng vol. 17
  
  Pages: 1012-1016
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Angled Exposure Method for Pattering on Three-Dimensional Structures2007
- Author(s)
  V.K. Singh, M. Sasaki, K. Hane
- Journal Title
  
  Japanese Journal of Applied Physics 46, No.9B
  
  Pages: 6449-6453
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681023
[Journal Article] Fabrication of MOSFET Capacitive Sensor using Spray Coating Method2007
- Author(s)
  S. Aoyagi, Y. Matsui, K. Makihira, H. Tokunaga, M. Sasaki, K. Hane
- Journal Title
  
  電気学会論文誌E 127-E, No.3
  
  Pages: 153-159
- NAID
  10018737787
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681023
[Journal Article] Angled exposure method for patterning on three-dimensional structures2007
- Author(s)
  V.K.Singh, M.Sasaki, K.Hane
- Journal Title
  
  Jpn. J. Appl. Phys vol. 46
  
  Pages: 6449-6453
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Fabrication of MOSFET Capacitive Sensor using Spray Coating Method2007
- Author(s)
  Seiji Aoyagi, Yuichi Matsui, Kenji Makihira, Hiroshi Tokunaga, Minoru Sasaki, Kazuhiro Hane
- Journal Title
  
  電気学会論文誌E Vol.127-E, No.3
  
  Pages: 153-159
- NAID
  10018737787
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681023
[Journal Article] Angled Exposure Method for Pattering on Three-Dimensional Structures2007
- Author(s)
  Vijay Kumar SINGH, Minoru SASAKI, and Kazuhiro HANE
- Journal Title
  
  Japanese Journal of Applied Physics Vol.46, No.9B
  
  Pages: 6449-6453
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681023
[Journal Article] Tunable vertical comb for driving micromirror realized by bending drive wafer2007
- Author(s)
  M.Sasaki, et al.
- Journal Title
  
  IEICE Transaction on Electronics E90-C・1
  
  Pages: 147-148
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Performance of tense thin-film torsion bar for large rotation and low-voltage driving of micromirror2007
- Author(s)
  M.Sasaki, S.Yuki, K.Hane
- Journal Title
  
  IEEE J. Selected Topics Quant. Electron vol. 13
  
  Pages: 290-296
- NAID
  10022548226
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Tunable vertical comb for driving micromirror realized by bending drive wafer2007
- Author(s)
  M.Sasaki, et al.
- Journal Title
  
  IEICE Transaction on Electronics E90-C-1
  
  Pages: 147-148
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror2007
- Author(s)
  Minoru Sasaki, Shinya Yuki, Kazuhiro Hane
- Journal Title
  
  IEEE Journal of Selected Topics in Quantum Electronics Vol.13, Issue 2
  
  Pages: 290-296
- NAID
  10022548226
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19016003
[Journal Article] Electrostatic actuator with segmented comb electrodes2006
- Author(s)
  M.Sasaki, F.Bono, K.Hane
- Journal Title
  
  IEEJ Trans. SM vol. 126
  
  Pages: 168-169
- NAID
  10017538804
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar2006
- Author(s)
  M.Sasaki, S.Yuki, K.Hane
- Journal Title
  
  IEEE Photonics Technol. Lett vol. 18
  
  Pages: 1573-1575
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] 位相シフトマスクを利用した立体サンプルの露光法2006
- Author(s)
  佐々木実,陳俊中エドウィン,羽根一博
- Journal Title
  
  電気学会論文誌E Vol.126-E, No.6
  
  Pages: 241-242
- NAID
  10017582294
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681023
[Journal Article] Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar2006
- Author(s)
  M.Sasaki
- Journal Title
  
  IEEE Photonics Technology Letters 18・15
  
  Pages: 1573-1575
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Piezoresistive rotation angle sensor integrated in micromirror2006
- Author(s)
  M.Sasaki, M.Tabata, T.Haga, and K.Hane
- Journal Title
  
  Jpn. J. Appl. Phys vol. 45
  
  Pages: 3789-3793
- NAID
  10022541010
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Piezoresistive rotation angle sensor integrated in micromirror2006
- Author(s)
  M.Sasaki, K.Haga, M.Tabata, K.Hane
- Journal Title
  
  Japanese Journal of Applied Physics 45(in press)
- NAID
  10022541010
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Exposure method for three-dimensional samples using phase shift mask2006
- Author(s)
  M.Sasaki, T.Edwin, K.Hane
- Journal Title
  
  IEEJ Trans. SM vol. 126
  
  Pages: 241-242
- NAID
  10017586211
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] 位相シフトマスクを利用した立体サンプルの露光法2006
- Author(s)
  佐々木実
- Journal Title
  
  電気学会論文誌E 126-E・6
  
  Pages: 241-242
- NAID
  10017582294
- Data Source
  KAKENHI-PROJECT-18681023
[Journal Article] Piezoresistive Rotation Angle Sensor Integrated in Micromirror2006
- Author(s)
  Minoru Sasaki
- Journal Title
  
  Japanese Journal of Applied Physics 45・4B
  
  Pages: 3789-3793
- NAID
  10022541010
- Data Source
  KAKENHI-PROJECT-17040003
[Journal Article] 位相シフトマスクを利用した立体サンプルへの微細パターン露光法2006
- Author(s)
  佐々木実
- Journal Title
  
  電気学会研究会資料センサ・マイクロマシン準部門総合研究会,2006.5.15-16 MSS-06-19
  
  Pages: 89-92
- NAID
  10017586211
- Data Source
  KAKENHI-PROJECT-18681023
[Journal Article] Large-Rotation and Low-Voltage Driving of Micromirror Realized by Tense Thin Film Torsion Bar2006
- Author(s)
  Minoru Sasaki
- Journal Title
  
  IEEE Photonics Technology Letters 18・15
  
  Pages: 1573-1575
- Data Source
  KAKENHI-PROJECT-17040003
[Journal Article] 分割した櫛歯電極型静電駆動アクチュエータ2006
- Author(s)
  佐々木実
- Journal Title
  
  電気学会論文誌E 126-E・4
  
  Pages: 168-169
- NAID
  10017538804
- Data Source
  KAKENHI-PROJECT-17040003
[Journal Article] 位相シフトマスクを利用した立体サンプルの露光法2006
- Author(s)
  佐々木実, et al.
- Journal Title
  
  電気学会論文誌 E 126・6
  
  Pages: 241-242
- NAID
  10017582294
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Exposure method for three-dimensional samples using phase shift mask2006
- Author(s)
  M.Sasaki, et al.
- Journal Title
  
  IEEJ Transaction Sensors and Micromachines E126-6
  
  Pages: 241-242
- NAID
  10017586211
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] 位相シフトマスクを利用した立体サンプルの露光法2006
- Author(s)
  佐々木実, 陳俊中エドウィン, 羽根一博
- Journal Title
  
  電気学会論文誌E (印刷中)
- NAID
  10017582294
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Piezoresistive Rotation Angle Sensor Integrated in Micromirror2006
- Author(s)
  M.Sasaki, Motoki Tabata, Tsukasa Haga, Kazuhiro Hane
- Journal Title
  
  Japanese Journal of Applied Physics 45,No.4B(in press)
- NAID
  10022541010
- Data Source
  KAKENHI-PROJECT-17040003
[Journal Article] Piezoresistive rotation angle sensor integrated in micromirror2006
- Author(s)
  M.Sasaki
- Journal Title
  
  Japanese Journal of Applied Physics 45・4B
  
  Pages: 3789-3793
- NAID
  10022541010
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] 分割した櫛歯電極型静電駆動アクチュエータ2006
- Author(s)
  佐々木実
- Journal Title
  
  電気学会論文誌E 126・4
  
  Pages: 168-169
- NAID
  10017538804
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Deposition of thin and uniform photoresist on three-dimensional structures using fast flow in spray coating2005
- Author(s)
  V.K.Singh, M.Sasaki, K.Hane, Y.Watanabe, H.Takamatsu, M.Kawakita, H.Hayashi
- Journal Title
  
  J. Micromech. Microeng vol. 15
  
  Pages: 2339-2345
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Fiber-optical switch using cam-micromotor driven by scratch drive Actuators2005
- Author(s)
  Y.Kanamori, Y.Aoki, M.Sasaki, H.Hosoya, A.Wada, K.Hane
- Journal Title
  
  Journal of Micromechanics and Microengineering 15
  
  Pages: 118-123
- Data Source
  KAKENHI-PROJECT-14655094
[Journal Article] Deposition of thin and uniform photoresist on three-dimensional structures using fast flow in spray coating2005
- Author(s)
  V.K.Singh, M.Sasaki, K.Hane, Y.Watanabe, H.Takamatsu, M.Kawakita, H.Hayashi
- Journal Title
  
  Journal of Micromechanics and Microengineering 15・12
  
  Pages: 2339-2345
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] 高機能マイクロミラーデバイス2005
- Author(s)
  佐々木実, 羽根一博
- Journal Title
  
  光アライアンス,日本工業出版 16,No.12
  
  Pages: 30-34
- Data Source
  KAKENHI-PROJECT-17040003
[Journal Article] Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems2005
- Author(s)
  V.K.Singh, M.Sasaki, J.-H.Song, K.Hane
- Journal Title
  
  Jpn. J. Appl. Phys vol. 44
  
  Pages: 2016-2020
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems2005
- Author(s)
  V.K.Singh, M.Sasaki, J.-H.Song, K.Hane
- Journal Title
  
  Japanese Journal of Applied Physics 44・4A
  
  Pages: 2016-2020
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Compact triangular sensor array constructed by wafer bending2005
- Author(s)
  S.Endou, M.Ishimori, M.Sasaki, K.Hane
- Journal Title
  
  Japanese Journal of Applied Physics 44・4B
  
  Pages: 2874-2878
- Data Source
  KAKENHI-PROJECT-17068002
[Journal Article] Development of MEMS-based Optical Surge Suppressor2005
- Author(s)
  T.Hirata, I.Mitama, M.Abe, K.Makita, K.Shiba, K.Hane, M.Sasaki
- Journal Title
  
  Proceedings of OFC/NFOEC 2005 Conference
- Data Source
  KAKENHI-PROJECT-14655094
[Journal Article] Piezoresistive rotation angle sensor integrated in micromirror2005
- Author(s)
  M.Sasaki, M.Tabata, T.Haga, K.Hane
- Journal Title
  
  Extended abstracts of Int. Conf. on Solid State Devices and Materials, D-1-2(2005.9.13-15,Kobe).
  
  Pages: 72-73
- NAID
  10022541010
- Data Source
  KAKENHI-PROJECT-17040003
[Journal Article] Compact Triangulation Sensor Array Constructed by Wafer Bending2005
- Author(s)
  S.Endou, M.Ishimori, M.Sasaki, K.Hane
- Journal Title
  
  Jpn.J.Appl.Phys.Part 1 (in press)
- NAID
  10015705947
- Data Source
  KAKENHI-PROJECT-14702039
[Journal Article] Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device2005
- Author(s)
  Motoki Tabata, Minoru Sasaki, Kazuhiro Hane
- Journal Title
  
  Proceedings of the 22nd Sensor Symposium
  
  Pages: 45-48
- Data Source
  KAKENHI-PROJECT-17040003
[Journal Article] An Assembly Method for Ball Lens Using Wafer Bonding2004
- Author(s)
  F.Nakai, M.Sasaki, K.Hane, K.Yokomizo, K.Hori
- Journal Title
  
  Proceedings of International Conference Optical MEMS
  
  Pages: 116-117
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Resonant Cavity Thin Film Photodiode for Compact Displacement Sensor2004
- Author(s)
  Minoru Sasaki, Fuki Nakai, Xiaoyu Mi, Kazuhiro Hane
- Journal Title
  
  Jpn.J.Appl.Phys.Part 1 Vol.43, 4B
  
  Pages: 2381-2386
- NAID
  10012950324
- Data Source
  KAKENHI-PROJECT-14702039
[Journal Article] Rotation Angle Sensor in Micromirror Device2004
- Author(s)
  Minoru Sasaki, Tsukasa Haga, Kazuhiro Hane
- Journal Title
  
  2004 IEEE/LEOS International Conference on Optical MEMS, D-4
  
  Pages: 46-47
- Data Source
  KAKENHI-PROJECT-14702039
[Journal Article] An Assembly Method for Ball Lens Using Wafer Bonding2004
- Author(s)
  F.Nakai, M.Sasaki, K.Hane, K.Yokomizo, K.Hori
- Journal Title
  
  2004 IEEE/LEOS International Conference on Optical MEMS, P-26
  
  Pages: 116-117
- Data Source
  KAKENHI-PROJECT-14655094
[Journal Article] MEMS技術による光学システムの集積化2004
- Author(s)
  佐々木実, 羽根一博, 金森義明
- Journal Title
  
  光アライアンス Vol.15,No.6
  
  Pages: 1-5
- Data Source
  KAKENHI-PROJECT-14655094
[Journal Article] Low-Voltage Bulk Micromirror Device Using Tense Thin Film Torsion Bar2004
- Author(s)
  Shinya Yuuki, Minoru Sasaki, Kazuhiro Hane
- Journal Title
  
  2004 IEEE/LEOS International Conference on Optical MEMS, P-12
  
  Pages: 88-89
- Data Source
  KAKENHI-PROJECT-14702039
[Journal Article] Compact Triangulation Sensor Array Constructed by Folded Wafer2004
- Author(s)
  Satoshi Endou, Minoru Sasaki, Kazuhiro Hane
- Journal Title
  
  Extended Abstracts of the 2004 International Conference on Solid State Devices and Materials, I-6-4
  
  Pages: 386-387
- NAID
  10022538827
- Data Source
  KAKENHI-PROJECT-14702039
[Journal Article] Resonant Cavity Thin Film Photodiode for Compact Displacement Sensor2004
- Author(s)
  M.Sasaki, F.Nakai, X.Mi, K.Hane
- Journal Title
  
  Japanese Journal of Applied Physics 43
  
  Pages: 2381-2386
- NAID
  10012950324
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Flow Condition in Resist Spray and Patterning Performance for Three-Dimensional Photolithographyover Deep Structures2004
- Author(s)
  V.Singh, M.Sasaki, K.Hane, M.Esashi
- Journal Title
  
  Japanese Journal of Applied Physics 43
  
  Pages: 2387-2391
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Improved Resist Film Quality Prepared by Spray Coating for 3D-MEMS2004
- Author(s)
  V.Singh, M.Sasaki, K.Hane, Y.Watanabe, M.Kawakita, H.Hayahi
- Journal Title
  
  Proceedings of International Conference Optical MEMS
  
  Pages: 118-119
- Data Source
  KAKENHI-PROJECT-14102022
[Journal Article] Three-dimensional SOI-HEMS Constructed by Buckled Bridges ad Vertical Comb Drive Actuator2004
- Author(s)
  M.Sasaki, D.Briand, W.Noell, N.de Rooij, K.Hane
- Journal Title
  
  IEEE J.Selected Topics in Quantum Electronics Vol.10, No.3
  
  Pages: 455-461
- Data Source
  KAKENHI-PROJECT-14702039
[Journal Article] Three-Dimensional SOI-MEMS Constructed by Buckled Bridges and Vertical Comb Drive Actuator2004
- Author(s)
  M.Sasaki, D.Briand, W.Noell, N.de Rooij, K.Hane
- Journal Title
  
  IEEE Journal of Selected Topics Quantum Electronics 10
  
  Pages: 455-461
- NAID
  120002070119
- Data Source
  KAKENHI-PROJECT-14102022
[Patent] 呼吸センサおよび呼吸を計測する方法2015
- Inventor(s)
  佐々木実、寺澤槙恵、鈴木陽久、水野寛隆
- Industrial Property Rights Holder
  佐々木実、寺澤槙恵、鈴木陽久、水野寛隆
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-002331
- Filing Date
  2015-02-09
- Data Source
  KAKENHI-PROJECT-24650397
[Patent] 浮遊電極がシールドされた誘導結合型マイクロプラズマ源2014
- Inventor(s)
  佐々木実
- Industrial Property Rights Holder
  佐々木実
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2014-034796
- Filing Date
  2014-02-26
- Data Source
  KAKENHI-PUBLICLY-24110720
[Patent] トーションバーを用いた静電駆動型マイクロミラーデバイス2010
- Inventor(s)
  佐々木実, 羽根一博
- Industrial Property Rights Holder
  東北大学
- Filing Date
  2010-01-29
- Data Source
  KAKENHI-PROJECT-21656105
[Patent] トーションバーを用いた静電駆動型マイクロミラーデバイス2010
- Inventor(s)
  佐々木実、羽根一博
- Industrial Property Rights Holder
  東北大学
- Acquisition Date
  2010-01-29
- Data Source
  KAKENHI-PROJECT-21656105
[Patent] 露光方法及び露光装置2006
- Inventor(s)
  佐々木実, 羽根一博
- Industrial Property Rights Holder
  国立大学法人東北大学, ウシオ電機株式会社
- Filing Date
  2006-10-04
- Data Source
  KAKENHI-PROJECT-18681023
[Patent] マイクロミラーデバイス及びマイクロミラーデバイスを利用した装置2006
- Inventor(s)
  佐々木実, 羽根一博
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2006-141324
- Filing Date
  2006-05-22
- Data Source
  KAKENHI-PROJECT-17040003
[Patent] 露光方法及び露光装置2006
- Inventor(s)
  佐々木実他2名
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2006-273326
- Filing Date
  2006-10-04
- Data Source
  KAKENHI-PROJECT-18681023
[Patent] マイクロミラーデバイスとその製造方法,マイクロミラーデバイスの角度計測方法,およびマイクロミラーデバイス応用装置2005
- Inventor(s)
  佐々木実、羽根一博
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2005-219851
- Filing Date
  2005-07-29
- Data Source
  KAKENHI-PROJECT-17068002
[Patent] マイクロミラーデバイス、マイクロミラーデバイスの製造方法、マイクロミラーデバイスの計測方法、及び、マイクロミラーデバイスを利用した装置2005
- Inventor(s)
  佐々木実, 羽根一博
- Industrial Property Rights Holder
  国立大学法人東北大学
- Industrial Property Number
  2005-219851
- Filing Date
  2005-07-29
- Data Source
  KAKENHI-PROJECT-17040003
[Patent] ピエゾ抵抗型角度センサを組み込んだマイクロミラー2004
- Inventor(s)
  佐々木実, 羽根一博
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2004-241132
- Filing Date
  2004-08-20
- Data Source
  KAKENHI-PROJECT-14702039
[Patent] トーションバーを用いた静電駆動型マイクロミラーデバイス2004
- Inventor(s)
  佐々木実, 結城慎也, 羽根一博
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2004-140525
- Filing Date
  2004-05-11
- Data Source
  KAKENHI-PROJECT-14702039
[Patent] 光学装置、光学装置組立体、光学装置集合体、光学素子固定手段、光学装置部品、光学装置の製造方法、光学装置の組立方法2004
- Inventor(s)
  横溝寛治, 堀和仁, 羽根一博, 佐々木実
- Industrial Property Rights Holder
  ソニー株式会社
- Industrial Property Number
  2004-240276
- Filing Date
  2004-08-20
- Data Source
  KAKENHI-PROJECT-14655094
[Presentation] 翼用リブレット形成のためのプレス金型曲面の微細加工 ―三次元フォトリソグラフィによる曲面加工―2022
- Author(s)
  池ヶ谷巧, 佐々木実
- Organizer
  2022年度塑性加工春季講演会
- Data Source
  KAKENHI-PROJECT-19K04132
[Presentation] Deposition of PFCs Films on Die with Microstructures using CF4 Gas2022
- Author(s)
  Gang Han, Masaya Watanabe, Seiya Fujita, Minoru Sasaki
- Organizer
  14th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology and Science, 07P-33
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04132
[Presentation] めっき法を用いた小型SMESのための超電導体材料上への銅膜形成2021
- Author(s)
  信夫勇佑, 荒川太郎，盧柱亨，高井治, 本間英雄, 元廣友美, 佐々木実
- Organizer
  日本材料科学学会2021年度学術講演大会
- Data Source
  KAKENHI-PROJECT-19H02195
[Presentation] シリコンハードマスクを用いたステンレス鋼のドライエッチング2021
- Author(s)
  韓剛, 佐々木実
- Organizer
  第38回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-19K04132
[Presentation] マイクロマシン・センサシステム技術委員会の活動について」1-A-p1-1, 企画セッション：スマート社会・ライフサイエンス応用に向けたセンサ・マイクロマシンの研究動向2020
- Author(s)
  佐々木実
- Organizer
  令和 2 年電気学会基礎・材料・共通部門大会
- Data Source
  KAKENHI-PROJECT-19H02195
[Presentation] Estimation of Electricity Storage Density of Compact SMESs Composed of Si wafer Stacks Loaded with Superconducting Thin Film Coils in Spiral Trenches under the Constraint of Critical Magnetic Flux Density2019
- Author(s)
  T. Motohiro, M. Sasaki, J.-H. Noh
- Organizer
  The 32nd International Symposium on Superconductivity (ISS2019), December 3rd-5th, Kyoto, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02195
[Presentation] Stacking 4” Si Wafer with Parallel 3-Stepped Micro-Trenches to Deposit Superconducting Material for Magnetic Energy Storage2019
- Author(s)
  M. Sasaki, Y. Suzuki, T. Hioki, T. Motohiro,
- Organizer
  2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02195
[Presentation] Copper thin film formation on superconductor material for compact SMES using plating method2019
- Author(s)
  Kaito Seki, Joo-Hyoung Noh, Yoshio Horiuchi, Osamu Takai, Hideo Honma, Tomoyoshi Motohiro, Tatsumi Hioki, Minoru Sasaki and Taro Arakawa
- Organizer
  The 8th International Symposium on Materials Science and Surface Technology (MSST2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02195
[Presentation] Over 100m Length Single Spiral Silicon Micro-Trench with 3-Step Smooth Sidewalls to Deposit Superconducting Material for Magnetic Energy Storage2019
- Author(s)
  M. Sasaki, Y. Suzuki, K. Adachi, T. Hioki, T. Motohiro
- Organizer
  International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02195
[Presentation] Plasma-on-chip: Plasma-on-Chip: Evidence of Reactive Species Through Through-Holes2016
- Author(s)
  J.-S. Oh, S. Kojima, A. Hatta, M. Sasaki, S. Kumagai
- Organizer
  ISPlasma 2016/IC-PLANTS 2016
- Place of Presentation
  Nagoya University, Nagoya, Japan
- Year and Date
  2016-03-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] Measurement of Reactive Species for the Development of Plasma-on-Chip2016
- Author(s)
  J.-S. Oh, S. Kojima, A. Hatta, M. Sasaki, S. Kumagai
- Organizer
  2016年春季応用物理学会
- Place of Presentation
  東京工業大学　大岡山キャンパス（東京都・目黒区）
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] Plasma-on-Chip for Treatment of Individual Cells Cultured in Medium2015
- Author(s)
  C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, S. Kumagai
- Organizer
  2015年秋季応用物理学会
- Place of Presentation
  名古屋国際会議場　（愛知県・名古屋市）
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] Plasma-on-chip device for analyzing interactions between plasma gas and individual cells2015
- Author(s)
  C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, S. Kumagai
- Organizer
  The International Chemical Congress of Pacific Basin Societies 2015 (Pacifichem 2015)
- Place of Presentation
  Honolulu, Hawaii, USA
- Year and Date
  2015-12-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] 容量計測型呼吸センサのための衣服組み込み電極2015
- Author(s)
  寺澤槙恵、熊谷慎也、佐々木実
- Organizer
  第62回　応用物理学会　春季学術講演会　11p-A29-9
- Place of Presentation
  東海大学
- Year and Date
  2015-03-11
- Data Source
  KAKENHI-PROJECT-24650397
[Presentation] Irradiating cells cultured in microwells with low-temperature atmospheric pressure plasma2015
- Author(s)
  C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, S. Kumagai
- Organizer
  he 10th Asian-Europian International Conference on Plasma Surface Engineering (AEPSE2015)
- Place of Presentation
  Jeju, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] 3D lithography and micro-plasma possibilities for combining with precision machining2014
- Author(s)
  Minoru Sasaki
- Organizer
  International Symposium on Micro/Nano Mechanical Machining and Manufacturing (ISMNM 2014) Session B 23
- Place of Presentation
  Xi'an, China
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] MEMS Plasma Source and Combinations with Microfluidic Functions2014
- Author(s)
  Minoru Sasaki
- Organizer
  MEMS workshop for the 4th International Conference on Small Science (ICSS 2014)
- Place of Presentation
  Hong Kong, China
- Invited
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] 運動時の呼吸リズム観察への新しい呼吸モニターの応用2014
- Author(s)
  齊藤満、水藤弘吏、佐々木実
- Organizer
  第18回日本体力医学会東海地方会学術集会
- Place of Presentation
  愛知県知多郡
- Data Source
  KAKENHI-PROJECT-24650397
[Presentation] Length Effect of Floating Wire Electrode in Transportable 144MHz Inductively Coupled Micro-Plasma Source2014
- Author(s)
  D. Yasumatsu, H. Matsuyama, S. Kumagai, K. Takeda, M. Hori, M. Sasaki
- Organizer
  ISPlasma2014/IC-PLANTS2014, 03aP07
- Place of Presentation
  名古屋
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] MEMSによるマイクロ流体界面での反応性プラズマ形成2014
- Author(s)
  柄崎克樹, 熊谷慎也, 佐々木実
- Organizer
  日本機械学会東海支部第63期総会・講演会, OS3 MEMSと先進材料, 305
- Place of Presentation
  大同大学, 名古屋
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Delay Masking Process Using UV Cured Resist Layer Combined with Deep Reactive Ion Etching for Multiple Height Microstructures2014
- Author(s)
  R. Sato, T. Sawada, S. Kumagai, M. Sasaki
- Organizer
  ISPlasma2014/IC-PLANTS2014, 06aB03O
- Place of Presentation
  名古屋
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] A Microplasma Reactor Chip for Utilizing Gas-Gas Interface2014
- Author(s)
  M. Hashimoto, K. Tsukasaki, R. Sato, S. Kumagai, M. Sasaki
- Organizer
  Proc. 8th Int. Conf. on Reactive Plasmas and 31st Symp. on Plasma Processing, 6P-PM-S14-P35
- Place of Presentation
  福岡
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] MEMS Nozzle for Localized Irradiation of Atmospheric Pressure Plasma Trapping Micro-Samples2014
- Author(s)
  R. Shimane, S. Kumagai, H. Hashizume, T. Ohta, M. Ito, M. Hori, M. Sasaki
- Organizer
  ISPlasma2014/IC-PLANTS2014, 06aB05OLN
- Place of Presentation
  名古屋
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] 容量計測による衣服型呼吸センサ2014
- Author(s)
  クンドウスブラタクマル，熊谷慎也，佐々木実
- Organizer
  第31回「センサ・マイクロマシンと応用システム」シンポジウム 21pm3-PS082
- Place of Presentation
  松江
- Year and Date
  2014-10-21
- Data Source
  KAKENHI-PROJECT-24650397
[Presentation] MEMS大気圧プラズマ光源の省電力化2014
- Author(s)
  佐藤龍仁，熊谷慎也，堀勝，佐々木実
- Organizer
  第61回応用物理学会春季学術講演会, 19p-PG3-6, p.13-160
- Place of Presentation
  青山学院大学, 相模原
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Enhanced Wavelength Selective Infrared Emission Using Surface Plasmon Polariton and Thermal Energy Confined in Micro-Heater2014
- Author(s)
  T. Sawada, K. Masuno, S. Kumagai, M. Ishii, S. Uematsu, M. Sasaki
- Organizer
  Proc. the 27th Int. Conf. on Micro Electro Mechanical Systems, Th-240, pp.1179-1182
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Surface Plasmon Polariton Based Wavelength Selective IR Emitter Combined with MEMS Heater with Reduced Thermal Loss2014
- Author(s)
  T. Sawada, T. Chikuba, S. Kumagai, K. Masuno, M. Ishii, S. Uematsu, M. Sasaki
- Organizer
  Proc. 8th Int. Conf. on Reactive Plasmas and 31st Symp. on Plasma Processing, 5B-AM-08
- Place of Presentation
  福岡
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Micro-Channel Device for Spectrum Measurement Using Optical Fiber Aligned with Bias Spring with Reversely Tapered Profile2013
- Author(s)
  H. Iimura, D. Deng, S. Kumagai, Y. Ohishi, M. Sasaki
- Organizer
  Proc. 2013 IEEE Int. Conf. on Optical MEMS and Nanophotonics, WM-S2.5, pp.93-94
- Place of Presentation
  金沢
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Etching profile control of alignment spring for combining MEMS micro-channel device and optical fibers2013
- Author(s)
  H. Iimura, D. Deng, Y. Ohishi, S. Kumagai, M. Sasaki
- Organizer
  Abstracts of The 12th Asia Pacific Physics Conference (APPC12) D2-PMo-5, p.162
- Place of Presentation
  幕張メッセ
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] 着衣可能な容量型呼吸センサ2013
- Author(s)
  クンドウスブラタクマル，熊谷慎也，佐々木実
- Organizer
  第60回応用物理学会春季学術講演会, 29p-PA4-9, p.22-020
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-24650397
[Presentation] マイクロ流体界面へのシート状反応性プラズマ形成の検証2013
- Author(s)
  橋本將寛，柄崎克樹，熊谷慎也，佐々木実
- Organizer
  第5回集積化MEMSシンポジウム, 7pm1-E-4
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Local micro-plasma irradiation using MEMS nozzles2013
- Author(s)
  R. Shimane, H. Asano, S. Kumagai, M. Hori, M. Sasaki
- Organizer
  Proceedings of the 6th International Conference on PLAsma-Nano Technology and Science, P-H11
- Place of Presentation
  Gero, Japan
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Indirect Wavelength Selective Infrared Micro-Emitter Using Surface Plasmon Polariton for Gas Sensing2013
- Author(s)
  T. Sawada, S. Kumagai, K. Masuno, M. Ishii, S. Uematsu, M. Sasaki
- Organizer
  The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, M3P.128, pp.518-521
- Place of Presentation
  Barcelona, Spain
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] A MICROPLAMA CHIP FOR VUV LIGHT SOURCE2013
- Author(s)
  Ryoto Sato, Daisuke Yasumatsu, Shinya Kumagai, Masaru Hori, Minoru Sasaki
- Organizer
  The 26th International Conference on Micro Electro Mechanical Systems, Poster 113-Mo, pp.705-708.
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] MEMS大気圧プラズマ光源2013
- Author(s)
  佐藤龍仁，熊谷慎也，堀勝，佐々木実
- Organizer
  第30回「センサ・マイクロマシンと応用システム」シンポジウム, 6AM2-A-3
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] A Micro Plasma Reactor Chip: Using Interface in Micro-/Nano-Channels towards Materials Processing2013
- Author(s)
  M. Hashimoto, R. Sato, S. Kumagai, M. Sasaki
- Organizer
  IEEE Nanotechnology Materials and Devices Conference (IEEE NMDC 2013) WP-2-4
- Place of Presentation
  Tainan, Taiwan
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Surface Plasmon Polariton Based Wavelength Selective IR Emitter Combined with Microheater2013
- Author(s)
  T. Sawada, K. Masuno, S. Kumagai, M. Ishii, S. Uematsu, M. Sasaki
- Organizer
  Proc. 2013 IEEE Int. Conf. on Optical MEMS and Nanophotonics, TM-S1.5, pp.45-46
- Place of Presentation
  金沢
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] MEMSノズルを利用した大気圧プラズマ照射によるマイクロ加工2013
- Author(s)
  島根竜太郎, 熊谷慎也, 太田貴之, 伊藤昌文, 堀勝, 佐々木実
- Organizer
  第30回プラズマプロセシング研究会 SPP-30, B6-04, pp.103-104
- Place of Presentation
  浜松
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Wavelength Selective Infrared Emission via Surface Plasmon Polariton from MEMS Heater for CO2 Gas Sensing2013
- Author(s)
  K. Masuno, T. Sawada, S. Kumagai, M. Ishii, M. Sasaki, S. Uematsu
- Organizer
  2013 JSAP-MRS Joint Symposia Abstract DVD, 17p-PM4-26, JSAP-MRS-O-055
- Place of Presentation
  京都
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] A microfluidics device with thermocouples fabricated on sidewall2013
- Author(s)
  T. Yamaguchi, S. Kumagai, M. Sasaki
- Organizer
  JSAP-MRS Joint Symposia
- Place of Presentation
  (18a-M3-5)
- Data Source
  KAKENHI-PROJECT-24656066
[Presentation] Multiple-Height Microstructure Fabricated by Deep Reactive Ion Etching and Soft Resist Masks Combined with UV Curing2013
- Author(s)
  Ryoto Sato, Shinya Kumagai, Minoru Sasaki
- Organizer
  第26回プラズマ材料科学シンポジウム（SPSM26）24a-A-6
- Place of Presentation
  九州大学, 福岡
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Localized Microplasma Generation in MEMS Gas Channel2013
- Author(s)
  R. Sato, D. Yasumatsu, S. Kumagai, M. Hori, M. Sasaki
- Organizer
  Proc. 20th Int. Display Workshops, MEET5-2, pp.1409-1412
- Place of Presentation
  札幌
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] A Microplasma Chip for Radical Monitor2013
- Author(s)
  R. Sato, D. Yasumatsu, S. Kumagai, M. Hori, M. Sasaki
- Organizer
  Proc. 2013 IEEE Int. Conf. on Optical MEMS and Nanophotonics, TM-S1.4, pp.43-44
- Place of Presentation
  金沢
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] MEMS Plasma Source and its Applications2013
- Author(s)
  Minoru Sasaki, Shinya Kumaga
- Organizer
  The 4th International Workshop on Nanotechnology and Application - IWNA 2013, AMN-O35-I, pp.127-128
- Place of Presentation
  Vung Tau, Vietnam
- Invited
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] A Thermocouple Device Fabricated on Trench Sidewall for Measuring Accurate Temperature of Microfluid2013
- Author(s)
  T. Yamaguchi, S. Kumagai, M. Sasaki
- Organizer
  Extended Abstracts of the 2013 International Conference on Solid State Devices and Materials, Fukuoka
- Data Source
  KAKENHI-PROJECT-24656066
[Presentation] Microfluidic Device with Accurately Aligned Optical Fibers for Measuring Transmission Spectrum Using Supercontinuum Light2013
- Author(s)
  H. Iimura, D. Deng, S. Kumagai, Y. Ohishi, M. Sasaki
- Organizer
  Extended Abstracts 2013 Int. Conf. on Solid State Devices and Materials, G-3-2, pp836-837
- Place of Presentation
  福岡
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Localized Plasma Treatment for Individual Cells2013
- Author(s)
  R. Shimane, S. Kumagai, M. Hori, M. Sasaki
- Organizer
  Extended Abstracts 2013 Int. Conf. on Solid State Devices and Materials, G-2-6, pp832-833
- Place of Presentation
  福岡
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] MEMS Plasma VUV Light Source2013
- Author(s)
  R.SATO, S.KUMAGAI, M.HORI, M.SASAKI
- Organizer
  Proceedings of 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, P1005A, p.71
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Selective Ashing of One Resist Layer Combined with UV Curing2012
- Author(s)
  Shinya Kumagai, Tatsuki Wajima, Yukio Takeuchi, Minoru Sasaki
- Organizer
  11th Asia Pacific Conference on Plasma Science and Technology (APCPST) 2-P22, p.260.
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Analysis of Hard Sring Effect of Tense Poly-Si Torsion Bar of Micromirror Proc2012
- Author(s)
  Subrata Kumar Kundu, Shouhei Ogawa, Shinya Kumagai, Masayuki Fujishima, Kazuhiro Hane, Minoru Sasaki
- Organizer
  2011 IEEE Int. Conf. on Optical MEMS and Nanophotonics
- Place of Presentation
  Banff, Canada in schedule
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] A MICRO NOZZLE DEVICE TOWARDS PLASMA TREATMENT OF A CELL2012
- Author(s)
  R. Shimane, S. Kumagai, M. Hori, M. Sasaki
- Organizer
  The 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies, ac12000186
- Place of Presentation
  Nanjing, China
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] 張力を持つ薄膜MEMSねじり振動子を利用したセンサ2012
- Author(s)
  山崎辰也, 佐々木実, 熊谷慎也
- Organizer
  日本機械学会東海学生会第43回学生員卒業研究発表講演会,1003
- Place of Presentation
  名古屋工業大学
- Year and Date
  2012-03-14
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] 張力を持つ簿膜MEMSねじり振動子を利用したセンサ2012
- Author(s)
  山崎辰山, 佐々木実, 熊谷慎也
- Organizer
  日本機械学会,東海学生会,第43回学生員卒業研究発表講演会
- Place of Presentation
  名古屋工業大学
- Year and Date
  2012-03-14
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] マイクロミラー用薄膜トーションバーにおけるハードスプリング効果の評価2012
- Author(s)
  小川翔平, 熊谷慎也, 佐々木実
- Organizer
  第59回応用物理学関係連合講演会講演予稿集15p-GP3-21,p.22-021
- Place of Presentation
  早稲田大
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Wearable Capacitive Breathing Sensor2012
- Author(s)
  Subrata Kumar Kundu, Shinya Kumagai, Minoru Sasaki
- Organizer
  Extended Abstracts of the 2012 International Conference on Solid State Devices and Materials, Late News, PS-11-14L, pp.386-387
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-24650397
[Presentation] MEMS Indirect Wavelength Selective Infrared Emitter Using Surface Plasmon Polariton2012
- Author(s)
  Takahiro Sawada, Shinya Kumagai, Katsuya Masuno, Makoto Ishii, Shouichi Uematsu, Minoru Sasaki
- Organizer
  11th Asia Pacific Conference on Plasma Science and Technology (APCPST) Oral, 3T-O07, p.56.
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] MEMSノズルを利用したマイクロプラズマ照射2012
- Author(s)
  島根竜太郎，浅野博敬，熊谷慎也，堀勝，佐々木実
- Organizer
  日本機械学会2012年度年次大会講演論文集 No.12-1, J164031
- Place of Presentation
  金沢
- Data Source
  KAKENHI-PUBLICLY-24110720
[Presentation] Photoresist Spray Coating For 3D MEMS/NEMS2012
- Author(s)
  Shinya Kumagai, Taichi Yamamoto, Hironori Kubo, Minoru Sasaki
- Organizer
  2012 IEEE Nanotechnology Materials and Devices Conference
- Place of Presentation
  Hawaii, USA
- Data Source
  KAKENHI-PROJECT-24656066
[Presentation] Dynamic Deformation of Stretched Membrane in Drum-Type Micromirror2011
- Author(s)
  Subrata Kumar Kundu, Akiyoshi Hikita, Shinya Kumagai, Minoru Sasaki
- Organizer
  Proceedings of 2011 International Symposium on Micro-NanoMechatronics and Human Science pp.255-260
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Multiple-height Microstructure Fabricated by ICP-RIE and Masking Layers Using Only Photoresists2011
- Author(s)
  A.HIKITA, T.IWAMOTO, S.KUMAGAI, M.SASAKI
- Organizer
  Proc.3rd Int.Symp.Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, P2-009A, p.101
- Place of Presentation
  名古屋
- Year and Date
  2011-03-08
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] UVキュアによるレジスト硬化を利用した多段階立体構造のエッチング加工2011
- Author(s)
  熊谷慎也, 疋田晃義, 岩本拓也, 佐々木実
- Organizer
  第58回応用物理学関係連合講演会講演予稿集
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Nonlinear spring characteristics analyzed by a macro model of an electrostatically driven micromirror device2011
- Author(s)
  Shinya Kumagai, Gyu II Shim, Ryoichi Mimoto, Minoru Sasaki
- Organizer
  Proceedings of the 4th international conference on manufacturing, machine design and tribology, pp.237-238
- Place of Presentation
  Gamagori, Aichi
- Year and Date
  2011-04-26
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Comb-drive III-nitride micro mirror fabricated by fast atom beam etching2011
- Author(s)
  Y. Wang, T. Sasaki, T. Wu, F. Hu, K. Hane
- Organizer
  The 16th Int. Conf. Solid-State Sensors, Actuators and Microsystems, M3P
- Place of Presentation
  Beijing, China
- Year and Date
  2011-06-03
- Data Source
  KAKENHI-PROJECT-19106007
[Presentation] マイクロミラー用簿膜トーションバーの精密計測とハードスプリング効果に関する考察2011
- Author(s)
  小川翔平, 熊谷慎也, 佐々木実
- Organizer
  日本機械学会東海支部第60期総会講演会講演論文集
- Place of Presentation
  豊橋技術科学大学
- Year and Date
  2011-03-15
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] マイクロミラー用薄膜トーションバーの精密計測とハードスプリング効果に関する考察2011
- Author(s)
  小川翔平, 熊谷慎也, 佐々木実
- Organizer
  日本機械学会東海支部第60期総会講演会講演論文集609
- Place of Presentation
  豊橋技術科学大学
- Year and Date
  2011-03-15
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Nonlinear spring characteristics analyzed b y a macro model of an electrostatically driven micromirror device2011
- Author(s)
  Shinya Kumagai, Gyu I1 Shim, Ryoichi Mimoto, Minoru Sasaki
- Organizer
  Proceedings of the 4th intnational conference on manufacturing, machine design and tribology
- Place of Presentation
  蒲郡
- Year and Date
  2011-04-26
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Light-Weighted Micromirror Fabricated Using Stacked Photoresist Masks Reaized by UV Curing2011
- Author(s)
  A. Hikita, T. Iwamoto, S. Kumagai, M. Sasaki
- Organizer
  Proceedings of the 4th International Conference on PLAsma-Nano Technology and Science
- Place of Presentation
  高山
- Year and Date
  2011-03-11
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Light-Weighted Micromirror Fabricated Using Stacked Photoresist Masks Realized by UV Curing2011
- Author(s)
  A.Hikita, T.Iwamoto, S.Kumagai, M.Sasaki
- Organizer
  Proceedings of the 4th International Conference on PLAsma-Nano Technology and Science, O-06
- Place of Presentation
  高山
- Year and Date
  2011-03-11
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] UVキュアによるレジスト硬化を利用した多段階立体構造のエッチング加工2011
- Author(s)
  熊谷慎也, 疋田晃義, 岩本拓也, 佐々木実
- Organizer
  第58回応用物理学関係連合講演会講演予稿集,25a-KU-15,03-039
- Place of Presentation
  神奈川工科大学(大震災のため、予稿集による発表扱い)
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Dynamic Deformation of Stretched Membrane in Drum-Type Micromirror2011
- Author(s)
  Subrata Kumar Kundu, Akiyoshi Hikita, Shinya Kumagai, Minoru Sasaki
- Organizer
  Proceedings of 2011 International Symposium on Micro-NanoMechatronics and Human Science
- Place of Presentation
  名古屋
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Multiple-height Microstructure Fabricated by ICP-RIE and Masking Layers Using Only Photoresists2011
- Author(s)
  A. HIKITA, T. IWAMOTO, S. KUMAGAI, M. SASAKI
- Organizer
  Proc. 3rd Int. Symp. Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- Place of Presentation
  名古屋
- Year and Date
  2011-03-08
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror2010
- Author(s)
  Shouhei Ogawa, Shinya Kumagai, Minoru Sasaki
- Organizer
  Proceedings of the 17th International Display Workshops
- Place of Presentation
  博多
- Year and Date
  2010-12-02
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror2010
- Author(s)
  Shouhei Ogawa, Shinya Kumagai, Minoru Sasaki
- Organizer
  Proceedings of the 17th International Display Workshops, MEET2-3, pp.1581-1584.
- Place of Presentation
  博多(invited)
- Year and Date
  2010-12-02
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] スプレーコーティングの気流解析と膜厚分布均一化2010
- Author(s)
  佐々木実
- Organizer
  第27回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  島根県立産業交流会館(島根県)
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-20360116
[Presentation] Absorbent liquid immersion angled exposure for 3D Photolithography2010
- Author(s)
  Hironori Kubo, Minoru Sasaki
- Organizer
  IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
- Place of Presentation
  Sapporo
- Year and Date
  2010-08-12
- Data Source
  KAKENHI-PROJECT-20360116
[Presentation] スプレーコーティングの気流解析と膜厚分布均一化2010
- Author(s)
  佐々木実
- Organizer
  第27回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  島根
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-20360116
[Presentation] Extending Rotation Range Confirmed by Macro Model of Gap-closing Type Electrostatic Micromirror Controlling Non-linearity of Torsion Bar2009
- Author(s)
  G. Il Shim, R. Mimoto, S. Kumagai, M. Sasaki
- Organizer
  Proceedings ofThe 16th International Display Workshops
- Place of Presentation
  宮崎
- Year and Date
  2009-12-10
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] スプレーコート技術と斜め露光技術による垂直側面への配線形成技術2009
- Author(s)
  佐々木実
- Organizer
  中部地区ナノテク総合支援 : ナノ材料創製加工と先端機器分析、平成20年度成果報告会, T20, pp.37-38
- Place of Presentation
  名古屋
- Year and Date
  2009-03-05
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror2009
- Author(s)
  M.Sasaki, S.Kumagai, M.Fujishima, K.Hane, H.Miura
- Organizer
  Extended Abstracts of the 2009 Int. Conf. on Solid State Devices and Materials, pp.1328-1329.
- Place of Presentation
  Sendai
- Year and Date
  2009-10-09
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Liquid immersion angled exposure technique for 3D photolithography2009
- Author(s)
  TAKAFUMI HOSONO, SHINYA KUMAGAI, MINORU SASAKI
- Organizer
  First International Symposium on Advanced Plasma Science and its Applications
- Place of Presentation
  Nagoya
- Year and Date
  2009-03-09
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Micromirror realized by combined surface and bulk micromachining usng isotropic and anisotropic Si etching2009
- Author(s)
  Minoru Sasaki
- Organizer
  First International Symposium on Advanced Plasma Science and its Applications (ISPlasma2009) Poster, Mo.-21, p.143
- Place of Presentation
  名古屋
- Year and Date
  2009-03-09
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] 張力の加わったトーションバーを持つマイクロミラーのマクロモデルによる解析2009
- Author(s)
  沈規一, 味元良一, 熊谷慎也, 佐々木実
- Organizer
  第26回「センサ・マイクロマシンと応用システム」シンポジウム論文集
- Place of Presentation
  船堀
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Microactuator Using Tensile Thin Film2009
- Author(s)
  Minoru Sasaki
- Organizer
  International Symposium on Micro-Nano Mechatronics and Human Science
- Place of Presentation
  名古屋
- Year and Date
  2009-10-11
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Extending Rotation Range Confirmed by Macro Model of Gap-closing Type Electrostatic Micromirror Controlling Non-linearity of Torsion Bar2009
- Author(s)
  G.Il Shim, R.Mimoto, S.Kumagai, M.Sasaki
- Organizer
  Proceedings of The 16th International Display Workshops, MEMS5-3, pp.1501-1504.
- Place of Presentation
  Miyazaki
- Year and Date
  2009-12-10
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Micromirror realized by combined surface and bulk micromachining using isotropic and anisotropic Si etching2009
- Author(s)
  MINORU SASAKI, SHINYA KUMAGAI, KAZUHIRO HANE
- Organizer
  First International Symposium on Advanced Plasma Science and its Applications
- Place of Presentation
  名古屋
- Year and Date
  2009-03-09
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] MEMS用アッシング装置の開発2009
- Author(s)
  岩本拓也,佐々木実,熊谷慎也
- Organizer
  日本機械学会東海学生会、第40回学生員卒業研究発表講演会講演前刷集
- Place of Presentation
  岐阜大学
- Year and Date
  2009-03-16
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] ギャップクロージング型静電マクロミラーのマクロモデルよるpull-in現象解析2009
- Author(s)
  味元良一,佐々木実,熊谷慎也
- Organizer
  日本機械学会東海学生会、第40回学生員卒業研究発表講演会講演前刷集
- Place of Presentation
  岐阜大学
- Year and Date
  2009-03-16
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror2009
- Author(s)
  M. Sasaki, S. Kumagai, M. Fujishima, K. Hane, H. Miura
- Organizer
  Extended Abstracts of the 2009 Int. Conf. on Solid State Devices and Materials
- Place of Presentation
  仙台
- Year and Date
  2009-10-09
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] 張力の加わったトーションバーを持つマイクロミラーのマクロモデルによる解析2009
- Author(s)
  沈規一, 味元良一, 熊谷慎也, 佐々木実
- Organizer
  第26回「センサ・マイクロマシンと応用システム」シンポジウム論文集,pp.187～190
- Place of Presentation
  船堀(東京)
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Microactuator Using Tensile Thin Film2009
- Author(s)
  Minoru Sasaki
- Organizer
  International Symposium on Micro-NanoMechatronics and Human Science, pp.608-613.
- Place of Presentation
  Nagoya
- Year and Date
  2009-10-11
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] 「スプレーコート技術と斜め露光技術による垂直側面への配線形成技術」中部地区ナノテク総合支援 : ナノ材料創製加工と先端機器分析2009
- Author(s)
  森井裕貴,大平文和,佐々木実
- Organizer
  平成20年度成果報告会T20
- Place of Presentation
  名古屋
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress2008
- Author(s)
  M. Sasaki, K. Hane, D. Briand, W. Noell, N. de Rooij
- Organizer
  Proceedings of The 15th International Display Workshops, MEMS3-4
- Place of Presentation
  Niigata, Japan
- Year and Date
  2008-12-04
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device2008
- Author(s)
  Takuro Aonuma, Shinya Kumagai, Minoru Sasaki, Motoki Tabata, Kazuhiro Hane
- Organizer
  Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials, Tsukuba
- Place of Presentation
  Tukuba, Japan
- Year and Date
  2008-09-26
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Micromirror Using Thin Film Torsion Bar with Crystallization-Induced Stress2008
- Author(s)
  Minoru Sasaki
- Organizer
  The 2nd International Symposium on Next-Generation Actuators Leading Breakthroughs, pp.149-152
- Place of Presentation
  幕張
- Year and Date
  2008-04-17
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] スプレーコーティングしたレジスト膜の評価方法の検証2008
- Author(s)
  佐々木実
- Organizer
  第25回「センサ・マイクロマシンと応用システム」シンポジウム, P-1-10, pp.250-253
- Place of Presentation
  沖縄
- Year and Date
  2008-10-23
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] レジストの Spray Coating とMEMS応用2008
- Author(s)
  佐々木実
- Organizer
  Convertech JAPAN/新機能性材料展テクニカルフォーラム,ナノコーティングセッション予稿集
- Place of Presentation
  東京国際展示場
- Year and Date
  2008-02-13
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] A Monitoring Method for Spray Coated Resist Film2008
- Author(s)
  Hisayoshi Tajima, Minoru Sasaki
- Organizer
  Proceedings of The 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems
- Place of Presentation
  Okinawa
- Year and Date
  2008-10-23
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Conductive pattern forming method on vertical wall using spray coating and angled exposure technologies2008
- Author(s)
  Hiroki Morii, Fumikazu Oohira, Minoru Sasaki, Toshihiko Ochi, Asumi Yuzuriha, Katsuhito Wani
- Organizer
  Proceedings of The 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems
- Place of Presentation
  Okinawa
- Year and Date
  2008-10-23
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Stabilization of Temperature Characteristics of Micromirror for Low-Voltage Driving Using Thin Film Torsion Bar of Tensile Poly-Si2008
- Author(s)
  Minoru Sasaki
- Organizer
  Program of 2008 IEEE/LEOS Int. Conf. Optical MEMS and Nanophotonics, P12, pp.120-121
- Place of Presentation
  Freiburg, Germany
- Year and Date
  2008-08-13
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Micromirror Using Thin Film Torsion Bar with Crystallization-Induced Stress2008
- Author(s)
  Minoru Sasaki, Masayuki Fujishima, Hideo Miura, Kazuhiro Hane
- Organizer
  The 2nd International Symposium on Next-Generation Actuators Leading Breakthroughs
- Place of Presentation
  Makuhari, Japan
- Year and Date
  2008-04-17
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress2008
- Author(s)
  M. Sasaki
- Organizer
  Proceedings of The 15th International Display Wo rkshops, MEMS3-4, pp.1337-1340
- Place of Presentation
  新潟
- Year and Date
  2008-12-04
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Piezoresistive Rotation Angle Sensor in Micromirror for Feedback Control2008
- Author(s)
  Takuro Aonuma, Minoru Sasaki, Shinya Kumagai, Motoki Tabata, Kazuhiro Hane
- Organizer
  Proceedings of the 7th International Conference on Machine Automation
- Place of Presentation
  Awaji, Japan
- Year and Date
  2008-09-26
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Nonlinear Rotational Spring with Tension for Stabilizing Electrostaticaly Driven Micromirror2008
- Author(s)
  M. Sasaki
- Organizer
  2008 International Symposium on Micro-NanoMechatronics and Human Science, Organized Session : SA-2 : Actuators, pp.225-230
- Place of Presentation
  名古屋
- Year and Date
  2008-11-08
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] 3次元フォトリソグラフィと側面へのパターニング技術2008
- Author(s)
  佐々木実, 大平文和
- Organizer
  平成19年度中部地区ナノテクノロジー・ネットワーク総合支援成果報告会
- Place of Presentation
  岡崎
- Year and Date
  2008-03-19
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Stabilization of Temperature Characteristics of Micromirror for Low-Voltage Driving Using Thin Film Torsion Bar of Tensile Poly-Si2008
- Author(s)
  Minoru Sasaki, Masayuki Fujishima, Kazuhiro Hane, Hideo Miura
- Organizer
  Program of 2008 IEEE/LEOS Int. Conf. Optical MEMS and Nanophotonics
- Place of Presentation
  Freiburg, Germany
- Year and Date
  2008-08-13
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] レジストのSpray CoatingとMEMS応用2008
- Author(s)
  佐々木実
- Organizer
  コンバーティングテクノロジー総合展テクニカルフォーラム
- Place of Presentation
  東京国際展示場
- Year and Date
  2008-02-13
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Conductive Pattern Forming Method on Vertical Wall using Spray Coating and Angled Exposure Technologies2008
- Author(s)
  H. Morii, F. Oohira, M. Sasaki, T. Ochi, A. Yuzuriha
- Organizer
  Final Program of 2008 IEEE/LEOS Int. Conf. Optical MEMS and Nanophotonics
- Place of Presentation
  Freiburg, Germany
- Year and Date
  2008-08-13
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Nonlinear Rotational Spring with Tension for Stabilizing Electrostatically Driven Micromirror2008
- Author(s)
  M. Sasaki, S. Kumagai, K. Hane
- Organizer
  2008 International Symposium on Micro-NanoMechatronics and Human Science, Organized Session : SA-2 : Actuators
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2008-11-08
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Development of MEMS Capacitive Sensor Using a MOSFET Structure2007
- Author(s)
  H. Izumi, Y. Matsumoto, S. Aoyagi, Y. Harada, S. Shingubara, M. Sasaki, K. Hane, H. Tokunaga
- Organizer
  Proceedings of the 24th Sensor Symposium, pp.254-258
- Place of Presentation
  船堀
- Year and Date
  2007-10-16
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] 対になったテーブルを走査する静電駆動型大変位マイクロXYステージ2007
- Author(s)
  佐々木実, 坊野史典, 羽根一博
- Organizer
  第19回「電磁力関連のダイナミクス」シンポジウム・講演論文集B146, pp.124-125
- Place of Presentation
  早稲田
- Year and Date
  2007-05-16
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] "DRIVING OF MICROMIRROR AND SIMULTANEOUS DETECTION OF ROTATION ANGLE USING INTEGRATED PIEZORESISTIVE SENSOR", Digest of Technical Papers of Transducers' 072007
- Author(s)
  Minoru Sasaki, Motoki Tabata, Kazuhiro Hane
- Organizer
  The 14th International Conference on Solid-State Sensors, Actuators and Microsystems
- Place of Presentation
  Lyon, France
- Year and Date
  2007-06-13
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Micromirror Using Stretched Thin Film for Lower Electrostatic Driving Voltage and Higher Resonant Frequency2007
- Author(s)
  Minoru Sasaki
- Organizer
  Proceedings of The 14th International Display Workshops, MEMS5-1 Invited
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2007-12-06
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Optically Flat Micromirror Using Stretched Membrane with Crystallization-Induced Stress2007
- Author(s)
  Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, and Hideo Miura
- Organizer
  Proceedings of Optical MEMS & Nanophotonics 2007, International Conference on Optical MEMS and Nanophotonics, MC3
- Place of Presentation
  Hualien, Taiwan
- Year and Date
  2007-08-13
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror2007
- Author(s)
  Minoru Sasaki, Shinya Yuki, Kazuhiro Hane
- Organizer
  Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials, D-2-4, pp.92-93
- Place of Presentation
  Tsukuba, Japan
- Year and Date
  2007-09-19
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Development of MEMS Capacitive Sensor Using a MOSFET Structure2007
- Author(s)
  Hayato Izumi, Yohei Matsumoto, Seiji Aoyagi, Yusaku Harada, Shoso Shingubara, Minoru Sasaki, Kazuhiro Hane, Hiroshi Tokunaga
- Organizer
  Proceedings of the 24th Sensor Symposium
- Place of Presentation
  Funabori
- Year and Date
  2007-10-16
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Driving of micromirror and simultaneous detection of rotation angle using integrated piezoresistive sensor2007
- Author(s)
  M.Sasaki, M.Tabata, K.Hane
- Organizer
  The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems
- Place of Presentation
  Lyon France
- Year and Date
  2007-06-10
- Data Source
  KAKENHI-PROJECT-17068002
[Presentation] Large Displacement Micro XY-Stage with Paired Moving Plates2007
- Author(s)
  Minoru Sasaki, Fuminori Bono, Kazuhiro Hane
- Organizer
  Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials
- Place of Presentation
  Tsukuba, Japan
- Year and Date
  2007-09-19
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Micromirror Using Stretched Thin Film for Lower Electrostatic Driving Voltage and Higher Resonant Frequency2007
- Author(s)
  Minoru Sasaki
- Organizer
  The 14th International Display Workshops, MEMS5-1 Invited
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2007-12-06
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Passivated Piezo-resistive Rotation Angle SensorIntegrated in Micromirror2007
- Author(s)
  Minoru Sasaki, Motoki Tabata, and Kazuhiro Hane
- Organizer
  Proceedings of Optical MEMS & Nanophotonics 2007,International Conference on Optical MEMS and Nanophotonics, ThB2
- Place of Presentation
  Hualien, Taiwan
- Year and Date
  2007-08-16
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Optically Flat Micromirror Using Stretched Membrane with Crystallization-Induced Stress2007
- Author(s)
  Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura
- Organizer
  Proceedings of The 4th Public Symposium on Next-Generation Actuators Leading Breakthroughs
- Place of Presentation
  Okinawa, Japan
- Year and Date
  2007-11-19
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Passivated Piezoresistive Rotation Angle Sensor Integrated in Micromirror2007
- Author(s)
  Minoru Sasaki, Motoki Tabata, Kazuhiro Hane
- Organizer
  Proc. of Optical MEMS & Nanophotonics 2007, International Conference on Optical MEMS and Nanophotonics, ThB2, pp.193-194
- Place of Presentation
  Hualien, Taiwan
- Year and Date
  2007-08-16
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Optically Flat Micromirror Using Stretched Membrane with Crystallization-Induced Stress2007
- Author(s)
  Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura
- Organizer
  International Conference on Optical MEMS and Nanophotonics
- Place of Presentation
  Hualien, Taiwan
- Year and Date
  2007-08-13
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Optically flat micromirror using stretched membrane with crystallization-induced stress2007
- Author(s)
  M.Sasaki, T.Sasaki, K.Hane, H.Miura
- Organizer
  Int. Conf. on Optical MEMS and Nanophotoincs
- Place of Presentation
  Hualien, Taiwan
- Year and Date
  2007-08-13
- Data Source
  KAKENHI-PROJECT-17068002
[Presentation] 「対になったテーブルを走査する静電駆動型大変位マイクロXY ステージ」B1462007
- Author(s)
  佐々木実,坊野史典,羽根一博
- Organizer
  第19回「電磁力関連のダイナミクス」シンポジウム
- Place of Presentation
  早稲田大学
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Optically Flat Micromirror Using Stretched Membrane with Crystallization-Induced Stress2007
- Author(s)
  Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura
- Organizer
  Proceedings of The 4th Public Symposium on Next-Generation Actuators Leading Breakthroughs, pp.49-52
- Place of Presentation
  Okinawa, Japan
- Year and Date
  2007-11-19
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Performance of tense thin film torsion bar for large-rotation and low-voltage driving of micromirror2007
- Author(s)
  M.Sasaki, S.Yuki, K.Hane
- Organizer
  2007 Int. Conf. on Solid State Devices and Materials
- Place of Presentation
  Tsukuba, Japan
- Year and Date
  2007-09-18
- Data Source
  KAKENHI-PROJECT-17068002
[Presentation] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror2007
- Author(s)
  Minoru Sasaki, Shinya Yuki, Kazuhiro Hane
- Organizer
  Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials
- Place of Presentation
  Tsukuba, Japan
- Year and Date
  2007-09-19
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Large Displacement Micro XY-Stage with Paired Moving Plates2007
- Author(s)
  Minoru Sasaki, Fuminori Bono, Kazuhiro Hane
- Organizer
  Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials, D-2-2, pp.88-89
- Place of Presentation
  Tsukuba, Japan
- Year and Date
  2007-09-19
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Passivated piezoresistive rotation angle sensor integrated in micromirror2007
- Author(s)
  M.Sasaki, M.Tabata, K.Hane
- Organizer
  Int. Conf. on Optical MEMS and Nanophotoincs
- Place of Presentation
  Hualien, Taiwan
- Year and Date
  2007-08-16
- Data Source
  KAKENHI-PROJECT-17068002
[Presentation] Optically Flat Micromirror Designs Using Stretched Membrane with Crystallization-Induced Stress2007
- Author(s)
  Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, and Hideo Miura
- Organizer
  Proceedings of 2007 IEEE/LEOS Annual Meeting Conference, ThC2
- Place of Presentation
  Florida, USA
- Year and Date
  2007-10-25
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Optically Flat Micromirror Designs Using Stretched Membrane with Crystallization-Induced Stress2007
- Author(s)
  Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura
- Organizer
  Proceedings of 2007 IEEE LEOS Annual Meeting Conference, ThC2, pp.709-710.
- Place of Presentation
  Lake Buena Vista, Florida, USA
- Year and Date
  2007-10-25
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Fiber-Bragg gratuned by micro-heater array2006
- Author(s)
  V.K.Singh, M.Sasaki, K.Hane
- Organizer
  5th Int. Conf. on Optics-photonics Design and Fabrication
- Place of Presentation
  Nara, Japan
- Year and Date
  2006-12-07
- Data Source
  KAKENHI-PROJECT-17068002
[Presentation] 基調講演「ナノ・マイクロ形状と加工技術の現状と動向」Electronic Journal2006
- Author(s)
  佐々木実
- Organizer
  第137回Technical Symposium,新・微細加工技術徹底検証
- Place of Presentation
  品川,コクヨホール
- Year and Date
  2006-08-30
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Angled exposure method for patterning 3D samples with slant side surfaces2006
- Author(s)
  Vijay Kumar Singh, Minoru Sasaki, Kazuhiro Hane
- Organizer
  Proceedins of 2006 International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Kamakura
- Year and Date
  2006-10-27
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Fabrication of MOSFET Capacitive Sensor Using Spray Coating Method2006
- Author(s)
  Yuichi Matsui, Seiji Aoyagi, Kenji Makihira, Hiroshi Tokunaga, Minoru Sasaki, Kazuhiro Hane
- Organizer
  Proceedings of the 23rd Sensor Symposium
- Place of Presentation
  Takamatsu
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Effect of Angled Exposure Light for Three-Dimensional Lithography2006
- Author(s)
  Vijay Kumar Singh, Minoru Sasaki and Kazuhiro Hane
- Organizer
  Proceedings of the 23rd Sensor Symposium
- Place of Presentation
  Takamatsu
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] 位相シフトマスクを利用した立体サンプルへの微細パターン露光法2006
- Author(s)
  佐々木実,陳俊中エドウィン,羽根一博
- Organizer
  MSS-06-19,電気学会研究会資料センサ・マイクロマシン準部門総合研究会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-18681023
[Presentation] Piezoresistive rotation angle sensor integrated in micromirror2005
- Author(s)
  M.Sasaki, M.Tabata, T.Haga and K.Hane
- Organizer
  Int. Conf. on Solid State Devices and Materials
- Place of Presentation
  Kobe, Japan
- Year and Date
  2005-09-16
- Data Source
  KAKENHI-PROJECT-17068002
[Presentation] Micro/nano opt-mechanical systems using silicon micromachining technology2005
- Author(s)
  K.Hane, M.Sasaki, Y.Kanamori, F.R.Hu
- Organizer
  Nanoengineering Symposium 2005
- Place of Presentation
  Daeon, Korea
- Year and Date
  2005-10-28
- Data Source
  KAKENHI-PROJECT-17068002
[Presentation] Performance of tense thin film torsion bar for large-rotation and low-voltage driving of micromirror2005
- Author(s)
  M.Sasaki, S.Yuuki, K.Hane
- Organizer
  IEEE/LEOS Int. Conf. on Optical MEMs and Their Application
- Place of Presentation
  Oulu, Finland
- Year and Date
  2005-08-03
- Data Source
  KAKENHI-PROJECT-17068002
[Presentation] A microfluidics device with thermocouples fabricated on sidewall
- Author(s)
  T. Yamaguchi, S. Kumagai, M. Sasaki
- Organizer
  2013 JSAP-MRS Joint Symposia
- Place of Presentation
  Doshisha University, Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-24656066
[Presentation] Plasma-on-Chip for Controlling Bioreaction of an Individual Cell
- Author(s)
  CHUN-YAO CHANG, JONGHYEON JEONG, MIME KOBAYASHI, TETSUJI SHIMIZU, MINORU SASAKI, SHINYA KUMAGAI
- Organizer
  ISPlasma 2015 / IC-PLANTS 2015
- Place of Presentation
  Nagoya University
- Year and Date
  2015-03-26 – 2015-03-31
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] Development of Plasma-on-Chip: Plasma Treatment of Individual Cells using Gas-Liquid Interface
- Author(s)
  C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, S. Kumagai
- Organizer
  2015年　春季応用物理学会
- Place of Presentation
  東海大学
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] A Thermocouple Device Fabricated on Trench Sidewall for Measuring Accurate Temperature　of Microfluid
- Author(s)
  T. Yamaguchi, S. Kumagai, M. Sasaki
- Organizer
  2013 International Conference on Solid State Devices and Materials
- Place of Presentation
  Hilton Fukuoka, Sea Hawk, Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-24656066

1. HANE Kazuhiro (50164893)

# of Collaborated Projects: 15 results

# of Collaborated Products: 76 results
2. KANAMORI, (10333858)

# of Collaborated Projects: 8 results

# of Collaborated Products: 4 results
3. KUMAGAI Shinya (70333888)

# of Collaborated Projects: 5 results

# of Collaborated Products: 51 results
4. ESASHI Masayoshi (20108468)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
5. 大橋俊朗 (30270812)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. 南和幸 (00229759)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
7. 高橋ひとみ

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. MIURA Hideo (90361112)

# of Collaborated Projects: 1 results

# of Collaborated Products: 11 results
9. HU Fangren (50396545)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
10. OOHIRA Fumikazu (80325315)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. MIHARA Yutaka (50314901)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. YOSIMURA Hidenori (30314412)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. KUNDU Subrata (00621327)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
14. JEONG Jonghyon (90728114)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. OKUMA Shigeru (40111827)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. Ebizuka Noboru (80333300)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. MOTOHIRO Tomoyoshi (20394421)

# of Collaborated Projects: 1 results

# of Collaborated Products: 9 results
18. 齊藤満 (80126862)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. 山形豊 (70261203)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. 青木和光 (20321581)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. 厨川常元 (90170092)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. Nguyen HaiMinh (90815862)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. HAN Gang (50880184)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
24. 盧柱亨 (50313474)

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
25. IEKI Atsushi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. SHIMATSU Takehito

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. UOMOTO Miyuki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
28. KAJIWARA Ken

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. OKUMURA Toshio

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
30. TANAKA Ichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
31. HATTORI Takashi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
32. OZAKI Shinobu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
33. KIRINO Okiharu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
34. OKAMOTO Takayuki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
35. HOSOBATA Takuya

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
36. TAKEDA Masahiro

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
37. 別所芳則

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
38. JEONG JongHyeon

# of Collaborated Projects: 0 results

# of Collaborated Products: 6 results
39. 斉藤満

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Sasaki Minoru 佐々木 実

SASAKI Minoru 佐々木 実

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Fusing precision machining and three-dimensional photolithography and application to realize the shark skin inspired riblet surface for reducing air resistancePrincipal Investigator

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マイクロ流体界面に形成するシート状反応性プラズマPrincipal Investigator

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Development of Wearable Respiratory Sensor and Practical ApplicationPrincipal Investigator

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Highly sensitive infra-red sensor using non-linear vibrationPrincipal Investigator

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Stabilized Temperature Characteristics, High-Speed Response, and Low-Voltage Driving of MicromirrorPrincipal Investigator

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High-performance MEMS devices realized by three-dimensional photolithographyPrincipal Investigator

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回転角センサー体型MEMS光スキャナPrincipal Investigator

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Sasaki Minoru 佐々木実

SASAKI Minoru 佐々木実