MIMURA Kouji 三村耕司

Researcher Number	00091752
Affiliation (based on the past Project Information) *help	2007 – 2012: Tohoku University, 多元物質科学研究所, Associate Professor 2005 – 2006: 東北大学, 多元物質科学研究所, 助教授 2002 – 2004: 東北大学, 多元物質科学研究所, 助手 1995 – 1999: 東北大学, 素材工学研究所, 助手 1992 – 1993: 東北大学, 素材工学研究所, 助手
Review Section/Research Field	Principal Investigator Metal making engineering / Metal making engineering / 金属精錬・金属化学 Except Principal Investigator Metal making engineering / Metal making engineering / Structural/Functional materials
Keywords	Principal Investigator 高純度金属 / 水素プラズマ / 高純度化 / ランタン / 金属生産工学 / 希土類金属 / ジルコニウム / 水素プラズマ溶解 / 高純度精製 / 精製 … More / 帯溶融 / Annealing effect / Trace impurity / Cobalt / Iron / Copper / Purity evaluation / Residual resistivity ratio / High purity metals / 伝導電子 / サイズ効果 / 真空焼鈍 / 水素焼鈍 / 比抵抗 / クロム / 焼鈍効果 / 微量不純物 / コバルト / 鉄 / 銅 / 純度評価 / 残留抵抗比 / Vacuum melting / Zone melting / Purification / Lantharum / Neodymium / Rare earth metal / 真空溶解 / 高真空溶解 / 帯域溶融 / ネオジム / 不純物除去 / バナジウム / プラズマ溶解 / 不純物 / 高融点金属 / 減圧水素プラズマ / バナジウムジルコニウム / モリブデン / 水素プラズマ溶解精製 / セリウム / 活性水素 / 帯溶融精製 / 精製機構 / プラズマ溶解精製 / 不純物強除去速度 / チタン / ハフニウム / レアメタル / 熱プラズマ … More Except Principal Investigator Oxidation / Thin Film / Copper / Hafnium / Zirconium / 誘電特性 / 酸化 / 薄膜 / 銅 / ハフニウム / ジルコニウム / high purity iron / high quality single crystal / Si substrate / hydrogen terminate / molecular beam epitaxy / chemical vapor transport / β-FeSi_2 / β-FeSi_2単結晶 / フォトルミネッセンス / 化学気相輸送法 / 成長機構 / 電気特性 / β-FeSi2単結晶 / 半導体用超高純度鉄 / 超高純度鉄 / 高品位単結晶 / Si基板 / 水素終端処理 / 分子線エピタキシー / 化学気相輸送 / β-FeSi2 / Kinetics / High purity metals / Refining / Hydrogen plasma / Plasma melting / 蒸発種 / 反応速度 / 分光学的解析 / 熱伝導 / 蒸発 / 発光スペクトル / シミュレーション / 高純度金属 / 精製 / 水素プラズマ / プラズマ溶解 / 配線評価用TEG / パルスめっき技術 / 配線抵抗率 / 添加剤フリーめつき技術 / 超高純度めっき材料 / ULSI / 微細構造 / 微量不純物 / Cuの高純度化 / TEG / 分子動力学シミュレーション / 革新的高導電性 / 超高純度めっき材 / 添加剤フリー / Cu 配線 / 収差補正STEM / クレヴァス / Ru膜 / 添加剤フリーめっき / 収差補正TEM / 粒界不純物 / 抵抗率 / 超高純度硫酸銅 / Cu配線 / LSI / 情報材料 / 電子 Less

Purification of refractory metals used for the sputtering targetPrincipal Investigator
- Principal Investigator
  
  MIMURA Kouji
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
Nano-structure Control of Cu Interconnects by a Very High Purity Plating Processes and Its Application to Next-generation LSIs.
- Principal Investigator
  
  ONUKI Jin (OONUKI Jin)
- Project Period (FY)
  2008 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Structural/Functional materials
- Research Institution
  Ibaraki University
Purification of sputtering target metals for high-k insulator films of MOSFET devicesPrincipal Investigator
- Principal Investigator
  
  MIMURA Kouji
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
Low Temperature Oxidation of Ultra-High Purity Metals and Stoichiometry Control of Oxide Films
- Principal Investigator
  
  ISSHIKI Minoru
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
Single Crystal Growth and Stoichiometory Control of Ecologically Friendly Semiconductor β-FeSi_2
- Principal Investigator
  
  ISSHIKI Minoru
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
Precise Purity Evaluation of High-Purity Metals by Residual Resistivity RatioPrincipal Investigator
- Principal Investigator
  
  MIMURA Kouji
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Metal making engineering
- Research Institution
  TOHOKU UNIVERSITY
Impurity removal kinetics of hydrogen plasma arc melting
- Principal Investigator
  
  ISSHIKI Minoru
- Project Period (FY)
  1996 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
プラズマ帯溶融精製法の開発とレアメタル高純度化への応用Principal Investigator
- Principal Investigator
  
  三村耕司
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
Purification of Rare Earth Metals by Advanced Electron Beam Floating Zone Melting MethodPrincipal Investigator
- Principal Investigator
  
  MIMURA Kouji
- Project Period (FY)
  1992 – 1993
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  金属精錬・金属化学
- Research Institution
  Tohoku University

All 2012 2011 2010 2009 2008 2007

All Journal Article Presentation

[Journal Article] 高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011
- Author(s)
  田代優, 門田裕行, 伊藤雅彦, 打越雅仁, 三村耕司, 一色実, 大貫仁
- Journal Title
  
  日本金属学会誌
  
  Volume: 75(掲載決定)
- NAID
  10029368773
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] 高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011
- Author(s)
  田代優, 打越雅仁, 三村耕司, 一色実, 大貫仁
- Journal Title
  
  本金属学会誌 75掲載決定
- NAID
  10029368773
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Preparation of high purity metals for advanced devices2011
- Author(s)
  一色実、三村耕司、打越雅仁
- Journal Title
  
  Thin Solid Films
  
  Volume: Vol.519 Issue: 24 Pages: 8451-8455
- DOI
  10.1016/j.tsf.2011.05.038
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360311
[Journal Article] 金属の高純度精製プロセス2011
- Author(s)
  三村耕司、打越雅仁、一色実
- Journal Title
  
  金属
  
  Volume: 81巻 Pages: 941-948
- URL
  http://www.agne.co.jp/kinzoku/
- Data Source
  KAKENHI-PROJECT-22360311
[Journal Article] Hydrogen effect on refining of Mo metal by Ar-H_2 plasma arc melting2010
- Author(s)
  J.W.Lim, K.Mimura, D.Miyawaki J.M.Oh, G.S.Choi, S.B.Kim, M.Uchikoshi, M.Isshiki
- Journal Title
  
  Materials Letters
  
  Volume: 64 Pages: 2290-2292
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360311
[Journal Article] Purification of CuC12 by anion-exchange separation using multi-column method2010
- Author(s)
  M.Uchikoshi, Y.Yamada, Y.Baba, J.Onuki, K.Mimura, M.Isshiki
- Journal Title
  
  High Temperature Materials and Processes
  
  Volume: 29 Pages: 469-481
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Hydrogen effect on refining of Mometal by Ar-H2 plasma arc melting2010
- Author(s)
  J.W.Lim, 三村耕司 , D.Miyawaki, J.M.Oh, G.S.Choi, S.B.Kim, 打越雅仁、一色実
- Journal Title
  
  Materials Letters
  
  Volume: Vol.64 Issue: 21 Pages: 2290-2292
- DOI
  10.1016/j.matlet.2010.07.067
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360311
[Journal Article] Refining effect of hydrogen plasma arc melting on titanium sponges2010
- Author(s)
  三村耕司, J. W. Lim, J. M. Oh, G. S. Choi, S. W. Cho, 打越雅仁, 一色実
- Journal Title
  
  Materials Letters Vol. 64
  
  Pages: 411-414
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360339
[Journal Article] Refining effect of hydrogen plasma arc melting on titanium sponges2010
- Author(s)
  K.Mimura, J.W. Lim, J.M. Oh, G.S. Choi, S.W. Cho, M.Uchikoshi, M.Isshiki
- Journal Title
  
  Materials Letters 64
  
  Pages: 411-414
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360339
[Journal Article] Impurity behavior in Cu refined by Ar plasma-arc zone melting2009
- Author(s)
  G.M.Lalev, J.-W.Lim, N.R.Munirathnam, G.-S.Choi, M.Uchikoshi, K.Mimura, M.Isshiki
- Journal Title
  
  Metals and Materials International 15
  
  Pages: 753-757
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Purification of Cu by hydrogen plasma-arc zone melting and characterization of trace impurities by secondary ion mass spectrometry2009
- Author(s)
  G.M.Lalev, J.W.Lim, N.R.Munirathnmam, G.S.Choi, M.Uchikoshi, K.Mimura, M.Isshiki
- Journal Title
  
  Materials Characterization 60
  
  Pages: 60-64
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Concentration Behavior of Non-Metallic Impurities in Cu Rods Refined by Argon and Hydrogen Plasma-Arc Zone Melting2009
- Author(s)
  G.M.Lalev, J.-W.Lim, N.R.Munirathnam, G.-S.Choi, M.Uchikoshi, K.Mimura, M.Isshiki
- Journal Title
  
  Materials Transactions 50
  
  Pages: 618-621
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Purification of lanthanum and cerium by plasma arczone melting2008
- Author(s)
  三村耕司、佐藤貴則、一色実
- Journal Title
  
  Journal of Materials Science 43
  
  Pages: 721-2730
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360339
[Journal Article] Purification of lanthanum and cerium by plasma arc zone melting2008
- Author(s)
  三村耕司, 佐藤貴則, 一色実
- Journal Title
  
  Journal of Materials Science Vol. 43
  
  Pages: 2721-2730
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360339
[Presentation] 水素プラズマ溶解による金属Moの高純度精製2012
- Author(s)
  三村耕司、宮脇大、打越雅仁、一色実
- Organizer
  日本金属学会
- Place of Presentation
  横浜市
- Year and Date
  2012-03-29
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] Vの水素化反応と1水素化物相中の水素の拡散に及ぼす酸素の影響2012
- Author(s)
  浅野耕太、林繁信、三村耕司、榎浩利、中村優美子
- Organizer
  日本金属学会
- Place of Presentation
  愛媛大学(松山市)
- Year and Date
  2012-09-18
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] Vの水素化反応と1水素化物相中の水素の拡散に及ぼす酸素の影響2012
- Author(s)
  浅野耕太、林繁信、三村耕司、榎浩利、中村優美子
- Organizer
  日本金属学会
- Place of Presentation
  愛媛大学、松山市
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] Effect of oxygen content on hydrogenation of vanadium and hydrogen diffusion in the monohydride phase2012
- Author(s)
  浅野耕太、林繁信、三村耕司、榎浩利、中村優美子
- Organizer
  International Symposium on Metal–Hydrogen Systems 2012
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] Effect of oxygen content on hydrogenation of vanadium andhydrogen diffusion in the monohydride phase2012
- Author(s)
  浅野耕太、林繁信、三村耕司、榎浩利、中村優美子
- Organizer
  International Symposium on Metal-Hydrogen Systems 2012
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2012-10-21
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] 水素プラズマ溶解による金属Moの溶解精製2012
- Author(s)
  三村耕司、宮脇大、打越雅仁、一色実
- Organizer
  日本金属学会
- Place of Presentation
  横浜国立大(横浜市)
- Year and Date
  2012-03-29
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] Hydrogen Plasma Arc Melting and Refining of Refractory Metals2011
- Author(s)
  K.Mimura, M.Isshiki
- Organizer
  International Symposium of Materials Integration
- Place of Presentation
  Sendai, Japan
- Year and Date
  2011-12-01
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] Hydrogen plasma arc melting and refining of refractory metals2011
- Author(s)
  三村耕司、一色実
- Organizer
  International Symposium ofMaterials Integration
- Place of Presentation
  東北大学(仙台市)
- Year and Date
  2011-12-01
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] 水素プラズマアーク溶解によるTi及びTi合金の精製2009
- Author(s)
  三村耕司, J. W. Lim, G. S. Choi, 一色実
- Organizer
  日本金属学会
- Place of Presentation
  京都大学(京都市)
- Year and Date
  2009-09-16
- Data Source
  KAKENHI-PROJECT-19360339
[Presentation] Plasma Arc Melting and Refining of Titanium and Hafnium2008
- Author(s)
  三村耕司
- Organizer
  Proceedings of International Symposium of Resource Recycling 2007
- Place of Presentation
  韓国、済州島
- Year and Date
  2008-11-28
- Data Source
  KAKENHI-PROJECT-19360339
[Presentation] Refining and Purification of Rare Metals using Plasma Arc Heating2008
- Author(s)
  三村耕司, 一色実
- Organizer
  Symposium on the Development and Applications of Rare Metals
- Place of Presentation
  大田(韓国)
- Year and Date
  2008-05-22
- Data Source
  KAKENHI-PROJECT-19360339
[Presentation] Refining and Purification of Rare Metals using Plasma Are Heating2008
- Author(s)
  三村耕司、一色実
- Organizer
  Symposium on the Development and Applications of Rare Metals
- Place of Presentation
  Korea, Daejon
- Year and Date
  2008-05-22
- Data Source
  KAKENHI-PROJECT-19360339
[Presentation] Purification of Rare Metals by Special Melting Method2007
- Author(s)
  Kouji Mimura
- Organizer
  The International Symposium on Metals Root Technology, 2007 Spring Conference of the Korea Institute of Metals and Materials
- Place of Presentation
  ChangWon (Korea)
- Year and Date
  2007-04-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360366
[Presentation] Plasma arc melting and refining of titanium and hafnium2007
- Author(s)
  Kouji Mimura
- Organizer
  International Symposium of Resource Recycling 2007
- Place of Presentation
  Jeju (Korea)
- Year and Date
  2007-11-27
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360366
[Presentation] Purification of Rare Metals by Special Melting Method2007
- Author(s)
  Kouji Mimura
- Organizer
  The International Symposium on Metals Root Technology, 2007 Spring Conference of the Korea Institute of Metals and Materials
- Place of Presentation
  Korea, ChangWon
- Year and Date
  2007-04-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360366
[Presentation] Plasma arc melting and refining of titanium and hafnium2007
- Author(s)
  Kouji Mimura J.-W. Lim, G.-S. Choi, Minoru Isshiki
- Organizer
  International Symposium of Resource Recycling 2007
- Place of Presentation
  Korea, Jeju
- Year and Date
  2007-11-27
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360366
[Presentation] Plasma Arc Melting and Refining of Titanium and Hafnium2007
- Author(s)
  三村耕司
- Organizer
  International Symposium of Resource Recycling 2007
- Place of Presentation
  済州島(韓国)
- Year and Date
  2007-11-28
- Data Source
  KAKENHI-PROJECT-19360339

1. ISSHIKI Minoru (20111247)

# of Collaborated Projects: 9 results

# of Collaborated Products: 22 results
2. ISHIKAWA Yukio (40250823)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
3. WANG Jifeng (30271977)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. ONUKI Jin (70315612)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
5. ISHIKAWA Nobuhiro (00370312)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. KONDO Kazuo (50250478)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. INAMI Takashi (20091853)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. CHONAN Yasunori (30363740)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. ITO Shinji (50370317)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
10. UCHIKOSHI Masahito (60447191)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
11. OHTA Hiromichi (70168946)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. NAGANO Takatoshi (70343621)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. KIMURA Takashi (70370319)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. SASAJIMA Yasushi (80187137)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. AOYAMA Takashi (80363737)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. TASHIRO Suguru (90272111)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results

MIMURA Kouji 三村 耕司

Research Projects

Research Products

Co-Researchers

Purification of refractory metals used for the sputtering targetPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Nano-structure Control of Cu Interconnects by a Very High Purity Plating Processes and Its Application to Next-generation LSIs.

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Purification of sputtering target metals for high-k insulator films of MOSFET devicesPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Low Temperature Oxidation of Ultra-High Purity Metals and Stoichiometry Control of Oxide Films

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Single Crystal Growth and Stoichiometory Control of Ecologically Friendly Semiconductor β-FeSi_2

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Precise Purity Evaluation of High-Purity Metals by Residual Resistivity RatioPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Impurity removal kinetics of hydrogen plasma arc melting

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

プラズマ帯溶融精製法の開発とレアメタル高純度化への応用Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Purification of Rare Earth Metals by Advanced Electron Beam Floating Zone Melting MethodPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] 高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011

Author(s)

Journal Title

NAID

Data Source

[Journal Article] 高純度めっき材料を用いた 低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Preparation of high purity metals for advanced devices2011

Author(s)

Journal Title

DOI

Data Source

[Journal Article] 金属の高純度精製プロセス2011

Author(s)

Journal Title

URL

Data Source

[Journal Article] Hydrogen effect on refining of Mo metal by Ar-H_2 plasma arc melting2010

Author(s)

MIMURA Kouji 三村耕司

[Journal Article] 高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011