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Nagano Takatoshi  永野 隆敏

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NAGANO Takatoshi  永野 隆敏

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Researcher Number 70343621
Other IDs
Affiliation (Current) 2022: 茨城大学, 理工学研究科(工学野), 講師
Affiliation (based on the past Project Information) *help 2017 – 2022: 茨城大学, 理工学研究科(工学野), 講師
2012 – 2017: 茨城大学, 工学部, 講師
Review Section/Research Field
Principal Investigator
Thin film/Surface and interfacial physical properties
Except Principal Investigator
Composite materials/Surface and interface engineering / Basic Section 26050:Material processing and microstructure control-related / Structural/Functional materials / Material processing/Microstructural control engineering / Medium-sized Section 26:Materials engineering and related fields
Keywords
Principal Investigator
偏析 / β-FeSi2 / 第一原理計算
Except Principal Investigator
粒子法 / 抵抗率 / 相変態 / 熱電変換 / 電子 / 情報材料 / LSI … More / Cu配線 / 超高純度硫酸銅 / 粒界不純物 / 収差補正TEM / 添加剤フリーめっき / Ru膜 / クレヴァス / 収差補正STEM / Cu 配線 / 添加剤フリー / 超高純度めっき材 / 革新的高導電性 / 分子動力学シミュレーション / TEG / Cuの高純度化 / 微量不純物 / 微細構造 / ULSI / 超高純度めっき材料 / 添加剤フリーめつき技術 / 配線抵抗率 / パルスめっき技術 / 配線評価用TEG / Cu-TSV / 3次元実装 / 低抗率 / Cuめっき / 不純物 / 3次元実装 / 結晶粒径 / 化合物 / 低歪 / TSV / 低ひずみ / 熱電特性 / ナノ構造 / 状態図 / 熱伝導率 / ギブス-トムソン効果 / 固溶度 / 複合組織 / 熱電変換材料 / 組織制御 / キャリア密度 / フォノン散乱 / ボールミル / ナノ材料 / ナノ構造化熱電材料 / バンド構造 / 透過型電子顕微鏡 / 超音波接合 / 界面構造 / その場観察 / シミュレーション / 多孔質熱電材料 / 一方向凝固 / 粒子法シミュレーション / フェーズフィールド法 / 拡散接合 / 多孔質材料 / ポロシティ / 孔径 / 接合界面 / 多孔質 / ドーピング / 熱伝達係数 / 構造・機能材料 / デバイス設計 / パーメンジュール合金 / 集合組織 / 中性子回折 / 軟磁気特性 / 異種金属間接合 / Cu-Al / 摩擦撹拌接 / 金属間化合物相 / 合金相 / 回復・再結晶 / 接合強度 Less
  • Research Projects

    (8 results)
  • Research Products

    (36 results)
  • Co-Researchers

    (21 People)
  •  Development of bonding technology for thin metal sheets using friction stir welding

    • Principal Investigator
      田代 優
    • Project Period (FY)
      2021 – 2022
    • Research Category
      Grant-in-Aid for Challenging Research (Exploratory)
    • Review Section
      Medium-sized Section 26:Materials engineering and related fields
    • Research Institution
      Ibaraki University
  •  Innovation of soft magnetic permendur alloys based on surface-induced recrystallization

    • Principal Investigator
      佐藤 成男
    • Project Period (FY)
      2020 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 26050:Material processing and microstructure control-related
    • Research Institution
      Ibaraki University
  •  Dynamic direct observation of surface/interface transition process in ultrasonic welding

    • Principal Investigator
      Iwamoto Chihiro
    • Project Period (FY)
      2018 – 2021
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 26050:Material processing and microstructure control-related
    • Research Institution
      Ibaraki University
  •  Three dimensional thermal interface modification and its application to a novel thermoelectric conversion system

    • Principal Investigator
      Ikeda Teruyuki
    • Project Period (FY)
      2017 – 2019
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Composite materials/Surface and interface engineering
    • Research Institution
      Ibaraki University
  •  Nanostructuring of thermoelectric materials via high-energy nonequilibrium processes and their novel functions

    • Principal Investigator
      Ikeda Teruyuki
    • Project Period (FY)
      2014 – 2017
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Composite materials/Surface and interface engineering
    • Research Institution
      Ibaraki University
  •  Low strain and high aspect ratio Cu-TSVs

    • Principal Investigator
      Onuki Jin
    • Project Period (FY)
      2013 – 2015
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Material processing/Microstructural control engineering
    • Research Institution
      Ibaraki University
  •  the appearance of surface magnetism beta-FeSi2Principal Investigator

    • Principal Investigator
      NAGANO Takatoshi
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Young Scientists (B)
    • Research Field
      Thin film/Surface and interfacial physical properties
    • Research Institution
      Ibaraki University
  •  Nano-structure Control of Cu Interconnects by a Very High Purity Plating Processes and Its Application to Next-generation LSIs.

    • Principal Investigator
      ONUKI Jin (OONUKI Jin)
    • Project Period (FY)
      2008 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Structural/Functional materials
    • Research Institution
      Ibaraki University

All 2020 2019 2018 2016 2015 2013 2012 2011 Other

All Journal Article Presentation Patent

  • [Journal Article] ロータス型多孔質熱電材料を用いた新しい熱電変換デバイスの可能性2020

    • Author(s)
      池田輝之,永野隆敏,篠嶋妥
    • Journal Title

      機能材料

      Volume: 39 Pages: 52-59

    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Journal Article] 流体透過性多孔質熱電材料を用いた新しい熱電変換モジュール2020

    • Author(s)
      池田輝之,佐々木誠,永野隆敏
    • Journal Title

      クリーンエネルギー

      Volume: 29 Pages: 51-55

    • NAID

      40022131918

    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Journal Article] Pinning Effect of Fe(ClO) and Ti(ClO) Compounds on Cu Grain Growth in Very Narrow Cu Wires2015

    • Author(s)
      Takatoshi Nagano, Yashushi Sasajima, Bobuhiro Ishikawa, Kunihiro Tamahashi,Kishio Hidaka,and Jin Onuki
    • Journal Title

      ECS Electrochemistry Letters

      Volume: 4

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25289258
  • [Journal Article] Cs-corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu interconnect2013

    • Author(s)
      T.Nagano,Y.Sasajima,K.Tamahashi, and J.Onuki
    • Journal Title

      ECS Electrochemistry Letters

      Volume: 掲載確定

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Journal Article] Cs-Corrected STEM Observation and Atomic Modeling of Grain Boudary Impurities of Very Narrow Cu Interconnect2013

    • Author(s)
      Takatoshi Nagano,Kunihiro Tamahashi, Yasushi Sasajima, Jin Onuki
    • Journal Title

      ECS Electrochemistry Letters

      Volume: 2

    • DOI

      10.1149/2.001306eel

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24760022
  • [Journal Article] Cs-Corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu Interconnect2013

    • Author(s)
      Takatoshi Naganoz, Kunihiro Tamahashi, Yasushi Sasajima and Jin Onuki
    • Journal Title

      ECS Electrochemistry Letters

      Volume: 2

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24760022
  • [Journal Article] Cs-Corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu Interconnect2013

    • Author(s)
      永野隆敏、篠嶋妥
    • Journal Title

      ECS Electrochemistry Letters

      Volume: 2巻

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24760022
  • [Journal Article] Searching for barrier materials for Cu wire in LSI2013

    • Author(s)
      Yasushi Sasajima, Takatoshi Nagano, and Jin Onuki
    • Journal Title

      ECS Journal of Solid State Science and Technology

      Volume: Vol.2 Pages: 351-356

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-25289258
  • [Journal Article] Electron backscatter diffraction analysis of electrodeposited nano-scale copper wires2013

    • Author(s)
      T.Nagano,Y.Sasajima,K.Tamahashi, and J.Onuki
    • Journal Title

      Thin Solid Films

      Volume: (掲載確定)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Journal Article] Effect of Point Defects on Lattice Constant in MgO Thin Film Deposited on Silicon (001) Substrate2012

    • Author(s)
      金子智、永野隆敏
    • Journal Title

      European Physical Journal - Applied Physics

      Volume: 58巻 Pages: 10302-10302

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24760022
  • [Journal Article] Substrate temperature dependence of electrical and structural properties of Ru films2011

    • Author(s)
      Takatoshi Nagano, Kazuya Inokuchi, Kunihiro Tamahashi, Nobuhiro Ishikawa, Yasushi Sasajima, Jin Onuki
    • Journal Title

      Thin Solid Films

      Volume: 520 Pages: 374-379

    • DOI

      10.1016/j.tsf.2011.07.046

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Patent] 熱電変換モジュール2019

    • Inventor(s)
      池田輝之,児島孝文,永野隆敏,井手拓哉,中嶋英雄ほか
    • Industrial Property Rights Holder
      国立大学法人茨城大学,株式会社ロータスマテリアル研究所
    • Industrial Property Rights Type
      特許
    • Patent Publication Number
      2019-165137
    • Filing Date
      2019
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Patent] 熱電変換モジュール2018

    • Inventor(s)
      池田輝之, 児島孝文, 永野隆敏,他
    • Industrial Property Rights Holder
      国立大学法人茨城大学, 株式会社ロータスマテリアル研究所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2018-052531
    • Filing Date
      2018
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Patent] Ru膜成膜装置、金属性膜装置、Ruバリアメタル層、配線構造2016

    • Inventor(s)
      永野隆敏、大貫 仁、篠嶋 妥、玉橋邦裕、小沼重春
    • Industrial Property Rights Holder
      永野隆敏、大貫 仁、篠嶋 妥、玉橋邦裕、小沼重春
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-086074
    • Filing Date
      2016-04-22
    • Data Source
      KAKENHI-PROJECT-25289258
  • [Patent] 超低抵抗率銅配線を有する半導体集積回路装置2015

    • Inventor(s)
      篠嶋 妥、 大貫 仁、永野隆敏
    • Industrial Property Rights Holder
      篠嶋 妥、 大貫 仁、永野隆敏
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-038589
    • Filing Date
      2015-02-27
    • Data Source
      KAKENHI-PROJECT-25289258
  • [Patent] 半導体集積回路装置及びその製造方法並びに該半導体集積回路装置に使用する低抵抗率銅配線の探索方法2013

    • Inventor(s)
      大貫、篠嶋、永野、玉橋、千葉
    • Industrial Property Rights Holder
      大貫、篠嶋、永野、玉橋、千葉
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-101708
    • Filing Date
      2013-05-13
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Patent] 半導体集積回路装置及びその製造方法並びに該半導体集積回路装置に使用する低抵抗率銅配線の探索方法2013

    • Inventor(s)
      大貫, 篠嶋, 永野, 玉橋, 千葉
    • Industrial Property Rights Holder
      茨城大学
    • Industrial Property Number
      2013-101708
    • Filing Date
      2013-05-13
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Patent] 半導体集積回路装置用バリア材の探索方法2011

    • Inventor(s)
      篠嶋妥、大貫仁、永野隆敏、玉橋邦裕
    • Industrial Property Rights Holder
      国立大学法人茨城大学
    • Industrial Property Number
      2011-030514
    • Filing Date
      2011-02-16
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Patent] 半導体集積回路装置用ルテニウムバリア膜とその作成方法及び該ルテニウムバリア膜を有する半導体集積回路装置とその製2011

    • Inventor(s)
      永野隆敏、大貫仁、篠嶋妥、玉橋邦裕
    • Industrial Property Rights Holder
      国立大学法人茨城大学
    • Industrial Property Number
      2011-033019
    • Filing Date
      2011-02-18
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Presentation] 粒子法シミュレーションにより評価した流体透過性多孔質熱電材料の熱伝達係数の形状パラメータ依存性2020

    • Author(s)
      佐々木 誠、橋本 康孝、永野 隆敏、池田 輝之
    • Organizer
      日本金属学会2020年春期講演大会
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Presentation] 多孔質Siを用いた熱電変換デバイスの作製条件検討2020

    • Author(s)
      橋本 康孝、佐々木 誠、日山 洋平、永野 隆敏、池田 輝之
    • Organizer
      日本金属学会2020年春期講演大会
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Presentation] 多孔質Siを用いた熱電変換デバイス作製に向けて2019

    • Author(s)
      橋本康孝,佐々木誠,日山洋平,永野隆敏,池田輝之
    • Organizer
      日本金属学会2019年秋期講演大会
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Presentation] 多孔質熱電変換材料を用いた熱電変換デバイスの作製条件の検討2019

    • Author(s)
      橋本康孝,佐々木誠,永野隆敏,池田輝之
    • Organizer
      日本金属学会2019年春期講演大会
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Presentation] 粒子法シミュレーションによる熱流体透過型多孔質熱電材料の熱伝達係数の精度評価2019

    • Author(s)
      佐々木誠,橋本康孝,永野 隆敏,池田輝之
    • Organizer
      日本金属学会2019年秋期講演大会
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Presentation] Towards fabrication of thermoelectric conversion devices using porous thermoelectric materials2019

    • Author(s)
      Yasutaka Hashimoto, Makoto Sasaki, Takatoshi Nagano, Teruyuki Ikeda
    • Organizer
      The 38th International Conference on Thermoelectrics & The 4th Asian Conference on Thermoelectrics
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Presentation] Examination of Fabrication Condition of Thermoelectric Conversion Devices Using Porous Thermoelectric Materials2019

    • Author(s)
      Yasutaka HASHIMOTO, Makoto SASAKI, Yohei HIYAMA, Takatoshi NAGANO, Teruyuki IKEDA
    • Organizer
      Materials Researchmeeting 2019 (MRM2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Presentation] Fabrication of porous thermoelectric materials and their applications2019

    • Author(s)
      Yasutaka Hashimoto, Makoto Sasaki, Yohei Hiyama, Takatoshi Nagano, Teruyuki Ikeda
    • Organizer
      The 4th International Symposium of Quantum Beam Science
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Presentation] 粒子法シミュレーションによる熱流体透過型多孔質熱電材料の熱伝達係数評価2018

    • Author(s)
      佐々木誠,永野隆敏,池田輝之,井手拓哉,中嶋英雄
    • Organizer
      日本熱電学会学術講演会
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Presentation] 粒子法シミュレーションによる熱流体透過型多孔質熱電材料の温度分布評価2018

    • Author(s)
      佐々木誠, Shiva Kumar Singh, 永野隆敏, 池田輝之, 井手拓哉, 中嶋英雄
    • Organizer
      日本金属学会2018年春期講演大会
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Presentation] Porous thermoelectric materials and their applications2018

    • Author(s)
      Teruyuki Ikeda, Takatoshi Nagano, Takuya Ide, Hideo Nakajima
    • Organizer
      The 35th International Conference & The 1st Asia Conference on Thermoelectrics
    • Data Source
      KAKENHI-PROJECT-17H03399
  • [Presentation] 超微細配線中のCu 粒成長に及ぼす不純物元素の影響2012

    • Author(s)
      江口大貴,永野隆敏, 圓谷哲紀,篠嶋妥
    • Organizer
      日本金属学会2012年秋期大会
    • Place of Presentation
      愛媛大学城北キャンパス
    • Year and Date
      2012-09-19
    • Data Source
      KAKENHI-PROJECT-24760022
  • [Presentation] Cu薄膜の粒成長に及ぼす基板の影響2012

    • Author(s)
      圓谷哲紀,江口大貴,永野隆敏,篠嶋妥
    • Organizer
      日本金属学会2012年秋期大会
    • Place of Presentation
      愛媛大学城北キャンパス
    • Year and Date
      2012-09-19
    • Data Source
      KAKENHI-PROJECT-24760022
  • [Presentation] a-SiGe/SiGe 粒界上偏析構造の第一原理計算2012

    • Author(s)
      圖師優磨, 山田翔世, 永野隆敏
    • Organizer
      第73回応用物理学会学術講演
    • Place of Presentation
      松山大学文京キャンパス
    • Year and Date
      2012-09-13
    • Data Source
      KAKENHI-PROJECT-24760022
  • [Presentation] 微細Cu 配線における粒界偏析元素の直接観察と第一原理計算2012

    • Author(s)
      永野隆敏, 圓谷哲紀,江口大貴,篠嶋妥
    • Organizer
      日本金属学会2012年秋期大会
    • Place of Presentation
      愛媛大学城北キャンパス
    • Year and Date
      2012-09-19
    • Data Source
      KAKENHI-PROJECT-24760022
  • [Presentation] a-SiGe/SiGe 粒界上偏析構造の第一原理計算2012

    • Author(s)
      山田翔世, 圖師優磨, 永野隆敏
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、早稲田キャンパス
    • Year and Date
      2012-03-16
    • Data Source
      KAKENHI-PROJECT-24760022
  • [Presentation] アモルファスSiGe/SiGe粒界上偏析構造の第一原理計算

    • Author(s)
      永野隆敏
    • Organizer
      応用物理学会 シリサイド系半導体と関連物質研究会
    • Place of Presentation
      愛媛県松山市民会館
    • Invited
    • Data Source
      KAKENHI-PROJECT-24760022
  • 1.  SASAJIMA Yasushi (80187137)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 6 results
  • 2.  ONUKI Jin (70315612)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 5 results
  • 3.  KONDO Kazuo (50250478)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 4.  INAMI Takashi (20091853)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 5.  OHTA Hiromichi (70168946)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 6.  TASHIRO Suguru (90272111)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 7.  Ikeda Teruyuki (40314421)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 13 results
  • 8.  鵜殿 治彦 (10282279)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 9.  MIMURA Koji (00091752)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  ISHIKAWA Nobuhiro (00370312)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results
  • 11.  CHONAN Yasunori (30363740)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  ITO Shinji (50370317)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  UCHIKOSHI Masahito (60447191)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  KIMURA Takashi (70370319)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  AOYAMA Takashi (80363737)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  Iwamoto Chihiro (60311635)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 17.  一色 実 (20111247)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 18.  佐藤 成男 (40509056)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 19.  鈴木 茂 (40143028)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 20.  星川 晃範 (60391257)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 21.  小貫 祐介 (50746998)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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