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All Journal Article Presentation Patent
Journal of Vacuum Science & Technology A
Volume: 39 Pages: 043401-043401
10.1116/6.0001023
Advanced Optical Materials
Volume: 10 Pages: 2101615-2101615
10.1002/adom.202101615
Thin Solid Films
Volume: 651 Pages: 91-96
Jouranal of Alloys and Compounds
Volume: 748 Pages: 87-92
Physical Review Applied
Volume: 6 Pages: 044022-044022
10.1103/physrevapplied.6.044022
Volume: 636 Pages: 63-69
10.1016/j.tsf.2017.05.027
Journal of Vacuum Science and Technology A
Volume: 35
10.1116/1.4989669
Volume: 624 Pages: 49-53
10.1016/j.tsf.2017.01.022
Volume: 616 Pages: 95-100
10.1016/j.tsf.2016.07.056
Journal of Applies Physics
Volume: 119
10.1063/1.4941348
Optics Express
Volume: 24 Pages: 4405-4410
10.1364/oe.24.004405
Journal of Applied Physics
Volume: 117
10.1063/1.4922122
10.1063/1.4921105
Jpn. J. Appl. Phys.
Volume: vol.53, No.3 Pages: 35802-35802
210000143443
Volume: 115 Pages: 153501-153501
10.1063/1.4870868
J. Appl. Phys.
Volume: vol.115 Pages: 153501-153501
Volume: 53 Issue: 3 Pages: 035802-035802
10.7567/jjap.53.035802
Volume: vol.113 Pages: 163503-163503
Volume: 113
10.1063/1.4795813
Volume: vol.113 Pages: 123503-123503
10.1063/1.4802652
Volume: 111
10.1063/1.3700210
Volume: vol.111 Pages: 73514-73514
J. Vac. Sci. Technol.
Volume: A 30 Pages: 51502-51502
Volume: 30
10.1116/1.4733995
Journal of the Vacuum Society of Japan (真空)
Volume: Vol.54, No3 Pages: 169-172
10028057028
Journal of Vacuum Society of Japan
Volume: 54(印刷中)
Appl. Phys. Lett.
Volume: 99 Pages: 51903-51903
Volume: 50 Issue: 6R Pages: 065803-065803
10.1143/jjap.50.065803
Volume: Vol.50, No.6 Pages: 65803-65803
J.Appl.Phys. Vol.107
Phy.Rev.B 82
Pages: 153401-153401
120002661515
Physical Review B
Volume: 82
Volume: 107
真空 Vol.52, No3
Pages: 167-1970
10024897925
Jpn.J.Appl.Phys. Vol.48, Special Issue
Jpn.J.Appl.Phys. Vol.48, No.4
Japanese Journal of Applied Physics Vol.48
International Journal of Nanoscience Nos.1 & 2
Pages: 147-150
Journal of the Vacuum Society of Japan 第52巻3号
Pages: 167-170
Jpn.J.Appl.Phys. Vol.48, No.6
Thin Solid Films (On-line)
Thin Solid Films Vol. 516
Pages: 3572-3576
Thin Solid Films Vol.516
Proceedings of International Symposium on Dry Process 2008
Pages: 195-196
Japanese Journal of Applied Physics Vol.46,No.34
Solid State Phenomena Vols.123-126
Pages: 703-706
Thin Solid Films Vol.515
Pages: 4992-4995
Solid State Phenomena Vol. 124-126
Thin Solid Films Vol. 515
Solid State Phenomena Vols.124-126
Japanese Journal of Applied Physics Vol. 46, No. 34
Proceedings of 6^<th> International Symposium on Dry Process
Pages: 117-118
Japanese Journal of Applied Physics Vol. 45, No. 12
Pages: 9200-9202
40015182135
Japanese Journal of Applied Physics Vol.45
Proceedings of the 6^<th> International Conference on Reactive Plasmas and 23^<rd> Symposium on Plasma Processing
Pages: 661-662
Japanese Jouranl of Applied Physics Vol.45,No.12
Pages: 269-270
Pages: 659-660
Proceedings of 27^th International Symposium on Dry Process
Pages: 317-318
Japanese Journal of Applied Physics Vol.44, No.5A
Pages: 3192-3195
10015707072
Proceeding of Plasma Science Symposium 2005/The 22^<th> Symposium on Plasma Processing
Pages: 383-384
Proceedings of 27th International Symposium on Dry Process
Japanese Journal of Applied Physics Vol.44,No.36
Japanese Journal of Applied Physics Vol.44,No.5A
Japanese Journal of Applied Physics Vol.44, No.36
Japanese Journal of Applied Physics Vol.44,No.5A(accepted for publication)
Proceedings of 27^<th> International Symposium on Dry Process
Proceedings of Plasma Science Symposium 2005/The 22^<th> Symposium on Plasma Processing
Pages: 387-388
Japanese Journal of Applied Physics Vol.44,No.5B
Japanese Journal of Applied Physics Vol.43, No.5B
10012930898
Japanese Journal of Applied Physics Vol.43,No.5B
130004532032