OKIMURA Kunio 沖村邦雄

Researcher Number	00194473
Other IDs
Affiliation *help	2015 – 2018 : 東海大学, 工学部, 教授 2009 – 2013 : Tokai University, 工学部, 教授 2010 : 東海大学, 情報理工学部, 教授 2006 – 2008 : 東海大学, 情報理工学部, 教授 2005 : Tokai University, School of Information Technology and Electronics, Professor, 電子情報学部, 教授 … More
Review Section/Research Field	Principal Investigator Applied materials science/Crystal engineering / Plasma science / プラズマ理工学 / Applied materials Except Principal Investigator Material processing/treatments / 広領域 / Plasma science
Keywords	Principal Investigator 機能性酸化物 / バナジウム酸化膜 / エピタキシャル成長 / 相転移 / スイッチングデバイス / vanadium dioxide / ICP支援スパッタ成膜法 / メモリーデバイス / ICP支援スパッタ装置 / 相共存 … More Except Principal Investigator セラミックコーティング / 窒化 / ceramic coating / 表面処理 / nitriding / 複合処理 / プラズマ処理 / plasma treatment / suraface treatment / duplex treatment / chromium nitride / 窒化クロム / 環境映像 / クロム・ニッケル / pulse-count / CsI (T1) scintillation detector / 真空容器 / ガス密度分布 / environmental radiation / 放射線教育 / フレキシブルエレクトロニクス / 電子線照射 / 大面積プラスティック表面処理 / 表面改質 / picture of survey route / educational use / 大面積プラズマ / 大規模ラインプラズマ / 小型可搬放射線測定器 / 排気効率 / chromium - nickel / wear / 大面積プラズマプロセス / NaI (T1) scintillation detector / 計測制御教材 / ガスノズル / 大規模マイクロ波プラズマ / 弾性散乱電子 / 自然放射線量の環境依存 / 排気経路 / 太陽電池薄膜CVD / carborne survey / 摩耗 / equivalent dose rate / surface treatment / フラットパネルディスプレー Less

相転移酸化物薄膜の面直方向スイッチングに基づく低電圧発振素子に関する研究Principal InvestigatorOngoing
- Principal Investigator
  
  沖村邦雄
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied materials
- Research Institution
  Tokai University
Study on crystalline growth of phase transition oxides with various oxidation states and their electric transport characteristicsPrincipal Investigator
- Principal Investigator
  
  OKIMURA Kunio
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Tokai University
Research on Large-Scaled Line Plasma Production by Microwave
- Principal Investigator
  
  SHINDO Haruo
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Tokai University
Study on crystalline growth of phase transition oxide and electric field-induced switching phenomenaPrincipal Investigator
- Principal Investigator
  
  OKIMURA Kunio
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Tokai University
Crystal with Metal-Insulator Transition by Plasma Processing Technique and Its Application to Switching DevicesPrincipal Investigator
- Principal Investigator
  
  OKIMURA Kunio
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Tokai University
Study on the Epitaxial Growth of Oxide Films in Sputtering focusing on Negative Oxygen Ion BehaviorPrincipal Investigator
- Principal Investigator
  
  OKIMURA Kunio
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Tokai University
Development of Supertough Ceramic or Cermet Thick Coatings Available in Various Surroundings
- Principal Investigator
  
  YASUMARU Naoki
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  Material processing/treatments
- Research Institution
  Fukui National College of Technology
Duplex Surface Treatment due to Combined Plasma Nitriding and Ceramic or Cermet Thick Coatings of Cr-Ni-N System
- Principal Investigator
  
  YASUMARU Naoki
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  Fukui National College of Technology
Educational Apparatus to Collect the Data of Environmental Ionizing Radiations with the Landscape-Image of Survey Route
- Principal Investigator
  
  MAEDA Nobuhiro
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  広領域
- Research Institution
  Fukui National College of Technology
ガス導入真空容器内のガス密度分布の測定と効率的排気法の研究
- Principal Investigator
  
  MAEDA Nobuhiro
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  広領域
- Research Institution
  Fukui National College of Technology
He希釈RFスパッタによるルチル型TiO_2結晶の低温成長とその機構解明Principal Investigator
- Principal Investigator
  
  沖村邦雄
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Fukui National College of Technology
Duplex Surface Treatment due to Combined ECR Plasma Nitriding and Ceramic Coatings
- Principal Investigator
  
  YASUMARU Naoki
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Material processing/treatments
- Research Institution
  Fukui National College of Technology
プラズマ中蒸発Ti原子のポストイオン化によるTiO_2ルチル作成の試みPrincipal Investigator
- Principal Investigator
  
  沖村邦雄
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Fukui National College of Technology

All 2017 2016 2015 2014 2013 2012 2011 2010 2009 2008 2007 2006 2005 2004

All Journal Article Presentation

[Journal Article] Anisotropic Babinet-Invertible Metasurfaces to Realize Transmission-Reflection Switching for Orthogonal Polarizations of Light2017
- Author(s)
  Y. Nakata, Y. Urade, K. Okimura, T. Nakanishi, F. Miyamaru, M. Wada Takeda, and M. Kitano
- Journal Title
  
  Physical Review Applied
  
  Volume : 6 Pages : 044022-044022
- DOI
  10.1103/PhysRevApplied.6.044022
- Peer Reviewed / Open Access / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K04652, KAKENHI-PROJECT-15J07603, KAKENHI-PROJECT-16K13699
[Journal Article] Dynamically Babinet-invertible metasurface: A capacitive-inductive reconfigurable filter for terahertz waves using vanadium-dioxide metal-insulator transition2016
- Author(s)
  Yoshiro Urade, Yosuke Nakata, Kunio Okimura, Toshihiro Nakanishi, Fumiaki Miyamaru, Mitsuo Wada Takeda, and Masao Kitano
- Journal Title
  
  Optics Express
  
  Volume : 24 Pages : 4405-4410
- DOI
  10.1364/OE.24.004405
- Peer Reviewed / Open Access / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15J07603, KAKENHI-PROJECT-25790065, KAKENHI-PROJECT-15K04652, KAKENHI-PROJECT-16K13699
[Journal Article] Oriented Growth of VO2(B) Thin Films on Mo Foils by Reactive Sputtering for Lithium Ion Batteries2016
- Author(s)
  Kui Su, Takuya Naka, Nurul Hanis Azhan, Kunio Okimura, and Masashi Higuchi
- Journal Title
  
  Thin Solid Films
  
  Volume : ６１６ Pages : 95-100
- DOI
  10.1016/j.tsf.2016.07.056
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04652
[Journal Article] Large modification in insulator-metal transition of VO2 films grown on Al2O3 (001) by high energy ion irradiation in biased reactive sputtering2016
- Author(s)
  Nurul Hanis Azhan, Kunio Okimura, Yoshiyuki Ohtsubo, Shin-ichi Kimura, Mustapha Zaghrioui, and Joe Sakai
- Journal Title
  
  Journal of Applies Physics
  
  Volume : 119
- DOI
  10.1063/1.4941348
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04652, KAKENHI-PROJECT-26887024, KAKENHI-PROJECT-15H03676
[Journal Article] Self-oscillation up to 9 MHz based on voltage triggered switching in VO2/TiN point contact junctions2015
- Author(s)
  Md. Suruz Mian, Kunio Okimura, Joe Sakai
- Journal Title
  
  Journal of Applied Physics
  
  Volume : 117
- DOI
  10.1063/1.4922122
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04652
[Journal Article] Radio frequency substrate biasing effects on the insulator-metal transition behavior of reactively sputtered VO2 films on sapphire (001)2015
- Author(s)
  Nurul Hanis Azhan, Ku Sui, Kunio Okimura, and Joe Sakai
- Journal Title
  
  Journal of Applied Physics
  
  Volume : 117
- DOI
  10.1063/1.4921105
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04652
[Journal Article] Effects of energetic substrate-incident ions on the growth of crystalline vanadium dioxide films in inductively coupled plasma-assisted sputtering2014
- Author(s)
  Md. Suruz Mian and Kunio Okimura
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume : vol.53, No.3 Pages : 35802-35802
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Temperature - dependent Raman and UPS studies on phase transition behavior of VO_2 films with M1 and M2 phases2014
- Author(s)
  Kunio Okimura, Nurul Hanis Azhan, Tetsuya Hajiri, Shin-ichi Kimura, Mustapha Zaghrioui and Joe Sakai
- Journal Title
  
  J. Appl. Phys.
  
  Volume : vol.115 Pages : 153501-153501
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Temperature - dependent Raman and ultraviolet photoelectron spectroscopy studies on phase transition behavior of VO2 films with M1 and M2 phases2014
- Author(s)
  K. Okimura, N. H. Azhan, T. Hajiri, S. Kimura, M. Zaghrioui, J. Sakai
- Journal Title
  
  Journal of Applied Physics
  
  Volume : 115 Pages : 153501-153501
- DOI
  10.1063/1.4870868
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J02477, KAKENHI-PROJECT-23560013
[Journal Article] Effects of energetic substrate-incident ions on the growth of crystalline vanadium dioxidefilms in inductively coupled plasma-assisted sputtering2014
- Author(s)
  Md. Suruz Mian and Kunio Okimura
- Journal Title
  
  Japanese. Journal of Applied Physics
  
  Volume : 53
- DOI
  10.7567/JJAP.53.035802
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Pulsed laser-deposited VO_2 thin films on Pt layers2013
- Author(s)
  Joe Sakai, Mustapha Zaghrioui, Vinh Ta Phuoc, Sylvain Roger, Cecile Autret-Lambert, and Kunio Okimura
- Journal Title
  
  J. Appl. Phys.
  
  Volume : vol.113 Pages : 123503-123503
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Phase selective growth and characterization of vanadium dioxide films on silicon substrates2013
- Author(s)
  Tomo Watanabe, Kunio Okimura, Shin-ichi Kimura, Tetsuya Hajiri and Joe Sakai
- Journal Title
  
  J. Appl. Phys.
  
  Volume : vol.113 Pages : 163503-163503
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Pulsed laser-deposited VO2 thin films on Pt layers2013
- Author(s)
  Joe Sakai,Mustapha Zaghrioui, Vinh Ta Phuoc, Sylvain Roger, C_ecile Autret-Lambert, and Kunio Okimura
- Journal Title
  
  Journal of Applied Physics
  
  Volume : 113
- DOI
  10.1063/1.4795813
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Phase Selective Growth and Characterization of Vanadium Dioxide Films on Silicon Substrates2013
- Author(s)
  Tomo Watanabe, Kunio Okimura, Tetsuya Hajiri, Shin-ichi Kimura, and Joe Sakai
- Journal Title
  
  Journal of Applied Physics
  
  Volume : 113
- DOI
  10.1063/1.4802652
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Stress-induced VO2 films with M2 monoclinic phase stable at room temperature grown by inductively coupled plasma-assisted reactive sputtering2012
- Author(s)
  Kunio Okimura, Tomo Watanabe, and Joe Sakai
- Journal Title
  
  Journal of Applied Physics
  
  Volume : 111
- DOI
  10.1063/1.3700210
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Stress-induced VO_2 films with M2 monoclinic phase stable at room temperature grown by inductively coupled plasma-assisted reactive sputtering2012
- Author(s)
  Kunio Okimura, Tomo Watanabe, and Joe Sakai
- Journal Title
  
  J. Appl. Phys.
  
  Volume : vol.111 Pages : 73514-73514
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Low-temperature oriented growth of vanadium dioxide films on CoCrTa metal template on Si and vertical metal-insulator transition2012
- Author(s)
  Kunio Okimura, and Md.Suruz Mian
- Journal Title
  
  J. Vac. Sci. Technol.
  
  Volume : A 30 Pages : 51502-51502
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Low-temperature oriented growth of vanadium dioxide films on CoCrTa metal template on Si and vertical metal-insulator transition2012
- Author(s)
  Kunio Okimura, and Md.Suruz Mian
- Journal Title
  
  Journal of Vacuum Science and Technology A
  
  Volume : 30
- DOI
  10.1116/1.4733995
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Epitaxial Growth of V2O3 Thin Films on c-Al2O3 in Reactive Sputtering and Its Transformation to VO2 Films by Post-annealing2011
- Author(s)
  K.Okimura and Y.Suzuki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume : 50
- DOI
  10.1143/JJAP.50.065803
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] 反応性スパッタ法による相転移V_2O_3薄膜のサファイア基板上へのエピタキシャル成長2011
- Author(s)
  沖村邦雄, 鈴木康史
- Journal Title
  
  Journal of Vacuum Society of Japan
  
  Volume : 54(印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] 反応性スパッタ法による相転移V_2O_3薄膜のサファイア基板上へのエピタキシャル成長2011
- Author(s)
  沖村邦雄,鈴木康史
- Journal Title
  
  Journal of the Vacuum Society of Japan (真空)
  
  Volume : Vol.54, No3 Pages : 169-172
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Epitaxial Growth of V_2O_3 Thin Films on c-Al_2O_3 in Reactive Sputtering and Its Transformation to VO_2 Films by Post-annealing2011
- Author(s)
  Kunio Okimura and Yasushi Suzuki
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume : Vol.50, No.6 Pages : 65803-65803
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] Photo-induced lattice softening of excited-state VO_22011
- Author(s)
  Masaki Hada, Kunio Okimura and Jiro Matsuo
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume : 99 Pages : 51903-51903
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560013
[Journal Article] In-situ X-ray diffraction studies on epitaxial VO_2 films grown on c-Al_2O_3 during thermally induced insulator-metal transition2010
- Author(s)
  K.Okimura, J.Sakai, S.Ramanatha
- Journal Title
  
  J.Appl.Phys. Vol.107
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Characterization of structural dynamics of VO2 thin film on c-Al2O3 using in-air time-resolved X-ray diffraction2010
- Author(s)
  M.Hada, K.Okimura, J.Matsuo
- Journal Title
  
  Phy.Rev.B 82
  
  Pages : 153401-153401
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Characterization of structural dynamics of VO_2 thin film on c-Al_2O_3 using in-air time-resolved X-ray diffraction2010
- Author(s)
  M.Hada, K.Okimura, J.Matsuo
- Journal Title
  
  Physical Review B
  
  Volume : 82
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] In-situ X-ray diffraction studies on epitaxial VO_2 films grown on c-Al_2O_3 during thermally induced insulator-metal transition2010
- Author(s)
  K.Okimura, J.Sakai, S.Ramanathan
- Journal Title
  
  Journal of Applied Physics
  
  Volume : 107
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Effect of Light Irradiation on Electric Field Induced Resistance Switching Phenomenon in Planer VO_2/c-Al_2O_3 Structure2009
- Author(s)
  Nurul Ezreena Mohamad, K.Okimura, J.Sakai
- Journal Title
  
  International Journal of Nanoscience Nos.1 & 2
  
  Pages : 147-150
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Changes in Lattice Parameters of VO_2 Films Grown on c-Al_2O_3 Substrate across Metal-Insulator Transition2009
- Author(s)
  K.Okimura, J.Sakai
- Journal Title
  
  Jpn.J.Appl.Phys. Vol.48, No.4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] サファイア基板上VO_2薄膜の結晶構造転移の温度依存性2009
- Author(s)
  小池秀明,野中利倫,沖村邦雄
- Journal Title
  
  真空 Vol.52, No3
  
  Pages : 167-1970
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Effect of annealing with Ar plasma irradiation for transparent conductive Nb-doped TiO_2 films on glass substrate2009
- Author(s)
  M.Hojo, K.Okimura
- Journal Title
  
  Jpn.J.Appl.Phys. Vol.48, Special Issue
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Electric Field-Induced Multi-Step Resistance Switching Phenomena in a Planer VO_2/c-Al_2O_3 Structure2009
- Author(s)
  K.Okimura, Nurul Ezreena, Y.Sasakawa, J.Sakai
- Journal Title
  
  Jpn.J.Appl.Phys. Vol.48, No.6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Effect of annealing with Ar plasma irradiation for transparent conductive Nb-doped TiO_2 films on glass substrate2009
- Author(s)
  M.Hojo, K.Okimura
- Journal Title
  
  Japanese Journal of Applied Physics Vol.48
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Electric Field-Induced Multi-Step Resistance Switching Phenomena in a Planer VO_2/c-Al_2O_3 Structure2009
- Author(s)
  K.Okimura, Nurul Ezreena, Y.Sasakawa, J.Sakai
- Journal Title
  
  Japanese Journal of Applied Physics Vol.48
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Changes in Lattice Parameters of VO_2 Films Grown on c-Al_2O_3 Sub-strate across Metal-Insulator Transition2009
- Author(s)
  K.Okimura, J.Sakai
- Journal Title
  
  Japanese Journal of Applied Physics Vol.48
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] サファイア基板上VO_2薄膜の結晶構造転移の温度依存性2009
- Author(s)
  小池秀明, 野中利倫, 沖村邦雄
- Journal Title
  
  Journal of the Vacuum Society of Japan 第52巻3号
  
  Pages : 167-170
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Advantages of Inductively Coupled Plasma -Assisted Sputtering for Preparation of Stoichiometric V0_2 films with Metal-Insulator Transition2008
- Author(s)
  Yusuke, Nihei, Yusuke, Sasakawa, Kunio, Okimura
- Journal Title
  
  Thin Solid Films Vol. 516
  
  Pages : 3572-3576
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Advantages of Inductively Coupled Plasma-Assisted Sputtering for Preparation of Ctoichiometric VO_2 films with Metal-Insulator Transition2008
- Author(s)
  Yusuke Nihei, Yusuke Sasakawa and Kunio Okimura
- Journal Title
  
  Thin Solid Films Vol.516
  
  Pages : 3572-3576
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Advantages of Inductively Coupled Plasma -Assisted Sputtering for Preparation of Stoichiometric VO_2 films with Metal-Insulator Transition2008
- Author(s)
  Y.Nihei, Y.Sasakawa, K.Okimura
- Journal Title
  
  Thin Solid Films Vol.516
  
  Pages : 3572-3576
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Effect of annealing with Ar plasma irradiation for transparent conductive Nb-doped TiO_2 films on glass substrate2008
- Author(s)
  Mika Hojo, Kunio Okimura
- Journal Title
  
  Proceedings of International Symposium on Dry Process 2008
  
  Pages : 195-196
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Advantages of Inductively Coupled Plasma -Assisted Sputtering for Preparation of Stoichiometric VO_2 films with Metal-Insulator Transition2008
- Author(s)
  Y. Nihei, Y. Sasakawa, K. Okimura
- Journal Title
  
  Thin Solid Films Vol. 516
  
  Pages : 3572-3576
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560016
[Journal Article] Advantages of Inductively Coupled Plasma -Assisted Sputtering for Preparation of Stoichiometric VO_2 films with Metal Insulator Transition2008
- Author(s)
  Y.Nihei, Y.Sasakawa and K.Okimura
- Journal Title
  
  Thin Solid Films (On-line)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Time-dependent Characteristics of Electric Field-Induced Metal-Insulator Transition of Planer VO_2 /Al_2O_3 Structure2007
- Author(s)
  Kunio, Okimura, J, Sakai
- Journal Title
  
  Japanese Journal of Applied Physics Vol. 46, No. 34
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Time-dependent Characteristics of Electric Field-Induced Metal-Insulator Transition of Planer VO_2/Al_2O_3 Structure2007
- Author(s)
  Kunio Okimura and J Sakai
- Journal Title
  
  Japanese Journal of Applied Physics Vol.46,No.34
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Electric Field Induced Metal-Insulator Transition of Vanadium Dioxide Films on Sapphire Substrate Prepared by Inductively Coupled Plasma-Assisted Sputtering2007
- Author(s)
  Kunio Okimura, Yusuke Nihei and Yusuke Sasakawa
- Journal Title
  
  Solid State Phenomena Vols.123-126
  
  Pages : 703-706
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Growth of VO_2 films wtih metal-insulator transition on silicon substrates in inductively coupled plasma-assisted sputtering2007
- Author(s)
  Kunio Okimura and N.Kubo
- Journal Title
  
  Thin Solid Films Vol.515
  
  Pages : 4992-4995
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Electric Field Induced Metal-Insulator Transition of Vanadium Dioxide Films on Sapphire Substrate Prepared by Inductively Coupled Plasma-Assisted Sputtering2007
- Author(s)
  K.Okimura, Y.Nihei, Y.sasakawa
- Journal Title
  
  Solid State Phenomena Vols.124-126
  
  Pages : 703-706
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Growth of V0_2 films with metal-insulator transition on silicon substrates in inductively coupled plasma -assisted sputtering2007
- Author(s)
  Kunio, Okimura, N., Kubo
- Journal Title
  
  Thin Solid Films Vol. 515
  
  Pages : 4992-4995
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Growth of VO_2 films with metal-insulator transition on silicon substrates in inductively coupled plasma-assisted sputtering2007
- Author(s)
  K.Okimura, N.Kubo
- Journal Title
  
  Thin Solid Films Vol.515
  
  Pages : 4992-4995
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Electric Field Induced Metal-Insulator Transition of Vanadium Dioxide Films on Sapphire Substrate Prepared by Inductively Coupled Plasma-Assisted Sputtering2007
- Author(s)
  Kunio, Okimura, Yusuke, Nihei, Yusuke, Sasakawa
- Journal Title
  
  Solid State Phenomena Vol. 124-126
  
  Pages : 703-706
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Time-dependent Characteristics of Electric Field-Induced Metal-Insulator Transition of Planer VO_2/Al_2O_3 Structure2007
- Author(s)
  K.Okimura and J.Sakai
- Journal Title
  
  Japanese Journal of Applied Physics Vol.46,No.34
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Highly Oriented Growth of Sb-doped SnO_2 Films on A1_2O_3 substrate in ICP-Assisted Reactive Sputtering2006
- Author(s)
  T.Sugimoto, K.Okimura
- Journal Title
  
  Proceedings of the 6^<th> International Conference on Reactive Plasmas and 23^<rd> Symposium on Plasma Processing
  
  Pages : 661-662
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] X-ray Diffraction Study of Electric Field-Induced Metal-Insulator Transition of Vanadium Dioxide Film on Sapphire Substrate2006
- Author(s)
  Kunio Okimura, Yusuke Sasakawa and Yusuke Nihei
- Journal Title
  
  Japanese Jouranl of Applied Physics Vol.45,No.12
  
  Pages : 9200-9202
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] X-ray Diffraction Study of Electric Field-Induced Metal-Insulator Transition of Vanadium Dioxide Film on Sapphire Substrate2006
- Author(s)
  Kunio, Okimura, Yusuke, Sasakawa, Yusuke, Nihei
- Journal Title
  
  Japanese Journal of Applied Physics Vol. 45, No. 12
  
  Pages : 9200-9202
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] X-ray Diffraction Study of Electric Field-Induced Metal-Insulator Transition of Vanadium Dioxide Film on Sapphire Substrate2006
- Author(s)
  K.Okimura, Y.Sasakawa, Y.Nihei
- Journal Title
  
  Japanese Journal of Applied Physics Vol.45
  
  Pages : 9200-9202
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Advantages of Inductively Coupled Plasma-Assisted Sputtering for Preparation of Stoichiometric VO_2 Films with Metal-Insulator Transition2006
- Author(s)
  Y.Nihei, Y.Sasakawa, K.Okimura
- Journal Title
  
  Proceedings of 6^<th> International Symposium on Dry Process
  
  Pages : 117-118
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Epitaxial Growth of Conductive Anatase TiO_2 : Nb Films on SrTiO_3 Substrate by Reactive Sputtering2006
- Author(s)
  J.Takayama, K.Okimura
- Journal Title
  
  Proceedings of 6^<th> International Symposium on Dry Process
  
  Pages : 269-270
- Data Source
  KAKENHI-PROJECT-18540495
[Journal Article] Selective Growth of Rutile and Anatase TiO_2 Films on MgO substrate Using TiN Buffer Layer in Reactive Sputtering2006
- Author(s)
  J.Takayama, K.Okimura
- Journal Title
  
  Proceedings of the 6^<th> International Conference on Reactive Plasmas and 23^<rd> Symposium on Plasma Processing
  
  Pages : 659-660
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] Growth of VO_2 Films with Metal Insulator Transition on Silicon Substrates by Inductively Coupled Plasma Assisted Sputtering2005
- Author(s)
  K.Okimura, N.Kubo
- Journal Title
  
  Proceedings of 27th International Symposium on Dry Process
  
  Pages : 317-318
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] Performance of Ihductively Coupled Plasma Source with an External Coil for Sputtering of Titanium Oxide2005
- Author(s)
  K.Okamura, K.Okimura
- Journal Title
  
  Proceedings of Plasma Science Symposium 2005/The 22^<th> Symposium on Plasma Processing
  
  Pages : 387-388
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] Preparation of VO_2 Films with Metal-Insulator Transition on Sapphire and Silicon Substrates by Inductively Coupled Plasma -Assisted Sputtering2005
- Author(s)
  K.Okimura, N.Kubo
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44, No.36
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] In-Plane Orientation and Annealing Behavior of Rutile TiO_2 Films on MgO Substrate Prepared by Inductively Coupled Plasma-Assisted Sputtering2005
- Author(s)
  K.Okimura, T.Furumi
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44, No.5A
  
  Pages : 3192-3195
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] In-Plane Orientation and Annealing Behavior of Rutile TiO2 Films on MgO Substrate Prepared by Inductively Coupled Plasma-Assisted Sputterin2005
- Author(s)
  K.Okimura, T.Furumi
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44,No.5A(accepted for publication)
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] In-Plane Orientation of Epitaxially Grown Rutile TiO2 Films on MgO Substrate in ICP-Assisted Reactive Sputtering2005
- Author(s)
  T.Furumi, K.Okimura
- Journal Title
  
  Proceeding of Plasma Science Symposium 2005/The 22^<th> Symposium on Plasma Processing
  
  Pages : 383-384
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] Preparation of VO_2 Films with Metal-Insulator on Sapphire and Silicon Substrates by Inductively Coupled Plasma-Assisted Sputtering2005
- Author(s)
  Kunio Okimura
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44,No.36
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] In-Plane Orientation and Annealing Behavior of Rutile TiO_2 Films on MgO Substrate Prepared by Inductively Coupled Plasma-Assisted Sputtering2005
- Author(s)
  Kunio Okimura
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44,No.5A
  
  Pages : 3192-3195
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] Growth of VO_2 Films with Metal-Insulator Transition on Silicon Substrates by Inducitvely Coupled Plasma-Assisted Sputtering2005
- Author(s)
  Kunio Okimura
- Journal Title
  
  Proceedings of 27^th International Symposium on Dry Process
  
  Pages : 317-318
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] Growth of VO_2 Films with Metal-Insulator Transition on Silicon Substrates by Inductively Coupled Plasma-Assisted Sputtering2005
- Author(s)
  Kunio Okimura
- Journal Title
  
  Proceedings of 27^<th> International Symposium on Dry Process
  
  Pages : 317-318
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] Preparation of VO_2 Films with Metal-Insulator Transition on Sapphire and Silicon Substrates by Inductively Coupled Plasma-Assisted Sputtering2005
- Author(s)
  Kunio Okimura
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44, No.36
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] In-Plane Orientation and Annealing Behavior of Rutile TiO_2 Films on MgO Substrate Prepared by Inductively Coupled Plasma-Assisted Sputtering2005
- Author(s)
  Kunio Okimura
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44, No.5A
  
  Pages : 3192-3195
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] Epitaxial Growth of Rutile TiO2 Films on MgO Substrate in Inductively Coupled Plasma -Assisted Sputtering2004
- Author(s)
  K.Okimura, T.Furumi
- Journal Title
  
  Japanese Journal of Applied Physics Vol.43,No.5B
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] Epitaxial Growth of Rutile TiO_2 Films on MgO Substrate in Inductively Coupled Plasma-Assisted Sputtering2004
- Author(s)
  Kunio Okimura
- Journal Title
  
  Japanese Journal of Applied Physics Vol.43, No.5B
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16540454
[Journal Article] Epitaxial Growth of TiO_2 Films on MgO Substrate in Inductively Coupled Plasma-Assisted Sputtering2004
- Author(s)
  Kunio Okimura
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44,No.5B
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16540454
[Presentation] VO2/TiN/Ti/Si積層構造デバイスにおけるマルチステップ発振2017
- Author(s)
  青戸智寛，佐藤賢太，モハメッドシュルズミヤ，沖村邦雄
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコヨコハマ
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K04652
[Presentation] 導電性TiN層上への相転移VO2薄膜の配向成長と転移特性評価2016
- Author(s)
  青戸智寛, 田邊祐大, 中村拓也, 佐藤賢太, モハメッドシュルズミヤ，沖村邦雄
- Organizer
  第36回表面科学学術講演会・第57回真空に関する連合講演会(真空・表面合同講演会2016)
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2016-11-29
- Data Source
  KAKENHI-PROJECT-15K04652
[Presentation] Characteristic μm-sized VO2 domains grown on Al2O3 (001) deposited under particular substrate biasing conditions2016
- Author(s)
  Nurul Hanis Azhan, Kunio Okimura, Mustapha Zaghrioui, and Joe Sakai
- Organizer
  The 18th International Conference on Crystal Growth and Epitaxy (ICCGE18)
- Place of Presentation
  Nagoya International Convention Center
- Year and Date
  2016-08-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04652
[Presentation] Low temperature growth of VO2 films on ZnO/glass and their transition properties2016
- Author(s)
  K. Sato, H. Hoshino, Md. Suruz Mian, and K. Okimura
- Organizer
  The 26th Annual meeting of MRS-J International Symposium: Advanced Functional Oxide Materials
- Place of Presentation
  Yokohama Port Opening Plaza
- Year and Date
  2016-12-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04652
[Presentation] 導電性ITO層上に成長したM2相VO2薄膜のIMT特性及び自励発振特性2016
- Author(s)
  モハメッドシュルズミヤ，佐藤賢太，按田祐輔，椎名庸介，沖村邦雄，坂井　穣
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K04652
[Presentation] ZnO/glass上への反応性スパッタ法によるVO2薄膜の低温成長と特性評価2016
- Author(s)
  佐藤賢太，星野寛明，モハメッドシュルズミヤ，沖村邦雄
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ・新潟
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K04652
[Presentation] VO2/Ti/Si点接触積層型デバイスにおける自励発振現象のパラメータ依存性2015
- Author(s)
  モハメッドシュルズミヤ，沖村邦雄，坂井　穣
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-14
- Data Source
  KAKENHI-PROJECT-15K04652
[Presentation] High frequency self-oscillations in VO2 based out-of-plane device structure2015
- Author(s)
  Md. Suruz Mian, Kunio Okimura, Joe Sakai
- Organizer
  The 13th International Symposium on Sputtering & Plasma Processes (ISSP 2015)
- Place of Presentation
  Kyoto Research Park
- Year and Date
  2015-07-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04652
[Presentation] Voltage induced electrical oscillation in VO2-based layered structure device2015
- Author(s)
  Md. Suruz Mian, Kunio Okimura and Joe Sakai
- Organizer
  14th International Union of Materials Research Societies – International Conference on Advanced Materials (IUMRS-ICAM)
- Place of Presentation
  Jeju International Convention Center, Korea
- Year and Date
  2015-10-25
- Data Source
  KAKENHI-PROJECT-15K04652
[Presentation] 反応性スパッタ法によるVO_2(B)薄膜の成長とアニールによるVO_2(M1)への変換2014
- Author(s)
  ヌルーハニスアズハン,沖村邦雄
- Organizer
  第61回応用物理学会春季学術講演会予稿集
- Place of Presentation
  青山学院大学(19a-E8-8)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] TiNバッファー層によるVO_2薄膜の結晶成長及び転移特性の改善2014
- Author(s)
  モハメッドシュルズミヤ,沖村邦雄
- Organizer
  第61回応用物理学会春季学術講演会予稿集
- Place of Presentation
  青山学院大学(18a-E8-6)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] 反応性スパッタ法によるVO2(B)薄膜の成長とアニールによるVO2(M1)への変態2014
- Author(s)
  ヌルーハニスアズハン, 蘇　魁, 沖村邦雄
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] TiN導電バッファー層によるVO2薄膜の結晶成長及び転移特性の改善2014
- Author(s)
  モハメッドシュルズミヤ, 沖村邦雄
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ガラス基板上M2相VO_2薄膜の結晶構造変態と金属-絶縁体転移特性2013
- Author(s)
  沖村邦雄,渡部智,坂井穣
- Organizer
  第60回応用物理学関係連合講演会
- Place of Presentation
  神奈川工大(29p-F2-18)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Electrical Properties of VO_2 Thin Films and Post-annealing Effects on the Growth of Non-stoichiometric VOx2013
- Author(s)
  Nurul Hanis Azhan and Kunio Okimura
- Organizer
  MJIIT-JUC Joint Symposium 2013 (MJJS 2013)
- Place of Presentation
  Tokai University, Hiratsuka, Japan(Proceedings ES-2-2)
- Year and Date
  2013-11-06
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ICP支援スパッタ法における基板入射イオンエネルギー分析とVO_2薄膜の低温成長に関する研究2013
- Author(s)
  モハメッドシュルズミヤ,ヌルーハニスアズハン,沖村邦雄
- Organizer
  第74回応用物理学会学術講演会予稿集
- Place of Presentation
  同志社大学(16p-D3-3)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] スパッタ法により堆積したVO_2薄膜の電気的特性とポストアニールによる伝導型反転2013
- Author(s)
  ヌルーハニスアズハン,沖村邦雄
- Organizer
  第74回応用物理学会学術講演会予稿集
- Place of Presentation
  同志社大学(16p-D3-5)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Insulator-metal Transition of VO_2 Films on Noble Metal Bottom Electrodes2013
- Author(s)
  J. Sakai, M. Zaghrioui, V. T. Phuoc, J. Wolfman, and K. Okimura
- Organizer
  2013JSAP-MRS Joint Symposium
- Place of Presentation
  同志社大学(19a-M6-8, JSAP-MRS-E-008)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Layered growth of vanadium dioxide films on Ti/Si by inductively coupled plasma assisted sputtering method and out-of-plane electrical switching characteristics2013
- Author(s)
  Md. Suruz Mian and Kunio Okimura
- Organizer
  Proceedings of. 12^<th> International Symposium on Sputtering and Plasma Proccess (ISSP 2013)
- Place of Presentation
  Kyoto
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Electrical Properties of Post-annealed VO_2 Thin Films on Silicon Substrates with Metal-Insulator Transition2013
- Author(s)
  Nurul Hanis Azhan and Kunio Okimura
- Organizer
  Proceedings of. 12^<th> International Symposium on Sputtering and Plasma Proccess (ISSP 2013)
- Place of Presentation
  Kyoto
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ICP支援スパッタ法によるTi/Si(100)上へのVO_2薄膜の低温成長と積層方向スイッチング2013
- Author(s)
  モハメッドシュルズミヤ,沖村邦雄
- Organizer
  第60回応用物理学関係連合講演会
- Place of Presentation
  神奈川工大(29p-F2-19)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] スパッタ法により堆積したVO2薄膜の電気的特性とポストアニールによる伝導型反転2013
- Author(s)
  ヌルーハニスアズハン,沖村邦雄
- Organizer
  第74回応用物理学会学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Electrical Properties of VO2 Thin Films and Post-annealing Effects on the Growth of Non-stoichiometric VOx2013
- Author(s)
  Nurul Hanis Azhan and Kunio Okimura
- Organizer
  MJIIT-JUC Joint Symposium 2013 (MJJS 2013)
- Place of Presentation
  東海大学
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Electrical Properties of Post-annealed VO2 Thin Films on Silicon Substrates with Metal-Insulator Transition2013
- Author(s)
  Nurul Hanis Azhan and Kunio Okimura
- Organizer
  12th International Symposium on Sputtering and Plasma Proccess (ISSP 2013)
- Place of Presentation
  Kyoto Research Park
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ICP支援スパッタ法における基板入射イオンエネルギー分析とVO2薄膜の低温成長に関する研究2013
- Author(s)
  モハメッドシュルズミヤ，ヌルーハニスアズハン,沖村邦雄
- Organizer
  第74回応用物理学会学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Layered growth of vanadium dioxide films on Ti/Si by inductively coupled plasma assisted sputtering method and out-of-plane electrical switching characteristics2013
- Author(s)
  Md. Suruz Mian and Kunio Okimura
- Organizer
  12th International Symposium on Sputtering and Plasma Proccess (ISSP 2013)
- Place of Presentation
  Kyoto Research Park
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ガラス基板上M2相VO2薄膜の結晶構造変態と金属‐絶縁体転移特性2013
- Author(s)
  沖村邦雄，渡辺　智，坂井　穣
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ICP支援スパッタ法によるTi/Si(100)上へのVO2薄膜の低温成長と積層方向スイッチング2013
- Author(s)
  モハメッド　シュルズ　ミヤ，沖村邦雄
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ICP支援スパッタ法におけるストレス誘起M2相VO_2薄膜の成長とその特性2012
- Author(s)
  渡部智,沖村邦雄,坂井穣
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学(17p-F6-13)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ICP支援スパッタ法による金属膜上へのVO_2薄膜の成長と積層方向スイッチング特性2012
- Author(s)
  モハメッドシュルズミヤ,沖村邦雄
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学(17p-F6-12)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] 反応性スパッタ法によるマグネリ相を含む低酸化度バナジウム酸化膜堆積2012
- Author(s)
  鈴木康史,沖村邦雄
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学(17p-F6-14)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] 反応性スパッタ法によるマグネリ相酸化バナジウム薄膜の堆積と相転移特性2012
- Author(s)
  鈴木康史,沖村邦雄
- Organizer
  第53回真空に関する連合講演会予稿集
- Place of Presentation
  甲南大学ポートアイランドキャンパス(15P-16)
- Year and Date
  2012-11-15
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Electrical Properties of Vanadium Dioxide Thin Films on Silicon Substrate with Metal-Insulator Transition2012
- Author(s)
  Nurul Hanis Azhan and Kunio Okimura
- Organizer
  MJIIT-JUC Joint Symposium 2012 (MJJS 2012)
- Place of Presentation
  MJIIT, UTM, KL, Malaysia(Proceedings ESE-8)
- Year and Date
  2012-11-21
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ICP支援スパッタ法によるTi/Si(100)上へのVO_2薄膜の低温成長2012
- Author(s)
  モハメッドシュルズミヤ,沖村邦雄
- Organizer
  第73回応用物理学会学術講演会予稿集
- Place of Presentation
  愛媛大学・松山大学(12a-C13-5)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ストレス誘起M_2相VO_2薄膜の電子状態と相転移特性2012
- Author(s)
  渡部智,モハメッドシュルズミヤ,沖村邦雄,坂井穣
- Organizer
  第73回応用物理学会学術講演会予稿集
- Place of Presentation
  愛媛大学・松山大学(12a-C13-4)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Vanadium Dioxide Film Growth onn Titanium Metal Layer on Si (100) by Inductively Coupled Plasma Assisted Sputtering Method2012
- Author(s)
  Md. Suruz Mian and Kunio Okimura
- Organizer
  MJIIT-JUC Joint Symposium 2012 (MJJS 2012)
- Place of Presentation
  MJIIT, UTM, KL, Malaysia(Proceedings ESE-8)
- Year and Date
  2012-11-21
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Electrical Properties of Vanadium Dioxide Thin Films on Silicon Substrate with Metal-Insulator Transition2012
- Author(s)
  Nurul Hanis Azhan and Kunio Okimura
- Organizer
  MJIIT-JUC Joint Symposium 2012 (MJJS 2012)
- Place of Presentation
  Kuala Lumpur, Malaysia
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ストレス誘起M2相VO2薄膜の電子状態と相転移特性2012
- Author(s)
  渡部智，モハメッドシュルズミヤ，沖村邦雄，坂井穣
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ICP支援スパッタ法によるTi/Si(100)上へのVO2薄膜の低温成長2012
- Author(s)
  モハメッドシュルズミヤ，沖村邦雄
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Vanadium Dioxide Film Growth onn Titanium Metal Layer on Si (100) by Inductively Coupled Plasma Assisted Sputtering Method2012
- Author(s)
  Md. Suruz Mian and Kunio Okimura
- Organizer
  MJIIT-JUC Joint Symposium 2012 (MJJS 2012)
- Place of Presentation
  Kuala Lumpur, Malaysia
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] 反応性スパッタ法によるマグネリ相酸化バナジウム薄膜の堆積と相転移特性2012
- Author(s)
  鈴木康史，沖村邦雄
- Organizer
  第53回真空に関する連合講演会
- Place of Presentation
  甲南大学ポートアイランドキャンパス
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Effects of phase coexistence and stress on the metal-insulator transition of V_2O_3 films grown on c-plane sapphire in reactive sputtering2011
- Author(s)
  K.Okimura and Y. Suzuki
- Organizer
  11^<th> International Conference on Sputtering & Plasma Processes (ISSP2011) TF 1-5
- Place of Presentation
  Kyoto research Park
- Year and Date
  2011-07-08
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] ICP支援スパッタ法によるM_2相VO_2薄膜の成長と相転移特性2011
- Author(s)
  渡部智,モハメッドシュルズミヤ,沖村邦雄
- Organizer
  第72回応用物理学会学術講演会予稿集
- Place of Presentation
  山形大学(1a-ZK-1)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] サファイアc面基板上にスパッタ成膜したV_2O_3薄膜の相転移特性と膜中ストレスの影響2011
- Author(s)
  鈴木康史,沖村邦雄
- Organizer
  第72回応用物理学会学術講演会予稿集
- Place of Presentation
  山形大学(1a-ZK-3)
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Effects of phase coexistence and stress on the metal-insulator transition of V2O3 films grown on c-plane sapphire in reactive sputtering2011
- Author(s)
  K.Okimura and Y. Suzuki
- Organizer
  11th International Conference on Sputtering & Plasma Processes (ISSP2011)
- Place of Presentation
  Kyoto Research Park
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Growth of vanadium dioxide thin films with metal-insulator transition on CoCrTa/Si at low temperature2011
- Author(s)
  Md. Suruz Mian and Kunio Okimura
- Organizer
  15^<th> International Conference on Thin Films
- Place of Presentation
  KyotoTERSSA(P-S2-33)
- Year and Date
  2011-11-10
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] Growth of phase transition VO_2 films with M_2 phase in inductively coupled plasma assisted reactive sputtering2011
- Author(s)
  T. Watanabe, Md. Suruz Mian, K.Okimura and J. Sakai
- Organizer
  15^<th> International Conference on Thin Films
- Place of Presentation
  KyotoTERSSA(P-S2-44)
- Year and Date
  2011-11-10
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] c面サファイア基板上バナジウム酸化膜におけるマグネリ相を含む相共存モデル2011
- Author(s)
  鈴木康史,沖村邦雄
- Organizer
  第52回真空に関する連合講演会予稿集
- Place of Presentation
  学習院大学(17P-39)
- Year and Date
  2011-11-17
- Data Source
  KAKENHI-PROJECT-23560013
[Presentation] サファイア基板上に成長したバナジウム酸化膜の相転移特性に対するポストアニール効果2010
- Author(s)
  沖村邦雄
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] 反応性スパッタ法による相転移V2O3薄膜のサファイア基板上へのエピタキシャル成長2010
- Author(s)
  沖村邦雄,鈴木康史
- Organizer
  第51回真空に関する連合講演会(真空・表面科学合同講演会
- Place of Presentation
  大阪大学
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] サファイア基板上エピタキシャルV_2O_3薄膜成長とアニールによるVO_2への変態2010
- Author(s)
  沖村邦雄,鈴木亮太,鈴木康史
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] 反応性スパッタ法による金属-絶縁体相転移VO2薄膜の成長とその応用2010
- Author(s)
  沖村邦雄
- Organizer
  表面技術協会第121回講演大会
- Place of Presentation
  成蹊大学
- Year and Date
  2010-03-15
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] 時間分解X線回折法を用いたVO2薄膜の構造ダイナミクスの評価2010
- Author(s)
  羽田真毅,沖村邦雄,松尾二郎
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] サファイア基板上エピタキシャルV_2O_3薄膜成長とアニールによるVO_2への変態2010
- Author(s)
  沖村邦雄, 鈴木亮太, 鈴木康史
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] X-ray diffraction study on structures of vanadium dioxide films with metal-insulator transition2008
- Author(s)
  Kunio Okimura, Nurul Ezreena, Joe Sakai
- Organizer
  XXI Congress of the International Union of Crystallography
- Place of Presentation
  Osaka International Convention Center
- Year and Date
  2008-08-28
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] 反応性スパッタ法による酸化ビスマス薄膜の堆積と光記録膜への応用2008
- Author(s)
  小池秀明,上村隆久,村田吉正,沖村邦雄,後藤廣則
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] ICP支援スパッタ法により堆積したVO_2薄膜の電界誘起相転移(II)2008
- Author(s)
  ヌルルエズリナ,笹川裕介,沖村邦雄
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] Nurul Ezreena and Joe Sakai : X-ray diffraction study on structures of vanadium dioxide films with metal-insulator transition2008
- Author(s)
  沖村邦雄
- Organizer
  XXI Congress of the International Union of Crystallography
- Place of Presentation
  Osaka
- Year and Date
  2008-08-28
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] ガラス基板上NbドープTiO_2スパッタ薄膜へのICP高密度Arプラズマアニール処理の効果(II)2008
- Author(s)
  北条美加,沖村邦雄
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] PLD法及びスパッタ法により堆積した相転移VO_2薄膜の結晶格子長測定2008
- Author(s)
  小池秀明,沖村邦雄,坂井穣
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] ICP支援スパッタ法による相転移VO_2薄膜成長におけるバナジウムバッファ層の効果2008
- Author(s)
  野中利倫,沖村邦雄
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] サファイア基板上VO_2薄膜の結晶構造転移の温度依存性2008
- Author(s)
  小池秀明,野中利倫,沖村邦雄
- Organizer
  第49回真空に関する連合講演会
- Place of Presentation
  くにびきメッセ,松江
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] Effect of Light Irradiation on Electric Field Induced Resistance Switching Phenomenon in Planer VO_2/c-Al_2O_3 Structure2008
- Author(s)
  Nurul Ezreena Mohamad, Kunio Okimura, Joe Sakai
- Organizer
  The 2008 Asian Conference on Nanoscience and Nanotechnology (AsiaNANO 2008)
- Place of Presentation
  Singapore
- Year and Date
  2008-11-03
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] Effect of annealing with Ar plasma irradiation for transparent conductive Nb-doped TiO_2 films on glass substrate2008
- Author(s)
  Mika Hojo, Kunio Okimura
- Organizer
  International Symposium on Dry Process
- Place of Presentation
  Tokyo
- Year and Date
  2008-11-27
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] ガラス基板上NbドープTiO_2スパッタ薄膜へのICP高密度Arプラズマアニール処理の効果2008
- Author(s)
  北条美加,沖村邦雄
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] In-situ連続成膜ICP支援スパッタによる相転移VO_2薄膜堆積2008
- Author(s)
  野中利倫,二瓶祐輔,沖村邦雄
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学
- Data Source
  KAKENHI-PROJECT-20560016
[Presentation] Electric Field Induced Fast Switching Phenomena of Vanadium Dioxide (VO_2) on Sapphire Substrate2007
- Author(s)
  Nurul Ezreena Mohamad, Yusuke Sasakawa, Yusuke Nihei and Kunio Okimura
- Organizer
  Malaysia-Japan International Symposium On Advanced Technology 2007 (MJISAT)
- Place of Presentation
  Kuararunpul,Malaysia
- Year and Date
  2007-11-14
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18540495
[Presentation] Electric Field Induced Fast Switching Phenomena of Vanadium Dioxide(V0_2) on Sapphire Substrate2007
- Author(s)
  Ezreena, Mohamad, Yusuke Sasakawa, Yusuke Nihei, Kunio, Okimura
- Organizer
  Malaysia-Japan International Symposium On Advanced Technology 2007(MJISAT)
- Place of Presentation
  Kuararunpul, Malaysia
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540495
[Presentation] Electric Field Induced Fast Switching Phenomena of Vanadium Dioxide(VO_2) on Sapphire Substrate2007
- Author(s)
  Nurul Ezreena, Yusuke Sasakawa, Yusuke Nihei and Kunio Okimura
- Organizer
  Malaysia-Japan International Symposium On Advanced Technology 2007
- Place of Presentation
  Malaysia,Kuala Lumpur
- Year and Date
  2007-11-14
- Data Source
  KAKENHI-PROJECT-18540495
[Presentation] X-ray Diffraction Study on Electric field induced Metal-Insulator Transition of Vanadium Dioxide Films on Sapphire Substrate Prepared by Reactive Sputtering2006
- Author(s)
  Yusuke Sasakawa and Kunio Okimura
- Organizer
  Kyoto Conference on Solid State Chemistry, Transition Metal Oxides Past, Present and Future
- Place of Presentation
  Kyoto,Japan
- Year and Date
  2006-11-12
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18540495
[Presentation] Expitaxial Growth of Conductive Anatase TiO_2:Nb Films on SrTiO_3 Substrate by Reactive Sputtering2006
- Author(s)
  Jun Takayama and Kunio Okimura
- Organizer
  6th International Symposium on Dry Process
- Place of Presentation
  Nagoya,Japan
- Year and Date
  2006-11-30
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18540495
[Presentation] X-ray Diffraction Study on Electric field induced Metal-Insulator Transition of Vanadium Dioxide Films on Sapphire Substrate Prepared by Reactive Sputtering2006
- Author(s)
  Yusuke, Sasakawa, Kunio, Okimura
- Organizer
  Kyoto Conference on Solid State Chemistry, Transition Metal Oxides Past, Present and Future
- Place of Presentation
  Kyoto
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540495
[Presentation] Epitaxial Growth of Conductive Anatase TiO_2 : Nb Films on SrTiO_3 Substrate by Reactive Sputtering2006
- Author(s)
  Jun, Takayama, Kunio, Okimura
- Organizer
  6th International Symposium on Dry Process
- Place of Presentation
  Nagoya
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540495

1. SHINDO Haruo (20034407)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
2. YASUMARU Naoki (90158006)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
3. MAEDA Nobuhiro (40124028)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
4. IBE Toshio

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
5. IDEHARA Toshitaka (80020197)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
6. TANAKA Shigetoshi (20025240)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
7. ARAKAWA Masakazu (30232044)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
8. HIRAI Keiko (60132601)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
9. OHTA Yasuo (10042988)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
10. 佐藤匡 (10225964)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
11. TAKAGI Katuaki

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
12. 桜井充

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
13. Toshihiro Nakanishi

# of Collaborated Projects : 0results

# of Collaborated Products : 2results
14. 北野正雄

# of Collaborated Projects : 0results

# of Collaborated Products : 2results
15. 大坪嘉之

# of Collaborated Projects : 0results

# of Collaborated Products : 1results
16. 木村真一

# of Collaborated Projects : 0results

# of Collaborated Products : 1results

OKIMURA Kunio 沖村 邦雄

Research Projects

Research Products

Co-Researchers

相転移酸化物薄膜の面直方向スイッチングに基づく低電圧発振素子に関する研究Principal InvestigatorOngoing

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Study on crystalline growth of phase transition oxides with various oxidation states and their electric transport characteristicsPrincipal Investigator

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Research on Large-Scaled Line Plasma Production by Microwave

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Study on crystalline growth of phase transition oxide and electric field-induced switching phenomenaPrincipal Investigator

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Crystal with Metal-Insulator Transition by Plasma Processing Technique and Its Application to Switching DevicesPrincipal Investigator

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Study on the Epitaxial Growth of Oxide Films in Sputtering focusing on Negative Oxygen Ion BehaviorPrincipal Investigator

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Development of Supertough Ceramic or Cermet Thick Coatings Available in Various Surroundings

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Duplex Surface Treatment due to Combined Plasma Nitriding and Ceramic or Cermet Thick Coatings of Cr-Ni-N System

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Educational Apparatus to Collect the Data of Environmental Ionizing Radiations with the Landscape-Image of Survey Route

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ガス導入真空容器内のガス密度分布の測定と効率的排気法の研究

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He希釈RFスパッタによるルチル型TiO_2結晶の低温成長とその機構解明Principal Investigator

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Duplex Surface Treatment due to Combined ECR Plasma Nitriding and Ceramic Coatings

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プラズマ中蒸発Ti原子のポストイオン化によるTiO_2ルチル作成の試みPrincipal Investigator

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OKIMURA Kunio 沖村邦雄