Horiuchi Toshiyuki 堀内敏行

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HORIUCHI Toshiyuki 堀内敏行

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Researcher Number	00297582
Other IDs
Affiliation (Current)	2025: 東京電機大学, 工学部, 研究員
Affiliation (based on the past Project Information) *help	2018 – 2022: 東京電機大学, 工学部, 研究員 2014 – 2017: 東京電機大学, 工学部, 教授 2005 – 2006: 東京電機大学, 工学部, 教授 1999 – 2000: 東京電機大学, 工学部・精密機械工学科, 教授
Review Section/Research Field	Principal Investigator Nano/Microsystems / Basic Section 28050:Nano/micro-systems-related / Applied optics/Quantum optical engineering / Applied optics/Quantum optical engineering
Keywords	Principal Investigator リソグラフィ / 投影露光 / 光リソグラフィ / 大パターン / scan exposure / projection exposure / optical lithography / 円柱面露光 / マイクロ部品 / 放物面ミラー … More / 立体面 / 投影像 / 一方向照明 / コリメート照明 / マジックミラー / 放物面鏡 / ヘルスモニタ / 曲面リソグラフィ / 回転放物面ミラー / 立体面投影露光 / デフォーカス投影露光 / 断面形状制御 / レジスト / 2画面切り替え / デフォーカス制御 / レンズアレイ / マイクロレンズ / 側壁制御 / 厚膜レジスト / デフォーカス / レンチキュラーレンズ / マイクロレンズアレイ / inner-surface lithography / micro-coil / exposure on pipe surface / exposure on cylindrical surface / axially symmetrical specimen / 露光 / 側表面 / 回転エンコーダ / 内面露光 / マイクロコイル / 走査露光 / 円筒面露光 / 軸対称回転体 / dose uniformity / pattern stitching / gradation field stitching / field stitching / gradation stitching / 露光フィールド / 露光均一性 / パタン接続 / ぼかしフィールド接続 / フィールド接続 / ぼかし接続 / スキャン露光 / 電解エッチング / 偏心補正 / 円柱面へのリソグラフィ / 円柱面投影露光装置 / SUS304 / 金属管 / レーザ走査露光装置 / 同期走査投影露光装置 / マルチスリット管 / ステント / ウェットエッチング / ステンレス管 / レーザ走査露光 / 同期走査回転投影露光 Less

Research on lithography using projection exposure of stereophonic surfacePrincipal Investigator
- Principal Investigator
  
  Horiuchi Toshiyuki
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Tokyo Denki University
Research on fabrication technology of micro-lens arrays utilizing cross section profile control of thick resist patternsPrincipal Investigator
- Principal Investigator
  
  Horiuchi Toshiyuki
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nano/Microsystems
- Research Institution
  Tokyo Denki University
Research on technology for fabricating medical and biochemical micro-parts using optical lithography onto cylindrical surfaces of small-diameter pipesPrincipal Investigator
- Principal Investigator
  
  HORIUCHI Toshiyuki
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nano/Microsystems
- Research Institution
  Tokyo Denki University
Research on optical lithography for patterning on axially symmetrical specimensPrincipal Investigator
- Principal Investigator
  
  HORIUCHI Toshiyuki
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tokyo Denki University
Optical projection lithography using gradation stitching of the exposure fieldsPrincipal Investigator
- Principal Investigator
  
  HORIUCHI Toshiyuki
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tokyo Denki University

All 2023 2022 2021 2020 2019 2018 2017 2016 2015 2006 2005 Other

All Journal Article Presentation Patent

[Journal Article] Demonstration of stereophonic projection lithography using parabolic mirror optics and collimated illumination from one side2023
- Author(s)
  Horiuchi Toshiyuki、Iwasaki Jun-ya、Kobayashi Hiroshi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 62 Issue: SG Pages: SG1026-SG1026
- DOI
  10.35848/1347-4065/acbbd7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K05293
[Journal Article] Feasibility of stereophonic projection lithography applying a parabolic magic mirror system2022
- Author(s)
  Horiuchi Toshiyuki、Kobayashi Hiroshi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: SD Pages: SD1042-SD1042
- DOI
  10.35848/1347-4065/ac5e4c
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K05293
[Journal Article] Patterning-Area Expansion of Parabolic-Mirror Projection Optics for Lithography Using One-Sided and Collimated Illumination2022
- Author(s)
  Toshiyuki Horiuchi、Jun-ya Iwasaki、Hiroshi Kobayashi
- Journal Title
  
  IOSR Journal of Applied PHysics
  
  Volume: 14(5)Series-2 Pages: 12-20
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K05293
[Journal Article] Stereophonic projection lithography using parabolic mirrors2021
- Author(s)
  Horiuchi Toshiyuki、Kobayashi Hiroshi
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 11908 Pages: 2-2
- DOI
  10.1117/12.2597232
- Data Source
  KAKENHI-PROJECT-20K05293
[Journal Article] Two-layer resist process for printing thick patterns by exploiting a maskless projection exposure system using a liquid-crystal-display panel2020
- Author(s)
  Horiuchi Toshiyuki、Okiyama Hayato、Sato Ryuta、Kobayashi Hiroshi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 59 Issue: SI Pages: SIIA01-SIIA01
- DOI
  10.35848/1347-4065/ab7438
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05021
[Journal Article] Performances of Fine-Pitch Lenticular Lens Arrays Fabricated Using Semi-Cylindrical Resist Patterns2019
- Author(s)
  Horiuchi Toshiyuki、Kurata Maiko、Miyazawa Satoshi、Yanagida Akira、Kobayashi Hiroshi
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 32 Issue: 1 Pages: 67-72
- DOI
  10.2494/photopolymer.32.67
- NAID
  130007744323
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2019-06-24
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05021
[Journal Article] Fabrication of a Stent-Like Complicated Structure Using Synchronized Scan Rotation Lithography and Wet Chemical Etching2019
- Author(s)
  Toshiyuki Horiuchi, Kaiki Ito, Yuhta Suzuki, Akira Yanagida and Hiroshi Kobayashi
- Journal Title
  
  Proceedings of ASPEN2019, 8th International Conference of Asian Society for Precision Engineering and Nanotechnology
  
  Volume: なし
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05021
[Journal Article] Application of projection lithography using a gradient-index lens array and wet etching to texturing for control of the hydrophobic properties of stainless-steel plates2019
- Author(s)
  Horiuchi Toshiyuki、Kazama Yuta、Yoshida Hiroya、Yanagida Akira、Kobayashi Hiroshi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Issue: SD Pages: SDDA01-SDDA01
- DOI
  10.7567/1347-4065/ab0543
- NAID
  210000155917
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05021
[Journal Article] Improvement of Hydrophobic Property of Stainless-Steel Plates by Forming Lens-Like Protrusions Similar to Oxalis Leaf Surfaces2019
- Author(s)
  Horiuchi Toshiyuki、Imon Yoshie、Sumimoto Kazuya、Yanagida Akira、Kobayashi Hiroshi
- Journal Title
  
  Key Engineering Materials
  
  Volume: 813 Pages: 19-24
- DOI
  10.4028/www.scientific.net/kem.813.19
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05021
[Journal Article] Effectiveness of fine-pitch lenticular lens arrays fabricated using projection lithography for improving resolution and clearness in switching of two pictures2018
- Author(s)
  Toshiyuki Horiuchi, Maiko Kurata, Satoshi Miyazawa, Yuta Morizane
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 10675 Pages: 24-24
- DOI
  10.1117/12.2305690
- Data Source
  KAKENHI-PROJECT-17K05021
[Journal Article] Evaluation of resist molds formed for fabricating micro-lens arrays and practicability of replicated epoxy resin lenses2018
- Author(s)
  Toshiyuki Horiuchi, Noa Kobayashi, Ryunosuke Sasaki
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 10587 Pages: 58-58
- DOI
  10.1117/12.2307043
- Open Access
- Data Source
  KAKENHI-PROJECT-17K05021
[Journal Article] Printing of Lenticular Lens Patterns Using Defocused Projection Lithography2018
- Author(s)
  Hiroshi Kobayashi, Yuta Morizane, and Toshiyuki Horiuchi
- Journal Title
  
  Journal of Photopolymer Science and Technology
  
  Volume: 31 Pages: 45-50
- NAID
  130007481447
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05021
[Journal Article] Measurement of Diffusion Coefficients by Observing Mixing of Two Liquids Simultaneously Injected in a Micro-Mixer2018
- Author(s)
  Toshiyuki Horiuchi, Yuta Morizane
- Journal Title
  
  IEEJ Transactions on Fundamentals and Materials
  
  Volume: 138 Issue: 5 Pages: 173-179
- DOI
  10.1541/ieejfms.138.173
- NAID
  130006730665
- ISSN
  0385-4205, 1347-5533
- Year and Date
  2018-05-01
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05021
[Journal Article] Synchronous scan-projection lithography on overall circumference of fine pipes with a diameter of 2 mm2016
- Author(s)
  Toshiyuki Horiuchi, Takahiro Furuhata, and Hideyuki Muro
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55
- NAID
  210000146693
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26390040
[Journal Article] Synchronous Scan-Projection Lithography for Fabricating Cylindrical Micro-Parts2016
- Author(s)
  Kaiki Ito, Yuta Suzuki, and Toshiyuki Horiuchi
- Journal Title
  
  Proc. of SPIE
  
  Volume: 9984 Pages: 99840I-99840I
- DOI
  10.1117/12.2240273
- Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26390040
[Journal Article] Laser-Scan Lithography onto Ultra-Fine Pipes 100 μm in diameter2016
- Author(s)
  Hiroshi Takahashi, Tomoya Sagara, and Toshiyuki Horiuchi
- Journal Title
  
  Proc. of SPIE
  
  Volume: 9984 Pages: 99840J-99840J
- DOI
  10.1117/12.2240158
- Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26390040
[Journal Article] Lithography onto Surfaces of Fine-Diameter Pipes Using Rotary Scan-Projection Exposure2015
- Author(s)
  Toshiyuki Horiuchi, Hayato Fujii, and Kahori Yasunaga
- Journal Title
  
  Journal of Photopolymer Science and Technology
  
  Volume: 28 Pages: 273-278
- NAID
  130005093857
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26390040
[Journal Article] Fabrication of micro-coils using laser scan lithography on copper pipes2006
- Author(s)
  Yoshihisa Kaneko, Kohei Hashimoto, Toshiyuki Horiuchi
- Journal Title
  
  Microelectronic Engineering Vol.83
  
  Pages: 1249-1252
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560036
[Journal Article] Projection lithography onto overall cylindrical surfaces2006
- Author(s)
  Kohei Hashimoto, Yoshihisa Kaneko, Toshiyuki Horiuchi
- Journal Title
  
  Microelectronic Engineering Vol.83
  
  Pages: 1312-1315
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560036
[Journal Article] Fabrication of micro-coils using laser scan lithography on copper pipes2006
- Author(s)
  Yoshihisa Kaneko, Kohei Hashimoto, Toshiyuki Horiuchi
- Journal Title
  
  Microelectronic Engineering 83
  
  Pages: 1249-1252
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560036
[Journal Article] Projection lithography onto overall cylindrical surfaces2006
- Author(s)
  Kohei Hashimoto, Yoshihisa Kaneko, Toshiyuki Horiuchi
- Journal Title
  
  Microelectronic Engineering 83
  
  Pages: 1312-1315
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560036
[Journal Article] Projection Lithography onto Overall Cylindrical Surfaces2005
- Author(s)
  Kohei Hashimoto, Yoshihisa Kaneko, Toshiyuki Horiuchi
- Journal Title
  
  31^<st> International Conference on Micro- and Nano-Engineering 2005
- Data Source
  KAKENHI-PROJECT-17560036
[Journal Article] Fabrication of Micro Coils Using Laser Scan Lithography on Copper Pipes2005
- Author(s)
  Yoshihisa Kaneko, Kohei Hashimoto, Toshiyuki Horiuchi
- Journal Title
  
  31^<st> International Conference on Micro- and Nano-Engineering 2005
- Data Source
  KAKENHI-PROJECT-17560036
[Patent] 立体面投影露光装置2022
- Inventor(s)
  堀内敏行
- Industrial Property Rights Holder
  堀内敏行
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2022-130281
- Filing Date
  2022
- Data Source
  KAKENHI-PROJECT-20K05293
[Patent] 内面露光装置および内面露光方法2006
- Inventor(s)
  堀内敏行, 藤田克行, 安田喬
- Industrial Property Rights Holder
  東京電機大学
- Filing Date
  2006-12-25
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560036
[Patent] 特許(PCT)2006
- Inventor(s)
  堀内敏行, 藤田克行, 安田喬
- Industrial Property Rights Holder
  学校法人東京電機大学
- Filing Date
  2006-12-25
- Data Source
  KAKENHI-PROJECT-17560036
[Patent] 特許出願2006
- Inventor(s)
  堀内敏行, 藤田克行, 安田喬
- Industrial Property Rights Holder
  東京電機大学
- Industrial Property Number
  2006-034413
- Filing Date
  2006-01-17
- Data Source
  KAKENHI-PROJECT-17560036
[Presentation] 平面レチクルを用いた対向放物面ミラー立体投影露光の可能性2023
- Author(s)
  堀内敏行，小林宏史
- Organizer
  第70回応用物理学会春季学術講演会, 講演予稿集 15a-D209-5, 06-005
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] Situation of Stereophonic Lithography Using Parabolic Mirrors, Abstract p.592023
- Author(s)
  Toshiyuki Horiuchi, Jun-ya Iwasaki, Hiroshi Kobayashi
- Organizer
  Photomask Japan 2023, The 29th Symposium on Photomask and NGL Mask Technology, p. 59
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 一方向照明の適用による放物面鏡投影露光レジストパターンの改善2022
- Author(s)
  堀内敏行, 小林宏史
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] Stereophonic Lithography Using a Parabolic Mirror Projection System and One-sided Illumination2022
- Author(s)
  T. Horiuchi, J. Iwasaki, and H. Kobayashi
- Organizer
  ODF’22 (Sapporo, Japan), Technical Digest, OThA4A-03
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 青色発光ダイオードでコリメート照明した対向放物面鏡立体投影リソグラフィによるスプーン面へのパターン形成の実証2022
- Author(s)
  堀内敏行，小林宏史
- Organizer
  第83回応用物理学会秋季学術講演会, 講演予稿集 20a-C101-4, 06-004
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] PERFORMANCES OF STEREOPHONIC PROJECTION LITHOGRAPHY USING A PARABOLLIC MIRROR SET ILLUMINATED BY COLLIMATED LIGHT2022
- Author(s)
  T. Horiuchi, J. Iwasaki, H. Kobayashi
- Organizer
  35th Int. Microprocesses and Nonotechnol. Conf, (Tokushima, Japan), 11P-4-1
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 透過原図物体を用いた対向放物面ミラー立体投影露光の検討2021
- Author(s)
  堀内敏行, 小林宏史
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] Stereophonic Projection Exposure Using a Pair of Parabolic Mirrors2021
- Author(s)
  Toshiyuki Horiuchi and Hiroshi Kobayashi
- Organizer
  Photomask Japan 2021, The 27th Symposium on Photomask and NGL Mask Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 放物面ミラーを用いた立体リソグラフィ投影露光光学系の検討2021
- Author(s)
  堀内敏行, 小林宏史
- Organizer
  令和3年電気学会基礎・材料・共通部門大会
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] INVESTIGATION OF PROJECTION EXPOSURE SYSTEM USING A PAIR OF PARABOLIC MIRRORS2021
- Author(s)
  Toshiyuki Horiuchi and Hiroshi Kobayashi
- Organizer
  MNC 2021, 34th International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 対向放物面ミラープロトタイプ露光装置を用いたレジストパターン形成の実証2021
- Author(s)
  堀内敏行, 小林宏史
- Organizer
  第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] 一列アレイを積層した正方形断面光ファイバマトリックスの露光特性2020
- Author(s)
  堀内敏行，渡辺潤, 岩崎順哉, 小林宏史
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] マジックミラー光学系を用いた立体面投影露光リソグラフィの基礎検討2020
- Author(s)
  堀内敏行, 小林宏史
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20K05293
[Presentation] Improvement of Hydrophobic Property of Stainless Steel Plates by Forming Lens-Like Protrusions similar to Oxalis Leaf Surfaces2019
- Author(s)
  Horiuchi Toshiyuki, Imon Yoshie, Sumimoto Kazuya, Yanagida Akira, Kobayashi Hiroshi
- Organizer
  33rd Conference on Surface Modification Technologies 26-28 June, 2019 Naples, Italy
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] 液晶投影露光により短波長厚膜レジストパターンを形成する二層レジストプロセス2019
- Author(s)
  堀内敏行, 沖山隼人, 佐藤龍太, 小林宏史
- Organizer
  電気学会光応用・視覚研究会
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] レンズ状突起の形成によるステンレス鋼板の撥水性向上2019
- Author(s)
  堀内敏行,井門芳恵, 住本和弥, 柳田明, 小林宏史
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] 小径ステンレス管表面への網目パターンの均一形成2019
- Author(s)
  堀内敏行, 伊藤海樹, 小林宏史
- Organizer
  2019年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] Two-Layer Resist Process to Print Thick Patterns by Exploiting Matrix Projection Exposure Using a Liquid-Crystal Display Panel2019
- Author(s)
  Toshiyuki Horiuchi, Hayato Okiyama, Ryuta Sato, and Hiroshi Kobayashi
- Organizer
  MNC 2019, 32nd International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] 屈折率分布型レンズアレイによる大面積均一投影露光2019
- Author(s)
  堀内敏行, 風間裕太, 吉田寛弥, 井門芳恵, 住本和弥, 柳田明, 小林宏史
- Organizer
  令和元年電気学会基礎・材料・共通部門大会
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] Fabrication of a Stent-Like Complicated Structure Using Synchronized Scan Rotation Lithography and Wet Chemical Etching2019
- Author(s)
  Toshiyuki Horiuchi, Kaiki Ito, Yuhta Suzuki, Akira Yanagida and Hiroshi Kobayashi
- Organizer
  ASPEN 2019, 8th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] Effectiveness of fine-pitch lenticular lens arrays fabricated using projection lithography for improving resolution and clearness in switching of two pictures2018
- Author(s)
  Toshiyuki Horiuchi, Maiko Kurata, Satoshi Miyazawa, Yuta Morizane
- Organizer
  SPIE Photonics Europe 2018, Strasbourg, France
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] 凹面レジストパターン形成リソグラフィを用いて製作したマイクロレンズアレイの評価2018
- Author(s)
  堀内敏行, 小林野歩, 笹木龍之介
- Organizer
  応用物理学会次世代リソグラフィ技術研究会次世代リソグラフィワークショップ予稿集
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] Effectiveness of fine-pitch lenticular lens arrays fabricated using projection lithography for improving resolution and clearness in switching of two pictures2018
- Author(s)
  Toshiyuki Horiuchi, Maiko Kurata, Satoshi Miyazawa, Yuta Morizane
- Organizer
  SPIE Photonics Europe, Strasbourg, France
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] Applications of photopolymer resists to direct fabrication of three-dimensional micro-structures2018
- Author(s)
  Toshiyuki Horiuchi, Noa Kobayashi, Yuta Morizane, Ryunosuke Sasaki, Maiko Kurata, Satoshi Miyazawa, Kouta Shimizu, Hiroshi Kobayashi, Akira Yanagida
- Organizer
  Polymer World Congress 2018, Stockholm, Sweden
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] Application of Projection Exposure Using a Gradient Index Lens Array and Wet Etching to Texturing and Hydrophobic-Property Control of Stainless-Steel Plates2018
- Author(s)
  Toshiyuki Horiuchi, Yuta Kazama, Hiroya Yoshida, Akira Yanagida, and Hiroshi Kobayashi
- Organizer
  MNC 2018, 31st International Microprocesses and Nanotechnology Conference, Sapporo, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] Evaluation of resist molds formed for fabricating micro-lens arrays and practicability of replicated epoxy resin lenses2018
- Author(s)
  Toshiyuki Horiuchi, Noa Kobayashi, Ryunosuke Sasaki
- Organizer
  SPIE Advanced Lithography, 2018, San Jose, California, United States
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] Laser-Scan Lithography and Electrolytic Etching of Fine Pipes with a Diameter of 100 μm2017
- Author(s)
  Hiroshi Takahashi, Tomoya Sagara, and Toshiyuki Horiuchi
- Organizer
  Photomask Japan 2016, The 24th Symposium on Photomask and NGL Mask Technology
- Place of Presentation
  パシフィコ横浜(神奈川県横浜市)
- Year and Date
  2017-04-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390040
[Presentation] Fabrication of Cylindrical Micro-Parts Using Synchronous Scan-Projection Lithography and Chemical Etching2017
- Author(s)
  Kaiki Ito, Yuhta Suzuki, and Toshiyuki Horiuchi
- Organizer
  Photomask Japan 2016, The 24th Symposium on Photomask and NGL Mask Technology
- Place of Presentation
  パシフィコ横浜(神奈川県横浜市)
- Year and Date
  2017-04-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390040
[Presentation] マイクロレンズアレイ製作用凹面レジストパターンの曲率半径の測定2017
- Author(s)
  堀内敏行, 笹木龍之介, 小林野歩
- Organizer
  電気学会計測研究会
- Data Source
  KAKENHI-PROJECT-17K05021
[Presentation] Laser-Scan Lithography onto Ultra-Fine Pipes 100 μm in diameter2016
- Author(s)
  Hiroshi Takahashi, Tomoya Sagara, and Toshiyuki Horiuchi
- Organizer
  Photomask Japan 2016, The 23rd Symposium on Photomask and NGL Mask Technology
- Place of Presentation
  パシフィコ横浜(神奈川県横浜市)
- Year and Date
  2016-04-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390040
[Presentation] 同期走査投影露光と化学エッチングによるマイクロ円筒部品の製作2016
- Author(s)
  伊藤海樹, 鈴木佑汰, 堀内敏行
- Organizer
  2016年度第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ(新潟県新潟市)
- Year and Date
  2016-09-01
- Data Source
  KAKENHI-PROJECT-26390040
[Presentation] Synchronous Scan-Projection Lithography for Fabricating Cylindrical Micro-Parts2016
- Author(s)
  Kaiki Ito, Yuhta Suzuki, and Toshiyuki Horiuchi
- Organizer
  Photomask Japan 2016, The 23rd Symposium on Photomask and NGL Mask Technology
- Place of Presentation
  パシフィコ横浜(神奈川県横浜市)
- Year and Date
  2016-04-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390040
[Presentation] 外径100μmのステンレス微細管へのマルチスリット形状電解エッチング2016
- Author(s)
  髙橋宏志, 相良友也, 堀内敏行
- Organizer
  2016年度精密工学会秋季大会学術講演会
- Place of Presentation
  茨城大学(茨城県水戸市)
- Year and Date
  2016-08-20
- Data Source
  KAKENHI-PROJECT-26390040
[Presentation] Scan-Projection Lithography onto Overall Circumferences of Small-diameter Pipes2015
- Author(s)
  Toshiyuki Horiuchi, Takahiro Furuhata and Hideyuki Muro, 12P-7-104, 2015.11.10.
- Organizer
  MNC 2015, 28th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  富山国際会議場(富山県富山市)
- Year and Date
  2015-11-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390040
[Presentation] 小径管内面へのパターン形成と内面パターンの非破壊観察2015
- Author(s)
  堀内敏行, 木村のぞみ
- Organizer
  電気学会光応用・視覚、計測合同研究会, LAV-15-2, IM-15-2, pp. 5-9.
- Place of Presentation
  徳島県徳島市内ホテル千秋閣
- Year and Date
  2015-02-12
- Data Source
  KAKENHI-PROJECT-26390040
[Presentation] Patterning of Multi-slits on Pipes for Developing Fine Diameter Stents
- Author(s)
  Toshiyuki Horiuchi, Hiroshi Sakabe, and Hiroshi Kobayashi
- Organizer
  BIODEVICES 2015, Proceedings, pp. 103-108, 査読有
- Place of Presentation
  Lisbon, Portugal
- Year and Date
  2015-01-12 – 2015-01-15
- Data Source
  KAKENHI-PROJECT-26390040

1. 小林宏史 (80838855)

# of Collaborated Projects: 1 results

# of Collaborated Products: 16 results
2. ITO Kaiki

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
3. TAKAHASHI Hiroshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
4. KIMURA Nozomi

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
5. SUZUKI Yuta

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
6. FURUHATA Takahiro

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
7. MURO Hideyuki

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
8. SAGARA Tomoya

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
9. FUJII Hayato

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
10. YASUNAGA Kahori

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results

Horiuchi Toshiyuki 堀内 敏行

HORIUCHI Toshiyuki 堀内 敏行

Research Projects

Research Products

Co-Researchers

Research on lithography using projection exposure of stereophonic surfacePrincipal Investigator

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Research on fabrication technology of micro-lens arrays utilizing cross section profile control of thick resist patternsPrincipal Investigator

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Research on technology for fabricating medical and biochemical micro-parts using optical lithography onto cylindrical surfaces of small-diameter pipesPrincipal Investigator

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Research on optical lithography for patterning on axially symmetrical specimensPrincipal Investigator

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Optical projection lithography using gradation stitching of the exposure fieldsPrincipal Investigator

Principal Investigator

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[Journal Article] Demonstration of stereophonic projection lithography using parabolic mirror optics and collimated illumination from one side2023

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[Journal Article] Feasibility of stereophonic projection lithography applying a parabolic magic mirror system2022

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[Journal Article] Patterning-Area Expansion of Parabolic-Mirror Projection Optics for Lithography Using One-Sided and Collimated Illumination2022

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[Journal Article] Stereophonic projection lithography using parabolic mirrors2021

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[Journal Article] Two-layer resist process for printing thick patterns by exploiting a maskless projection exposure system using a liquid-crystal-display panel2020

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[Journal Article] Performances of Fine-Pitch Lenticular Lens Arrays Fabricated Using Semi-Cylindrical Resist Patterns2019

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[Journal Article] Fabrication of a Stent-Like Complicated Structure Using Synchronized Scan Rotation Lithography and Wet Chemical Etching2019

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[Journal Article] Application of projection lithography using a gradient-index lens array and wet etching to texturing for control of the hydrophobic properties of stainless-steel plates2019

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Journal Title

DOI

NAID

Data Source

[Journal Article] Improvement of Hydrophobic Property of Stainless-Steel Plates by Forming Lens-Like Protrusions Similar to Oxalis Leaf Surfaces2019

Author(s)

Horiuchi Toshiyuki 堀内敏行

HORIUCHI Toshiyuki 堀内敏行