Tanaka Shuji 田中秀治

… Alternative Names

TANAKA Shuji 田中秀治

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Researcher Number	00312611
Other IDs
Affiliation (Current)	2025: 東北大学, 工学研究科, 教授
Affiliation (based on the past Project Information) *help	2018 – 2025: 東北大学, 工学研究科, 教授 2016: 東北大学, 大学院工学研究科, 教授 2013 – 2015: 東北大学, 工学(系)研究科(研究院), 教授 2012: 東北大学, 工学(系)研究科(研究院), 准教授 2007 – 2011: 東北大学, 大学院・工学研究科, 准教授 … More 2006: Tohoku University, Graduate School of Engineering, Associate Professor, 大学院工学研究科, 助教授 2003 – 2005: Tohoku University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 2001 – 2002: Tohoku Uniyeristy, Graduate School of Engineering, Lecturer, 大学院・工学研究科, 講師 2001 – 2002: 東北大学, 大学院・工学系研究科, 講師 2000 – 2002: 東北大学, 大学院・工学系研究科, 助手 2001: 東北大学, 工学研究科, 講師 1999 – 2000: 東北大学, 大学院・工学研究科, 助手 Less
Review Section/Research Field	Principal Investigator Basic Section 28050:Nano/micro-systems-related / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Nano/Microsystems / Microdevices/Nanodevices / Basic Section 20010:Mechanics and mechatronics-related / Medium-sized Section 31:Nuclear engineering, earth resources engineering, energy engineering, and related fields / Production engineering/Processing studies / Thermal engineering / Aerospace engineering Except Principal Investigator Applied physics, general … More / Microdevices/Nanodevices / 機械工作・生産工学 / Human interface and interaction / Material processing/treatments / Measurement engineering / Design engineering/Machine functional elements/Tribology / Applied physics, general / Science and Engineering Less
Keywords	Principal Investigator MEMS / 共振子 / センサ / 圧電薄膜 / エピタキシャル成長 / PZT / マイクロヒータ / 樹脂材料 / ダンピング / 非線形性 … More / ジャイロ / モード局在化 / センサー / シリコン / 温度補償 / 振動子 / ドーピング / 周波数温度特性 / アクチュエータ / SmドープPMN-PT / ピエゾ抵抗 / 圧電MEMS / PMN-PT / 信頼性 / ピエゾ抵抗センサー / 放射線 / 集積回路 / γ線ダメージ / センサ読出回路 / ダイオード / 炭化ケイ素 / 容量型センサ / ダイオードブリッジ / 高温実装技術 / ブリッジ回路 / SiCダイオード / 信号読出し / 高温センサ / 圧電定数 / シリコン基板 / 単結晶膜 / スパッタ成膜 / チタン酸ジルコン酸鉛 / スパッタリング / キュリー点 / バッファ層 / 誘電率 / 急冷法 / 単結晶圧電薄膜 / マイクロセンサー / ホットワイヤ― / セレン化亜鉛 / 化学的気相堆積 / 原子状水素 / ホットワイヤ / カーボンナノチューブ / 水銀滴 / 接触熱抵抗 / カーボンナノチ / メタ磁性体 / 磁気冷凍 / 熱スイッチ / 微小光学部品 / グレイスケールリソグラフィ / 非球面レンズ / SiC(炭化珪素) / 微細光学部品 / ガラスプレス / マイクロパワー源 / マイクロスラスター / 熱電発電 / 燃料改質器 / 触媒燃焼 / フィードスルー配線 / ロケットアレイ / 固体燃料 / マイクロスラスタ / 固体ロケット / マイクロマシング / マイクロ宇宙船 / キーワード … More Except Principal Investigator マイクロマシニング / MEMS / マイクロマシン / ナノマシニング / Micromachining / Micromachine / 振動子 / 近接場光学顕微鏡 / 高密度記録 / Resonator / Actuator / Sensor / アクチュエータ / センサ / BiTe / 走査型プローブ顕微鏡 / 3-dimensional fine structure / DNA / 近接場光学 / 3次元微細構造 / カーボンナノチューブ / 高感度センサー / 走査型プローブ / 触覚呈示 / デバイス / 指装着 / 仮想現実感 / 触覚提示 / 遠隔ロボット / バーチャルリアリティ / Relay / Wireless / リレー / 無線 / マイクロマニシング / local heating / micro beat flux sensor / micro heater / intelligence mold / 犠牲層マスク / 熱流速センサ / 局所加熱 / マイクロヒータ / 熱流束センサ / 知能化金型 / Data storage / Nanomachine / アクチュエーター / 電界放出エミッタ / 静電アクチュエータ / 圧電アクチュエータ / データストレージ / ナノマシン / micro-casting / glass-encapsulating process / materials micro-processing / microfabrication / micromachining / micro-module / thermoelectric material / PbTe / 熱間等方圧成形 / マイクロキャスティング / ガラスカプセル法 / 微細材料加工 / マイクロファブリケーション / マイクロ熱電素子 / 熱電材料 / Scanning Probe Microscopy / Near-field microscopy / High-Density Data-Storage / Ultra-sensitive sensor / Micromachinihg / 高感度センシング / 微小振動子 / Focused ion beam machining method / The electron beam depositing method / Near-field optics / Biotechnology handling / 微小電極 / 集束イオンビーム加工法 / 電子ビーム堆積法 / バイオハンドリング / Nanomachining / Nano pattern transfer / Microprobe for NSOM / Capacitive AFM probe / Precise micromachining / Gyroscope / Accelerometer / Highly sensitive pressure sensor / NSOM用プローブ / ナノパターン転写 / NMOS用プローブ / 容量型AFMプローブ / 高精度マイクロマシニング / ジャイロスコープ / 加速度センサ / 高感度圧力センサ / Molding / Pump / Valve / Flow sensor / Biochemical analysis / Micro fluid control / 射出成形 / ポンプ / バルブ / フローセンサ / 生化学分析 / 微小流体制御 / 洗浄度 / トライボコーティング / 摩擦振動制御 / スパッタリング法 / 高周波プラズマCVD法 / オーバーコート法 / スパッタリング / ナノコンポジット / 表面自由エネルギー / 摩擦支援 / 低摩擦機構 / 摩擦制御 / 固体潤滑 / ナノイメージング / 熱機械ノイズ / ピエゾ抵抗 / 変位センサ / 単電子トランジスタ / 磁気共鳴力顕微鏡 / MEHS / ダイアモンド / 電子線描画装置 / 電子線描画 / マスクレス露光 / セルフアセンブル / 光制御電子源 / 並列電子線描画 / 電子描画装置 / MEMS・NEMS / エネルギー / エレクトレット発電 / 圧電発電 / 振動発電 / 熱電発電 / バイオ発電 / マイクロ発電 / エナジー・ハーベスティング / 固体電解質 / マイクロ爆轟 / バイオ電池 / 燃料電池 / バイオテクノロジー / エネルギー・ハーベスティング / マイクロ・ナノデバイス / 垂直エッチング / マクロポーラスシリコン / ウェットエッチング / ナノマジニング / プローブ / マイクロアクチュエータ / 高感度センサ / 近接場光 Less

超音波の音響放射圧を用いたマイクロアクチュエーターPrincipal Investigator
- Principal Investigator
  
  田中秀治
- Project Period (FY)
  2025 – 2027
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Tohoku University
MEMSに「設計された積極的ダンピング」を導入するという新発想の体系化への挑戦Principal Investigator
- Principal Investigator
  
  田中秀治
- Project Period (FY)
  2024 – 2025
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  Tohoku University
2+1マスMEMS共振子による新たなモード制御法の研究と高性能センサーへの適用Principal Investigator
- Principal Investigator
  
  田中秀治
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Tohoku University
Temperature Compensation of Silicon MEMS Resonators by Multiple DopingPrincipal Investigator
- Principal Investigator
  
  Tanaka Shuji
- Project Period (FY)
  2021 – 2022
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  Tohoku University
Study on On-site Recovery of Integrated Circuit Failed by Gamma Ray IrradiationPrincipal Investigator
- Principal Investigator
  
  Tanaka Shuji
- Project Period (FY)
  2018 – 2019
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 31:Nuclear engineering, earth resources engineering, energy engineering, and related fields
- Research Institution
  Tohoku University
Stable / Reliable Sensing and Precise Control of Piezoelectric Thin Film ActuatorsPrincipal Investigator
- Principal Investigator
  
  Tanaka Shuji
- Project Period (FY)
  2018 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 20010:Mechanics and mechatronics-related
- Research Institution
  Tohoku University
Development of high density and accuracy tactile device using MEMS technology
- Principal Investigator
  
  SONE JUNJI
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Human interface and interaction
- Research Institution
  Tokyo Polytechnic University
Readout Technology of MEMS Sensors Installed in High Temperature EnvironmentsPrincipal Investigator
- Principal Investigator
  
  Tanaka Shuji
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Nano/Microsystems
- Research Institution
  Tohoku University
Deposition of Ideally-oriented PZT Monocrystalline Thin Film on Si Substrate and Feasibility Study of Its Application to MEMSPrincipal Investigator
- Principal Investigator
  
  Tanaka Shuji
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Nano/Microsystems
- Research Institution
  Tohoku University
Study on low-temperature and high-rate deposition technology of ZnSe for the application to infrared sensor arraysPrincipal Investigator
- Principal Investigator
  
  TANAKA Shuji
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Tohoku University
Super-low Friction Mechanisms of Tribo-coating Films and its Application to Space Mechanisms
- Principal Investigator
  
  ADACHI Koshi
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Design engineering/Machine functional elements/Tribology
- Research Institution
  Tohoku University
高感度マイクロセンサのためのマイクロ磁気冷凍機の開発Principal Investigator
- Principal Investigator
  
  田中秀治
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Tohoku University
Massive Parallel Electron Beam Lithography System
- Principal Investigator
  
  ESASHI Masayoshi
- Project Period (FY)
  2007 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Tohoku University
ナノメカニカル・単電子トランジスタによるナノセンシング
- Principal Investigator
  
  小野崇人
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University
Research of a nano-energy system creation
- Principal Investigator
  
  KUWANO Hiroki
- Project Period (FY)
  2006 – 2010
- Research Category
  
  Grant-in-Aid for Creative Scientific Research
- Research Institution
  Tohoku University
生産性の高いシリコンのウェット垂直エッチング
- Principal Investigator
  
  江刺正喜
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Tohoku University
SiCモールドを用いたマイクロ非球面ガラスレンズのプレス加工に関する研究Principal Investigator
- Principal Investigator
  
  田中秀治
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
RF MEMS device based on micromachining
- Principal Investigator
  
  ESASHI Masayoshi
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Tohoku University
微小空間における燃焼の制御・利用に関する研究Principal Investigator
- Principal Investigator
  
  田中秀治
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Thermal engineering
- Research Institution
  Tohoku University
Distributed Micro-Nanomachines which move with nanometer precision
- Principal Investigator
  
  ESASHI Masahi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University
Development of molding technologies to create microstructures on glass and plastic and analysis of phenomena in the process.
- Principal Investigator
  
  MATSUMOTO Kiyoshi
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  The Univarsity of Tokyo
高効率近接場光源の開発と応用
- Principal Investigator
  
  ONO Takahito
- Project Period (FY)
  2000 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Tohoku University
超小形人工衛星・惑星探査機用マイクロスラスタに関する研究Principal Investigator
- Principal Investigator
  
  田中秀治
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Aerospace engineering
- Research Institution
  Tohoku University
10nm-orderd 33D structures for bio-mechanical handling
- Principal Investigator
  
  NAKAO Masayuki
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  The University of Tokyo
Micro/Nanomachined Device for High-density Data Storage
- Principal Investigator
  
  ONO Takahito
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University
Manufacturing of Thermoelectric Microdevices
- Principal Investigator
  
  LI Jing-feng
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  TOHOKU UNIVERSITY
Joint Research on Micro Fluid Control System
- Principal Investigator
  
  ESASHI Masayoshi
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University
Ultra Sensing Using Highly Precise Micromachining
- Principal Investigator
  
  ESASHI Masayoshi
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (A).
- Research Field
  
  Measurement engineering
- Research Institution
  Tohoku University

[Book] エネルギーハーベスティング技術の最新動向第5章-2「マイクロ燃料電池システム」(監修:桑野博喜)2010
- Author(s)
  田中秀治
- Publisher
  シーエムシー出版
- Data Source
  KAKENHI-PROJECT-18GS0203
[Book] MEMS/NEMS工学全集(桑野博喜監修)5-23「燃料電池」, 8-8「マイクロ発電」2009
- Author(s)
  田中秀治
- Total Pages
  1096
- Publisher
  テクノシステム
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] Two-axis multiple masses resonator with frequency and Q-factor matching2024
- Author(s)
  J. Chen, T. Tsukamoto, G. Langfelder and S. Tanaka
- Journal Title
  
  Sensors and Actuators A
  
  Volume: 366 Pages: 114938-114938
- DOI
  10.1016/j.sna.2023.114938
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23192
[Journal Article] A mechanically coupled three degree-of-freedom resonator with tunable stiffness sensitivity2022
- Author(s)
  Chen Jianlin、Tsukamoto Takashiro、Tanaka Shuji
- Journal Title
  
  Sensors and Actuators A: Physical
  
  Volume: 344 Pages: 113713-113713
- DOI
  10.1016/j.sna.2022.113713
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21J11628, KAKENHI-PROJECT-23K23192
[Journal Article] 良好な絶縁性を有するc軸配向PZT系単結晶薄膜のSi基板上への形成2020
- Author(s)
  海老原凌, 吉田慎哉, 田中秀治
- Journal Title
  
  電気学会論文誌E
  
  Volume: 140 Pages: 137-143
- NAID
  130007850137
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H01390
[Journal Article] Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator2020
- Author(s)
  Andrea Vergara, Takashiro Tsukamoto, Weileun Fang and Shuji Tanaka
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume: 30 Issue: 11 Pages: 115020-115020
- DOI
  10.1088/1361-6439/abb756
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01390
[Journal Article] Development of Sputter Epitaxy Technique of Pure-Perovskite (001)/(100)-Oriented Sm-Doped Pb(Mg1/3, Nb2/3)O3?PbTiO3 on Si2020
- Author(s)
  Qi Xuanmeng、Yoshida Shinya、Tanaka Shuji
- Journal Title
  
  IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
  
  Volume: 67 Issue: 12 Pages: 2738-2744
- DOI
  10.1109/tuffc.2020.3011649
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05231, KAKENHI-PROJECT-18H01390
[Journal Article] Fabrication and characterization of large figure-of-merit epitaxialPMnN-PZT/Si transducer for piezoelectric MEMS sensors2016
- Author(s)
  Shinya Yoshida, Hiroaki Hanzawa, Kiyotaka Wasa, Shuji Tanaka
- Journal Title
  
  Sensors and Actuators A
  
  Volume: 239 Pages: 201-208
- DOI
  10.1016/j.sna.2016.01.031
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25286033
[Journal Article] Highly c-Axis Oriented Monocrystalline Pb(Zr, Ti)O3 Thin Films on Si Wafer Prepared by Fast Cooling Immediately after Sputter Deposition2014
- Author(s)
  Shinya Yoshida, Hiroaki Hanzawa, Kiyotaka Wasa, Masayosh Esashi, Shuji Tanaka
- Journal Title
  
  IEEE Transactions on Ultrasonics, Feroelectrics, and Frequency Control
  
  Volume: 61 Issue: 9 Pages: 1552-1558
- DOI
  10.1109/tuffc.2014.3069
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25286033
[Journal Article] マイクロ燃料電池2010
- Author(s)
  田中秀治
- Journal Title
  
  高圧ガス
  
  Volume: (高圧ガス) Pages: 57-57
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] 携帯型燃料電池のためのMEMS技術2010
- Author(s)
  田中秀治
- Journal Title
  
  月刊ディスプレイ 16
  
  Pages: 39-45
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] 中低温動作マイクロSOFCのためのGd添加CeO_2の堆積と微細加工2009
- Author(s)
  高橋智一, 井口史匡, 湯上浩雄, 江刺正喜, 田中秀治
- Journal Title
  
  日本機械学会論文集, b編
  
  Volume: 75 Pages: 524-526
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] Long working range mercury droplet actuation2009
- Author(s)
  Takashi Tsukamoto, Masayoshi Esashi, Shuji Tanaka
- Journal Title
  
  Journal of Micromechanics and Microengineering 19
  
  Pages: 94016-94016
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20651036
[Journal Article] MERCURY DROPLET ACTUATION USING NEW DESIGN OF ELECTRODES FOR LONG WORKING RANGE2008
- Author(s)
  T. Tsukamoto, M. Esashi, S. Tanaka
- Journal Title
  
  Proceedings of PowerMEMS 2008 + μEMS 2008
  
  Pages: 417-420
- Data Source
  KAKENHI-PROJECT-20651036
[Journal Article] LONG WORKING RANGE MERCURY DROPLET ACTUATION2008
- Author(s)
  T. Tsukamoto, S. Tanaka and M. Esashi
- Journal Title
  
  Proceedings of The Fourth Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)
- Data Source
  KAKENHI-PROJECT-20651036
[Journal Article] ナノ領域温度計測用マイクロシステムコンセプトと作製プロセス2007
- Author(s)
  田中克洋
- Journal Title
  
  平成19年電気学会全国大会講演論文集
  
  Pages: 163-163
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] ナノ領域の温度計測を目指した非接触式マイクロシステムの研究2007
- Author(s)
  田中克洋
- Journal Title
  
  日本機械学会2006年度年次大会講演論文集 No.06-1
  
  Pages: 295-296
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] A NOVEL SCANNING THERMAL MICROSCOPY SYSTEM2007
- Author(s)
  Katsuhiro Tanaka
- Journal Title
  
  Proc. IEEE Micro Electro-Mechanical Systems Int. Conf.2007
  
  Pages: 627-630
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] A Thermal Measurement System for Nano-Meter Scale Area Evaluation2006
- Author(s)
  K.Tanaka
- Journal Title
  
  Proc. International Conference on Nanoscience and Technology
  
  Pages: 337-337
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] マスクレス露光装置を用いたグレイスケールフォトレジストパターンの作製2005
- Author(s)
  戸津健太郎, 藤代健太, 田中秀治, 江刺正喜
- Journal Title
  
  電気学会全国大会講演論文集 (発表予定)
- Data Source
  KAKENHI-PROJECT-16656046
[Journal Article] MICRO/NANO GLASS PRESSMOLDINGUSING SILICON CARBIDEMOLDS FABRICATED RY SILICON LOSTMOLDING2005
- Author(s)
  Kyong-Oh Min, Shuji Tanaka, Masayoshi Esashi
- Journal Title
  
  Proc.IEEE MEMS 2005
  
  Pages: 475-478
- Data Source
  KAKENHI-PROJECT-16656046
[Journal Article] Micro Press Molding of Pyrex Glass using SiC Molds2005
- Author(s)
  Kyung-Oh Min, Shuji Tanaka, Masayoshi Esashi
- Journal Title
  
  Proceedings of the 22nd Sensor Symposium
  
  Pages: 494-497
- Data Source
  KAKENHI-PROJECT-16656046
[Patent] ホットワイヤ化学蒸着装置2013
- Inventor(s)
  熊野勝文,田中秀治,江刺正喜
- Industrial Property Rights Holder
  東北大学
- Industrial Property Rights Type
  特許
- Filing Date
  2013-03-08
- Overseas
- Data Source
  KAKENHI-PROJECT-24651155
[Patent] ホットワイヤ化学蒸着装置2013
- Inventor(s)
  熊野勝文, 田中秀治, 江刺正喜
- Industrial Property Rights Holder
  東北大学
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2013-047127
- Filing Date
  2013
- Data Source
  KAKENHI-PROJECT-24651155
[Presentation] MODE LOCALIZATION AND FREQUENCY MODULATION SENSINGUSING SUPERPOSED IN-PHASE AND ANTI-PHASE OSCILLATIONS2024
- Author(s)
  T. Tsukamoto, R. Forke, S. Weidlich, D. Buelz, A. Shaporin, K. Hiller, and S. Tanaka
- Organizer
  IEEE MEMS 2024
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23192
[Presentation] Enhanced Stiffness Sensitivity in a Mode Localized Sensor Using Internal Resonance Actuation2023
- Author(s)
  J. Chen, H. Zhang, T. Tsukamoto, M. Kraft and S. Tanaka
- Organizer
  2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23192
[Presentation] 直交2軸振動子を用いた感度可変モード局在センシング2023
- Author(s)
  長坂悠汰, Alessia Baronchelli, 塚本貴城, 田中秀治
- Organizer
  日本機械学会第14回マイクロ・ナノ工学シンポジウム
- Data Source
  KAKENHI-PROJECT-23K23192
[Presentation] TEMPERATURE-COMPENSATED PURE SILICON CANTILEVER RESONATOR WITH COUPLED TORSIONAL STRUCTURE AT ANCHOR2023
- Author(s)
  Shunsuke Yamada and Shuji Tanaka
- Organizer
  The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18666
[Presentation] Virtually Rotated Multiple Mass Resonator Enabled by Electrostatic Frequency and Q-factor Tuning2023
- Author(s)
  J. Chen, T. Tsukamoto, G. Langfelder and S. Tanaka
- Organizer
  IEEE INERTIAL 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23192
[Presentation] MEMS共振子の温度特性を予測するシミュレータの作成2022
- Author(s)
  山田駿介, 田中秀治
- Organizer
  第13回マイクロ・ナノ工学シンポジウム
- Data Source
  KAKENHI-PROJECT-21K18666
[Presentation] SM-DOPED PB(MG1/3, NB2/3)O3-PBTIO3 SPUTTER-EPITAXY ON SI TOWARDS GIANT-PIEZOELECTRIC THIN FILM FOR MEMS2021
- Author(s)
  Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
- Organizer
  34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] PZT MEMS ACTUATOR WITH INTEGRATED BURIED PIEZORESISTORS FOR POSITION CONTROL2021
- Author(s)
  Andrea Vergara, Takashiro Tsukamoto, Weileun Fang and Shuji Tanaka
- Organizer
  34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] Sputter-Epitaxy of Sm-Doped Pb(Mg1/3, Nb2/3)O3-PbTiO3 on Si for Creation of Giant-Piezoelectric MEMS Actuator2021
- Author(s)
  Xuanmeng Qi, Shinya Yoshida and Shuji Tanaka
- Organizer
  圧電材料・デバイスシンポジウム
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] Epitaxial Growth of Pure-Perovskite-Phase Sm-Doped Pb(Mg1/3Nb2/3)O3-PbTiO3 Thin Film on Si by Magnetron Sputter using Powder Target2020
- Author(s)
  Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
- Organizer
  Electroceramics XVII
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] PZT THIN FILM ACTUATOR WITH INTEGRATED BURIED PIEZORESISTOR FOR HIGH STABILITY POSITION CONTROL2020
- Author(s)
  Andrea Vergara, Takashiro Tsukamoto, Weileun Fang, Shuji Tanaka
- Organizer
  日本機械学会東北支部第55期総会・講演会
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] 良好な絶縁性を有するc軸配向PZT系単結晶薄膜のSi基板上への形成2019
- Author(s)
  海老原凌, 吉田慎哉, 田中秀治
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] ntegration of buried piezoresistive sensors and PZT thin film for highly stable MEMS actuators2019
- Author(s)
  Andrea Vergara, Takashiro Tsukamoto, Weileun Fang, Shuji Tanaka
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] 良好な絶縁性を有するMEMS用PZT系単結晶薄膜の形成法の探索2019
- Author(s)
  海老原凌, 吉田慎哉, 田中秀治
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] 圧電薄膜デバイスと基板の選択2019
- Author(s)
  和佐清孝, 清水貴博, 足立英明, 吉田慎哉, 柳谷隆彦, 田中秀治
- Organizer
  圧電材料・デバイスシンポジウム2019
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] ガンマ線照射ダメージその場回復のためのメンブレン型ヒータ集積化LSI2019
- Author(s)
  Gong Tianjiao, 鈴木裕輝夫, 田中秀治
- Organizer
  第11回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19040
[Presentation] PZT thin film actuator with integrated buried piezoresistive sensors for high precision and stability2019
- Author(s)
  Vergara Andrea, 塚本貴城, Fang Weileun, 田中秀治
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] Si基板上c軸配向PZT系エピタキシャル成長への靭性付与法の探索2019
- Author(s)
  勝又優, 吉田慎哉, 田中秀治
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] Advanced Piezoelectric Films for MEMS and Acoustic Wave Devices2015
- Author(s)
  S. Tanaka, S. Yoshida, M. Kadota, K. Wasa
- Organizer
  Sixth International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems
- Place of Presentation
  千葉, 千葉大学
- Year and Date
  2015-11-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] Epitaxial Growth of (100)/(001) PZT-Based Thin Film on (111) Si Wafer Using SrRuO3/LaNiO3/Pt/CeO2 Buffer Layer2015
- Author(s)
  Takeshi Hayasaka, Shinya Yoshida, Shuji Tanaka
- Organizer
  IEEE International Symposium on Applications of Ferroelectric (ISAF)
- Place of Presentation
  Singapore
- Year and Date
  2015-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] Design and Prototyping of Tactile MEMS Device for Finger Tactile Sensation2015
- Author(s)
  Takehiro Adachi,Yasuyoshi Matsumoto, Taiki Inomata, Youichi Hoshi, Junji Sone, Shuji Tanaka
- Organizer
  14th ACM SIGGRAPH International Conference on Virtual Reality Continuum and Its Applications in Industry
- Place of Presentation
  Port Island Center (Kobe)
- Year and Date
  2015-10-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K12089
[Presentation] MEMS技術を用いた指触覚デバイスの設計と製作（第3報）2015
- Author(s)
  松本康義, 猪俣泰気, 足立丈宗, 星陽一, 曽根順治, 田中秀治
- Organizer
  第20回日本バーチャルリアリティ学会大会
- Place of Presentation
  芝浦工業大学 (東京)
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15K12089
[Presentation] MEMSの最新動向と圧電応用2015
- Author(s)
  田中秀治
- Organizer
  第153回電子セラミック・プロセス研究会
- Place of Presentation
  横浜, 横浜港湾福利厚生協会波止場会館
- Year and Date
  2015-10-17
- Invited
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] Sputter Deposition of Epitaxial Yttria-Stabilized Zirconia (YSZ) Buffer Layer on Large Diameter Si Wafer for Epitaxial PZT Thin Film Transducer2015
- Author(s)
  S. Yoshida, S. Nishizawa, T. Hayasaka, K. Wasa and S. Tanaka
- Organizer
  IEEE International Symposium on Applications of Ferroelectric (ISAF)
- Place of Presentation
  Singapore
- Year and Date
  2015-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] 対向スパッタによる圧電膜の成膜2015
- Author(s)
  曽根順治, 足立丈宗, 松本康義, 星陽一, 田中秀治
- Organizer
  第7回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  朱鷺メッセ(新潟市)
- Year and Date
  2015-10-26
- Data Source
  KAKENHI-PROJECT-15K12089
[Presentation] K. Wasa, H. Hanzawa, S. Yoshida, S. Tanaka, H. Adachi, T. Matsunaga, Structure and Ferroelectric Properties of High TcBi(Me)O3-PbTiO3 Single Crystal Thin Films2015
- Author(s)
  K. Wasa, H. Hanzawa, S. Yoshida, S. Tanaka, H. Adachi, T. Matsunaga
- Organizer
  IEEE International Symposium on Applications of Ferroelectric (ISAF)
- Place of Presentation
  Singapore
- Year and Date
  2015-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] LARGE FIGURE-OF-MERIT EPITAXIAL PB(MN,NB)O3-PB(ZR,TI)O3/SI TRANSDUCER FOR PIEZOELECTRIC MEMS SENSORS2015
- Author(s)
  Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa, and Shuji Tanaka
- Organizer
  18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015
- Place of Presentation
  Anchorage, Alaska, USA
- Year and Date
  2015-06-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] Advanced Piezoelectric Thin Films and Devices2015
- Author(s)
  Shuji Tanaka
- Organizer
  19th Nano Engineering and Microsystem Technology Conference
- Place of Presentation
  台北, 台湾
- Year and Date
  2015-08-13
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] MEMS研究者から見た見た圧電MEMS と圧電材料2015
- Author(s)
  吉田慎哉, 田中秀治
- Organizer
  応用物理学会春季講演会
- Place of Presentation
  名古屋, 名古屋国際会議場
- Year and Date
  2015-09-13
- Invited
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] Removal of SU-8 by Two Types of Hot Wire Atomic Hydrogen Sources2014
- Author(s)
  K. Tanaka, M. Kumano, S. Tanaka
- Organizer
  The 7th Asia Pacific Conference on Transducers and Micro/NanoTechnologies (APCOT 2014)
- Place of Presentation
  韓国,大邱
- Data Source
  KAKENHI-PROJECT-24651155
[Presentation] Advanced Piezoeletric Thin Film and Devices2014
- Author(s)
  Shuji Tanaka
- Organizer
  10th Fraunhofer Symposium in Sendai
- Place of Presentation
  東北大学，仙台，宮城
- Year and Date
  2014-11-26
- Invited
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] REMOVAL OF SU-8 BY TWO TYPES OF HOT WIRE ATOMIC HYDROGEN SOURCES2014
- Author(s)
  K. Tanaka, M. Kumano, S. Tanaka
- Organizer
  APCOT 2014
- Place of Presentation
  韓国、大邱
- Data Source
  KAKENHI-PROJECT-24651155
[Presentation] MEMSプロセスのための遠隔輸送型ホットワイヤ反応装置の開発2013
- Author(s)
  中康基,熊野勝文,江刺正喜,田中秀治
- Organizer
  第10回Cat-CVD研究会
- Place of Presentation
  岐阜市
- Data Source
  KAKENHI-PROJECT-24651155
[Presentation] 加熱タングステン触媒体を用いた遠隔輸送型原子状水素源の開発2013
- Author(s)
  中康基,熊野勝文,江刺正喜,田中秀治
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-24651155
[Presentation] MEMSプロセスのための遠隔輸送型ホットワイヤ反応装置の開2013
- Author(s)
  田中康基, 熊野勝文, 江刺正喜, 田中秀治
- Organizer
  第10回Cat-CVD研究会
- Place of Presentation
  岐阜
- Data Source
  KAKENHI-PROJECT-24651155
[Presentation] 加熱タングステン触媒体を用いた遠隔輸送型原子状水素源の開発2013
- Author(s)
  田中康基, 熊野勝文, 江刺正喜, 田中秀治
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川大学
- Data Source
  KAKENHI-PROJECT-24651155
[Presentation] 光制御Spindt型カーボンナノチューブ電解放出素子アレイ2012
- Author(s)
  田中雄次郎
- Organizer
  平成24年電気学会全国大会
- Place of Presentation
  広島工業大学
- Year and Date
  2012-03-21
- Data Source
  KAKENHI-PROJECT-19101005
[Presentation] 並列電子線描画システムのための光スイッチング電子源アレイ2011
- Author(s)
  田中雄次郎
- Organizer
  電気学会センサ・マイクロマシン部門主催第28回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  東京都
- Year and Date
  2011-09-26
- Data Source
  KAKENHI-PROJECT-19101005
[Presentation] Optically controllable emitter array with pn-junction integrated Si tip2011
- Author(s)
  Y. Tanaka, H. Miyashita, E. Tomono, M. Esashi, & T. Ono
- Organizer
  24th International Vacuum Nanoelectronics Conference
- Place of Presentation
  Wuppertal, Germany
- Year and Date
  2011-07-18
- Data Source
  KAKENHI-PROJECT-19101005
[Presentation] Optically controllable emitter array with pn-junction inte t grated Si tip2011
- Author(s)
  Yujiro Tanaka
- Organizer
  24th International Vacuum Nanoelectronics Conference
- Place of Presentation
  Historische Stadthalle Wuppertal, Germany
- Year and Date
  2011-07-18
- Data Source
  KAKENHI-PROJECT-19101005
[Presentation] Micro Fuel Cell Research2010
- Author(s)
  Shuji Tanaka
- Organizer
  The 3rd Symposium on Micro Environmental Machine Systems in conjunction with The 5th Micro Energy Technical Meeting
- Place of Presentation
  Sendai
- Data Source
  KAKENHI-PROJECT-18GS0203
[Presentation] LOW CONTACT RESISTANCE MICRO THERMAL SWITCH WITH CARBON-NANOTUBE-ENHANCED CONTACTOR2009
- Author(s)
  T.Tsukamoto, M.Esashi, S.Tanaka
- Organizer
  The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009
- Place of Presentation
  Denver, Colorado, USA
- Data Source
  KAKENHI-PROJECT-20651036
[Presentation] FABRICATION OF GDC-BASED MICRO SOFC WITH MICROHEATERS2008
- Author(s)
  Tomokazu Takahashi, Fumitada Iguchi, Hiroo Yugami, Masayoshi Esashi, Shuji Tanaka
- Organizer
  FABRICATION OF GDC-BASED MICRO SOFC WITH MICROHEATERS
- Place of Presentation
  札幌
- Data Source
  KAKENHI-PROJECT-18GS0203
[Presentation] 圧電MEMSのためのスパッタ堆積による大口径Si基板上へのYSZバッファ層のエピタキシャル成長
- Author(s)
  西澤信典, 吉田慎哉, 和佐清孝, 田中秀治
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス，平塚，神奈川
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] 高性能圧電MEMSセンサのためのc軸配向PMnN-PZTエピタキシャル薄膜のSi基板上への形成
- Author(s)
  吉田慎哉, 半澤弘明, 和佐清孝, 田中秀治
- Organizer
  圧電材料・デバイスシンポジウム2015
- Place of Presentation
  東北大学，仙台，宮城
- Year and Date
  2015-02-18 – 2015-02-19
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] 急冷法によってc軸配向させたSi基板上のPMnN-PZT単結晶薄膜の高温特性
- Author(s)
  半澤弘明, 吉田慎哉, 和佐清孝, 田中秀治
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス，平塚，神奈川
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] Highly c-Axis Oriented Monocrystalline Pb(Zr, Ti)O3 based Thin Film on Si Wafer by Sputter Deposition with Fast Cooling Process
- Author(s)
  Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa and Shuji Tanaka
- Organizer
  2014 IEEE International Ultrasonics Symposium
- Place of Presentation
  Chicago, Illinois, USA
- Year and Date
  2014-09-03 – 2014-09-06
- Data Source
  KAKENHI-PROJECT-25286033

1. ESASHI Masayoshi (20108468)

# of Collaborated Projects: 11 results

# of Collaborated Products: 4 results
2. ONO Takahito (90282095)

# of Collaborated Projects: 11 results

# of Collaborated Products: 1 results
3. TOTSU Kentaro (60374956)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
4. YOSHIDA Shinya (30509691)

# of Collaborated Projects: 3 results

# of Collaborated Products: 21 results
5. ANBE Takashi (00333857)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. KAWAI Yusuke (20451536)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
7. HAGA Yoichi (00282096)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. MINAMI Kazuyuki (00229759)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
9. LIU Lyong xun (90312610)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. HANE Kazuhiro (50164893)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
11. NAKAO Masayuki (90242007)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
12. MATSUMOTO Kiyoshi (10282675)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
13. 塚本貴城 (70646413)

# of Collaborated Projects: 2 results

# of Collaborated Products: 10 results
14. KUWANO Hiroki (50361118)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. NISHIZAWA Matsuhiko (20273592)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. ORIMO Shinichi (40284129)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. NAGASAWA Sumito (30400279)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. OKAMOTO Hiroshi (70455799)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. ONUKI Teppei (70400447)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. CAO Ziping (90552406)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. HAMATE Yuichiro (10455800)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. OGUCHI Hiroyuki (40570908)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. MIYASHITA Hidetoshi (00401258)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
24. ADACHI Koshi (10222621)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. MIKI Hiroyuki (80325943)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. TAKENO Takanori (00451617)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. KURABAYASHI Toru (90195537)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
28. TAKEUCHI Takatsugu (10134470)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. HATAMURA Yotaro (40010863)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
30. WASHIZU Masao (10201162)

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31. LI Jing-feng (50241542)

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32. WATANABE Ryuzo (20005341)

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33. YONEYAMA Takeshi (30175020)

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34. SONE JUNJI (50329215)

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# of Collaborated Products: 3 results
35. HASEGAWA Shoichi (10323833)

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36. HOSHI Yoichi (20108228)

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37. 後藤顕也 (20234982)

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38. 山田駿介 (50811634)

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# of Collaborated Products: 2 results
39. ABE Munemitus

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40. MORIYAMA Masaaki

# of Collaborated Projects: 1 results

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41. HIRANO Hideki

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42. MITA Yoshio

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43. ADACHI Takehiro

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
44. MATSUMOTO Yasuyoshi

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# of Collaborated Products: 3 results
45. HORIKAWA Yuuki

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# of Collaborated Products: 0 results
46. INOMATA Taiki

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# of Collaborated Products: 2 results
47. YAMADA Yuuki

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# of Collaborated Products: 0 results
48. KUTSUZAWA Shogo

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
49. TANAKA Koki

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# of Collaborated Products: 3 results
50. NISHINO Hitoshi

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# of Collaborated Products: 0 results
51. ASANO Sho

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# of Collaborated Products: 0 results
52. KANEKO Ryosuke

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# of Collaborated Products: 0 results
53. WANDT Michae

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# of Collaborated Products: 0 results
54. MENZ Wolfgan

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# of Collaborated Products: 0 results

Tanaka Shuji 田中 秀治

TANAKA Shuji 田中 秀治

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超音波の音響放射圧を用いたマイクロアクチュエーターPrincipal Investigator

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MEMSに「設計された積極的ダンピング」を導入するという新発想の体系化への挑戦Principal Investigator

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2+1マスMEMS共振子による新たなモード制御法の研究と高性能センサーへの適用Principal Investigator

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Temperature Compensation of Silicon MEMS Resonators by Multiple DopingPrincipal Investigator

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Study on On-site Recovery of Integrated Circuit Failed by Gamma Ray IrradiationPrincipal Investigator

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Stable / Reliable Sensing and Precise Control of Piezoelectric Thin Film ActuatorsPrincipal Investigator

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Readout Technology of MEMS Sensors Installed in High Temperature EnvironmentsPrincipal Investigator

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Deposition of Ideally-oriented PZT Monocrystalline Thin Film on Si Substrate and Feasibility Study of Its Application to MEMSPrincipal Investigator

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Study on low-temperature and high-rate deposition technology of ZnSe for the application to infrared sensor arraysPrincipal Investigator

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高感度マイクロセンサのためのマイクロ磁気冷凍機の開発Principal Investigator

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Tanaka Shuji 田中秀治

TANAKA Shuji 田中秀治