Toyoda Noriaki 豊田紀章

… Alternative Names

TOYODA Noriaki 豊田紀章

豊田紀章トヨダノリアキ

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Researcher Number	00382276
Other IDs
Affiliation (Current)	2025: 兵庫県立大学, 工学研究科, 教授
Affiliation (based on the past Project Information) *help	2020 – 2024: 兵庫県立大学, 工学研究科, 教授 2017 – 2020: 兵庫県立大学, 工学研究科, 准教授 2012 – 2013: 兵庫県立大学, 工学(系)研究科(研究院), 准教授 2011: 兵庫県立大学, 准教授 2005 – 2006: 兵庫県立大学, 高度産業科学技術研究所, 客員助教授
Review Section/Research Field	Principal Investigator Basic Section 18020:Manufacturing and production engineering-related / Thin film/Surface and interfacial physical properties / Nanomaterials/Nanobioscience / Material processing/treatments Except Principal Investigator Basic Section 26020:Inorganic materials and properties-related / Basic Section 56020:Orthopedics-related
Keywords	Principal Investigator 原子層エッチング / クラスター / クラスターイオン / 位置制御 / ガスクラスターイオン / 高精度加工 / クラスタービーム / 超薄膜 / XPS / MoS2 … More / 遷移金属カルコゲナイド / ガスクラスターイオンビーム / 有機電子材料 / ダメージフリー / ナノ加工 / 有機材料 / 精密研磨 / 精密部品加工 … More Except Principal Investigator 代謝 / 大気圧 / 生細胞 / 細胞活性 / イオン注入 / イオン銃 / イオン伝導性ガラス / マクロファージ / 細胞応答 / 大気圧プラズマ / イオン放出 / イオン伝導 / ガラス / 骨転移動物モデル / GCIB / 骨転移 / 脊椎インプラント / 徐放化抗がん剤 / 非金属脊椎インプラント / 徐放化抗癌剤 / 脊椎転移 Less

Ultra-precise fabrication technology by location specific atomic layer etching with cluster beamPrincipal Investigator
- Principal Investigator
  
  豊田紀章
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  University of Hyogo
the study of new treatment for spinal metastasis with the combination of sustained release anti-cancer drug and non-metal spinal instrumentation
- Principal Investigator
  
  Kakutani Kenichiro
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 56020:Orthopedics-related
- Research Institution
  Kobe University
Cell metabolic activity via non-vacuum ion implantation utilizing an enhanced electric field at a sharpened glass tip
- Principal Investigator
  
  Daiko Yusuke
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 26020:Inorganic materials and properties-related
- Research Institution
  Nagoya Institute of Technology
Atomic layer etching of transition metal chalcogenide with gas cluster ion beamPrincipal Investigator
- Principal Investigator
  
  Toyoda Noriaki
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  University of Hyogo
Damage-free etching of organic materials with mesoscopic cluster beamsPrincipal Investigator
- Principal Investigator
  
  TOYODA Noriaki
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Nanomaterials/Nanobioscience
- Research Institution
  University of Hyogo
ガスクラスターイオンビームを用いた超精密3次元形状加工技術の開発Principal Investigator
- Principal Investigator
  
  豊田紀章
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  University of Hyogo

All 2024 2023 2022 2020 2019 2018 2017 2013 2012 2011 2006 2005 Other

All Journal Article Presentation

[Journal Article] Atomic layer etching of silicon nitride film by oxygen gas cluster ion beam with acetylacetone2023
- Author(s)
  Takeuchi Masaya、Fujiwara Reki、Toyoda Noriaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 62 Issue: SG Pages: SG1051-SG1051
- DOI
  10.35848/1347-4065/acd065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K13236, KAKENHI-PROJECT-23K22649
[Journal Article] クラスターイオンビーム励起による表面反応と原子層エッチングへの応用2022
- Author(s)
  豊田　紀章
- Journal Title
  
  光技術コンタクト
  
  Volume: 60 Pages: 23-23
- Data Source
  KAKENHI-PROJECT-23K22649
[Journal Article] Surface preparation of metal films by gas cluster ion beams using organic acid vapor for Cu?Cu bonding2022
- Author(s)
  S. Hanahara、M. Takeuchi、N. Toyoda
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: SF Pages: SF1004-SF1004
- DOI
  10.35848/1347-4065/ac5424
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K22649
[Journal Article] Atomic layer etching by gas cluster ion beams with acetylacetone2019
- Author(s)
  N. Toyoda, K. Uematsu
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Issue: SE Pages: SEEA01-SEEA01
- DOI
  10.7567/1347-4065/ab17c5
- NAID
  210000156295
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05061
[Journal Article] Cluster beams, nano-ripples, and bio Applications2019
- Author(s)
  N. Toyoda, B. Tilakaratne, I. Saleem, W-K. Chu
- Journal Title
  
  Appl. Phys. Rev.
  
  Volume: 6 Issue: 2 Pages: 020901-020901
- DOI
  10.1063/1.5030500
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05061
[Journal Article] Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening2018
- Author(s)
  Shawn Yohanes Siew, Eric Jun Hao Cheung, Haidong Liang, Andrew Bettiol, Noriaki Toyoda, Bandar Alshehri, Elhadj Dogheche, and Aaron J. Danner
- Journal Title
  
  Optics express
  
  Volume: 26 Issue: 4 Pages: 4421-4430
- DOI
  10.1364/oe.26.004421
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Journal Article] Surface Planarization with Gas Cluster Ion Beams and Application to Wide-Bandgap Semiconductors2018
- Author(s)
  Noriaki Toyoda
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 12 Issue: 2 Pages: 170-174
- DOI
  10.20965/ijat.2018.p0170
- NAID
  130007505896
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2018-03-05
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05061
[Journal Article] Irradiation conditions of gas cluster ion beam for surface-activated bonding2018
- Author(s)
  Noriaki Toyoda, Tomoya Sasaki, Shota Ikeda, Isao Yamada
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 57 Issue: 2S1 Pages: 02BA02-02BA02
- DOI
  10.7567/jjap.57.02ba02
- NAID
  210000148617
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05061
[Journal Article] Gas cluster ion beam irradiation for wafer bonding2017
- Author(s)
  Noriaki Toyoda, Tomoya Sasaki, Shota Ikeda, Isao Yamada
- Journal Title
  
  Proceedings of 5th Int. Workshop on Low Temperature Bonding for 3D Integration
  
  Volume: - Pages: 5-5
- DOI
  10.23919/ltb-3d.2017.7947401
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05061
[Journal Article] Optimization of GCIB irradiation conditions for surface activated bonding Proceedings of 5th Int. Workshop on Low Temperature Bonding for 3D Integration2017
- Author(s)
  Shota Ikeda, Tomoya Sasaki, Noriaki Toyoda
- Journal Title
  
  Proceedings of 5th Int. Workshop on Low Temperature Bonding for 3D Integration
  
  Volume: - Pages: 66-66
- DOI
  10.23919/ltb-3d.2017.7947462
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05061
[Journal Article] Atomic layer etching of Cu film using gas cluster ion beam2017
- Author(s)
  Noriaki Toyoda and Akihiro Ogawa
- Journal Title
  
  Journal of Physics D: Applied Physics
  
  Volume: 50 Issue: 18 Pages: 184003-184003
- DOI
  10.1088/1361-6463/aa6527
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05061
[Journal Article] Surface morphology and sputtering yield of SiO2 with oblique-incidence gas cluster ion beam2013
- Author(s)
  K.Sumie, N.Toyoda, I.Yamada
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research, Section B
  
  Volume: 307 Pages: 290-293
- DOI
  10.1016/j.nimb.2013.01.087
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Magnetic properties of Fe7Co3 films with gas clusterion beam irradiations2013
- Author(s)
  N. Toyoda, A. Fujimoto, I. Yamada
- Journal Title
  
  Journal of applied physics
  
  Volume: 113
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Gas cluster ion beam etching under acetic acid vapor for etch-resistant material2013
- Author(s)
  A. Yamaguchi, R. Hinoura, N. Toyoda, K. Hara, I. Yamada
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 52
- NAID
  40020934185
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Evaluation of charge state of gas cluster ions by means of individual crater observations2013
- Author(s)
  N. Toyoda, I. Yamada
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research, Section B
  
  Volume: 307 Pages: 269-272
- NAID
  40020675212
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Gas cluster ion beam etching under acetic acid vapor for etch-resistant material2013
- Author(s)
  A.Yamaguchi, R.Hinoura, N.Toyoda, K.Hara, I.Yamada
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 52 Issue: 5S2 Pages: 05EB05-05EB05
- DOI
  10.7567/jjap.52.05eb05
- NAID
  40020934185
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Surface morphology and sputtering yield of SiO2 withoblique-incidence gas cluster ion beam2013
- Author(s)
  K. Sumie, N. Toyoda, I. Yamada
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research, Section B
  
  Volume: 52 Pages: 290-293
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Irradiation effects of gas cluster ion beamson co-fe films2013
- Author(s)
  N. Toyoda, A. Fujimoto, I. Yamada
- Journal Title
  
  Japanese journal of applied physics
  
  Volume: 52
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Irradiation effects of gas cluster ion beams on co-fe films2013
- Author(s)
  N.Toyoda, A.Fujimoto, I.Yamada
- Journal Title
  
  Japanese journal of applied physics
  
  Volume: 52 Issue: 6S Pages: 06GF01-06GF01
- DOI
  10.7567/jjap.52.06gf01
- NAID
  40020934190
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Magnetic properties of Fe7Co3 films with gas cluster ion beam irradiations2013
- Author(s)
  N.Toyoda, A.Fujimoto, I.Yamada
- Journal Title
  
  Journal of applied physics
  
  Volume: 113 Issue: 17
- DOI
  10.1063/1.4797475
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Metal etching with reactive gas cluster ion beams using pickup cell2012
- Author(s)
  N. Toyoda, I. Yamada
- Journal Title
  
  AIP conference proceedings
  
  Volume: 1496 Pages: 288-291
- NAID
  40020675205
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Gas cluster ion beam technology for nano-fabrication2012
- Author(s)
  N. Toyoda, I. Yamada
- Journal Title
  
  Advances in Science and Technology
  
  Volume: 82 Pages: 1-8
- NAID
  40020675203
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Development of Cu Etching Using O2 Cluster Ion Beam under Acetic Acid Gas Atmosphere2012
- Author(s)
  T. Suda, N. Toyoda, K. Hara, I. Yamada
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 51
- NAID
  210000072698
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Reduction of irradiation damage using size-controlled nitrogen gas cluster ion beams2012
- Author(s)
  N. Toyoda, and I. Yamada
- Journal Title
  
  Nuclear Instruments & Methods in Physics Research Section B
  
  Volume: 273 Pages: 11-14
- NAID
  40020675393
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23310080
[Journal Article] Current research topics and applications of gas cluster ion bean processes2006
- Author(s)
  I.Yamada, N.Toyoda
- Journal Title
  
  Nucl. Instr. and Meth. in Phys. Res. B, 242
  
  Pages: 143-145
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Cluster size effects of gas cluster ion beams on surface modification2006
- Author(s)
  N.Toyoda, I.Yamada
- Journal Title
  
  Proc. of 16th Int. Conf. on Ion Implantation Technology Marseille, France, 2006
  
  Pages: 210-213
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Development of size-selected cluster ion irradiation system2006
- Author(s)
  N.Toyoda, S.Houzumi, I.Yamada
- Journal Title
  
  Nucl. Instr. and Meth. in Phys. Res. B, 242
  
  Pages: 466-468
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Cross-sectional TEM observations of Si wafers irradiated with gas cluster ion beams2006
- Author(s)
  H.Isogai, E.Toyoda, T.Senda, K.Izunome, K.Kashima, N.Toyoda, I.Yamada
- Journal Title
  
  Proc. of 16th Int. Conf. on Ion Implantation Technology Marseille, France, 2006
  
  Pages: 194-197
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Low-damage sputtering of GaAs and GaP using size-selected Ar cluster ion beams2005
- Author(s)
  M.Nagano, S.Yamada, S.Akita, S.Houzumi, N.Toyoda, I.Yamada
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44 no.1-7
- NAID
  10014420780
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Morphological evolution of surfaces irradiated by gas cluster ion beams during thin film deposition2005
- Author(s)
  S.Inoue, N.Toyoda, H.Tsubakino, I.Yamada
- Journal Title
  
  Nuclear Instruments & Methods in Physics Research, Section B 237
  
  Pages: 449-454
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Development of pure O_2 cluster ion beam assisted deposition system2005
- Author(s)
  T.Nose, S.Inoue, N.Toyoda, K.Mochiji, T.Mitamura, I.Yamada
- Journal Title
  
  Nuclear Instruments & Methods in Physics Research, B 241
  
  Pages: 626-629
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Nano Structure Formations by gas cluster ion beam irradiations at oblique incidence2005
- Author(s)
  N.Toyoda, T.Mashita, I.Yamada
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B 232
  
  Pages: 212-216
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Recent advances in R&D of gas cluster ion beam processes and equipment2005
- Author(s)
  I.Yamada, N.Toyoda
- Journal Title
  
  Nuclear Instruments & Methods in Physics Research, B 241
  
  Pages: 589-593
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Development of size-selected cluster ion irradiation system2005
- Author(s)
  N.Toyoda, S.Houzumi, I.Yamada
- Journal Title
  
  Nuclear Instruments & Methods in Physics Research B 242
  
  Pages: 466-468
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Development of a new cluster size selector2005
- Author(s)
  K.Ohwaki, Y.Dake, N.Toyoda, I.Yamada
- Journal Title
  
  Nuclear Instruments & Methods in Physics Research, B 241
  
  Pages: 614-617
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Current research topics and applications of gas cluster ion beam processes2005
- Author(s)
  I.Yamada, N.Toyoda
- Journal Title
  
  Nuclear Instruments & Methods in Physics Research B 242
  
  Pages: 143-145
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Summary of recent research on gas cluster ion beam process technology2005
- Author(s)
  I.Yamada, N.Toyoda
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B 232
  
  Pages: 195-199
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Irradiation of silicon surface by Ar cluster ion beam : Cluster size effects2005
- Author(s)
  Y.Nakayama, S.Houzumi, N.Toyoda, K.Mochiji, T.Mitamura, I.Yamada
- Journal Title
  
  Nuclear Instruments & Methods in Physics Research, Section B 241
  
  Pages: 618-621
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Current research and development topics on gas cluster ion-beam processes2005
- Author(s)
  I.Yamada, N.Toyoda
- Journal Title
  
  Journal of Vacuum Science and Technology A Vol.23,No.4
  
  Pages: 1090-1099
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Development of a size-selected gas cluster ion beam system for low-damage processing2005
- Author(s)
  N.Toyoda, S.Houzumi, I.Yamada
- Journal Title
  
  Nuclear Instruments & Methods in Physics Research B 241
  
  Pages: 609-613
- Data Source
  KAKENHI-PROJECT-17760584
[Journal Article] Scanning Tunneling Microscopy Observation of Graphite Surfaces Irradiated with size-selected Ar cluster ion beams2005
- Author(s)
  S.Houzumi, K.Mochiji, N.Toyoda, I.Yamada
- Journal Title
  
  Japanese Journal of Applied Physics vol.44,no.8,
  
  Pages: 6252-6254
- NAID
  130004534608
- Data Source
  KAKENHI-PROJECT-17760584
[Presentation] 反応性ガス吸着とGCIB照射を用いたエッチングにおける基板冷却効果2024
- Author(s)
  伊藤汰一,作田昂大,竹内雅耶,豊田紀章
- Organizer
  2024年応用物理学会春季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 中性ガスクラスタービームを用いたCu膜のドライALE2024
- Author(s)
  池田　圭佑, 田中　秀幸, 竹内　雅耶, 豊田　紀章
- Organizer
  2024年応用物理学会春季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] GCIB照射で極薄化した電子線透過窓を用いた液体セルによるSEM/EDS検出の高感度化2024
- Author(s)
  竹内雅耶，鈴木哲，豊田紀章
- Organizer
  2024年応用物理学会春季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 2023年中性クラスタービーム照射による金属膜のエッチング2023
- Author(s)
  田中秀幸、竹内雅耶、豊田紀章
- Organizer
  応用物理学会秋季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] O 2 -GCIBとアセチルアセトンによるSiNx膜原子層エッチングプロセスの反応機構の検討2023
- Author(s)
  竹内雅耶、藤原怜輝、山下大晴、豊田紀章
- Organizer
  2023年第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 反応性ガス吸着とO 2 -GCIBを用いたNiパターンエッチング2023
- Author(s)
  作田昂大、竹内雅耶、豊田紀章
- Organizer
  2023年第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] Reactive etching and pressure resistance evaluation of SiNx film by O2-GCIB for electron transmission window of liquid cell2023
- Author(s)
  M. Takeuchi, S. Suzuki, M. Nakamura, T. Hata, N. Toyoda
- Organizer
  MNC 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] Evaluation of mechanical property of ultra-thin SiNx membranes irradiated by gas cluster ion beam2023
- Author(s)
  M. Takeuchi, N. Toyoda
- Organizer
  Radiation Effects in Insulator 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] Surface Modification with Neutral Gas Cluster Beams and Its Application to Atomic Layer Etching2023
- Author(s)
  N. Toyoda, H. Tanaka, M. Takeuchi
- Organizer
  Atomic Layer Etching Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] GCIBを用いた電子透過窓極薄化による液中試料検出の高感度化2023
- Author(s)
  竹内雅耶，鈴木哲，豊田紀章
- Organizer
  2023年応用物理学会秋季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] Surface modification and etching of metal films by neutral cluster beam irradiation2023
- Author(s)
  H. Tanaka, M. Takeuchi, N.Toyoda
- Organizer
  Dry Process Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 反応性ガス吸着とO2-GCIB照射を用いた金属エッチングの基板冷却効果2023
- Author(s)
  作田昂大、竹内雅耶、豊田紀章
- Organizer
  2023年応用物理学会秋季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] Temperature dependence on metal etching using reactive gas adsorption and GCIB2023
- Author(s)
  K. Sakuta, M. Takeuchi, N. Toyoda
- Organizer
  Dry Process Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 位置制御とGCIB-ALEを用いた高精度形状加工技術の検討2022
- Author(s)
  藤原怜輝、竹内雅耶、豊田紀章
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 窒化シリコン膜へのGCIB照射による低損傷照射効果の検討2022
- Author(s)
  竹内雅耶、藤原怜輝、豊田紀章
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 窒化シリコン膜の低損傷かつ原子層制御を実現するGCIBエッチングプロセスの検討2022
- Author(s)
  竹内雅耶、藤原怜輝、豊田紀章
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] GCIB照射がPEEK製椎弓根スクリューの引き抜き強度に与える影響2022
- Author(s)
  角谷賢一朗　豊田紀章　長宗高樹　由留部崇　張鍾穎　垣内裕司　武岡由樹　神田裕太郎　辻本龍　宮崎邦彦　宮崎真吾　高田徹　土井田稔　黒田良祐
- Organizer
  脊椎脊髄病学会
- Data Source
  KAKENHI-PROJECT-20K09505
[Presentation] O2-GCIBとacac吸着によるNiパターンのエッチング2022
- Author(s)
  作田昂大、竹内雅耶、豊田紀章
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] hfac吸着表面へのGCIB照射によるNiの原子層エッチング2020
- Author(s)
  植松　功多,　豊田紀章
- Organizer
  2020年応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] GCIB照射を用いたMoS2の表面改質とエッチング(Ⅱ)2020
- Author(s)
  劔持将之, 豊田紀章
- Organizer
  2020年応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] クラスタービーム励起による表面反応と原子層エッチングへの応用2020
- Author(s)
  豊田　紀章
- Organizer
  日本表面真空学会　第12回関東支部セミナー
- Invited
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] acac吸着表面へのAr-GCIB照射によるNiの原子層エッチング2019
- Author(s)
  植松　功多,　豊田紀章
- Organizer
  2019年応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] Analysis of metal surface during atomic layer etching with gas cluster ion beam and organic acid2019
- Author(s)
  Noriaki Toyoda, Kota Uematsu
- Organizer
  America Vacuum Society 66th International Symposium & Exhibition
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] Low temperature wafer bonding with gas cluster ion beams2019
- Author(s)
  Noriaki Toyoda, Shota Ikeda
- Organizer
  2019 6th International IEEE workshop on low temperature bonding for 3D integration
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] GCIB照射を用いたMoS2の表面改質とエッチング2019
- Author(s)
  劔持将之, 豊田紀章
- Organizer
  2019年応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] Atomic layer etching of transition metals with gas cluster ion beam irradiation and acetylacetone2019
- Author(s)
  Noriaki Toyoda, Kota Uematsu
- Organizer
  2019 Atomic Layer deposition & Atomic Layer Etching workshop
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] Gas Cluster Ion Beam Etching under Organic Vapor for Atomic Layer Etching2018
- Author(s)
  Noriaki Toyoda
- Organizer
  America Vacuum Society (AVS) Fall symposium 2018
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] Precise polishing and figuring for optical manufacturing with gas cluster ion beam (GCIB)2018
- Author(s)
  Noriaki Toyoda
- Organizer
  International Symposium on Extreme Optical Manufacturing and Laser-Induced Damage in Optics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] ガスクラスターイオンビームによる原子層エッチング2018
- Author(s)
  豊田　紀章
- Organizer
  第79回応用物理学会秋季講演会
- Invited
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] Atomic layer etching by gas cluster ion beams with acetylacetone2018
- Author(s)
  Noriaki Toyoda
- Organizer
  Dry process symposium (DPS) 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] Novel atomic layer etching using gas cluster ion beam irradiation2017
- Author(s)
  Noriaki Toyoda
- Organizer
  Material Research Society Fall Meeting 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] Atomic layer etching with gas cluster ion beams2017
- Author(s)
  Noriaki Toyoda, Akihiro Ogawa
- Organizer
  International Conference on Advanced Materials 2017(IUMRS-ICAM2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] Atomic layer etching with gas cluster ion beam irradiation in reactive gas vapor2017
- Author(s)
  Noriaki Toyoda, Akihiro Ogawa, Isao Yamada
- Organizer
  International conference on atomic layer deposition, Atomic layer etching workshop 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] Gas cluster ion beam irradiation for wafer bonding2017
- Author(s)
  Noriaki Toyoda, Tomoya Sasaki, Shota Ikeda, Isao Yamada
- Organizer
  5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] Atomic layer etching with gas cluster ion beams2017
- Author(s)
  Noriaki Toyoda
- Organizer
  23rd International conference on ion-surface interaction: ISI-2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05061
[Presentation] TEM study ofirradiation effects of GCIB2013
- Author(s)
  N. Toyoda, A. Yamaguchi, A. Fujimoto, R. Hinoura and I. Yamada
- Organizer
  第23回日本MRS年次大会
- Place of Presentation
  横浜(神奈川)
- Year and Date
  2013-12-09
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Low-damage and high-rate sputtering of organic materials with GCIB under H2O vapor environment2013
- Author(s)
  N. Toyoda, I. Yamada
- Organizer
  Surface modification of materials by ionbeams 2013
- Place of Presentation
  クシャダシ(トルコ)
- Year and Date
  2013-09-18
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] ガスクラスターイオンビームによる磁性膜の低損傷加工2013
- Author(s)
  藤本昌宏、木村旭、豊田紀章、山田
- Organizer
  2013応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] ガスクラスターイオンビーム照射によるされた DLC膜の表面の構造改質2013
- Author(s)
  藤本昌宏、豊田紀章、山田公
- Organizer
  2013応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学(京都)
- Year and Date
  2013-09-19
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] ガスクラスターイオンビームエッチング後の MRAM材料の表面状態評価2013
- Author(s)
  日野浦諒、山口明良、豊田紀章、原謙一、山田公
- Organizer
  2013応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Ripple formations by gas cluster ions in ambient reactive gas2013
- Author(s)
  豊田　紀章
- Organizer
  2013 JSAP-MRSジョイントシンポジウム
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Etching of FeCo films with gas cluster ion beams and their magnetic properties2013
- Author(s)
  N. Toyoda
- Organizer
  12th Joint MMM-IntermagConference 2013
- Place of Presentation
  シカゴ(米国)
- Year and Date
  2013-01-15
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Low-damage and high-rate sputtering of organic materials with GCIB under H2O vapor environment2013
- Author(s)
  豊田　紀章
- Organizer
  Surface modification of materials by ion beams 2013
- Place of Presentation
  イズミール（トルコ）
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] In-situ XPS study of GCIB etching for materialsused in STT-MRAM2013
- Author(s)
  R. Hinoura, N. Toyoda, I. Yamada
- Organizer
  ドライプロセスシンポジウム 2013
- Place of Presentation
  済州島(韓国)
- Year and Date
  2013-08-30
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Nano-scale surface modification and ion induced reactions with gas cluster ion beams2013
- Author(s)
  豊田　紀章
- Organizer
  2013春季ヨーロッパ材料学会（E-MRS）
- Place of Presentation
  ストラスブール（フランス）
- Invited
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] TEM study of irradiation effects of GCIB2013
- Author(s)
  豊田　紀章
- Organizer
  日本MRS年次大会2013
- Place of Presentation
  横浜開港記念会館
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] ガスクラスターイオンビームによる磁気トンネル接合素子下の平坦化2013
- Author(s)
  山口明良、日野浦諒、豊田紀章、原謙一、山田公
- Organizer
  2013応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Nano-scale surface modification and ion induced reactions withgas cluster ion beams2013
- Author(s)
  N. Toyoda, I. Yamada
- Organizer
  2013春季ヨーロッパ材料学会(E-MRS)
- Place of Presentation
  ストラスブール(フランス)
- Year and Date
  2013-05-28
- Invited
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] GCIB照射によるメディア保護膜の表面平坦化効果2013
- Author(s)
  木村旭、富田淳、豊田紀章、谷弘詞、山田公
- Place of Presentation
  同志社大学(京都)
- Year and Date
  2013-09-19
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Ripple formations by gas cluster ions inambient reactive gas2013
- Author(s)
  N. Toyoda, K. Sumie, A. Kimura, I. Yamada
- Organizer
  2013 JSAP-MRSジョイントシンポジウム
- Place of Presentation
  同志社大学(京都)
- Year and Date
  2013-09-20
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Gas cluster ion beam etching of metals with pick-up cell2012
- Author(s)
  N. Toyoda and I. Yamada
- Organizer
  19th international conference on ionimplantation technology
- Place of Presentation
  ヴァリャドリード(スペイン)
- Year and Date
  2012-06-25
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Nano-scale Surface Modification and Ion Induced Chemical Reactions with Gas Cluster Ion Beams2012
- Author(s)
  N. Toyoda
- Organizer
  2nd annual world congress of nano-science and technology
- Place of Presentation
  青島(中国)
- Year and Date
  2012-10-28
- Invited
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Gas cluster ion beam technology for nanofabrication2012
- Author(s)
  N. Toyoda and I. Yamada
- Organizer
  4th international conference smart materials,structures and systems
- Place of Presentation
  モンテカッティーニテルメ(イタリア)
- Year and Date
  2012-06-11
- Invited
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] What is the key parameter of electron ionization on crater formations on solid surface?2011
- Author(s)
  N.Toyoda, T.Furuya, I.Yamada
- Organizer
  11^<th> Workshop on Cluster Ion Beam Technology
- Place of Presentation
  京都大学品川オフィス(東京都)
- Year and Date
  2011-12-05
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Surface modification and interaction with gas cluster ion beams2011
- Author(s)
  N. Toyoda and I. Yamada
- Organizer
  20th International Conference onIon Beam Analysis
- Place of Presentation
  イタペマ(ブラジル)
- Year and Date
  2011-04-15
- Invited
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] 雰囲気ガス中 GCIB照射された有機材料の XPSによる評価2011
- Author(s)
  中桐基裕、豊田紀章、山田公
- Organizer
  2011年秋季応用物理学会学術講演会
- Place of Presentation
  山形大学(山形県)
- Year and Date
  2011-08-30
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] GCIB照射損傷のクラスターサイズ依存性の In-situXPSによる評価2011
- Author(s)
  中桐基裕、豊田紀章、山田公
- Organizer
  2012年春季応用物理学会学術講演会
- Place of Presentation
  早稲田大学(東京都)
- Year and Date
  2011-03-17
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Surface modification and interaction with gas cluster ion beams2011
- Author(s)
  N.Toyoda, I.Yamada
- Organizer
  20^<th> International Conference on Ion Beam Analysis
- Place of Presentation
  イタペマ(ブラジル)(招待講演)
- Year and Date
  2011-04-15
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] What is the key parameter of electron ionization on crater formations on solid surface ?2011
- Author(s)
  N. Toyoda, T. Furuya and I. Yamada
- Organizer
  11th Workshop on Cluster Ion Beam Technology
- Place of Presentation
  京都大学品川オフィス(東京都)
- Year and Date
  2011-12-05
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] 雰囲気ガス中GCIB照射された有機材料のXPSによる評価2011
- Author(s)
  中桐基裕、豊田紀章、山田公
- Organizer
  2011年秋季応用物理学会学術講演会
- Place of Presentation
  山形大学(山形県)
- Year and Date
  2011-08-30
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] GCIB照射損傷のクラスターサイズ依存性のIn-situ XPSによる評価2011
- Author(s)
  中桐基裕、豊田紀章、山田公
- Organizer
  2012年春季応用物理学会学術講演会
- Place of Presentation
  早稲田大学(東京都)
- Year and Date
  2011-03-17
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Gas cluster ion beam technology for nanofabrication
- Author(s)
  Noriaki Toyoda
- Organizer
  4th international conference smart materials, structures and systems
- Place of Presentation
  モンテカッティーニテルメ（イタリア）
- Invited
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Gas cluster ion beam etching of metals with pick-up cell
- Author(s)
  Noriaki Toyoda
- Organizer
  19th international conference on ion implantation technology
- Place of Presentation
  ヴァリャドリード（スペイン）
- Data Source
  KAKENHI-PROJECT-23310080
[Presentation] Nano-scale Surface Modification and Ion Induced Chemical Reactions with Gas Cluster Ion Beams
- Author(s)
  Noriaki Toyoda
- Organizer
  2nd annual world congress of nano-science and technology
- Place of Presentation
  青島（中国）
- Invited
- Data Source
  KAKENHI-PROJECT-23310080

1. Kakutani Kenichiro (10533739)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
2. Daiko Yusuke (70514404)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
3. 張鍾穎 (00824195)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
4. 由留部崇 (10514648)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
5. 垣内裕司 (40849212)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
6. 篠崎健二 (10723489)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. 小幡亜希子 (40402656)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 本間剛 (70447647)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 竹内雅耶 (70889683)

# of Collaborated Projects: 1 results

# of Collaborated Products: 19 results
10. 寺岡有殿 (10343922)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Toyoda Noriaki 豊田 紀章

TOYODA Noriaki 豊田 紀章

豊田 紀章 トヨダ ノリアキ

Research Projects

Research Products

Co-Researchers

Ultra-precise fabrication technology by location specific atomic layer etching with cluster beamPrincipal Investigator

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the study of new treatment for spinal metastasis with the combination of sustained release anti-cancer drug and non-metal spinal instrumentation

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Cell metabolic activity via non-vacuum ion implantation utilizing an enhanced electric field at a sharpened glass tip

Principal Investigator

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Atomic layer etching of transition metal chalcogenide with gas cluster ion beamPrincipal Investigator

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Damage-free etching of organic materials with mesoscopic cluster beamsPrincipal Investigator

Principal Investigator

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ガスクラスターイオンビームを用いた超精密3次元形状加工技術の開発Principal Investigator

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Research Institution

[Journal Article] Atomic layer etching of silicon nitride film by oxygen gas cluster ion beam with acetylacetone2023

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[Journal Article] クラスターイオンビーム励起による表面反応と原子層エッチングへの応用2022

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Journal Title

Data Source

[Journal Article] Surface preparation of metal films by gas cluster ion beams using organic acid vapor for Cu?Cu bonding2022

Author(s)

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DOI

Data Source

[Journal Article] Atomic layer etching by gas cluster ion beams with acetylacetone2019

Author(s)

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NAID

Data Source

[Journal Article] Cluster beams, nano-ripples, and bio Applications2019

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DOI

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[Journal Article] Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening2018

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Surface Planarization with Gas Cluster Ion Beams and Application to Wide-Bandgap Semiconductors2018

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ISSN

Year and Date

Language

Toyoda Noriaki 豊田紀章

TOYODA Noriaki 豊田紀章

豊田紀章トヨダノリアキ