MATSUMURA Michio 松村道雄

… Alternative Names

Researcher Number	20107080
Other IDs
External Links
Affiliation (based on the past Project Information) *help	2013: 大阪大学, 学内共同利用施設等, 教授 2012 – 2013: 大阪大学, 太陽エネルギー化学研究センター, 教授 2002 – 2009: 大阪大学, 太陽エネルギー化学研究センター, 教授 1997 – 1999: 大阪大学, 有機光工学研究センター, 教授 1994 – 1995: 大阪大学, 有機光工学研究センター, 教授 1988: 大阪大学, 基礎工学部, 助教授 1987: 大阪大学, 基礎工学部, 講師
Review Section/Research Field	Principal Investigator Science and Engineering / 工業物理化学 / Nanostructural science / Nanomaterials/Nanobioscience / Electron device/Electronic equipment Except Principal Investigator 物理化学一般
Keywords	Principal Investigator シリコン / 電気化学 / 表面 / 界面 / 触媒 / 溶解 / 酸素 / 有機薄膜 / ナノ加工 / 光照射 … More Except Principal Investigator アモルファスシリコン / 太陽電池 / プラズマCVD法 / 光電気化学 / 金属微粒子 / 酸化物薄膜 / 半導体電極 / 水素発生 / Amorphous silicon / Solar cell / Plasma CVD method / Photoelectrochemistry / Ultrafine metal particle / Oxide film / Semiconductor electrode / Hydrogen evolution Less

New etching phenomena occurring at catalytic metal/Si interface in gas phasePrincipal Investigator
- Principal Investigator
  
  MATSUMURA Michio
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka University
触媒作用を利用したシリコンへの微細配線形成技術の開発Principal Investigator
- Principal Investigator
  
  松村道雄
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Osaka University
触媒法によるシリコンへのナノサイズ孔・溝形成技術の開発Principal Investigator
- Principal Investigator
  
  松村道雄
- Project Period (FY)
  2007
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Osaka University
Basic study on development of micro- and nano-machining processes for semiconductors using catalytic effects of metalsPrincipal Investigator
- Principal Investigator
  
  MATSUMURA Michio
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Nanomaterials/Nanobioscience
- Research Institution
  Osaka University
有機薄膜系太陽電池の高効率化を目指した接合構造の制御Principal Investigator
- Principal Investigator
  
  松村道雄
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Osaka University
金属微粒子の触媒作用を利用したシリコン基板へのナノ細孔の形成Principal Investigator
- Principal Investigator
  
  松村道雄
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Nanostructural science
- Research Institution
  Osaka University
有機薄膜系太陽電池の高効率化を目指した界面構造制御Principal Investigator
- Principal Investigator
  
  松村道雄
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Osaka University
有機薄膜系太陽電池の高効率化を目指した界面構造制御Principal Investigator
- Principal Investigator
  
  松村道雄
- Project Period (FY)
  2002
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Osaka University
Development of New Methods for Structural Analysis of Silicon/Oxide Interface and Silicon SurfacePrincipal Investigator
- Principal Investigator
  
  MATSUMURA Michio
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  工業物理化学
- Research Institution
  Osaka University
光照射による溶液中のシリコン表面の原子レベルでの構造変化Principal Investigator
- Principal Investigator
  
  松村道雄
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Osaka University
光照射による溶液中のシリコン表面の原子レベルでの構造変化Principal Investigator
- Principal Investigator
  
  松村道雄
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Osaka University
シリコン表面の原子レベルでの平坦化に関する電気化学的手法を用いた研究Principal Investigator
- Principal Investigator
  
  松村道雄
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  工業物理化学
- Research Institution
  Osaka University
Elucidation of the mechanism of organic EL devicesPrincipal Investigator
- Principal Investigator
  
  MATSUMURA Michio
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  工業物理化学
- Research Institution
  OSAKA UNIVERSITY
Decomposition of Water by Use of a Wet-Type Solar Cell Equipped with a Stacked Multilayer Amorphous Silicon Electrode
- Principal Investigator
  
  TSUBOMURA Hiroshi
- Project Period (FY)
  1987 – 1989
- Research Category
  
  Grant-in-Aid for General Scientific Research (A)
- Research Field
  
  物理化学一般
- Research Institution
  Osaka University

All 2014 2013 2012 2010 2009 2008

All Journal Article Presentation Patent

[Journal Article] Formation of Si Nano Hole Arrays Using a Self-assembled Nanolithography Mask and Cu Fill of the Array2013
- Author(s)
  近藤英一、玉井　架、松村道雄
- Journal Title
  
  J. Surf. Finish Soc. Jpn.
  
  Volume: 64 Issue: 12 Pages: 659-661
- DOI
  10.4139/sfj.64.659
- NAID
  130004704927
- ISSN
  0915-1869, 1884-3409
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656232
[Journal Article] Pore Formation in a Silicon Wafer Using a Platinum Needle Electrode with Application of Square-Wave Potential Pulses in HF Solution2013
- Author(s)
  Tomohiko Sugita, Kazuki Hiramatsu, Shigeru Ikeda, Michio Matsumura
- Journal Title
  
  ACS Appl. Mater. Interfaces
  
  Volume: 5 Pages: 2580-2584
- DOI
  10.1021/am303167c
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656232
[Journal Article] Acceleration of groove formation in silicon using catalytic wire electrodes for development of a slicing technique2010
- Author(s)
  M.S. Salem, C.-L. Lee, S. Ikeda, M. Matsumura
- Journal Title
  
  J. Mater. Process. Technol Vol.210,No.2
  
  Pages: 330-334
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19310073
[Journal Article] Formation of 100-μm-deep Vertical Pores in Si Wafers by Wet Etching and Cu Electrodeposition2009
- Author(s)
  C.-L. Lee, S. Tsuru, Y. Kanda, S. Ikeda, M. Matsumura
- Journal Title
  
  Electrochem. Soc Vol.156,No.12
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19310073
[Journal Article] Electrochemical Grooving of Si Wafers Using Catalytic Wire Electrodes in HF Solution2009
- Author(s)
  C.-L. Lee, Y. Kanda, T. Hirai, S. Ikeda, M. Matsumura
- Journal Title
  
  J. Electrochem. Soc Vol.156,No.3
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19310073
[Journal Article] 触媒を利用したシリコンのエッチングと太陽電池製造工程への応用2009
- Author(s)
  李佳龍、池田茂、松村道雄
- Journal Title
  
  生産技術 Vol.61,No.1
  
  Pages: 27-31
- NAID
  40016873419
- Data Source
  KAKENHI-PROJECT-19310073
[Journal Article] Pore Formation in Silicon by Wet Etching Using Micrometer-sized Metal Particles as Catalysts2008
- Author(s)
  C.-L. Lee, K. Tsujino, Y. Kanda, S. Ikeda, M. Matsumura
- Journal Title
  
  J. Mater. Chem Vol.18,No.9
  
  Pages: 1015-1020
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19310073
[Patent] 結晶基板に孔を形成する方法、並びに結晶基板内に配線や配管を有する機能性デバイス2012
- Inventor(s)
  松村道雄、永田大地、釘宮公一
- Industrial Property Rights Holder
  松村道雄、永田大地、釘宮公一
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2012-185715
- Filing Date
  2012-08-14
- Data Source
  KAKENHI-PROJECT-24656232
[Patent] 結晶基板に孔を形成する方法、並びに結晶基板に配線や配管を有する機能デバイス2012
- Inventor(s)
  松村道雄, 永田大地, 釘宮公一
- Industrial Property Rights Holder
  大阪大学
- Industrial Property Rights Type
  特許
- Filing Date
  2012-08-24
- Data Source
  KAKENHI-PROJECT-24656232
[Presentation] TSV Formation by Metal-Assisted Chemical Etching2014
- Author(s)
  松村道雄
- Organizer
  第一回日仏三次元集積回路ワークショップ
- Place of Presentation
  日仏会館
- Year and Date
  2014-06-09
- Data Source
  KAKENHI-PROJECT-24656232
[Presentation] Making Through Holes in Si for 3D IC Packaging by Metal-Catalyzed Wet Etching: Progress and Challenges2014
- Author(s)
  川口遼馬、巽　康司、原田隆史、池田　茂、松村道雄
- Organizer
  MRS Spring Meeting
- Place of Presentation
  San Francisico
- Data Source
  KAKENHI-PROJECT-24656232
[Presentation] 「Making Through Holes in Si for 3D IC Packaging by Metal-Catalyzed Wet Etching : Progress and Challenges2014
- Author(s)
  R. Kawaguchi, K. Tatsumi, T. Harada, S. Ikeda and M. Matsumura
- Organizer
  2014 MRS Spring Meeting
- Place of Presentation
  San Francisco
- Data Source
  KAKENHI-PROJECT-24656232
[Presentation] Pd触媒を用いたSiの気相エッチングと貫通孔形成2013
- Author(s)
  川口遼馬，原田隆史，池田茂，松村道雄
- Organizer
  第74回　応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学田辺キャンパス
- Data Source
  KAKENHI-PROJECT-24656232
[Presentation] Making Fine Cu Wires in a Si Wafer Using Catalytic Reactions2013
- Author(s)
  K. Tatsumi, S. Ikeda and M. Matsumura
- Organizer
  2013 MRS Spring Meeting
- Place of Presentation
  San Francisco
- Data Source
  KAKENHI-PROJECT-24656232
[Presentation] Pd触媒を用いたSiの気相エッチングと貫通孔形成2013
- Author(s)
  川口遼馬, 原田隆史, 池田茂, 松村道雄
- Organizer
  第74回応用物理学会秋期学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-24656232
[Presentation] 金属触媒を用いたシリコンの新規気相エッチング法2012
- Author(s)
  永田大地, 杉田智彦, 池田茂, 松村道雄
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学・松山大学
- Data Source
  KAKENHI-PROJECT-24656232
[Presentation] Micromachining of Silicon Wafers with Catalytic Needle Electrodes in HF solution2010
- Author(s)
  T. Sugita, T. Hirai, S. Ikeda, M. Matsumura
- Organizer
  The 217th Meeting of The Electrochemical Society (ECS)
- Place of Presentation
  Vancouver, Canada (The Fairmont Hotel Vancouver)
- Year and Date
  2010-04-27
- Data Source
  KAKENHI-PROJECT-19310073
[Presentation] アノード分極した金属針によるシリコンウェハへの微細孔の形成2010
- Author(s)
  杉田智彦, 平井豪, 松村道雄
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  平塚(東海大学湘南キャンパス)
- Year and Date
  2010-03-20
- Data Source
  KAKENHI-PROJECT-19310073
[Presentation] 触媒粒子を用いたエッチングにより形成されるシリコンの新規表面構造2009
- Author(s)
  神田裕士, 原田隆史, 松村道雄
- Organizer
  電気化学秋季大会
- Place of Presentation
  小金井(東京農工大学工学部)
- Year and Date
  2009-09-10
- Data Source
  KAKENHI-PROJECT-19310073
[Presentation] 触媒針電極を用いたシリコン基板への微細加工2009
- Author(s)
  杉田智彦, 平井豪, 松村道雄
- Organizer
  第70回応用物理学会学術講演会
- Place of Presentation
  富山(富山大学五福キャンパス)
- Year and Date
  2009-09-10
- Data Source
  KAKENHI-PROJECT-19310073
[Presentation] 触媒針電極を用いたシリコン基板への貫通孔の形成2009
- Author(s)
  杉田智彦, 平井豪, 池田茂, 松村道雄
- Organizer
  電気化学会第76回大会
- Place of Presentation
  京都(京都大学吉田キャンパス)
- Year and Date
  2009-03-29
- Data Source
  KAKENHI-PROJECT-19310073
[Presentation] 電気化学的エッチング反応を利用したシリコンブロックのスライシング2009
- Author(s)
  李佳龍, 神田裕士, Mohamed Shaker Salem, 池田茂, 松村道雄
- Organizer
  電気化学会第76回大会
- Place of Presentation
  京都(京都大学吉田キャンパス)
- Year and Date
  2009-03-29
- Data Source
  KAKENHI-PROJECT-19310073
[Presentation] 水素プラズマ処理により多結晶シリコン中に取り込まれた水素の状態について2009
- Author(s)
  水田紘平, 池田茂, 松村道雄
- Organizer
  第70回応用物理学会学術講演会
- Place of Presentation
  富山(富山大学五福キャンパス)
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-19310073
[Presentation] Wet Processes for Boring, Grooving and Slicing Silicon Using Metal Catalysts2009
- Author(s)
  Chia-Long Lee, Yuji Kanda, Mohamed Shaker Salem, Takeshi Hirai, Shigeru Ikeda, Michio Matsumura
- Organizer
  2009 Material Research Society (MRS) Spring Meeting
- Place of Presentation
  San Francisco, USA (San Francisco Marriott Hotel
- Year and Date
  2009-04-15
- Data Source
  KAKENHI-PROJECT-19310073
[Presentation] Electrochemical Grooving of Slicing Silicon Wafers Using Catalytic Wires2008
- Author(s)
  Chia-Long L S alem, Takeshi Hirai, Shigeru Ikeda, Michio Matsumura
- Organizer
  電気化学日米合同大会
- Place of Presentation
  Honolulu, USA(ヒルトン・ハワイアンヴィレッジ)
- Year and Date
  2008-10-14
- Data Source
  KAKENHI-PROJECT-19310073

1. IKEDE Shigeru (40312417)

# of Collaborated Projects: 3 results

# of Collaborated Products: 11 results
2. KOBAYASHI Hikaru (90195800)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
3. NAKATO Yoshihiro (70029502)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. TSUBOMURA Hiroshi (20029367)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. 大佐々崇宏 (30403124)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. 辻埜和也 (40403125)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. 原田隆史 (00379314)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 平井豪 (80423086)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 近藤英一 (70304871)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

MATSUMURA Michio 松村 道雄

松村 道雄 マツムラ ミチオ

Research Projects

Research Products

Co-Researchers

New etching phenomena occurring at catalytic metal/Si interface in gas phasePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

触媒作用を利用したシリコンへの微細配線形成技術の開発Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

触媒法によるシリコンへのナノサイズ孔・溝形成技術の開発Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Basic study on development of micro- and nano-machining processes for semiconductors using catalytic effects of metalsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

有機薄膜系太陽電池の高効率化を目指した接合構造の制御Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

金属微粒子の触媒作用を利用したシリコン基板へのナノ細孔の形成Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

有機薄膜系太陽電池の高効率化を目指した界面構造制御Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

有機薄膜系太陽電池の高効率化を目指した界面構造制御Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of New Methods for Structural Analysis of Silicon/Oxide Interface and Silicon SurfacePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

光照射による溶液中のシリコン表面の原子レベルでの構造変化Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Institution

光照射による溶液中のシリコン表面の原子レベルでの構造変化Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Institution

シリコン表面の原子レベルでの平坦化に関する電気化学的手法を用いた研究Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Elucidation of the mechanism of organic EL devicesPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

MATSUMURA Michio 松村道雄

松村道雄マツムラミチオ